TWM619828U - Atomic layer deposition device for blowing powder - Google Patents

Abstract

The present model provides an atomic layer deposition device for blowing powder, which mainly includes a vacuum chamber, a shaft sealing device and a driving unit, wherein the driving unit drives the vacuum chamber to rotate through the shaft sealing device. The shaft sealing device includes an outer tube body and an inner tube body, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum cavity, and forms a protruding tube part in the reaction space. At least one air extraction line and at least one air intake line are located in the inner tube body, wherein the air intake line passes through the tube wall protruding from the tube wall and extends from the inner tube body to the reaction space. The extension tube wall includes a plurality of air outlets facing the surface of the lower half of the reaction space, and is used for conveying a non-reactive gas to the reaction space to blow the powder in the reaction space.

Description

Atomic layer deposition device for blowing powder

The invention relates to an atomic layer deposition device for blowing powder, in which at least one extension pipeline is extended from a shaft seal device to the reaction space of a vacuum chamber, and a non-reactive gas is transported through a plurality of air outlets of the extension pipeline To the reaction space to blow the powder in the reaction space.

Nanoparticles are generally defined as particles smaller than 100 nanometers in at least one dimension. Nanoparticles and macroscopic substances have completely different physical and chemical properties. Generally speaking, the physical properties of macroscopic matter have nothing to do with its size, but nanoparticle is not the case. Nanoparticles have potential applications in the fields of biomedicine, optics, and electronics.

Quantum dots (Quantum Dot) are semiconductor nano-particles. The semiconductor materials currently studied are II-VI materials, such as ZnS, CdS, CdSe, etc., of which CdSe has attracted the most attention. The size of quantum dots is usually between 2 and 50 nanometers. After the quantum dots are irradiated with ultraviolet light, the electrons in the quantum dots absorb energy and transition from the valence band to the conduction band. When the excited electron returns from the conduction band to the valence band, it releases energy through light emission.

The energy gap of a quantum dot is related to the size. The larger the size of the quantum dot, the smaller the energy gap, and will emit light with a longer wavelength after irradiation. The smaller the size of the quantum dot, the larger the energy gap, and the wavelength will be emitted after irradiation. Shorter light. For example, quantum dots of 5 to 6 nanometers will emit orange or red light, while quantum dots of 2 to 3 nanometers will emit blue or green light. Of course, the light color depends on the material composition of the quantum dots.

Light-emitting diodes (LEDs) using quantum dots produce light that can be close to a continuous spectrum, have high color rendering properties, and help improve the luminous quality of the light-emitting diodes. In addition, the wavelength of the emitted light can be adjusted by changing the size of the quantum dots, making the quantum dots the focus of the development of a new generation of light-emitting devices and displays.

Although quantum dots have the above-mentioned advantages and characteristics, they are prone to agglomeration during the application or manufacturing process. In addition, quantum dots have high surface activity and are easy to react with air and water vapor, thereby shortening the lifespan of quantum dots.

Specifically, when the quantum dots are made into a sealant for light-emitting diodes, agglomeration effect may occur, which reduces the optical performance of the quantum dots. In addition, after quantum dots are made into the sealant of light-emitting diodes, external oxygen or water vapor may still pass through the sealant and contact the surface of the quantum dots, causing the quantum dots to oxidize and affect the quantum dots and light-emitting diodes. The performance or service life of the product. Surface defects and dangling bonds of quantum dots may also cause nonradiative recombination, which also affects the luminous efficiency of quantum dots.

At present, the industry mainly uses atomic layer deposition (ALD) to form a nanometer-thick film on the surface of quantum dots, or form multiple layers of thin films on the surface of quantum dots to form a quantum well structure.

Atomic layer deposition can form a thin film with uniform thickness on the substrate and can effectively control the thickness of the thin film. In theory, it is also suitable for three-dimensional quantum dots. When the quantum dots are placed on the carrier plate, there will be contact points between adjacent quantum dots, so that the precursors of atomic layer deposition cannot contact these contact points, and it is impossible to form a uniform thickness on the surface of all nano particles. film.

In order to solve the above-mentioned problems faced by the prior art, the present invention proposes an atomic layer deposition device for blowing powder, which mainly extends at least one gas inlet line from the shaft seal device to the reaction space of the vacuum chamber, and in the reaction space An extension pipeline is formed. The extension pipeline includes a plurality of air outlets facing a surface of the reaction space, and the non-reactive gas is output through the plurality of air outlets of the extension pipeline to blow the powder in the reaction space to facilitate the formation of a uniform thickness film on the surface of each powder.

