CN206696110U - High temperature scratching instrument - Google Patents
High temperature scratching instrument Download PDFInfo
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- CN206696110U CN206696110U CN201720506096.8U CN201720506096U CN206696110U CN 206696110 U CN206696110 U CN 206696110U CN 201720506096 U CN201720506096 U CN 201720506096U CN 206696110 U CN206696110 U CN 206696110U
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Abstract
The utility model discloses a kind of high temperature scratching instrument, its drip irrigation device is:Including scratching instrument main body, cut test device, pressue device, XY things platform and cut image collecting device for fixing and moving horizontally sample for driving cut test device to move up and down.The heater for heating sample is fixed with XY thing platforms, cut test device includes the capstan head that can be rotated, support bar is fixedly installed on capstan head, the end of support bar is hinged with pressure head, cut image collecting device includes optical system and the object lens being fixed on capstan head, object lens are symmetrical on the axis of capstan head with pressure head, pressue device includes the crossbeam being fixedly connected with cut test device, the path channels passed through for the incident light of the optical system are provided with crossbeam, path channels are arranged on the surface of sample, friction force checking device is fixedly installed in scratching instrument main body.The utility model can utilize itself observation of use instrument sample cut.
Description
Technical field
A kind of high temperature test instrument is the utility model is related to, more particularly to a kind of high temperature scratching instrument.
Background technology
Cut refers to that material locally resists the ability that hard thing is pressed into its surface, and different method of testings has different cut marks
It is accurate.Wherein, the cut value for delineating method measurement represents the ability of material resistance surface partial fracture.
Existing notification number is that CN202710451U Chinese patent discloses a kind of scratching instrument, and the scratching instrument utilizes diamond
Scriber scribing specimen surface during gradual loaded load, untill being loaded into maximum required loading force.By right
The pattern of cut is detected and analyzed, and can calculate the cut of material.
However, above-mentioned scratching instrument be only capable of specimen surface formed cut, and can not utilize itself observation of use instrument cut, it is necessary to
Cut pattern could be observed by being equipped with other instruments.
Utility model content
The purpose of this utility model is to provide a kind of high temperature scratching instrument, and its advantage is easy for utilizing itself observation of use instrument sample
Cut.
Above-mentioned technical purpose of the present utility model technical scheme is that:
A kind of high temperature scratching instrument, it is characterised in that:Including scratching instrument main body, cut test device, for driving cut to survey
The pressue device moved up and down, XY things platform and cut image collecting device for fixing and moving horizontally sample are put in trial assembly,
The heater for heating sample is fixed with the XY things platform, the cut test device includes the capstan head that can be rotated,
Support bar is fixedly installed on the capstan head, the end of the support bar is hinged with pressure head, the cut image collecting device bag
Optical system and the object lens being fixed on capstan head are included, the object lens and axis of the pressure head along the capstan head are symmetrical, described
Pressue device includes the crossbeam being fixedly connected with the cut test device, is provided with the crossbeam for the optical system
The path channels that incident light passes through, the path channels are arranged on the surface of sample, are fixedly installed in the scratching instrument main body
There is supporting plate, one end of the supporting plate is fixed with pin, the wall contacts of the pin and the pressure head.
Pass through above-mentioned technical proposal, after pressure head completes delineation work, and object lens are turned to immediately below path channels, optics
System, path channels, object lens and sample form path, and the incident light of optical system can project scratching instrument master by path channels
Body, and be irradiated on sample, optical system and object lens coordinate the IMAQ work of completion cut.Pin there is support to make pressure head
With, while limit pressure head and rotated along pin joint, prevent pressure head from departing from specimen surface.
The utility model is further arranged to:The optical system include narrow-band light source, several be used for focus on filter
Filter glass, enocscope and the CCD modules being connected with computer.
Pass through above-mentioned technical proposal, focus on the light after filtering and reflected through enocscope into light straight down, the light
Scratching instrument main body is projected by path channels, and sample cut surface is radiated at by object lens.After being reflected through sample cut surface
The light launched at high temperature with sample cut of light together reflected by object lens and path channels, after line focus filters
Into in module, finally transmit to computer and carry out cut IMAQ work, and carry out cut value calculating.
