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TWI800831B - 半導體裝置和製造半導體裝置的方法 - Google Patents

半導體裝置和製造半導體裝置的方法 Download PDF

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Publication number
TWI800831B
TWI800831B TW110117600A TW110117600A TWI800831B TW I800831 B TWI800831 B TW I800831B TW 110117600 A TW110117600 A TW 110117600A TW 110117600 A TW110117600 A TW 110117600A TW I800831 B TWI800831 B TW I800831B
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Taiwan
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semiconductor device
manufacturing
semiconductor
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TW110117600A
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TW202205435A (zh
Inventor
高琬貽
蕭宇正
王俊堯
彭治棠
盧永誠
志安 徐
Original Assignee
台灣積體電路製造股份有限公司
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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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