An object of the present invention is to provide an atomic layer deposition device for blowing powder, which mainly includes a driving unit, a shaft sealing device and a vacuum chamber, wherein the driving unit is connected through the shaft sealing device and drives the vacuum chamber to rotate. The shaft sealing device includes an outer tube body and an inner tube body, wherein the inner tube body is arranged in an accommodating space of the outer tube body, and at least one air suction pipeline and at least one air inlet pipeline are arranged in the inner tube body. The air extraction line is used to extract the gas in the vacuum chamber, and the air intake line is used to transport a non-reactive gas and/or a precursor gas into the reaction space.

The filter unit is arranged on one side of the inner tube body connected to the reaction space, and the air inlet line passes through the filter unit and extends from the inner tube body into the reaction space to form an extended pipeline in the reaction space. The extension pipeline is close to the surface of the lower half of the reaction space and includes a plurality of air outlets, wherein the extension pipeline blows the non-reactive gas to the surface of the lower half of the reaction space through the plurality of air outlets to blow the powder in the reaction space.

An object of the present invention is to provide an atomic layer deposition device for blowing powder, which mainly includes a driving unit, a shaft sealing device and a vacuum chamber, wherein the driving unit is connected through the shaft sealing device and drives the vacuum chamber to rotate. The shaft sealing device includes an outer tube body and an inner tube body, wherein the inner tube body extends from an accommodating space of the outer tube body to a reaction space of the vacuum chamber, and a protruding tube portion is formed in the reaction space.

At least one gas extraction pipeline and at least one gas inlet pipeline are arranged in the inner tube body, wherein the gas inlet pipeline extends into the reaction space through a tube wall of the protruding tube part, and forms an extension pipeline in the reaction space. The extension pipeline is close to the surface of the lower half of the reaction space and includes a plurality of air outlets, wherein the extension pipeline blows the non-reactive gas to the surface of the lower half of the reaction space through the plurality of air outlets to blow the powder in the reaction space.

One purpose of the present invention is to provide an atomic layer deposition device for blowing powder. The inner tube of the shaft seal device extends from the accommodating space of the outer tube to the reaction space of the vacuum chamber, and is formed in the reaction space. One protruding tube. A plurality of air outlets are arranged on the pipe wall of the protruding pipe part, and the air outlets face the surface of the lower half of the vacuum cavity. The air inlet pipeline located in the inner tube does not extend to the reaction space, but is fluidly connected to a plurality of air outlets on the wall of the inner tube, and the non-reactive gas is blown toward the surface of the lower half of the reaction space through the plurality of air outlets , In order to facilitate blowing the powder in the reaction space.

In order to achieve the above objective, the present invention proposes an atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powder; a shaft sealing device, including an outer tube and An inner tube body, wherein the outer tube body has an accommodating space for accommodating the inner tube body, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum chamber, and is formed in the reaction space A protruding tube; a driving unit, which is connected to the vacuum chamber through the outer tube body of the shaft seal device, and drives the vacuum chamber to rotate through the outer tube body; at least one suction line is located in the inner tube body and is fluidly connected to the vacuum chamber body The reaction space is used to extract a gas in the reaction space; and at least one gas inlet line passes through a tube wall of the protruding tube portion, extends from the inner tube body to the reaction space, and forms an extension in the reaction space Pipeline, where the extension pipeline includes a plurality of air outlets facing opposite On one side of the reaction space, the extension pipeline blows a non-reactive gas toward the side of the reaction space through a plurality of air outlets to blow the powder in the reaction space.

The present invention proposes another atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powders; a shaft sealing device, including an outer tube body and an inner tube body, The outer tube body has an accommodating space for accommodating the inner tube body; a filter unit located on the side where the inner tube body is connected to the reaction space; a driving unit connected to the vacuum chamber through the outer tube body of the shaft seal device, The vacuum chamber is driven to rotate through the outer tube; at least one air extraction line is located in the inner tube and is fluidly connected to the reaction space of the vacuum chamber through the filter unit, and is used to extract a gas in the reaction space; and at least one air inlet line , Located in the inner tube body, extending through the filter unit from the inner tube body to the reaction space, and forming an extension pipeline in the reaction space, wherein the extension pipeline includes a plurality of air outlets facing one side of the reaction space, and the extension pipeline passes through a plurality of The air outlet blows a non-reactive gas toward the side of the reaction space to blow the powder in the reaction space.

