WO2023190682A1

WO2023190682A1 - Diffusion plate and device

Info

Publication number: WO2023190682A1
Application number: PCT/JP2023/012796
Authority: WO
Inventors: 光雄有馬; 正之石渡
Original assignee: デクセリアルズ株式会社
Priority date: 2022-03-30
Filing date: 2023-03-29
Publication date: 2023-10-05
Also published as: TW202403228A

Abstract

[Problem] To further improve an effect of suppressing unnecessary diffracted light, which includes spectral diffracted light, 0-th order diffracted light, and the like, and thereby further improve the homogeneity and light distribution characteristics of the diffused light, by using a new variable element of a microlens array structure even in a case of regularly arraying a plurality of microlenses, and by imparting irregular phase difference on the diffused light from the plurality of lenses. [Solution] Provided is a diffusion plate that is provided with a base material, and a microlens array composed of a plurality of microlenses arranged on an XY-plane on at least one of the surfaces of the base material. The surface shape of each of the microlenses is a preset reference surface shape, and the plurality of microlenses are arranged regularly on the XY-plane. Each of the microlenses is disposed at a position randomly shifted in the Z-direction, which is perpendicular to the XY-plane, from a reference position in the Z-direction. There are Z-directional steps at boundaries between the microlenses that are mutually adjacent to each other.

Description

Diffuser and equipment

The present invention relates to a diffuser plate and a device.

In order to change the light diffusion characteristics, a diffusion plate is used to diffuse incident light in a desired direction. Diffusion plates are widely used in various devices such as display devices such as displays, projection devices such as projectors, and various lighting devices. There is a type of diffuser plate that uses light refraction caused by the surface shape of the diffuser plate to diffuse incident light at a desired diffusion angle. As this type of diffusion plate, a microlens array type diffusion plate in which a plurality of microlenses each having a size of about several tens of micrometers are arranged is known.

Such a microlens array type diffuser plate has a problem in that as a result of interference between the wavefronts of light from each microlens, diffraction waves are generated due to the periodic structure of the microlens array, causing unevenness in the intensity distribution of the diffused light. For this reason, techniques have been proposed to reduce unevenness in the intensity distribution of diffused light due to interference and diffraction by varying the arrangement of microlenses, the shape of lens surfaces, and the shape of apertures.

For example, Patent Document 1 discloses that a plurality of microlenses are randomly arranged using a honeycomb structure as a basic pattern. In Patent Document 1, a plurality of microlenses are randomly arranged on the surface of a diffuser plate such that the apex position of each microlens is located within a predetermined circle centered on the apex position in the basic pattern. .

Furthermore, Patent Document 2 discloses that the cross-sectional shapes and heights of the vertices of a plurality of microlenses arranged in a grid on the main surface of a diffuser plate are different from each other, and the surface shape of each microlens does not have an axis of symmetry. It is disclosed that the shape is

Furthermore, Patent Document 3 discloses that by providing a difference in the height of the vertices of a plurality of regularly arranged microlenses, the diffusion angle distribution of transmitted light from each microlens is approximately the same and is within a certain range. Microlenses having mutually different phase differences are disclosed.

Further, in Patent Document 4, microlenses are formed such that the bottoms of a plurality of microlenses (concavities) are at two or more different positions in the depth direction, and the bottoms of the microlenses are arranged irregularly. However, it is disclosed that the pattern exists within a predetermined circle based on the center point of the regular arrangement pattern.

Further, Patent Document 5 discloses arranging a plurality of microlenses based on a reference lattice while displacing the position of the apex of the microlens to the vicinity of a lattice point of the reference lattice structure.

Patent No. 4981300 International Publication 2016/051785 JP2017-009669 Patent No. 6680455 International Publication 2015/182619

As mentioned above, in the conventional techniques described in Patent Documents 1 to 5, a plurality of microlenses are arranged at irregular planar positions on the surface of the diffuser plate (on the XY plane), or a plurality of microlenses are arranged regularly By irregularly shifting the positions of the vertices of the microlenses on the XY plane or by making the heights of the vertices differ from each other in the Z direction, the surface shapes of the multiple lenses were irregularly varied. . In this way, the microlens array structure in which the planar arrangement of the lenses, the position of the lens vertices, and the surface shape of the lenses are irregularly varied can have the effect of reducing the above-mentioned unevenness in the intensity distribution of the diffused light to some extent.

However, in a microlens array structure in which a plurality of microlenses are arranged periodically, the diffraction phenomenon of the periodic structure causes spectral diffracted light (a spectrum distributed concentrically around the optical axis of the light emitted from the diffuser plate). There is a problem in that the uniformity of the intensity of the diffused light is reduced. Furthermore, since high-intensity 0th-order diffracted light (peak noise that occurs near the optical axis of the emitted light (diffusion angle is near 0 degrees)) is generated, it becomes difficult to appropriately disperse and distribute the diffused light. There was also a problem that the light distribution of the diffused light deteriorated. In this regard, even with the irregular microlens array structure of the prior art described above, it is not possible to sufficiently suppress spectral diffracted light and zero-order diffracted light, resulting in uneven intensity distribution of diffused light. There was room for improvement in the homogeneity and light distribution of diffused light.

Therefore, in addition to irregularly varying the arrangement of a plurality of lenses, the height or plane position of the lens apex, and the lens surface shape as in the prior art described above, by using new variable elements of the microlens array structure, It has been desired to impart an irregular phase difference to the diffused light from a plurality of lenses. This further enhances the effect of suppressing unnecessary diffracted light, including spectral diffracted light and zero-order diffracted light, further reduces unevenness in the intensity distribution of diffused light, and further improves the homogeneity and light distribution of diffused light. You can expect to do so.

In particular, when multiple microlenses having approximately the same lens shape are arranged regularly (for example, when arranged regularly in a rectangular lattice shape or a hexagonal lattice shape), it is possible to suppress brightness unevenness and flickering for each lens. There are advantages. However, when multiple microlenses are arranged regularly, compared to the case where they are arranged irregularly, unnecessary diffracted light including spectral diffracted light and zero-order diffracted light due to the periodic structure of the lenses described above is generated. There is a problem in that the generation of light becomes even more noticeable. Therefore, in the case of the regular arrangement, it is even more desirable to use the above-mentioned new variable element of the microlens array structure to impart an irregular phase difference to the diffused light from the plurality of lenses. was.

In addition, Patent Document 3 discloses that a raised part that gives a phase difference to a plurality of regularly arranged microlenses is continuously formed in the lens part, and this raised part is formed into a convex curved surface having a larger slope than the lens part or It is disclosed that the convex portion of the microlens has a concave curved surface and the difference between the maximum height and the minimum height of the convex portion of the microlens is controlled within a predetermined range. However, if the raised portion of the microlens is configured with an inclined convex curved surface or concave curved surface as in Patent Document 3, the cutoff property and uniformity of the diffused light distribution may deteriorate, and the local There were problems with small brightness changes (unevenness) and flickering.

Therefore, the present invention has been made in view of the above circumstances, and an object of the present invention is to solve new variations in the microlens array structure even when a plurality of microlenses are regularly arranged. By using elements to impart an irregular phase difference to the diffused light from multiple lenses, the effect of suppressing unnecessary diffracted light including spectral diffracted light and 0th order diffracted light is further enhanced, and the diffused light The objective is to further improve the homogeneity and light distribution of the light.

In order to solve the above problems, according to a certain aspect of the present invention,
base material and
a microlens array composed of a plurality of microlenses arranged on an XY plane on at least one surface of the base material;
Equipped with
The surface shape of each microlens has a preset reference surface shape,
The plurality of microlenses are regularly arranged on the XY plane,
Each of the microlenses is arranged at a position randomly shifted in the Z direction from a reference position in the Z direction perpendicular to the XY plane,
A diffusion plate is provided at a boundary between the plurality of microlenses that are adjacent to each other, and the step in the Z direction is present.

The step may be made of a flat surface perpendicular to the XY plane.

The shift amount Δs of each microlens in the Z direction may vary randomly within a predetermined variation width δS.

When λ is the wavelength of the incident light [μm] and n is the refractive index of the material forming the microlens array,
The fluctuation range δS of the shift amount Δs may satisfy the following formula (5).

The fluctuation range δS of the shift amount Δs may satisfy the following formula (6).

The fluctuation width δS of the shift amount Δs may substantially satisfy the following formula (7).

When m is an integer of 1 or more, λ is the wavelength of the incident light [μm], and n is the refractive index of the material forming the microlens array,
The fluctuation width δS [μm] of the shift amount Δs may satisfy the following formula (8).

The fluctuation width δS [μm] of the shift amount Δs may satisfy the following formula (1).

The fluctuation width δS [μm] of the shift amount Δs may substantially satisfy the following formula (2).

The following formula (3) may be satisfied.

Eva _{(D', λ, δZ)} : Evaluation value determined by the above formula (3) λ: Wavelength of incident light [μm]
n: refractive index of the material forming the microlens array δZ: difference between the maximum value h _max and the minimum value h _min of the height h of the apex of each of the microlenses [μm]
Dk: Reference opening width [μm] of the reference surface shape. The reference opening width Dk is the diameter of the circular reference opening of the reference surface shape.
D': Effective opening width [μm] of the reference surface shape. The effective opening width D' is the diameter of an inscribed circle inscribed in a regular hexagon that is inscribed in a circle whose diameter is the reference opening width Dk.

The following formula (4) may be satisfied.

On the XY plane, the plurality of microlenses may be arranged with no gaps between them, and there may be no flat portion at the boundary between the plurality of mutually adjacent microlenses.

The surface shapes of the plurality of microlenses may be the same.

The surface shape of each microlens may be an aspherical shape or a spherical shape having an axis of symmetry.

The microlens may be a cylindrical lens.

The optical axis of at least some of the plurality of microlenses may be inclined with respect to the Z direction at an inclination angle α of more than 0° and less than 60°.

The inclination angles α of the optical axes of the plurality of microlenses are different from each other,
The inclination angle α may vary randomly within a predetermined variation range with respect to a predetermined reference inclination angle αk.

The reference opening of the reference surface shape may be circular, oval, or polygonal including square, rectangle, diamond, or hexagon.

The material forming the microlens array may be glass, resin, or semiconductor.

In order to solve the above problems, according to another aspect of the present invention, an apparatus is provided that includes the above diffusion plate.

As explained above, according to the present invention, even when a plurality of microlenses are arranged regularly, by using a new variable element of the microlens array structure, the diffused light from the plurality of lenses can be irregularly arranged. By imparting a phase difference, the effect of suppressing unnecessary diffracted light including spectral diffracted light, zero-order diffracted light, etc. can be further enhanced, and the homogeneity and light distribution of diffused light can be further improved.

FIG. 1 is a plan view and an enlarged view schematically showing a diffusion plate according to an embodiment of the present invention. FIG. 2 is an enlarged plan view and an enlarged cross-sectional view schematically showing the configuration of a diffuser plate according to the same embodiment. FIG. 3 is an enlarged cross-sectional view schematically showing the vicinity of the boundary of the microlens according to the same embodiment. FIG. 3 is a plan view schematically showing the planar shape (outer shape) of the microlens according to the same embodiment. FIG. 3 is an enlarged perspective view showing the surface of the microlens array according to the same embodiment. FIG. 7 is an explanatory diagram showing a manner in which the height of the apex of each microlens changes due to a change in the lens surface shape and a lens shift according to the same embodiment. FIG. 3 is a plan view showing a reference aperture width and an effective aperture width according to the same embodiment. It is a schematic diagram which shows the aspect which inclines the optical axis of the microlens based on the same embodiment. FIG. 3 is a schematic diagram showing a deflection function of a microlens according to the same embodiment. FIG. 3 is an explanatory diagram showing a planar shape of an anamorphic microlens according to the same embodiment. FIG. 3 is a perspective view showing the three-dimensional shape of an anamorphic microlens according to the same embodiment. FIG. 3 is an explanatory diagram showing a planar shape of a torus-shaped microlens according to the same embodiment. FIG. 2 is a perspective view showing the three-dimensional shape of a torus-shaped microlens according to the same embodiment. FIG. 3 is a perspective view showing a torus-shaped curved surface according to the same embodiment. It is a flowchart which shows the design method of the microlens based on the same embodiment. FIG. 3 is a plan view showing the arrangement of lens center coordinates of the microlens according to the same embodiment. FIG. 3 is a plan view showing the arrangement of microlenses having a rotationally symmetrical aspherical shape according to the same embodiment. FIG. 3 is a perspective view showing a microlens having a rotationally asymmetric aspherical shape according to the same embodiment. FIG. 3 is a perspective view showing a method for determining the surface shape of a microlens according to the same embodiment. FIG. 6 is an explanatory diagram showing a method for adjusting the lens surface height of the microlens according to the same embodiment. FIG. 6 is an explanatory diagram showing a method for adjusting the lens surface height of the microlens according to the same embodiment. It is a flowchart which shows the manufacturing method of the diffuser plate based on the same embodiment. It is a graph showing the relationship between the value of the parameter “(n-1)·δS/λ” and the diffraction peak level A according to the example. It is a graph showing the relationship between the value of the parameter “(n-1)·δS/λ” and the diffraction peak ratio K _A according to the example. FIG. 3 is an explanatory diagram regarding a diffuser plate according to Comparative Example 1. FIG. 3 is an explanatory diagram regarding a diffuser plate according to Example 1. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 2. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 3. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 4. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 5. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 6. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 7. FIG. 7 is an explanatory diagram regarding a diffuser plate according to Example 8. FIG. 7 is an explanatory diagram regarding a diffusion plate according to Example 9.

Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Note that, in this specification and the drawings, components having substantially the same functional configurations are designated by the same reference numerals and redundant explanation will be omitted.

<1. Overview of diffuser plate>
First, an overview of a diffusion plate 1 according to an embodiment of the present invention will be described with reference to FIGS. 1 to 5.

As shown in FIGS. 1 to 5, the diffusion plate 1 according to the present embodiment is a microlens array type diffusion plate that has a function of uniformly diffusing light. The diffusion plate 1 includes a base material 10 and a microlens array 20 formed on an XY plane on at least one surface (principal surface) of the base material 10. The microlens array 20 is composed of a plurality of microlenses 21 regularly arranged on the XY plane. The microlens 21 has a convex structure (convex lens) or a concave structure (concave lens) having a light diffusion function, and has an aperture width D (also referred to as a lens diameter or aperture diameter) of about several tens of μm, for example, and an aperture width D of about several tens of μm. It has a radius of curvature R of approximately Note that the diffusion plate 1 may be a transmission type diffusion plate that transmits incident light, or a reflection type diffusion plate that reflects incident light, as long as it is equipped with the microlens array 20. It's okay.

Furthermore, as described above, the plurality of microlenses 21 are regularly arranged on the XY plane of the base material 10. For example, in the examples shown in FIGS. 1 and 2, each microlens 21 has a regular hexagonal planar shape (aperture shape), and the plurality of microlenses 21 are arranged in a hexagonal lattice shape on the XY plane of the base material 10. are normally arranged. However, the plurality of microlenses 21 may be regularly arranged based on various reference lattices other than the hexagonal lattice, such as a square lattice, a rectangular lattice, a triangular lattice, or other polygonal lattices. Here, "regularly arranged" means substantially regularly arranged. "Substantially regularly arranged" means, for example, not only when perfectly aligned with the reference grid and normally arranged, but also within a minute error (for example, ±1% placement error). , including the case where the grid is shifted from the reference grid.

In the diffuser plate 1 according to the present embodiment, the surface shape (three-dimensional shape) of each microlens 21 has a spherical shape or an aspherical shape. Each microlens 21 is a spherical lens or an aspherical lens. Furthermore, the surface shape of each microlens 21 (hereinafter sometimes referred to as "lens surface shape") has a predetermined reference surface shape set in advance. The surface shape of each microlens 21 preferably matches, for example, the reference surface shape, and as a result, it is preferable that the plurality of microlenses 21 have the same surface shape.

However, the present invention is not limited to this example, and the surface shape of each microlens 21 may be substantially the same as the reference surface shape. For example, the surface shape of each microlens 21 may be a shape that varies within a minute error (for example, a shape error of ±1%) with respect to the reference surface shape. Further, the surface shape of each microlens 21 may be such that the positional shift of the lens apex with respect to the reference surface shape is 5 μm or less, preferably 0.1 μm or less. In this way, the surface shapes of the plurality of microlenses 21 may be completely the same shape, or may be substantially the same shape within the range of the above-mentioned shape error.

In the examples shown in FIGS. 1 and 2, the planar shape of the aperture of the reference surface shape of the microlens 21 (the shape of the reference aperture) is a regular hexagon, but is not limited to this example, and may be circular, circular, etc. It may be an ellipse, or a polygonal shape including a square, rectangle, diamond, or hexagon.

As described above, in this embodiment, the plurality of microlenses 21 having substantially the same surface shape are substantially regularly arranged on the XY plane of the base material 10. This makes it possible to take advantage of the regularly arranged microlenses 21. For example, when a plurality of microlenses having different surface shapes are arranged irregularly, there is a problem that brightness unevenness or flickering occurs for each microlens. In addition, when the surface shape of the microlens is randomly varied, the diffusion angle of the diffused light emitted from each microlens varies, which causes a problem that the cutoff property of the entire diffused light decreases. On the other hand, in this embodiment, since the plurality of microlenses 21 having substantially the same surface shape are arranged substantially regularly, uneven brightness and flickering of each microlens 21 can be prevented. It can be significantly reduced. Further, since the diffusion angles of the diffused light emitted from the plurality of microlenses 21 can be made substantially the same, the cutoff property of the entire diffused light can be improved.

