Wu et al., 2018 - Google Patents
Oblique angle deposition of Au/Ti porous getter filmsWu et al., 2018
View PDF- Document ID
- 16751165064518427904
- Author
- Wu M
- Moulin J
- Bosseboeuf A
- Publication year
- Publication venue
- Journal of Applied Physics
External Links
Snippet
Interdiffusion in gold/titanium films with titanium evaporated on silicon at different oblique angles (0, 30, 50, and 70) and gold evaporated under normal incidence is investigated using a scanning electron microscope and in-situ sheet resistance measurements for the …
- 239000010936 titanium 0 abstract description 107
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
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