The present invention also proposes another atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powders; a shaft sealing device, including an outer tube body and an inner tube body , Wherein the outer tube body has an accommodating space for accommodating the inner tube body, and the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space Part, wherein the protruding tube part includes a plurality of air outlets, passing through a tube wall of the protruding tube part, and facing the direction of one side of the reaction space; a driving unit connected to the vacuum chamber through the outer tube body of the shaft sealing device , And drive the vacuum chamber to rotate through the outer tube; at least one gas extraction pipeline located in the inner tube, fluidly connected to the reaction space of the vacuum chamber, and used to extract a gas in the reaction space; and at least one gas inlet pipeline located in the In the inner tube body and the protruding tube part, a plurality of air outlets are fluidly connected, A non-reactive gas is blown toward the side of the reaction space through a plurality of air outlets to blow the powder in the reaction space.

In the atomic layer deposition device for blowing powder, the plurality of air outlets of the extension pipeline face the side surface of the lower half of the reaction space.

In the atomic layer deposition device for blowing powder, the reaction space is a columnar body, including two bottom surfaces and side surfaces, the side surfaces connect the two bottom surfaces, and the extension pipeline extends toward the bottom surface and the side surface of the reaction space.

In the atomic layer deposition device for blowing powder, the gas inlet pipeline includes at least one non-reactive gas delivery pipeline, and the non-reactive gas delivery pipeline extends from the inner tube body into the reaction space to form an extension pipeline.

The atomic layer deposition device for blowing powder includes a filter unit located on the side of the inner tube body connected to the reaction space.

In the atomic layer deposition device for blowing powder, the inner tube extends from the accommodating space of the outer tube to the reaction space of the vacuum chamber, and a protruding tube is formed in the reaction space, and the filter unit It is located on the side where the protruding pipe part is connected to the reaction space.

10: Atomic layer deposition device for blowing powder

11: Vacuum chamber

111: cover

1111: inner surface

113: Cavity

115: monitor wafer

12: reaction space

121: powder

122: Bottom

124: Side

13: Shaft seal device

130: protruding tube

131: Outer tube body

132: accommodating space

133: inner tube body

1331: air outlet

134: Connecting Space

139: filter unit

14: Gear

15: drive unit

16: heating device

171: Extraction line

172: Extension pipeline

1721: air outlet

173: intake line

175: Non-reactive gas pipeline

177: heater

179: temperature sensing unit

191: Carrier Board

193: fixed frame

195: connecting shaft

[Figure 1] is a three-dimensional schematic diagram of an embodiment of a new type of atomic layer deposition apparatus for blowing powder.

[Figure 2] is a schematic cross-sectional view of an embodiment of a new type of atomic layer deposition apparatus for blowing powder.

[Figure 3] is a schematic cross-sectional view of an embodiment of a shaft sealing device of a novel atomic layer deposition device for blowing powder.

[Figure 4] is a schematic cross-sectional view of another embodiment of the new type of atomic layer deposition apparatus for blowing powder.

[Figure 5] is a schematic cross-sectional view of another embodiment of the new type of atomic layer deposition apparatus for blowing powder.

[Figure 6] is a schematic cross-sectional view of another embodiment of the new type of atomic layer deposition apparatus for blowing powder.

[Figure 7] is a schematic cross-sectional view of another embodiment of the new type of atomic layer deposition apparatus for blowing powder.

Please refer to Figure 1, Figure 2 and Figure 3, which are respectively a three-dimensional schematic diagram, a cross-sectional schematic diagram of an embodiment of a novel atomic layer deposition device for blowing powder, and a shaft sealing device of the atomic layer deposition device for blowing powder A schematic cross-sectional view of an embodiment. As shown in the figure, the atomic layer deposition apparatus 10 for blowing powder mainly includes a vacuum chamber 11, a shaft sealing device 13 and a driving unit 15. The driving unit 15 is connected to the vacuum chamber 11 through the shaft sealing device 13, and Drive the vacuum chamber 11 to rotate.

The vacuum cavity 11 has a reaction space 12 for accommodating a plurality of powders 121. The powders 121 can be Quantum Dots, such as II-VI semiconductor materials such as ZnS, CdS, CdSe, etc., and are formed on the quantum dots. The above film can be aluminum oxide (Al2O3). The vacuum chamber 11 may include a cover 111 and a cavity 113, wherein an inner surface 1111 of the cover 111 is used to cover the cavity 113, and a reaction space 12 is formed between the two.

