TWM448052U - Chip peeling device - Google Patents
Chip peeling device Download PDFInfo
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- TWM448052U TWM448052U TW101217051U TW101217051U TWM448052U TW M448052 U TWM448052 U TW M448052U TW 101217051 U TW101217051 U TW 101217051U TW 101217051 U TW101217051 U TW 101217051U TW M448052 U TWM448052 U TW M448052U
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Description
本新型係在於提供一種剝離裝置,尤指一種晶片的剝離裝置。The present invention is to provide a peeling device, and more particularly to a stripping device for a wafer.
請參閱第一圖所示,一般的晶片型電阻形成於一片狀基板1上,於該基板1上以雷射方式割劃出縱、橫的折痕11並格設出多個格狀晶片12;請參閱第二圖所示,格狀晶片12再以自動化方式進行剝離出一條條細長的電阻條13,並將各細長的電阻條13予以收集堆疊成整組,再將整組堆疊完整的電阻條13送至下一個進行折粒成每一格狀晶片12為一單元的製程;此種將形成晶片型電阻的片狀基板1進行剝離及堆疊的習知技術例如CN2566426「晶片電阻剝條整列機」,其主要利用傳送裝置將晶片基板置入輸送皮帶,使其進入由二汽缸所驅動的二壓輪組間,以上、下兩個方向作凹折的剝離裝置內進行剝條的作業。Referring to the first figure, a general wafer type resistor is formed on a sheet substrate 1, and vertical and horizontal creases 11 are obliquely cut on the substrate 1 to form a plurality of lattice wafers. 12; Referring to the second figure, the lattice wafer 12 is then automatically stripped out of a strip of elongated resistive strips 13, and the elongated strips 13 are collected and stacked into a complete group, and then the entire stack is completed. The strip 13 is sent to the next process for dicing the wafer 12 into a unit; such a technique for stripping and stacking the sheet-like substrate 1 forming the wafer-type resistor, such as CN2566426 "wafer resistor stripping" The strip arranging machine mainly uses a conveying device to place the wafer substrate into the conveying belt, and enters the two pressure roller groups driven by the two cylinders, and strips the stripping device in the upper and lower directions. operation.
上述習知技術對晶片型電阻的片狀基板進行剝離,採用晶片基板置入輸送皮帶,使其進入由二汽缸所驅動的二壓輪組間,以上、下兩個方向作凹折的剝離方式,由於上下壓輪的輥壓施力相對折痕線較不對應,晶片在輸送帶上剝離的品質亦不甚理想。The above-mentioned prior art peels off the sheet-shaped substrate of the wafer type resistor, and inserts the wafer into the transport belt to enter the two pressure roller groups driven by the two cylinders, and the upper and lower directions are concavely folded. Since the rolling pressing force of the upper and lower pressing wheels does not correspond to the crease line, the quality of the wafer peeling on the conveyor belt is not satisfactory.
爰是,本新型的目的,在於提供一種能夠快速而確實剝離晶片電阻的電阻條,並方便調整的晶片剝離裝置。Therefore, the object of the present invention is to provide a wafer stripping apparatus which can quickly and surely strip the resistance of the wafer and facilitate adjustment.
依據本新型之目的,本新型晶片的剝離裝置,包括:設有一剝折機構及一推送機構;剝折機構設有受第一驅動機構所驅動的擺座,擺座上設有夾具,欲受剝折的晶片基板置於夾具中,可受該推送機構推送而使前端進入一定位裝置受定位,第一驅動機構可驅動擺座連動夾具及其上的晶片基板執行偏斜彎折的操作,以剝離晶片基板上的電阻條。According to the purpose of the present invention, the stripping device of the novel wafer comprises: a stripping mechanism and a pushing mechanism; the stripping mechanism is provided with a swing seat driven by the first driving mechanism, and the clamp is provided with a clamp The stripped wafer substrate is placed in the fixture, and can be pushed by the pushing mechanism to cause the front end to enter a positioning device to be positioned, and the first driving mechanism can drive the swinging joint clamping fixture and the wafer substrate thereon to perform the skew bending operation. To strip the resistive strip on the wafer substrate.
