CN201497488U - Device for correcting aspheric surface biased error during sub-aperture stitching interferometry - Google Patents
Device for correcting aspheric surface biased error during sub-aperture stitching interferometry Download PDFInfo
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- CN201497488U CN201497488U CN2009201005204U CN200920100520U CN201497488U CN 201497488 U CN201497488 U CN 201497488U CN 2009201005204 U CN2009201005204 U CN 2009201005204U CN 200920100520 U CN200920100520 U CN 200920100520U CN 201497488 U CN201497488 U CN 201497488U
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Abstract
The utility model relates to a device for correcting aspheric surface biased errors during sub-aperture stitching interferometry. The sub-aperture stitching interferometry is one of the important means for large-aperture and deep aspheric surface measurement. The device comprises a granite base (1) connected with a horizontal platform (2) and a vertical platform (3), wherein the two platforms are connected on an air device (4), a slot is formed inside the horizontal platform, an air bearing bar (5) is connected in the slot and connected with an engine, a coder, an air bearing (6) and an interferometer (7), the frame of the interferometer is connected with a lifting platform (8) (Z platform), the lifting platform is connected on a vertical platform (9), and a ceramic tube (10) is arranged in the lifting platform and connected with the air bearing. The device is used for correcting biased errors of aspheric surface mechanisms and stitching measurement of aspheric surface.
Description
Technical field:
The utility model relates to the device that a kind of sub-aperture stitching interferometer is measured large-aperture optical surface and the correction of the aspheric splicing body biased error of the degree of depth.
Background technology:
The sub-aperture stitching interferometer measurement is one of important technical of heavy caliber and degree of depth non-spherical measuring, also is the extensively technical approach of approval of present countries in the world.
When adopting sub-aperture to interfere the splicing method to measure heavy caliber and degree of depth aspheric surface, the principal element that influences measuring accuracy is: adjust the theoretical question that the error effect analysis exists during aspherical splicing is measured; The space orientation biased error of splicing detent mechanism is measured the quantitative analysis of the form of expression of influence to stitching interferometer; Therefore, the correction of adopting suitable mathematical measure to carry out systematic error is the principal element that finally realizes high-acruracy survey.
At present, solving sub-aperture stitching interferometer measuring system error correcting method mainly contains following several:
First kind of three direction adjustment that are most of researchists and mechanism are adopted technology that calibrates for error.Three directions are adjusted the installation error that error mainly refers to measured piece, refer to the droop error of two directions and defocus error vertically respectively.The ultimate principle of this technology is to adjust error and make that overlay region phase place degree of not matching minimizes between sub-aperture by calibrating three directions, and this method is applicable to plane and the higher sphere of machining precision, but is unsuitable for aspheric surface.
Second kind is the method for the interlocking compensation device (interlocked compensator) of U.S. QED company proposition, it has further revised reference wavefront error on the basis of original error correcting method, make the SSI splicing measuring systems of its exploitation can measure the aspheric surface of bore 200mm with interior plane, sphere and appropriate bias.Error match framework has defined two groups of fit equation, is called as free compensator and interlocking compensation device.Wherein, free compensator is that one group of phase place is adjusted equation, and to its coefficient difference of each sub-aperture, the interlocking compensation device then must have identical coefficient to each sub-aperture, and little random position systematic error also can be described as the interlocking compensation device.This instrument can be measured the hemisphere face that numerical aperture equals 1.
From existing aperture aspherical splicing detection means, part has solved the non-spherical measuring problem, but owing to system errors for measurement concrete manifestation form is not carried out quantitative analysis, do not have real resolution system error correction problem, this makes the accurate measurement of degree of depth aperture aspherical still be in the situation of stagnation.
Summary of the invention:
The purpose of this utility model is in measuring at sub-aperture stitching interferometer, weak point of the prior art, a kind of systematic error correcting device is provided, so that the accurate match of twice measured value in overlay region, sub-aperture, and then realize adopting the sub-aperture stitching interferometer mensuration accurately to measure aspheric surface.
