WO2021100392A1

WO2021100392A1 - Apparatus for manufacturing glass plate and method for manufacturing same

Info

Publication number: WO2021100392A1
Application number: PCT/JP2020/039458
Authority: WO
Inventors: 弘樹中塚; 好晴山本; 靖義森岡
Original assignee: 日本電気硝子株式会社
Priority date: 2019-11-19
Filing date: 2020-10-20
Publication date: 2021-05-27
Also published as: JP7290103B2; TW202120452A; JP2021080129A

Abstract

The present invention comprises: a processing tank 1 in which a process space 7 is formed between a base surface 5 in which an air supply port 8 and an air discharge port 9 are disposed and a facing surface 6 that faces the base surface 5, and a process surface Ga of a glass plate G is etched inside the process space 7 using process gas supplied into the process space 7 from the air supply port 8 and discharged from the air discharge port 9; and a delivery means 22 for delivering the glass plate G into the process space 7 such that the process surface Ga of the glass plate G faces the base surface 5. Additionally, projections 23 are formed between the air supply port 8 and air discharge port 9 while being spaced toward the air discharge port 9 side away from the air supply port 8, the projections 23 projecting from the base surface 5 toward the facing surface 6 side.

Description

Glass plate manufacturing equipment and its manufacturing method

In the present invention, a glass plate in which the treated surface of the glass plate is etched in the treatment space by using the treatment gas supplied from the air supply port to the treatment space and exhausted from the treatment space to the exhaust port. The present invention relates to a manufacturing apparatus and a manufacturing method thereof.

As is well known, glass plates are glass substrates for displays such as liquid crystal displays, plasma displays, and organic EL displays, glass substrates for mobile devices such as smartphones and tablet PCs, and cover glasses for organic EL lighting. It is used in various fields as represented by. In the manufacturing process of the glass plate that is the basis for producing the glass plate that is the final product, a problem due to electrostatic charge may occur when handling the glass plate or the like. Therefore, it is possible to suppress the charge of static electricity by spraying a treatment gas such as hydrogen fluoride on the surface (treated surface) of this type of glass plate to perform etching treatment and roughening the surface of the glass plate. It has been.

As a specific example of the apparatus for etching the surface of the glass plate in this way, the apparatus disclosed in Patent Document 1 can be mentioned. The apparatus disclosed in the same document is provided with an air supply port and an exhaust port on the upper surface (base surface) of the lower structure, and a processing space is formed between the base surface and the lower surface of the upper structure. Then, in the processing space, the lower surface (processed surface) of the glass plate continuously conveyed by the processing gas supplied from the air supply port and exhausted to the exhaust port is etched.

JP-A-2017-52679

By the way, since the base surface of the device disclosed in Patent Document 1 is a single plane, the following adverse effects are caused. That is, when the processing gas flows through the processing space, the concentration of the processing gas tends to increase as it approaches the base surface due to the influence of the outside air or the like. In this case, since the processing surface of the glass plate conveyed in the processing space is separated from the base surface, the concentration of the processing gas becomes low in the vicinity of the processing surface. Therefore, the treated surface cannot be sufficiently etched, and it becomes difficult to make the amount of roughening of the glass plate an appropriate amount.

From the above viewpoint, the present invention suppresses a decrease in the concentration of the processing gas in the vicinity of the treated surface of the glass plate, sufficiently etches the treated surface, and makes the amount of roughening of the glass plate an appropriate amount. That is the issue.

The first aspect of the present invention, which was devised to solve the above problems, is that a processing space is formed between a base surface on which an air supply port and an exhaust port are arranged and a facing surface facing the base surface. A treatment tank in which the treatment surface of the glass plate is etched in the treatment space using the treatment gas supplied from the air supply port to the treatment space and exhausted from the treatment space to the exhaust port, and the above. A glass plate manufacturing apparatus including a transport means for transporting the glass plate so that the processing surface of the glass plate and the base surface face each other in the processing space, wherein the air supply port and the exhaust port are provided. It is characterized in that a convex portion is formed so as to project from the base surface toward the facing surface side at a position separated from the air supply port toward the exhaust port side between the two and the air supply port.

