WO2012099201A1 - Photoresist management device and method - Google Patents
Photoresist management device and method Download PDFInfo
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- WO2012099201A1 WO2012099201A1 PCT/JP2012/051074 JP2012051074W WO2012099201A1 WO 2012099201 A1 WO2012099201 A1 WO 2012099201A1 JP 2012051074 W JP2012051074 W JP 2012051074W WO 2012099201 A1 WO2012099201 A1 WO 2012099201A1
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- photoresist
- data
- container
- wireless tag
- tag reader
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 177
- 238000000034 method Methods 0.000 title claims description 69
- 239000004065 semiconductor Substances 0.000 claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 claims abstract description 20
- 238000007726 management method Methods 0.000 claims description 85
- 238000004891 communication Methods 0.000 claims description 17
- 238000003780 insertion Methods 0.000 description 7
- 230000037431 insertion Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Definitions
- the present invention relates to photoresist management in a semiconductor manufacturing process, and more particularly to a photoresist management apparatus and management method for a semiconductor photolithography process.
- a photoresist used in a semiconductor photolithography process is managed using a bar code, and manages data and data from a semiconductor process tool for performing a semiconductor manufacturing process. Data from the bar code system was reported to the host via a separate channel.
- FIG. 1 is a diagram showing a configuration of a conventional PR management system using a barcode.
- the host 20 is connected to the semiconductor process tool 10 and transmits / receives and processes data related to the semiconductor manufacturing process.
- PR is a photosensitive polymer material used for photolithography, and is generally placed in a bottle-shaped PR container 30 and placed in the semiconductor process tool 10.
- a barcode is attached to the PR container 30, and the operator acquires data relating to PR with the barcode reader 50 and sends the data to the host 20 via the barcode controller 40.
- PR is managed by the following process.
- the semiconductor process tool 10 detects that there is no PR in the PR container 30 and notifies the host 20 of it. Therefore, the operator sees the message notified from the host 20 and recognizes that the PR container 30 is empty. Thereafter, the operator directly checks the state of the PR container 30 arranged in the semiconductor process tool 10 to confirm the empty PR container 30. Then, the operator inputs data on a new PR container 30 '(not shown) containing the same PR with the barcode reader 50, and then replaces the empty PR container 30 with a new PR container 30'. Data input by the bar code reader 50 is sent to the host 20 via the bar code reader controller 40.
- the replacement operation of the PR container 30 when all the PR in the PR container 30 attached to a predetermined position is used is performed in the following order.
- the sensor detects that no PR is present in the PR container 30 (PR empty event)
- the operator brings a new container 30 'of the same type.
- the operator removes the PR container 30 without PR, attaches a new PR container 30 ′ at that position, and reads the barcode attached to the newly attached PR container 30 ′ through the barcode reader 50.
- the PR management apparatus to which the barcode reader 50 is connected determines whether or not the PR types in the PR containers (30, 30 ′) before and after replacement are the same from the read barcode data, and the same type If not, a warning message is displayed.
- the conventional PR management system shown in FIG. 1 a communication channel between the semiconductor process tool 10 and the host 20 and a communication channel between the barcode reader 50 and the host 20 exist separately. There was annoyance that it was necessary to synchronize and use data coming in via two different routes.
- the conventional PR management system is basically a system using a bar code, and the operator directly inputs the PR data to be replaced with the bar code reader 50 during the PR replacement work. There is a problem that the replacement takes time and is replaced with another PR due to an operator error.
- the bar code data attached to the PR containers (30, 30 ′) before and after the replacement is used only to check whether the PR types match. Even if they are the same type of PR, if the manufacturer, lot number, or whether there is aging, etc. are different, there will be a difference in fine components in the PR, and such a difference will be the actual semiconductor manufacturing. There was a problem affecting the process.
- the present invention has been made to solve such problems of the prior art, and is managed by managing the PR used in the semiconductor manufacturing process by using the wireless tag technology and unifying the communication system.
- the purpose is to provide the PR management data at a more appropriate timing.
- an object of the present invention is to improve the process stability by detecting in advance the replacement with an incompatible PR that affects the actual semiconductor manufacturing process.
- a photoresist management apparatus is connected to a semiconductor process tool, a wireless tag reader, and a host, and indicates that a photoresist container is empty from the semiconductor process tool.
- a first event processing unit that requests and obtains data relating to the empty photoresist container from the wireless tag reader and sends the data obtained from the wireless tag reader to the host; Receiving a second message including data relating to the photoresist container removed from the semiconductor process tool from the wireless tag reader; a second event processing unit sending data relating to the removed photoresist container to the host; Location of photoresist container removed from the semiconductor process tool And a third event processing unit that sends data relating to the newly placed photoresist container to the host when receiving a third message including data relating to the newly placed photoresist container from the wireless tag reader.
- a photoresist management method for achieving the above object is a method for managing photoresist in a photoresist management apparatus connected to a semiconductor process tool, a wireless tag reader, and a host.
- the wireless tag reader is requested to obtain data related to the empty photoresist container, and the wireless tag is acquired.
- another photoresist management apparatus obtains photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist for a photoresist container attached at a predetermined position.
- An acquisition unit a storage unit for storing the photoresist type data and the photoresist attribute data obtained by the acquisition unit, and, if the photoresist container is replaced, whether the acquisition unit is stored in the storage unit.
- a comparison unit that compares the photoresist type data and photoresist attribute data for the photoresist container before replacement with the photoresist type data and photoresist attribute data for the photoresist container after replacement, using the data obtained from Depending on the result of the comparison, And a notification section for notifying whether or not there was an error in the replacement of the resist container.
- another photoresist management method obtains photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist for a photoresist container attached at a predetermined position.
- An acquisition step a storage step for storing the photoresist type data and the photoresist attribute data obtained from the acquisition step, and, if the photoresist container has been replaced, whether it was stored in the storage step or the acquisition step.
- information from a semiconductor process tool and information from a wireless tag reader that reads data from a PR container can be collected simultaneously by unifying the conventional PR management system that has been dualized. Therefore, the PR management data can be managed at an appropriate timing.
- SECS Session Control Coding Standard
- SECS protocol is a communication protocol related to message exchange between a semiconductor process tool and a host in the SEMI standard.
- SEMI is an abbreviation for “Semiconductor Equipment and Material International”.
- FIG. 1 is a diagram illustrating a configuration in which a PR management device 60 according to a first embodiment of the present invention is connected to a semiconductor process tool 10, a host 20, and a wireless tag reader 70.
- FIG. It is a block diagram showing PR management device 60 concerning a 1st embodiment of the present invention.
- It is a flowchart which shows the PR management method which concerns on 1st Embodiment of this invention.
- PR management device 80 concerning a 2nd embodiment of the present invention. The flowchart of the PR management method which concerns on 2nd Embodiment of this invention is shown.
- FIG. 2 is a diagram illustrating a configuration in which the PR management device 60 according to the first embodiment of the present invention is connected to the semiconductor process tool 10, the host 20, and the wireless tag reader 70.
- the PR management device 60 is connected to the semiconductor process tool 10, the host 20, and the wireless tag reader 70, synchronizes data sent from the semiconductor process tool 10 or the wireless tag reader 70, and sends the data to the host 20. Is sent to the semiconductor process tool 10 or the wireless tag reader 70.
- the semiconductor process tool 10 sends various data generated in the semiconductor manufacturing process to the host 20 via the PR management device 60.
- the wireless tag reader 70 reads data from the wireless tag attached to each PR container 30 arranged in the semiconductor process tool 10, and sends the read data to the host 20 via the PR management device 60.
- the PR management device 60 includes a semiconductor process tool IF 610 that is an interface unit for exchanging data with the semiconductor process tool 10, a wireless tag reader IF 620 that is an interface unit for exchanging data with the wireless tag reader 70, and a host. And a host IF 630 which is an interface unit for exchanging data with 20. Further, the PR management device 60 includes a control unit 600 that processes data from the semiconductor process tool IF 610, the wireless tag reader IF 620, and the host IF 630 and sends necessary commands. Data processed by the control unit 600 is displayed on the display unit 690 and can be easily confirmed by the operator.
- the PR empty event processing unit 650 When receiving a PR empty message as a first message indicating that the PR container 30 is empty from the semiconductor process tool 10, the PR empty event processing unit 650 as a first event processing unit receives an empty Data regarding the PR container 30 in a state is requested and acquired from the wireless tag reader 70, and the data acquired from the wireless tag reader 70 is sent to the host 20.
- the PR empty event processing unit 650 also displays the position of the empty PR container 30 in the semiconductor process tool 10 and the data related to the PR container 30 on the display unit 690 based on the data related to the PR container 30 acquired from the wireless tag reader 70. Display. As a result, the operator can easily grasp the position of the empty PR container 30 and the data related to the PR container 30.
- the PR removal event processing unit 660 as a second event processing unit removes the PR container 30 from the semiconductor process tool 10 and outputs a PR removal message as a second message including data regarding the removed PR container 30.
- data regarding the removed PR container 30 is sent to the host 20.
- the PR input event processing unit 670 as a third event processing unit includes a new PR container 30 ′ disposed at the position of the PR container 30 removed from the semiconductor process tool 10, and includes data regarding the new PR container 30 ′.
- data regarding the newly placed PR container 30 ′ is sent to the host 20.
- the error determination unit 680 compares the data regarding the empty PR container 30 with the data regarding the newly disposed PR container 30 ′ to determine whether or not there is an error in the PR replacement work, and it is determined that there is an error. In this case, it is configured to notify that there is an error in the replacement work of the PR containers 30, 30 ′.
- the error determination unit 680 is provided in the PR management device 60 so that the PR management device 60 determines whether there is an error in the replacement work of the PR containers 30 and 30 ′.
- an error determination unit 680 may be provided in the host 20 to determine whether or not the host 20 has an error in the replacement work of the PR containers 30 and 30 ′.
- the error determination unit 680 can determine whether or not there is an error in the replacement work of the PR container 30 by comparing the PR type data indicating the type of PR, and the type of PR is determined as in the second embodiment to be described later. It is possible to determine whether or not there is an error in the replacement work of the PR container 30 by comparing not only the PR type data to be shown but also the PR attribute data showing more detailed PR attributes than the PR type.
