CN108181183A - A kind of mini type high temperature impression mechanics performance test apparatus - Google Patents
A kind of mini type high temperature impression mechanics performance test apparatus Download PDFInfo
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- CN108181183A CN108181183A CN201810049816.1A CN201810049816A CN108181183A CN 108181183 A CN108181183 A CN 108181183A CN 201810049816 A CN201810049816 A CN 201810049816A CN 108181183 A CN108181183 A CN 108181183A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/18—Performing tests at high or low temperatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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Abstract
The invention discloses a kind of structure is reliable, loading is stablized, mini type high temperature impression mechanics performance test apparatus with high accuracy, Z-direction movable plate is reciprocatingly slided by the Z-direction moving guide rail on Z-direction driving device drives edge bottom plate；It is equipped with Z-direction piezoelectric ceramics module and pressure head installing plate on Z-direction movable plate successively from the bottom to top；High temperature pressure head is in one end of pressure head installing plate；Mounting seat is connected to one end of bottom plate, and X is reciprocatingly slided to movable plate from X of the X in driving device drives edge mounting seat to moving guide rail, and X is equipped with Y-direction moving guide rail to movable plate, and Y-direction movable plate is reciprocatingly slided by Y-direction driving device drives edge Y-direction moving guide rail；It is equipped with two-dimensional piezoelectric ceramic module, piezoelectric ceramics module upper plate, force snesor, heat insulation pedestal and sample stage on Y-direction movable plate successively from the bottom to top, sample stage is equipped with heater；Controller communicates to connect respectively with X to driving device, Y-direction driving device, Z-direction driving device, force snesor and heater.
Description
Technical field
The present invention relates to field of in-situ mechanical property test, more particularly to a kind of mini type high temperature impression Mechanics Performance Testing
Equipment.
Background technology
Nowadays using micro-nano impression as the mechanical property and materials microstructure under external force of means research material
Structure and morphology variation has become the important tool in investigation of materials field and means.With the continuous development of science and technology, how
It is business and the final goal of autonomous instrument and equipment that characterization is carried out to the material under working environment.Indentation equipment is by for many years
Development, to become the important instrument of investigation of materials, but volume is big the shortcomings that traditional commerce micro-nano indentation equipment, and structure is multiple
It is miscellaneous, it is integrated it is difficult to be combined with miscellaneous equipment, itself function can only be used alone, it is difficult to expansion research is carried out, especially for
High temperature alloy, thermal barrier coating, ceramics etc. are often operated in the material of hot conditions, also only MML companies of Britain, the U.S.
Hysitron, Bruker Ji Jia foreign corporations equipment have high temperature test function, but equipment volume is huge, be not appropriate for and its
Its relevant device is combined.Currently early have been enter into micro-nano-scale to the research of material, and the also not only office of the requirement to instrument
Be limited to simple the physical-chemical parameters characterization function, what is more important Record analysis its under operating mode heterogeneous microstructure with outer
The real-time change situation of field action.Such requirement just needs, by traditional indentation equipment miniaturization, flexibility, to sweep in order to same
Electron microscope is retouched, the equipment that light microscope etc. has real-time observing function is integrated.It instantly can be with scanning electron microscopy
Mirror carries out high temperature the indentation equipment all category and external commercial company's product, and quantity type is seldom substantially of integrated characterization, such as beautiful
State Hysitron, Nanomechanics, Switzerland Alemins, but its is expensive, and loaded load is small, and loading velocity is fast, loading
Process variation is big, these destabilizing factors have the normal position indentation test of material the defects of certain, and in material crack germinating or
Tissue change initially cannot be fixed tentatively accurately, there is delay, these are all unfavorable for observing sample in real time in scanning electron microscope
The process of product pattern changes in microstructure.
Invention content
The object of the present invention is to provide a kind of mini type high temperature impression mechanics performance test apparatus, to solve the above-mentioned prior art
There are the problem of, make its structure reliable, loading stablize, test data is accurate, reduce use cost.
