CN104678676B - A kind of reciprocal optical logical device based on micro-ring resonator - Google Patents
A kind of reciprocal optical logical device based on micro-ring resonator Download PDFInfo
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- CN104678676B CN104678676B CN201510096810.6A CN201510096810A CN104678676B CN 104678676 B CN104678676 B CN 104678676B CN 201510096810 A CN201510096810 A CN 201510096810A CN 104678676 B CN104678676 B CN 104678676B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F3/00—Optical logic elements; Optical bistable devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
The invention provides a kind of reciprocal optical XOR device based on micro-ring resonator, it is made up of two micro-ring resonators and a Y-branch coupler, the reciprocal optical logical device has two electrical pulse sequence inputs to be calculated, what is exported is the light pulse sequence after XOR is calculated, and input is with exporting one-to-one corresponding.Reciprocal optical logical device manufacture craft and COMS techniques of the present invention are completely compatible so that device volume is small, speed is fast, it is low in energy consumption, be easy to integrated, be expected to play an important role in photonic computer.
Description
Technical field
The invention belongs to optical logic calculating field, it is related to a kind of reciprocal optical logical device based on micro-ring resonator,
Specially a kind of reversible XOR optical logic device based on micro-ring resonator for being applied to optic communication and optical oomputing field.
Background technology
Develop with the continuation of semiconductor technology, the integrated level more and more higher of chip or integrated circuit, the chi of integrated component
Very little further diminution, electric leakage and the heat dissipation problem of conventional electrical device can not be solved well.More and more sign shows, light
A kind of scheme of the information processing power information processing instead traditional with optical oomputing has very bright prospect.Optical signal is passed
Defeated concurrency causes optical system to have information channel more broader than electricity system；It is made up of optical fiber and various optical elements integrated
Light path, can greatly improve the ability to data operation, transmission and storage, and optical logic device be must not in optical oomputing network
The element that can lack, the power consumption of photonic device is extremely low in addition, therefore photonic device has caused the note of more and more scientific research personnel
Meaning.
Computing is all that binary number is calculated, and existing traditional calculation is to be based on irreversible logical device
Realize, its principal character shows as being that result of calculation is that a bit is exported after dibit is inputted, input letter
Breath will lose an information after computing, and according to Landauer principles, irreversible calculating computing each time can all cause ratio
The loss of special position, and often lose a bit information and just have kTln2 heat energy and distribute.And reversible logic device principal character is showed
To be that result of calculation is the output of two bits after two bits are inputted, and it is one-to-one pass to input with output
System, therefore input information will not lose information after computing, due to the loss without bit, combine the low work(of optical computing
After the characteristics of consumption, energy consumption during computer operation can be greatly reduced, and solve the huge bottle of traditional computer caloric value
Neck.
The content of the invention
It is an object of the invention to provide a kind of reciprocal optical logical device based on micro-ring resonator, it is not necessary to is swashed using strong
Light is used as pump light, it is easy to operate.
The present invention is realized especially by following technical scheme：
A kind of reciprocal optical logical device based on micro-ring resonator, by be made of the semi-conducting material on insulator two
Individual micro-ring resonator MRR and a Y-branch coupler are constituted.
Two described micro-ring resonator MRR are the first micro-ring resonator and the second micro-ring resonator, the first micro-ring resonant
Device includes the first silica-based nanowire micro-loop, the first input waveguide, the first straight-through fiber waveguide and first and downloads fiber waveguide, and first is micro-
Ring resonator carries silicon-based electro-optical modulator or silicon substrate Thermo-optical modulator；It is micro- that second micro-ring resonator includes the second silica-based nanowire
Ring, the second input waveguide, the second straight-through fiber waveguide, the 3rd input waveguide and the second output optical waveguide, the second input light wave
Lead and be connected with the straight-through fiber waveguide of Y-branch, the 3rd input waveguide is connected with the first download fiber waveguide；Second micro-ring resonator is carried
Silicon-based electro-optical modulator or silicon substrate Thermo-optical modulator.
Described Y-branch coupler be the first Y-branch coupler include the 4th input waveguide, the first output optical waveguide and
Y-branch leads directly to fiber waveguide；4th input waveguide is located on the main straight wave guide of Y-branch coupler, and leads directly to fiber waveguide with second
It is connected, the first output optical waveguide and Y-branch lead directly to the Liang Ge branches straight wave guide that fiber waveguide is located at the first Y-branch coupler respectively
On.