The utility model is further arranged to:The light source is narrow-band light source.
Pass through above-mentioned technical proposal, ensure sample cut can in object lens blur-free imaging.
The utility model is further arranged to:Protective cover is provided with the capstan head, water cooling is provided with the protective cover
Layer, the liquid for cooling down the object lens is connected with the water-cooled layer, is provided with outer cover on the outside of the object lens, it is embedding on the outer cover
Equipped with diathermic mirror.
Pass through above-mentioned technical proposal, the heat radiation that sends out of diathermic mirror isolation heater, the liquid in water-cooled layer
The heat come out is absorbed, to protect object lens not influenceed by the high temperature of heater.
The utility model is further arranged to:Radially vertically worn on the crossbeam and be fixed with linear bearing, it is described straight
Bobbin is equipped with support shaft in holding, and the support shaft is fixed in scratching instrument main body vertically.
Pass through above-mentioned technical proposal, support shaft are played a supporting role to crossbeam, at the same limit crossbeam can not be with respect to scratching instrument
Main body horizontal movement, in the presence of linear bearing, crossbeam only can be along the axial slip of support shaft.
The utility model is further arranged to:The pressue device includes being threadedly coupled with the crossbeam by feed screw nut
The first leading screw, first leading screw is connected with the scratching instrument main body by bearing, is provided with below first leading screw
The servomotor for driving it to rotate.
Pass through above-mentioned technical proposal, when servomotor works, servomotor drives the first leading screw to rotate, the first leading screw band
Move and axial movement of the crossbeam that it is threadedly coupled along the first leading screw.
The utility model is further arranged to:The groove for placing sample is provided with the heater.
Pass through above-mentioned technical proposal, sample are placed in groove, and then the position of sample is fixed.
The utility model is further arranged to:The scratching instrument body exterior sets promising high temperature scratching instrument to provide pure gas
The atmosphere room of body, the atmosphere room include the air control of glove box and the control glove box internal oxygen and vapour concentration
Device, it is provided with outside the glove box to the argon bottle that argon gas is provided inside the glove box.
Pass through above-mentioned technical proposal, air controller control the concentration of the oxygen and steam inside glove box, make the two dense
Degree is respectively less than 1PPM.Argon gas is delivered to inside glove box by argon bottle by flexible pipe, makes to be full of chemical property not inside glove box
Active argon gas, prevents test button to be oxidized.
The utility model is further arranged to:It is provided with the pin and the pin is applied for detecting the pressure head
The sensor of pressure size.
Pass through above-mentioned technical proposal, because pressure head and support bar are hinged, and pressure head contradicts with sample so that pressure head moves in sample
The trend rotated along pin joint is produced in dynamic process.Because pin limitation pressure head rotates along pin joint so that pressure head is applied to pin
Plus-pressure.The pressure value that sensor record pressure head on pin applies to pin, so by lever principle calculate pressure head with
Friction force value between sample.
In summary, the utility model has the advantages that:
(1)Pressure head is hinged with support bar, and when XY things platform drives the sample contradicted with pressure head to move, pin gives pressure head branch
Support and limit pressure head along be hinged point articulated, pressure head is contradicted all the time with specimen surface, and cut is formed in specimen surface;
(2)During the support of pressure head is given, the sensor record pressure head on pin passes through pin to the pressure of pin
Lever principle calculates the friction force value between pressure head and specimen surface;
(3)After object lens are turned to immediately below optical channel, object lens and optical system form path, and object lens and optical system are altogether
Same-action, imaging specimens are transmitted to CCD modules, and then deliver to computer and observed and analyzed;
(4)Water-cooled layer and diathermic mirror on capstan head play a protective role to object lens, to protect object lens not by heater
High temperature influence.