According to such a configuration, the processing gas supplied to the processing space from the air supply port arranged on the base surface is exhausted to the exhaust port arranged on the base surface, and the concentration of this processing gas is determined. Originally, the concentration tends to increase as it approaches the base surface due to the influence of the outside air. In the configuration here, the high-concentration processing gas flowing from the air supply port side to the exhaust port side near the base surface hits the convex portion protruding from the base surface toward the facing surface side, and the flow direction is the basis. The direction is changed from the surface side to the facing surface side. In this case, since the processing surface of the glass plate conveyed in the processing space by the conveying means faces the base surface, the high-concentration processing gas whose direction has been changed easily comes into contact with the processing surface of the glass plate. Therefore, the treated surface of the glass plate can be sufficiently etched by the treated gas having an increased concentration, and the amount of roughening of the glass plate can be adjusted to an appropriate amount.

In this manufacturing apparatus, the convex portion extends in a direction intersecting the transport direction of the glass plate, and the length of the glass plate and the convex portion in the direction intersecting the transport direction is longer than that of the glass plate. It is preferable that the convex portion is longer.

In this way, the high-concentration processing gas from the base surface side to the facing surface side by hitting the convex portion is likely to come into contact with the entire length in the direction intersecting the transport direction on the processing surface of the glass plate. As a result, it becomes possible to perform a sufficient etching process on the entire treated surface of the glass plate conveyed in the processing space, and it is possible to optimize the amount of roughening over the entire area of the glass plate.

In the above manufacturing apparatus, the transport means includes transport rollers for supporting the glass plate at a plurality of locations in the transport direction of the glass plate between the air supply port and the exhaust port, and these transport rollers. It is preferable that the convex portions are arranged between each other in the transport direction.

In this way, the glass plate is supported by the transport rollers at a plurality of locations in the transport direction, so that the glass plate can be stably transported. Moreover, since the convex portions are arranged between the transport rollers in the transport direction, the convex portions can be appropriately arranged while avoiding interference with the transport rollers, which is preferable in terms of layout. As a result, it is possible to efficiently achieve both the optimization of the transport form of the glass plate and the optimization of the layout of the convex portion.

In the above manufacturing apparatus, it is preferable that a plurality of the convex portions are arranged in the transport direction of the glass plate.

In this way, the high-concentration processing gas that is supplied from the air supply port to the processing space and flows in the vicinity of the base surface toward the exhaust port is changed in direction by the convex portions at a plurality of places in the transport direction, and the glass is used. It can be directed to the treated surface of the board. As a result, the amount of roughening of the glass plate can be further optimized.

In the above manufacturing apparatus, it is preferable that the air supply port is formed in a protruding portion protruding from the base surface toward the facing surface side.

In this way, the processing gas supplied from the air supply port to the processing space is supplied to a position closer to the processing surface of the glass plate by the amount of the protruding portion protruding toward the facing surface side. As a result, the processing gas existing in the vicinity of the processing surface of the glass plate can be easily maintained at a higher concentration, and the amount of roughening of the glass plate can be further optimized.

The second aspect of the present invention, which was devised to solve the above problems, is that a processing space is formed between a base surface on which an air supply port and an exhaust port are arranged and a facing surface facing the base surface. In the processing tank, the processing surface of the glass plate existing in the processing space is etched by using the processing gas supplied from the air supply port to the processing space and exhausted from the processing space to the exhaust port. A method for manufacturing a glass plate, comprising an etching step and a transporting step of transporting the glass plate so that the treated surface of the glass plate and the base surface face each other in the processing space using a transporting means. Therefore, in the etching step, the air supply port and the exhaust port are formed at a position separated from the air supply port toward the exhaust port side and protrude from the base surface toward the facing surface side. It is characterized in that the processing gas flowing from the air supply port side to the exhaust port side is applied to the convex portion.

