WO2006084632A1 - Utilisation de la magneto-impedance sur un capteur de position sans contact et capteur correspondant - Google Patents
Utilisation de la magneto-impedance sur un capteur de position sans contact et capteur correspondant Download PDFInfo
- Publication number
- WO2006084632A1 WO2006084632A1 PCT/EP2006/000936 EP2006000936W WO2006084632A1 WO 2006084632 A1 WO2006084632 A1 WO 2006084632A1 EP 2006000936 W EP2006000936 W EP 2006000936W WO 2006084632 A1 WO2006084632 A1 WO 2006084632A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- magnet
- electrical conductor
- conductor
- variation
- conductive track
- Prior art date
Links
- 239000004020 conductor Substances 0.000 claims abstract description 71
- 230000005291 magnetic effect Effects 0.000 claims abstract description 26
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 239000003302 ferromagnetic material Substances 0.000 claims description 5
- 239000002907 paramagnetic material Substances 0.000 claims description 4
- 230000002596 correlated effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000002500 effect on skin Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910000595 mu-metal Inorganic materials 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000005298 paramagnetic effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2033—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
Definitions
- the invention relates to the application of magneto-impedance, also called RMS (resistive magnetic saturation - resistive magnetic saturation), to the field of sensors.
- RMS resistive magnetic saturation - resistive magnetic saturation
- the physical phenomenon concerned by this subject is the following, in a general way.
- the thickness of this skin is determined by the formula:
- e thickness of the skin
- p resistivity of the conductor in Ohm.
- meter ⁇ 0 magnetic permeability of the vacuum (4. ⁇ r.10 7 )
- ⁇ r magnetic permeability of the material
- f frequency in Hertz.
- R resistance of the conductor in Ohm
- p resistance of the conductor in Ohm. metre
- L length of the conductor in meters
- S surface of the section of the conductor.
- a magnetic field modifies the value of the magnetic permeability of the material ( ⁇ r ). This has the effect of dropping the measured resistance R relative to the same conductor not subject to the external magnetic field considered.
- This phenomenon is already used to measure, typically with great precision, absolute magnetic fields and sensors operating on the principle of magneto-impedance, and especially on giant magneto-impedance, have been developed. They operate at very high frequencies (above GHz, for giant magneto-impedance) and use amorphous materials in particular to constitute the electrical conductor serving as a sensitive element.
- the problem posed here is that of widening the field of application of the magneto-impedance, on the basis of the physical phenomenon presented above, without necessarily having to measure with a great precision the magnetic fields concerned, and without being subjected to necessarily high costs imposed so far especially in the case of the aforementioned sensors, in particular developed in relation to the giant magneto-impedance.
- this magneto-impedance phenomenon on a non-contact position sensor, with the particularity that: a) an electrical conductor is produced having a magnetically sensitive surface subjected to magnetic effect of a permanent magnet, this surface varying according to its relative position with respect to the magnet, b) said relative position is varied between the magnet and the magnetically sensitive surface of the electrical conductor, which varies at least a physical characteristic of this conductor, c) said variation in physical characteristic (s) of the electrical conductor obtained during step b) is recorded, this variation being correlated with the position of the magnet.
- the physical characteristic of the electrical conductor that varies and that is raised is the electrical resistance of this conductor.
- this electrical resistance is modified by the relative positron variation between the magnet and the magnetically sensitive surface of the electrical conductor and raising this resistance is an easy and inexpensive measure, especially if it is not useful to obtain an important precision in the statement.
- the choice of the use of the magneto-impedance to realize such a position sensor being in particular an economic choice and since the object of the present approach will not be to conduct an exact quantitative measurement, it is advised that, when d ⁇ step b), the electric conductor is subjected to an alternating voltage of between a few kilohertz and less than one hundred megahertz.
- the density will be greater if the magnet moves in front of three sections close to each other than if the same magnet, for the same displacement and for the same length of sections, sees only two more spaced apart.
- the electric conductor surface subjected to its magnetic field may vary, even if the conductor section remains constant.
- the relative displacement between the magnet and the electrical conductor may in particular be a translation or a rotation.
- step a) the driver is wound so that it presents externally sections developing substantially along a spiral
- step b the magnet and this spiral are rotated relative to each other in the course of step b).
- the invention therefore applies to a position sensor as such, and in particular to a position sensor for a motor vehicle, comprising:
- a conductive track zone having a surface sensitive to the magnetic field of a magnet, physical characteristics, and terminals
- a source of power for creating an alternating voltage at said terminals of the conductive track zone (s)
- displacement means for varying the relative position between the magnet and the sensitive surface
- - Reading means to record a variation of at least one of the physical characteristics of the conductive track area (s) generated by said relative position variation.
