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WO2008038610A1 - Appareil de déshydratation/séchage et procédé de déshydratation/séchage - Google Patents

Appareil de déshydratation/séchage et procédé de déshydratation/séchage Download PDF

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Publication number
WO2008038610A1
WO2008038610A1 PCT/JP2007/068502 JP2007068502W WO2008038610A1 WO 2008038610 A1 WO2008038610 A1 WO 2008038610A1 JP 2007068502 W JP2007068502 W JP 2007068502W WO 2008038610 A1 WO2008038610 A1 WO 2008038610A1
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WO
WIPO (PCT)
Prior art keywords
cleaned
cleaning liquid
solvent
tank
alcohol
Prior art date
Application number
PCT/JP2007/068502
Other languages
English (en)
Japanese (ja)
Inventor
Koujiro Ookawa
Original Assignee
Koujiro Ookawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koujiro Ookawa filed Critical Koujiro Ookawa
Publication of WO2008038610A1 publication Critical patent/WO2008038610A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements

Definitions

  • the present invention is used for separating and removing moisture from, for example, a glass substrate, a liquid crystal display panel, or an object to be washed that has been subjected to a washing treatment such as an electronic component, an optical component, a precision component, or a metal component.
  • V A draining and drying apparatus and a draining and drying method.
  • a work with moisture attached thereto is mixed in a mixed liquid obtained by mixing isopropyl alcohol (IPA) and hyde mouth fluoroether (HFE) stored in a cleaning tank.
  • IPA isopropyl alcohol
  • HFE hyde mouth fluoroether
  • there draining drying device power s drying process the workpiece by the steam layer is released into the washing tank upward Hyde port Furuoroeteru.
  • Patent Document 1 Japanese Patent Laid-Open No. 10-290901
  • the present invention removes and removes water from an object to be cleaned after washing with water.
  • the provision of a draining and drying apparatus and a draining and drying method that can be drained and dried in a dry state will be provided.
  • the draining and drying apparatus of the invention described in claim 1 immerses an object to be cleaned in a cleaning liquid obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in an immersion tank, A draining and drying apparatus that dissolves water adhering to an object to be cleaned in an alcohol-based solvent to separate and remove the water from the object to be cleaned, on the surface of the cleaning liquid stored in the immersion tank.
  • a vapor layer composed of vapor of the cleaning liquid heated to a temperature at which evaporation of the cleaning liquid adhering to the object to be cleaned is promoted, and irradiating far-infrared rays on the object to be cleaned taken out from the vapor layer
  • a far-infrared spring heating means for heating to a temperature at which the alcoholic solvent adhering to the object to be cleaned evaporates.
  • the object to be cleaned attached with water is immersed in a cleaning solution obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in an immersion tank, and the water adhering to the object to be cleaned is removed. It is dissolved in an alcohol solvent to separate and remove water from the object to be cleaned.
  • the object to be cleaned after immersion cleaning taken out from the cleaning liquid is moved into a vapor layer formed of vapor of the cleaning liquid formed on the liquid surface of the cleaning liquid, and the cleaning liquid adhering to the object to be cleaned by the vapor of the cleaning liquid Heat to a temperature that promotes evaporation.
  • the object to be cleaned after steam cleaning taken out from the vapor layer is heated uniformly by far infrared rays emitted from the far infrared heating means, and the alcoholic solvent containing water and an alcohol solvent that adheres to the object to be cleaned Evaporate the solvent, drain and dry.
  • the object to be cleaned can be composed of, for example, a glass substrate, a liquid crystal display panel, or an electronic component, an optical component, a precision component, a metal component, or the like.
  • the fluorine-based solvent constituting the cleaning liquid is composed of, for example, a single solvent or a composite solvent containing, as a main component, hydride fluorocarbon (HFE), hydride fluorocarbon (HFC), hydride chlorofluorocarbon (HCFC), or the like. I can do it.
  • Asahi Clin AE-31 manufactured by Asahi Glass Co., Ltd. is used as an example of the cleaning liquid.
  • Force S using 00E (trade name) other companies' solvents may be used as cleaning liquid.
  • the latent heat of vaporization of moisture is 2259KJ / Kg.
  • the draining and drying apparatus of the invention described in claim 2 combines the structure described in claim 1 with a liquid containing water that floats on the liquid surface portion of the cleaning liquid stored in the immersion tank.
  • the dipping bath is configured to be overflowable in all directions.
