WO2015041198A1 - 押圧検出センサ - Google Patents
押圧検出センサ Download PDFInfo
- Publication number
- WO2015041198A1 WO2015041198A1 PCT/JP2014/074353 JP2014074353W WO2015041198A1 WO 2015041198 A1 WO2015041198 A1 WO 2015041198A1 JP 2014074353 W JP2014074353 W JP 2014074353W WO 2015041198 A1 WO2015041198 A1 WO 2015041198A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- receiving member
- piezoelectric
- operation receiving
- pressure
- adhesive
- Prior art date
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- 238000001514 detection method Methods 0.000 claims abstract description 85
- 239000000853 adhesive Substances 0.000 claims abstract description 54
- 230000001070 adhesive effect Effects 0.000 claims abstract description 53
- 239000006059 cover glass Substances 0.000 claims abstract description 14
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims abstract description 12
- 239000004626 polylactic acid Substances 0.000 claims description 17
- 229920000747 poly(lactic acid) Polymers 0.000 claims description 16
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 abstract description 5
- 230000007423 decrease Effects 0.000 abstract description 3
- 238000005452 bending Methods 0.000 description 22
- 238000003825 pressing Methods 0.000 description 16
- 230000009477 glass transition Effects 0.000 description 11
- 239000011241 protective layer Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J201/00—Adhesives based on unspecified macromolecular compounds
Definitions
- the present invention relates to a pressure detection sensor that detects a pressing force when an operation surface is pushed.
- various operation detection sensors for detecting an operation on an operation surface by an operator have been devised.
- the operation detection sensor there are a capacitance method, a thermal resistance method, a piezoelectric acoustic method, an infrared sensor method, and the like, but when detecting a pressing force on the operation surface, a separate pressure detection sensor is installed. There is a need.
- Patent Document 1 describes a touch-type input device including a touch panel that is an operation detection sensor and a pressure-sensitive sensor that detects pressing of an operation surface.
- the pressure-sensitive sensor is disposed on the lower surface (surface opposite to the operation surface) of the touch panel and has the same area as the touch panel.
- the protective layer is arrange
- the pressure sensor receives stress due to the operation surface being pushed in via the protective layer and the touch sensor, and detects the pressing force according to the stress.
- an acrylic adhesive having a high translucency is used as an adhesive member that bonds the protective layer and the touch sensor. Many.
- FIG. 5 is a graph showing temperature characteristics of the elastic modulus of the pressure-sensitive adhesive. As shown in FIG. 5, the elastic modulus at a lower temperature than in the vicinity of the glass transition point is significantly higher than the elastic modulus at a higher temperature than in the vicinity of the glass transition point.
- FIG. 6 is a graph showing the temperature characteristics of the deflection amount of the multilayer member. As shown in FIG. 6, when the operation surface is pushed in with the same pressing force, the amount of bending at a higher temperature than near the glass transition point is significantly larger than the amount of bending at a lower temperature than near the glass transition point. (For example, in the case of FIG. 6, about 4 times).
- the pressure detection value of the pressure sensor at a temperature higher than the vicinity of the glass transition point is significantly larger than the pressure detection value of the pressure sensor at a temperature lower than the vicinity of the glass transition point.
- An object of the present invention is to provide a pressure detection sensor that has no temperature dependency and can obtain a detection value corresponding to the pressure.
- the present invention relates to a press detection sensor including an operation receiving member and a piezoelectric sensor, and is characterized by the following configuration.
- the operation receiving member is a plate-like member having a structure in which a plurality of rigid plates are bonded and laminated with a first adhesive, and one main surface orthogonal to the stacking direction is an operation surface.
- the piezoelectric sensor is a flat film-like member disposed on the other main surface side of the operation receiving member at a position where stress applied to the operation receiving member propagates. Furthermore, the piezoelectric sensor includes a piezoelectric film and detection electrodes formed on both main surfaces of the piezoelectric film. The detection electrode on the operation receiving member side and the piezoelectric film are bonded with a second adhesive.
- the elastic modulus of the adhesive (second adhesive) of the piezoelectric sensor when a difference occurs in the bending of the operation receiving member depending on the temperature, the elastic modulus of the adhesive (second adhesive) of the piezoelectric sensor also changes depending on the temperature. Therefore, the difference in the deflection of the operation receiving member due to the temperature change is alleviated by the temperature change of the elastic modulus of the adhesive of the piezoelectric sensor. Thereby, the amount by which the amount of bending of the piezoelectric film, that is, the stress applied to the piezoelectric film changes with temperature, can be suppressed.
