CN102787363A - Crystal growth furnace and safety exhaust valve thereof - Google Patents
Crystal growth furnace and safety exhaust valve thereof Download PDFInfo
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- CN102787363A CN102787363A CN2011101322564A CN201110132256A CN102787363A CN 102787363 A CN102787363 A CN 102787363A CN 2011101322564 A CN2011101322564 A CN 2011101322564A CN 201110132256 A CN201110132256 A CN 201110132256A CN 102787363 A CN102787363 A CN 102787363A
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- blind plate
- safety exhaust
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- exhaust valve
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Abstract
The invention discloses a safety exhaust valve for exhausting of a crystal growth furnace, and the safety exhaust valve comprises a blind plate and a sealing ring; one end of the blind plate is hinged with a flange on a vacuum pipe of the crystal growth furnace; the sealing ring is disposed between the blind plate and the flange. According to the invention, when an over charge phenomenon occurs, oxide ultrafine dust in the furnace cavity migrate to the sealing ring; the safety exhaust valve is sealed only by the deadweight of the blind plate, so the safety exhaust valve can be opened easily, and the oxide ultrafine dust can be discharged to reach the purpose of natural pressure release. When the vacuum cavity is damaged by sparking to cause water leakage, the safety exhaust valve rapidly exhausts after water evaporates at high temperature. According to the safety exhaust valve of the invention, the vacuum pipe is quite convenient for cleaning; the pipe can be cleaned only by lifting the blind plate, and the pipe is closed naturally by putting down the blind plate; complete suction is realized after vacuum is turned on. The invention also discloses a crystal growth furnace with the safety exhaust valve.
Description
Technical field
The present invention relates to technical field of polysilicon production, particularly a kind of crystal growing furnace and safety exhaust thereof.
Background technology
The crystalline manufacturing processed is under the condition of high temperature, the thermal field structure more complicated, and owing to crystal installation reason possibly cause contacting with the furnace chamber inwall of crystal growing furnace, the sparking of generation electric shock damages cavity and leaks.Also have a kind of situation to be because quartz crucible leaks silicon, damage cavity material and leak.Owing to cavity damages the water sharply evaporation expansion in high temperature that spills, extremely dangerous, therefore need discharge the water vapour of HTHP through vent valve, to alleviate the pressure in the crystal growing furnace.
As shown in Figure 1; Present vent valve generally comprises blind plate 3; Blind plate 3 slidably is arranged on the flange 2 of vacuum pipe 1 through bolt 6, and blind plate 3 is pressed on the compression spring 6 on the flange 2 being arranged with on the bolt 6, between flange 2 and blind plate 3, also is provided with sealed picture 4.The furnace chamber of crystal growing furnace need often vacuumize and inflate, to keep being in vacuum and atmospheric pressure state respectively in the stove.When vacuum state charges into gas with the recovery normal pressure; Furnace pressure is equal to or greater than under the normal pressure situation; To the migration of the outlet side of vent valve, the deadweight of the deformation of spring 6 and spring pressure and blind plate 3 by compression makes vent valve effectively not open to oxide compound ultrafine dust in the furnace chamber under pressure.When oxide compound ultrafine dust migration to sealed picture 4 places, because vent valve is not opened, can not discharge and make the oxide compound ultrafine dust swim, on the outside surface that covers sealed picture 4, cause sealing property to descend.When vacuumizing, owing to be coated with the oxide compound ultrafine dust on the outside surface of sealed picture 4, make poorly sealedly, produce gas leakage, can't guarantee the vacuum tightness in the furnace chamber.
Therefore, how making things convenient for the unlatching that realizes vent valve, reduce the failure rate of vacuum leak, is those skilled in the art's problem demanding prompt solutions.
Summary of the invention
In view of this, the invention provides a kind of crystal growing furnace and safety exhaust thereof,, reduce the failure rate of vacuum leak with the convenient unlatching that realizes vent valve.
For realizing above-mentioned purpose, the present invention provides following technical scheme:
A kind of safety exhaust is used for the exhaust of crystal growing furnace, comprises blind plate and sealed picture, and the flange on an end of said blind plate and the vacuum pipe of said crystal growing furnace is hinged, and said sealed picture is arranged between said blind plate and the said flange.
Preferably, in above-mentioned safety exhaust, also comprise hinging pin shaft;
Said blind plate is provided with first fixing part, and this first fixing part is provided with first hinge hole;
Said flange is provided with second fixing part, and this second fixing part is provided with second hinge hole, and said hinging pin shaft is inserted on said first hinge hole and said second hinge hole successively.
Preferably, in above-mentioned safety exhaust, first fixing part and said second fixing part are fixed on said blind plate and the said flange through holding bolt respectively.
Preferably, in above-mentioned safety exhaust,, offering the groove that holds said sealed picture on the end face of said flange, said sealed picture places in this groove.
Preferably, in above-mentioned safety exhaust, said sealed picture is an O type sealed picture.
Preferably, in above-mentioned safety exhaust, said blind plate level places on the said flange.
Preferably, in above-mentioned safety exhaust, said blind plate is obliquely installed on said flange.
