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WO2015156069A1 - Dispositif de mesure de quantité de fléchissement - Google Patents

Dispositif de mesure de quantité de fléchissement Download PDF

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Publication number
WO2015156069A1
WO2015156069A1 PCT/JP2015/056913 JP2015056913W WO2015156069A1 WO 2015156069 A1 WO2015156069 A1 WO 2015156069A1 JP 2015056913 W JP2015056913 W JP 2015056913W WO 2015156069 A1 WO2015156069 A1 WO 2015156069A1
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WO
WIPO (PCT)
Prior art keywords
sheet
elastic body
bending amount
capacitor
conductive elastic
Prior art date
Application number
PCT/JP2015/056913
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English (en)
Japanese (ja)
Inventor
哲也 辻上
健人 井ノ口
田中　守
林　義明
勇三 今堀
山口　和也
正光 小谷
Original Assignee
株式会社 イマック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 イマック filed Critical 株式会社 イマック
Publication of WO2015156069A1 publication Critical patent/WO2015156069A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

Definitions

  • the present invention relates to a bending amount measuring apparatus that measures the bending amount of an object that is bent and deformed in a human or animal body or machine.
  • bending amount measuring devices for measuring the bending amount (degree of bending) of an object to be bent and deformed.
  • a comparatively simple structure for example, in Patent Document 1, two piezoelectric films are attached in accordance with the amount of bending by closely attaching a sensor unit obtained by bonding two piezoelectric films to the surface of an object.
  • a bending amount measuring apparatus for measuring a bending amount by measuring an electromotive force generated during the period is disclosed.
  • the bending amount measuring device is an industrial-use device that measures the amount of bending by setting it to a joint part of a medical or exercise device or robot that measures the amount of bending of a part of a human or animal body such as an elbow or knee. Since it can be used for various devices such as devices, it is desirable that it be as simple as possible.
  • the present invention has been made in view of such reasons, and an object thereof is to provide a bending amount measuring apparatus having a simpler configuration.
  • a bending amount measuring apparatus uses first and second sheet-like elastic bodies as dielectrics, and first to first sandwiching these dielectrics in a sandwich shape. 3 as an electrode, the first capacitor, the second sheet-like conductive elastic body, and the second sheet-like conductive elastic body between the first sheet-like conductive elastic body and the second sheet-like conductive elastic body.
  • An AC voltage is applied to the first capacitor by applying an AC voltage to the sensor section formed by forming a second capacitor between the three sheet-like conductive elastic bodies and a terminal of the first sheet-like conductive elastic body.
  • the capacitance value of the second capacitor increases and the value of the alternating current flowing therethrough increases.
  • An alternating current flows through the terminal of the conductive elastomer, and a current obtained by combining the alternating current and the alternating current flowing through the first capacitor flows as an alternating current through the second capacitor.
  • both of the first and second sheet-like elastic bodies are not provided with a gap or a depression, or both of the first and second sheet-like elastic bodies are provided. Are provided with a number of voids or depressions.
  • the first and second sheet-like elastic bodies are made of the same material. More preferably, the first and second sheet-like elastic bodies have the same thickness.
  • the bending amount is obtained by adding the angles of both ends of the sensor unit.
  • a bending amount measuring device having a simpler configuration can be provided.
  • the bending amount measuring apparatus 1 includes a sensor unit 2 and an electric circuit unit 3.
  • the bending amount measuring apparatus 1 includes a sensor unit 2 incorporated in a supporter 4 and applied to an elbow or the like, and from an electric circuit unit 3 through electric wirings 51 to 53 in a cable 5. A signal is sent to the sensor unit 2 or from the sensor unit 2 to the electric circuit unit 3.
  • the sensor unit 2 includes a first sheet-like elastic body 23 having a first sheet-like elastic body 21 and a second sheet-like elastic body 22 as dielectrics and sandwiching the dielectric bodies 21 and 22 in a sandwich shape.
  • the second sheet-like conductive elastic body 24 and the third sheet-like conductive elastic body 25 are used as an electrode between the first sheet-like conductive elastic body 23 and the second sheet-like conductive elastic body 24.
