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ATE503209T1 - Herstellungsprozesse für substrate mit mehreren tiefen - Google Patents

Herstellungsprozesse für substrate mit mehreren tiefen

Info

Publication number
ATE503209T1
ATE503209T1 AT01932865T AT01932865T ATE503209T1 AT E503209 T1 ATE503209 T1 AT E503209T1 AT 01932865 T AT01932865 T AT 01932865T AT 01932865 T AT01932865 T AT 01932865T AT E503209 T1 ATE503209 T1 AT E503209T1
Authority
AT
Austria
Prior art keywords
selected regions
resist layer
substrates
manufacturing processes
multiple depth
Prior art date
Application number
AT01932865T
Other languages
English (en)
Inventor
Reynolds Richard Mc
Original Assignee
Caliper Life Sciences Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Caliper Life Sciences Inc filed Critical Caliper Life Sciences Inc
Application granted granted Critical
Publication of ATE503209T1 publication Critical patent/ATE503209T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00388—Etch mask forming
    • B81C1/00428—Etch mask forming processes not provided for in groups B81C1/00396 - B81C1/0042
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
AT01932865T 2000-05-03 2001-05-01 Herstellungsprozesse für substrate mit mehreren tiefen ATE503209T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20150400P 2000-05-03 2000-05-03
PCT/US2001/014125 WO2001084242A1 (en) 2000-05-03 2001-05-01 Multi depth substrate fabrication processes

Publications (1)

Publication Number Publication Date
ATE503209T1 true ATE503209T1 (de) 2011-04-15

Family

ID=22746084

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01932865T ATE503209T1 (de) 2000-05-03 2001-05-01 Herstellungsprozesse für substrate mit mehreren tiefen

Country Status (7)

Country Link
US (1) US6569607B2 (de)
EP (1) EP1279071B1 (de)
AT (1) ATE503209T1 (de)
AU (2) AU2001259355B2 (de)
CA (1) CA2406063A1 (de)
DE (1) DE60144278D1 (de)
WO (1) WO2001084242A1 (de)

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US7010391B2 (en) 2001-03-28 2006-03-07 Handylab, Inc. Methods and systems for control of microfluidic devices
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DE102004020363A1 (de) * 2004-04-23 2005-11-17 Schott Ag Verfahren zur Herstellung eines Masters, Master und Verfahren zur Herstellung von optischen Elementen sowie optischen Element
EP1745153B1 (de) 2004-05-03 2015-09-30 Handylab, Inc. Bearbeitung polynukleotidhaltiger proben
US8852862B2 (en) 2004-05-03 2014-10-07 Handylab, Inc. Method for processing polynucleotide-containing samples
US7378068B2 (en) * 2005-06-01 2008-05-27 Conocophillips Company Electrochemical process for decomposition of hydrogen sulfide and production of sulfur
US11806718B2 (en) 2006-03-24 2023-11-07 Handylab, Inc. Fluorescence detector for microfluidic diagnostic system
EP2001990B1 (de) 2006-03-24 2016-06-29 Handylab, Inc. Integriertes system zur verarbeitung von mikrofluidischen proben und verwendungsverfahren
US10900066B2 (en) 2006-03-24 2021-01-26 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US7998708B2 (en) 2006-03-24 2011-08-16 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
WO2008060604A2 (en) 2006-11-14 2008-05-22 Handylab, Inc. Microfluidic system for amplifying and detecting polynucleotides in parallel
US8765076B2 (en) 2006-11-14 2014-07-01 Handylab, Inc. Microfluidic valve and method of making same
JP2008262953A (ja) * 2007-04-10 2008-10-30 Sharp Corp 半導体装置の製造方法
US9618139B2 (en) 2007-07-13 2017-04-11 Handylab, Inc. Integrated heater and magnetic separator
ES2648798T3 (es) 2007-07-13 2018-01-08 Handylab, Inc. Materiales de captura de polinucleótidos y métodos de utilización de los mismos
US8287820B2 (en) 2007-07-13 2012-10-16 Handylab, Inc. Automated pipetting apparatus having a combined liquid pump and pipette head system
USD621060S1 (en) 2008-07-14 2010-08-03 Handylab, Inc. Microfluidic cartridge
US20090136385A1 (en) 2007-07-13 2009-05-28 Handylab, Inc. Reagent Tube
US8133671B2 (en) 2007-07-13 2012-03-13 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US8105783B2 (en) 2007-07-13 2012-01-31 Handylab, Inc. Microfluidic cartridge
US8182763B2 (en) 2007-07-13 2012-05-22 Handylab, Inc. Rack for sample tubes and reagent holders
US9186677B2 (en) 2007-07-13 2015-11-17 Handylab, Inc. Integrated apparatus for performing nucleic acid extraction and diagnostic testing on multiple biological samples
US8016260B2 (en) * 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
US7951722B2 (en) 2007-08-08 2011-05-31 Xilinx, Inc. Double exposure semiconductor process for improved process margin
USD618820S1 (en) 2008-07-11 2010-06-29 Handylab, Inc. Reagent holder
USD787087S1 (en) 2008-07-14 2017-05-16 Handylab, Inc. Housing
US8100293B2 (en) * 2009-01-23 2012-01-24 Formulatrix, Inc. Microfluidic dispensing assembly
KR20120055754A (ko) * 2010-11-22 2012-06-01 한국전자통신연구원 클리세 및 그의 제조방법
CN106190806B (zh) 2011-04-15 2018-11-06 贝克顿·迪金森公司 扫描实时微流体热循环仪和用于同步的热循环和扫描光学检测的方法
CN106996984B (zh) 2011-09-30 2018-11-27 贝克顿·迪金森公司 组合试剂条
USD692162S1 (en) 2011-09-30 2013-10-22 Becton, Dickinson And Company Single piece reagent holder
WO2013067202A1 (en) 2011-11-04 2013-05-10 Handylab, Inc. Polynucleotide sample preparation device
CA2863637C (en) 2012-02-03 2021-10-26 Becton, Dickinson And Company External files for distribution of molecular diagnostic tests and determination of compatibility between tests

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Also Published As

Publication number Publication date
AU5935501A (en) 2001-11-12
EP1279071B1 (de) 2011-03-23
WO2001084242A1 (en) 2001-11-08
EP1279071A4 (de) 2006-08-02
EP1279071A1 (de) 2003-01-29
US20020004182A1 (en) 2002-01-10
US6569607B2 (en) 2003-05-27
CA2406063A1 (en) 2001-11-08
AU2001259355B2 (en) 2005-09-01
DE60144278D1 (de) 2011-05-05

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