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WO2006088119A1 - Unite de filtrage pour ventilateur - Google Patents

Unite de filtrage pour ventilateur Download PDF

Info

Publication number
WO2006088119A1
WO2006088119A1 PCT/JP2006/302799 JP2006302799W WO2006088119A1 WO 2006088119 A1 WO2006088119 A1 WO 2006088119A1 JP 2006302799 W JP2006302799 W JP 2006302799W WO 2006088119 A1 WO2006088119 A1 WO 2006088119A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotation speed
fan
rotational speed
unit
detected
Prior art date
Application number
PCT/JP2006/302799
Other languages
English (en)
Japanese (ja)
Inventor
Masafumi Matsui
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to JP2007503720A priority Critical patent/JP4561828B2/ja
Priority to CN2006800028123A priority patent/CN101107482B/zh
Priority to US11/722,816 priority patent/US20100028164A1/en
Publication of WO2006088119A1 publication Critical patent/WO2006088119A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F04D25/166—Combinations of two or more pumps ; Producing two or more separate gas flows using fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/0001—Control or safety arrangements for ventilation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Definitions

  • the present invention relates to a fan filter unit used in a clean room or the like that requires a clean space for manufacturing semiconductors, liquid crystals, plasma display panels, and the like.
  • the fan filter unit is required to be thin, have a large area of clean air outlets, and be capable of supplying a uniform and sufficient air volume. Therefore, several fan motors are used. When multiple fan motors are used with a strong force, a roaring sound may occur.
  • rotational speed As a method for suppressing the generation of a roaring sound, a technique for accurately controlling the rotational speed per unit time (hereinafter referred to as rotational speed) of a plurality of fan motors is disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-205095. ing.
  • the rotational speed of the second fan motor is matched with the rotational speed of the first fan motor, and the second Match the rotation speed of the third fan motor with the rotation speed of the other fan motor.
  • the rotational speed cannot be adjusted.
  • the present invention solves such a conventional problem, and can cope with variations in the motor capacity of the fan filter unit and can suppress a beat noise.
  • the purpose is to provide.
  • the fan filter unit of the present invention includes a plurality of fan motors, a plurality of detection units, a main body control unit, and a filter.
  • Each fan motor includes a fan and a motor.
  • Each detection unit detects the rotation speed of each motor.
  • the main body control unit feedback-controls each fan motor based on the rotation speed detected by the detection unit so that the detected rotation speed matches the set rotation speed.
  • the fan motor with a low rotation speed Rotational speed tuning control is performed so that the rotational speed of the other fan motor matches the rotational speed of the motor.
  • the rotational speeds of the respective fan motors can be made to coincide with each other including variations in motor capability.
  • FIG. 1 is a schematic configuration diagram of a fan filter unit according to Embodiment 1 of the present invention.
  • FIG. 2 is a block circuit diagram of the fan filter unit shown in FIG.
  • FIG. 3 is a block circuit diagram of a fan filter unit according to Embodiment 2 of the present invention.
  • FIG. 4 is a block circuit diagram of a fan filter unit according to Embodiment 3 of the present invention.
  • FIG. 5 is a block circuit diagram of a fan filter unit according to Embodiment 4 of the present invention.
  • FIG. 6 is a block circuit diagram of a fan filter unit according to Embodiment 5 of the present invention.
  • FIG. 7 is a block circuit diagram of a fan filter unit according to Embodiment 6 of the present invention.
  • FIG. 1 is a front view showing a schematic configuration of a fan filter unit according to Embodiment 1 of the present invention, with a part of the filter cut away.
  • Figure 2 shows the block circuit diagram.
  • This fan filter unit has a first fan motor 5 A, a second fan motor 5 B, and a filter 6.
  • the fan motor 5A includes a first fan 2A, a first motor 3A, and a first motor driver 4A.
  • the fan motor 5B includes a second fan 2B, a second motor 3B, and a second motor dryer B.
  • Filter 6 is air blown by fans 2A and 2B To clean.
  • the filter 6 is made of glass fiber, for example, and captures micron-order particles with high efficiency. More specifically, the filter 6 collects 0.3 m of fine particles with a collection efficiency of 99.97% or more.
  • the filter 6 is arranged on the blowout side or the suction side of the fans 2A and 2B.
