Sadeghi et al., 2010 - Google Patents
Electrostatically driven micro-hydraulic actuator arraysSadeghi et al., 2010
View PDF- Document ID
- 7096792356024007634
- Author
- Sadeghi M
- Kim H
- Najafi K
- Publication year
- Publication venue
- 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
External Links
Snippet
This paper describes an all-electrical individually-addressable micro-hydraulic actuator array that produces high displacement and force by utilizing hydraulic amplification and electrostatic control, offering a considerable improvement in fabrication technique and …
- 238000000034 method 0 abstract description 17
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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