WO2017138327A1 - 波長変換素子及び光源装置 - Google Patents
波長変換素子及び光源装置 Download PDFInfo
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- WO2017138327A1 WO2017138327A1 PCT/JP2017/001900 JP2017001900W WO2017138327A1 WO 2017138327 A1 WO2017138327 A1 WO 2017138327A1 JP 2017001900 W JP2017001900 W JP 2017001900W WO 2017138327 A1 WO2017138327 A1 WO 2017138327A1
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- Prior art keywords
- wavelength conversion
- light
- conversion element
- conversion member
- source device
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Images
Classifications
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- F21S41/10—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source
- F21S41/14—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source characterised by the type of light source
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- F21S41/10—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source
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- F21S41/10—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by the light source
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- F21S41/20—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by refractors, transparent cover plates, light guides or filters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/30—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors
- F21S41/37—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors characterised by their material, surface treatment or coatings
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- F21V23/04—Arrangement of electric circuit elements in or on lighting devices the elements being switches
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- F21V7/24—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by the material
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
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Definitions
- the present disclosure relates to a wavelength conversion element and a light source device using the same.
- the wavelength conversion element is irradiated with light emitted from the semiconductor light-emitting device in order to emit a high luminous flux, thereby converting the wavelength.
- the light emitted from the element is used efficiently.
- Patent Document 1 a conventional light source device disclosed in Patent Document 1 will be described with reference to FIG.
- FIG. 21 is a schematic diagram showing a configuration of a conventional light source device 1001.
- a conventional light source device 1001 includes a semiconductor laser element 1002 that emits laser light, a phosphor 1004 that converts at least part of the laser light emitted from the semiconductor laser element 1002 into incoherent light, and a coherent laser light And a safety device (light detector 1011, control unit 1009) that suppresses emission to the outside.
- the light receiving element 1008 of the light detector 1011 receives light having a wavelength larger than about 500 nm transmitted through the optical filter 1007 among the light from the phosphor 1004 arranged in the concave portion 1005a of the reflecting member 1005.
- the output of the light receiving element 1008 is reduced, and the determination unit 1009a of the control unit 1009 determines a predetermined value. Determined to be less than or equal to the value.
- the drive circuit 1010 stops driving the semiconductor laser element 1002.
- the fluorescence emitted from the wavelength conversion member (phosphor) is light emitted in a random direction, it is difficult to detect a minute change in the light emission state of the wavelength conversion member (phosphor). .
- the light source device 1001 can determine the final stage of a failure such as a dropout or breakage of the phosphor, but can detect the initial stage of a failure such as a crack generated in a part of the phosphor. I can't.
- This indication is made in order to solve such a subject, and it aims at providing a light source device provided with the wavelength conversion element which can detect the state of a wavelength conversion member correctly, and the wavelength conversion element concerned. .
- a wavelength conversion element is integrated on a base, a plate-like or film-like wavelength conversion member disposed on at least a part of the surface of the base, and the p And a light receiving portion including a pn junction composed of an n-type semiconductor and an n-type semiconductor.
- the light receiving unit including the pn junction is integrated on the substrate on which the wavelength converting member is arranged, so that the light receiving unit detects light emitted from the wavelength converting member in the vicinity of the wavelength converting member. can do. Therefore, the light receiving unit can accurately detect a minute change in the wavelength conversion member.
- the light receiving unit may receive light incident on the base.
- the light receiving unit can detect light emitted from the wavelength conversion member toward the substrate in the vicinity of the wavelength conversion member. Therefore, a minute change in the wavelength conversion member can be accurately detected.
- the thickness of the wavelength conversion member in the direction perpendicular to the surface may be smaller than the maximum width in the direction parallel to the surface of the wavelength conversion member.
- the wavelength conversion element according to the present disclosure may further include an optical filter that is disposed between the wavelength conversion member and the base and reflects light emitted from the wavelength conversion member.
- the light propagating toward the substrate can be efficiently emitted to the outside of the wavelength conversion element.
- the optical filter may include a metal film or a dielectric multilayer film.
- This configuration makes it easy to form an optical filter.
- the p-type semiconductor and the n-type semiconductor may be silicon doped with impurities.
- This configuration makes it possible to easily manufacture the light receiving part.
- the light receiving unit may be disposed inside the base or between the base and the wavelength conversion member.
- the distance between the wavelength conversion member and the light receiving portion can be shortened by this configuration, a minute change of the wavelength conversion member can be accurately detected.
- the base may include a plurality of the light receiving units.
- This configuration makes it possible to accurately detect the position of light incident on the wavelength conversion member.
- the light receiving unit may be disposed around the wavelength conversion member in a plan view of the surface.
- This configuration makes it possible to accurately detect information on light incident on the wavelength conversion member. For example, when irradiating light from the light emitting device to the wavelength conversion element, the irradiation position of the light from the light emitting device may be shifted so that the light is incident on the periphery of the wavelength converting member without being incident on the wavelength converting member. . In such a case, in this configuration, it is possible to accurately detect the deviation of the irradiation position.
- the light receiving unit may be disposed on the periphery of the wavelength conversion member in the plan view of the surface.
- the position of light from the light emitting device to the wavelength conversion member can be detected, and the area of the light receiving unit can be reduced.
- the wavelength conversion member may have a plurality of regions.
- a wavelength conversion member having a plurality of light emitting regions can be easily configured.
- a light source device includes the wavelength conversion element and a light-emitting device that emits light applied to the wavelength conversion element.
- the light source device can achieve the same effect as the wavelength conversion element.
- the light emitting device may emit laser light.
- the light source device may further include an optical system that varies the optical path of the light emitted from the light emitting device.
- a wavelength conversion element capable of accurately detecting the state of the wavelength conversion member and a light source device including the wavelength conversion element.
- FIG. 1 is a schematic cross-sectional view showing the configuration of the light source device according to Embodiment 1.
- FIG. 2 is a schematic cross-sectional view showing the configuration of the wavelength conversion element mounted on the light source device according to Embodiment 1.
- 3A is a schematic cross-sectional view for explaining an example of the operation of the wavelength conversion element according to Embodiment 1.
- FIG. 3B is a schematic cross-sectional view for explaining another example of the operation of the wavelength conversion element according to Embodiment 1.
- 3C is a schematic cross-sectional view for explaining yet another example of the operation of the wavelength conversion element according to Embodiment 1.
- FIG. FIG. 4 is a schematic circuit block diagram of the light source device according to Embodiment 1 and a control unit that operates the light source device.
- FIG. 5 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the first modification of the first embodiment.
- FIG. 6 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the second modification of the first embodiment.
- FIG. 7 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the second embodiment.
- FIG. 8 is a perspective view showing an appearance of the wavelength conversion element according to the second embodiment.
- FIG. 9 is a schematic cross-sectional view showing the configuration of the light source device according to Embodiment 2.
- FIG. 10 is a schematic cross-sectional view showing the configuration of the light source device according to Embodiment 3.
- FIG. 9 is a schematic cross-sectional view showing the configuration of the light source device according to Embodiment 2.
- FIG. 11 is a schematic circuit block diagram of the light source device according to Embodiment 3 and a control unit for driving the light source device.
- FIG. 12 is a flowchart illustrating a control algorithm in the light source device and the control unit according to the third embodiment.
- FIG. 13 is a graph showing the time dependency of an example of a drive signal input to the light source device according to the third embodiment.
- FIG. 14 is a perspective view schematically showing a light source device according to the first modification of the third embodiment.
- FIG. 15 is a schematic diagram illustrating an application example of the light source device according to the first modification of the third embodiment.
- FIG. 16 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the second modification of the third embodiment.
- FIG. 17 is a schematic cross-sectional view illustrating a configuration of a wavelength conversion element according to Modification 3 of Embodiment 3.
- FIG. 18 is a schematic cross-sectional view showing the configuration of the light source device according to Embodiment 4.
- FIG. 19 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the fourth embodiment.
- FIG. 20 is a schematic cross-sectional view showing the configuration of the wavelength conversion element according to the fifth embodiment.
- FIG. 21 is a schematic diagram showing a configuration of a conventional light source device.
- Embodiment 1 the light source device according to Embodiment 1 will be described with reference to FIGS. 1 and 2.
- FIG. 1 is a schematic cross-sectional view showing a configuration of a light source device 101 according to the present embodiment.
- FIG. 2 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 100 mounted on the light source device 101 according to the present embodiment.
- the light source device 101 includes a wavelength conversion element 100 and a light emitting device 1 that irradiates the wavelength conversion element 100 with light.
- the light source device 101 further includes a condensing optical system 3.
- the light source device 101 irradiates the wavelength conversion member 4 with the light emitted from the light emitting device 1, and emits the light emitted from the wavelength conversion member 4 as the emitted light 90 of the light source device 101.
- the wavelength conversion element 100 is an element that is irradiated with light from the light emitting device 1 and that converts at least a part of the light to emit the light, and includes a base body 5, a wavelength conversion member 4, and a light receiving unit 6.
