WO2012090532A1 - Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these - Google Patents
Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these Download PDFInfo
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- WO2012090532A1 WO2012090532A1 PCT/JP2011/063913 JP2011063913W WO2012090532A1 WO 2012090532 A1 WO2012090532 A1 WO 2012090532A1 JP 2011063913 W JP2011063913 W JP 2011063913W WO 2012090532 A1 WO2012090532 A1 WO 2012090532A1
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- resin composition
- photocurable resin
- carboxyl group
- manufactured
- filler
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0041—Photosensitive materials providing an etching agent upon exposure
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
Definitions
- the present invention relates to a photocurable resin composition used as a solder resist of a printed wiring board, a dry film and a cured product thereof, and a printed wiring board using them.
- solder resists are also required to have improved workability and higher performance in response to the increase in the density of printed wiring boards as electronic devices become lighter, thinner and shorter.
- BGA ball grid array
- CSP chip
- QFP quad flat pack package
- SOP small outline package
- An IC package called “Scale Package” has appeared.
- PCT pressure cooker test
- moisture heat resistance is particularly required.
- a solder resist is also required to have reactivity with ultraviolet rays used for patterning, that is, high exposure sensitivity.
- the conventional liquid development type solder resist still has room for improvement with respect to the above required characteristics. Furthermore, the conventional liquid development type solder resist has a problem that moisture absorbed inside the package during reflowing due to moisture absorption of the solder resist during package mounting causes boiling of the solder resist film inside the package and its surroundings. is there. Further, in a package with a solder resist, when the IC chip is sealed or when the IC is driven, heat is applied to the substrate and the solder resist, and cracks and peeling are likely to occur due to the difference in expansion coefficient between the substrate and the solder resist. .
- the object of the present invention is that even if a large amount of filler is blended, the adhesiveness and fluidity of the composition are not lowered, it can be easily applied to the substrate, and the linear expansion coefficient of the solder resist is lowered. It is in providing the photocurable resin composition which can suppress generation
- a photocurable resin composition capable of forming a cured film having excellent characteristics required for IC packages, capable of responding to high density and surface mounting of printed wiring boards, and capable of forming small-diameter openings by alkali development. Is to provide. Furthermore, a dry film and a cured product excellent in various properties as described above obtained by using such a photocurable resin composition, and a cured film such as a solder resist is formed by the dry film and the cured product. It is to provide a printed wiring board.
- a composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler.
- a photocurable resin composition that can be developed with an alkaline solution, characterized in that the content of the filler is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
- the polymer binder is a thermoplastic resin, preferably a thermoplastic resin solution having a solid content of 10 to 50 wt% dissolved in a solvent.
- the filler contains Ba or Mg and / or Al.
- the photocurable resin composition obtained by applying and drying the photocurable resin composition on a carrier film, the photocurable resin composition or the dry film can be converted into active energy.
- a cured product obtained by photocuring by irradiation of a line particularly a cured product obtained by photocuring on copper, and a cured product obtained by photocuring in a pattern.
- a dry film consists of a dried layer of a plurality of photocurable resin compositions, and at least one layer is formed from the photocurable resin composition of the present invention.
- the print is characterized by having a cured film obtained by photocuring the photocurable resin composition or the dry film into a pattern by irradiation with active energy rays, and preferably further thermosetting.
- a wiring board is also provided.
- the photocurable resin composition of the present invention has a linear expansion coefficient of 15 to 35 ⁇ 10 ⁇ when the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition. It can be adjusted to a range of 6 / K (hereinafter abbreviated as ppm), and the occurrence of solder resist cracks can be reduced by matching or approaching the linear expansion coefficient with the base.
- the adhesiveness of the composition which is a problem that occurs when a large amount of filler is blended, reduced fluidity, reduced film formability, Problems such as handling cracks are solved, and when the cured product is used, for example, in a printed wiring board or a semiconductor package, excellent resolution and PCT resistance resulting from adhesion are obtained, and high reliability. Can be obtained.
- the photocurable resin composition developable with the alkaline solution of the present invention (hereinafter also referred to as a photocurable resin composition) includes a carboxyl group-containing oligomer, a polymer binder having a higher molecular weight than the carboxyl group-containing oligomer, and photopolymerization.
- a composition comprising an initiator, a photopolymerizable monomer and a filler, wherein the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
- each component of the photocurable resin composition of the present invention will be described in detail.
- the photocurable resin composition of the present invention can impart alkali developability by using a carboxyl group-containing oligomer.
- the term “oligomer” should be understood to be used to make it easy to distinguish the molecular weight from the polymer binder.
- the carboxyl group-containing oligomer various conventionally known carboxyl group-containing resins or prepolymers having a carboxyl group in the molecule can be used.
- a carboxyl group-containing photosensitive resin or a carboxyl group-containing photosensitive prepolymer having an ethylenically unsaturated double bond in the molecule is more preferable in terms of photocurability and development resistance.
- the unsaturated double bond is preferably derived from acrylic acid, methacrylic acid or derivatives thereof.
- a carboxyl group-containing resin or prepolymer having no ethylenically unsaturated double bond is used, in order to make the composition photocurable, a plurality of ethylenically unsaturated groups are contained in the molecule described later. It is necessary to use a compound having a photopolymerizable monomer in combination.
- the carboxyl group-containing oligomer oligomers listed below can be suitably used.
- a carboxyl group-containing oligomer obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
- an unsaturated carboxylic acid such as (meth) acrylic acid
- an unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
- Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers
- carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
- Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of (meth) acrylate or a partially acid anhydride-modified product thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
- bisphenol A type epoxy resin hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of (meth) acrylate or a partially acid anhydride-modified product thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
- one isocyanate group and one or more (meth) acryl groups are introduced into the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate.
- a carboxyl group-containing photosensitive urethane resin obtained by adding a compound having a terminal (meth) acrylate.
- a polyfunctional epoxy resin obtained by epoxidizing a hydroxyl group of a bifunctional (solid) epoxy resin as described later with epichlorohydrin is reacted with (meth) acrylic acid, and a dibasic acid anhydride is added to the resulting hydroxyl group.
- An added carboxyl group-containing photosensitive oligomer is added to the resulting hydroxyl group.
- a carboxyl group-containing polyester obtained by reacting a dicarboxylic acid such as adipic acid, phthalic acid or hexahydrophthalic acid with a bifunctional oxetane resin as described later, and adding a dibasic acid anhydride to the resulting primary hydroxyl group. Oligomer.
- Reaction product obtained by reacting a compound obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide with an unsaturated group-containing monocarboxylic acid.
- Carboxyl group-containing photosensitive oligomer obtained by reacting polybasic acid anhydrides such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and the like.
- (meth) acrylate is a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.
- the acid value of the carboxyl group-containing oligomer is suitably in the range of 40 to 200 mgKOH / g, more preferably in the range of 45 to 120 mgKOH / g.
- the acid value of the carboxyl group-containing oligomer is less than 40 mgKOH / g, alkali development becomes difficult.
- it exceeds 200 mgKOH / g dissolution of the exposed portion by the developer proceeds, and the line may become thinner than necessary.
- the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to draw a normal resist pattern.
- the weight average molecular weight of the carboxyl group-containing oligomer varies depending on the resin skeleton, but is generally within the range of 2,000 to 150,000, more preferably 5,000 to 100,000. Although it is necessary to use a carboxyl group-containing oligomer having a weight average molecular weight lower than that of the polymer binder to be used, a particularly preferable weight average molecular weight is 5000 to 35,000. If the weight average molecular weight is less than 2,000, the tack-free performance of the coating film may be inferior, the moisture resistance of the coating film after exposure may be poor, the film may be reduced during development, and the resolution may be greatly inferior. On the other hand, when the weight average molecular weight exceeds 150,000, developability is remarkably deteriorated. Moreover, when larger than the polymeric binder mentioned later, the improvement of the brittleness of the target coating film cannot be performed.
- the compounding amount of such a carboxyl group-containing oligomer is 10 to 60% by mass, preferably 20 to 50% by mass of the total composition.
- the amount of the carboxyl group-containing oligomer is less than the above range, the film strength is lowered, which is not preferable.
- the amount is larger than the above range, the viscosity of the composition is increased or the coating property is lowered, which is not preferable.
- carboxyl group-containing oligomers can be used without being limited to those listed above, and can be used singly or in combination.
- resins having an aromatic ring are preferable because they have a high refractive index and excellent resolution, and those having a biphenyl novolak structure not only have resolution but also PCT. It is preferable because it is excellent in resistance and crack resistance.
- carboxyl group-containing oligomers using a phenol compound as a starting material such as carboxyl group-containing photosensitive oligomers (9) and (10), are also preferable because PCT resistance is similarly improved.
- the increase in the filler component makes it easy for water absorption to occur at the interface between the filler and the resin, whereas those having a biphenyl novolak structure and carboxyl group-containing oligomers such as (9) and (10) Even if the filler component increased, the PCT resistance was very excellent. This is probably because the former has improved hydrophobicity due to the biphenyl novolac structure, and the latter has a carboxyl group-containing photosensitive oligomer (6) and (7) with an epoxy acrylate structure that can form a similar structure. On the other hand, it is considered that the carboxyl group-containing photosensitive oligomers (9) and (10) do not have a hydroxyl group and the hydrophobicity is remarkably improved.
- the polymer binder is not particularly limited as long as it is a thermoplastic resin regardless of whether it is reactive or non-reactive.
- a thermoplastic resin regardless of whether it is reactive or non-reactive.
- a polymer obtained by subjecting a vinyl derivative of the above to solution or suspension polymerization can be used.
- a binary copolymer, a ternary copolymer, a block copolymer, and the like obtained by polymerization using a monomer having two or more kinds of vinyl groups can also be used.
- these polymers those derived from cellulose derivatives and block copolymers are particularly preferred.
- the preferred molecular weight of the polymer binder is 30,000 to 1,500,000 in terms of weight average molecular weight, but should be used if it is determined that the molecular weight is clearly larger than the carboxyl group-containing oligomer used. Can do. For example, when dissolved in the same solvent, the viscosity is higher than that of the carboxyl group-containing oligomer.
- the molecular weight since the higher the molecular weight, the lower the solubility in the solvent, the lower the solid content when dissolved in the same solvent, especially when the molecular weight is 10 to 50 wt%, the molecular weight is higher than that of the carboxyl group-containing oligomer. Judged to be large. When the solid content is less than 10 wt%, there is a problem that the solvent content increases and a composition cannot be formed. On the other hand, when it exceeds 50 wt%, it may not correspond to a polymer and is not appropriate.