To achieve the above object, the present invention provides following schemes：
The present invention provides a kind of mini type high temperature impression mechanics performance test apparatus, including bottom plate, Z-direction piezoelectric ceramics module,
High temperature pressure head, mounting seat, two-dimensional piezoelectric ceramic module, sample stage and controller are equipped with Z-direction on bottom plate and move along its length
Guide rail slidably connects Z-direction movable plate on Z-direction moving guide rail, and Z-direction movable plate is by Z-direction driving device drives edge Z-direction moving guide rail
It reciprocatingly slides；Z-direction piezoelectric ceramics module is set on Z-direction movable plate, and pressure head installing plate is equipped in Z-direction piezoelectric ceramics module；
High temperature pressure head is installed on one end of pressure head installing plate；Mounting seat is connected to the one end of bottom plate along its length, and mounting seat
Length direction be parallel to the width direction of bottom plate；X is equipped in mounting seat along its length to moving guide rail, X is led to movement
X is slidably connected on rail to movable plate, X reciprocatingly slides to movable plate from X to driving device drives edge X to moving guide rail, and X is to shifting
Movable plate is equipped with Y-direction moving guide rail, the length direction of Y-direction moving guide rail perpendicular to bottom plate in-plane, on Y-direction moving guide rail
Y-direction movable plate is slidably connected, Y-direction movable plate is reciprocatingly slided by Y-direction driving device drives edge Y-direction moving guide rail；Two-dimensional piezoelectric
Ceramic module includes setting up and down and connection X to piezoelectric ceramics module and Y-direction piezoelectric ceramics module, two-dimensional piezoelectric ceramic module
It is set on Y-direction movable plate, two-dimensional piezoelectric ceramic module connects force sensor, force snesor by piezoelectric ceramics module upper plate
On be connected with heat insulation pedestal；Sample stage is connected in heat insulation pedestal, and sample stage is equipped with heater with specimen heating holder；The X
It is communicated to connect to driving device, the Y-direction driving device and the Z-direction driving device with the controller, the controller
It is communicated to connect respectively with the force snesor and the heater.
Preferably, the Z-direction driving device includes Z-direction motor, and the Z-direction motor is connected to by Z-direction motor fixing seat
On the bottom plate, the Z-direction motor output shaft is connected with Z-direction precision adjusting screw by shaft coupling, and the Z-direction precision adjusts silk
Thick stick is threaded with a Z-direction nut, and the Z-direction nut is fixedly connected with the Z-direction movable plate.
Preferably, it further includes a grating displacement sensor, displacement is connected with by the first fixed plate on the Z-direction movable plate
Sensor sliding panel, the reading head of the grating displacement sensor are set on institute's displacement sensors sliding panel, the grating
The scale of sensor is set in a displacement sensor fixed plate, and institute's displacement sensors sliding panel is consolidated with institute displacement sensors
Fixed board is slidably connected, and institute's displacement sensors fixed plate is connected to by the second fixed plate on the bottom plate.
Preferably, the X includes X to motor to driving device, and the X is connected to motor by X to motor fixing seat
In the mounting seat, the X is connected with an X to motor gear to the output shaft of motor, and the X is engaged with one to motor gear
For X to screw gear, the X is fixedly connected with an X to accurate adjusting screw to screw gear, and the X is to accurate adjusting screw
Axial direction and axial direction from the X to motor each parallel to the width direction of the bottom plate, and the X adjusts silk to precision
Thick stick is threaded with an X to nut, and the X is fixedly connected on X on nut installing plate to nut, and the X is to nut installing plate
The X is connected on movable plate, and the X is freely sheathed on the X outside motor and can be along the X to nut installing plate
To being free to move axially for motor.
Preferably, the Y-direction driving device includes Y-direction motor, and the Y-direction motor is connected to by Y-direction motor fixing seat
On the bottom plate, the output shaft of the Y-direction motor is connected with a Y-direction motor gear, and the Y-direction motor gear is engaged with a Y-direction
Screw gear, the Y-direction screw gear are fixedly connected with a Y-direction precision adjusting screw, the axial direction of the Y-direction precision adjusting screw
The axial direction of direction and the Y-direction motor is each perpendicular to the bottom plate, and the Y-direction precision adjusting screw is threaded with one
Y-direction nut, the Y-direction nut are fixedly connected on Y-direction nut installing plate, and the Y-direction nut installing plate is connected to the Y-direction and moves
On movable plate, and the Y-direction nut installing plate be freely sheathed on outside the Y-direction motor and can along the Y-direction motor it is axial oneself
By moving.
Preferably, the pressure head installing plate is equipped with aluminium radiator structure, the aluminium radiator structure and the pressure head installing plate
Connect by mounting screw with the Z-direction piezoelectric ceramics module, the pressure head installing plate and the Z-direction piezoelectric ceramics module it
Between be equipped with multiple thermal insulation ceramics bushings, each mounting screw both pass through after a thermal insulation ceramics bushing with the Z-direction pressure
Electroceramics module connects.
Preferably, described sample stage one end is equipped with a fixed column, and the fixed column is equipped with the heater, the heating
Device is heating tungsten filament, and when the sample stage is connected to the outer end of the heat insulation pedestal, the fixed column stretches to the heat-insulated bottom
In seat, the heat insulation pedestal is zirconia ceramics pedestal, and the sample stage is alumina sample platform；It is additionally provided on the sample stage
Temperature sensor, the temperature sensor are communicated to connect with the controller.