  • the water adhering to the object to be cleaned is dissolved in the alcohol-based solvent mixed in the cleaning liquid, and the specific gravity of the liquid containing the water is lighter than the specific gravity of the cleaning liquid not containing the water.
  • Liquid containing water floats on the surface of the cleaning liquid stored in the immersion tank and overflows in all directions outside the immersion tank, so alcoholic solvents are used near the corners and the periphery of the immersion tank.
  • the draining and drying apparatus of the invention described in claim 3 combines with the configuration described in claim 1 and heats a fluorinated solvent having a boiling point higher than the fluorinated solvent of the cleaning liquid in the immersion tank.
  • a solvent heating means as a medium is provided.
  • the solvent heating means using the fluorine-based solvent of the cleaning liquid stored in the immersion tank as a heating medium, the fluorine-based solvent having a boiling point higher than that of the fluorine-based solvent of the cleaning liquid. Since it evaporates by heating, it is easier to control the temperature of the cleaning liquid than to use another solvent as a heating medium.
  • the draining and drying apparatus of the invention described in claim 4 is characterized in that, in addition to the configuration described in claim 1, the far infrared heating means is configured by a plate-shaped far infrared heater.
  • the far-infrared radiation radiated from the far-infrared heater is uniformly irradiated to the object to be cleaned taken out from the vapor layer, so that a difference in drying speed or unevenness in drying occurs. There is nothing.
  • the draining and drying method immerses an object to be cleaned that has adhered moisture. It is immersed in a cleaning liquid that is a mixture of a fluorine-based solvent and an alcohol-based solvent stored in a tank, so that water adhering to the object to be cleaned is dissolved in the alcohol-based solvent, and the substrate removed from the cleaning liquid is used.
  • the washing liquid is moved to a vapor layer made of the washing liquid vapor formed on the surface of the washing liquid, and the washing liquid vapor is heated to a temperature at which evaporation of the washing liquid remaining on the washing object is promoted.
  • the object to be cleaned taken out from the vapor layer is heated by far infrared radiation emitted from the far infrared heating means, and the alcoholic solvent remaining on the object to be cleaned is evaporated and dried. It is characterized by that.
  • the object to be cleaned attached with water is immersed in a cleaning liquid obtained by mixing a fluorine-based solvent and an alcohol-based solvent stored in an immersion tank, and the water adhering to the object to be cleaned is removed. It is dissolved in an alcohol solvent to separate and remove water from the object to be cleaned.
  • the object to be cleaned after immersion cleaning taken out from the cleaning liquid is moved into a vapor layer made of the cleaning liquid vapor formed on the surface of the cleaning liquid, and the cleaning liquid adheres to the target object by the cleaning liquid vapor.
  • the mixture is heated to a temperature that promotes evaporation and vaporization.
  • the object to be cleaned after steam cleaning taken out from the vapor layer is heated by far infrared radiation emitted from the far infrared heating means, and the alcohol solvent that adheres to the object to be cleaned or the alcohol solvent containing water Is evaporated and evaporated to dryness.
  • the alcoholic solvent remaining on the object to be cleaned according to claims 1 and 5 means that when the object to be cleaned is taken out of the vapor layer, moisture in the atmosphere existing above the vapor layer is adsorbed. It contains an alcohol solvent.
  • the water adhering to the object to be cleaned is dissolved in the cleaning liquid in the immersion tank and separated.
  • the object to be cleaned after immersion cleaning is heated uniformly by the steam composed of the cleaning liquid of the vapor layer and the far infrared ray emitted from the far infrared ray heating means, and the alcohol adhering to the object to be cleaned. Since the solvent solvent and the alcohol solvent containing water are evaporated, the object to be cleaned after the water washing treatment can be drained and dried in a state where the water is separated and removed. In addition, since the alcoholic solvent with high water solubility is separated and removed from the object to be cleaned, when it is taken out from the vapor layer, it is dried and drained so that the moisture in the atmosphere does not reattach to the object to be cleaned. Can keep. Brief Description of Drawings
  • FIG. 1 is a longitudinal front view showing a process of processing an object to be cleaned by a drainer / dryer.
  • FIG. 2 is a central longitudinal side view showing a state in which an object to be cleaned is immersed in a cleaning liquid in an immersion tank.
  • FIG. 3 is a perspective view showing a state in which the cleaning liquid overflows in all directions of the immersion tank.