- the piezoelectric sensor is bonded to the other main surface of the operation receiving member.
- the stress due to the bending of the operation receiving member can be directly received by the piezoelectric sensor, and the push-in detection sensitivity can be improved.
- the first adhesive and the second adhesive are made of the same material.
- the first adhesive and the second adhesive are acrylic adhesives.
- an acrylic pressure-sensitive adhesive that easily realizes high translucency is used, which is suitable when the operation receiving member requires translucency.
- the piezoelectric film preferably contains polylactic acid. In this configuration, the deflection can be detected with high sensitivity.
- the operation receiving member includes a cover glass having one main surface serving as the operation surface, and a flat plate-like position detection sensor disposed on the other main surface side of the cover glass. May be. In this configuration, the operation position can be detected by the operation receiving member.
- the operation receiving member may further include a display panel arranged on the surface opposite to the cover glass of the position detection sensor.
- a touch panel with a display function can be realized by the operation receiving member.
- FIG. 1 is a plan view and a side sectional view showing a schematic configuration of a pressure detection sensor according to an embodiment of the present invention.
- FIG. 1 specific layer configurations of the operation receiving member and the piezoelectric sensor are not illustrated, and
- FIG. 2 illustrates specific layer configurations of the operation receiving member and the piezoelectric sensor.
- FIG. 2 is a diagram showing a specific layer configuration of the operation receiving member and the piezoelectric sensor according to the embodiment of the present invention.
- the press detection sensor 1 includes a piezoelectric sensor 10, an operation receiving member 20, and an adhesive member 30.
- the operation receiving member 20 is a rectangular flat plate.
- the operation receiving member 20 has at least both ends in the short direction fixed to a rigid body such as a housing (not shown). At this time, it is preferable that substantially the entire length of the end side along the longitudinal direction constituting both ends of the operation receiving member 20 in the short direction is fixed to a rigid body such as a housing.
- the piezoelectric sensor 10 is a long flat film.
- the piezoelectric sensor 10 is bonded to the back surface of the operation receiving member 20 by an adhesive member 30.
- the adhesive member 30 is made of an adhesive.
- the adhesive 30 is provided on substantially the entire surface in contact with the operation receiving member 20 of the piezoelectric sensor 10.
- an adhesive having an elastic modulus of 10 8 [Pa] to 10 9 [Pa] or more in the range of about ⁇ 30 [° C.] to about +60 [° C.] is used.
- the piezoelectric sensor 10 is bonded near one end of the operation receiving member 20 in the longitudinal direction. At this time, the piezoelectric sensor 10 is bonded to the operation receiving member 20 so that the longitudinal direction of the piezoelectric sensor 10 is parallel to the short direction of the operation receiving member 20.
- the piezoelectric sensor 10 when the operation receiving member 20 is bent by being pushed into the operation surface, the piezoelectric sensor 10 is also bent. In other words, the stress due to the bending of the operation receiving member 20 caused by pushing into the operation surface is transmitted to the piezoelectric sensor 10 via the adhesive member 30, and the stress due to pushing into the operation surface is applied to the piezoelectric sensor 10.
- the piezoelectric sensor 10 generates a detection voltage by this bending stress. By acquiring this detection voltage, the push-in can be detected. Further, since the value of the detection voltage is uniquely determined by the amount of pressing, that is, the pressing force, the pressing force can be detected by acquiring the detection voltage value.
- the operation receiving member 20 is formed by laminating a cover glass 21, a position detection sensor 22, and a display panel 23 along the thickness direction.
- the cover glass 21, the position detection sensor 22, and the display panel 23 correspond to the “rigid plate” of the present invention.
- the cover glass 21, the position detection sensor 22, and the display panel 23 are rectangular flat plates that are stacked so that their main surfaces overlap each other. At this time, the surface of the cover glass 21, that is, the surface on which the position detection sensor 22 is not bonded becomes the operation surface of the operation receiving member 20.
- the cover glass 21 and the position detection sensor 22 are bonded via an adhesive 231.
- the adhesive 231 is provided on substantially the entire main surface where the cover glass 21 and the position detection sensor 22 face each other.
- the position detection sensor 22 and the display panel 23 are bonded via an adhesive 232.
- the adhesives 231 and 232 are desirably acrylic adhesives. Since the acrylic pressure-sensitive adhesive has high translucency, the display image of the display panel 30 can be efficiently displayed on the operation surface.