Preferably, the thermal insulation ceramics bushing be zirconia ceramics bushing, the bottom plate be red copper bottom plate, the installation bottom
Seat is stainless steel base, and the difficult molten molybdenum alloy pressure head of high temperature pressure head, the high temperature indenter tip is Diamond tip.
Preferably, the Z-direction moving guide rail is dual crossing roller rail, and the X is to the screw pitch, described of accurate adjusting screw
The screw pitch of Y-direction precision adjusting screw and the screw pitch of the Z-direction precision adjusting screw are 200~300 microns.
Preferably, further include a top plate, the top plate be connected to bottom plate one end along its length and with the peace
Dress pedestal is opposite to be arranged in parallel.
The present invention achieves following technique effect relative to the prior art：
Mini type high temperature impression mechanics performance test apparatus provided by the invention, X include X to piezoelectric ceramics module and make pottery to piezoelectricity
To closed-loop control system, Y-direction piezoelectric ceramics module includes Y-direction piezoelectric ceramics and Y-direction closed-loop control system, Z-direction piezoelectricity pottery by porcelain and X
Ceramic former block includes Z-direction piezoelectric ceramics and Z-direction closed-loop control system, and X can obtain positions of the X to piezoelectric ceramics to closed-loop control system
It moves information and controls displacements of the X to piezoelectric ceramics, Y-direction closed-loop control system can obtain the displacement information of Y-direction piezoelectric ceramics simultaneously
The displacement of Y-direction piezoelectric ceramics is controlled, Z-direction closed-loop control system can obtain the displacement information of Z-direction piezoelectric ceramics and control Z-direction pressure
The displacement of electroceramics；And X is controlled to drive X to drive to driving device, Y-direction driving device and Z-direction driving device by controller
Dynamic device and Y-direction driving device drive sample stage movement, and driving Z-direction driving device drives high temperature movable press head, so as to fulfill sample
Sample and the coarse adjustment of high temperature pressure head relative position in sample platform make the region to be measured of sample be connect generally within below high temperature pressure head
It through X to piezoelectric ceramics module and the fine adjustment of Y-direction piezoelectric ceramics module, sample surfaces region to be measured or structure bit can be made
Immediately below high temperature pressure head and heater is controlled to start sample by controller to heat, pass through Z after sample reaches set temperature
To the fine adjustment of piezoelectric ceramics module, control high temperature pressure head is automatically close and is pressed into sample.Displacement degree of regulation is high, and structure can
It leans on, loading is stablized, and is substantially increased the accuracy of test data, is reduced use cost.
Description of the drawings
It in order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the axis side structure schematic diagram of mini type high temperature impression mechanics performance test apparatus provided by the invention；
Fig. 2 is that the axis side structure of another angle of mini type high temperature impression mechanics performance test apparatus provided by the invention is illustrated
Figure；
In figure：1- bottom plates；2-Y is to nut installing plate；3- mounting seats；4-Y is to motor；5-Y is to motor gear；6-Y to
Screw gear；7-Y is to accurate adjusting screw；8-Y is to motor fixing seat；9-X is to nut installing plate；10-X is to motor；11-X to
Motor gear；12-X is to accurate adjusting screw；13-X is to screw gear；14- force snesors；15- displacement sensor fixed plates；
16- heat insulation pedestals；17- displacement sensor sliding panels；The reading head of 18- grating displacement sensors；The first fixed plates of 19-；20- aluminium
Radiator structure；21- top plates；22- pressure head installing plates；The second fixed plates of 23-；24-Z is to piezoelectric ceramics module；25-Z is to nut；
26-Z is to accurate adjusting screw；27- shaft couplings；28- sample stages；29-Z is to motor fixing seat；30- piezoelectric ceramics module upper plates；
31- two-dimensional piezoelectric ceramic modules；32-Z is to moving guide rail；33-Z is to movable plate；34- thermal insulation ceramics bushings；35- heaters；36-
High temperature pressure head；37-X is on moving guide rail；38-X is to movable plate；39-Y is on moving guide rail；40-Y is to movable plate；41-X is to electricity
Machine fixed seat；42- fixed columns.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of mini type high temperature impression mechanics performance test apparatus, to solve the above-mentioned prior art
There are the problem of, make its structure reliable, loading stablize, test data is accurate, reduce use cost.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, it is below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Embodiment one
The present embodiment provides a kind of mini type high temperature impression mechanics performance test apparatus, as shown in Fig. 1~2, including bottom plate 1, Z
To piezoelectric ceramics module 24, high temperature pressure head 36, mounting seat 3, two-dimensional piezoelectric ceramic module 31, sample stage 28 and controller, bottom
Z-direction moving guide rail 32 is equipped on plate 1 along its length, Z-direction movable plate 33, Z-direction movement are slidably connected on Z-direction moving guide rail 32
Plate 33 is reciprocatingly slided by Z-direction driving device drives edge Z-direction moving guide rail 32；Z-direction piezoelectric ceramics module 24 is set to Z-direction movable plate