In an embodiment of the present invention, a monitoring wafer 115 may be disposed on the inner surface 1111 of the cover 111, and when the cover 111 covers the cavity 113, the monitoring wafer 115 will be located in the reaction space 12. When atomic layer deposition is performed in the reaction space 12, a thin film is formed on the surface of the monitoring wafer 115. In practical applications, the film thickness on the surface of the monitoring wafer 115 and the film thickness on the surface of the powder 121 can be further measured, and the relationship between the two can be calculated. Then, the film thickness on the surface of the monitoring wafer 115 can be measured to calculate the film thickness on the surface of the powder 121.

The shaft sealing device 13 includes an outer tube body 131 and an inner tube body 133. The outer tube body 131 has a accommodating space 132, and the inner tube body 133 has a connecting space 134, such as the outer tube body 131 and the inner tube body. 133 can be a hollow cylinder. The accommodating space 132 of the outer tube body 131 is used for accommodating the inner tube body 133, wherein the outer tube body 131 and the inner tube body 133 are coaxially arranged. The shaft seal device 13 may be a common shaft seal or a magnetic fluid shaft seal, and is mainly used to isolate the reaction space 12 of the vacuum chamber 11 from the external space, so as to maintain the vacuum of the reaction space 12.

The driving unit 15 is connected to one end of the shaft sealing device 13, and drives the vacuum chamber 11 to rotate through the shaft sealing device 13, for example, connects to the vacuum chamber 11 through the outer tube body 131, and drives the vacuum chamber 11 to rotate through the outer tube body 131. In addition, the driving unit 15 is not connected to the inner tube body 133, so when the driving unit 15 drives the outer tube body 131 and the vacuum chamber 11 to rotate, the inner tube body 133 will not rotate with it.

The driving unit 15 can drive the outer tube body 131 and the vacuum chamber 11 to continuously rotate in the same direction, for example, clockwise or counterclockwise to continuously rotate. In different embodiments, the driving unit 15 can drive the outer tube body 131 and the vacuum chamber 11 to rotate a specific angle in a clockwise direction, and then rotate a specific angle in a counterclockwise direction, for example, the specific angle may be 360 degrees. When the vacuum chamber 11 rotates, it will agitate the powder 121 in the reaction space 12, so that the powder 121 will be evenly heated and contact the precursor or non-reactive gas.

In an embodiment of the present invention, the driving unit 15 may be a motor, which is connected to the outer tube body 131 through at least one gear 14, and drives the outer tube body 131 and the vacuum chamber 11 to rotate relative to the inner tube body 133 via the gear 14.

The connecting space 134 of the inner tube body 133 can be provided with at least one gas extraction line 171, at least one gas inlet line 173, at least one non-reactive gas delivery line 175, a heater 177 and/or a temperature sensing unit 179, as shown in FIG. 2 and Figure 3.

The gas extraction line 171 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used to extract gas in the reaction space 12 so that the reaction space 12 is in a vacuum state for the atomic layer deposition process. Specifically, the pumping line 171 can be connected to a pump, and the gas in the reaction space 12 can be pumped out through the pump.

The gas inlet line 173 is fluidly connected to the reaction space 12 of the vacuum chamber 11 and is used to transport a precursor or a non-reactive gas to the reaction space 12, where the non-reactive gas can be an inert gas such as nitrogen or argon. For example, the gas inlet line 173 may be connected to a precursor storage tank and a non-reactive gas storage tank through a valve assembly, and the precursor can be transported into the reaction space 12 through the valve assembly, so that the precursor deposits on the surface of the powder 121. In practical applications, the gas inlet line 173 may transport a carrier gas and precursors into the reaction space 12 together. Then, the non-reactive gas is transported into the reaction space 12 through the valve assembly, and is pumped through the gas extraction line 171 to remove the precursors in the reaction space 12. In an embodiment of the present invention, the gas inlet pipeline 173 may be connected to a plurality of branch pipelines, and different precursors can be sequentially delivered into the reaction space 12 through each branch pipeline.

In addition, the gas inlet line 173 can increase the flow rate of the non-reactive gas delivered to the reaction space 12, and blow the powder 121 in the reaction space 12 through the non-reactive gas, so that the powder 121 is driven by the non-reactive gas and diffuses into the reaction space. 12 various areas.

