Chew et al., 2004 - Google Patents
Impact of technology scaling on the 1/f noise of thin and thick gate oxide deep submicron NMOS transistorsChew et al., 2004
- Document ID
- 3068114825301924723
- Author
- Chew K
- Yeo K
- Chu S
- Publication year
- Publication venue
- IEE Proceedings-Circuits, Devices and Systems
External Links
Snippet
This study discusses the composite effect of channel length and gate oxide thickness scaling, coupled with the effect of gate dielectric nitridation on the 1/f noise of minimum channel length NMOS transistors. These transistors have been taken from four advance …
- 238000005516 engineering process 0 title abstract description 43
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