On 33, pressure head installing plate 22 is installed in Z-direction piezoelectric ceramics module 24；High temperature pressure head 36 is installed on the one of pressure head installing plate 22
End；Mounting seat 3 is connected to the one end of bottom plate 1 along its length, and the length direction of mounting seat 3 is parallel to the width of bottom plate 1
Spend direction；X is equipped in mounting seat 3 along its length to moving guide rail 37, X slidably connects X to shifting on moving guide rail 37
Movable plate 38, X reciprocatingly slide to movable plate 38 from X to driving device drives edge X to moving guide rail 37, and X is equipped with Y to movable plate 38
To moving guide rail 39, the length direction of Y-direction moving guide rail 39 is slided perpendicular to the in-plane of bottom plate 1 on Y-direction moving guide rail 39
Y-direction movable plate 40 is connected with, Y-direction movable plate 40 is reciprocatingly slided by Y-direction driving device drives edge Y-direction moving guide rail 39；Two dimension pressure
Electroceramics module 31 includes setting up and down and connection X to piezoelectric ceramics module and Y-direction piezoelectric ceramics module, two-dimensional piezoelectric ceramics
Module 31 is set on Y-direction movable plate 40, and two-dimensional piezoelectric ceramic module 31 connects strong biography by piezoelectric ceramics module upper plate 30
Sensor 14 is connected with heat insulation pedestal 16 on force snesor 14；Sample stage 28 is connected in heat insulation pedestal 16, and sample stage 28 is equipped with
Heater 35 is with specimen heating holder 28；X to driving device, Y-direction driving device and Z-direction driving device with controller communication link
It connects, controller communicates to connect respectively with force snesor 14 and heater 35.
Mini type high temperature impression mechanics performance test apparatus provided in this embodiment, X include X to piezoelectricity to piezoelectric ceramics module
To closed-loop control system, Y-direction piezoelectric ceramics module includes Y-direction piezoelectric ceramics and Y-direction closed-loop control system, Z-direction piezoelectricity by ceramics and X
Ceramic module includes Z-direction piezoelectric ceramics and Z-direction closed-loop control system, and X can obtain X to piezoelectric ceramics to closed-loop control system
Displacement information simultaneously controls displacements of the X to piezoelectric ceramics, and Y-direction closed-loop control system can obtain the displacement information of Y-direction piezoelectric ceramics
And the displacement of Y-direction piezoelectric ceramics is controlled, Z-direction closed-loop control system can obtain the displacement information of Z-direction piezoelectric ceramics and control Z-direction
The displacement of piezoelectric ceramics；And X is controlled to driving device, Y-direction driving device and Z-direction driving device by controller, driving X to
Driving device and Y-direction driving device drive sample stage 28 to move, and driving Z-direction driving device drives high temperature pressure head 36 to move, so as to
It realizes the coarse adjustment of the sample and 36 relative position of high temperature pressure head on sample stage 28, makes the region to be measured of sample generally within high-temperature high-pressure
First 36 lower section, then can make sample surfaces to be measured by X to piezoelectric ceramics module and the fine adjustment of Y-direction piezoelectric ceramics module
Region or structure, which are located at immediately below high-temperature high-pressure head 36 and heater 35 are controlled to start sample by controller, to be heated, when sample reaches
By the fine adjustment of Z-direction piezoelectric ceramics module 24 after set temperature, control high temperature pressure head 36 is automatically close and is pressed into sample.Position
It is high to move degree of regulation, structure is reliable, and loading is stablized, and is substantially increased the accuracy of test data, is reduced use cost.
Mini type high temperature impression mechanics performance test apparatus provided in this embodiment, Z-direction driving device include Z-direction motor 29, Z
It is connected on bottom plate 1 by Z-direction motor fixing seat 29 to motor, Z-direction motor output shaft is connected with Z-direction precision by shaft coupling 27
Adjusting screw 26, Z-direction precision adjusting screw 26 are threaded with a Z-direction nut 25, and Z-direction nut 25 is fixedly connected with Z-direction movement
Plate 33.After opening Z-direction motor, the rotation of Z-direction precision adjusting screw 26 drives Z-direction movable plate 33 along the Z on floor length direction
It is slided to moving guide rail 32, realizes the displacement coarse adjustment of the Z-direction of high temperature pressure head 36.
It further includes a grating displacement sensor, displacement sensor is connected with by the first fixed plate 19 on Z-direction movable plate 33
Sliding panel 17, the reading head 18 of grating displacement sensor are set on displacement sensor sliding panel 17, the scale of grating sensor
It being set in a displacement sensor fixed plate 15, displacement sensor sliding panel 17 is slidably connected with displacement sensor fixed plate 15,
And displacement sensor fixed plate 15 is connected to by the second fixed plate 23 on bottom plate 1；It can be accurate by grating displacement sensor
Learn the displacement of Z-direction movable plate 33.Mini type high temperature impression mechanics performance test apparatus provided in this embodiment, pattern displacement sensing
0.5 μm of the resolution ratio of device.
