[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

US20080166247A1 - Single-Shaft Vacuum Positive Displacement Pump - Google Patents

Single-Shaft Vacuum Positive Displacement Pump Download PDF

Info

Publication number
US20080166247A1
US20080166247A1 US11/884,979 US88497906A US2008166247A1 US 20080166247 A1 US20080166247 A1 US 20080166247A1 US 88497906 A US88497906 A US 88497906A US 2008166247 A1 US2008166247 A1 US 2008166247A1
Authority
US
United States
Prior art keywords
pump
shaft
rotor
motor
positive displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/884,979
Inventor
Michael Holzemer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HOLZEMER, MICHAEL
Publication of US20080166247A1 publication Critical patent/US20080166247A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • the invention relates to a single-shaft vacuum positive replacement pump comprising two or more pump stages arranged one behind the other and a drive motor.
  • Conventional single-shaft vacuum positive replacement pumps comprising two pump stages are configured as two-stage rotary piston pumps or rotary vane pumps, for example.
  • the two pump stages are axially arranged one behind the other, wherein the drive motor is disposed at a longitudinal end of one of the two pump stages and drives the common shaft of the two pump stages.
  • Both the drive motor and the two pump stages are arranged in their own housings such that the shaft passes through a plurality of housing openings.
  • at least two shaft bearings are provided in the drive motor, and in the region of the pump stages three shaft bearings are normally arranged.
  • the drive motor is axially arranged between the two pump stages, wherein a single common shaft supports the two pump rotors and the motor rotor.
  • the vacuum positive replacement pump thus only comprises a single one-piece shaft, which offers a number of constructional advantages.
  • two common shaft bearings can be used for supporting the drive motor rotor and the two axially adjacent pump rotors. In this manner, the number of shaft bearings can be reduced to only a few bearings.
  • the overall positive replacement pump does not require more than two shaft bearings. Due to the single-shaft configuration a coupling is not required, which further simplifies the layout.
  • a simple two-stage positive replacement pump of compact design which is inexpensive to manufacture, is provided.
  • To the two pump stages arranged adjacent to the drive motor further pump stages facing away from the drive motor may be axially attached.
  • the gas connection between the two pump stages is defined by the gap between the motor rotor and the motor stator. Formation of a gap between the motor rotor and the motor is unavoidable. This gap serves as a connecting conduit between the two pump stages, namely between the prevacuum stage and the high-vacuum stage. A separate connecting conduit between the two pump stages thus need not be provided. This allows for a simple configuration and an inexpensive manufacture. An additional separate connecting conduit is to be provided merely in the case of a larger pumping capacity.
  • the gap between the motor rotor and the motor stator is cylindrical, i.e. the motor rotor is of cylindrical configuration on the outside, and the motor stator is of cylindrical configuration on the inside.
  • the motor rotor comprises a helical pump groove.
  • the helical rotating pump groove improves the axial gas transport from the high-vacuum stage to the pre-vacuum stage through the gap between the motor rotor and the motor stator.
  • the motor rotor acts as a lubricant pump pumping the lubricant from the upstream to the downstream pump stage.
  • the pump groove is suitable for transporting even the liquid lubricant from the high-vacuum stage to the pre-vacuum stage. Therefore a separate lubricant pump is not required.
  • the lubricant further cools the drive motor and in particular the motor rotor such that a separate motor cooling device may possibly be omitted.
  • a single stator housing surrounds the shaft, wherein the stator housing does not comprise any shaft sealings.