  • the fan filter unit includes a main body control unit (hereinafter referred to as a control unit) 7 that controls the fan motors 5A and 5B, a first detection unit 9A that detects the rotational speed of the motor 3A, and the motor 3B. And a second detector 9B for detecting the rotational speed.
  • the control unit 7 includes a rotation speed setting unit 8 that sets the rotation speed of the fan motors 5A and 5B, and a first rotation control unit (hereinafter referred to as a control) that controls the rotation of the fan motor 5A by inputting the detection rotation speed of the detection unit 9A.
  • the control unit 7 further includes a first comparator 30A, a second comparator 30B, a third comparator 31, and a rotation speed tuning control unit (hereinafter referred to as a control unit) 11.
  • the comparators 30A and 30B compare the rotation speed set by the rotation speed setting unit 8 with the rotation speed detected by the detection units 9A and 9B, and transmit the results to the control units 10A and 10B, respectively.
  • the comparator 31 compares the rotation speed detected by the detection unit 9A with the rotation speed detected by the detection unit 9B, and is slow! The rotation speed of one side is faster!
  • the number of rZmin slower than the other rotation speed is calculated and transmitted to the control unit 11. That is, the difference between the rotation speed detected by the detection unit 9A and the rotation speed detected by the detection unit 9B is calculated.
  • the control unit 11 performs tuning control so as to reduce the higher rotational speed of the fan motors 5A and 5B via one of the control units 10A and 10B.
  • the motors 3A and 3B are configured by, for example, electronically controlled brushless motors, and the motor drivers 4A and 4B are configured by a microcomputer and software or a dedicated circuit.
  • the motors 3A and 3B may be composed of other types of motors, and the motor drivers 4A and 4B may be composed of circuits for controlling the power applied to the motors 3A and 3B.
  • Each unit constituting the control unit 7 includes a microcomputer and software or a dedicated circuit. These may be configured integrally or individually. Furthermore, the detection units 9A and 9B may be configured integrally with the control unit 7.
  • the fan motors 5A and 5B are provided far away from each other inside the fan filter unit. It is not affected by this. On the other hand, the distance between each of the control units 10A and 10B and the motor drivers 4A and 4B is affected by noise and needs to be shortened. Therefore, at least the fan motor 5A and the control unit 10A, and the fan motor 5B and the control unit 10B are preferably provided adjacent to each other.
  • the detection units 9A and 9B are composed of, for example, a magnet rotated by the motors 3A and 3B, a magnetic detection element for detecting the magnetic change, and a circuit for calculating the magnetic change force rotation speed.
  • a disk having a reflecting portion rotated by the motors 3A and 3B, an optical element for detecting the luminance, and a circuit cover for calculating the rotation speed from the luminance change may be configured. That is, the detection units 9A and 9B can be configured by a magnetic system or an optical system.
  • a clock vibration is generated by a crystal resonator, and the rotation speeds of the motors 3A and 3B per unit time are calculated based on the vibration. With this configuration, the rotational speeds of the motors 3A and 3B can be detected with high accuracy.
  • the rotation speed set to 2000 rZmin by the rotation speed setting unit 8 is given to the motors 3A and 3B. Then, feedback control is performed so that the detected rotational speeds of the motors 3A and 3B become the set rotational speed. That is, the comparators 30A and 30B compare the detected rotational speeds of the detection units 9A and 9B with the rotational speed set by the rotational speed setting unit 8, respectively. Then, the result is sent to the control units 10A and 10B.
  • the control units 10A and 10B control the motor drivers 4A and 4B so that the rotation speeds of the motors 3A and 3B approach the set rotation speed based on the results of the comparators 30A and 30B, respectively.
  • the control unit 11 receives the calculation result of the comparator 31, and sets the control unit 10B to match the rotation speed of the fan motor 5B with the higher detection rotational speed to the fan motor 5A with the lower detection rotation speed. Control. That is, the control units 10A and 10B give priority to the control from the control unit 11 over the results of the comparators 30A and 30B. As a result, the fan motors 5A and 5B have different capacities, which suppresses the generation of humming noise that is affected by fluctuations in air pressure at the installation location. [0017] It should be noted that the conditions under which the roaring sound is generated vary depending on the operating speed and size of the fan motors 5A and 5B, the shapes of the fans 2A and 2B, and the like. Therefore, it is preferable to set a rotational speed deviation threshold value for starting the rotational speed synchronization control in accordance with each case.
