WO2010016511A1 - 有機薄膜トランジスタ用化合物及びそれを用いた有機薄膜トランジスタ - Google Patents
有機薄膜トランジスタ用化合物及びそれを用いた有機薄膜トランジスタ Download PDFInfo
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- WO2010016511A1 WO2010016511A1 PCT/JP2009/063846 JP2009063846W WO2010016511A1 WO 2010016511 A1 WO2010016511 A1 WO 2010016511A1 JP 2009063846 W JP2009063846 W JP 2009063846W WO 2010016511 A1 WO2010016511 A1 WO 2010016511A1
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- CBFCDTFDPHXCNY-UHFFFAOYSA-N icosane Chemical group CCCCCCCCCCCCCCCCCCCC CBFCDTFDPHXCNY-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
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- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004768 lowest unoccupied molecular orbital Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- COQAIRYMVBNUKQ-UHFFFAOYSA-J magnesium;barium(2+);tetrafluoride Chemical compound [F-].[F-].[F-].[F-].[Mg+2].[Ba+2] COQAIRYMVBNUKQ-UHFFFAOYSA-J 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- IXRHKEJLLBUIBJ-UHFFFAOYSA-N n-cyclohexyl-4-methylcyclohexan-1-imine Chemical compound C1CC(C)CCC1=NC1CCCCC1 IXRHKEJLLBUIBJ-UHFFFAOYSA-N 0.000 description 1
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- IGGUPRCHHJZPBS-UHFFFAOYSA-N nonacosane Chemical group CCCCCCCCCCCCCCCCCCCCCCCCCCCCC IGGUPRCHHJZPBS-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 125000005582 pentacene group Chemical group 0.000 description 1
- YKNWIILGEFFOPE-UHFFFAOYSA-N pentacosane Chemical group CCCCCCCCCCCCCCCCCCCCCCCCC YKNWIILGEFFOPE-UHFFFAOYSA-N 0.000 description 1
- 125000006340 pentafluoro ethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 125000001388 picenyl group Chemical group C1(=CC=CC2=CC=C3C4=CC=C5C=CC=CC5=C4C=CC3=C21)* 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
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- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
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- 239000005033 polyvinylidene chloride Substances 0.000 description 1
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- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- CVSGFMWKZVZOJD-UHFFFAOYSA-N pyrazino[2,3-f]quinoxaline Chemical compound C1=CN=C2C3=NC=CN=C3C=CC2=N1 CVSGFMWKZVZOJD-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- XPBSKOLNCVNFGD-UHFFFAOYSA-N pyrimido[4,5-f]quinazoline Chemical compound C1=NC=C2C=CC3=NC=NC=C3C2=N1 XPBSKOLNCVNFGD-UHFFFAOYSA-N 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
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- 230000002940 repellent Effects 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical class O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- IOGXOCVLYRDXLW-UHFFFAOYSA-N tert-butyl nitrite Chemical compound CC(C)(C)ON=O IOGXOCVLYRDXLW-UHFFFAOYSA-N 0.000 description 1
- 239000012414 tert-butyl nitrite Substances 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- POOSGDOYLQNASK-UHFFFAOYSA-N tetracosane Chemical group CCCCCCCCCCCCCCCCCCCCCCCC POOSGDOYLQNASK-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- VJYJJHQEVLEOFL-UHFFFAOYSA-N thieno[3,2-b]thiophene Chemical compound S1C=CC2=C1C=CS2 VJYJJHQEVLEOFL-UHFFFAOYSA-N 0.000 description 1
- CRUIOQJBPNKOJG-UHFFFAOYSA-N thieno[3,2-e][1]benzothiole Chemical compound C1=C2SC=CC2=C2C=CSC2=C1 CRUIOQJBPNKOJG-UHFFFAOYSA-N 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- JXTPJDDICSTXJX-UHFFFAOYSA-N triacontane Chemical group CCCCCCCCCCCCCCCCCCCCCCCCCCCCCC JXTPJDDICSTXJX-UHFFFAOYSA-N 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- FIGVVZUWCLSUEI-UHFFFAOYSA-N tricosane Chemical group CCCCCCCCCCCCCCCCCCCCCCC FIGVVZUWCLSUEI-UHFFFAOYSA-N 0.000 description 1
- FWSPXZXVNVQHIF-UHFFFAOYSA-N triethyl(ethynyl)silane Chemical group CC[Si](CC)(CC)C#C FWSPXZXVNVQHIF-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C15/00—Cyclic hydrocarbons containing only six-membered aromatic rings as cyclic parts
- C07C15/20—Polycyclic condensed hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/20—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring
- C07C43/205—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring the aromatic ring being a non-condensed ring
- C07C43/2055—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring the aromatic ring being a non-condensed ring containing more than one ether bond
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/623—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene containing five rings, e.g. pentacene
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/02—Ortho- or ortho- and peri-condensed systems
- C07C2603/52—Ortho- or ortho- and peri-condensed systems containing five condensed rings
Definitions
- the present invention relates to a compound for an organic thin film transistor and an organic thin film transistor using the compound for an organic semiconductor layer.
- TFTs Thin film transistors
- a typical TFT has a gate electrode, an insulator layer, and an organic semiconductor layer in this order on a substrate, and has a source electrode and a drain electrode formed on the organic semiconductor layer at a predetermined interval. .
- the organic semiconductor layer forms a channel region, and an on / off operation is performed by controlling a current flowing between the source electrode and the drain electrode with a voltage applied to the gate electrode.
- this TFT has been manufactured using amorphous or polycrystalline silicon.
- a CVD apparatus used for manufacturing such a TFT using silicon is very expensive, and a display device using the TFT.
- Such an increase in size has a problem in that it involves a significant increase in manufacturing costs.
- the process of forming amorphous or polycrystalline silicon is performed at a very high temperature, the types of materials that can be used as a substrate are limited, and thus there is a problem that a lightweight resin substrate cannot be used. there were.
- a TFT using an organic substance instead of amorphous or polycrystalline silicon (hereinafter sometimes abbreviated as an organic TFT) has been proposed.
- Vacuum deposition and coating methods are known as film formation methods used when forming TFTs with organic materials.
- film formation methods it is possible to increase the size of the element while suppressing an increase in manufacturing costs.
- the process temperature required for film formation can be made relatively low.
- the organic TFT has an advantage that there are few restrictions when selecting a material to be used for the substrate, and its practical application is expected, and research reports have been actively made.
- materials for p-type FETs include polymers such as conjugated polymers and thiophenes, metal phthalocyanine compounds, condensed aromatic hydrocarbons such as pentacene, etc. Used in the form of a mixture with a compound.
- Examples of the material of the n-type FET include 1,4,5,8-naphthalene tetracarboxydianhydride (NTCDA), 11,11,12,12-tetracyanonaphth-2,6-quinodimethane (TCNNQD). 1,4,5,8-naphthalenetetracarboxydiimide (NTCDI) and fluorinated phthalocyanines are known.
- an organic electroluminescence (EL) element as a device that similarly uses electric conduction.
- a strong electric field of 10 5 V / cm or more is generally applied in the film thickness direction of an ultra-thin film of 100 nm or less. It is necessary to flow charges at a high speed with an electric field of a distance of 10 5 V / cm or less, and the organic substance used in the organic TFT itself needs further conductivity.
- the above-described compound in the conventional organic TFT has a small field effect mobility, a slow response speed, and a problem in high-speed response as a transistor. Also, the on / off ratio was small.
- the on / off ratio here refers to the current flowing between the source and drain when the gate voltage is applied (on) divided by the current flowing between the source and drain when the gate voltage is not applied (off).
- the on-current is a current value (saturation current) when the current flowing between the source and the drain is normally saturated while increasing the gate voltage.
- Non-Patent Document 1 reports an organic TFT using a condensed aromatic ring having a structure in which a benzene ring is bent, such as picene, instead of a linear condensed aromatic ring such as pentacene. It is described that picene is superior in oxidation stability of the compound in the atmosphere because it has a lower ionization potential than pentacene. JP-A-5-55568 JP 2001-94107 A H.
- An object of the present invention is to provide a compound for an organic thin film transistor having excellent film forming properties. Another object of the present invention is to provide an organic thin film transistor having high mobility.
- the present inventors have determined whether the organic compound represented by the following formula (1) having a specific substituent introduced into the picene structure has high mobility.
- the present invention was completed by finding that it can be applied to a coating process and is suitable as an organic semiconductor layer of an organic thin film transistor.
- this invention is a compound for organic thin-film transistors which has a structure of following formula (1).
- R 1 to R 6 are each a hydrogen atom, a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or 1 carbon atom.
- the organic semiconductor layer provides an organic thin film transistor containing an organic compound having the structure of the formula (1).
- this invention provides the picene compound represented by following formula (2).
- R 7 to R 12 is a halogen atom, an alkyl group having 2 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, A haloalkoxy group having 1 to 30 carbon atoms, an alkthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (the alkyl group is May be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 60 carbon atoms
- R 7 ⁇ R 12 is a hydrogen atom.
- R 7 to R 12 only two of R 7 to R 12 are halogen atoms, alkyl groups having 1 to 30 carbon atoms, haloalkyl groups having 1 to 30 carbon atoms, alkoxy groups having 1 to 30 carbon atoms, A haloalkoxy group having 1 to 30 carbon atoms, an alkylthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (alkyl The groups may be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon having 6 to 60 carbon atoms Group, an aromatic hetero
- R 7 to R 12 when only two of R 7 to R 12 are methyl groups, these methyl groups are not adjacent, and the remaining R 7 to R 12 are hydrogen atoms.