In an embodiment of the present invention, the gas inlet line 173 may include at least one non-reactive gas delivery line 175 fluidly connected to the reaction space 12 of the vacuum chamber 11, and is used to deliver a non-reactive gas to the reaction space 12, such as non-reactive gas The delivery line 175 can be connected to a nitrogen storage tank through the valve assembly, and deliver the nitrogen to the reaction space 12 through the valve assembly. The non-reactive gas is used to blow the powder 121 in the reaction space 12 and cooperate with the driving unit 15 to drive the vacuum chamber 11 to rotate, which can effectively and uniformly stir the powder 121 in the reaction space 12 and deposit the thickness on the surface of each powder 121 Uniform film.

Both the gas inlet pipe 173 and the non-reactive gas delivery pipe 175 of the atomic layer deposition apparatus 10 used to blow powder are used to deliver the non-reactive gas to the reaction space 12, and the flow of the non-reactive gas delivered by the gas inlet pipe 173 is relatively small. , Which is mainly used to remove the precursors in the reaction space 12, and the non-reactive gas transported by the non-reactive gas delivery line 175 has a relatively large flow rate, which is mainly used to blow the powder 121 in the reaction space 12.

Specifically, the time points at which the gas inlet line 173 and the non-reactive gas conveying line 175 convey the non-reactive gas to the reaction space 12 are different. Therefore, in actual applications, the non-reactive gas conveying line 175 may not be provided, and the gas inlet line 173 may be adjusted in time. The flow of non-reactive gas delivered at different time points. When the precursors in the reaction space 12 are to be removed, the flow rate of the non-reactive gas delivered by the gas inlet line 173 to the reaction space 12 can be reduced, and when the powder 121 in the reaction space 12 is to be blown, the gas inlet line 173 should be added for conveying. The flow rate of the non-reactive gas to the reaction space 12.

When the driving unit 15 of the present invention drives the outer tube body 131 and the vacuum chamber 11 to rotate, the inner tube body 133 and the air suction line 171, the air inlet line 173 and/or the non-reactive gas delivery line 175 inside will not rotate with it , It is beneficial to improve the stability of the non-reactive gas and/or precursor that is delivered to the reaction space 12 by the gas inlet pipe 173 and/or the non-reactive gas delivery pipe 175.

The heater 177 is used to heat the connection space 134 and the inner tube body 133, and heat the air extraction line 171, the air inlet line 173 and/or the non-reactive gas delivery line 175 in the inner tube body 133 through the heater 177 to improve air extraction The temperature of the gas in the pipeline 171, the gas inlet pipeline 173, and/or the non-reactive gas delivery pipeline 175. For example, the temperature of the non-reactive gas and/or the precursor delivered by the gas inlet line 173 to the reaction space 12 can be increased, and the temperature of the non-reactive gas delivered by the non-reactive gas delivery line 175 to the reaction space 12 can be increased. When non-reactive gases and/or precursors enter the reaction space 12, the temperature of the reaction space 12 will not drop or change significantly. In addition, the temperature of the heater 177 or the connecting space 134 can be measured through the temperature sensing unit 179 to know the working state of the heater 177. Of course, another heating device 16 is usually arranged inside, outside or around the vacuum chamber 11, as shown in FIG. 4, where the heating device 16 is adjacent to or in contact with the vacuum chamber 11 and is used to heat the vacuum chamber 11 and the reaction space 12 .

In the embodiment of the present invention, the gas inlet pipeline 173 and/or the non-reactive gas delivery pipeline 175 extends from the inner tube body 133 of the shaft sealing device 13 into the reaction space 12 of the vacuum chamber 11 and faces a surface of the reaction space 12 In the direction of extension. For example, the inlet line 173 and/or the non-reactive gas delivery line 175 extends from the connecting space 134 of the inner tube 133 to the reaction space 12 of the vacuum chamber 11, and the inlet line 173 and/or the non-reactive gas line 173 extending to the reaction space 12 The gas delivery line 175 can be defined as an extension line 172.

In an embodiment of the present invention, the reaction space 12 may be a columnar body and includes two bottom surfaces 122 and at least one side surface 124, wherein the side surface 124 is connected to the two bottom surfaces 122. The extension pipeline 172 located in the reaction space 12 extends toward the bottom surface 122 and the side surface 124 of the reaction space 12. For example, a part of the extension pipeline 172 is closer to the side surface 124 of the lower half of the reaction space 12.