- communication protocol data used for data exchange between the semiconductor process tool 10 and the host 20 such as the SECS protocol
- the PR management device 60 determines whether or not a PR empty message indicating that the PR container 30 is empty is received from the semiconductor process tool 10 (step S410).
- the PR management device 60 receives the PR empty message (“YES” in step S410)
- the PR management device 60 performs data relating to the empty PR container 30 (data relating to the position of the PR container 30 and the type of PR, etc.).
- Is obtained by requesting the wireless tag reader 70 and the data obtained from the wireless tag reader 70 is converted into data of a communication protocol (SECS protocol) used for data exchange between the semiconductor process tool 10 and the host 20.
- SECS protocol communication protocol
- the PR management device 60 displays the position of the empty PR container 30 in the semiconductor process tool 10 and the data related to the PR container 30 on the display unit 690 based on the data related to the PR container 30 acquired from the wireless tag reader 70 (Ste S430). Thereby, the operator can easily grasp the position of the empty PR container 30 and the data related to the PR container 30.
- steps S410, S420, and S430 constitute a first event processing step of the present invention.
- the PR management device 60 determines whether or not a PR removal message including data related to the PR container 30 removed from the semiconductor process tool 10 is received from the wireless tag reader 70 (step S440).
- the PR management device 60 exchanges data regarding the removed PR container 30 between the semiconductor process tool 10 and the host 20.
- the data is converted into communication protocol data to be used and sent to the host 20 (step S450). That is, the operator brings a new PR container 30 ′, which is the same as the empty PR container 30, from the data displayed on the display unit 690 of the PR management device 60 from the PR temporary storage (PR Stocker) in the clean room.
- steps S440 and S450 constitute a second event processing step of the present invention.
- the PR management device 60 wirelessly transmits a PR insertion message including data relating to the newly placed PR container 30 ′ at the position of the PR container 30 removed from the semiconductor process tool 10. It is determined whether it has been received from the tag reader 70 (step S460). When the PR management device 60 receives the PR insertion message (“YES” in step S460), the PR management device 60 transmits data regarding the newly placed PR container 30 ′ between the semiconductor process tool 10 and the host 20. The data is converted into communication protocol data used for the exchange of data and sent to the host 20 (step S470).
- Steps S460 and S470 constitute the third event processing step of the present invention.
- the PR management device 60 compares the data regarding the empty PR container 30 with the data regarding the newly disposed PR container 30 'to determine whether or not there is an error in the PR replacement work (step S480). If there is no error (“NO” in step S480), the process ends. If there is an error (“YES” in step S480), it is notified that there was an error in the PR replacement work (step S490). As a result, the operator recognizes that an error has occurred in the PR replacement work, and performs the corresponding process. Steps S480 and S490 constitute an error determination step of the present invention.
- FIG. 5 shows a block diagram of a PR management device 80 according to the second embodiment of the present invention.
- the PR management device 80 is connected to the wireless tag reader 70 and includes an acquisition unit 810, a storage unit 820, a comparison unit 830, and a notification unit 840.
- the acquisition unit 810 transmits the PR type data indicating the PR type to the PR container 30 attached at a predetermined position through the wireless tag reader 70, and the PR attribute indicating the more detailed PR attribute than the PR type. Data is acquired, and the storage unit 820 stores the PR type data and the PR attribute data obtained by the acquisition unit 810.
- the acquisition unit 810 is connected to the wireless tab reader 70, and the wireless tag reader 70 reads the data including the PR type data and the PR attribute data stored in the wireless tag attached to the PR container 30, and sends it to the acquisition unit 810. Then, the acquisition unit 810 acquires the PR type data and the PR attribute data transferred from the wireless tag reader 70.
- the PR management device 80 is connected to the wireless tag reader 70 and the acquisition unit 810 acquires the PR type data and the PR attribute data from the wireless tag reader 70.
- the PR management device 80 may be connected to a barcode reader, and the acquisition unit 810 may be configured to acquire PR type data and PR attribute data from the barcode reader.
- the PR type data is generally data for identifying the type (type) of the PR, and is, for example, a PR product name sold by a PR manufacturer or a product-specific code corresponding to the corresponding product name.
- the PR attribute data is data for identifying a more detailed PR attribute than the PR type. For example, the data indicating the PR manufacturer, the PR manufacturing lot number (LOT No.) Data indicating whether or not there is aging in the data and PR.
- the comparison unit 830 uses the data stored in the storage unit 820 or obtained from the acquisition unit 810 to obtain the PR type data and the PR attribute data for the PR container 30 before replacement, respectively.
- the PR type data and PR attribute data for the replaced PR container 30 ′ are compared.
- the PR attribute data indicating more detailed PR attributes than the PR type data and In order to compare whether or not they match, even a small change affecting the semiconductor manufacturing process can be sensed, and the semiconductor manufacturing process can be further stabilized.
- the notification unit 840 notifies whether there is an error in the replacement of the PR container 30 according to the comparison result of the comparison unit 830.
- the notification unit 840 notifies that the non-conforming PR container 30 has been replaced.
- the notification unit 840 if the PR type data is the same before and after replacement of the PR container 30 but the PR attribute data is different, the notification unit 840 notifies that there is a possibility that an error may occur due to replacement of the PR container 30.
- the notification by the notification unit 840 can be performed by any method such as an audible or visual notification, and the notification can be transmitted to the operator or the host device.
- the PR management device 80 when replacing the PR container 30, compares whether or not it matches with the PR attribute data indicating a more detailed PR attribute than the PR type data. Since a small change that affects the semiconductor manufacturing process can be detected, the PR management device 80 provides an effect of further stabilizing the semiconductor manufacturing process.
- the acquisition unit 810 acquires PR type data indicating the type of PR in the PR container 30 and PR attribute data indicating more detailed PR attributes than the PR type through the wireless tag reader 70 (S610). ).
- the PR type data and the PR attribute data obtained by the acquisition unit 810 are stored in the storage unit 820 (S620).
- the PR management device 80 determines whether or not the PR container has been replaced (S630).
- whether or not the PR container 30 has been replaced can be determined by a known method such as a change in pressure at the position where the PR container 30 is placed or detection by a wireless tab reader.
- the acquisition unit 810 acquires PR type data and PR attribute data for the newly replaced PR container 30 ′ through the wireless tab reader 70 (S640). ). Then, the comparison unit 830 determines whether or not the PR type data is the same before and after the replacement (S650). If it is determined that the PR type data is not the same (“No” in S650), the notification unit 840 determines that the PR container 30 is incompatible. (S660). If the comparison unit 830 determines that the PR type data is the same before and after the replacement (“Yes” in S650), the comparison unit 830 subsequently determines whether the PR attribute data is the same before and after the replacement (S670).
- the notification unit 840 when it is determined that they are not the same (S670 'No'), the notification unit 840 notifies that an error may occur due to replacement of the PR container (S680). If it is determined that the PR attribute data is the same before and after replacement (“YES” in S670), the notification unit 840 notifies that there is no possibility of an error due to replacement of the PR container (S690). .
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Abstract
This photoresist management device contains: a first event processor for, upon receiving a first message expressing that a photoresist container is empty and originating from a semiconductor fabrication tool, requesting and obtaining data pertaining to the empty photoresist container from a wireless tag reader, and transmitting the data to a host; a second event processor for, upon receiving a second message containing data pertaining to a photoresist container removed from the semiconductor fabrication tool and originating from the wireless tag reader, transmitting the data pertaining to the removed photoresist container to the host; and a third event processor for, upon receiving a third message containing data pertaining to a photoresist container newly positioned in the location of the photoresist container that was removed from the semiconductor fabrication tool, transmitting the data pertaining to the newly positioned photoresist container to the host.
Description
本発明は、半導体製造工程においてフォトレジストの管理に係り、特に半導体フォトリソグラフィ工程用フォトレジストの管理装置及び管理方法に関する。
The present invention relates to photoresist management in a semiconductor manufacturing process, and more particularly to a photoresist management apparatus and management method for a semiconductor photolithography process.
従来、半導体フォトリソグラフィ工程において使用されるフォトレジスト（以下、「ＰＲ」と略称する）は、バーコードを用いて管理され、半導体製造工程を実施する半導体工程ツールからのデータと、ＰＲを管理するバーコードシステムからのデータとが別途のチャンネルを介してホストへ報告されていた。
Conventionally, a photoresist (hereinafter abbreviated as “PR”) used in a semiconductor photolithography process is managed using a bar code, and manages data and data from a semiconductor process tool for performing a semiconductor manufacturing process. Data from the bar code system was reported to the host via a separate channel.
図１は、従来のバーコードを用いたＰＲ管理システムの構成を示す図である。ホスト２０は、半導体工程ツール１０に接続され、半導体製造工程に関するデータを送受信及び処理する。ＰＲは、フォトリソグラフィに使用される感光性高分子物質であり、一般に、ボトル形状のＰＲ容器３０に入れられて半導体工程ツール１０内に配置される。ＰＲ容器３０には、バーコードが付着されており、オペレーターは、バーコードリーダー５０にてＰＲに関するデータを取得し、該データをバーコードコントローラ４０を介してホスト２０へ送る。
FIG. 1 is a diagram showing a configuration of a conventional PR management system using a barcode. The host 20 is connected to the semiconductor process tool 10 and transmits / receives and processes data related to the semiconductor manufacturing process. PR is a photosensitive polymer material used for photolithography, and is generally placed in a bottle-shaped PR container 30 and placed in the semiconductor process tool 10. A barcode is attached to the PR container 30, and the operator acquires data relating to PR with the barcode reader 50 and sends the data to the host 20 via the barcode controller 40.
図１に示された従来のＰＲ管理システムでは、次のようなプロセスによってＰＲを管理する。
In the conventional PR management system shown in FIG. 1, PR is managed by the following process.