  • FIG. 4 is an explanatory diagram showing an operation of immersing an object to be cleaned in a cleaning liquid in an immersion tank.
  • FIG. 5 is an explanatory diagram showing an operation of heating an object to be cleaned with far infrared rays.
  • FIG. 6 is a perspective view showing an example in which far-infrared heaters are arranged at the same height.
  • FIG. 7 is a perspective view showing another example in which far-infrared heaters are arranged vertically.
  • FIG. 8 is a longitudinal front view showing another example in which a far-infrared heater is disposed in a treatment tank.
  • the object of the present invention is to dissolve the water adhering to the object to be cleaned in the cleaning liquid of the immersion tank, for the purpose of draining and drying the object to be cleaned after being washed with water in a state where the water is separated and removed. This was achieved by heating with steam composed of the cleaning liquid for the vapor layer and far infrared rays emitted from the far infrared heating means.
  • the drawings show the water draining drying apparatus and the water draining drying method used when separating / removing the water adhering to the object to be cleaned after the washing!
  • this draining and drying apparatus 1 is provided with an inlet 2a on the left side of the processing chamber 2 where the washed object A to be washed is allowed to be loaded, and the washed object A that has been drained and dried. Is provided on the right side of the processing chamber 2.
  • a processing tank 3 for separating and removing moisture from the object to be cleaned A is disposed.
  • an immersion tank 4 in which a cleaning liquid B for immersing the object A to be cleaned is stored is placed!
  • a vapor layer 5 made of the vapor Ba of the cleaning liquid B is provided on the left side of the treatment tank 3.
  • far infrared heaters 6, 6 for heating the object A to be cleaned taken out from the vapor layer 5 are arranged!
  • the carry-in compressor 7 disposed at the carry-in port 2a carries the water-washed! / And the treated object A to be treated into the left side of the treatment chamber 2.
  • the unloading compressor 8 arranged at the unloading port 2b unloads the material A to be washed and dried to the outside right side of the processing chamber 2. Further, the carry-in port 2a and the carry-out port 2b are opened immediately before the cleaning object A passes, and are closed immediately after the cleaning object A passes.
  • the transporting device 9 disposed above the processing tank 3 has a pair of left and right transporting bodies 9a and 9b on which the plate-shaped objects A to be cleaned are individually held by a motor or the like on the upper left side and upper right side of the processing tank 3. It is provided so that it can move horizontally, and it can be moved vertically up and down at the rising position where horizontal movement of the treatment tank 3 is allowed to move to the upper left and upper right and the lowering position where the following operations are allowed.
  • the transport bodies 9a and 9b are vertically lowered when moving to the upper left side of the processing tank 3, and the left object 9a holds the object to be cleaned A placed on the loading conveyor 7 on the left side of the processing tank 3. And the operation of holding the object A to be cleaned, which is immersed in the cleaning liquid B of the immersion tank 4, by the right transporter 9b.
  • the transporting bodies 9a and 9b When the transporting bodies 9a and 9b are moved vertically to the upper right side of the processing tank 3, the operation of immersing the object A to be cleaned held in the left transporting body 9a in the cleaning liquid B of the dipping tank 4, and the right transporting body Operation to place the object to be cleaned A held in 9b after steam cleaning on the unloading compressor 8 on the right side of the treatment tank 3 I do.
  • the transporters 9a and 9b may be moved horizontally and vertically moved up and down independently.
  • the treatment tank 3 disposed in the center of the treatment chamber 2 is provided with an inlet / outlet port 3a for carrying and unloading the carrier 9a on which the object A to be cleaned is placed, and placed on the carrier 9a.
  • An immersion tank 4 in which the entire object to be cleaned A is immersed in the cleaning liquid B is provided in the lower center of the processing tank 3.
  • the immersion tank 4 is provided with an inlet / outlet port 4a for loading and unloading the object A placed on the carrier 9a at the upper part of the tank, and a peripheral edge of the inlet / outlet port 4a.
  • the water solution Bb in which the water floating on the liquid surface of the cleaning solution B is dissolved can be overflowed in all directions.
  • the immersion tank 4 is supported in a state spaced apart from the front and rear inner wall surfaces and the left and right inner wall surfaces of the treatment tank 3 at a predetermined interval, and the immersion tank 4 is immersed between the opposing wall surfaces of the treatment tank 3 and the immersion tank 4.
  • Asahi Clin AE-3100E (trade name) manufactured by Asahi Glass Co., Ltd., which is an example of the cleaning liquid B, is used.