- R 7 to R 12 only three of R 7 to R 12 are halogen atoms, alkyl groups having 1 to 30 carbon atoms, haloalkyl groups having 1 to 30 carbon atoms, alkoxy groups having 1 to 30 carbon atoms, carbon numbers A haloalkoxy group having 1 to 30 carbon atoms, an alkthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (the alkyl group is May be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfony
- an organic thin film transistor having excellent film forming properties or an organic thin film transistor having high mobility it is possible to provide an organic thin film transistor having excellent film forming properties or an organic thin film transistor having high mobility.
- the compound for an organic thin film transistor of the present invention has a structure represented by the following formula (1).
- R 1 to R 6 are each a hydrogen atom, a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or 1 carbon atom.
- At least one of R 1 , R 3 and R 5 and at least one of R 2 , R 4 and R 6 are not hydrogen atoms but the above groups.
- R 1 and R 2 is a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or an alkyl group having 1 to 30 carbon atoms.
- the haloalkoxy group, the alkylsilylacetylene group having 5 to 60 carbon atoms, or the cyano group, each of which may have a substituent, and the remaining R 1 to R 6 are hydrogen atoms.
- at least one of R 1 and R 2 is an alkyl group having 1 to 18 carbon atoms. More preferably, R 1 and R 2 are both the above groups.
- R 1 and R 2 are an aromatic hydrocarbon group having 6 to 60 carbon atoms or an aromatic heterocyclic group having 3 to 60 carbon atoms, and each of these groups has a substituent.
- the remaining R 1 to R 6 are hydrogen atoms. More preferably, R 1 and R 2 are both the above groups.
- the picene compound of the present invention has the structure of the following formula (2). This picene compound is included in the compound of formula (1).
- R 7 to R 12 is a halogen atom, an alkyl group having 2 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, A haloalkoxy group having 1 to 30 carbon atoms, an alkthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (the alkyl group is May be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 60 carbon atoms, An aromatic heterocyclic group having 3 to 60 carbon atoms, an
- R 7 ⁇ R 12 is a hydrogen atom.
- R 7 to R 12 only two of R 7 to R 12 are halogen atoms, alkyl groups having 1 to 30 carbon atoms, haloalkyl groups having 1 to 30 carbon atoms, alkoxy groups having 1 to 30 carbon atoms, A haloalkoxy group having 1 to 30 carbon atoms, an alkylthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (alkyl The groups may be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon having 6 to 60 carbon atoms Group, an aromatic hetero
- R 7 to R 12 when only two of R 7 to R 12 are methyl groups, these methyl groups are not adjacent, and the remaining R 7 to R 12 are hydrogen atoms.
- R 7 to R 12 only three of R 7 to R 12 are halogen atoms, alkyl groups having 1 to 30 carbon atoms, haloalkyl groups having 1 to 30 carbon atoms, alkoxy groups having 1 to 30 carbon atoms, carbon numbers A haloalkoxy group having 1 to 30 carbon atoms, an alkthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 60 carbon atoms (the alkyl group is May be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfony
- halogen atom examples include fluorine, chlorine, bromine and iodine atoms.
- alkyl group examples include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, s-butyl group, isobutyl group, t-butyl group, n-pentyl group, n-hexyl group, and n-heptyl group.
- N-octyl group N-octyl group, n-nonyl group, n-decyl group, n-undecyl group, n-dodecyl group, n-tridecyl group, n-tetradecyl group, n-pentadecyl group, n-hexadecyl group, n-heptadecyl group N-octadecyl group, n-nonadecyl group, n-icosane group, n-henicosane group, n-docosane group, n-tricosane group, n-tetracosane group, n-pentacosane group, n-hexacosane group, n-heptacosane group N-octacosane group, n-nonacosane group, n-triacontan
- haloalkyl group examples include chloromethyl group, 1-chloroethyl group, 2-chloroethyl group, 2-chloroisobutyl group, 1,2-dichloroethyl group, 1,3-dichloroisopropyl group, 2,3-dichloro- t-butyl group, 1,2,3-trichloropropyl group, bromomethyl group, 1-bromoethyl group, 2-bromoethyl group, 2-bromoisobutyl group, 1,2-dibromoethyl group, 1,3-dibromoisopropyl group, 2,3-dibromo-t-butyl group, 1,2,3-tribromopropyl group, iodomethyl group, 1-iodoethyl group, 2-iodoethyl group, 2-iodoisobutyl group, 1,2-diiodoethyl group, 1, 3-diio
- the alkoxy group is a group represented by —OY 1
- examples of Y 1 include the same examples as described for the alkyl group
- the haloalkoxy group is represented by —OY 2.
- Examples of Y 2 include the same examples as those described for the haloalkyl group.
- the alkylthio group is a group represented by —SY 1
- examples of Y 1 include the same examples as described for the alkyl group
- the haloalkylthio group is represented by —SY 2.
- Examples of Y 2 include the same examples as those described for the haloalkyl group.
- the alkylamino group is a group represented by —NHY 1 ; the dialkylamino group is a group represented by —NY 1 Y 3 ; and Y 1 and Y 3 are the same as those described for the alkyl group, respectively. Similar examples are given.
- the alkyl group of the dialkylamino group may be bonded to each other to form a ring structure containing a nitrogen atom, and examples of the ring structure include pyrrolidine, piperidine and the like.
- the alkylsulfonyl group is a group represented by —SO 2 Y 1 , and examples of Y 1 include the same examples as described for the alkyl group, and the haloalkylsulfonyl group includes —SO 2 Y 2 is a group represented by Y 2 , and examples of Y 2 include the same examples as those described for the haloalkyl group.
- the alkylsilyl group is a group represented by —SiY 1 Y 3 Y 4 , and examples of Y 1 , Y 3 and Y 4 are the same as those described for the alkyl group.
- the alkylsilylacetylene group is a group in which the group represented by the alkylsilyl group is interposed by an ethynylene group, and examples thereof include a trimethylsilylacetylene group, a triethylsilylacetylene group, and a triisopropylsilylacetylene group.
- aromatic hydrocarbon group examples include residues such as benzene, naphthalene, anthracene, phenanthrene, chrysene, phenanthrene, and tetracene.
- aromatic heterocyclic group examples include pyridine, pyrazine, quinoline, naphthyridine, quinoxaline, phenazine, diazaanthracene, pyridoquinoline, pyrimidoquinazoline, pyrazinoquinoxaline, phenanthroline, carbazole, thiophene, benzothiophene, dibenzothiophene, Benzodithiophene, [1] benzothieno [3,2-b] benzothiophene, thienothiophene, dithienothiophene, furan, benzofuran, dibenzofuran, benzodifuran, thiazole, benzothiazole, dithiaindacene, dithiaindenoindene, dibenzoselenophene, Residues such as diselenindacene, diselenaindenoindene, and dibenzosilol are examples of the
- the organic compound having a specific structure used in the organic thin film transistor of the present invention is basically bipolar with p-type (hole conduction) and n-type (electron conduction), and is combined with the source and drain electrodes described later. Therefore, it can be driven as a p-type element or an n-type element.
- the lowest unoccupied orbital (LUMO) level can be lowered to function as an n-type semiconductor. it can.
- Preferred as the electron-accepting group are a hydrogen atom, a halogen atom, a cyano group, a haloalkyl group having 1 to 30 carbon atoms, a haloalkoxy group having 1 to 30 carbon atoms, and a haloalkylsulfonyl group having 1 to 30 carbon atoms.
- the semiconductor can function as a p-type semiconductor.
- the electron donating group include a hydrogen atom, an alkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, and a dialkylamino group having 2 to 60 carbon atoms.
- the amino groups may be bonded to each other to form a ring structure containing a nitrogen atom).
- Examples of the substituent that may be further substituted for each group represented by R 1 to R 6 and R 7 to R 12 in the formulas (1) and (2) include an aromatic hydrocarbon group, an aromatic heterocyclic group, Examples include an alkyl group, an alkoxy group, a haloalkyl group, an alkylthio group, an alkylsulfonyl group, an aryloxy group, an arylthio group, an alkoxycarbonyl group, an amino group, a halogen atom, a cyano group, a nitro group, a hydroxyl group, and a carboxy group.
- the compound for organic thin film transistor of the present invention can be synthesized by a known method, for example, the following reaction.
- Non-patent document Journal of Organic Chemistry 1992, Vol. 56, pages 6649-6755 using a known compound 3,6-diiodobenzene-1,2-diamine synthesized as a raw material, followed by a Sandmeyer reaction
- the intermediates were synthesized by various coupling reactions using transition metal catalysts typified by the Suzuki-Miyaura coupling of (A) and the Sonogashira coupling of (B), and the intermediate was synthesized by the following reaction (C) And a cyclization reaction using a metal salt such as (D).
- the compound for organic thin film transistor of the present invention includes, for example, alkylation of 1,2-bis (2-iodoethyl) benzene using a Schiff base in the following reaction (A), and cyclization using an acid catalyst of (B). It can also synthesize
- an electronic device such as a transistor
- a device with high field-effect mobility and a high on / off ratio can be obtained by using a material with high purity. Therefore, it is desirable to add purification by techniques such as column chromatography, recrystallization, distillation, sublimation, etc. as necessary. Preferably, it is possible to improve the purity by repeatedly using these purification methods or combining a plurality of methods. Furthermore, it is desirable to repeat sublimation purification at least twice or more as the final step of purification. By using these methods, it is preferable to use a material having a purity of 90% or more measured by HPLC, more preferably 95% or more, and particularly preferably 99% or more. In addition, the on / off ratio can be increased and the performance inherent to the material can be extracted.