The extension pipeline 172 may include a plurality of air outlets 1721, wherein the air outlets 1721 face a surface of the lower half of the reaction space 12. For example, the extension pipeline 172 can blow non-reactive gas toward the side surface 124 of the lower half of the reaction space 12 through a plurality of air outlets 1721, or blow non-reactive gas in a direction radially outward of the vacuum chamber 11.

The extension pipeline 172 of the present invention has a plurality of air outlets 1721, and the non-reactive gas and/or reaction gas can be blown to the powder 121 in the reaction space 12 in a spray-like manner through the air outlet 1721 to facilitate uniform raising The powder 121 in the reaction space 12.

A filter unit 139 can be provided on the side of the inner tube 133 close to or connected to the reaction space 12 in the embodiment of the present invention, wherein the suction line 171 in the inner tube 133 is fluidly connected to the reaction space 12 of the vacuum chamber 11 via the filter unit 139 , And the inlet pipe 173 and/or the non-reactive gas delivery pipe 175 located in the inner tube body 133 pass through the filter unit 139 and form an extension pipe 172 in the reaction space 12, as shown in FIG. 2. The arrangement of the filter unit 139 can prevent the powder 121 in the reaction space 12 from being drawn out when the gas extraction line 171 extracts the gas in the reaction space 12, resulting in the loss of the powder 121.

In an embodiment of the present invention, the extension pipeline 172 has an L-shaped or stepped appearance, and includes three sections and two turning angles, where the turning angle is about 90 degrees. The first section of the extension pipeline 172 is connected to the gas inlet pipeline 173 and/or the non-reactive gas delivery pipeline 175 in the inner tube body 133 and extends toward the cover 111 or the bottom surface 122 of the reaction space 12. The second section of the extension pipeline 172 is connected to the first section, wherein there is a turning angle between the second section and the first section, and the second section extends toward the side surface 124 of the reaction space 12. The third section of the extension pipeline 172 is connected to the second section and extends toward the bottom surface 122 of the reaction space 12 or the cover 111. Of course there are 172 extension pipelines The three segments and two turning angles are only an embodiment of the present invention, and are not a limitation of the scope of rights of the present invention.

Specifically, in the embodiment of the present invention, an extension pipeline 172 is mainly arranged in the reaction space 12, and the extension pipeline 172 provided with the air outlet 1721 is close to the powder 121 located in the lower half of the reaction space 12, and the air outlet 1721 faces the powder 121 and The side surface 124 of the lower half of the reaction space 12 blows air to raise the powder 121 in the reaction space 12.

In an embodiment of the present invention, as shown in FIG. 4, the inner tube body 133 extends from the accommodating space 132 of the outer tube body 131 to the reaction space 12 of the vacuum chamber 11, and a protruding tube is formed in the reaction space 12部130. The gas inlet line 173 and/or the non-reactive gas delivery line 175 passes through the inner tube body 133 and/or the tube wall of the protruding tube portion 130 located in the reaction space 12, and extends from the inner tube body 133 into the reaction space 12, and An extension line 172 is formed in the reaction space 12. In addition, a plurality of air outlets 1721 are formed on the side surface 124 of the extension pipeline 172 close to the lower half of the reaction space 12.

In another embodiment of the present invention, as shown in FIG. 5, the gas inlet line 173 and/or the non-reactive gas delivery line 175 may not extend from the connection space 134 of the inner tube body 133 to the reaction space 12. In other words, the extension pipeline 172 is not provided in the reaction space 12 of the vacuum chamber 11, but a plurality of air outlets 1331 are provided on the inner tube body 133 and/or the protruding tube portion 130 near the lower half of the vacuum chamber 11 , Wherein the air outlet passes through the tube wall of the protruding tube portion 130 and faces a surface or side surface 124 of the lower half of the reaction space 12.

The gas extraction pipeline 171, the gas inlet pipeline 173, the non-reactive gas delivery pipeline 175, the heater 177, and/or the temperature sensing unit 179 extend into the protruding pipe portion 130, wherein the gas inlet pipeline 173 or the non-reactive gas delivery pipeline 175 is fluid The air outlet 1331 on the pipe wall of the protruding pipe 130 or the inner pipe body 133 is connected. Specifically, the air outlet provided on the tube wall of the protruding tube portion 130 or the inner tube body 133 1331 faces the side surface 124 of the lower half of the reaction space 12, so that the gas inlet line 173 or the non-reactive gas delivery line 175 can blow the non-reactive gas toward the side surface 124 of the lower half of the reaction space 12 through the air outlet 1331, and use the non-reactive gas The powder 121 in the reaction space 12 is blown. In an embodiment of the present invention, the air inlet line 173 or the non-reactive gas delivery line 175 may be integrated on the inner surface of the inner tube body 133 and connected to the air outlet 1331 provided on the inner tube body 133.

In another embodiment of the present invention, as shown in FIG. 6, the inner tube body 133 extends from the accommodating space 132 of the outer tube body 131 into the reaction space 12, and a protrusion is provided in the reaction space 12 of the vacuum chamber 11 Pipe 130. A filter unit 139 can be provided on the side of the protruding pipe 130 connected to the reaction space 12, and the gas inlet line 173 and/or the non-reactive gas delivery line 175 passes through the filter unit 139 and extends from the inner pipe body 133 into the reaction space 12. And an extension pipeline 172 is formed in the reaction space 12. In addition, a plurality of air outlets 1721 may be provided on the pipe wall of the extension pipeline 172 close to the side 124 of the lower half of the reaction space 12, and non-reactive gas can be blown out toward the side 124 of the lower half of the reaction space 12 through the air outlets 1721.

In actual application, the height of the air outlet 1721 of the extension pipeline 172 can be adjusted, or the amount of the powder 121 in the reaction space 12 can be controlled, so that when the vacuum chamber 11 is not rotating, the powder 121 in the reaction space 12 will not cover The air outlet 1721 of the pipeline 172 is extended to reduce the loss of the powder 121. In addition, another filter unit can be provided at the air outlet 1721 of the extension pipeline 172 to further reduce the loss of the powder 121.

In another embodiment of the present invention, the extension pipeline 172 can continuously transport the non-reactive gas to the reaction space 12 and can adjust the flow rate of the non-reactive gas. Specifically, the non-reactive gas output mode of the extension line 172 may include agitation mode and general mode. In the agitation mode, the flow rate of the non-reactive gas output by the extension line 172 is relatively large, and the output non-reactive gas can agitate the reaction space 12的粉121。 The powder 121. In the normal mode, the flow rate of the non-reactive gas output from the extension line 172 is small, It may not be possible to agitate the powder 121 in the reaction space 12, but the non-reactive gas output in the normal mode will form a positive pressure at the air outlet 1721 of the extension line 172 to prevent the powder 121 from entering the extension line 172 from the air outlet 1721.

In an embodiment of the present invention, the atomic layer deposition apparatus 10 for blowing powder may also include a carrying plate 191 and at least one fixing frame 193, wherein the carrying plate 191 may be a plate for carrying the driving unit 15, Vacuum chamber 11 and shaft sealing device 13. For example, the carrying plate 191 is connected to the driving unit 15, and the shaft sealing device 13 and the vacuum chamber 11 are connected through the driving unit 15. In addition, the shaft sealing device 13 and/or the vacuum chamber 11 can also be connected to the bearing plate 191 through at least one support frame to improve the stability of the connection.

The carrying plate 191 can be connected to the fixing frame 193 through at least one connecting shaft 195, wherein the number of the fixing frame 193 can be two, and the fixing frame 193 can be arranged on both sides of the carrying plate 191, respectively. The bearing plate 191 can rotate relative to the fixed frame 193 with the shaft 195 as the axis to change the elevation angle of the driving unit 15, the shaft sealing device 13 and the vacuum chamber 11, so as to facilitate the formation of a thin film of uniform thickness on the surface of each powder 121.

In an embodiment of the present invention, as shown in FIG. 7, the gas inlet line 173 and/or the non-reactive gas delivery line 175 extends from the inner tube body 133 of the shaft sealing device 13 into the reaction space 12 of the vacuum chamber 11, and An extension pipeline 172 is formed in the reaction space 12, wherein the extension pipeline 172 extends toward the bottom surface 122 of the vacuum chamber 11 or the cover 111. At least one air outlet 1721 is provided on the extension pipeline 172, wherein the air outlet 1721 faces the side 124 or the bottom surface 122 or the cover 111 of the vacuum chamber 11 to blow the powder 121 in the reaction space 12.

The foregoing is only one of the preferred embodiments of the present invention, and is not used to limit the scope of implementation of the present invention, that is, all the equivalent changes and changes in the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention Modifications should be included in the scope of the patent application for this new model.