According to such a manufacturing method, as in the manufacturing apparatus described above, a high-concentration processing gas that is supplied from the air supply port to the processing space and flows in the vicinity of the base surface toward the exhaust port is discharged from the base surface. It hits a convex portion that protrudes toward the facing surface side, and the flow direction is changed from the base surface side to the facing surface side. Therefore, even with this manufacturing method, it is possible to sufficiently etch the treated surface of the glass plate with the treated gas having a higher concentration, and it is possible to optimize the amount of roughening of the glass plate. it can.

According to the present invention, the decrease in the concentration of the processing gas in the vicinity of the treated surface of the glass plate is suppressed, and the treated surface can be sufficiently etched, so that the amount of roughening of the glass plate is adjusted to an appropriate amount. It becomes possible to do.

It is a schematic longitudinal front view which shows the main part of the glass plate manufacturing apparatus (the processing tank for etching processing which forms the main part) which concerns on 1st Embodiment of this invention. It is a cross-sectional plan view cut according to the X-ray line of FIG. It is a main part enlarged longitudinal side view which shows an example of the peripheral structure of the transport roller which is a component element of the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. FIG. 5 is an enlarged vertical sectional side view of a main part showing another example of a peripheral structure of a transport roller which is a component of a glass plate manufacturing apparatus according to a first embodiment of the present invention. It is a main part enlarged longitudinal front view which shows the peripheral structure of the convex part which is a component element of the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. It is a schematic longitudinal front view which shows the main part of the glass plate manufacturing apparatus (the processing tank for etching processing which forms the main part) which concerns on 2nd Embodiment of this invention. It is a cross-sectional plan view cut according to the YY line of FIG.

Hereinafter, the glass plate manufacturing apparatus and the manufacturing method thereof according to the embodiment of the present invention will be described with reference to the attached drawings.

<First Embodiment>
FIG. 1 is a schematic longitudinal front view showing a main part of a glass plate manufacturing apparatus (a processing tank 1 for etching processing which forms a main part thereof) according to the first embodiment of the present invention. As shown in the figure, the processing tank 1 has an upper component 2 arranged on the upper side, a lower component 3 arranged on the lower side, and the depth directions of both the components 2 and 3 (orthogonal to the paper surface). It is provided with end walls 4 (see FIG. 2) fixed to both ends in the direction). Etching with respect to the lower surface (processed surface) Ga of the glass plate G between the upper surface (base surface) 5 of the lower structure 3 and the lower surface (opposing surface) 6 of the upper structure 2 facing the base surface 5. A processing space 7 for performing the processing is formed.

The arrow A direction shown in FIG. 1 is the transport direction of the glass plate G, and in the following description, the direction along the arrow A is simply referred to as the transport direction. Further, the left side in the figure is referred to as the front side in the transport direction, and the right side in the figure is referred to as the rear side in the transport direction. Further, the depth direction of both

components

2 and 3 is simply referred to as the depth direction. Here, in the illustrated example, the transport direction of the glass plate G is the horizontal direction of the horizontal direction, but the downward inclination or the downward inclination is made within a range in which the front side of the transport direction is within 30 ° with respect to the other horizontal direction, that is, the horizontal direction. It may be in an ascending and sloping direction. The thickness of the glass plate G is not particularly limited, but is, for example, 1 mm or less, 700 μm or less, or 500 μm or less. The size of the glass plate G is also not particularly limited, but is, for example, 200 × 300 mm to 3100 × 3500 mm.

On the base surface 5, an air supply port 8 for supplying a processing gas (for example, hydrogen fluoride) to the processing space 7 and an exhaust port 9 for exhausting the processing gas from the processing space 7 are arranged. In this embodiment, both the air supply port 8 and the exhaust port 9 are open to the base surface 5. The air supply port 8 opens at a position separated from the central portion of the base surface 5 in the transport direction to the rear side in the transport direction, and the exhaust port 9 opens at a position separated from the central portion of the base surface 5 in the transport direction to the front side in the transport direction. doing. As shown in FIG. 2, both the air supply port 8 and the exhaust port 9 are formed in a slit shape extending in the depth direction. In this embodiment, the lengths of the air supply port 8 and the exhaust port 9 in the depth direction are both longer than the length of the glass plate G in the depth direction.