- the element configuration of the organic thin film transistor of the present invention is such that at least three terminals of a gate electrode, a source electrode and a drain electrode, an insulator layer and an organic semiconductor layer are provided on a substrate, and a source-drain current is applied to the gate electrode. It is a thin film transistor controlled by this. And an organic-semiconductor layer contains the compound for organic thin-film transistors of this invention mentioned above, It is characterized by the above-mentioned.
- the structure of the transistor is not particularly limited, and components other than the components of the organic semiconductor layer may have a known element configuration. A specific example of the element configuration of the organic thin film transistor will be described with reference to the drawings.
- the organic thin film transistor 1 of FIG. 1 has a source electrode 11 and a drain electrode 12 formed on a substrate 10 so as to face each other with a predetermined interval. And the organic-semiconductor layer 13 is formed so that the source electrode 11, the drain electrode 12, and the gap
- a gate electrode 15 is formed on the insulator layer 14 and on the gap between the source electrode 11 and the drain electrode 12.
- the organic thin film transistor 2 in FIG. 2 has a gate electrode 15 and an insulator layer 14 in this order on a substrate 10, and a pair of source electrode 11 and drain formed on the insulator layer 14 with a predetermined interval therebetween.
- An electrode 12 is provided, and an organic semiconductor layer 13 is formed thereon.
- the organic semiconductor layer 13 forms a channel region, and is turned on / off by controlling a current flowing between the source electrode 11 and the drain electrode 12 with a voltage applied to the gate electrode 15.
- the organic thin film transistor 3 in FIG. 3 has a gate electrode 15, an insulator layer 14, and an organic semiconductor layer 13 in this order on a substrate 10.
- a source electrode 11 and a drain electrode 12 are provided.
- the insulating layer 14 and the gate electrode 15 are provided in this order.
- the organic thin film transistor of the present invention has a field effect transistor (FET: Field Effect Transistor) structure. As described above, there are several configurations depending on the position of the electrodes, the layer stacking order, and the like.
- the organic thin film transistor is formed with an organic semiconductor layer (organic compound layer), a source electrode and a drain electrode formed to face each other with a predetermined distance, and a predetermined distance from the source electrode and the drain electrode. And a current flowing between the source and drain electrodes is controlled by applying a voltage to the gate electrode.
- the distance between the source electrode and the drain electrode is determined by the use of the organic thin film transistor of the present invention, and is usually 0.1 ⁇ m to 1 mm, preferably 1 ⁇ m to 100 ⁇ m, and more preferably 5 ⁇ m to 100 ⁇ m.
- the organic thin film transistor of the present invention has also been proposed as the organic thin film transistor in the above device configuration, and the current flowing between the source electrode and the drain electrode is controlled by the voltage applied to the gate electrode.
- the device configuration is not limited to the above as long as an effect such as on / off operation and amplification is exhibited.
- the top-and-bottom contact organic thin-film transistor proposed by Yoshida et al. Of the National Institute of Advanced Industrial Science and Technology in the 49th Conference on Applied Physics Related Lectures 27a-M-3 (March 2002) (see Fig. 5)
- a vertical organic thin film transistor proposed by Kudo et al. Of Chiba University in IEEJ Transactions 118-A (1998) 1440.
- the constituent members of the organic thin film transistor will be described.
- the organic-semiconductor layer in the organic thin-film transistor of this invention contains the compound for organic thin-film transistors of this invention mentioned above.
- the thickness of the organic semiconductor layer is not particularly limited, but is usually 0.5 nm to 1 ⁇ m, preferably 2 nm to 250 nm.
- a method for forming the organic semiconductor layer is not particularly limited, and a known method can be applied.
- the organic semiconductor layer material is formed as described above.
- MBE molecular beam deposition
- vacuum deposition chemical deposition
- chemical deposition dipping of a solution in which a material is dissolved in a solvent
- coating and baking electropolymerization
- molecular beam deposition self assembly from solution, and combinations thereof
- the organic semiconductor layer material is formed as described above.
- the crystallinity of the organic semiconductor layer is improved, field effect mobility is improved, and it is preferable to perform annealing after film formation regardless of the film formation method because a high-performance device can be obtained.
- the annealing temperature is preferably 50 to 200 ° C., more preferably 70 to 200 ° C., and the time is preferably 10 minutes to 12 hours, more preferably 1 to 10 hours.
- the organic semiconductor layer one kind of the compound represented by the formula (1) may be used, or a plurality of mixed thin films or stacked layers using a known semiconductor such as pentacene or thiophene oligomer may be used. May be used.
- the substrate in the organic thin film transistor of the present invention plays a role of supporting the structure of the organic thin film transistor.
- a material in addition to glass, inorganic compounds such as metal oxides and nitrides, plastic films (PET, PES, PC) It is also possible to use metal substrates or composites or laminates thereof.
- PET, PES, PC plastic films
- metal substrates or composites or laminates thereof when the structure of the organic thin film transistor can be sufficiently supported by the components other than the substrate, it is possible not to use the substrate.
- a silicon (Si) wafer is often used as a material for the substrate.
- Si itself can be used as a gate electrode / substrate.
- the surface of Si can be oxidized to form SiO 2 and used as an insulating layer.
- a metal layer such as Au may be formed on the Si substrate serving as the substrate and gate electrode as an electrode for connecting the lead wire.
- the material for the gate electrode, the source electrode, and the drain electrode is not particularly limited as long as it is a conductive material.
- Examples of the method for forming the electrode include means such as vapor deposition, electron beam vapor deposition, sputtering, atmospheric pressure plasma method, ion plating, chemical vapor deposition, electrodeposition, electroless plating, spin coating, printing, and ink jet. It is done.
- a conductive thin film formed using the above method is formed using a known photolithographic method or a lift-off method, on a metal foil such as aluminum or copper.
- the thickness of the electrode formed in this way is not particularly limited as long as current is conducted, but is preferably in the range of 0.2 nm to 10 ⁇ m, more preferably 4 nm to 300 nm. If it is in this preferable range, the resistance is increased due to the thin film thickness, and a voltage drop does not occur. In addition, since the film is not too thick, it does not take time to form the film, and when another layer such as a protective layer or an organic semiconductor layer is laminated, the laminated film can be smooth without causing a step.
- another source electrode, drain electrode, gate electrode and a method for forming the source electrode are formed using a fluid electrode material such as a solution, paste, ink, or dispersion containing the above conductive material.
- a fluid electrode material such as a solution, paste, ink, or dispersion containing the above conductive material.
- a fluid electrode material containing a conductive polymer or metal fine particles containing platinum, gold, silver, or copper is preferable.
- the solvent or dispersion medium is preferably a solvent or dispersion medium containing 60% by mass or more, preferably 90% by mass or more of water, in order to suppress damage to the organic semiconductor.
- the dispersion containing the metal fine particles for example, a known conductive paste or the like may be used, but a dispersion containing metal fine particles having a particle size of usually 0.5 nm to 50 nm, 1 nm to 10 nm is preferable.
- the material of the fine metal particles include platinum, gold, silver, nickel, chromium, copper, iron, tin, antimony lead, tantalum, indium, palladium, tellurium, rhenium, iridium, aluminum, ruthenium, germanium, molybdenum, and tungsten. Zinc or the like can be used.
- an electrode using a dispersion in which these metal fine particles are dispersed in water or a dispersion medium which is an arbitrary organic solvent using a dispersion stabilizer mainly composed of an organic material.
- a method for producing such a dispersion of metal fine particles metal ions can be reduced in the liquid phase, such as a physical generation method such as gas evaporation method, sputtering method, metal vapor synthesis method, colloid method, coprecipitation method, etc.
- a chemical production method for producing metal fine particles preferably disclosed in JP-A-11-76800, JP-A-11-80647, JP-A-11-319538, JP-A-2000-239853, and the like.
- metal fine particle dispersions may be directly patterned by an ink jet method, or may be formed from a coating film by lithograph or laser ablation. Moreover, the patterning method by printing methods, such as a letterpress, an intaglio, a lithographic plate, and screen printing, can also be used. After the electrode is formed and the solvent is dried, the metal fine particles are heat-fused by heating in a shape within a range of 100 ° C. to 300 ° C., preferably 150 ° C. to 200 ° C., if necessary. An electrode pattern having the following shape can be formed.
- a known conductive polymer whose conductivity has been improved by doping is also preferable to use as another gate electrode, source electrode, and drain electrode material.
- conductive polyaniline, conductive polypyrrole, conductive polythiophene ( A complex of polyethylene dioxythiophene and polystyrene sulfonic acid and the like, and a complex of polyethylene dioxythiophene (PEDOT) and polystyrene sulfonic acid are also preferably used. These materials can reduce the contact resistance between the organic semiconductor layer of the source electrode and the drain electrode.
- These forming methods may also be patterned by an ink jet method, or may be formed from a coating film by lithography, laser ablation, or the like.
- the patterning method by printing methods such as a letterpress, an intaglio, a lithographic plate, and screen printing, can also be used.
- the material for forming the source electrode and the drain electrode is preferably a material having a small electric resistance at the contact surface with the organic semiconductor layer among the examples described above.
- the electrical resistance at this time corresponds to the field effect mobility when the current control device is manufactured, and the resistance needs to be as small as possible in order to obtain a large mobility. This is generally determined by the magnitude relationship between the work function of the electrode material and the energy level of the organic semiconductor layer.
- the work function (W) of the electrode material is a
- the ionization potential of the organic semiconductor layer is (Ip) b
- the electron affinity (Af) of the organic semiconductor layer is c
- a, b, and c are all positive values based on the vacuum level.
