CN105627913A - Linear length measurement alignment adjustment method for laser interferometer - Google Patents
Linear length measurement alignment adjustment method for laser interferometer Download PDFInfo
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- CN105627913A CN105627913A CN201410603378.0A CN201410603378A CN105627913A CN 105627913 A CN105627913 A CN 105627913A CN 201410603378 A CN201410603378 A CN 201410603378A CN 105627913 A CN105627913 A CN 105627913A
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Abstract
The invention relates to the technical field of testing and measurement technologies and equipment, and specifically relates to a linear length measurement alignment adjustment method for a laser interferometer. The method comprises the following steps: (1), linear reflector positioning; (2), visual inspection alignment; (3), optical path low-precision alignment; (4), optical path high-precision alignment; (5), linear interferoscope positioning and alignment. The method is simple in method, and is accurate in result. The method is used for linear positioning measurement, and also can used for other linear measurement.
Description
Technical field
The present invention relates to test measurement technology and equipment technical field, be specifically related to a kind of laser interferometer and linearly survey long collimation adjustment method.
Background technology
The precision of semiconductor manufacturing equipment is more and more higher, and the requirement of the multiaxis locating platform being applied in equipment is also more and more higher, and when system accuracy requires when micron order, the positioning precision of each axle of many Shaft fixed position modules to reach submicron order in theory. In order to improve the overall precision of many Shaft fixed position modules it is necessary to the positioning precision of each axle of system is carried out detection compensation. Laser interferometer, because its precision height, applied range, environment-adapting ability are strong, Real-time and Dynamic tests the speed advantages of higher, is used as the preferred unit of accuracy detection, examination. Linear position measurement is the modal a kind of measurement of laser interferometer. Laser interferometer system can compare the real data of the target position data on shaft position and measurement, thus measuring linear orientation precision and repetitive positioning accuracy. When carrying out linear position measurement, in order to reduce Abbe error and the cosine error of system, first have to carry out the collimation adjustment of system.
Summary of the invention
It is contemplated that propose a kind of laser interferometer linearly survey long collimation adjustment method.
Technical program of the present invention lies in:
A kind of laser interferometer linearly surveys long collimation adjustment method, comprises the following steps:
(1) linear reflective mirror location;
(2) range estimation collimation;
(3) the low precision collimation of light path;
(4) light path high accuracy collimation;
(5) linear interference mirror location and collimation.
Preferably, described linear reflective mirror localization method is:
(1) linear measurement reflecting mirror is fixed on the workbench of movement;
(2) interferoscope is already affixed on the fixing parts of equipment (to pass through magnetic bracket), and meets interferoscope and be placed in the light path between laser instrument and reflecting mirror;
(3) what adjust The Cloud Terrace rear rocks vernier control and rapid translation handle, it is at the centre position of stroke, by mobile spider, range estimation adjusts the horizontal direction of laser instrument, make laser beam parallel with the moving direction of tested kinematic axis in the horizontal direction, now just complete and substantially collimate.
Preferably, described range estimation alignment method is:
(1) position adjustments: light target is arranged on measurement reflecting mirror, and light target is positioned to white point upward, and the optical gate of laser head rotates to collimation and adjusts position, makes laser output beam diameter reduce; Rotate height adjusting crank, regulate the height of laser head, and translate laser head, until laser beam is mapped to the white dot center on light target; Now the height of laser head is determined substantially, and height lock fixed ring is locked;
(2) horizontal adjustment: after propping spider, is fixed to laser head and The Cloud Terrace assembly on spider, air-bubble level is placed on the upper surface of laser head; The horizontal alignment of laser head is completed by regulating 3 leg lengths of spider.
Preferably, the low precision alignment method of described light path is:
(1) measurement reflecting mirror is moved to laser instrument the most nearby, (light target has been mounted to measure on reflecting mirror, and it is positioned to white point upward), adjust height and the right position of reflecting mirror or laser head, make laser beam hit the white dot center on light target;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of light target, then illustrate substantially to collimate; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction are not parallel; The vernier control knob that rocks at adjustable The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, the pitching knob at adjustable laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, if now light beam still deviates target center, then repeatable step (1)��(2), until in total travel, light beam is held in target center, illustrates that the collimation of laser beam mixes up substantially.
Or preferably, described light path high accuracy alignment method is:
(1) remove the light target measured on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from measurement reflecting mirror; Adjust and measure on reflecting mirror or laser head translation up and down, make to swash
The target center of beam alignment laser instrument optical gate;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of laser instrument optical gate, then illustrate entirely collimated; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction there is also collimating error; The vernier control knob that rocks adjusting The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, adjust the pitching knob at laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, until in total travel, light beam is held in laser instrument optical gate target center, illustrates that the collimation of laser beam completes; If now rotating optical gate to measuring position, then laser head beam intensity display lamp all light.
