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WO2012090532A1 - Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these - Google Patents

Photocurable resin composition, dry film and cured object obtained therefrom, and printed wiring board obtained using these Download PDF

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Publication number
WO2012090532A1
WO2012090532A1 PCT/JP2011/063913 JP2011063913W WO2012090532A1 WO 2012090532 A1 WO2012090532 A1 WO 2012090532A1 JP 2011063913 W JP2011063913 W JP 2011063913W WO 2012090532 A1 WO2012090532 A1 WO 2012090532A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin composition
photocurable resin
carboxyl group
manufactured
filler
Prior art date
Application number
PCT/JP2011/063913
Other languages
French (fr)
Japanese (ja)
Inventor
峰岸 昌司
有馬 聖夫
Original Assignee
太陽インキ製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 太陽インキ製造株式会社 filed Critical 太陽インキ製造株式会社
Priority to JP2012550744A priority Critical patent/JP5771221B2/en
Priority to KR1020157035295A priority patent/KR20160003294A/en
Priority to KR1020137019865A priority patent/KR20130099219A/en
Priority to CN201180063164.3A priority patent/CN103299242B/en
Publication of WO2012090532A1 publication Critical patent/WO2012090532A1/en

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0041Photosensitive materials providing an etching agent upon exposure
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/085Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process

Definitions

  • the present invention relates to a photocurable resin composition used as a solder resist of a printed wiring board, a dry film and a cured product thereof, and a printed wiring board using them.
  • solder resists are also required to have improved workability and higher performance in response to the increase in the density of printed wiring boards as electronic devices become lighter, thinner and shorter.
  • BGA ball grid array
  • CSP chip
  • QFP quad flat pack package
  • SOP small outline package
  • An IC package called “Scale Package” has appeared.
  • PCT pressure cooker test
  • moisture heat resistance is particularly required.
  • a solder resist is also required to have reactivity with ultraviolet rays used for patterning, that is, high exposure sensitivity.
  • the conventional liquid development type solder resist still has room for improvement with respect to the above required characteristics. Furthermore, the conventional liquid development type solder resist has a problem that moisture absorbed inside the package during reflowing due to moisture absorption of the solder resist during package mounting causes boiling of the solder resist film inside the package and its surroundings. is there. Further, in a package with a solder resist, when the IC chip is sealed or when the IC is driven, heat is applied to the substrate and the solder resist, and cracks and peeling are likely to occur due to the difference in expansion coefficient between the substrate and the solder resist. .
  • the object of the present invention is that even if a large amount of filler is blended, the adhesiveness and fluidity of the composition are not lowered, it can be easily applied to the substrate, and the linear expansion coefficient of the solder resist is lowered. It is in providing the photocurable resin composition which can suppress generation
  • a photocurable resin composition capable of forming a cured film having excellent characteristics required for IC packages, capable of responding to high density and surface mounting of printed wiring boards, and capable of forming small-diameter openings by alkali development. Is to provide. Furthermore, a dry film and a cured product excellent in various properties as described above obtained by using such a photocurable resin composition, and a cured film such as a solder resist is formed by the dry film and the cured product. It is to provide a printed wiring board.
  • a composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler.
  • a photocurable resin composition that can be developed with an alkaline solution, characterized in that the content of the filler is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
  • the polymer binder is a thermoplastic resin, preferably a thermoplastic resin solution having a solid content of 10 to 50 wt% dissolved in a solvent.
  • the filler contains Ba or Mg and / or Al.
  • the photocurable resin composition obtained by applying and drying the photocurable resin composition on a carrier film, the photocurable resin composition or the dry film can be converted into active energy.
  • a cured product obtained by photocuring by irradiation of a line particularly a cured product obtained by photocuring on copper, and a cured product obtained by photocuring in a pattern.
  • a dry film consists of a dried layer of a plurality of photocurable resin compositions, and at least one layer is formed from the photocurable resin composition of the present invention.
  • the print is characterized by having a cured film obtained by photocuring the photocurable resin composition or the dry film into a pattern by irradiation with active energy rays, and preferably further thermosetting.
  • a wiring board is also provided.
  • the photocurable resin composition of the present invention has a linear expansion coefficient of 15 to 35 ⁇ 10 ⁇ when the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition. It can be adjusted to a range of 6 / K (hereinafter abbreviated as ppm), and the occurrence of solder resist cracks can be reduced by matching or approaching the linear expansion coefficient with the base.
  • the adhesiveness of the composition which is a problem that occurs when a large amount of filler is blended, reduced fluidity, reduced film formability, Problems such as handling cracks are solved, and when the cured product is used, for example, in a printed wiring board or a semiconductor package, excellent resolution and PCT resistance resulting from adhesion are obtained, and high reliability. Can be obtained.
  • the photocurable resin composition developable with the alkaline solution of the present invention (hereinafter also referred to as a photocurable resin composition) includes a carboxyl group-containing oligomer, a polymer binder having a higher molecular weight than the carboxyl group-containing oligomer, and photopolymerization.
  • a composition comprising an initiator, a photopolymerizable monomer and a filler, wherein the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
  • each component of the photocurable resin composition of the present invention will be described in detail.
  • the photocurable resin composition of the present invention can impart alkali developability by using a carboxyl group-containing oligomer.
  • the term “oligomer” should be understood to be used to make it easy to distinguish the molecular weight from the polymer binder.
  • the carboxyl group-containing oligomer various conventionally known carboxyl group-containing resins or prepolymers having a carboxyl group in the molecule can be used.
  • a carboxyl group-containing photosensitive resin or a carboxyl group-containing photosensitive prepolymer having an ethylenically unsaturated double bond in the molecule is more preferable in terms of photocurability and development resistance.
  • the unsaturated double bond is preferably derived from acrylic acid, methacrylic acid or derivatives thereof.
  • a carboxyl group-containing resin or prepolymer having no ethylenically unsaturated double bond is used, in order to make the composition photocurable, a plurality of ethylenically unsaturated groups are contained in the molecule described later. It is necessary to use a compound having a photopolymerizable monomer in combination.
  • the carboxyl group-containing oligomer oligomers listed below can be suitably used.
  • a carboxyl group-containing oligomer obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
  • an unsaturated carboxylic acid such as (meth) acrylic acid
  • an unsaturated group-containing compound such as styrene, ⁇ -methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
  • Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers
  • carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
  • Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of (meth) acrylate or a partially acid anhydride-modified product thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
  • bisphenol A type epoxy resin hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of (meth) acrylate or a partially acid anhydride-modified product thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
  • one isocyanate group and one or more (meth) acryl groups are introduced into the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate.
  • a carboxyl group-containing photosensitive urethane resin obtained by adding a compound having a terminal (meth) acrylate.
  • a polyfunctional epoxy resin obtained by epoxidizing a hydroxyl group of a bifunctional (solid) epoxy resin as described later with epichlorohydrin is reacted with (meth) acrylic acid, and a dibasic acid anhydride is added to the resulting hydroxyl group.
  • An added carboxyl group-containing photosensitive oligomer is added to the resulting hydroxyl group.
  • a carboxyl group-containing polyester obtained by reacting a dicarboxylic acid such as adipic acid, phthalic acid or hexahydrophthalic acid with a bifunctional oxetane resin as described later, and adding a dibasic acid anhydride to the resulting primary hydroxyl group. Oligomer.
  • Reaction product obtained by reacting a compound obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide with an unsaturated group-containing monocarboxylic acid.
  • Carboxyl group-containing photosensitive oligomer obtained by reacting polybasic acid anhydrides such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and the like.
  • (meth) acrylate is a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.
  • the acid value of the carboxyl group-containing oligomer is suitably in the range of 40 to 200 mgKOH / g, more preferably in the range of 45 to 120 mgKOH / g.
  • the acid value of the carboxyl group-containing oligomer is less than 40 mgKOH / g, alkali development becomes difficult.
  • it exceeds 200 mgKOH / g dissolution of the exposed portion by the developer proceeds, and the line may become thinner than necessary.
  • the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to draw a normal resist pattern.
  • the weight average molecular weight of the carboxyl group-containing oligomer varies depending on the resin skeleton, but is generally within the range of 2,000 to 150,000, more preferably 5,000 to 100,000. Although it is necessary to use a carboxyl group-containing oligomer having a weight average molecular weight lower than that of the polymer binder to be used, a particularly preferable weight average molecular weight is 5000 to 35,000. If the weight average molecular weight is less than 2,000, the tack-free performance of the coating film may be inferior, the moisture resistance of the coating film after exposure may be poor, the film may be reduced during development, and the resolution may be greatly inferior. On the other hand, when the weight average molecular weight exceeds 150,000, developability is remarkably deteriorated. Moreover, when larger than the polymeric binder mentioned later, the improvement of the brittleness of the target coating film cannot be performed.
  • the compounding amount of such a carboxyl group-containing oligomer is 10 to 60% by mass, preferably 20 to 50% by mass of the total composition.
  • the amount of the carboxyl group-containing oligomer is less than the above range, the film strength is lowered, which is not preferable.
  • the amount is larger than the above range, the viscosity of the composition is increased or the coating property is lowered, which is not preferable.
  • carboxyl group-containing oligomers can be used without being limited to those listed above, and can be used singly or in combination.
  • resins having an aromatic ring are preferable because they have a high refractive index and excellent resolution, and those having a biphenyl novolak structure not only have resolution but also PCT. It is preferable because it is excellent in resistance and crack resistance.
  • carboxyl group-containing oligomers using a phenol compound as a starting material such as carboxyl group-containing photosensitive oligomers (9) and (10), are also preferable because PCT resistance is similarly improved.
  • the increase in the filler component makes it easy for water absorption to occur at the interface between the filler and the resin, whereas those having a biphenyl novolak structure and carboxyl group-containing oligomers such as (9) and (10) Even if the filler component increased, the PCT resistance was very excellent. This is probably because the former has improved hydrophobicity due to the biphenyl novolac structure, and the latter has a carboxyl group-containing photosensitive oligomer (6) and (7) with an epoxy acrylate structure that can form a similar structure. On the other hand, it is considered that the carboxyl group-containing photosensitive oligomers (9) and (10) do not have a hydroxyl group and the hydrophobicity is remarkably improved.
  • the polymer binder is not particularly limited as long as it is a thermoplastic resin regardless of whether it is reactive or non-reactive.
  • a thermoplastic resin regardless of whether it is reactive or non-reactive.
  • a polymer obtained by subjecting a vinyl derivative of the above to solution or suspension polymerization can be used.
  • a binary copolymer, a ternary copolymer, a block copolymer, and the like obtained by polymerization using a monomer having two or more kinds of vinyl groups can also be used.
  • these polymers those derived from cellulose derivatives and block copolymers are particularly preferred.
  • the preferred molecular weight of the polymer binder is 30,000 to 1,500,000 in terms of weight average molecular weight, but should be used if it is determined that the molecular weight is clearly larger than the carboxyl group-containing oligomer used. Can do. For example, when dissolved in the same solvent, the viscosity is higher than that of the carboxyl group-containing oligomer.
  • the molecular weight since the higher the molecular weight, the lower the solubility in the solvent, the lower the solid content when dissolved in the same solvent, especially when the molecular weight is 10 to 50 wt%, the molecular weight is higher than that of the carboxyl group-containing oligomer. Judged to be large. When the solid content is less than 10 wt%, there is a problem that the solvent content increases and a composition cannot be formed. On the other hand, when it exceeds 50 wt%, it may not correspond to a polymer and is not appropriate.
  • these polymer binders There are several functions of these polymer binders. One is to change the fluidity of the composition. More specifically, when a large amount of filler is added to the carboxyl group-containing oligomer and the photopolymerizable monomer, the photopolymerizable monomer and the filler are particularly unsuitable, and the resulting composition becomes a dilatancy fluid. When the composition becomes dilatancy, it is difficult to stir, print, or coat the composition, and it cannot be used unless it is in a considerably diluted state, and in particular, it is performed at a relatively high viscosity such as screen printing or roll coating. In the case of printing, there is a problem that a required film thickness cannot be secured by one printing.
  • the composition could be transformed into a thixotropic fluid. This is the first material that can be printed and coated.
  • the second effect has been shown to control handling cracks when the composition is coated and dried to a dry film state. This is considered to be due to the effect of holding the filler containing a large amount of the polymer binder.
  • the third effect of adding the polymer binder is that the toughness of the coating film can be increased in the physical properties after curing. This is presumably because the polymer binder is present in an IPN (sea island) state in the photocurable resin matrix.
  • these polymer binders may have functional groups such as a carboxyl group, a hydroxyl group, and an epoxy group at the terminal and / or side chain.
  • a suitable amount of the carboxyl group is an acid value of 30 mgKOH / g or less.
  • a suitable blending amount of the polymer binder is 1 part by mass or more with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • the fluidity of the composition can be sufficiently achieved.
  • a larger amount of polymer binder can be added, but the upper limit is suitably about 30 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • the photocurable resin composition is applied by 2
  • the composition of the present invention in which a polymer binder is not included or less than 5 parts by weight is applied in the first construction, and then the polymer binder and a large amount of filler are blended. When applied, the problem of poor development is solved.
  • a dry film it is composed of two or more layers, and the layer on the side directly touching the substrate is formed of a composition layer having no polymer binder or a proportion of less than 5 parts by mass, and the like. This layer can be solved by forming a layer with the composition of the present invention containing a large amount of a polymer binder.
  • Examples of the photopolymerization initiator used in the photocurable resin composition of the present invention include an oxime ester photopolymerization initiator having an oxime ester group, an ⁇ -aminoacetophenone photopolymerization initiator, and an acylphosphine oxide photopolymerization initiator.
  • an oxime ester photopolymerization initiator having an oxime ester group an oxime ester group
  • an ⁇ -aminoacetophenone photopolymerization initiator an acylphosphine oxide photopolymerization initiator.
  • One or more selected from the group consisting of can be preferably used.
  • oxime ester photopolymerization initiator examples include CGI-325, Irgacure (registered trademark) OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, NCI-831 manufactured by ADEKA, and the like as commercially available products.
  • numerator can also be used suitably, Specifically, the oxime ester compound which has a carbazole structure represented with the following general formula is mentioned.
  • X is a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, a phenyl group (an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms).
  • Y and Z are each a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, or a carbon atom having 1 carbon atom), substituted with an alkyl group having a C 1-8 alkyl group or a dialkylamino group.
  • the blending amount of such an oxime ester photopolymerization initiator is preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • it is less than 0.01 parts by mass, the photocurability on copper is insufficient, the coating film is peeled off, and the coating properties such as chemical resistance are deteriorated.
  • the amount exceeds 5 parts by mass, light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 3 parts by mass.
  • ⁇ -aminoacetophenone photopolymerization initiators include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone-1, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N , N-dimethylaminoacetophenone and the like.
  • Examples of commercially available products include Irgacure 907, Irgacure 369, and Irgacure 379 manufactured by BASF Japan.
  • acylphosphine oxide photopolymerization initiators include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, and bis (2,6-dimethoxy). And benzoyl) -2,4,4-trimethyl-pentylphosphine oxide.
  • examples of commercially available products include Lucilin TPO manufactured by BASF, Irgacure 819 manufactured by BASF Japan, and the like.
  • the blending amount of these ⁇ -aminoacetophenone photopolymerization initiator and acylphosphine oxide photopolymerization initiator is preferably 0.01 to 15 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. If it is less than 0.01 parts by mass, the photo-curability on copper is similarly insufficient, the coating film peels off, and the coating properties such as chemical resistance deteriorate. On the other hand, when the amount exceeds 15 parts by mass, the effect of reducing the outgas cannot be obtained, the light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 10 parts by mass.
  • the oxime ester initiator is added in a small amount, and outgassing is suppressed, which is effective in terms of PCT resistance and crack resistance. Further, it is particularly preferable to use an acylphosphine oxide photopolymerization initiator in addition to the oxime ester initiator because a shape with good resolution can be obtained.
  • examples of the photopolymerization initiator, photoinitiator assistant, and sensitizer that can be suitably used in the photocurable resin composition of the present invention include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketal compounds, and benzophenones. Compounds, tertiary amine compounds, and xanthone compounds.
  • benzoin compound examples include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.
  • acetophenone compound examples include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, and the like.
  • anthraquinone compound examples include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone and the like.
  • thioxanthone compound examples include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, and the like.
  • ketal compound examples include acetophenone dimethyl ketal and benzyl dimethyl ketal.
  • benzophenone compound examples include benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4′-methyldiphenyl sulfide, 4-benzoyl-4′-ethyldiphenyl sulfide, and 4-benzoyl-4′-propyldiphenyl. And sulfides.
  • the tertiary amine compound include an ethanolamine compound and a compound having a dialkylaminobenzene structure, such as 4,4′-dimethylaminobenzophenone (Nisso Cure MABP manufactured by Nippon Soda Co., Ltd.), Dialkylaminobenzophenones such as 4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin), etc.
  • 4,4′-dimethylaminobenzophenone Non-dimethylaminobenzophenone
  • Dialkylaminobenzophenones such as 4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (die
  • a dialkylamino group-containing coumarin compound ethyl 4-dimethylaminobenzoate (Kayacure (registered trademark) EPA manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Bio-Synthetics), -Dimethylaminobenzoic acid (n-butoxy) ethyl (Quantacure BEA manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamylethyl ester (Kayacure DMBI manufactured by Nippon Kayaku Co., Ltd.), 4-dimethylaminobenzoic acid 2 -Ethylhexyl (Esolol 507 manufactured by Van Dyk), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), and the like.
  • Kayacure registered
  • thioxanthone compounds and tertiary amine compounds are preferred.
  • the inclusion of a thioxanthone compound is preferable from the viewpoint of deep curability.
  • thioxanthone compounds such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone are preferably included.
  • the amount of such a thioxanthone compound is preferably 20 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • the blending amount of the thioxanthone compound exceeds 20 parts by mass, the thick film curability is lowered and the cost of the product is increased. More preferably, it is 10 parts by mass or less.
  • a compound having a dialkylaminobenzene structure is preferable, and among them, a dialkylaminobenzophenone compound, a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 450 nm, and ketocoumarins are particularly preferable.
  • dialkylaminobenzophenone compound 4,4′-diethylaminobenzophenone is preferable because of its low toxicity.
  • the dialkylamino group-containing coumarin compound has a maximum absorption wavelength of 350 to 410 nm in the ultraviolet region, so it is less colored and uses a colored pigment as well as a colorless and transparent photosensitive composition, and reflects the color of the colored pigment itself. It becomes possible to provide a solder resist film.
  • 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferred because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
  • the blending amount of such a tertiary amine compound is preferably 0.1 to 20 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • the compounding amount of the tertiary amine compound is less than 0.1 part by mass, a sufficient sensitizing effect tends not to be obtained.
  • the amount exceeds 20 parts by mass light absorption on the surface of the dried solder resist coating film by the tertiary amine compound becomes intense, and the deep curability tends to decrease. More preferably, it is 0.1 to 10 parts by mass.
  • photopolymerization initiators can be used alone or as a mixture of two or more.
  • the total amount of such photopolymerization initiator, photoinitiator assistant, and sensitizer is preferably 35 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer. When it exceeds 35 parts by mass, the deep curability tends to decrease due to light absorption.
  • these photopolymerization initiators, photoinitiator assistants, and sensitizers absorb a specific wavelength, the sensitivity may be lowered in some cases, and may function as an ultraviolet absorber. However, they are not used only for the purpose of improving the sensitivity of the composition. Absorbs light of a specific wavelength as necessary to improve the photoreactivity of the surface, change the resist line shape and opening to vertical, tapered, reverse taper, and processing accuracy of line width and opening diameter Can be improved.
  • the photo-curable resin composition of the present invention contains a filler.
  • a filler As a result of detailed examination of the filler content, 30 to 60% by mass of the filler based on the total amount of nonvolatile components is added. Thus, it has been found that PCT resistance and electrical characteristics (HAST resistance) are improved. Furthermore, when the refractive index of the filler is in the range of 1.50 to 1.65, not only PCT resistance and HAST resistance (resistance to the advanced accelerated life test) are excellent, but also good resolution is obtained. It was also found out. The reason why high resolution can be obtained is that the refractive index of the resin having an aromatic ring used for improving PCT resistance and HAST resistance is close to the refractive index of the filler.
  • fillers examples include known and commonly used inorganic fillers such as barium sulfate, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, boehmite, mica powder, and hydrotalcite. it can.
  • the filler contains Ba or Mg and / or Al.
  • the filler containing Ba is barium sulfate (refractive index: 1.65)
  • the filler containing Mg is talc (refractive index: 1.54-59), magnesium carbonate (refractive index: 1.57-1.60).
  • fillers containing Al As fillers containing Al, kaolinite, clay (refractive index: 1.55-1.57), aluminum oxide (refractive index: 1.65), aluminum hydroxide (refractive index: 1.65), boehmite (refractive) Ratio: 1.62-1.65), mica powder (refractive index: 1.59), and filler containing Mg and Al is preferably hydrotalcite (refractive index: 1.50).
  • the total amount of filler is suitably in the range of 30 to 60% by mass with respect to the total amount of nonvolatile components of the photocurable resin composition.
  • the filler content is less than 30% by mass, the cured product of the photocurable resin composition does not show a decrease in coefficient of linear expansion, and is not preferable because crack resistance deteriorates.
  • it exceeds 60% by mass the viscosity of the composition increases, the coating and moldability deteriorates, and the water absorption also increases, so that the PCT resistance and HAST resistance deteriorate, which is not preferable.
  • these fillers can be used individually or in combination of 2 or more types.
  • a mercapto compound it is preferable to add a mercapto compound to the photocurable resin composition of the present invention. It was observed that the addition of mercapto compounds improves PCT resistance and HAST resistance. This may be because the crosslink density was improved by adding a mercapto compound, or the adhesion was improved.
