Kodama et al., 2016 - Google Patents
Low-cost, high-performance nonevaporable getter pumps using nonevaporable getter pillsKodama et al., 2016
- Document ID
- 1661565020044542955
- Author
- Kodama H
- Ohno S
- Tanaka M
- Tanaka M
- Okudaira K
- Mase K
- Kikuchi T
- Publication year
- Publication venue
- Journal of Vacuum Science & Technology A
External Links
Snippet
Nonevaporable getter (NEG) pumps are widely used for maintaining a clean ultrahigh vacuum (UHV) of≤ 10− 8 Pa because of their high pumping speeds for hydrogen (H 2) and active gases in the UHV region. In addition, they are oil free, evaporation free, sputtering …
- 229910000986 non-evaporable getter 0 title abstract description 81
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