  • the stator housing thus surrounds the two pump stages and the motor rotor, and may possibly define the stators of the pump stages and the drive motor. Since no shaft sealings are provided, all problems and costs associated therewith are avoided. In particular any undesired oil and gas leakage can thus be prevented to a large extent.
  • the stator housing is surrounded by a lubricant housing.
  • the stator housing is arranged in spaced relationship in the lubricant housing such that the lubricant is disposed between the stator housing and the lubricant housing, and is allowed to flow from the outlet to a lubricant pump.
  • the two pump stages are configured as rotary piston or rotary vane pump stages.
  • Multistage rotor stages or claw-type pump stages or other types of pump stages may also be provided.
  • FIGURE shows a longitudinal section of a single-shaft vacuum positive replacement pump according to the invention comprising two rotary vane pump stages.
  • the FIGURE shows a vacuum positive replacement pump 10 comprising two pump stages 12 , 14 each configured as a rotary vane pump stage, and a drive motor 16 axially arranged between the two pump stages 12 , 14 .
  • the inlet-side pump stage 14 is connected with a gas inlet 18 and defines the high-vacuum stage.
  • the pump stage 12 arranged downstream as seen in the direction of gas flow is the pre-vacuum stage which pumps gas against the atmospheric pressure out of the gas outlet 20 .
  • the two pump stages 12 , 14 each comprise a pump rotor 13 , 15
  • the drive motor 16 comprises a motor rotor 17 .
  • the pump rotors 13 , 15 and the motor rotor 17 are permanently fixed to a common one-piece shaft 22 .
  • the motor rotor 17 is permanently excited.
  • the gas connection between the two pump stages 12 , 14 is realized by a cylindrical gap 24 which is defined on the inside by the motor rotor 17 and on the outside by a motor stator 28 .
  • the motor rotor 17 comprises a helical groove 30 provided in the cylindrical outside of the motor rotor 17 .
  • the gas connection may further be realized by an external channel, e.g. in the case of larger pumping capacities.
  • the shaft 22 is supported by two shaft bearings 32 , 34 configured as roller bearings. Slide bearings or gas bearings may also be used.
  • the pump rotors 13 , 15 are supported in a cantilevered position such that the shaft 22 is supported by the two shaft bearings 32 , 34 alone.
  • the two pump stages 12 , 14 and the drive motor 16 as well as the shaft 22 are supported and fully surrounded by a stator housing 40 .
  • the stator housing 40 does not comprise any shaft sealings.
  • the stator housing 40 is arranged in a lubricant housing 41 which serves for receiving the lubricant and transporting it from the pre-vacuum side to the high-vacuum side.
  • a gear pump 44 is arranged which pumps the liquid lubricant 46 into the gap 24 between the motor rotor and the motor stator via a channel 48 .
  • a gear pump 44 Through a corresponding inlet a small portion of the lubricant delivered by the gear pump 44 is transported directly into the working chamber of the high-vacuum pump stage 14 .
  • the mixture of the gas and the lubricant leaving the high-vacuum pump stage 14 is pumped to the pre-vacuum pump stage 12 via the helical pump groove 30 , whereby the motor rotor 17 and the motor stator 28 are lubricated and cooled.
  • an oil separator 50 Adjacent to the pump chamber outlet of the pre-vacuum pump stage 12 an oil separator 50 is arranged which separates the lubricant dripping down and the the gas pumped off against the atmosphere.
  • the lubricant flows between the lubricant housing 41 and the stator housing 40 and back to the gear pump 44 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A single-shaft vacuum positive displacement pump (10) comprises two pump stages (12,14) each provided with a pump rotor (13,15) and a drive motor (16). The drive motor (16) is axially arranged between the two pump stages (12,14), wherein the shaft (22) supports the pump rotors (13,15) and the motor rotor (17).