  • the blending amount of the mercapto compound is suitably 0.01 parts by mass or more and 10.0 parts by mass or less, more preferably 0.05 parts by mass or more and 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. Or less. If it is less than 0.01 part by mass, the improvement in adhesion as an effect of adding a mercapto compound is not confirmed. On the other hand, if it exceeds 10.0 parts by mass, the development failure of the photocurable resin composition and the decrease in the dry management width will be confirmed. This is not preferable because it may cause These mercapto compounds can be used alone or in combination of two or more.
  • thermosetting component can be added to the photocurable resin composition of the present invention. It was confirmed that heat resistance was improved by adding a thermosetting component.
  • thermosetting components used in the present invention include amino resins such as melamine resins, benzoguanamine resins, melamine derivatives, benzoguanamine derivatives, blocked isocyanate compounds, cyclocarbonate compounds, polyfunctional epoxy compounds, polyfunctional oxetane compounds, episulfide resins, bismaleimides.
  • Well-known thermosetting resins such as carbodiimide resins can be used.
  • a thermosetting component having a plurality of cyclic ether groups and / or cyclic thioether groups hereinafter abbreviated as cyclic (thio) ether groups
  • thermosetting component having a plurality of cyclic (thio) ether groups in the molecule has either one of the three-, four- or five-membered cyclic (thio) ether groups or a plurality of two types of groups in the molecule.
  • Compound for example, a compound having a plurality of epoxy groups in the molecule, that is, a polyfunctional epoxy compound, a compound having a plurality of oxetanyl groups in the molecule, that is, a polyfunctional oxetane compound, a compound having a plurality of thioether groups in the molecule That is, an episulfide resin etc. are mentioned.
  • polyfunctional epoxy compound examples include epoxidized vegetable oils such as Adekasizer O-130P, Adekasizer O-180A, Adekasizer D-32, and Adekasizer D-55 manufactured by ADEKA; jER (registered trademark) manufactured by Mitsubishi Chemical Corporation 828, jER834, jER1001, jER1004, EHPE3150 manufactured by Daicel Chemical Industries, Epicron (registered trademark) 840 manufactured by DIC, Epicron 850, Epicron 1050, Epicron 2055, Epotot (registered trademark) YD manufactured by Nippon Steel Chemical Co., Ltd. -011, YD-013, YD-127, YD-128, D.C. E. R.
  • epoxidized vegetable oils such as Adekasizer O-130P, Adekasizer O-180A, Adekasizer D-32, and Adekasizer D-55 manufactured by ADEKA
  • jER registered trademark
  • Mitsubishi Chemical Corporation 828
  • Bisphenol A type epoxy resin such as 664 (all trade names); Hydroquinone type epoxy resin such as YDC-1312 (trade name) manufactured by Nippon Steel Chemical Co., Ltd. YSLV-80XY (trade name) manufactured by Nippon Steel Chemical Co., Ltd. Bisphenol type epoxy resins such as YSLV-120TE (trade name) manufactured by Nippon Steel Chemical Co., Ltd .; jERYL903 manufactured by Mitsubishi Chemical Corporation, Epicron 152, Epicron 165 manufactured by DIC, Nippon Steel Chemical Co., Ltd. Epototo YDB-400, YDB-500 manufactured by Dow Chemical Co., Ltd. E. R.
  • E. R. Novolak type epoxy resins such as ECN-235 and ECN-299 (both trade names); biphenol novolak type epoxy resins such as NC-3000 and NC-3100 manufactured by Nippon Kayaku; Epicron 830 manufactured by DIC, Mitsubishi Chemical JER807 manufactured by Nippon Steel Chemical Co., Ltd., Epotot YDF-170, YDF-175, YDF-2004 manufactured by Nippon Steel Chemical Co., Ltd., Araldide XPY306 manufactured by BASF Japan Co., Ltd. (all trade names); manufactured by Nippon Steel Chemical Co., Ltd.
  • Hydrogenated bisphenol A type epoxy resin such as Epototo ST-2004, ST-2007, ST-3000 (trade name), etc .; jER604 manufactured by Mitsubishi Chemical Corporation, Epototo YH-434 manufactured by Nippon Steel Chemical Co., Ltd., manufactured by BASF Japan Araldide MY720 from Sumitomo Chemical Co., Ltd. 20 etc. (all trade names) glycidylamine type epoxy resins; Hydantoin type epoxy resins such as Araldide CY-350 (trade name) manufactured by BASF Japan; Celoxide (registered trademark) 2021 manufactured by Daicel Chemical Industries, BASF Japan Alicyclic epoxy resins such as Araldide CY175, CY179, etc.
  • Type or biphenol type epoxy resin or a mixture thereof Nippon Kayaku EBPS-200, ADEKA EPX-30, DIC EXA-1514 (trade name), etc .; bisphenol S type epoxy resin; Bisphenol A novolac type epoxy resin such as jER157S (trade name); tetraphenylolethane type epoxy resin such as jERYL-931 manufactured by Mitsubishi Chemical Corporation, Araldide 163 manufactured by BASF Japan Co., Ltd. (all trade names); BASF Japan Araldide PT810 (trade name) manufactured by Nissan Chemical Industries Heterocyclic epoxy resins such as TEPIC (registered trademark) manufactured by Nihon Yushi Co., Ltd.
  • Diglycidyl phthalate resins such as Blemmer (registered trademark) DGT manufactured by Nippon Oil &Fats; Tetraglycidyl xylenoyl ethane such as ZX-1063 manufactured by Nippon Steel Chemical Co., Ltd. Resins; Naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, DIC Corporation HP-4032, EXA-4750, EXA-4700; DIC Corporation HP-7200, HP-7200H, etc.
  • Blemmer registered trademark
  • Tetraglycidyl xylenoyl ethane such as ZX-1063 manufactured by Nippon Steel Chemical Co., Ltd. Resins
  • Naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, DIC Corporation HP-4032, EXA-4750, EXA-4700; DIC Corporation HP-7200, HP-7200H, etc
  • Epoxy resin having a dicyclopentadiene skeleton Epoxy resin copolymerized with glycidyl methacrylate such as CP-50S and CP-50M manufactured by NOF Corporation; Copolymer epoxy resin of cyclohexylmaleimide and glycidyl methacrylate; Epoxy-modified polybutadiene rubber derivative (For example, manufactured by Daicel Chemical Industries B-3600, etc.), CTBN modified epoxy resin (e.g., Nippon Steel Chemical Co. YR-102, YR-450, etc.) and others as mentioned, is not limited thereto.
  • These epoxy resins can be used alone or in combination of two or more.
  • a novolak type epoxy resin, a bixylenol type epoxy resin, a biphenol type epoxy resin, a biphenol novolak type epoxy resin or a mixture thereof is particularly preferable.
  • polyfunctional oxetane compound examples include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4-bis [(3- Methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3-ethyl-3- In addition to polyfunctional oxetanes such as oxetanyl) methyl acrylate, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate and oligomers or copolymers thereof, oxetane alcohol and novolak resin , Poly (p-hydroxy
  • Examples of the compound having a plurality of cyclic thioether groups in the molecule include bisphenol A type episulfide resin YL7000 manufactured by Mitsubishi Chemical Corporation. Moreover, episulfide resin etc. which replaced the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom using the same synthesis method can be used.
  • the blending amount of the thermosetting component having a plurality of cyclic (thio) ether groups in the molecule is preferably 0.6 to 2.5 equivalents relative to 1 equivalent of the carboxyl group of the carboxyl group-containing oligomer.
  • the blending amount is less than 0.6, a carboxyl group remains in the solder resist film, and heat resistance, alkali resistance, electrical insulation and the like are lowered.
  • the amount exceeds 2.5 equivalents, the low molecular weight cyclic (thio) ether group remains in the dry coating film, thereby reducing the strength of the coating film. More preferably, it is 0.8 to 2.0 equivalents.
  • thermosetting component having a plurality of cyclic (thio) ether groups in the molecule
  • thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole.
  • Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine.
  • Examples of commercially available products include 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Kogyo Co., Ltd. and U-CAT (registered by San Apro). Trademarks) 3503N, U-CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof), and the like.
  • thermosetting catalyst for epoxy resins or oxetane compounds or a catalyst that promotes the reaction of epoxy groups and / or oxetanyl groups with carboxyl groups, either alone or in combination of two or more. Can be used.
  • thermosetting catalysts is sufficient in the usual quantitative ratio, for example, preferably 100 parts by mass of the thermosetting component having a carboxyl group-containing oligomer or a plurality of cyclic (thio) ether groups in the molecule.
  • the amount is 0.1 to 20 parts by mass, more preferably 0.5 to 15.0 parts by mass.
  • a colorant can be blended in the photocurable resin composition of the present invention.
  • known colorants such as red, blue, green and yellow can be used, and any of pigments, dyes and pigments may be used.
  • Red colorant examples include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone.
  • -Indexes (CI; issued by The Society of Dyers and Colorists) are listed.
  • Monoazo Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
  • Disazo Pigment Red 37, 38, 41.
  • Monoazo lakes Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1,68.
  • Benzimidazolone series Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
  • Perylene series Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
  • Diketopyrrolopyrrole series Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
  • Condensed azo series Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
  • Anthraquinone series Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
  • Kinacridone series Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
  • Blue colorant include phthalocyanine-based and anthraquinone-based pigments, and pigment-based compounds such as Pigment Blue 15 and Pigment Blue 15 are listed below. : 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4, Pigment Blue 15: 6, Pigment Blue 16, and Pigment Blue 60.
  • the dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used.
  • a metal-substituted or unsubstituted phthalocyanine compound can also be used.
  • Green colorant examples include phthalocyanine, anthraquinone, and perylene. Specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. are used. be able to. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
  • Yellow colorant examples include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
  • Anthraquinone series Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
  • Isoindolinone type Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
  • Condensed azo series Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
  • Benzimidazolone series Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.
  • Monoazo Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
  • Disazo Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
  • a colorant such as purple, orange, brown, or black may be added for the purpose of adjusting the color tone.
  • the colorant as described above can be appropriately blended, it is preferably 10 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer or thermosetting component. More preferably, it is 0.1 to 5 parts by mass.
  • a compound having a plurality of ethylenically unsaturated groups in the molecule can be blended.
  • the compound having a plurality of ethylenically unsaturated groups in the molecule used in the photocurable resin composition of the present invention is photocured by irradiation with active energy rays, and the photosensitive compound of the present invention or the carboxyl group-containing photosensitivity.
  • the insoluble oligomer is insolubilized in the aqueous alkali solution or assists insolubilization.
  • polyester (meth) acrylate polyether (meth) acrylate, urethane (meth) acrylate, carbonate (meth) acrylate, epoxy (meth) acrylate, urethane (meth) acrylate and the like can be used.
  • hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate
  • glycol diacrylates such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol and propylene glycol
  • N, N-dimethyl Acrylamides such as acrylamide, N-methylolacrylamide, N, N-dimethylaminopropylacrylamide
  • Aminoalkyl acrylates such as N, N-dimethylaminopropyl acrylate
  • polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethylisocyanurate, or their ethylene oxide adducts, propylene oxide
  • Polyvalent acrylates such as adducts or ⁇ -caprolactone adducts
  • Polyvalent acrylates of sidyl ethers obtained by directly acrylated polyols such as polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadienes, polyester polyols, or urethane acrylates via diisocyanates, and / or Examples include methacrylates corresponding to the acrylate.
  • an epoxy acrylate resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac type epoxy resin, and further a hydroxy acrylate such as pentaerythritol triacrylate and a diisocyanate such as isophorone diisocyanate on the hydroxyl group of the epoxy acrylate resin.
  • the epoxy urethane acrylate compound etc. which made the half urethane compound react are mentioned.
  • Such an epoxy acrylate resin can improve the photocurability without deteriorating the touch drying property of the coating film.
  • Such compounds having a plurality of ethylenically unsaturated groups can be used singly or in combination of two or more.
  • a compound having 4 to 6 ethylenically unsaturated groups in one molecule is preferable from the viewpoint of photoreactivity and resolution, and a compound having two ethylenically unsaturated groups in one molecule is used.
  • it is preferable that the linear expansion coefficient of the cured product is lowered, and it has been found that the occurrence of cracks during the thermal cycle test is reduced.
  • the compounding amount of the compound having a plurality of ethylenically unsaturated groups in the molecule is preferably 5 to 100 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer.
  • the blending amount is less than 5 parts by mass, photocurability is lowered, and pattern formation becomes difficult by alkali development after irradiation with active energy rays.
  • it exceeds 100 mass parts the solubility with respect to dilute alkali aqueous solution falls, and a coating film becomes weak. More preferably, it is 1 to 70 parts by mass.
  • the photocurable resin composition of the present invention may use an organic solvent for the synthesis of the carboxyl group-containing oligomer and the preparation of the composition, or for adjusting the viscosity for application to a substrate or a carrier film. It can.
  • organic solvents are used alone or as a mixture of two or more.
  • an ultraviolet absorber can be used in the photocurable resin composition of the present invention in addition to the antioxidant.
  • ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, anthranilate derivatives, dibenzoylmethane derivatives, and the like.
  • the photo-curable resin composition of the present invention may further include a known thickener such as a known thermal polymerization inhibitor, fine silica, organic bentonite, and montmorillonite, a silicone-based, a fluorine-based, a polymer-based, etc., if necessary.
  • a known thickener such as a known thermal polymerization inhibitor, fine silica, organic bentonite, and montmorillonite, a silicone-based, a fluorine-based, a polymer-based, etc., if necessary.
  • Known additives such as antifoaming agents and / or leveling agents, imidazole-based, thiazole-based, triazole-based silane coupling agents, antioxidants, rust inhibitors, and the like can be blended.
  • an adhesion promoter can be used in order to improve the adhesion between layers or the adhesion between the formed resin insulation layer and the substrate.
  • adhesion promoters include, for example, benzimidazole, benzoxazole, benzothiazole, 3-morpholinomethyl-1-phenyl-triazole-2-thione, 5-amino-3-morpholinomethyl-thiazole-2-thione.
  • the photocurable resin composition of the present invention configured as described above is prepared to a predetermined composition, it is adjusted to a viscosity suitable for a coating method with an organic solvent, for example, on a substrate, a dip coating method, a flow
  • the coating method is a coating method, a roll coating method, a bar coater method, a screen printing method, a curtain coating method, or the like.
  • the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C. to form a tack-free coating film (resin insulating layer).
  • the volatile drying is performed by using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (using a method having a heat source of an air heating method using steam in a countercurrent contact with hot air in the dryer) A method of spraying on a support).
  • a resin insulating layer by forming a dry film with a photocurable resin composition and bonding this on a base material.
  • the dry film has, for example, a structure in which a carrier film such as polyethylene terephthalate, a resin insulating layer such as a solder resist layer, and a peelable cover film used as necessary are laminated in this order.
  • the resin insulation layer is a layer obtained by applying and drying a photocurable resin composition on a carrier film or a cover film.
  • the photocurable resin composition of the present invention is uniformly applied to a carrier film with a thickness of 10 to 150 ⁇ m by a blade coater, a lip coater, a comma coater, a film coater, etc., and dried. Formed. And a dry film is formed by laminating
  • the carrier film may be laminated after the photocurable resin composition is applied to the cover film and dried.
  • the carrier film for example, a thermoplastic film such as a polyester film having a thickness of 2 to 150 ⁇ m is used.
  • a cover film a polyethylene film, a polypropylene film, or the like can be used, but a cover film having a smaller adhesive force than the solder resist layer is preferable.
  • paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy, synthetic fiber epoxy Made of materials such as copper clad laminates for high frequency circuits using fluorine, polyethylene, PPO, cyanate ester, etc., all grades (FR-4 etc.) copper clad laminates, other polyimide films, PET films, glass A substrate, a ceramic substrate, a wafer plate, etc. can be mentioned.
  • the pattern is exposed by an active energy beam or directly by a laser direct exposure machine through a photomask having a pattern formed by a contact method (or non-contact method).
  • the exposed portion (the portion irradiated by the active energy ray) is cured.
  • a direct drawing device for example, a laser direct imaging device that draws an image directly with a laser using CAD data from a computer
  • an exposure device equipped with a metal halide lamp an (ultra) high-pressure mercury lamp
  • an ultraviolet lamp such as a (super) high pressure mercury lamp.
  • the active energy ray it is preferable to use laser light having a maximum wavelength in the range of 350 to 410 nm. By setting the maximum wavelength within this range, radicals can be efficiently generated from the photopolymerization initiator. If a laser beam in this range is used, either a gas laser or a solid laser may be used.
  • the amount of exposure varies depending on the film thickness and the like, but can generally be in the range of 5 to 500 mJ / cm 2 , preferably 10 to 300 mJ / cm 2 .
  • the direct drawing apparatus for example, those manufactured by Nippon Orbotech, Pentax, etc. can be used, and any apparatus that oscillates laser light having a maximum wavelength of 350 to 410 nm may be used. .
  • the exposed portion (the portion irradiated with the active energy ray) is cured, and the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3 wt% sodium carbonate aqueous solution).
  • a dilute alkaline aqueous solution for example, 0.3 to 3 wt% sodium carbonate aqueous solution.
  • a cured product is formed.
  • a developing method a dipping method, a shower method, a spray method, a brush method, or the like can be used.
  • an alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like can be used.
  • thermosetting component when added, for example, by heating to a temperature of about 140 to 180 ° C. and thermosetting, the carboxyl group of the carboxyl group-containing oligomer and, for example, a plurality of cyclic ether groups and / or cyclic groups in the molecule
  • a thermosetting component having a thioether group reacts to form a cured product (pattern) excellent in various properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical characteristics.
  • the photocurable resin composition by containing a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, a filler,
  • a carboxyl group-containing oligomer by containing a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, a filler.
  • reliability such as heat resistance required when used for electronic parts and the like, and heat cycle resistance without impairing migration resistance characteristics.
  • Synthesis example 1 A novolac-type cresol resin (trade name “Shonol CRG951”, manufactured by Showa Polymer Co., Ltd., OH equivalent: 119.4) is added to an autoclave equipped with a thermometer, a nitrogen introduction device / alkylene oxide introduction device, and a stirring device. 4 parts, 1.19 parts of potassium hydroxide and 119.4 parts of toluene were charged, the system was purged with nitrogen while stirring, and the temperature was raised. Next, 63.8 parts of propylene oxide was gradually added dropwise and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours.
  • reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide.
  • the nonvolatile content was 62.1% and the hydroxyl value was 182.2 g / eq.
  • a novolak-type cresol resin propylene oxide reaction solution was obtained. This was an average of 1.08 moles of alkylene oxide added per equivalent of phenolic hydroxyl group. 293.0 parts of an alkylene oxide reaction solution of the obtained novolak-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 part of methylhydroquinone and 252.9 parts of toluene were mixed with a stirrer and a temperature.
  • a reactor equipped with a meter and an air blowing tube was charged, air was blown at a rate of 10 ml / min, and the reaction was carried out at 110 ° C. for 12 hours while stirring.
  • 12.6 parts of water was distilled from the water produced by the reaction as an azeotrope with toluene. Thereafter, the reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution.
  • A-1 a solution (hereinafter abbreviated as A-1) of a carboxyl group-containing photosensitive oligomer (Mw: 2650) having a non-volatile content of 65% and a solid acid value of 87.7 mgKOH / g was obtained.
  • Synthesis example 2 Put 330 parts of cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220) in a flask equipped with a gas introduction tube, a stirrer, a condenser tube and a thermometer, and add 340 parts of carbitol acetate. In addition, the mixture was dissolved by heating, and 0.46 part of hydroquinone and 1.38 parts of triphenylphosphine were added. This mixture was heated to 95 to 105 ° C., 108 parts of acrylic acid was gradually added dropwise and reacted for 16 hours.
  • cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220)
  • A-4 a solution (hereinafter abbreviated as A-4) of a carboxyl group-containing photosensitive oligomer (Mw: 9500) having a solid acid value of 50 mgKOH / g and a nonvolatile content of 60% was obtained.
  • Examples 1 to 16 and Comparative Examples 1 to 3 Using the resin solution of the above synthesis example, blended in the proportions (parts by mass) shown in Table 1 together with various components shown in Table 1 below, premixed with a stirrer, kneaded with a three-roll mill, and used for solder resist A photosensitive resin composition was prepared.
  • ⁇ Optimum exposure amount> A circuit pattern substrate having a copper thickness of 35 ⁇ m was polished with buffalo, washed with water and dried, and then the compositions of the examples and comparative examples were applied to the entire surface by a screen printing method, and 30 ° C. in a hot air circulation drying oven at 80 ° C. Let dry for minutes. Thereafter, exposure is performed through a 41-step tablet of a stoker using an exposure apparatus (HMW-680-GW20) equipped with a metal halide lamp, and development (30 ° C., 0.2 MPa, 1 wt% Na 2 CO 3 aqueous solution) is performed at 60 ° C. When the pattern of the step tablet remaining when it was performed in seconds was 7 steps, the optimum exposure amount was set.
  • ⁇ Applicability> The entire surface of the patterned copper foil substrate was applied by screen printing, and the printed state was confirmed.
  • the judgment criteria are as follows. (Double-circle): The film thickness of a resist ink is hold
  • ⁇ Electroless gold plating resistance> Using a commercially available electroless nickel plating bath and electroless gold plating bath, plating is performed under the conditions of nickel 0.5 ⁇ m and gold 0.03 ⁇ m, and the presence of peeling of the resist layer and the penetration of the plating solution by tape peeling Then, the presence or absence of the resist layer was evaluated by tape peeling. The judgment criteria are as follows. A: No soaking or peeling is observed. ⁇ : Slight penetration is confirmed after plating, but does not peel off after tape peeling. ⁇ : Slight penetration after plating and peeling after tape peel. X: There is peeling after plating.
  • ⁇ PCT resistance> It was placed in a high-pressure, high-temperature and high-humidity tank at 121 ° C., 2 atm and 100% humidity for 168 hours, and the change in state of the cured coating film was evaluated according to the following evaluation criteria.
  • Each photocurable thermosetting resin composition of an Example and a comparative example was apply
  • This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes.