Or preferably, described linear interference mirror location and alignment method are:
(1) on the fixed position of equipment and also be between laser instrument and reflecting mirror, put into linear interference mirror, light target is arranged on linear interference mirror, and is positioned to white point upward; Adjust linear interference mirror height to move left and right, make laser beam hit the white dot center on light target;
(2) remove the light target on linear interference mirror, mount it to measure on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from linear interference mirror; Adjust the pitching of linear interference mirror and rock, making the target center of laser beam alignment laser instrument optical gate;
(3) removing the light target measuring reflecting mirror, on laser head optical gate, 2 light beams are just completely superposed and are directed at white dot center;
(4) traverse measurement reflecting mirror within the scope of the total travel of measured axis, if global extent inner laser head can obtain the signal intensity that can be used to test, can measure.
The method have technical effect that:
The inventive method is simple, and result is accurate. It is not only applicable to linear orientation measure, and
Can apply to other linear measurement.
Detailed description of the invention
A kind of laser interferometer linearly surveys long collimation adjustment method, comprises the following steps:
(1) linear reflective mirror location;
(2) range estimation collimation;
(3) the low precision collimation of light path;
(4) light path high accuracy collimation;
(5) linear interference mirror location and collimation.
Wherein, linear reflective mirror localization method is:
(1) linear measurement reflecting mirror is fixed on the workbench of movement;
(2) interferoscope is already affixed on the fixing parts of equipment (to pass through magnetic bracket), and meets interferoscope and be placed in the light path between laser instrument and reflecting mirror;
(3) what adjust The Cloud Terrace rear rocks vernier control and rapid translation handle, it is at the centre position of stroke, by mobile spider, range estimation adjusts the horizontal direction of laser instrument, make laser beam parallel with the moving direction of tested kinematic axis in the horizontal direction, now just complete and substantially collimate.
Range estimation alignment method is:
(1) position adjustments: light target is arranged on measurement reflecting mirror, and light target is positioned to white point upward, and the optical gate of laser head rotates to collimation and adjusts position, makes laser output beam diameter reduce; Rotate height adjusting crank, regulate the height of laser head, and translate laser head, until laser beam is mapped to the white dot center on light target; Now the height of laser head is determined substantially, and height lock fixed ring is locked;
(2) horizontal adjustment: after propping spider, is fixed to laser head and The Cloud Terrace assembly on spider, air-bubble level is placed on the upper surface of laser head; The horizontal alignment of laser head is completed by regulating 3 leg lengths of spider.
The low precision alignment method of light path is:
(1) measurement reflecting mirror is moved to laser instrument the most nearby, (light target has been mounted to measure on reflecting mirror, and it is positioned to white point upward), adjust height and the right position of reflecting mirror or laser head, make laser beam hit the white dot center on light target;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of light target, then illustrate substantially to collimate; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction are not parallel; The vernier control knob that rocks at adjustable The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, the pitching knob at adjustable laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, if now light beam still deviates target center, then repeatable step (1)��(2), until in total travel, light beam is held in target center, illustrates that the collimation of laser beam mixes up substantially.
Light path high accuracy alignment method is:
(1) remove the light target measured on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from measurement reflecting mirror; Adjust and measure on reflecting mirror or laser head translation up and down, make to swash
The target center of beam alignment laser instrument optical gate;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of laser instrument optical gate, then illustrate entirely collimated; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction there is also collimating error; The vernier control knob that rocks adjusting The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, adjust the pitching knob at laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, until in total travel, light beam is held in laser instrument optical gate target center, illustrates that the collimation of laser beam completes; If now rotating optical gate to measuring position, then laser head beam intensity display lamp all light.
Linear interference mirror location with alignment method is:
(1) on the fixed position of equipment and also be between laser instrument and reflecting mirror, put into linear interference mirror, light target is arranged on linear interference mirror, and is positioned to white point upward; Adjust linear interference mirror height to move left and right, make laser beam hit the white dot center on light target;
(2) remove the light target on linear interference mirror, mount it to measure on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from linear interference mirror; Adjust the pitching of linear interference mirror and rock, making the target center of laser beam alignment laser instrument optical gate;
(3) removing the light target measuring reflecting mirror, on laser head optical gate, 2 light beams are just completely superposed and are directed at white dot center;
(4) traverse measurement reflecting mirror within the scope of the total travel of measured axis, if global extent inner laser head can obtain the signal intensity that can be used to test, can measure.
Claims (6)
1. a laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: comprise the following steps:
(1) linear reflective mirror location;
(2) range estimation collimation;
(3) the low precision collimation of light path;
(4) light path high accuracy collimation;
(5) linear interference mirror location and collimation.
2. as claim 1 laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: described linear reflective mirror localization method is:
(1) linear measurement reflecting mirror is fixed on the workbench of movement;
(2) interferoscope is already affixed on the fixing parts of equipment (to pass through magnetic bracket), and meets interferoscope and be placed in the light path between laser instrument and reflecting mirror;
(3) what adjust The Cloud Terrace rear rocks vernier control and rapid translation handle, it is at the centre position of stroke, by mobile spider, range estimation adjusts the horizontal direction of laser instrument, make laser beam parallel with the moving direction of tested kinematic axis in the horizontal direction, now just complete and substantially collimate.