  • the mixing ratio of the fluorine-based solvent and the alcohol-based solvent that constitutes cleaning liquid B is approximately 94.5 wt% of hydrofluoric ether and approximately 5.5 wt% of ethyl alcohol.
  • the mixing ratio of the alcohol-based solvent is preferably set to a content included in a range of, for example, approximately 5% to approximately 6%. However, the mixing ratio is approximately 5% or less or approximately 6% or more. You can change it.
  • a tubular heater 11 as a solvent heating means disposed on the inner wall surface of the bottom of the immersion tank 4 is connected to the medium heating device 15 via the pump 12, the valve 13, and the circulation path 14, and the pump
  • the liquid heating medium heated by the medium heating device 15 is circulated and supplied to the heating heater 11 by the transfer force of 12, and heated and kept at a temperature at which the cleaning liquid B stored in the immersion tank 4 evaporates and evaporates.
  • the heating medium for example, a fluorinated solvent having a boiling point higher than that of the fluorinated solvent stored in the immersion tank 4 is used. Therefore, it is easier to control the temperature of the cleaning liquid B than when using another solvent as the heating medium. Can be done.
  • the vapor Ba of the cleaning liquid B evaporated by the heater 11 is supplied onto the surface of the cleaning liquid B stored in the immersion tank 4, and the evaporation of the cleaning liquid B that leaves the entire object A to be cleaned is evaporated.
  • a vapor layer 5 for heating to a temperature that promotes this is formed between the liquid level of the cleaning liquid B stored in the immersion tank 4 and a cooling jacket 16 (described later) disposed thereabove.
  • the cooling jacket 16 disposed above the vapor layer 5 in the treatment tank 3 is disposed in a loop shape along the inner wall surface between the inlet / outlet 3a and the vapor layer 5, and the condensation disposed on the side of the cooling jacket 16
  • the coil 17 is disposed above the water separation tank 18 connected to the upper side of the immersion tank 4. In addition, it is arranged so that loading, unloading, and movement of the object to be cleaned A are not hindered.
  • the cooling jacket 16 and the condensing coil 17 are connected to a refrigeration apparatus (not shown) such as a chiller or a branchler, and the cleaning liquid B supplied to the vapor layer 5 is supplied by a cooling medium circulated from the refrigeration apparatus. It is cooled to a temperature at which the vapor Ba and the moisture in the air entering the tank are condensed and liquefied.
  • a refrigeration apparatus such as a chiller or a branchler
  • the cleaning liquid B condensed and liquefied by the cooling jacket 16 is dropped into the dipping tank 4 and the water separation tank 18 to prevent the vaporized vapor B of the cleaning liquid B from being released outside the apparatus.
  • the cleaning liquid B condensed by the condensing coil 17 is dropped into the water separation tank 18 to prevent the condensed liquid from entering the cleaning liquid B of the immersion tank 4.
  • the water separation tank 18 is separated from the liquid storage tank 18c for storing the water condensed by the condensing coil 17 and the cleaning liquid B by the two partition plates 18a and 18b, due to the difference in specific gravity. It is divided into a liquid storage tank 18d for storing the cleaning liquid B.
  • the upper liquid storage area of the liquid storage tank 18c is connected via a valve 19 and a recovery path 20 to a disposal unit (not shown) for discarding water that has floated on the liquid surface.
  • the lower liquid storage area of the liquid storage tank 18d is connected to the upper liquid storage area of the immersion tank 4 via the return path 24. Due to the difference in height between the immersion tank 4 and the liquid storage tank 18d, The cleaning liquid B, which has been separated due to the difference in specific gravity and recovered to the predetermined cleaning power, is returned from the storage tank 18d to the immersion tank 4 and reused.
  • the liquid storage tank 10 includes a tank part 10c for storing the water-dissolved liquid Bb in which the water is dissolved by the two partition plates 10a and 10b, and a cleaning liquid in which the water is separated due to the difference in specific gravity. It is divided into tanks 10d for storing B.
  • the lower liquid storage area of the tank 10d is connected to the recovery port of the filtration device 28 via the pump 25, the valve 26, and the recovery path 27, and is stored in the tank 10d by the transfer force of the pump 25.
  • the liquid B after the separation of the specific gravity is supplied to the filter device 28, and foreign substances such as dust and dirt are separated and removed from the liquid B, for example.