10: Atomic layer deposition device for blowing powder

11: Vacuum chamber

111: cover

1111: inner surface

113: Cavity

115: monitor wafer

12: reaction space

121: powder

122: Bottom

124: side

13: Shaft seal device

131: Outer tube body

132: accommodating space

133: inner tube body

134: Connecting Space

139: filter unit

14: Gear

15: drive unit

171: Extraction line

172: Extension pipeline

1721: air outlet

173: intake line

175: Non-reactive gas pipeline

177: heater

Claims (9)

An atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powders; a shaft sealing device, including an outer tube body and an inner tube body, wherein the outer tube The body has an accommodating space for accommodating the inner tube body, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum chamber, and forms a space in the reaction space A protruding tube portion; a driving unit that connects the vacuum chamber through the outer tube body of the shaft sealing device, and drives the vacuum chamber to rotate through the outer tube body; at least one suction line is located in the inner tube body, Fluidly connected to the reaction space of the vacuum chamber and used to extract a gas in the reaction space; and at least one gas inlet line, passing through a pipe wall of the protruding pipe portion, and extending from the inner pipe body to the reaction In the space, an extension pipeline is formed in the reaction space, wherein the extension pipeline includes a plurality of air outlets facing a side surface of the reaction space, and the extension pipeline blows out toward the side of the reaction space through the plurality of air outlets A non-reactive gas to blow the powder in the reaction space. The atomic layer deposition apparatus for blowing powder according to claim 1, wherein the plurality of air outlets of the extension pipeline face the side surface of the lower half of the reaction space. The atomic layer deposition apparatus for blowing powder according to claim 2, wherein the reaction space is a columnar body including two bottom surfaces and the side surface, the side surface connects the two bottom surfaces, and the extension pipeline faces the The direction of the bottom surface and the side surface of the reaction space extends. The atomic layer deposition apparatus for blowing powder according to claim 1, wherein the gas inlet pipeline includes at least one non-reactive gas delivery pipeline, and the non-reactive gas delivery pipeline extends from the inner tube body into the reaction space and forms The extension pipeline. The atomic layer deposition device for blowing powder according to claim 1, including a filter unit located on the side of the inner tube connected to the reaction space. An atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powders; a shaft sealing device, including an outer tube body and an inner tube body, wherein the outer tube The body has an accommodating space for accommodating the inner tube body; a filter unit located on the side of the inner tube body connected to the reaction space; a driving unit connected to the vacuum through the outer tube body of the shaft seal device The cavity is driven by the outer tube to rotate the vacuum chamber; at least one suction line is located in the inner tube and is fluidly connected to the reaction space of the vacuum chamber through the filter unit, and is used to draw out the reaction space And at least one gas inlet line located in the inner tube body, extending through the filter unit from the inner tube body into the reaction space, and forming an extension pipeline in the reaction space, wherein the extension pipeline includes At least one air outlet faces a side surface or a bottom surface of the reaction space, and the extension pipeline blows a non-reactive gas in the direction of the side surface or the bottom surface of the reaction space through the air outlet port to blow the powder in the reaction space . The atomic layer deposition apparatus for blowing powder according to claim 6, wherein the inner tube body extends from the accommodating space of the outer tube body to the reaction space of the vacuum chamber, and is in the reaction space A protruding tube portion is formed, and the filter unit is located on the side where the protruding tube portion is connected to the reaction space. An atomic layer deposition device for blowing powder, including: a vacuum chamber, including a reaction space for accommodating a plurality of powders; a shaft sealing device, including an outer tube body and an inner tube body, wherein the outer tube The body has an accommodating space for accommodating the inner tube body, and the inner tube body extends from the accommodating space of the outer tube body to the vacuum chamber A reaction space, and a protruding pipe portion is formed in the reaction space, wherein the protruding pipe portion includes a plurality of air outlets, passing through a pipe wall of the protruding pipe portion, and facing a side of the reaction space ; A drive unit, connected to the vacuum chamber through the outer tube body of the shaft sealing device, and drive the vacuum chamber to rotate through the outer tube body; at least one air extraction pipeline located in the inner tube body, fluidly connected to the vacuum The reaction space of the cavity is used to extract a gas in the reaction space; and at least one gas inlet line is located in the inner tube body and the protruding tube part, and is fluidly connected to the plurality of air outlets and passes through the plurality of air outlets. The air outlet blows a non-reactive gas toward the side of the reaction space to blow the powder in the reaction space. The atomic layer deposition apparatus for blowing powder according to claim 8, wherein the gas inlet pipeline includes at least one non-reactive gas conveying pipeline fluidly connected to the plurality of gas outlets.

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