  • the minimum opening of the cured coating film of the obtained photosensitive resin composition for solder resist was determined using an optical microscope adjusted to 200 times. The judgment criteria are as follows. A: Less than 60 ⁇ m. ⁇ : 60 ⁇ m or more and less than 80 ⁇ m. ⁇ : 80 ⁇ m or more and less than 100 ⁇ m. X: 100 ⁇ m or more.
  • solder resist such as a flexible wiring board, an interlayer insulating material of a multilayer wiring board, and the like, particularly for forming a solder resist for a semiconductor package.

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Abstract

The purpose of the present invention is to provide a photocurable and alkaline-solution-developable resin composition which, even when containing a filler incorporated in a large quantity, gives a solder resist that has satisfactory handleability and can be inhibited from cracking or peeling off during thermal shock cycles. The composition comprises a carboxylated oligomer, a polymeric binder that has a higher molecular weight than the carboxylated oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler, wherein the content of the filler is 30-60 mass% with respect to the total amount of the nonvolatile components of the composition. A thermoplastic resin is suitable as the polymeric binder, and the thermoplastic resin preferably is in the state of having been dissolved in a solvent so that the thermoplastic-resin solution has a solid content of 10-50 wt.%. The photocurable resin composition or a dry film obtained therefrom is advantageously applicable to the formation of a cured film such as the solder resist of a printed wiring board.

Description

光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板Photocurable resin composition, dry film and cured product thereof, and printed wiring board using them
 本発明は、プリント配線基板のソルダーレジスト等として用いられる光硬化性樹脂組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板に関する。 The present invention relates to a photocurable resin composition used as a solder resist of a printed wiring board, a dry film and a cured product thereof, and a printed wiring board using them.
 近年、エレクトロニクス機器の軽薄短小化に伴うプリント配線板の高密度化に対応して、ソルダーレジストにも作業性や高性能化が要求されている。また、最近では、電子機器の小型化、軽量化、高性能化に伴い、半導体パッケージの小型化、多ピン化が実用化され、量産化が進んでいる。このような高密度化に対応して、QFP(クワッド・フラットパック・パッケージ)、SOP(スモール・アウトライン・パッケージ)等と呼ばれるICパッケージに代わって、BGA(ボール・グリッド・アレイ)、CSP(チップ・スケール・パッケージ)等と呼ばれるICパッケージが登場した。このようなパッケージ基板や車載用のプリント配線板に用いられるソルダーレジストとしては、従来、種々の光硬化性樹脂組成物が提案されている(例えば、特許文献1参照)。 In recent years, solder resists are also required to have improved workability and higher performance in response to the increase in the density of printed wiring boards as electronic devices become lighter, thinner and shorter. Recently, along with the downsizing, lightening, and high performance of electronic devices, downsizing of semiconductor packages and increasing the number of pins have been put into practical use, and mass production is progressing. In response to this high density, BGA (ball grid array), CSP (chip) instead of IC packages called QFP (quad flat pack package), SOP (small outline package), etc. An IC package called “Scale Package” has appeared. As a solder resist used for such a package substrate or an in-vehicle printed wiring board, various photocurable resin compositions have been conventionally proposed (for example, see Patent Document 1).
 ソルダーレジストなどの絶縁材料に対しては、高い絶縁信頼性が要求されており、そのために、特に耐湿熱性ともいうべきPCT(プレッシャー・クッカー・テスト)耐性が要求されている。一方、生産性の観点から、ソルダーレジストにおいても、パターニングの際に用いられる紫外線などに対する反応性、すなわち高い露光感度を有することが要求されている。 High insulation reliability is required for an insulating material such as a solder resist. Therefore, PCT (pressure cooker test) resistance, which is also called moisture heat resistance, is particularly required. On the other hand, from the viewpoint of productivity, a solder resist is also required to have reactivity with ultraviolet rays used for patterning, that is, high exposure sensitivity.
 しかしながら、従来の液状現像型ソルダーレジストは、前記した要求特性に関して未だ改善すべき余地が残されている。さらに、従来の液状現像型ソルダーレジストは、パッケージ実装時、ソルダーレジストの吸湿により、リフロー中にパッケージ内部で吸湿した水分が沸騰し、パッケージ内部のソルダーレジスト皮膜及びその周辺にクラックを生じるという問題がある。さらに、ソルダーレジストを施したパッケージでは、ICチップを封止する際や、IC駆動時に、基板及びソルダーレジストに熱がかかり、基板とソルダーレジストの膨張係数の違いからクラックや剥れが発生し易い。 However, the conventional liquid development type solder resist still has room for improvement with respect to the above required characteristics. Furthermore, the conventional liquid development type solder resist has a problem that moisture absorbed inside the package during reflowing due to moisture absorption of the solder resist during package mounting causes boiling of the solder resist film inside the package and its surroundings. is there. Further, in a package with a solder resist, when the IC chip is sealed or when the IC is driven, heat is applied to the substrate and the solder resist, and cracks and peeling are likely to occur due to the difference in expansion coefficient between the substrate and the solder resist. .
 このような技術的問題に対して、ソルダーレジスト用の感光性樹脂組成物にフィラーを多量に配合するという試みがある(特許文献2参照)。感光性樹脂組成物にフィラーを多量に配合すると、得られる塗膜の見かけの耐熱性や吸水率が低下することを本発明者らも確認しているが、非常に多量に配合した場合には、被接着体に対してフィラー自身が接地する場合が多く、塗膜の密着性が低下するという問題の他に、組成物の流動性が著しく悪くなる。特に光重合性モノマーと共に配合した場合、ダイラタンシー流体となって攪拌やコーティングさえできない状態になる。また、ソルダーレジストのごときネガ型感光性樹脂組成物では、フィラーの影響で小径の開口部に対する充分な解像性が得られず、光のハレーションにより開口部がかなり閉じた状態になるという問題があった。 In response to such technical problems, there is an attempt to add a large amount of filler to the photosensitive resin composition for solder resist (see Patent Document 2). The present inventors have confirmed that when the filler is added in a large amount to the photosensitive resin composition, the apparent heat resistance and water absorption rate of the resulting coating film are reduced. In many cases, the filler itself is grounded to the adherend, and the fluidity of the composition is remarkably deteriorated in addition to the problem that the adhesion of the coating film is lowered. In particular, when blended with a photopolymerizable monomer, it becomes a dilatancy fluid and cannot be stirred or even coated. In addition, with a negative photosensitive resin composition such as a solder resist, there is a problem that sufficient resolution cannot be obtained for a small-diameter opening due to the filler, and the opening is considerably closed due to light halation. there were.
特開昭61-243869号公報Japanese Patent Laid-Open No. 61-243869 特開2000-181058号公報JP 2000-181058 A
 従って、本発明の目的は、フィラーを多量に配合しても、組成物の密着性や流動性の低下をまねかず、基材に対して塗布が容易であり、ソルダーレジストの線膨張係数を低下させることにより、冷熱サイクル時に生じるソルダーレジストのクラックの発生や剥がれを抑制できる光硬化性樹脂組成物を提供することにある。
 また、従来からのプリント配線板のソルダーレジストや多層配線板の層間絶縁材料等に要求される解像性、無電解金めっき耐性、密着性に起因するPCT耐性等の特性を向上させ、且つ、特にICパッケージに要求される特性に優れる硬化皮膜が得られ、プリント配線板の高密度化、面実装化に対応可能で、アルカリ現像することで小径の開口が形成可能な光硬化性樹脂組成物を提供することにある。
 さらにこのような光硬化性樹脂組成物を用いることによって得られる上記のような諸特性に優れたドライフィルム及び硬化物、並びに該ドライフィルムや硬化物によりソルダーレジスト等の硬化皮膜が形成されてなるプリント配線板を提供することにある。
Therefore, the object of the present invention is that even if a large amount of filler is blended, the adhesiveness and fluidity of the composition are not lowered, it can be easily applied to the substrate, and the linear expansion coefficient of the solder resist is lowered. It is in providing the photocurable resin composition which can suppress generation | occurrence | production and the peeling of the crack of the soldering resist which arises at the time of a thermal cycle by making it.
In addition, it improves the characteristics such as the resolution required for conventional solder resist of printed wiring boards and interlayer insulation materials of multilayer wiring boards, electroless gold plating resistance, PCT resistance resulting from adhesion, and In particular, a photocurable resin composition capable of forming a cured film having excellent characteristics required for IC packages, capable of responding to high density and surface mounting of printed wiring boards, and capable of forming small-diameter openings by alkali development. Is to provide.
Furthermore, a dry film and a cured product excellent in various properties as described above obtained by using such a photocurable resin composition, and a cured film such as a solder resist is formed by the dry film and the cured product. It is to provide a printed wiring board.
 前記目的を達成するために、本発明によれば、カルボキシル基含有オリゴマー、上記カルボキシル基含有オリゴマーよりも分子量の大きな高分子バインダー、光重合開始剤、光重合性モノマー及びフィラーを含む組成物であって、上記フィラーの含有量が組成物の不揮発成分全体量の30~60質量%であることを特徴とするアルカリ溶液により現像可能な光硬化性樹脂組成物が提供される。
 好適な態様によれば、上記高分子バインダーは、熱可塑樹脂、好ましくは溶剤に溶かした状態で固形分が10~50wt%の熱可塑樹脂溶液である。別の好適な態様によれば、上記フィラーはBa又はMg及び/又はAlを含む。
In order to achieve the above object, according to the present invention, there is provided a composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler. Thus, there is provided a photocurable resin composition that can be developed with an alkaline solution, characterized in that the content of the filler is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
According to a preferred embodiment, the polymer binder is a thermoplastic resin, preferably a thermoplastic resin solution having a solid content of 10 to 50 wt% dissolved in a solvent. According to another preferred embodiment, the filler contains Ba or Mg and / or Al.
 また、本発明によれば、前記光硬化性樹脂組成物を、キャリアフィルム上に塗布・乾燥させて得られる光硬化性のドライフィルムや、前記光硬化性樹脂組成物又は該ドライフィルムを活性エネルギー線の照射により光硬化させて得られる硬化物、特に銅上にて光硬化させて得られる硬化物や、パターン状に光硬化して得られる硬化物も提供される。一つの態様においては、ドライフィルムは複数の光硬化性樹脂組成物の乾燥層からなり、少なくとも1層は本発明の前記光硬化性樹脂組成物から形成されている。
 さらに本発明によれば、前記光硬化性樹脂組成物又はドライフィルムを活性エネルギー線の照射によりパターン状に光硬化させ、好ましくはさらに熱硬化して得られる硬化皮膜を有することを特徴とするプリント配線板も提供される。
Further, according to the present invention, the photocurable resin composition obtained by applying and drying the photocurable resin composition on a carrier film, the photocurable resin composition or the dry film can be converted into active energy. There are also provided a cured product obtained by photocuring by irradiation of a line, particularly a cured product obtained by photocuring on copper, and a cured product obtained by photocuring in a pattern. In one aspect, a dry film consists of a dried layer of a plurality of photocurable resin compositions, and at least one layer is formed from the photocurable resin composition of the present invention.
Furthermore, according to the present invention, the print is characterized by having a cured film obtained by photocuring the photocurable resin composition or the dry film into a pattern by irradiation with active energy rays, and preferably further thermosetting. A wiring board is also provided.
 本発明の光硬化性樹脂組成物は、フィラーの含有量が組成物の不揮発成分全体量の30~60質量%であることによって、目的とする硬化物の線膨張係数を15~35×10-6/K(以下、ppmと略記する)の範囲に調整することができ、下地との線膨張係数を一致もしくは接近させることでソルダーレジストのクラックの発生を低減させることができる。さらにカルボキシル基含有オリゴマーよりも高分子量のバインダーを加えることにより、多量のフィラーを配合した場合に生じる不具合であった組成物の密着性低下、流動性低下、フィルム形成性低下、フィルムにしたときのハンドリングクラック等の問題が解決され、且つ、その硬化物において、例えばプリント配線板や半導体パッケージに用いられる際に、優れた解像性や密着性に起因するPCT耐性等が得られ、高い信頼性を得ることができる。 The photocurable resin composition of the present invention has a linear expansion coefficient of 15 to 35 × 10 − when the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition. It can be adjusted to a range of 6 / K (hereinafter abbreviated as ppm), and the occurrence of solder resist cracks can be reduced by matching or approaching the linear expansion coefficient with the base. Furthermore, by adding a binder having a higher molecular weight than that of the carboxyl group-containing oligomer, the adhesiveness of the composition, which is a problem that occurs when a large amount of filler is blended, reduced fluidity, reduced film formability, Problems such as handling cracks are solved, and when the cured product is used, for example, in a printed wiring board or a semiconductor package, excellent resolution and PCT resistance resulting from adhesion are obtained, and high reliability. Can be obtained.
 本発明のアルカリ溶液により現像可能な光硬化性樹脂組成物(以下、光硬化性樹脂組成物とも称する)は、カルボキシル基含有オリゴマー、上記カルボキシル基含有オリゴマーよりも分子量の大きな高分子バインダー、光重合開始剤、光重合性モノマー及びフィラーを含む組成物であって、上記フィラーの含有量が組成物の不揮発成分全体量の30~60質量%であることを特徴とするものである。
以下、本発明の光硬化性樹脂組成物の各構成成分について詳細に説明する。
The photocurable resin composition developable with the alkaline solution of the present invention (hereinafter also referred to as a photocurable resin composition) includes a carboxyl group-containing oligomer, a polymer binder having a higher molecular weight than the carboxyl group-containing oligomer, and photopolymerization. A composition comprising an initiator, a photopolymerizable monomer and a filler, wherein the filler content is 30 to 60% by mass of the total amount of nonvolatile components of the composition.
Hereinafter, each component of the photocurable resin composition of the present invention will be described in detail.
 本発明の光硬化性樹脂組成物は、カルボキシル基含有オリゴマーを用いることでアルカリ現像性を付与することが可能となる。尚、本明細書において、用語「オリゴマー」は、高分子バインダーと分子量を区別し易いようにするために用いられていると理解されるべきである。カルボキシル基含有オリゴマーとしては、分子中にカルボキシル基を有している従来公知の各種カルボキシル基含有樹脂もしくはプレポリマーを使用できる。特に、分子中にエチレン性不飽和二重結合を有するカルボキシル基含有感光性樹脂もしくはカルボキシル基含有感光性プレポリマーが、光硬化性や耐現像性の面からより好ましい。そして、その不飽和二重結合は、アクリル酸もしくはメタアクリル酸又はそれらの誘導体由来のものが好ましい。尚、エチレン性不飽和二重結合を有さないカルボキシル基含有樹脂もしくはプレポリマーのみを用いる場合、組成物を光硬化性とするためには、後述する分子中に複数のエチレン性不飽和基を有する化合物、即ち光重合性モノマーを併用する必要がある。
 カルボキシル基含有オリゴマーの具体例としては、以下に列挙するようなオリゴマーを好適に使用できる。
The photocurable resin composition of the present invention can impart alkali developability by using a carboxyl group-containing oligomer. In the present specification, the term “oligomer” should be understood to be used to make it easy to distinguish the molecular weight from the polymer binder. As the carboxyl group-containing oligomer, various conventionally known carboxyl group-containing resins or prepolymers having a carboxyl group in the molecule can be used. In particular, a carboxyl group-containing photosensitive resin or a carboxyl group-containing photosensitive prepolymer having an ethylenically unsaturated double bond in the molecule is more preferable in terms of photocurability and development resistance. And the unsaturated double bond is preferably derived from acrylic acid, methacrylic acid or derivatives thereof. When only a carboxyl group-containing resin or prepolymer having no ethylenically unsaturated double bond is used, in order to make the composition photocurable, a plurality of ethylenically unsaturated groups are contained in the molecule described later. It is necessary to use a compound having a photopolymerizable monomer in combination.
As specific examples of the carboxyl group-containing oligomer, oligomers listed below can be suitably used.
 (1)(メタ)アクリル酸等の不飽和カルボン酸と、スチレン、α-メチルスチレン、低級アルキル(メタ)アクリレート、イソブチレン等の不飽和基含有化合物との共重合により得られるカルボキシル基含有オリゴマー。 (1) A carboxyl group-containing oligomer obtained by copolymerization of an unsaturated carboxylic acid such as (meth) acrylic acid and an unsaturated group-containing compound such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, and isobutylene.
 (2)脂肪族ジイソシアネート、分岐脂肪族ジイソシアネート、脂環式ジイソシアネート、芳香族ジイソシアネート等のジイソシアネートと、ジメチロールプロピオン酸、ジメチロールブタン酸等のカルボキシル基含有ジアルコール化合物及びポリカーボネート系ポリオール、ポリエーテル系ポリオール、ポリエステル系ポリオール、ポリオレフィン系ポリオール、アクリル系ポリオール、ビスフェノールA系アルキレンオキシド付加体ジオール、フェノール性ヒドロキシル基及びアルコール性ヒドロキシル基を有する化合物等のジオール化合物の重付加反応によるカルボキシル基含有ウレタン樹脂。 (2) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, and aromatic diisocyanates; carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, polycarbonate polyols, and polyethers A carboxyl group-containing urethane resin by a polyaddition reaction of a diol compound such as a polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, a compound having a phenolic hydroxyl group and an alcoholic hydroxyl group.
 (3)ジイソシアネートと、ビスフェノールA型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂等の2官能エポキシ樹脂の(メタ)アクリレートもしくはその部分酸無水物変性物、カルボキシル基含有ジアルコール化合物及びジオール化合物の重付加反応によるカルボキシル基含有感光性ウレタン樹脂。 (3) Diisocyanate and bifunctional epoxy resin such as bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin ( A carboxyl group-containing photosensitive urethane resin obtained by a polyaddition reaction of (meth) acrylate or a partially acid anhydride-modified product thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
 (4)前記(2)又は(3)の樹脂の合成中に、ヒドロキシアルキル(メタ)アクリレート等の分子中に1つの水酸基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化したカルボキシル基含有感光性ウレタン樹脂。 (4) During the synthesis of the resin of (2) or (3), a compound having one hydroxyl group and one or more (meth) acryl groups in a molecule such as hydroxyalkyl (meth) acrylate is added, and the terminal ( (Meth) acrylic carboxyl group-containing photosensitive urethane resin.
 (5)前記(2)又は(3)の樹脂の合成中に、イソホロンジイソシアネートとペンタエリスリトールトリアクリレートの等モル反応物など、分子中に1つのイソシアネート基と1つ以上の(メタ)アクリル基を有する化合物を加え末端(メタ)アクリル化したカルボキシル基含有感光性ウレタン樹脂。 (5) During the synthesis of the resin of the above (2) or (3), one isocyanate group and one or more (meth) acryl groups are introduced into the molecule, such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate. A carboxyl group-containing photosensitive urethane resin obtained by adding a compound having a terminal (meth) acrylate.
 (6)後述するような2官能又はそれ以上の多官能(固形)エポキシ樹脂に(メタ)アクリル酸を反応させ、側鎖に存在する水酸基に無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸等の2塩基酸無水物を付加させたカルボキシル基含有感光性オリゴマー。 (6) (Meth) acrylic acid is reacted with a bifunctional or higher polyfunctional (solid) epoxy resin as described later, and phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride are added to the hydroxyl group present in the side chain. A carboxyl group-containing photosensitive oligomer to which a dibasic acid anhydride such as
 (7)後述するような2官能(固形)エポキシ樹脂の水酸基をさらにエピクロロヒドリンでエポキシ化した多官能エポキシ樹脂に(メタ)アクリル酸を反応させ、生じた水酸基に2塩基酸無水物を付加させたカルボキシル基含有感光性オリゴマー。 (7) A polyfunctional epoxy resin obtained by epoxidizing a hydroxyl group of a bifunctional (solid) epoxy resin as described later with epichlorohydrin is reacted with (meth) acrylic acid, and a dibasic acid anhydride is added to the resulting hydroxyl group. An added carboxyl group-containing photosensitive oligomer.
 (8)後述するような2官能オキセタン樹脂にアジピン酸、フタル酸、ヘキサヒドロフタル酸等のジカルボン酸を反応させ、生じた1級の水酸基に2塩基酸無水物を付加させたカルボキシル基含有ポリエステルオリゴマー。 (8) A carboxyl group-containing polyester obtained by reacting a dicarboxylic acid such as adipic acid, phthalic acid or hexahydrophthalic acid with a bifunctional oxetane resin as described later, and adding a dibasic acid anhydride to the resulting primary hydroxyl group. Oligomer.
 (9)1分子中に複数のフェノール性水酸基を有する化合物とエチレンオキシド、プロピレンオキシド等のアルキレンオキシドとを反応させて得られる反応生成物に不飽和基含有モノカルボン酸を反応させ、得られる反応生成物に無水マレイン酸、テトラヒドロ無水フタル酸、無水トリメリット酸、無水ピロメリット酸等の多塩基酸無水物を反応させて得られるカルボキシル基含有感光性オリゴマー。 (9) Reaction product obtained by reacting a compound obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide with an unsaturated group-containing monocarboxylic acid. Carboxyl group-containing photosensitive oligomer obtained by reacting polybasic acid anhydrides such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and the like.
 (10)1分子中に複数のフェノール性水酸基を有する化合物とエチレンカーボネート、プロピレンカーボネート等の環状カーボネート化合物とを反応させて得られる反応生成物に不飽和基含有モノカルボン酸を反応させ、得られる反応生成物に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性オリゴマー。 (10) Obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a reaction product obtained by reacting a cyclic carbonate compound such as ethylene carbonate or propylene carbonate with an unsaturated group-containing monocarboxylic acid. A carboxyl group-containing photosensitive oligomer obtained by reacting a reaction product with a polybasic acid anhydride.
 (11)上記(1)~(10)の樹脂にさらに1分子中に1つのエポキシ基と1つ以上の(メタ)アクリル基を有する化合物を付加してなるカルボキシル基含有感光性オリゴマー。
 なお、本明細書において、(メタ)アクリレートとは、アクリレート、メタクリレート及びそれらの混合物を総称する用語で、他の類似の表現についても同様である。
(11) A carboxyl group-containing photosensitive oligomer obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (1) to (10).
