[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

WO2023021854A1 - Procédé d'inspection de stratifié optiquement transparent - Google Patents

Procédé d'inspection de stratifié optiquement transparent Download PDF

Info

Publication number
WO2023021854A1
WO2023021854A1 PCT/JP2022/025868 JP2022025868W WO2023021854A1 WO 2023021854 A1 WO2023021854 A1 WO 2023021854A1 JP 2022025868 W JP2022025868 W JP 2022025868W WO 2023021854 A1 WO2023021854 A1 WO 2023021854A1
Authority
WO
WIPO (PCT)
Prior art keywords
height
light
laminate
main surface
scanning
Prior art date
Application number
PCT/JP2022/025868
Other languages
English (en)
Japanese (ja)
Inventor
裕司 山下
浩次 自然
ジョンビン ユン
Original Assignee
日東電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to CN202280055466.4A priority Critical patent/CN117795288A/zh
Priority to KR1020247004130A priority patent/KR20240045215A/ko
Priority to JP2022545358A priority patent/JPWO2023021854A1/ja
Publication of WO2023021854A1 publication Critical patent/WO2023021854A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

Definitions

  • the present invention relates to a method for inspecting a light transmissive laminate.
  • a light-transmitting laminate for example, an optical member, an optical laminate, an optical film, a light-transmitting adhesive sheet
  • an image display device removes foreign matter inside the laminate in order to prevent image display defects.
  • a light-transmissive laminate is typically subjected to a foreign matter inspection.
  • a foreign matter inspection is typically a transmission inspection carried out while conveying a long web of light-transmitting laminates, and defects such as foreign matter can be recognized as dark spots in the transmission inspection.
  • the display performance required for image display devices has increased remarkably, and as a result, remarkably high accuracy in foreign matter inspection of light-transmissive laminates has been required.
  • the present invention has been made to solve the above-mentioned problems, and its main purpose is to detect defects that are much smaller than those in the past, even if wrinkles or bends are present in the light-transmitting laminate. It is an object of the present invention to provide a method for inspecting a sheet-fed light-transmitting laminate that can be inspected.
  • a method for inspecting a sheet-fed light-transmissive laminate having a first principal surface and a second principal surface wherein a displacement sensor detects the first principal surface of the light-transmissive laminate. detecting the height of the main surface to obtain displacement data; scanning the light-transmissive laminate with an optical system to create a coordinate map of defects from the resulting scanned image; detecting a defect based on the coordinate map of the defect, and the height of the focal point of the optical system when scanning the light transmissive laminate to obtain the scanned image based on the displacement data; An inspection method is provided in which the distance between the position and the height position of the first main surface is maintained constant.
  • creating the defect coordinate map includes scanning the light transmissive laminate multiple times with the optical system to create a plurality of preliminary coordinate maps; Integrating a preliminary coordinate map, wherein the distance between the height position of the focus and the height position of the first principal surface in each scan differs by a predetermined distance P.
  • the number of times of scanning is Qa + Qb + Qc + 2, and from the height position of the first main surface of the light-transmitting laminate to the thickness direction upward (Qa + 1) ⁇ P distance from the height to the thickness direction downward A region up to a height of (Qb+Qc) ⁇ P is scanned while changing the distance between the height position of the focus and the height position of the first principal surface by the predetermined distance P.
  • the predetermined distance P is 10 ⁇ m to 100 ⁇ m.
  • the optical system includes a line camera, and obtaining the displacement data and creating the coordinate map of the defect are continuously performed for each field of view of the line camera in the width direction.
  • the inspection method detects defects with a size of 50 ⁇ m or less.
  • the light transmissive laminate is selected from optical films, adhesive sheets, and combinations thereof.
  • the optical film is selected from polarizing plates, retardation plates, and laminates containing these.
  • the thickness of the light transmissive laminate is 300 ⁇ m or less.
  • the displacement (undulation) of a sheet of light-transmitting laminate is detected, and the light-transmitting layer is detected so that the focus of imaging is along the undulation.
  • FIG. 1 is a schematic side view of an example of an inspection device that can be used in an inspection method according to an embodiment of the invention
  • FIG. It is a schematic diagram explaining a displacement data acquisition process. It is a schematic diagram explaining a displacement data acquisition process.
  • FIG. 11 is a schematic diagram for explaining a scan number determination process;