X includes X to motor 10 to driving device, and X is connected to mounting seat 1 by X to motor 10 to motor fixing seat 41
On, the output shaft of from X to motor 10 is connected with an X to motor gear 11, and X is engaged with an X to screw gear 13 to motor gear 11,
X is fixedly connected with an X to accurate adjusting screw 12 to screw gear 13, axial direction from X to accurate adjusting screw 12 and X to electricity
The axial direction of machine 10 is each parallel to the width direction of bottom plate 1, and X is threaded with an X to nut to accurate adjusting screw 12,
X is fixedly connected on X on nut installing plate 9 to nut, and X is connected to X on movable plate 38 to nut installing plate 9, and X is to nut
Installing plate 9 is freely sheathed on X outside motor 10 and being capable of being free to move axially along X to motor 10.X is opened after motor 10, X
Drive X to movable plate 38 along 3 length direction of mounting seat to nut installing plate 9 by X to the rotation of accurate adjusting screw 12
X slided to moving guide rail 37, realize sample stage 28 X to displacement coarse adjustment.
Y-direction driving device includes Y-direction motor 4, and Y-direction motor 4 is connected to by Y-direction motor fixing seat 8 on bottom plate 1, Y-direction electricity
The output shaft of machine 4 is connected with a Y-direction motor gear 5, and Y-direction motor gear 5 is engaged with a Y-direction screw gear 6, Y-direction screw gear 6
A Y-direction precision adjusting screw 7 is fixedly connected with, the axial direction of Y-direction precision adjusting screw 7 and the axial direction of Y-direction motor 4 are equal
Perpendicular to bottom plate 1, and Y-direction precision adjusting screw 7 is threaded with a Y-direction nut, and Y-direction nut is fixedly connected on Y-direction nut peace
In loading board 2, Y-direction nut installing plate 2 is connected on Y-direction movable plate 40, and Y-direction nut installing plate 2 is freely sheathed on Y-direction motor 4
It outside and being capable of being free to move axially along Y-direction motor 4.After opening Y-direction motor 4, the rotation of Y-direction precision adjusting screw 7 passes through Y-direction spiral shell
Female installing plate 2 drives Y-direction movable plate 40 to be slided along the Y-direction moving guide rail 39 on mounting seat length direction, realizes sample stage
28 Y-direction displacement coarse adjustment.
Pressure head installing plate 22 is equipped with aluminium radiator structure 20, and aluminium radiator structure 20 and pressure head installing plate 22 are by installing spiral shell
Nail is connect with Z-direction piezoelectric ceramics module 24, and multiple thermal insulation ceramics are equipped between pressure head installing plate 22 and Z-direction piezoelectric ceramics module 24
Bushing 34, each mounting screw are connect after both passing through a thermal insulation ceramics bushing 34 with Z-direction piezoelectric ceramics module 24.Aluminium radiator structure
20 can effectively reduce the temperature of pressure head installing plate 22, and thermal insulation ceramics bushing 34 can effectively completely cut off pressure head installing plate 22 and Z-direction
Temperature conduction between piezoelectric ceramics module 24 ensures the service precision of Z-direction piezoelectric ceramics module 24.
28 one end of sample stage is equipped with a fixed column 42, and fixed column 42 is equipped with heater 35, and heater 35 is heating tungsten filament,
Heating tungsten filament is wound in fixed column 42；When sample stage 28 is connected to the outer end of heat insulation pedestal 16, fixed column 42 stretches to heat-insulated
In pedestal 16, heat insulation pedestal 16 is zirconia ceramics pedestal, and sample stage 28 is alumina sample platform；Temperature is additionally provided on sample stage 28
Sensor is spent, temperature sensor is communicated to connect with controller.Tungsten filament thermal-stable in a vacuum, power is low, and calorific value is big, heating
Speed is fast.Heat insulation pedestal 16 is zirconia ceramics pedestal, and is thin-wall construction in vertical spline sample platform direction, can effectively completely cut off sample
Product heat is conducted to X to piezoelectric ceramics module and Y-direction piezoelectric ceramics module, avoids influencing its service precision.
Mini type high temperature impression mechanics performance test apparatus provided in this embodiment, force snesor 14 are removably connected to piezoelectricity
Ceramic module upper plate 30 and heat insulation pedestal 16；Position adjust with process of press in, force snesor 14, grating displacement sensor,
Temperature sensor shows real time data by controller, and comparison data carries out simple analysis and obtains the power position in sample process of press in
Move curve, hardness and elastic modulus value.The mini type high temperature impression mechanics performance test apparatus can be carried by replacing force snesor 14
Maximum up to 15N for the pressure of different accuracy and range, heating temperature up to 850 degrees Celsius, stablize by whole Indentation Process, examination
It is reliable to test result data.