- the piezoelectric sensor 10 includes a piezoelectric film 11, a first detection member 12, and a second detection member 13.
- the piezoelectric film 11 is made of polylactic acid (PLA), more specifically L-type polylactic acid (PLLA), and is made of a long flat film.
- the molecular orientation direction 900 of the piezoelectric film 11 forms 45 ° with respect to the long and short directions of the piezoelectric film 11. In other words, the uniaxial stretching direction of the piezoelectric film 11 is approximately 45 ° with respect to the long and short directions of the piezoelectric film 11.
- PLLA consists of a chiral polymer.
- PLLA has a helical structure in the main chain.
- molecules are oriented in a uniaxially stretched direction, and have piezoelectricity due to the orientation of the molecules.
- the uniaxially stretched PLLA generates electric charges when the piezoelectric film 11 is distorted.
- the distortion generated in the piezoelectric film 11 means that the piezoelectric film 11 extends in a predetermined direction.
- the amount of generated charge is determined by the amount of strain of the piezoelectric film 11.
- the piezoelectric constant of uniaxially stretched PLLA belongs to a very high class among polymers.
- the piezoelectric strain constant d 14 of PLLA can be as high as 10 to 20 pC / N by adjusting conditions such as stretching conditions, heat treatment conditions, and additive blending.
- the piezoelectric sensor 10 by adhering the piezoelectric sensor 10 to the operation receiving member 20 as described above, the direction in which the piezoelectric film 11 bends and expands due to the pressing stress and the uniaxial stretching direction form an angle of approximately 45 °. Can be effectively converted into electric charges.
- the stretching ratio of the piezoelectric film 11 is preferably about 3 to 8 times.
- the same effect as that of uniaxial stretching can be obtained by varying the stretching ratio of each axis. For example, when a certain direction is taken as an X-axis, 8 times in that direction, and 2 times in the Y-axis direction perpendicular to that axis, the piezoelectric constant is about 4 times in the X-axis direction, Almost the same effect can be obtained.
- a film that is simply uniaxially stretched easily tears along the direction of the stretch axis, and thus the strength can be increased somewhat by performing biaxial stretching as described above.
- PLLA generates piezoelectricity by molecular orientation treatment such as stretching, and therefore does not need to be subjected to poling treatment like other polymers such as PVDF and piezoelectric ceramics. That is, the piezoelectricity of PLLA that does not belong to ferroelectrics is not expressed by the polarization of ions like ferroelectrics such as PVDF and PZT, but is derived from a helical structure that is a characteristic structure of molecules. is there. For this reason, the piezoelectric constant of PVDF or the like changes over time due to depolarization, and in some cases the piezoelectric constant may be significantly reduced, but the piezoelectric constant of PLLA is extremely stable over time. Therefore, the output charge amount is not affected by the surrounding environment. Furthermore, since PLLA does not generate pyroelectricity that occurs in other ferroelectric piezoelectric materials, the possibility of erroneous detection due to temperature changes is reduced.
- the first detection member 12 includes base films 121 and 123 and electrodes 122 and 124.
- the base films 121 and 123 are made of a flexible insulating film such as polyimide.
- the electrode 122 is made of a conductor film having high conductivity such as copper foil, and is formed on the main surface of the base film 121.
- the electrode 124 is made of a conductive film having high conductivity such as copper foil, and is formed on the main surface of the base film 123.
- the base films 121 and 123 are formed with an area larger than that of the piezoelectric film 11, and the electrodes 122 and 124 are formed with an area substantially the same as that of the piezoelectric film 11 and smaller than that of the piezoelectric film 11. ing.
- the base film 121 on which the electrode 122 is formed and the base film 123 on which the electrode 124 is formed are laminated so that the base film 121, the electrode 122, the base film 123, and the electrode 124 are arranged in this order.
- the first detection member 12 is configured by this laminated body.
- the first detection member 12 is bonded to the piezoelectric film 11 via an adhesive 141 so that the electrode 124 contacts the piezoelectric film 11. At this time, the first detection member 12 is bonded to the piezoelectric film 11 so that the electrodes 122 and 124 overlap the piezoelectric film 11.
- the adhesive 141 is made of the same material as the adhesives 231 and 232 described above.
- the second detection member 13 includes a base film 131 and an electrode 132.
- the base film 131 is made of a flexible insulating film such as polyimide.