  • FIG. 4 is a schematic diagram for explaining the height position of the focal point when capturing a scanned image;
  • FIG. 4 is a conceptual diagram illustrating an example of creation of a defect coordinate map;
  • A. Outline of inspection method for light-transmissive laminate As shown in the flow diagram of FIG. detecting the height of the first main surface of the light-transmitting laminate with a displacement sensor to obtain displacement data (displacement data acquisition step); creating a defect coordinate map from the scanned image (defect coordinate map creating step); and detecting the defect based on the defect coordinate map (defect detecting step), preferably It further includes determining the number of scans (number of scans determination step).
  • the scanning of the light transmissive laminate is based on the obtained displacement data, and the height position of the focal point of the optical system and the height position of the first main surface when obtaining the scanned image.
  • FIG. 2 is a schematic side view of an example of an inspection apparatus that can be used in an inspection method according to an embodiment of the present invention.
  • the inspection apparatus 100 shown in FIG. 2 includes a sample stage 10 that fixes a light-transmitting laminate to be inspected, an optical system 20 that includes an imaging unit that captures a scanned image, and a first main surface of the light-transmitting laminate ( A displacement sensor 30 for detecting the height of the upper surface), and a Z-axis movement control unit 40 for supporting the optical system 20 so as to be arbitrarily movable in the Z-axis direction.
  • the displacement sensor 30 and the Z-axis movement control section 40 are supported by support mechanisms 50a and 50b, and the sample stage 10 can be arbitrarily moved in the X-axis direction and the Y-axis direction by the XY-axis movement control section 60.
  • the displacement sensor 30 is connected to a displacement data processing unit that analyzes or processes the measured displacement data, and the Z-axis movement control unit 40 receives displacement information (for example, a displacement map) output from the displacement data processing unit. ), the height of the optical system 20 can be varied to correspond to the displacement pattern of the first principal surface.
  • the focal point of the optical system (imaging unit) can be set at a desired position (height) through a change in the position (height) of the optical system 20.
  • the height position of the focal point of the optical system (imaging unit) can be controlled so that the distance from the height position of the first main surface during scanning is constant.
  • the sample stage 10 is configured to be arbitrarily movable in the X-axis direction and the Y-axis direction, as described above. With such a configuration, any region of the light-transmitting laminate can be inspected.
  • the sample stage can include, for example, a stage base on which the light-transmissive laminate is placed, and fixing members for fixing the ends thereof.
  • the sample stage may be configured to fix the light-transmitting laminate in the air.
  • the sample stage may be configured such that only the ends of the light-transmitting laminate can be gripped by a pair or two pairs of supporting members facing each other. can be From the viewpoint of reducing wrinkles and bending, the light-transmissive laminate may be fixed while being tensioned.
  • the optical system 20 includes an irradiation-side optical system for irradiating the light-transmissive laminate with inspection light and an imaging section.
  • the imaging unit includes an imaging device and an imaging-side optical system that forms an image of inspection light reflected by the light-transmissive laminate on the imaging device.
  • the irradiation-side optical system includes a coaxial epi-illumination system or an oblique illumination system, and the coaxial epi-illumination system is preferably used.
  • Laser light is preferably used as the inspection light.
  • the image-side optics may include an objective lens, an imaging lens, and the like.
  • a CCD, a CMOS, or the like can preferably be exemplified as an imaging device.
  • the imaging unit may be referred to as a camera. In one embodiment, the imaging unit is a line camera.
  • the displacement sensor 30 is typically a non-contact displacement sensor.
  • a laser displacement sensor, an ultrasonic displacement sensor, and the like can be preferably exemplified.
  • the inspection device that can be used in the inspection method according to the embodiment of the present invention is not limited to the example illustrated above.
  • the illustrated inspection apparatus 100 is a reflective inspection apparatus, a transmissive inspection apparatus can also be used. Defects such as air bubbles can be detected as white dots by the reflective inspection device, and defects such as foreign matter can be detected as black dots by the transmissive inspection device.
  • the illumination-side optical system (light source) is provided on the second main surface side, typically below the sample stage, and the sample stage is provided with a light-transmissive laminate so as to allow light to pass through. It can be configured in a shape (for example, frame-like) that can hold only the end of the body.