Furthermore, as shown in FIGS. 2 and 5, in this embodiment, each microlens 21 is positioned at a position randomly shifted in the Z direction from a reference position in the Z direction perpendicular to the XY plane of the base material 10. It is located. The shift amount Δs of each microlens in the Z direction varies randomly within a predetermined variation width δS. Therefore, the plurality of microlenses 21 are shifted in the Z direction by mutually different shift amounts Δs. As a result, a step 23 in the Z direction exists at the boundary between the plurality of microlenses 21 adjacent to each other on the XY plane.

In this way, the microlenses 21 according to the present embodiment are arranged regularly on the XY plane, but at positions shifted in the Z direction by a random shift amount Δs. Here, shifting the microlens 21 in the Z direction does not mean changing the surface shape of the microlens 21 in the Z direction, but moving the surface shape of the microlens 21 in parallel in the Z direction (from the reference position in the Z direction). (to move up and down in the Z direction). By shifting the microlens 21 in the Z direction by the shift amount Δs, it is possible to impart a phase difference corresponding to the shift amount Δs to the diffused light emitted from the microlens 21.

This shift of the microlens 21 in the Z direction is a new variable element that does not exist in the past as a variable element of the microlens array structure. The microlens array 20 according to this embodiment combines the above-described random shift of the microlenses 21 in the Z direction with a regular arrangement of a plurality of microlenses 21 having substantially the same lens surface shape. It is characterized by

Thereby, a more irregular phase difference can be imparted to the diffused light emitted from the plurality of microlenses 21. Therefore, since the diffraction of the diffused light emitted from each microlens 21 can be canceled out, the effect of suppressing unnecessary diffracted light including spectral diffracted light and zero-order diffracted light, which could not be sufficiently suppressed in the past, can be suppressed. It can be further increased. Therefore, it is possible to more effectively suppress unevenness in the intensity distribution of the diffused light caused by mutual interference or diffraction of the diffused light from the plurality of microlenses 21, thereby improving the homogeneity and light distribution of the diffused light. can be further improved.

As described above, according to the microlens array 20 according to the present embodiment, the advantages of the plurality of regularly arranged microlenses 21 (the effect of reducing brightness unevenness and flickering for each lens described above, and the cutoff property While taking advantage of the improvement, etc.), unnecessary diffracted light (spectral diffracted light, zero-order diffracted light, etc.) generated due to the periodic structure of the regularly arranged lenses is removed in the Z direction of the microlens 21. can be suitably suppressed by shifting .

Further, according to the present embodiment, the plurality of microlenses 21 are arranged such that, for example, on the XY plane, the amount of overlap Ov between the plurality of mutually adjacent microlenses 21 falls within a preset tolerance range. They may be arranged at regular positions, overlapping each other. Furthermore, as shown in FIGS. 2 and 5, on the XY plane of the base material 10, the plurality of microlenses 21 are arranged without any gaps between them, and the boundaries between the plurality of mutually adjacent microlenses 21 are flat. Preferably, no part is present. That is, the filling rate of the microlenses 21 on the XY plane of the base material 10 is preferably 100%.

As a result, the surface of the diffuser plate 1 is occupied by the uneven structure of the plurality of randomly arranged microlenses 21, and no flat portion exists. Therefore, the incident light on the diffuser plate 1 is transmitted or reflected by the lens surface of one of the microlenses 21 and refracted, so that the zero-order transmitted light passes through the flat part of the base material 10 without being refracted. Components can be suppressed. Therefore, by imparting an irregular phase difference to the diffused light emitted from the plurality of microlenses 21, it is possible to suppress the generation of unnecessary diffracted light and also prevent the generation of light that passes through the diffuser plate 1 without being refracted. .

Furthermore, as described above, each microlens 21 has a preset reference surface shape, and the surface shapes of the plurality of microlenses 21 are substantially the same. Therefore, the aperture width D (lens diameter) and radius of curvature R of the plurality of microlenses 21 are substantially the same. That is, the aperture width D of each microlens 21 is substantially the same as the predetermined reference aperture width Dk. (D [μm] = Dk [μm]). Similarly, the radius of curvature R of each microlens 21 is substantially the same as the predetermined reference radius of curvature Rk (R [μm] = Rk [μm]). Here, the reference aperture width Dk is the aperture width of the reference surface shape of the microlens 21, and the reference radius of curvature Rk is the radius of curvature of the reference surface shape of the microlens 21. The reference surface shape is a lens surface shape that serves as a reference for designing the microlens 21. Thereby, the surface shapes of the plurality of microlenses 21 can be matched to the predetermined reference surface shape.

In this way, the surface shape of each microlens 21 according to the present embodiment is a three-dimensional shape based on a preset reference surface shape. Here, the surface shape (lens surface shape) and reference surface shape of each microlens 21 are preferably aspherical or spherical with an axis of symmetry. Here, the axis of symmetry is an axis that serves as a reference for rotational symmetry or line symmetry. For example, the lens surface shape and the reference surface shape may be a three-dimensional shape that is rotationally symmetrical about the axis of symmetry, or a three-dimensional shape that is line symmetrical about a plane that includes the axis of symmetry. In this way, since the lens surface shape is an aspherical shape or a spherical shape having an axis of symmetry, the lens surface shape does not become an excessively distorted shape or an excessively irregular shape. Therefore, each microlens 21 can suitably exhibit a diffusion function that can realize the uniformity and light distribution of diffused light required of the diffusion plate 1.

Furthermore, it is preferable that the diffusion angles of the diffused light emitted from the plurality of microlenses 21 be a predetermined angle set in advance, and that they be the same. Further, it is more effective that the diffusion angle of the diffused light emitted from the entire diffuser plate 1 according to this embodiment is, for example, in the range of 0.5° or more and 20° or less. In this embodiment, the microlenses 21 are shifted by a random shift amount Δs in the Z direction, and a step 23 is formed at the boundary between the microlenses 21. This prevents unevenness in the intensity distribution of the diffused light due to interference and diffraction of the diffused light emitted from the plurality of microlenses 21 in the diffuser plate 1 that emits diffused light having a diffusion angle in a relatively narrow angle range (for example, 5 degrees). It is possible to reduce the amount of light and distribute the diffused light uniformly.

Further, as shown in FIG. 4, when each microlens 21 is projected onto the XY plane and viewed in plan, the outline (boundary line 24) of the planar shape of each microlens 21 is the same as that of a reference lattice such as a hexagonal lattice. Preferably, it is a straight line that follows the shape. This makes it possible to suppress brightness unevenness and flickering for each microlens 21, and also to make the diffusion angles of the diffused light emitted from the plurality of microlenses 21 the same, thereby improving the cut-off performance of the entire diffused light. .

Further, the optical axes 25 of at least some of the plurality of microlenses 21 may be inclined with respect to the Z direction at an inclination angle α of, for example, more than 1° and less than 60° (see FIG. 8). . By tilting the optical axis 25 of the microlens 21 with respect to the Z direction in this way, the surface shape of the microlens 21 can also be rotated in the tilting direction and tilted with respect to the Z direction. Thereby, the emitted light (diffused light) that passes through the diffuser plate 1 and is diffused can be deflected in a direction different from the normal refraction effect of the diffuser plate. Due to the deflection effect of the diffuser plate 1, the luminous flux of the emitted light can be bent in a desired direction.

Furthermore, it is preferable that the inclination angles α of the optical axes 25 of the plurality of microlenses 21 are different from each other. The inclination angle α may vary randomly within a predetermined variation range (for example, within the range of αk±Δα) with respect to a predetermined reference inclination angle αk (α[°]=αk[°] ±Δα [°]). Thereby, the diffused light emitted from the plurality of microlenses 21 can be randomly deflected, so that the unevenness of the intensity distribution of the diffused light can be reduced and the diffused light can be uniformly distributed.

As described above, in this embodiment, in addition to randomly varying the shift amount Δs of the microlenses 21 in the Z direction, the arrangement of the plurality of microlenses 21 on the XY plane and the aperture of each microlens 21 are Multiple types of variable factors such as the width D and radius of curvature R, the height h of the lens apex, the lens planar shape, the diffusion angle, the inclination angle α of the optical axis 25, etc. are adjusted to a minute value that does not deviate from the regular arrangement of the microlenses 21. It may be varied randomly within the range. Thereby, the microlens array structure can be more randomly varied using various variable elements.

Note that the microlens 21 is not limited to the example of a spherical or aspherical lens as described above, but may be a cylindrical lens (not shown). For example, a plurality of microlenses 21 made up of cylindrical lenses may be regularly arranged on the XY plane of the base material 10 so as to extend in mutually parallel directions (for example, the X direction or the Y direction). Thereby, anisotropy can be imparted to the diffusion direction of the diffusion plate 1 including a plurality of cylindrical lenses. Even when the microlens 21 is composed of cylindrical lenses as described above, it is preferable to shift each cylindrical lens in the Z direction by a random shift amount Δs in the same way as described above. This allows the cylindrical lens to impart anisotropy and a narrow diffusion angle to the diffuser plate 1 while suppressing unnecessary diffracted light including spectral diffracted light and zero-order diffracted light in the diffuser plate 1. becomes possible.

As described above, according to the present embodiment, it is possible to realize a three-dimensional surface structure of the microlens array 20 with high randomness, so that the superposition state of the phases of the diffused lights emitted from the plurality of microlenses 21 can be controlled. be able to. That is, according to the present embodiment, while a plurality of microlenses 21 having the same lens surface shape are regularly arranged, each microlens 21 is randomly shifted in the Z direction, and mutually adjacent microlenses 21, A vertical step 23 is provided between 21. As a result, even if a plurality of microlenses 21 having the same lens surface shape are arranged regularly, an irregular phase difference can be imparted to the diffused light from the plurality of microlenses 21. I can do it. Therefore, since the diffraction of the diffused light emitted from the plurality of microlenses 21 can be canceled out, the effect of suppressing unnecessary diffracted light including spectral diffracted light, zero-order diffracted light, etc. can be enhanced. Therefore, since the unevenness of the intensity distribution of the diffused light can be sufficiently reduced, the homogeneity and light distribution of the diffused light can be further improved. Further, the diffuser plate 1 according to the present embodiment achieves a brightness characteristic with high transmittance, satisfies the homogeneity of the light distribution of the diffused light, and realizes the brightness distribution of the diffused light with an effective cutoff property. You can also.

Below, the diffuser plate 1 according to the present embodiment having the above characteristics will be described in detail.

<2. Overall configuration of diffuser plate>
Next, with reference to FIG. 1, the overall configuration of a diffuser plate 1 and a layout pattern of microlenses according to an embodiment of the present invention will be described. FIG. 1 is a plan view and an enlarged view schematically showing a diffusion plate 1 according to this embodiment.

The diffusion plate 1 according to the present embodiment is a microlens array type diffusion plate in which a microlens array 20 consisting of a plurality of microlenses 21 (single lenses) is arranged on a base material 10. The microlens array of the diffuser plate 1 is composed of a plurality of unit cells 3, as shown in FIG. The unit cell 3 is a basic arrangement pattern of the microlenses 21. A plurality of microlenses 21 are arranged on the surface of each unit cell 3 in a predetermined layout pattern (arrangement pattern).

Here, FIG. 1 shows an example in which the shape of the unit cells 3 constituting the microlens array 20 of the diffuser plate 1 is rectangular, particularly square. However, the shape of the unit cell 3 is not limited to the example shown in FIG. 1. For example, the shape of the unit cell 3 is not limited to the example shown in FIG. It may have any shape as long as it can be filled.

When the surface of the microlens array 20 of the diffuser plate 1 is divided into a plurality of unit areas, the unit cells 3 correspond to each unit area. In the example of FIG. 1, a plurality of square unit cells 3 are repeatedly arranged vertically and horizontally on the surface of the diffuser plate 1. The number of unit cells 3 constituting the diffusion plate 1 is not particularly limited, and the diffusion plate 1 may be composed of one unit cell 3 or may be composed of a plurality of unit cells 3. It's okay. In the diffusion plate 1, unit cells 3 having mutually different surface structures may be repeatedly arranged, or unit cells 3 having the same surface structure may be repeatedly arranged.

Further, as schematically shown in the enlarged view on the right side of FIG. In between, the unit cells 3 are continuous in the arrangement direction of the unit cells 3 (in other words, the array arrangement direction). The microlens array 20 is constructed by arranging the unit cells 3 without gaps while maintaining the continuity of the surface shape of the microlenses 21 at the boundary between a plurality of mutually adjacent unit cells 3. Here, the continuity of the surface shape of the microlens 21 refers to the microlens 21 located at the outer edge of one unit cell 3 of two mutually adjacent unit cells 3, and the one located at the outer edge of the other unit cell 3. This means that the microlenses 21 located at the outer edge are formed continuously without any deviation in planar shape or step in the height direction.

In this way, in the diffusion plate 1 according to the present embodiment, the unit cells 3 (basic structure) of the microlens array 20 are arranged without any gaps while maintaining the continuity of the boundaries, so that the microlens array 20 is configured. ing. This prevents the occurrence of unintended problems such as diffraction, reflection, and scattering of light at the boundary between the mutually

adjacent unit cells

3 and 3, thereby making it possible to obtain desired light distribution characteristics by the diffuser plate 1. can. Moreover, by making the microlens array 20 have a structure in which the unit cells 3 are repeated, the design efficiency and productivity of the microlens array 20 can be improved.

<3. Diffusion plate configuration>
Next, the configuration of the diffuser plate 1 according to this embodiment will be described in more detail with reference to FIGS. 2 to 5. FIG. 2 is an enlarged plan view and an enlarged sectional view schematically showing the configuration of the diffusion plate 1 according to the present embodiment. FIG. 3 is an enlarged sectional view schematically showing the vicinity of the boundary of the microlens 21 according to this embodiment. FIG. 4 is a plan view schematically showing the planar shape (outer shape) of the microlens 21 when the microlens 21 is viewed in plan from a direction perpendicular to the surface of the base material 10 according to the present embodiment.

As shown in FIG. 2, the diffusion plate 1 according to the present embodiment includes a base material 10 and a microlens array 20 formed on the surface of the base material 10.

First, the base material 10 will be explained. The base material 10 is a substrate for supporting the microlens array 20. The base material 10 may be in the form of a film or a plate. Further, the base material 10 may have a flat plate shape or a curved plate shape. The base material 10 shown in FIG. 2 has, for example, a rectangular flat plate shape, but is not limited to this example. The shape and thickness of the base material 10 may be arbitrary depending on the shape, configuration, etc. of the device in which the diffuser plate 1 is mounted.

The base material 10 is a transparent base material that can transmit light. The base material 10 is made of a material that can be considered transparent in the wavelength band of light incident on the diffuser plate 1. For example, the base material 10 may be formed of a material having a light transmittance of 70% or more in the wavelength band of visible light.

The base material 10 is made of, for example, polymethyl methacrylate (PMMA), polyethylene terephthalate (PET), polycarbonate (PC), cyclic olefin copolymer (Cy clo Olefin Copolymer: COC), cyclic olefin polymer (Cyclo It may be formed of a known resin such as Olefin Polymer (COP), triacetylcellulose (TAC), or the like. Alternatively, the base material 10 may be formed of a known optical glass such as quartz glass, borosilicate glass, white plate glass, or the like.

Next, the microlens array 20 will be explained. The microlens array 20 is provided on at least one surface (principal surface) of the base material 10. The microlens array 20 is an aggregate of a plurality of microlenses 21 (single lenses) arranged on the surface of the base material 10. In this embodiment, as shown in FIG. 2, a microlens array 20 is formed on one surface (principal surface) of the base material 10. However, the present invention is not limited to this example, and the microlens array 20 may be formed on both main surfaces (the front surface and the back surface) of the base material 10.

The surface of the base material 10 on which the microlens array 20 is provided may be, for example, a flat surface. Below, the flat surface of the base material 10 may be referred to as an XY plane. The X direction and the Y direction in the XY plane are directions parallel to the surface of the base material 10. The X direction and the Y direction are perpendicular to each other. Further, the Z direction is a direction perpendicular to the surface of the base material 10 (that is, a normal direction), and corresponds to the thickness direction of the diffusion plate 1. The Z direction is perpendicular to the XY plane, the X direction, and the Y direction.

Note that the microlens array 20 may be formed directly on the surface of the base material 10 itself, or may be indirectly formed on another layer laminated on the surface of the base material 10. For example, a resin layer made of an ultraviolet curable resin or the like is laminated on the surface of the base material 10 made of glass or the like, and the uneven structure of the master is transferred to this resin layer to form a microlens array. 20 may be formed.

The microlens 21 is, for example, a minute optical lens on the order of several tens of μm. The microlens 21 constitutes a single lens of the microlens array 20. The microlenses 21 may have a concave structure (concave lens) formed to recess in the thickness direction of the diffuser plate 1, or may have a convex structure (convex lens) formed to protrude in the thickness direction of the diffuser plate 1. It may be. In this embodiment, an example in which the microlens 21 has a convex structure (convex lens) as shown in FIG. 2 will be described, but the present invention is not limited to this example. Depending on the desired optical characteristics of the diffuser plate 1, the microlens 21 may have a concave structure (concave lens).