As shown in FIG. 1, the lower structure 3 is hanging and fixed to a base plate 10 having a above-mentioned base surface 5 whose upper surface is a single flat surface and a portion of the base plate 10 on the rear side in the transport direction. The air supply structure 11 is provided, and the exhaust structure 12 is suspended and fixed to a portion of the base plate 10 on the front side in the transport direction. An air supply hole 13 leading to the air supply port 8 is formed in a portion of the base plate 10 on the rear side in the transport direction, and the air supply hole 13 communicates with the air supply passage 14 formed in the air supply structure 11. An exhaust hole 15 leading to an exhaust port 9 is formed in a portion of the base plate 10 on the front side in the transport direction, and the exhaust hole 15 communicates with an exhaust passage 16 formed in the exhaust structure 12. The upstream end of the air supply passage 14 (lower end of the illustration) leads to the processing gas supply source (not shown), and the downstream end of the exhaust passage 16 (lower end of the illustration). Section) leads to a processing gas recovery section (not shown). In this embodiment, the lower structure 3 is made of a resin such as polyvinyl chloride, which has excellent corrosion resistance to the processing gas. Further, each of the air supply structure 11 and the exhaust structure 12 has a built-in heater (not shown) for preventing the occurrence of dew condensation due to the processing gas.

On the upper part of the base plate 10, a disk-shaped transport roller that supports the glass plate G from below at a plurality of locations (three locations in the drawing) in the transport direction at the portion from the air supply port 8 to the exhaust port 9. 17 is assembled. As shown in FIG. 2, these transport rollers 17 are also assembled at a plurality of locations (4 locations in the illustrated example) in the depth direction of the upper portion of the base plate 10. Further, similar transport rollers 18 are assembled on the upper portion of the base plate 10 at a portion on the rear side in the transport direction from the air supply port 8 and a portion on the front side in the transport direction from the exhaust port 9. 18 is also assembled in the same manner at a plurality of locations in the depth direction.

All of these

transport rollers

17 and 18 are independent free rollers, are not subjected to rotational driving force, and are rotatable in a recess 19 formed in the upper portion of the base plate 10 as shown in FIG. It is held in. The recesses 19 are formed at predetermined intervals in both the transport direction and the depth direction. More specifically, each transport roller 17 (18) is inserted into each recess 19 with play, and only the upper portion of each roller 17 (18) projects upward from the base surface 5. The roller shafts 17a (18a) of the rollers 17 (18) are rotatably supported on the support surfaces 20 extending from the middle portion in the height direction to both sides in the depth direction of the recesses 19. In this example, the upper part of each roller shaft 17a (18a) is open. Instead, as shown in FIG. 4, the upper portion of each roller shaft 17a (18a) may be covered with a covering wall portion 21 having a base surface 5 at the upper end.

A plurality of drive transport rollers (illustrated) for carrying the glass plate G into the treatment space 7 and carrying out the glass plate G from the treatment space 7 on the rear side in the transport direction of the treatment tank 1 and on the front side in the transport direction of the treatment tank 1, respectively. (Omitted) are arranged along the transport direction. Therefore, the transport means 22 for transporting the glass plate G so that the processing surface Ga of the glass plate G and the base surface 5 face each other in the processing space 7 is a plurality of transport rollers described above for guiding the feeding of the glass plate G. It is composed of 17 (18) and a plurality of the above-mentioned drive transfer rollers that apply a feeding force to the glass plate G. In this embodiment, the transport means 22 is configured to sequentially and continuously transport a plurality of glass plates G into the processing space 7. The

transport rollers

17 and 18 may be rollers to which a rotational driving force is applied, and a feeding force may be applied to the glass plate G.

As shown in FIG. 1, on the base surface 5, there are a plurality of locations (three locations in the illustrated example) in the transport direction between the air supply port 8 and the exhaust port 9, from the base surface 5 to the facing surface 6 side. A convex portion 23 protruding toward the surface is formed. Of these convex portions 23, the convex portion 23 located on the rearmost side in the transport direction is separated from the air supply port 8 on the front side in the transport direction, and the convex portion 23 located on the front side in the transport direction is transported from the exhaust port 9. It is separated to the rear side of the direction. Further, among these convex portions 23, the convex portions 23 (two convex portions 23 in the illustrated example) existing in the central peripheral portion in the transport direction are the plurality of transport rollers 17 (three transport rollers 17 in the illustrated example). They are placed between each other. The convex portion 23 located on the front side in the transport direction may be connected to the exhaust port 9 without a gap without being separated from the exhaust port 9 on the rear side in the transport direction.