半導体製造工程の進行に伴い、ＰＲ容器３０内のＰＲが完全に無くなると、半導体工程ツール１０はＰＲ容器３０内にＰＲがないことを検出し、それをホスト２０に通知する。そこで、オペレーターは、ホスト２０から通知されたメッセージを見てＰＲ容器３０が空状態であることを認識する。しかる後、オペレーターは、半導体工程ツール１０に配置されたＰＲ容器３０の状態を直接目視して空状態のＰＲ容器３０を確認する。そして、オペレーターは、同じＰＲが入っている新しいＰＲ容器３０’（図示せず）に関するデータをバーコードリーダー５０にて入力した後、空状態のＰＲ容器３０を新しいＰＲ容器３０’に取り替える。バーコートリーダー５０にて入力されたデータは、バーコードリーダーコントローラ４０を介してホスト２０へ送られる。
When the PR in the PR container 30 is completely removed as the semiconductor manufacturing process proceeds, the semiconductor process tool 10 detects that there is no PR in the PR container 30 and notifies the host 20 of it. Therefore, the operator sees the message notified from the host 20 and recognizes that the PR container 30 is empty. Thereafter, the operator directly checks the state of the PR container 30 arranged in the semiconductor process tool 10 to confirm the empty PR container 30. Then, the operator inputs data on a new PR container 30 '(not shown) containing the same PR with the barcode reader 50, and then replaces the empty PR container 30 with a new PR container 30'. Data input by the bar code reader 50 is sent to the host 20 via the bar code reader controller 40.
なお、従来は所定の位置（例えば、半導体工程ツール１０）に取り付けられたＰＲ容器３０内のＰＲがすべて使用されたときのＰＲ容器３０の取り替え作業は次のような順で行われた。先に、センサーによって、ＰＲ容器３０内にＰＲが存在しないこと（ＰＲエンプティーイベント）が検出されると、オペレーターは、同じ種類の新しい容器３０’を持ってくる。その後、オペレーターは、ＰＲのないＰＲ容器３０を取り外し、その位置に新たにＰＲ容器３０’を取り付け、新たに取り付けられたＰＲ容器３０’に付着されたバーコードをバーコードリーダー５０を通じて読み出す。このとき、バーコードリーダー５０が接続されたＰＲ管理装置は、読み出されたバーコードデータから取り替え前後のＰＲ容器（３０、３０’）内のＰＲ種類が同じか否かを判定し、同じ種類ではない場合には警告メッセージを表示する。
Conventionally, the replacement operation of the PR container 30 when all the PR in the PR container 30 attached to a predetermined position (for example, the semiconductor process tool 10) is used is performed in the following order. First, when the sensor detects that no PR is present in the PR container 30 (PR empty event), the operator brings a new container 30 'of the same type. Thereafter, the operator removes the PR container 30 without PR, attaches a new PR container 30 ′ at that position, and reads the barcode attached to the newly attached PR container 30 ′ through the barcode reader 50. At this time, the PR management apparatus to which the barcode reader 50 is connected determines whether or not the PR types in the PR containers (30, 30 ′) before and after replacement are the same from the read barcode data, and the same type If not, a warning message is displayed.
図１に示された従来のＰＲ管理システムでは、半導体工程ツール１０とホスト２０間での通信チャンネルと、バーコードリーダー５０とホスト２０間での通信チャンネルとが別に存在するため、ホスト２０では２つの別の経路を介して入ってくるデータを同期化して使用する必要があるという煩わしさがあった。また、従来のＰＲ管理システムは、基本的にバーコードを用いたシステムであって、ＰＲの取り替え作業の際にオペレーターが、取り替えられるＰＲのデータをバーコードリーダー５０にて直接入力していたため、その取り替えに手間がかかり、またオペレーターのエラーによって別のＰＲに取り替えられてしまうという問題点が存在していた。
In the conventional PR management system shown in FIG. 1, a communication channel between the semiconductor process tool 10 and the host 20 and a communication channel between the barcode reader 50 and the host 20 exist separately. There was annoyance that it was necessary to synchronize and use data coming in via two different routes. In addition, the conventional PR management system is basically a system using a bar code, and the operator directly inputs the PR data to be replaced with the bar code reader 50 during the PR replacement work. There is a problem that the replacement takes time and is replaced with another PR due to an operator error.
なお、前述した従来技術では、取り替え前後のＰＲ容器（３０、３０’）に付着されたバーコードデータを用いてＰＲの種類が一致するか否かのみを確認したが、実際の半導体製造の際に、同じ種類のＰＲであるとしても、製造社、ロット番号、エージングがあるか否か等が異なる場合には、ＰＲにおいて微細な成分の差異が発生し、このような差異が実際の半導体製造プロセスに影響を及ぼすという問題点が存在した。
In the above-described prior art, the bar code data attached to the PR containers (30, 30 ′) before and after the replacement is used only to check whether the PR types match. Even if they are the same type of PR, if the manufacturer, lot number, or whether there is aging, etc. are different, there will be a difference in fine components in the PR, and such a difference will be the actual semiconductor manufacturing. There was a problem affecting the process.
本発明は、こうした従来技術の問題点を解決するためになされたものであって、半導体製造工程において使用されたＰＲを無線タグ技術を用いて管理し、通信系統を一元化することで同期化されたＰＲ管理データをより適切なタイミングで提供することをその目的とする。
The present invention has been made to solve such problems of the prior art, and is managed by managing the PR used in the semiconductor manufacturing process by using the wireless tag technology and unifying the communication system. The purpose is to provide the PR management data at a more appropriate timing.
また、本発明は実際の半導体製造プロセスに影響を及ぼす不適合なＰＲへの取替えを事前に検出してプロセスの安定性を高めることを目的とする。
Also, an object of the present invention is to improve the process stability by detecting in advance the replacement with an incompatible PR that affects the actual semiconductor manufacturing process.
上記の目的を達成するための本発明に係るフォトレジストの管理装置は、半導体工程ツール、無線タグリーダー、及びホストに接続され、上記半導体工程ツールからフォトレジスト容器が空状態であることを示す第１のメッセージを受信すると、空状態の上記フォトレジスト容器に関するデータを上記無線タグリーダーに対して要求して取得し、上記無線タグリーダーから取得したデータを上記ホストへ送る第１のイベント処理部と、上記半導体工程ツールから取り外されたフォトレジスト容器に関するデータを含む第２のメッセージを上記無線タグリーダーから受信すると、取り外されたフォトレジスト容器に関するデータを上記ホストへ送る第２のイベント処理部と、上記半導体工程ツールから取り外されたフォトレジスト容器の位置に新たに配置されたフォトレジスト容器に関するデータを含む第３のメッセージを上記無線タグリーダーから受信すると、新たに配置されたフォトレジスト容器に関するデータを上記ホストへ送る第３のイベント処理部と、を含む。
In order to achieve the above object, a photoresist management apparatus according to the present invention is connected to a semiconductor process tool, a wireless tag reader, and a host, and indicates that a photoresist container is empty from the semiconductor process tool. A first event processing unit that requests and obtains data relating to the empty photoresist container from the wireless tag reader and sends the data obtained from the wireless tag reader to the host; Receiving a second message including data relating to the photoresist container removed from the semiconductor process tool from the wireless tag reader; a second event processing unit sending data relating to the removed photoresist container to the host; Location of photoresist container removed from the semiconductor process tool And a third event processing unit that sends data relating to the newly placed photoresist container to the host when receiving a third message including data relating to the newly placed photoresist container from the wireless tag reader. .
また、上記の目的を達成するための本発明に係るフォトレジスト管理方法は、半導体工程ツール、無線タグリーダー、及びホストに接続されたフォトレジスト管理装置における、フォトレジストを管理するための方法であって、上記半導体工程ツールからフォトレジスト容器が空状態であることを示す第１のメッセージを受信すると、空状態の上記フォトレジスト容器に関するデータを上記無線タグリーダーに要求して取得し、上記無線タグリーダーから取得したデータを上記ホストへ送る第１のイベント処理ステップと、上記半導体工程ツールから取り外されたフォトレジスト容器に関するデータを含む第２のメッセージを上記無線タグリーダーから受信すると、取り外されたフォトレジスト容器に関するデータを上記ホストへ送る第２のイベント処理ステップと、上記半導体工程ツールから取り外されたフォトレジスト容器の位置に新たに配置されたフォトレジスト容器に関するデータを含む第３のメッセージを上記無線タグリーダーから受信すると、新たに配置されたフォトレジスト容器に関するデータを上記ホストへ送る第３のイベント処理ステップと、を含む。
A photoresist management method according to the present invention for achieving the above object is a method for managing photoresist in a photoresist management apparatus connected to a semiconductor process tool, a wireless tag reader, and a host. When the first message indicating that the photoresist container is empty is received from the semiconductor process tool, the wireless tag reader is requested to obtain data related to the empty photoresist container, and the wireless tag is acquired. A first event processing step for sending data acquired from a reader to the host; and a second message including data relating to a photoresist container removed from the semiconductor process tool; Second to send data on resist containers to the host Upon receiving a third message from the RFID tag reader that includes data relating to an event processing step and a photoresist container newly disposed at the position of the photoresist container removed from the semiconductor process tool, the newly disposed photo And a third event processing step for sending data relating to the resist container to the host.
なお、本発明による他のフォトレジスト管理装置は、所定の位置に取り付けられたフォトレジスト容器に対し、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データを取得する取得部と、前記取得部によって得られた前記フォトレジスト種類データと前記フォトレジスト属性データを格納する格納部と、前記フォトレジスト容器が取り替えられた場合、前記格納部に格納されたか前記取得部から得られたデータを用いて、取り替え前のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データを取り替え後のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データと比較する比較部と、前記比較の結果に応じて、フォトレジスト容器の取り替えにおいてエラーがあったか否かを通知する通知部とを含む。
In addition, another photoresist management apparatus according to the present invention obtains photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist for a photoresist container attached at a predetermined position. An acquisition unit, a storage unit for storing the photoresist type data and the photoresist attribute data obtained by the acquisition unit, and, if the photoresist container is replaced, whether the acquisition unit is stored in the storage unit. A comparison unit that compares the photoresist type data and photoresist attribute data for the photoresist container before replacement with the photoresist type data and photoresist attribute data for the photoresist container after replacement, using the data obtained from Depending on the result of the comparison, And a notification section for notifying whether or not there was an error in the replacement of the resist container.