In addition, in this specification, (meth) acrylate is a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.
 前記のようなカルボキシル基含有オリゴマーは、バックボーン・ポリマーの側鎖に多数のカルボキシル基を有するため、希アルカリ水溶液による現像が可能になる。
 また、前記カルボキシル基含有オリゴマーの酸価は、40~200mgKOH/gの範囲が適当であり、より好ましくは45~120mgKOH/gの範囲である。カルボキシル基含有オリゴマーの酸価が40mgKOH/g未満であるとアルカリ現像が困難となり、一方、200mgKOH/gを超えると現像液による露光部の溶解が進むために、必要以上にラインが痩せたり、場合によっては、露光部と未露光部の区別なく現像液で溶解剥離してしまい、正常なレジストパターンの描画が困難となるので好ましくない。
Since the carboxyl group-containing oligomer as described above has a large number of carboxyl groups in the side chain of the backbone polymer, development with a dilute alkaline aqueous solution becomes possible.
The acid value of the carboxyl group-containing oligomer is suitably in the range of 40 to 200 mgKOH / g, more preferably in the range of 45 to 120 mgKOH / g. When the acid value of the carboxyl group-containing oligomer is less than 40 mgKOH / g, alkali development becomes difficult. On the other hand, if it exceeds 200 mgKOH / g, dissolution of the exposed portion by the developer proceeds, and the line may become thinner than necessary. Depending on the case, the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to draw a normal resist pattern.
 また、前記カルボキシル基含有オリゴマーの重量平均分子量は、樹脂骨格により異なるが、一般的に2,000~150,000、さらには5,000~100,000の範囲にあるものが好ましい。使用する高分子バインダーよりも重量平均分子量が低いカルボキシル基含有オリゴマーを使用する必要があるが、特に好ましい重量平均分子量は5000~35,000である。重量平均分子量が2,000未満であると、塗膜のタックフリー性能が劣ることがあり、露光後の塗膜の耐湿性が悪く、現像時に膜減りが生じ、解像度が大きく劣ることがある。一方、重量平均分子量が150,000を超えると、現像性が著しく悪くなる。また、後述する高分子バインダーよりも大きい場合は、目的である塗膜の脆さの改善ができない。 The weight average molecular weight of the carboxyl group-containing oligomer varies depending on the resin skeleton, but is generally within the range of 2,000 to 150,000, more preferably 5,000 to 100,000. Although it is necessary to use a carboxyl group-containing oligomer having a weight average molecular weight lower than that of the polymer binder to be used, a particularly preferable weight average molecular weight is 5000 to 35,000. If the weight average molecular weight is less than 2,000, the tack-free performance of the coating film may be inferior, the moisture resistance of the coating film after exposure may be poor, the film may be reduced during development, and the resolution may be greatly inferior. On the other hand, when the weight average molecular weight exceeds 150,000, developability is remarkably deteriorated. Moreover, when larger than the polymeric binder mentioned later, the improvement of the brittleness of the target coating film cannot be performed.
 このようなカルボキシル基含有オリゴマーの配合量は、全組成物の10~60質量%、好ましくは20~50質量%の範囲が適当である。カルボキシル基含有オリゴマーの配合量が上記範囲より少ない場合、皮膜強度が低下したりするので好ましくない。一方、上記範囲より多い場合、組成物の粘性が高くなったり、塗布性等が低下するので好ましくない。 The compounding amount of such a carboxyl group-containing oligomer is 10 to 60% by mass, preferably 20 to 50% by mass of the total composition. When the amount of the carboxyl group-containing oligomer is less than the above range, the film strength is lowered, which is not preferable. On the other hand, when the amount is larger than the above range, the viscosity of the composition is increased or the coating property is lowered, which is not preferable.
 これらカルボキシル基含有オリゴマーは、前記列挙したものに限らず使用することができ、1種類でも複数種混合しても使用することができる。特に前記カルボキシル基含有オリゴマーの中で芳香環を有している樹脂が屈折率が高く、解像性に優れるので好ましく、さらにビフェニルノボラック構造を有しているものが解像性だけで無く、PCT耐性やクラック耐性に優れているので好ましい。また、カルボキシル基含有感光性オリゴマー(9)、(10)のごときフェノール化合物を出発材料として使用するカルボキシル基含有オリゴマーも、同様にPCT耐性が向上するため好ましい。一般に、フィラー成分の増加により、フィラーと樹脂の界面で吸水が起こり易くなるのに対して、ビフェニルノボラック構造を有しているものや、(9)、(10)のごときカルボキシル基含有オリゴマーは、フィラー成分が増加してもPCT耐性は非常に優れたのであった。これは、前者はビフェニルノボラック構造により疎水性が向上しているためと考えられ、後者は、類似の構造を形成できるカルボキシル基含有感光性オリゴマー(6)、(7)がエポキシアクリレート構造で水酸基を有しているのに対して、カルボキシル基含有感光性オリゴマー(9)、(10)は水酸基がなく、著しく疎水性が向上しているためと考えられる。 These carboxyl group-containing oligomers can be used without being limited to those listed above, and can be used singly or in combination. In particular, among the carboxyl group-containing oligomers, resins having an aromatic ring are preferable because they have a high refractive index and excellent resolution, and those having a biphenyl novolak structure not only have resolution but also PCT. It is preferable because it is excellent in resistance and crack resistance. In addition, carboxyl group-containing oligomers using a phenol compound as a starting material, such as carboxyl group-containing photosensitive oligomers (9) and (10), are also preferable because PCT resistance is similarly improved. In general, the increase in the filler component makes it easy for water absorption to occur at the interface between the filler and the resin, whereas those having a biphenyl novolak structure and carboxyl group-containing oligomers such as (9) and (10) Even if the filler component increased, the PCT resistance was very excellent. This is probably because the former has improved hydrophobicity due to the biphenyl novolac structure, and the latter has a carboxyl group-containing photosensitive oligomer (6) and (7) with an epoxy acrylate structure that can form a similar structure. On the other hand, it is considered that the carboxyl group-containing photosensitive oligomers (9) and (10) do not have a hydroxyl group and the hydrophobicity is remarkably improved.
 前記高分子バインダーとしては、反応性、非反応性にかかわらず熱可塑性樹脂であれば特に限定されるものではないが、例えば、ポリフェニレンサルファイド、ポリアリレート、ポリスルホン、ポリエーテルスルホン、ポリエーテルエーテルケトン、ポリエーテルケトン等の熱可塑性樹脂、熱可塑性ポリイミド、フェノキシ樹脂と呼ばれている芳香族系樹脂群、エチルセルロース、アセチルセルロース、アセチルプロピルセルロース、アセチルブチルセルロース等セルロース誘導体、各種アクリレートやスチレン、酢酸ビニル等のビニル誘導体を溶液、懸濁重合させて得られるポリマーなどが使用できる。また、2種類以上のビニル基を有するモノマーを用いて重合を行うことで得られる2元共重合体、3元共重合体、ブロック共重合体なども使用できる。特に、これらのポリマーのうち、セルロース誘導体によるものやブロック共重合体が好ましい。高分子バインダーの好適な分子量は、重量平均分子量で30,000~1,500,000であるが、使用するカルボキシル基含有オリゴマーよりも明確に分子量が大きいと判断される場合であれば使用することができる。例えば、同一溶剤に溶解させた際にカルボキシル基含有オリゴマーと比較して粘度が高い場合である。さらに、通常、分子量が大きいものほど溶剤に対する溶解性が低いため、同一溶剤に溶解させたときの固形分の量が低い場合、特に10~50wt%のときに前記カルボキシル基含有オリゴマーよりも分子量が大きいと判断される。10wt%よりも固形分が少ないときは溶剤分が増えて組成物を形成し得ないという問題を生じる。一方、50wt%より多いときは高分子に該当しない場合があり、妥当でない。 The polymer binder is not particularly limited as long as it is a thermoplastic resin regardless of whether it is reactive or non-reactive. For example, polyphenylene sulfide, polyarylate, polysulfone, polyethersulfone, polyetheretherketone, Thermoplastic resins such as polyetherketone, thermoplastic polyimide, aromatic resin group called phenoxy resin, cellulose derivatives such as ethylcellulose, acetylcellulose, acetylpropylcellulose, acetylbutylcellulose, various acrylates, styrene, vinyl acetate, etc. A polymer obtained by subjecting a vinyl derivative of the above to solution or suspension polymerization can be used. In addition, a binary copolymer, a ternary copolymer, a block copolymer, and the like obtained by polymerization using a monomer having two or more kinds of vinyl groups can also be used. Of these polymers, those derived from cellulose derivatives and block copolymers are particularly preferred. The preferred molecular weight of the polymer binder is 30,000 to 1,500,000 in terms of weight average molecular weight, but should be used if it is determined that the molecular weight is clearly larger than the carboxyl group-containing oligomer used. Can do. For example, when dissolved in the same solvent, the viscosity is higher than that of the carboxyl group-containing oligomer. Furthermore, since the higher the molecular weight, the lower the solubility in the solvent, the lower the solid content when dissolved in the same solvent, especially when the molecular weight is 10 to 50 wt%, the molecular weight is higher than that of the carboxyl group-containing oligomer. Judged to be large. When the solid content is less than 10 wt%, there is a problem that the solvent content increases and a composition cannot be formed. On the other hand, when it exceeds 50 wt%, it may not correspond to a polymer and is not appropriate.
 これら高分子バインダーの働きは幾つか挙げられる。その一つは、組成物の流動性を変えることである。具体的に述べると、カルボキシル基含有オリゴマー及び光重合性モノマーに多量のフィラーを配合した場合、特に光重合性モノマーとフィラーのなじみが悪く、得られる組成物はダイラタンシー流体になる。組成物がダイラタンシーになると、組成物を攪拌、印刷、又はコーティングすることが困難であり、かなりの希釈状態でないと使用することができず、特にスクリーン印刷やロールコーティング等の比較的高粘度で行う印刷の場合には、必要な膜厚が一回の印刷で確保できない問題があった。ここに高分子バインダーを加えると、組成物はチキソトロピー流体へと変化することができた。ここで初めて印刷やコーティングが可能な材料となった。第2の効果は、組成物をコーティング、乾燥してドライフィルム状態にした際、ハンドリングクラックを制御することが明らかとなった。これは、高分子バインダーが多量に配合されたフィラーをつなぎとめる効果があったためと考えられる。高分子バインダー添加の第3の効果は、硬化後の物性において、塗膜の靭性を増大させることができたことである。これは、高分子バインダーが光硬化性樹脂マトリックス中にIPN(海島)状態で存在しているためと考えられる。以上のような3つの理由により、高分子バインダーを添加してはじめて、光重合性モノマーと多量のフィラーが共存する組成物においても、印刷及びコーティングが可能となり、線膨張係数が低く、強靭な塗膜が得られるようになったものと考えられる。 There are several functions of these polymer binders. One is to change the fluidity of the composition. More specifically, when a large amount of filler is added to the carboxyl group-containing oligomer and the photopolymerizable monomer, the photopolymerizable monomer and the filler are particularly unsuitable, and the resulting composition becomes a dilatancy fluid. When the composition becomes dilatancy, it is difficult to stir, print, or coat the composition, and it cannot be used unless it is in a considerably diluted state, and in particular, it is performed at a relatively high viscosity such as screen printing or roll coating. In the case of printing, there is a problem that a required film thickness cannot be secured by one printing. When a polymeric binder was added here, the composition could be transformed into a thixotropic fluid. This is the first material that can be printed and coated. The second effect has been shown to control handling cracks when the composition is coated and dried to a dry film state. This is considered to be due to the effect of holding the filler containing a large amount of the polymer binder. The third effect of adding the polymer binder is that the toughness of the coating film can be increased in the physical properties after curing. This is presumably because the polymer binder is present in an IPN (sea island) state in the photocurable resin matrix. For the above three reasons, only when a polymer binder is added, a composition in which a photopolymerizable monomer and a large amount of filler coexist can be printed and coated, has a low coefficient of linear expansion, and has a tough coating. It is considered that a film can be obtained.
 また、これら高分子バインダーは、末端及び/又は側鎖にカルボキシル基、水酸基、エポキシ基等の官能基が存在していてもかまわない。好適なカルボキシル基の量としては酸価30mgKOH/g以下である。 In addition, these polymer binders may have functional groups such as a carboxyl group, a hydroxyl group, and an epoxy group at the terminal and / or side chain. A suitable amount of the carboxyl group is an acid value of 30 mgKOH / g or less.
 高分子バインダーの好適な配合量は、前記カルボキシル基含有オリゴマー100質量部に対して1質量部以上である。このように少量の高分子バインダーの添加でも、組成物の流動性は充分達成できる。さらに物性を充分に向上させるためにはより多量の高分子バインダーを加えることができるが、その上限はカルボキシル基含有オリゴマー100質量部に対して30質量部程度が適当である。高分子バインダーの添加量が多くなると現像性が著しく悪く、回路形成された基板の回路上や回路間に残渣が残ることがあるが、このようなときには、光硬化性樹脂組成物の塗布を2回に分け、一回目の途工の際には高分子バインダーを含まないかもしくは5質量部未満含む組成物を塗布し、その後、高分子バインダーと多量のフィラーを配合した本発明の組成物を塗布すると、現像不良の問題は解決される。同様に、ドライフィルムを形成する際も2層以上の層構成とし、基材に直接触れる側の層は高分子バインダーが存在しないかもしくは5質量部未満の割合の組成物層で形成し、他の層を高分子バインダーを多く含む本発明の組成物で層形成することなどで解決できる。 A suitable blending amount of the polymer binder is 1 part by mass or more with respect to 100 parts by mass of the carboxyl group-containing oligomer. Thus, even if a small amount of the polymer binder is added, the fluidity of the composition can be sufficiently achieved. Furthermore, in order to sufficiently improve the physical properties, a larger amount of polymer binder can be added, but the upper limit is suitably about 30 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. When the addition amount of the polymer binder is increased, the developability is remarkably deteriorated, and a residue may remain on the circuit formed on the circuit or between the circuits. In such a case, the photocurable resin composition is applied by 2 The composition of the present invention in which a polymer binder is not included or less than 5 parts by weight is applied in the first construction, and then the polymer binder and a large amount of filler are blended. When applied, the problem of poor development is solved. Similarly, when forming a dry film, it is composed of two or more layers, and the layer on the side directly touching the substrate is formed of a composition layer having no polymer binder or a proportion of less than 5 parts by mass, and the like. This layer can be solved by forming a layer with the composition of the present invention containing a large amount of a polymer binder.
 本発明の光硬化性樹脂組成物に用いられる光重合開始剤としては、オキシムエステル基を有するオキシムエステル系光重合開始剤、α-アミノアセトフェノン系光重合開始剤、アシルホスフィンオキサイド系光重合開始剤からなる群から選択される1種以上を好適に使用することができる。 Examples of the photopolymerization initiator used in the photocurable resin composition of the present invention include an oxime ester photopolymerization initiator having an oxime ester group, an α-aminoacetophenone photopolymerization initiator, and an acylphosphine oxide photopolymerization initiator. One or more selected from the group consisting of can be preferably used.
 オキシムエステル系光重合開始剤としては、市販品として、BASFジャパン社製のCGI-325、イルガキュアー(登録商標)OXE01、イルガキュアーOXE02、ADEKA社製N-1919、NCI-831などが挙げられる。また、分子中に2個のオキシムエステル基を有する光重合開始剤も好適に用いることができ、具体的には、下記一般式で表されるカルバゾール構造を有するオキシムエステル化合物が挙げられる。
Figure JPOXMLDOC01-appb-C000001
(式中、Xは、水素原子、炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、フェニル基、フェニル基(炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、アミノ基、炭素数1~8のアルキル基を持つアルキルアミノ基又はジアルキルアミノ基により置換されている)、ナフチル基(炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、アミノ基、炭素数1~8のアルキル基を持つアルキルアミノ基又はジアルキルアミノ基により置換されている)を表し、Y、Zはそれぞれ、水素原子、炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、ハロゲン基、フェニル基、フェニル基(炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、アミノ基、炭素数1~8のアルキル基を持つアルキルアミノ基又はジアルキルアミノ基により置換されている)、ナフチル基(炭素数1~17のアルキル基、炭素数1~8のアルコキシ基、アミノ基、炭素数1~8のアルキル基を持つアルキルアミノ基又はジアルキルアミノ基により置換されている)、アンスリル基、ピリジル基、ベンゾフリル基、ベンゾチエニル基を表し、Arは、結合か、炭素数1~10のアルキレン、ビニレン、フェニレン、ビフェニレン、ピリジレン、ナフチレン、チオフェン、アントリレン、チエニレン、フリレン、2,5-ピロール-ジイル、4,4’-スチルベン-ジイル、4,2’-スチレン-ジイルを表し、nは0か1の整数である。)
 特に前記一般式中、X、Yが、それぞれ、メチル基又はエチル基であり、Zはメチル又はフェニルであり、nは0であり、Arは、結合か、フェニレン、ナフチレン、チオフェン又はチエニレンであることが好ましい。
Examples of the oxime ester photopolymerization initiator include CGI-325, Irgacure (registered trademark) OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, NCI-831 manufactured by ADEKA, and the like as commercially available products. Moreover, the photoinitiator which has two oxime ester groups in a molecule | numerator can also be used suitably, Specifically, the oxime ester compound which has a carbazole structure represented with the following general formula is mentioned.
Figure JPOXMLDOC01-appb-C000001
(In the formula, X is a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, a phenyl group (an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms). Group, an amino group, an alkylamino group having an alkyl group having 1 to 8 carbon atoms or a dialkylamino group), a naphthyl group (an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms), And Y and Z are each a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, or a carbon atom having 1 carbon atom), substituted with an alkyl group having a C 1-8 alkyl group or a dialkylamino group. Alkyl groups having 8 to 8 alkoxy groups, halogen groups, phenyl groups, phenyl groups (alkyl groups having 1 to 17 carbon atoms, alkoxy groups having 1 to 8 carbon atoms, amino groups, alkyl groups having 1 to 8 carbon atoms) Or substituted with a dialkylamino group), a naphthyl group (an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an amino group, an alkylamino group having an alkyl group having 1 to 8 carbon atoms, or Represents an anthryl group, a pyridyl group, a benzofuryl group, a benzothienyl group, Ar is a bond or alkylene having 1 to 10 carbon atoms, vinylene, phenylene, biphenylene, pyridylene, naphthylene, thiophene , Anthrylene, thienylene, furylene, 2,5-pyrrole-diyl, 4,4′-stilbene-diyl, 4,2′-styrene-diyl, and n is an integer of 0 or 1.)
In particular, in the above general formula, X and Y are each a methyl group or an ethyl group, Z is methyl or phenyl, n is 0, and Ar is a bond, phenylene, naphthylene, thiophene or thienylene. It is preferable.
 このようなオキシムエステル系光重合開始剤の配合量は、カルボキシル基含有オリゴマー100質量部に対して、0.01~5質量部とすることが好ましい。0.01質量部未満であると、銅上での光硬化性が不足し、塗膜が剥離するとともに、耐薬品性などの塗膜特性が低下する。一方、5質量部を超えると、塗膜表面での光吸収が激しくなり、深部硬化性が低下する傾向がある。より好ましくは、0.5~3質量部である。 The blending amount of such an oxime ester photopolymerization initiator is preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. When it is less than 0.01 parts by mass, the photocurability on copper is insufficient, the coating film is peeled off, and the coating properties such as chemical resistance are deteriorated. On the other hand, when the amount exceeds 5 parts by mass, light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 3 parts by mass.
 α-アミノアセトフェノン系光重合開始剤としては、具体的には2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノプロパノン-1、2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)-ブタン-1-オン、2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノン、N,N-ジメチルアミノアセトフェノンなどが挙げられる。市販品としては、BASFジャパン社製のイルガキュアー907、イルガキュアー369、イルガキュアー379などが挙げられる。 Specific examples of α-aminoacetophenone photopolymerization initiators include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone-1, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N , N-dimethylaminoacetophenone and the like. Examples of commercially available products include Irgacure 907, Irgacure 369, and Irgacure 379 manufactured by BASF Japan.
 アシルホスフィンオキサイド系光重合開始剤としては、具体的には2,4,6-トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6-トリメチルベンゾイル)-フェニルホスフィンオキサイド、ビス(2,6-ジメトキシベンゾイル)-2,4,4-トリメチル-ペンチルホスフィンオキサイドなどが挙げられる。市販品としては、BASF社製のルシリンTPO、BASFジャパン社製のイルガキュアー819などが挙げられる。 Specific examples of acylphosphine oxide photopolymerization initiators include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, and bis (2,6-dimethoxy). And benzoyl) -2,4,4-trimethyl-pentylphosphine oxide. Examples of commercially available products include Lucilin TPO manufactured by BASF, Irgacure 819 manufactured by BASF Japan, and the like.
 これらα-アミノアセトフェノン系光重合開始剤、アシルホスフィンオキサイド系光重合開始剤の配合量は、カルボキシル基含有オリゴマー100質量部に対して、0.01~15質量部であることが好ましい。0.01質量部未満であると、同様に銅上での光硬化性が不足し、塗膜が剥離するとともに、耐薬品性などの塗膜特性が低下する。一方、15質量部を超えると、アウトガスの低減効果が得られず、さらに塗膜表面での光吸収が激しくなり、深部硬化性が低下する傾向がある。より好ましくは0.5~10質量部である。 The blending amount of these α-aminoacetophenone photopolymerization initiator and acylphosphine oxide photopolymerization initiator is preferably 0.01 to 15 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. If it is less than 0.01 parts by mass, the photo-curability on copper is similarly insufficient, the coating film peels off, and the coating properties such as chemical resistance deteriorate. On the other hand, when the amount exceeds 15 parts by mass, the effect of reducing the outgas cannot be obtained, the light absorption on the surface of the coating film becomes intense, and the deep curability tends to decrease. More preferably, it is 0.5 to 10 parts by mass.