  • a second capacitor C2 is formed between the first capacitor C1, the second sheet-like conductive elastic body 24, and the third sheet-like conductive elastic body 25 (see FIG. 3). That is, the sensor unit 2 is formed by stacking five layers of sheet-like elastic bodies 23, 21, 24, 22, 25 in this order. For adhesion between the layers, for example, a thin adhesive can be used.
  • the first and second sheet-like elastic bodies 21 and 22 are made of insulating silicon rubber, and the first to third sheet-like conductive elastic bodies 23, 24, and 25 are made of conductive silicon rubber. Can be used.
  • the third sheet-like conductive elastic body 25 greatly extends.
  • the third sheet-like elastic elastic body 25 side of the second sheet-like elastic body 22 extends greatly, and the thickness of the second sheet-like elastic body 22 decreases according to the extension.
  • the electrode area of the second capacitor C2 is greatly enlarged and the distance between the electrodes is shortened, the capacitance value thereof becomes very large.
  • the capacitance value of the first capacitor C1 is changed. It is very small compared to the change of the second capacitor C2.
  • the capacitance value of the first capacitor C1 becomes very large in the same manner.
  • the change of the capacitance value of the second capacitor C2 is very small compared to the change of the first capacitor C1.
  • the terminals 23 a of the first sheet-like conductive elastic body 23, the terminals 24 a of the second sheet-like conductive elastic body 24, and the terminals 25 a of the third sheet-like conductive elastic body 25 are electrical wirings constituting the cable 5. 51, 52, 53 are connected, and these electric wirings 51, 52, 53 are connected to the electric circuit section 3. Normally, the terminals 23a, 24a, and 25a are formed at end portions of the first to third sheet-like conductive elastic bodies 23, 24, and 25, respectively.
  • Electrical circuit section 3 includes a first AC output circuit 31 supplies the alternating currents I 1 to the first capacitor C1 by applying an AC voltages V 1 to the terminal 23a of the first sheet-like conductive elastic body 23, the a second AC output circuit 32 to the terminal 25a of the third sheet-like conductive elastic body 25 by applying an AC voltage V 2 to the second capacitor C2 supplies the alternating current I 2, the second sheet-like conductive elastic It has a current measuring circuit 33 for converting an AC current I 3 flowing through the terminals 24a of the body 24 to the voltage (bending amount measuring voltage Vo) measurement, the.
  • the bending amount measurement voltage Vo is a voltage corresponding to the bending amount.
  • the bending amount measurement voltage Vo may be an alternating current or a direct current converted voltage.
  • the AC voltage V 1 applied to the terminal 23 a of the first sheet-like conductive elastic body 23 and the AC voltage V 2 applied to the terminal 25 a of the third sheet-like conductive elastic body 25 are:
  • the ground potential is set as a reference potential
  • the terminal 24a of the second sheet-like conductive elastic body 24 is set to be held at the same potential as the ground potential.
  • the first AC output circuit 31 and the second AC output circuit 32 are configured such that when the sensor unit 2 is not bent and deformed, the AC current I 1 and the AC current I 2 have the same amplitude with a phase difference of 180 degrees. either or both of the AC voltages V 1 and the AC voltage V 2 is adjusted.
  • AC voltages V 1 and an AC voltage V 2 for example, a frequency of about 10 KHz, an amplitude of approximately 5V. Therefore, when the sensor unit 2 is not bent and deformed, the alternating current I 1 flowing through the first capacitor C 1 flows as the alternating current I 2 through the second capacitor, so that the second sheet-like conductive elastic body 24 The alternating current I 3 does not flow through the terminal 24a, that is, the current measuring circuit 33.
  • the alternating current I 3 flows through the terminal 24a of the second sheet-like conductive elastic body 24, and the current obtained by combining the alternating current I 3 and the alternating current I 1 flowing through the first capacitor C1 is the second current.
  • the capacitor C2 flows as AC current I 2.
  • a second alternating current terminal 24a of the sheet-like conductive elastic body 24 current I 3 is, the sensor unit 2 to flow in the opposite direction as when bending deformation in the first sheet-like conductive elastic body 23 side, the current AC current I 2 flowing through the AC current I 3 to the second capacitor C2 is touched if flows in the first capacitor C1 as an alternating current I 1.
  • the bending amount measuring device 1 is constituted by the sensor unit 2 and the electric circuit unit 3.