Thermal insulation ceramics bushing 34 is zirconia ceramics bushing, and thermal conductivity factor is small (1/the 20 of traditional stainless steel), effectively
The temperature conduction between pressure head installing plate 22 and Z-direction piezoelectric ceramics module 24 is completely cut off；Bottom plate 1 be red copper bottom plate, heat conductivility
Good, the heat generated in 35 heating process of heater can effectively be radiated by bottom plate 1, reduce the temperature of whole device,
Improve experimental precision；High temperature pressure head 36 is infusibility molybdenum alloy pressure head, and high temperature resistant, 36 tip of high temperature pressure head is Diamond tip, firmly
Degree is big, improves indentation test precision；Mounting seat 3 is stainless steel base, and rigidity is big, and stress deformation is small, and mounting seat 3 is being tested
Deformation in the process is small, can reduce in Indentation Process due to the deformation of mounting seat 3 and caused by sample compression distance
Error.
Z-direction moving guide rail 32 is dual crossing roller rail, screw pitch of the X to accurate adjusting screw 12, Y-direction precision adjusting screw
7 screw pitch and the screw pitch of Z-direction precision adjusting screw 26 are 200~300 microns.
A top plate 21 is further included, top plate 21 is connected to the other end relative to mounting seat 3 of bottom plate 1 along its length simultaneously
It is opposite with mounting seat 3 to be arranged in parallel.
This product small in volume, X, Y, Z three-dimensional can reach nano level control accuracy requirement, be adapted for engagement with sweeping
It retouches electron microscope and completes material micro mechanical property, institutional framework and coordinates hot conditions in the real-time change of stressing conditions
The real-time observation experiment in original position of material under some high temperature operating conditions can be done.
When being tested using mini type high temperature impression mechanics performance test apparatus provided in this embodiment, sample is led to first
Nonelastic gluing knot is crossed on sample stage 28, X is controlled sample stage 28 to be driven to move to motor 10 and Y-direction motor 4 by controller,
Sample is placed in immediately below high temperature pressure head 36, controller control X is stopped to motor 10 and Y-direction motor 4；Then pass through control
Device control Z-direction motor processed is by high temperature pressure head 36 close to sample, and until 14 registration of force snesor increases, controller controls Z-direction at this time
Motor work stops, 35 specimen heating holder 28 of heater, by the way that Z-direction piezoelectric ceramics module 24 is controlled to drive high temperature pressure head 36
It retreats, 14 value of force snesor is made to restore initial.Start automatic control mode at this time, Z-direction piezoelectric ceramics module 24 drives high-temperature high-pressure
First 36 with certain step-length speed, it can be achieved that the experiment process of certain compression distance or certain loading of pressing in, and pass through controller
Upper computer software obtain power displacement curve in real time, the mechanical property parameters of material can be obtained by the curve.In scanning electricity
Tiny area can be made to be in 36 lower section of high temperature pressure head by adjusting two-dimensional piezoelectric ceramic module 31 in mirror, realize that specified region refers to
Determine the experiment of structure.
Specific case is applied in the present invention to be expounded the principle of the present invention and embodiment, above example
Illustrate to be merely used to help understand method and its core concept of the invention；Meanwhile for those of ordinary skill in the art, according to
According to the thought of the present invention, in specific embodiments and applications there will be changes.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (10)
1. a kind of mini type high temperature impression mechanics performance test apparatus, it is characterised in that：Including：
Bottom plate is equipped with Z-direction moving guide rail on the bottom plate along its length, and Z-direction shifting is slidably connected on the Z-direction moving guide rail
Movable plate, Z-direction movable plate Z-direction moving guide rail as described in Z-direction driving device drives edge reciprocatingly slide；
Z-direction piezoelectric ceramics module, the Z-direction piezoelectric ceramics module are set on the Z-direction movable plate, the Z-direction piezoelectric ceramics
Pressure head installing plate is installed in module；
High temperature pressure head, the high temperature pressure head are installed on one end of the pressure head installing plate；
Mounting seat, the mounting seat are connected to the one end of the bottom plate along its length, and the length of the mounting seat
It is oriented parallel to the width direction of the bottom plate；X is equipped in the mounting seat along its length to moving guide rail, the X to
X is slidably connected on moving guide rail to movable plate, the X to movable plate described in X to driving device drives edge X to moving guide rail
It reciprocatingly slides, the X is equipped with Y-direction moving guide rail to movable plate, and the length direction of the Y-direction moving guide rail is perpendicular to the bottom
The in-plane of plate slidably connects Y-direction movable plate on the Y-direction moving guide rail, and the Y-direction movable plate is by Y-direction driving device
Y-direction moving guide rail reciprocatingly slides described in drives edge；
Two-dimensional piezoelectric ceramic module, the two-dimensional piezoelectric ceramic module include setting up and down and connection X to piezoelectric ceramics module
With Y-direction piezoelectric ceramics module, the two-dimensional piezoelectric ceramic module is set on the Y-direction movable plate, the two-dimensional piezoelectric ceramics
Module connects force sensor by piezoelectric ceramics module upper plate, and heat insulation pedestal is connected on the force snesor；
Sample stage, the sample stage are connected in the heat insulation pedestal, and the sample stage is equipped with heater to heat the sample
Sample platform；And
Controller, the X communicate to driving device, the Y-direction driving device and the Z-direction driving device with the controller
Connection, the controller communicate to connect respectively with the force snesor and the heater.