- these polymer binders There are several functions of these polymer binders. One is to change the fluidity of the composition. More specifically, when a large amount of filler is added to the carboxyl group-containing oligomer and the photopolymerizable monomer, the photopolymerizable monomer and the filler are particularly unsuitable, and the resulting composition becomes a dilatancy fluid. When the composition becomes dilatancy, it is difficult to stir, print, or coat the composition, and it cannot be used unless it is in a considerably diluted state, and in particular, it is performed at a relatively high viscosity such as screen printing or roll coating. In the case of printing, there is a problem that a required film thickness cannot be secured by one printing.
- the composition could be transformed into a thixotropic fluid. This is the first material that can be printed and coated.
- the second effect has been shown to control handling cracks when the composition is coated and dried to a dry film state. This is considered to be due to the effect of holding the filler containing a large amount of the polymer binder.
- the third effect of adding the polymer binder is that the toughness of the coating film can be increased in the physical properties after curing. This is presumably because the polymer binder is present in an IPN (sea island) state in the photocurable resin matrix.
- these polymer binders may have functional groups such as a carboxyl group, a hydroxyl group, and an epoxy group at the terminal and / or side chain.
- a suitable amount of the carboxyl group is an acid value of 30 mgKOH / g or less.
- a suitable blending amount of the polymer binder is 1 part by mass or more with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- the fluidity of the composition can be sufficiently achieved.
- a larger amount of polymer binder can be added, but the upper limit is suitably about 30 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- the photocurable resin composition is applied by 2
- the composition of the present invention in which a polymer binder is not included or less than 5 parts by weight is applied in the first construction, and then the polymer binder and a large amount of filler are blended. When applied, the problem of poor development is solved.
- a dry film it is composed of two or more layers, and the layer on the side directly touching the substrate is formed of a composition layer having no polymer binder or a proportion of less than 5 parts by mass, and the like. This layer can be solved by forming a layer with the composition of the present invention containing a large amount of a polymer binder.
- Examples of the photopolymerization initiator used in the photocurable resin composition of the present invention include an oxime ester photopolymerization initiator having an oxime ester group, an ⁇ -aminoacetophenone photopolymerization initiator, and an acylphosphine oxide photopolymerization initiator.
- an oxime ester photopolymerization initiator having an oxime ester group an oxime ester group
- an ⁇ -aminoacetophenone photopolymerization initiator an acylphosphine oxide photopolymerization initiator.
- One or more selected from the group consisting of can be preferably used.
- oxime ester photopolymerization initiator examples include CGI-325, Irgacure (registered trademark) OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, NCI-831 manufactured by ADEKA, and the like as commercially available products.
- numerator can also be used suitably, Specifically, the oxime ester compound which has a carbazole structure represented with the following general formula is mentioned.
- X is a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, a phenyl group (an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms).
- Y and Z are each a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, or a carbon atom having 1 carbon atom), substituted with an alkyl group having a C 1-8 alkyl group or a dialkylamino group.
- the blending amount of such an oxime ester photopolymerization initiator is preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- it is less than 0.01 parts by mass, the photocurability on copper is insufficient, the coating film is peeled off, and the coating properties such as chemical resistance are deteriorated.
- the amount exceeds 5 parts by mass, light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 3 parts by mass.
- ⁇ -aminoacetophenone photopolymerization initiators include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone-1, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N , N-dimethylaminoacetophenone and the like.
- Examples of commercially available products include Irgacure 907, Irgacure 369, and Irgacure 379 manufactured by BASF Japan.
- acylphosphine oxide photopolymerization initiators include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, and bis (2,6-dimethoxy). And benzoyl) -2,4,4-trimethyl-pentylphosphine oxide.
- examples of commercially available products include Lucilin TPO manufactured by BASF, Irgacure 819 manufactured by BASF Japan, and the like.
- the blending amount of these ⁇ -aminoacetophenone photopolymerization initiator and acylphosphine oxide photopolymerization initiator is preferably 0.01 to 15 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. If it is less than 0.01 parts by mass, the photo-curability on copper is similarly insufficient, the coating film peels off, and the coating properties such as chemical resistance deteriorate. On the other hand, when the amount exceeds 15 parts by mass, the effect of reducing the outgas cannot be obtained, the light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 10 parts by mass.
- the oxime ester initiator is added in a small amount, and outgassing is suppressed, which is effective in terms of PCT resistance and crack resistance. Further, it is particularly preferable to use an acylphosphine oxide photopolymerization initiator in addition to the oxime ester initiator because a shape with good resolution can be obtained.
- examples of the photopolymerization initiator, photoinitiator assistant, and sensitizer that can be suitably used in the photocurable resin composition of the present invention include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketal compounds, and benzophenones. Compounds, tertiary amine compounds, and xanthone compounds.
- benzoin compound examples include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.
- acetophenone compound examples include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, and the like.
- anthraquinone compound examples include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone and the like.
- thioxanthone compound examples include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, and the like.
- ketal compound examples include acetophenone dimethyl ketal and benzyl dimethyl ketal.
- benzophenone compound examples include benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4′-methyldiphenyl sulfide, 4-benzoyl-4′-ethyldiphenyl sulfide, and 4-benzoyl-4′-propyldiphenyl. And sulfides.
- the tertiary amine compound include an ethanolamine compound and a compound having a dialkylaminobenzene structure, such as 4,4′-dimethylaminobenzophenone (Nisso Cure MABP manufactured by Nippon Soda Co., Ltd.), Dialkylaminobenzophenones such as 4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin), etc.
- 4,4′-dimethylaminobenzophenone Non-dimethylaminobenzophenone
- Dialkylaminobenzophenones such as 4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (die
- a dialkylamino group-containing coumarin compound ethyl 4-dimethylaminobenzoate (Kayacure (registered trademark) EPA manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Bio-Synthetics), -Dimethylaminobenzoic acid (n-butoxy) ethyl (Quantacure BEA manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamylethyl ester (Kayacure DMBI manufactured by Nippon Kayaku Co., Ltd.), 4-dimethylaminobenzoic acid 2 -Ethylhexyl (Esolol 507 manufactured by Van Dyk), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), and the like.
- Kayacure registered
- thioxanthone compounds and tertiary amine compounds are preferred.
- the inclusion of a thioxanthone compound is preferable from the viewpoint of deep curability.
- thioxanthone compounds such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone are preferably included.
- the amount of such a thioxanthone compound is preferably 20 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- the blending amount of the thioxanthone compound exceeds 20 parts by mass, the thick film curability is lowered and the cost of the product is increased. More preferably, it is 10 parts by mass or less.
- a compound having a dialkylaminobenzene structure is preferable, and among them, a dialkylaminobenzophenone compound, a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 450 nm, and ketocoumarins are particularly preferable.
- dialkylaminobenzophenone compound 4,4′-diethylaminobenzophenone is preferable because of its low toxicity.
- the dialkylamino group-containing coumarin compound has a maximum absorption wavelength of 350 to 410 nm in the ultraviolet region, so it is less colored and uses a colored pigment as well as a colorless and transparent photosensitive composition, and reflects the color of the colored pigment itself. It becomes possible to provide a solder resist film.
- 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferred because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
- the blending amount of such a tertiary amine compound is preferably 0.1 to 20 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- the compounding amount of the tertiary amine compound is less than 0.1 part by mass, a sufficient sensitizing effect tends not to be obtained.
- the amount exceeds 20 parts by mass light absorption on the surface of the dried solder resist coating film by the tertiary amine compound becomes intense, and the deep curability tends to decrease. More preferably, it is 0.1 to 10 parts by mass.
- photopolymerization initiators can be used alone or as a mixture of two or more.
- the total amount of such photopolymerization initiator, photoinitiator assistant, and sensitizer is preferably 35 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer. When it exceeds 35 parts by mass, the deep curability tends to decrease due to light absorption.
- these photopolymerization initiators, photoinitiator assistants, and sensitizers absorb a specific wavelength, the sensitivity may be lowered in some cases, and may function as an ultraviolet absorber. However, they are not used only for the purpose of improving the sensitivity of the composition. Absorbs light of a specific wavelength as necessary to improve the photoreactivity of the surface, change the resist line shape and opening to vertical, tapered, reverse taper, and processing accuracy of line width and opening diameter Can be improved.
- the photo-curable resin composition of the present invention contains a filler.
- a filler As a result of detailed examination of the filler content, 30 to 60% by mass of the filler based on the total amount of nonvolatile components is added. Thus, it has been found that PCT resistance and electrical characteristics (HAST resistance) are improved. Furthermore, when the refractive index of the filler is in the range of 1.50 to 1.65, not only PCT resistance and HAST resistance (resistance to the advanced accelerated life test) are excellent, but also good resolution is obtained. It was also found out. The reason why high resolution can be obtained is that the refractive index of the resin having an aromatic ring used for improving PCT resistance and HAST resistance is close to the refractive index of the filler.
- fillers examples include known and commonly used inorganic fillers such as barium sulfate, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, boehmite, mica powder, and hydrotalcite. it can.
- the filler contains Ba or Mg and / or Al.
- the filler containing Ba is barium sulfate (refractive index: 1.65)
- the filler containing Mg is talc (refractive index: 1.54-59), magnesium carbonate (refractive index: 1.57-1.60).
- fillers containing Al As fillers containing Al, kaolinite, clay (refractive index: 1.55-1.57), aluminum oxide (refractive index: 1.65), aluminum hydroxide (refractive index: 1.65), boehmite (refractive) Ratio: 1.62-1.65), mica powder (refractive index: 1.59), and filler containing Mg and Al is preferably hydrotalcite (refractive index: 1.50).
- the total amount of filler is suitably in the range of 30 to 60% by mass with respect to the total amount of nonvolatile components of the photocurable resin composition.
- the filler content is less than 30% by mass, the cured product of the photocurable resin composition does not show a decrease in coefficient of linear expansion, and is not preferable because crack resistance deteriorates.
- it exceeds 60% by mass the viscosity of the composition increases, the coating and moldability deteriorates, and the water absorption also increases, so that the PCT resistance and HAST resistance deteriorate, which is not preferable.
- these fillers can be used individually or in combination of 2 or more types.
- a mercapto compound it is preferable to add a mercapto compound to the photocurable resin composition of the present invention. It was observed that the addition of mercapto compounds improves PCT resistance and HAST resistance. This may be because the crosslink density was improved by adding a mercapto compound, or the adhesion was improved.