 ここで、用いる光重合開始剤としては上記オキシムエステル系開始剤が添加量も少なく、アウトガスが抑えられるため、PCT耐性やクラック耐性に効果があり好ましい。また、オキシムエステル系開始剤に加えてアシルホスフィンオキサイド系光重合開始剤を併用すると、解像性の良好な形状が得られるため特に好ましい。 Here, as the photopolymerization initiator to be used, the oxime ester initiator is added in a small amount, and outgassing is suppressed, which is effective in terms of PCT resistance and crack resistance. Further, it is particularly preferable to use an acylphosphine oxide photopolymerization initiator in addition to the oxime ester initiator because a shape with good resolution can be obtained.
 その他、本発明の光硬化性樹脂組成物に好適に用いることができる光重合開始剤、光開始助剤及び増感剤としては、ベンゾイン化合物、アセトフェノン化合物、アントラキノン化合物、チオキサントン化合物、ケタール化合物、ベンゾフェノン化合物、3級アミン化合物、及びキサントン化合物などを挙げることができる。 In addition, examples of the photopolymerization initiator, photoinitiator assistant, and sensitizer that can be suitably used in the photocurable resin composition of the present invention include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketal compounds, and benzophenones. Compounds, tertiary amine compounds, and xanthone compounds.
 ベンゾイン化合物としては、具体的には、例えばベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテルなどが挙げられる。 Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.
 アセトフェノン化合物としては、具体的には、例えばアセトフェノン、2,2-ジメトキシ-2-フェニルアセトフェノン、2,2-ジエトキシ-2-フェニルアセトフェノン、1,1-ジクロロアセトフェノンなどが挙げられる。 Specific examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, and the like.
 アントラキノン化合物としては、具体的には、例えば2-メチルアントラキノン、2-エチルアントラキノン、2-t-ブチルアントラキノン、1-クロロアントラキノンなどが挙げられる。 Specific examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone and the like.
 チオキサントン化合物としては、具体的には、例えば2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2-クロロチオキサントン、2,4-ジイソプロピルチオキサントンなどが挙げられる。 Specific examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, and the like.
 ケタール化合物としては、具体的には、例えばアセトフェノンジメチルケタール、ベンジルジメチルケタールなどが挙げられる。 Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.
 ベンゾフェノン化合物としては、具体的には、例えばベンゾフェノン、4-ベンゾイルジフェニルスルフィド、4-ベンゾイル-4’-メチルジフェニルスルフィド、4-ベンゾイル-4’-エチルジフェニルスルフィド、4-ベンゾイル-4’-プロピルジフェニルスルフィドなどが挙げられる。 Specific examples of the benzophenone compound include benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4′-methyldiphenyl sulfide, 4-benzoyl-4′-ethyldiphenyl sulfide, and 4-benzoyl-4′-propyldiphenyl. And sulfides.
 3級アミン化合物としては、具体的には、例えばエタノールアミン化合物、ジアルキルアミノベンゼン構造を有する化合物、例えば、市販品では、4,4’-ジメチルアミノベンゾフェノン(日本曹達社製ニッソキュアーMABP)、4,4’-ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)などのジアルキルアミノベンゾフェノン、7-(ジエチルアミノ)-4-メチル-2H-1-ベンゾピラン-2-オン(7-(ジエチルアミノ)-4-メチルクマリン)などのジアルキルアミノ基含有クマリン化合物、4-ジメチルアミノ安息香酸エチル(日本化薬社製カヤキュアー(登録商標)EPA)、2-ジメチルアミノ安息香酸エチル(インターナショナルバイオ-シンセエティックス社製Quantacure DMB)、4-ジメチルアミノ安息香酸(n-ブトキシ)エチル(インターナショナルバイオ-シンセエティックス社製Quantacure BEA)、p-ジメチルアミノ安息香酸イソアミルエチルエステル(日本化薬社製カヤキュアーDMBI)、4-ジメチルアミノ安息香酸2-エチルヘキシル(Van Dyk社製Esolol 507)、4,4’-ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)などが挙げられる。 Specific examples of the tertiary amine compound include an ethanolamine compound and a compound having a dialkylaminobenzene structure, such as 4,4′-dimethylaminobenzophenone (Nisso Cure MABP manufactured by Nippon Soda Co., Ltd.), Dialkylaminobenzophenones such as 4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin), etc. A dialkylamino group-containing coumarin compound, ethyl 4-dimethylaminobenzoate (Kayacure (registered trademark) EPA manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Bio-Synthetics), -Dimethylaminobenzoic acid (n-butoxy) ethyl (Quantacure BEA manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamylethyl ester (Kayacure DMBI manufactured by Nippon Kayaku Co., Ltd.), 4-dimethylaminobenzoic acid 2 -Ethylhexyl (Esolol 507 manufactured by Van Dyk), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co.), and the like.
 これらのうち、チオキサントン化合物及び3級アミン化合物が好ましい。特に、チオキサントン化合物が含まれることが、深部硬化性の面から好ましい。中でも、2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2-クロロチオキサントン、2,4-ジイソプロピルチオキサントンなどのチオキサントン化合物を含むことが好ましい。 Of these, thioxanthone compounds and tertiary amine compounds are preferred. In particular, the inclusion of a thioxanthone compound is preferable from the viewpoint of deep curability. Of these, thioxanthone compounds such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone are preferably included.
 このようなチオキサントン化合物の配合量としては、カルボキシル基含有オリゴマー100質量部に対して、20質量部以下であることが好ましい。チオキサントン化合物の配合量が20質量部を超えると、厚膜硬化性が低下するとともに、製品のコストアップに繋がる。より好ましくは10質量部以下である。 The amount of such a thioxanthone compound is preferably 20 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer. When the blending amount of the thioxanthone compound exceeds 20 parts by mass, the thick film curability is lowered and the cost of the product is increased. More preferably, it is 10 parts by mass or less.
 また、3級アミン化合物としては、ジアルキルアミノベンゼン構造を有する化合物が好ましく、中でも、ジアルキルアミノベンゾフェノン化合物、最大吸収波長が350~450nmにあるジアルキルアミノ基含有クマリン化合物及びケトクマリン類が特に好ましい。 As the tertiary amine compound, a compound having a dialkylaminobenzene structure is preferable, and among them, a dialkylaminobenzophenone compound, a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 450 nm, and ketocoumarins are particularly preferable.
 ジアルキルアミノベンゾフェノン化合物としては、4,4’-ジエチルアミノベンゾフェノンが、毒性も低く好ましい。ジアルキルアミノ基含有クマリン化合物は、最大吸収波長が350~410nmと紫外線領域にあるため、着色が少なく、無色透明な感光性組成物はもとより、着色顔料を用い、着色顔料自体の色を反映した着色ソルダーレジスト膜を提供することが可能となる。特に、7-(ジエチルアミノ)-4-メチル-2H-1-ベンゾピラン-2-オンが、波長400~410nmのレーザー光に対して優れた増感効果を示すことから好ましい。 As the dialkylaminobenzophenone compound, 4,4′-diethylaminobenzophenone is preferable because of its low toxicity. The dialkylamino group-containing coumarin compound has a maximum absorption wavelength of 350 to 410 nm in the ultraviolet region, so it is less colored and uses a colored pigment as well as a colorless and transparent photosensitive composition, and reflects the color of the colored pigment itself. It becomes possible to provide a solder resist film. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferred because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
 このような3級アミン化合物の配合量としては、カルボキシル基含有オリゴマー100質量部に対して、0.1~20質量部であることが好ましい。3級アミン化合物の配合量が0.1質量部未満であると、充分な増感効果を得ることができない傾向にある。20質量部を超えると、3級アミン化合物による乾燥ソルダーレジスト塗膜の表面での光吸収が激しくなり、深部硬化性が低下する傾向がある。より好ましくは0.1~10質量部である。 The blending amount of such a tertiary amine compound is preferably 0.1 to 20 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. When the compounding amount of the tertiary amine compound is less than 0.1 part by mass, a sufficient sensitizing effect tends not to be obtained. When the amount exceeds 20 parts by mass, light absorption on the surface of the dried solder resist coating film by the tertiary amine compound becomes intense, and the deep curability tends to decrease. More preferably, it is 0.1 to 10 parts by mass.
 これらの光重合開始剤、光開始助剤及び増感剤は、単独で又は2種類以上の混合物として使用することができる。
 このような光重合開始剤、光開始助剤、及び増感剤の総量は、前記カルボキシル基含有オリゴマー100質量部に対して35質量部以下であることが好ましい。35質量部を超えると、これらの光吸収により深部硬化性が低下する傾向にある。
These photopolymerization initiators, photoinitiator assistants, and sensitizers can be used alone or as a mixture of two or more.
The total amount of such photopolymerization initiator, photoinitiator assistant, and sensitizer is preferably 35 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer. When it exceeds 35 parts by mass, the deep curability tends to decrease due to light absorption.
 なお、これら光重合開始剤、光開始助剤、及び増感剤は、特定の波長を吸収するため、場合によっては感度が低くなり、紫外線吸収剤として働くことがある。しかしながら、これらは組成物の感度を向上させることだけの目的に用いられるものではない。必要に応じて特定の波長の光を吸収させて、表面の光反応性を高め、レジストのライン形状及び開口を垂直、テーパー状、逆テーパー状に変化させるとともに、ライン幅や開口径の加工精度を向上させることができる。 In addition, since these photopolymerization initiators, photoinitiator assistants, and sensitizers absorb a specific wavelength, the sensitivity may be lowered in some cases, and may function as an ultraviolet absorber. However, they are not used only for the purpose of improving the sensitivity of the composition. Absorbs light of a specific wavelength as necessary to improve the photoreactivity of the surface, change the resist line shape and opening to vertical, tapered, reverse taper, and processing accuracy of line width and opening diameter Can be improved.
 本発明の光硬化性樹脂組成物にはフィラーを配合しているが、フィラーの配合量について詳細に検討を行った結果、組成物の不揮発成分全体量の30~60質量%のフィラーを加えることにより、PCT耐性や電気特性(HAST耐性)が向上することを見出した。さらにフィラーの屈折率が1.50~1.65の範囲内の場合においては、PCT耐性やHAST耐性(高度加速寿命試験に対する耐性)が優れているだけでなく、良好な解像性が得られることも判明した。高解像が得られる理由としては、PCT耐性やHAST耐性を向上させるために用いられている芳香環を有する樹脂の屈折率とフィラーの屈折率が近いことが考えられる。 The photo-curable resin composition of the present invention contains a filler. As a result of detailed examination of the filler content, 30 to 60% by mass of the filler based on the total amount of nonvolatile components is added. Thus, it has been found that PCT resistance and electrical characteristics (HAST resistance) are improved. Furthermore, when the refractive index of the filler is in the range of 1.50 to 1.65, not only PCT resistance and HAST resistance (resistance to the advanced accelerated life test) are excellent, but also good resolution is obtained. It was also found out. The reason why high resolution can be obtained is that the refractive index of the resin having an aromatic ring used for improving PCT resistance and HAST resistance is close to the refractive index of the filler.
 本発明に用いることができるフィラーとしては、例えば硫酸バリウム、タルク、クレー、炭酸マグネシウム、炭酸カルシウム、酸化アルミニウム、水酸化アルミニウム、ベーマイト、雲母粉、ハイドロタルサイトなどの公知慣用の無機充填剤が使用できる。好適な態様によれば、上記フィラーはBa又はMg及び/又はAlを含む。特にBaを含むフィラーとしては硫酸バリウム(屈折率:1.65)、Mgを含むフィラーとしてはタルク(屈折率:1.54-59)、炭酸マグネシウム(屈折率:1.57-1.60)、Alを含むフィラーとしてはカオリナイト、クレー(屈折率:1.55-1.57)、酸化アルミニウム(屈折率:1.65)、水酸化アルミニウム(屈折率:1.65)、ベーマイト(屈折率:1.62-1.65)、雲母粉(屈折率:1.59)、Mg及びAlを含むフィラーとしてはハイドロタルサイト(屈折率:1.50)が好ましい。 Examples of fillers that can be used in the present invention include known and commonly used inorganic fillers such as barium sulfate, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, boehmite, mica powder, and hydrotalcite. it can. According to a preferred embodiment, the filler contains Ba or Mg and / or Al. In particular, the filler containing Ba is barium sulfate (refractive index: 1.65), and the filler containing Mg is talc (refractive index: 1.54-59), magnesium carbonate (refractive index: 1.57-1.60). As fillers containing Al, kaolinite, clay (refractive index: 1.55-1.57), aluminum oxide (refractive index: 1.65), aluminum hydroxide (refractive index: 1.65), boehmite (refractive) Ratio: 1.62-1.65), mica powder (refractive index: 1.59), and filler containing Mg and Al is preferably hydrotalcite (refractive index: 1.50).
 フィラーの総量は、光硬化性樹脂組成物の不揮発成分全体量の30~60質量%の範囲が適当である。フィラーの含有量が30質量%より少ない場合、光硬化性樹脂組成物の硬化物において線膨張係数の低下が見られず、クラック耐性が悪くなるので好ましくない。一方、60質量%を超えた場合、組成物の粘度が高くなり、塗布、成形性が低下し、さらに吸水性も増すためPCT耐性やHAST耐性が悪化するので好ましくない。また、これらのフィラーは、単独で又は2種類以上を併用することができる。 The total amount of filler is suitably in the range of 30 to 60% by mass with respect to the total amount of nonvolatile components of the photocurable resin composition. When the filler content is less than 30% by mass, the cured product of the photocurable resin composition does not show a decrease in coefficient of linear expansion, and is not preferable because crack resistance deteriorates. On the other hand, when it exceeds 60% by mass, the viscosity of the composition increases, the coating and moldability deteriorates, and the water absorption also increases, so that the PCT resistance and HAST resistance deteriorate, which is not preferable. Moreover, these fillers can be used individually or in combination of 2 or more types.
 本発明の光硬化性樹脂組成物には、メルカプト化合物を添加することが好ましい。メルカプト化合物を加えることにより、PCT耐性とHAST耐性が向上することが認められた。これは、メルカプト化合物を加えることで架橋密度が向上したこと、もしくは、密着性が向上したことが考えられる。 It is preferable to add a mercapto compound to the photocurable resin composition of the present invention. It was observed that the addition of mercapto compounds improves PCT resistance and HAST resistance. This may be because the crosslink density was improved by adding a mercapto compound, or the adhesion was improved.
 メルカプト化合物の配合量は、前記カルボキシル基含有オリゴマー100質量部に対して、0.01質量部以上、10.0質量部以下が適当であり、さらに好ましくは0.05質量部以上、5部質量部以下である。0.01質量部未満では、メルカプト化合物添加の効果としての密着性の向上が確認されず、一方、10.0質量部を超えると、光硬化性樹脂組成物の現像不良、乾燥管理幅の低下などを引き起こすおそれがあるので好ましくない。これらのメルカプト化合物は、単独又は2種以上を併用することができる。 The blending amount of the mercapto compound is suitably 0.01 parts by mass or more and 10.0 parts by mass or less, more preferably 0.05 parts by mass or more and 5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. Or less. If it is less than 0.01 part by mass, the improvement in adhesion as an effect of adding a mercapto compound is not confirmed. On the other hand, if it exceeds 10.0 parts by mass, the development failure of the photocurable resin composition and the decrease in the dry management width will be confirmed. This is not preferable because it may cause These mercapto compounds can be used alone or in combination of two or more.
 本発明の光硬化性樹脂組成物には、熱硬化成分を加えることができる。熱硬化成分を加えることにより耐熱性が向上することが確認された。本発明に用いられる熱硬化成分としては、メラミン樹脂、ベンゾグアナミン樹脂、メラミン誘導体、ベンゾグアナミン誘導体等のアミノ樹脂、ブロックイソシアネート化合物、シクロカーボネート化合物、多官能エポキシ化合物、多官能オキセタン化合物、エピスルフィド樹脂、ビスマレイミド、カルボジイミド樹脂等の公知の熱硬化性樹脂が使用できる。特に好ましいのは、分子中に複数の環状エーテル基及び/又は環状チオエーテル基(以下、環状(チオ)エーテル基と略す)を有する熱硬化成分である。 A thermosetting component can be added to the photocurable resin composition of the present invention. It was confirmed that heat resistance was improved by adding a thermosetting component. Examples of thermosetting components used in the present invention include amino resins such as melamine resins, benzoguanamine resins, melamine derivatives, benzoguanamine derivatives, blocked isocyanate compounds, cyclocarbonate compounds, polyfunctional epoxy compounds, polyfunctional oxetane compounds, episulfide resins, bismaleimides. Well-known thermosetting resins such as carbodiimide resins can be used. Particularly preferred is a thermosetting component having a plurality of cyclic ether groups and / or cyclic thioether groups (hereinafter abbreviated as cyclic (thio) ether groups) in the molecule.
 このような分子中に複数の環状(チオ)エーテル基を有する熱硬化成分は、分子中に3、4又は5員環の環状(チオ)エーテル基のいずれか一方又は2種類の基を複数有する化合物であり、例えば、分子中に複数のエポキシ基を有する化合物、すなわち多官能エポキシ化合物、分子中に複数のオキセタニル基を有する化合物、すなわち多官能オキセタン化合物、分子中に複数のチオエーテル基を有する化合物、すなわちエピスルフィド樹脂等が挙げられる。 Such a thermosetting component having a plurality of cyclic (thio) ether groups in the molecule has either one of the three-, four- or five-membered cyclic (thio) ether groups or a plurality of two types of groups in the molecule. Compound, for example, a compound having a plurality of epoxy groups in the molecule, that is, a polyfunctional epoxy compound, a compound having a plurality of oxetanyl groups in the molecule, that is, a polyfunctional oxetane compound, a compound having a plurality of thioether groups in the molecule That is, an episulfide resin etc. are mentioned.
