CN104007028B - Micro-member tensile test device - Google Patents

Abstract

The utility model relates to a micro-component tensile testing device, relating to a micro-component mechanical property testing device. The invention can realize the measurement of the static parameters of the mechanical properties of the micron-scale components and the exploration of the fatigue characteristics. The two guide rails are fixed on the L-shaped base; the precision drive unit is fixed on the right loading platform, the moving stage is fixedly connected with the precision driving unit, and there is a positioning groove for fixing micro components on the static and moving stages. The stage is fixedly connected to the micro force sensor, the micro force sensor is fixed to the force sensor fixed block, the force sensor fixed block is fixed to the left loading platform, the grating scale is installed on the front or rear side of the precision drive unit, and the right loading platform The reading head installation frame is fixed, and the degree head is fixed on the reading head installation frame; the right loading platform is fixedly connected with the screw nut of the screw nut pair, and the right loading platform is slidingly connected with two guide rails through four right sliders. The stepper motor drives the lead screw nut pair to move, and the left loading platform is fixed relative to the guide rail. The invention is used for testing the mechanical properties of micro components.

Description

Micro-component tensile testing device

technical field

The invention relates to a device for testing the mechanical properties of micro components.

Background technique

The highly elastic alloy micro-components of the inertial navigation system are very easy to fracture and fail in the ground loading test, and the characteristic size of the micro-components in the inertial sensor is roughly in the range of submicron to millimeter. When it is micron/nanoscale, due to the size effect, the physical properties of the micro-component material itself and the degree to which it is affected by the environment will change greatly, and its mechanical properties and the relative relationship between the body force and surface force will also change. Significant changes will occur. The mechanical performance parameters of materials under macroscopic conditions are far from meeting the design requirements of MEMS system structures, and a series of technical problems caused by tiny test pieces make traditional testing methods and devices no longer applicable.

In recent years, scholars at home and abroad have paid more and more attention to the research on the mechanical properties of micro-component materials, and proposed some new testing methods and testing devices. However, the data measured by various methods are highly dispersed, and even the most basic modulus of elasticity does not have a consistent and recognized result. In micro-component design and reliability analysis, due to the lack of basic data on the mechanical properties of micro-component materials, an effective design criterion has not been established, resulting in low yield and poor reliability, which seriously hinders the development of MEMS.

The commonly used methods in testing the mechanical properties of materials include uniaxial tensile method, nanoindentation method, tympanic membrane method, microbeam bending method and substrate curvature method, etc. Among them, the most commonly used method is the uniaxial tensile method. The micro-tensile test is the most direct method to measure the elastic modulus, Poisson's ratio, yield strength and breaking strength of micron-scale materials. The data of the tensile test is easy to interpret, and the test results More reliable than bending experiments. However, due to the small size of the sample, a series of technical difficulties such as the centering, clamping, micro-displacement driving of micro-components, and the measurement of micro-load and micro-displacement make traditional testing methods and devices no longer applicable. At present, there is no uniform standard for testing devices, and most of the testing devices have complex structures, expensive instruments, and large dispersion of test data. How to minimize test errors, ensure accurate and consistent test results, improve test efficiency, and enable test data to be processed quickly for feedback monitoring or directly applied to production practice, these problems are difficulties that need to be overcome urgently for researchers It is also a challenge.

Contents of the invention

The purpose of the present invention is to provide a micro-component tensile testing device to realize the measurement of static parameters of mechanical properties of micro-scale components and the exploration of fatigue characteristics.

The technical scheme that the present invention solves the problems referred to above is:

The micro-component tensile testing device of the present invention includes a precision drive unit, a micro-force sensor, a linear grating measuring device, a high-precision electric stage, a stage, a force sensor fixing block, and two fixing pieces. The high-precision electric The moving table includes a left loading platform, a right loading platform, a screw nut pair, an L-shaped base, a support seat, a stepping motor, four left sliders, four right sliders, and two guide rails. The stage includes a moving object stage and a static stage, and the linear grating measuring device includes a grating ruler reading head installation frame, a reading head and a grating ruler,