  • the control unit 7 performs feedback control based on the rotation speed detected by the detection unit 9A so that the rotation speed of the fan motor 5A matches the set rotation speed. Similarly, feedback control is performed based on the rotation speed detected by the detection unit 9B so that the rotation speed of the fan motor 5B matches the set rotation speed. Furthermore, when the rotational speed detected by the detection unit 9A is slower than the rotational speed detected by the detection unit 9B by a predetermined value or more, rotational speed tuning control is performed to lower the rotational speed of the fan motor 5B to the rotational speed detected by the detection unit 9A. Do.
  • the rotation speed tuning is performed to lower the rotation speed of the fan motor 5A to the rotation speed detected by the detection unit 9B.
  • FIG. 3 is a block circuit diagram of a fan filter unit according to Embodiment 2 of the present invention.
  • the configuration according to the present embodiment is different from the configuration according to the first embodiment in that the stability control section 16 is provided between the comparator 31 and the rotation speed tuning control section (hereinafter, control section) 11 in the main body control section 73. Is the point.
  • Other configurations are the same as those in the first embodiment.
  • the stability unit 16 prevents the control unit 11 from functioning until a preparatory operation for a predetermined time has elapsed.
  • the stability unit 16 is used when the control unit 11 is in a period when the detected rotation speed of the fan motors 5A and 5B is unstable, such as immediately after the start of operation of the fan motors 5A and 5B or when the rotation speed fluctuates momentarily. Prevents functioning.
  • the stability section 16 is also constituted by a microcomputer or the like.
  • the stability unit 16 is set for a predetermined time when the detected rotational speeds of the fan motors 5A and 5B deviate by ⁇ 10rZmin or more. During this period, the control unit 11 is prevented from functioning. In other words, the stabilization unit 16 delays the start of the rotational speed tuning control by a predetermined time. That is, even if the detected rotational speed of the fan motors 5A and 5B deviates by more than lOrZmin, the controller 11 does not function for a predetermined time.
  • the predetermined time is, for example, when the set rotational speed is changed for 30 seconds immediately after the start of operation when the power is turned on, or when the detected rotational speed is changed due to a sudden change in the load of the fan motors 5A and 5B. If so, it is set to 10 seconds. These set times correspond to preparatory operation times. As a result, it is possible to suppress the excessive reaction of the rotational speed tuning control when the rotational speeds of the fan motors 5A and 5B are unstable.
  • the main body control unit 73 delays the start of the rotational speed tuning control by a predetermined time. This prevents the control unit 11 from functioning during a time period when the detected rotational speeds of the fan motors 5A and 5B are unstable.
  • FIG. 4 is a block circuit diagram of a fan filter unit according to Embodiment 3 of the present invention.
  • the configuration according to the present embodiment is different from the configuration according to the first embodiment in that the main body control unit 74 is provided with a retry unit 19.
  • Other configurations are the same as those in the first embodiment.
  • the retry unit 19 is also composed of a microcomputer! RU
  • the retry unit 19 is configured so that the rotation speed tuning control unit (hereinafter referred to as the control unit) 11 continuously performs the rotation speed tuning control for a predetermined time. , It has a retry function to perform control to try to match the rotation speed of 2B.
  • the retry unit 19 measures the duration of the rotation speed tuning control.
  • the rotation speed tuning control is performed continuously for 10 minutes due to the variation in the capacity of the fan motors 5A and 5B, for example, the fan motors 5A and 5B are initially connected via the rotation control units 10A and 10B. Attempt to control at the set rotation speed. That is, the retry unit 19 The instruction is given priority over the control by the control unit 11.
  • the main body control unit 74 performs retry control to try to match the rotation speeds of the fan motors 5A and 5B with the set rotation speed when the rotation speed tuning control is performed for a predetermined time.
  • the rotation speed tuning control prevents the expected air volume obtained at the set rotation speed from being obtained and the low speed operation from being continued. For this reason, the original capability of the fan motors 5A and 5B can be fully exhibited. Then, the fan motors 5A and 5B are operated again at a rotational speed as close as possible to the set rotational speed.