- the recording means comprise means for recording the electrical resistance or the electrical resistance variation of said conductive track area (s).
- the electrical conductor comprises or is constituted (at least in its sensitive area) with a paramagnetic material or a ferromagnetic material.
- the magnet be mobile with respect to the sensitive surface in a direction of movement, and
- the conductive track zone (s) has predominantly or exclusively conductive track portions (s) not perpendicular to the direction of movement of the magnet.
- the magnet be provided with polar parts to focus the magnetic field.
- FIG. 1 schematically shows an example of a non-contact position sensor according to the invention, designed on the evoked base of the magneto-impedance
- FIG. 2 schematizes in side view of a position sensor with a magnet provided with polar parts
- FIGS. 3, 4, 5, 6, 7 and 8 show different geometries of electrical conductors (also referred to as conductive track zones, above).
- the object of the approach is therefore a priori not here to make an exact quantitative measurement (measurement of external magnetic field as was the case of GMI sensors)
- the physical characteristic of the electrical conductor 1, in the sensitive zone 10 subjected to the effect of the magnet, which must vary to allow the use of the magneto-impedance phenomenon (or RMS ) relates to the impedance and in particular the resistance R of this conductor, at the stimulation frequency.
- the position sensor of the invention therefore based favorably on the variation of the resistance R of an electrical conductor, in particular of paramagnetic or ferromagnetic material, and subjected to an alternating voltage of frequency f, is generally described as follows:
- the amorphous materials - very expensive - can be advantageously replaced by ferromagnetic materials such as ⁇ -metal® for example. This makes it possible to use a low cost magnet and still obtain excellent results.
- a film of ⁇ -metal® can be applied. The tracks are then engraved.
- ⁇ -metal® is a soft magnetic alloy, which has a relatively stable crystalline structure, taking into account the different treatments occurring in its manufacturing process, and good thermal conductivity. It is an alloy based on nickel and iron (77% Ni, 14% Fe, 5% Cu, 4% Mo for example). Permalloy® is another known usable magnetic alloy trade name. Other materials are available. The iron could be used for example, but it would be necessary to change the operating frequencies of the alternating current associated with the sensor, in order to achieve good performance. In FIG. 1, there is therefore an electrical conductor 1 powered by an AC supply such as a source 3 of AC power and connected to the ground at 5.
- an AC supply such as a source 3 of AC power and connected to the ground at 5.
- An alternating input voltage Ui can thus be applied between the terminals 1a, 1b of the conductor 1.
- this voltage Ui will be between a few hundred Hz and less than a thousand MHz and advantageously between a few KHz and less than 100 MHz and even more advantageously (for these materials) between 5 KHz and 50 MHz.
- the electrical conductor 1 can be connected to a voltmeter for measuring the amplitude of the output signal.
- An amplitude-modulated AC voltage source may be used to further facilitate the electronic measurement of the output voltage as a function of the resistance variation of the sensing element.
- the electrical conductor 1 defines an area of conductive tracks, also called resistive tracks, 10, constituting the sensitive part of the sensor with, at the place where the conductor passes, a magnetically sensitive surface (delimited by the contour 10) subjected to the magnetic effect of a permanent magnet 11 disposed opposite.
- the conductive track zone 10 may in particular be formed on a support substrate usually called PCB (Printed Circuit Board) commonly used for the realization of electronic cards. Faced with these resistive tracks, the magnet 11 is, in Figures 1 and 2, movable in translation in a direction 11a parallel to the direction of elongation of the tracks.
- PCB Print Circuit Board
- the movable magnet 11 extends over the entire width of the resistive track zone 10, in order to make a widest possible surface sensitive.
- the relative movement between the magnet and the sensitive area of the electrical conductor 1 can be generated by any suitable organ or group of members, such as for example a motor shaft, camshaft, crankshaft (on an automobile engine) , or else the clutch, the suspension ...
- a motor shaft end 12 rotating the magnet 11 fixed to a free end has been schematized.
- the electrical conductor 1 typically has a substantially rectilinear section 13 having a slope slightly inclined with respect to 11a and extending along the length L of the sensitive zone 10, so that in this zone the conductor electrical 10 has, on either side of this essentially straight central portion of connection and therefore of the central axis 11a, two (approximately) similar surfaces 15a, 15b, crenellated or meandering respectively developing in increasing and decreasing in one direction and in the opposite direction, along the axis 11a, and substantially following two inverted triangular surfaces.
- Terminal 1c is at one end of section 13 (FIG. 1).