- the substrate 5 is a member on which the wavelength conversion member 4 is disposed and the light receiving unit 6 is integrated.
- substrate 5 is not specifically limited, For example, plate shape may be sufficient.
- the wavelength converting member 4 is a plate-like or film-like wavelength converting member disposed on at least a part of the surface of the substrate 5.
- the wavelength conversion member 4 is a member including at least one kind of phosphor material, for example, absorbs light having a wavelength of 380 nm to 490 nm and emits fluorescence having a peak wavelength in a visible light region between wavelengths 420 nm and 780 nm. Exit.
- the wavelength conversion member 4 includes at least a phosphor material that emits red light from yellow light having a wavelength between 500 nm and 650 nm, for example.
- the wavelength conversion member 4 includes, for example, a cerium (Ce) activated yttrium / aluminum / garnet phosphor material as the phosphor material.
- the light receiving portion 6 is integrated on the base 5 and includes a pn junction composed of a p-type semiconductor and an n-type semiconductor.
- the light receiving unit 6 receives light incident on the substrate 5.
- the light emitting device 1 is a device that emits light irradiated to the wavelength conversion element 100.
- the light emitting device 1 includes, for example, a semiconductor light emitting element 10.
- the semiconductor light emitting device 10 is, for example, a nitride semiconductor light emitting device including a light emitting layer made of a nitride semiconductor.
- the semiconductor light emitting element 10 is, for example, a semiconductor laser diode element in which an optical waveguide is formed.
- the emitted light 11 emitted from the semiconductor light emitting element 10 is, for example, light having a wavelength of near ultraviolet to blue having a peak wavelength between 380 nm and 490 nm.
- the emitted light 11 is, for example, laser light emitted from a semiconductor laser diode element.
- the condensing optical system 3 is an optical system including one or more optical elements such as a convex lens and a concave reflecting lens, and condenses at least a part of the emitted light 11 on at least a part of the surface of the wavelength conversion member 4. To do.
- the emitted light 90 is light emitted from the wavelength conversion member 4.
- the outgoing light 90 includes light obtained by wavelength-converting at least a part of the outgoing light 11 by the wavelength conversion member 4. More specifically, from the wavelength conversion member 4 irradiated with the outgoing light 11, the first outgoing light 91 that is a part of the outgoing light 11 scattered and the other part of the outgoing light 11 are absorbed. And the 2nd emitted light 92 which is the light by which wavelength conversion was carried out is emitted.
- the first outgoing light 91 is blue light
- the second outgoing light 92 is yellow light. That is, the wavelength conversion member 4 emits the emitted light 90 that is white light in which the first emitted light 91 and the second emitted light 92 are mixed.
- the wavelength conversion element 100 is integrated with the base 5, the plate-like or film-like wavelength conversion member 4 disposed on at least a part of the surface of the base 5, and the base 5, and is composed of a p-type semiconductor and an n-type semiconductor. And a light receiving unit 6 including a pn junction.
- the base 5 is, for example, a first semiconductor 22 made of silicon (Si) having a first conductivity type and a second conductivity type that is disposed on the wavelength conversion member 4 side of the first semiconductor 22 and has a conductivity type different from the first conductivity type.
- the second semiconductor 23 is formed of conductive silicon.
- the first conductivity type and the second conductivity type are n-type and p-type, respectively. Thereby, the light-receiving part 6 can be manufactured easily.
- the first conductivity type and the second conductivity type may be p-type and n-type, respectively.
- the first semiconductor 22 is, for example, an n-type silicon substrate whose outer shape is 3 mm in length, 3 mm in width, and 300 ⁇ m in thickness.
- the second semiconductor 23 is formed by injecting a p-type dopant into the surface of the first semiconductor 22.
- the light receiving unit 6 including a pn junction is formed between the first semiconductor 22 and the second semiconductor 23, the light receiving unit 6 including a pn junction is formed. A depletion layer is formed in the light receiving unit 6.
- the depth from the surface of the light receiving portion 6 formed at the interface between the first semiconductor 22 and the second semiconductor 23 is designed based on the light penetration length in the second semiconductor 23. For example, when receiving light with a wavelength of 420 nm to 650 nm, the light receiving unit 6 is disposed at a position where the depth from the surface of the second semiconductor 23 is between 0.1 ⁇ m and 10 ⁇ m.
- a protective film 35 which is a silicon oxide film having a thickness of, for example, between 0.1 ⁇ m and 10 ⁇ m, is formed on the second semiconductor 23 side of the substrate 5.
- the protective film 35 is a film for suppressing deterioration of the first semiconductor 22 and the second semiconductor 23.
- the protective film 35 is not an essential component of the wavelength conversion element 100.
- a second electrode 33 made of a metal such as nickel, aluminum, titanium, platinum, or gold is formed on part or all of the surface of the protective film 35. In addition, an opening is provided in a part of the surface of the second semiconductor 23, and the second semiconductor 23 and the second electrode 33 are electrically connected.
- the surface of the first semiconductor 22 opposite to the second semiconductor 23 of the base 5 (that is, the lower side in FIG. 2) is made of a metal such as nickel, aluminum, titanium, platinum, or gold.
- One electrode 32 is formed, and the first electrode 32 and the first semiconductor 22 are electrically connected.
- the wavelength conversion member 4 is a member including one or more kinds of phosphor materials, and is formed on at least one surface of the protective film 35 and the second electrode 33.
- the wavelength conversion member 4 is made of a mixed paste of Ce-activated (Gd, Y, Lu) 3 (Al, Ga) 5 O 12 phosphor particles and silicone having an average particle diameter D50 of 5 ⁇ m. It is formed by being applied to the surface and cured.
- the wavelength conversion member 4 is formed, for example, in a region slightly smaller than the main surface of the main surface on which the wavelength conversion member 4 of the base 5 is disposed.
- the thickness of the wavelength conversion member 4 is, for example, 10 ⁇ m to 150 ⁇ m.
- the thickness of the wavelength conversion member 4 is appropriately set depending on the color temperature of the emitted light 90 emitted from the wavelength conversion member, the conversion efficiency from the emitted light 11 to the emitted light 90, and the like.
- the wavelength conversion element 100 is electrically connected to an external circuit using a conductive member such as solder or conductive paste, or a metal wire.
- a conductive member such as solder or conductive paste, or a metal wire.
- the second electrode 33 is connected to the outside by a metal wire 37 as shown in FIG.
- the light source device 101 includes a wavelength conversion element 100 and a light emitting device 1.
- the wavelength conversion element 100 and the light emitting device 1 are held by a holding member (not shown).
- the light source device 101 further includes a condensing optical system 3 and an external connection means 80.
- the light emitting device 1 includes, for example, a package 12 that is TO-CAN and a semiconductor light emitting element 10 mounted on the package 12.
- the package 12 includes lead pins 13 a and 13 b that are wirings for applying power to the semiconductor light emitting element 10.
- the package 12 includes a can 15 that seals the semiconductor light emitting element 10.
- the can 15 includes a translucent member 16.
- the translucent member 16 is made of glass, for example.
- the light emitting device 1 emits outgoing light 11 that is blue laser light having a peak wavelength of 450 nm, for example.
- the emitted light 11 passes through the translucent member 16 and is emitted to the outside of the light emitting device 1.
- the lead pins 13a and 13b of the light emitting device 1 are connected to wirings 70a and 70b, respectively.
- the wirings 70a and 70b are, for example, flexible printed circuit boards in which wiring is formed of copper foil or the like on a base film such as polyimide.
- Wirings 70a and 70b are connected to external connection means 80.
- the external connection means 80 is a connector, for example.
- the condensing optical system 3 is a convex lens, and condenses the emitted light 11 on the wavelength conversion element 100.
- a light projecting member 120 which is an aspherical convex lens having a high numerical aperture, is disposed on the optical path of the emitted light 90 emitted from the wavelength conversion element 100, for example. ing. Thereby, the light distribution characteristic of the light source device 101 can be adjusted.
- FIG. 3A is a schematic cross-sectional view for explaining an example of the operation of the wavelength conversion element 100 according to the present embodiment.
- FIG. 3B is a schematic cross-sectional view for explaining another example of the operation of the wavelength conversion element 100 according to the present embodiment.
- FIG. 3C is a schematic cross-sectional view for explaining still another example of the operation of the wavelength conversion element 100 according to the present embodiment.
- the light source device 101 condenses the emitted light 11 emitted from the light emitting device 1 by the condensing optical system 3 and irradiates the wavelength conversion member 4 of the wavelength conversion element 100.
- the wavelength conversion member 4 irradiated with the emitted light 11 emits emitted light 90 that is white light.
- the emitted light 11 is applied to the wavelength conversion member 4 disposed on the upper part of the light receiving unit 6.
- a part of the emitted light 90b transmitted through the protective film 35 or the second electrode 33 is incident on the light receiving unit 6 including the depletion layer of the substrate 5.