  • the predetermined time measured by the retry unit 19 depends on the internal volume of a clean room or the like to which the fan motor unit is attached and the required air volume.
  • FIG. 5 is a block circuit diagram of a fan filter unit according to Embodiment 4 of the present invention.
  • the configuration according to the present embodiment is different from the configuration according to the third embodiment in that the main body control unit 75 is provided with a retry count unit 20 and an operation stop unit 18.
  • Other configurations are the same as those in the third embodiment.
  • the retry count unit 20 and the operation stop unit 18 are also configured by a microcomputer or the like.
  • the operation stopping unit 18 may stop supplying power to the motors 3A and 3B in addition to stopping the fan motors 5A and 5B via the rotation control units 10A and 10B. That is, the operation stop unit 18 may be configured by a relay.
  • the retry count unit 20 detects that the retry function by the retry unit 19 has been repeatedly performed a predetermined number of times within a predetermined time, the retry count unit 20 does not perform the rotation speed tuning control and passes through the operation stop unit 18.
  • the fan motors 5A and 5B are automatically stopped.
  • the instruction by the operation stop unit 18 is performed with higher priority than the instruction by the retry unit 19.
  • the main body control unit 75 repeats the retry control a predetermined number of times within a predetermined time, and the fan motor 5 Stop A and 5B.
  • the retry count unit 20 counts, for example, the number of times the retry function has been performed in one hour. Then, if the counted number exceeds, for example, 5 times, it is judged as abnormal use. For example, when the installation environment pressure is abnormal, the fan motor 5A or 5B is used abnormally, such as a foreign object such as a mouth, or the filter 6 is abnormal. Arise.
  • the retry count unit 20 outputs a signal to the operation stop unit 18 when the number of times counted within a predetermined time exceeds a predetermined value. The operation stop unit 18 receives this signal and automatically stops the fan motors 5A and 5B. In this way, abnormal use of the fan motors 5A and 5B is automatically avoided.
  • the predetermined time for the retry count unit 20 to measure the number of times the retry unit 19 instructs the retry function is about 1 to 2 hours. Since this control is aimed at detecting an abnormality as described above, it is preferable to make a determination in a short time. If there is an abnormality, the retry function is performed continuously, so the threshold for outputting a signal to the operation stop unit 18 may be about 3 to 5 times.
  • FIG. 6 is a block circuit diagram of a fan filter unit according to Embodiment 5 of the present invention.
  • the configuration according to the present embodiment is different from the configuration according to the first embodiment in that the main body control unit 76 is provided with a third comparator 21 having a different function instead of the comparator 31 and an operation stop unit 18. Is a point.
  • Other configurations are the same as those in the first embodiment.
  • the comparator 21 is also composed of a microcomputer or the like.
  • Comparator 21 has the same function as comparator 31, compares the rotational speed detected by detector 9A with the rotational speed detected by detector 9B, and compares the result with rotational speed tuning control. Section (hereinafter referred to as control section) 11 In addition, the comparator 21 compares the rotational speed set by the rotational speed setting unit 8 with the rotational speed detected by the detection units 9A and 9B. Then, a determination is made as to whether or not the force is greater than a rotation difference limit corresponding to 25% of the set rotation speed, for example, a difference between the set rotation speed and the detection rotation speed detected by either of the detection units 9A and 9B.
  • the fan motors 5A and 5C are automatically stopped without performing the rotation speed tuning control via the operation stop unit 18. In this way, the instruction from the shutdown unit 18 is controlled. It is prioritized over the instructions given by Mobe 11.
  • the comparator 21 detects the rotational speed difference by comparing the rotational speed detected by the detection units 9A and 9B with the rotational speed set by the rotational speed setting unit 8.
  • a fan motor 5C that is completely different from the fan motor 5B may be installed at the installation stage.
  • the comparator 21 can detect that the rotational speed of the fan motor 5C is significantly different and can determine that the fan motor 5C is installed incorrectly.