 前記多官能エポキシ化合物としては、ADEKA社製のアデカサイザーO-130P、アデカサイザーO-180A、アデカサイザーD-32、アデカサイザーD-55等のエポキシ化植物油;三菱化学社製のjER(登録商標)828、jER834、jER1001、jER1004、ダイセル化学工業社製のEHPE3150、DIC社製のエピクロン(登録商標)840、エピクロン850、エピクロン1050、エピクロン2055、新日鐵化学社製のエポトート(登録商標)YD-011、YD-013、YD-127、YD-128、ダウケミカル社製のD.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、BASFジャパン社のアラルダイド6071、アラルダイド6084、アラルダイドGY250、アラルダイドGY260、住友化学工業社製のスミ-エポキシESA-011、ESA-014、ELA-115、ELA-128、旭化成工業社製のA.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(何れも商品名)のビスフェノールA型エポキシ樹脂;新日鐵化学社製のYDC-1312(商品名)等のハイドロキノン型エポキシ樹脂、新日鐵化学社製のYSLV-80XY(商品名)等のビスフェノール型エポキシ樹脂、新日鐵化学社製のYSLV-120TE(商品名)等のチオエーテル型エポキシ樹脂;三菱化学社製のjERYL903、DIC社製のエピクロン152、エピクロン165、新日鐵化学社製のエポトートYDB-400、YDB-500、ダウケミカル社製のD.E.R.542、BASFジャパン社製のアラルダイド8011、住友化学工業社製のスミ-エポキシESB-400、ESB-700、旭化成工業社製のA.E.R.711、A.E.R.714等(何れも商品名)のブロム化エポキシ樹脂;三菱化学社製のjER152、jER154、ダウケミカル社製のD.E.N.431、D.E.N.438、DIC社製のエピクロンN-730、エピクロンN-770、エピクロンN-865、新日鐵化学社製のエポトートYDCN-701、YDCN-704、BASFジャパン社製のアラルダイドECN1235、アラルダイドECN1273、アラルダイドECN1299、アラルダイドXPY307、日本化薬社製のEPPN(登録商標)-201、EOCN(登録商標)-1025、EOCN-1020、EOCN-104S、RE-306、住友化学工業社製のスミ-エポキシESCN-195X、ESCN-220、旭化成工業社製のA.E.R.ECN-235、ECN-299等(何れも商品名)のノボラック型エポキシ樹脂;日本化薬社製NC-3000、NC-3100等のビフェノールノボラック型エポキシ樹脂;DIC社製のエピクロン830、三菱化学社製jER807、新日鐵化学社製のエポトートYDF-170、YDF-175、YDF-2004、BASFジャパン社製のアラルダイドXPY306等(何れも商品名)のビスフェノールF型エポキシ樹脂;新日鐵化学社製のエポトートST-2004、ST-2007、ST-3000(商品名)等の水添ビスフェノールA型エポキシ樹脂;三菱化学社製のjER604、新日鐵化学社製のエポトートYH-434、BASFジャパン社製のアラルダイドMY720、住友化学工業社製のスミ-エポキシELM-120等(何れも商品名)のグリシジルアミン型エポキシ樹脂;BASFジャパン社製のアラルダイドCY-350(商品名)等のヒダントイン型エポキシ樹脂;ダイセル化学工業社製のセロキサイド(登録商標)2021、BASFジャパン社製のアラルダイドCY175、CY179等(何れも商品名)の脂環式エポキシ樹脂;三菱化学社製のYL-933、ダウケミカル社製のT.E.N.、EPPN-501、EPPN-502等(何れも商品名)のトリヒドロキシフェニルメタン型エポキシ樹脂;三菱化学社製のYL-6056、YX-4000、YL-6121(何れも商品名)等のビキシレノール型もしくはビフェノール型エポキシ樹脂又はそれらの混合物;日本化薬社製EBPS-200、ADEKA社製EPX-30、DIC社製のEXA-1514(商品名)等のビスフェノールS型エポキシ樹脂;三菱化学社製のjER157S(商品名)等のビスフェノールAノボラック型エポキシ樹脂;三菱化学社製のjERYL-931、BASFジャパン社製のアラルダイド163等(何れも商品名)のテトラフェニロールエタン型エポキシ樹脂;BASFジャパン社製のアラルダイドPT810(商品名)、日産化学工業社製のTEPIC(登録商標)等の複素環式エポキシ樹脂;日本油脂社製ブレンマー(登録商標)DGT等のジグリシジルフタレート樹脂;新日鐵化学社製ZX-1063等のテトラグリシジルキシレノイルエタン樹脂;新日鐵化学社製ESN-190、ESN-360、DIC社製HP-4032、EXA-4750、EXA-4700等のナフタレン基含有エポキシ樹脂;DIC社製HP-7200、HP-7200H等のジシクロペンタジエン骨格を有するエポキシ樹脂;日本油脂社製CP-50S、CP-50M等のグリシジルメタアクリレート共重合系エポキシ樹脂;さらにシクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂;エポキシ変性のポリブタジエンゴム誘導体(例えばダイセル化学工業製PB-3600等)、CTBN変性エポキシ樹脂(例えば新日鐵化学社製のYR-102、YR-450等)等が挙げられるが、これらに限られるものではない。これらのエポキシ樹脂は、単独で又は2種以上を組み合わせて用いることができる。これらの中でも特にノボラック型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂、ビフェノールノボラック型エポキシ樹脂又はそれらの混合物が好ましい。 Examples of the polyfunctional epoxy compound include epoxidized vegetable oils such as Adekasizer O-130P, Adekasizer O-180A, Adekasizer D-32, and Adekasizer D-55 manufactured by ADEKA; jER (registered trademark) manufactured by Mitsubishi Chemical Corporation 828, jER834, jER1001, jER1004, EHPE3150 manufactured by Daicel Chemical Industries, Epicron (registered trademark) 840 manufactured by DIC, Epicron 850, Epicron 1050, Epicron 2055, Epotot (registered trademark) YD manufactured by Nippon Steel Chemical Co., Ltd. -011, YD-013, YD-127, YD-128, D.C. E. R. 317, D.E. E. R. 331, D.D. E. R. 661, D.D. E. R. 664, BASF Japan Araldide 6071, Araldide 6084, Araldide GY250, Araldide GY260, Sumitomo Chemical Co., Ltd. Sumi-Epoxy ESA-011, ESA-014, ELA-115, ELA-128, Asahi Kasei Kogyo Co., Ltd. E. R. 330, A.I. E. R. 331, A.I. E. R. 661, A.I. E. R. Bisphenol A type epoxy resin such as 664 (all trade names); Hydroquinone type epoxy resin such as YDC-1312 (trade name) manufactured by Nippon Steel Chemical Co., Ltd. YSLV-80XY (trade name) manufactured by Nippon Steel Chemical Co., Ltd. Bisphenol type epoxy resins such as YSLV-120TE (trade name) manufactured by Nippon Steel Chemical Co., Ltd .; jERYL903 manufactured by Mitsubishi Chemical Corporation, Epicron 152, Epicron 165 manufactured by DIC, Nippon Steel Chemical Co., Ltd. Epototo YDB-400, YDB-500 manufactured by Dow Chemical Co., Ltd. E. R. 542, Araldide 8011 manufactured by BASF Japan, Sumi-epoxy ESB-400, ESB-700 manufactured by Sumitomo Chemical Co., Ltd. E. R. 711, A.I. E. R. Brominated epoxy resins such as 714 (both trade names); jER152 and jER154 manufactured by Mitsubishi Chemical Corporation, and D.C. E. N. 431, D.D. E. N. 438, Epicron N-730, Epicron N-770, Epicron N-865 manufactured by DIC, Epototo YDCN-701, YDCN-704 manufactured by Nippon Steel Chemical Co., Ltd., Araldide ECN1235, Araldide ECN1273, Araldide ECN1299 manufactured by BASF Japan , Araldide XPY307, Nippon Kayaku Co., Ltd. EPPN (registered trademark) -201, EOCN (registered trademark) -1025, EOCN-1020, EOCN-104S, RE-306, Sumitomo Chemical Co., Ltd. Sumi-epoxy ESCN-195X ESCN-220, manufactured by Asahi Kasei Kogyo Co., Ltd. E. R. Novolak type epoxy resins such as ECN-235 and ECN-299 (both trade names); biphenol novolak type epoxy resins such as NC-3000 and NC-3100 manufactured by Nippon Kayaku; Epicron 830 manufactured by DIC, Mitsubishi Chemical JER807 manufactured by Nippon Steel Chemical Co., Ltd., Epotot YDF-170, YDF-175, YDF-2004 manufactured by Nippon Steel Chemical Co., Ltd., Araldide XPY306 manufactured by BASF Japan Co., Ltd. (all trade names); manufactured by Nippon Steel Chemical Co., Ltd. Hydrogenated bisphenol A type epoxy resin such as Epototo ST-2004, ST-2007, ST-3000 (trade name), etc .; jER604 manufactured by Mitsubishi Chemical Corporation, Epototo YH-434 manufactured by Nippon Steel Chemical Co., Ltd., manufactured by BASF Japan Araldide MY720 from Sumitomo Chemical Co., Ltd. 20 etc. (all trade names) glycidylamine type epoxy resins; Hydantoin type epoxy resins such as Araldide CY-350 (trade name) manufactured by BASF Japan; Celoxide (registered trademark) 2021 manufactured by Daicel Chemical Industries, BASF Japan Alicyclic epoxy resins such as Araldide CY175, CY179, etc. (both are trade names) manufactured by Mitsubishi Chemical Corporation; YL-933 manufactured by Mitsubishi Chemical Corporation; E. N. , EPPN-501, EPPN-502, etc. (all trade names) trihydroxyphenylmethane type epoxy resin; Mitsubishi Chemical Corporation YL-6056, YX-4000, YL-6121 (all trade names), etc. Type or biphenol type epoxy resin or a mixture thereof; Nippon Kayaku EBPS-200, ADEKA EPX-30, DIC EXA-1514 (trade name), etc .; bisphenol S type epoxy resin; Bisphenol A novolac type epoxy resin such as jER157S (trade name); tetraphenylolethane type epoxy resin such as jERYL-931 manufactured by Mitsubishi Chemical Corporation, Araldide 163 manufactured by BASF Japan Co., Ltd. (all trade names); BASF Japan Araldide PT810 (trade name) manufactured by Nissan Chemical Industries Heterocyclic epoxy resins such as TEPIC (registered trademark) manufactured by Nihon Yushi Co., Ltd. Diglycidyl phthalate resins such as Blemmer (registered trademark) DGT manufactured by Nippon Oil &Fats; Tetraglycidyl xylenoyl ethane such as ZX-1063 manufactured by Nippon Steel Chemical Co., Ltd. Resins; Naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, DIC Corporation HP-4032, EXA-4750, EXA-4700; DIC Corporation HP-7200, HP-7200H, etc. Epoxy resin having a dicyclopentadiene skeleton; Epoxy resin copolymerized with glycidyl methacrylate such as CP-50S and CP-50M manufactured by NOF Corporation; Copolymer epoxy resin of cyclohexylmaleimide and glycidyl methacrylate; Epoxy-modified polybutadiene rubber derivative (For example, manufactured by Daicel Chemical Industries B-3600, etc.), CTBN modified epoxy resin (e.g., Nippon Steel Chemical Co. YR-102, YR-450, etc.) and others as mentioned, is not limited thereto. These epoxy resins can be used alone or in combination of two or more. Among these, a novolak type epoxy resin, a bixylenol type epoxy resin, a biphenol type epoxy resin, a biphenol novolak type epoxy resin or a mixture thereof is particularly preferable.
 多官能オキセタン化合物としては、例えば、ビス[(3-メチル-3-オキセタニルメトキシ)メチル]エーテル、ビス[(3-エチル-3-オキセタニルメトキシ)メチル]エーテル、1,4-ビス[(3-メチル-3-オキセタニルメトキシ)メチル]ベンゼン、1,4-ビス[(3-エチル-3-オキセタニルメトキシ)メチル]ベンゼン、(3-メチル-3-オキセタニル)メチルアクリレート、(3-エチル-3-オキセタニル)メチルアクリレート、(3-メチル-3-オキセタニル)メチルメタクリレート、(3-エチル-3-オキセタニル)メチルメタクリレートやそれらのオリゴマー又は共重合体等の多官能オキセタン類の他、オキセタンアルコールとノボラック樹脂、ポリ(p-ヒドロキシスチレン)、カルド型ビスフェノール類、カリックスアレーン類、カリックスレゾルシンアレーン類、又はシルセスキオキサン等の水酸基を有する樹脂とのエーテル化物等が挙げられる。その他、オキセタン環を有する不飽和モノマーとアルキル(メタ)アクリレートとの共重合体等も挙げられる。 Examples of the polyfunctional oxetane compound include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4-bis [(3- Methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3-ethyl-3- In addition to polyfunctional oxetanes such as oxetanyl) methyl acrylate, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate and oligomers or copolymers thereof, oxetane alcohol and novolak resin , Poly (p-hydroxystyrene), cardo type bis Phenol ethers, calixarenes, calix resorcin arenes or etherified products such as the resin having a hydroxyl group such as silsesquioxane and the like. In addition, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth) acrylate is also included.
 分子中に複数の環状チオエーテル基を有する化合物としては、例えば、三菱化学社製のビスフェノールA型エピスルフィド樹脂 YL7000等が挙げられる。また、同様の合成方法を用いて、ノボラック型エポキシ樹脂のエポキシ基の酸素原子を硫黄原子に置き換えたエピスルフィド樹脂なども用いることができる。 Examples of the compound having a plurality of cyclic thioether groups in the molecule include bisphenol A type episulfide resin YL7000 manufactured by Mitsubishi Chemical Corporation. Moreover, episulfide resin etc. which replaced the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom using the same synthesis method can be used.
 このような分子中に複数の環状(チオ)エーテル基を有する熱硬化成分の配合量は、カルボキシル基含有オリゴマーのカルボキシル基1当量に対して、0.6~2.5当量が好ましい。配合量が0.6未満である場合、ソルダーレジスト膜にカルボキシル基が残り、耐熱性、耐アルカリ性、電気絶縁性等が低下する。一方、2.5当量を超える場合、低分子量の環状(チオ)エーテル基が乾燥塗膜に残存することにより、塗膜の強度等が低下する。より好ましくは、0.8~2.0当量である。 The blending amount of the thermosetting component having a plurality of cyclic (thio) ether groups in the molecule is preferably 0.6 to 2.5 equivalents relative to 1 equivalent of the carboxyl group of the carboxyl group-containing oligomer. When the blending amount is less than 0.6, a carboxyl group remains in the solder resist film, and heat resistance, alkali resistance, electrical insulation and the like are lowered. On the other hand, when the amount exceeds 2.5 equivalents, the low molecular weight cyclic (thio) ether group remains in the dry coating film, thereby reducing the strength of the coating film. More preferably, it is 0.8 to 2.0 equivalents.
 分子中に複数の環状(チオ)エーテル基を有する熱硬化成分を使用する場合、熱硬化触媒を含有することが好ましい。そのような熱硬化触媒としては、例えば、イミダゾール、2-メチルイミダゾール、2-エチルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、4-フェニルイミダゾール、1-シアノエチル-2-フェニルイミダゾール、1-(2-シアノエチル)-2-エチル-4-メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4-(ジメチルアミノ)-N,N-ジメチルベンジルアミン、4-メトキシ-N,N-ジメチルベンジルアミン、4-メチル-N,N-ジメチルベンジルアミン等のアミン化合物、アジピン酸ジヒドラジド、セバシン酸ジヒドラジド等のヒドラジン化合物;トリフェニルホスフィン等のリン化合物等が挙げられる。また、市販されているものとしては、例えば四国化成工業社製の2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ社製のU-CAT(登録商標)3503N、U-CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U-CATSA102、U-CAT5002(いずれも二環式アミジン化合物及びその塩)等が挙げられる。特に、これらに限られるものではなく、エポキシ樹脂やオキセタン化合物の熱硬化触媒、もしくはエポキシ基及び/又はオキセタニル基とカルボキシル基の反応を促進するものであればよく、単独で又は2種以上を混合して使用してもかまわない。また、グアナミン、アセトグアナミン、ベンゾグアナミン、メラミン、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン、2-ビニル-2,4-ジアミノ-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン・イソシアヌル酸付加物、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン・イソシアヌル酸付加物等のS-トリアジン誘導体を用いることもでき、好ましくはこれら密着性付与剤としても機能する化合物を熱硬化触媒と併用する。 When using a thermosetting component having a plurality of cyclic (thio) ether groups in the molecule, it is preferable to contain a thermosetting catalyst. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole. Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine. Examples of commercially available products include 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Kogyo Co., Ltd. and U-CAT (registered by San Apro). Trademarks) 3503N, U-CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof), and the like. In particular, it is not limited to these, as long as it is a thermosetting catalyst for epoxy resins or oxetane compounds, or a catalyst that promotes the reaction of epoxy groups and / or oxetanyl groups with carboxyl groups, either alone or in combination of two or more. Can be used. Guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diamino S-triazine derivatives such as -S-triazine / isocyanuric acid adducts and 2,4-diamino-6-methacryloyloxyethyl-S-triazine / isocyanuric acid adducts can also be used. A compound that also functions in combination with a thermosetting catalyst.
 これら熱硬化触媒の配合量は、通常の量的割合で充分であり、例えばカルボキシル基含有オリゴマー又は分子中に複数の環状(チオ)エーテル基を有する熱硬化成分100質量部に対して、好ましくは0.1~20質量部、より好ましくは0.5~15.0質量部である。 The blending amount of these thermosetting catalysts is sufficient in the usual quantitative ratio, for example, preferably 100 parts by mass of the thermosetting component having a carboxyl group-containing oligomer or a plurality of cyclic (thio) ether groups in the molecule. The amount is 0.1 to 20 parts by mass, more preferably 0.5 to 15.0 parts by mass.
 さらに、本発明の光硬化性樹脂組成物には、着色剤を配合することができる。着色剤としては、赤、青、緑、黄などの公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。但し、環境負荷低減並びに人体への影響の観点からハロゲンを含有しないことが好ましい。 Furthermore, a colorant can be blended in the photocurable resin composition of the present invention. As the colorant, known colorants such as red, blue, green and yellow can be used, and any of pigments, dyes and pigments may be used. However, it is preferable not to contain a halogen from the viewpoint of reducing the environmental burden and affecting the human body.
 赤色着色剤:
 赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系などがあり、具体的には以下のようなカラ-インデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものが挙げられる。
 モノアゾ系:Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269。
 ジスアゾ系:Pigment Red 37, 38, 41。
 モノアゾレーキ系:Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53:2, 57:1, 58:4, 63:1, 63:2, 64:1,68。
 ベンズイミダゾロン系:Pigment Red 171、Pigment Red 175、Pigment Red 176、Pigment Red 185、Pigment Red 208。
 ぺリレン系:Solvent Red 135、Solvent Red 179、Pigment Red 123、Pigment Red 149、Pigment Red 166、Pigment Red 178、Pigment Red 179、Pigment Red 190、Pigment Red 194、Pigment Red 224。
 ジケトピロロピロール系:Pigment Red 254、Pigment Red 255、Pigment Red 264、Pigment Red 270、Pigment Red 272。
 縮合アゾ系:Pigment Red 220、Pigment Red 144、Pigment Red 166、Pigment Red 214、Pigment Red 220、Pigment Red 221、Pigment Red 242。
 アンスラキノン系:Pigment Red 168、Pigment Red 177、Pigment Red 216、Solvent Red 149、Solvent Red 150、Solvent Red 52、Solvent Red 207。
 キナクリドン系:Pigment Red 122、Pigment Red 202、Pigment Red 206、Pigment Red 207、Pigment Red 209。
Red colorant:
Examples of the red colorant include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. -Indexes (CI; issued by The Society of Dyers and Colorists) are listed.
Monoazo: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
Disazo: Pigment Red 37, 38, 41.
Monoazo lakes: Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1,68.
Benzimidazolone series: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
Perylene series: Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
Diketopyrrolopyrrole series: Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
Condensed azo series: Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
Anthraquinone series: Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
Kinacridone series: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
 青色着色剤:
 青色着色剤としてはフタロシアニン系、アントラキノン系があり、顔料系はピグメント(Pigment)に分類されている化合物、具体的には、下記のようなものを挙げることができる:Pigment Blue 15、Pigment Blue 15:1、Pigment Blue 15:2、Pigment Blue 15:3、Pigment Blue 15:4、Pigment Blue 15:6、Pigment Blue 16、Pigment Blue 60。
 染料系としては、Solvent Blue 35、Solvent Blue 63、Solvent Blue 68、Solvent Blue 70、Solvent Blue 83、Solvent Blue 87、Solvent Blue 94、Solvent Blue 97、Solvent Blue 122、Solvent Blue 136、Solvent Blue 67、Solvent Blue 70等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
Blue colorant:
Blue colorants include phthalocyanine-based and anthraquinone-based pigments, and pigment-based compounds such as Pigment Blue 15 and Pigment Blue 15 are listed below. : 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4, Pigment Blue 15: 6, Pigment Blue 16, and Pigment Blue 60.
The dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
 緑色着色剤:
 緑色着色剤としては、同様にフタロシアニン系、アントラキノン系、ペリレン系があり、具体的にはPigment Green 7、Pigment Green 36、Solvent Green 3、Solvent Green 5、Solvent Green 20、Solvent Green 28等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
Green colorant:
Similarly, green colorants include phthalocyanine, anthraquinone, and perylene. Specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. are used. be able to. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
 黄色着色剤:
 黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系等があり、具体的には以下のものが挙げられる。
 アントラキノン系:Solvent Yellow 163、Pigment Yellow 24、Pigment Yellow 108、Pigment Yellow 193、Pigment Yellow 147、Pigment Yellow 199、Pigment Yellow 202。
 イソインドリノン系:Pigment Yellow 110、Pigment Yellow 109、Pigment Yellow 139、Pigment Yellow 179、Pigment Yellow 185。
 縮合アゾ系:Pigment Yellow 93、Pigment Yellow 94、Pigment Yellow 95、Pigment Yellow 128、Pigment Yellow 155、Pigment Yellow 166、Pigment Yellow 180。
 ベンズイミダゾロン系:Pigment Yellow 120、Pigment Yellow 151、Pigment Yellow 154、Pigment Yellow 156、Pigment Yellow 175、Pigment Yellow 181。
 モノアゾ系:Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62:1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116, 167, 168, 169, 182, 183。
 ジスアゾ系:Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198。
Yellow colorant:
Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
Anthraquinone series: Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
Isoindolinone type: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
Condensed azo series: Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
Benzimidazolone series: Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.
Monoazo: Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
Disazo: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
 その他、色調を調整する目的で紫、オレンジ、茶色、黒などの着色剤を加えてもよい。
 具体的に例示すれば、Pigment Violet 19、23、29、32、36、38、42、Solvent Violet 13、36、C.I.ピグメントオレンジ1、C.I.ピグメントオレンジ5、C.I.ピグメントオレンジ13、C.I.ピグメントオレンジ14、C.I.ピグメントオレンジ16、C.I.ピグメントオレンジ17、C.I.ピグメントオレンジ24、C.I.ピグメントオレンジ34、C.I.ピグメントオレンジ36、C.I.ピグメントオレンジ38、C.I.ピグメントオレンジ40、C.I.ピグメントオレンジ43、C.I.ピグメントオレンジ46、C.I.ピグメントオレンジ49、C.I.ピグメントオレンジ51、C.I.ピグメントオレンジ61、C.I.ピグメントオレンジ63、C.I.ピグメントオレンジ64、C.I.ピグメントオレンジ71、C.I.ピグメントオレンジ73、C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラック1、C.I.ピグメントブラック7等がある。
In addition, a colorant such as purple, orange, brown, or black may be added for the purpose of adjusting the color tone.
Specifically, Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Black 1, CI Pigment Black And the like.
 前記したような着色剤は適宜配合できるが、カルボキシル基含有オリゴマー又は熱硬化性成分100質量部に対して、10質量部以下とすることが好ましい。より好ましくは0.1~5質量部である。 Although the colorant as described above can be appropriately blended, it is preferably 10 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing oligomer or thermosetting component. More preferably, it is 0.1 to 5 parts by mass.