- ba ⁇ 1.5 eV (formula (I)) is preferable, and ba ⁇ 1.0 eV is more preferable. If the above relationship can be maintained in relation to the organic semiconductor layer, a high-performance device can be obtained.
- the electrode material has a work function as large as possible, and the work function is 4.0 eV or more.
- the work function is preferably 4.2 eV or more.
- the value of the work function of a metal is, for example, an effective metal having a work function of 4.0 eV or higher as described in Chemistry Handbook Fundamentals II-493 (revised 3 edition, published by The Chemical Society of Japan, Maruzen 1983)
- the high work function metal is mainly Ag (4.26, 4.52, 4.64, 4.74 eV), Al (4.06, 4.24, 4.41 eV), Au (5.1, 5.37, 5.47 eV), Be (4.98 eV), Bi (4.34 eV), Cd (4.08 eV), Co (5.0 eV), Cu (4.65 eV), Fe (4.5, 4.67, 4.81 eV), Ga (4.3 eV), Hg (4.4 eV), Ir (5.42, 5.76 eV), Mn (4.1 eV), Mo (4 .53, 4.55, 4.95 eV), Nb (4.02, 4.3) , 4.87 eV), Ni (5.04, 5.22, 5.35 eV), Os (5.93
- the work function of the electrode material is preferably as small as possible, and the work function is preferably 4.3 eV or less. More preferably, the work function is 3.7 eV or less.
- the low work function metal it has a work function of 4.3 eV or less as described in, for example, Chemical Handbook, Basics, pages II-493 (revised 3rd edition, published by The Chemical Society of Japan, Maruzen Co., Ltd.
- the electrode material contains one or more of these low work function substances, there is no particular limitation as long as the work function satisfies the above formula (II).
- the low work function metal easily deteriorates when exposed to moisture and oxygen in the atmosphere, it is desirable to coat with a stable metal in the air such as Ag or Au as necessary.
- the film thickness necessary for the coating is 10 nm or more, and as the film thickness increases, it can be protected from oxygen and water. However, for practical reasons, it is desirable to set it to 1 ⁇ m or less for the purpose of increasing productivity.
- a buffer layer may be provided between the organic semiconductor layer and the source and drain electrodes for the purpose of improving the injection efficiency.
- the buffer layer has an alkali metal or alkaline earth metal ion bond such as LiF, Li 2 O, CsF, NaCO 3 , KCl, MgF 2 , and CaCO 3 used for an organic EL cathode for an n-type organic thin film transistor.
- Alq alkali metal or alkaline earth metal ion bond
- cyano compounds such as FeCl 3 , TCNQ, F 4 -TCNQ, HAT, CFx, GeO 2 , SiO 2 , MoO 3 , V 2 O 5 , VO 2 , V 2 O 3 , MnO, Metal oxides other than alkali metals and alkaline earth metals such as Mn 3 O 4 , ZrO 2 , WO 3 , TiO 2 , In 2 O 3 , ZnO, NiO, HfO 2 , Ta 2 O 5 , ReO 3 , PbO 2 Inorganic compounds such as ZnS and ZnSe are desirable. In many cases, these oxides cause oxygen vacancies, which are suitable for hole injection. Further, amine compounds such as TPD and NPD, and compounds used as a hole injection layer and a hole transport layer in an organic EL device such as CuPc may be used. Moreover, what consists of two or more types of said compounds is desirable.
- the buffer layer has the effect of lowering the threshold voltage by lowering the carrier injection barrier and driving the transistor at a low voltage
- the buffer layer only needs to be thin between the electrode and the organic semiconductor layer, and the thickness is 0.1 nm to 30 nm, preferably 0.3 nm to 20 nm.
- the material of the insulator layer in the organic thin film transistor of the present invention is not particularly limited as long as it has electrical insulation and can be formed as a thin film.
- Metal oxide including silicon oxide
- metal nitride (Including silicon nitride)
- polymers low molecular organic molecules, and the like, materials having an electrical resistivity at room temperature of 10 ⁇ cm or more can be used, and an inorganic oxide film having a high relative dielectric constant is particularly preferable.
- Inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, lead lanthanum titanate, strontium titanate, Barium titanate, barium magnesium fluoride, lanthanum oxide, fluorine oxide, magnesium oxide, bismuth oxide, bismuth titanate, niobium oxide, strontium bismuth titanate, strontium bismuth tantalate, tantalum pentoxide, niobium tantalate Examples thereof include bismuth acid, trioxide yttrium, and combinations thereof, and silicon oxide, aluminum oxide, tantalum oxide, and titanium oxide are preferable.
- inorganic nitrides such as silicon nitride (Si 3 N 4 , SixNy (x, y> 0)) and aluminum nitride can be suitably used.
- the insulator layer may be formed of a precursor containing an alkoxide metal, and the insulator layer is formed by coating a solution of the precursor on a substrate, for example, and subjecting the solution to a chemical solution treatment including heat treatment. It is formed.
- the metal in the alkoxide metal is selected from, for example, a transition metal, a lanthanoid, or a main group element.
- alkoxide in the alkoxide metal examples include, for example, alcohols including methanol, ethanol, propanol, isopropanol, butanol, isobutanol, methoxyethanol, ethoxyethanol, propoxyethanol, butoxyethanol, pentoxyethanol, heptoxyethanol, Examples thereof include those derived from alkoxy alcohols including methoxypropanol, ethoxypropanol, propoxypropanol, butoxypropanol, pentoxypropanol, heptoxypropanol, and the like.
- the insulator layer when the insulator layer is made of the above-described material, polarization easily occurs in the insulator layer, and the threshold voltage for transistor operation can be reduced. Further, among the above materials, in particular, when an insulator layer is formed of silicon nitride such as Si 3 N 4 , SixNy, or SiONx (x, y> 0), a depletion layer is more easily generated, and the threshold of transistor operation is increased. The voltage can be further reduced.
- polyimide, polyamide, polyester, polyacrylate, photo radical polymerization system, photo cation polymerization system photo-curable resin, copolymer containing acrylonitrile component, polyvinyl phenol, polyvinyl alcohol, A novolac resin, cyanoethyl pullulan, or the like can also be used.
- a material having water repellency is particularly preferable.
- the interaction between the insulator layer and the organic semiconductor layer can be suppressed, and the crystallinity of the organic semiconductor layer can be improved by utilizing the cohesiveness inherent in the organic semiconductor, thereby improving the device performance.
- Examples of this include Yasuda et al. Jpn. J. et al. Appl. Phys. Vol. 42 (2003) p.
- the polyparaxylylene derivatives described in 6614-6618 and Janos Veres et al. Chem. Mater. , Vol. 16 (2004) p. 4543-4555 can be mentioned.
- the organic semiconductor layer can be formed with less damage. Therefore, it is an effective method.
- the insulator layer may be a mixed layer using a plurality of inorganic or organic compound materials as described above, or may be a laminated structure of these. In this case, the performance of the device can be controlled by mixing or laminating a material having a high dielectric constant and a material having water repellency, if necessary.
- the insulator layer may include an anodic oxide film or the anodic oxide film as a configuration.
- the anodized film is preferably sealed.
- the anodized film is formed by anodizing a metal that can be anodized by a known method. Examples of the metal that can be anodized include aluminum and tantalum, and the anodizing method is not particularly limited, and a known method can be used.
- An oxide film is formed by anodizing. Any electrolyte solution that can form a porous oxide film can be used as the anodizing treatment. Generally, sulfuric acid, phosphoric acid, oxalic acid, chromic acid, boric acid, sulfamic acid, benzenesulfone, and the like can be used. An acid or the like or a mixed acid obtained by combining two or more of these or a salt thereof is used.
- the treatment conditions for anodization vary depending on the electrolyte used and cannot be specified in general. In general, however, the concentration of the electrolyte is 1 to 80% by mass, the temperature of the electrolyte is 5 to 70 ° C., and the current density.
- a preferred anodizing treatment is a method in which an aqueous solution of sulfuric acid, phosphoric acid or boric acid is used as the electrolytic solution and the treatment is performed with a direct current, but an alternating current can also be used.
- the concentration of these acids is preferably 5 to 45% by mass, and the electrolytic treatment is preferably performed for 20 to 250 seconds at an electrolyte temperature of 20 to 50 ° C. and a current density of 0.5 to 20 A / cm 2 .
- the thickness of the insulator layer As the thickness of the insulator layer, if the layer is thin, the effective voltage applied to the organic semiconductor increases, so the drive voltage and threshold voltage of the device itself can be lowered, but conversely between the source and gate. Therefore, it is necessary to select an appropriate film thickness, which is normally 10 nm to 5 ⁇ m, preferably 50 nm to 2 ⁇ m, and more preferably 100 nm to 1 ⁇ m.
- any orientation treatment may be performed between the insulator layer and the organic semiconductor layer.
- a preferable example thereof is a method for improving the crystallinity of the organic semiconductor layer by reducing the interaction between the insulator layer and the organic semiconductor layer by performing a water repellent treatment or the like on the surface of the insulator layer.
- Silane coupling agents such as hexamethyldisilazane, octadecyltrichlorosilane, trichloromethylsilazane, and self-organized alignment film materials such as alkane phosphoric acid, alkane sulfonic acid, and alkane carboxylic acid are insulated in a liquid phase or gas phase state.
- An example is a method in which the film is brought into contact with the surface of the film to form a self-assembled film, followed by appropriate drying treatment.
- a method in which a film made of polyimide or the like is provided on the surface of the insulating film and the surface is rubbed so as to be used for liquid crystal alignment is also preferable.