As shown in FIG. 2, the plurality of convex portions 23 extend in a direction intersecting the transport direction (in the example, a direction orthogonal to the transport direction (depth direction)). The length of these plurality of convex portions 23 in the depth direction is longer than the length of the glass plate G in the depth direction, and in this embodiment, it is longer than the length of the air supply port 8 and the exhaust port 9 in the depth direction. It is said to be a scale. Further, in this embodiment, each convex portion 23 is an elongated plate or columnar body having a rectangular cross section, but has an elongated plate having a trapezoidal, other polygonal, circular, or semicircular cross section. It may be a shape or a column. In the illustrated example, both ends of each convex portion 23 in the depth direction are slightly separated from the end wall 4, but may reach the end wall 4.

As shown in FIG. 5, the protrusion dimension L1 from the base surface 5 of each convex portion 23 is 1/5 to 4/5, preferably 2 of the separation dimension L2 from the base surface 5 to the processing surface Ga of the glass plate G. It is / 5 to 3/5. As a specific numerical value, the dimension L1 is 1 to 5 mm, preferably 2 to 3 mm, and the dimension L2 is 2 to 10 mm, preferably 3 to 6 mm. Here, the material of each convex portion 23 is a resin such as polyvinyl chloride having excellent corrosion resistance to the processing gas.

As shown in FIG. 1, the upper structure 2 is configured by connecting and fixing a top plate 24 on the front side in the transport direction and a top plate 25 on the rear side in the transport direction, and the lower surfaces of both

top plates

24 and 25 are formed. It is the above-mentioned facing surface 6 forming a single plane connected in a flush state. The facing surface 6 is parallel to the base surface 5, and the facing surface 6 and the base surface 5 are parallel to the processing surface Ga and the upper surface Gb of the glass plate G conveyed to the processing space 7.

The upper structure 2 is made of a resin such as polyvinyl chloride, which has excellent corrosion resistance to processing gas. Further, the top plate 24 on the front side in the transport direction and the top plate 25 on the rear side in the transport direction each have a built-in heater (not shown) for preventing the occurrence of dew condensation due to the processing gas.

In the method of manufacturing a glass plate using the manufacturing apparatus (treatment tank 1) having the above configuration, in consideration of FIG. 1, in the treatment tank 1, air is supplied from the air supply port 8 to the treatment space 7 and the treatment space 7 is used. An etching step is provided in which the processing surface Ga of the glass plate G existing in the processing space 7 is subjected to an etching process using the processing gas exhausted from the exhaust port 9. Further, the manufacturing method includes a transport step of transporting the glass plate G so that the processing surface Ga of the glass plate G and the base surface 5 face each other in the processing space 7 by using the transport means 22. Then, in the etching step, the processing gas flowing from the air supply port 8 side to the exhaust port 9 side is applied to the convex portion 23 formed on the base surface 5.

Next, the operation and effect of the glass plate manufacturing apparatus and the manufacturing method thereof according to the first embodiment will be described.

The processing gas supplied from the air supply port 8 to the processing space 7 is exhausted from the processing space 7 to the exhaust port 9, but the concentration of this processing gas is essentially affected by the outside air and the like. The concentration tends to increase as it approaches 5. Here, according to the configuration according to the present embodiment, the high-concentration processing gas flowing from the air supply port 8 toward the exhaust port 9 in the vicinity of the base surface 5 hits the convex portion 23 as shown in FIG. , The direction of the flow is changed from the base surface 5 side to the facing surface 6 side as indicated by the arrow W. At this time, as shown by the chain line in the figure, the processing surface Ga of the glass plate G conveyed to the processing space 7 faces the base surface 5, so that the high-concentration processing gas whose direction has been changed is glass. It becomes easy to come into contact with the processing surface Ga of the plate G. Therefore, the treated surface Ga of the glass plate G can be sufficiently etched by the treated gas having an increased concentration, and the amount of roughening of the glass plate G can be adjusted to an appropriate amount.