本新型所達成的優點:由於採用一端定位,一端彎折的方式利用剝離裝置進行剝折,故能夠快速而確實剝離晶片電阻的電阻條,且剝折機構的第一驅動機構驅動偏心輪旋轉驅動連桿連動擺座擺動的幅度可作調整,對於剝離的確實性可有效的調整因應,加上推送機構中第一、二感測元件的感測控制與夾持機構之夾推控制,更可使整體剝折操作更自動化及增加剝折的速度。The advantages achieved by the present invention: since one end is positioned and the one end is bent, the stripping device is used for stripping, so that the strip of the wafer resistor can be quickly and surely stripped, and the first driving mechanism of the stripping mechanism drives the eccentric wheel to rotate. The amplitude of the connecting rod linkage swing can be adjusted, and the adjustment of the stripping can be effectively adjusted, and the sensing control of the first and second sensing elements in the pushing mechanism and the clamping mechanism of the clamping mechanism can be further controlled. Automate the overall stripping operation and increase the speed of stripping.
請參閱第三圖和第四圖,本新型實施例對其上設有晶片電阻的基板2進行剝離的方式,係使基板2一端被嵌入一定位裝置3的一嵌槽31中。Referring to the third and fourth figures, the substrate 2 on which the chip resistance is disposed is stripped in such a manner that one end of the substrate 2 is embedded in a recess 31 of a positioning device 3.
請參閱第五圖,本新型實施例使載有基板2的剝離裝置4執行向一側偏斜的彎折操作,以使基板2欲折切的電阻條21被剝離。Referring to the fifth embodiment, in the present embodiment, the peeling device 4 carrying the substrate 2 is subjected to a bending operation which is deflected to one side so that the resistive strip 21 to be folded by the substrate 2 is peeled off.
請參閱第六圖,剝離後的電阻條21嵌於定位裝置3嵌槽31中,經由定位裝置3旋轉180度至另一側,以被一收集裝置5所攫取並堆疊收集;其中,該定位裝置3及收集裝置5並非本新型的特徵,以下僅針對本新型所主張的剝離裝置4詳細作說明。Referring to the sixth figure, the stripped strip 21 is embedded in the recess 31 of the positioning device 3, rotated 180 degrees to the other side via the positioning device 3, and is picked up by a collecting device 5 and stacked for collection; wherein, the positioning is performed. The device 3 and the collecting device 5 are not characteristic of the present invention, and only the peeling device 4 proposed by the present invention will be described in detail below.
請參閱第七圖,本新型實施例的剝離裝置4設有一剝折機構41及一設於剝折機構41上的推送機構42;其中,該推送機構42係設於剝折機構41上,並以一滑軌421固設在擺座413所凸伸的一懸臂419上;滑軌421上設有一滑座422,滑座422受一第二驅動機構7所驅動,該第二驅動機構7包括一固設於擺座413下方的馬達71,馬達71的轉軸上設有驅動輪72,在所述懸臂419上設有固定架73,其上設有一轉輪74,所述驅動輪72與轉輪74間套設有一皮帶75。請配合參閱第八圖,該剝折機構41設有一座架411,其上設相隔適當間距的二支架412,在二支架412間樞設一擺座413,擺座413上設有一夾具414,夾具414由相隔適當間距的二導軌415所構成,二導軌415間形成一可供待剝折基板2置設之區間416,並於由二導軌415所構成的夾具414前方設有前限位元件417,而夾具414後方則設有二分別設於各導軌415後方呈相對應角件形態的後限位元件418;請配合參閱第八圖、第九圖與第十圖,擺座413受一呈間歇性反復運動的第一驅動機構6所驅動,而可以擺座413與二支架412的樞接處,呈上、下 反復擺動;該第一驅動機構6包括由馬達61所帶動旋轉的偏心輪62,以及一端樞接點偏置於偏心輪62旋轉圓心外而另一端與擺座413一側樞接的連桿63,連桿63上設有一調節段631,可藉螺轉調節段631而使整體連桿63伸長或縮短,以改變偏心輪62旋轉驅動連桿63連動擺座413上、下擺動的擺幅,相對影響擺座413載設基板2的前端剝折的能力。