- the insulator layer can be formed by vacuum deposition, molecular beam epitaxy, ion cluster beam, low energy ion beam, ion plating, CVD, sputtering, JP-A-11-61406, 11-133205, JP-A 2000-121804, 2000-147209, 2000-185362, etc., dry process such as atmospheric pressure plasma method, spray coating method, spin coating method, blade coating Examples thereof include wet processes such as a method by coating such as a method, a dip coating method, a cast method, a roll coating method, a bar coating method, and a die coating method, and a patterning method such as printing and ink jetting.
- the wet process is a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as required, or an oxide precursor, for example,
- a so-called sol-gel method in which a solution of an alkoxide body is applied and dried is used.
- the method for forming the organic thin film transistor of the present invention is not particularly limited, and may be a known method. According to a desired element configuration, the substrate is charged, the gate electrode is formed, the insulator layer is formed, the organic semiconductor layer is formed, and the source electrode is formed. It is preferable to form a series of device manufacturing steps up to the formation of the drain electrode without being exposed to the atmosphere at all, because the device performance can be prevented from being impaired by moisture, oxygen, etc. in the atmosphere due to contact with the atmosphere. When it is unavoidable that the atmosphere must be exposed to the atmosphere once, the process after the organic semiconductor layer is formed is not exposed to the atmosphere at all.
- the surface on which the source electrode and the drain electrode are partially stacked on the insulating layer) is cleaned and activated by ultraviolet irradiation, ultraviolet / ozone irradiation, oxygen plasma, argon plasma, etc., and then the organic semiconductor layer is stacked. It is preferable.
- some p-type TFT materials are exposed to the atmosphere once, and the performance is improved by adsorbing oxygen or the like. Therefore, depending on the material, the materials are appropriately exposed to the atmosphere.
- a gas barrier layer may be formed on the whole or a part of the outer peripheral surface of the organic transistor element.
- the gas barrier layer As a material for forming the gas barrier layer, those commonly used in this field can be used, and examples thereof include polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyvinyl chloride, polyvinylidene chloride, and polychlorotrifluoroethylene. . Furthermore, the inorganic substance which has the insulation illustrated in the said insulator layer can also be used.
- an organic thin film light emitting transistor that emits light using a current flowing between a source electrode and a drain electrode and controls light emission by applying a voltage to the gate electrode. That is, an organic thin film transistor can be used as a light emitting element (organic EL). Since the transistor for controlling light emission and the light emitting element can be integrated, the aperture ratio of the display can be improved and the cost can be reduced by the simplification of the manufacturing process.
- organic EL light emitting element
- At least one of the source electrode and the drain electrode is a hole injecting electrode in order to improve the hole injecting property.
- a hole injection electrode is an electrode containing a substance having a work function of 4.2 eV or higher.
- at least one of the source electrode and the drain electrode is preferably an electron injectable electrode.
- An electron injecting electrode is an electrode containing a substance having a work function of 4.3 eV or less. More preferably, it is an organic thin-film light-emitting transistor provided with an electrode in which one is hole-injecting and the other is electron-injecting.
- the hole injection layer In order to improve the hole injection property, it is preferable to insert a hole injection layer between at least one of the source electrode and the drain electrode and the organic semiconductor layer.
- the hole injection layer include amine-based materials used as a hole injection material and a hole transport material in an organic EL device.
- an electron injecting layer between at least one of the source electrode and the drain electrode and the organic semiconductor layer.
- the electron injection material used for the organic EL element can be used for the electron injection layer as well as the hole. More preferably, one of the electrodes is provided with a hole injection layer and the other electrode is provided with an electron injection layer. It is a thin film light emitting transistor.
- the device using the organic thin film transistor of the present invention may be a device using the organic thin film transistor of the present invention, such as a circuit, a personal computer, a display, a mobile phone and the like.
- Example 1 Synthesis of Compound (1)
- Compound (1) was synthesized as follows.
- Triethylamine solution of 2.6 g (6.18 mmol) of compound (A), 0.36 g (0.309 mmol) of tetrakistriphenylphosphine palladium (0), 0.12 g (0.618 mmol) of copper (I) iodide in a reactor 15 ml was added, and 1.82 g (18.5 mmol) of trimethylsilylacetylene was added thereto, and the reactor was heated to reflux at 80 ° C. for 16 hours.
- the reaction mixture was filtered and washed with methanol and hexane to obtain 2.2 g (yield 80%) of a crude product of compound (B). This was directly used in the next reaction.
- Example 2 (Production of organic thin film transistor) An organic thin film transistor was produced by the following procedure. First, the surface of a Si substrate (also used as a P-type specific resistance 1 ⁇ cm gate electrode) was oxidized by a thermal oxidation method to produce a 300 nm thermal oxide film on the substrate to form an insulator layer. Further, after the SiO 2 film formed on one side of the substrate is completely removed by dry etching, chromium is deposited to a thickness of 20 nm by sputtering, and further gold (Au) is sputtered by 100 nm by sputtering. A film was formed and taken out as an electrode. This substrate was ultrasonically cleaned with a neutral detergent, pure water, acetone and ethanol for 30 minutes each, and further subjected to ozone cleaning.
- a neutral detergent, pure water, acetone and ethanol for 30 minutes each, and further subjected to ozone cleaning.
- the substrate was subjected to a surface treatment by heating the substrate in a hexamethyldisilazane atmosphere for 3 hours.
- the surface-treated substrate was placed in a vacuum vapor deposition apparatus (ULVAC, EX-400), and the compound (1) was deposited on the insulator layer at a deposition rate of 0.05 nm / s and a 50 nm thick organic semiconductor. Deposited as a layer.
- gold was deposited to a thickness of 50 nm through a metal mask, so that a source electrode and a drain electrode that were not in contact with each other were formed so that a distance (channel length L) was 75 ⁇ m.
- an organic thin film transistor was manufactured by forming a film so that the width (channel width W) of the source electrode and the drain electrode was 5 mm (see FIG. 3).
- the source - a current was passed by applying a voltage between the drain.
- the on / off ratio of the current between the source and drain electrodes in the current saturation region was 2 ⁇ 10 6 .
- I D (W / 2L) ⁇ C ⁇ ⁇ (V G ⁇ V T ) 2 (A)
- ID is a source-drain current
- W is a channel width
- L is a channel length
- C is a capacitance per unit area of the gate insulator layer
- V T is a gate threshold voltage
- V G is a gate voltage.
- Example 8 Manufacture of an organic thin film transistor using a coating process
- the substrate was washed in the same manner as in Example 2 to form a gate electrode and an insulator layer.
- 0.5% by mass of the compound (50) was dissolved in chloroform, and a film was formed on a substrate on which the insulator layer was formed with a spin coater (Mikasa Co., Ltd .: 1H-D7).
- the film was dried at 0 ° C. to form an organic semiconductor layer.
- gold (Au) was formed in a film thickness of 50 nm through a metal mask with a vacuum evaporation apparatus to form source and drain electrodes that were not in contact with each other, and an organic thin film transistor was manufactured.
- the obtained organic thin film transistor was p-type driven at the gate voltage V G of ⁇ 70 V in the same manner as in Example 2.
- Table 1 shows the results of measuring the on / off of the current between the source and drain electrodes and calculating the field effect mobility ⁇ of the holes.
- Examples 9 to 12 (Production of organic thin-film transistors using a coating process) An organic thin film transistor was fabricated in the same manner as in Example 8 except that the compound (8), (12), (13), and (14) were used in place of the compound (50) as the material of the organic semiconductor layer. The obtained organic thin film transistor was p-type driven at a gate voltage V G of ⁇ 70 V in the same manner as in Example 8. Table 1 shows the results of measuring the on / off ratio of the current between the source and drain electrodes and calculating the field effect mobility ⁇ of the holes.
- Comparative Example 1 (Production of organic thin film transistor) An organic thin film transistor was produced in the same manner as in Example 1 except that the following comparative compound (1) was used instead of the compound (1) as the material of the organic semiconductor layer. The obtained organic thin film transistor was p-type driven at the gate voltage V G of ⁇ 70 V in the same manner as in Example 1. Table 1 shows the results of measuring the on / off ratio of the current between the source and drain electrodes and calculating the field effect mobility ⁇ of the holes.
- Comparative Example 2 (Production of organic thin film transistor using coating process) An organic thin film transistor was produced in the same manner as in Example 8 except that the comparative compound (1) was used instead of the compound (1) as the material of the organic semiconductor layer. However, since the comparative compound (1) is hardly soluble, an organic thin film transistor cannot be produced by the coating process.
- the compounds used in the examples are excellent in film formability and can be applied to the coating process, or have a higher mobility than the comparative compounds when formed by the vapor deposition process. I understand.
- the compound of the present invention is excellent in film formability and has high field effect mobility, and therefore can be suitably used as a material for an organic semiconductor layer of an organic thin film transistor.
- the transistor using the compound of the present invention can also be used as an organic thin film light emitting transistor capable of emitting light.