  • the comparator 21 detects that the set rotational speed is 2000 rZmin and the difference between the detected rotational speed and the set rotational speed is 500 rZmin or more. In such a case, the comparator 21 outputs a signal to the operation stop unit 18.
  • the operation stop unit 18 receives this signal and automatically stops the fan motors 5A and 5C. In this way, abnormal use of the fan motor 5C is automatically avoided.
  • the fan motors 5A and 5B are also stopped when the fan motors 5A and 5B are correctly installed and the filter 6 is locally clogged and one of the fan motors 5A and 5B cannot operate normally.
  • the main body control unit 76 stops the fan motor when the difference between the set rotation speed and the rotation speed detected by the detection unit 9A or the detection unit 9B is larger than a predetermined value. This prevents one fan motor from operating incorrectly or in an abnormal condition.
  • FIG. 7 is a block circuit diagram of a fan filter unit according to Embodiment 6 of the present invention.
  • the configuration according to the present embodiment is different from the configuration according to the first embodiment in that the main body control unit 77 is provided with a third comparator 22 having a different function instead of the comparator 31 and an operation stop unit 18. Is a point.
  • Other configurations are the same as those in the first embodiment.
  • the comparator 22 is also composed of a microcomputer or the like.
  • Comparator 22 has the same function as comparator 31, compares the rotational speed detected by detector 9A with the rotational speed detected by detector 9B, and compares the result with rotational speed tuning control. Part (hereinafter, Control part) In addition, the comparator 22 compares the rotation speed detected by the detection units 9A and 9B with the rotation speed set by the rotation speed setting unit 8. The fan motors 5C and 5D are stopped via the operation stop unit 18 when the detected rotational speeds by the detection units 9A and 9B differ from the set rotational speed by a predetermined value or more.
  • the fan motors 5C and 5D are different from the fan motors 5A and 5B to be installed having the necessary capacity.
  • the fan motors 5C and 5D cannot rotate at the required rotation speed. That is, the detected rotational speed does not match the set rotational speed immediately after the start of operation, even though the set rotational speed is set below the predetermined rotational speed within the capacity range of the fan motor to be installed.
  • the comparator 22 detects the misuse of the fan motors 5C and 5D by comparing the rotation speed detected by the detection units 9A and 9B with the rotation speed set by the rotation speed setting unit 8. Then, the fan motors 5C and 5D are automatically stopped by the operation stop unit 18 without performing the rotation speed synchronization control.
  • the rotational speed setting unit 8 sets the rotational speed within 1800 rZmin, which is within the capacity range of the fan motors 5A, 5B, for example, 1000 to 20 OOrZmin.
  • the fan motors 5A and 5B have sufficient capacity and can be feedback controlled.
  • the comparison unit 22 determines that the fan motors 5C and 5D, which have completely different capabilities from the fan motors 5A and 5B, are used abnormally, such as being misused. Then, a signal is output to the operation stop unit 18.
  • the operation stop unit 18 receives this signal and automatically stops the fan motors 5C and 5D. In this way, abnormal use of the fan motors 5C and 5D is automatically avoided.
  • the determination reference value in the comparator 22 is set so that the operation stop unit 18 does not operate.
  • the rotational speed of the fan motor may not be stabilized immediately after the start of operation. For this reason, it is preferable to suppress the operation stop unit 18 from operating for a certain period of time, similarly to the function of the stability lever unit 16 of the second embodiment.
  • main body control unit 77 stops fan motors 5A and 5B when the difference between the set rotational speed and the rotational speed detected by detection units 9A and 9B is greater than a predetermined value.
  • the configurations unique to each of Embodiments 2 to 6 may be combined as long as they do not conflict with each other, and such configurations are within the scope of the present invention.
  • the configuration of the second embodiment may be combined with the configurations of the third to sixth embodiments.
  • the present invention in a room including a clean room in which a plurality of fans having approximate rotational speeds are installed, it is possible to suppress the roaring noise caused by the fans using the rotational speed tuning control. Therefore, it can be used for the purpose of making the living environment comfortable as well as the working environment.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)
  • Control Of Multiple Motors (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)