The long plate of the L-shaped base is arranged horizontally, and the two guide rails are parallel to the long sides of the L-shaped base and fixed on the long plate of the L-shaped base; the left loading platform and the right loading platform are left and right Arranged side by side, the precision driving unit is fixed on the upper surface of the right loading platform, the moving loading platform is fixedly connected to the left side of the precision driving unit, and the static loading platform is adjacent to the moving loading platform And set correspondingly, the corresponding positions of the upper surface of the static stage and the moving stage are respectively processed with a positioning groove for fixing the micro components; the static stage, the micro force sensor and the force sensor fixing block are arranged from right to left They are sequentially arranged on the upper surface of the left loading platform, and the static loading platform is fixedly connected with the micro force sensor, the micro force sensor is fixedly connected with the force sensor fixed block, and the force sensor fixed block is fixedly connected with the upper surface of the left object loading platform. The grating ruler is installed on the front side or rear side of the precision drive unit, and the reading head installation frame is fixed on the side on the same side as the grating ruler on the right loading platform, and the degree head is set opposite to the grating ruler and fixed on the reading head. On the head mounting frame; the lower surface of the right loading platform is fixedly connected with the nut of the lead screw nut pair, one end of the lead screw of the lead screw nut pair is rotatably connected with the support seat, and the other end of the lead screw of the lead screw nut pair is connected to the L The short plate of the L-shaped base is rotatably connected, the support seat is fixedly connected with the long plate of the L-shaped base, the lower surface of the right loading platform is fixedly connected with four right sliders arranged in a rectangular shape, and the four right sliders slide with two guide rails connection, the stepper motor is fixed on the short plate of the L-shaped base, and the stepper motor drives the screw nut pair to move; the lower surface of the left loading platform is fixedly connected with four left sliders arranged in a rectangular shape, and the four The left slider is set on two guide rails, and there is a fixing piece fixedly connected with the guide rails between the two left sliders set on the same guide rail. During operation, the left loading platform is fixed relative to the guide rails, and the right loading platform Movement relative to the guide rail.

Compared with the prior art, the beneficial effect of the present invention is: the present invention can not only realize the micro-stretch static test of the micro-component, but also combine with the dynamic test, and use the precision drive unit to drive the moving stage to pull the micro-component at 0-4kHz Fatigue loading, reliable clamping of micro-components; high-precision force sensor (accuracy 5mN) to achieve accurate measurement of load; high-precision linear grating measurement device to achieve accurate detection of micro-displacement, with a resolution of 5nm, easy to install and debug. The device can not only realize the measurement of static parameters of micro-components, such as the measurement of elastic modulus, yield strength, and fracture strength, but also realize the exploration of fatigue characteristics, such as fatigue strength.

Description of drawings

Fig. 1 is the overall assembly drawing of micro-component tensile testing device of the present invention;

Fig. 2 is an assembly drawing of the precision drive unit in Fig. 1;

FIG. 3 is a partial enlarged view of A in FIG. 1 .

The names and labels of the components involved in the above figure are:

L-shaped base 1, stepping motor 2, support seat 3, force sensor fixed block 4, micro force sensor 5, static stage 6, micro component 7, moving stage 8, precision drive unit 9, flexible hinge 9-1 , Gasket 9-2, Steel Ball 9-3, Mounting Hole 9-4, Pretightening Screw 9-5, Piezoelectric Ceramic 9-6, Screw Nut Pair 10, Right Loading Platform 11, Right Slider 12, Grating Ruler reading head installation frame 13, guide rail 14, reading head 15, grating ruler 16, fixture 17, left slide block 18, left loading platform 19.

detailed description

As shown in Figures 1 to 3, the micro-component tensile testing device includes a precision drive unit 9, a micro force sensor 5, a linear grating measuring device, a high-precision electric stage, a stage, a force sensor fixed block 4, two Fixture 17, the high-precision electric shift table includes a left loading platform 19, a right loading platform 11, a screw nut pair 10, an L-shaped base 1, a support seat 3, a stepping motor 2, and four left sliders 18. Four right sliders 12, two guide rails 14, the described object stage includes a moving object stage 8 and a static object stage 6, and the described linear grating measuring device includes a grating ruler reading head mounting frame 13, a reading Head 15 and grating ruler 16,