  • an XY-axis movement mechanism capable of arbitrarily moving the optical system and the displacement sensor in the X-axis direction and the Y-axis direction is provided. good too.
  • the light-transmitting laminate to be inspected includes any suitable light-transmitting laminate that requires inspection.
  • Specific examples include optical films, pressure-sensitive adhesive sheets, and combinations thereof (for example, pressure-sensitive adhesive layer-attached optical films).
  • optical films include polarizing plates, retardation plates, conductive films for touch panels, surface treatment films, and laminates obtained by appropriately laminating these according to the purpose (e.g., antireflection circular polarizing plate, touch panel polarizing plate with a conductive layer).
  • a pressure-sensitive adhesive sheet typically includes a pressure-sensitive adhesive and a release film temporarily adhered to at least one side thereof.
  • the light-transmitting laminate may typically be an optical film with a pressure-sensitive adhesive layer.
  • the thickness of the light-transmissive laminate is preferably 300 ⁇ m or less, more preferably 280 ⁇ m or less, still more preferably 250 ⁇ m or less. According to the embodiment of the present invention, even in such a thin light-transmissive laminate, minute foreign matter can be detected satisfactorily.
  • the lower limit of the thickness of the light transmissive laminate may be 30 ⁇ m, for example.
  • the thickness of the light-transmitting laminate is the thickness when the refractive index is taken into consideration, and is calculated based on the following formula (1). Also, the average refractive index in the formula (1) is calculated based on the following formula (2).
  • Thickness ( ⁇ m) of the light-transmitting laminate when the refractive index is taken into consideration Total thickness ( ⁇ m) of each layer constituting the light-transmitting laminate/average refractive index (1)
  • Average refractive index total refractive index of each layer constituting the light-transmitting laminate / number of layers constituting the light-transmitting laminate (2)
  • the light-transmitting laminate can be produced, for example, by laminating each layer constituting the light-transmitting laminate by so-called roll-to-roll.
  • the light transmissive laminate has a first main surface and a second main surface.
  • the first main surface is a surface (upper surface) on the imaging unit side.
  • the first main surface is, for example, the surface opposite to the image display cell to which the light-transmitting laminate is bonded;
  • the second main surface is, for example, the surface on the image display cell side, more specifically adhesive It can be the surface of the agent layer.
  • the produced long optically transparent laminate is cut into a predetermined size and subjected to inspection.
  • the size may typically be a size that allows multiple final products to be obtained. After inspection, the light transmissive laminate can typically be cut to the final product size and shipped.
  • the light-transmissive laminate may have a reflective protective film releasably attached to the first main surface when the laminate is subjected to inspection.
  • a reflective protective film releasably attached to the first main surface when the laminate is subjected to inspection.
  • a reflective protective film typically reflects measurement light from the displacement sensor and inspection light from the optical system.
  • the reflective protective film satisfies the following relationship: y ⁇ 0.0181x ⁇ 11.142
  • x is the absolute value of the detection wavelength in the wavelength range of 650 nm to 800 nm
  • y is the absolute value of the reflectance.
  • the reflective protective film can be composed of, for example, a cyclic olefin resin described in [0031] of JP-A-2019-099751. Examples of cyclic olefin resins include polynorbornene.
  • a commercially available product may be used as the cyclic olefin resin.
  • Specific examples of commercially available products include Zeonor and Zeonex manufactured by Nippon Zeon, Arton manufactured by JSR, Appel manufactured by Mitsui Chemicals, and Topas manufactured by TOPAS ADVANCED POLYMERS.
  • the cyclic olefin resin film preferably contains 50% by weight or more of the cyclic olefin resin.
  • a hard coat layer may be formed on the surface of the reflective protective film. By forming a hard coat layer, it is possible to prevent the occurrence of scratches on the reflective protective film and the adhesion of foreign matter to the reflective protective film, so that inspection can be performed with higher accuracy, and minute defects can be detected. can be accurately detected.
  • multiple reflective protective films may be temporarily attached. For example, if two inspections are scheduled, by sticking two reflective protective films together, peeling off one outer reflective protective film before the second inspection allows the inner reflective protection to be removed. Since it is possible to prevent the occurrence of scratches on the film and the adhesion of foreign matter to the inner reflective protective film, it is possible to perform inspections more accurately and multiple times. Note that even when multiple inspections are scheduled, only one reflective protective film may be temporarily attached.
  • a surface protective film may be detachably temporarily adhered to the surface of the reflective protective film (if there are multiple reflective protective films, the surface of the outermost reflective protective film). By temporarily attaching the surface protective film, it is possible to prevent the reflective protective film from being scratched, prevent foreign substances from adhering to the reflective protective film, and the like, so that inspection can be performed with higher accuracy.
  • the surface protective film is typically peeled off during inspection. After completion of the inspection, the surface protective film that was peeled off during the inspection may be temporarily adhered to the surface of the light-transmitting laminate again, or another surface protective film may be temporarily adhered in a detachable manner.
  • the reflective protective film and surface protective film may be temporarily attached to the light-transmitting laminate by roll-to-roll (that is, before cutting), or may be temporarily attached after cutting.
  • the displacement sensor detects the height (displacement) of the first main surface of the light transmissive laminate to acquire displacement data.
  • a displacement sensor is used to two-dimensionally scan the first main surface of the light transmissive laminate to detect its height.
  • the first main surface 200a of the light transmissive laminate 200 is scanned linearly at a predetermined interval L to detect the height.
  • the predetermined distance L is, for example, 1 mm to 100 mm, preferably 1 mm to 30 mm, more preferably 5 mm to 15 mm.
  • Detection of the height of the first main surface by the displacement sensor can be performed along a plurality of lines for each field of view in the width direction of the imaging section (typically, a line camera).
  • the height of the first main surface is detected as follows. First, the area to be inspected on the first main surface of the light-transmissive laminate is divided into N areas for each field of view (30 mm in the illustrated example) in the width direction of the imaging section.
  • the height of the first main surface from the starting point (coordinate Y 0 ) to the end point (coordinate Y 100 ) in the Y direction of the four lines X1 to X4 at intervals of 10 mm is sequentially measured.
  • the height of the first main surface from the starting point (coordinate Y 0 ) to the end point (coordinate Y 100 ) in the Y direction of the four lines X4 to X7 at intervals of 10 mm is Detection is performed sequentially (height detection on line X4 may be omitted).
  • displacement data can be obtained for the entire first main surface of the light-transmissive laminate or the entire inspection target area.
  • displacement data may be acquired for the entire first main surface or the entire inspection target area, and then the optical system may be scanned, or an image may be captured.
  • the steps from obtaining the displacement data to creating the coordinate map of the defect are continuously performed for each field of view in the width direction of the part, and the same operation is repeated while sequentially shifting the field of view. You can do an inspection. Therefore, by detecting the height of the first main surface in one direction for each field of view, it is possible to obtain displacement data that matches the scanning pattern (scanning direction and position) of the optical system. It can contribute to efficiency of inspection.
  • a 2D or 3D shape profile (hereinafter also referred to as a displacement map) can be obtained by processing the obtained displacement data with any suitable algorithm.
  • a displacement map of the entire first main surface or a predetermined region, a displacement map in any cross section, a displacement map when viewed from any side, etc. can be obtained.
  • Examples of such processing include processing using any suitable computer program such as a shape analysis program attached to the displacement sensor, a program created according to the purpose, etc. (for example, Auto Focus Whole Displacement Scan Mode Algorithm). .
  • the height position of the first main surface of the light-transmitting laminate and the imaging can be performed by changing the distance from the height position of the focus of the part by a predetermined distance P.
  • the number of scans is determined prior to the defect coordinate mapping process.
  • the number of scans is, for example, the reference height, maximum height and minimum height of the first main surface of the light-transmitting laminate determined based on the displacement data (hereinafter simply referred to as the reference height of the light-transmitting laminate , may be referred to as maximum height and minimum height) and the thickness of the light transmissive laminate.
  • the height of an arbitrary point on the first main surface can be used as the reference height.
  • the reference height of the light transmissive laminate is the median value of the maximum height and minimum height in the displacement data obtained with respect to the first principal surface, and is calculated as the arithmetic mean of both.
  • the maximum height and minimum height of the light transmissive laminate are the maximum height and minimum height in the displacement data, respectively.
  • the assumed maximum height and the assumed minimum height calculated by extrapolation, interpolation, etc. based on the displacement data can be used as the maximum height and minimum height of the light-transmitting laminate, respectively.
  • the number of scans is, for example, Qa, the value obtained by dividing the difference between the maximum height and the reference height (
  • Qb is the value obtained by rounding the quotient obtained by dividing the difference (
  • Qc is a value obtained by rounding to the first decimal place, it can be determined to be Qa+Qb+Qc or more (however, when Qa+Qb+Qc is 0, 1 or more).
  • the upper limit of the number of scans is not particularly limited, but from the viewpoint of production takt time, the number of scans may be, for example, 1 or more and 10 or less.
  • the number of scans is Qa+Qb+Qc+1 or Qa+Qb+Qc+2, further adding a first pre-scan above the first main surface and/or a second pre-scan below the second main surface. can be done.
  • the first pre-scanning and/or the second pre-scanning it is possible to reliably inspect the light transmissive laminate over the entire thickness direction.
  • the displacement map shown in FIG. 5(b) is a 2D shape profile showing the surface displacement of the first main surface when the light transmissive laminate 200 is viewed from the Y-direction ⁇ side in FIG. 5(a).
  • the displacement sensor 30 detects the surface displacement in four lines (line A to line D) at predetermined intervals, and auto focus is performed.
  • the maximum measured value is 160 ⁇ m at line B, and the minimum measured value is ⁇ 310 ⁇ m, and the assumed maximum and minimum heights obtained by interpolation are 190 ⁇ m and ⁇ 340 ⁇ m, respectively).
  • the maximum height and minimum height in the obtained displacement data are used as the maximum height and minimum height of the light-transmitting laminate.
  • the thickness of the light-transmitting laminate (calculated by dividing the actual thickness (350 ⁇ m) by the average refractive index (1.4)) is 250 ⁇ m, and the predetermined distance P in each scan is 100 ⁇ m. Note that the height of 0 ⁇ m in FIG.
  • Procedure A1 Based on the maximum height H max (160 ⁇ m) and the minimum height H min ( ⁇ 310 ⁇ m), determine a reference height of ⁇ 75 ⁇ m.
  • Procedure A5 Determine the number of scans based on Qa, Qb, and Qc (the number of scans applied as Qa+Qb+Qc or more is 7 or more, and perform either or both of the first prescan and the second prescan The number of scans in each case can be 8 or 9).
  • a defect coordinate map is created by scanning the light-transmissive laminate with inspection light and obtaining a scanned image. At this time, based on the displacement data, scanning is performed while maintaining a constant distance between the height position of the focal point of the optical system (imaging unit) and the height position of the first main surface. In one embodiment, scanning is performed while adjusting the height position of the focal point so that the focal point of the imaging unit follows the displacement pattern of the first main surface.
  • Alignment between the displacement data and the scanning position can be performed, for example, by providing a reference mark in advance on the first main surface of the light-transmitting laminate and based on the position coordinates of the reference mark.
  • alignment can be performed using the corners of the light-transmissive laminate as a reference.
  • scanning can be performed two-dimensionally over the entire inspection target area of the light-transmitting laminate.
  • the scanning direction of the imaging unit and the scanning direction of the displacement sensor are parallel, more preferably the same direction.
  • a value calculated from displacement data using any appropriate algorithm can be used as the height position of the first main surface.
  • the median value between the maximum height and the minimum height of the first main surface within the field of view in the width direction (eg, X direction) of the line camera is taken as the height position of the first main surface.
  • Scanning is performed while changing the height position of the focal point of the line scan camera so as to follow the change in the height position of the first main surface in the scanning direction (for example, the Y direction) for each field of view. be able to.
  • Y coordinates from Y 0 to Y 100 such as the median of maximum and minimum heights at X4, . It is possible to scan while changing the height position of the focal point of the line camera so as to follow the height position of the first main surface that changes along with the movement of the line camera.
  • the scanning of the light-transmissive laminate is performed once or multiple times. Preferably, a plurality of scans determined in the scan count determination step are performed.
  • the imaging unit focused on the first main surface in other words, at the height position of the first main surface
  • the imaging unit focused on the depth With the imaging unit focused on the depth, the entire inspection target area is scanned, and the scanned image obtained by the scanning becomes the defect coordinate map (XY coordinate map).
  • the predetermined distance P is not limited within a range in which a clear scanned image can be obtained, and can be appropriately set according to the depth of focus (depth of field) of the optical system.
  • the predetermined distance P is, for example, 10 ⁇ m to 100 ⁇ m, preferably 20 ⁇ m to 80 ⁇ m, more preferably 40 ⁇ m to 60 ⁇ m. According to such a configuration, substantially all defects existing in the thickness direction can be detected with an appropriate number of scans.
  • the focus is adjusted by moving the optical system (imaging unit) in the Z direction using the Auto Focus system, but the focus is adjusted by other means. good too.
  • the focal length of the imaging unit may be changed by a lens or the like, the height of the sample stage may be changed, or these means may be combined.
  • the scanning order is not particularly limited. Specifically, the first pre-scanning can be performed first, the scanning can be performed while shifting the focal point of the imaging unit downward in the thickness direction by a predetermined distance P, and finally the second pre-scanning can be performed.
  • the first scanning is performed with the imaging unit focused on the first main surface (in other words, at the height position of the first main surface), and then the imaging unit is moved downward in the thickness direction.
  • Sequential scanning is performed while shifting the focus, and after completion of the second preliminary scanning, sequential scanning is performed while shifting the focus of the imaging unit upward in the thickness direction from the height position of the first main surface, and finally the first preliminary scanning is performed.
  • Scanning can be performed.
  • the first scanning is performed with the imaging unit focused on the first main surface (in other words, at the height position of the first main surface), and then the imaging unit moves upward in the thickness direction.
  • Sequential scanning is performed while shifting the focus, and after completion of the first preliminary scanning, sequential scanning is performed while shifting the focus of the imaging unit downward in the thickness direction from the height position of the first main surface, and finally the second preliminary scanning is performed. Scanning can be performed.
  • the maximum height, minimum height, standard height, and thickness of the light-transmitting laminate are 160 ⁇ m, ⁇ 310 ⁇ m, ⁇ 75 ⁇ m, and 250 ⁇ m, respectively, and the predetermined distance P is 100 ⁇ m.
  • the height position of the focal point of the imaging unit is A first scan is performed so as to maintain a distance of 300 ⁇ m upward from the height position of one principal surface, and then a total of 9 scans are performed while shifting the height position of the focal point downward by 100 ⁇ m. can.
  • a defect coordinate map (integrated XY coordinate map) is created by integrating a plurality of obtained preliminary coordinate maps using the scanned image obtained in each scanning as a preliminary coordinate map. be done.
  • FIG. 7 shows an example of creating a defect coordinate map (integrated XY coordinate map) by integrating five preliminary coordinate maps.
  • defects present in each coordinate map can be expressed on common XY coordinates.
  • substantially all defects in the light-transmissive laminate are represented by XY coordinates (two-dimensional coordinates).
  • defects are detected based on the defect coordinate map.
  • the same defect can be identified from the XY coordinates in all the preliminary coordinate maps, and the image with the highest contrast value can be detected as the defect.
  • the depth (Z coordinate) of the defect can be specified from the focal position when the image was obtained.
  • defects with a size (maximum length) of 50 ⁇ m or less, preferably 30 ⁇ m or less, more preferably 20 ⁇ m or less, and even more preferably 10 ⁇ m or less can be detected.
  • the size of the detected defects can be for example 1 ⁇ m or more, also for example 3 ⁇ m or more, also for example 8 ⁇ m or more.
  • Defects can be detected as described above.
  • the light-transmitting laminate can typically be cut to the final product size and shipped as described above.
  • the peeled surface protective film may be re-attached temporarily to the light-transmissive laminate in a peelable manner, if necessary.
  • the steps from the displacement data acquisition step to the defect coordinate map creation step may be performed for each field of view in the width direction of the imaging unit (line camera).
  • the method for inspecting a light-transmitting laminate according to an embodiment of the present invention can be suitably used for detecting defects in optical films, pressure-sensitive adhesive sheets, etc. in the manufacturing process of image display devices.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

La présente invention concerne un procédé d'inspection d'un stratifié optiquement transparent qui permet de détecter des défauts qui sont nettement plus minuscules, par comparaison avec l'état de la technique. Ce procédé d'inspection d'un stratifié optiquement transparent est un procédé d'inspection d'une feuille de stratifié optiquement transparent qui possède une première surface principale et une seconde surface principale, le procédé consistant à : détecter la hauteur de la première surface principale du stratifié optiquement transparent avec un capteur de déplacement pour obtenir des données de déplacement ; balayer le stratifié optiquement transparent avec un système optique et créer une carte de coordonnées de défauts à partir d'images de balayage obtenues par ce procédé ; et détecter des défauts sur la base de la carte de coordonnées de défauts. Le balayage du stratifié optiquement transparent est effectué tandis qu'une distance constante est maintenue entre la position en hauteur du foyer du système optique lors de l'obtention des images de balayage et la position en hauteur de la première surface principale sur la base des données de déplacement.
PCT/JP2022/025868 2021-08-17 2022-06-29 Procédé d'inspection de stratifié optiquement transparent WO2023021854A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202280055466.4A CN117795288A (zh) 2021-08-17 2022-06-29 光透射性积层体的检查方法
KR1020247004130A KR20240045215A (ko) 2021-08-17 2022-06-29 광투과성 적층체의 검사 방법
JP2022545358A JPWO2023021854A1 (fr) 2021-08-17 2022-06-29