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Abstract
Description
従来、このTFTは、アモルファスや多結晶のシリコンを用いて作製されていたが、このようなシリコンを用いたTFTの作製に用いられるCVD装置は、非常に高額であり、TFTを用いた表示装置等の大型化は、製造コストの大幅な増加を伴うという問題点があった。また、アモルファスや多結晶のシリコンを成膜するプロセスは非常に高い温度下で行われるので、基板として使用可能な材料の種類が限られてしまうため、軽量な樹脂基板等は使用できないという問題があった。
有機TFTに用いる有機物半導体として、p型FET(電界効果トランジスタ)の材料としては、共役系ポリマーやチオフェン等の多量体、金属フタロシアニン化合物、ペンタセン等の縮合芳香族炭化水素等が、単体又は他の化合物との混合物の状態で用いられている。また、n型FETの材料としては、例えば、1,4,5,8-ナフタレンテトラカルボキシジアンヒドライド(NTCDA)、11,11,12,12-テトラシアノナフト-2,6-キノジメタン(TCNNQD)、1,4,5,8-ナフタレンテトラカルボキシジイミド(NTCDI)や、フッ素化フタロシアニンが知られている。
尚、ここで言うオン/オフ比とは、ゲート電圧をかけたとき(オン)のソース-ドレイン間に流れる電流を、ゲート電圧をかけないとき(オフ)のソース-ドレイン間に流れる電流で割った値であり、オン電流とは通常ゲート電圧を増加させていき、ソース-ドレイン間に流れる電流が飽和したときの電流値(飽和電流)のことである。
又は、式(2)において、R7~R12のうち2つのみが、ハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよい。ただし、R7~R12のうち2つのみがメチル基の場合には、これらメチル基は隣接せず、残りのR7~R12は水素原子である。
又は式(2)において、R7~R12のうち3つのみがハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよく、残りのR7~R12は水素原子である。]
より好ましくはR1,R2が共に上記の基である。
より好ましくはR1,R2が共に上記の基である。
又は、式(2)において、R7~R12のうち2つのみが、ハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよい。ただし、R7~R12のうち2つのみがメチル基の場合には、これらメチル基は隣接せず、残りのR7~R12は水素原子である。
又は式(2)において、R7~R12のうち3つのみがハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよく、残りのR7~R12は水素原子である。]
前記ハロゲン原子は、フッ素、塩素、臭素及びヨウ素原子が挙げられる。
前記アルキル基としては、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、s-ブチル基、イソブチル基、t-ブチル基、n-ペンチル基、n-ヘキシル基、n-ヘプチル基、n-オクチル基、n-ノニル基、n-デシル基、n-ウンデシル基、n-ドデシル基、n-トリデシル基、n-テトラデシル基、n-ペンタデシル基、n-ヘキサデシル基、n-ヘプタデシル基、n-オクタデシル基、n-ノナデシル基、n-イコサン基、n-ヘニコサン基、n-ドコサン基、n-トリコサン基、n-テトラコサン基、n-ペンタコサン基、n-ヘキサコサン基、n-ヘプタコサン基、n-オクタコサン基、n-ノナコサン基、n-トリアコンタン基等が挙げられる。
非特許文献Journal of Organic Chemistry 1992年、56巻、6749-6755ページに記載の方法に従って合成した公知化合物3,6-ジヨードベンゼン-1,2-ジアミンを原料に、ザンドマイヤー反応を行い、その後、(A)の鈴木・宮浦カップリング、(B)の薗頭カップリングに代表される遷移金属触媒を用いた各種カップリング反応により中間体を合成し、その中間体を下記の反応(C)のような脱シリル化反応、(D)のような金属塩を用いた環化反応を行うことにより合成できる。
本発明の有機薄膜トランジスタの素子構成は、少なくとも基板上にゲート電極、ソース電極及びドレイン電極の3端子、絶縁体層並びに有機半導体層が設けられ、ソース-ドレイン間電流をゲート電極に電圧を印加することによって制御する薄膜トランジスタである。そして、有機半導体層が上述した本発明の有機薄膜トランジスタ用化合物を含むことを特徴とする。
トランジスタの構造は、特に限定されず、有機半導体層の成分以外が公知の素子構成を有するものであってもよい。有機薄膜トランジスタの素子構成の具体例を図を用いて説明する。
図1の有機薄膜トランジスタ1は、基板10上に、相互に所定の間隔をあけて対向するように形成されたソース電極11及びドレイン電極12を有する。そして、ソース電極11、ドレイン電極12及びそれらの間の間隙を覆うように有機半導体層13が形成され、さらに、絶縁体層14が積層されている。絶縁体層14の上部であって、かつソース電極11及びドレイン電極12の間の間隙上にゲート電極15が形成されている。
例えば、産業技術総合研究所の吉田らにより第49回応用物理学関係連合講演会講演予稿集27a-M-3(2002年3月)において提案されたトップアンドボトムコンタクト型有機薄膜トランジスタ(図5参照)や、千葉大学の工藤らにより電気学会論文誌118-A(1998)1440頁において提案された縦形の有機薄膜トランジスタ(図6参照)のような素子構成を有するものであってもよい。
以下、有機薄膜トランジスタの構成部材について説明する。
本発明の有機薄膜トランジスタにおける有機半導体層は、上述した本発明の有機薄膜トランジスタ用化合物を含む。有機半導体層の膜厚は、特に制限されることはないが、通常、0.5nm~1μmであり、2nm~250nmであると好ましい。
また、有機半導体層の形成方法は特に限定されることはなく公知の方法を適用でき、例えば、分子線蒸着法(MBE法)、真空蒸着法、化学蒸着、材料を溶媒に溶かした溶液のディッピング法、スピンコーティング法、キャスティング法、バーコート法、ロールコート法、インクジェット法等の印刷、塗布法及びベーキング、エレクトロポリマラインゼーション、分子ビーム蒸着、溶液からのセルフ・アセンブリ、及びこれらの組合せた手段により、前記したような有機半導体層の材料で形成される。
有機半導体層の結晶性を向上させると電界効果移動度が向上するため、成膜方法に関わらず成膜後にアニーリングを実施すると高性能デバイスが得られるため好ましい。アニーリングの温度は50~200℃が好ましく、70~200℃であるとさらに好ましく、時間は10分~12時間が好ましく、1~10時間であるとさらに好ましい。
本発明において、有機半導体層には、式(1)で示される化合物の1種類を用いてもよく、複数を組み合わせたり、ペンタセンやチオフェンオリゴマー等の公知の半導体を用いて複数の混合薄膜又は積層して用いてもよい。
本発明の有機薄膜トランジスタにおける基板は、有機薄膜トランジスタの構造を支持する役目を担うものであり、材料としてはガラスの他、金属酸化物や窒化物等の無機化合物、プラスチックフィルム(PET,PES,PC)や金属基板又はこれら複合体や積層体等も用いることが可能である。また、基板以外の構成要素により有機薄膜トランジスタの構造を十分に支持し得る場合には、基板を使用しないことも可能である。また、基板の材料としてはシリコン(Si)ウエハが用いられることが多い。この場合、Si自体をゲート電極兼基板として用いることができる。また、Siの表面を酸化し、SiO2を形成して絶縁層として活用することも可能である。この場合、基板兼ゲート電極のSi基板にリード線接続用の電極として、Au等の金属層を成膜することもある。
本発明の有機薄膜トランジスタにおける、ゲート電極、ソース電極及びドレイン電極の材料としては、導電性材料であれば特に限定されず、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチモン鉛、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、アルミニウム、ルテニウム、ゲルマニウム、モリブデン、タングステン、酸化スズ・アンチモン、酸化インジウム・スズ(ITO)、フッ素ドープ酸化亜鉛、亜鉛、炭素、グラファイト、グラッシーカーボン、銀ペースト及びカーボンペースト、リチウム、ベリリウム、ナトリウム、マグネシウム、カリウム、カルシウム、スカンジウム、チタン、マンガン、ジルコニウム、ガリウム、ニオブ、ナトリウム、ナトリウム-カリウム合金、マグネシウム、リチウム、アルミニウム、マグネシウム/銅混合物、マグネシウム/銀混合物、マグネシウム/アルミニウム混合物、マグネシウム/インジウム混合物、アルミニウム/酸化アルミニウム混合物、リチウム/アルミニウム混合物等が用いられる。
電極材料の仕事関数(W)をa、有機半導体層のイオン化ポテンシャルを(Ip)をb、有機半導体層の電子親和力(Af)をcとすると、以下の関係式を満たすことが好ましい。ここで、a、b及びcはいずれも真空準位を基準とする正の値である。
これらの中でも、貴金属(Ag,Au,Cu,Pt),Ni,Co,Os,Fe,Ga,Ir,Mn,Mo,Pd,Re,Ru,V,Wが好ましい。金属以外では、ITO、ポリアニリンやPEDOT:PSSのような導電性ポリマー及び炭素が好ましい。電極材料としてはこれらの高仕事関数の物質を1種又は複数含んでいても、仕事関数が前記式(I)を満たせば特に制限を受けるものではない。
低仕事関数金属の具体例としては、例えば化学便覧 基礎編II-493頁(改訂3版 日本化学会編 丸善株式会社発行1983年)に記載されている4.3eV又はそれ以下の仕事関数をもつ有効金属の前記リストから選別すればよく、Ag(4.26eV),Al(4.06,4.28eV),Ba(2.52eV),Ca(2.9eV),Ce(2.9eV),Cs(1.95eV),Er(2.97eV),Eu(2.5eV),Gd(3.1eV),Hf(3.9eV),In(4.09eV),K(2.28),La(3.5eV),Li(2.93eV),Mg(3.66eV),Na(2.36eV),Nd(3.2eV),Rb(4.25eV),Sc(3.5eV),Sm(2.7eV),Ta(4.0,4.15eV),Y(3.1eV),Yb(2.6eV),Zn(3.63eV)等が挙げられる。これらの中でも、Ba,Ca,Cs,Er,Eu,Gd,Hf,K,La,Li,Mg,Na,Nd,Rb,Y,Yb,Znが好ましい。電極材料としてはこれらの低仕事関数の物質を1種又は複数含んでいても、仕事関数が前記式(II)を満たせば特に制限を受けるものではない。ただし、低仕事関数金属は、大気中の水分や酸素に触れると容易に劣化してしまうので、必要に応じてAgやAuのような空気中で安定な金属で被覆することが望ましい。被覆に必要な膜厚は10nm以上必要であり、膜厚が熱くなるほど酸素や水から保護することができるが、実用上、生産性を上げる等の理由から1um以下にすることが望ましい。