The surface shape (lens surface shape) of the microlens 21 has a spherical shape or an aspherical shape. The surface shape of the microlens 21 is not particularly limited as long as it has a curved shape that includes at least a spherical component or an aspherical component at least in part. For example, the surface shape of the microlens 21 may be a spherical shape including only a spherical component, an aspheric shape including only an aspherical component, or an aspherical component and a spherical component. The curved surface shape may include other curved surface components. For example, the surface shape of the portion on the vertex side of the microlens 21 may be aspherical, and the surface shape of the other portion may be spherical. Further, the surface shape of the portion on the vertex side of the microlens 21 may be spherical, and the surface shape of the other portion may be aspherical.

Furthermore, as described above, the surface shape (lens surface shape) of the microlens 21 is preferably an aspherical shape or a spherical shape having an axis of symmetry. For example, the lens surface shape is preferably a three-dimensional shape that is rotationally symmetrical about an axis of symmetry or a three-dimensional shape that is axisymmetric with respect to a plane that includes the axis of symmetry. As a result, the lens surface shape does not become an excessively distorted shape or an excessively irregular shape. It can suitably exhibit a diffusion function that can realize optical properties. Furthermore, as described above, the microlens 21 may be configured with a cylindrical lens extending in a predetermined direction on the XY plane.

Further, as shown in FIG. 2, it is preferable that the plurality of microlenses 21 be arranged closely so as to be adjacent to each other without any gaps. In other words, it is preferable that the plurality of microlenses 21 are arranged continuously so as to overlap each other so that there is no gap (flat part) at the boundary between the plurality of

microlenses

21, 21 adjacent to each other. . In this way, it is preferable that the plurality of microlenses 21 be arranged without gaps on the surface of the base material 10 (on the XY plane). That is, it is preferable that the microlenses 21 be arranged so that the filling rate of the microlenses 21 on the surface of the base material 10 is 100%. This makes it possible to suppress the component (hereinafter also referred to as "zero-order transmitted light component") of the incident light that passes through the surface of the diffuser plate 1 without being scattered. As a result, the microlens array 20 in which the plurality of microlenses 21 are arranged adjacent to each other without gaps can further improve the diffusion performance.

Note that in order to suppress the zero-order transmitted light component, the filling rate of the microlenses 21 on the base material 10 is preferably 90% or more, and more preferably 100%. Here, the filling rate is the ratio of the area occupied by the plurality of microlenses 21 on the surface of the base material 10 (on the XY plane). If the filling rate is 100%, most of the surface of the microlens array 20 is formed by curved surface components and contains almost no flat surface components.

However, in actual manufacturing of the microlens array 20, in order to continuously connect the curved surfaces of a plurality of microlenses 21, the vicinity of the inflection point at the boundary between mutually

adjacent microlenses

21, 21 is approximately flat. It could happen. In such a case, at the boundary between the

microlenses

21, 21, the width of the area near the inflection point that is approximately flat (the width of the boundary line 24 between the

microlenses

21, 21 shown in FIGS. 3 and 4) is 1 μm. It is preferable that it is below. Thereby, the zero-order transmitted light component can be sufficiently suppressed.

Furthermore, in the microlens array 20 according to the present embodiment, the plurality of microlenses 21 are regularly arranged along the reference grid on the XY plane. Here, "regular arrangement" means that there is substantial regularity in the arrangement of the microlenses 21 in any region of the microlens array 20. However, even if there is some irregularity in the arrangement of the microlenses 21 in a small area, if there is regularity in the arrangement of the microlenses in the entire arbitrary area, it is considered to be included in the "regular arrangement". do. Note that a method for regularly arranging the microlenses 21 in the microlens array 20 according to this embodiment will be described later.

Further, lens parameters such as the aperture width D and the radius of curvature R that determine the surface shape of each microlens 21 are the same as the reference aperture width Dk and the reference radius of curvature Rk of the reference surface shape set in advance, or The value is within a small shape error range with respect to the reference opening width Dk and the reference radius of curvature Rk (for example, within a range of ±1% with respect to Dk and Rk). Note that the aperture width D is the width of the aperture 27 of the microlens 21 (for example, see FIG. 8) in the X direction or the Y direction, and corresponds to the lens diameter of the microlens 21. The radius of curvature R is the radius of curvature of the curved surface shape of the microlens 21 in the X direction or the Y direction.

Note that the aperture width D of each microlens 21 varies randomly within a predetermined minute fluctuation rate δD [%] (for example, δD=±1%) with respect to a predetermined reference aperture width Dk. (D=Dk±δD%). Similarly, the radius of curvature R of each microlens varies randomly within a predetermined minute variation rate δR [%] (for example, δR=±1%) with respect to a predetermined reference radius of curvature Rk. (R=Rk±δR%). Thereby, the aperture width D and the radius of curvature R can be appropriately varied within a small error range around the predetermined reference aperture width Dk and reference radius of curvature Rk. Therefore, while maintaining the regular arrangement of the plurality of microlenses 21 and the desired optical characteristics (diffusion performance) of the diffuser plate 1, unevenness in the intensity distribution of the diffused light due to interference and diffraction of the diffused light from each microlens 21 can be prevented. (brightness unevenness, color unevenness, etc.) can be reduced. Furthermore, local minute brightness changes and flickering of the diffused light from each microlens 21 can be reduced. In this way, the overall intensity distribution of interference diffraction of the microlens array 20 can be minimized, and the change in brightness of each microlens 21 alone can also be minimized.

As described above, in the microlens array 20 according to the present embodiment, each microlens 21 has substantially the same surface shape based on a predetermined reference surface shape. Furthermore, on the surface of the base material 10 (on the XY plane), the plurality of microlenses 21 are arranged densely and continuously so as to overlap each other, and the individual microlenses 21 are arranged regularly on the XY plane. It is located.

As a result, the surface shape (three-dimensional curved surface shape) and planar shape (shape projected onto the XY plane of the base material 10) of each microlens 21 become substantially the same as the reference surface shape. As a result, the surface shapes and planar shapes of the plurality of microlenses 21 become substantially the same. Therefore, as schematically shown in FIG. 2, the plurality of microlenses 21 have a substantially constant planar shape that follows the shape of the reference lattice, such as a regular hexagon, and have symmetry.

As a result, as shown in FIG. 3, the radius of curvature _RA of the microlens 21A and the radius of curvature _RB of the microlens 21B adjacent to the microlens 21A are substantially the same ( _RA = _RB = Rk). When the radii of curvature R _A and R _B of the

microlenses

21A and 21B adjacent to each other are substantially the same, as shown in FIG. 4, the boundary line 24 between the

microlenses

21A and 21B is substantially It consists only of straight lines and does not contain curves.

Specifically, as shown in FIG. 4, consider the case where the microlens 21 is viewed from above in the normal direction (Z direction) perpendicular to the surface of the base material 10. In this case, the outline of the planar shape of the microlens 21 (the boundary line 24 between the microlens 21 and a plurality of adjacent microlenses 21) is a straight line. In this way, when the boundary line 24 between the mutually

adjacent microlenses

21, 21 includes only a substantially straight line, the regularity of the boundary between the

microlenses

21, 21 can be maintained. Therefore, the advantages of the regular arrangement of the plurality of microlenses 21 described above (for example, the effect of reducing uneven brightness and flickering for each lens, and the improvement of cutoff performance) can be ensured.

<4. Shift of microlens in Z direction>
Next, the lens shift, which is a feature of the microlens array 20 according to this embodiment, will be described in detail with reference to FIGS. 2, 3, and 5. FIG. 5 is an enlarged perspective view showing the surface of the microlens array 20 according to this embodiment.

<4.1. Lens shift and difference between lenses>
As shown in FIGS. 2, 3, and 5, each microlens 21 according to the present embodiment is located at a reference position in the Z direction perpendicular to the They are placed at positions randomly shifted in the Z direction from the zero height position. The shift amount Δs of each microlens in the Z direction varies randomly within a predetermined variation width δS. For example, when the variation width δS is 1 μm, the shift amount Δs of each microlens 21 is set to a variation value that randomly varies within the variation range of 0 to 1 μm. Each shift amount Δs may be randomly determined using random numbers.

In this way, the plurality of microlenses 21 are arranged at positions shifted in the Z direction by mutually different shift amounts Δs. As a result, as shown in FIGS. 2, 3, and 5, a step 23 in the Z direction exists at the boundary between the plurality of

microlenses

21, 21 that are adjacent to each other on the XY plane. For example, the step 23 is preferably a flat surface parallel to the Z direction (i.e., a flat surface perpendicular to the XY plane), but it is preferably a curved surface parallel to the Z direction (i.e., the XY plane It may be a curved surface perpendicular to the Z direction), or a flat or curved surface inclined with respect to the Z direction. Since the step 23 in the Z direction is provided at the boundary between the plurality of mutually

adjacent microlenses

21, 21, the surface shapes of the

microlenses

21, 21 are discontinuous with each other. The size (height in the Z direction) of the step 23 formed at the boundary between the

microlenses

21, 21 is irregular.

In this way, the microlens 21 according to the present embodiment is arranged at a position shifted in the Z direction by a random shift amount Δs. Thereby, a random phase difference can be imparted to the diffused light emitted from each microlens 21 according to the random shift amount Δs of each microlens 21.

As described above, in the microlens array 20 according to the present embodiment, in the microlens array 20 in which a plurality of microlenses 21 having substantially the same shape are regularly arranged, each microlens 21 is randomly arranged in the Z direction. It is characterized by shifting to. By applying such a lens shift as a new variable element of the microlens array structure, it is possible to impart a phase difference depending on the variation of the lens shift to the diffused light emitted from each microlens 21. Therefore, even when a plurality of microlenses 21 are arranged regularly, it is possible to impart an irregular and variously varying phase difference to the diffused light emitted from each microlens 21. Furthermore, by making the step 23 between the shifted microlenses 21, 21 a plane perpendicular to the XY plane, it is possible to improve the cutoff property and uniformity of the diffused light distribution, and to This has the effect of reducing and eliminating small local brightness changes (unevenness) and flickering.

Therefore, according to the present embodiment, by imparting an irregular phase difference due to a lens shift to the diffused light from each microlens 21, the diffraction of the diffused light can be mutually canceled out. Therefore, in the diffused light emitted from the entire diffuser plate 1, spectral diffracted light (spectral noise that occurs concentrically in the entire diffused light), 0th-order diffracted light (peak-shaped noise that occurs near the diffusion angle of 0 degrees), etc. It is possible to significantly improve the effect of suppressing unnecessary diffracted light including. Therefore, in the diffused light emitted from the entire diffuser plate 1, unevenness in the intensity distribution caused by spectral diffracted light and zero-order diffracted light can be suppressed more effectively, thereby improving the homogeneity and light distribution of the diffused light. can be further improved.

<4.2. Variation in lens height h>
Next, with reference to FIG. 6, "lens shift" which is a variable factor for imparting a phase difference to the microlens 21 according to this embodiment will be described. FIG. 6 is an explanatory diagram showing a manner in which the height h of the apex of each microlens 21 (hereinafter also referred to as "lens height h") changes due to the lens shift according to the present embodiment.

As described above, in this embodiment, in the microlens array 20 in which a plurality of microlenses 21 having the same shape are regularly arranged, the lens surface shape is not changed (or the lens surface shape is slightly changed). ), and the arrangement of each microlens 21 is randomly shifted in the Z direction (lens shift). Therefore, the height h of the apex of each microlens 21 varies depending on the lens shift. As a result, a phase difference due to the lens shift is imparted to the diffused light from each microlens 21.

FIG. 6 shows a procedure for designing the microlens 21 to provide a phase difference by irregularly varying the lens height h by the lens shift as described above. The various dimensions shown in FIG. 6 are as follows.

Dk: Reference aperture width [μm] which is the aperture width of the reference surface shape of the microlens
Rk: Standard radius of curvature [μm] which is the radius of curvature of the standard surface shape of the microlens
hk: Reference lens height [μm] which is the height of the apex of the reference surface shape of the microlens
D: Microlens aperture width [μm]
R: Radius of curvature of microlens [μm]
Δs: Shift amount of microlens in Z direction [μm]
h: Height of the apex of the microlens after shifting in the Z direction (lens height) [μm] (h=hk+Δs)

First, as shown in FIG. 6A, a plurality of microlenses 21A, 21B, and 21C having a reference surface shape are arranged on the XY plane of the base material 10. At this stage, the plurality of microlenses 21A, 21B, and 21C all have the same reference surface shape. Therefore, the aperture widths D ₁ , D 2 , and _{D 3} _of these

microlenses

21A, 21B, and 21C are the same reference aperture width Dk, and the curvature radii R ₁ , R ₂ , and R ₃ are the same reference curvature radius Rk. It is. Further, the heights of these

microlenses

21A, 21B, and 21C are all the same reference lens height hk.

Next, as shown in FIG. 6B, each of the microlenses 21A, 21B, and 21C is shifted by random shift amounts Δs ₁ , Δs ₂ , and Δs ₃ in the Z direction. In this lens shift, the surface shape of each microlens 21A, 21B, 21C does not change from the reference surface shape, but the

microlens

21A, 21B, 21C relative to the reference position in the Z direction (for example, the position of Z-axis coordinate z=0) The relative position in the Z direction changes. As a result, a step 23 (vertical flat surface) in the Z direction is formed at the boundary between the

adjacent microlenses

21A, 21B, and 21C. Furthermore, the heights h ₁ , h ₂ , and h ₃ of the vertices of the microlenses 21A, 21B, and 21C also vary by different shift amounts Δs ₁ , Δs ₂ , and Δs ₃ , and become different heights. In this way, due to the lens shift, the lens height h in FIG. 6B changes by a different shift amount Δs with respect to the lens height hk in FIG. 6A (h=hk+Δs). As a result, the final lens height h of each microlens 21 becomes hk+Δs.

As described above with reference to FIG. 6, in this embodiment, the lens height h of each regularly arranged microlens 21 is changed by "lens shift" which is a variable element of the microlens array structure. Vary according to the rules. As a result, irregular phase differences that differ from each other can be imparted to the diffused light emitted from the plurality of microlenses 21, so that the diffraction of the diffused light can be canceled out and unnecessary diffracted light can be suppressed. can.

<4.3. Lens shift variation range δS>
Next, a suitable range of the variation range δS of the shift amount Δs when the arrangement of the microlenses 21 according to the present embodiment is randomly shifted in the Z direction will be described.

As described above, the shift amount Δs [μm] of each microlens 21 in the Z direction varies randomly within a predetermined variation width δS [μm]. The variation width δS of the shift amount Δs is a preset fixed value, and corresponds to the difference between the maximum value Δs _MAX and the minimum value Δs _MIN of the shift amount Δs (δS=Δs _MAX −Δs _MIN ).

For example, if Δs _MAX (fixed value) = +1.06 [μm] and Δs _MIN (fixed value) = 0 [μm], then "δS (fixed value) = Δs _MAX - Δs _MIN = 1.06 [μm]" =Δs _MAX ”. In this case, the Z-direction shift amount Δs (random fluctuation value) of each microlens 21 is set as a random fluctuation value within the range of 0 to 1.06 [μm].

Also, if Δs _MAX (fixed value) = +1.06 [μm] and Δs _MIN (fixed value) = -0.56 [μm], then "δS (fixed value) = Δs _MAX - Δs _MIN = 1.62 [μm]” and “δS≠Δs _MAX ”. In this case, the shift amount Δs (random variation value) of each microlens 21 in the Z direction is set as a random variation value within the range of -0.56 to 1.06 [μm].

The fluctuation range δS of the shift amount Δs preferably satisfies the following formula (5), more preferably satisfies formula (6), and even more preferably substantially satisfies formula (7). Note that "substantially satisfies" not only means that the values on the left and right sides of equation (7) completely match, but also when the error between the values on the left and right sides is a minute error ( For example, it may be within the range of ±2% error).

When the variation range δS of the shift amount Δs satisfies equation (5), the diffraction peak ratio K _A can be suppressed to 60% or less. When δS satisfies formula (6), the diffraction peak ratio K _A can be suppressed to 30% or less. When δS substantially satisfies formula (7), the diffraction peak ratio K _A can be suppressed to 10% or less.

Note that the "diffraction peak level (A)" is an index representing the level (for example, amplitude) of the peak of diffracted light included in the diffused light emitted from the diffuser plate 1. "Diffraction peak ratio (K _A )" is the ratio of the measured diffraction peak level (A) to the reference value (Ak) of the diffraction peak level (K _A [%] = (A/Ak) x 100) . For example, when the diffraction peak level (for example, the amplitude of the diffraction emission line spectrum) is measured using a diffraction plate equipped with a microlens array that has not been subjected to lens shift according to the present embodiment, the measured value is the value of the diffraction peak level. It can be used as a reference value (Ak). Moreover, the measured value when the diffraction peak level (for example, the amplitude of the diffraction emission line spectrum) of the diffused light is measured using the diffuser plate 1 equipped with the microlens array 20 subjected to the lens shift according to the present embodiment, It can be used as a diffraction peak level (A).

Additionally, the following formulas (8), (1), and (2) can be considered as formulas that are generalized versions of the above formulas (5) to (7), respectively. The variation width δS of the shift amount Δs preferably satisfies the following formula (8), more preferably satisfies formula (1), and even more preferably substantially satisfies formula (2). Note that "substantially satisfies" not only means that the values on the left and right sides of equation (2) completely match, but also when the error between the values on the left and right sides is a minute error ( For example, it may be within the range of ±2% error).

When δS satisfies formula (8), the diffraction peak ratio K _A can be suppressed to 60% or less. When δS satisfies formula (1), the diffraction peak ratio K _A can be suppressed to 30% or less. When δS substantially satisfies formula (2), the diffraction peak ratio K _A can be suppressed to 10% or less.