Described the first input waveguide, the first straight-through fiber waveguide and the 4th input waveguide is sequentially located at same level
In the straight first wave guide set, one end of the first wave guide is connected with the main straight wave guide of Y-branch coupler；First downloads light
In waveguide and the horizontally disposed U-shaped second waveguide of the 3rd input waveguide, first, which downloads fiber waveguide, is located at first silicon substrate
Below nano wire micro-loop, the end of the segmentation is the first smooth unloader port T1；It is located at the second silica-based nanowire in second waveguide micro-
The 3rd input waveguide and the second output optical waveguide are sequentially provided with segmentation below ring；The 3rd waveguide end and Y-branch of U-shaped
Straight-through fiber waveguide is connected, and the second input light is sequentially provided with the segmentation above the 3rd waveguide the second silica-based nanowire micro-loop
Waveguide and the second output optical waveguide, the end of the segmentation is the second smooth unloader port.
Reciprocal optical logic device of the present invention has the following advantages that：
1) the reciprocal optical logical device that make use of the natural characteristic of light to realize replaces traditional electricity logical device, does not have
At the galvanomagnetic-effect of conventional electrical device and the influence of dead resistance electric capacity, the information so as to realize high-speed high capacity
Reason.
2) the reciprocal optical logical device that make use of the natural characteristic of light to realize replaces traditional logical device, computing output
As a result corresponded with input results, heat energy caused by no traditional logic device bit bit loss is distributed, so as to significantly
Reduce the energy consumption of computer.
3) the silicon materials SOI in dielectric substrate is used, is referred in SiO2One layer is grown on insulating barrier has certain thickness
The monocrystalline silicon thin film of degree, the silicon waveguide being made using SOI materials, its sandwich layer is Si (refractive index is 3.45), and covering is SiO2(folding
Rate is penetrated for 1.45), the refringence of such covering and sandwich layer is very big, so the waveguide forces to obtain it very much to the limitation capability of light field
Bending radius can be with very little, beneficial to large-scale integrated.
4) only it is made up of two micro-ring resonators and Y-branch coupler, two straight wave guides, two curved waveguides, its
In do not intersect, therefore integral device loss it is smaller.
5) it is made of existing CMOS technology so that device volume is small, low in energy consumption, favorable expandability, is easy to and other yuan
Part is integrated.
Brief description of the drawings
Fig. 1 is the structural representation of optics reversible logic device of the present invention；
Fig. 2 is the structural representation of the first micro-ring resonator in optics reversible logic device of the present invention；
Fig. 3 is the structural representation of the second micro-ring resonator in optics reversible logic device of the present invention；
Fig. 4 is the structural representation of Y-branch coupler in optics reversible logic device of the present invention；
Fig. 5 is the electrode of the micro-ring resonator MRR with silicon substrate Thermo-optical modulator in optics reversible logic device of the present invention
Structural representation；
Fig. 6 is the electrode of the micro-ring resonator MRR with silicon-based electro-optical modulator in optics reversible logic device of the present invention
Structural representation；
Explanation is indicated in accompanying drawing：1st, the first micro-ring resonator, the 2, second micro-ring resonator, 3, Y-branch coupler, 4, Si linings
Bottom, 5, SiO2Layer, 6, heating electrode, 7, silicon substrate fiber waveguide, the 10, first silica-based nanowire micro-loop, the 11, first input waveguide,
12nd, the first straight-through fiber waveguide, the 13, first download fiber waveguide, the 20, second silica-based nanowire micro-loop, the 21, second input waveguide,
22nd, the second straight-through fiber waveguide, the 23, the 3rd input waveguide, the 24, second output optical waveguide, the 31, the 4th input waveguide, 32, the
One output optical waveguide, 33, Y-branch lead directly to fiber waveguide.
Embodiment
Explanation is further explained to optics reversible logic device of the present invention with reference to the accompanying drawings and examples.
As shown in figure 1, the reversible XOR device of optics of the present invention, including the first micro-ring resonator, the second micro-ring resonant
Device, Y-branch coupler is the first Y-branch coupler (3).