- the light incident on the light receiving unit 6 generates electron-hole pairs by photoelectric conversion.
- a voltage for applying a reverse bias to the pn junction is applied to the first electrode 32 and the second electrode 33.
- a positive voltage and a negative voltage are applied to the first electrode 32 and the second electrode 33, respectively. Therefore, the electrons and holes generated in the light receiving unit 6 reach the external connection means 80 from the first electrode 32 and the second electrode 33 via the wirings 70c and 70d, respectively. Furthermore, electrons and holes are sent from the external connection means 80 to the outside of the light source device 101.
- the state of the wavelength conversion member 4 can be detected based on a signal (that is, photocurrent) output from the light receiving unit 6. Furthermore, the operation control of the light emitting device 1 can be performed based on the detection result. For example, when the photocurrent from the light receiving unit 6 suddenly increases, it is determined that the wavelength conversion member 4 may be damaged or detached, and the operation of the light emitting device 1 can be stopped. In this way, it is possible to suppress the coherent outgoing light 11 from being directly emitted to the outside of the light source device 101 without being scattered.
- FIG. 4 is a schematic circuit block diagram of the light source device 101 according to the present embodiment and the control unit 140 that operates the light source device 101.
- the light source device 101 includes a semiconductor light emitting element 10, a photodetector 20, and external connection means 80.
- the photodetector 20 is a photodiode including the light receiving unit 6, the first electrode 32, and the second electrode 33.
- the external connection means 80 includes an anode terminal C1, a cathode terminal C2, a first terminal C3, and a second terminal C4.
- the anode electrode of the semiconductor light emitting element 10 is connected to the anode terminal C1 of the external connection means 80, and the cathode electrode of the semiconductor light emitting element 10 is connected to the cathode terminal C2 of the external connection means 80.
- the cathode electrode of the photodetector 20 is connected to the first terminal C3 of the external connection means 80, and the anode electrode of the photodetector 20 is connected to the second terminal C4 of the external connection means 80.
- the external connection means 80 of the light source device 101 is connected to the control unit 140 by an external wiring 81.
- the light source device 101 is driven by a power supply unit 160 that is, for example, a battery, an external circuit 150 that is, for example, a central control circuit, and a control unit 140. That is, the power supply unit 160, the external circuit 150, and the control unit 140 constitute a drive unit of the light source device 101.
- a power supply unit 160 that is, for example, a battery
- an external circuit 150 that is, for example, a central control circuit
- a control unit 140 constitute a drive unit of the light source device 101.
- the power supply unit 160 supplies electric power to drive the control unit 140.
- the external circuit 150 communicates with the control unit 140, for example. Thereby, the external circuit 150 may obtain information from the control unit 140 or may issue an instruction to the control unit 140.
- the controller 140 supplies a predetermined current Iop to the semiconductor light emitting element 10 through the anode terminal C1 and the cathode terminal C2 in order to drive the semiconductor light emitting element 10.
- control unit 140 receives the photocurrent via the second terminal C4 in order to detect the photocurrent from the photodetector 20.
- the control unit 140 includes a microcontroller 141, a first step-down converter 142, and a second step-down converter 143.
- the control unit 140 further includes a resistance element 132, an A / D converter 144, an I / O port 148, and a sense resistor 146.
- the microcontroller 141 is a circuit that controls the current Iop supplied to the semiconductor light emitting element 10 based on the photocurrent from the photodetector 20 and the signal from the external circuit 150.
- the first step-down converter 142 is a buck converter for supplying a current Iop to the semiconductor light emitting element 10.
- the second step-down converter 143 is a buck converter for generating a power supply voltage Vcc to be applied to the photodetector 20.
- the resistance element 132 is a resistance element for obtaining a voltage value corresponding to the photocurrent output from the photodetector 20.
- the A / D converter 144 is a converter that converts a voltage value corresponding to the photocurrent from the photodetector 20 into a digital signal.
- the I / O port 148 is a port for performing communication with the external circuit 150.
- the sense resistor 146 is a resistor element for obtaining a voltage corresponding to the current Iop supplied from the first step-down converter 142 to the semiconductor light emitting element 10.
- the light source device 101 and the control unit 140 control the operation of the semiconductor light emitting element 10 with the circuit configuration as described above.
- the light source device 101 As an application example of the light source device 101 according to the present embodiment, an example in which the light source device 101 is used as a headlamp for a vehicle such as an automobile will be described.
- the operation of the light source device 101 is prepared by starting the engine of the vehicle.
- power (voltage V B ) is supplied from the power supply unit 160 to the control unit 140, and the power supply voltage Vcc is generated by the second step-down converter 143.
- a predetermined instruction signal is sent from the external circuit 150 to the microcontroller 141 via the I / O port 148, and the current Iop passes from the first step-down converter 142 through the external wiring 81 to external connection means. It flows to 80 anode terminals C1.
- the current Iop supplied to the anode terminal C1 is supplied from the external wiring 81 to the external connection means 80. As shown in FIG. 1, the current Iop is transmitted to the lead pins 13a and 13b by the wirings 70a and 70b, and is supplied to the semiconductor light emitting element 10 by a metal wire (not shown). Thereby, the emitted light 11 is emitted from the semiconductor light emitting element 10.
- the emitted light 11 emitted from the semiconductor light emitting element 10 of the light emitting device 1 is incident on the wavelength converting member 4 of the wavelength converting element 100 by the condensing optical system 3.
- the wavelength conversion member 4 scatters a part of the emitted light 11 and emits the first emitted light 91.
- the wavelength converting member 4 absorbs a part of the emitted light 11 and emits the second emitted light 92.
- the outgoing light 90 is a light in which the first outgoing light 91 and the second outgoing light 92 are mixed.
- the first emitted light 91 is blue light and the second emitted light 92 is yellow light
- the emitted light 90 that is white light is emitted from the light source device 101.
- a part of the emitted light 90 b enters the light receiving unit 6.
- the light received by the light receiving unit 6 is converted into a photocurrent by photoelectric conversion and input to the control unit 140.
- the photocurrent input to the control unit 140 becomes a voltage signal by the resistance element 132 and is input to the microcontroller 141.
- the thickness of the wavelength conversion member 4 is, for example, about 10 ⁇ m to 150 ⁇ m.
- the thickness of the protective film 35 is, for example, about 0.1 ⁇ m to 10 ⁇ m.
- the light receiving unit 6 is arranged at a predetermined position whose depth from the surface of the base 5 is, for example, between 0.1 ⁇ m and 10 ⁇ m.
- the material alteration portion 4x is generated at the surface portion where the light intensity of the wavelength conversion member 4 is strong and the temperature is highest.
- the light receiving unit 6 is arranged outside the optical path of the emitted light 90 and at a position close to the material altered portion 4x, so that a minute change in the wavelength conversion member 4 can be accurately regarded as a change in the emitted light 90b. Can be detected.
- the light receiving unit 6 since the light receiving unit 6 is disposed outside the optical path of the emitted light 90, the light receiving unit 6 does not prevent the propagation of the emitted light 90.
- the light receiving unit 6 can be disposed at a place of 170 ⁇ m or less from the surface of the wavelength conversion member 4.
- a minute change of the wavelength conversion member 4 can be regarded as a change of the emitted light 90b. It can be detected accurately.
- the light amount of the emitted light 90b is output from the light source device 101 as a photocurrent, converted into a signal by the resistance element 132 and the A / D converter 144, and input to the microcontroller 141.
- This signal is judged by the microcontroller 141, and when the wavelength conversion member 4 has a problem, the microcontroller 141 controls the first step-down converter 142 to set the current Iop to 0 and stop the operation of the semiconductor light emitting device 10.
- the light receiving unit 6 including the pn junction is integrated on the base 5 on which the wavelength conversion member 4 is disposed. Thereby, the light receiving unit 6 can detect the light emitted from the wavelength conversion member 4 in the vicinity of the wavelength conversion member 4. Therefore, the light receiving unit 6 can accurately detect a minute change in the wavelength conversion member 4.
- the light receiving unit 6 can detect light emitted from the wavelength conversion member 4 toward the base 5 in the vicinity of the wavelength conversion member 4. Therefore, a minute change of the wavelength conversion member 4 can be accurately detected.
- the thickness of the wavelength conversion member 4 in the direction perpendicular to the main surface of the base 5 is smaller than the maximum width in the direction parallel to the main surface of the wavelength conversion member 4, the light receiving unit 6 Of the light generated by the wavelength conversion member 4, light having a short propagation distance inside the wavelength conversion member 4 can be detected. Such light intensity is sensitive to minute changes in the wavelength conversion member 4. Therefore, the state of the wavelength conversion member 4 can be detected more accurately by the light receiving unit 6.
- the distance between the wavelength conversion member 4 and the light receiving unit 6 can be shortened. For this reason, a minute change of the wavelength conversion member 4 can be accurately detected.
- the light source device 101 includes a wavelength conversion element 100 and a light emitting device that emits light applied to the wavelength conversion element 100. Thereby, the light source device 101 can have the same effect as the wavelength conversion element 100.