The utility model provides a kind of splicing body biased error correcting device, this device is by analyzing the action face form of biased error in measurement of splicing measuring mechanism, utilize coordinate transform and find the solution multiple linear regression equations etc. mathematical measure, the biased error of splicing body is revised, to realize phase place accurate match in overlay region between sub-aperture.
Deficiency at reaching harmonic measure under the noise situations in the existing frequency analysis synchronously provides a kind of digital-to-analogue to mix harmonic analysis instrument.
Above-mentioned purpose realizes by following technical scheme:
Sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, its composition comprises: granite base, described granite base connects levelling bench and vertical platform, described levelling bench and vertical platform are connected on the air assembly, one slit is arranged in the described levelling bench, connected an air bearing bar in the described slit, described air bearing bar connects engine and scrambler, described air bearing bar connects air bearing, described air bearing connects interferometer, described interferometer frame connects hoistable platform (Z platform), described hoistable platform is connected on the vertical platform with three flat air bearing, in the described hoistable platform ceramic pipe is arranged, described ceramic pipe connects two air bearing, suppresses translation and rotation moving with respect to levelling bench.
Described sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, and described transverse translation platform is connected on the duricrust by three air bearing, suppresses the translation of hoistable platform and the motion of the relative transverse translation platform of rotation.
Described sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, and described hoistable platform is connected with two bearings with vertical platform, and two relative motions between the platform are minimized.
The beneficial effects of the utility model:
1. the utility model has taken into full account the influence of the motion benchmark of splicing body to the splicing measurement, utilizes theory analysis method, has obtained the freedom of motion of mechanism kinematic and the funtcional relationship of biased error.
2. the utility model has obtained the effect form of expression of biased error, therefore can define the influence degree of the each several part of splicing measuring mechanism to the splicing measurement, the systematic error of energy quantitative test splicing body.
3. measurement evaluation benchmark of the present utility model adopts Xue Shengshi t distribution statistics method that the splicing precision of system is evaluated, overcome the uncertainty of relative method commonly used, overcome existing statistical distribution method simultaneously and determined confidence factor k by normal distribution, but k value and fiducial probability have fixed relationship, can not reflect the problem of increment reliability of standard deviation to the influence of fiducial probability.
In the work, the measurement mechanism of use comprises interferometer (Feisuo type interferometer), as standard sphere or planar lens, tested aspheric surface, automatically controlled precision positioning driving mechanism and the computer control system thereof of interferometer annex.Standard flat lens or spherical lens are placed between interferometer and the tested aspheric surface, by the automatically controlled rotation translation of computer control location splicing apparatus, carry out translation and rotation according to the measured surface contour shape, purpose allows interferometer normal to an emergent wave surface and tested regional normal be similar to and overlaps, thereby the center of curvature of the reference spherical wave front of interferometer outgoing is overlapped with the vertex curvature center in survey zone, and the light that incides tested zone so just can return along former road approx.Interferometer carries out interferometry at this optical surface region, obtain a sub-aperture, then according to the measured surface profile, control translation positioning of rotating splicing body carries out translation or rotation, arrives next zone to be measured, i.e. second sub-aperture, obtain the measured value in second sub-aperture, between two sub-apertures the overlay region is arranged, the overlay region size so just obtains two sub-apertures to be spliced by the decision of face type.In theory, the Wave-front phase value that twice detection obtains in the overlapping region should be the same, also promptly twice detected phase data is positioned at same, and in the actual detected process, because mobile and rotation causes inclination, translation equal error, the phase value difference that the same area measures for twice, two faces do not overlap.By analyzing the effect form of expression of splicing body biased error in the interferometry of sub-aperture as can be known, biased error makes each rank wavefront component of tested aspheric surface that variation all take place.Use coordinate transform, two aperture coordinates are united, by revising the third-order system aberration, make the accurate match of overlay region, two apertures phase place, thereby finish the splicing in two sub-apertures again.