As shown in Fig. 2 the first micro-ring resonator 1 includes the first silica-based nanowire micro-loop 10, the first input waveguide 11, the
Fiber waveguide 13 is downloaded in thang-kng waveguide always 12 and first, and the first micro-ring resonator 1 carries silicon-based electro-optical modulator or the hot light of silicon substrate
Modulator.
As shown in figure 3, the second micro-ring resonator 2 includes the second silica-based nanowire micro-loop 20, the second input waveguide 21, the
Two output optical waveguides 22, the 3rd input waveguide 23, second lead directly to fiber waveguide 24, and the second input waveguide 21 is led directly to Y-branch
Fiber waveguide is connected, and the 3rd input waveguide 23 is downloaded fiber waveguide 13 with the first micro-ring resonator 1 first and is connected；Second micro-ring resonant
Device 2 carries silicon-based electro-optical modulator or silicon substrate Thermo-optical modulator.
As shown in figure 4, Y-branch coupler 3, Y-branch coupler 3 includes the 4th input waveguide 31, the first output light-wave
Lead 32 and the straight-through fiber waveguide 33 of Y-branch；4th input waveguide 31 is located on the main straight wave guide of Y-branch coupler 3, and with first
Straight-through fiber waveguide 12 is connected, and the first output optical waveguide 32 and Y-branch lead directly to fiber waveguide 33 and be located at the two of Y-branch coupler 3 respectively
On individual branch's straight wave guide.
First input waveguide 11, first leads directly to the input waveguide 31 of fiber waveguide 12 and the 4th and is sequentially located at same level
In the straight first wave guide set, one end of the first wave guide is connected with the main straight wave guide of Y-branch coupler 3；First downloads
In the second waveguide of the horizontally disposed " u "-shaped of the input waveguide 23 of fiber waveguide 13 and the 3rd, first downloads fiber waveguide 13
In the lower section of the first silica-based nanowire micro-loop 10, the end of the segmentation is the first smooth unloader port T1；It is located at the in second waveguide
The 3rd input waveguide 23 and the second output optical waveguide are sequentially provided with the segmentation of the lower section of two silica-based nanowire micro-loop 20；" u "-shaped
The 3rd waveguide end and Y-branch lead directly to fiber waveguide 33 and be connected, close to the top of the 3rd the second silica-based nanowire of waveguide micro-loop 20
Segmentation on be sequentially provided with the second input waveguide 21 and the second output optical waveguide 22, the end of the segmentation unloads end for the second light
Mouth T2.
The micro-ring resonator MRR of silicon substrate Thermo-optical modulator electrode, as shown in figure 5, having SiO on Si substrates 42Layer 5, SiO2
There is silicon substrate fiber waveguide 7 on layer 5, one layer of heating electrode 6 has been laid in the top of silicon substrate light wave 7.Applied on the lead of heating electrode 6
Making alive, has electric current by electrode, the electric current can produce the temperature that heat changes silicon substrate fiber waveguide 7 by way of heat radiation
Degree, so as to change the effective refractive index Neff of disc waveguide, then changes MRR resonance wavelength, realizes dynamic filter.
It can be seen that the modulation principle of silicon substrate Thermo-optical modulator and the silicon-based electro-optical modulator shown in Fig. 6 is differed,
Silicon substrate Thermo-optical modulator is to change the effective refractive index of waveguide by the temperature of silicon substrate fiber waveguide is changed.Silicon-based electro-optical modulator
It is to change the refractive index of waveguide by the carrier concentration in the fiber waveguide of track is changed；Because the speed of heat radiation is much more slowly than
The speed of carrier annihilation.So the speed of Electro-optical Modulation is far longer than the speed of thermo-optic modulation, but because to waveguide doping
Reason, the structure of electrooptic modulator is more more complicated than the structure of Thermo-optical modulator, and manufacturing process is also simpler.Therefore it is general in needs
Modulated, and adjusted to the not high occasion of response device rate request using the hot light of silicon substrate using silicon-based electro-optic in the case of high speed
System.