- FIGS. 3 and 5 there are two other forms of conductive track zone geometry 10 developed on the basis of a variation in the density of the conductor 1 electrically subjected to the magnetic effect of the magnet: crenellated and generally triangular shape in Figure 3 and crenellated crenellated thickness decreasing in one direction, in the direction of displacement 11a in Figure 5.
- the magnet 11 may favorably be provided with pole pieces 29a, 29b located on either side of its transverse sides to the axis of displacement 11a. .
- the position sensor of the invention is used for rotational displacement measurements, as for example in Figure 6 at the end of shaft 12, here with a square drawing of the resistive track zone 10 and a rectangular magnet 11, the geometry of the zone 10 being able to correspond to that of Figure 4, on a square surface and not rectangular.
- each conductor 30, 31 has been wound to externally present sections, respectively 30a, 30b; 31a, 31b, for two of them in each case, these sections developing substantially along a spiral, as can be seen. And it is in front of this spiral that the magnet will turn, to obtain the magneto-resistive sensor wanted here.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/883,529 US7791331B2 (en) | 2005-02-08 | 2006-02-03 | Use of magneto-impedance on a contactless position sensor and corresponding sensor |
JP2007554483A JP2008530541A (ja) | 2005-02-08 | 2006-02-03 | 非接触位置センサにおける磁気インピーダンスの利用及び関連するセンサ |
CN200680004248A CN100595522C (zh) | 2005-02-08 | 2006-02-03 | 磁阻在无触点位置传感器上的应用和相应的传感器 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0501236A FR2881823B1 (fr) | 2005-02-08 | 2005-02-08 | Utilisation de la magneto-impedance sur un capteur de position sans contact et capteur correspondant |
FR0501236 | 2005-02-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006084632A1 true WO2006084632A1 (fr) | 2006-08-17 |
Family
ID=34953710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2006/000936 WO2006084632A1 (fr) | 2005-02-08 | 2006-02-03 | Utilisation de la magneto-impedance sur un capteur de position sans contact et capteur correspondant |
Country Status (5)
Country | Link |
---|---|
US (1) | US7791331B2 (fr) |
JP (1) | JP2008530541A (fr) |
CN (1) | CN100595522C (fr) |
FR (1) | FR2881823B1 (fr) |
WO (1) | WO2006084632A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101520466A (zh) * | 2008-02-28 | 2009-09-02 | 鸿富锦精密工业(深圳)有限公司 | 加工头运动参数测量装置 |
FR2950964B1 (fr) | 2009-10-02 | 2016-01-15 | Continental Automotive France | Capteur de position lineaire |
CA2802853C (fr) | 2010-06-16 | 2016-07-26 | Bruce Chandler May | Utilisation de la levocetirizine et du montelukast dans le traitement de la grippe, du rhume et d'une inflammation |
US9574865B2 (en) | 2010-08-14 | 2017-02-21 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Method and apparatus for sensing magnetic fields |
JP6512141B2 (ja) * | 2016-03-09 | 2019-05-15 | Tdk株式会社 | 磁石および変位検出装置 |
DE102017123772B4 (de) * | 2017-10-12 | 2019-06-19 | Paul Tutzu | Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt |
US11512982B2 (en) | 2017-10-12 | 2022-11-29 | Victor Vasiloiu | Electromagnetic measuring system for detecting length and angle on the basis of the magnetoimpedance effect |
FR3111737B1 (fr) * | 2020-06-19 | 2022-07-08 | Commissariat Energie Atomique | Protection de puce ou de boitier-systeme utilisant l’effet gmi |
CN112729089B (zh) * | 2020-12-28 | 2022-08-19 | 无锡广联数字传感科技有限公司 | 一种应用于多场合的位移传感器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5502380A (en) * | 1994-04-28 | 1996-03-26 | Rosemount Inc. | Analog weighted binary absolute position encoder including an array of sense resistors each having material responsive to FWX and nonresponsive to flux |