The long plate of the L-shaped base 1 is arranged horizontally, and the two guide rails 14 are parallel to the long sides of the L-shaped base 1 and fixed on the long plate of the L-shaped base 1; the left loading platform 19 and The right loading platform 11 is arranged side by side, the precision driving unit 9 is fixed on the upper surface of the right loading platform 11, the moving loading platform 8 is fixedly connected to the left side of the precision driving unit 9, and the static The stage 6 is adjacent to the moving stage 8 and is arranged correspondingly. The corresponding positions of the upper surfaces of the static stage 6 and the moving stage 8 are respectively processed with a positioning groove for fixing the micro-component 7, and the micro-milling technology is used to , process the positioning groove; the static loading table 6, the micro force sensor 5 and the force sensor fixing block 4 are arranged on the upper surface of the left loading platform 19 from right to left, and the static loading table 6 and the micro force sensor 5 Fixedly connected, the micro force sensor 5 is fixedly connected with the force sensor fixed block 4, the force sensor fixed block 4 is fixedly connected with the upper surface of the left loading platform 19, and the grating ruler 16 is installed on the front side or the rear side of the precision drive unit 9 On the right loading platform 11, a reading head installation frame 13 is fixed on the side on the same side as the grating ruler 16, and the degree head 15 is arranged opposite to the grating ruler 16 and is fixed on the reading head installation frame 13; The lower surface of the right loading platform 11 is fixedly connected with the nut of the lead screw nut pair 10, one end of the lead screw of the lead screw nut pair 10 is rotatably connected with the support seat 3, and the other end of the lead screw of the lead screw nut pair 10 is connected with the L-shaped base The short plate of 1 is rotationally connected, the support base 3 is fixedly connected with the long plate of the L-shaped base 1, the lower surface of the right loading platform 11 is fixedly connected with four right sliders 12 arranged in a rectangular shape, and the four right sliders 12 are connected with Two guide rails 14 are slidingly connected to guide, and the stepping motor 2 is fixed on the short plate of the L-shaped base 1, and the stepping motor 2 drives the screw nut pair 10 to move; the lower surface of the left loading platform 19 is in contact with the Four left sliders 18 that are arranged in a rectangle are fixedly connected, and four left sliders 18 are arranged on two guide rails 14, and a fixed connection with guide rail 14 is installed between the two left sliders 18 on the same guide rail 14. As for the fixing part 17, the left object loading platform 19 is fixed relative to the guide rail 14 during work, and the right object loading platform 11 moves relative to the guide rail 14.

The micro force sensor 5 is a commercial sensor, and the model of the micro force sensor 5 is GSO-1000-T.

The precision drive unit 9 includes a flexible hinge mechanism 9-1, pre-tightening screws 9-5, piezoelectric ceramics 9-6, two gaskets 9-2, two steel balls 9-3, three mounting holes 9- 4. The middle part of the flexible hinge mechanism 9-1 is provided with a groove, the piezoelectric ceramic 9-6 is arranged in the groove of the flexible hinge mechanism 9-1, and the two ends of the piezoelectric ceramic 9-6 pass through steel balls respectively. 9-3. The gasket 9-2 is in contact with the inner wall of the groove of the flexible hinge mechanism 9-1. The flexible hinge mechanism 9-1 is provided with three mounting holes 9-4 for fixed connection with the right loading platform 11. Screws are penetrated in the mounting holes 9-4, and the flexible hinge mechanism 9-1 is fixedly connected with the right loading platform 11 by screws. It is threadedly connected with the threaded hole of the flexible hinge mechanism 9-1, and the pre-tightening screw 9-5 pre-compresses the piezoelectric ceramic 9-6 through the gasket 9-2 and the steel ball 9-3.

The precision driving unit 9 can not only realize the driving of simple tensile displacement, but also realize the fatigue loading of micro-components at a certain frequency.

The test device can be integrated with a CCD test system or other test equipment to facilitate in-situ monitoring.

Specific test method 1: The test device is placed on a marble vibration isolation platform, and the laboratory environment is clean and constant temperature. First turn on the main power supply of the control system, and the piezoelectric ceramic control power supply is preheated for 30 minutes. Adjust the position of the dynamic and static stage so that the marked center lines coincide (it is best to use the CCD to assist in the adjustment). Then, take out the micro-component processed by the micro-milling process with tweezers, and stick it in the positioning groove of the dynamic and static stage with glue. Through adjustment, the centerline of the dynamic and static stage coincides with the center of the micro-component (preferably centered in the field of view of the CCD camera), and the test is performed with the assistance of the CCD. The piezoelectric ceramic driver is used to control the precision drive unit, and the micro-components are subjected to pull-pull cycle fatigue loading. When the number of cycles reaches the set value, the fatigue test ends. Then carry out the micro-tensile test, the precision drive unit drives the moving stage to stretch the micro-component until the micro-component breaks, record the test data and perform data processing. Finally, soak the broken micro-component with acetone solution, remove the micro-component with tweezers after 5 minutes, and the test process ends.