p型有機薄膜トランジスタに対してはFeCl3、TCNQ、F4-TCNQ、HAT等のシアノ化合物、CFxやGeO2、SiO2、MoO3、V2O5、VO2、V2O3、MnO、Mn3O4、ZrO2、WO3、TiO2、In2O3、ZnO、NiO、HfO2、Ta2O5、ReO3、PbO2等のアルカリ金属、アルカリ土類金属以外の金属酸化物、ZnS、ZnSe等の無機化合物が望ましい。これらの酸化物は多くの場合、酸素欠損を起こし、これが正孔注入に好適である。さらにはTPDやNPD等のアミン系化合物やCuPc等有機EL素子において正孔注入層、正孔輸送層として用いられる化合物でもよい。また、上記の化合物二種類以上からなるものが望ましい。
本発明の有機薄膜トランジスタにおける絶縁体層の材料としては、電気絶縁性を有し薄膜として形成できるものであるのなら特に限定されず、金属酸化物(珪素の酸化物を含む)、金属窒化物(珪素の窒化物を含む)、高分子、有機低分子等室温での電気抵抗率が10Ωcm以上の材料を用いることができ、特に、比誘電率の高い無機酸化物皮膜が好ましい。
無機酸化物としては、酸化ケイ素、酸化アルミニウム、酸化タンタル、酸化チタン、酸化スズ、酸化バナジウム、チタン酸バリウムストロンチウム、ジルコニウム酸チタン酸バリウム、ジルコニウム酸チタン酸鉛、チタン酸鉛ランタン、チタン酸ストロンチウム、チタン酸バリウム、フッ化バリウムマグネシウム、ランタン酸化物、フッ素酸化物、マグネシウム酸化物、ビスマス酸化物、チタン酸ビスマス、ニオブ酸化物,チタン酸ストロンチウムビスマス、タンタル酸ストロンチウムビスマス、五酸化タンタル、タンタル酸ニオブ酸ビスマス、トリオキサイドイットリウム及びこれらを組合せたもの等が挙げられ、酸化ケイ素、酸化アルミニウム、酸化タンタル、酸化チタンが好ましい。
また、窒化ケイ素(Si3N4、SixNy(x、y>0))、窒化アルミニウム等の無機窒化物も好適に用いることができる。
前記アルコキシド金属における金属としては、例えば、遷移金属、ランタノイド、又は主族元素から選択され、具体的には、バリウム(Ba)、ストロンチウム(Sr)、チタン(Ti)、ビスマス(Bi)、タンタル(Ta)、ジルコン(Zr)、鉄(Fe)、ニッケル(Ni)、マンガン(Mn)、鉛(Pb)、ランタン(La)、リチウム(Li)、ナトリウム(Na)、カリウム(K)、ルビジウム(Rb)、セシウム(Cs)、フランシウム(Fr)ベリリウム(Be)マグネシウム(Mg)、カルシウム(Ca)、ニオブ(Nb)、タリウム(Tl)、水銀(Hg)、銅(Cu)、コバルト(Co)、ロジウム(Rh)、スカンジウム(Sc)及びイットリウム(Y)等が挙げられる。また、前記アルコキシド金属におけるアルコキシドとしては、例えば、メタノール、エタノール、プロパノール、イソプロパノール、ブタノール、イソブタノール等を含むアルコール類、メトキシエタノール、エトキシエタノール、プロポキシエタノール、ブトキシエタノール、ペントキシエタノール、ヘプトキシエタノール、メトキシプロパノール、エトキシプロパノール、プロポキシプロパノール、ブトキシプロパノール、ペントキシプロパノール、ヘプトキシプロパノールを含むアルコキシアルコール類等から誘導されるものが挙げられる。
有機化合物を用いた絶縁体層としては、ポリイミド、ポリアミド、ポリエステル、ポリアクリレート、光ラジカル重合系、光カチオン重合系の光硬化性樹脂、アクリロニトリル成分を含有する共重合体、ポリビニルフェノール、ポリビニルアルコール、ノボラック樹脂、及びシアノエチルプルラン等を用いることもできる。
絶縁体層に用いる有機化合物材料、高分子材料として、特に好ましいのは撥水性を有する材料である。撥水性を有することにより絶縁体層と有機半導体層との相互作用を抑え、有機半導体が本来保有している凝集性を利用して有機半導体層の結晶性を高めデバイス性能を向上させることができる。このような例としては、Yasudaら Jpn.J.Appl.Phys.Vol.42(2003)pp.6614-6618に記載のポリパラキシリレン誘導体やJanos Veres ら Chem.Mater.,Vol.16(2004)pp.4543-4555に記載のものが挙げられる。
また、前記絶縁体層は、陽極酸化膜、又は該陽極酸化膜を構成として含んでもよい。陽極酸化膜は封孔処理されることが好ましい。陽極酸化膜は、陽極酸化が可能な金属を公知の方法により陽極酸化することにより形成される。陽極酸化処理可能な金属としては、アルミニウム又はタンタルを挙げることができ、陽極酸化処理の方法には特に制限はなく、公知の方法を用いることができる。陽極酸化処理を行なうことにより、酸化被膜が形成される。陽極酸化処理に用いられる電解液としては、多孔質酸化皮膜を形成することができるものならばいかなるものでも使用でき、一般には、硫酸、燐酸、蓚酸、クロム酸、ホウ酸、スルファミン酸、ベンゼンスルホン酸等あるいはこれらを2種類以上組み合わせた混酸又はそれらの塩が用いられる。陽極酸化の処理条件は使用する電解液により種々変化するので一概に特定し得ないが、一般的には、電解液の濃度が1~80質量%、電解液の温度5~70℃、電流密度0.5~60A/cm2、電圧1~100ボルト、電解時間10秒~5分の範囲が適当である。好ましい陽極酸化処理は、電解液として硫酸、リン酸又はホウ酸の水溶液を用い、直流電流で処理する方法であるが、交流電流を用いることもできる。これらの酸の濃度は5~45質量%であることが好ましく、電解液の温度20~50℃、電流密度0.5~20A/cm2で20~250秒間電解処理するのが好ましい。
絶縁体層の厚さとしては、層の厚さが薄いと有機半導体に印加される実効電圧が大きくなるので、デバイス自体の駆動電圧、閾電圧を下げることができるが、逆にソース-ゲート間のリーク電流が大きくなるので、適切な膜厚を選ぶ必要があり、通常10nm~5μm、好ましくは50nm~2μm、さらに好ましくは100nm~1μmである。
さらに、例えば、大気中に含まれる酸素、水等の有機半導体層に対する影響を考慮し、有機トランジスタ素子の外周面の全面又は一部に、ガスバリア層を形成してもよい。ガスバリア層を形成する材料としては、この分野で常用されるものを使用でき、例えば、ポリビニルアルコール、エチレン-ビニルアルコール共重合体、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリクロロトリフロロエチレン等が挙げられる。さらに、前記絶縁体層で例示した、絶縁性を有する無機物も使用できる。
また、電子の注入性を向上させるため、ソース電極及びドレイン電極の少なくとも一方は電子注入性電極であることが好ましい。電子注入性電極とは上記仕事関数4.3eV以下の物質を含む電極である。
さらに好ましくは一方が正孔注入性であり、且つ、もう一方が電子注入性である電極を備える有機薄膜発光トランジスタである。
また、電子の注入性を向上させるため、ソース電極及びドレイン電極の少なくとも一方電極と有機半導体層の間に電子注入性層を挿入すること好ましい。正孔と同じく電子注入層には有機EL素子に用いられる電子注入材料を用いることができる
さらに好ましくは一方の電極に正孔注入層を備え、且つ、もう一方の電極に電子注入層を備える有機薄膜発光トランジスタである。
[実施例]
実施例1(化合物(1)の合成)
化合物(1)を以下のようにして合成した。
FD-MS(フィールドディソープションマス分析)の測定により目的物であることを確認した。FD-MSの測定結果を以下に示す。
<FD-MS測定>
装置:HX110(日本電子社製)
条件:加速電圧 8kV
スキャンレンジ m/z=50~1500
FD-MS(フィールドディソープションマス分析)の測定により目的物であることを確認した。FD-MSの測定結果を以下に示す。
<FD-MS測定>
装置:HX110(日本電子社製)
条件:加速電圧 8kV
スキャンレンジ m/z=50~1500
有機薄膜トランジスタを以下の手順で作製した。まず、Si基板(P型比抵抗1Ωcmゲート電極兼用)を熱酸化法にて表面を酸化させ、基板上300nmの熱酸化膜を作製して絶縁体層とした。さらに基板の一方に成膜したSiO2膜をドライエッチングにて完全に除去した後、スパッタ法にてクロムを20nmの膜厚で成膜し、さらにその上に金(Au)を100nmスパッタにて成膜し取り出し電極とした。この基板を、中性洗剤、純水、アセトン及びエタノールで各30分超音波洗浄し、さらにオゾン洗浄を行った。
ID=(W/2L)・Cμ・(VG-VT)2 (A)
式中、IDはソース-ドレイン間電流、Wはチャンネル幅、Lはチャンネル長、Cはゲート絶縁体層の単位面積あたりの電気容量、VTはゲート閾値電圧、VGはゲート電圧である。
実施例1の化合物(A)の合成に用いた4-メチルボロン酸をそれぞれ対応するボロン酸誘導体とした他は、実施例1と同様にして化合物(8)、(12)、(13)、(14)、(50)を得た。
また、化合物(D)の合成において、それぞれ対応するN-(4-アルキルシクロヘキシリデン)シクロヘキサナミンを用いた他は、実施例1と同様にして化合物(8)、(12)、(13)、(14)を合成した。
FD-MSの測定により目的物であることを確認した。FD-MSの測定結果を以下に示す。
FD-MS,calcd for C38H46=502,found,m/z=502(M+,100)
FD-MS,calcd for C46H62=614,found,m/z=614(M+,100)
FD-MS,calcd for C48H66=642,found,m/z=642(M+,100)
FD-MS,calcd for C50H70=670,found,m/z=670(M+,100)
FD-MS, calcd for C34H38O2=478,found,m/z=478(M+,100)