  • the return port of the filtration device 28 is connected to the lower liquid storage region of the immersion tank 4 through the pump 29, the valve 30, and the return path 31, and the moisture is separated by the transfer force of the pump 29 to a predetermined value. Return the cleaning solution B, which has been recovered to the cleaning power, to the immersion bath 4.
  • the upper liquid storage area of the tank section 10c is connected via a valve 32 and a discharge path 33 to a disposal section (not shown) for discarding water that has floated on the liquid surface.
  • the plate-shaped far infrared heaters 6, 6, which are far infrared heating means arranged on the right side of the treatment tank 3, are objects to be cleaned held on the right carrier 9 b as shown in FIG. 5 and FIG.
  • Two sheets are arranged facing both the front and rear surfaces of A, and are arranged at substantially the same height with a front-rear spacing that allows the right-side transport body 9b holding the object A to be moved up and down.
  • the object to be cleaned A is irradiated with far infrared rays radiated from the pair of front and rear far infrared heaters 6 and 6 on both the front and rear surfaces of the object A held on the right side carrier 9b during the descent.
  • the temperature at which the cleaning solution B evaporates that is, at least the alcohol solvent evaporates. If heated evenly to a temperature (a temperature in the range of about 80 ° C to about 85 ° C), the thin-film alcohol solvent containing moisture remaining on the object to be cleaned A will evaporate, When taken out from the vapor layer 5, it is possible to maintain a dry and dry state in which moisture in the atmosphere does not reattach to the object A to be cleaned.
  • the exhaust device 34 disposed at the rear of the processing chamber 2 exhausts the intake ports 35, 35 opened on the lower inner wall surface of the processing chamber 2 and the intake port of the filtration unit 36 disposed on the upper outer wall surface of the processing chamber 2.
  • An organic exhaust treatment device (not shown) for communicating with organic exhaust is connected to the exhaust passage of the filtration unit 36 by an exhaust passage (not shown).
  • a fan built in the filtration unit 36
  • the atmosphere containing a vaporized solvent such as a fluorine-based solvent or an alcohol-based solvent discharged into the processing chamber 2 is sucked from the intake ports 35, 35, and the filtration unit
  • the atmosphere filtered through 36 is supplied to an organic exhaust treatment device for exhaust treatment.
  • the filtration unit 38 disposed on the inner wall surface of the ceiling of the processing chamber 2 tunes the atmosphere sucked into the processing chamber 2 when the atmosphere in the processing chamber 2 is exhausted by the transfer force of the fan. Clean and filter to a clean state.
  • the illustrated embodiment is configured as described above, and hereinafter, a method of draining and drying the object A to be cleaned with the moisture draining apparatus 1 attached thereto will be described.
  • the object A to be cleaned after being washed with pure water or the like is placed on the carry-in compressor 7 and carried into the left side of the processing chamber 2 from the carry-in port 2a.
  • the transport bodies 9a and 9b are moved horizontally from the upper left side to the upper right side of the processing tank 3, the object A to be cleaned held by the left transport body 9a is moved upward to the processing tank 3, and then the transport bodies 9a and 9b. 2 and 4, as shown in FIGS. 2 and 4, the entire object A to be cleaned held by the left transport body 9a is immersed in the cleaning liquid B stored in the immersion tank 4 for a predetermined time.
  • the carriers 9a and 9b are lifted and returned to the upper left side of the treatment tank 3.
  • the water adhering to the object to be cleaned A is dissolved in the alcoholic solvent mixed in the cleaning liquid B and separated and removed from the object A to be cleaned.
  • the water solution Bb in which water is dissolved in the alcohol solvent has a lower specific gravity than the fluorine solvent, which is the main component of the cleaning liquid B, and floats on the surface of the cleaning liquid B stored in the immersion tank 4.
  • the water solution Bb floating on the liquid surface portion of the cleaning liquid B is overflowed in all directions from the peripheral edge of the inlet / outlet 4a of the immersion tank 4, and the treatment tank 3 and the immersion tank 4
  • the liquid is stored in the liquid storage tank 10 provided between the opposite wall surfaces.
  • the transport body 9a, 9b moved to the upper left side of the processing tank 3 is lowered, and the left transport body 9a holds the next object A to be cleaned carried into the processing chamber 2 left side.
  • the right carrier 9b simultaneously holds the object A to be cleaned immersed in the cleaning liquid B in the immersion tank 4.