Referring to the seventh embodiment, the stripping device 4 of the present embodiment is provided with a stripping mechanism 41 and a pushing mechanism 42 disposed on the stripping mechanism 41. The pushing mechanism 42 is disposed on the stripping mechanism 41, and A sliding rail 421 is fixed on a cantilever 419 protruding from the swinging seat 413. The sliding rail 421 is provided with a sliding seat 422. The sliding seat 422 is driven by a second driving mechanism 7. The second driving mechanism 7 includes a motor 71 fixed under the swinging seat 413, a driving wheel 72 is disposed on the rotating shaft of the motor 71, and a fixed bracket 73 is disposed on the cantilever 419, and a rotating wheel 74 is disposed thereon, and the driving wheel 72 is rotated A belt 75 is provided between the wheels 74. Referring to FIG. 8 , the stripping mechanism 41 is provided with a frame 411 , which is provided with two brackets 412 spaced apart from each other, and a swing seat 413 is disposed between the two brackets 412 . The clamp 413 is provided with a clamp 414 . The clamp 414 is formed by two guide rails 415 spaced apart from each other. A section 416 for the substrate 2 to be stripped is formed between the two guide rails 415, and a front limit member is disposed in front of the clamp 414 formed by the two guide rails 415. 417, and the rear of the clamp 414 is provided with two rear limit members 418 respectively disposed at the rear of each of the guide rails 415; please refer to the eighth, ninth and tenth views, and the seat 413 is subjected to a The first driving mechanism 6 that is intermittently and repeatedly moved is driven, and the pivoting position of the seat 413 and the two brackets 412 can be up and down. The first driving mechanism 6 includes an eccentric wheel 62 driven by the motor 61, and a connecting rod 63 whose one end pivot point is offset from the center of rotation of the eccentric wheel 62 and the other end is pivotally connected to the side of the swing seat 413. The connecting rod 63 is provided with an adjusting section 631. The integral connecting rod 63 can be extended or shortened by the screwing adjustment section 631 to change the swing of the upper and lower swings of the swinging drive rod 63 of the eccentric wheel 62. The ability of the swing seat 413 to sandwich the front end of the substrate 2 is relatively affected.
請參閱第十一圖,一個呈﹁形的載座423固設於滑座422上,載座423以一∟形連接件424配合一固定件425夾設該皮帶75位於上方的一側,使馬達71轉動而以驅動輪72帶動皮帶75位移時,可連動該載座423藉滑座422在所述滑軌421作前後往復位移;載座423上以一滾珠滑軌組426(上方為滑座,下方為滑軌,其間設有排設的滾珠,滑軌及滑座可作相對滑動位移;由於為一市售之部件及非本新型特徵,僅以一長方體示意)在上方固設一夾持機構9之承載台91。Referring to FIG. 11, a "shaped carrier 423 is fixed to the sliding seat 422. The carrier 423 is coupled to a fixing member 425 by a connecting member 425 to sandwich the upper side of the belt 75. When the motor 71 rotates and the drive wheel 72 drives the belt 75 to displace, the carrier 423 can be interlocked with the slide rail 422 to reciprocate back and forth on the slide rail 421; the carrier 423 is provided with a ball slide group 426 (the upper part is slippery The lower part is a slide rail with a row of balls arranged therein, and the slide rail and the slide seat can be used for relative sliding displacement; since it is a commercially available component and not a novel feature, it is only fixed by a rectangular parallelepiped) The carrier 91 of the clamping mechanism 9.