- the light emitting device 1 emits laser light. Therefore, since laser light with high directivity is incident on the wavelength conversion element 100, the sensitivity of the light receiving unit 6 with respect to a minute change in the state of the wavelength conversion member 4 can be improved.
- Modification 1 of Embodiment 1 Next, a wavelength conversion element according to Modification 1 of Embodiment 1 will be described.
- the wavelength conversion element according to this modification is different from the wavelength conversion element 100 according to Embodiment 1 in that an optical filter is provided between the wavelength conversion member 4 and the substrate 5.
- an optical filter is provided between the wavelength conversion member 4 and the substrate 5.
- FIG. 5 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 100a according to this modification.
- the wavelength conversion element 100 a includes an optical filter that is disposed between the wavelength conversion member 4 and the base 5 and reflects light emitted from the wavelength conversion member 4.
- the optical filter 40 is, for example, a metal film such as a silver alloy, a dielectric multilayer film, or a film that combines both of them. With this configuration, the optical filter 40 whose reflectance can be freely designed can be easily formed between the wavelength conversion member 4 and the substrate 5.
- the optical filter 40 reflects light having at least one wavelength of the emitted light 11 and the wavelength-converted light (fluorescence) emitted from the wavelength conversion member 4. Thereby, out of the light emitted from the wavelength conversion member 4, the light propagating toward the base 5 is efficiently emitted to the outside of the wavelength conversion element 100 a, and the light incident from the wavelength conversion member 4 to the light receiving unit 6 is necessary. Can be minimized.
- the optical filter 40 is designed to reflect 95% of the light having the wavelength of the emitted light 11 and the light having the wavelength converted from the wavelength-converted light emitted from the wavelength conversion member 4. At this time, only 5% of the light traveling from the wavelength conversion member 4 to the light receiving unit 6 can be transmitted through the optical filter 40 and input to the light receiving unit 6. At this time, by adjusting the thickness and the dopant amount of the first semiconductor 22 and the second semiconductor 23 that form the light receiving portion, it is possible to arrange the light receiving portion 6 having sufficient sensitivity even with a small amount of light.
- the reflectivity of the optical filter 40 is an example, and it is preferable that the optical filter 40 is designed to reflect light at a high reflectivity, for example, a ratio of 80% to 99.9%. With this configuration, it is possible to increase the luminous flux of the light emitted from the wavelength conversion element 100a and to allow the predetermined outgoing light to enter the light receiving unit 6 and detect a minute change in the state of the wavelength conversion member 4.
- the base 5 forms the first semiconductor 22 that is an n-type silicon region by implanting an n-dopant into the substrate 21 that is a p-type silicon substrate, for example. Then, a third semiconductor 24 that is an n + region implanted with a high concentration n dopant is formed, and a second semiconductor 23 that is a p layer implanted with a p-type dopant is formed. The first electrode 32 is electrically connected to the third semiconductor 24. A protective film 35 is formed on the surface of the second semiconductor 23, and the second semiconductor 23 is electrically connected to the second electrode 33.
- the base 5 is wired to the outside by metal wires 36 and 37 from the first electrode 32 and the second electrode 33 formed on the main surface on the side where the wavelength conversion member 4 is disposed.
- wiring can be performed only on one main surface of the substrate 5, wiring can be easily performed by wire bonding or the like.
- the optical filter 40 may be configured by applying and curing a mixture of white fine particles, for example, TiO 2 fine particles of 1 ⁇ m or less with a transparent binder such as silicone.
- FIG. 6 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 100b according to this modification.
- the base 5 is fixed to the package 50 by the adhesive layer 45.
- the first terminal 55, the second terminal 56, and the third terminal 57 are embedded in the insulating member 52.
- the insulating member 52 is made of plastic, for example.
- the 1st terminal 55, the 2nd terminal 56, and the 3rd terminal 57 are the terminals by which the copper surface was plated, for example.
- the first terminal 55 and the second terminal 56 are used for wiring with the outside of the package.
- the first electrode 32 provided on the substrate 5 and the first terminal 55 are connected by a metal wire 36.
- the second electrode 33 provided on the base 5 and the second terminal 56 are connected by a metal wire 37.
- the wavelength conversion element 100 according to the present modification can be easily handled when the light source device 101 is manufactured.
- the wavelength conversion element according to the present embodiment is different from the wavelength conversion element 100 according to the first embodiment in that it includes a plurality of light receiving units.
- the wavelength conversion element and the light source device according to the present embodiment will be described focusing on differences from the wavelength conversion element 100 and the light source device 101 according to Embodiment 1.
- FIG. 7 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 200 according to the present embodiment.
- FIG. 8 is a perspective view showing an appearance of the wavelength conversion element 200 according to the present embodiment.
- positioned is shown.
- 7 is a cross-sectional view corresponding to the VII-VII cross section of FIG.
- the wavelength conversion element 200 has a plurality of light receiving portions 6a to 6e, and the wavelength conversion member 4 is disposed above the plurality of light receiving portions 6a to 6e.
- the wavelength conversion element 200 includes five light receiving portions 6a to 6e.
- the wavelength conversion element 200 includes a total of 15 light receiving portions in the vicinity of the central portion of the substrate 5, 5 rows in the horizontal direction and 3 rows in the vertical direction. Then, 18 electrodes are formed on the periphery of the base 5 so as to surround the light receiving portion. At this time, of the 18 electrodes, 3 are common cathode electrodes for the three rows of light receiving portions in the vertical direction, and the remaining 15 are the anode electrodes of the 15 light receiving portions.
- the plurality of light receiving portions 6a to 6e are formed, for example, by injecting a p-type dopant into the first semiconductor 22 made of n-type silicon for each region where the second semiconductors 23a to 23e and the like are formed.
- the optical filter 40 is formed between the wavelength conversion member 4 and the substrate 5, as in the first modification of the first embodiment.
- the optical filter 40 also has an effect of flattening the surface on the substrate 5 on which the wavelength conversion member 4 is disposed.
- the optical filter 40 is composed of, for example, a metal film such as a silver alloy, a dielectric multilayer film, a film formed by mixing white fine particles with a transparent binder, or a film obtained by combining a plurality of them.
- FIG. 9 is a schematic cross-sectional view showing the configuration of the light source device 201 according to the present embodiment.
- the light source device 201 includes a wavelength conversion element 200 and the light emitting device 1.
- the wavelength conversion element 200 and the light emitting device 1 are held by a holding member (not shown).
- the light source device 201 further includes a condensing optical system 3, an external connection means 80, a first wiring board 71, and a second wiring board 72.
- the lead pins 13 a and 13 b of the light emitting device 1 are connected to the first wiring board 71.
- the first wiring board 71 is, for example, a printed circuit board in which wiring is formed of copper foil or the like on a base board such as plastic.
- external connection means 80 which is a connector is mounted.
- the condensing optical system 3 is configured by a combination of a convex lens 3a and a concave reflecting surface 3b, and condenses the emitted light 11 on the wavelength conversion element 200.
- the first terminal 55 and the second terminal 56 of the wavelength conversion element 200 are connected to the second wiring board 72.
- the second wiring board 72 is, for example, a flexible printed circuit board in which wiring is formed with a copper foil or the like on a base film such as polyimide.
- the second wiring board 72 is electrically connected to the first wiring board 71.
- the light source device 201 condenses the emitted light 11 emitted from the light emitting device 1 by the condensing optical system 3 and irradiates the wavelength conversion member 4 of the wavelength conversion element 200.
- the wavelength conversion member 4 irradiated with the emitted light 11 emits emitted light 90 that is white light.
- the light incident on each of the plurality of light receiving units generates electron-hole pairs by photoelectric conversion. Electrons and holes generated in each of the plurality of light receiving units are sent to the outside from the package 50 via the second wiring board 72 and the external connection means 80, respectively.
- the state of the wavelength conversion member 4 can be detected based on signals from a plurality of light receiving units.
- the light source device according to the present embodiment is different from the light source device 201 according to the second embodiment in that an optical system that varies the optical path of the light emitted from the light emitting device 1 is provided.
- the light source device according to the present embodiment will be described focusing on differences from the light source device 201 according to the second embodiment.
- FIG. 10 is a schematic cross-sectional view showing the configuration of the light source device 301 according to the present embodiment.
- the light source device 301 includes an optical system that varies the optical path of the emitted light 11 from the light emitting device 1.
- the emitted light 11 from the light emitting device 1 can be irradiated to a desired position of the wavelength conversion member 4.
- the emitted light having a predetermined light distribution pattern can be emitted from the light source device 301.
- the condensing optical system 3 includes a convex lens 3a and a movable reflective surface 3b.
- the wavelength conversion element 200 includes a base body 5 and a wavelength conversion member 4 in a package 50.
- the wavelength conversion element 200 is mounted on the second wiring board 72.
- the wavelength conversion element 200 is connected to an external circuit through the external wiring 83 by the external connection means 82.