Note that in the above equations (5) to (8), equation (1), and equation (2), "m" is an integer of 1 or more (m=1, 2, 3, . . . ). “λ” is the wavelength [μm] of the incident light that enters the diffuser plate 1. “n” is the refractive index of the material forming the microlens array 20.

Here, the refractive index n of the material forming the microlens array 20 will be explained. The material forming the microlens array 20 means the material of the member (medium through which light passes) on which the microlens array 20 is formed. The material forming the microlens array 20 (hereinafter sometimes referred to as "the material of the microlens array 20") is, for example, glass, resin, or semiconductor. Note that when the incident light is visible light, a microlens array 20 made of glass or resin is used. On the other hand, when the incident light is infrared light, a microlens array 20 made of semiconductor is used.

As described above, when the microlens array 20 is formed directly on the surface of the glass base material 10, the material of the microlens array 20 is glass. On the other hand, when the microlens array 20 is indirectly formed on another layer laminated on the surface of the glass base material 10, the material of the microlens array 20 is the material of the other layer ( For example, the above-mentioned various resins, semiconductors, etc.). For example, the microlens array 20 is formed by laminating a resin layer made of the above-mentioned various resins on the surface of the glass base material 10 and transferring the uneven structure of the microlens array 20 to the resin layer using a master. There are cases where In this case, the material of the microlens array 20 is the resin forming the resin layer.

In this way, when the microlens array 20 is made of different materials, the refractive index n when light passes through the microlens array 20 also has different values. Note that the refractive index n is the absolute refractive index of the material of the microlens array 20.

Next, the parameters “(n-1)・δS” and “(n-1)・δS/λ” included in the above equations (5) to (8), equation (1), and equation (2) Explain the technical significance of

Assuming that the external medium in contact with the structural surface of the microlens array 20 is air, it is assumed that the refractive index n' (absolute refractive index) of air is approximately "1" (n'=1). In this case, a refractive index difference (n-1) occurs between the refractive index n of the material of the microlens array 20 and the refractive index n' of air.

In this embodiment, as described above, each microlens 21 is shifted in the Z direction by a random shift amount Δs within the range of fluctuation width δS. Thereby, when the incident light passes through the microlens array 20, a random phase difference is imparted to the diffused light emitted from each microlens 21 depending on the shift amount Δs of each microlens 21. The phase difference given to each microlens 21 by the shift amount Δs is the refractive index difference (n-1) rather than the phase difference corresponding to the distance optical path length difference "Δs" considering only the shift amount Δs. It is preferable to use a phase difference corresponding to an optical optical path length difference "(n-1)·Δs" that takes into account both the shift amount Δs and the shift amount Δs. This optical optical path length difference "(n-1)・Δs" reflects not only the optical path length difference due to the shift amount Δs, but also the change in the refractive index n that depends on the material of the microlens array 20 and the wavelength λ. It represents the phase difference.

As for the phase difference imparted to the entire microlens array 20, the above refractive index difference (n-1) It is preferable to use a phase difference corresponding to the optical maximum optical path length difference "(n-1).delta.S" taking into account both the variation width .delta.S and the variation width .delta.S. It is conceivable that the interference effect between the diffused lights emitted from the plurality of microlenses 21 of the microlens array 20 changes due to this optical maximum optical path length difference “(n−1)·δS”. Therefore, in this embodiment, the effect of suppressing diffracted light is evaluated using a parameter "(n-1)·δS/λ" as a parameter representing the maximum phase difference imparted to the entire microlens array 20. This parameter “(n-1)·δS/λ” represents the ratio of the phase difference corresponding to the optical maximum optical path length difference “(n-1)·δS” to the wavelength λ of the incident light.

The above equation (5) indicates that the parameter "(n-1)·δS/λ" is equal to or greater than "0.5". In other words, equation (5) indicates that the optical maximum optical path length difference "(n-1)·δS" is 0.5 times or more the wavelength λ. By satisfying this equation (5), the maximum optical path length difference “(n−1)·δS” given by the lens shift according to the present embodiment can be set to an appropriate value for the wavelength λ. Thereby, an irregular phase difference can be appropriately imparted to the diffused light emitted from the plurality of microlenses 21 within the range of the maximum optical path length difference “(n−1)·δS”. Therefore, the diffused lights to which such irregular phase differences are imparted can suitably interfere with each other, and the diffraction of the diffused lights can be canceled out. Therefore, in the diffused light emitted from the entire microlens array 20, the peak of the diffracted light, especially the peak of the 0th order diffracted light, can be suitably suppressed, so that the diffraction peak ratio _KA can be suppressed to 60% or less. can.

Furthermore, the above equation (6) indicates that the parameter "(n-1)·δS/λ" is equal to or greater than "0.75". In other words, equation (6) indicates that the optical maximum optical path length difference "(n-1)·δS" is 0.75 times or more the wavelength λ. By satisfying this equation (6), the maximum optical path length difference “(n−1)·δS” given by the lens shift according to the present embodiment can be set to a more appropriate value for the wavelength λ. Thereby, an irregular phase difference can be more appropriately imparted to the diffused light emitted from the plurality of microlenses 21 within the range of the maximum optical path length difference “(n−1)·δS”. Therefore, the diffused lights having such irregular phase differences can be caused to interfere with each other more appropriately, and the diffraction of the diffused lights can be canceled out. Therefore, in the diffused light emitted from the entire microlens array 20, the peak of the diffracted light, especially the peak of the 0th order diffracted light, can be suppressed more preferably, so the diffraction peak ratio K _A can be suppressed to 30% or less. I can do it.

Furthermore, the above equation (7) indicates that the parameter "(n-1)·δS/λ" is "1". In other words, equation (7) indicates that the optical maximum optical path length difference "(n-1)·δS" is the wavelength λ. By satisfying this equation (7), the maximum optical path length difference “(n−1)·δS” given by the lens shift according to the present embodiment can be set to a more appropriate value for the wavelength λ. Thereby, it is possible to more appropriately impart an irregular phase difference to the diffused light emitted from the plurality of microlenses 21 within the range of the maximum optical path length difference “(n−1)·δS”. Therefore, the diffused lights to which such irregular phase differences have been imparted can be caused to interfere with each other even more favorably, and the diffraction of the diffused lights can be canceled out. Therefore, in the diffused light emitted from the entire microlens array 20, the peak of the diffracted light, especially the peak of the 0th order diffracted light, can be suppressed even more favorably, so the diffraction peak ratio _KA is suppressed to 10% or less. be able to.

On the other hand, the above equation (8) indicates that the optical maximum optical path length difference "(n-1)·δS" is equal to or greater than "0.5·m·λ". That is, equation (8) indicates that the parameter "(n-1).delta.S/λ" is greater than or equal to "0.5.m". When m=1, equation (8) is synonymous with equation (5). Here, the effect of suppressing the peak of the diffracted light due to the mutual interference of the diffused light with a phase difference is the difference between the maximum optical path length difference "(n-1)・δS" and an integer multiple of the wavelength λ. Depends on size. Therefore, even if λ in Equation (5) is multiplied by an integral number (m times), the same effect of suppressing the diffracted light can be obtained as long as the difference is about the same level. Therefore, the effect of suppressing the diffracted light obtained by satisfying the above formula (5) can also be obtained by satisfying formula (8), which is an integral multiple (m times) of the wavelength λ. Therefore, by satisfying formula (8), the diffraction peak ratio K _A can be suppressed to 60% or less similarly to formula (5).

Similarly, when m=1, equation (1) is synonymous with equation (6), and equation (2) is synonymous with equation (7). Therefore, for the same reason as the relationship between equations (5) and (8) above, by satisfying equation (1), the diffraction peak ratio K _A can be suppressed to 30% or less, as in equation (6). be able to. Further, by substantially satisfying the equation (2), the diffraction peak ratio K _A can be suppressed to 10% or less similarly to the equation (7).

<4.3. Maximum height difference δZ of lens height h>
Next, with reference to FIG. 7, a relational expression regarding the maximum height difference δZ of the height h of the apex of the microlens 21 according to the present embodiment will be described. Note that the symbols and terms used in the following explanation are as follows.

Eva _(D',λ,δZ) : Evaluation value determined by the following formula (3) λ: Wavelength of incident light [μm]
n: refractive index of the material forming the microlens array 20 [dimensionless quantity]
δZ: Difference [μm] between the maximum value h _max and the minimum value h _min of the height h of the apex of the plurality of microlenses 21 constituting the microlens array 20 (δZ=h _max - h _min )
Dk: Reference opening width of reference surface shape [μm]. As shown in FIG. 7, the reference opening width Dk is the diameter of the circular reference opening 60 having the reference surface shape.
D': Effective opening width of the reference surface shape [μm]. As shown in FIG. 7, the effective opening width D' is the diameter of an inscribed circle 64 that is inscribed in a regular hexagon 62 that is inscribed in a circle whose diameter is the reference opening width Dk (that is, the reference opening 60). When the reference surface shapes of a plurality of microlenses 21 are regularly arranged in a hexagonal dense manner on the XY plane, the circular reference aperture of the microlens 21 becomes the inscribed circle 64, and the aperture width of the circular reference aperture is effective. The opening width becomes D'.

As described with reference to FIG. 6, the heights of the vertices (lens height h) of the plurality of microlenses 21 according to this embodiment vary irregularly due to lens shift. The maximum height difference δZ of the lens heights h is the difference between the highest lens height h _max and the lowest lens height h _min among the lens heights h of the plurality of microlenses 21 (δZ=h _max - h _min ). In this embodiment, since the lens surface shape does not change, the change in the lens height h depends on the shift amount Δs of the lens shift. The shift amount Δs of each microlens 21 is randomly set within a predetermined fluctuation width δS. Therefore, the maximum height difference δZ of the lens height h is substantially the same as the variation width δS of the shift amount Δs (δZ≈δS).

In the microlens array 20 according to the present embodiment, it is preferable that the maximum height difference δZ, the effective aperture width D', the wavelength λ, and the refractive index n satisfy the following formula (3). By satisfying this formula (3), the evaluation value Eva _{(D', λ, δZ)} becomes 10 or more, and in the diffused light from the entire diffuser plate 1, spectral diffracted light can be suitably suppressed, and the diffused light It has the effect of homogenizing and equalizing the intensity distribution.

Furthermore, it is more preferable that the maximum height difference δZ, the effective aperture width D', the wavelength λ, and the refractive index n satisfy the following formula (4). By satisfying this formula (4), the evaluation value Eva _{(D', λ, δZ)} becomes 15 or more, and in the diffused light from the entire diffuser plate 1, spectral diffracted light can be further suppressed, and the diffused light The effect of homogenizing and equalizing the intensity distribution can be further improved.

<5. Microlens optical axis tilt and diffused light deflection function>
Next, with reference to FIG. 8, a microlens 21 having an inclined optical axis 25 according to this embodiment will be described. FIG. 8 is a schematic diagram showing a mode in which the optical axis 25 of the microlens 21 according to this embodiment is tilted. The upper diagram in FIG. 8 (FIG. 8A) shows the surface shape (reference aspheric shape) of the microlens 21 before the optical axis 25 is tilted. The lower diagram in FIG. 8 (FIG. 8B) shows the surface shape (tilted aspherical shape) of the microlens 21 after the optical axis 25 is tilted. Note that in the following description, the surface 26 of the microlens 21 may be referred to as the "lens surface 26", and the surface shape of the microlens 21 (that is, the curved shape of the lens surface 26) may be referred to as the "lens surface shape". Note that although an example in which the lens surface shape is an aspherical shape having an axis of symmetry will be described below, the lens surface shape may be a spherical shape or a cylindrical lens shape.

<5.1. Tilted optical axis and lens surface shape>
As shown in FIG. 8, the curved shape (lens surface shape) of the lens surface 26 of the microlens 21 according to the present embodiment may have an aspherical shape such as an ellipsoid, a paraboloid, or a hyperboloid. good. FIG. 8 shows an example in which the aspherical shape of the lens surface 26 is an ellipsoid that is vertically elongated in the direction of the optical axis 25 (Conic coefficient K>0). Note that the ellipsoidal surface means a spheroidal surface that is the surface of a spheroid. A spheroid is a rotating body obtained by using an ellipse with its major axis or minor axis as the axis of rotation. The ellipsoidal surface in the case of K>0 is the surface of a spheroid (that is, a long ellipsoid) obtained with the long axis of the ellipse as the rotation axis. On the other hand, when −1<K<0, the ellipsoidal surface is the surface of a spheroid (that is, a flat ellipsoid) obtained with the minor axis of the ellipse as the rotation axis. In either case, the axis of rotation (corresponding to the axis of symmetry) of the spheroid coincides with the optical axis 25 of the microlens 21.

As shown in FIG. 8A, when the optical axis 25 of the microlens 21 is not inclined, the optical axis 25 of the microlens 21 is in the normal direction (Z direction) to the surface (XY plane) of the base material 10 of the diffuser plate 1. ). In other words, the optical axis 25 overlaps the Z axis. In this case, the surface shape of the microlens 21 also has a reference aspheric shape (FIG. 8A) that is not inclined with respect to the Z direction. The reference aspherical shape according to this embodiment is, for example, an aspherical shape that is rotationally symmetrical about the normal direction (Z direction) to the XY plane. Note that the reference aspherical shape may be, for example, an aspherical shape that is rotationally asymmetrical about the Z direction as long as the optical axis 25 is an aspherical shape parallel to the Z direction. When the lens surface shape is a reference aspherical shape, the vertex 28 of the microlens 21 is located on the optical axis 25 and the Z axis. Note that the reference aspherical shape (FIG. 8A) is a lens surface shape that serves as a reference when designing the inclined aspherical shape (FIG. 8B).

The aperture width D of the microlens 21 is the width (lens diameter) of the aperture 27 of the microlens 21 in the XY plane. The shape of the opening 27 of the microlens 21 may be, for example, a circle, an ellipse, a square, a rectangle, a diamond, a hexagon, or another polygon. An example will be explained. The opening width D is represented by an opening width Dx in the X direction and an opening width Dy in the Y direction. Further, the radius of curvature R of the microlens 21 is the radius of curvature at the top of the lens surface shape. The radius of curvature R is represented by a radius of curvature Rx in the X direction and a radius of curvature Ry in the Y direction. As shown in FIG. 8A, when the lens surface shape is a reference aspherical shape and rotationally symmetrical about the optical axis 25, Dx=Dy, Rx=Ry, and Dx and Dy are the reference aperture. It becomes equal to the width Dk, and Rx and Ry become equal to the reference radius of curvature Rk.

On the other hand, as shown in FIG. 8B, the optical axis 25 of the microlens 21 according to the present embodiment is aligned at a predetermined direction with respect to the normal direction (Z direction) to the surface (XY plane) of the base material 10 of the diffuser plate 1. It may be inclined at an inclination angle α. The tilt angle α is the angle between the optical axis 25 and the normal direction (Z direction). Further, the inclination direction of the optical axis 25 is represented by an azimuth angle β. The azimuth angle β is the angle between the optical axis 25 projected onto the XY plane and the X direction when the inclined optical axis 25 is projected onto the XY plane. Following the inclination of the optical axis 25, the lens surface 26 of the microlens 21 also inclines at an inclination angle α in the inclination direction represented by the azimuth angle β. As a result, the lens surface shape of the tilted microlens 21 becomes an aspherical shape obtained by tilting the reference aspherical shape (FIG. 8A), that is, a tilted aspherical shape (FIG. 8B).

As shown in FIG. 8B, when the optical axis 25 of the microlens 21 is inclined at an inclination angle α with respect to the Z direction, the surface shape of the microlens 21 also changes in the inclination direction represented by the azimuth angle β. It has an inclined aspherical shape inclined at an inclination angle α with respect to the Z direction. This inclined aspherical shape (FIG. 8B) is a shape obtained by rotating the reference aspherical shape (FIG. 8A) by an inclination angle α about the center point 30 of the reference aspherical shape. This tilted aspherical shape is rotationally symmetrical about the optical axis 25 tilted at an inclination angle α.

Note that the center point 30 is the origin (x, y, z) when designing the reference aspherical shape of the microlens 21. Specifically, in the design stage of the microlens array 20, the aperture surface of the reference aspherical shape of the microlens 21 is designed to be a circle, an ellipse, or the like. At this time, an opening surface is set on the xy plane where z=0 so that the radius x of the circle (x=y) or the minor axis x and major axis y of the ellipse have the set lengths. The origin (x=0, y=0, z=0) in such xyz space is the origin (x, y, z) when designing the reference aspherical shape, and the origin (x, y, z) ) corresponds to the center point 30 above. Moreover, this origin (x, y, z) may be a reference position when shifting the arrangement of the microlens 21 in the Z direction as described above. In addition, although the center point 30 is illustrated as being located on the surface (XY plane) of the base material 10 in FIG. 8, the center point 30 does not have to be located on the XY plane.

As shown in FIG. 8A above, when the lens surface shape is a non-inclined standard aspherical shape, the apex 28 of the microlens 21 is located on the optical axis 25 and the Z axis.

On the other hand, as shown in FIG. 8B, when the optical axis 25 and the lens surface shape are tilted, the vertex 29 of the lens surface 26 of the tilted microlens 21 is different from the vertex 28 of the lens surface 26 shown in FIG. 8A. Move to different positions. This apex 29 is the highest point in the Z direction of the tilted aspherical shape (FIG. 8B), and is located at a position offset from the optical axis 25 tilted by the tilt angle α.

As described above, in this embodiment, the optical axis 25 of the microlens 21 and the lens surface shape are tilted, and the apex 29 of the microlens 21 is moved to a position offset from the optical axis 25. Thereby, when light is incident on the microlens 21 with the optical axis 25 inclined, the outgoing light (diffused light) that passes through the microlens 21 and is emitted can be deflected with respect to the incident light. Deflection means bending the direction of the principal ray of the emitted light in a desired direction with respect to the direction of the principal ray of the incident light, thereby deflecting the main traveling direction of the emitted light (diffuse light) in the desired direction. do.

<5.2. Outgoing light deflection function>
Here, with reference to FIG. 9, the deflection function of the emitted light (diffused light) by the microlens 21 according to this embodiment will be described in more detail. FIG. 9 is a schematic diagram showing the deflection function of the microlens 21 according to this embodiment. The upper diagram in FIG. 9 (FIG. 9A) shows the diffusion function of transmitted light by the microlens 21 whose optical axis 25 is not inclined. The lower diagram in FIG. 9 (FIG. 9B) shows the diffusion and deflection functions of transmitted light by the microlens 21 with the optical axis 25 inclined.

As shown in FIG. 9, a case will be considered in which collimated light parallel to the normal direction (Z direction) of the surface of the diffuser plate 1 is incident as the incident light 40 to the diffuser plate 1. In this case, the incident angle θin of the incident light 40 is 0°, and the direction of the principal ray 41 of the incident light 40 is parallel to the Z direction. When the collimated light is incident on the diffuser plate 1, the light that passes through the diffuser plate 1 is diffused by the microlens 21, so the emitted light 50 becomes diffused light.

Here, as shown in FIG. 9A, if the optical axis 25 of the microlens 21 is not inclined, the light transmitted through the microlens 21 is symmetrical about the direction of the optical axis 25 of the microlens 21 (Z direction). spread to. Therefore, the emitted light 50 becomes diffused light that is symmetrically diffused around the Z direction. As a result, the outgoing angle θout of the principal ray 51 of the outgoing light 50 becomes 0°, and the direction of the principal ray 51 of the outgoing light 50 becomes parallel to the Z direction.

On the other hand, as shown in FIG. 9B, when the optical axis 25 of the microlens 21 is inclined at the inclination angle α, the principal ray 51 of the outgoing light 50 emitted from the diffuser plate 1 becomes the principal ray 41 of the incident light 40. deflect against. Specifically, the light that passes through the diffuser plate 1 is diffused almost symmetrically with respect to a polarization direction different from the Z direction. This deflection direction is a direction in which the principal ray 51 of the outgoing light 50 is bent with respect to the principal ray 41 of the incident light 40, and is represented by a deflection angle γ. As shown in FIG. 9B, when the incident light 40 enters the diffuser plate 1 in the Z direction (θin=0°), the deflection direction of the principal ray 51 of the output light 50 is aligned with the optical axis 25 of the microlens 21. The direction is opposite to the direction of inclination (the right direction in FIG. 9B) (the left direction in FIG. 9B). The deflection angle γ representing this deflection direction is determined by the inclination angle α of the optical axis 25, the inclined aspherical shape of the microlens 21, the position of the apex 29, etc. The deflection angle γ changes depending on the tilt angle α. If the lens surface shape is the same, the larger the inclination angle α, the larger the deflection angle γ.

In this way, when the optical axis 25 of the microlens 21 is inclined at the inclination angle α, the luminous flux of the emitted light 50 is deflected in the direction of deflection (direction represented by the deflection angle γ) with respect to the luminous flux of the incident light 40. The light is deflected and becomes diffused light that is diffused almost symmetrically around the deflection direction. As a result, the outgoing angle θout of the principal ray 51 of the outgoing light 50 becomes γ°, and the direction of the principal ray 51 of the outgoing light 50 is a direction inclined by the deflection angle γ with respect to the Z direction, and the optical axis 25 The direction is opposite to the direction of inclination.

As explained above, according to the present embodiment, the optical axis 25 of each microlens 21 constituting the microlens array 20 is aligned in the normal direction (Z direction) to the surface (XY plane) of the base material 10 of the diffuser plate 1. ). Furthermore, the lens surface shape of each microlens 21 is an inclined aspherical shape (FIGS. 8B, 9B) obtained by rotating the reference aspherical shape (FIGS. 8A, 9A) in the same direction at an inclination angle α. The lens surface shape is also inclined to follow the inclination of the optical axis 25. Thereby, the direction of the output light 50 can be bent in the direction opposite to the direction of inclination of the optical axis 25 with respect to the direction of the input light 40, and the output light 50 can be deflected in a desired direction. Therefore, according to this embodiment, the emitted light 50 can also be deflected in a direction different from the refraction direction due to the normal refraction effect of the diffuser plate 1.

Note that the incident light incident on the diffuser plate 1 according to the present embodiment may be, for example, collimated light collimated by an optical system, or may be diffused light incident from a single point light source. However, the light may be diffused light or collimated light incident from a plurality of light sources arranged in the same direction with respect to the diffuser plate 1. The microlens array 20 according to this embodiment can suitably deflect these incident lights.

<5.3. Preferred range of inclination angle α>
Moreover, it is preferable that the inclination angle α of the optical axis 25 of the microlens 21 according to this embodiment is 60° or less. If the inclination angle α exceeds 60°, the surface shape of the microlens 21 will be distorted, and the microlens 21 will have extreme anisotropy. For this reason, it becomes difficult to mold the microlenses 21 that are excessively inclined, and the feasibility of forming a microlens array structure may decrease. Furthermore, it may become difficult to clearly manifest the deflection function of the emitted light, and the optical characteristics of the microlens 21 may also deteriorate. Therefore, in order to ensure the moldability of the microlens 21, the feasibility of the microlens array structure, the clear manifestation of the deflection function by the microlens 21, and the optical properties of the microlens 21, the inclination angle α must be 60°. It is preferable that it is less than or equal to °.

Furthermore, it is more preferable that the inclination angle α is 45° or less. When the inclination angle α is more than 45°, noise in the diffused light may easily occur depending on the shape of the inclined microlens 21. This lens shape-dependent noise includes, for example, zero-order diffracted light noise or spectral noise. Spectral noise is noise composed of refracted and scattered extraordinary light and relatively periodic peak-shaped diffracted light, and is generated by a diffraction phenomenon caused by discontinuity in the shape of the microlens array 20. Therefore, in order to reduce noise generated by the diffused light caused by the microlens 21, it is preferable that the inclination angle α is 45° or less.

Furthermore, the inclination angle α is preferably 1° or more. If the inclination angle α is less than 1°, the realization of the deflection function will not be determined due to formation errors of the microlens 21 or limitations in the detection accuracy of the deflection angle, and the deflection function of the emitted light will be insufficient. There are cases. Therefore, in order to suitably realize the deflection function, the inclination angle α is preferably 1° or more, and more preferably 2° or more.

<5.4. Rotationally symmetrical aspherical shape>
The surface shape (lens surface shape) of the microlens 21 according to the present embodiment is preferably an aspherical shape that is rotationally symmetrical about the optical axis 25 tilted at the tilt angle α, as shown in FIG. 8, for example. . The rotationally symmetrical aspherical shape is, for example, an ellipsoid (-1<K<0, K>0), a paraboloid (K=-1), or a hyperboloid (K<-1). Note that "K" is a conic coefficient, which is used in the equation that defines the aspherical shape.

As described above, the lens surface shape according to the present embodiment is preferably a tilted aspherical shape that is rotationally symmetrical about the tilted optical axis 25. This has the advantage that the microlens 21 with the optical axis 25 inclined can be designed and manufactured relatively easily. Furthermore, the emitted light 50 can be suitably deflected in a desired direction by the microlens 21, and the accuracy and uniformity of the deflection function can be improved.

<5.5. Random variation of inclination angle α and azimuth angle β>
Here, an example will be described in which the inclination angle α and azimuth angle β of the plurality of microlenses 21 are randomly varied and set to mutually different variation values.

Regarding the plurality of microlenses 21 constituting the microlens array 20, the inclination angle α of the optical axis 25 with respect to the Z direction may vary randomly with respect to a predetermined reference inclination angle αk. Furthermore, the azimuth angle β representing the direction of inclination of the optical axis 25 may also vary randomly. For example, as shown in the following equation (30), the inclination angles α of all the microlenses 21 may vary randomly within a predetermined variation width Δα with reference to the reference inclination angle αk. Furthermore, as shown in the following equation (31), the azimuth angles β of all the microlenses 21 may vary randomly within a relatively wide variation range. For example, the standard inclination angle αk is 0° (αk = 0°), the fluctuation width Δα is 20° (Δα = 20°), and the fluctuation range of the azimuth angle β is random in the range of 0° to 360°. It may be.

α=αk±Δα...(30)
β=0°~360°...(31)

As described above, the optical axes 25 of the plurality of microlenses 21 constituting the microlens array 20 may be inclined in mutually different directions (azimuth angle β) at mutually different inclination angles α. At this time, the inclination angle α of the optical axis 25 of the plurality of microlenses 21 varies randomly within a predetermined variation range (for example, within a relatively wide variation range Δα) with respect to a predetermined reference inclination angle αk. You can leave it there. Similarly, the azimuth angle β of the optical axis 25 of the plurality of microlenses 21 also differs from each other, and the azimuth angle β varies randomly within a predetermined variation range (for example, within a relatively wide variation width Δβ). You can leave it there.

The surface shape of all the microlenses 21 is an ellipsoid, and is rotationally symmetrical about the optical axis 25. In this embodiment, the aperture width D and radius of curvature R of the microlens 21 do not vary randomly around Dk and Rk, but are substantially the same as Dk and Rk, so that the surface of each microlens 21 The shape is substantially the same as the shape of the reference ellipsoid. Therefore, the surface shapes of the plurality of microlenses 21 are mutually the same ellipsoid.

With the microlens array 20 having such a configuration, the light emitted from each microlens 21 is deflected at a deflection angle γ corresponding to the inclination angle α of each optical axis 25 and corresponding to the azimuth angle β of each optical axis 25. can be deflected in the deflection direction. Therefore, the microlens array 20 as a whole can deflect the emitted light in random directions at random deflection angles γ centered on a desired angle. Therefore, since the deflection direction and the deflection angle γ of the emitted light can be varied, the homogeneity of the emitted light can be improved. Furthermore, even if the plurality of microlenses 21 have substantially the same lens surface shape and are regularly arranged, the inclination angle α and azimuth angle β of the optical axis 25 of each microlens 21 can be changed. It can be varied randomly within a relatively wide variation range. Thereby, it is also possible to further reduce unevenness in the intensity distribution of the diffused light due to interference and diffraction of the light emitted from the plurality of microlenses 21.

<5.5. Conic coefficient K of aspherical shape, aspect ratio>
Furthermore, when the aspherical shape of the microlens 21 according to the present embodiment is expressed by an aspherical lens formula using a conic coefficient K, the conic coefficient K in the aspherical lens formula is likely to be greater than 0. Preferred (K>0). If K>0, the lens surface shape becomes an ellipsoid that is vertically elongated in the direction of the optical axis 25. This has the effect of making it easier to achieve both deflection function and diffusion control.

Note that when the aspherical shape of the microlens 21 is an aspherical shape that is rotationally symmetrical about the optical axis 25, the formula for the aspherical lens representing the aspherical shape is, for example, the following formula (40). be able to.

Z=(x ² /R)/{1+(1-(1+K)・x ² /R ² ) ^0.5 }+A ₄・x ⁴ +A ₆・x ⁶ ...(40)

Note that in equation (40), each parameter is as follows.
Z: Sag amount x: Distance from Z-axis R: Radius of curvature K: Conic coefficient A ₄ , A ₆ : 4th and 6th order aspheric coefficients

Further, the aspect ratio k of the surface shape of the microlens 21 (i.e., the above-mentioned aspherical shape) is preferably 0.1 or more and 1.1 or less, and preferably 0.2 or more and 0.6 or less. is more preferable. This has the effect of making it easier to control the diffusion angle and form the structure of the microlens 21.

Here, the aspect ratio k is the ratio between the maximum lens height h _MAX of the plurality of microlenses 21 and the reference aperture width Dk of the microlenses 21 (k=h _MAX /Dk). The maximum lens height h _MAX is the difference between the maximum lens apex height h _max and the minimum boundary point height h _MIN (h _MAX =h _max −h _MIN ). The maximum lens apex height h _max is the apex height of the microlens 21 having the highest apex height among the plurality of microlenses 21 included in one unit cell 3 shown in FIG. The maximum value of h is h _max ). The minimum boundary point height h _MIN is the height of the lowest position of the boundary line 24 around the microlens 21 .

<6. Other lens surface shapes>
As described above, the microlens 21 according to the present embodiment preferably has an aspherical shape or a spherical shape having an axis of symmetry, for example, as shown in FIG. Preferably, it has a rotationally symmetrical aspherical shape. This rotationally symmetrical aspherical shape is isotropic with the optical axis 25 as the center. However, the surface shape of the microlens 21 is not limited to this example; for example, it may be an aspherical shape that is not rotationally symmetrical about the optical axis 25, or it may be an aspherical shape that has anisotropy. good. Even if the lens surface shape is a rotationally asymmetrical aspherical shape or an anisotropic aspherical shape, by shifting each microlens 21 in the Z direction by a random shift amount Δs to impart a phase difference. , it is possible to suppress the diffracted light and improve the homogeneity of the diffused light. Furthermore, even in the aspherical microlens 21 having anisotropy, if the optical axis 25 of the microlens 21 is inclined, the emitted light can be deflected in a desired direction by the action of the inclined optical axis 25. is possible.

Below, with reference to FIGS. 10 to 14, as an example where the surface shape of the microlens 21 is an aspherical shape having an axis of symmetry, the microlens 21 is rotationally asymmetric with respect to the optical axis 25. An example of an aspherical shape having anisotropy and line symmetry with respect to a plane containing (axis of symmetry) will be described. For example, an anamorphic shape or a torus shape can be used as the aspherical shape having anisotropy and extending in a predetermined direction.

(1) Anamorphic shape First, the anamorphic microlens 21 will be described with reference to FIGS. 10 and 11. FIG. 10 is an explanatory diagram showing the planar shape of the anamorphic microlens 21. FIG. 11 is a perspective view showing the three-dimensional shape of the anamorphic microlens 21.

The microlens 21 shown in FIGS. 10 and 11 is a so-called anamorphic lens, and its surface shape is an aspherical shape including an anamorphic curved surface. As shown in FIG. 10, the planar shape of the microlens 21 is an anisotropic ellipse. The major axis of the elliptical shape in the Y-axis direction is Dy, and the minor axis in the X-axis direction is Dx. These Dx and Dy correspond to the aperture widths of the microlens 21 in the X direction and the Y direction. As shown in FIG. 11, the surface shape of the microlens 21 is an aspherical curved surface having predetermined radii of curvature Rx and Ry in the major and minor axis directions of an elliptical shape, respectively. The microlens 21 has an aspherical shape having anisotropy in the Y-axis direction.

Here, a method for setting the surface shape of the anamorphic microlens 21 will be described with reference to FIG. 11 and equation (50) below. The anamorphic curved surface (aspherical surface) shown in FIG. 11 is expressed by the following formula (50). The following formula (50) is an example of a formula representing an anamorphic curved surface (aspherical surface).

Note that in equation (50), each parameter is as follows.
Cx=1/Rx
Cy=1/Ry
Rx: Radius of curvature in the X direction Ry: Radius of curvature in the Y direction Kx: Conic coefficient in the X direction Ky: Conic coefficient in the Y direction A _x4 , A _x6 : 4th and 6th order aspheric coefficients in the X direction A _y4 , A _y6 : 4th and 6th order aspherical coefficients in the Y direction

As shown in FIG. 11, from the anamorphic curved surface defined by the above formula (50), the short axis in the X direction of the ellipse on the XY plane is Dx, and the long axis in the Y direction is Dy. , cut out the curved surface. This cut out part of the curved surface shape is set as the surface shape (anamorphic shape) of the microlens 21. Here, the major axis Dy, the minor axis Dx, the radius of curvature Ry in the Y direction (major axis direction), and the radius of curvature Rx in the X direction (minor axis direction) of the elliptical shape are set at a predetermined rate of variation for each microlens 21. Vary randomly within a range to create variation. Thereby, the surface shapes of the plurality of microlenses 21 having mutually different anamorphic shapes can be set.

(2) Torus Shape Next, another example of the aspherical shape (torus shape) of the microlens 21 will be described with reference to FIGS. 12 to 14. FIG. 12 is an explanatory diagram showing the planar shape of the torus-shaped microlens 21. FIG. 13 is a perspective view showing the three-dimensional shape of the torus-shaped microlens 21. FIG. 14 is a perspective view showing a torus-shaped curved surface.

As shown in FIGS. 12 to 14, the surface shape of the microlens 21 is an aspherical shape including a partially curved surface of a torus shape. A torus is a surface of revolution obtained by rotating a circle. Specifically, as shown in FIG. 14, the small circle (radius: R) is rotated along the circumference of the large circle (radius: R) around the rotation axis (X-axis) located outside the small circle (radius: r). By rotating the circle, a so-called donut-shaped torus is obtained. The curved shape of the surface (torus surface) of this toric body is a torus shape. By cutting out the outer portion of this torus shape, a three-dimensional shape of the torus-shaped microlens 21 as shown in FIG. 13 is obtained.

As shown in FIG. 12, the planar shape of the torus-shaped microlens 21 is an elliptical shape with anisotropy. The major axis of the elliptical shape in the Y-axis direction is R, and the minor axis in the X-axis direction is r. These r and R correspond to the aperture widths Dx and Dy of the microlens 21 in the X direction and the Y direction. As shown in FIG. 13, the three-dimensional shape of the microlens 21 is an aspherical curved surface having predetermined radii of curvature R and r in the major and minor axis directions of an elliptical shape, respectively. The microlens 21 has an aspherical shape having anisotropy in the Y-axis direction.

Here, a method for setting the surface shape of the torus-shaped microlens 21 will be described with reference to FIG. 14 and the following equation (52). FIG. 14 is a perspective view showing an aspherical curved surface expressed by the following formula (52). Note that in equation (52), R is the radius of the large circle, and r is the radius of the small circle.

As shown in FIG. 14, from the torus-shaped curved surface defined by the above formula (52), the curved surface is formed such that the short axis in the X direction of the ellipse on the XY plane is r, and the long axis in the Y direction is R. Cut out. This cut out part of the curved surface shape is set as the curved surface shape (torus shape) of the microlens 21. Here, the major axis Dy, the minor axis Dx, the radius of curvature R in the Y direction (major axis direction) (corresponds to the radius of curvature Ry of the lens), and the radius of curvature r in the X direction (minor axis direction) (corresponding to the radius of curvature Ry of the lens). (corresponding to the radius of curvature Rx) is randomly varied within a predetermined variation rate for each microlens 21 to vary it. Thereby, the surface shapes of the plurality of microlenses 21 having mutually different torus shapes can be set.

The aspherical shapes such as the anamorphic shape and torus shape described above are not rotationally symmetrical shapes about the optical axis 25 of the microlens 21. However, the aspherical shape is a shape that is symmetrical in the Y direction with respect to the XZ plane that includes the optical axis 25, and a shape that is symmetrical in the X direction with respect to the YZ plane that includes the optical axis 25. The surface shape of the microlens 21 may be an aspherical shape (for example, an anamorphic shape or a torus shape) having such symmetry and anisotropy. Even in this case, diffracted light can be suppressed and the homogeneity of diffused light can be increased by shifting each microlens 21 having an aspherical shape in the Z direction by a random shift amount Δs to provide a phase difference. is possible. Furthermore, even in the case of an aspherical microlens 21 having symmetry and anisotropy, if the optical axis 25 of the microlens 21 is tilted and the lens surface shape is rotated in the direction of inclination, the inclination can be Due to the effect of the optical axis 25 and the lens surface shape, the emitted light can be deflected in a desired direction. Furthermore, different diffusion characteristics can be obtained in the X direction and the Y direction.

Note that as the aspherical shape of the microlens 21 having anisotropy, in addition to the above examples, for example, an aspherical shape cut out from an ellipsoid can also be used.

<7. How to design a microlens array>
Next, a method for designing the microlens array 20 according to this embodiment will be described with reference to FIGS. 15 to 21. FIG. 15 is a flowchart showing a method for designing the microlens array 20 according to this embodiment.

(S10) Setting of lens center coordinates As shown in FIG. 15, first, in _S10 , on the surface of the microlens array 20 (on the and y coordinate). The lens center coordinates p _n are the coordinates of the center point 30 (see FIG. 8) of each microlens 21 on the XY plane. In this embodiment, since the plurality of microlenses 21 are regularly arranged on the XY plane, the plurality of lens center coordinates p _n are regularly arranged along a preset reference grid.

Specifically, as shown in FIG. 16, for example, on the XY plane of the microlens array 20 whose size is set in advance, a plurality of lens center coordinates are arranged along a reference grating having a preset grating interval i. Set p _n (xp _n , yp _n ). Note that n is the number of installed microlenses 21 (n=1, 2, 3, . . . ). In the illustrated example, a triangular lattice is used as the reference lattice so that the intervals between the plurality of lens center coordinates _pn fall within a preset range. First, a triangular lattice is set on the XY plane by arranging a plurality of equilateral triangles whose side length is the lattice interval i. Next, the lattice points (vertices of equilateral triangles) of the triangular lattice are set at the center coordinates p _n (xp _n , yp _n ) of each lens. Thereby, a plurality of lens center coordinates p _n can be regularly arranged along the triangular lattice, and the intervals between the lens center coordinates p _n can be adjusted to a constant lattice interval i.

Furthermore, when arranging the lens center coordinates p _n as described above, as shown in FIG. It is preferable to adjust the grid spacing i of the reference grid so that it falls within a permissible range (for example, below a predetermined value). Thereby, on the XY plane, the plurality of microlenses 21 can be arranged regularly while overlapping each other with an appropriate amount of overlap Ov. Therefore, it is possible to suppress the generation of a flat part that does not become a lens surface between the mutually

adjacent microlenses

21, 21, so that the generation of zero-order diffracted light that passes through the flat part of the diffuser plate 1 can be suppressed. Moreover, unevenness in the intensity distribution of the diffused light due to interference or diffraction of the diffused light emitted from the plurality of microlenses 21 can be reduced. Furthermore, since the

microlenses

21, 21 do not overlap each other excessively, the moldability and feasibility of the microlens array structure are not impaired.

(S12) Setting Lens Parameters Next, as shown in FIG. 15, in S12, the lens parameters of each microlens 21 are set. The lens parameter is a parameter that determines the surface shape of the microlens 21 (lens surface shape). Preferably, the lens parameters are set randomly within a preset variation range.

The lens parameters include, for example, the reference aperture width Dk and reference radius of curvature Rk of the reference surface shape, the actual aperture width D (lens diameter) of each microlens 21, the radius of curvature R of the top of the microlens 21, and the like. For example, when the reference surface shape is a reference aspherical surface shape that is rotationally symmetrical about the optical axis 25 (axis of symmetry), for example, an ellipsoidal surface (the surface of a spheroid whose axis of rotation is in the direction of the optical axis 25), In the case of a paraboloid, a hyperboloid, etc. (see FIG. 17), the lens parameters include, for example, a reference aperture width Dk, a reference radius of curvature Rk, an aperture width D, a radius of curvature R, an inclination angle α, an azimuth angle β, etc. (See Figure 8.)

On the other hand, as shown in FIG. 18, the reference surface shape of the microlens 21 is rotationally asymmetric about the optical axis 25 and has an anisotropic aspherical shape, such as an anamorphic shape or a torus shape. In this case, the lens parameter may be a parameter used in a function (z=f(d)) that defines the aspherical shape. In this case, the value z of the lens surface shape in the height direction is expressed as a function of the distance d from the lens center coordinates p _n on the XY plane (z=f(d)). The distance d may include a distance dx in the X direction and a distance dy in the Y direction from the lens center coordinate _pn on the XY plane. A function using these distances dx and dy can determine the position z of the lens surface shape in the height direction (z=f(dx, dy)). A parameter included in a function (z=f(d)) representing the aspherical lens surface shape having such anisotropy may be set as the lens parameter.

Note that when the lens surface shape is a reference aspherical surface shape that is rotationally symmetrical about the optical axis 25 (for example, an ellipsoid, a paraboloid, a hyperboloid, etc.), the planar shape of the microlens 21 is, for example, as shown in FIG. , becomes a circle as shown in FIG. On the other hand, when the lens surface shape is a reference aspherical shape that is rotationally asymmetric about the optical axis 25 (for example, an anamorphic shape, a torus shape), the planar shape of the microlens 21 is, for example, FIGS. As shown in the figure, it becomes an ellipse or a shape approximating an ellipse.

Furthermore, as described above, in this embodiment, the plurality of microlenses 21 have the same shape, and the lens surface shape of each microlens 21 is substantially the same as the reference surface shape. Therefore, the aperture width D and the radius of curvature R of each microlens 21 are set to the reference aperture width Dk and the reference radius of curvature Rk, respectively. In this case, the lens parameters set in the lens parameter setting step (S12) may be only parameters related to the reference surface shape (Dk, Rk, etc.).

However, the present invention is not limited to such an example, and the surface shape of each microlens 21 is a shape that varies within a minute error (for example, ±1% shape error) with respect to the reference surface shape. It's okay. In this case, the aperture width D and radius of curvature R of each microlens 21 may be set to randomly varied values within a small error range. At this time, the aperture width D may be set to a value that randomly varies within a small variation rate δD based on a predetermined reference aperture width Dk (D=Dk±δD%). Similarly, the radius of curvature R of each microlens 21 may be set to a value that randomly varies within the range of a minute variation rate δR with respect to a predetermined reference radius of curvature Rk (R=Rk±δR% ). In this way, by minutely varying the lens parameters aperture width D and radius of curvature R, the lens surface shape of the plurality of microlenses 21 can be changed from a reference surface shape (for example, a reference aspherical shape having an axis of symmetry) to a minute value. It is possible to set mutually different lens surface shapes by varying the lens surface shape. When varying the lens surface shape in this way, the lens parameters set in the lens parameter setting step (S12) include parameters related to the reference surface shape (Dk, Rk, etc.) and parameters related to the variation rate (δD, δR). ) may also be included.

(S14) Setting the shift amount Δs in the Z direction Next, in S14, the shift amount Δs for shifting the arrangement of each microlens 21 from the reference position in the Z direction in the Z direction is set. The Z-direction reference position is a height position (Z coordinate position) that serves as a reference for lens shift in the Z direction, and is, for example, the height position of the center point 30 (z=0 position) shown in FIG. The shift amount Δs is a distance by which the microlens 21 placed at the reference position is shifted in the Z direction in the initial setting (see FIG. 6B).

It is preferable that the shift amount Δs is randomly set within a preset fluctuation range δS. That is, the shift amount Δs of each microlens 21 is preferably set to a value that varies randomly within the range of variation δS so that the shift amount Δs of the plurality of microlenses 21 has different values. . For example, the shift amount Δs may be the product of a preset fluctuation range δS and a random number (for example, a random number in the range of 0.0 to 1.0) (Δs=δS×random number). In this case, the fluctuation width δS corresponds to the maximum shift amount Δs _max , which is the maximum value among the shift amounts Δs of the plurality of microlenses 21.

For example, the fluctuation width δS preferably satisfies the above formula (5) (or formula (8)), more preferably satisfies the above formula (6) (or formula (1)), and satisfies the above formula (7) ( It is even more preferable that the formula (2) is satisfied (m=1, 2, 3...). For example, when the above formula (7) is satisfied, δS=λ/(n-1), and the shift amount Δs can be any value within the range of 0 [μm] or more and λ/(n-1) [μm] or less. set to the value.

By setting the shift amount Δs to a random value in this way, the positions in the Z direction and the lens height h of the plurality of microlenses 21 are more irregularly changed, and the mutual can be given different phase differences. Furthermore, by setting the fluctuation width δS to a value that satisfies the above formulas ((5) to (7)), δS can be set to a more appropriate value according to the wavelength λ of the incident light and the refractive index n of the microlens array 20. As a result, it is possible to impart an irregular phase difference within a range suitable for the wavelength λ and refractive index n to the light emitted from each microlens 21 (diffused light). Since the 0th-order diffracted light included in the output light having a phase difference can be canceled out, the effect of suppressing unnecessary diffracted light such as the 0th-order diffracted light described above is further enhanced.

(S16) Determination of Lens Surface Shape Next, in S16, the lens surface shape of each microlens 21 is determined based on the lens parameters set in S12 above. As a result, the lens surface shape and lens surface height hk (see FIG. 6A) of each microlens 21 are determined.

Specifically, as shown in FIG. 19, the Z coordinate position representing the lens surface 26 of each microlens 21 is calculated based on the lens parameters set above, and the lens surface shape of each microlens 21 is determined. do. Then, the size of the set lens surface shape on the XY plane (for example, aperture width D) matches the size of the parameter set in S12 above (for example, aperture width D set in S12 above). Adjust the height position of the set lens surface shape in the Z direction. Then, the horizontal cross section of the lens surface shape taken on the XY plane after adjusting the height position is defined as the cross section at the position of z=0.

Note that after S16, if necessary, a tilting process (see FIG. 8) may be performed to tilt the optical axis 25 of each microlens 21 and the lens surface shape. When performing this tilting process, the optical axis 25 of each microlens 21 is tilted at a tilt angle α with respect to the Z direction in the tilt direction defined by the azimuth angle β. Further, in accordance with the inclination of the optical axis 25, the lens surface shape determined in S16 is rotated about the center point 30 of each microlens 21 as a rotation center. The rotation angle at this time is the same as the inclination angle α, and the rotation direction is the direction of the azimuth angle β. Further, the center point 30, which is the center of rotation, is the origin (x, y, z) when designing the reference surface shape of the microlens 21 in S12 and S16 above.

Through this rotation process, as shown in FIG. 8, the lens surface shape is tilted at an inclination angle α with respect to the Z direction, changing from the reference surface shape (see FIG. 8A) to the inclined surface shape (see FIG. 8B). Changes to Further, the apex of the microlens 21 moves from the apex 28 before rotation to a new apex 29. This new apex 29 is the apex of the inclined surface shape obtained by rotating the reference surface shape by the inclination angle α, and is located at a position tilted by the inclination angle α and shifted from the optical axis 25.

(S18) Adjusting the height of the lens surface in the region where the lens surfaces overlap Next, in S18, regarding the plurality of microlenses 21 whose lens surface shapes have been determined in the above S16, the height of the lens surface 26 of the

adjacent microlenses

21, 21 is adjusted. When parts overlap, the height of the lens surface 26 in the overlapping area is adjusted. The height adjustment process (S18) of the lens surface 26 will be explained with reference to FIGS. 20 and 21.

As a result of the lens surface shape determination process (S16), as shown in FIG. 20A, the lens surfaces 26, 26 of

adjacent microlenses

21, 21 may partially overlap each other. Therefore, in the area where the lens surfaces overlap, as shown in FIG. 20B, the lens surface 26 of the two lenses with a larger z value (that is, the lens surface 26 with a higher height) is used as a microlens. Used as the surface of array 20.

More specifically, in the lens surface height adjustment process (S18), first, as shown in FIG. 21, a grid arranged in a lattice shape on the XY plane is set. Next, for each grid, the z value (lens height) of each grid is determined based on the lens surface shape determined in S16 above.

More specifically, as shown in FIG. 21, for example, a unique lens ID is first set for each microlens 21. Then, the z value, which is a function of the distance from the lens center, is determined for each grid on the XY plane. The z value represents the height of the lens surface 26 at that XY plane position. In the area where the two microlenses 21 and 21 (the lens with lens ID=1 and the lens with lens ID=2) overlap each other, the lens with lens ID=1 and the lens with lens ID=2 are Calculate the z-value of surface 26. Then, the z value of the lens surface 26 of the two lenses with the larger z value is used as the z value of the lens surface 26 of the microlens array 20. In FIG. 21, "1" or "2" is assigned as a lens ID for each grid, and in S20 described later, it is possible to specify which lens's z value is used for each grid. . Further, by assigning a lens ID to each grid in this way, it is also possible to specify the boundary line 24 between

adjacent microlenses

21, 21.

(S20) Lens Shift Processing Thereafter, in S20, a process of shifting each microlens 21 by a shift amount Δs in the Z direction is performed. In this shift processing, the lens surface 26 of each microlens 21 is shifted in the Z direction by a shift amount Δs that is randomly set in advance for each microlens 21, and the height position of the lens surface 26 of each microlens 21 ( z value) is determined.

Specifically, in S20, the shift amount Δs of each microlens 21 randomly set in S14 above is added to the z value representing the height h' of each microlens 21 whose lens surface shape was determined in S16 above. Add the represented z values. Thereby, the z value representing the height h (see FIG. 6B) of each microlens 21 after being shifted is determined (h=h'+Δs).

When performing the shift process in S20, based on the lens ID (see FIG. 21) assigned to each grid in S18, the microlens 21 used in that grid and the lens surface of the microlens 21 are selected. Twenty-six z-values are identified. Then, the shift amount Δs set for the specified microlens 21 is added to the z value of the specified lens surface 26 to obtain the final height h of the lens surface 26 of the microlens 21. A representative z value is determined. At this time, regarding the area where two

adjacent microlenses

21, 21 overlap, the area where the two

adjacent microlenses

21, 21 overlap is determined based on the lens ID assigned to each grid in S18 and the boundary line 24 between the

microlenses

21, 21. It is possible to determine which lens among the two

microlenses

21 and 21's z value and shift amount Δs should be used for calculation.

As described above, in S20, the shift amount Δs randomly set for each microlens 21 is added to the z value representing the height h' of each microlens 21. As a result, the lens surface 26 of each microlens 21 is shifted in the Z direction by a random shift amount Δs (see FIG. 6B).

The method for designing the microlens array 20 according to this embodiment has been described above. According to the design method according to the present embodiment, the lens surface shape of the plurality of microlenses 21 is such that the plurality of microlenses 21 having substantially the same lens surface shape are regularly arranged on the XY plane, and (S10, S12, S16), the lens surface of each microlens 21 can be placed at a position shifted in the Z direction by a random shift amount Δs (S14, S20). Thereby, an irregular phase difference corresponding to the random shift amount Δs can be superimposed and imparted to the diffused light emitted from each microlens 21.

By such a random shift of the shift amount Δs, an irregular phase difference can be imparted to the diffused light emitted from the plurality of microlenses 21. Therefore, the diffraction of the diffused light emitted from each microlens 21 can be mutually canceled out. Therefore, unnecessary diffracted light including spectral diffracted light and zero-order diffracted light, which could not be suppressed by conventional microlens arrays in which microlenses are regularly arranged, can be suppressed. Therefore, unevenness in the intensity distribution of the diffused light caused by mutual interference and diffraction of the diffused light from the plurality of microlenses 21 can be effectively suppressed. Therefore, the homogeneity and light distribution of the diffused light emitted from the entire regularly arranged microlens array 20 can be improved.