請參閱第十二、十三圖,固定架73上設有第一感測元件81,載座423固設一感測片82可移入所述第一感測元件81缺空狀之感測區間83;該夾持機構9於承載台91上的一固定座92樞設一夾臂93,其一夾壓端931與承載台91前端的一鉗座94形成一夾口95,夾臂93相對於夾壓端931的另一施力端932上設有抵輪933,承載台91後端設有氣壓缸96,其凸伸的缸桿961前端962可受推伸前移而抵至抵輪933,使該施力端932 被抵推而下壓,相對使夾壓端931上啟夾口95;請配合參閱第十四圖,承載台91後端設有一感測桿84及一L型固定座85,感測桿84後伸經該L型固定座85而凸伸於L型固定座85後,感測桿84末端並可伸入L型固定座85上所設一第二感測元件86的缺空狀的感測區間87,同時在承載台91後端與L型固定座85間的感測桿84上套設一彈簧所構成的彈性元件88。The first sensing element 81 is disposed on the fixing frame 73. 83. The clamping mechanism 9 pivots a clamping arm 93 on a fixing base 92 of the carrying platform 91. A clamping end 931 forms a clamping mouth 95 with a clamping seat 94 at the front end of the loading platform 91. The clamping arm 93 is opposite to the clamping arm 93. The other biasing end 932 of the crimping end 931 is provided with a yoke 933. The rear end of the carrying platform 91 is provided with a pneumatic cylinder 96. The front end 962 of the protruding cylinder rod 961 can be pushed forward and reached against the yoke 933. Applying the force end 932 Pressed and pushed down, relatively close the clamping end 931 to the clamping port 95; please refer to the fourteenth figure, the rear end of the carrying platform 91 is provided with a sensing rod 84 and an L-shaped fixing seat 85, the sensing rod 84 After extending through the L-shaped fixing base 85 and protruding from the L-shaped fixing base 85, the end of the sensing rod 84 can extend into the L-shaped fixing base 85 to provide a feeling of lack of a second sensing element 86. In the measuring section 87, a spring element 88 composed of a spring is sleeved on the sensing rod 84 between the rear end of the carrying platform 91 and the L-shaped fixing base 85.
本新型實施例在實施上,受輸送至剝離裝置4的基板2將被送到剝折機構41中擺座413的夾具414中,而置放在二導軌415上,並位於區間416的前限位元件417與後限位元件418間,藉由推送機構42中第二驅動機構7驅動,使夾持機構9前移並利用承載台91上的夾臂93夾壓端931與鉗座94形成的夾口95夾推基板2前進,此時固定架73上的第一感測元件81將因載座423上感測片82移出感測區間83,而傳遞一訊號記載基板2的剝折次數記錄,直到基板2前端抵於所述定位裝置3嵌槽31中而無法繼續前進時,此時推送機構42中第二驅動機構7的驅動力將促使載座423連動L型固定座85及第二感測元件86前移,藉由滾珠滑軌組426,此時滾珠滑軌組426上方的承載台91與滾珠滑軌組426下方的載座423將產生相對錯動,除彈性元件88將被壓縮外,此時感測桿84末端亦將進入第二感測元件86的感測區間87,使產生一令第二驅動機構7停止驅動推送機構42前移之訊號,並進行使第一驅動機 構6驅動偏心輪62旋轉驅動連桿63連動擺座413往上擺動,以對擺座413載設的基板2進行剝折操作,並在完成剝折操作而推送機構42退回原位時,將再因載座423上感測片82移入感測區間83,使第一感測元件81感應到而傳遞訊號記載基板2完成一次剝折操作;經由以上操作反覆實施,當基板2上各電阻條21都完成剝折後,下一基板2才繼續送入剝折機構41續行剝折作業。In the implementation of the present invention, the substrate 2 conveyed to the stripping device 4 will be sent to the jig 414 of the pendulum 413 in the stripping mechanism 41, placed on the two rails 415, and located in the front of the section 416. Between the positional element 417 and the rear stop element 418, the second drive mechanism 7 of the push mechanism 42 drives the clamp mechanism 9 to advance and form the clamped end 931 and the clamp 94 by the clamp arm 93 on the support table 91. The clamping port 95 pushes the substrate 2 forward. At this time, the first sensing element 81 on the fixing frame 73 will transfer the sensing piece 