WO2024190069A1 - Probe - Google Patents

Abstract

The present invention presses a plunger against an inner wall of a barrel in a stable manner.　A probe of the present invention comprises: a first plunger; a barrel that holds the first plunger in a movable state; and a coil spring that urges the first plunger. The coil spring has a first coil part, a second coil part, and a third coil part. The first coil part is located at one end section of the third coil part and is in contact with the first plunger. The second coil part is located at the other end section of the third coil part. In a state in which no load is being applied to the coil spring, at least one among a first plane perpendicular to a first center axis of the first coil part and a second plane perpendicular to a second center axis of the second coil part is not parallel to a third plane perpendicular to a third center axis of the third coil part.

Description

probe

The present invention relates to a probe.

　Probes that can be attached to inspection sockets, etc., have been proposed in the past, such as in Patent Document 1.

JP 2020-165803 A

However, there is not enough force to press the plunger against the inner wall of the barrel.

Thus, one object of the present invention is to stably press the plunger against the inner wall of the barrel. Other objects of the present invention will become apparent from the description of this specification.

One aspect of the present invention is a probe comprising a first plunger, a barrel that holds the first plunger in a movable state, and a coil spring that biases the first plunger, the coil spring having a first coil portion, a second coil portion, and a third coil portion, the first coil portion being located at one end of the third coil portion and in contact with the first plunger, and the second coil portion being located at the other end of the third coil portion, and in a state where no load is applied to the coil spring, at least one of a first plane perpendicular to the first central axis of the first coil portion and a second plane perpendicular to the second central axis of the second coil portion is non-parallel to a third plane perpendicular to the third central axis of the third coil portion.

The above aspect of the present invention allows the plunger to be stably pressed against the inner wall of the barrel.

4 is a configuration diagram of the probe before a force is applied to a first plunger in the embodiment. FIG. FIG. 2 is an exploded view of the probe according to the embodiment. FIG. 2 is a side view of the coil spring of the present embodiment. 4 is a configuration diagram of the probe in the present embodiment in a state where a force is applied to a first plunger. FIG.

The present embodiment will be described below with reference to Figures 1 to 4. Note that the embodiment is not limited to the following embodiment. Furthermore, the contents described in one embodiment are, in principle, also applicable to the other embodiments. Furthermore, each embodiment and each modified example can be combined as appropriate.

In addition, in Figures 1, 2, and 4, the barrel 13 is shown in cross section, and the other members are shown in side view. In addition, to explain the directions, the direction in which the plunger and barrel are aligned is defined as the x direction, and the direction perpendicular to the x direction is defined as the y direction.

Specifically, as shown in Figures 1 to 4, in this embodiment, the direction in which the first plunger 11, barrel 13, and second plunger 12 are aligned is the x direction, and the radial direction of each of the first plunger 11, barrel 13, and second plunger 12 is the y direction. In addition, in Figures 1 to 4, the directions indicated by the arrows on the x and y axes are defined as the leftward and upward directions, respectively.

(Probe 1)
The probe 1 in this embodiment includes a first plunger (terminal on the substrate side of the inspection device) 11, a second plunger (terminal on the inspection target side) 12, a barrel 13, and a coil spring 14. The probe 1 is a measuring device used for semiconductor inspection (see FIGS. 1 and 2). The first plunger 11, the second plunger 12, the barrel 13, and the coil spring 14 are made of conductive materials. The probe 1 is configured such that the coil spring 14 in the barrel 13 biases the first plunger 11 in a direction to protrude from the barrel 13.

(First plunger 11)
The first plunger 11 has a first contact portion 11a and a first base end portion 11b. The radial size of the first contact portion 11a is smaller than the radial size of the first base end portion 11b.

The end (first tip a1) of the first contact portion 11a protrudes from the inside to the outside of the barrel 13. That is, at least a part of the first contact portion 11a is exposed from the barrel 13. The first base end 11b is held by the barrel 13 in a state in which it can move in the x direction. The side of the first contact portion 11a that contacts the first base end 11b (the left side of the first contact portion 11a in the x direction) is located inside the barrel 13. The end (second tip a2) on the left side in the x direction of the first base end 11b is formed with a first protrusion 11c that protrudes to the side where the second plunger 12 is located (the left side in the x direction). The radial size of the first protrusion 11c is smaller than the radial size of the second tip a2. The second tip a2 has a flat shape in the radial direction. The first coil portion 14a of the coil spring 14 is inserted into the first protrusion 11c.