実施例2と同様に基板を洗浄し、ゲート電極、絶縁体層を成膜した。次いで、前記化合物(50)をクロロホルムに0.5質量%溶解させ、前記絶縁体層まで成膜した基板の上にスピンコーター(ミカサ社製:1H-D7)で成膜し、窒素雰囲気下80℃にて乾燥させ有機半導体層として成膜した。次いで、真空蒸着装置で金属マスクを通して金(Au)を50nmの膜厚で成膜することにより、互いに接しないソース及びドレイン電極を形成し、有機薄膜トランジスタを作製した。得られた有機薄膜トランジスタについて、実施例2と同様にして、-70Vのゲート電圧VGにてp型駆動させた。ソース-ドレイン電極間の電流のオン/オフを測定し、正孔の電界効果移動度μを算出した結果を表1に示す。
有機半導体層の材料として、化合物(50)の代わりに前記化合物(8)、(12)、(13)、(14)を用いた以外は、実施例8と同様にして有機薄膜トランジスタを作製した。得られた有機薄膜トランジスタについて、実施例8と同様にして、-70Vのゲート電圧VGにてp型駆動させた。ソース-ドレイン電極間の電流のオン/オフ比を測定し、正孔の電界効果移動度μを算出した結果を表1に示す。
有機半導体層の材料として、化合物(1)の代わりに下記比較化合物(1)を用いた以外は、実施例1と同様にして有機薄膜トランジスタを作製した。得られた有機薄膜トランジスタについて、実施例1と同様にして、-70Vのゲート電圧VGにてp型駆動させた。ソース-ドレイン電極間の電流のオン/オフ比を測定し、正孔の電界効果移動度μを算出した結果を表1に示す。
有機半導体層の材料として、化合物(1)の代わりに前記比較化合物(1)を用いた以外は、実施例8と同様にして有機薄膜トランジスタの作製を試みた。しかしながら、比較化合物(1)は難溶性のため、塗布プロセスでは有機薄膜トランジスタを作製できなかった。
この明細書に記載の文献の内容を全てここに援用する。
Claims (10)
- 下記式(1)の構造を有する有機薄膜トランジスタ用化合物。
- R1,R3,R5の少なくとも1つ及び、R2,R4,R6の少なくとも1つが水素原子ではない請求項1に記載の有機薄膜トランジスタ用化合物。
- R1,R2の少なくとも1つが、ハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数5~60のアルキルシリルアセチレン基、又はシアノ基であって、これら各基は置換基を有していてもよく、残りのR1~R6は水素原子である請求項1又は2に記載の有機薄膜トランジスタ用化合物。
- R1,R2の少なくとも1つが、炭素数6~60の芳香族炭化水素基又は炭素数3~60の芳香族複素環基であって、これら各基は置換基を有していてもよく、残りのR1~R6は水素原子である請求項1又は2に記載の有機薄膜トランジスタ用化合物。
- 少なくとも基板上にゲート電極、ソース電極及びドレイン電極の3端子、絶縁体層並びに有機半導体層が設けられ、ソース-ドレイン間電流をゲート電極に電圧を印加することによって制御する有機薄膜トランジスタにおいて、
前記有機半導体層が、請求項1~4のいずれかに記載の有機薄膜トランジスタ用化合物を含む有機薄膜トランジスタ。 - ソース-ドレイン間を流れる電流を利用して発光し、ゲート電極に電圧を印加することによって発光を制御する請求項5に記載の有機薄膜トランジスタ。
- ソース電極及びドレイン電極の一方が仕事関数4.2eV以上の物質からなり、他方が仕事関数4.3eV以下の物質からなる請求項6に記載の有機薄膜トランジスタ。
- ソース及びドレイン電極と有機半導体層の間にバッファ層を有する請求項5~7のいずれかに記載の有機薄膜トランジスタ。
- 請求項5~8のいずれかに記載の有機薄膜トランジスタを備えた装置。
- 下記式(2)で表されるピセン化合物。
又は、式(2)において、R7~R12のうち2つのみが、ハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよい。ただし、R7~R12のうち2つのみがメチル基の場合には、これらメチル基は隣接せず、残りのR7~R12は水素原子である。
又は式(2)において、R7~R12のうち3つのみがハロゲン原子、炭素数1~30のアルキル基、炭素数1~30のハロアルキル基、炭素数1~30のアルコキシ基、炭素数1~30のハロアルコキシ基、炭素数1~30のアルキチオ基、炭素数1~30のハロアルキルチオ基、炭素数1~30のアルキルアミノ基、炭素数2~60のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1~30のアルキルスルホニル基、炭素数1~30のハロアルキルスルホニル基、炭素数6~60の芳香族炭化水素基、炭素数3~60の芳香族複素環基、炭素数3~20のアルキルシリル基、炭素数5~60のアルキルシリルアセチレン基又はシアノ基であり、これら各基は置換基を有していてもよく、残りのR7~R12は水素原子である。]
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JP (1) | JPWO2010016511A1 (ja) |
KR (1) | KR20110057133A (ja) |
CN (1) | CN102177598B (ja) |
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Cited By (10)
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JPWO2010024388A1 (ja) * | 2008-08-29 | 2012-01-26 | 出光興産株式会社 | 有機薄膜トランジスタ用化合物及びそれを用いた有機薄膜トランジスタ |
JP2012067051A (ja) * | 2010-09-27 | 2012-04-05 | Idemitsu Kosan Co Ltd | 有機薄膜トランジスタ用化合物及びそれを用いた有機薄膜トランジスタ |
JP2014058501A (ja) * | 2012-05-22 | 2014-04-03 | Adeka Corp | ピセン及びその誘導体の製造方法 |
JP2014240483A (ja) * | 2013-05-13 | 2014-12-25 | 株式会社Adeka | ピセン誘導体、光電変換材料及び光電変換素子 |
WO2015016344A1 (ja) * | 2013-08-02 | 2015-02-05 | 富士フイルム株式会社 | 化合物、有機トランジスタ及びその応用 |
JP2015032716A (ja) * | 2013-08-02 | 2015-02-16 | 富士フイルム株式会社 | 有機薄膜トランジスタ、有機半導体薄膜および有機半導体材料 |
JP2015032715A (ja) * | 2013-08-02 | 2015-02-16 | 富士フイルム株式会社 | 有機薄膜トランジスタ、有機半導体薄膜および有機半導体材料 |
WO2015098604A1 (ja) * | 2013-12-24 | 2015-07-02 | 富士フイルム株式会社 | 有機トランジスタ、化合物、非発光性有機半導体デバイス用有機半導体材料、有機トランジスタ用材料、非発光性有機半導体デバイス用塗布溶液、非発光性有機半導体デバイス用有機半導体膜 |
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JP2017154993A (ja) * | 2016-02-29 | 2017-09-07 | 国立大学法人群馬大学 | フェナセン化合物、フェナセン化合物の製造方法及び有機発光素子 |
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- 2009-08-05 KR KR1020117003842A patent/KR20110057133A/ko not_active Application Discontinuation
- 2009-08-05 CN CN200980139877.6A patent/CN102177598B/zh not_active Expired - Fee Related
- 2009-08-05 US US13/057,820 patent/US8575599B2/en not_active Expired - Fee Related
- 2009-08-05 WO PCT/JP2009/063846 patent/WO2010016511A1/ja active Application Filing
- 2009-08-10 TW TW098126756A patent/TW201014006A/zh unknown
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WO2015016344A1 (ja) * | 2013-08-02 | 2015-02-05 | 富士フイルム株式会社 | 化合物、有機トランジスタ及びその応用 |
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JP2015122437A (ja) * | 2013-12-24 | 2015-07-02 | 富士フイルム株式会社 | 有機薄膜トランジスタ、有機半導体薄膜および有機半導体材料 |
WO2016117389A1 (ja) * | 2015-01-19 | 2016-07-28 | 富士フイルム株式会社 | 有機薄膜トランジスタ及びその製造方法 |
JPWO2016117389A1 (ja) * | 2015-01-19 | 2017-09-28 | 富士フイルム株式会社 | 有機薄膜トランジスタ及びその製造方法 |
JP2017154993A (ja) * | 2016-02-29 | 2017-09-07 | 国立大学法人群馬大学 | フェナセン化合物、フェナセン化合物の製造方法及び有機発光素子 |
Also Published As
Publication number | Publication date |
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TW201014006A (en) | 2010-04-01 |
JPWO2010016511A1 (ja) | 2012-01-26 |
US20110220883A1 (en) | 2011-09-15 |
US8575599B2 (en) | 2013-11-05 |
CN102177598B (zh) | 2014-05-14 |
KR20110057133A (ko) | 2011-05-31 |
CN102177598A (zh) | 2011-09-07 |
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