- the reflecting surface 3b is connected to the driving unit 538 via the shaft 527.
- the driving unit 538 is connected to the external wiring 84, and power is supplied to the driving unit 538 from the outside. With this electric power, the reflecting surface 3b is driven using electrostatic force, magnetic force or the like.
- the emitted light 11 can be applied to a predetermined position of the wavelength conversion member 4. Further, the irradiation position of the emitted light 11 can be scanned.
- the reflecting surface 3b when the reflecting surface 3b is at the position 3b1, the emitted light 11 is reflected as the emitted light 54a and irradiated to the position 351 of the wavelength conversion member 4.
- the emitted light 11 is reflected as the emitted light 54b when it is at the position 3b2 of the reflecting surface 3b, and is irradiated to the position 352 of the wavelength conversion member 4.
- the position of the emitted light 11 on the wavelength conversion member 4 can also be detected by the plurality of light receiving portions of the wavelength conversion element 200.
- the position of the emitted light 11 on the wavelength conversion member 4 is at the position 351, the amount of light received by the light receiving unit immediately below the position 351 increases, and thus the photocurrent output from the light receiving unit increases.
- circuit configuration Next, a circuit configuration of a control unit that operates the light source device 301 according to the present embodiment will be described with reference to the drawings.
- FIG. 11 is a schematic circuit block diagram of the light source device 301 and the control unit 140 for driving the light source device 301 according to the present embodiment.
- the light source device 301 includes the semiconductor light emitting device 10, photodetectors 20 a to 20 e, external connection means 80 and 82, and a drive unit 538.
- the photodetectors 20a to 20e are photodiodes each including the light receiving portions 6a to 6e, the first electrode 32, and the second electrode 33.
- the photodetectors 20a to 20e are photodiodes each including the light receiving portions 6a to 6e, the first electrode 32, and the second electrode 33.
- FIG. 11 for simplification, only five photodetectors 20a to 20e are shown among all the photodetectors.
- External connection means 80 and 82 of the light source device 301 are connected to the control unit 140 through external wirings 81 and 83, respectively.
- the drive unit 538 is connected to the control unit 140 through the external wiring 84.
- control unit 140 includes a microcontroller 141, a first step-down converter 142, a second step-down converter 143, a resistance element 132, and an A / D converter 144. , I / O port 148 and sense resistor 146. Control unit 140 according to the present embodiment further includes drive circuit 145.
- the drive circuit 145 is a circuit for operating the drive unit 538, and operates the drive unit 538 based on a control signal from the microcontroller 141.
- control unit 140 can control the operations of the semiconductor light emitting element 10 and the drive unit 538 of the light source device 301.
- FIG. 12 is a flowchart showing a control algorithm in the light source device 301 and the control unit 140 according to the present embodiment.
- FIG. 13 is a graph showing an example of the time dependency of the drive signal input to the light source device 301 according to the present embodiment.
- a graph (a) in FIG. 13 is a graph showing the time dependency of the voltage applied from the drive circuit 145 to the drive unit 538.
- the graph (b) in FIG. 13 is a graph showing the time dependency of the current supplied from the first step-down converter 142 to the semiconductor light emitting element 10.
- the light source device 301 As an application example of the light source device 301 according to this embodiment, an example in which the light source device 301 is used as a headlamp for a vehicle such as an automobile will be described. First, for example, the operation of the light source device 301 is prepared by starting the engine of the vehicle. As a result, power is supplied from the power supply unit 160 to the control unit 140, and the power supply voltage Vcc is generated by the second step-down converter 143.
- an instruction signal indicating a predetermined light projecting pattern is sent from the external circuit 150 to the microcontroller 141.
- the microcontroller 141 calculates the instruction signal and outputs a control signal for controlling the drive circuit 145 to the drive circuit 145. Thereby, the drive part 538 which drives the reflective surface 3b is operated.
- a periodic voltage signal such as a sine wave as shown in the graph (a) of FIG. 13 is applied to the drive unit 538, for example.
- a voltage from ⁇ G ACT to + G ACT is applied to the drive unit 538 at a predetermined period (2T ACT ).
- the irradiation position of the emitted light 11 from the semiconductor light emitting element 10 to the wavelength conversion member 4 is from the predetermined peripheral portion of the wavelength conversion member 4 to the central portion and from the central portion to other peripheral portions. Moving from the other peripheral part to the central part and from the central part to the predetermined peripheral part.
- the emitted light 11 is irradiated to the peripheral region of the wavelength conversion member 4 when the voltage applied to the drive unit 538 takes an extreme value.
- the drive unit 538 is described as performing a one-dimensional operation (linear operation), but this is not restrictive.
- An actuator that performs a two-dimensional operation may be used as the driving unit 538.
- the microcontroller 141 operates the first step-down converter 142, and a predetermined current Iop (t) from the first step-down converter 142 passes through the external wiring 81 and the semiconductor light emitting element 10 of the light emitting device 1.
- the current Iop (t) is a pulsed current having a peak value G LD .
- the current Iop (t) is modulated with the same cycle (2T LD ) as the cycle of the voltage applied to the drive unit 538 (2T ACT ). That is, the current Iop (t) is synchronized with the voltage applied to the drive unit 538.
- the light source device 301 and the control unit 140 receive a signal from the wavelength conversion element 200 based on the algorithm illustrated in FIG. 12, calculate the signal, and feed back to the drive unit 538.
- the irradiation position of the emitted light 11 on the wavelength conversion member 4 can be accurately controlled.
- the algorithm shown in FIG. 12 will be described.
- a light distribution pattern is input from the external circuit 150 to the control unit 140 (S10).
- the light distribution pattern is information indicating a relationship between a position (light emission position) where the emitted light 11 is irradiated on the wavelength conversion member 4 and a light emission intensity at the position.
- the light emission intensity is a parameter corresponding to the intensity of the emitted light 11, that is, the amount of current supplied to the semiconductor light emitting element 10.
- control unit 140 operates the driving unit 538 (S12).
- control unit 140 causes a laser operation by supplying current to the semiconductor light emitting element 10 (S14). That is, the control unit 140 causes the semiconductor light emitting element 10 to emit light.
- control unit 140 processes the signals from the plurality of photodetectors of the wavelength conversion element 200, thereby obtaining the position of each of the plurality of photodetectors and the signal intensity output from each photodetector. Information indicating the relationship is obtained (S16).
- the validity of the signals from the plurality of photodetectors is determined based on the information obtained in step S16 (S18). That is, it is determined whether signals obtained from a plurality of photodetectors correspond to the light distribution pattern input to the control unit 140.
- the control unit 140 proceeds to control based on the next light distribution pattern (S40).
- the control unit 140 determines whether there is a deviation in the emission intensity (S20).
- control unit 140 determines that the emission intensity has a deviation (YES in S20)
- the control unit 140 corrects the gain value corresponding to the current supplied to the semiconductor light emitting element 10 according to the deviation (S22). Return to step S14.
- the controller 140 determines whether there is a deviation in the light emission position (S24).
- the controller 140 determines that it cannot be corrected, displays an error, and stops the operation (S42). .
- control unit 140 determines whether there is a deviation in the light emission timing (S26).
- the controller 140 determines that there is a deviation in the light emission timing (YES in S26), the controller 140 corrects the waveform of the current supplied to the semiconductor light emitting element 10 in the time axis direction (S28), and proceeds to step S14. Return. On the other hand, if the controller 140 does not determine that there is a deviation in the light emission timing (NO in S26), the controller 140 determines whether there is a deviation in the scanning by the drive unit 538 (S30).
- control unit 140 determines that there is a shift in scanning by the drive unit 538 (YES in S30)
- the control unit 140 corrects the gain value corresponding to the voltage applied to the drive unit 538 (S32), and step S12.
- the control unit 140 determines that the state cannot be corrected, displays an error, and stops the operation ( S44).
- the concave reflection surface 3b is actively driven by the drive unit 538, and the irradiation position of the emitted light 11 on the wavelength conversion member 4 is changed, thereby changing the irradiation position of the emitted light from the light source device 301. Can be changed.
- the irradiation position (light emission position) of the emitted light 11 to the wavelength conversion member 4 can be accurately grasped in a plurality of photodetectors, the position of the emitted light from the light source device 301 can be accurately controlled. it can.
- FIG. 14 is a perspective view schematically showing a part of the light source device 301a according to this modification, and in particular, an embodiment of the reflecting surface 3b and the shaft 527 will be described in more detail.
- a light projecting member 120 which is an aspherical convex lens having a high numerical aperture, is disposed on the optical path of emitted light from the wavelength conversion member 4 of the wavelength conversion element 200, for example. Yes.
- the reflecting surface 3b can be inclined in two directions (that is, two directions perpendicular to each other) in the x and y directions. More specifically, the reflecting surface 3b and the shaft 527 are formed by using a micro electrical mechanical system technology.