Preferably, in above-mentioned safety exhaust, the angle of said blind plate and horizontal plane is 30～50 degree.
A kind of crystal growing furnace comprises vent valve, and said vent valve is as above each described safety exhaust.
Can find out that from above-mentioned technical scheme safety exhaust provided by the invention is used for the exhaust of crystal growing furnace; Comprise blind plate and sealed picture; Wherein, the flange on an end of blind plate and the vacuum pipe of said crystal growing furnace is hinged, and sealed picture is arranged between said blind plate and the said flange.The present invention has saved compression spring and bolt, only relies on the sealing of the gravity maintenance furnace chamber of blind plate.When furnace chamber is inflated to normal pressure by vacuum state; If overcharge phenomenon, the oxide compound ultrafine dust in the furnace chamber under pressure to the migration of the outlet side of safety exhaust, when oxide compound ultrafine dust migration to sealed picture place; Because safety exhaust only relies on the deadweight of blind plate to seal; Therefore can make safety exhaust open easily, and the oxide compound ultrafine dust is emitted, play the purpose of nature row pressure.Run into sparking at vacuum cavity and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the present invention to clear up vacuum-lines very convenient, start blind plate and just can carry out pipeline and clean, put down back natural enclosing pipeline, suck fully after the open vacuum.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of existing vent valve;
The structural representation of the safety exhaust that Fig. 2 provides for the embodiment of the invention;
The structural representation of the safety exhaust that Fig. 3 another embodiment of the present invention provides.
Embodiment
The invention discloses a kind of crystal growing furnace and safety exhaust thereof,, reduce the failure rate of vacuum leak with the convenient unlatching that realizes vent valve.
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
See also Fig. 2 and Fig. 3, the structural representation of the safety exhaust that Fig. 2 provides for the embodiment of the invention, the structural representation of the safety exhaust that Fig. 3 another embodiment of the present invention provides.
Safety exhaust provided by the invention is used for the exhaust of crystal growing furnace, comprises blind plate 13 and sealing Figure 14, and wherein, the flange 12 on an end of blind plate 13 and the vacuum pipe 11 of crystal growing furnace is hinged, and sealing Figure 14 is arranged between blind plate 13 and the flange 12.Blind plate 13 is close to sealing Figure 14 under the effect of gravity, thereby guarantees the sealing in the vacuum pipe 11.Air pressure in vacuum pipe 11 is during greater than external pressure, and blind plate 13 rotates along the jointed shaft between itself and the flange 2 under the effect of air pressure inside, thereby and produce exhaust clearance between sealing Figure 14, internal gas is discharged.
The present invention has saved compression spring and bolt, only relies on the sealing of the gravity maintenance furnace chamber of blind plate 13.When furnace chamber is inflated to normal pressure by vacuum state; If overcharge phenomenon, the oxide compound ultrafine dust in the furnace chamber under pressure to the migration of the outlet side of safety exhaust, in the migration of oxide compound ultrafine dust when sealing Figure 14 place; Because safety exhaust only relies on the deadweight of blind plate 13 to seal; Therefore can make safety exhaust open easily, and the oxide compound ultrafine dust is emitted, play the purpose of nature row pressure.Run into sparking at vacuum cavity and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the present invention to clear up vacuum pipe 11 very convenient, start blind plate 13 and just can carry out vacuum pipe 11 and clean, put down back natural enclosing vacuum pipe 11, suck fully after the open vacuum.
The present invention realizes hinged between blind plates 13 and the flange 12 through hinging pin shaft 17, and blind plate 13 is provided with first fixing part 15, and this first fixing part 15 is provided with first hinge hole; Flange 12 is provided with second fixing part 16, and this second fixing part 16 is provided with second hinge hole, and hinging pin shaft 17 is inserted on first hinge hole and second hinge hole successively.During use first fixing part 15 and second fixing part 16 are separately fixed on blind plate 13 and the flange 12, can be through welding, mode of connection such as bolt connection are separately fixed at first fixing part 15 and second fixing part 16 on blind plate 13 and the flange 12.
The present invention preferably is fixed on first fixing part 15 and second fixing part 16 on blind plate 13 and the flange 12 through holding bolt respectively; Like this after blind plate 13 damages; Can only change, after first fixing part 15 and 16 dismountings of second fixing part, also can continue to use blind plate 13.
Offer on the end face of flange 12 and hold the groove that seals Figure 14, sealing Figure 14 places in this groove, and sealing Figure 14 is preferably O type sealed picture.But blind plate 13 levels provided by the invention place on the flange 12, and also tiltable is arranged on the flange 12, when blind plate 13 is obliquely installed, should guarantee blind plate 13 under the effect of gravity, are close on sealing Figure 14, to keep the sealing in the vacuum pipe 11.Preferably, blind plate 13 and angle of inclination horizontal plane are 45 degree.On the principle blind plate 13 and angle horizontal plane can be degree 0～90 (not comprising 90), better in 30～50 degree effects, 45 effects when spending are best.