The structural parameters of first silica-based nanowire micro-loop 10 and the complete phase of structural parameters of the second silica-based nanowire micro-loop 20
Together, when incident optical signal meets condition of resonance (m × λ=Neff× 2 π × r) when, optical signal can pass through evanscent field coupling
Micro-loop is coupled into from waveguide, now, is existed if any the fiber waveguide in addition to incidence, the optical signal in micro-loop equally can be by suddenly
A coupling die from micro-loop coupled into waveguide；Condition of resonance (m × λ=Neff× 2 π × r) in m represent micro-ring resonant level,
Its value is positive integer, and λ is resonance wavelength, and Neff is the effective refractive index of waveguide, and r is the radius of micro-loop.
Below by analysis optical signal in the Y-branch coupler shown in the micro-ring resonator and Fig. 4 shown in Fig. 2 and Fig. 3
The transmitting procedure of middle light, briefly explains the operation principle of reciprocal optical XOR device of the present invention：
For the first micro-ring resonator 1 shown in Fig. 2, it is assumed that the first input waveguide of optical signals 11 is inputted, when light letter
During number by coupled zone (the first input waveguide 11 and a closest scope of the first silica-based nanowire micro-loop 10), light letter
Number by evanscent field coupling enter the first silica-based nanowire micro-loop 10 in, the optical signal in the first silica-based nanowire micro-loop 10
Also it can be coupled into by evanscent field coupling in the first download fiber waveguide 13.For meeting condition of resonance (m × λ=Neff×
2 π × r) optical signal, when being coupled to the first straight-through fiber waveguide 12 from micro-loop, caused by the phase difference π of two ways of optical signals
Destructive interference, can occur frosting phenomenon in the first straight-through fiber waveguide 12；And the light of the condition of resonance is unsatisfactory for due to phase difference
Can not meet destructive interference condition, thus the optical signal for being unsatisfactory for condition of resonance be considered as having no effect by coupled zone from
Thang-kng waveguide always 12 is exported.
For the second micro-ring resonator 2 shown in Fig. 3, it is assumed that the second input waveguide of optical signals 21 is inputted (from first
The optical signal that input 11 is inputted is unsatisfactory for the condition of resonance of the first silica-based nanowire micro-loop 10), when optical signal is by coupled zone
(the second input waveguide 21 and a closest scope of the second straight-through silica-based nanowire micro-loop 20 of fiber waveguide 22 and second)
When, meet condition of resonance (m × λ=Neff× 2 π × r) optical signal by evanscent field coupling enter the second silica-based nanowire
In micro-loop 20, the optical signal in the second silica-based nanowire micro-loop 20 can also be coupled into the second output by evanscent field coupling
Fiber waveguide 24, and exported by the second output optical waveguide 24；And that the light for being unsatisfactory for condition of resonance is considered as having no effect is logical
Overcoupling area is exported from the second straight-through fiber waveguide 22.When the input waveguide 23 of optical signals the 3rd input it is (defeated from first input end
The optical signal entered meets the condition of resonance of the first silica-based nanowire micro-loop 10) when, optical signal is by coupled zone (the 3rd input light wave
Lead 23 and the second closest scope of silica-based nanowire micro-loop 20) when, meet condition of resonance (m × λ=Neff×2π×
R) optical signal is entered in the second silica-based nanowire micro-loop 20 by evanscent field coupling, in the second silica-based nanowire micro-loop 20
Optical signal the second download fiber waveguide 22 can be also coupled into by evanscent field coupling from the second smooth unloader port T2 unloading；
And the light for being unsatisfactory for condition of resonance being exported by coupled zone from the second output optical waveguide 24 of being considered as having no effect.
For the Y-branch coupler 3 shown in Fig. 4, when optical signal is inputted from the 4th input waveguide 31, pass through the first Y points
Optical signal is divided into two beams by branch coupler 3, and leading directly to waveguide 33 from the first output optical waveguide 32 and the first Y-branch respectively exports.
