Classifications

• • H01L29/66484—
• • H01L29/78645—
• • H01L29/66969—
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02518—Deposited layers
  • H01L21/02521—Materials
  • H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• • H01L29/0657—
• • H01L29/4238—
• • H01L29/42384—
• • H01L29/4908—
• • H01L29/685—
• • H01L29/7606—
• • H01L29/778—
• • H01L29/7831—
• • H01L29/78648—
• • H01L29/78681—
• • H01L29/78696—
• • H01L29/788—
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02518—Deposited layers
  • H01L21/02521—Materials
  • H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02612—Formation types
  • H01L21/02617—Deposition types
  • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
• • H01L29/0692—
• • H01L29/24—
• • H01L29/40111—
• • H01L29/40114—
• • H01L29/7869—

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• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Materials Engineering (AREA)
• Thin Film Transistor (AREA)

Applications Claiming Priority (6)

Publications (2)

Family

ID=80601384

Family Applications (1)

Country Status (5)

Families Citing this family (2)

Citations (3)

Family Cites Families (9)

• 2021
  • 2021-05-19 US US17/324,893 patent/US11670720B2/en active Active
  • 2021-05-26 DE DE102021113520.6A patent/DE102021113520A1/de active Pending
  • 2021-07-14 KR KR1020210092215A patent/KR102597962B1/ko active IP Right Grant
  • 2021-08-05 TW TW110128990A patent/TWI799936B/zh active
  • 2021-09-28 CN CN202111145868.7A patent/CN114188224A/zh active Pending
• 2023
  • 2023-04-20 US US18/303,924 patent/US12027628B2/en active Active

Patent Citations (3)

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