Crystal growing furnace provided by the invention comprises vent valve, and wherein, vent valve is the as above disclosed safety exhaust of embodiment.Run into sparking at the vacuum cavity of crystal growing furnace and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the present invention to clear up vacuum pipe 11 very convenient, start blind plate 13 and just can carry out vacuum pipe 11 and clean, put down back natural enclosing vacuum pipe 11, suck fully after the open vacuum.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and the corresponding to wide region of features of novelty.
Claims (9)
1. safety exhaust; Be used for the exhaust of crystal growing furnace; Comprise blind plate (13) and sealed picture (14); It is characterized in that the flange (12) on the vacuum pipe (11) of an end of said blind plate (13) and said crystal growing furnace is hinged, said sealed picture (14) is arranged between said blind plate (13) and the said flange (12).
2. safety exhaust as claimed in claim 1 is characterized in that, also comprises hinging pin shaft (17);
Said blind plate (13) is provided with first fixing part (15), and this first fixing part (15) is provided with first hinge hole;
Said flange (12) is provided with second fixing part (16), and this second fixing part (16) is provided with second hinge hole, and said hinging pin shaft (17) is inserted on said first hinge hole and said second hinge hole successively.
3. safety exhaust as claimed in claim 2 is characterized in that, first fixing part (15) and said second fixing part (16) are fixed on said blind plate (13) and the said flange (12) through holding bolt respectively.
4. safety exhaust as claimed in claim 1 is characterized in that, offers the groove that holds said sealed picture (14) on the end face of said flange (12), and said sealed picture (14) places in this groove.
5. safety exhaust as claimed in claim 4 is characterized in that, said sealed picture (14) is an O type sealed picture.
6. like each described safety exhaust of claim 1-5, it is characterized in that said blind plate (13) level places on the said flange (12).
7. like each described safety exhaust of claim 1-5, it is characterized in that said blind plate (13) is obliquely installed on said flange (12).
8. safety exhaust as claimed in claim 7 is characterized in that, said blind plate (13) is 30～50 degree with the angle of horizontal plane.
9. a crystal growing furnace comprises vent valve, it is characterized in that, said vent valve is like each described safety exhaust of claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101322564A CN102787363A (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101322564A CN102787363A (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve thereof |
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| Publication Number | Publication Date |
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| CN102787363A true CN102787363A (en) | 2012-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101322564A Pending CN102787363A (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve thereof |
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| CN (1) | CN102787363A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111023797A (en) * | 2019-11-29 | 2020-04-17 | 合肥科晶材料技术有限公司 | Safety sealing system for down-loading vacuum atmosphere high-temperature sintering equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990012209A1 (en) * | 1989-04-11 | 1990-10-18 | Westonbridge International Limited | Constant flow-rate micropump |
| WO2001099171A1 (en) * | 2000-06-21 | 2001-12-27 | Tokyo Electron Limited | Gas supply device and treating device |
| CN2611296Y (en) * | 2002-11-28 | 2004-04-14 | 范锦和 | Vacuum fresh-keeping device |
| CN2804761Y (en) * | 2005-07-13 | 2006-08-09 | 崔兆星 | High temp roller furnace |
| CN201071372Y (en) * | 2007-07-16 | 2008-06-11 | 浙江省湖州二轻机械总厂 | Weight hammer type exhaust system of barrate for tanning leather and dyeing process |
| CN201237057Y (en) * | 2008-08-08 | 2009-05-13 | 湖南力威液压设备有限公司 | Exhausting equipment for outlet conduit of water pump station |
| CN201264761Y (en) * | 2008-07-08 | 2009-07-01 | 楼其云 | Hand-push vacuum fresh preserving box |
| CN202081192U (en) * | 2011-05-20 | 2011-12-21 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and safety exhaust valve of same |
-
2011
- 2011-05-20 CN CN2011101322564A patent/CN102787363A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990012209A1 (en) * | 1989-04-11 | 1990-10-18 | Westonbridge International Limited | Constant flow-rate micropump |
| WO2001099171A1 (en) * | 2000-06-21 | 2001-12-27 | Tokyo Electron Limited | Gas supply device and treating device |
| CN2611296Y (en) * | 2002-11-28 | 2004-04-14 | 范锦和 | Vacuum fresh-keeping device |
| CN2804761Y (en) * | 2005-07-13 | 2006-08-09 | 崔兆星 | High temp roller furnace |
| CN201071372Y (en) * | 2007-07-16 | 2008-06-11 | 浙江省湖州二轻机械总厂 | Weight hammer type exhaust system of barrate for tanning leather and dyeing process |
| CN201264761Y (en) * | 2008-07-08 | 2009-07-01 | 楼其云 | Hand-push vacuum fresh preserving box |
| CN201237057Y (en) * | 2008-08-08 | 2009-05-13 | 湖南力威液压设备有限公司 | Exhausting equipment for outlet conduit of water pump station |
| CN202081192U (en) * | 2011-05-20 | 2011-12-21 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and safety exhaust valve of same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111023797A (en) * | 2019-11-29 | 2020-04-17 | 合肥科晶材料技术有限公司 | Safety sealing system for down-loading vacuum atmosphere high-temperature sintering equipment |
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Application publication date: 20121121 |