- the blending amount of the mercapto compound is suitably 0.01 parts by mass or more and 10.0 parts by mass or less, more preferably 0.05 parts by mass or more and 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. Or less. If it is less than 0.01 part by mass, the improvement in adhesion as an effect of adding a mercapto compound is not confirmed. On the other hand, if it exceeds 10.0 parts by mass, the development failure of the photocurable resin composition and the decrease in the dry management width will be confirmed. This is not preferable because it may cause These mercapto compounds can be used alone or in combination of two or more.
- thermosetting component can be added to the photocurable resin composition of the present invention. It was confirmed that heat resistance was improved by adding a thermosetting component.
- thermosetting components used in the present invention include amino resins such as melamine resins, benzoguanamine resins, melamine derivatives, benzoguanamine derivatives, blocked isocyanate compounds, cyclocarbonate compounds, polyfunctional epoxy compounds, polyfunctional oxetane compounds, episulfide resins, bismaleimides.
- Well-known thermosetting resins such as carbodiimide resins can be used.
- a thermosetting component having a plurality of cyclic ether groups and / or cyclic thioether groups hereinafter abbreviated as cyclic (thio) ether groups
- thermosetting component having a plurality of cyclic (thio) ether groups in the molecule has either one of the three-, four- or five-membered cyclic (thio) ether groups or a plurality of two types of groups in the molecule.
- Compound for example, a compound having a plurality of epoxy groups in the molecule, that is, a polyfunctional epoxy compound, a compound having a plurality of oxetanyl groups in the molecule, that is, a polyfunctional oxetane compound, a compound having a plurality of thioether groups in the molecule That is, an episulfide resin etc. are mentioned.
- polyfunctional epoxy compound examples include epoxidized vegetable oils such as Adekasizer O-130P, Adekasizer O-180A, Adekasizer D-32, and Adekasizer D-55 manufactured by ADEKA; jER (registered trademark) manufactured by Mitsubishi Chemical Corporation 828, jER834, jER1001, jER1004, EHPE3150 manufactured by Daicel Chemical Industries, Epicron (registered trademark) 840 manufactured by DIC, Epicron 850, Epicron 1050, Epicron 2055, Epotot (registered trademark) YD manufactured by Nippon Steel Chemical Co., Ltd. -011, YD-013, YD-127, YD-128, D.C. E. R.
- epoxidized vegetable oils such as Adekasizer O-130P, Adekasizer O-180A, Adekasizer D-32, and Adekasizer D-55 manufactured by ADEKA
- jER registered trademark
- Mitsubishi Chemical Corporation 828
- Bisphenol A type epoxy resin such as 664 (all trade names); Hydroquinone type epoxy resin such as YDC-1312 (trade name) manufactured by Nippon Steel Chemical Co., Ltd. YSLV-80XY (trade name) manufactured by Nippon Steel Chemical Co., Ltd. Bisphenol type epoxy resins such as YSLV-120TE (trade name) manufactured by Nippon Steel Chemical Co., Ltd .; jERYL903 manufactured by Mitsubishi Chemical Corporation, Epicron 152, Epicron 165 manufactured by DIC, Nippon Steel Chemical Co., Ltd. Epototo YDB-400, YDB-500 manufactured by Dow Chemical Co., Ltd. E. R.
- E. R. Novolak type epoxy resins such as ECN-235 and ECN-299 (both trade names); biphenol novolak type epoxy resins such as NC-3000 and NC-3100 manufactured by Nippon Kayaku; Epicron 830 manufactured by DIC, Mitsubishi Chemical JER807 manufactured by Nippon Steel Chemical Co., Ltd., Epotot YDF-170, YDF-175, YDF-2004 manufactured by Nippon Steel Chemical Co., Ltd., Araldide XPY306 manufactured by BASF Japan Co., Ltd. (all trade names); manufactured by Nippon Steel Chemical Co., Ltd.
- Hydrogenated bisphenol A type epoxy resin such as Epototo ST-2004, ST-2007, ST-3000 (trade name), etc .; jER604 manufactured by Mitsubishi Chemical Corporation, Epototo YH-434 manufactured by Nippon Steel Chemical Co., Ltd., manufactured by BASF Japan Araldide MY720 from Sumitomo Chemical Co., Ltd. 20 etc. (all trade names) glycidylamine type epoxy resins; Hydantoin type epoxy resins such as Araldide CY-350 (trade name) manufactured by BASF Japan; Celoxide (registered trademark) 2021 manufactured by Daicel Chemical Industries, BASF Japan Alicyclic epoxy resins such as Araldide CY175, CY179, etc.
- Type or biphenol type epoxy resin or a mixture thereof Nippon Kayaku EBPS-200, ADEKA EPX-30, DIC EXA-1514 (trade name), etc .; bisphenol S type epoxy resin; Bisphenol A novolac type epoxy resin such as jER157S (trade name); tetraphenylolethane type epoxy resin such as jERYL-931 manufactured by Mitsubishi Chemical Corporation, Araldide 163 manufactured by BASF Japan Co., Ltd. (all trade names); BASF Japan Araldide PT810 (trade name) manufactured by Nissan Chemical Industries Heterocyclic epoxy resins such as TEPIC (registered trademark) manufactured by Nihon Yushi Co., Ltd.
- Diglycidyl phthalate resins such as Blemmer (registered trademark) DGT manufactured by Nippon Oil &Fats; Tetraglycidyl xylenoyl ethane such as ZX-1063 manufactured by Nippon Steel Chemical Co., Ltd. Resins; Naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, DIC Corporation HP-4032, EXA-4750, EXA-4700; DIC Corporation HP-7200, HP-7200H, etc.
- Blemmer registered trademark
- Tetraglycidyl xylenoyl ethane such as ZX-1063 manufactured by Nippon Steel Chemical Co., Ltd. Resins
- Naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, DIC Corporation HP-4032, EXA-4750, EXA-4700; DIC Corporation HP-7200, HP-7200H, etc
- Epoxy resin having a dicyclopentadiene skeleton Epoxy resin copolymerized with glycidyl methacrylate such as CP-50S and CP-50M manufactured by NOF Corporation; Copolymer epoxy resin of cyclohexylmaleimide and glycidyl methacrylate; Epoxy-modified polybutadiene rubber derivative (For example, manufactured by Daicel Chemical Industries B-3600, etc.), CTBN modified epoxy resin (e.g., Nippon Steel Chemical Co. YR-102, YR-450, etc.) and others as mentioned, is not limited thereto.
- These epoxy resins can be used alone or in combination of two or more.
- a novolak type epoxy resin, a bixylenol type epoxy resin, a biphenol type epoxy resin, a biphenol novolak type epoxy resin or a mixture thereof is particularly preferable.
- polyfunctional oxetane compound examples include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4-bis [(3- Methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3-ethyl-3- In addition to polyfunctional oxetanes such as oxetanyl) methyl acrylate, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate and oligomers or copolymers thereof, oxetane alcohol and novolak resin , Poly (p-hydroxy
- Examples of the compound having a plurality of cyclic thioether groups in the molecule include bisphenol A type episulfide resin YL7000 manufactured by Mitsubishi Chemical Corporation. Moreover, episulfide resin etc. which replaced the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom using the same synthesis method can be used.
- the blending amount of the thermosetting component having a plurality of cyclic (thio) ether groups in the molecule is preferably 0.6 to 2.5 equivalents relative to 1 equivalent of the carboxyl group of the carboxyl group-containing oligomer.
- the blending amount is less than 0.6, a carboxyl group remains in the solder resist film, and heat resistance, alkali resistance, electrical insulation and the like are lowered.
- the amount exceeds 2.5 equivalents, the low molecular weight cyclic (thio) ether group remains in the dry coating film, thereby reducing the strength of the coating film. More preferably, it is 0.8 to 2.0 equivalents.
- thermosetting component having a plurality of cyclic (thio) ether groups in the molecule
- thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole.
- Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine.
- Examples of commercially available products include 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Kogyo Co., Ltd. and U-CAT (registered by San Apro). Trademarks) 3503N, U-CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof), and the like.
- thermosetting catalyst for epoxy resins or oxetane compounds or a catalyst that promotes the reaction of epoxy groups and / or oxetanyl groups with carboxyl groups, either alone or in combination of two or more. Can be used.
- thermosetting catalysts is sufficient in the usual quantitative ratio, for example, preferably 100 parts by mass of the thermosetting component having a carboxyl group-containing oligomer or a plurality of cyclic (thio) ether groups in the molecule.
- the amount is 0.1 to 20 parts by mass, more preferably 0.5 to 15.0 parts by mass.
- a colorant can be blended in the photocurable resin composition of the present invention.
- known colorants such as red, blue, green and yellow can be used, and any of pigments, dyes and pigments may be used.
- Red colorant examples include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone.
- -Indexes (CI; issued by The Society of Dyers and Colorists) are listed.
- Monoazo Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
- Disazo Pigment Red 37, 38, 41.
- Monoazo lakes Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1,68.
- Benzimidazolone series Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
- Perylene series Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
- Diketopyrrolopyrrole series Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
- Condensed azo series Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
- Anthraquinone series Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
- Kinacridone series Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
- Blue colorant include phthalocyanine-based and anthraquinone-based pigments, and pigment-based compounds such as Pigment Blue 15 and Pigment Blue 15 are listed below. : 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4, Pigment Blue 15: 6, Pigment Blue 16, and Pigment Blue 60.
- the dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used.
- a metal-substituted or unsubstituted phthalocyanine compound can also be used.
- Green colorant examples include phthalocyanine, anthraquinone, and perylene. Specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. are used. be able to. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
- Yellow colorant examples include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
- Anthraquinone series Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
- Isoindolinone type Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
- Condensed azo series Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
- Benzimidazolone series Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.
- Monoazo Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
- Disazo Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
- a colorant such as purple, orange, brown, or black may be added for the purpose of adjusting the color tone.
- the colorant as described above can be appropriately blended, it is preferably 10 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer or thermosetting component. More preferably, it is 0.1 to 5 parts by mass.
- a compound having a plurality of ethylenically unsaturated groups in the molecule can be blended.
- the compound having a plurality of ethylenically unsaturated groups in the molecule used in the photocurable resin composition of the present invention is photocured by irradiation with active energy rays, and the photosensitive compound of the present invention or the carboxyl group-containing photosensitivity.