2. mini type high temperature impression mechanics performance test apparatus according to claim 1, it is characterised in that：The Z-direction driving
Device includes Z-direction motor, and the Z-direction motor is connected to by Z-direction motor fixing seat on the bottom plate, the Z-direction motor output
Axis is connected with Z-direction precision adjusting screw by shaft coupling, and the Z-direction precision adjusting screw is threaded with a Z-direction nut, described
Z-direction nut is fixedly connected with the Z-direction movable plate.
3. mini type high temperature impression mechanics performance test apparatus according to claim 1 or 2, it is characterised in that：Further include one
Grating displacement sensor is connected with displacement sensor sliding panel, the grating position on the Z-direction movable plate by the first fixed plate
The reading head of displacement sensor is set on institute's displacement sensors sliding panel, and the scale of the grating sensor is set to a displacement
On sensor fixation plate, institute's displacement sensors sliding panel is slidably connected, and the displacement with institute displacement sensors fixed plate
Sensor fixation plate is connected to by the second fixed plate on the bottom plate.
4. mini type high temperature impression mechanics performance test apparatus according to claim 3, it is characterised in that：The X is to driving
Device includes X to motor, and the X is connected to motor fixing seat in the mounting seat to motor by X, and the X is to motor
Output shaft be connected with an X to motor gear, the X is engaged with an X to screw gear to motor gear, and the X is to leading screw tooth
Wheel is fixedly connected with an X to accurate adjusting screw, axial direction from the X to accurate adjusting screw and axis from the X to motor
To direction each parallel to the width direction of the bottom plate, and the X is threaded with an X to nut, institute to accurate adjusting screw
It stating X and is fixedly connected on X on nut installing plate to nut, the X is connected to the X on movable plate to nut installing plate, and
The X is freely sheathed on the X outside motor to nut installing plate and being capable of being free to move axially along the X to motor.
5. mini type high temperature impression mechanics performance test apparatus according to claim 4, it is characterised in that：The Y-direction driving
Device includes Y-direction motor, and the Y-direction motor is connected to by Y-direction motor fixing seat on the bottom plate, the Y-direction motor it is defeated
Shaft is connected with a Y-direction motor gear, and the Y-direction motor gear is engaged with a Y-direction screw gear, and the Y-direction screw gear is consolidated
Surely it is connected with the axial direction side of a Y-direction precision adjusting screw, the axial direction of the Y-direction precision adjusting screw and the Y-direction motor
To the bottom plate is each perpendicular to, and the Y-direction precision adjusting screw is threaded with a Y-direction nut, the Y-direction nut, which is fixed, to be connected
It is connected on Y-direction nut installing plate, the Y-direction nut installing plate is connected on the Y-direction movable plate, and the Y-direction nut is installed
Plate is freely sheathed on outside the Y-direction motor and being capable of being free to move axially along the Y-direction motor.
6. mini type high temperature impression mechanics performance test apparatus according to claim 1, it is characterised in that：The pressure head installation
Plate is equipped with aluminium radiator structure, and the aluminium radiator structure and the pressure head installing plate pass through mounting screw and the Z-direction piezoelectricity
Ceramic module connects, and multiple thermal insulation ceramics bushings, each institute are equipped between the pressure head installing plate and the Z-direction piezoelectric ceramics module
It states after mounting screw both passes through a thermal insulation ceramics bushing and is connect with the Z-direction piezoelectric ceramics module.
7. mini type high temperature impression mechanics performance test apparatus according to claim 1, it is characterised in that：The sample stage one
End is equipped with a fixed column, and the fixed column is equipped with the heater, and the heater is heating tungsten filament, the sample stage connection
When the outer end of the heat insulation pedestal, the fixed column is stretched in the heat insulation pedestal, and the heat insulation pedestal is made pottery for zirconium oxide
Porcelain pedestal, the sample stage are alumina sample platform；Be additionally provided with temperature sensor on the sample stage, the temperature sensor with
The controller communication connection.
