CN203007501U - Four-way type gas extraction pipeline for single crystal furnace - Google Patents
Four-way type gas extraction pipeline for single crystal furnace Download PDFInfo
- Publication number
- CN203007501U CN203007501U CN 201220642269 CN201220642269U CN203007501U CN 203007501 U CN203007501 U CN 203007501U CN 201220642269 CN201220642269 CN 201220642269 CN 201220642269 U CN201220642269 U CN 201220642269U CN 203007501 U CN203007501 U CN 203007501U
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- cover plate
- line
- single crystal
- pump
- cleanout opening
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Abstract
The utility model provides a four-way type gas extraction pipeline for a single crystal furnace. The four-way type gas extraction pipeline comprises a pipeline main body, and is characterized in that a gas outlet of the gas extraction pipeline is connected with one interface of a crisscross four-way joint; one interface of the four-way joint, which is in 90-degree distribution with the gas outlet of the gas extraction pipeline, is of a gas outlet interface; the other two interfaces of the four-way joint are sweeping ports, sealing and buckling devices are respectively arranged on the two sweeping ports, and each sealing and buckling device comprises a sweeping port flange, a cover plate, a hinge and a seal ring; and a cavity of the pipeline can be opened and closed by turning, opening and closing the cover plate, and the gas extraction pipeline can be swept in two directions. When the pressure in an inner cavity of a furnace body in the cavity is higher than the design pressure, the cover plate is opened by receiving an outward motion action force, then the high-pressure gas in the inner cavity of the furnace body overflows so as to reduce the pressure in the furnace cavity, and the cover plate returns to the original position under the action of deadweight component force till the cover plate re-isolates the gas in the furnace body from an atmosphere.
Description
Technical field
The utility model provides a kind of tubing type pump-line for single crystal growing furnace, especially a kind ofly can clean fast, the tubing type pump-line that is used for single crystal growing furnace of safe release of pressure.
Background technology
Single crystal growing furnace environmental facies in body of heater when normal operation are rendered as negative pressure, the condition of high temperature for external environment.Body of heater is connected to guarantee negative pressure in stove by the pipeline of finding time, fly-ash separator with vacuum pump.In stove, silicon materials can be attached to the inner-walls of duct of finding time along air flow line because of the volatile matter that high temperature melt, low pressure produce in whole single crystal growing furnace operational process, long time integration can affect pumping speed and body of heater vacuum tightness, and the pipeline of finding time needs regularly cleaning to keep clean and unobstructed.If because unforeseen circumstances causes cooling water leakage in body of heater, at high temperature water coolant can instant vaporization transfer gas to, cause the air pressure in body of heater sharply to increase to over the outer normal atmosphere of body of heater, light may cause the damage of crystal growth equipment or the stable situation of other harm crystal growth equipments, heavy may set off an explosion, jeopardize personnel safety.At present, single crystal growing furnace evacuation tube road shape is complicated, pipeline is pulled down could be cleaned all dead angles, and secure context need to increase explosion-proof equipment again.Therefore, how to make pipe interior be convenient to cleaning, can increase again the integral device security and become problem demanding prompt solution.
The utility model content
In order to solve problems of the prior art, the utility model provides a kind of each dead angle that can easily clean pump-line, itself has the tubing type pump-line that is used for single crystal growing furnace of safe release of pressure.
Technical solution adopted in the utility model is:
A kind of tubing type pump-line for single crystal growing furnace, comprise pipe main body, the air outlet of pump-line is connected with an interface of a cross four-way connection, one of them interface that four-way connection and air outlet pump-line are 90 ° of distributions is the interface of giving vent to anger, two interfaces of all the other of four-way connection are cleanout opening, are respectively arranged with the seal buckle locking device on two cleanout openings.
Wherein, described seal buckle locking device comprises cleanout opening flange, cover plate, hinge and sealing-ring, the cleanout opening flange is fitted on cleanout opening, the port part of cleanout opening flange is coated with cover plate, a page plate of hinge is fixed on the cleanout opening flange, and another of hinge page plate is fixed on the outer rim of cover plate; Sealing-ring is arranged between the oral area of cover plate and cleanout opening flange.
Wherein, be 30 ° to 75 ° angles between cover plate and horizontal plane, the angle of the port part of cleanout opening flange and the angle of cover plate match.
Wherein, pump-line is two, is separately positioned on the relative both sides of body of heater.
Wherein, pump-line is double-layer sealing structure, and recirculated cooling water is arranged in interlayer.
Wherein, between cover plate and horizontal plane be 60 ° of angles.
The beneficial effects of the utility model are:
1, can open cover plate in the situation that need not dismantle the single crystal growing furnace pump-line, two orientation cleaning pipe interiors, discharging voluntarily furnace pressure at furnace pressure during higher than set(ting)value increases the single crystal growing furnace security.
2, cover plate and cleanout opening flange are all by cover plate own wt and cleanout opening flange close contact, and the top is without constraint mechanism, and reaching setting range at pressure can upspring voluntarily.
Description of drawings
Fig. 1 is structure scheme of installation of the present utility model;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the sectional view of seal buckle locking device of the present utility model;
Fig. 4 is that the A of seal buckle locking device of the present utility model is to sectional view;
1. bodies of heater in figure, 2. pump-line, 3. cover plate, 4. hinge axis, 5. hinge, 6. cleanout opening flange, 7. body of heater inner chamber, 8. sealing-ring, 9. four-way connection.