- the insoluble oligomer is insolubilized in the aqueous alkali solution or assists insolubilization.
- polyester (meth) acrylate polyether (meth) acrylate, urethane (meth) acrylate, carbonate (meth) acrylate, epoxy (meth) acrylate, urethane (meth) acrylate and the like can be used.
- hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate
- glycol diacrylates such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol and propylene glycol
- N, N-dimethyl Acrylamides such as acrylamide, N-methylolacrylamide, N, N-dimethylaminopropylacrylamide
- Aminoalkyl acrylates such as N, N-dimethylaminopropyl acrylate
- polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethylisocyanurate, or their ethylene oxide adducts, propylene oxide
- Polyvalent acrylates such as adducts or ⁇ -caprolactone adducts
- Polyvalent acrylates of sidyl ethers obtained by directly acrylated polyols such as polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadienes, polyester polyols, or urethane acrylates via diisocyanates, and / or Examples include methacrylates corresponding to the acrylate.
- an epoxy acrylate resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac type epoxy resin, and further a hydroxy acrylate such as pentaerythritol triacrylate and a diisocyanate such as isophorone diisocyanate on the hydroxyl group of the epoxy acrylate resin.
- the epoxy urethane acrylate compound etc. which made the half urethane compound react are mentioned.
- Such an epoxy acrylate resin can improve the photocurability without deteriorating the touch drying property of the coating film.
- Such compounds having a plurality of ethylenically unsaturated groups can be used singly or in combination of two or more.
- a compound having 4 to 6 ethylenically unsaturated groups in one molecule is preferable from the viewpoint of photoreactivity and resolution, and a compound having two ethylenically unsaturated groups in one molecule is used.
- it is preferable that the linear expansion coefficient of the cured product is lowered, and it has been found that the occurrence of cracks during the thermal cycle test is reduced.
- the compounding amount of the compound having a plurality of ethylenically unsaturated groups in the molecule is preferably 5 to 100 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
- the blending amount is less than 5 parts by mass, photocurability is lowered, and pattern formation becomes difficult by alkali development after irradiation with active energy rays.
- it exceeds 100 mass parts the solubility with respect to dilute alkali aqueous solution falls, and a coating film becomes weak. More preferably, it is 1 to 70 parts by mass.
- the photocurable resin composition of the present invention may use an organic solvent for the synthesis of the carboxyl group-containing oligomer and the preparation of the composition, or for adjusting the viscosity for application to a substrate or a carrier film. It can.
- organic solvents are used alone or as a mixture of two or more.
- an ultraviolet absorber can be used in the photocurable resin composition of the present invention in addition to the antioxidant.
- ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, anthranilate derivatives, dibenzoylmethane derivatives, and the like.
- the photo-curable resin composition of the present invention may further include a known thickener such as a known thermal polymerization inhibitor, fine silica, organic bentonite, and montmorillonite, a silicone-based, a fluorine-based, a polymer-based, etc., if necessary.
- a known thickener such as a known thermal polymerization inhibitor, fine silica, organic bentonite, and montmorillonite, a silicone-based, a fluorine-based, a polymer-based, etc., if necessary.
- Known additives such as antifoaming agents and / or leveling agents, imidazole-based, thiazole-based, triazole-based silane coupling agents, antioxidants, rust inhibitors, and the like can be blended.
- an adhesion promoter can be used in order to improve the adhesion between layers or the adhesion between the formed resin insulation layer and the substrate.
- adhesion promoters include, for example, benzimidazole, benzoxazole, benzothiazole, 3-morpholinomethyl-1-phenyl-triazole-2-thione, 5-amino-3-morpholinomethyl-thiazole-2-thione.
- the photocurable resin composition of the present invention configured as described above is prepared to a predetermined composition, it is adjusted to a viscosity suitable for a coating method with an organic solvent, for example, on a substrate, a dip coating method, a flow
- the coating method is a coating method, a roll coating method, a bar coater method, a screen printing method, a curtain coating method, or the like.
- the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C. to form a tack-free coating film (resin insulating layer).
- the volatile drying is performed by using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (using a method having a heat source of an air heating method using steam in a countercurrent contact with hot air in the dryer) A method of spraying on a support).
- a resin insulating layer by forming a dry film with a photocurable resin composition and bonding this on a base material.
- the dry film has, for example, a structure in which a carrier film such as polyethylene terephthalate, a resin insulating layer such as a solder resist layer, and a peelable cover film used as necessary are laminated in this order.
- the resin insulation layer is a layer obtained by applying and drying a photocurable resin composition on a carrier film or a cover film.
- the photocurable resin composition of the present invention is uniformly applied to a carrier film with a thickness of 10 to 150 ⁇ m by a blade coater, a lip coater, a comma coater, a film coater, etc., and dried. Formed. And a dry film is formed by laminating
- the carrier film may be laminated after the photocurable resin composition is applied to the cover film and dried.
- the carrier film for example, a thermoplastic film such as a polyester film having a thickness of 2 to 150 ⁇ m is used.
- a cover film a polyethylene film, a polypropylene film, or the like can be used, but a cover film having a smaller adhesive force than the solder resist layer is preferable.
- paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy, synthetic fiber epoxy Made of materials such as copper clad laminates for high frequency circuits using fluorine, polyethylene, PPO, cyanate ester, etc., all grades (FR-4 etc.) copper clad laminates, other polyimide films, PET films, glass A substrate, a ceramic substrate, a wafer plate, etc. can be mentioned.
- the pattern is exposed by an active energy beam or directly by a laser direct exposure machine through a photomask having a pattern formed by a contact method (or non-contact method).
- the exposed portion (the portion irradiated by the active energy ray) is cured.
- a direct drawing device for example, a laser direct imaging device that draws an image directly with a laser using CAD data from a computer
- an exposure device equipped with a metal halide lamp an (ultra) high-pressure mercury lamp
- an ultraviolet lamp such as a (super) high pressure mercury lamp.
- the active energy ray it is preferable to use laser light having a maximum wavelength in the range of 350 to 410 nm. By setting the maximum wavelength within this range, radicals can be efficiently generated from the photopolymerization initiator. If a laser beam in this range is used, either a gas laser or a solid laser may be used.
- the amount of exposure varies depending on the film thickness and the like, but can generally be in the range of 5 to 500 mJ / cm 2 , preferably 10 to 300 mJ / cm 2 .
- the direct drawing apparatus for example, those manufactured by Nippon Orbotech, Pentax, etc. can be used, and any apparatus that oscillates laser light having a maximum wavelength of 350 to 410 nm may be used. .
- the exposed portion (the portion irradiated with the active energy ray) is cured, and the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3 wt% sodium carbonate aqueous solution).
- a dilute alkaline aqueous solution for example, 0.3 to 3 wt% sodium carbonate aqueous solution.
- a cured product is formed.
- a developing method a dipping method, a shower method, a spray method, a brush method, or the like can be used.
- an alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like can be used.
- thermosetting component when added, for example, by heating to a temperature of about 140 to 180 ° C. and thermosetting, the carboxyl group of the carboxyl group-containing oligomer and, for example, a plurality of cyclic ether groups and / or cyclic groups in the molecule
- a thermosetting component having a thioether group reacts to form a cured product (pattern) excellent in various properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical characteristics.
- the photocurable resin composition by containing a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, a filler,
- a carboxyl group-containing oligomer by containing a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, a filler.
- reliability such as heat resistance required when used for electronic parts and the like, and heat cycle resistance without impairing migration resistance characteristics.
- Synthesis example 1 A novolac-type cresol resin (trade name “Shonol CRG951”, manufactured by Showa Polymer Co., Ltd., OH equivalent: 119.4) is added to an autoclave equipped with a thermometer, a nitrogen introduction device / alkylene oxide introduction device, and a stirring device. 4 parts, 1.19 parts of potassium hydroxide and 119.4 parts of toluene were charged, the system was purged with nitrogen while stirring, and the temperature was raised. Next, 63.8 parts of propylene oxide was gradually added dropwise and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours.
- reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide.
- the nonvolatile content was 62.1% and the hydroxyl value was 182.2 g / eq.
- a novolak-type cresol resin propylene oxide reaction solution was obtained. This was an average of 1.08 moles of alkylene oxide added per equivalent of phenolic hydroxyl group. 293.0 parts of an alkylene oxide reaction solution of the obtained novolak-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 part of methylhydroquinone and 252.9 parts of toluene were mixed with a stirrer and a temperature.
- a reactor equipped with a meter and an air blowing tube was charged, air was blown at a rate of 10 ml / min, and the reaction was carried out at 110 ° C. for 12 hours while stirring.
- 12.6 parts of water was distilled from the water produced by the reaction as an azeotrope with toluene. Thereafter, the reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution.
- A-1 a solution (hereinafter abbreviated as A-1) of a carboxyl group-containing photosensitive oligomer (Mw: 2650) having a non-volatile content of 65% and a solid acid value of 87.7 mgKOH / g was obtained.
- Synthesis example 2 Put 330 parts of cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220) in a flask equipped with a gas introduction tube, a stirrer, a condenser tube and a thermometer, and add 340 parts of carbitol acetate. In addition, the mixture was dissolved by heating, and 0.46 part of hydroquinone and 1.38 parts of triphenylphosphine were added. This mixture was heated to 95 to 105 ° C., 108 parts of acrylic acid was gradually added dropwise and reacted for 16 hours.
- cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220)
- A-4 a solution (hereinafter abbreviated as A-4) of a carboxyl group-containing photosensitive oligomer (Mw: 9500) having a solid acid value of 50 mgKOH / g and a nonvolatile content of 60% was obtained.
- Examples 1 to 16 and Comparative Examples 1 to 3 Using the resin solution of the above synthesis example, blended in the proportions (parts by mass) shown in Table 1 together with various components shown in Table 1 below, premixed with a stirrer, kneaded with a three-roll mill, and used for solder resist A photosensitive resin composition was prepared.
- ⁇ Optimum exposure amount> A circuit pattern substrate having a copper thickness of 35 ⁇ m was polished with buffalo, washed with water and dried, and then the compositions of the examples and comparative examples were applied to the entire surface by a screen printing method, and 30 ° C. in a hot air circulation drying oven at 80 ° C. Let dry for minutes. Thereafter, exposure is performed through a 41-step tablet of a stoker using an exposure apparatus (HMW-680-GW20) equipped with a metal halide lamp, and development (30 ° C., 0.2 MPa, 1 wt% Na 2 CO 3 aqueous solution) is performed at 60 ° C. When the pattern of the step tablet remaining when it was performed in seconds was 7 steps, the optimum exposure amount was set.