- the minute movable reflecting surface 3b is configured by being held hollow on a substrate such as a silicon substrate by an axis 527X that is an axis in the x direction and an axis 527Y that is an axis in the y direction.
- the reflecting surface 3b can be slightly rotated about the axis 527Y, and the emitted light 11 can be scanned in the x direction.
- the reflecting surface 3b is slightly rotated about the axis 527X, the emitted light 11 can be scanned in the y direction.
- the semiconductor light emitting element 10 is supplied with the current shown in the graph (b) of FIG.
- a driving voltage shown in the graph (a) of FIG. 13 is applied from the control unit 140 to the voltage converted into the rotational force of the shaft 527Y of the driving unit 538 of the reflecting surface 3b.
- an outgoing light pattern 112 is formed on the wavelength conversion member 4, and outgoing light 90 having a pattern corresponding to the pattern is emitted.
- the emitted light 90 is incident on the light projecting member 120 with the light distribution pattern 111. Then, the light projecting member 120 can irradiate the irradiated light with the light projecting pattern 110 to a place away from the light source device 301.
- the light projection pattern 110 can be adjusted to a desired pattern and brightness by controlling the drive circuit 145 and the first step-down converter 142 of the control unit 140 by the microcontroller 141.
- FIG. 15 is a schematic diagram showing an application example of the light source device 301a according to the present modification.
- a vehicle 99 is equipped with a light source device 301 according to this modification as a traveling headlamp.
- a traveling headlamp On night highways and the like, it is preferable in terms of safety to illuminate as far as possible using a traveling headlamp.
- the driving headlight that illuminates a distant place is turned on when passing the oncoming vehicle 199, the driver of the oncoming vehicle 199 is dazzling and takes the driver's view. For this reason, when passing the oncoming vehicle 199, generally, the traveling headlamp is turned off and only the passing headlamp is turned on.
- the position information of the oncoming vehicle 199 is detected by a sensor or the like (not shown), and based on that information, the light projection pattern 110 as shown in FIG. A lamp can be irradiated.
- the light source device 301a may be arranged behind the vehicle 99 and projected with a pattern such as a light projection pattern 210 shown in FIG. Thereby, information can be presented to the vehicle traveling behind the vehicle 99.
- the wavelength conversion member 4 for example, a phosphor having a peak wavelength of 615 nm is used, and the wavelength component of the emitted light 11 emitted from the light source device 301 a is suppressed, thereby being used as a tail lamp of the vehicle 99. It can also be used.
- FIG. 16 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 300a according to this modification.
- the plurality of light receiving portions 6 a and 6 b are arranged at the periphery of the wavelength conversion member 4 in a plan view of the surface of the substrate 5 on which the wavelength conversion member 4 is disposed. It is arranged in the part.
- the amount of inclination of the movable reflective surface 3b can be adjusted by adjusting the extreme value of the voltage applied to the drive unit that drives the reflective surface 3b.
- the light receiving portions 6a and 6b are arranged at the end of the region to be scanned of the wavelength conversion member 4.
- the scanning position of the emitted light 11 is calculated using the light receiving parts 6 a and 6 b at the periphery of the wavelength conversion member 4. For example, when the amount of inclination of the reflecting surface 3b is insufficient, the photocurrent decreases in at least a part of the plurality of light receiving parts 6a and 6b. As described above, the scanning position of the emitted light 11 can be detected by the plurality of light receiving portions 6 a and 6 b arranged on the periphery of the wavelength conversion member 4.
- the wavelength conversion element according to this modification it is possible to reduce the area of the light receiving part as compared with the case where the light receiving part is provided in the entire area facing the wavelength conversion member 4 of the base 5. That is, in the wavelength conversion element according to this modification, the position of the light from the light emitting device 1 to the wavelength conversion member 4 can be detected, and the area of the light receiving unit can be reduced.
- FIG. 17 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 300b according to this modification.
- the plurality of light receiving portions 6 a and 6 b have the wavelength conversion member 4 of the base 5 in a plan view of the surface on which the wavelength conversion member 4 is disposed. It is arranged around. That is, the plurality of light receiving portions 6 a and 6 b are arranged outside the wavelength conversion member 4 and in the vicinity of the wavelength conversion member 4 in a plan view of the surface.
- the wavelength conversion element 300b according to this modification has the same effects as the wavelength conversion element 300a according to modification 2 according to the third embodiment. Furthermore, according to the wavelength conversion element 300b according to the present modification, the light receiving portions 6a and 6b are arranged around the wavelength conversion member 4 so that the lower part of the wavelength conversion member 4 (that is, between the wavelength conversion member 4 and the substrate 5). The degree of freedom in designing the structure of the reflective film can be improved. For example, in the wavelength conversion element 300b according to this modification, there is no light receiving portion immediately below the wavelength conversion member 4, and therefore an optical filter 40 having a reflectance of approximately 100% is selectively disposed below the wavelength conversion member. Also good.
- the wavelength conversion element according to the present embodiment is different from the wavelength conversion element 200 according to Embodiment 3 in that the wavelength conversion member includes a plurality of wavelength conversion regions.
- the wavelength conversion element and the light source device according to the present embodiment will be described with reference to the drawings with a focus on differences from the third embodiment.
- FIG. 18 is a schematic cross-sectional view showing the configuration of the light source device 301c according to the present embodiment.
- FIG. 19 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 300c according to the present embodiment.
- the same optical system as that of the third embodiment is fixed to the support member 320.
- the support member 320 has a heat radiating surface 320b on one surface, and the light emitting device 1 and the wavelength conversion element 300c are fixed to the opposite surface.
- the condensing optical system 3 includes a convex lens 3a and a movable reflective surface 3b.
- the convex lens 3 a is fixed to the package of the light emitting device 1.
- the light-emitting device 1 is mounted with a semiconductor light-emitting element 10 having an optical waveguide 10 a in a package and sealed with a metal can 15. At this time, the convex lens 3a is fixed to the opening of the can 15 with a low melting point glass or the like.
- the reflective surface 3b is, for example, a micro electrical mechanical system, and is connected to the drive unit 538 via a shaft 527.
- the driving unit 538 is connected to the external wiring 84, and power is supplied to the driving unit 538 from the outside. With this electric power, the reflecting surface 3b is moved by an electrostatic force, a magnetic force, or the like.
- the driving unit 538 is held by the holding unit 324 and is fixed after positioning with respect to the support member 320.
- the wavelength conversion element 300 c includes the base 5 and the wavelength conversion member 4 in the package 50.
- the wavelength conversion element 300 c is mounted on the second wiring board 72 and is electrically connected to the first wiring board 71.
- a plurality of light receiving portions 6a to 6e are formed on the base 5 of the wavelength conversion element 300c.
- the wavelength conversion member 4 is divided into a plurality of wavelength conversion regions 4a to 4e, which are arranged so as to correspond to the plurality of light receiving portions 6a to 6e, respectively.
- a blocking member 204 having a low light transmittance is disposed between adjacent wavelength conversion regions.
- the blocking member 204 is made of, for example, a silicone resin mixed with titania particles.
- the emitted light 11 can be irradiated to a predetermined position of the wavelength conversion member 4, and the irradiation position can be changed.
- the reflecting surface 3 b when the reflecting surface 3 b is at the position 3 b 1, the emitted light 11 is reflected as the emitted light 51 a by the reflecting surface 3 b and is irradiated to the position 351 of the wavelength conversion member 4.
- the reflecting surface 3 b is at the position 3 b 2, the emitted light 11 is reflected as the emitted light 51 b by the reflecting surface 3 b and irradiated to the position 352 of the wavelength conversion member 4.
- each light receiving unit is a wavelength conversion region arranged above the other light receiving unit adjacent to the light receiving unit. It is difficult to receive outgoing light.
- the information of the emitted light irradiated on the wavelength conversion member 4 can be accurately received for each wavelength conversion region.
- a wavelength conversion member having a plurality of light emitting regions can be easily configured.
- the wavelength conversion element according to the present embodiment is different from the wavelength conversion element 100 according to the first embodiment in that the light receiving unit is provided outside the base.
- FIG. 20 is a schematic cross-sectional view showing the configuration of the wavelength conversion element 400 according to the present embodiment.
- the wavelength conversion element 400 includes a base 5, a plate-like or film-like wavelength conversion member 4 disposed on at least a part of the surface of the base 5, and the base 5. And a light receiving unit 6 including a pn junction composed of a first semiconductor 22 and a second semiconductor 23.
- the light receiving unit 6 is not disposed inside the base 5 or between the base 5 and the wavelength conversion member 4, and the base 5 is optically connected to the wavelength conversion member 4. 5a.
- the light receiving unit 6 is disposed on the surface of the substrate 5 on which the wavelength conversion member 4 is disposed, is optically connected to the optical waveguide 5 a, and is disposed in the vicinity of the wavelength conversion member 4.
- the wavelength conversion element 400 further includes first electrodes 32a to 32c, second electrodes 33a to 33c, a protective film 35, an optical filter 40, and a reflective film 432.