Description

  • The invention relates to a single-shaft vacuum positive replacement pump comprising two or more pump stages arranged one behind the other and a drive motor.
  • Conventional single-shaft vacuum positive replacement pumps comprising two pump stages are configured as two-stage rotary piston pumps or rotary vane pumps, for example. Usually, the two pump stages are axially arranged one behind the other, wherein the drive motor is disposed at a longitudinal end of one of the two pump stages and drives the common shaft of the two pump stages. Both the drive motor and the two pump stages are arranged in their own housings such that the shaft passes through a plurality of housing openings. For shaft supporting purposes at least two shaft bearings are provided in the drive motor, and in the region of the pump stages three shaft bearings are normally arranged.
  • It is an object of the invention to provide a simplified single-shaft vacuum positive replacement pump.
  • According to the invention, this object is achieved through the features of claim 1.
  • In the positive replacement pump according to the invention, the drive motor is axially arranged between the two pump stages, wherein a single common shaft supports the two pump rotors and the motor rotor. The vacuum positive replacement pump thus only comprises a single one-piece shaft, which offers a number of constructional advantages. In particular two common shaft bearings can be used for supporting the drive motor rotor and the two axially adjacent pump rotors. In this manner, the number of shaft bearings can be reduced to only a few bearings. When the two pump rotors are supported in a cantilevered position, the overall positive replacement pump does not require more than two shaft bearings. Due to the single-shaft configuration a coupling is not required, which further simplifies the layout. Thus a simple two-stage positive replacement pump of compact design, which is inexpensive to manufacture, is provided. To the two pump stages arranged adjacent to the drive motor further pump stages facing away from the drive motor may be axially attached.
  • Preferably, the gas connection between the two pump stages is defined by the gap between the motor rotor and the motor stator. Formation of a gap between the motor rotor and the motor is unavoidable. This gap serves as a connecting conduit between the two pump stages, namely between the prevacuum stage and the high-vacuum stage. A separate connecting conduit between the two pump stages thus need not be provided. This allows for a simple configuration and an inexpensive manufacture. An additional separate connecting conduit is to be provided merely in the case of a larger pumping capacity.
  • According to a preferred embodiment, the gap between the motor rotor and the motor stator is cylindrical, i.e. the motor rotor is of cylindrical configuration on the outside, and the motor stator is of cylindrical configuration on the inside.
  • According to a preferred embodiment, the motor rotor comprises a helical pump groove. The helical rotating pump groove improves the axial gas transport from the high-vacuum stage to the pre-vacuum stage through the gap between the motor rotor and the motor stator.
  • According to a preferred embodiment, the motor rotor acts as a lubricant pump pumping the lubricant from the upstream to the downstream pump stage. In wet-type vacuum positive replacement pumps, i.e. in positive replacement pumps lubricated with a flowing lubricant, the pump groove is suitable for transporting even the liquid lubricant from the high-vacuum stage to the pre-vacuum stage. Therefore a separate lubricant pump is not required. The lubricant further cools the drive motor and in particular the motor rotor such that a separate motor cooling device may possibly be omitted.
  • Preferably, a single stator housing surrounds the shaft, wherein the stator housing does not comprise any shaft sealings. The stator housing thus surrounds the two pump stages and the motor rotor, and may possibly define the stators of the pump stages and the drive motor. Since no shaft sealings are provided, all problems and costs associated therewith are avoided. In particular any undesired oil and gas leakage can thus be prevented to a large extent.
  • Preferably, the stator housing is surrounded by a lubricant housing. The stator housing is arranged in spaced relationship in the lubricant housing such that the lubricant is disposed between the stator housing and the lubricant housing, and is allowed to flow from the outlet to a lubricant pump.
  • Preferably, the two pump stages are configured as rotary piston or rotary vane pump stages. Multistage rotor stages or claw-type pump stages or other types of pump stages may also be provided.
  • An embodiment of the invention will now be described in greater detail with reference to the drawings.
  • The FIGURE shows a longitudinal section of a single-shaft vacuum positive replacement pump according to the invention comprising two rotary vane pump stages.
    •
  • The FIGURE shows a vacuum positive replacement pump 10 comprising two pump stages 12,14 each configured as a rotary vane pump stage, and a drive motor 16 axially arranged between the two pump stages 12,14. The inlet-side pump stage 14 is connected with a gas inlet 18 and defines the high-vacuum stage. The pump stage 12 arranged downstream as seen in the direction of gas flow is the pre-vacuum stage which pumps gas against the atmospheric pressure out of the gas outlet 20. The two pump stages 12,14 each comprise a pump rotor 13,15, and the drive motor 16 comprises a motor rotor 17. The pump rotors 13,15 and the motor rotor 17 are permanently fixed to a common one-piece shaft 22. The motor rotor 17 is permanently excited.
  • The gas connection between the two pump stages 12,14 is realized by a cylindrical gap 24 which is defined on the inside by the motor rotor 17 and on the outside by a motor stator 28. The motor rotor 17 comprises a helical groove 30 provided in the cylindrical outside of the motor rotor 17. The gas connection may further be realized by an external channel, e.g. in the case of larger pumping capacities.
  • The shaft 22 is supported by two shaft bearings 32,34 configured as roller bearings. Slide bearings or gas bearings may also be used. The pump rotors 13,15 are supported in a cantilevered position such that the shaft 22 is supported by the two shaft bearings 32,34 alone.
  • The two pump stages 12,14 and the drive motor 16 as well as the shaft 22 are supported and fully surrounded by a stator housing 40. The stator housing 40 does not comprise any shaft sealings. The stator housing 40, in turn, is arranged in a lubricant housing 41 which serves for receiving the lubricant and transporting it from the pre-vacuum side to the high-vacuum side.
  • At the high-vacuum end of the shaft 22 a gear pump 44 is arranged which pumps the liquid lubricant 46 into the gap 24 between the motor rotor and the motor stator via a channel 48. Through a corresponding inlet a small portion of the lubricant delivered by the gear pump 44 is transported directly into the working chamber of the high-vacuum pump stage 14. The mixture of the gas and the lubricant leaving the high-vacuum pump stage 14 is pumped to the pre-vacuum pump stage 12 via the helical pump groove 30, whereby the motor rotor 17 and the motor stator 28 are lubricated and cooled.
  • Adjacent to the pump chamber outlet of the pre-vacuum pump stage 12 an oil separator 50 is arranged which separates the lubricant dripping down and the the gas pumped off against the atmosphere. The lubricant flows between the lubricant housing 41 and the stator housing 40 and back to the gear pump 44.