Description of drawings:
Accompanying drawing 1 is the utility model inner structure synoptic diagram.
Accompanying drawing 2 is the utility model interferometer support synoptic diagram.
Embodiment:
Embodiment 1:
Sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, its composition comprises: granite base 1, described granite base 1 connects levelling bench 2 and vertical platform 3, described levelling bench 2 and vertical platform 3 are connected on the air assembly 4, in the described levelling bench 2 slit is arranged, connected an air bearing bar 5 in the described slit, described air bearing bar 5 connects engine and scrambler, described air bearing bar 5 connects air bearing 6, described air bearing 6 connects interferometer 7, described interferometer frame connects hoistable platform 8 (Z platform), three flat air bearing of described hoistable platform 8 usefulness are connected on the vertical platform 9, in the described hoistable platform 8 ceramic pipe 10 is arranged, described ceramic pipe 10 connects two air bearing, suppresses translation and rotation moving with respect to levelling bench.
Embodiment 2:
Embodiment 1 described sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, it is characterized in that: described transverse translation platform 12 is connected on the duricrust 11 by three air bearing 6, suppresses the translation of hoistable platform 8 and the motion of the relative transverse translation platform of rotation.
Embodiment 3:
Embodiment 1 described sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, and described hoistable platform is connected with two bearings with vertical platform, and two relative motions between the platform are minimized.
Embodiment 4:
Embodiment 3 described sub-aperture stitching interferometers are measured the device of aspheric surface biased error correction, and described hoistable platform and vertical platform have added engine and weight compensation means.
Claims (3)
1. a sub-aperture stitching interferometer is measured the device of aspheric surface biased error correction, its composition comprises: granite base, it is characterized in that: described granite base connects levelling bench and vertical platform, described levelling bench and vertical platform are connected on the air assembly, one slit is arranged in the described levelling bench, connected an air bearing bar in the described slit, described air bearing bar connects engine and scrambler, described air bearing bar connects air bearing, described air bearing connects interferometer, described interferometer frame connects hoistable platform, described hoistable platform is connected on the vertical platform with three flat air bearing, in the described hoistable platform ceramic pipe is arranged, described ceramic pipe connects two air bearing, suppresses translation and rotation moving with respect to levelling bench.
2. sub-aperture stitching interferometer according to claim 1 is measured the device of aspheric surface biased error correction, it is characterized in that: described transverse translation platform is connected on the duricrust by three air bearing, suppresses the translation of hoistable platform and the motion of the relative transverse translation platform of rotation.
3. sub-aperture stitching interferometer according to claim 1 and 2 is measured the device of aspheric surface biased error correction, and it is characterized in that: described hoistable platform is connected with two bearings with vertical platform, and two relative motions between the platform are minimized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201005204U CN201497488U (en) | 2009-07-31 | 2009-07-31 | Device for correcting aspheric surface biased error during sub-aperture stitching interferometry |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201005204U CN201497488U (en) | 2009-07-31 | 2009-07-31 | Device for correcting aspheric surface biased error during sub-aperture stitching interferometry |
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| Publication Number | Publication Date |
|---|---|
| CN201497488U true CN201497488U (en) | 2010-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009201005204U Expired - Fee Related CN201497488U (en) | 2009-07-31 | 2009-07-31 | Device for correcting aspheric surface biased error during sub-aperture stitching interferometry |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330051A (en) * | 2014-11-05 | 2015-02-04 | 上海大学 | Low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements |
| CN109341587A (en) * | 2018-11-28 | 2019-02-15 | 中国科学院光电技术研究所 | Splicing measuring device and method |
-
2009
- 2009-07-31 CN CN2009201005204U patent/CN201497488U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330051A (en) * | 2014-11-05 | 2015-02-04 | 上海大学 | Low-and-medium-frequency surface shape rapid detecting device and method for large-caliber optical elements |
| CN109341587A (en) * | 2018-11-28 | 2019-02-15 | 中国科学院光电技术研究所 | Splicing measuring device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100602 Termination date: 20120731 |