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-132506 2021-08-17
JP2021132506 2021-08-17

Publications (1)

Publication Number Publication Date
WO2023021854A1 true WO2023021854A1 (fr) 2023-02-23

Family

ID=85240457

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/025868 WO2023021854A1 (fr) 2021-08-17 2022-06-29 Procédé d'inspection de stratifié optiquement transparent

Country Status (5)

Country Link
JP (1) JPWO2023021854A1 (fr)
KR (1) KR20240045215A (fr)
CN (1) CN117795288A (fr)
TW (1) TW202309511A (fr)
WO (1) WO2023021854A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI853522B (zh) * 2023-04-07 2024-08-21 住華科技股份有限公司 光學膜缺陷檢測系統及應用其之光學膜缺陷檢測方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014081356A (ja) * 2012-09-27 2014-05-08 Nissan Motor Co Ltd 自動車車体の外観検査装置および外観検査方法
JP2017166903A (ja) * 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
WO2019039331A1 (fr) * 2017-08-24 2019-02-28 日本電気硝子株式会社 Procédé pour fabriquer une feuille de verre
JP2019219357A (ja) * 2018-06-22 2019-12-26 名古屋電機工業株式会社 撮影装置、撮影方法および撮影プログラム
WO2021172089A1 (fr) * 2020-02-28 2021-09-02 日東電工株式会社 Procédé d'inspection de stratifié optiquement transmissif

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014081356A (ja) * 2012-09-27 2014-05-08 Nissan Motor Co Ltd 自動車車体の外観検査装置および外観検査方法
JP2017166903A (ja) * 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
WO2019039331A1 (fr) * 2017-08-24 2019-02-28 日本電気硝子株式会社 Procédé pour fabriquer une feuille de verre
JP2019219357A (ja) * 2018-06-22 2019-12-26 名古屋電機工業株式会社 撮影装置、撮影方法および撮影プログラム
WO2021172089A1 (fr) * 2020-02-28 2021-09-02 日東電工株式会社 Procédé d'inspection de stratifié optiquement transmissif

Also Published As

Publication number Publication date
TW202309511A (zh) 2023-03-01
CN117795288A (zh) 2024-03-29
JPWO2023021854A1 (fr) 2023-02-23
KR20240045215A (ko) 2024-04-05

Similar Documents

Publication Publication Date Title
JP7451227B2 (ja) 光透過性積層体の検査方法
TWI413823B (zh) 影像檢查裝置
TWI445919B (zh) 玻璃基板之厚度測定和二維碼檢測系統及其方法
KR100722102B1 (ko) 외관 검사 장치 및 외관 검사 방법
JP2008298780A (ja) 透明基板のための検査手法
JP2014119255A (ja) 光学フィルムの検査装置および光学フィルムの検査方法
EP3123501A1 (fr) Courbure de champ d'image variable pour inspection d'objet
JP2021135219A5 (fr)
WO2023021854A1 (fr) Procédé d'inspection de stratifié optiquement transparent
TW201140043A (en) End face inspection method for light-pervious rectangular sheets and end face inspection apparatus
EP2386059A1 (fr) Système et procédé pour assurance de qualité de films minces
JP2009128098A (ja) 透明板状体の形状測定装置及び板ガラスの製造方法
JP4968720B2 (ja) 電子デバイス用基板形状検査装置及び電子デバイス用基板形状検査方法、並びにマスクブランク用ガラス基板の製造方法
JP3779507B2 (ja) 透明積層体の検査装置
JP5839167B2 (ja) 観察装置
WO2023026660A1 (fr) Procédé d'inspection de corps empilés optiquement transparents et dispositif d'inspection
KR20180016757A (ko) 광학 필름의 결함 검사 방법 및 장치
JP2017110949A (ja) フィルムの検査方法及びフィルムの検査装置
JP2002277411A (ja) 透明積層体の検査方法および検査装置
JP2008020356A (ja) レンズ検査装置
JP5140260B2 (ja) 画像測定機用校正スケール
JP2012225824A (ja) 立体欠陥検査方法および検査装置
KR20240144891A (ko) 장척 광학 필름의 검사 방법
JP4675160B2 (ja) 光学的検査装置、および光学フィルム貼り合わせ製品製造装置
JP2013200456A (ja) マスクブランク用基板の製造方法、マスクブランクの製造方法、転写用マスクの製造方法、及び半導体デバイスの製造方法

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2022545358

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22858177

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
WWE Wipo information: entry into national phase

Ref document number: 202280055466.4

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22858177

Country of ref document: EP

Kind code of ref document: A1