Specific test method 2: The preparation work is the same as method 1, and the micro-components are directly subjected to micro-tensile tests to measure the static mechanical properties of the specimens.

Claims (1)

1. a micro-member tensile test device, it is characterized in that: it comprises accurate driver element (9), Micro-force sensor (5), linear grating measurement mechanism, high accuracy electromigration platform, objective table, power sensor fixed block (4), two fixtures (17), described high accuracy electromigration platform comprises left article carrying platform (19), right article carrying platform (11), screw pair (10), L shaped base (1), supporting seat (3), stepper motor (2), four left sliders (18), four right slide blocks (12), two guide rails (14), described objective table comprises moving objective table (8) and quiet objective table (6), described linear grating measurement mechanism comprises grating ruler reading head installing rack (13), read head (15) and grating scale (16),

The long slab of described L shaped base (1) is horizontally disposed with, and described two guide rails (14) are parallel to the long limit of L shaped base (1) and are fixed on the long slab of L shaped base (1), described left article carrying platform (19) and right article carrying platform (11) left and right are set up in parallel, described accurate driver element (9) is fixed on right article carrying platform (11) upper surface, described moving objective table (8) is fixedly connected with the left surface of accurate driver element (9), and the corresponding setting adjacent with moving objective table (8) of described quiet objective table (6), quiet objective table (6) is processed with respectively a locating slot for fixing micro-member (7) with the upper surface correspondence position of moving objective table (8), described quiet objective table (6), Micro-force sensor (5) and power sensor fixed block (4) are successively set on the upper surface of left article carrying platform (19) from right to left, and quiet objective table (6) is fixedly connected with Micro-force sensor (5), Micro-force sensor (5) is fixedly connected with power sensor fixed block (4), power sensor fixed block (4) is fixedly connected with the upper surface of left article carrying platform (19), described grating scale (16) is arranged on the leading flank or trailing flank of accurate driver element (9), upper and the grating scale (16) of right article carrying platform (11) is positioned on the side of homonymy and is fixed with read head installing rack (13), number of degrees head (15) is oppositely arranged and is fixed on read head installing rack (13) with grating scale (16), the lower surface of described right article carrying platform (11) is fixedly connected with the nut of screw pair (10), leading screw one end of screw pair (10) and supporting seat (3) are rotationally connected, the short slab of the leading screw other end of screw pair (10) and L shaped base (1) is rotationally connected, supporting seat (3) is fixedly connected with the long slab of L shaped base (1), the lower surface of right article carrying platform (11) is fixedly connected with four right slide blocks (12) of rectangular setting, four right slide blocks (12) are slidably connected with two guide rails (14), described stepper motor (2) is fixed on the short slab of L shaped base (1), stepper motor (2) drives screw pair (10) motion, the lower surface of left article carrying platform (19) is fixedly connected with four left sliders (18) of rectangular setting, four left sliders (18) are arranged on two guide rails (14), be arranged on a fixture (17) being fixedly connected with guide rail (14) is installed between two left sliders (18) on same guide rail (14), in work, the relative guide rail (14) of left article carrying platform (19) maintains static, right article carrying platform (11) relatively guide rail (14) moves, described accurate driver element (9) comprises flexure hinge mechanism (9-1), pretension screw (9-5), piezoelectric ceramics (9-6), two pads (9-2), two steel balls (9-3), three installing holes (9-4), described flexure hinge mechanism (9-1) middle part is provided with groove, described piezoelectric ceramics (9-6) is arranged in the groove of flexure hinge mechanism (9-1), piezoelectric ceramics (9-6) two ends are respectively by steel ball (9-3), pad (9-2) contacts with the groove inwall of flexure hinge mechanism (9-1), flexure hinge mechanism (9-1) is provided with three installing holes (9-4) for being fixedly connected with right article carrying platform (11), the right side of flexure hinge mechanism (9-1) is processed with screwed hole, described pretension screw (9-5) is threaded with the screwed hole of flexure hinge mechanism (9-1), pretension screw (9-5) is by pad (9-2) and steel ball (9-3) pre-pressing piezoelectric ceramics (9-6).