Cao et al., 2015 - Google Patents
Long-life micro vacuum chamber for a micromachined cryogenic coolerCao et al., 2015
View PDF- Document ID
- 6819538382074316173
- Author
- Cao H
- Vermeer C
- Vanapalli S
- Holland H
- ter Brake H
- Publication year
- Publication venue
- Journal of Vacuum Science & Technology A
External Links
Snippet
Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum …
- 239000007789 gas 0 abstract description 37
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