3. as claim 1 laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: described range estimation alignment method is:
(1) position adjustments: light target is arranged on measurement reflecting mirror, and light target is positioned to white point upward, and the optical gate of laser head rotates to collimation and adjusts position, makes laser output beam diameter reduce; Rotate height adjusting crank, regulate the height of laser head, and translate laser head, until laser beam is mapped to the white dot center on light target; Now the height of laser head is determined substantially, and height lock fixed ring is locked;
(2) horizontal adjustment: after propping spider, is fixed to laser head and The Cloud Terrace assembly on spider, air-bubble level is placed on the upper surface of laser head; The horizontal alignment of laser head is completed by regulating 3 leg lengths of spider.
4. as claim 1 laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: the low precision alignment method of described light path is:
(1) measurement reflecting mirror is moved to laser instrument the most nearby, (light target has been mounted to measure on reflecting mirror, and it is positioned to white point upward), adjust height and the right position of reflecting mirror or laser head, make laser beam hit the white dot center on light target;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of light target, then illustrate substantially to collimate; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction are not parallel; The vernier control knob that rocks at adjustable The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, the pitching knob at adjustable laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, if now light beam still deviates target center, then repeatable step (1)��(2), until in total travel, light beam is held in target center, illustrates that the collimation of laser beam mixes up substantially.
5. as claim 1 laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: described light path high accuracy alignment method is:
(1) remove the light target measured on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from measurement reflecting mirror; Adjust and measure on reflecting mirror or laser head translation up and down, make to swash
The target center of beam alignment laser instrument optical gate;
(2) measurement reflecting mirror is moved to laser instrument farthest, if now light beam is still on the white dot center of laser instrument optical gate, then illustrate entirely collimated; If BEAM SQUINT white dot center, then illustrate that laser beam and movable workbench direction there is also collimating error; The vernier control knob that rocks adjusting The Cloud Terrace rear makes laser level rotate, if there is highly deviated in light beam and white point, adjust the pitching knob at laser instrument rear, light beam is made to move to the symmetric position centered by light target white point by the two knob, then integral translation (height left and right) laser instrument, makes beam alignment white dot center;
(3) measurement reflecting mirror is moved to laser instrument the most nearby, until in total travel, light beam is held in laser instrument optical gate target center, illustrates that the collimation of laser beam completes; If now rotating optical gate to measuring position, then laser head beam intensity display lamp all light.
6. as claim 1 laser interferometer linearly surveys long collimation adjustment method, it is characterised in that: described linear interference mirror location with alignment method is:
(1) on the fixed position of equipment and also be between laser instrument and reflecting mirror, put into linear interference mirror, light target is arranged on linear interference mirror, and is positioned to white point upward; Adjust linear interference mirror height to move left and right, make laser beam hit the white dot center on light target;
(2) remove the light target on linear interference mirror, mount it to measure on reflecting mirror, observe and return to the laser beam optical gate whether on white dot center from linear interference mirror; Adjust the pitching of linear interference mirror and rock, making the target center of laser beam alignment laser instrument optical gate;
(3) removing the light target measuring reflecting mirror, on laser head optical gate, 2 light beams are just completely superposed and are directed at white dot center;
(4) traverse measurement reflecting mirror within the scope of the total travel of measured axis, if global extent inner laser head can obtain the signal intensity that can be used to test, can measure.
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| CN201410603378.0A CN105627913A (en) | 2014-10-31 | 2014-10-31 | Linear length measurement alignment adjustment method for laser interferometer |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105021140A (en) * | 2015-08-18 | 2015-11-04 | 中国人民解放军军械工程学院 | Laser collimation technology based target plate adjusting and calibrating device |
| CN106500590A (en) * | 2016-12-15 | 2017-03-15 | 宁夏共享模具有限公司 | A kind of laser interferometer interferoscope adjusts platform |
| CN111451634A (en) * | 2020-04-30 | 2020-07-28 | 中车青岛四方机车车辆股份有限公司 | Laser welding equipment calibration method |
| CN112066881A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Use method of control system for precisely measuring Abbe error |
| CN116661163A (en) * | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
-
2014
- 2014-10-31 CN CN201410603378.0A patent/CN105627913A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105021140A (en) * | 2015-08-18 | 2015-11-04 | 中国人民解放军军械工程学院 | Laser collimation technology based target plate adjusting and calibrating device |
| CN106500590A (en) * | 2016-12-15 | 2017-03-15 | 宁夏共享模具有限公司 | A kind of laser interferometer interferoscope adjusts platform |
| CN111451634A (en) * | 2020-04-30 | 2020-07-28 | 中车青岛四方机车车辆股份有限公司 | Laser welding equipment calibration method |
| CN112066881A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Use method of control system for precisely measuring Abbe error |
| CN112066881B (en) * | 2020-09-15 | 2021-10-22 | 成都明杰科技有限公司 | Use method of control system for precisely measuring Abbe error |
| CN116661163A (en) * | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
| CN116661163B (en) * | 2023-07-28 | 2023-12-08 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
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