8. mini type high temperature impression mechanics performance test apparatus according to claim 6, it is characterised in that：The thermal insulation ceramics
Bushing be zirconia ceramics bushing, the bottom plate be red copper bottom plate, the mounting seat be stainless steel base, the high temperature pressure head
For infusibility molybdenum alloy pressure head, the high temperature indenter tip is Diamond tip.
9. mini type high temperature impression mechanics performance test apparatus according to claim 5, it is characterised in that：The Z-direction movement
Guide rail is dual crossing roller rail, and the X is to the screw pitch, the screw pitch of the Y-direction precision adjusting screw and institute of accurate adjusting screw
The screw pitch for stating Z-direction precision adjusting screw is 200~300 microns.
10. mini type high temperature impression mechanics performance test apparatus according to claim 1, it is characterised in that：Further include a top
Plate, the top plate are connected to bottom plate one end along its length and opposite with the mounting seat are arranged in parallel.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810049816.1A CN108181183B (en) | 2018-01-18 | 2018-01-18 | Small-size high temperature indentation mechanical properties test equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810049816.1A CN108181183B (en) | 2018-01-18 | 2018-01-18 | Small-size high temperature indentation mechanical properties test equipment |
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| CN108181183B CN108181183B (en) | 2023-10-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109545274A (en) * | 2018-12-26 | 2019-03-29 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum big stroke precision piezoelectric position moving stage and its installation method |
| CN112665974A (en) * | 2021-02-08 | 2021-04-16 | 上海中研仪器制造有限公司 | Portable mechanical property testing machine |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297082A (en) * | 2014-09-25 | 2015-01-21 | 吉林大学 | In-situ micro-nano indentation/scratch tester |
| CN104697872A (en) * | 2015-01-12 | 2015-06-10 | 吉林大学 | Method and device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation |
| CN104729911A (en) * | 2015-03-11 | 2015-06-24 | 吉林大学 | In-situ micro-nano indentation/scratch test platform and test method |
| CN105021478A (en) * | 2015-07-29 | 2015-11-04 | 吉林大学 | Mini-type precise in-situ nano impression and scratching testing device |
| CN106768770A (en) * | 2017-03-03 | 2017-05-31 | 吉林大学 | A kind of linear rolling guide damper reliability test bench and test method |
| CN206696110U (en) * | 2017-05-08 | 2017-12-01 | 北京东方德兴科技有限公司 | High temperature scratching instrument |
| US20180180521A1 (en) * | 2015-07-17 | 2018-06-28 | Jilin University | Material in-situ detection device and method under multi-load and multi-physical field coupled service conditions |
| CN207689287U (en) * | 2018-01-18 | 2018-08-03 | 北京工业大学 | A kind of mini type high temperature impression mechanics performance test apparatus |
-
2018
- 2018-01-18 CN CN201810049816.1A patent/CN108181183B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297082A (en) * | 2014-09-25 | 2015-01-21 | 吉林大学 | In-situ micro-nano indentation/scratch tester |
| CN104697872A (en) * | 2015-01-12 | 2015-06-10 | 吉林大学 | Method and device for testing continuous thermoregulation high-vacuum low-temperature micro nanoindentation |
| CN104729911A (en) * | 2015-03-11 | 2015-06-24 | 吉林大学 | In-situ micro-nano indentation/scratch test platform and test method |
| US20180180521A1 (en) * | 2015-07-17 | 2018-06-28 | Jilin University | Material in-situ detection device and method under multi-load and multi-physical field coupled service conditions |
| CN105021478A (en) * | 2015-07-29 | 2015-11-04 | 吉林大学 | Mini-type precise in-situ nano impression and scratching testing device |
| CN106768770A (en) * | 2017-03-03 | 2017-05-31 | 吉林大学 | A kind of linear rolling guide damper reliability test bench and test method |
| CN206696110U (en) * | 2017-05-08 | 2017-12-01 | 北京东方德兴科技有限公司 | High temperature scratching instrument |
| CN207689287U (en) * | 2018-01-18 | 2018-08-03 | 北京工业大学 | A kind of mini type high temperature impression mechanics performance test apparatus |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109545274A (en) * | 2018-12-26 | 2019-03-29 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum big stroke precision piezoelectric position moving stage and its installation method |
| CN109545274B (en) * | 2018-12-26 | 2023-08-25 | 仪晟科学仪器(嘉兴)有限公司 | Large-stroke precision piezoelectric displacement table for ultrahigh vacuum and mounting method thereof |
| CN112665974A (en) * | 2021-02-08 | 2021-04-16 | 上海中研仪器制造有限公司 | Portable mechanical property testing machine |
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| CN108181183B (en) | 2023-10-20 |
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