- the electrode 132 is made of a conductor film having high conductivity such as copper foil, and is formed on the main surface of the base film 131. At this time, the base film 131 is formed with a larger area than the piezoelectric film 11, and the electrode 132 is formed with the same area as the piezoelectric film 11 and smaller than the piezoelectric film 11.
- the second detection member 13 is bonded to the piezoelectric film 11 via an adhesive 142 so that the electrode 132 is in contact with the piezoelectric film 11.
- the first detection member 12 is bonded to the piezoelectric film 11 so that the electrodes 122 and 124 overlap the piezoelectric film 11.
- the adhesive 142 is made of the same material as the adhesives 141, 231, 232 described above.
- the electric charges generated when the piezoelectric film 11 expands due to the bending stress applied to the piezoelectric film 11 can be detected by the electrodes 124 and 132. Then, when the electrodes 124 and 132 detect charges, the above-described detection voltage can be acquired.
- the electrode 122 and the base film 121 on which the electrode 122 is formed can be omitted.
- noise from the operation surface side can be shielded, and the detection voltage value by pressing can be obtained accurately.
- FIG. 3 is a diagram schematically illustrating how each part bends when the operation surface is pushed.
- 3A shows a state at a high temperature
- FIG. 3B shows a state at a low temperature.
- FIG. 3 shows a state in which the center in the short direction of the operation receiving member 20 is pushed in with both ends of the operation receiving member 20 in the short direction as fixed points.
- the high temperature shown in this embodiment indicates that the temperature is higher than the glass transition point of the pressure-sensitive adhesive
- the low temperature indicates that the temperature is lower than the glass transition point of the pressure-sensitive adhesive.
- the pressing force P is the same.
- the first detection member 12 is adhered to the piezoelectric film 11 via the adhesive 141, and the elastic modulus of the adhesive 141 is also reduced. Therefore, the stress due to the bending DLG 20H of the operation receiving member 20 is relieved, and the bending DLP 20H of the piezoelectric film 11 is significantly smaller than the bending DLG 20H of the operation receiving member 20 (DLP20H ⁇ DLG20H).
- the stress due to the bending DLG 20 ⁇ / b> L of the operation receiving member 20 propagates to the first detection member 12 bonded to the operation receiving member 20 by the adhesive member 30, and is further bonded to the first detection member 12 by the adhesive 124. Propagating to the conductive film 11.
- the first detection member 12 is bonded to the piezoelectric film 11 via the adhesive 141, and the adhesive 141 also has a high elastic modulus. Therefore, the stress due to the bending DLG 20H of the operation receiving member 20 is hardly relieved, and the bending DLP 20L of the piezoelectric film 11 is substantially the same as the bending DLG 20L of the operation receiving member 20 (DLP20L ⁇ DLG 20L).
- the amount of charge generated by the piezoelectric film 11 is substantially the same without depending on the temperature, and the detection voltage value generated by the piezoelectric sensor 10 is substantially the same. Be the same.
- FIG. 4 is a diagram illustrating the temperature characteristics of the amount of charge generated by the piezoelectric film of the pressure detection sensor according to the embodiment of the present invention and the temperature characteristics of the amount of charge generated by the piezoelectric film of the pressure detection sensor of the conventional configuration. is there.
- FIG. 4 is a graph showing the detected charge amount when the pressing force is constant and the temperature is changed.
- the conventional structure shown in FIG. 4 shows the aspect which replaced the adhesive of the 1st detection member 12 with the adhesive agent.
- the detected charge amount greatly varies depending on the temperature.
- the detected charge amount becomes substantially constant without depending on the temperature.
- the mounting position of the piezoelectric sensor 10 on the operation receiving member 20 is not limited to the above-described position, but may be any other position as long as the operation receiving member 20 is subjected to stress due to bending by being pushed into the operation surface. It may be.
- the piezoelectric sensor 10 may be another component (for example, the back side of the operation receiving member 20) that constitutes the pressure detection sensor as long as the bending stress due to the operation receiving member 20 being pushed is transmitted. It may be mounted on a sheet metal member or the like disposed on the surface.