  • the carriers 9a and 9b are moved up, the object A held by the left carrier 9a is moved to the upper left side of the treatment tank 3, and the object A held by the right carrier 9b is immersed. Remove from washing solution B in tank 4 and move upward in treatment tank 3.
  • the transporters 9a and 9b are moved upward from the processing tank 3, and then the left upper force of the processing tank 3 is moved horizontally to the upper right, and the object to be cleaned A held by the left transporter 9a To the upper side of the processing tank 3 and the object A to be cleaned held by the right transporter 9b is moved to the upper left side of the processing tank 3.
  • Treatment tank 3 A pair of left and right transport bodies 9a horizontally moved upward on the right side is lowered to left transport body 9 The operation of immersing the object to be cleaned A held in a in the cleaning solution B of the immersion tank 4 and the operation of placing the object A to be cleaned held in the right transport body 9b on the unloading compressor 8 on the right side of the treatment tank 3 are simultaneously performed. Do.
  • the pair of front and rear units disposed on the right side of the treatment tank 3 is slowly lowered at a constant speed while the object A to be cleaned after being held by the left side carrier 9a is slowly lowered.
  • Far-infrared rays emitted from the far-infrared ray heaters 6 and 6 are irradiated almost simultaneously on the front and rear surfaces of the object to be cleaned A, and the entire object to be cleaned A is uniformly heated to the temperature at which the cleaning liquid B evaporates. .
  • the alcohol solvent is heated to a temperature at which thin film distillation is performed (about 80 ° C)
  • the alcohol solvent is separated and removed from the outer surface of the object A to be cleaned.
  • a small and large object to be cleaned A can be drained and dried in a state where moisture is separated and removed.
  • the force S is used to maintain a draining and dry state in which moisture in the atmosphere does not reattach to the object A to be cleaned.
  • the entire object to be cleaned A is uniformly heated by far infrared rays emitted from the far-infrared heaters 6 and 6, and the thin film-like cleaning liquid B and alcohol solvent remaining on the object to be cleaned A are thin-film distilled. Therefore, even if it is not heated to the boiling point temperature, it is at least lower than the boiling point of the alcohol solvent! /, It is possible to evaporate and evaporate the alcohol solvent remaining on the object to be cleaned S only by heating at the temperature. . Further, it is possible to prevent a stain or the like that does not cause a difference in drying speed or cause drying unevenness from remaining on the surface of the object A to be cleaned. In addition, since there is no need to send or exhaust an air current such as hot air, it can prevent fine dust, dust, etc. from adhering to the cleaned workpiece, and it can be used in clean rooms where cleanliness is required. Is possible
  • the far-infrared heater has a temperature lower than the boiling point of the cleaning liquid B. 6, 6 If heated in step, the object to be cleaned A can be dried in a state in which the cleaning liquid B (including the alcohol-based solvent in which water is dissolved) is separated and removed without causing alteration due to heat.
  • FIG. 7 shows another example in which two far-infrared heaters 6 and 6 are arranged so that the front and rear surfaces of the object A to be cleaned are shifted up and down so that the front and rear surfaces are sequentially heated one by one.
  • the front side of the object to be cleaned A is heated by the lower far infrared heater 6. That is, since the front and back surfaces of the object to be cleaned A are heated one by one in order, it is possible to prevent overheating of the object to be cleaned A above the temperature at which the alcohol solvent evaporates.
  • the plurality of far-infrared heaters 6 are arranged so that the front and rear surfaces and the left and right surfaces of the object to be cleaned A are heated substantially simultaneously, or the front and rear surfaces and the left and right surfaces are sequentially heated. May be.
  • the far-infrared heater 6 may be formed in an optimum size and shape for heating the large object A to be cleaned. It can be heated uniformly by far infrared rays.
  • FIG. 8 shows another example in which the cleaning object A taken out from the vapor layer 5 is heated by a pair of front and rear far-infrared heaters 6 and 6 arranged on the inner wall surface on the entrance / exit 3a side of the processing tank 3.
  • the far-infrared heaters 6 and 6 are arranged on the front and rear inner wall surfaces of the free board space formed in the treatment tank 3. That is, the object A to be cleaned taken out above the vapor layer 5 is moved above the treatment tank 3 at a constant speed, and the front and rear surfaces of the object A to be cleaned are radiated from the pair of front and rear far-infrared heaters 6 and 6.
  • the far-infrared heater 6 may be disposed on the left and right inner walls of the treatment tank 3.