  • the sensor unit 2 may be a dielectric body in which the first and second sheet-like elastic bodies 21 and 22 are elastically deformed, and the first to third sheet-like conductive elastic bodies 23, 24 and 25 are elastically deformed. As long as it is conductive, no special material is used.
  • the electric circuit unit 3 is configured by a simple circuit. Therefore, the bending amount measuring apparatus 1 has a simpler configuration than the conventional one.
  • the first and second sheet-like elastic bodies 21 and 22 are preferably provided with no voids or depressions in the following points. If the first sheet-like elastic body 21 and the second sheet-like elastic body 22 are not provided with a gap or a depression, the sensor unit 2 is bent and deformed toward the first sheet-like conductive elastic body 23. In this case, the change in the thickness of the second sheet-like elastic body 22 is increased, and the change in the capacitance value of the second capacitor C2 is increased, so that the sensor unit 2 moves toward the third sheet-like conductive elastic body 25. In the case of bending deformation, the change in the thickness of the first sheet-like elastic body 21 increases, and the change in the capacitance value of the first capacitor C1 increases. As a result, the sensitivity (bending amount measurement voltage Vo with respect to the bending amount) is increased. (The slope of the characteristic curve) increases.
  • the first and second sheet-like elastic bodies 21 and 22 may be those provided with a large number of voids 21a and 22a or depressions. As an advantage in this case, they are easily bent and deformed.
  • the orientations of the large number of voids 21 a and 22 a or the depressions are not necessarily the same in the first sheet-like elastic body 21 and the second sheet-like elastic body 22.
  • the orientations of a large number of voids 21 a or depressions of the first sheet-like elastic body 21 and the orientations of the numerous voids 22 a or depressions of the second sheet-like elastic body 22 may be orthogonal to each other. Is possible.
  • FIG. 5 the orientations of a large number of voids 21 a or depressions of the first sheet-like elastic body 21 and the orientations of the numerous voids 22 a or depressions of the second sheet-like elastic body 22 may be orthogonal to each other. Is possible.
  • FIG. 5 the orientations of a large number of voids 21 a
  • the first sheet-like elastic body 21 and the second sheet-like elastic body 22 are preferably made of the same material. As a result, the first sheet-like elastic body 21 and the second sheet-like elastic body 22 are almost the same or very close to the characteristic curve of the bending amount measurement voltage Vo with respect to the bending amount, so that the entire sensor unit 2 is bent. The characteristic curve of the bending amount measurement voltage Vo with respect to the amount becomes stable. For this advantage, it is more preferable that the first sheet-like elastic body 21 and the second sheet-like elastic body 22 have the same thickness.
  • the sensor unit 2 may be bent and deformed only on the first sheet-like conductive elastic body 23 side, but the sensor unit 2 is in the first sheet-like shape.
  • the first sheet-like elastic body 21 and the second sheet-like elastic body 22 are If the same material, the same thickness, and no gaps or depressions are provided, or both are provided with a large number of gaps 21a, 22a or depressions, the amount of bending relative to the bending amount regardless of which one is bent Almost the same characteristic curve of the measurement voltage Vo can be used.
  • FIG. 7 shows a characteristic curve obtained by experiment of the bending amount measurement voltage Vo with respect to the bending amount.
  • the bending amount is an angle ⁇ of bending deformation when the sensor unit 2 is bent toward the first sheet-like conductive elastic body 23, and actually the both ends of the sensor unit 2 with respect to the horizontal axis. The angles of the parts were added together, that is, doubled.
  • the sensor unit 2 is arranged linearly along the horizontal axis.
  • the length of the sensor unit 2 in the bending deformation direction (the length between both fixing positions to the experimental device 6) is 50 mm
  • the length perpendicular to the bending deformation direction (the width direction) is 70 mm
  • the first sheet-like elastic body 21 and the second sheet-like elastic body 22 are both provided with no gap or depression and have a thickness of 2 mm.
  • the first sheet-like conductive elastic body 23 and the second sheet The thickness of each of the sheet-like conductive elastic body 24 and the third sheet-like conductive elastic body 25 was 0.7 mm.
  • FIG. 9 shows the result of a simulation in which the total sum of strains in the thickness direction of the first sheet-like elastic body 21 and the second sheet-like elastic body 22 is nonlinearly analyzed under the same conditions.