- the base 5 may not include the first semiconductor and the second semiconductor.
- the base 5 includes an optical waveguide 5a that propagates light from the wavelength conversion member 4 to the light receiving portion or the vicinity of the light receiving portion without passing through a space. That is, the light from the wavelength conversion member 4 is incident on the inside of the base body 5 without passing through the space and propagates.
- the base 5 preferably suppresses the temperature increase of the wavelength conversion member 4 by transferring and diffusing the heat generated by the wavelength conversion member 4. Therefore, the base 5 is preferably composed of a transparent substrate such as sapphire having high transmittance with respect to the wavelength of incident light and high thermal conductivity.
- the transparent substrate is radiated from the wavelength conversion member 4, enters the transparent substrate without passing through a space, and is sandwiched between the optical filter 40 and the reflective film 432 that reflect part or all of the wavelength of light propagating through the transparent substrate.
- the optical waveguide 5a is formed.
- the optical filter 40 is a film formed on the surface of the substrate 5 on which the wavelength conversion member 4 is disposed. Accordingly, the light traveling from the wavelength conversion member 4 toward the base 5 passes through the optical filter 40 and enters the base.
- the optical filter 40 includes, for example, the same material and configuration as the optical filter 40 according to the first modification of the first embodiment. In other words, the optical filter 40 is designed so that it slightly transmits from the wavelength conversion member 4 to the base 5 and the light from the inside of the base toward the optical filter 40 is reflected with a high reflectance. In order to make light easily propagate from the wavelength conversion member 4 to the light receiving unit 6 in the optical filter 40, pattern formation may be performed in addition to the adjustment of the refractive index and the film thickness. Further, the optical filter 40 may have a configuration in which the reflectance increases as the incident angle to the surface increases in order to facilitate light propagation.
- the reflective film 432 is a film that reflects light incident on the base 5.
- the reflective film 432 is, for example, a metal film such as a silver alloy, a dielectric multilayer film, or a film that combines both.
- the first electrode 32 c and the second electrode 33 c are electrodes arranged at positions different from the arrangement position of the wavelength conversion member 4 on the protective film 35 of the base 5.
- the first electrode 32c and the second electrode 33c are arranged so as not to contact each other.
- the first electrode 32c and the second electrode 33c are made of the same material as the first electrode 32 and the second electrode 33 according to Embodiment 1, respectively.
- the first semiconductor 22, the second semiconductor 23, and the light receiving unit 6 are disposed on the surface of the base 5 at positions corresponding to the first electrode 32c and the second electrode 33c. That is, the first semiconductor 22, the second semiconductor 23, and the light receiving unit 6 are disposed on the surface of the base 5 on which the wavelength conversion member 4 is disposed, and are disposed at positions different from the position where the wavelength conversion member 4 is disposed. It is optically connected to the optical waveguide 5 a arranged at the arrangement position of the wavelength conversion member 4.
- the second semiconductor 23 is formed on the surface of the first semiconductor 22 on the base 5 side.
- the light receiving unit 6 includes a pn junction including the first semiconductor 22 and the second semiconductor 23.
- the protective film 35 is a protective film formed on the surface of the first semiconductor 22 and the second semiconductor 23 on the base 5 side.
- the protective film 35 has the same configuration as the protective film 35 according to the first embodiment.
- the first electrode 32a and the second electrode 33a are disposed on the base 5 side of the first semiconductor 22 and the second semiconductor 23, respectively, and are electrically connected to the first semiconductor 22 and the second semiconductor 23, respectively.
- the first electrode 32a and the second electrode 33a are made of a metal such as nickel, aluminum, titanium, platinum, or gold, for example.
- the first electrode 32b is a conductive member that electrically connects the first electrode 32a and the first electrode 32c.
- the second electrode 33b is a conductive member that electrically connects the second electrode 33a and the second electrode 33c.
- the first electrode 32b and the second electrode 33b are made of, for example, solder.
- the wavelength conversion element 400 Since the wavelength conversion element 400 according to the present embodiment has the above-described configuration, a part of the emitted light emitted from the wavelength conversion member 4 is formed on the base 5 as indicated by arrows in FIG.
- the light enters the optical waveguide 5 a disposed immediately below the wavelength conversion member 4, and is reflected by the optical filter 40 and the reflection film 432.
- the light receiving unit 6 receives at least a part of the light incident on the optical waveguide 5 a of the base 5.
- the optical waveguide 5a is provided on the base 5 on which the wavelength conversion member 4 is arranged, the light receiving unit 6 including the pn junction is integrated, and further the wavelength conversion is performed.
- the member 4, the optical waveguide 5a, and the light receiving unit 6 are optically connected.
- the light receiving unit 6 can detect the light emitted from the wavelength conversion member 4 substantially in the vicinity of the wavelength conversion member 4. Therefore, the light receiving unit 6 can accurately detect a minute change in the wavelength conversion member 4.
- the light receiving unit 6 can detect the light emitted from the wavelength conversion member 4 toward the base 5 without being scattered by the wavelength conversion member. Therefore, a minute change of the wavelength conversion member 4 can be accurately detected.
- the thickness of the wavelength conversion member 4 in the direction perpendicular to the main surface of the base 5 is smaller than the maximum width in the direction parallel to the main surface of the wavelength conversion member 4, the light receiving unit 6 Of the light generated by the wavelength conversion member 4, light having a short propagation distance inside the wavelength conversion member 4 can be detected. Such light intensity is sensitive to minute changes in the wavelength conversion member 4. Therefore, the state of the wavelength conversion member 4 can be detected more accurately by the light receiving unit 6.
- the light receiving unit 6 since the light receiving unit 6 is disposed on the surface of the base 5 using the optical waveguide 5a provided in the base 5, the light receiving unit 6 of the wavelength conversion element 400 can be arranged more freely. Can be set. For this reason, a minute change of the wavelength conversion member 4 can be accurately detected.
- the wavelength conversion element 400 according to this embodiment can accurately detect a minute change of the wavelength conversion member 4.
- the member in order to increase the amount of light incident on the light receiving unit 6 out of the light incident on the base 5, the member is disposed between the light receiving unit 6 and the base 5 and reflects or absorbs light. You may reduce the member to do.
- a region where the reflecting first electrode and the second electrode are not disposed may be provided in the region where the light receiving unit 6 is disposed.
- a region where the optical filter 40 is not disposed may be provided in a region where the light receiving unit 6 is disposed.
- the light receiving unit 6 has been described with respect to the structure disposed on the surface of the base 5 on the same side as the wavelength conversion member 4, but this is not limiting, and the base 5 on the opposite side to the wavelength conversion member 4. The same effect can be realized even if it is arranged in contact with the surface.
- the light receiving unit 6 may be disposed between the wavelength conversion member 4 and the base 5.
- the film-shaped light receiving unit 6 may be disposed between the wavelength conversion member 4 and the base 5.
- the present disclosure can be applied to a wavelength conversion element and a light source device used in a display field such as a projection display device or a lighting field such as vehicle illumination, industrial illumination, and medical illumination.