(Second plunger 12)
The second plunger 12 has a second contact portion 12a and a second base end portion 12b. The radial size of the second contact portion 12a is smaller than the radial size of the second base end portion 12b.

The end (third tip a3) of the second contact portion 12a protrudes from the inside to the outside of the barrel 13. That is, at least a part of the second contact portion 12a is exposed from the barrel 13. The second base end 12b is held by the barrel 13 in a state where it cannot move relative to the barrel 13. The end (fourth tip a4) on the right side in the x direction of the second base end 12b is formed with a second protrusion 12c that protrudes to the side where the first plunger 11 is located (right side in the x direction). The radial size of the second protrusion 12c is smaller than the radial size of the fourth tip a4. The fourth tip a4 is a flat shape in the radial direction. The second coil portion 14b of the coil spring 14 is inserted into the second protrusion 12c. The second base end 12b has a first recessed region 12b1 whose outer diameter is smaller than that of the adjacent region.

(Barrel 13)
The barrel 13 has a main body portion 13a having a cylindrical shape.

The end (fifth tip a5) of the main body 13a that holds the first plunger 11 is bent toward the inside of the cylindrical shape, forming a narrowed region (first convex region 13a1) with a smaller inner diameter. The first convex region 13a1 prevents the first base end 11b of the first plunger 11 from slipping out to the right in the x direction. The first convex region 13a1 may be formed around the entire circumference of the fifth tip a5, or may be formed on only a part of the fifth tip a5.

In the area of the main body 13a that accommodates the second base end 12b of the second plunger 12, a narrowed area (second convex area 13a2) that protrudes toward the inside of the cylindrical shape and has a smaller inner diameter is formed. The first recessed area 12b1 of the second base end 12b of the second plunger 12 is hooked onto the second convex area 13a2, and the second plunger 12 is fixed to the barrel 13. The second convex area 13a2 may be formed around the entire circumference of the inner wall of the main body 13a, or may be formed on only a part of the inner wall of the main body 13a.

(Coil spring 14)
The coil spring 14 is located in the barrel 13 and biases the first plunger 11 in the x-direction, causing the first contact portion 11a of the first plunger 11 to protrude from the inside to the outside of the barrel 13. The coil spring 14 has a first coil portion 14a, a second coil portion 14b, and a third coil portion 14c (see FIGS. 3 and 4). The first coil portion 14a, the second coil portion 14b, and the third coil portion 14c are integrally formed. The first coil portion 14a is located at one end of the third coil portion 14c and contacts the first plunger 11. The first coil portion 14a includes a seat winding and is configured with a closed end. The second coil portion 14b is located at the other end of the third coil portion 14c and contacts the second plunger 12. The second coil portion 14b includes a seat winding and is configured with a closed end. The inner diameters of the first coil portion 14a and the second coil portion 14b are smaller than the inner diameter of the third coil portion 14c. The third coil portion 14c is deflected more greatly in response to a load than the first coil portion 14a and the second coil portion 14b. The third coil portion 14c is formed of a generally cylindrical spring whose inner diameter at the end portion is smaller than the inner diameter at the center portion. The outer diameters of the first coil portion 14a, the second coil portion 14b, and the third coil portion 14c are smaller than the inner diameter of the barrel 13.

When no load is applied to the coil spring 14, the first plane E1 perpendicular to the central axis (first central axis LX1) of the first coil portion 14a forms a predetermined angle (first angle θ1) less than 90 degrees with the central axis (third central axis LX3) of the third coil portion 14c. That is, the first plane E1 is not parallel to the third plane E3 perpendicular to the third central axis LX3. In other words, the first plane E1 is inclined with respect to the third plane E3. Since the first plane E1 is inclined with respect to the third plane E3, the first central axis LX1 extends in a direction different from the direction in which the third central axis LX3 extends (x direction). In addition, the first central axis LX1 intersects with the end face of the first coil portion 14a at a position shifted from the area through which the third central axis LX3 passes on the end face of the first coil portion 14a.

When no load is applied to the coil spring 14, the second plane E2 perpendicular to the central axis (second central axis LX2) of the second coil portion 14b forms a predetermined angle (second angle θ2) less than 90 degrees with the third central axis LX3. That is, the second plane E2 is not parallel to the third plane E3 perpendicular to the third central axis LX3. In other words, the second plane E2 is inclined with respect to the third plane E3. Since the second plane E2 is inclined with respect to the third plane E3, the second central axis LX2 extends in a direction different from the direction in which the third central axis LX3 extends (x direction). In addition, the second central axis LX2 intersects with the end face of the second coil portion 14b at a position shifted from the area through which the third central axis LX3 passes on the end face of the second coil portion 14b.