82 on the carrier 423 out of the sensing section 83, and transmit a signal to record the number of times of peeling of the substrate 2. Recording, until the front end of the substrate 2 is in the groove 31 of the positioning device 3 and cannot continue to advance, the driving force of the second driving mechanism 7 in the pushing mechanism 42 at this time will cause the carrier 423 to interlock with the L-shaped fixing seat 85 and the The second sensing element 86 is advanced by the ball slide group 426. At this time, the carrier platform 91 above the ball slide group 426 and the carrier 423 below the ball slide group 426 will be relatively displaced, except for the elastic member 88. In addition, the end of the sensing rod 84 will also enter the sensing interval 87 of the second sensing element 86, so that 7 so that the second drive mechanism 42 stops driving means pushing forward the signal, and the first drive unit The driving eccentric wheel 62 rotates the driving link 63 to swing the swinging seat 413 upward to perform the stripping operation on the substrate 2 carried by the swinging seat 413, and when the peeling operation is completed and the pushing mechanism 42 is returned to the original position, Then, the sensing piece 82 on the carrier 423 is moved into the sensing section 83, so that the first sensing component 81 is sensed and the signal recording substrate 2 is transferred to perform a stripping operation; and the resistive strips on the substrate 2 are repeatedly implemented through the above operations. After the peeling is completed, the next substrate 2 continues to be fed into the stripping mechanism 41 to continue the stripping operation.
本新型實施例在設計上,由於採用一端定位,一端彎折的方式利用剝離裝置4進行剝折,故能夠快速而確實剝離晶片電阻的電阻條,且剝折機構41的第一驅動機構6驅動偏心輪62旋轉驅動連桿63連動擺座413擺動的幅度可作調整,對於剝離的確實性可有效的調整因應,加上推送機構42中第一、二感測元件81、86的感測控制與夾持機構9之夾推控制,更可使整體剝折操作更自動化及增加剝折的速度。In the design of the present invention, since the one end is positioned and the one end is bent, the stripping device 4 is used for stripping, so that the strip of the wafer resistor can be quickly and surely stripped, and the first driving mechanism 6 of the stripping mechanism 41 is driven. The amplitude of the swing of the eccentric wheel 62 of the rotary drive link 63 in conjunction with the swing seat 413 can be adjusted, and the effective control of the peeling can be effectively adjusted, and the sensing control of the first and second sensing elements 81 and 86 in the push mechanism 42 is added. The pinch control with the clamping mechanism 9 can further automate the overall stripping operation and increase the speed of the stripping.
惟以上所述者,僅為本新型之較佳實施例而已,當不能以此限定本新型實施之範圍,即大凡依本新型申請專利範圍及新型說明內容所作之簡單的等效變化與修飾,皆仍屬本新型專利涵蓋之範圍內。However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the simple equivalent change and modification made by the novel patent application scope and the novel description content, All remain within the scope of this new patent.