What is be analyzed above is static micro-ring resonator working characteristics, and for summary, what micro-ring resonator can be fixed is certain
The signal of a little wavelength (wavelength for meeting condition of resonance) is downloaded, and the signal of some wavelength is straight-through (to be unsatisfactory for the ripple of condition of resonance
It is long)；When this device works, in addition it is also necessary to which the resonance wavelength of micro-ring resonator is dynamically adjustable.By condition of resonance (m × λ=Neff×2π
× r) find out, will all the humorous of silica-based nanowire micro-loop be changed by changing the radius R and effective refractive index Neff of silica-based nanowire micro-loop
Vibration wave is long.Change the resonance wavelength of silica-based nanowire micro-loop here by the effective refractive index Neff of regulation micro-loop waveguide.Have
It is relevant with the refractive index for manufacturing silica-based nanowire micro-loop material to imitate refractive index, and the refractive index for changing the material has two methods：
One is that material is heated, and changes the temperature of material, Refractive Index of Material, i.e., above-mentioned silicon substrate thermo-optic modulation are changed using thermo-optic effect
Device；Two be to inject the refractive index for changing material by carrier using electrooptic effect, i.e., above-mentioned silicon-based electro-optical modulator.Due to
The influence of hot modulating speed thermal convection speed, and electrical modulation speed depends on carrier lifetime, therefore electrical modulation speed, in height
Electrical modulation is used in speed system.
Illustrate the course of work of reversible XOR optical logic device of the invention by taking hot modulating mechanism as an example below：
Firstly, since the technological parameter that we set is completely the same, therefore nano wire micro-loop 10 and nano wire micro-loop 20 are complete
Resonance wavelength is (completely the same in theory.
For the reciprocal optical logical device shown in Fig. 1, inputted in optical signal input (input) in operation wavelength
Then two micro-loops are heated to change the resonance wave of micro-loop by continuous signal light (cw) plus modulation voltage to micro-loop respectively
It is long, and define output port and have during light output and represented with logical one, represented when output port is without light output with logical zero, this can
Inverse optics XOR device has four kinds of working conditions.
With reference to the operation principle of structure chart labor reciprocal optical logical device of the present invention：When the first silicon-based nano
Line micro-loop 10 plus low level (logical zero), the second silica-based nanowire micro-loop 20 be also plus during low level (logical zero), at this moment this two
Individual micro-loop is all in resonant condition, in all no light output of the output port Y1 and Y2 of light (logical value is all " 0 ")；When the first silicon
Base nano-wire micro-loop 10 increases level (logical one), the second silica-based nanowire micro-loop 20 plus low level (logical zero), the second silicon
Base nano-wire micro-loop 20 is in resonant condition, and the first silica-based nanowire micro-loop 10 is in non-resonant condition, in the output port of light
Y1 and Y2 have light output (logical value is all " 1 ")；When the first silica-based nanowire micro-loop 10 plus low level (logical zero), the second silicon
Base nano-wire micro-loop 20 increases level (logical one), and at this moment the second silica-based nanowire micro-loop 20 is in non-resonant condition, the first silicon
Base nano-wire micro-loop 10 is in resonant condition, has light output (logical value is " 1 ") in the output port Y2 of light, in the output end of light
Mouth Y1 is without light output (logical value is " 0 ")；When the first silica-based nanowire micro-loop 10 increases level (logical one), the second silicon substrate is received
Rice noodles micro-loop 20 also increases level (logical one), and at this moment two micro-loops are all in non-resonant condition, in the output port Y1 of light
Have light output (logical value be " 1 "), light output port Y2 without light output (logical value is " 0 ").It can be seen that this hair
Bright optical logic device input is that two to be calculated binary system low and high level electric signals and one are in operation wavelength
The continuous laser signal at place, output is optical signal after XOR；Therefore this optics reciprocal devices can complete two
The reversible XOR of an individual bit.Each micro-ring resonator MRR elementary cell is with hot modulating mechanism or electrical modulation
The micro-ring resonator MRR photoswitches of mechanism, 2 electric signals to be calculated are as follows to the respective MRR mode of action：We set
Micro-loop 10,20 is not adding the resonance wavelength of modulation for operation wavelength, therefore when the modulation signal being added in micro-loop 10 or 20 is
During high level, MRR resonant frequency shifts, the off resonance at the wavelength of input laser；When the tune being added in micro-loop 10 or 20
When electric signal processed is low level, MRR resonance at the wavelength of input laser, optical signal is downloaded；In this reciprocal optical logic device
One optical port of part inputs the continuous laser of particular job wavelength, and 2 low and high level electric signals to be calculated are acted on respectively
In the first silica-based nanowire micro-loop 10 and the second silica-based nanowire micro-loop 20, in two signal output ports just with the shape of light logic
Formula exports the reversible XOR result of calculation corresponding with the electric signal of 2 inputs, so as to complete reciprocal optical logical device
Function.