Abstract

L’invention présentée concerne une unité de filtrage de ventilateur qui est composée d’une variété de moteurs de ventilateur et de sections de détection, une section de contrôle de l’appareil et un filtre. Chaque moteur de filtre inclut un ventilateur et un moteur. La section de contrôle réalise un contrôle de suivi de chacun des moteurs de ventilateur afin que leur vitesse de rotation détectée coïncide avec une vitesse de rotation programmée en fonction d’une vitesse de rotation détectée à une section de détection. Lorsqu’une valeur de vitesse de rotation détectée par l'une quelconque des sections de détection est inférieure à celle qui est détectée par d'autres sections, le contrôle de synchronisation de la vitesse de rotation est réalisé afin de faire correspondre la vitesse de rotation des autres moteurs de ventilateur à celle du moteur ayant la vitesse de rotation la plus basse.
PCT/JP2006/302799 2005-02-21 2006-02-17 Unite de filtrage pour ventilateur WO2006088119A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007503720A JP4561828B2 (ja) 2005-02-21 2006-02-17 ファンフィルタユニット
CN2006800028123A CN101107482B (zh) 2005-02-21 2006-02-17 风机过滤器机组
US11/722,816 US20100028164A1 (en) 2005-02-21 2006-02-17 Fan filter unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005043712 2005-02-21
JP2005-043712 2005-02-21

Publications (1)

Publication Number Publication Date
WO2006088119A1 true WO2006088119A1 (fr) 2006-08-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/302799 WO2006088119A1 (fr) 2005-02-21 2006-02-17 Unite de filtrage pour ventilateur

Country Status (5)

Country Link
US (1) US20100028164A1 (fr)
JP (1) JP4561828B2 (fr)
KR (1) KR100823404B1 (fr)
CN (1) CN101107482B (fr)
WO (1) WO2006088119A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011155066A1 (fr) * 2010-06-11 2011-12-15 富士通株式会社 Dispositif d'enregistrement d'informations, dispositif de traitement d'informations, procédé de commande de dispositif de disque et programme de commande de dispositif de disque
CN102374181A (zh) * 2010-08-19 2012-03-14 日本电产株式会社 风扇系统和电子设备
CN105879535A (zh) * 2014-09-06 2016-08-24 齐梓桢 雾化洗涤式空气净化器

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4508056B2 (ja) * 2005-09-20 2010-07-21 パナソニック株式会社 集塵装置
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CN101107482B (zh) 2010-05-26
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