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Abstract
Description
以下、実施の形態1における光源装置について、図1及び図2を参照しながら説明する。
まず、本実施の形態に係る光源装置101及び波長変換素子100の基本構成について説明する。なお、以下に説明する基本構成は、以下の各実施の形態に共通であるため、以下の各実施の形態の説明においては、以下の基本構成に関する説明を省略する。
続いて、本実施の形態に係る波長変換素子100及び光源装置101の詳細構成について説明する。
波長変換素子100は、基体5と、基体5の表面の少なくとも一部に配置された板状又は膜状の波長変換部材4と、基体5に集積され、p型半導体及びn型半導体で構成されるp-nジャンクションを含む受光部6とを備える。
図1に示すように、光源装置101は、波長変換素子100と、発光装置1とを備える。波長変換素子100及び発光装置1は、図示しない保持部材に保持される。
<動作の概要>
次に、本実施の形態に係る波長変換素子100の動作の概要について図面を参照しながら説明する。
続いて、本実施の形態に係る光源装置101を動作させる制御部の回路構成について、図面を参照しながら説明する。
続いて、本実施の形態に係る光源装置101及び制御部140の動作の詳細について図4などを参照しながら説明する。
続いて、本実施の形態に係る光源装置101から、正常な出射光90が出力されない不良モードにおける光源装置101の動作について説明する。
以上のように、本実施の形態に係る波長変換素子100においては、波長変換部材4が配置された基体5に、p-nジャンクションを含む受光部6が集積されている。これにより、受光部6は、波長変換部材4から出射される光を、波長変換部材4の近傍で検出することができる。したがって、受光部6は波長変換部材4の微小な変化を正確に検出することができる。
次に、実施の形態1の変形例1に係る波長変換素子について説明する。本変形例に係る波長変換素子においては、波長変換部材4と基体5との間に光学フィルタを備える点において、実施の形態1に係る波長変換素子100と相違する。以下、本変形例に係る波長変換素子と、実施の形態1に係る波長変換素子100との相違点を中心に図面を参照しながら説明する。
次に、実施の形態1の変形例2に係る波長変換素子について説明する。本変形例に係る波長変換素子は、パッケージングされている点において、実施の形態1に係る波長変換素子100と相違する。以下、本変形例に係る波長変換素子について、実施の形態1に係る波長変換素子100との相違点を中心に図面を参照しながら説明する。
次に、実施の形態2に係る波長変換素子及び光源装置について説明する。本実施の形態に係る波長変換素子は、複数の受光部を備える点において、実施の形態1に係る波長変換素子100と相違する。以下、本実施の形態に係る波長変換素子及び光源装置について、実施の形態1に係る波長変換素子100及び光源装置101との相違点を中心に説明する。
まず、本実施の形態に係る波長変換素子について図面を参照しながら説明する。
続いて、本実施の形態に係る光源装置について図面を参照しながら説明する。
続いて、本実施の形態に係る光源装置201の動作について説明する。
次に、実施の形態3に係る光源装置について説明する。本実施の形態に係る光源装置は、発光装置1からの出射された光の光路を変動させる光学系を備える点において、実施の形態2の形態に係る光源装置201と相違する。以下、本実施の形態に係る光源装置について、実施の形態2に係る光源装置201との相違点を中心に説明する。
まず、本実施の形態に係る光源装置の構成について図面を参照しながら説明する。
続いて、本実施の形態に係る光源装置301を動作させる制御部の回路構成について、図面を参照しながら説明する。
次に、本実施の形態に係る光源装置301及び制御部140の動作について図面を参照しながら説明する。
次に、実施の形態3の変形例1に係る光源装置について図面を用いて説明する。本変形例の光源装置は図10に示す光源装置301の構成とほぼ同じである。
次に、実施の形態3の変形例2に係る波長変換素子について、図面を参照しながら説明する。
次に、実施の形態3の変形例3に係る波長変換素子について図面を参照しながら説明する。
次に、実施の形態4に係る波長変換素子及びそれを備える光源装置について説明する。本実施の形態に係る波長変換素子は、波長変換部材が複数の波長変換領域を備える点において、実施の形態3に係る波長変換素子200と相違する。以下、本実施の形態に係る波長変換素子及び光源装置について、実施の形態3との相違点を中心に図面を参照しながら説明する。
次に、実施の形態5に係る波長変換素子について説明する。本実施の形態に係る波長変換素子は、受光部が、基体の外部に設けられている点において、実施の形態1に係る波長変換素子100と相違する。以下の本実施の形態に係る波長変換素子について、実施の形態1に係る波長変換素子100との相違点を中心に図面を参照しながら説明する。
以上、本開示に係る波長変換素子及び光源装置について、実施の形態および変形例に基づいて説明したが、本開示は、上記の実施の形態および変形例に限定されるものではない。例えば、各実施の形態および変形例に対して当業者が思いつく各種変形を施して得られる形態や、本開示の趣旨を逸脱しない範囲で各実施の形態および変形例における構成要素および機能を任意に組み合わせることで実現される形態も本開示に含まれる。
3 集光光学系
3a 凸レンズ
3b 反射面
4 波長変換部材
4a、4b、4c、4d、4e 波長変換領域
4x 材料変質部
4y クラック
5 基体
6、6a、6b、6c、6d、6e 受光部
10 半導体発光素子
11、51a、51b、54a、54b、90、90b 出射光
20、20a、20b、20c、20d、20e 光検出器
21 基板
22 第1半導体
23、23a、23b、23c、23d、23e 第2半導体
24 第3半導体
32、32a、32b、32c 第1電極
33、33a、33b、33c 第2電極
35 保護膜
36、37 金属ワイヤ
40 光学フィルタ
55 第1端子
56 第2端子
57 第3端子
71 第1の配線基板
72 第2の配線基板
80、82 外部接続手段
81、83、84 外部配線
91 第1出射光
92 第2出射光
99 車両
100、100a、100b、200、300a、300b、300c、400 波長変換素子
101、101a、101b、201、301、301a、301c 光源装置
110、210 投光パターン
111 配光パターン
112 出射光パターン
115 中心線
120 投光部材
132 抵抗素子
140 制御部
142 第1の降圧コンバータ
143 第2の降圧コンバータ
144 A/Dコンバータ
145 駆動回路
146 センス抵抗
148 I/Oポート
150 外部回路
160 電源部
199 対向車
204 遮断部材
320 支持部材
320b 放熱面
324 保持部
432 反射膜
527 軸
538 駆動部
Claims (14)
- 基体と、
前記基体の表面の少なくとも一部に配置された板状又は膜状の波長変換部材と、
前記基体に集積され、p型半導体及びn型半導体で構成されるp-nジャンクションを含む受光部とを備える
波長変換素子。 - 前記受光部は、前記基体に入射する光を受光する
請求項1に記載の波長変換素子。 - 前記波長変換部材の前記表面に垂直な方向の厚みは、前記波長変換部材の前記表面に平行な方向の最大幅より小さい
請求項1又は2に記載の波長変換素子。 - 前記波長変換部材と前記基体との間に配置され、前記波長変換部材から出射される光を反射する光学フィルタをさらに備える
請求項1~3のいずれか1項に記載の波長変換素子。 - 前記光学フィルタは、金属膜又は誘電体多層膜を含む
請求項4に記載の波長変換素子。 - 前記p型半導体及び前記n型半導体は、不純物がドープされたシリコンである
請求項1~5のいずれか1項に記載の波長変換素子。 - 前記受光部は、前記基体の内部、又は、前記基体と前記波長変換部材との間に配置される
請求項1~6のいずれか1項に記載の波長変換素子。 - 前記基体は複数の前記受光部を備える
請求項1~7のいずれか1項に記載の波長変換素子。 - 前記受光部は、前記表面の平面視において、前記波長変換部材の周囲に配置される
請求項1~8のいずれか1項に記載の波長変換素子。 - 前記受光部は、前記表面の平面視において、前記波長変換部材の周縁に配置される
請求項1~8のいずれか1項に記載の波長変換素子。 - 前記波長変換部材は、複数の波長変換領域を備える
請求項1~10のいずれか1項に記載の波長変換素子。 - 請求項1~11のいずれか1項に記載の波長変換素子と、
前記波長変換素子に照射される光を出射する発光装置とを備える
光源装置。 - 前記発光装置は、レーザ光を出射する
請求項12に記載の光源装置。 - 前記発光装置から出射された光の光路を変動させる光学系をさらに備える
請求項12又は13に記載の光源装置。
Priority Applications (4)
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JP2017566570A JP6799828B2 (ja) | 2016-02-08 | 2017-01-20 | 光源装置 |
CN201780009281.9A CN108604609A (zh) | 2016-02-08 | 2017-01-20 | 波长变换元件以及光源装置 |
EP17750052.7A EP3416197A4 (en) | 2016-02-08 | 2017-01-20 | WAVE LENGTH CONVERTING ELEMENT AND LIGHT SOURCE DEVICE |
US16/054,688 US20180342629A1 (en) | 2016-02-08 | 2018-08-03 | Wavelength conversion element and light source device |
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JP2016-022198 | 2016-02-08 | ||
JP2016022198 | 2016-02-08 |
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US16/054,688 Continuation US20180342629A1 (en) | 2016-02-08 | 2018-08-03 | Wavelength conversion element and light source device |
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US (1) | US20180342629A1 (ja) |
EP (1) | EP3416197A4 (ja) |
JP (1) | JP6799828B2 (ja) |
CN (1) | CN108604609A (ja) |
WO (1) | WO2017138327A1 (ja) |
Cited By (3)
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CN109424916A (zh) * | 2017-09-05 | 2019-03-05 | 株式会社小糸制作所 | 灯具单元以及车辆用灯具 |
US20210119404A1 (en) * | 2017-11-09 | 2021-04-22 | Compact Laser Solutions Gmbh | Device for adjusting an optical component |
JP2022063342A (ja) * | 2017-12-25 | 2022-04-21 | 日亜化学工業株式会社 | 発光装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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DE102014217521A1 (de) * | 2014-09-02 | 2016-03-03 | Osram Gmbh | Beleuchtungsvorrichtung zur variablen Beleuchtung |
US10854646B2 (en) * | 2018-10-19 | 2020-12-01 | Attollo Engineering, LLC | PIN photodetector |
JP2021154949A (ja) * | 2020-03-27 | 2021-10-07 | 本田技研工業株式会社 | 車両におけるコミュニケーション支援装置 |
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- 2017-01-20 WO PCT/JP2017/001900 patent/WO2017138327A1/ja active Application Filing
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2018
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CN108604609A (zh) | 2018-09-28 |
JPWO2017138327A1 (ja) | 2018-11-29 |
EP3416197A1 (en) | 2018-12-19 |
EP3416197A4 (en) | 2019-06-12 |
JP6799828B2 (ja) | 2020-12-16 |
US20180342629A1 (en) | 2018-11-29 |
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