  • the vertical axis represents the total sum of distortion in the thickness direction of each element of the nonlinear analysis.
  • the bending amount measurement voltage Vo is output according to the bending amount. It can also be seen that the bending amount measurement voltage Vo with respect to the bending amount changes linearly (in a straight line). Further, as shown in FIG. 9, distortion occurs in the thickness direction of the first sheet-like elastic body 21 and the second sheet-like elastic body 22, and the sum total thereof is linear (linearly) with respect to the bending amount. You can see that it is changing.
  • the bending amount measuring apparatus 1 described above can be applied to a medical or exercise device that measures the bending amount of a part of a human or animal body such as an elbow or a knee as shown in FIG. Further, the present invention can also be applied to industrial equipment that is set in a joint portion such as a robot and measures a bending amount.
  • the bending amount measuring device has been described above, but the present invention is not limited to the one described in the embodiment, and various design changes within the scope of the matters described in the claims. Is possible.
  • the sensor unit 2 is not limited to the flat shape shown in FIG. 3 or the like in the initial state before bending deformation, but depending on the object to which the bending amount measuring device 1 is applied, the cross section is almost half as shown in FIG. An arc shape or the like is also possible.
  • the sensor unit 2 forms an angle ⁇ a at an end A and an angle ⁇ b at an end B with respect to a reference axis (for example, a horizontal axis) S.
  • the bent portions C, D, F, and H are bent and deformed toward the first sheet-like conductive elastic body 23 at angles of ⁇ c, ⁇ d, ⁇ f, and ⁇ h, respectively, and the bent portions E and G have ⁇ e and ⁇ g, respectively. It is bent and deformed to the third sheet-like conductive elastic body 25 side at an angle.
  • the relational expression of these angles is as follows.
  • ⁇ a + ⁇ b ⁇ c + ⁇ d- ⁇ e + ⁇ f- ⁇ g + ⁇ h
  • R is a bending radius
  • t is the thickness of the first sheet-like elastic body 21 and the second sheet-like elastic body 22 in a state where they are not bent
  • K is a constant.
  • the numerator in this equation is due to a change in length and the denominator is due to a change in thickness.
  • the capacitance value of the first capacitor C1 is as follows.
  • the capacitance value of the second capacitor C2 is larger than the capacitance value of the first capacitor C1 by 4Kt ⁇ c, 4Kt ⁇ d, 4Kt ⁇ f, and 4Kt ⁇ h, respectively, and in the bent portions E and G, The capacitance value of the second capacitor C2 is smaller than the capacitance value of the first capacitor C1 by 4Kt ⁇ e and 4Kt ⁇ g, respectively.
  • the difference between the capacitance value of the second capacitor C2 and the capacitance value of the first capacitor C1 is as follows.
  • C2-C1 4Kt ( ⁇ c + ⁇ d + ⁇ f + ⁇ h- ⁇ e- ⁇ g) That is, it is as follows.
  • C2-C1 4Kt ( ⁇ a + ⁇ b)
  • the bending amount is defined as the sum of the angles ⁇ a and ⁇ b at both ends of the sensor unit 2, even if a large number of wrinkles (bending portions) occur, the capacitance of the second capacitor C2 with respect to the bending amount The difference between the value and the capacitance value of the first capacitor C1 is stabilized, and as a result, a stable characteristic of the bending amount measurement voltage Vo with respect to the bending amount can be obtained.
  • the sensor unit 2 In the initial state before bending deformation, the sensor unit 2 is arranged linearly along the horizontal axis.
  • the length of the sensor 2 in the bending direction (the length between both fixing positions to the experimental device 6) is 200 mm
  • the length perpendicular to the bending direction (the width direction) is 30 mm
  • the first sheet-like elasticity Both the body 21 and the second sheet-like elastic body 22 are not provided with voids or depressions, have a thickness of 0.5 mm, the first sheet-like conductive elastic body 23, and the second sheet-like conductivity.
  • the thicknesses of the elastic body 24 and the third sheet-like conductive elastic body 25 were all 0.7 mm.
  • the black circles in FIG. 13 indicate the bend amount by making the angle ⁇ a of the end A equal to the angle ⁇ b of the end B without generating wrinkles and adding them to the bend amount.