Claims (12)

1. A single-shaft vacuum positive displacement pump comprising:
two pump stages, each stare including a pump rotor; and
a drive motor said drive motor being axially arranged between said two pump stages, and a shaft supporting pump rotors of said pump stages and a motor rotor.
2. The single-shaft positive displacement pump according to claim 1, wherein a gas connection between the two pumps stages is defined by a gap between the motor rotor and a motor stator.
3. The single-shaft positive displacement pump according to claim 2, wherein the gap between the motor rotor and the motor stator is cylindrical.
4. The single-shaft positive displacement pump according to claim 2, wherein the motor rotor comprises a helical pump groove.
5. The single-shaft positive displacement pump according to claim 1, wherein a stator housing surrounds the shaft, wherein the stator housing does not comprise any sealings.
6. The single-shaft positive displacement pump according to claim 1, wherein exactly two roller bearings are provided between the motor rotor and the pump rotors.
7. The single-shaft positive displacement pump according to claim 1, wherein a stator housing is surrounded by a lubricant housing.
8. The single-shaft positive displacement pump according to claim 1, wherein the motor rotor acts as a lubricant pump which pumps a lubricant from a high-vacuum one of the pump stages to a downstream pre-vacuum one of the pump stages.
9. The single-shaft positive displacement pump according to claim 1, wherein the two pump stages are configured as rotary piston or rotary vane pump stages.
10. The single-shaft positive displacement pump according to claim 1, wherein a first bearing and a first of the pump stage rotors are supported on the shaft on one side of the motor rotor and a second bearing and a second of the pump stage rotors are supported on the shaft on an opposite side of the motor rotor.
11. A pump comprising:
a motor stator;
a motor rotor rotatably mounted in the motor stator on a shaft, the motor rotor and the motor stator defining a fluid passage therebetween;
a first pump stage having a rotor mounted on the shaft on one side of the rotor to pump fluid from a fluid inlet into the fluid passage between the motor rotor and the motor stator; and
a second pump stage having a rotor mounted on the shaft on an opposite side of the rotor from the first pump stage rotor to pump fluid from the fluid passage between the motor rotor and the motor stator to an outlet.
12. The pump according to claim 11 further including:
a first bearing supporting the shaft between the motor rotor and the first pump stage rotor; and
a second bearing supporting the shaft between the motor rotor and the second pump stage rotor.
US11/884,979 2005-02-26 2006-01-27 Single-Shaft Vacuum Positive Displacement Pump Abandoned US20080166247A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005008887.2 2005-02-26
DE102005008887A DE102005008887A1 (en) 2005-02-26 2005-02-26 Single-shaft vacuum displacement pump has two pump stages each with pump rotor and drive motor supported by the shaft enclosed by a stator housing
PCT/EP2006/050481 WO2006089828A1 (en) 2005-02-26 2006-01-27 Single-shaft vacuum positive displacement pump

Publications (1)

Publication Number Publication Date
US20080166247A1 true US20080166247A1 (en) 2008-07-10

Family

ID=36130115

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/884,979 Abandoned US20080166247A1 (en) 2005-02-26 2006-01-27 Single-Shaft Vacuum Positive Displacement Pump

Country Status (7)