FR2803030A1 (fr) * | 1999-12-22 | 2001-06-29 | Siemens Automotive Sa | Capteur analogique de position sans contact |
US6401883B1 (en) * | 1999-09-22 | 2002-06-11 | Mts Systems Corporation | Vehicle suspension strut having a continuous position sensor |
US20040017187A1 (en) * | 2002-07-24 | 2004-01-29 | Van Ostrand Kent E. | Magnetoresistive linear position sensor |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61239922A (ja) * | 1986-04-14 | 1986-10-25 | Yoshimasa Tawara | 封鎖先端部を有するプラスチツク製容器の射出成形方法 |
JPS6394101A (ja) * | 1986-10-08 | 1988-04-25 | Hitachi Constr Mach Co Ltd | 変位検出装置 |
JPS63212803A (ja) * | 1987-03-02 | 1988-09-05 | Mitsubishi Kasei Corp | 変位計測装置 |
JPS63212805A (ja) * | 1987-03-02 | 1988-09-05 | Mitsubishi Kasei Corp | 回転角計測装置 |
JPH0750664Y2 (ja) * | 1990-06-08 | 1995-11-15 | シーケーディ株式会社 | 磁気式リニアスケール |
JPH04307304A (ja) * | 1991-04-03 | 1992-10-29 | Nec Corp | リニアスケール |
JPH055603A (ja) * | 1991-06-27 | 1993-01-14 | Mazda Motor Corp | ピストンのストローク検出装置 |
JP2677506B2 (ja) * | 1993-06-28 | 1997-11-17 | シーケーディ株式会社 | 磁気リニアスケール |
JP3197414B2 (ja) * | 1993-12-22 | 2001-08-13 | 科学技術振興事業団 | 磁気インピーダンス効果素子 |
JPH0875835A (ja) * | 1994-09-09 | 1996-03-22 | Mitsumi Electric Co Ltd | 磁気インピーダンス素子および磁気検出回路 |
JPH09113590A (ja) * | 1995-10-18 | 1997-05-02 | Canon Electron Inc | 磁気センサー |
JP3340134B2 (ja) * | 1996-07-30 | 2002-11-05 | マイクロエプシロン・メステクニク・ゲーエムベーハー・アンド・カンパニー・カーゲー | 非接触式変位センサ |
JP3258245B2 (ja) * | 1996-11-27 | 2002-02-18 | キヤノン電子株式会社 | 硬貨識別装置 |
WO1999006848A1 (fr) * | 1997-07-29 | 1999-02-11 | Unitika Ltd. | Dispositif a effet d'impedance magnetique |
JP3404624B2 (ja) * | 1998-07-10 | 2003-05-12 | オムロン株式会社 | 磁気センサ |
JP4195152B2 (ja) * | 1999-08-02 | 2008-12-10 | ソニーマニュファクチュアリングシステムズ株式会社 | 位置検出装置 |
US6199381B1 (en) * | 1999-09-02 | 2001-03-13 | Sunpower, Inc. | DC centering of free piston machine |
JP2001281313A (ja) * | 2000-01-27 | 2001-10-10 | Hitachi Metals Ltd | 磁界センサー、それを用いた磁気式エンコーダー、及び磁気ヘッド |
JP2001235375A (ja) * | 2000-02-25 | 2001-08-31 | Topy Ind Ltd | 面歪み測定用歪みゲージと歪み測定装置 |
JP2001281308A (ja) * | 2000-03-29 | 2001-10-10 | Sony Precision Technology Inc | 磁気センサ及び位置検出装置 |
JP2002006014A (ja) * | 2000-06-22 | 2002-01-09 | Fuji Electric Co Ltd | 磁気センサ |
JP3508718B2 (ja) * | 2000-10-17 | 2004-03-22 | トヨタ自動車株式会社 | 回転角検出装置 |
JP3421650B2 (ja) * | 2000-12-04 | 2003-06-30 | 明産株式会社 | ロータリーキャリパー計 |
JP4609915B2 (ja) * | 2001-06-29 | 2011-01-12 | 株式会社森精機製作所 | 位置検出装置 |
JP4812064B2 (ja) * | 2001-09-28 | 2011-11-09 | Necトーキン株式会社 | 磁気センサ |
JP3848862B2 (ja) * | 2001-10-15 | 2006-11-22 | 内橋エステック株式会社 | 生体組織内への医療用挿入具の位置検出装置及び位置検出方法 |
JP3606831B2 (ja) * | 2001-11-02 | 2005-01-05 | シーケーディ株式会社 | シリンダ用位置検出装置 |
JP2004012196A (ja) * | 2002-06-04 | 2004-01-15 | Microjenics Inc | 位置検出器 |
JP2004156907A (ja) * | 2002-11-01 | 2004-06-03 | Masahiko Sumikama | 巻線磁気インピーダンス方式の磁気センサユニット |
JP2004219321A (ja) * | 2003-01-16 | 2004-08-05 | Murata Mach Ltd | 半導体磁気抵抗素子を用いた位置変位センサ |
JP4110468B2 (ja) * | 2003-03-03 | 2008-07-02 | 富士電機機器制御株式会社 | 磁気インピーダンス素子 |
JP4418986B2 (ja) * | 2003-04-21 | 2010-02-24 | 宮城県 | 磁界検出素子およびこれを利用した磁界検出方法 |
DE102005007265A1 (de) * | 2004-09-21 | 2006-04-06 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Vorrichtung und Verfahren zur Erfassung der Position und der Geschwindigkeit eines Messobjekts |
-
2005
- 2005-02-08 FR FR0501236A patent/FR2881823B1/fr not_active Expired - Fee Related
-
2006
- 2006-02-03 CN CN200680004248A patent/CN100595522C/zh not_active Expired - Fee Related
- 2006-02-03 US US11/883,529 patent/US7791331B2/en not_active Expired - Fee Related
- 2006-02-03 WO PCT/EP2006/000936 patent/WO2006084632A1/fr not_active Application Discontinuation