The truth table that optics reciprocal devices of the present invention complete reversible XOR calculating is as shown in table 1：
The truth table of the reversible XOR device of the optics of table 1
| A | B | Y1(A) | Y2(XOR) |
| 0 | 0 | 0 | 0 |
| 1 | 0 | 1 | 1 |
| 0 | 1 | 0 | 1 |
| 1 | 1 | 1 | 0 |
Particular embodiments described above, to the purpose of the present invention, technical scheme and beneficial effect have been carried out further in detail
Describe in detail it is bright, should be understood that it is above-described be only the present invention specific embodiment, be not intended to limit the invention,
Within the spirit and principles of the invention, any modification made, it is equal to replace, improve etc., it should be included in the present invention
Protection domain within.
Claims (1)
1. a kind of reciprocal optical logical device based on micro-ring resonator, it is characterised in that by with the semiconductor material on insulator
Expect that the two micro-ring resonator MRR and a Y-branch coupler that are made are constituted；
Two described micro-ring resonator MRR are the first micro-ring resonator（1）With the second micro-ring resonator（2）, the first micro-loop is humorous
Shake device（1）Including the first silica-based nanowire micro-loop（10）, the first input waveguide（11）, the first straight-through fiber waveguide（12）With first
Download fiber waveguide（13）, the first micro-ring resonator（1）With silicon-based electro-optical modulator or silicon substrate Thermo-optical modulator；Second micro-loop is humorous
Shake device（2）Including the second silica-based nanowire micro-loop（20）, the second input waveguide（21）, the second straight-through fiber waveguide（22）, the 3rd
Input waveguide（23）With the second output optical waveguide（24）, the second input waveguide（21）Fiber waveguide is led directly to Y-branch（33）Phase
Even, the 3rd input waveguide（23）Fiber waveguide is downloaded with first（13）It is connected；Second micro-ring resonator（2）Adjusted with silicon-based electro-optic
Device processed or silicon substrate Thermo-optical modulator；
Described first downloads fiber waveguide（13）With the 3rd input waveguide（23）In horizontally disposed U-shaped second waveguide,
First downloads fiber waveguide（13）Positioned at the first silica-based nanowire micro-loop（10）It is located at the first silicon-based nano in lower section, second waveguide
Line micro-loop（10）Lower section and provided with first download fiber waveguide（13）Straight wave guide the other end be the first smooth unloader port（T1）；
It is located at the second silica-based nanowire micro-loop in described second waveguide（20）The 3rd input light is sequentially provided with the segmentation of lower section
Waveguide（23）With the second output optical waveguide（24）；
Described Y-branch coupler is the first Y-branch coupler（3）, including the 4th input waveguide（31）, the first output light-wave
Lead（32）Fiber waveguide is led directly to Y-branch（33）；The 4th described input waveguide（31）Positioned at the first Y-branch coupler（3）'s
On main straight wave guide, and fiber waveguide is led directly to second（22）It is connected, the first output optical waveguide（32）Fiber waveguide is led directly to Y-branch（33）
It is located at the first Y-branch coupler respectively（3）Liang Ge branches straight wave guide on；
The first described input waveguide（11）, the first straight-through fiber waveguide（12）With the 4th input waveguide（31）It is sequentially located at same
In a piece horizontally disposed straight first wave guide, one end and the Y-branch coupler of the first wave guide（3）Main straight wave guide be connected
Connect；
Described Y-branch leads directly to fiber waveguide（33）It is connected with the 3rd waveguide end of U-shaped, close to the 3rd the second silicon-based nano of waveguide
Line micro-loop（20）The second input waveguide is sequentially provided with the segmentation of top（21）With the second output optical waveguide（22）, the 3rd waveguide
In be provided with the second input waveguide（21）With the second output optical waveguide（22）Straight wave guide end be the second smooth unloader port
（T2）.
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| CN108519642B (en) * | 2018-05-24 | 2020-08-04 | 兰州大学 | Integrated optical mode switch compatible with wavelength division multiplexing and mode division multiplexing functions |
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