- ⁇ Applicability> The entire surface of the patterned copper foil substrate was applied by screen printing, and the printed state was confirmed.
- the judgment criteria are as follows. (Double-circle): The film thickness of a resist ink is hold
- ⁇ Electroless gold plating resistance> Using a commercially available electroless nickel plating bath and electroless gold plating bath, plating is performed under the conditions of nickel 0.5 ⁇ m and gold 0.03 ⁇ m, and the presence of peeling of the resist layer and the penetration of the plating solution by tape peeling Then, the presence or absence of the resist layer was evaluated by tape peeling. The judgment criteria are as follows. A: No soaking or peeling is observed. ⁇ : Slight penetration is confirmed after plating, but does not peel off after tape peeling. ⁇ : Slight penetration after plating and peeling after tape peel. X: There is peeling after plating.
- ⁇ PCT resistance> It was placed in a high-pressure, high-temperature and high-humidity tank at 121 ° C., 2 atm and 100% humidity for 168 hours, and the change in state of the cured coating film was evaluated according to the following evaluation criteria.
- Each photocurable thermosetting resin composition of an Example and a comparative example was apply
- This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes.
- the minimum opening of the cured coating film of the obtained photosensitive resin composition for solder resist was determined using an optical microscope adjusted to 200 times. The judgment criteria are as follows. A: Less than 60 ⁇ m. ⁇ : 60 ⁇ m or more and less than 80 ⁇ m. ⁇ : 80 ⁇ m or more and less than 100 ⁇ m. X: 100 ⁇ m or more.
- solder resist such as a flexible wiring board, an interlayer insulating material of a multilayer wiring board, and the like, particularly for forming a solder resist for a semiconductor package.
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Abstract
Description
また、従来からのプリント配線板のソルダーレジストや多層配線板の層間絶縁材料等に要求される解像性、無電解金めっき耐性、密着性に起因するPCT耐性等の特性を向上させ、且つ、特にICパッケージに要求される特性に優れる硬化皮膜が得られ、プリント配線板の高密度化、面実装化に対応可能で、アルカリ現像することで小径の開口が形成可能な光硬化性樹脂組成物を提供することにある。
さらにこのような光硬化性樹脂組成物を用いることによって得られる上記のような諸特性に優れたドライフィルム及び硬化物、並びに該ドライフィルムや硬化物によりソルダーレジスト等の硬化皮膜が形成されてなるプリント配線板を提供することにある。 Therefore, the object of the present invention is that even if a large amount of filler is blended, the adhesiveness and fluidity of the composition are not lowered, it can be easily applied to the substrate, and the linear expansion coefficient of the solder resist is lowered. It is in providing the photocurable resin composition which can suppress generation | occurrence | production and the peeling of the crack of the soldering resist which arises at the time of a thermal cycle by making it.
In addition, it improves the characteristics such as the resolution required for conventional solder resist of printed wiring boards and interlayer insulation materials of multilayer wiring boards, electroless gold plating resistance, PCT resistance resulting from adhesion, and In particular, a photocurable resin composition capable of forming a cured film having excellent characteristics required for IC packages, capable of responding to high density and surface mounting of printed wiring boards, and capable of forming small-diameter openings by alkali development. Is to provide.
Furthermore, a dry film and a cured product excellent in various properties as described above obtained by using such a photocurable resin composition, and a cured film such as a solder resist is formed by the dry film and the cured product. It is to provide a printed wiring board.
好適な態様によれば、上記高分子バインダーは、熱可塑樹脂、好ましくは溶剤に溶かした状態で固形分が10~50wt%の熱可塑樹脂溶液である。別の好適な態様によれば、上記フィラーはBa又はMg及び/又はAlを含む。 In order to achieve the above object, according to the present invention, there is provided a composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler. Thus, there is provided a photocurable resin composition that can be developed with an alkaline solution, characterized in that the content of the filler is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
According to a preferred embodiment, the polymer binder is a thermoplastic resin, preferably a thermoplastic resin solution having a solid content of 10 to 50 wt% dissolved in a solvent. According to another preferred embodiment, the filler contains Ba or Mg and / or Al.
さらに本発明によれば、前記光硬化性樹脂組成物又はドライフィルムを活性エネルギー線の照射によりパターン状に光硬化させ、好ましくはさらに熱硬化して得られる硬化皮膜を有することを特徴とするプリント配線板も提供される。 Further, according to the present invention, the photocurable resin composition obtained by applying and drying the photocurable resin composition on a carrier film, the photocurable resin composition or the dry film can be converted into active energy. There are also provided a cured product obtained by photocuring by irradiation of a line, particularly a cured product obtained by photocuring on copper, and a cured product obtained by photocuring in a pattern. In one aspect, a dry film consists of a dried layer of a plurality of photocurable resin compositions, and at least one layer is formed from the photocurable resin composition of the present invention.
Furthermore, according to the present invention, the print is characterized by having a cured film obtained by photocuring the photocurable resin composition or the dry film into a pattern by irradiation with active energy rays, and preferably further thermosetting. A wiring board is also provided.
以下、本発明の光硬化性樹脂組成物の各構成成分について詳細に説明する。 The photocurable resin composition developable with the alkaline solution of the present invention (hereinafter also referred to as a photocurable resin composition) includes a carboxyl group-containing oligomer, a polymer binder having a higher molecular weight than the carboxyl group-containing oligomer, and photopolymerization. A composition comprising an initiator, a photopolymerizable monomer and a filler, wherein the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
Hereinafter, each component of the photocurable resin composition of the present invention will be described in detail.
カルボキシル基含有オリゴマーの具体例としては、以下に列挙するようなオリゴマーを好適に使用できる。 The photocurable resin composition of the present invention can impart alkali developability by using a carboxyl group-containing oligomer. In the present specification, the term “oligomer” should be understood to be used to make it easy to distinguish the molecular weight from the polymer binder. As the carboxyl group-containing oligomer, various conventionally known carboxyl group-containing resins or prepolymers having a carboxyl group in the molecule can be used. In particular, a carboxyl group-containing photosensitive resin or a carboxyl group-containing photosensitive prepolymer having an ethylenically unsaturated double bond in the molecule is more preferable in terms of photocurability and development resistance. And the unsaturated double bond is preferably derived from acrylic acid, methacrylic acid or derivatives thereof. When only a carboxyl group-containing resin or prepolymer having no ethylenically unsaturated double bond is used, in order to make the composition photocurable, a plurality of ethylenically unsaturated groups are contained in the molecule described later. It is necessary to use a compound having a photopolymerizable monomer in combination.
As specific examples of the carboxyl group-containing oligomer, oligomers listed below can be suitably used.
なお、本明細書において、(メタ)アクリレートとは、アクリレート、メタクリレート及びそれらの混合物を総称する用語で、他の類似の表現についても同様である。 (11) A carboxyl group-containing photosensitive oligomer obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (1) to (10).
In addition, in this specification, (meth) acrylate is a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.
また、前記カルボキシル基含有オリゴマーの酸価は、40~200mgKOH/gの範囲が適当であり、より好ましくは45~120mgKOH/gの範囲である。カルボキシル基含有オリゴマーの酸価が40mgKOH/g未満であるとアルカリ現像が困難となり、一方、200mgKOH/gを超えると現像液による露光部の溶解が進むために、必要以上にラインが痩せたり、場合によっては、露光部と未露光部の区別なく現像液で溶解剥離してしまい、正常なレジストパターンの描画が困難となるので好ましくない。 Since the carboxyl group-containing oligomer as described above has a large number of carboxyl groups in the side chain of the backbone polymer, development with a dilute alkaline aqueous solution becomes possible.
The acid value of the carboxyl group-containing oligomer is suitably in the range of 40 to 200 mgKOH / g, more preferably in the range of 45 to 120 mgKOH / g. When the acid value of the carboxyl group-containing oligomer is less than 40 mgKOH / g, alkali development becomes difficult. On the other hand, if it exceeds 200 mgKOH / g, dissolution of the exposed portion by the developer proceeds, and the line may become thinner than necessary. Depending on the case, the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to draw a normal resist pattern.
特に前記一般式中、X、Yが、それぞれ、メチル基又はエチル基であり、Zはメチル又はフェニルであり、nは0であり、Arは、結合か、フェニレン、ナフチレン、チオフェン又はチエニレンであることが好ましい。 Examples of the oxime ester photopolymerization initiator include CGI-325, Irgacure (registered trademark) OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, NCI-831 manufactured by ADEKA, and the like as commercially available products. Moreover, the photoinitiator which has two oxime ester groups in a molecule | numerator can also be used suitably, Specifically, the oxime ester compound which has a carbazole structure represented with the following general formula is mentioned.
In particular, in the above general formula, X and Y are each a methyl group or an ethyl group, Z is methyl or phenyl, n is 0, and Ar is a bond, phenylene, naphthylene, thiophene or thienylene. It is preferable.
このような光重合開始剤、光開始助剤、及び増感剤の総量は、前記カルボキシル基含有オリゴマー100質量部に対して35質量部以下であることが好ましい。35質量部を超えると、これらの光吸収により深部硬化性が低下する傾向にある。 These photopolymerization initiators, photoinitiator assistants, and sensitizers can be used alone or as a mixture of two or more.
The total amount of such photopolymerization initiator, photoinitiator assistant, and sensitizer is preferably 35 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer. When it exceeds 35 parts by mass, the deep curability tends to decrease due to light absorption.
赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系などがあり、具体的には以下のようなカラ-インデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものが挙げられる。
モノアゾ系:Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269。
ジスアゾ系:Pigment Red 37, 38, 41。
モノアゾレーキ系:Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53:2, 57:1, 58:4, 63:1, 63:2, 64:1,68。
ベンズイミダゾロン系:Pigment Red 171、Pigment Red 175、Pigment Red 176、Pigment Red 185、Pigment Red 208。
ぺリレン系:Solvent Red 135、Solvent Red 179、Pigment Red 123、Pigment Red 149、Pigment Red 166、Pigment Red 178、Pigment Red 179、Pigment Red 190、Pigment Red 194、Pigment Red 224。
ジケトピロロピロール系:Pigment Red 254、Pigment Red 255、Pigment Red 264、Pigment Red 270、Pigment Red 272。
縮合アゾ系:Pigment Red 220、Pigment Red 144、Pigment Red 166、Pigment Red 214、Pigment Red 220、Pigment Red 221、Pigment Red 242。
アンスラキノン系:Pigment Red 168、Pigment Red 177、Pigment Red 216、Solvent Red 149、Solvent Red 150、Solvent Red 52、Solvent Red 207。
キナクリドン系:Pigment Red 122、Pigment Red 202、Pigment Red 206、Pigment Red 207、Pigment Red 209。 Red colorant:
Examples of the red colorant include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. -Indexes (CI; issued by The Society of Dyers and Colorists) are listed.