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- Organic Chemistry (AREA)
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- General Physics & Mathematics (AREA)
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- Position Input By Displaying (AREA)
Abstract
Description
図3(A)に示すように、高温時には、操作受付部材20を構成する粘着剤231,232の弾性率が低下するため、押圧力Pで操作面が押し込まれると、操作受付部材20は大きな撓みDLG20Hを生じる。この操作受付部材20の撓みDLG20Hによる応力は、接着部材30によって操作受付部材20に接着している第1検出部材12に伝搬し、さらに粘着剤124によって第1検出部材12と接着している圧電性フィルム11に伝搬する。
図3(B)に示すように、低温時には、操作受付部材20を構成する粘着剤231,232の弾性率が高いので、押圧力Pで操作面が押し込まれると、操作受付部材20は小さな撓みDLG20Lを生じる。このように低温時での操作受付部材20の撓みDLG20Lは、高温時での操作受付部材20の撓みDLG20Hと比較して大幅に小さくなる(DLG20L<<DLG20H)。
10:圧電センサ
11:圧電性フィルム
12:第1検出部材
13:第2検出部材
20:操作受付部材
21:カバーガラス
22:位置検出センサ
23:表示パネル
30:接着部材
231,232:粘着剤
121,123,131:ベースフィルム
122,124,132:電極
141,142:粘着剤
Claims (7)
- 複数の剛体板を第1の粘着剤で接着して積層した構造からなり、積層方向に直交する一方主面が操作面となる操作受付部材と、
該操作受付部材の他方主面側で、前記操作受付部材に加わる応力が伝搬する位置に配置された平膜状の圧電センサと、を備えた押圧検出センサであって、
前記圧電センサは、
圧電性フィルムと、該圧電性フィルムの両主面に形成された検出用電極とを備え、
前記操作受付部材側の前記検出用電極と前記圧電性フィルムとは、第2の粘着剤によって接着されている、押圧検出センサ。 - 前記圧電センサは、前記操作受付部材の前記他方主面に接着されている、請求項1に記載の押圧検出センサ。
- 前記第1の粘着剤と前記第2の粘着剤は同じ材料からなる、請求項1または請求項2に記載の押圧検出センサ。
- 前記第1の粘着剤と前記第2の粘着剤は、アクリル系粘着剤である、請求項1乃至請求項3のいずれかに記載の押圧検出センサ。
- 前記圧電性フィルムはポリ乳酸を含む、請求項1乃至請求項4のいずれかに記載の押圧検出センサ。
- 前記操作受付部材は、
一方主面が前記操作面となるカバーガラスと、
該カバーガラスの他方主面側に配置された平板状の位置検出センサと、を備える、請求項1乃至請求項5のいずれかに記載の押圧検出センサ。 - 前記操作受付部材は、
前記位置検出センサの前記カバーガラスと反対側の面に配置された表示パネルをさらに備える、請求項6に記載の押圧検出センサ。
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JP2015537916A JP5950053B2 (ja) | 2013-09-20 | 2014-09-16 | 押圧検出センサ |
CN201480051336.9A CN105556267B (zh) | 2013-09-20 | 2014-09-16 | 按压检测传感器 |
US15/052,149 US10309844B2 (en) | 2013-09-20 | 2016-02-24 | Press detecting sensor |
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JP2013195144 | 2013-09-20 |
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US15/052,149 Continuation US10309844B2 (en) | 2013-09-20 | 2016-02-24 | Press detecting sensor |
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CN107615030A (zh) * | 2015-05-29 | 2018-01-19 | 株式会社村田制作所 | 压电膜传感器以及保持状态检测装置 |
WO2023153431A1 (ja) * | 2022-02-10 | 2023-08-17 | 株式会社村田製作所 | センサ |
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JP6690992B2 (ja) * | 2016-05-18 | 2020-04-28 | 株式会社ジャパンディスプレイ | 表示装置 |
WO2019021981A1 (ja) | 2017-07-26 | 2019-01-31 | 株式会社村田製作所 | 押圧センサ及び電子機器 |
CN214748552U (zh) * | 2018-06-20 | 2021-11-16 | 株式会社村田制作所 | 按压传感器和按压检测装置 |
CN110617914B (zh) * | 2019-08-30 | 2022-01-11 | 华为技术有限公司 | 一种压电传感器的信号校正方法及电子设备 |
CN111044183B (zh) * | 2019-12-24 | 2022-03-18 | 浙江清华柔性电子技术研究院 | 柔性压力传感及其制备方法 |
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JP5950053B2 (ja) | 2016-07-13 |
US10309844B2 (en) | 2019-06-04 |
CN105556267B (zh) | 2018-11-16 |
JPWO2015041198A1 (ja) | 2017-03-02 |
US20160169753A1 (en) | 2016-06-16 |
CN105556267A (zh) | 2016-05-04 |
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