 本発明の光硬化性樹脂組成物には、分子中に複数のエチレン性不飽和基を有する化合物を配合することができる。本発明の光硬化性樹脂組成物に用いられる分子中に複数のエチレン性不飽和基を有する化合物は、活性エネルギー線照射により、光硬化して、本発明の感光性化合物や前記カルボキシル基含有感光性オリゴマーを、アルカリ水溶液に不溶化、又は不溶化を助けるものである。このような化合物としては、慣用公知のポリエステル(メタ)アクリレート、ポリエーテル(メタ)アクリレート、ウレタン(メタ)アクリレート、カーボネート(メタ)アクリレート、エポキシ(メタ)アクリレート、ウレタン(メタ)アクリレートなどが使用でき、具体的には、2-ヒドロキシエチルアクリレート、2-ヒドロキシプロピルアクリレートなどのヒドロキシアルキルアクリレート類;エチレングリコール、メトキシテトラエチレングリコール、ポリエチレングリコール、プロピレングリコールなどのグリコールのジアクリレート類;N,N-ジメチルアクリルアミド、N-メチロールアクリルアミド、N,N-ジメチルアミノプロピルアクリルアミドなどのアクリルアミド類;N,N-ジメチルアミノエチルアクリレート、N,N-ジメチルアミノプロピルアクリレートなどのアミノアルキルアクリレート類;ヘキサンジオール、トリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリス-ヒドロキシエチルイソシアヌレートなどの多価アルコール又はこれらのエチレオキサイド付加物、プロピレンオキサイド付加物、もしくはε-カプロラクトン付加物などの多価アクリレート類;フェノキシアクリレート、ビスフェノールAジアクリレート、及びこれらのフェノール類のエチレンオキサイド付加物もしくはプロピレンオキサイド付加物などの多価アクリレート類;グリセリンジグリシジルエーテル、グリセリントリグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、トリグリシジルイソシアヌレートなどのグリシジルエーテルの多価アクリレート類;その他、ポリエーテルポリオール、ポリカーボネートジオール、水酸基末端ポリブタジエン、ポリエステルポリオールなどのポリオールを直接アクリレート化、もしくは、ジイソシアネートを介してウレタンアクリレート化したアクリレート類及びメラミンアクリレート、及び/又は上記アクリレートに対応する各メタクリレート類などが挙げられる。 In the photocurable resin composition of the present invention, a compound having a plurality of ethylenically unsaturated groups in the molecule can be blended. The compound having a plurality of ethylenically unsaturated groups in the molecule used in the photocurable resin composition of the present invention is photocured by irradiation with active energy rays, and the photosensitive compound of the present invention or the carboxyl group-containing photosensitivity. The insoluble oligomer is insolubilized in the aqueous alkali solution or assists insolubilization. As such a compound, conventionally known polyester (meth) acrylate, polyether (meth) acrylate, urethane (meth) acrylate, carbonate (meth) acrylate, epoxy (meth) acrylate, urethane (meth) acrylate and the like can be used. Specifically, hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; glycol diacrylates such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol and propylene glycol; N, N-dimethyl Acrylamides such as acrylamide, N-methylolacrylamide, N, N-dimethylaminopropylacrylamide; N, N-dimethylaminoethyl acrylate Aminoalkyl acrylates such as N, N-dimethylaminopropyl acrylate; polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethylisocyanurate, or their ethylene oxide adducts, propylene oxide Polyvalent acrylates such as adducts or ε-caprolactone adducts; polyvalent acrylates such as phenoxy acrylate, bisphenol A diacrylate, and ethylene oxide adducts or propylene oxide adducts of these phenols; glycerin diglycidyl ether Glycerin triglycidyl ether, trimethylolpropane triglycidyl ether, triglycidyl isocyanurate, etc. Polyvalent acrylates of sidyl ethers; other acrylates and melamine acrylates obtained by directly acrylated polyols such as polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadienes, polyester polyols, or urethane acrylates via diisocyanates, and / or Examples include methacrylates corresponding to the acrylate.
 さらに、クレゾールノボラック型エポキシ樹脂等の多官能エポキシ樹脂に、アクリル酸を反応させたエポキシアクリレート樹脂や、さらにそのエポキシアクリレート樹脂の水酸基に、ペンタエリスリトールトリアクリレート等のヒドロキシアクリレートとイソホロンジイソシアネート等のジイソシアネートのハーフウレタン化合物を反応させたエポキシウレタンアクリレート化合物等が挙げられる。このようなエポキシアクリレート系樹脂は、塗膜の指触乾燥性を低下させることなく、光硬化性を向上させることができる。 Furthermore, an epoxy acrylate resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac type epoxy resin, and further a hydroxy acrylate such as pentaerythritol triacrylate and a diisocyanate such as isophorone diisocyanate on the hydroxyl group of the epoxy acrylate resin. The epoxy urethane acrylate compound etc. which made the half urethane compound react are mentioned. Such an epoxy acrylate resin can improve the photocurability without deteriorating the touch drying property of the coating film.
 このような複数のエチレン性不飽和基を有する化合物は、1種を単独で又は2種以上を組み合わせて用いることができる。特に1分子中に4個から6個のエチレン性不飽和基を有する化合物が光反応性と解像性の観点から好ましく、さらに1分子中に2個のエチレン性不飽和基を有する化合物を用いると、硬化物の線膨張係数が低下し、冷熱サイクル試験時におけるクラックの発生が低減されることが見出されたことから好ましい。 Such compounds having a plurality of ethylenically unsaturated groups can be used singly or in combination of two or more. In particular, a compound having 4 to 6 ethylenically unsaturated groups in one molecule is preferable from the viewpoint of photoreactivity and resolution, and a compound having two ethylenically unsaturated groups in one molecule is used. And, it is preferable that the linear expansion coefficient of the cured product is lowered, and it has been found that the occurrence of cracks during the thermal cycle test is reduced.
 このような分子中に複数のエチレン性不飽和基を有する化合物の配合量は、カルボキシル基含有オリゴマー100質量部に対して、5~100質量部が好ましい。配合量が、5質量部未満の場合、光硬化性が低下し、活性エネルギー線照射後のアルカリ現像により、パターン形成が困難となる。一方、100質量部を超えた場合、希アルカリ水溶液に対する溶解性が低下して、塗膜が脆くなる。より好ましくは、1~70質量部である。 The compounding amount of the compound having a plurality of ethylenically unsaturated groups in the molecule is preferably 5 to 100 parts by mass with respect to 100 parts by mass of the carboxyl group-containing oligomer. When the blending amount is less than 5 parts by mass, photocurability is lowered, and pattern formation becomes difficult by alkali development after irradiation with active energy rays. On the other hand, when it exceeds 100 mass parts, the solubility with respect to dilute alkali aqueous solution falls, and a coating film becomes weak. More preferably, it is 1 to 70 parts by mass.
 さらに、本発明の光硬化性樹脂組成物は、上記カルボキシル基含有オリゴマーの合成や組成物の調製のため、又は基板やキャリアフィルムに塗布するための粘度調整のため、有機溶剤を使用することができる。このような有機溶剤は、単独で又は2種以上の混合物として用いられる。 Furthermore, the photocurable resin composition of the present invention may use an organic solvent for the synthesis of the carboxyl group-containing oligomer and the preparation of the composition, or for adjusting the viscosity for application to a substrate or a carrier film. it can. Such organic solvents are used alone or as a mixture of two or more.
 本発明の光硬化性樹脂組成物には、酸化を防ぐために(1)発生したラジカルを無効化するようなラジカル補足剤又は/及び(2)発生した過酸化物を無害な物質に分解し、新たなラジカルが発生しないようにする過酸化物分解剤等の酸化防止剤を添加することができる。 In the photocurable resin composition of the present invention, in order to prevent oxidation, (1) a radical scavenger that invalidates the generated radical or / and (2) the generated peroxide is decomposed into a harmless substance, Antioxidants such as peroxide decomposers that prevent the generation of new radicals can be added.
 さらに本発明の光硬化性樹脂組成物には、酸化防止剤の他に、紫外線吸収剤を使用することができる。
 このような紫外線吸収剤としては、ベンゾフェノン誘導体、ベンゾエート誘導体、ベンゾトリアゾール誘導体、トリアジン誘導体、ベンゾチアゾール誘導体、シンナメート誘導体、アントラニレート誘導体、ジベンゾイルメタン誘導体等が挙げられる。
Furthermore, an ultraviolet absorber can be used in the photocurable resin composition of the present invention in addition to the antioxidant.
Examples of such ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, anthranilate derivatives, dibenzoylmethane derivatives, and the like.
 本発明の光硬化性樹脂組成物は、さらに必要に応じて、公知の熱重合禁止剤、微粉シリカ、有機ベントナイト、モンモリロナイト等の公知の増粘剤、シリコーン系、フッ素系、高分子系等の消泡剤及び/又はレベリング剤、イミダゾール系、チアゾール系、トリアゾール系等のシランカップリング剤、酸化防止剤、防錆剤等のような公知の添加剤類を配合することができる。 The photo-curable resin composition of the present invention may further include a known thickener such as a known thermal polymerization inhibitor, fine silica, organic bentonite, and montmorillonite, a silicone-based, a fluorine-based, a polymer-based, etc., if necessary. Known additives such as antifoaming agents and / or leveling agents, imidazole-based, thiazole-based, triazole-based silane coupling agents, antioxidants, rust inhibitors, and the like can be blended.
 本発明の光硬化性樹脂組成物には、層間の密着性、又は形成される樹脂絶縁層と基材との密着性を向上させるために、密着促進剤を用いることができる。このような密着促進剤例としては、例えば、ベンゾイミダゾール、ベンゾオキサゾール、ベンゾチアゾール、3-モルホリノメチル-1-フェニル-トリアゾール-2-チオン、5-アミノ-3-モルホリノメチル-チアゾール-2-チオン、トリアゾール、テトラゾール、ベンゾトリアゾール、カルボキシベンゾトリアゾール、アミノ基含有ベンゾトリアゾール、シランカップリング剤等がある。 In the photocurable resin composition of the present invention, an adhesion promoter can be used in order to improve the adhesion between layers or the adhesion between the formed resin insulation layer and the substrate. Examples of such adhesion promoters include, for example, benzimidazole, benzoxazole, benzothiazole, 3-morpholinomethyl-1-phenyl-triazole-2-thione, 5-amino-3-morpholinomethyl-thiazole-2-thione. , Triazole, tetrazole, benzotriazole, carboxybenzotriazole, amino group-containing benzotriazole, silane coupling agent and the like.
 このように構成される本発明の光硬化性樹脂組成物は、所定の組成に調製した後、例えば、有機溶剤で塗布方法に適した粘度に調整し、基材上に、ディップコート法、フローコート法、ロールコート法、バーコーター法、スクリーン印刷法、カーテンコート法等の方法により塗布する。
 そして、約60~100℃の温度で、組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させ、タックフリーの塗膜(樹脂絶縁層)を形成する。このとき、揮発乾燥は、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブン等(蒸気による空気加熱方式の熱源を備えたものを用いて乾燥機内の熱風を向流接触させる方法及びノズルより支持体に吹き付ける方式)を用いて行うことができる。
After the photocurable resin composition of the present invention configured as described above is prepared to a predetermined composition, it is adjusted to a viscosity suitable for a coating method with an organic solvent, for example, on a substrate, a dip coating method, a flow The coating method is a coating method, a roll coating method, a bar coater method, a screen printing method, a curtain coating method, or the like.
Then, the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C. to form a tack-free coating film (resin insulating layer). At this time, the volatile drying is performed by using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (using a method having a heat source of an air heating method using steam in a countercurrent contact with hot air in the dryer) A method of spraying on a support).
 また、光硬化性樹脂組成物によりドライフィルムを形成し、これを基材上に張り合わせることにより、樹脂絶縁層を形成してもよい。
 ドライフィルムは、例えばポリエチレンテレフタレート等のキャリアフィルムと、ソルダーレジスト層などの樹脂絶縁層と、必要に応じて用いられる剥離可能なカバーフィルムとが、この順序に積層された構造を有するものである。
Moreover, you may form a resin insulating layer by forming a dry film with a photocurable resin composition and bonding this on a base material.
The dry film has, for example, a structure in which a carrier film such as polyethylene terephthalate, a resin insulating layer such as a solder resist layer, and a peelable cover film used as necessary are laminated in this order.
 樹脂絶縁層は、光硬化性樹脂組成物をキャリアフィルム又はカバーフィルムに塗布・乾燥して得られる層である。このような樹脂絶縁層は、本発明の光硬化性樹脂組成物をブレードコーター、リップコーター、コンマコーター、フィルムコーター等で、キャリアフィルムに、10~150μmの厚さで均一に塗布し、乾燥して形成される。そして、さらに必要に応じてカバーフィルムを積層することにより、ドライフィルムが形成される。このとき、光硬化性樹脂組成物をカバーフィルムに塗布、乾燥した後、キャリアフィルムを積層してもよい。 The resin insulation layer is a layer obtained by applying and drying a photocurable resin composition on a carrier film or a cover film. For such a resin insulating layer, the photocurable resin composition of the present invention is uniformly applied to a carrier film with a thickness of 10 to 150 μm by a blade coater, a lip coater, a comma coater, a film coater, etc., and dried. Formed. And a dry film is formed by laminating | stacking a cover film further as needed. At this time, the carrier film may be laminated after the photocurable resin composition is applied to the cover film and dried.
 キャリアフィルムとしては、例えば2~150μmの厚みのポリエステルフィルム等の熱可塑性フィルムが用いられる。
 カバーフィルムとしては、ポリエチレンフィルム、ポリプロピレンフィルム等を使用することができるが、ソルダーレジスト層との接着力が、キャリアフィルムよりも小さいものが良い。
As the carrier film, for example, a thermoplastic film such as a polyester film having a thickness of 2 to 150 μm is used.
As the cover film, a polyethylene film, a polypropylene film, or the like can be used, but a cover film having a smaller adhesive force than the solder resist layer is preferable.
 このようなドライフィルムを用いて、カバーフィルムが用いられた場合はこれを剥がした後、樹脂絶縁層と基材を重ね、ラミネーター等を用いて張り合わせることにより、基材上に樹脂絶縁層が形成される。なお、キャリアフィルムは、後述する露光の前又は後に剥離すればよい。 If such a dry film is used and the cover film is used, after peeling off the cover film, the resin insulation layer and the base material are stacked and bonded together using a laminator or the like, so that the resin insulation layer is formed on the base material. It is formed. In addition, what is necessary is just to peel a carrier film before or after the exposure mentioned later.
 このとき、塗膜が形成され、あるいはドライフィルムを張り合わせる基材としては、紙フェノール、紙エポキシ、ガラス布エポキシ、ガラスポリイミド、ガラス布/不繊布エポキシ、ガラス布/紙エポキシ、合成繊維エポキシ、フッ素・ポリエチレン・PPO・シアネートエステル等を用いた高周波回路用銅張積層版等の材質を用いたもので全てのグレード(FR-4等)の銅張積層版、その他ポリイミドフィルム、PETフィルム、ガラス基板、セラミック基板、ウエハ板等を挙げることができる。 At this time, as a base material on which a coating film is formed or a dry film is laminated, paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy, synthetic fiber epoxy, Made of materials such as copper clad laminates for high frequency circuits using fluorine, polyethylene, PPO, cyanate ester, etc., all grades (FR-4 etc.) copper clad laminates, other polyimide films, PET films, glass A substrate, a ceramic substrate, a wafer plate, etc. can be mentioned.
 さらに、接触式(又は非接触方式)により、パターンを形成したフォトマスクを通して、選択的に活性エネルギー線により露光もしくはレーザーダイレクト露光機により直接パターン露光する。塗膜は、露光部(活性エネルギー線により照射された部分)が硬化する。
 活性エネルギー線照射に用いられる露光機としては、直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)、メタルハライドランプを搭載した露光機、(超)高圧水銀ランプを搭載した露光機、水銀ショートアークランプを搭載した露光機、もしくは(超)高圧水銀ランプ等の紫外線ランプを使用した直接描画装置を用いることができる。
Further, the pattern is exposed by an active energy beam or directly by a laser direct exposure machine through a photomask having a pattern formed by a contact method (or non-contact method). In the coating film, the exposed portion (the portion irradiated by the active energy ray) is cured.
As an exposure machine used for active energy ray irradiation, a direct drawing device (for example, a laser direct imaging device that draws an image directly with a laser using CAD data from a computer), an exposure device equipped with a metal halide lamp, and an (ultra) high-pressure mercury lamp It is possible to use an exposure machine mounted, an exposure machine equipped with a mercury short arc lamp, or a direct drawing apparatus using an ultraviolet lamp such as a (super) high pressure mercury lamp.
 活性エネルギー線としては、最大波長が350~410nmの範囲にあるレーザー光を用いることが好ましい。最大波長をこの範囲とすることにより、光重合開始剤から効率よくラジカルを生成することができる。この範囲のレーザー光を用いていればガスレーザー、固体レーザーのいずれでもよい。また、その露光量は膜厚等によって異なるが、一般には5~500mJ/cm、好ましくは10~300mJ/cmの範囲内とすることができる。 As the active energy ray, it is preferable to use laser light having a maximum wavelength in the range of 350 to 410 nm. By setting the maximum wavelength within this range, radicals can be efficiently generated from the photopolymerization initiator. If a laser beam in this range is used, either a gas laser or a solid laser may be used. The amount of exposure varies depending on the film thickness and the like, but can generally be in the range of 5 to 500 mJ / cm 2 , preferably 10 to 300 mJ / cm 2 .
 直接描画装置としては、例えば、日本オルボテック社製、ペンタックス社製等のものを使用することができ、最大波長が350~410nmのレーザー光を発振する装置であればいずれの装置を用いてもよい。 As the direct drawing apparatus, for example, those manufactured by Nippon Orbotech, Pentax, etc. can be used, and any apparatus that oscillates laser light having a maximum wavelength of 350 to 410 nm may be used. .
 そして、このようにして露光することにより、露光部(活性エネルギー線により照射された部分)を硬化させ、未露光部を希アルカリ水溶液(例えば、0.3~3wt%炭酸ソーダ水溶液)により現像して、硬化物(パターン)が形成される。
 このとき、現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができる。また、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類等のアルカリ水溶液を用いることができる。
Then, by exposing in this way, the exposed portion (the portion irradiated with the active energy ray) is cured, and the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3 wt% sodium carbonate aqueous solution). Thus, a cured product (pattern) is formed.
At this time, as a developing method, a dipping method, a shower method, a spray method, a brush method, or the like can be used. Further, as the developer, an alkaline aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines and the like can be used.
 さらに、熱硬化成分を加えた場合、例えば約140~180℃の温度に加熱して熱硬化させることにより、カルボキシル基含有オリゴマーのカルボキシル基と、例えば分子中に複数の環状エーテル基及び/又は環状チオエーテル基を有する熱硬化成分が反応し、耐熱性、耐薬品性、耐吸湿性、密着性、電気特性等の諸特性に優れた硬化物(パターン)を形成することができる。 Further, when a thermosetting component is added, for example, by heating to a temperature of about 140 to 180 ° C. and thermosetting, the carboxyl group of the carboxyl group-containing oligomer and, for example, a plurality of cyclic ether groups and / or cyclic groups in the molecule A thermosetting component having a thioether group reacts to form a cured product (pattern) excellent in various properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical characteristics.
 このように、光硬化樹脂組成物においては、カルボキシル基含有オリゴマー、及び前記カルボキシル基含有オリゴマーよりも分子量の大きな高分子バインダー、光重合開始剤、光重合性モノマー、フィラーを含有することにより、その硬化物において、電子部品などに用いられる際に要求される耐熱性や、耐マイグレーション特性を損なうことなく冷熱サイクル耐性などの信頼性を得ることができる。そして、このような硬化物をプリント配線板などに用いることにより、高い信頼性を得ることが可能となる。 Thus, in the photocurable resin composition, by containing a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, a filler, In the cured product, it is possible to obtain reliability such as heat resistance required when used for electronic parts and the like, and heat cycle resistance without impairing migration resistance characteristics. And it becomes possible by using such hardened | cured material for a printed wiring board etc. to obtain high reliability.
 以下に実施例及び比較例を示して本発明について具体的に説明するが、本発明が下記実施例に限定されるものではないことはもとよりである。尚、以下において「部」及び「%」とあるのは、特に断りのない限り全て質量基準である。 Hereinafter, the present invention will be described in detail with reference to examples and comparative examples, but the present invention is not limited to the following examples. In the following, “parts” and “%” are based on mass unless otherwise specified.
 合成例1
 温度計、窒素導入装置兼アルキレンオキシド導入装置及び撹拌装置を備えたオートクレーブに、ノボラック型クレゾール樹脂(商品名「ショーノールCRG951」、昭和高分子(株)製、OH当量:119.4)119.4部、水酸化カリウム1.19部及びトルエン119.4部を仕込み、撹拌しつつ系内を窒素置換し、加熱昇温した。次に、プロピレンオキシド63.8部を徐々に滴下し、125~132℃、0~4.8kg/cmで16時間反応させた。その後、室温まで冷却し、この反応溶液に89%リン酸1.56部を添加混合して水酸化カリウムを中和し、不揮発分62.1%、水酸基価が182.2g/eq.であるノボラック型クレゾール樹脂のプロピレンオキシド反応溶液を得た。これは、フェノール性水酸基1当量当りアルキレンオキシドが平均1.08モル付加しているものであった。
 得られたノボラック型クレゾール樹脂のアルキレンオキシド反応溶液293.0部、アクリル酸43.2部、メタンスルホン酸11.53部、メチルハイドロキノン0.18部及びトルエン252.9部を、撹拌機、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、110℃で12時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、12.6部の水が留出した。その後、室温まで冷却し、得られた反応溶液を15%水酸化ナトリウム水溶液35.35部で中和し、次いで水洗した。その後、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート118.1部で置換しつつ留去し、ノボラック型アクリレート樹脂溶液を得た。次に、得られたノボラック型アクリレート樹脂溶液332.5部及びトリフェニルホスフィン1.22部を、撹拌器、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8部を徐々に加え、95~101℃で6時間反応させ、冷却後、取り出した。このようにして、不揮発分65%、固形物の酸価87.7mgKOH/gのカルボキシル基含有感光性オリゴマー(Mw:2650)の溶液(以下、A-1と略称する)を得た。
Synthesis example 1
A novolac-type cresol resin (trade name “Shonol CRG951”, manufactured by Showa Polymer Co., Ltd., OH equivalent: 119.4) is added to an autoclave equipped with a thermometer, a nitrogen introduction device / alkylene oxide introduction device, and a stirring device. 4 parts, 1.19 parts of potassium hydroxide and 119.4 parts of toluene were charged, the system was purged with nitrogen while stirring, and the temperature was raised. Next, 63.8 parts of propylene oxide was gradually added dropwise and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. Thereafter, the reaction solution was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to and mixed with the reaction solution to neutralize potassium hydroxide. The nonvolatile content was 62.1% and the hydroxyl value was 182.2 g / eq. A novolak-type cresol resin propylene oxide reaction solution was obtained. This was an average of 1.08 moles of alkylene oxide added per equivalent of phenolic hydroxyl group.