Embodiment
Below in conjunction with Fig. 1 to Fig. 4, the utility model is described in further details:
As seen from Figure 1, Figure 2, a kind of tubing type pump-line for single crystal growing furnace, the inlet mouth of pump-line 2 is connected with the body of heater inner chamber 7 of body of heater 1, the air outlet of pump-line 2 is connected with an interface of a cross four-way connection 9, one of them interface that the air outlet with pump-line 2 of four-way connection 9 is 90 ° of distributions is the interface of giving vent to anger, two interfaces of all the other of four-way connection 9 are cleanout opening, are respectively arranged with the seal buckle locking device on two cleanout openings.Pump-line 2 is two, is separately positioned on the relative both sides of body of heater 1.Pump-line is double-layer sealing structure, and recirculated cooling water is arranged in interlayer.
Described seal buckle locking device comprises cleanout opening flange 6, cover plate 3, hinge 5 and sealing-ring 8, cleanout opening flange 6 is fitted on cleanout opening, the port part of cleanout opening flange 6 is coated with cover plate 3, a page plate of hinge 8 is fixed on cleanout opening flange 6, another page plate of hinge 5 is fixed on the outer rim of cover plate 3, and two page plates of hinge 8 connect by hinge axis 4; Sealing-ring 8 is arranged between the oral area of cover plate 3 and cleanout opening flange 6, is 30 ° to 75 ° angles between plate and horizontal plane, and the angle of the port part of cleanout opening flange and the angle of cover plate match.In embodiment, be 60 ° of angles between cover plate and horizontal plane.
During work, communicate with body of heater inner chamber 7 at pump-line 2, pump-line 2 internal gas pressures equate with body of heater inner chamber 7 internal gas pressures, the external world of pump-line 2 is a normal atmosphere, operating air pressure in body of heater inner chamber 7 is less than normal atmosphere, the situation lower cover 3 of normal operation because of barometric point and deadweight inclination component self-closed body of heater inner with the contacting of ambient atmosphere.
In the time of in unexpected situation body of heater is arranged, cause the body of heater chamber pressure sharply to raise, pressure in body of heater is during gradually higher than the pressure of external pressure and cover plate 3, cover plate 3 can be subject to an impulse force and motion laterally, and the gas in body of heater contacts with the atmosphere of outside, and the gas in body of heater is excessive causes the pressure in body of heater to reduce, pressure reduces in process, cover plate 3 is moved back by deadweight component, and when pressure was reduced to certain value, cover plate 3 was again with the gas in body of heater and isolated from atmosphere.
Claims (5)
1. tubing type pump-line that is used for single crystal growing furnace, comprise pipe main body, it is characterized in that: the air outlet of pump-line is connected with an interface of a cross four-way connection, one of them interface that four-way connection and air outlet pump-line are 90 ° of distributions is the interface of giving vent to anger, two interfaces of all the other of four-way connection are cleanout opening, are respectively arranged with the seal buckle locking device on two cleanout openings.
2. a kind of tubing type pump-line for single crystal growing furnace according to claim 1, it is characterized in that: described seal buckle locking device comprises cleanout opening flange, cover plate, hinge and sealing-ring, the cleanout opening flange is fitted on cleanout opening, the port part of cleanout opening flange is coated with cover plate, a page plate of hinge is fixed on the cleanout opening flange, and another of hinge page plate is fixed on the outer rim of cover plate; Sealing-ring is arranged between the oral area of cover plate and cleanout opening flange.
3. a kind of tubing type pump-line for single crystal growing furnace according to claim 2, it is characterized in that: be 30 ° to 75 ° angles between cover plate and horizontal plane, the angle of the port part of cleanout opening flange and the angle of cover plate match.
4. a kind of tubing type pump-line for single crystal growing furnace according to claim 1, it is characterized in that: pump-line is double-layer sealing structure, and recirculated cooling water is arranged in interlayer.
5. a kind of tubing type pump-line for single crystal growing furnace according to claim 3, is characterized in that: be 60 ° of angles between cover plate and horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220642269 CN203007501U (en) | 2012-11-28 | 2012-11-28 | Four-way type gas extraction pipeline for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220642269 CN203007501U (en) | 2012-11-28 | 2012-11-28 | Four-way type gas extraction pipeline for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203007501U true CN203007501U (en) | 2013-06-19 |
Family
ID=48599113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220642269 Expired - Fee Related CN203007501U (en) | 2012-11-28 | 2012-11-28 | Four-way type gas extraction pipeline for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203007501U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105506730A (en) * | 2015-12-15 | 2016-04-20 | 上海汉虹精密机械有限公司 | Main vacuum pipeline structure of single-crystal furnace |
-
2012
- 2012-11-28 CN CN 201220642269 patent/CN203007501U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105506730A (en) * | 2015-12-15 | 2016-04-20 | 上海汉虹精密机械有限公司 | Main vacuum pipeline structure of single-crystal furnace |
| CN105506730B (en) * | 2015-12-15 | 2019-02-12 | 上海汉虹精密机械有限公司 | A kind of main vacuum line structure of single crystal growing furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20171128 |