  • This is data obtained by measuring the voltage Vo.
  • the range indicated by a in FIG. 13 was obtained by adding the angle ⁇ a of the end A and the angle ⁇ b of the end B as shown in FIGS. 14A to 14C using the same experimental apparatus as described above. This is the range of the bending amount measurement voltage Vo obtained by generating and measuring wrinkles so that the bending amount becomes zero.
  • the same experimental apparatus as described above was used to generate wrinkles by setting both the angle ⁇ a of the end A and the angle ⁇ b of the end B to 30 degrees as shown in FIG.
  • the bending amount measurement voltage Vo obtained by measurement. In each experiment shown in (a) to (d) of FIG. 14, the measurement was performed 5 times while changing the bending method little by little.
  • both the range indicated by a and the range indicated by b are located in the vicinity of a straight line obtained from ⁇ (black circle).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

La présente invention porte sur un dispositif de mesure de quantité de fléchissement ayant une structure simple. Le dispositif de mesure de quantité de fléchissement (1) selon la présente invention comporte une unité de détection (2) produite par formation d'un premier condensateur (C1) et d'un second condensateur (C2) utilisant, en tant que diélectriques, des premier et second corps élastiques en forme de feuille (21, 22) de la même matière et utilisant, en tant qu'électrodes, d'un premier à un troisième corps élastique conducteur en forme de feuille (23-25) prenant en sandwich les diélectriques. Lorsque l'unité de détection (2) est fléchie vers le côté du premier corps élastique conducteur en forme de feuille (23), la valeur du courant alternatif (CA) circulant dans le second condensateur (C3) augmente, un courant CA circule dans la borne du deuxième corps élastique conducteur en forme de feuille (24), et une tension de mesure de quantité de fléchissement (VO) est délivrée en sortie depuis une unité de circuit électrique (3).
PCT/JP2015/056913 2014-04-08 2015-03-10 Dispositif de mesure de quantité de fléchissement WO2015156069A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-079789 2014-04-08
JP2014079789 2014-04-08
JP2014-261327 2014-12-24
JP2014261327A JP2015206783A (ja) 2014-04-08 2014-12-24 曲げ量計測装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020111073A1 (fr) * 2018-11-28 2020-06-04 バンドー化学株式会社 Corps de capteur et dispositif de capteur

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101865229B1 (ko) * 2016-08-02 2018-06-08 연세대학교 산학협력단 인공수염 휨 측정 장치 및 방법
JP6505164B2 (ja) * 2017-07-10 2019-04-24 バンドー化学株式会社 静電容量型センサシート及びセンサ装置
KR102499290B1 (ko) * 2017-12-28 2023-02-13 주식회사 성우하이텍 행거 모니터링 시스템 및 그 방법
CN114585873A (zh) * 2019-11-15 2022-06-03 郡是株式会社 层叠型弯曲传感器以及机电转换装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189515A (ja) * 1988-01-26 1989-07-28 Mitsubishi Electric Corp 変位検出装置
JPH0278925A (ja) * 1988-09-16 1990-03-19 Yokohama Syst Kenkyusho:Kk 静電容量型圧力センサ
JP2008241717A (ja) * 2004-03-29 2008-10-09 Sanyo Electric Co Ltd 静電容量型圧力センサー及びこれを用いた心拍／呼吸計測装置
JP2009020006A (ja) * 2007-07-12 2009-01-29 Tokai Rubber Ind Ltd 静電容量型センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189515A (ja) * 1988-01-26 1989-07-28 Mitsubishi Electric Corp 変位検出装置
JPH0278925A (ja) * 1988-09-16 1990-03-19 Yokohama Syst Kenkyusho:Kk 静電容量型圧力センサ
JP2008241717A (ja) * 2004-03-29 2008-10-09 Sanyo Electric Co Ltd 静電容量型圧力センサー及びこれを用いた心拍／呼吸計測装置
JP2009020006A (ja) * 2007-07-12 2009-01-29 Tokai Rubber Ind Ltd 静電容量型センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020111073A1 (fr) * 2018-11-28 2020-06-04 バンドー化学株式会社 Corps de capteur et dispositif de capteur

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