Furthermore, according to the design method of the microlens array 20 according to the present embodiment, the plurality of microlenses 21 are regularly arranged on the XY plane of the base material 10. Furthermore, it is preferable that the plurality of microlenses 21 are arranged so as to overlap each other without any gaps with a predetermined amount of overlap Ov, and that there is no flat part at the boundary between adjacent microlenses 21. Thereby, while arranging the plurality of microlenses 21 continuously on the XY plane with no gaps between them, it is possible to impart different diffusion characteristics to each of the microlenses 21 by the lens shift. The microlens array 20 having such a configuration can reduce macroscopic light intensity fluctuations depending on the lens surface structure and light intensity changes due to unnecessary diffracted light, so it can achieve good homogeneity and light distribution, and diffusion with effective cutoff properties. Light intensity distribution can be realized.

<7. Microlens manufacturing method>
Next, with reference to FIG. 22, a method for manufacturing the diffusion plate 1 according to this embodiment will be described. FIG. 22 is a flowchart showing a method for manufacturing the diffusion plate 1 according to this embodiment.

As shown in FIG. 22, in the method for manufacturing the diffusion plate 1 according to the present embodiment, first, the base material (the base material of the master master or the base material 10 of the diffusion plate 1) is cleaned (step S101). The base material may be, for example, a roll base material such as a glass roll, or a flat base material such as a glass wafer or a silicon wafer.

Next, a resist is formed on the surface of the cleaned base material (step S103). For example, the resist layer can be formed using a resist using a metal oxide. Specifically, a resist layer can be formed on a roll-shaped base material by spray coating or dipping a resist. On the other hand, a resist layer can be formed on a flat base material by subjecting it to various coating treatments. Note that as the resist, a positive photoreactive resist or a negative photoreactive resist may be used. Furthermore, a coupling agent may be used to increase the adhesion between the base material and the resist.

Further, the resist layer is exposed using a pattern corresponding to the shape of the microlens array 20 (step S105). Such exposure processing may be performed using known exposure methods, such as exposure using a gray scale mask, multiple exposure by overlapping multiple gray scale masks, or laser exposure using a picosecond pulse laser or femtosecond pulse laser. may be applied as appropriate.

Thereafter, the exposed resist layer is developed (S107). A pattern is formed in the resist layer by this development process. Development processing can be performed by using an appropriate developer depending on the material of the resist layer. For example, when the resist layer is formed of a resist using a metal oxide, the resist layer can be alkali developed using an inorganic or organic alkaline solution.

Next, by performing sputtering or etching using the developed resist layer (S109), a master master having the shape of the microlens array 20 formed on its surface is completed (S111). Specifically, a glass master can be manufactured by etching a glass base material using a patterned resist layer as a mask. Alternatively, a metal master can be manufactured by performing Ni sputtering or nickel plating (NED treatment) on a resist layer on which a pattern has been formed, forming a nickel layer with a transferred pattern, and then peeling off the base material. . For example, a metal master master is manufactured by forming a nickel layer with a resist pattern transferred thereto by Ni sputtering with a thickness of about 50 nm or nickel plating with a thickness of 100 μm to 200 μm (e.g., Ni sulfamate bath). can do.

Furthermore, by using the master master completed in step S111 (e.g., glass master master, metal master master) to transfer (imprint) a pattern onto a resin film or the like, an inverted shape of the microlens array 20 is formed on the surface. A soft mold is created (S113).

Thereafter, using a soft mold, the pattern of the microlens array 20 is transferred onto a glass base material, a film base material, etc., which is the base material 10 of the diffuser plate 1 (S115), and if necessary, a protective film is added. , an antireflection film or the like is formed (S117). Thereby, the diffusion plate 1 according to this embodiment can be manufactured using the master master and the soft mold.

Note that, above, an example has been described in which a soft mold is manufactured (S113) using a master master (S111), and then the diffusion plate 1 is manufactured by transfer using the soft mold (S115). However, the invention is not limited to this example, and a master master (for example, an inorganic glass master) on which the inverted shape of the microlens array 20 is formed may be manufactured, and the diffusion plate 1 may be manufactured by imprinting using the master master. . For example, an acrylic photocurable resin is applied to a base material made of PET (PolyEthylene Terephthalate) or PC (PolyCarbonate), a pattern of a master master is transferred to the applied acrylic photocurable resin, and the acrylic photocurable resin is exposed to UV light. By curing, the diffusion plate 1 can be manufactured.

On the other hand, the diffuser plate 1 may be manufactured by directly processing the glass base material itself. In this case, following the development process in step S107, a dry etching process is performed on the base material 10 of the diffuser plate 1 using a known compound such as _CF4 (S119), and then, if necessary, A protective film, an antireflection film, etc. may be formed (S121). Thereby, the diffusion plate 1 according to this embodiment can be manufactured.

Note that the manufacturing method shown in FIG. 22 is just an example, and the manufacturing method of the diffuser plate 1 is not limited to the above example. The diffusion plate 1 according to this embodiment can be manufactured by various methods, such as photolithography, etching, resin transfer, or electroforming transfer.

<8. Application examples of diffuser plates>
Next, an application example of the diffuser plate 1 according to this embodiment will be described.

The diffusion plate 1 as described above can be appropriately installed in various devices that need to diffuse light in order to realize its functions. Examples of such devices include display devices such as various displays (for example, LEDs and organic EL displays), projection devices such as projectors, and various lighting devices.

For example, the diffusion plate 1 can be applied to a backlight of a liquid crystal display device, a lens integrated with a diffusion plate, etc., and can also be applied to light shaping. Further, the diffusion plate 1 can be applied to a transmission screen, a Fresnel lens, a reflection screen, etc. of a projection device. Further, the diffusion plate 1 can be applied to various lighting devices used for spot lighting, base lighting, etc., various special lighting, and various screens such as intermediate screens and final screens. Furthermore, the diffusion plate 1 can be applied to applications such as controlling the diffusion of light source light in optical devices, such as controlling the light distribution of LED light source devices, controlling the light distribution of laser light source devices, and controlling the incident light to various light valve systems. It can also be applied to control, etc.

Note that the device to which the diffuser plate 1 is applied is not limited to the above application example, but can be applied to any known device as long as it utilizes light diffusion. For example, the diffusion plate 1 according to the present embodiment can be installed in optical equipment such as various illumination optical systems, image projection optical systems, measurement detection sensing optical systems, and the like. As described above, the device including the diffusion plate 1 according to the present embodiment may be a display device, a projection device, a lighting device, a photodetection device, a video device, an optical processing device, an optical communication device, an optical calculation device, etc. . The light incident on the diffuser plate 1 is preferably light having a wavelength λ in the visible light range, and may be, for example, coherent light such as a laser beam, or incoherent light from a light source such as an LED or a lamp. It may be light. Furthermore, when the device including the diffuser plate 1 is used as a lighting device or a video device, a light source such as an LED light source or a white light source may also be used.

Further, the diffusion plate 1 including the microlenses 21 having an inclined aspherical shape according to the present embodiment can be manufactured by, for example, imprint processing using a master disk having an uneven structure of the microlenses 21. can. The master disc can be manufactured by high-precision drawing exposure or stepper exposure using laser light or a controlled light source, and photolithography techniques such as etching. For example, the master can be manufactured by transferring a structural surface formed by lithography by electroforming, or it can also be manufactured as an inorganic device by glass etching. Alternatively, the master disc can also be manufactured by precision machining technology.

The product of the diffusion plate 1 according to this embodiment may be provided as an inorganic device by glass etching, for example. Further, the diffusion plate 1 may be provided, for example, as an organic imprint film that is copied from a master. In this way, the product of the diffusion plate 1 can be provided as a transfer film product or a member surface transfer product. When manufacturing a transfer product of the diffusion plate 1, a flat plate master or a roll master can be used, and injection molding, melt transfer, UV resin transfer using photopolymerization method, etc. can be used.

Next, a diffusion plate according to an embodiment of the present invention will be described. Note that the following examples are merely examples for showing the effects and feasibility of the diffusion plate according to the present invention, and the present invention is not limited to the following examples.

<1. Design conditions>
A diffuser plate according to an example of the present invention and a diffuser plate according to a comparative example were designed according to the design conditions described below while changing the surface structure of the microlens array.

Tables 1 and 2 show the design conditions of the surface structure of the microlens array and the evaluation results of the effect of suppressing the diffraction peak of diffused light regarding the diffusion plates according to the examples and comparative examples. Table 2 shows examples and comparative examples that meet the requirements of formula (5), formula (6), and formula (7) (requirements of formula (8), formula (1), and formula (2)). It also shows whether or not the requirements of Equation (3), Equation (4), and Equation (7) are satisfied.

(1) Common design conditions for Examples and Comparative Examples As shown in Table 1, both Examples and Comparative Examples have a lens surface shape based on the reference surface shape (reference aperture width Dk, reference radius of curvature Rk). A microlens array was designed by regularly arranging a plurality of microlenses on the XY plane of the base material. At this time, a plurality of microlenses were regularly arranged along a hexagonal lattice to form a regular honeycomb array structure (see FIG. 2).

The reference surface shape of the microlens in Examples and Comparative Examples was spherical, and the reference aperture was circular. The reference opening width Dk of the reference surface shape was set to a fixed value of 30 μm. The reference radius of curvature Rk of the reference surface shape was set to a fixed value of 60 μm.

In addition, the distance L between the vertices of two mutually adjacent microlenses (hereinafter referred to as "lens inter-vertex distance L", L corresponds to "grid interval i" shown in FIG. 16) is 25 μm. And so. As a result, the overlapping amount Ov between adjacent microlenses was set to 5 μm (Ov=Dk−L=30 μm−25 μm=5 μm). Further, the refractive index n of the material (glass base material) forming the microlens array was set to 1.5.

In Comparative Example 1 and Examples 1 to 8, the lens surface shape was not changed and remained at the standard surface shape. As the aperture width D of each microlens, a reference aperture width Dk=30 μm was used. Further, as the radius of curvature R of each microlens, a reference radius of curvature Rk=60 μm was used.

On the other hand, in Example 9, the lens surface shape is minutely changed by varying lens parameters such as the aperture width D and the radius of curvature R within a minute error range (variation rate δ[%] = ±1%). I varied it. Specifically, by randomly varying the reference aperture width Dk within a predetermined variation rate δ (±1%) using random numbers, the aperture width D (random variation value) of each microlens is determined. Ta. Similarly, the radius of curvature R (random variation value) of each microlens was determined by randomly varying the reference radius of curvature Rk within a predetermined variation rate δ (±1%) using random numbers. In this manner, in Example 9, the lens surface shape of each microlens was randomly varied within a small error range with respect to the reference surface shape. As a result, the lens height h' of each microlens after the variation of the lens surface shape according to Example 9 varied by a random variation amount Δh from the reference lens height hk (fixed value) (h'=hk+Δh) . The case where the lens surface shape is slightly varied within the range of minute error (for example, ±1% shape error) as in Example 9 above is also included in the case where the microlens of the present invention has the reference surface shape. It will be done.

(2) Design conditions for Examples only Furthermore, in Examples 1 to 9, each microlens having the above reference surface shape was shifted in the Z direction by a random shift amount Δs. As the shift amount Δs of each microlens, a value was used that was randomly varied within a preset variation width δS using random numbers. As shown in Table 1, the fluctuation width δS was set to a different value (0.266 to 2.120 μm) for each of Examples 1 to 9. The difference between the maximum value Δs_max (for example, 0.266 to 2.120 μm) and the minimum value Δs_min (for example, 0 μm) of the shift amount Δs in each of Examples 1 to 9 is determined by the variation set in advance for each of Examples 1 to 9. The width was made to match the width δS (for example, 0.266 to 2.120 μm) (δS=Δs_max−Δs_min).

Due to the lens shift described above, in Examples 1 to 8, the final height h of the apex of each microlens (lens height h) is a random shift from the reference lens height hk (fixed value). It varied by an amount Δs (h=hk+Δs). On the other hand, in Example 9, the final lens height h was varied by a random shift amount Δs from the lens height h' after the slight variation in the lens surface shape (h=h'+Δs=hk+Δh+Δs). . In addition, in the microlens arrays according to Examples 1 to 9, a step in the Z direction is formed at the boundary between adjacent microlenses, and due to the step at the boundary, the lens surfaces of adjacent microlenses become discontinuous with each other. (See Figure 5.)

In addition, the preferable range of the variation range δS of the shift amount Δs defined by the above-mentioned equation (5) (formula (8)), equation (6) (formula (1)), and equation (7) (formula (2)) is As shown in Table 2, in Examples 2 to 9, δS was set so as to satisfy the requirements of formula (5) (formula (8)). Furthermore, in Examples 3 to 9, δS was set so as to satisfy the requirements of equation (6) (formula (1)). Furthermore, in Examples 4 and 9, δS was set so as to satisfy the requirements of Equation (7) (Equation (2)). Note that the value of "m" in Equation (8), Equation (1), and Equation (2) was set to "1".

Furthermore, as shown in Table 2, in Examples 5 to 8, the evaluation value Eva (D', λ, δZ) defined by the left side of equations (3) and (4) is calculated by equation (3). ), the effective aperture width D', the wavelength λ, and the maximum height difference δZ were set. In Examples 6 to 8, the effective aperture width D', wavelength λ, and maximum height difference δZ were set so as to satisfy the requirements of equation (4).

As described above, in the microlens array structures according to Examples 1 to 9, a plurality of microlenses having substantially the same lens surface shape are shifted randomly in the Z direction Δs within the range of variation ΔS. I shifted it. As a result, an irregular phase difference "(n-1)·Δs" is imparted to the diffused light emitted from each microlens due to the lens shift. Therefore, the value of the parameter "(n-1)・δS/λ" that represents the ratio of the phase difference "(n-1)・δS" corresponding to the optical maximum optical path length difference of the entire microlens array to the wavelength λ. was 0.25 to 1.99.

(3) Design conditions only for comparative example On the other hand, in comparative example 1, the lens shift in the Z direction as in the above example was not performed (δS=0, Δs=0). Therefore, the final apex height h (lens height h) of each microlens according to Comparative Example 1 was the same as the reference lens height hk of the reference surface shape (h=hk). Further, in the microlens array according to Comparative Example 1, no step in the Z direction was formed at the boundary between adjacent microlenses, and the lens surfaces of adjacent microlenses were continuously connected to each other. As a result, the irregular phase difference "(n-1)·δS" is not imparted to the diffused light emitted from each microlens. Therefore, the value of the parameter "(n-1)·δS/λ" was 0.

<2. Simulation conditions and manufacturing conditions>
When collimated light in the Z direction (wavelength λ = 0.532 μm) was incident on the microlens arrays of Examples 1 to 9 and Comparative Example 1 designed as described above, the microlens We simulated the state of diffused light distribution by the array. Specifically, using electromagnetic field analysis, the distribution of diffused light by the diffuser plates equipped with microlens arrays according to Examples 1 to 9 and Comparative Example 1 was simulated. In addition, the amplitude distribution of diffused light projected from the diffuser plate equipped with the microlens array according to Examples 1 to 9 and Comparative Example 1 onto a screen at a distance of 100 mm was simulated. Note that the refractive index of the glass base material, which is the material on which the microlens array is formed, was set to "1.5".

<3. Evaluation criteria>
Next, the effects of suppressing diffracted light by the diffusion plates according to the examples and comparative examples were evaluated using the above simulation results and the actually manufactured diffusion plates. The evaluation criteria for the suppressing effect on diffracted light will be described below with reference to Table 2 and FIGS. 23 to 24.

23 and 24 show the values of the parameters “(n-1)・δS/λ” shown in Table 2, the diffraction peak level A (amplitude), and the diffraction peak ratio for Comparative Example 1 and Examples 1 to 9. KA is a graph showing the relationship with _A.

As described above, the diffraction peak level (A) is an index representing the level (for example, amplitude) of the peak of diffracted light included in the diffused light emitted from the diffuser plate 1. The diffraction peak ratio (K _A ) is the ratio of the measured diffraction peak level (A) to the reference value (Ak) of the diffraction peak level (K _A [%]=(A/Ak)×100). In the simulation according to this example, the measured value when simulating the diffraction peak level (for example, the amplitude of the diffraction emission line spectrum) using the microlens array without the lens shift according to Comparative Example 1 is calculated as the diffraction peak level. The reference value (Ak) was set as the reference value (Ak). In addition, the measured value when simulating the diffraction peak level (for example, the amplitude of the diffraction emission line spectrum) of diffused light using the microlens array subjected to the lens shift according to Examples 1 to 9 was calculated using the diffraction peak level (A ). That is, the diffraction peak ratio K _A [%] according to Examples 1 to 9 indicates the ratio of the diffraction peak ratio K _A according to Comparative Example 1 to the reference value (=100%). The smaller the value of the diffraction peak ratio _KA , the more appropriately the peak of the diffracted light (especially the peak of the 0th order diffracted light) can be reduced, and the more appropriately the unnecessary diffracted light can be suppressed.

The effect of suppressing unnecessary diffracted light (spectral diffracted light and 0th order diffracted light) by the diffusion plates of Examples 1 to 9 and Comparative Example 1 was evaluated in five grades (ratings A, B, C, D, X). The evaluation results of the suppressing effect on unnecessary diffracted light are shown in Table 2 above.