1‧‧‧基板1‧‧‧Substrate
11‧‧‧折痕11‧‧‧ crease
12‧‧‧晶片12‧‧‧ wafer
13‧‧‧電阻條13‧‧‧Resistance strip
2‧‧‧基板2‧‧‧Substrate
21‧‧‧電阻條21‧‧‧Resistance strip
3‧‧‧定位裝置3‧‧‧ Positioning device
31‧‧‧嵌槽31‧‧‧Inlay
4‧‧‧剝離裝置4‧‧‧ peeling device
41‧‧‧剝折機構41‧‧‧Folding mechanism
411‧‧‧座架411‧‧‧Rack
412‧‧‧支架412‧‧‧ bracket
413‧‧‧擺座413‧‧‧Seat
414‧‧‧夾具414‧‧‧ fixture
415‧‧‧導軌415‧‧‧rail
416‧‧‧區間416‧‧‧
417‧‧‧前限位元件417‧‧‧ front limit components
418‧‧‧後限位元件418‧‧‧ rear limit components
42‧‧‧推送機構42‧‧‧ Pushing agency
421‧‧‧滑軌421‧‧‧Slide rails
422‧‧‧滑座422‧‧‧Slide
423‧‧‧載座423‧‧‧Hosting
424‧‧‧連接件424‧‧‧Connecting parts
425‧‧‧固定件425‧‧‧Fixed parts
426‧‧‧滾珠滑軌組426‧‧‧Rolling track group
5‧‧‧收集裝置5‧‧‧Collection device
6‧‧‧第一驅動機構6‧‧‧First drive mechanism
61‧‧‧馬達61‧‧‧Motor
62‧‧‧偏心輪62‧‧‧Eccentric wheel
63‧‧‧連桿63‧‧‧ linkage
631‧‧‧調節段631‧‧‧ adjustment section
7‧‧‧第二驅動機構7‧‧‧Second drive mechanism
71‧‧‧馬達71‧‧‧Motor
72‧‧‧驅動輪72‧‧‧ drive wheel
73‧‧‧固定架73‧‧‧Retaining frame
74‧‧‧轉輪74‧‧‧Runner
75‧‧‧皮帶75‧‧‧Land
81‧‧‧第一感測元件81‧‧‧First sensing element
82‧‧‧感測片82‧‧‧Sense film
83‧‧‧感測區間83‧‧‧Sensing interval
84‧‧‧感測桿84‧‧‧Sensing rod
85‧‧‧固定座85‧‧‧ Fixed seat
86‧‧‧第二感測元件86‧‧‧Second sensing element
87‧‧‧感測區間87‧‧‧Sensing interval
88‧‧‧彈性元件88‧‧‧Flexible components
9‧‧‧夾持機構9‧‧‧Clamping mechanism
91‧‧‧承載台91‧‧‧Loading station
92‧‧‧固定座92‧‧‧ fixed seat
93‧‧‧夾臂93‧‧‧ clip arm
931‧‧‧夾壓端931‧‧‧ pinch end
932‧‧‧施力端932‧‧‧ 施力端
933‧‧‧抵輪933‧‧‧Round
94‧‧‧鉗座94‧‧‧ clamp seat
95‧‧‧夾口95‧‧‧ Sandwich
96‧‧‧氣壓缸96‧‧‧ pneumatic cylinder
961‧‧‧缸桿961‧‧‧Cylinder rod
962‧‧‧前端962‧‧‧ front end
第一圖係一般晶片電阻的剝折前的構造示意圖。The first figure is a schematic diagram of the structure of the general wafer resistor before stripping.
第二圖係一般晶片電阻所剝折出的電阻條示意圖。The second figure is a schematic diagram of the strip of resistance stripped by the general chip resistor.
第三圖係本新型實施例在整個剝折及堆疊的製程關係 圖。The third figure is the process relationship of the entire embodiment in the entire stripping and stacking process. Figure.
第四圖係本新型實施例將晶片電阻推入定位裝置嵌槽的放大示意圖。The fourth figure is an enlarged schematic view of the novel embodiment pushing the chip resistor into the slot of the positioning device.
第五圖係本新型實施例將晶片電阻進行剝折的操作示意圖。The fifth figure is a schematic view of the operation of stripping the resistor of the wafer in the novel embodiment.
第六圖係本新型實施例剝折出的電阻條受定位裝置移送至堆疊裝置的製程示意圖。The sixth figure is a schematic diagram of the process of the strip of the strip stripped by the positioning device being transferred to the stacking device by the positioning device.
第七圖係本新型實施例立體構造示意圖。The seventh figure is a schematic view of the three-dimensional structure of the novel embodiment.
第八圖係本新型實施例中剝折機構立體構造示意圖。The eighth figure is a schematic view of the three-dimensional structure of the stripping mechanism in the novel embodiment.
第九圖係本新型實施例中剝折機構正面示意圖。The ninth drawing is a front view of the stripping mechanism in the novel embodiment.
第十圖係本新型實施例中剝折機構擺座上移偏斜的構造示意圖。The tenth figure is a schematic structural view of the deflection mechanism of the stripping mechanism in the new embodiment.
第十一圖係本新型實施例中推送機構仰視的立體構造示意圖。The eleventh figure is a three-dimensional structural diagram of the push mechanism in the present embodiment.
第十二圖係本新型實施例中推送機構立體構造示意圖。The twelfth figure is a schematic view showing the three-dimensional structure of the pushing mechanism in the novel embodiment.
第十三圖係本新型實施例中推送機構夾臂開閉構造示意圖。The thirteenth drawing is a schematic view showing the opening and closing structure of the clamping mechanism of the pushing mechanism in the novel embodiment.
第十四圖係本新型實施例中推送機構第二感測元件相關感測構造立體示意圖。Figure 14 is a perspective view showing the sensing structure of the second sensing element of the pushing mechanism in the novel embodiment.
4‧‧‧剝離裝置4‧‧‧ peeling device
41‧‧‧剝折機構41‧‧‧Folding mechanism
413‧‧‧擺座413‧‧‧Seat
419‧‧‧懸臂419‧‧‧cantilever
42‧‧‧推送機構42‧‧‧ Pushing agency
421‧‧‧滑軌421‧‧‧Slide rails
422‧‧‧滑座422‧‧‧Slide
7‧‧‧第二驅動機構7‧‧‧Second drive mechanism
71‧‧‧馬達71‧‧‧Motor
72‧‧‧驅動輪72‧‧‧ drive wheel
73‧‧‧固定架73‧‧‧Retaining frame
74‧‧‧轉輪74‧‧‧Runner
75‧‧‧皮帶75‧‧‧Land
Claims (14)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220338856 CN202839187U (en) | 2012-07-13 | 2012-07-13 | Stripping device for chip |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM448052U true TWM448052U (en) | 2013-03-01 |
Family
ID=47950831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101217051U TWM448052U (en) | 2012-07-13 | 2012-09-05 | Chip peeling device |
Country Status (2)
Country | Link |
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CN (1) | CN202839187U (en) |
TW (1) | TWM448052U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI646618B (en) * | 2018-01-09 | 2019-01-01 | 宏碁股份有限公司 | Micro component transfer device and related method |
TWI675426B (en) * | 2018-10-23 | 2019-10-21 | 萬潤科技股份有限公司 | Method and device for positioning wafer stripping process |
TWI683383B (en) * | 2018-10-23 | 2020-01-21 | 萬潤科技股份有限公司 | Pushing method and mechanism of wafer stripping process and equipment using the mechanism |
TWI700760B (en) * | 2018-10-23 | 2020-08-01 | 萬潤科技股份有限公司 | Feeding method and device for chip peeling process |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104347212A (en) * | 2013-08-04 | 2015-02-11 | 昆山市和博电子科技有限公司 | Chip resistor stacker base plate folding strip moving-out process |
CN107068728A (en) * | 2017-05-05 | 2017-08-18 | 武汉华星光电技术有限公司 | The method for dismounting of electronic device in OLED display panel |
-
2012
- 2012-07-13 CN CN 201220338856 patent/CN202839187U/en not_active Expired - Fee Related
- 2012-09-05 TW TW101217051U patent/TWM448052U/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI646618B (en) * | 2018-01-09 | 2019-01-01 | 宏碁股份有限公司 | Micro component transfer device and related method |
US10505070B2 (en) | 2018-01-09 | 2019-12-10 | Acer Incorporated | Micro device transfer equipment and related method |
TWI675426B (en) * | 2018-10-23 | 2019-10-21 | 萬潤科技股份有限公司 | Method and device for positioning wafer stripping process |
TWI683383B (en) * | 2018-10-23 | 2020-01-21 | 萬潤科技股份有限公司 | Pushing method and mechanism of wafer stripping process and equipment using the mechanism |
TWI700760B (en) * | 2018-10-23 | 2020-08-01 | 萬潤科技股份有限公司 | Feeding method and device for chip peeling process |
Also Published As
Publication number | Publication date |
---|---|
CN202839187U (en) | 2013-03-27 |
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