  • the far-infrared heating means of the present invention corresponds to the far-infrared heater 6 of the embodiment, and similarly,
  • the solvent heating means corresponds to the heater 11,
  • the present invention is not limited only to the configuration of the above-described embodiments, but can be applied based on the technical idea shown in the claims, and many embodiments can be obtained.
  • the object A to be cleaned held by the transport device 9 is transferred to an unillustrated V elevating device arranged above the treatment tank 3, and the object A to be cleaned held by the elevating device is washed in the immersion tank 4. It may be immersed in. Further, when the object to be cleaned A is immersed, the entrance / exit 3a of the treatment tank 3 may be closed with a lid, a door or the like.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Microbiology (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

[PROBLÈMES] Disposer d'un appareil de déshydratation/séchage avec lequel un travail qui doit être nettoyé et qui a été lavé peut être déshydraté et séché pour séparer et enlever l'eau du travail ; ainsi que d'un procédé de déshydratation/séchage. [MÉTHODE DE RÉSOLUTION DES PROBLÈMES] Selon la présente invention, un travail qui doit être nettoyé (A), qui a été lavé avec de l'eau, est immergé dans un liquide de nettoyage (B) qui est placé dans un réservoir d'immersion (4) et qui est obtenu en mélangeant un solvant fluorochimique avec un solvant alcoolique. L'eau adhérent au travail (A) est donc dissoute dans le solvant alcoolique contenu dans le liquide de nettoyage (B), ce qui sépare/enlève, de ce fait, l'eau de celui-là. Après le nettoyage par immersion, le travail (A) est enlevé du réservoir d'immersion (4), déplacé jusqu'à une couche de vapeur (5) comprenant la valeur (Ba) du liquide de nettoyage (B) et chauffé à une température à laquelle la vaporisation du liquide de nettoyage (B) est accélérée. Après le nettoyage à la vapeur, le travail (A) est enlevé de la couche de vapeur (5) et chauffé avec des rayons infrarouges éloignés émis par des dispositifs de chauffage aux rayons infrarouges éloignés (6, 6) pour évaporer le solvant alcoolique adhérent au travail (A). Ainsi, le travail est déshydraté et séché.
PCT/JP2007/068502 2006-09-26 2007-09-25 Appareil de déshydratation/séchage et procédé de déshydratation/séchage WO2008038610A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006260197A JP2008082569A (ja) 2006-09-26 2006-09-26 水切り乾燥装置及び水切り乾燥方法
JP2006-260197 2006-09-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103551347A (zh) * 2013-10-29 2014-02-05 新乡市海泉精密管件有限公司 铜配管清洗方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012059865A (ja) 2010-09-08 2012-03-22 Sony Corp 撮像素子および撮像装置
JP2012064703A (ja) 2010-09-15 2012-03-29 Sony Corp 撮像素子および撮像装置
JP4737700B1 (ja) * 2010-10-21 2011-08-03 ジャパン・フィールド株式会社 被洗浄物の蒸気洗浄方法
EP2963372B1 (fr) * 2013-02-26 2019-01-02 NGK Insulators, Ltd. Dispositif de séchage
JP6352519B1 (ja) * 2017-12-28 2018-07-04 ジャパン・フィールド株式会社 被洗浄物の洗浄方法及びその装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08241881A (ja) * 1994-11-29 1996-09-17 Sharp Corp 基板乾燥装置
JPH10209110A (ja) * 1997-01-24 1998-08-07 Tokyo Electron Ltd 洗浄装置及び洗浄方法
JPH10290901A (ja) * 1997-04-18 1998-11-04 Otsuka Giken Kogyo Kk 水切り乾燥装置
JP2002231688A (ja) * 2001-02-05 2002-08-16 Tokyo Electron Ltd 基板の乾燥方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08241881A (ja) * 1994-11-29 1996-09-17 Sharp Corp 基板乾燥装置
JPH10209110A (ja) * 1997-01-24 1998-08-07 Tokyo Electron Ltd 洗浄装置及び洗浄方法
JPH10290901A (ja) * 1997-04-18 1998-11-04 Otsuka Giken Kogyo Kk 水切り乾燥装置
JP2002231688A (ja) * 2001-02-05 2002-08-16 Tokyo Electron Ltd 基板の乾燥方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103551347A (zh) * 2013-10-29 2014-02-05 新乡市海泉精密管件有限公司 铜配管清洗方法

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