Moreover, since the length of the convex portion 23 in the depth direction is longer than the length of the glass plate G in the depth direction, the high-concentration processing gas whose direction is changed as shown by the arrow W by hitting the convex portion 23 is , It becomes easy to come into contact with the processing surface Ga over the entire length of the glass plate G in the depth direction. Therefore, the processing gas having an increased concentration can be brought into contact with the entire area of the processing surface Ga of the glass plate G passing through the processing space 7. As a result, it becomes possible to perform a sufficient etching process on the entire surface Ga of the processing surface Ga of the glass plate G conveyed in the processing space 7, and the amount of roughening can be optimized over the entire area of the glass plate G. ..

Further, since the length of the convex portion 23 in the depth direction is longer than the length of the air supply port 8 and the exhaust port 9 in the depth direction, high-concentration processing from the air supply port 8 side to the exhaust port 9 side is performed. The direction of the gas can be changed as much as possible, and the entire area of the treated surface Ga of the glass plate G can be further sufficiently etched.

Further, when the glass plate G is transported in the processing space 7, the glass plate G is supported by the disk-shaped transport rollers 17 at a plurality of locations in the transport direction and the depth direction, so that the glass plate G is stably transported. Can be done. Moreover, since the convex portions 23 are arranged between the transport rollers 17 in the transport direction, the convex portions 23 can be appropriately arranged while avoiding interference with the transport rollers 17, and the layout surface can be improved. It becomes preferable. As a result, it is possible to efficiently achieve both the optimization of the transport form of the glass plate G and the optimization of the layout of the convex portion 23.

Further, since the convex portions 23 are arranged at a plurality of locations in the transport direction, the direction of the high-concentration processing gas from the air supply port 8 side to the exhaust port 9 side can be changed at the plurality of locations in the transport direction. It becomes possible to further optimize the amount of roughening of the glass plate G.

<Second embodiment>
6 and 7 illustrate the glass plate manufacturing apparatus (processing tank 1) according to the second embodiment of the present invention. As shown in both of these figures, the treatment tank 1 according to the second embodiment is different from the treatment tank 1 according to the first embodiment described above, in that the air supply port 8 faces from the base surface 5. It is a point formed on the protruding portion 27 that protrudes toward the surface 6 side. Specifically, the air supply port 8 opens at the tip (upper end) of the protrusion 27. Further, the projecting portion 27 has an elongated frame shape elongated in the depth direction in the plan view shown in FIG. 7. Here, the material of the protruding portion 27 is a resin such as polyvinyl chloride having excellent corrosion resistance to the processing gas. Since the other components are the same as those in the first embodiment described above, the components common to both embodiments are designated by the same reference numerals in FIGS. 6 and 7, and the description thereof will be omitted.

According to the manufacturing apparatus (processing tank 1) according to the second embodiment, the processing gas supplied from the air supply port 8 to the processing space 7 has a protruding portion 27 protruding toward the facing surface 6 side. However, air is supplied to a position close to the processing surface Ga of the glass plate G. As a result, the processing gas existing in the vicinity of the processing surface Ga of the glass plate G can be easily maintained at a higher concentration, and the amount of roughening of the glass plate G can be further optimized.

In the above first and second embodiments, the convex portion 23 is formed as a separate body on the base surface 5 of the base plate 10, but the convex portion 23 may be integrally formed with the base plate 10. .. In this case, the region of the upper surface of the base plate 10 excluding the convex portion 23 is the base surface 5.

Similarly, the protruding portion 27 is also formed as a separate body on the base surface 5 of the base plate 10, but it may be integrally formed with the base plate 10. In this case as well, the base plate 10 may be formed integrally. The region of the upper surface of the above surface excluding the protruding portion 27 is the base surface 5.