In this embodiment, an example is shown in which the first angle θ1 and the second angle θ2 are the same angle between 75 degrees and 85 degrees.

The winding pitch of the coil spring 14 is formed as follows:

At least one of the pitch of the windings close to the first coil portion 14a of the third coil portion 14c (11th pitch P11) and the pitch between the third coil portion 14c and the first coil portion 14a (12th pitch P12) on one side in the y direction (e.g., the upper side in the y direction) is narrower than the pitch of the other region (the pitch of the region of the third coil portion 14c away from the first coil portion 14a and the second coil portion 14b (3rd pitch P3)). And/or at least one of the 11th pitch P11 and the 12th pitch P12 on the other side in the y direction (e.g., the lower side in the y direction) is wider than the third pitch P3.

At least one of the pitch of the winding of the third coil portion 14c close to the second coil portion 14b (21st pitch P21) and the pitch between the third coil portion 14c and the second coil portion 14b (22nd pitch P22) on one side of the y direction is narrower than the third pitch P3. And/or at least one of the pitches of the 21st pitch P21 and the 22nd pitch P22 on the other side of the y direction is wider than the third pitch P3.

In this embodiment (see FIG. 3), an example is shown in which the 11th pitch P11 and the 12th pitch P12 on one side of the y direction are narrower than the third pitch P3, and the 21st pitch P21 and the 22nd pitch P22 on one side of the y direction are narrower than the third pitch P3.

It is desirable that the coil spring 14 is formed so that on one side of the y direction, the first plane E1 and the third plane E3 approach each other, and on the other side of the y direction, the first plane E1 and the third plane E3 move away from each other, and on one side of the y direction, the second plane E2 and the third plane E3 approach each other, and on the other side of the y direction, the second plane E2 and the third plane E3 move away from each other, i.e., the first plane E1 and the second plane E2 intersect to form an approximate V-shape.

In particular, it is desirable that the coil spring 14 be formed so that the first plane E1 and the second plane E2 are in a line-symmetrical positional relationship, i.e., so that the first angle θ1 and the second angle θ2 are equal.

However, as long as at least one of the first plane E1 and the second plane E2 is not parallel to the third plane E3, other positional relationships are also possible, such as the first plane E1 and the second plane E2 being parallel.

(Attachment of the first plunger 11 to the barrel 13)
The second tip a2 of the first base end 11b of the first plunger 11 is inserted from the end (fifth tip a5) on the side where the first convex region 13a1 of the main body 13a of the barrel 13 is located. At this time, the first convex region 13a1 and the second convex region 13a2 are not formed in the barrel 13. When the first base end 11b is completely inserted into the main body 13a of the barrel 13, the first convex region 13a1 is formed by crimping or the like.

(Attachment of second plunger 12 to barrel 13)
After the first plunger 11 is attached to the barrel 13, the coil spring 14 is inserted from the end (sixth tip portion a6) of the barrel body that holds the second plunger, and then the second base end portion 12b of the second plunger 12 is inserted from the sixth tip portion a6. The first coil portion 14a of the coil spring 14 is inserted into the first convex portion 11c of the first plunger 11, and the second coil portion 14b of the coil spring 14 is inserted into the second convex portion 12c of the second plunger 12.

After the second plunger 12 is inserted, a second convex region 13a2 is formed by a punch or the like. The first recessed region 12b1 of the second base end 12b fits into the second convex region 13a2 of the body portion 13a of the barrel 13, and the second plunger 12 is fixed to the barrel 13. By fixing the second plunger 12 to the barrel 13, the probe 1 of this embodiment is formed.

(Operation procedure)
When the probe 1 is attached to an inspection socket (not shown) and the first tip a1 of the first contact portion 11a of the first plunger 11 of the probe 1 comes into contact with the substrate 100 of the inspection device, the probe 1 is lifted toward the object under inspection. Then, a force is applied to the second plunger 12 from the object under inspection (see FIG. 4).

