WO1993026137B1 - High performance horizontal diffusion furnace system - Google Patents
High performance horizontal diffusion furnace systemInfo
- Publication number
- WO1993026137B1 WO1993026137B1 PCT/US1993/005546 US9305546W WO9326137B1 WO 1993026137 B1 WO1993026137 B1 WO 1993026137B1 US 9305546 W US9305546 W US 9305546W WO 9326137 B1 WO9326137 B1 WO 9326137B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- new
- furnace
- heating element
- high temperature
- air
- Prior art date
Links
- 238000009792 diffusion process Methods 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 claims abstract 26
- 238000001816 cooling Methods 0.000 claims abstract 2
- 230000002708 enhancing Effects 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N Silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims 3
- 239000000919 ceramic Substances 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000004886 process control Methods 0.000 abstract 1
Abstract
Performance of a high temperature diffusion furnace (10) is enhanced by an improved multi-furnace module design (11). The furnace (10) is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly (59). A side out assembly (31) and heating element alignment mechanism (85) of individual furnace tube modules (25) with a heating element hoist mechanism (22) allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element (12) with individual furnace module cooling system (15, 16, 30). Improved thermal couple (107) is positioned to enhance heat treatment process control and heating element maintainability.
Claims
- -
AMENDED CLAIMS
[received by the International Bureau on 12 January 1994 (12.01.94); original claims unchanged; new claims 10-27 added (4 pages)]
10. (New) An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising: a cylindrical heating element with a load end, the cylindrical heating element having a furnace chamber surrounding a process chamber with an opening at the load end; and an element liner between the process chamber and the furnace chamber allowing for uniform heating in the process chamber.
11. (New) The apparatus of Claim 10, wherein the element liner allows for enhanced dynamic temperature responses in the process chamber.
12. (New) The apparatus of Claim 11, wherein the element liner has a width of 6 millimeters or less.
13. (New) The apparatus of Claim 12, wherein the element liner comprises a ceramic fiber and silicon carbide composite.
14. (New) The apparatus of Claim 13, wherein the element liner comprises Siconex.
15. (New) An apparatus for measuring thermal energy in a high temperature furnace having a radio frequency interference energy field, comprising: a thermal couple; and a silicon carbide layer covering at least a portion of the thermal couple removing radio frequency interference energy.
16. (New) The apparatus of Claim 46, wherein the silicon carbide layer comprises Siconex.
17. (New) An apparatus for measuring the temperature in a high temperature furnace, comprising: a cylindrical heating element having a furnace chamber; and
a thermal couple sufficiently immersed in the furnace chamber allowing for precise measurements of temperature.
18. (New) The apparatus of Claim 17, wherein the cylindrical heating element includes: a furnace chamber surrounding a process chamber with a source end, the furnace chamber having a bore at the source end for inserting the thermal couple.
19. (New) The apparatus of Claim 18, wherein the cylindrical heating element having a center-line longitudinal axis and the furnace chamber bore having a center-line longitudinal axis parallel to the cylindrical heating element center-line longitudinal axis.
20. (New) An apparatus for cooling a plurality of heating elements radiating thermal energy in a high temperature furnace using a source of air, comprising: means for producing independent flows of air from the source of air over the plurality of heating elements, respectively.
21. (New) The apparatus of Claim 20, wherein the means for producing independent flows of air includes: means for extracting the source of air producing a flow of air over a first heating element radiating thermal energy which transfers the thermal energy of the first heating element to the flow of air; and means for separating the flow of air across the first heating element from a second heating element.
22. (New) The apparatus of Claim 21, wherein the means for extracting the source of air includes: an air intake vent;
- 28 -
a fan positioned for extracting the source of air through the air intake vent producing a flow of air over the first heating element; and a flume for exhausting the flow of air from the high temperature furnace.
23. (New) An apparatus for allowing access to a furnace module in a high temperature furnace having a load end, an opposing end, a front side and a back side, comprising: a frame supporting the high temperature furnace; and means, coupled to the frame, for removing the furnace module laterally from a side of the high temperature furnace.
24. (New) The apparatus of the Claim 23, wherein the frame includes: a cantilever member means extending from the back side toward the front side for positioning the furnace module.
25. (New) The apparatus of Claim 24, wherein the means for removing the furnace module includes: a drawer slider coupled to the cantilever member; and a bulkhead coupling the drawer slider and the furnace module such that the furnace module may extend laterally from the front side of the high temperature furnace.
26. (New) The apparatus of Claim 24, wherein the furnace module includes a heating element and further comprises; means for transferring the heating element to or from the high temperature furnace.
27. (New) The apparatus of Claim 26, wherein the means for transferring the heating element includes: a beam coupled to the high temperature furnace; a first cable extending from the beam; means, coupled to the first cable, for attaching the first cable to the heating element; and
- 29 -
means for moving the first cable allowing the heating element to be transferred to or from the high temperature furnace.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE69332639T DE69332639T2 (en) | 1992-06-15 | 1993-06-09 | RIGHT RIGHT DIFFUSION OVEN WITH HIGH PERFORMANCE |
| KR1019940704560A KR100316069B1 (en) | 1992-06-15 | 1993-06-09 | High Performance Horizontal Diffusion Furnace System |
| EP93916481A EP0645072B1 (en) | 1992-06-15 | 1993-06-09 | High performance horizontal diffusion furnace system |
| AT93916481T ATE231318T1 (en) | 1992-06-15 | 1993-06-09 | HIGH PERFORMANCE HORIZONTAL DIFFUSION FURNACE |
| JP6501711A JPH07509345A (en) | 1992-06-15 | 1993-06-09 | High performance horizontal diffusion furnace equipment |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US898,552 | 1986-08-21 | ||
| US07/898,552 US5461214A (en) | 1992-06-15 | 1992-06-15 | High performance horizontal diffusion furnace system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1993026137A1 WO1993026137A1 (en) | 1993-12-23 |
| WO1993026137B1 true WO1993026137B1 (en) | 1994-02-17 |
Family
ID=25409614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1993/005546 WO1993026137A1 (en) | 1992-06-15 | 1993-06-09 | High performance horizontal diffusion furnace system |
Country Status (8)
| Country | Link |
|---|---|
| US (5) | US5461214A (en) |
| EP (1) | EP0645072B1 (en) |
| JP (3) | JPH07509345A (en) |
| KR (1) | KR100316069B1 (en) |
| AT (1) | ATE231318T1 (en) |
| DE (1) | DE69332639T2 (en) |
| ES (1) | ES2191665T3 (en) |
| WO (1) | WO1993026137A1 (en) |
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