Brief description of the drawings
Fig. 1 is the structural representation of the present embodiment;
Fig. 2 is the schematic diagram that the 3rd lead screw position is embodied in the present embodiment;
Fig. 3 is sectional views of the Fig. 2 along line A-A;
Fig. 4 is the schematic diagram that turret structure is embodied in the present embodiment;
Fig. 5 is the schematic diagram that heater structure is embodied in the present embodiment;
Fig. 6 is the schematic diagram that radiating hole site is embodied in the present embodiment;
Fig. 7 is the schematic diagram that U-shaped water pipe structure is embodied in the present embodiment;
Fig. 8 is the schematic diagram that optical system principle is embodied in the present embodiment.
In figure, 1, atmosphere room;11st, glove box;12nd, air controller;13rd, argon bottle;2nd, scratching instrument main body;21st, crossbeam;
211st, linear bearing;212nd, support shaft;213rd, path channels;22nd, the first leading screw;23rd, servomotor;3rd, cut test device;
31st, capstan head;311st, support bar;312nd, protective cover;313rd, water-cooled layer;32nd, pressure head;4th, heater;41st, heating unit;411、
Box body;4111st, groove;412nd, cover plate;4121st, through hole;413rd, latch;414th, Si-Mo rod;4141st, heater;415th, thermal insulation separation
Hot material;42nd, cooling unit;421st, heat emission hole;422nd, water inlet;423rd, delivery port;424th, U-shaped water pipe;5th, XY things platform;51、
Second leading screw;52nd, the 3rd leading screw;6th, rub force checking device;61st, supporting plate;62nd, pin;7th, cut image collecting device;
71st, object lens;711st, outer cover;712nd, diathermic mirror;72nd, optical system;721st, narrow-band light source;722nd, filter glass;723rd, refractive power
Mirror;724th, CCD modules.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.Wherein identical parts identical accompanying drawing
Mark represents.It should be noted that the word "front", "rear", "left", "right", the "up" and "down" that are used below in description refer to
It is the direction in accompanying drawing 1, word " bottom surface " and " top surface ", " interior " and " outer " are referred respectively to towards or away from particular elements geometry
The direction at center.
Embodiment:A kind of high temperature scratching instrument, as shown in figures 1 and 3, including atmosphere room 1, be arranged in atmosphere room 1 draw
Trace instrument main body 2, the cut test device 3 being arranged in scratching instrument main body 2, it is arranged in scratching instrument main body 2 and for heating examination
The heater 4 of sample, XY things platform 5, friction force checking device 6 and the cut image collecting device for driving heater 4 to move
7。
As shown in figure 1, atmosphere room 1 includes glove box 11, the air controller 12 inside glove box 11 and positioned at hand
Argon bottle 13 outside casing 11.Air controller 12 is used for the concentration for controlling oxygen and steam inside glove box 11, makes two
Person's concentration is respectively less than 1PPM.Argon gas is delivered to inside glove box 11 by argon bottle 13 by flexible pipe, is full of the inside of glove box 11
The inactive argon gas of chemical property, prevents test button to be oxidized.
As shown in Figures 2 and 3, horizontal crossbeam 21 and the first vertical leading screw 22 are provided with scratching instrument main body 2.Crossbeam
Radially vertically worn on 21 and be fixed with two linear bearings 211, be equipped with linear bearing 211 and slid with linear bearing 211
The support shaft 212 of connection.Support shaft 212 is fixed in scratching instrument main body 2 vertically, and support shaft 212 plays support to crossbeam 21 and made
With, at the same limit crossbeam 21 can not be with respect to the horizontal movement of scratching instrument main body 2.In the presence of linear bearing 211, crossbeam 21 only may be used
Along the axial slip of support shaft 212.
The upper end of first leading screw 22 is threadedly coupled by feed screw nut with crossbeam 21, and the first leading screw 22 passes through bearing and cut
Instrument main body 2 connects, and the first leading screw 22 can rotate relative to scratching instrument main body 2.The underface of first leading screw 22 is provided with servomotor
23, the output shaft of servomotor 23 is fixedly connected by shaft coupling with the first leading screw 22, and servomotor 23 drives the first leading screw 22
Rotate.
When servomotor 23 works, servomotor 23 drives the first leading screw 22 to rotate, and the first leading screw 22 drives and its spiral shell
Axial movement of the crossbeam 21 of line connection along the first leading screw 22, while axial slip of the linear bearing 211 along support shaft 212, enter
And crossbeam 21 is adjusted in the position of vertical direction.
As shown in Figure 3 and Figure 4, cut test device 3 includes capstan head 31 and pressure head 32.The main shaft of capstan head 31 by bearing with
Crossbeam 21 is rotatablely connected.The top of capstan head 31 is provided with motor, and the output shaft of the motor is fixedly connected by shaft coupling with main shaft,
To drive capstan head 31 to rotate.
Vertical support bar 311 is fixed with capstan head 31, the upper end and the bottom of support bar 311 of pressure head 32 are hinged.
To make pressure head 32 meet need of work, it is not damaged because of the high temperature of heater 4, herein from diamond penetrator 32, to adapt to
Scratch detection under high temperature.
When servomotor 23 works, crossbeam 21 is vertically movable, and then drives cut test device 3 along vertical
Direction is moved, and adjusts capstan head 31 and pressure head 32 in the position of vertical direction.
As shown in Figures 2 and 3, the XY things platform 5 for driving heater 4 to move is arranged at the lower section of capstan head 31, under XY things platform 5
Side is vertically fixed to be rotated by motor-driven second leading screw 51, the second leading screw of motor task driven 51, and then adjusts XY things platform 5
Position vertically.Two groups of drive mechanisms of the horizontal level of XY things platform 5 can be adjusted by being separately provided with XY things platform 5.Wherein
One group of drive mechanism is made up of the motor of the 3rd leading screw 52 of the 3rd leading screw 52 and driving, the output shaft of the motor by shaft coupling with
3rd screw mandrel 52 connects, and this drive mechanism can control XY things platform 5 along X-direction(Refer to the left and right directions in Fig. 1)It is mobile.Another group
Drive mechanism is identical with the structure of the drive mechanism, for controlling XY things platform 5 along Y direction(Refer to the fore-and-aft direction in Fig. 1)Move
It is dynamic.
As shown in Figure 2 and Figure 5, heater 4 is fixedly installed on the top of XY things platform 5, and heater 4 includes heating unit 41
With the cooling unit 42 positioned at the both sides of heating unit 41.
As shown in figure 5, heating unit 41 includes an open-topped box body 411, the top of box body 411 is provided be hinged with it
Cover plate 412, the side relative with the hinged place is provided with lock 413 on box body 411, and lock 413 is used for cover plate 412 and box
Body 411 is locked.The centre position of the bottom of box body 411 is provided with groove 4111, and groove 4111 is used to place test specimens to be checked, cover plate
The through hole 4121 for extending vertically through its upper and lower surface is provided with 412.When testing sample, pressure head 32 can pass through through hole 4121
Box body 411 is stretched into, the sample being pointed in groove 4111 carries out scribing.
The calandria of promising sample heating is set in box body 411, and calandria includes but is not limited to the Si-Mo rod 414 of U-shaped, silicon
The both ends of molybdenum bar 414 extend to the cooling unit 42 of the side of heating unit 41, and are passed from the cooling unit 42, with being fixed on this
Connected in the side wall of cooling unit 42 and for the heater 4141 that Si-Mo rod 414 heats.Si-Mo rod 414 is surrounded on the outer of groove 4111
Circle, and the sample inside groove 4111 is heated in a manner of around heating.The outer ring of Si-Mo rod 414 and the inwall of box body 411
Between be filled with heat preserving and insulating material 415, for preventing the heat of Si-Mo rod 414 to scatter and disappear to glove box 11, ensure Si-Mo rod
414 heat will not have an impact to other devices in glove box 11.Vertical range between cover plate 412 and Si-Mo rod 414
Not less than 5mm, so that interval forms air layer therebetween, scattering and disappearing for heat is prevented.
As shown in Figure 6 and Figure 7, some heat emission holes 421 are provided with the side wall of cooling unit 42, heat emission hole 421 is used to discharge
High-temperature gas in cooling unit 42.The box body 411 of heating unit 41 and the hollow stream that the U-shaped connected is provided with cooling unit 42
Road, and the water inlet 422 and delivery port 423 connected with hollow flow passage is provided with the side wall of cooling unit 42.Hollow flow passage
Inside be provided with U-shaped water pipe 424, the both ends of U-shaped water pipe 424 are stretched out from water inlet 422 and delivery port 423 respectively, and with external water
Pipe connects.Cold water in external water pipe flows into U-shaped water pipe 424 via water inlet 422, carries out recirculated water to heating unit 41 afterwards
Cooling, is flowed out by delivery port 423 again afterwards, and the hot water after heat exchange is drawn into heater 4.In the mistake that heating unit 41 works
Cheng Zhong, cold water is connected with all the time in U-shaped water pipe 424, to realize the circulating water to heater 4, to prevent the mistake of heater 4
Heat and test specimen and related facility are caused damage.
As shown in figure 3, friction force checking device 6 is fixed in scratching instrument main body 2.Friction force checking device 6 can detect X
The frictional force of direction of principal axis, can also detect the frictional force of Y direction, and the friction force checking device 6 in the present embodiment is used to detect Y
The frictional force of direction of principal axis.
Friction force checking device 6 includes a supporting plate 61, and supporting plate 61 is located at the outside of capstan head 31 and away from scratching instrument main body
2, supporting plate 61 is located in the vertical plane of X-direction, and the upper end of supporting plate 61 is fixed in scratching instrument main body 2.Supporting plate 61
Lower end is fixed with the pin 62 of belt sensor, and pin 62 is vertical with supporting plate 61 and is located in the vertical plane of Y direction, pin 62
One end contacted with pressure head 32.
When high temperature scratching instrument works, pressure head 32 contradicts sample straight down, and at the uniform velocity loaded load of starting from scratch.Adding
During carrying load, XY things platform 5 is moved under the drive of drive mechanism with the direction away from scratching instrument main body 2 along Y-axis so that
Sample in heater 4 moves along Y-axis.Because pressure head 32 and support bar 311 are be hinged, and pressure head 32 contradicts with sample, makes
Obtain pressure head 32 and the trend rotated along pin joint is produced during sample moves.Turn because pin 62 limits pressure head 32 along pin joint
It is dynamic so that pressure head 32 applies pressure to pin 62.The pressure value that sensor record pressure head 32 on pin 62 applies to pin 62,
And then calculate the friction force value between pressure head 32 and sample.
After the loaded load of pressure head 32 reaches setting value, pressure head 32 stops loading, and XY things platform 5 stops movement, pressure head 32
Complete scribing work.Now pressure head 32 no longer applies pressure to pin 62, the sensor stop recording on pin 62, frictional force inspection
Device 6 is surveyed to be stopped.Pressure head 32 upwards simultaneously away from heater 4, cut image collecting device 7 start working by motion afterwards.
Cut image collecting device 7 includes the object lens 71 being fixed in capstan head 31 and the light being arranged in scratching instrument main body 2
System 72.The path channels 213 passed through for the incident light of the optical system 72, path channels 213 are provided with crossbeam 21
It is arranged on the surface of sample.Object lens 71 are symmetrical on the axis of capstan head 31 with pressure head 32.
As shown in figure 4, in order to ensure that object lens 71 will not be by heater 4(See Fig. 3)The heat distributed injures, on capstan head 31
Protective cover 312 is provided with, and water-cooled layer 313 is internally provided with protective cover 312.The camera lens periphery of object lens 71 is covered with protective glass head
Outer cover 711, in same level, outer cover 711 can prevent water for the lower surface of outer cover 711 and the lower surface of protective cover 312
Liquid pollution camera lens in cooling layer 313.One piece of diathermic mirror 712 is embedded with outer cover 711, diathermic mirror 712, which can isolate, to be added
The heat distributed in thermal 4, while object lens 71 can see the object of the outside of protective cover 312 by diathermic mirror 712, with side
Just sample cut is observed.Diathermic mirror 712 isolates the heat radiation that sends out of heater 4, and the liquid in water-cooled layer 313 is taken away
The heat that capstan head 31 receives, to protect object lens 71 not influenceed by the high temperature of heater 4.
After pressure head 32 completes scribing work, capstan head 31 rotates the underface and just for making object lens 71 go to path channels 213
To sample.Under the collective effect of object lens 71 and optical system 72, the IMAQ work to sample cut is completed.
As shown in figure 8, optical system 72 include narrow-band light source 721, several filter glass 722, enocscope 723 and with
The CCD modules 724 of computer connection.Narrow-band light source 721 sends out the light of horizontal single wavelength(Selected in the present embodiment
405 nano narrow band light sources), single-frequency light further focuses in the presence of several filter glass 722, at the same filter off be not belonging to it is narrow
Other with light source 721 interfere light, and the light after focusing optical filtering reflects into light straight down, the light through enocscope 723
Line projects scratching instrument main body 2 by path channels 213, and is radiated at sample cut surface by object lens 71.Through sample cut table
The light that light after the reflection of face is launched at high temperature with sample cut is together reflected back by object lens 71 and path channels 213
Come, line focus enters in CCD modules 724 after filtering, and finally transmits to computer and carries out cut IMAQ work, and is drawn
Trace value calculates.
As shown in figures 3 and 8, when pressure head 32 delineate test specimen when, the face sample of pressure head 32 and positioned at path channels 213 just under
Side, the passage between path channels 213 and sample is blocked, narrow-band light source 721 can not get to light on sample, not start now
Cut IMAQ works.After pressure head 32 completes delineation work, and object lens 71 are turned to immediately below path channels 213, arrowband
Light source 721, filter glass 722, enocscope 723, path channels 213, object lens 71, sample and CCD modules 724 form path, narrow
The illumination sent with light source 721 is mapped to specimen surface and is reflected to CCD modules 724, and optical system 72 and object lens 71 coordinate completion
Cut IMAQ works.
The course of work:
The first step, oxygen and vapour concentration in atmosphere room 1 are adjusted, and be passed through argon gas, it is met condition of work;
Second step, the second leading screw 51 is adjusted, the vertical height of XY things platform 5 is met condition of work;
Second step, the cover plate 412 on heating unit 41 is opened, by sample fixed placement in groove 4111, covers cover plate
412 and by the locking heating units 41 of lock 413, heater 4141 begins to warm up Si-Mo rod 414, and Si-Mo rod 414 enters to sample
Row heating;Simultaneously toward recirculated cooling water is passed through in U-shaped water pipe 424, water cooling unit is set to proceed by cooling work;
3rd step, after heating-up temperature reaches preset value, servomotor 23 drives the first leading screw 22 to rotate, and makes capstan head 31 perpendicular
Directly move downward, the through hole 4121 on the face cover plate 412 of pressure head 32, the position of fine setting XY things platform 5, make sample and the face of pressure head 32;
4th step, to the at the uniform velocity loaded load of pressure head 32, while make XY things platform 5 with the direction away from scratching instrument main body 2 along Y-axis
It is mobile, specimen surface is produced a cut, while the force checking device 6 that rubs works and records what pressure head 32 applied to pin 62
Pressure value;
5th step, after the loaded load of pressure head 32 reaches setting value, pressure head 32 stops loading, and XY things platform 5 stops movement,
Pressure head 32 completes delineation work, and capstan head 31 rotates and makes the face sample cut of object lens 71;
6th step;Cut image collecting device 7 is started working, and cut image is transmitted to calculating by CCD modules 724
In machine, computer carries out the cut value of sample at high temperature according to cut image and calculated.
This specific embodiment is only that it is not to limitation of the present utility model, ability to explanation of the present utility model
Field technique personnel can make the modification of no creative contribution to the present embodiment as needed after this specification is read, but
As long as all protected in right of the present utility model by Patent Law.
Claims (9)
- A kind of 1. high temperature scratching instrument, it is characterised in that:Including scratching instrument main body(2), cut test device(3), for drive draw Trace test device(3)The pressue device moved up and down, the XY thing platforms for fixing and moving horizontally sample(5)And cut image Harvester(7), the XY things platform(5)On be fixed with heater for heating sample(4), the cut test device (3)Including the capstan head that can be rotated(31), the capstan head(31)On be fixedly installed support bar(311), the support bar(311) End be hinged with pressure head(32), the cut image collecting device(7)Including optical system(72)Be fixed on capstan head(31) On object lens(71), the object lens(71)With the pressure head(32)Along the capstan head(31)Axis it is symmetrical, it is described pressurization dress Put including with the cut test device(3)The crossbeam being fixedly connected(21), the crossbeam(21)On be provided with for the optics System(72)The path channels that pass through of incident light(213), the path channels(213)The surface of sample is arranged on, it is described Scratching instrument main body(2)On be fixedly installed supporting plate(61), the supporting plate(61)One end be fixed with pin(62), the gear Bar(62)With the pressure head(32)Wall contacts.
- 2. high temperature scratching instrument according to claim 1, it is characterized in that:The optical system(72)Including narrow-band light source (721), several be used for focus on filter filter glass(722), enocscope(723)The CCD modules being connected with computer (724).
- 3. high temperature scratching instrument according to claim 2, it is characterized in that:The narrow-band light source(721)For narrow-band light source (721).
- 4. high temperature scratching instrument according to claim 1, it is characterized in that:The capstan head(31)On be provided with protective cover, it is described Water-cooled layer is provided with protective cover(313), the water-cooled layer(313)Inside it is connected with for cooling down the object lens(71)Liquid, institute State object lens(71)Outside is provided with outer cover(711), the outer cover(711)It is upper to be embedded with diathermic mirror(712).
- 5. high temperature scratching instrument according to claim 1, it is characterized in that:The crossbeam(21)On radially vertically wear fixation There is linear bearing(211), the linear bearing(211)Inside it is equipped with support shaft(212), the support shaft(212)It is vertical fixed In scratching instrument main body(2)On.
- 6. high temperature scratching instrument according to claim 5, it is characterized in that:The pressue device includes passing through feed screw nut and institute State crossbeam(21)First leading screw of threaded connection(22), first leading screw(22)Pass through bearing and the scratching instrument main body(2) Connection, first leading screw(22)Lower section be provided with driving its rotate servomotor(23).
- 7. high temperature scratching instrument according to claim 1, it is characterized in that:The heater(4)Inside it is provided with for placing The groove of sample(4111).
- 8. high temperature scratching instrument according to claim 1, it is characterized in that:The scratching instrument main body(2)Outside sets promising height Warm scratching instrument provides the atmosphere room of clean gas(1), the atmosphere room(1)Including glove box(11)And the control glove box (11)The air controller of internal oxygen and vapour concentration(12), the glove box(11)Outside is provided with to the glove box (11)Inside provides the argon bottle of argon gas(13).
- 9. high temperature scratching instrument according to claim 1, it is characterized in that:The pin(62)On be provided with it is described for detecting Pressure head(32)To the pin(62)Apply the sensor of pressure size.
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CN108181183A (en) * | 2018-01-18 | 2018-06-19 | 北京工业大学 | A kind of mini type high temperature impression mechanics performance test apparatus |
CN108181183B (en) * | 2018-01-18 | 2023-10-20 | 北京工业大学 | Small-size high temperature indentation mechanical properties test equipment |
CN109612842A (en) * | 2018-11-22 | 2019-04-12 | 浙江大学 | A kind of high temperature ballast of silicon wafer and its application |
CN110646313A (en) * | 2019-11-04 | 2020-01-03 | 郑州大学 | Self-propelled portable scratch instrument for online detection of in-service materials |
CN111089788A (en) * | 2020-02-13 | 2020-05-01 | 山东宗德机电设备有限公司 | Scalable anti-gas wave heat-insulating device of high temperature sclerometer |
CN114323920A (en) * | 2021-12-31 | 2022-04-12 | 华侨大学 | High-temperature scratch instrument |
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