The force applied to the first plunger 11 and the second plunger 12 pushes the first plunger 11 into the barrel 13. A compressive force is applied to the coil spring 14. The third coil portion 14c contracts in the x direction and is partially displaced in the y direction, deforming into an arched or serpentine shape. Because the third coil portion 14c deforms into an arched or serpentine shape, a portion of the third coil portion 14c comes into contact with the inner wall of the barrel 13. The first coil portion 14a pushes the first plunger 11 in the x direction. The first coil portion 14a also pushes the first plunger 11 in the y direction, in the opposite direction to the displacement of the third coil portion 14c (applies lateral pressure). Because the first coil portion 14a pushes the first plunger 11 in the y direction, the first base end portion 11b is pressed against the inner wall of the barrel 13, causing the first plunger 11 to become tilted. When the first plunger 11 is in a tilted state, the first plunger 11 is electrically connected to the second plunger 12 via the barrel 13.

(Effect of using coil spring 14 with inclined end)
Since the first plane E1 is inclined with respect to the third plane E3, when a compressive force in the x direction is applied to the coil spring 14, the coil spring 14 is more likely to deform into an arch shape or a serpentine shape, and a portion of the coil spring 14 is more likely to come into contact with the inner wall of the barrel 13, compared to a configuration in which the first plane E1 and the third plane E3 are parallel.

Because the first plane E1 is inclined with respect to the third plane E3, part of the spring 14 is more likely to come into contact with the inner wall of the barrel 13, so the force with which the first coil portion 14a presses the first plunger 11 against the inner wall of the barrel 13 is stronger, making it easier to maintain contact between the first plunger 11 and the barrel 13. In other words, the first plunger 11 can be stably pressed against the inner wall of the barrel 13, making it easier to maintain the first plunger 11 electrically connected to the barrel 13. And it makes it easier to maintain the first plunger 11 electrically connected to the second plunger 12 via the barrel 13.

Even if the second plane E2 is inclined with respect to the third plane E3, the coil spring 14 can be deformed into an arched or serpentine shape, so that a portion of the coil spring 14 can easily come into contact with the inner wall of the barrel 13. Even if the second plane E2 is inclined with respect to the third plane E3, a portion of the coil spring 14 can be easily brought into contact with the inner wall of the barrel 13. Therefore, as long as at least one of the first plane E1 and the second plane E2 is inclined with respect to the third plane E3, the first plunger 11 can be pressed against the inner wall of the barrel 13 in a stable manner. However, the first plunger 11 can be pressed against the inner wall of the barrel 13 more stably in a configuration in which both the first plane E1 and the second plane E2 are inclined with respect to the third plane E3 than in a configuration in which only one of the first plane E1 and the second plane E2 is inclined with respect to the third plane E3.

(Effect of forming the coil spring 14 in a positional relationship where the first plane E1 and the second plane E2 intersect)
The radial component of the biasing force of the coil spring 14 becomes larger, and compared to a configuration in which the first plane E1 and the second plane E2 do not intersect, the end face of the first coil portion 14a can stably press the first plunger 11 against the barrel 13.

(Effect of forming the coil spring 14 in a positional relationship in which the first plane E1 and the second plane E2 are line-symmetrical)
The coil spring 14 is easier to form than in a configuration in which the first plane E1 and the second plane E2 are not line-symmetrically positioned. Also, the coil spring 14 can be inserted into the barrel 13 without considering the insertion direction.

(Effect of Providing First Convex Part 11c)
The first protrusion 11c functions as a spring support for the coil spring 14 and restricts the first coil portion 14a of the coil spring 14 from being significantly displaced in the radial direction (such as the y direction). By restricting the first coil portion 14a from being significantly displaced in the radial direction, the coil spring 14 can reliably press the first plunger 11 against the inner wall of the barrel 13.

(Application example of the second plunger 12)
In the present embodiment, an example has been described in which the second plunger 12 is fixed to the barrel 13. However, the second plunger 12 may be held in the barrel 13 in a state in which it is movable in the x direction. When the second plunger 12 is held in the barrel 13 in a state in which it is movable in the x direction, the coil spring 14 of the present embodiment can also stably press the second plunger 12 against the inner wall of the barrel 13.

(Application examples of the first coil portion 14a and the second coil portion 14b)
In the present embodiment, an example has been described in which the first coil portion 14a and the second coil portion 14b include end turns and are configured with closed ends. However, at least one of the first coil portion 14a and the second coil portion 14b may be configured with an open end without including an end turn.

Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are within the scope of the invention and its equivalents as set forth in the claims, as well as the scope and spirit of the invention.

According to the present specification, there are provided probes having the following aspects.
(Aspect 1)
Aspect 1 comprises a first plunger, a barrel that holds the first plunger in a movably state, and a coil spring that biases the first plunger, wherein the coil spring has a first coil portion, a second coil portion, and a third coil portion, wherein the first coil portion is located at one end of the third coil portion and is in contact with the first plunger, and the second coil portion is located at the other end of the third coil portion, and when no load is applied to the coil spring, at least one of a first plane perpendicular to a first central axis of the first coil portion and a second plane perpendicular to a second central axis of the second coil portion is non-parallel to a third plane perpendicular to a third central axis of the third coil portion.

In the above-described embodiment, when a compressive force is applied to the coil spring, the coil spring deforms into an arched or serpentine shape, and a portion of the coil spring is likely to come into contact with the inner wall of the barrel. Because a portion of the coil spring comes into contact with the inner wall of the barrel, the force with which the first coil portion presses the first plunger against the inner wall of the barrel increases, making it easier to maintain contact between the first plunger and the barrel. In other words, the first plunger can be stably pressed against the inner wall of the barrel, making it easier to maintain the first plunger electrically connected to the barrel.

(Aspect 2)
In the second aspect, the coil spring is formed in a positional relationship in which the first plane and the second plane intersect with each other when no load is applied to the coil spring.

In the above-mentioned embodiment, the radial component of the biasing force of the coil spring is large, and compared to a configuration in which the first plane and the second plane do not intersect, the end face of the first coil portion can be pressed against the barrel of the first plunger more stably.

(Aspect 3)
In a third aspect, the coil spring is formed in a positional relationship in which the first plane and the second plane are line-symmetrical when no load is applied to the coil spring.

The above-mentioned embodiment makes it easier to form the coil spring compared to a configuration in which the coil spring is formed in a positional relationship in which the first plane and the second plane are not line-symmetrical. In addition, the coil spring can be inserted into the barrel without considering the insertion direction.

(Aspect 4)
In an aspect 4, the first plunger is formed with a protrusion into which the first coil portion is inserted.

In the above-described embodiment, the protrusion functions as a spring support for the coil spring, restricting the first coil portion of the coil spring from being displaced significantly in the radial direction. By restricting the first coil portion from being displaced significantly in the radial direction, the coil spring can reliably press the first plunger against the inner wall of the barrel.

1 Probe, 11 First plunger, 11a First contact portion, 11b First base end portion, 11c First convex portion, 12 Second plunger, 12a Second contact portion, 12b Second base end portion, 12b1 First concave region, 12c Second convex portion, 13 Barrel, 13a Main body portion, 13a1 First convex region, 13a2 Second convex region, 14 Coil spring, 14a First coil portion, 14b Second coil portion, 14c Third coil portion, 100 Inspection device substrate, a1 First tip portion (end portion of first contact portion), a2 Second tip portion (end portion of first base end portion), a3 Third tip portion (end portion of second contact portion), a4 Fourth tip portion (end portion of second base end portion), a5 Fifth tip portion (end portion of barrel body portion that holds first plunger), a6 Sixth tip portion (end portion of barrel body portion that holds second plunger), E1 First plane, E2 Second plane, E3 Third plane, LX1 First central axis, LX2 Second central axis, LX3 Third central axis, P11 Eleventh pitch, P12 Twelfth pitch, P21 Twenty-first pitch, P22 Twenty-second pitch, P3 Third pitch, θ1 First angle, θ2 Second angle

Claims (4)

A first plunger;
a barrel that movably holds the first plunger;
a coil spring that biases the first plunger,
the coil spring has a first coil portion, a second coil portion, and a third coil portion,
the first coil portion is located at one end of the third coil portion and is in contact with the first plunger;
the second coil portion is located at the other end of the third coil portion,
A probe, wherein when no load is applied to the coil spring, at least one of a first plane perpendicular to a first central axis of the first coil section and a second plane perpendicular to a second central axis of the second coil section is non-parallel to a third plane perpendicular to a third central axis of the third coil section. The probe of claim 1, wherein the coil spring is formed in a positional relationship in which the first plane and the second plane intersect when no load is applied to the coil spring. The probe of claim 2, wherein the coil spring is formed in a positional relationship in which the first plane and the second plane are linearly symmetrical when no load is applied to the coil spring. The probe according to claim 1, wherein the first plunger is formed with a protrusion into which the first coil portion is inserted.

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