A: Diffraction peak ratio K _A can be reduced to 10% or less, and the effect of suppressing diffracted light is extremely excellent.
B: Diffraction peak ratio K _A can be reduced to 30% or less, and the effect of suppressing diffracted light is outstanding. C: Diffraction peak ratio K _A can be reduced to 60% or less, and the effect of suppressing diffracted light is excellent.
D: Diffraction peak ratio K _A is less than 100%, and the suppressing effect of diffracted light is improved compared to the comparative example (diffraction peak ratio K _A =100%).
X: Diffraction peak ratio K _A is 100% (reference value), and the effect of suppressing diffracted light is poor.

<4. Evaluation results>
Next, with reference to Tables 1 and 2 above and FIGS. 23 to 34, the evaluation results of Examples and Comparative Examples will be compared and examined.

FIGS. 25 to 34 show simulation results of the light distribution characteristics, brightness distribution, etc. of diffused light by the diffuser plates according to Comparative Example 1 and Examples 1 to 9, respectively.

Note that in FIGS. 25 to 34, (a) is a bitmap data image showing the surface shape of one unit cell 3 (see FIG. 1) of the microlens array, which was generated by a computer. (b) is an image showing a simulation result of light distribution by electromagnetic field analysis. (c) is a graph showing simulation results of the brightness distribution of diffused light projected onto a screen located at a distance of 100 mm from the diffuser plate. In the graph (c), horizontal axis: horizontal coordinate position of the screen [mm], vertical axis: diffraction peak level A (vertical axis scale ranges from 0 to 2.4 [V/m]). be. The diffraction peak level A is, for example, the amplitude value (electric field strength) of a bright line spectrum representing the amplitude distribution of diffused light. (d) shows the diffraction peak ratio K _A shown in Table 2 and the evaluation results of the diffraction peak suppression effect.

(1) Comparison between Comparative Example 1 and Examples 1 to 9 (effectiveness of lens shift)
As shown in Table 1 and FIG. 25, in Comparative Example 1, Δs=0 and δS=0, each microlens was not randomly shifted in the Z direction, and a step was formed at the boundary between the microlenses. Not yet. Therefore, in Comparative Example 1, no phase difference is imparted to the plurality of regularly arranged microlenses. Therefore, as shown in FIG. 25, unnecessary diffracted light such as spectral diffracted light due to the periodic structure of the microlens array and 0th-order diffracted light generated near the optical axis of each lens is significantly generated, and the diffraction peak level A was a significantly high value of "2.20". As described above, Comparative Example 1 had no effect of suppressing spectral diffraction light or zero-order diffraction light, and as shown in the evaluation results in Table 2, had the lowest X evaluation.

On the other hand, in Examples 1 to 9, Δs≧0 and δS>0, each microlens was randomly shifted in the Z direction, and a step was formed at the boundary between the microlenses. As a result, in Examples 1 to 9, although a plurality of microlenses having substantially the same lens surface shape are regularly arranged along a hexagonal lattice, due to lens shift, spectral diffracted light and This has the effect of suppressing unnecessary diffracted light such as 0th-order diffracted light. As a result, as shown in Table 2 and FIGS. 26 to 34, in Examples 1 to 9, the peak of unnecessary diffracted light could be suppressed more favorably than in Comparative Example 1, and as shown in FIG. In addition, the diffraction peak ratio _KA was able to be reduced to 82% or less. Therefore, as shown in the evaluation results in Table 2, in Examples 1 to 9, the diffracted light suppression effect was evaluated as A to D.

As described above, all of Examples 1 to 9 were superior to Comparative Example 1 in suppressing diffracted light. The reason for this is thought to be that in Examples 1 to 9, the surface structure of the microlens array is made irregular by lens shift, and an irregular phase difference is superimposed on the diffused light from each microlens. Therefore, by randomly shifting the microlenses as in Examples 1 to 9, the effect of suppressing unnecessary diffracted light including spectral diffracted light and zero-order diffracted light is enhanced, and the unevenness of the intensity distribution of diffused light is reduced. It was confirmed that the homogeneity and light distribution of diffused light could be improved.

(2) Comparison of Examples 1 to 9 (effectiveness of the condition of fluctuation width δS of shift amount Δs)
Next, the phase difference corresponding to the optical maximum optical path length difference "(n-1)・δS" considering both the refractive index difference (n-1) and the variation width δS described above, and the parameters related to the phase difference. The validity of the conditions of equations (5) to (7) regarding “(n−1)·δS/λ” will be explained.

(2A) Regarding Equations (5) and Equations (8) As shown in Table 2, Example 1 does not satisfy Equation (5), whereas Examples 2 to 9 do not satisfy Equation (5). and the parameter "(n-1)·δS/λ" is 0.5 or more. As a result, as shown in Table 2 and FIGS. 23 and 24, in Examples 2 to 9, the diffraction peak level A could be reduced to 1.80 or less, and the diffraction peak ratio K _A could be reduced to 59% or less. The evaluation of the suppressing effect on diffracted light is C rating or higher. The reason for this is that by satisfying equation (5), each microlens can be irregularly shifted by a shift amount Δs within a more appropriate range of fluctuation δS, which can further improve the effect of suppressing diffracted light. It is thought to be from

These results confirmed that by satisfying formula (5), the diffraction peak ratio K _A can be reduced to 60% or less. Moreover, according to the results of the graph in FIG. 24, it can be said that by satisfying the above formula (8), the diffraction peak ratio K _A can be reduced to 60% or less, similarly to formula (5).

(2B) Regarding formula (6) and formula (1) Furthermore, as shown in Table 2, Examples 1 and 2 do not satisfy formula (6), whereas Examples 3 to 9 satisfy formula ( 6) is satisfied, and the above parameter "(n-1)·δS/λ" is 0.75 or more. As a result, as shown in Table 2 and FIGS. 23 and 24, in Examples 3 to 9, the diffraction peak level A could be reduced to 1.30 or less, and the diffraction peak ratio K _A could be reduced to 27% or less. The evaluation of the suppressing effect on diffracted light is B rating or higher. The reason for this is that by satisfying Equation (6), each microlens can be irregularly shifted by a shift amount Δs within a more appropriate variation width δS, which further improves the effect of suppressing diffracted light. This is probably because it can be improved.

These results confirmed that by satisfying formula (6), the diffraction peak ratio K _A can be reduced to 30% or less. Further, from the results of the graph in FIG. 24, it can be said that by satisfying the above formula (1), the diffraction peak ratio K _A can be reduced to 30% or less, similarly to formula (6).

(2C) Regarding formula (7) and formula (2) Furthermore, as shown in Table 2, Examples 1 to 3, 5, and 6 do not satisfy formula (7), whereas Example 4 Equation (7) is satisfied, and the parameter "(n-1)·δS/λ" is 1.0. As a result, as shown in Table 2 and FIGS. 23 and 24, in Example 4, the diffraction peak level A could be reduced to 0.16, and the diffraction peak ratio K _A could be reduced to 7%. The light suppression effect was evaluated as A. The reason for this is that by satisfying Equation (7), each microlens can be irregularly shifted by a shift amount Δs within the range of the optimal fluctuation width δS, and the effect of suppressing diffracted light can be significantly improved. It is thought to be from

Furthermore, as can be seen from the changes in the graph in FIG. 24, when "(n-1)・δS/λ" is around 1.0 as in Example 4, the diffraction peak ratio K _A decreases significantly. Therefore, K _A =7%. On the other hand, as "(n-1)・δS/λ" increases or decreases from 1.0, the diffraction peak ratio K _A increases to more than 10%. δS/λ"=0.75), K _A =27%, and in Example 5 ("(n-1)·δS/λ"=1.25), K _A =19%. Similarly, when "(n-1)·δS/λ" is around 2.0 as in Example 8, the diffraction peak ratio K _A is significantly reduced. From these results, if "(n-1)・δS/λ" is a value near an integer such as 1, 2, etc., that is, the optical path length difference is When “(n-1)・δS” is around an integer multiple of wavelength λ “m・λ” (for example, when “(n-1)・δS” = “m・λ” ±10%) , it can be said that the diffraction peak ratio K _A can be significantly reduced to 10% or less.

These results confirmed that by satisfying formula (7), the diffraction peak ratio K _A can be reduced to 10% or less. Further, from the results of the graph in FIG. 24, it can be said that by satisfying the above formula (2), the diffraction peak ratio K _A can be reduced to 10% or less, similarly to formula (7).

In addition, since Example 9 also satisfies formula (7), the diffraction peak ratio K _A is sufficiently reduced, but it is about 11%, which is slightly over 10%. The reason for this is presumed to be that in Example 9, since the lens surface shape was varied within a small error range, an error also occurred in the measured value of the diffraction peak level A. In any case, it was confirmed that by satisfying formula (7) and formula (2) as in Examples 4 and 9, the diffraction peak ratio K _A could be significantly reduced to 11% or less.

(3) Comparison of Examples 2 to 9 (effectiveness of requirements of formulas (3) and (4))
As described above, equations (3) and (4) are requirements regarding the appropriate range of the evaluation value Eva _{(D', λ, δZ)} with λ, Dk, and δZ as variables. As shown in Table 2, Examples 5 to 8 satisfy the requirements of formula (3), and Examples 6 to 8 satisfy the requirements of both formula (3) and formula (4). On the other hand, Examples 2 to 4 do not satisfy the requirements of both formula (3) and formula (4). Note that Examples 2 to 9 all satisfy the requirements of the above-mentioned formula (5), and there is no difference between Examples 2 to 9 with respect to the requirements.

In Examples 2 to 4, which do not satisfy the requirements of both formula (3) and formula (4), as shown in Table 2, the evaluation of the suppression effect of the peak of diffracted light is A to C, while Although not shown in No. 2, the evaluation of the uniformity of the intensity distribution of the diffused light was relatively poor. Therefore, in Examples 2 to 4, there is an effect of suppressing the peak of diffracted light centered on the 0th-order diffracted light, but the evaluation of the uniformity of the intensity distribution of diffused light is low, and the effect is improved to suppress the spectral diffracted light. There was room for.

On the other hand, in Examples 5 to 8 that satisfy the requirements of formula (3), the evaluation of the suppressing effect on the peak of diffracted light is A to B, as shown in Table 2. However, the evaluation of the uniformity of the intensity distribution of diffused light was also relatively excellent. In Examples 5 to 8, compared to Examples 2 to 4, which do not satisfy the requirements of formula (3) above, they are more effective in suppressing spectral diffraction light and are also more effective in equalizing the intensity distribution of diffused light. It was excellent.

As described above, by satisfying the formula (3) as in Examples 5 to 8, it is possible to suppress the spectral diffraction light and equalize the intensity distribution of the diffused light, thereby improving the homogeneity and light distribution of the diffused light. It was confirmed that this could be further improved.

Furthermore, in Examples 6 to 8, which satisfy not only the requirements of formula (3) but also formula (4), the suppressing effect of the peak of diffracted light is evaluated as A to B, and the intensity distribution of diffused light is uniform. The degree of evaluation was also even better than that of Example 5. Examples 6 to 8 were more effective in making the intensity distribution of diffused light more uniform than Example 5, which did not satisfy the requirements of the above formula (4).

As described above, by satisfying formula (4) as in Examples 6 to 8, the effect of suppressing spectral diffracted light and the effect of equalizing the intensity distribution of diffused light can be further improved, and the homogeneity of diffused light can be improved. It was confirmed that the light distribution could be further improved.

(4) Summary In the above example, the reference surface shape of the microlens (reference aperture width Dk of 30 μm, reference radius of curvature Rk of 60 m), which is assumed to be difficult to suppress zero-order diffraction light and spectral diffraction light, is used as a reference. designed a lens array. In the example, assuming incident light with a relatively long wavelength (λ = 0.532 μm) in the visible light range, using a shift amount Δs that randomly fluctuates with a fluctuation width δS of about 2.1 μm at maximum, Each microlens was shifted irregularly in the Z direction. Then, a simulation was conducted to evaluate the homogeneity and light distribution of diffused light by comparing Examples 1 to 9 in which such lens shifts were applied and Comparative Example 1 in which no lens shifts were applied.

In Examples 1 to 9, an irregular optical phase difference was imparted to the diffused light emitted from each microlens by geometrically shifting each microlens in the Z direction. As a result, the irregular optical phase difference given to each microlens has an excellent effect of reducing the peak of unnecessary diffracted light such as 0th order diffracted light, and the top hat shape can be achieved without changing the diffusion angle characteristics. It was confirmed that it is possible to achieve homogeneous light distribution characteristics.

Although preferred embodiments of the present invention have been described above in detail with reference to the accompanying drawings, the present invention is not limited to such examples. It is clear that a person with ordinary knowledge in the technical field to which the present invention pertains can come up with various changes or modifications within the scope of the technical idea stated in the claims. It is understood that these also naturally fall within the technical scope of the present invention.

For example, in the embodiment described above, the plurality of microlenses 21 are arranged regularly on the XY plane of the base material 10 along a reference lattice such as a square lattice, a rectangular lattice, a hexagonal lattice, etc. However, the present invention is not limited to such examples. For example, the plurality of microlenses 21 may be arranged quasi-regularly on the XY plane of the base material 10. Specifically, the plurality of microlenses 21 are basically arranged along the various reference lattices described above, but may also be arranged randomly to some extent by randomly varying the lattice spacing within a minute range. Good (semi-regular arrangement).

1 Diffusion plate 3 Unit cell 10 Base material 20 Microlens array 21 Microlens 23 Step 24 Boundary line 25 Optical axis 26 Lens surface 27

Aperture

28, 29 Vertex 30 Center point 60 Reference aperture D Aperture width Dk Reference aperture width D' Effective Aperture width R Radius of curvature Rk Standard radius of curvature δD Variation rate δR Variation rate Δs Shift amount δS Variation width h Lens height h' Lens height after lens surface shape variation Δh Lens height variation δZ Maximum height difference n Micro Refractive index of the material forming the lens array

Claims

base material and
a microlens array composed of a plurality of microlenses arranged on an XY plane on at least one surface of the base material;
Equipped with
The surface shape of each microlens has a preset reference surface shape,
The plurality of microlenses are regularly arranged on the XY plane,
Each of the microlenses is arranged at a position randomly shifted in the Z direction from a reference position in the Z direction perpendicular to the XY plane,
A diffuser plate, wherein a step in the Z direction exists at a boundary between the plurality of mutually adjacent microlenses.
The diffuser plate according to claim 1, wherein the step is a flat surface perpendicular to the XY plane.
The diffuser plate according to claim 1 or 2, wherein the shift amount Δs of each microlens in the Z direction varies randomly within a predetermined variation width δS.
When λ is the wavelength of the incident light [μm] and n is the refractive index of the material forming the microlens array,
The diffuser plate according to claim 3, wherein the variation width δS of the shift amount Δs satisfies the following formula (5).
The diffusion plate according to claim 4, wherein the variation width δS of the shift amount Δs satisfies the following formula (6).
The diffuser plate according to claim 4, wherein the variation range δS of the shift amount Δs substantially satisfies the following formula (7).
When m is an integer of 1 or more, λ is the wavelength of the incident light [μm], and n is the refractive index of the material forming the microlens array,
The diffusion plate according to claim 3, wherein the variation width δS [μm] of the shift amount Δs satisfies the following formula (8).
The diffuser plate according to claim 7, wherein the variation range δS [μm] of the shift amount Δs satisfies the following formula (1).
The diffuser plate according to claim 7, wherein the variation range δS [μm] of the shift amount Δs substantially satisfies the following formula (2).
The diffuser plate according to claim 1 or 2, which satisfies the following formula (3).

Eva (D', λ, δZ) : Evaluation value determined by the above formula (3) λ: Wavelength of incident light [μm]
n: refractive index of the material forming the microlens array δZ: difference between the maximum value h max and the minimum value h min of the height h of the apex of each of the microlenses [μm]
Dk: Reference opening width [μm] of the reference surface shape. The reference opening width Dk is the diameter of the circular reference opening of the reference surface shape.
D': Effective opening width [μm] of the reference surface shape. The effective opening width D' is the diameter of an inscribed circle inscribed in a regular hexagon that is inscribed in a circle whose diameter is the reference opening width Dk.
The diffuser plate according to claim 10, which satisfies the following formula (4).
The diffuser plate according to claim 1 or 2, wherein the plurality of microlenses are arranged without any gaps between them on the XY plane, and there is no flat portion at a boundary between the plurality of mutually adjacent microlenses. .
The diffuser plate according to claim 1 or 2, wherein the plurality of microlenses have the same surface shape.
The diffuser plate according to claim 1 or 2, wherein the surface shape of each of the microlenses is an aspherical shape or a spherical shape having an axis of symmetry.
The diffuser plate according to claim 1 or 2, wherein the microlens is a cylindrical lens.
The diffuser plate according to claim 1 or 2, wherein the optical axes of at least some of the plurality of microlenses are inclined with respect to the Z direction at an inclination angle α of more than 0° and less than 60°.
The inclination angles α of the optical axes of the plurality of microlenses are different from each other,
17. The diffuser plate according to claim 16, wherein the inclination angle α varies randomly within a predetermined variation range with respect to a predetermined reference inclination angle αk.
The diffuser plate according to claim 1 or 2, wherein the reference opening of the reference surface shape is circular, oval, or polygonal including square, rectangle, diamond, or hexagon.
The diffuser plate according to claim 1 or 2, wherein the material forming the microlens array is glass, resin, or semiconductor.
An apparatus comprising the diffuser plate according to claim 1 or 2.