さらに、本発明による他のフォトレジスト管理方法は、所定の位置に取り付けられたフォトレジスト容器に対し、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データを取得する取得ステップと、前記取得ステップから得られた前記フォトレジスト種類データと前記フォトレジスト属性データを格納する格納ステップと、前記フォトレジスト容器が取り替えられた場合、前記格納ステップで格納されたか前記取得ステップで得られたデータを用いて、取り替え前のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データをそれぞれ取り替え後のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データと比較する比較ステップと、前記比較結果に応じて、フォトレジスト容器の取り替えにおいてエラーがあったか否かを通知する通知ステップとを含む。
Furthermore, another photoresist management method according to the present invention obtains photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist for a photoresist container attached at a predetermined position. An acquisition step, a storage step for storing the photoresist type data and the photoresist attribute data obtained from the acquisition step, and, if the photoresist container has been replaced, whether it was stored in the storage step or the acquisition step. Compare the photoresist type data and photoresist attribute data for the photoresist container before replacement with the photoresist type data and photoresist attribute data for the photoresist container after replacement, respectively, using the data obtained in And step in response to the comparison result, and a notification step of notifying whether an error in the replacement of the photoresist container.
本発明によれば、半導体製造工程において使用されるＰＲを無線タグ技術を用いて管理し、通信系統を一元化することで同期化されたＰＲ管理データをより適切なタイミングで提供することができる。
According to the present invention, it is possible to provide PR management data synchronized at a more appropriate timing by managing the PR used in the semiconductor manufacturing process using the wireless tag technology and unifying the communication system.
また、本発明によれば、二元化されていた従来のＰＲ管理体系を一元化することで、半導体工程ツールからの情報とＰＲ容器からデータを読み取る無線タグリーダーからの情報とが同時に取り集められてホストへ通知されるため、ＰＲ管理データを適切なタイミングで管理することができる。
In addition, according to the present invention, information from a semiconductor process tool and information from a wireless tag reader that reads data from a PR container can be collected simultaneously by unifying the conventional PR management system that has been dualized. Therefore, the PR management data can be managed at an appropriate timing.
さらに、本発明によれば、半導体工程ツールや無線タグリーダーから取得したデータをＳＥＣＳプロトコルメッセージに変換して管理することで、ホスト側においてより容易にデータを管理することができる。なお、ＳＥＣＳは“ＳＥＭＩ Ｅｑｕｉｐｍｅｎｔ Ｃｏｍｍｕｎｉｃａｔｉｏｎ Ｓｔａｎｄａｒｄ”の略称であって、ＳＥＣＳプロトコルはＳＥＭＩスタンダードの中で半導体工程ツールとホスト間のメッセージ交換に関する通信プロトコルである。また、ＳＥＭＩは、“Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｅｑｕｉｐｍｅｎｔ ａｎｄ Ｍａｔｅｒｉａｌ Ｉｎｔｅｒｎａｔｉｏｎａｌ”の略称である。
Furthermore, according to the present invention, data acquired from a semiconductor process tool or a wireless tag reader is converted into a SECS protocol message and managed, so that data can be managed more easily on the host side. SECS is an abbreviation for “SEMI Equipment Communication Standard”, and the SECS protocol is a communication protocol related to message exchange between a semiconductor process tool and a host in the SEMI standard. SEMI is an abbreviation for “Semiconductor Equipment and Material International”.
なお、本発明によれば、実際の半導体製造プロセスに影響を及ぼす不適合なＰＲへの取り替えを事前に検出してプロセスの安定性を高めることができる。
It should be noted that according to the present invention, it is possible to improve the process stability by detecting in advance a replacement with an incompatible PR that affects the actual semiconductor manufacturing process.
以下、図面を参照して本発明の実施形態に係るＰＲ管理装置６０、８０及びＰＲ管理方法について詳しく説明する。
Hereinafter, the PR management devices 60 and 80 and the PR management method according to the embodiment of the present invention will be described in detail with reference to the drawings.
＜第１実施形態＞
図２は、本発明の第１実施形態に係るＰＲ管理装置６０が、半導体工程ツール１０、ホスト２０、及び無線タグリーダー７０に接続されている構成を示す図である。 <First Embodiment>
FIG. 2 is a diagram illustrating a configuration in which thePR management device 60 according to the first embodiment of the present invention is connected to the semiconductor process tool 10, the host 20, and the wireless tag reader 70.
図２は、本発明の第１実施形態に係るＰＲ管理装置６０が、半導体工程ツール１０、ホスト２０、及び無線タグリーダー７０に接続されている構成を示す図である。 <First Embodiment>
FIG. 2 is a diagram illustrating a configuration in which the
ＰＲ管理装置６０は、半導体工程ツール１０、ホスト２０、及び無線タグリーダー７０に接続され、半導体工程ツール１０または無線タグリーダー７０から送られてくるデータを同期化してホスト２０へ送り、ホスト２０からのデータを半導体工程ツール１０または無線タグリーダー７０へ送る。半導体工程ツール１０は、半導体製造工程において発生する各種のデータをＰＲ管理装置６０を介してホスト２０へ送る。無線タグリーダー７０は、半導体工程ツール１０内に配置された各ＰＲ容器３０に付着された無線タグからデータを読み取り、該読み取りデータをＰＲ管理装置６０を介してホスト２０へ送る。
The PR management device 60 is connected to the semiconductor process tool 10, the host 20, and the wireless tag reader 70, synchronizes data sent from the semiconductor process tool 10 or the wireless tag reader 70, and sends the data to the host 20. Is sent to the semiconductor process tool 10 or the wireless tag reader 70. The semiconductor process tool 10 sends various data generated in the semiconductor manufacturing process to the host 20 via the PR management device 60. The wireless tag reader 70 reads data from the wireless tag attached to each PR container 30 arranged in the semiconductor process tool 10, and sends the read data to the host 20 via the PR management device 60.
以下、図３を参照して本発明の第１実施形態に係るＰＲ管理装置６０の構成について説明する。
Hereinafter, the configuration of the PR management device 60 according to the first embodiment of the present invention will be described with reference to FIG.
ＰＲ管理装置６０は、半導体工程ツール１０とのデータのやり取りのためのインターフェース部である半導体工程ツールＩＦ６１０、無線タグリーダー７０とのデータのやり取りのためのインターフェース部である無線タグリーダーＩＦ６２０、及びホスト２０とのデータのやり取りのためのインターフェース部であるホストＩＦ６３０と、を含む。さらに、ＰＲ管理装置６０は、半導体工程ツールＩＦ６１０、無線タグリーダーＩＦ６２０、及びホストＩＦ６３０からのデータを処理し且つ必要な指令を送る制御部６００を含む。制御部６００が処理したデータは表示部６９０に表示され、オペレーターが容易に確認することができる。
The PR management device 60 includes a semiconductor process tool IF 610 that is an interface unit for exchanging data with the semiconductor process tool 10, a wireless tag reader IF 620 that is an interface unit for exchanging data with the wireless tag reader 70, and a host. And a host IF 630 which is an interface unit for exchanging data with 20. Further, the PR management device 60 includes a control unit 600 that processes data from the semiconductor process tool IF 610, the wireless tag reader IF 620, and the host IF 630 and sends necessary commands. Data processed by the control unit 600 is displayed on the display unit 690 and can be easily confirmed by the operator.
第１のイベント処理部としてのＰＲエンプティー（ｅｍｐｔｙ）イベント処理部６５０は、半導体工程ツール１０からＰＲ容器３０が空状態であることを示す、第１のメッセージとしてのＰＲエンプティーメッセージを受信すると、空状態のＰＲ容器３０に関するデータを無線タグリーダー７０に要求して取得し、無線タグリーダー７０から取得したデータをホスト２０へ送る構成となっている。
When receiving a PR empty message as a first message indicating that the PR container 30 is empty from the semiconductor process tool 10, the PR empty event processing unit 650 as a first event processing unit receives an empty Data regarding the PR container 30 in a state is requested and acquired from the wireless tag reader 70, and the data acquired from the wireless tag reader 70 is sent to the host 20.
また、ＰＲエンプティーイベント処理部６５０は、無線タグリーダー７０から取得したＰＲ容器３０に関するデータに基づき、半導体工程ツール１０内の空状態のＰＲ容器３０の位置及びＰＲ容器３０に関するデータを表示部６９０にディスプレイする。これにより、オペレーターは空状態のＰＲ容器３０の位置及びＰＲ容器３０に関するデータを容易に把握することができる。
The PR empty event processing unit 650 also displays the position of the empty PR container 30 in the semiconductor process tool 10 and the data related to the PR container 30 on the display unit 690 based on the data related to the PR container 30 acquired from the wireless tag reader 70. Display. As a result, the operator can easily grasp the position of the empty PR container 30 and the data related to the PR container 30.
第２のイベント処理部としてのＰＲ取り外しイベント処理部６６０は、半導体工程ツール１０からＰＲ容器３０が取り外され、該取り外されたＰＲ容器３０に関するデータを含む、第２のメッセージとしてのＰＲ取り外しメッセージを無線タグリーダー７０から受信すると、該取り外されたＰＲ容器３０に関するデータをホスト２０へ送る構成となっている。
The PR removal event processing unit 660 as a second event processing unit removes the PR container 30 from the semiconductor process tool 10 and outputs a PR removal message as a second message including data regarding the removed PR container 30. When receiving from the wireless tag reader 70, data regarding the removed PR container 30 is sent to the host 20.
第３のイベント処理部としてのＰＲ投入イベント処理部６７０は、半導体工程ツール１０から取り外されたＰＲ容器３０の位置に新しいＰＲ容器３０’が配置され、該新しいＰＲ容器３０’に関するデータを含む、第３のメッセージとしてのＰＲ投入メッセージを無線タグリーダー７０から受信すると、新たに配置されたＰＲ容器３０’に関するデータをホスト２０へ送る構成となっている。
The PR input event processing unit 670 as a third event processing unit includes a new PR container 30 ′ disposed at the position of the PR container 30 removed from the semiconductor process tool 10, and includes data regarding the new PR container 30 ′. When the PR insertion message as the third message is received from the wireless tag reader 70, data regarding the newly placed PR container 30 ′ is sent to the host 20.