293.0 parts of an alkylene oxide reaction solution of the obtained novolak-type cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 part of methylhydroquinone and 252.9 parts of toluene were mixed with a stirrer and a temperature. A reactor equipped with a meter and an air blowing tube was charged, air was blown at a rate of 10 ml / min, and the reaction was carried out at 110 ° C. for 12 hours while stirring. 12.6 parts of water was distilled from the water produced by the reaction as an azeotrope with toluene. Thereafter, the reaction solution was cooled to room temperature, neutralized with 35.35 parts of a 15% aqueous sodium hydroxide solution, and then washed with water. Thereafter, toluene was distilled off while substituting 118.1 parts of diethylene glycol monoethyl ether acetate with an evaporator to obtain a novolak acrylate resin solution. Next, 332.5 parts of the obtained novolak acrylate resin solution and 1.22 parts of triphenylphosphine were charged into a reactor equipped with a stirrer, a thermometer and an air blowing tube, and air was supplied at a rate of 10 ml / min. While blowing and stirring, 60.8 parts of tetrahydrophthalic anhydride was gradually added, reacted at 95 to 101 ° C. for 6 hours, cooled and taken out. Thus, a solution (hereinafter abbreviated as A-1) of a carboxyl group-containing photosensitive oligomer (Mw: 2650) having a non-volatile content of 65% and a solid acid value of 87.7 mgKOH / g was obtained.
 合成例2
 クレゾールノボラック型エポキシ樹脂(エピクロンN-695、DIC(株)製、エポキシ当量220)330部を、ガス導入管、撹拌装置、冷却管及び温度計を備えたフラスコに入れ、カルビトールアセテート340部を加え、加熱溶解し、ハイドロキノン0.46部と、トリフェニルホスフィン1.38部を加えた。この混合物を95~105℃に加熱し、アクリル酸108部を徐々に滴下し、16時間反応させた。この反応生成物を、80~90℃まで冷却し、テトラヒドロフタル酸無水物68部を加え、8時間反応させ、冷却させた。このようにして、固形物の酸価50mgKOH/g、不揮発分60%のカルボキシル基含有感光性オリゴマー(Mw:9500)の溶液(以下、A-4と略称する)を得た。
Synthesis example 2
Put 330 parts of cresol novolac type epoxy resin (Epiclon N-695, manufactured by DIC Corporation, epoxy equivalent 220) in a flask equipped with a gas introduction tube, a stirrer, a condenser tube and a thermometer, and add 340 parts of carbitol acetate. In addition, the mixture was dissolved by heating, and 0.46 part of hydroquinone and 1.38 parts of triphenylphosphine were added. This mixture was heated to 95 to 105 ° C., 108 parts of acrylic acid was gradually added dropwise and reacted for 16 hours. The reaction product was cooled to 80 to 90 ° C., 68 parts of tetrahydrophthalic anhydride was added, reacted for 8 hours, and cooled. Thus, a solution (hereinafter abbreviated as A-4) of a carboxyl group-containing photosensitive oligomer (Mw: 9500) having a solid acid value of 50 mgKOH / g and a nonvolatile content of 60% was obtained.
 実施例1~16及び比較例1~3
 上記合成例の樹脂溶液を用い、下記表1に示す種々の成分と共に表1に示す割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、ソルダーレジスト用感光性樹脂組成物を調製した。
Examples 1 to 16 and Comparative Examples 1 to 3
Using the resin solution of the above synthesis example, blended in the proportions (parts by mass) shown in Table 1 together with various components shown in Table 1 below, premixed with a stirrer, kneaded with a three-roll mill, and used for solder resist A photosensitive resin composition was prepared.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 上記表1中の参照符号の意味は以下のとおりである。
*1 ZFR-1124(不揮発分65.0%、固形分酸価100mgKOH/g、Mw:11500、日本化薬(株)製)
*2 ZCR-1601H(不揮発分65.0%、固形分酸価100mgKOH/g、Mw:1730、日本化薬(株)製)
*3 エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]1,1-(o-アセチルオキシム)(BASFジャパン社製)
*4 ルシリンTPO(BASF社製)
*5 日本タルク(株)製SG-2000(屈折率:1.57)
*6 堺化学工業(株)製B-33(屈折率:1.64)
*7 昭和電工(株)製ハイジライトH-42M(屈折率:1.65)
*8 シリチン(板状のカオリナイトと球状のシリカの天然結合物、屈折率:1.57)
*9 (株)アドマテックス製SO-E2(屈折率:1.45)
*10 協和化学工業(株)製DHT-4A(屈折率:1.50)
*11 新日鐵化学(株)製YP-50(フェノキシ樹脂、Mw:約70,000)
*12 新日鉄化学(株)製YP-50のカルビトールアセテート溶解品(固形分30%)
*13 アルケマ(株)製 MAM-M51(3元ブロック共重合体:ポリメチルメタクリレート-ポリブチルアクリレート-ポリメチルメタクリレート、Mw:約56,000)
*14 アルケマ(株)製 MAM-M52(3元ブロック共重合体:ポリメチルメタクリレート-ポリブチルアクリレート-ポリメチルメタクリレート、Mw:約96,000)
*15 アルケマ(株)製 SBM-E41(3元ブロック共重合体:ポリスチレン-ポリブタジエン-ポリメチルメタクリレート、Mw:約42,000)
*16 Eastman Chemical社製CAP-482(セルロースアセトプロピオネート、Mw:約75,000)
*17 東洋紡績(株)製バイロン670(非晶性ポリエステル樹脂、Mn:約30,000)
*18 ビキシレノール型エポキシ樹脂(三菱化学(株)製)
*19 ビスフェノール型エポキシ樹脂(新日鐵化学(株)製)
*20 C.I.Pigment Blue 15:3
*21 C.I.Pigment Yellow 147
*22 ジペンタエリスリトールヘキサアクリレート(日本化薬(株)製)
The meanings of the reference symbols in Table 1 are as follows.
* 1 ZFR-1124 (nonvolatile content: 65.0%, solid content acid value: 100 mgKOH / g, Mw: 11500, manufactured by Nippon Kayaku Co., Ltd.)
* 2 ZCR-1601H (nonvolatile content: 65.0%, solid content acid value: 100 mgKOH / g, Mw: 1730, manufactured by Nippon Kayaku Co., Ltd.)
* 3 Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] 1,1- (o-acetyloxime) (BASF Japan)
* 4 Lucillin TPO (manufactured by BASF)
* 5 SG-2000 manufactured by Nippon Talc Co., Ltd. (refractive index: 1.57)
* 6 B-33 manufactured by Sakai Chemical Industry Co., Ltd. (refractive index: 1.64)
* 7 Showa Denko Co., Ltd. Hijilite H-42M (refractive index: 1.65)
* 8 Siritin (natural combination of plate-like kaolinite and spherical silica, refractive index: 1.57)
* 9 SO-E2 manufactured by Admatechs Co., Ltd. (refractive index: 1.45)
* 10 DHT-4A manufactured by Kyowa Chemical Industry Co., Ltd. (refractive index: 1.50)
* 11 YP-50 manufactured by Nippon Steel Chemical Co., Ltd. (phenoxy resin, Mw: approx. 70,000)
* 12 YP-50 carbitol acetate dissolved product manufactured by Nippon Steel Chemical Co., Ltd. (solid content 30%)
* 13 MAM-M51 manufactured by Arkema Co., Ltd. (ternary block copolymer: polymethyl methacrylate-polybutyl acrylate-polymethyl methacrylate, Mw: about 56,000)
* 14 MAM-M52 manufactured by Arkema Co., Ltd. (ternary block copolymer: polymethyl methacrylate-polybutyl acrylate-polymethyl methacrylate, Mw: about 96,000)
* 15 SBM-E41 manufactured by Arkema Co., Ltd. (ternary block copolymer: polystyrene-polybutadiene-polymethyl methacrylate, Mw: about 42,000)
* 16 CAP-482 (cellulose acetopropionate, Mw: about 75,000) manufactured by Eastman Chemical Co.
* 17 Byron 670 manufactured by Toyobo Co., Ltd. (amorphous polyester resin, Mn: about 30,000)
* 18 Bixylenol-type epoxy resin (Mitsubishi Chemical Corporation)
* 19 Bisphenol-type epoxy resin (manufactured by Nippon Steel Chemical Co., Ltd.)
* 20 CIPigment Blue 15: 3
* 21 CIPigment Yellow 147
* 22 Dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.)
 特性試験:
 前記実施例及び比較例の各組成物を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で30分乾燥し、室温まで放冷した。この基板に高圧水銀灯を搭載した露光装置を用いて最適露光量でソルダーレジストパターンを露光し、30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像を行い、レジストパターンを得た。この基板を、UVコンベア炉にて積算露光量1000mJ/cmの条件で紫外線照射した後、160℃で60分加熱して硬化した。得られたプリント基板(評価基板)に対して以下のように特性を評価した。
Characteristic test:
Each of the compositions of Examples and Comparative Examples was applied on the entire surface of a patterned copper foil substrate by screen printing, dried at 80 ° C. for 30 minutes, and allowed to cool to room temperature. Using this exposure apparatus equipped with a high-pressure mercury lamp on this substrate, the solder resist pattern is exposed at an optimum exposure amount, and developed with a 1 wt% sodium carbonate aqueous solution at 30 ° C. under a spray pressure of 0.2 MPa for 90 seconds. Obtained. This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes. The characteristics of the obtained printed circuit board (evaluation board) were evaluated as follows.
 <最適露光量>
 銅厚35μmの回路パターン基板をバフロール研磨後、水洗し、乾燥してから、前記実施例及び比較例の各組成物をスクリーン印刷法により全面に塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。その後、メタルハライドランプ搭載の露光装置(HMW-680-GW20)を用いてストーファーの41段ステップタブレットを介して露光し、現像(30℃、0.2MPa、1wt%NaCO水溶液)を60秒で行った際残存するステップタブレットのパターンが7段の時を最適露光量とした。
<Optimum exposure amount>
A circuit pattern substrate having a copper thickness of 35 μm was polished with buffalo, washed with water and dried, and then the compositions of the examples and comparative examples were applied to the entire surface by a screen printing method, and 30 ° C. in a hot air circulation drying oven at 80 ° C. Let dry for minutes. Thereafter, exposure is performed through a 41-step tablet of a stoker using an exposure apparatus (HMW-680-GW20) equipped with a metal halide lamp, and development (30 ° C., 0.2 MPa, 1 wt% Na 2 CO 3 aqueous solution) is performed at 60 ° C. When the pattern of the step tablet remaining when it was performed in seconds was 7 steps, the optimum exposure amount was set.
 <塗布性>
 パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、印刷状態の確認を行った。判定基準は以下のとおりである。
 ◎:パターン上にムラなくレジストインキの膜厚が保持される。
 ○:パターン上に一部ムラを生じるが、レジストインキの膜厚が保持される。
 ×:パターン上のインキが薄くなる。
<Applicability>
The entire surface of the patterned copper foil substrate was applied by screen printing, and the printed state was confirmed. The judgment criteria are as follows.
(Double-circle): The film thickness of a resist ink is hold | maintained uniformly on a pattern.
○: Some unevenness occurs on the pattern, but the film thickness of the resist ink is maintained.
X: The ink on a pattern becomes thin.
 <無電解金めっき耐性>
 市販品の無電解ニッケルめっき浴及び無電解金めっき浴を用いて、ニッケル0.5μm、金0.03μmの条件でめっきを行い、テープピーリングにより、レジスト層の剥がれの有無やめっき液のしみ込みの有無を評価した後、テープピーリングによりレジスト層の剥がれの有無を評価した。判定基準は以下のとおりである。
 ◎:染み込み、剥がれが見られない。
 ○:めっき後に少し染み込みが確認されるが、テープピール後は剥がれない。
 △:めっき後にほんの僅かしみ込みが見られ、テープピール後に剥がれも見られる。
 ×:めっき後に剥がれがある。
<Electroless gold plating resistance>
Using a commercially available electroless nickel plating bath and electroless gold plating bath, plating is performed under the conditions of nickel 0.5 μm and gold 0.03 μm, and the presence of peeling of the resist layer and the penetration of the plating solution by tape peeling Then, the presence or absence of the resist layer was evaluated by tape peeling. The judgment criteria are as follows.
A: No soaking or peeling is observed.
○: Slight penetration is confirmed after plating, but does not peel off after tape peeling.
Δ: Slight penetration after plating and peeling after tape peel.
X: There is peeling after plating.
 <PCT耐性>
 121℃、2気圧、湿度100%の高圧高温高湿槽に168時間入れ、硬化塗膜の状態変化を、以下の評価基準で評価した。
 ◎:顕著な膨れ、変色なし。
 ○:微小な膨れ有り、変色なし。
 ×:顕著な膨れ、変色有り。
<PCT resistance>
It was placed in a high-pressure, high-temperature and high-humidity tank at 121 ° C., 2 atm and 100% humidity for 168 hours, and the change in state of the cured coating film was evaluated according to the following evaluation criteria.
A: No noticeable swelling or discoloration.
○: There is a minute bulge and no discoloration.
X: Remarkable swelling and discoloration.
 <クラック耐性>
 -55℃で30分間、125℃で30分間を1サイクルとして熱履歴を加え、1000サイクル経過後、光学顕微鏡で観察した。判定基準は以下のとおりである。
 ◎:クラック発生なし。
 ○:クラック発生あり。
 ×:クラック発生著しい。
<Crack resistance>
Thermal history was added for 30 minutes at −55 ° C. and 30 minutes at 125 ° C., and after 1000 cycles, the samples were observed with an optical microscope. The judgment criteria are as follows.
(Double-circle): There is no crack generation.
○: Cracks are generated.
X: Crack generation is remarkable.
 <解像性>
 実施例及び比較例の各光硬化性熱硬化性樹脂組成物を、めっき銅が形成された基板にスクリーン印刷法により塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。乾燥後、高圧水銀灯(ショートアークランプ)搭載の露光装置を用いて露光した。露光パターンは開口:50/60/70/80/90/100μmの丸を描画させるガラス乾板を使用した。露光量は感光性樹脂組成物の最適露光量となるように活性エネルギー線を照射した。露光後、30℃の1wt%炭酸ナトリウム水溶液をスプレー圧0.2MPaの条件で90秒間現像を行い、レジストパターンを得た。この基板を、UVコンベア炉にて積算露光量1000mJ/cmの条件で紫外線照射した後、160℃で60分加熱して硬化した。
 得られたソルダーレジスト用感光性樹脂組成物の硬化塗膜の最小開口を、200倍に調整した光学顕微鏡を用いて求めた。判定基準は以下のとおりである。
 ◎:60μm未満。
 ○:60μm以上~80μm未満。
 △:80μm以上100μm未満。
 ×:100μm以上。
<Resolution>
Each photocurable thermosetting resin composition of an Example and a comparative example was apply | coated by the screen printing method to the board | substrate with which plating copper was formed, and was dried for 30 minutes with a 80 degreeC hot-air circulation type drying furnace. After drying, exposure was performed using an exposure apparatus equipped with a high-pressure mercury lamp (short arc lamp). The exposure pattern used was a glass dry plate on which a circle with an opening of 50/60/70/80/90/100 μm was drawn. The active energy ray was irradiated so that the exposure amount became the optimal exposure amount of the photosensitive resin composition. After the exposure, a 1 wt% sodium carbonate aqueous solution at 30 ° C. was developed for 90 seconds under a spray pressure of 0.2 MPa to obtain a resist pattern. This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 160 ° C. for 60 minutes.
The minimum opening of the cured coating film of the obtained photosensitive resin composition for solder resist was determined using an optical microscope adjusted to 200 times. The judgment criteria are as follows.
A: Less than 60 μm.
○: 60 μm or more and less than 80 μm.
Δ: 80 μm or more and less than 100 μm.
X: 100 μm or more.
 <線膨張係数>
 3mm×10mmのサイズの硬化塗膜を、セイコーインスツールメンツ社製TMA6100にて10gの荷重を加えながら一定の昇温速度で0℃-260℃の温度範囲で引張り試験を行った。温度に対する硬化塗膜の伸び量から線膨張係数を算出した。
 上記各試験の結果を表2にまとめて示す。
<Linear expansion coefficient>
A tensile test was performed on a cured coating film having a size of 3 mm × 10 mm in a temperature range of 0 ° C. to 260 ° C. at a constant temperature increase rate while applying a load of 10 g with TMA6100 manufactured by Seiko Instruments Inc. The linear expansion coefficient was calculated from the amount of elongation of the cured coating film with respect to temperature.
The results of the above tests are summarized in Table 2.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 上記表2に示されるように、本発明の光硬化性樹脂組成物を用いた各実施例では、塗布性、無電解金めっき耐性、PCT耐性、クラック耐性のいずれも優れていた。これに対し、高分子バインダーを配合しなかった比較例1の場合、著しくダイラタンシー状態となり、塗布することが困難であった。さらに解像性も劣っていた。一方、高分子バインダーを配合したが、フィラーを配合しなかった比較例2の場合、塗布性、解像性には問題なかったが、線膨張係数を低くできず、クラック耐性に劣っていた。またフィラーを含有しないことによりめっき液等の水分がしみ込み易くなり、無電解金めっき耐性及びPCT耐性に劣っていた。また、フィラーの配合量が少ない比較例3の場合にも、線膨張係数を充分に低くできず、クラック耐性に問題があった。 As shown in Table 2 above, in each of the examples using the photocurable resin composition of the present invention, all of applicability, electroless gold plating resistance, PCT resistance, and crack resistance were excellent. On the other hand, in the case of the comparative example 1 which did not mix | blend a polymer binder, it became a dilatancy state remarkably and it was difficult to apply | coat. Furthermore, the resolution was inferior. On the other hand, in the case of Comparative Example 2 in which a polymer binder was blended but no filler was blended, there was no problem in applicability and resolution, but the linear expansion coefficient could not be lowered and crack resistance was poor. Moreover, it became easy to permeate | transmit water, such as a plating solution, by not containing a filler, and was inferior to electroless gold-plating tolerance and PCT tolerance. Moreover, also in the case of the comparative example 3 with few compounding quantities of a filler, a linear expansion coefficient was not able to be made low enough, but there existed a problem in crack tolerance.
 本発明の光硬化性樹脂組成物を用いることにより、フィラーを多量に配合しても、ソルダーレジストとして取り扱い良好で、冷熱サイクル時に生じるソルダーレジストのクラックの発生や剥がれを抑制できるので、プリント配線板やフレキシブル配線板などのソルダーレジストや多層配線板の層間絶縁材料等、特に半導体パッケージ用ソルダーレジストの形成に好適に用いることができる。 By using the photo-curable resin composition of the present invention, even if a large amount of filler is blended, it is easy to handle as a solder resist, and it is possible to suppress the generation and peeling of the solder resist cracks that occur during the cooling and heating cycle. And a solder resist such as a flexible wiring board, an interlayer insulating material of a multilayer wiring board, and the like, particularly for forming a solder resist for a semiconductor package.

Claims (10)

  1.  カルボキシル基含有オリゴマー、上記カルボキシル基含有オリゴマーよりも分子量の大きな高分子バインダー、光重合開始剤、光重合性モノマー及びフィラーを含む組成物であって、上記フィラーの含有量が組成物の不揮発成分全体量の30~60質量%であることを特徴とするアルカリ溶液により現像可能な光硬化性樹脂組成物。 A composition comprising a carboxyl group-containing oligomer, a polymer binder having a molecular weight larger than that of the carboxyl group-containing oligomer, a photopolymerization initiator, a photopolymerizable monomer, and a filler, wherein the filler content is the entire nonvolatile component of the composition A photocurable resin composition developable with an alkaline solution, characterized in that the amount is 30 to 60% by mass of the amount.
  2.  前記高分子バインダーが熱可塑樹脂であることを特徴とする請求項1に記載の光硬化性樹脂組成物。 The photocurable resin composition according to claim 1, wherein the polymer binder is a thermoplastic resin.
  3.  前記熱可塑樹脂が同一溶剤に溶かした状態で固形分10~50wt%であることを特徴とする請求項2に記載の光硬化性樹脂組成物。 3. The photocurable resin composition according to claim 2, wherein the thermoplastic resin has a solid content of 10 to 50 wt% in a state dissolved in the same solvent.
  4.  前記フィラーがBa又はMg及び/又はAlを含むことを特徴とする請求項1に記載の光硬化性樹脂組成物。 The photocurable resin composition according to claim 1, wherein the filler contains Ba, Mg, and / or Al.
  5.  請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を、キャリアフィルムに塗布・乾燥して得られるドライフィルム。 A dry film obtained by coating and drying the photocurable resin composition according to any one of claims 1 to 4 on a carrier film.
  6.  ドライフィルムが複数の光硬化性樹脂組成物の乾燥層からなり、少なくとも1層が請求項1~4のいずれか1項に記載の光硬化性樹脂組成物から形成されていることを特徴とする請求項5に記載のドライフィルム。 The dry film comprises a plurality of dry layers of a photocurable resin composition, and at least one layer is formed from the photocurable resin composition according to any one of claims 1 to 4. The dry film according to claim 5.
  7.  請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を基材に塗布し、活性エネルギー線の照射により光硬化させて得られることを特徴とする硬化物。 A cured product obtained by applying the photocurable resin composition according to any one of claims 1 to 4 to a substrate and photocuring it by irradiation with active energy rays.
  8.  請求項1~4のいずれか1項に記載の光硬化性樹脂組成物を、基材に塗布・乾燥し、活性エネルギー線の照射により光硬化させて得られる硬化物のパターンを有することを特徴とするプリント配線板。 5. A pattern of a cured product obtained by applying the photocurable resin composition according to any one of claims 1 to 4 to a substrate, drying and photocuring by irradiation with an active energy ray. Printed wiring board.
  9.  請求項5又は6に記載のドライフィルムを、基材にラミネートし、活性エネルギー線照射により光硬化させて得られることを特徴とする硬化物。 A cured product obtained by laminating the dry film according to claim 5 or 6 on a substrate and photocuring it by irradiation with active energy rays.
  10.  請求項5又は6に記載のドライフィルムを基材にラミネートし、活性エネルギー線の照射により光硬化させて得られる硬化物のパターンを有することを特徴とするプリント配線板。 7. A printed wiring board comprising a pattern of a cured product obtained by laminating the dry film according to claim 5 or 6 on a substrate and photocuring by irradiation with active energy rays.
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