In the first and second embodiments described above, one convex portion 23 is formed so that one plate-like body or columnar body extends in the depth direction, but instead, one convex portion 23 is formed. A plurality of plate-like bodies or columnar bodies may be arranged and formed so as to extend in the depth direction. In this case, a gap may be provided between the plurality of plate-shaped bodies or columnar bodies in the depth direction. However, the size of the gap is such that the processing gas flowing from the air supply port 8 side to the exhaust port 9 side in the vicinity of the base surface 5 can be sufficiently changed in direction by the convex portion 23. Need to be.

In the first and second embodiments described above, the transport rollers 17 have a disk shape, but they may have a cylindrical shape that is longer in the axial direction than the disc shape, and the transport rollers 17 are arranged in the depth direction. The number of rollers 17 may also be one per row. However, in such a case, the transport roller 17 can flow a sufficient amount of processing gas from the air supply port 8 side to the exhaust port 9 side in the vicinity of the base surface 5 without getting in the way. In addition, it is necessary to prevent the problem of bending of the glass plate G from occurring.

In the above first and second embodiments, the upper surface of the base plate 10 is set as the base surface 5, and the air supply port 8, the exhaust port 9, and the convex portion 23 are arranged on the base surface 5, but instead of this, the air supply port 8, the exhaust port 9, and the convex portion 23 are arranged. , The lower surfaces of the

top plates

24 and 25 may be used as a base surface, and an air supply port, an exhaust port and a convex portion may be arranged on the base surface. In this case, the upper surface (base surface 5) of the base plate 10 is the facing surface, and the upper surface Gb of the glass plate G is the processing surface.

1 Treatment tank 5 Base surface 6 Facing surface 6a Facing surface 6b Facing surface 7 Processing space 7a Processing space 7b Processing space 8 Air supply port 9 Exhaust port 17 Conveying roller 22 Conveying means 23 Convex part 27 Protruding part G Glass plate Ga Glass plate Processing surface

Claims

A processing space is formed between the base surface on which the air supply port and the exhaust port are arranged and the facing surface facing the base surface, air is supplied from the air supply port to the processing space, and the exhaust from the processing space. A processing tank that etches the processing surface of the glass plate in the processing space using the processing gas that is exhausted to the mouth.
A transport means for transporting the glass plate so that the treated surface of the glass plate and the base surface face each other in the processing space.
It is a glass plate manufacturing device equipped with
It is characterized in that a convex portion protruding from the base surface toward the facing surface side is formed at a position separated from the air supply port toward the exhaust port side between the air supply port and the exhaust port. Glass plate manufacturing equipment.
The convex portion extends in a direction intersecting the transport direction of the glass plate, and the length of the glass plate and the convex portion in the direction intersecting the transport direction is longer in the convex portion than in the glass plate. The glass plate manufacturing apparatus according to claim 1, wherein the glass plate is long.
The transport means includes transport rollers for supporting the glass plate at a plurality of locations in the transport direction of the glass plate between the air supply port and the exhaust port, and the transport rollers are mutually in the transport direction. The apparatus for manufacturing a glass plate according to claim 1 or 2, wherein the convex portions are arranged between them.
The glass plate manufacturing apparatus according to any one of claims 1 to 3, wherein a plurality of the convex portions are arranged in the transport direction of the glass plate.
The glass plate manufacturing apparatus according to any one of claims 1 to 4, wherein the air supply port is formed in a protruding portion protruding from the base surface toward the facing surface side.
In a treatment tank in which a treatment space is formed between a base surface on which an air supply port and an exhaust port are arranged and a facing surface facing the base surface, air is supplied from the air supply port to the treatment space and the treatment is performed. An etching process in which the processing surface of the glass plate existing in the processing space is etched using the processing gas exhausted from the space to the exhaust port.
A transport step of transporting the glass plate so that the processing surface of the glass plate and the base surface face each other in the processing space using a transport means.
It is a manufacturing method of a glass plate equipped with
In the etching step, a convex portion formed at a position separated from the air supply port to the exhaust port side between the air supply port and the exhaust port and projecting from the base surface toward the facing surface side. A method for manufacturing a glass plate, which comprises applying the processing gas flowing from the intake port side to the exhaust port side.