エラー判定部６８０は、空状態のＰＲ容器３０に関するデータと新たに配置されたＰＲ容器３０’に関するデータとを比べて、ＰＲ取り替え作業にエラーがあったか否かを判定し、エラーがあったと判定された場合にＰＲ容器３０、３０’の取り替え作業にエラーがあることを通知する構成となっている。なお、本実施形態では、ＰＲ管理装置６０内にエラー判定部６８０を設けて、ＰＲ管理装置６０にてＰＲ容器３０、３０’の取り替え作業にエラーがあったか否かを判定するように構成したが、他の実施形態として、ホスト２０内にエラー判定部６８０を設けて、ホスト２０にてＰＲ容器３０、３０’の取り替え作業にエラーがあったか否かを判定することに構成することもできる。エラー判定部６８０は、ＰＲの種類を示すＰＲ種類データを比較してＰＲ容器３０の取り替え作業にエラーがあったか否かを判定することができ、後述する第２実施形態のようにＰＲの種類を示すＰＲ種類データだけではなく、ＰＲの種類に比べてより詳細なＰＲの属性を示すＰＲ属性データを比較してＰＲ容器３０の取り替え作業にエラーがあったか否かを判定することもできる。
The error determination unit 680 compares the data regarding the empty PR container 30 with the data regarding the newly disposed PR container 30 ′ to determine whether or not there is an error in the PR replacement work, and it is determined that there is an error. In this case, it is configured to notify that there is an error in the replacement work of the PR containers 30, 30 ′. In the present embodiment, the error determination unit 680 is provided in the PR management device 60 so that the PR management device 60 determines whether there is an error in the replacement work of the PR containers 30 and 30 ′. As another embodiment, an error determination unit 680 may be provided in the host 20 to determine whether or not the host 20 has an error in the replacement work of the PR containers 30 and 30 ′. The error determination unit 680 can determine whether or not there is an error in the replacement work of the PR container 30 by comparing the PR type data indicating the type of PR, and the type of PR is determined as in the second embodiment to be described later. It is possible to determine whether or not there is an error in the replacement work of the PR container 30 by comparing not only the PR type data to be shown but also the PR attribute data showing more detailed PR attributes than the PR type.
半導体工程ツール１０とホスト２０間でのデータ通信と、無線タグリーダー７０とホスト２０間でのデータ通信とでは互いに異なる通信規約を用いる。このため、ＰＲエンプティーイベント処理部６５０、ＰＲ取り外しイベント処理部６６０及びＰＲ投入イベント処理部６７０は、無線タグリーダー７０からの空状態のＰＲ容器３０に関するデータ、ＰＲ取り外しメッセージ及びＰＲ投入メッセージを、例えば、ＳＥＣＳプロトコルのような半導体工程ツール１０とホスト２０間でのデータのやり取りに用いられる通信規約のデータに変換し、該変換されたデータをホスト２０へ送る。
The data communication between the semiconductor process tool 10 and the host 20 and the data communication between the wireless tag reader 70 and the host 20 use different communication rules. For this reason, the PR empty event processing unit 650, the PR removal event processing unit 660, and the PR insertion event processing unit 670 receive, for example, data regarding the empty PR container 30 from the wireless tag reader 70, a PR removal message, and a PR insertion message. Then, the data is converted into communication protocol data used for data exchange between the semiconductor process tool 10 and the host 20 such as the SECS protocol, and the converted data is sent to the host 20.
以下、図４を参照して本発明の第１実施形態に係るＰＲ管理装置６０によるＰＲ管理方法について説明する。
Hereinafter, a PR management method by the PR management device 60 according to the first embodiment of the present invention will be described with reference to FIG.
先ず、ＰＲ管理装置６０は、半導体工程ツール１０からＰＲ容器３０が空状態であることを示すＰＲエンプティーメッセージを受信したか否かを判定する（ステップＳ４１０）。ＰＲ管理装置６０がＰＲエンプティーメッセージを受信した場合（ステップＳ４１０の「ＹＥＳ」）には、ＰＲ管理装置６０は、空状態のＰＲ容器３０に関するデータ（ＰＲ容器３０の位置及びＰＲの種類などに関するデータ）を無線タグリーダー７０に要求して取得し、無線タグリーダー７０から取得したデータを半導体工程ツール１０とホスト２０間でのデータのやり取りに用いられる通信規約（ＳＥＣＳプロトコル）のデータに変換してホスト２０へ送る（ステップＳ４２０）。またＰＲ管理装置６０は、無線タグリーダー７０から取得したＰＲ容器３０に関するデータに基づき、半導体工程ツール１０内の空状態のＰＲ容器３０の位置及びＰＲ容器３０に関するデータを表示部６９０にディスプレイする（ステップＳ４３０）。これにより、オペレーターは、空状態のＰＲ容器３０の位置及びＰＲ容器３０に関するデータを容易に把握することができる。なお、ステップＳ４１０、Ｓ４２０及びＳ４３０は、本発明の第１のイベント処理ステップを構成している。
First, the PR management device 60 determines whether or not a PR empty message indicating that the PR container 30 is empty is received from the semiconductor process tool 10 (step S410). When the PR management device 60 receives the PR empty message (“YES” in step S410), the PR management device 60 performs data relating to the empty PR container 30 (data relating to the position of the PR container 30 and the type of PR, etc.). ) Is obtained by requesting the wireless tag reader 70, and the data obtained from the wireless tag reader 70 is converted into data of a communication protocol (SECS protocol) used for data exchange between the semiconductor process tool 10 and the host 20. The data is sent to the host 20 (step S420). The PR management device 60 displays the position of the empty PR container 30 in the semiconductor process tool 10 and the data related to the PR container 30 on the display unit 690 based on the data related to the PR container 30 acquired from the wireless tag reader 70 ( Step S430). Thereby, the operator can easily grasp the position of the empty PR container 30 and the data related to the PR container 30. Note that steps S410, S420, and S430 constitute a first event processing step of the present invention.
しかる後、ＰＲ管理装置６０は、半導体工程ツール１０から取り外されたＰＲ容器３０に関するデータを含むＰＲ取り外しメッセージを無線タグリーダー７０から受信したか否かを判定する（ステップＳ４４０）。ＰＲ管理装置６０がＰＲ取り外しメッセージを受信した場合（ステップＳ４４０の「ＹＥＳ」）、ＰＲ管理装置６０は、取り外されたＰＲ容器３０に関するデータを半導体工程ツール１０とホスト２０間でのデータのやり取りに用いられる通信規約のデータに変換してホスト２０へ送る（ステップＳ４５０）。すなわち、オペレーターがＰＲ管理装置６０の表示部６９０にディスプレイされたデータから空状態のＰＲ容器３０と同じの新しいＰＲ容器３０’をクリーンルーム内のＰＲ仮保管所（ＰＲ Ｓｔｏｃｋｅｒ）から持ってきて、空状態のＰＲ容器３０を新しいＰＲ容器３０’で取り替えるために空状態のＰＲ容器３０を取り外した場合、無線タグリーダー７０がＰＲ取り外しメッセージをＰＲ管理装置６０へ送り、該メッセージを受信したＰＲ管理装置６０は、取り外されたＰＲ容器３０に関するデータをＳＥＣＳプロトコルに変換してホスト２０へ送るようになる。なお、ステップＳ４４０及びＳ４５０は、本発明の第２のイベント処理ステップを構成している。
Thereafter, the PR management device 60 determines whether or not a PR removal message including data related to the PR container 30 removed from the semiconductor process tool 10 is received from the wireless tag reader 70 (step S440). When the PR management device 60 receives the PR removal message (“YES” in step S440), the PR management device 60 exchanges data regarding the removed PR container 30 between the semiconductor process tool 10 and the host 20. The data is converted into communication protocol data to be used and sent to the host 20 (step S450). That is, the operator brings a new PR container 30 ′, which is the same as the empty PR container 30, from the data displayed on the display unit 690 of the PR management device 60 from the PR temporary storage (PR Stocker) in the clean room. When the empty PR container 30 is removed in order to replace the state PR container 30 with a new PR container 30 ′, the wireless tag reader 70 sends a PR removal message to the PR management device 60, and the PR management device that has received the message 60 converts the data about the removed PR container 30 into SECS protocol and sends it to the host 20. Note that steps S440 and S450 constitute a second event processing step of the present invention.
そして、ＰＲ管理装置６０は、半導体工程ツール１０から取り外されたＰＲ容器３０の位置にＰＲ容器３０’が新たに配置され、新たに配置されたＰＲ容器３０’に関するデータを含むＰＲ投入メッセージを無線タグリーダー７０から受信したか否かを判定する（ステップＳ４６０）。ＰＲ管理装置６０がＰＲ投入メッセージを受信した場合（ステップＳ４６０の「ＹＥＳ」）、ＰＲ管理装置６０は、新たに配置されたＰＲ容器３０’に関するデータを半導体工程ツール１０とホスト２０間でのデータのやり取りに用いられる通信規約のデータに変換してホスト２０へ送る（ステップＳ４７０）。すなわち、オペレーターが新しいＰＲ容器３０’をＰＲ容器３０が取り外された位置に装着すると、無線タグリーダー７０がＰＲ投入メッセージをＰＲ管理装置６０へ送り、該メッセージを受信したＰＲ管理装置６０は新たに配置されたＰＲ容器３０’に関するデータをＳＥＣＳプロトコルに変換してホスト２０へ送るようになる。なお、ステップＳ４６０及びＳ４７０は、本発明の第３のイベント処理ステップを構成している。
Then, the PR management device 60 wirelessly transmits a PR insertion message including data relating to the newly placed PR container 30 ′ at the position of the PR container 30 removed from the semiconductor process tool 10. It is determined whether it has been received from the tag reader 70 (step S460). When the PR management device 60 receives the PR insertion message (“YES” in step S460), the PR management device 60 transmits data regarding the newly placed PR container 30 ′ between the semiconductor process tool 10 and the host 20. The data is converted into communication protocol data used for the exchange of data and sent to the host 20 (step S470). That is, when the operator attaches a new PR container 30 ′ to the position where the PR container 30 is removed, the wireless tag reader 70 sends a PR insertion message to the PR management device 60, and the PR management device 60 that has received the message newly Data regarding the arranged PR container 30 ′ is converted into SECS protocol and sent to the host 20. Steps S460 and S470 constitute the third event processing step of the present invention.
最後に、ＰＲ管理装置６０は、空状態のＰＲ容器３０に関するデータと新たに配置されたＰＲ容器３０’に関するデータとを比べてＰＲ取り替え作業にエラーがあったか否かを判定する（ステップＳ４８０）。エラーがない場合（ステップＳ４８０の「ＮＯ」）にプロセスを終了する。エラーがあった場合（ステップＳ４８０の「ＹＥＳ」）にはＰＲ取り替え作業にエラーがあったことを通知する（ステップＳ４９０）。これにより、オペレーターはＰＲ取り替え作業にエラーが発生したことを認識し、対応処理を遂行するようになる。なお、ステップＳ４８０及びＳ４９０は、本発明のエラー判定ステップを構成している。
Finally, the PR management device 60 compares the data regarding the empty PR container 30 with the data regarding the newly disposed PR container 30 'to determine whether or not there is an error in the PR replacement work (step S480). If there is no error (“NO” in step S480), the process ends. If there is an error (“YES” in step S480), it is notified that there was an error in the PR replacement work (step S490). As a result, the operator recognizes that an error has occurred in the PR replacement work, and performs the corresponding process. Steps S480 and S490 constitute an error determination step of the present invention.
＜第２実施形態＞
図５は本発明の第２実施形態に係るＰＲ管理装置８０のブロック図を示す。
ＰＲ管理装置８０は無線タグリーダー７０と接続され、取得部８１０、格納部８２０、比較部８３０及び通知部８４０を含む。 Second Embodiment
FIG. 5 shows a block diagram of aPR management device 80 according to the second embodiment of the present invention.
ThePR management device 80 is connected to the wireless tag reader 70 and includes an acquisition unit 810, a storage unit 820, a comparison unit 830, and a notification unit 840.
図５は本発明の第２実施形態に係るＰＲ管理装置８０のブロック図を示す。
ＰＲ管理装置８０は無線タグリーダー７０と接続され、取得部８１０、格納部８２０、比較部８３０及び通知部８４０を含む。 Second Embodiment
FIG. 5 shows a block diagram of a
The
取得部８１０は、無線タグリーダー７０を通じて、所定の位置に取り付けられたＰＲ容器３０に対し、ＰＲの種類を示すＰＲ種類データと、ＰＲの種類に比べてより詳細なＰＲの属性を示すＰＲ属性データを取得し、格納部８２０は、取得部８１０により得られたＰＲ種類データとＰＲ属性データを格納する。取得部８１０は、無線タブリーダー７０と接続されており、無線タグリーダー７０はＰＲ容器３０に付着された無線タグに格納されたＰＲ種類データとＰＲ属性データを含むデータを読み出して取得部８１０に転送し、取得部８１０は無線タグリーダー７０から転送されたＰＲ種類データ及びＰＲ属性データを取得する。
The acquisition unit 810 transmits the PR type data indicating the PR type to the PR container 30 attached at a predetermined position through the wireless tag reader 70, and the PR attribute indicating the more detailed PR attribute than the PR type. Data is acquired, and the storage unit 820 stores the PR type data and the PR attribute data obtained by the acquisition unit 810. The acquisition unit 810 is connected to the wireless tab reader 70, and the wireless tag reader 70 reads the data including the PR type data and the PR attribute data stored in the wireless tag attached to the PR container 30, and sends it to the acquisition unit 810. Then, the acquisition unit 810 acquires the PR type data and the PR attribute data transferred from the wireless tag reader 70.
本実施形態では、ＰＲ管理装置８０が無線タグリーダー７０に接続し、取得部８１０が無線タグリーダー７０からＰＲ種類データ及びＰＲ属性データを取得することを例示しているが、他の実施形態としてＰＲ管理装置８０がバーコードリーダーに接続し、取得部８１０がバーコードリーダーからＰＲ種類データ及びＰＲ属性データを取得するように構成することもできる。
In the present embodiment, the PR management device 80 is connected to the wireless tag reader 70 and the acquisition unit 810 acquires the PR type data and the PR attribute data from the wireless tag reader 70. However, as another embodiment, The PR management device 80 may be connected to a barcode reader, and the acquisition unit 810 may be configured to acquire PR type data and PR attribute data from the barcode reader.
ＰＲ種類データは、一般的にＰＲの種類（タイプ）を識別するためのデータであって、例えば、ＰＲの製造社が販売するＰＲの商品名或いは該当商品名に対応する製品固有のコード等であり、ＰＲ属性データは、ＰＲの種類に比べてより詳細なＰＲの属性を識別するためのデータであって、例えば、ＰＲの製造社を示すデータ、ＰＲの製造ロット番号（ＬＯＴ Ｎｏ.）を示すデータ及びＰＲにエージング（Ａｇｉｎｇ）があったか否かを示すデータである。
The PR type data is generally data for identifying the type (type) of the PR, and is, for example, a PR product name sold by a PR manufacturer or a product-specific code corresponding to the corresponding product name. Yes, the PR attribute data is data for identifying a more detailed PR attribute than the PR type. For example, the data indicating the PR manufacturer, the PR manufacturing lot number (LOT No.) Data indicating whether or not there is aging in the data and PR.
比較部８３０は、ＰＲ容器３０が取り替えられた場合に、格納部８２０に格納されたか取得部８１０から得られたデータを用いて、取り替え前のＰＲ容器３０に対するＰＲ種類データ及びＰＲ属性データをそれぞれ取り替え後のＰＲ容器３０’に対するＰＲ種類データ及びＰＲ属性データと比較する。従来技術では、ＰＲ容器３０の取り替え前後において、ＰＲ種類データが一致しているか否かのみを比較したが、本実施形態では、ＰＲ種類データに比べてより詳細なＰＲ属性を示すＰＲ属性データと一致しているか否かも比較するため、半導体製造プロセスに影響を及ぼす小さな変化も感知することができ、半導体製造プロセスをさらに安定化することができる。
When the PR container 30 is replaced, the comparison unit 830 uses the data stored in the storage unit 820 or obtained from the acquisition unit 810 to obtain the PR type data and the PR attribute data for the PR container 30 before replacement, respectively. The PR type data and PR attribute data for the replaced PR container 30 ′ are compared. In the prior art, only whether or not the PR type data matches before and after the replacement of the PR container 30 is compared, but in this embodiment, the PR attribute data indicating more detailed PR attributes than the PR type data and In order to compare whether or not they match, even a small change affecting the semiconductor manufacturing process can be sensed, and the semiconductor manufacturing process can be further stabilized.
通知部８４０は、比較部８３０の比較結果に応じて、ＰＲ容器３０の取り替えにおいてエラーがあったか否かを通知する。比較の結果、ＰＲ容器３０の取り替え前後においてＰＲ種類データが異なると判断された場合、通知部８４０は不適合なＰＲ容器３０に取り替えられたことを通知する。また、比較の結果、ＰＲ容器３０の取り替え前後においてＰＲ種類データは同じであるが、ＰＲ属性データが異なる場合、通知部８４０はＰＲ容器３０の取り替えによりエラーが発生する可能性があることを通知する。通知部８４０による通知は、聴覚的または視覚的な報知等、如何なる方法によっても行うことができ、その通知はオペレーターまたはホスト装置に伝達することができる。
The notification unit 840 notifies whether there is an error in the replacement of the PR container 30 according to the comparison result of the comparison unit 830. As a result of the comparison, when it is determined that the PR type data is different before and after the replacement of the PR container 30, the notification unit 840 notifies that the non-conforming PR container 30 has been replaced. Also, as a result of comparison, if the PR type data is the same before and after replacement of the PR container 30 but the PR attribute data is different, the notification unit 840 notifies that there is a possibility that an error may occur due to replacement of the PR container 30. To do. The notification by the notification unit 840 can be performed by any method such as an audible or visual notification, and the notification can be transmitted to the operator or the host device.
本発明の第２実施形態によるＰＲ管理装置８０は、ＰＲ容器３０の取替えの際に、ＰＲ種類データに比べてより詳細なＰＲ属性を示すＰＲ属性データと一致しているか否かを比較するため、半導体製造プロセスに影響を及ぼす小さな変化も感知することができるので、ＰＲ管理装置８０によれば、半導体製造プロセスをさらに安定化することができる効果が得られる。
The PR management device 80 according to the second embodiment of the present invention, when replacing the PR container 30, compares whether or not it matches with the PR attribute data indicating a more detailed PR attribute than the PR type data. Since a small change that affects the semiconductor manufacturing process can be detected, the PR management device 80 provides an effect of further stabilizing the semiconductor manufacturing process.
以下では図６を参考にして本発明の第２実施形態によるＰＲ管理装置８０によるＰＲ管理方法を説明する。
Hereinafter, a PR management method by the PR management device 80 according to the second embodiment of the present invention will be described with reference to FIG.
先に、取得部８１０は、無線タグリーダー７０を通じてＰＲ容器３０内のＰＲの種類を示すＰＲ種類データと、ＰＲの種類に比べてより詳細なＰＲの属性を示すＰＲ属性データを取得する（Ｓ６１０）。取得部８１０によって得られたＰＲ種類データとＰＲ属性データは格納部８２０に格納される（Ｓ６２０）。
First, the acquisition unit 810 acquires PR type data indicating the type of PR in the PR container 30 and PR attribute data indicating more detailed PR attributes than the PR type through the wireless tag reader 70 (S610). ). The PR type data and the PR attribute data obtained by the acquisition unit 810 are stored in the storage unit 820 (S620).
その後、ＰＲ管理装置８０はＰＲ容器が取り替えられたか否かを判定する（Ｓ６３０）。ここで、ＰＲ容器３０に取替えがあったか否かの判定は、ＰＲ容器３０が載置された位置における圧力の変化や無線タブリーダーによる検出等、既に知られた方法により行うことができる。
Thereafter, the PR management device 80 determines whether or not the PR container has been replaced (S630). Here, whether or not the PR container 30 has been replaced can be determined by a known method such as a change in pressure at the position where the PR container 30 is placed or detection by a wireless tab reader.
ＰＲ容器３０が取り替えられたと判定されると（Ｓ６３０の‘はい’）、取得部８１０は無線タブリーダー７０を通じて新たに取り替えられたＰＲ容器３０’に対するＰＲ種類データ及びＰＲ属性データを取得する（Ｓ６４０）。そして、比較部８３０は、取り替え前後において、ＰＲ種類データが同じか否かを判定し（Ｓ６５０）、同じでないと判断された場合（Ｓ６５０の‘いいえ’）、通知部８４０は不適合なＰＲ容器３０に取り替えられたことを通知する（Ｓ６６０）。比較部８３０は、取り替え前後において、ＰＲ種類データが同じであると判断した場合（Ｓ６５０の‘はい’）には、続いて取り替え前後においてＰＲ属性データが同じか否かを判定する（Ｓ６７０）。ここで、同じではないと判断された場合（Ｓ６７０‘いいえ’）、通知部８４０がＰＲ容器の取り替えによりエラーが発生する可能性があることを通知する（Ｓ６８０）。取り替え前後において、ＰＲ属性データが同じであると判断された場合（Ｓ６７０の‘はい’）には、通知部８４０がＰＲ容器の取り替えによりエラーが発生する可能性がないことを通知する（Ｓ６９０）。
If it is determined that the PR container 30 has been replaced (“Yes” in S630), the acquisition unit 810 acquires PR type data and PR attribute data for the newly replaced PR container 30 ′ through the wireless tab reader 70 (S640). ). Then, the comparison unit 830 determines whether or not the PR type data is the same before and after the replacement (S650). If it is determined that the PR type data is not the same (“No” in S650), the notification unit 840 determines that the PR container 30 is incompatible. (S660). If the comparison unit 830 determines that the PR type data is the same before and after the replacement (“Yes” in S650), the comparison unit 830 subsequently determines whether the PR attribute data is the same before and after the replacement (S670). Here, when it is determined that they are not the same (S670 'No'), the notification unit 840 notifies that an error may occur due to replacement of the PR container (S680). If it is determined that the PR attribute data is the same before and after replacement (“YES” in S670), the notification unit 840 notifies that there is no possibility of an error due to replacement of the PR container (S690). .
上記のような実施形態のすべては、本発明を実施するにおいて具体的な例を示したものに過ぎなく、これらによって本発明の技術的範囲を限定して解釈してはならなく、本発明はその技術思想、またはその主な特徴を有する多様な形態で実施することができる。
All of the above-described embodiments are merely specific examples in carrying out the present invention, and the technical scope of the present invention should not be construed as being limited thereto. The present invention can be implemented in various forms having the technical idea or the main features.
１０ 半導体工程ツール
２０ ホスト
３０、３０’ ＰＲ容器
４０ バーコードリーダーコントローラ
５０ バーコードリーダー
６０、８０ ＰＲ管理装置
７０ 無線タグリーダー
６００ 制御部
６１０ 半導体工程ツールＩＦ
６２０ 無線タグリーダーＩＦ
６３０ ホストＩＦ
６５０ ＰＲエンプティーイベント処理部
６６０ ＰＲ取り外しイベント処理部
６７０ ＰＲ投入イベント処理部
６８０ エラー判定部
６９０ 表示部
８１０ 取得部
８２０ 格納部
８３０ 比較部
８４０ 通知部 DESCRIPTION OFSYMBOLS 10 Semiconductor process tool 20 Host 30, 30 'PR container 40 Bar code reader controller 50 Bar code reader 60, 80 PR management apparatus 70 Wireless tag reader 600 Control part 610 Semiconductor process tool IF
620 Wireless tag reader IF
630 Host IF
650 PR emptyevent processing unit 660 PR removal event processing unit 670 PR insertion event processing unit 680 error determination unit 690 display unit 810 acquisition unit 820 storage unit 830 comparison unit 840 notification unit
２０ ホスト
３０、３０’ ＰＲ容器
４０ バーコードリーダーコントローラ
５０ バーコードリーダー
６０、８０ ＰＲ管理装置
７０ 無線タグリーダー
６００ 制御部
６１０ 半導体工程ツールＩＦ
６２０ 無線タグリーダーＩＦ
６３０ ホストＩＦ
６５０ ＰＲエンプティーイベント処理部
６６０ ＰＲ取り外しイベント処理部
６７０ ＰＲ投入イベント処理部
６８０ エラー判定部
６９０ 表示部
８１０ 取得部
８２０ 格納部
８３０ 比較部
８４０ 通知部 DESCRIPTION OF
620 Wireless tag reader IF
630 Host IF
650 PR empty
Claims (22)
- 半導体工程ツール、無線タグリーダー、及びホストに接続されたフォトレジスト管理装置であって、
前記半導体工程ツールからフォトレジスト容器が空状態であることを示す第１のメッセージを受信すると、空状態の前記フォトレジスト容器に関するデータを前記無線タグリーダーに要求して取得し、前記無線タグリーダーから取得したデータを前記ホストへ送る第１のイベント処理部と、
前記半導体工程ツールから取り外されたフォトレジスト容器に関するデータを含む第２のメッセージを前記無線タグリーダーから受信すると、取り外されたフォトレジスト容器に関するデータを前記ホストへ送る第２のイベント処理部と、
前記半導体工程ツールから取り外されたフォトレジスト容器の位置に新たに配置されたフォトレジスト容器に関するデータを含む第３のメッセージを前記無線タグリーダーから受信すると、新たに配置されたフォトレジスト容器に関するデータを前記ホストへ送る第３のイベント処理部と
を含む。 A semiconductor process tool, a wireless tag reader, and a photoresist management device connected to a host,
Upon receiving a first message indicating that the photoresist container is empty from the semiconductor process tool, the wireless tag reader is requested to obtain data related to the empty photoresist container, and from the wireless tag reader A first event processing unit for sending the acquired data to the host;
A second event processing unit for sending data relating to the removed photoresist container to the host upon receipt of a second message including data relating to the removed photoresist container from the semiconductor process tool from the wireless tag reader;
When a third message including data relating to a newly placed photoresist container at the position of the photoresist container removed from the semiconductor process tool is received from the wireless tag reader, data relating to the newly placed photoresist container is received. And a third event processing unit to be sent to the host. - 請求項１に記載のフォトレジスト管理装置であって、
前記第１のイベント処理部、前記第２のイベント処理部、及び前記第３のイベント処理部は、前記無線タグリーダーから受信した空状態の前記フォトレジスト容器に関するデータ、第２のメッセージ、及び第３のメッセージを前記半導体工程ツールと前記ホスト間でのデータのやり取りに用いられる通信規約のデータに変換し、該変換したデータを前記ホストへ送る。 The photoresist management apparatus according to claim 1,
The first event processing unit, the second event processing unit, and the third event processing unit are configured to receive data relating to the empty photoresist container received from the wireless tag reader, a second message, and a second message processing unit. 3 is converted into communication protocol data used for data exchange between the semiconductor process tool and the host, and the converted data is sent to the host. - 請求項２に記載のフォトレジスト管理装置であって、
前記通信規約はＳＥＣＳプロトコルである。 The photoresist management apparatus according to claim 2,
The communication protocol is the SECS protocol. - 請求項１に記載のフォトレジスト管理装置であって、
第１のイベント処理部は、前記無線タグリーダーから取得した前記フォトレジスト容器に関するデータに基づき、前記半導体工程ツール内の空状態のフォトレジスト容器の位置を表示する。 The photoresist management apparatus according to claim 1,
The first event processing unit displays the position of the empty photoresist container in the semiconductor process tool based on the data regarding the photoresist container acquired from the wireless tag reader. - 請求項１に記載のフォトレジスト管理装置であって、
空状態のフォトレジスト容器に関するデータと新たに配置されたフォトレジスト容器に関するデータとを比べてフォトレジストの取り替え作業にエラーがあったか否かを判定し、エラーがあったと判定された場合、エラーの発生を通知するエラー判定部をさらに含む。 The photoresist management apparatus according to claim 1,
Compare the data on the empty photoresist container with the data on the newly placed photoresist container to determine if there was an error in the photoresist replacement operation. If it was determined that there was an error, an error occurred. An error determination unit for notifying is further included. - 請求項５に記載のフォトレジスト管理装置であって、
フォトレジスト取り替え作業にエラーがあったか否かを判定するために比較されるデータは、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データである。 The photoresist management apparatus according to claim 5,
Data to be compared to determine whether or not an error has occurred in the photoresist replacement operation is photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist. - 半導体工程ツール、無線タグリーダー、及びホストに接続されたフォトレジスト管理装置における、フォトレジストを管理するためのフォトレジスト管理方法であって、
前記半導体工程ツールからフォトレジスト容器が空状態であることを示す第１のメッセージを受信すると、空状態の前記フォトレジスト容器に関するデータを前記無線タグリーダーに要求して取得し、前記無線タグリーダーから取得したデータを前記ホストへ送る第１のイベント処理ステップと、
前記半導体工程ツールから取り外されたフォトレジスト容器に関するデータを含む第２のメッセージを前記無線タグリーダーから受信すると、取り外されたフォトレジスト容器に関するデータを前記ホストへ送る第２のイベント処理ステップと、
前記半導体工程ツールから取り外されたフォトレジスト容器の位置に新たに配置されたフォトレジスト容器に関するデータを含む第３のメッセージを前記無線タグリーダーから受信すると、新たに配置されたフォトレジスト容器に関するデータを前記ホストへ送る第３のイベント処理ステップと
を含む。 A photoresist management method for managing a photoresist in a photoresist management apparatus connected to a semiconductor process tool, a wireless tag reader, and a host,
Upon receiving a first message indicating that the photoresist container is empty from the semiconductor process tool, the wireless tag reader is requested to obtain data related to the empty photoresist container, and from the wireless tag reader A first event processing step of sending the acquired data to the host;
A second event processing step of sending data regarding the removed photoresist container to the host upon receipt of a second message from the wireless tag reader that includes data regarding the photoresist container removed from the semiconductor process tool;
When a third message including data relating to a newly placed photoresist container at the position of the photoresist container removed from the semiconductor process tool is received from the wireless tag reader, data relating to the newly placed photoresist container is received. And a third event processing step to send to the host. - 請求項７に記載のフォトレジスト管理方法であって、
前記第１のイベント処理ステップ、前記第２のイベント処理ステップ、及び前記第３のイベント処理ステップは、前記無線タグリーダーから受信した空状態の前記フォトレジスト容器に関するデータ、第２のメッセージ、及び第３のメッセージを前記半導体工程ツールと前記ホスト間でのデータのやり取りに用いられる通信規約のデータに変換し、該変換したデータを前記ホストへ送る。 The photoresist management method according to claim 7, comprising:
The first event processing step, the second event processing step, and the third event processing step include data relating to the empty photoresist container received from the RFID tag reader, a second message, and a second message processing step. 3 is converted into communication protocol data used for data exchange between the semiconductor process tool and the host, and the converted data is sent to the host. - 請求項７に記載のフォトレジスト管理方法であって、
前記通信規約はＳＥＣＳプロトコルである。 The photoresist management method according to claim 7, comprising:
The communication protocol is the SECS protocol. - 請求項７に記載のフォトレジスト管理方法であって、
第１のイベント処理ステップは、前記無線タグリーダーから取得した前記フォトレジスト容器に関するデータに基づき、前記半導体工程ツール内の空状態のフォトレジスト容器の位置を表示するステップを含む。 The photoresist management method according to claim 7, comprising:
The first event processing step includes displaying a position of an empty photoresist container in the semiconductor process tool based on data relating to the photoresist container obtained from the wireless tag reader. - 請求項７に記載のフォトレジスト管理方法であって、
空状態のフォトレジスト容器に関するデータと新たに配置されたフォトレジスト容器に関するデータとを比べてフォトレジストの取り替え作業にエラーがあったか否かを判定し、エラーがあったと判定された場合、エラーの発生を通知するエラー判定ステップをさらに含む。 The photoresist management method according to claim 7, comprising:
Compare the data on the empty photoresist container with the data on the newly placed photoresist container to determine if there was an error in the photoresist replacement operation. If it was determined that there was an error, an error occurred. An error determination step of notifying - 請求項１１に記載のフォトレジスト管理方法であって、
フォトレジスト取り替え作業にエラーがあったか否かを判定するために比較されるデータは、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データを含む。 The photoresist management method according to claim 11, comprising:
Data to be compared to determine whether or not an error has occurred in the photoresist replacement operation includes photoresist type data indicating the type of photoresist and photoresist attribute data indicating the attribute of the photoresist. - フォトレジストを管理するためのフォトレジスト管理装置であって、
所定の位置に取り付けられたフォトレジスト容器に対し、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データを取得する取得部と、
前記取得部によって得られた前記フォトレジスト種類データと前記フォトレジスト属性データを格納する格納部と、
前記フォトレジスト容器が取り替えられた場合、前記格納部に格納されたか前記取得部から得られたデータを用いて、取り替え前のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データをそれぞれ取り替え後のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データと比較する比較部と、
前記比較の結果に応じて、フォトレジスト容器の取り替えにおいてエラーがあったか否かを通知する通知部とを含む。 A photoresist management apparatus for managing a photoresist,
For a photoresist container attached at a predetermined position, an acquisition unit for acquiring photoresist type data indicating the type of photoresist, and photoresist attribute data indicating an attribute of the photoresist;
A storage unit for storing the photoresist type data and the photoresist attribute data obtained by the acquisition unit;
When the photoresist container is replaced, the data stored in the storage unit or obtained from the acquisition unit is used to replace the photoresist type data and the photoresist attribute data for the photoresist container before replacement, respectively. A comparison unit for comparing with the photoresist type data and the photoresist attribute data for the photoresist container;
And a notification unit for notifying whether or not there is an error in replacing the photoresist container according to the result of the comparison. - 請求項１３に記載のフォトレジスト管理装置であって、
前記取得部は、前記フォトレジスト種類データ及び前記フォトレジスト属性データをバーコードリーダー又は無線タグリーダーから取得する。 The photoresist management apparatus according to claim 13,
The acquisition unit acquires the photoresist type data and the photoresist attribute data from a barcode reader or a wireless tag reader. - 請求項１３に記載のフォトレジスト管理装置であって、
前記比較の結果、フォトレジスト容器の取り替え前後において、フォトレジスト種類データが異なる場合、前記通知部は不適合なフォトレジスト容器に取り替えられたことを通知する。 The photoresist management apparatus according to claim 13,
As a result of the comparison, if the photoresist type data is different before and after the replacement of the photoresist container, the notification unit notifies that the incompatible photoresist container has been replaced. - 請求項１３に記載のフォトレジスト管理装置であって、
前記比較の結果、フォトレジスト容器の取り替え前後において、フォトレジスト種類データは同じであるが、フォトレジスト属性データが異なる場合、前記通知部は、フォトレジスト容器の取り替えによりエラーが発生する可能性があることを通知する。 The photoresist management apparatus according to claim 13,
As a result of the comparison, before and after the replacement of the photoresist container, the photoresist type data is the same, but when the photoresist attribute data is different, the notification unit may cause an error due to the replacement of the photoresist container. Notify that. - 請求項１３に記載のフォトレジスト管理装置であって、
前記フォトレジスト属性データは、フォトレジストの製造社を示すデータ、フォトレジストの製造ロット番号（ＬＯＴ Ｎｏ.）を示すデータ及びフォトレジストにエージング（Ａｇｉｎｇ）があったか否かを示すデータのうちいずれか一つ以上を含む。 The photoresist management apparatus according to claim 13,
The photoresist attribute data is any one of data indicating a photoresist manufacturer, data indicating a photoresist manufacturing lot number (LOT No.), and data indicating whether or not the photoresist is aged. Including one or more. - フォトレジストを管理するためのフォトレジスト管理方法であって、
所定の位置に取り付けられたフォトレジスト容器に対し、フォトレジストの種類を示すフォトレジスト種類データと、フォトレジストの属性を示すフォトレジスト属性データを取得する取得ステップと、
前記取得ステップから得られた前記フォトレジスト種類データと前記フォトレジスト属性データを格納する格納ステップと、
前記フォトレジスト容器が取り替えられた場合、前記格納ステップで格納されたか前記取得ステップで得られたデータを用いて、取り替え前のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データをそれぞれ取り替え後のフォトレジスト容器に対するフォトレジスト種類データ及びフォトレジスト属性データと比較する比較ステップと、
前記比較結果に応じて、フォトレジスト容器の取り替えにおいてエラーがあったか否かを通知する通知ステップとを含む。 A photoresist management method for managing a photoresist,
For a photoresist container attached at a predetermined position, an acquisition step of acquiring photoresist type data indicating the type of photoresist, and photoresist attribute data indicating an attribute of the photoresist;
A storage step for storing the photoresist type data and the photoresist attribute data obtained from the obtaining step;
When the photoresist container is replaced, the data stored in the storing step or obtained in the obtaining step is used to replace the photoresist type data and the photoresist attribute data for the photoresist container before the replacement, respectively. A comparison step for comparing with photoresist type data and photoresist attribute data for a photoresist container;
A notification step of notifying whether there is an error in replacing the photoresist container according to the comparison result. - 請求項１８に記載のフォトレジスト管理方法であって、
前記取得ステップは、前記フォトレジスト種類データ及び前記フォトレジスト属性データをバーコードリーダー又は無線タグリーダーから取得する。 The photoresist management method according to claim 18, comprising:
The acquisition step acquires the photoresist type data and the photoresist attribute data from a barcode reader or a wireless tag reader. - 請求項１８に記載のフォトレジスト管理方法であって、
前記比較の結果、フォトレジスト容器の取り替え前後において、フォトレジスト種類データが異なる場合、前記通知ステップは不適合なフォトレジスト容器に取り替えられたことを通知する。 The photoresist management method according to claim 18, comprising:
As a result of the comparison, if the photoresist type data is different before and after the replacement of the photoresist container, the notification step notifies that the incompatible photoresist container has been replaced. - 請求項１８に記載のフォトレジスト管理方法であって、
前記比較の結果、フォトレジスト容器の取り替え前後において、フォトレジスト種類データは同じであるが、フォトレジスト属性データが異なる場合、前記通知ステップは、フォトレジスト容器の取り替えによりエラーが発生する可能性があることを通知する。 The photoresist management method according to claim 18, comprising:
As a result of the comparison, if the photoresist type data is the same before and after the replacement of the photoresist container, but the photoresist attribute data is different, the notification step may cause an error due to the replacement of the photoresist container. Notify that. - 請求項１８に記載のフォトレジスト管理方法であって、
前記フォトレジスト属性データは、フォトレジストの製造社を示すデータ、フォトレジストの製造ロット番号を示すデータ及びフォトレジストにエージングがあったか否かを示すデータのうちいずれか一つ以上を含む。 The photoresist management method according to claim 18, comprising:
The photoresist attribute data includes at least one of data indicating a photoresist manufacturer, data indicating a photoresist manufacturing lot number, and data indicating whether or not the photoresist is aged.
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| CN104979233B (en) * | 2014-04-03 | 2018-07-10 | 中芯国际集成电路制造（天津）有限公司 | Replace the method and system of chemicals on board |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10229045A (en) * | 1997-01-17 | 1998-08-25 | Samsung Electron Co Ltd | Chemical supply for producing semiconductor, chemical being applied thereto, receiver managing method, photoresist utilizing computer and data managing method associated therewith |
| JP2006218391A (en) * | 2005-02-10 | 2006-08-24 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus |
| JP2010171258A (en) * | 2009-01-23 | 2010-08-05 | Sokudo Co Ltd | Substrate processing apparatus, and substrate processing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050112225A (en) * | 2004-05-25 | 2005-11-30 | 삼성전자주식회사 | System for providing chemical |
| KR20060131076A (en) * | 2005-06-15 | 2006-12-20 | 삼성전자주식회사 | Device and method for preventing use together with photo resist of spinner equipment thereof |
-
2011
- 2011-01-21 WO PCT/JP2011/051064 patent/WO2012098673A1/en active Application Filing
-
2012
- 2012-01-19 WO PCT/JP2012/051074 patent/WO2012099201A1/en active Application Filing
- 2012-01-19 KR KR1020127027616A patent/KR20140018084A/en not_active Application Discontinuation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10229045A (en) * | 1997-01-17 | 1998-08-25 | Samsung Electron Co Ltd | Chemical supply for producing semiconductor, chemical being applied thereto, receiver managing method, photoresist utilizing computer and data managing method associated therewith |
| JP2006218391A (en) * | 2005-02-10 | 2006-08-24 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus |
| JP2010171258A (en) * | 2009-01-23 | 2010-08-05 | Sokudo Co Ltd | Substrate processing apparatus, and substrate processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140018084A (en) | 2014-02-12 |
| WO2012098673A1 (en) | 2012-07-26 |
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