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Zhao et al., 2019 - Google Patents

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao et al., 2019

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Document ID
14963276373243827218
Author
Zhao Y
Veltkamp H
Schut T
Groenesteijn J
de Boer M
Wiegerink R
Lötters J
Publication year
Publication venue
4th Conference on MicroFluidic Handling Systems, MFHS 2019

External Links

Snippet

Abstract Surface Channel Technology is widely used as the fabrication process to make free- hanging microchannels in various microfluidic devices. In this extended abstract, we report an innovative fabrication method to embed highly-doped silicon electrodes between the …
Continue reading at research.utwente.nl (PDF) (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements

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