- 2006-02-03 JP JP2007554483A patent/JP2008530541A/ja not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5502380A (en) * | 1994-04-28 | 1996-03-26 | Rosemount Inc. | Analog weighted binary absolute position encoder including an array of sense resistors each having material responsive to FWX and nonresponsive to flux |
US6401883B1 (en) * | 1999-09-22 | 2002-06-11 | Mts Systems Corporation | Vehicle suspension strut having a continuous position sensor |
FR2803030A1 (fr) * | 1999-12-22 | 2001-06-29 | Siemens Automotive Sa | Capteur analogique de position sans contact |
US20040017187A1 (en) * | 2002-07-24 | 2004-01-29 | Van Ostrand Kent E. | Magnetoresistive linear position sensor |
Also Published As
Publication number | Publication date |
---|---|
JP2008530541A (ja) | 2008-08-07 |
US7791331B2 (en) | 2010-09-07 |
FR2881823B1 (fr) | 2007-03-16 |
FR2881823A1 (fr) | 2006-08-11 |
US20080164868A1 (en) | 2008-07-10 |
CN101115973A (zh) | 2008-01-30 |
CN100595522C (zh) | 2010-03-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006084632A1 (fr) | Utilisation de la magneto-impedance sur un capteur de position sans contact et capteur correspondant | |
EP2038671B1 (fr) | Procede et systeme pour ajuster la sensibilite d'un capteur magnetoresistif | |
FR2752302A1 (fr) | Capteur de champ magnetique a pont de magnetoresistances | |
EP1435101A1 (fr) | Dispositif magnetoresistif a vanne de spin a performances ameliorees | |
EP0693791B1 (fr) | Capteur à magnétorésistance multicouche autopolarisée | |
FR2539542A1 (fr) | Tete magnetique de lecture | |
FR2735222A1 (fr) | Capteur a effet hall de proximite destine a detecter la presence et/ou le passage d'un objet ferromagnetique | |
FR2729790A1 (fr) | Magnetoresistance geante, procede de fabrication et application a un capteur magnetique | |
EP0721670B1 (fr) | Capteur de courant comprenant un ruban magnetoresistif et son procede de realisation | |
WO2003032001A1 (fr) | Structure pour capteur et capteur de champ magnetique | |
EP1046021B1 (fr) | Capteur angulaire lineaire a magnetoresistances | |
FR2709600A1 (fr) | Composant et capteur magnétorésistifs à motif géométrique répété. | |
EP0642030A1 (fr) | Guide de flux magnétique à languettes et capteur magnétorésistif comportant ce guide | |
FR3052249A1 (fr) | Capteur de position inductif destine a une mesure de position angulaire d'un arbre ou similaire | |
FR2803030A1 (fr) | Capteur analogique de position sans contact | |
FR2800459A1 (fr) | Capteur analogique de position sans contact a couplage differentiel | |
FR2800458A1 (fr) | Capteur analogique de position sans contact a couche noyau de largeur variable | |
FR2800914A1 (fr) | Systeme a couches magnetoresistantes | |
EP0779610A2 (fr) | Dispositif d'enregistrement à micropointe recouverte d'une multicouche magnétorésistive | |
EP3526871A1 (fr) | Procédé de génération d'une pluralité de courants présentant chacun une fréquence | |
FR3133444A1 (fr) | Capteur linéaire inductif | |
EP0647323A1 (fr) | Detecteur de champ magnetique | |
FR2772965A1 (fr) | Senseur de champ magnetique et tete magnetique de lecture utilisant un tel senseur | |
FR2800460A1 (fr) | Capteur analogique de position sans contact | |
WO2009156697A1 (fr) | Dispositif et procédé de mesure de champ magnétique. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 11883529 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 200680004248.9 Country of ref document: CN |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2007554483 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 06706605 Country of ref document: EP Kind code of ref document: A1 |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 6706605 Country of ref document: EP |