Country Link
US (1) US20080166247A1 (en)
EP (1) EP1851433A1 (en)
JP (1) JP2008531910A (en)
KR (1) KR20070103775A (en)
CN (1) CN101128671A (en)
DE (1) DE102005008887A1 (en)
WO (1) WO2006089828A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170045051A1 (en) * 2014-05-01 2017-02-16 Ateliers Busch Sa Pumping method in a system for pumping and system of vacuum pumps
US20190277282A1 (en) * 2018-03-06 2019-09-12 Schwäbische Hüttenwerke Automotive GmbH Vacuum pump sealing element
US10465686B2 (en) 2014-06-26 2019-11-05 Leybold Gmbh Vacuum pump system
US10760573B2 (en) 2014-06-27 2020-09-01 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010033373A1 (en) * 2010-08-04 2012-02-09 Inficon Gmbh Leak Detector
CN103206378B (en) * 2012-01-11 2015-10-07 复盛股份有限公司 Multistage heat pump compressor
CN107110172B (en) * 2014-10-31 2020-09-04 特灵国际有限公司 System and method for providing lubricant to a bearing

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2524269A (en) * 1946-10-14 1950-10-03 Sta Rite Products Inc Pump
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
US3438570A (en) * 1966-08-20 1969-04-15 Leybold Heraeus Gmbh & Co Kg Two stage vacuum pump
US3644702A (en) * 1969-03-31 1972-02-22 Balzers Patent Beteilig Ag Vacuum pump designed as displacement pump
US5088899A (en) * 1989-11-09 1992-02-18 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pump with drive motor
US5112200A (en) * 1990-05-29 1992-05-12 Nu-Tech Industries, Inc. Hydrodynamically suspended rotor axial flow blood pump
US5573387A (en) * 1992-11-13 1996-11-12 The Boc Group Plc Vacuum pumps
US5846062A (en) * 1996-06-03 1998-12-08 Ebara Corporation Two stage screw type vacuum pump with motor in-between the stages
US6244835B1 (en) * 1996-06-26 2001-06-12 James F. Antaki Blood pump having a magnetically suspended rotor
US6267572B1 (en) * 1998-10-30 2001-07-31 Tokico Ltd. Scroll fluid machine having scroll members at each end of a rotating hollow shaft
US20020114706A1 (en) * 2000-06-16 2002-08-22 Stuart Bassine Reversible pivoting vane rotary compressor for a valve-free oxygen concentrator
US6514053B2 (en) * 2000-02-10 2003-02-04 Toshiba Tec Kabushiki Kaisha Motor-driven pump with a plurality of impellers
US6631617B1 (en) * 2002-06-27 2003-10-14 Tecumseh Products Company Two stage hermetic carbon dioxide compressor
US20040071562A1 (en) * 2002-10-15 2004-04-15 Dreiman Nelik I. Horizontal two stage rotary compressor with improved lubrication structure
US7201567B2 (en) * 2003-06-20 2007-04-10 Emerson Climate Technologies, Inc. Plural compressors
US7224094B2 (en) * 2002-07-12 2007-05-29 Mitsubishi Denki Kabushiki Kaisha Magnetic bearing spindle

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03151989A (en) * 1989-11-08 1991-06-28 Daiwa Golf Kk Tubular article and making thereof
JPH05302581A (en) * 1992-04-24 1993-11-16 Daikin Ind Ltd Vertical type compressor
JPH07318179A (en) * 1994-05-26 1995-12-08 Toshiba Corp Sealed compressor, and freezer and air conditioner including the compressor
JPH08219059A (en) * 1995-02-17 1996-08-27 Hitachi Ltd Compressor
EP0738833B1 (en) * 1995-04-19 2000-09-20 Ebara Corporation Multistage positive-displacement vacuum pump
DE19945871A1 (en) * 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Screw pump, in particular screw vacuum pump, with two pump stages
JP2003254271A (en) * 2002-03-04 2003-09-10 Teijin Ltd Twin scroll type fluid machinery
JP4274841B2 (en) * 2003-04-14 2009-06-10 三洋電機株式会社 Manufacturing method of airtight container for compressor