Monoazo: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
Disazo: Pigment Red 37, 38, 41.
Monoazo lakes: Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1,68.
Benzimidazolone series: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
Perylene series: Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
Diketopyrrolopyrrole series: Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
Condensed azo series: Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
Anthraquinone series: Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
Kinacridone series: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
青色着色剤としてはフタロシアニン系、アントラキノン系があり、顔料系はピグメント(Pigment)に分類されている化合物、具体的には、下記のようなものを挙げることができる:Pigment Blue 15、Pigment Blue 15:1、Pigment Blue 15:2、Pigment Blue 15:3、Pigment Blue 15:4、Pigment Blue 15:6、Pigment Blue 16、Pigment Blue 60。
染料系としては、Solvent Blue 35、Solvent Blue 63、Solvent Blue 68、Solvent Blue 70、Solvent Blue 83、Solvent Blue 87、Solvent Blue 94、Solvent Blue 97、Solvent Blue 122、Solvent Blue 136、Solvent Blue 67、Solvent Blue 70等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。 Blue colorant:
Blue colorants include phthalocyanine-based and anthraquinone-based pigments, and pigment-based compounds such as Pigment Blue 15 and Pigment Blue 15 are listed below. : 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4, Pigment Blue 15: 6, Pigment Blue 16, and Pigment Blue 60.
The dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
緑色着色剤としては、同様にフタロシアニン系、アントラキノン系、ペリレン系があり、具体的にはPigment Green 7、Pigment Green 36、Solvent Green 3、Solvent Green 5、Solvent Green 20、Solvent Green 28等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。 Green colorant:
Similarly, green colorants include phthalocyanine, anthraquinone, and perylene. Specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. are used. be able to. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系等があり、具体的には以下のものが挙げられる。
アントラキノン系:Solvent Yellow 163、Pigment Yellow 24、Pigment Yellow 108、Pigment Yellow 193、Pigment Yellow 147、Pigment Yellow 199、Pigment Yellow 202。
イソインドリノン系:Pigment Yellow 110、Pigment Yellow 109、Pigment Yellow 139、Pigment Yellow 179、Pigment Yellow 185。
縮合アゾ系:Pigment Yellow 93、Pigment Yellow 94、Pigment Yellow 95、Pigment Yellow 128、Pigment Yellow 155、Pigment Yellow 166、Pigment Yellow 180。
ベンズイミダゾロン系:Pigment Yellow 120、Pigment Yellow 151、Pigment Yellow 154、Pigment Yellow 156、Pigment Yellow 175、Pigment Yellow 181。
モノアゾ系:Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62:1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116, 167, 168, 169, 182, 183。
ジスアゾ系:Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198。 Yellow colorant:
Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
Anthraquinone series: Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
Isoindolinone type: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
Condensed azo series: Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
Benzimidazolone series: Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.
Monoazo: Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
Disazo: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
具体的に例示すれば、Pigment Violet 19、23、29、32、36、38、42、Solvent Violet 13、36、C.I.ピグメントオレンジ1、C.I.ピグメントオレンジ5、C.I.ピグメントオレンジ13、C.I.ピグメントオレンジ14、C.I.ピグメントオレンジ16、C.I.ピグメントオレンジ17、C.I.ピグメントオレンジ24、C.I.ピグメントオレンジ34、C.I.ピグメントオレンジ36、C.I.ピグメントオレンジ38、C.I.ピグメントオレンジ40、C.I.ピグメントオレンジ43、C.I.ピグメントオレンジ46、C.I.ピグメントオレンジ49、C.I.ピグメントオレンジ51、C.I.ピグメントオレンジ61、C.I.ピグメントオレンジ63、C.I.ピグメントオレンジ64、C.I.ピグメントオレンジ71、C.I.ピグメントオレンジ73、C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラック1、C.I.ピグメントブラック7等がある。 In addition, a colorant such as purple, orange, brown, or black may be added for the purpose of adjusting the color tone.
Specifically, Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Black 1, CI Pigment Black And the like.
このような紫外線吸収剤としては、ベンゾフェノン誘導体、ベンゾエート誘導体、ベンゾトリアゾール誘導体、トリアジン誘導体、ベンゾチアゾール誘導体、シンナメート誘導体、アントラニレート誘導体、ジベンゾイルメタン誘導体等が挙げられる。 Furthermore, an ultraviolet absorber can be used in the photocurable resin composition of the present invention in addition to the antioxidant.
Examples of such ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, anthranilate derivatives, dibenzoylmethane derivatives, and the like.
そして、約60~100℃の温度で、組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させ、タックフリーの塗膜(樹脂絶縁層)を形成する。このとき、揮発乾燥は、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブン等(蒸気による空気加熱方式の熱源を備えたものを用いて乾燥機内の熱風を向流接触させる方法及びノズルより支持体に吹き付ける方式)を用いて行うことができる。 After the photocurable resin composition of the present invention configured as described above is prepared to a predetermined composition, it is adjusted to a viscosity suitable for a coating method with an organic solvent, for example, on a substrate, a dip coating method, a flow The coating method is a coating method, a roll coating method, a bar coater method, a screen printing method, a curtain coating method, or the like.
Then, the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C. to form a tack-free coating film (resin insulating layer). At this time, the volatile drying is performed by using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (using a method having a heat source of an air heating method using steam in a countercurrent contact with hot air in the dryer) A method of spraying on a support).
ドライフィルムは、例えばポリエチレンテレフタレート等のキャリアフィルムと、ソルダーレジスト層などの樹脂絶縁層と、必要に応じて用いられる剥離可能なカバーフィルムとが、この順序に積層された構造を有するものである。 Moreover, you may form a resin insulating layer by forming a dry film with a photocurable resin composition and bonding this on a base material.
The dry film has, for example, a structure in which a carrier film such as polyethylene terephthalate, a resin insulating layer such as a solder resist layer, and a peelable cover film used as necessary are laminated in this order.
カバーフィルムとしては、ポリエチレンフィルム、ポリプロピレンフィルム等を使用することができるが、ソルダーレジスト層との接着力が、キャリアフィルムよりも小さいものが良い。 As the carrier film, for example, a thermoplastic film such as a polyester film having a thickness of 2 to 150 μm is used.
As the cover film, a polyethylene film, a polypropylene film, or the like can be used, but a cover film having a smaller adhesive force than the solder resist layer is preferable.
活性エネルギー線照射に用いられる露光機としては、直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)、メタルハライドランプを搭載した露光機、(超)高圧水銀ランプを搭載した露光機、水銀ショートアークランプを搭載した露光機、もしくは(超)高圧水銀ランプ等の紫外線ランプを使用した直接描画装置を用いることができる。 Further, the pattern is exposed by an active energy beam or directly by a laser direct exposure machine through a photomask having a pattern formed by a contact method (or non-contact method). In the coating film, the exposed portion (the portion irradiated by the active energy ray) is cured.
As an exposure machine used for active energy ray irradiation, a direct drawing device (for example, a laser direct imaging device that draws an image directly with a laser using CAD data from a computer), an exposure device equipped with a metal halide lamp, and an (ultra) high-pressure mercury lamp It is possible to use an exposure machine mounted, an exposure machine equipped with a mercury short arc lamp, or a direct drawing apparatus using an ultraviolet lamp such as a (super) high pressure mercury lamp.
このとき、現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができる。また、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類等のアルカリ水溶液を用いることができる。 Then, by exposing in this way, the exposed portion (the portion irradiated with the active energy ray) is cured, and the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3 wt% sodium carbonate aqueous solution). Thus, a cured product (pattern) is formed.
At this time, as a developing method, a dipping method, a shower method, a spray method, a brush method, or the like can be used. Further, as the developer, an alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like can be used.
温度計、窒素導入装置兼アルキレンオキシド導入装置及び撹拌装置を備えたオートクレーブに、ノボラック型クレゾール樹脂(商品名「ショーノールCRG951」、昭和高分子(株)製、OH当量:119.4)119.4部、水酸化カリウム1.19部及びトルエン119.4部を仕込み、撹拌しつつ系内を窒素置換し、加熱昇温した。次に、プロピレンオキシド63.8部を徐々に滴下し、125~132℃、0~4.8kg/cm2で16時間反応させた。その後、室温まで冷却し、この反応溶液に89%リン酸1.56部を添加混合して水酸化カリウムを中和し、不揮発分62.1%、水酸基価が182.2g/eq.であるノボラック型クレゾール樹脂のプロピレンオキシド反応溶液を得た。これは、フェノール性水酸基1当量当りアルキレンオキシドが平均1.08モル付加しているものであった。
得られたノボラック型クレゾール樹脂のアルキレンオキシド反応溶液293.0部、アクリル酸43.2部、メタンスルホン酸11.53部、メチルハイドロキノン0.18部及びトルエン252.9部を、撹拌機、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、110℃で12時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、12.6部の水が留出した。その後、室温まで冷却し、得られた反応溶液を15%水酸化ナトリウム水溶液35.35部で中和し、次いで水洗した。その後、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート118.1部で置換しつつ留去し、ノボラック型アクリレート樹脂溶液を得た。次に、得られたノボラック型アクリレート樹脂溶液332.5部及びトリフェニルホスフィン1.22部を、撹拌器、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8部を徐々に加え、95~101℃で6時間反応させ、冷却後、取り出した。このようにして、不揮発分65%、固形物の酸価87.7mgKOH/gのカルボキシル基含有感光性オリゴマー(Mw:2650)の溶液(以下、A-1と略称する)を得た。 Synthesis example 1
A novolac-type cresol resin (trade name “Shonol CRG951”, manufactured by Showa Polymer Co., Ltd., OH equivalent: 119.4) is added to an autoclave equipped with a thermometer, a nitrogen introduction device / alkylene oxide introduction device, and a stirring device. 4 parts, 1.19 parts of potassium hydroxide and 119.4 parts of toluene were charged, the system was purged with nitrogen while stirring, and the temperature was raised. Next, 63.8 parts of propylene oxide was gradually added dropwise and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. Thereafter, the reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide. The nonvolatile content was 62.1% and the hydroxyl value was 182.2 g / eq. A novolak-type cresol resin propylene oxide reaction solution was obtained. This was an average of 1.08 moles of alkylene oxide added per equivalent of phenolic hydroxyl group.
293.0 parts of an alkylene oxide reaction solution of the obtained novolak-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 part of methylhydroquinone and 252.9 parts of toluene were mixed with a stirrer and a temperature. A reactor equipped with a meter and an air blowing tube was charged, air was blown at a rate of 10 ml / min, and the reaction was carried out at 110 ° C. for 12 hours while stirring. 12.6 parts of water was distilled from the water produced by the reaction as an azeotrope with toluene. Thereafter, the reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution. Next, 332.5 parts of the obtained novolak acrylate resin solution and 1.22 parts of triphenylphosphine were charged into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was supplied at a rate of 10 ml / min. While blowing and stirring, 60.8 parts of tetrahydrophthalic anhydride was gradually added, reacted at 95 to 101 ° C. for 6 hours, cooled and taken out. Thus, a solution (hereinafter abbreviated as A-1) of a carboxyl group-containing photosensitive oligomer (Mw: 2650) having a non-volatile content of 65% and a solid acid value of 87.7 mgKOH / g was obtained.
クレゾールノボラック型エポキシ樹脂(エピクロンN-695、DIC(株)製、エポキシ当量220)330部を、ガス導入管、撹拌装置、冷却管及び温度計を備えたフラスコに入れ、カルビトールアセテート340部を加え、加熱溶解し、ハイドロキノン0.46部と、トリフェニルホスフィン1.38部を加えた。この混合物を95~105℃に加熱し、アクリル酸108部を徐々に滴下し、16時間反応させた。この反応生成物を、80~90℃まで冷却し、テトラヒドロフタル酸無水物68部を加え、8時間反応させ、冷却させた。このようにして、固形物の酸価50mgKOH/g、不揮発分60%のカルボキシル基含有感光性オリゴマー(Mw:9500)の溶液(以下、A-4と略称する)を得た。 Synthesis example 2
Put 330 parts of cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220) in a flask equipped with a gas introduction tube, a stirrer, a condenser tube and a thermometer, and add 340 parts of carbitol acetate. In addition, the mixture was dissolved by heating, and 0.46 part of hydroquinone and 1.38 parts of triphenylphosphine were added. This mixture was heated to 95 to 105 ° C., 108 parts of acrylic acid was gradually added dropwise and reacted for 16 hours. The reaction product was cooled to 80 to 90 ° C., 68 parts of tetrahydrophthalic anhydride was added, reacted for 8 hours, and cooled. Thus, a solution (hereinafter abbreviated as A-4) of a carboxyl group-containing photosensitive oligomer (Mw: 9500) having a solid acid value of 50 mgKOH / g and a nonvolatile content of 60% was obtained.
上記合成例の樹脂溶液を用い、下記表1に示す種々の成分と共に表1に示す割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、ソルダーレジスト用感光性樹脂組成物を調製した。 Examples 1 to 16 and Comparative Examples 1 to 3
Using the resin solution of the above synthesis example, blended in the proportions (parts by mass) shown in Table 1 together with various components shown in Table 1 below, premixed with a stirrer, kneaded with a three-roll mill, and used for solder resist A photosensitive resin composition was prepared.
*1 ZFR-1124(不揮発分65.0%、固形分酸価100mgKOH/g、Mw:11500、日本化薬(株)製)
*2 ZCR-1601H(不揮発分65.0%、固形分酸価100mgKOH/g、Mw:1730、日本化薬(株)製)
*3 エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]1,1-(o-アセチルオキシム)(BASFジャパン社製)
*4 ルシリンTPO(BASF社製)
*5 日本タルク(株)製SG-2000(屈折率:1.57)
*6 堺化学工業(株)製B-33(屈折率:1.64)
*7 昭和電工(株)製ハイジライトH-42M(屈折率:1.65)
*8 シリチン(板状のカオリナイトと球状のシリカの天然結合物、屈折率:1.57)
*9 (株)アドマテックス製SO-E2(屈折率:1.45)
*10 協和化学工業(株)製DHT-4A(屈折率:1.50)
*11 新日鐵化学(株)製YP-50(フェノキシ樹脂、Mw:約70,000)
*12 新日鉄化学(株)製YP-50のカルビトールアセテート溶解品(固形分30%)
*13 アルケマ(株)製 MAM-M51(3元ブロック共重合体:ポリメチルメタクリレート-ポリブチルアクリレート-ポリメチルメタクリレート、Mw:約56,000)
*14 アルケマ(株)製 MAM-M52(3元ブロック共重合体:ポリメチルメタクリレート-ポリブチルアクリレート-ポリメチルメタクリレート、Mw:約96,000)
*15 アルケマ(株)製 SBM-E41(3元ブロック共重合体:ポリスチレン-ポリブタジエン-ポリメチルメタクリレート、Mw:約42,000)
*16 Eastman Chemical社製CAP-482(セルロースアセトプロピオネート、Mw:約75,000)
*17 東洋紡績(株)製バイロン670(非晶性ポリエステル樹脂、Mn:約30,000)
*18 ビキシレノール型エポキシ樹脂(三菱化学(株)製)
*19 ビスフェノール型エポキシ樹脂(新日鐵化学(株)製)
*20 C.I.Pigment Blue 15:3
*21 C.I.Pigment Yellow 147
*22 ジペンタエリスリトールヘキサアクリレート(日本化薬(株)製) The meanings of the reference symbols in Table 1 are as follows.
* 1 ZFR-1124 (nonvolatile content: 65.0%, solid content acid value: 100 mgKOH / g, Mw: 11500, manufactured by Nippon Kayaku Co., Ltd.)
* 2 ZCR-1601H (nonvolatile content: 65.0%, solid content acid value: 100 mgKOH / g, Mw: 1730, manufactured by Nippon Kayaku Co., Ltd.)
* 3 Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] 1,1- (o-acetyloxime) (BASF Japan)
* 4 Lucillin TPO (manufactured by BASF)
* 5 SG-2000 manufactured by Nippon Talc Co., Ltd. (refractive index: 1.57)
* 6 B-33 manufactured by Sakai Chemical Industry Co., Ltd. (refractive index: 1.64)
* 7 Showa Denko Co., Ltd. Hijilite H-42M (refractive index: 1.65)
* 8 Siritin (natural combination of plate-like kaolinite and spherical silica, refractive index: 1.57)
* 9 SO-E2 manufactured by Admatechs Co., Ltd. (refractive index: 1.45)
* 10 DHT-4A manufactured by Kyowa Chemical Industry Co., Ltd. (refractive index: 1.50)
* 11 YP-50 manufactured by Nippon Steel Chemical Co., Ltd. (phenoxy resin, Mw: approx. 70,000)
* 12 YP-50 carbitol acetate dissolved product manufactured by Nippon Steel Chemical Co., Ltd. (solid content 30%)
* 13 MAM-M51 manufactured by Arkema Co., Ltd. (ternary block copolymer: polymethyl methacrylate-polybutyl acrylate-polymethyl methacrylate, Mw: about 56,000)
* 14 MAM-M52 manufactured by Arkema Co., Ltd. (ternary block copolymer: polymethyl methacrylate-polybutyl acrylate-polymethyl methacrylate, Mw: about 96,000)
* 15 SBM-E41 manufactured by Arkema Co., Ltd. (ternary block copolymer: polystyrene-polybutadiene-polymethyl methacrylate, Mw: about 42,000)
* 16 CAP-482 (cellulose acetopropionate, Mw: about 75,000) manufactured by Eastman Chemical Co.
* 17 Byron 670 manufactured by Toyobo Co., Ltd. (amorphous polyester resin, Mn: about 30,000)
* 18 Bixylenol-type epoxy resin (Mitsubishi Chemical Corporation)
* 19 Bisphenol-type epoxy resin (manufactured by Nippon Steel Chemical Co., Ltd.)
* 20 CIPigment Blue 15: 3
* 21 CIPigment Yellow 147
* 22 Dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.)
前記実施例及び比較例の各組成物を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で30分乾燥し、室温まで放冷した。この基板に高圧水銀灯を搭載した露光装置を用いて最適露光量でソルダーレジストパターンを露光し、30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像を行い、レジストパターンを得た。この基板を、UVコンベア炉にて積算露光量1000mJ/cm2の条件で紫外線照射した後、160℃で60分加熱して硬化した。得られたプリント基板(評価基板)に対して以下のように特性を評価した。 Characteristic test:
Each of the compositions of Examples and Comparative Examples was applied on the entire surface of a patterned copper foil substrate by screen printing, dried at 80 ° C. for 30 minutes, and allowed to cool to room temperature. Using this exposure apparatus equipped with a high-pressure mercury lamp on this substrate, the solder resist pattern is exposed at an optimum exposure amount, and developed with a 1 wt% sodium carbonate aqueous solution at 30 ° C. under a spray pressure of 0.2 MPa for 90 seconds. Obtained. This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes. The characteristics of the obtained printed circuit board (evaluation board) were evaluated as follows.
銅厚35μmの回路パターン基板をバフロール研磨後、水洗し、乾燥してから、前記実施例及び比較例の各組成物をスクリーン印刷法により全面に塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。その後、メタルハライドランプ搭載の露光装置(HMW-680-GW20)を用いてストーファーの41段ステップタブレットを介して露光し、現像(30℃、0.2MPa、1wt%Na2CO3水溶液)を60秒で行った際残存するステップタブレットのパターンが7段の時を最適露光量とした。 <Optimum exposure amount>
A circuit pattern substrate having a copper thickness of 35 μm was polished with buffalo, washed with water and dried, and then the compositions of the examples and comparative examples were applied to the entire surface by a screen printing method, and 30 ° C. in a hot air circulation drying oven at 80 ° C. Let dry for minutes. Thereafter, exposure is performed through a 41-step tablet of a stoker using an exposure apparatus (HMW-680-GW20) equipped with a metal halide lamp, and development (30 ° C., 0.2 MPa, 1 wt% Na 2 CO 3 aqueous solution) is performed at 60 ° C. When the pattern of the step tablet remaining when it was performed in seconds was 7 steps, the optimum exposure amount was set.
パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、印刷状態の確認を行った。判定基準は以下のとおりである。
◎:パターン上にムラなくレジストインキの膜厚が保持される。
○:パターン上に一部ムラを生じるが、レジストインキの膜厚が保持される。
×:パターン上のインキが薄くなる。 <Applicability>
The entire surface of the patterned copper foil substrate was applied by screen printing, and the printed state was confirmed. The judgment criteria are as follows.
(Double-circle): The film thickness of a resist ink is hold | maintained uniformly on a pattern.
○: Some unevenness occurs on the pattern, but the film thickness of the resist ink is maintained.
X: The ink on a pattern becomes thin.
市販品の無電解ニッケルめっき浴及び無電解金めっき浴を用いて、ニッケル0.5μm、金0.03μmの条件でめっきを行い、テープピーリングにより、レジスト層の剥がれの有無やめっき液のしみ込みの有無を評価した後、テープピーリングによりレジスト層の剥がれの有無を評価した。判定基準は以下のとおりである。
◎:染み込み、剥がれが見られない。
○:めっき後に少し染み込みが確認されるが、テープピール後は剥がれない。
△:めっき後にほんの僅かしみ込みが見られ、テープピール後に剥がれも見られる。
×:めっき後に剥がれがある。 <Electroless gold plating resistance>
Using a commercially available electroless nickel plating bath and electroless gold plating bath, plating is performed under the conditions of nickel 0.5 μm and gold 0.03 μm, and the presence of peeling of the resist layer and the penetration of the plating solution by tape peeling Then, the presence or absence of the resist layer was evaluated by tape peeling. The judgment criteria are as follows.
A: No soaking or peeling is observed.
○: Slight penetration is confirmed after plating, but does not peel off after tape peeling.
Δ: Slight penetration after plating and peeling after tape peel.
X: There is peeling after plating.
121℃、2気圧、湿度100%の高圧高温高湿槽に168時間入れ、硬化塗膜の状態変化を、以下の評価基準で評価した。
◎:顕著な膨れ、変色なし。
○:微小な膨れ有り、変色なし。
×:顕著な膨れ、変色有り。 <PCT resistance>
It was placed in a high-pressure, high-temperature and high-humidity tank at 121 ° C., 2 atm and 100% humidity for 168 hours, and the change in state of the cured coating film was evaluated according to the following evaluation criteria.
A: No noticeable swelling or discoloration.
○: There is a minute bulge and no discoloration.
X: Remarkable swelling and discoloration.
-55℃で30分間、125℃で30分間を1サイクルとして熱履歴を加え、1000サイクル経過後、光学顕微鏡で観察した。判定基準は以下のとおりである。
◎:クラック発生なし。
○:クラック発生あり。
×:クラック発生著しい。 <Crack resistance>
Thermal history was added for 30 minutes at −55 ° C. and 30 minutes at 125 ° C., and after 1000 cycles, the samples were observed with an optical microscope. The judgment criteria are as follows.
(Double-circle): There is no crack generation.
○: Cracks are generated.
X: Crack generation is remarkable.
実施例及び比較例の各光硬化性熱硬化性樹脂組成物を、めっき銅が形成された基板にスクリーン印刷法により塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。乾燥後、高圧水銀灯(ショートアークランプ)搭載の露光装置を用いて露光した。露光パターンは開口:50/60/70/80/90/100μmの丸を描画させるガラス乾板を使用した。露光量は感光性樹脂組成物の最適露光量となるように活性エネルギー線を照射した。露光後、30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像を行い、レジストパターンを得た。この基板を、UVコンベア炉にて積算露光量1000mJ/cm2の条件で紫外線照射した後、160℃で60分加熱して硬化した。
得られたソルダーレジスト用感光性樹脂組成物の硬化塗膜の最小開口を、200倍に調整した光学顕微鏡を用いて求めた。判定基準は以下のとおりである。
◎:60μm未満。
○:60μm以上~80μm未満。
△:80μm以上100μm未満。
×:100μm以上。 <Resolution>
Each photocurable thermosetting resin composition of an Example and a comparative example was apply | coated by the screen printing method to the board | substrate with which plating copper was formed, and was dried for 30 minutes with a 80 degreeC hot-air circulation type drying furnace. After drying, exposure was performed using an exposure apparatus equipped with a high-pressure mercury lamp (short arc lamp). The exposure pattern used was a glass dry plate on which a circle with an opening of 50/60/70/80/90/100 μm was drawn. The active energy ray was irradiated so that the exposure amount became the optimal exposure amount of the photosensitive resin composition. After the exposure, a 1 wt% sodium carbonate aqueous solution at 30 ° C. was developed for 90 seconds under a spray pressure of 0.2 MPa to obtain a resist pattern. This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes.
The minimum opening of the cured coating film of the obtained photosensitive resin composition for solder resist was determined using an optical microscope adjusted to 200 times. The judgment criteria are as follows.
A: Less than 60 μm.
○: 60 μm or more and less than 80 μm.
Δ: 80 μm or more and less than 100 μm.
X: 100 μm or more.
3mm×10mmのサイズの硬化塗膜を、セイコーインスツールメンツ社製TMA6100にて10gの荷重を加えながら一定の昇温速度で0℃-260℃の温度範囲で引張り試験を行った。温度に対する硬化塗膜の伸び量から線膨張係数を算出した。
上記各試験の結果を表2にまとめて示す。 <Linear expansion coefficient>
A tensile test was performed on a cured coating film having a size of 3 mm × 10 mm in a temperature range of 0 ° C. to 260 ° C. at a constant temperature increase rate while applying a load of 10 g with TMA6100 manufactured by Seiko Instruments Inc. The linear expansion coefficient was calculated from the amount of elongation of the cured coating film with respect to temperature.
The results of the above tests are summarized in Table 2.
Claims (10)
- カルボキシル基含有オリゴマー、上記カルボキシル基含有オリゴマーよりも分子量の大きな高分子バインダー、光重合開始剤、光重合性モノマー及びフィラーを含む組成物であって、上記フィラーの含有量が組成物の不揮発成分全体量の30~60質量%であることを特徴とするアルカリ溶液により現像可能な光硬化性樹脂組成物。 A composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler, wherein the filler content is the entire nonvolatile component of the composition A photocurable resin composition developable with an alkaline solution, characterized in that the amount is 30 to 60% by mass of the amount.
- 前記高分子バインダーが熱可塑樹脂であることを特徴とする請求項1に記載の光硬化性樹脂組成物。 The photocurable resin composition according to claim 1, wherein the polymer binder is a thermoplastic resin.
- 前記熱可塑樹脂が同一溶剤に溶かした状態で固形分10~50wt%であることを特徴とする請求項2に記載の光硬化性樹脂組成物。 3. The photocurable resin composition according to claim 2, wherein the thermoplastic resin has a solid content of 10 to 50 wt% in a state dissolved in the same solvent.
- 前記フィラーがBa又はMg及び/又はAlを含むことを特徴とする請求項1に記載の光硬化性樹脂組成物。 The photocurable resin composition according to claim 1, wherein the filler contains Ba, Mg, and / or Al.
- 請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を、キャリアフィルムに塗布・乾燥して得られるドライフィルム。 A dry film obtained by coating and drying the photocurable resin composition according to any one of claims 1 to 4 on a carrier film.
- ドライフィルムが複数の光硬化性樹脂組成物の乾燥層からなり、少なくとも1層が請求項1~4のいずれか1項に記載の光硬化性樹脂組成物から形成されていることを特徴とする請求項5に記載のドライフィルム。 The dry film comprises a plurality of dry layers of a photocurable resin composition, and at least one layer is formed from the photocurable resin composition according to any one of claims 1 to 4. The dry film according to claim 5.
- 請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を基材に塗布し、活性エネルギー線の照射により光硬化させて得られることを特徴とする硬化物。 A cured product obtained by applying the photocurable resin composition according to any one of claims 1 to 4 to a substrate and photocuring it by irradiation with active energy rays.
- 請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を、基材に塗布・乾燥し、活性エネルギー線の照射により光硬化させて得られる硬化物のパターンを有することを特徴とするプリント配線板。 5. A pattern of a cured product obtained by applying the photocurable resin composition according to any one of claims 1 to 4 to a substrate, drying and photocuring by irradiation with an active energy ray. Printed wiring board.
- 請求項5又は6に記載のドライフィルムを、基材にラミネートし、活性エネルギー線照射により光硬化させて得られることを特徴とする硬化物。 A cured product obtained by laminating the dry film according to claim 5 or 6 on a substrate and photocuring it by irradiation with active energy rays.
- 請求項5又は6に記載のドライフィルムを基材にラミネートし、活性エネルギー線の照射により光硬化させて得られる硬化物のパターンを有することを特徴とするプリント配線板。 7. A printed wiring board comprising a pattern of a cured product obtained by laminating the dry film according to claim 5 or 6 on a substrate and photocuring by irradiation with active energy rays.
Priority Applications (4)
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JP2012550744A JP5771221B2 (en) | 2010-12-28 | 2011-06-17 | Photocurable resin composition, dry film and cured product thereof, and printed wiring board using them |
KR1020157035295A KR20160003294A (en) | 2010-12-28 | 2011-06-17 | Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these |
KR1020137019865A KR20130099219A (en) | 2010-12-28 | 2011-06-17 | Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these |
CN201180063164.3A CN103299242B (en) | 2010-12-28 | 2011-06-17 | Photocurable resin composition, its dry film and solidfied material and use their printed circuit board (PCB) |
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JP2010-292815 | 2010-12-28 | ||
JP2010292815 | 2010-12-28 |
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PCT/JP2011/063913 WO2012090532A1 (en) | 2010-12-28 | 2011-06-17 | Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these |
Country Status (5)
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JP (2) | JP5771221B2 (en) |
KR (2) | KR20160003294A (en) |
CN (1) | CN103299242B (en) |
TW (1) | TWI514074B (en) |
WO (1) | WO2012090532A1 (en) |
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Also Published As
Publication number | Publication date |
---|---|
TW201227172A (en) | 2012-07-01 |
CN103299242B (en) | 2016-08-10 |
KR20160003294A (en) | 2016-01-08 |
TWI514074B (en) | 2015-12-21 |
JPWO2012090532A1 (en) | 2014-06-05 |
JP5876925B2 (en) | 2016-03-02 |
KR20130099219A (en) | 2013-09-05 |
CN103299242A (en) | 2013-09-11 |
JP5771221B2 (en) | 2015-08-26 |
JP2015064612A (en) | 2015-04-09 |
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