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2524269A (en) * 1946-10-14 1950-10-03 Sta Rite Products Inc Pump
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
US3438570A (en) * 1966-08-20 1969-04-15 Leybold Heraeus Gmbh & Co Kg Two stage vacuum pump
US3644702A (en) * 1969-03-31 1972-02-22 Balzers Patent Beteilig Ag Vacuum pump designed as displacement pump
US5088899A (en) * 1989-11-09 1992-02-18 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Pump with drive motor
US5112200A (en) * 1990-05-29 1992-05-12 Nu-Tech Industries, Inc. Hydrodynamically suspended rotor axial flow blood pump
US5573387A (en) * 1992-11-13 1996-11-12 The Boc Group Plc Vacuum pumps
US5846062A (en) * 1996-06-03 1998-12-08 Ebara Corporation Two stage screw type vacuum pump with motor in-between the stages
US6244835B1 (en) * 1996-06-26 2001-06-12 James F. Antaki Blood pump having a magnetically suspended rotor
US6267572B1 (en) * 1998-10-30 2001-07-31 Tokico Ltd. Scroll fluid machine having scroll members at each end of a rotating hollow shaft
US6514053B2 (en) * 2000-02-10 2003-02-04 Toshiba Tec Kabushiki Kaisha Motor-driven pump with a plurality of impellers
US20020114706A1 (en) * 2000-06-16 2002-08-22 Stuart Bassine Reversible pivoting vane rotary compressor for a valve-free oxygen concentrator
US6631617B1 (en) * 2002-06-27 2003-10-14 Tecumseh Products Company Two stage hermetic carbon dioxide compressor
US7224094B2 (en) * 2002-07-12 2007-05-29 Mitsubishi Denki Kabushiki Kaisha Magnetic bearing spindle
US20040071562A1 (en) * 2002-10-15 2004-04-15 Dreiman Nelik I. Horizontal two stage rotary compressor with improved lubrication structure
US7201567B2 (en) * 2003-06-20 2007-04-10 Emerson Climate Technologies, Inc. Plural compressors

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170045051A1 (en) * 2014-05-01 2017-02-16 Ateliers Busch Sa Pumping method in a system for pumping and system of vacuum pumps
US10465686B2 (en) 2014-06-26 2019-11-05 Leybold Gmbh Vacuum pump system
US10760573B2 (en) 2014-06-27 2020-09-01 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
US11725662B2 (en) 2014-06-27 2023-08-15 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
US20190277282A1 (en) * 2018-03-06 2019-09-12 Schwäbische Hüttenwerke Automotive GmbH Vacuum pump sealing element
US11286929B2 (en) * 2018-03-06 2022-03-29 Schwäbische Hüttenwerke Automotive GmbH Vacuum pump sealing element

Also Published As

Publication number Publication date
EP1851433A1 (en) 2007-11-07
CN101128671A (en) 2008-02-20
DE102005008887A1 (en) 2006-08-31
KR20070103775A (en) 2007-10-24
WO2006089828A1 (en) 2006-08-31
JP2008531910A (en) 2008-08-14

Similar Documents

Publication Publication Date Title
US20080166247A1 (en) Single-Shaft Vacuum Positive Displacement Pump
US8764413B2 (en) Pumping arrangement
US5893702A (en) Gas friction pump
JP2005155540A (en) Multistage dry-sealed vacuum pump
JP5560263B2 (en) Multistage vacuum pump
US6409477B1 (en) Vacuum pump
JP4947405B2 (en) Turbo compressor
US6190149B1 (en) Vacuum pump oil distribution system with integral oil pump
US6676384B2 (en) Gas friction pump
CN106536935B (en) Compression refrigeration equipment with main shaft compressor
JPH0545827Y2 (en)
JP4928265B2 (en) Multistage centrifugal pump
JP5566636B2 (en) Vacuum pump
WO2004083643A1 (en) Positive-displacement vacuum pump
WO2022255275A1 (en) Screw compressor
EP1174621B1 (en) Screw compressor
JPH11294358A (en) Double shaft vacuum pump
EP4028666B1 (en) Centrifugal compressor with motor cooling by compressed process gas and bearing lubricant flow through a hollow shaft
US12071949B2 (en) Screw compressor having rotors mounted on one side
US20240077078A1 (en) Rotary vane vacuum pump with gas ballast assembly
EP4446585A1 (en) Refrigerant compressor
CN110714801B (en) Expander and fluid circulation system comprising an expander
RU47060U1 (en) CENTRIFUGAL MULTI-STAGE PUMP
JPH06346872A (en) Scroll type refrigerant pump

Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HOLZEMER, MICHAEL;REEL/FRAME:019792/0977

Effective date: 20070723

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE