TWI703012B - Blade cover - Google Patents

Abstract

The subject of the present invention is to be able to remove end materials and the like with a small amount of cutting water. In the present invention, the nozzle block is provided with an inner wall formed with a gap, cutting water injection ports formed on the inner wall to spray cutting water toward both sides of the flange, and communicating with the inner wall on the radially outer side of the cutting knife and extending along the cutting knife A groove formed in the outer peripheral shape and a high-pressure air injection port that communicates with the groove and is formed on the downstream side in the rotation direction of the cutting blade and sprays air toward both sides of the cutting blade. When the cutting water is supplied from the cutting water injection port, the cutting water will fill the gaps and grooves on the inner wall with the rotation of the cutting knife. Through the centrifugal force caused by the rotation of the main shaft, the cutting water is sprayed from the grooves at high speed, and simultaneously with The ejected high-pressure air is mixed, and the mixed fluid formed by mixing the two fluids is ejected from the high-pressure gas injection port.

Description

Blade cover

Invention field

The invention relates to a blade cover.

Background of the invention

Semiconductor wafers with ICs and other devices formed on the surface, and package substrates formed by sealing a plurality of device wafers with resin, etc. are processed by, for example, a cutting device with a rotating annular dicing knife (crystal Circular cutting device) performs cutting to divide into a plurality of wafers. The blade cover covering the cutting knife of this cutting device has a nozzle for supplying cutting water for cooling and washing the workpiece and the cutting knife.

However, when dividing the package substrate, for example, it is more efficient to use a suction table to suck and hold only the area corresponding to the divided wafer, and to cut unnecessary end materials while removing them. Therefore, a blade cover equipped with a nozzle for supplying cutting water is known in order to prevent contact with end materials etc. which are scattered by cutting (for example, see Patent Document 1).

Prior art literature

〔Patent Literature〕

[Patent Document 1] JP 2015-145046 No.

Summary of the invention

The technique described in Patent Document 1 sprays cutting water from the cutting water nozzle and the auxiliary cutting water nozzle on the outer peripheral end surface of the cutting blade, so a large amount of cutting water is required.

The present invention has been completed in view of the above-mentioned problems, and its object is to provide a blade cover capable of removing end materials and the like with a small amount of cutting water.

In order to solve the above-mentioned problems and achieve the objective, the blade cover of the present invention is a blade cover that is arranged at the front end of a spindle sleeve that rotatably supports the spindle, and covers a cutting knife installed on the spindle by a flange. The cutting water supplied to the cutting knife is scattered by the rotation of the cutting knife, and a nozzle block that sprays cutting water facing the two side surfaces of the cutting knife; the nozzle block is equipped with: along the installation of the cutting knife The shape of the flange of the knife and the two sides of the cutting knife with a gap formed the inner wall, a plurality of cutting water jets formed on the inner wall to spray cutting water toward the two sides of the flange, in the cutting The radially outer side of the knife communicates with the inner wall and forms an annular groove along the outer circumference of the cutting knife, and the end communicating with the groove and formed on the downstream side in the rotation direction of the cutting knife faces the The high-pressure air jet port for jetting air on both sides of the cutting knife; if cutting water is supplied from the cutting water jet port, the cutting water will fill the gap and the groove with the inner wall along with the rotation of the cutting knife, by The centrifugal force generated by the rotation of the main shaft sprays cutting water at high speed from the groove, and at the same time mixes with the high pressure air sprayed from the high pressure air injection port to spray two kinds of fluids.

With the blade cover of the present invention, end materials and the like can be removed with a small amount of cutting water.

1: Cutting device

2: Device body

3: Column

10: Holding part

11: hold the stage

11a: surface

19: Rotating table

20: Cutting mechanism

21: Spindle

22: Cutting knife

221: Flange

222: Blade

222a: Knife Peak

23: flange

30: X axis moving mechanism

40: Y-axis moving mechanism

50: Z-axis moving mechanism

60: Blade cover

61: Support

611: Base

612: cover

613: Through hole

614: male screw

62: nozzle block

63: body part

631: wall

632: Inner Wall

633: Through hole

64: Cutting water jet

641: First Supply Channel

65: groove

651: protrusion

66: High pressure air injection port

661: Second Supply Channel

67: Cutting water supply port

68: High pressure air supply port

69: male screw

90: control mechanism

100: input agency

101: display mechanism

F1: cutting water

F2: high pressure air

F3: Mixed fluid

R: rotation direction

W: to be processed

[Figure 1] Figure 1 is a perspective view of the cutting device with the blade cover installed in the embodiment.

[Figure 2] Figure 2 is an oblique view of the blade cover in the embodiment.

[Figure 3] Figure 3 is a front view of the blade cover in the embodiment.

[Figure 4] Figure 4 is a side view of the blade cover in the embodiment.

[Figure 5] Figure 5 is a perspective view of the blade cover in the embodiment.

[Figure 6] Figure 6 is a front view of the inner wall of the blade cover in the embodiment.

[Figure 7] Figure 7 is a partially enlarged front view of the inner wall of the blade cover in the embodiment.

[Figure 8] Figure 8 is a partially enlarged cross-sectional view of the blade cover in the embodiment.

[Fig. 9] Fig. 9 is a partially enlarged view showing another example of the high-pressure air injection port of the blade cover in the embodiment.

Forms used to implement the invention

The embodiments of the present invention will be described in detail below with reference to the drawings. The present invention is not limited to the content described in the following embodiments. In addition, the constituent elements described below include substantially the same configuration that is easy to think of those familiar with the technology. In addition, the following configuration can be Make the combination appropriately. Furthermore, various omissions, substitutions, or changes in the configuration can be made as long as they do not depart from the gist of the present invention.

Fig. 1 is a perspective view of the cutting device with the blade cover installed in the embodiment. Fig. 2 is a perspective view of the blade cover in the embodiment. Fig. 3 is a front view of the blade cover in the embodiment. Fig. 4 is a side view of the blade cover in the embodiment. Fig. 5 is a perspective view of the blade cover in the embodiment. Fig. 6 is a front view of the inner wall of the blade cover in the embodiment. Fig. 7 is a partially enlarged front view of the inner wall of the blade cover in the embodiment. Fig. 8 is a partially enlarged cross-sectional view of the blade cover in the embodiment. Fig. 9 is a partially enlarged view showing another example of the high-pressure air injection port of the blade cover in the embodiment.

The workpiece W is a plate-shaped object to be processed by the cutting device 1. In this embodiment, the workpiece W is a rectangular package substrate. The workpiece W has a plurality of devices D divided by a plurality of planned dividing lines L.

The cutting device 1 with a blade cover according to the present embodiment will be explained with reference to FIG. 1. The cutting device 1 cuts the workpiece W by relatively moving the cutting mechanism 20 having the cutting blade 22 and the holding portion 10 holding the workpiece W. The cutting device 1 is provided with a holding part 10 that sucks and holds the workpiece W on the surface 11a, a cutting mechanism 20, an X-axis moving mechanism 30 that moves the holding part 10 in the X-axis direction, and the cutting mechanism 20 in the X-axis direction. The Y-axis moving mechanism 40 that moves in the Y-axis direction, the Z-axis moving mechanism 50 that moves the cutting mechanism 20 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, the input mechanism 100, and the control mechanism 90. Furthermore, the cutting device 1 is installed in the device body 2 There is a gate-shaped column 3 on it.

As shown in FIG. 1, the holding portion 10 includes a holding table 11 having a surface 11 a and a rotating table 19 in configuration. The holding table 11 places the workpiece W on the surface 11a and sucks it through an unillustrated suction hole provided on the surface 11a, and sucks and holds the workpiece W by negative pressure. The suction hole and the device D of the workpiece W are provided in one-to-one correspondence. The surface 11a of the holding table 11 is formed with a clearance groove (not shown) for the cutting blade 22 of the cutting mechanism 20 corresponding to each planned division line L. When the workpiece W is divided into parts D, the cutting blade 22 is inserted into the clearance groove. The rotating table 19 can rotate the holding table 11 about an unillustrated axis parallel to the Z-axis direction orthogonal to the surface 11a. In addition, the holding portion 10 is provided so as to be movable in the X-axis direction by the X-axis moving mechanism 30. The operation of the holding unit 10 is controlled by the control mechanism 90.

The cutting mechanism 20 cuts the workpiece W held by the holding portion 10 with the cutting blade 22. The cutting mechanism 20 is provided in the column 3 through the Y-axis moving mechanism 40, the Z-axis moving mechanism 50, and the like. The cutting mechanism 20 is provided to be freely movable in the Y-axis direction by the Y-axis moving mechanism 40, and is provided to be freely movable in the Z-axis direction by the Z-axis moving mechanism 50. The operation of the cutting mechanism 20 is controlled by the control mechanism 90.

The cutting mechanism 20 has a main shaft 21 whose center axis is consistent with the Y-axis direction (corresponding to the indexing direction), and a cutting knife 22 installed at the front end of the main shaft 21. The main shaft 21 is rotatably supported by an unillustrated main sleeve, and is connected to an unillustrated blade drive source housed in the main sleeve. The blade drive source uses the power supplied by the power source not shown to make the main shaft 21 around the central axis The line rotates.

)。 The cutting knife 22 shown in FIG. 2 is an extremely thin cutting grindstone having a substantially annular shape, and is detachably mounted on the main shaft 21. The cutting blade 22 is rotationally driven by the rotational force generated by the blade drive source. In this embodiment, the rotation direction of the cutting blade 22 is the rotation direction R shown in FIG. 2. In the present embodiment, the cutting blade 22 has a ring-shaped blade 222 for cutting the workpiece W fixed to the outer peripheral portion of the disc-shaped flange 221. The cutting knife 22 is, for example, electroforming. The electrodeposited adhesive works as an adhesive to fix abrasive grains such as diamonds. The cutting knife 22 can also use a washer type blade (

).

Returning to FIG. 1, the X-axis moving mechanism 30 makes the holding part 10 perpendicular to the central axis of the main shaft 21 and relatively moves the main shaft 21 in a direction parallel to the surface 11 a of the holding part 10.

The input mechanism 100 is connected to the control mechanism 90, and is arranged in the display mechanism 101 that displays the state of the machining operation. The display mechanism 101 is constituted by, for example, a display panel such as a liquid crystal display and an organic EL display. The display mechanism 101 responds to the signal input from the control mechanism 90 and displays information such as text, pictures, and images. The input mechanism 100 is a device for operating keys by an operator, and is composed of a touch panel or the like provided on the entire display surface of the display mechanism 101. The input mechanism 100 inputs a signal in response to the received operation to the control mechanism 90.

The control mechanism 90 individually controls the above-mentioned components constituting the cutting device 1. The control mechanism 90 causes the cutting device 1 to perform a processing operation on the workpiece W, that is, a cutting operation. In addition, the control mechanism 90 has There are, for example, an arithmetic processing device constituted by a CPU or the like and a microprocessor (not shown) such as ROM and RAM as the main body. The control unit 90 is connected to the display unit 101 and the input unit 100 used by the operator when registering processing content information and the like.

The blade cover 60 shown in FIGS. 2 to 4 supplies cutting water F1 to the cutting knife 22. The blade cover 60 is disposed at the front end of the main shaft sleeve that rotatably supports the main shaft 21 of the cutting mechanism 20, and covers the cutting knife 22 installed on the main shaft 21 by the flange 23. The blade cover 60 is fixed to the front end of the main sleeve of the cutting mechanism 20 and covers the outer circumference of the cutting knife 22. The blade cover 60 has a support portion 61 fixed to the front end of the spindle sleeve, and a nozzle block 62 fixed to the support portion 61.

The supporting portion 61 is fixed to the front end of the main sleeve of the cutting mechanism 20. The supporting portion 61 has a plate-shaped base portion 611 along the front end portion of the main sleeve of the cutting mechanism 20 and a cover portion 612 covering a part of the outer circumference of the cutting blade 22. The base portion 611 is in a state where the through hole 613 is formed at the front end of the spindle sleeve of the cutting mechanism 20, and a through hole (not shown) with a nut formed on the inner circumference is overlapped, and the male screw 614 is inserted through it. Fixed to the main shaft sleeve of the cutting mechanism 20. The cover part 612 protrudes from the base part 611 in the Y-axis direction. The cover 612 is arranged in the direction in which the cutting water is scattered by the rotation of the cutting blade 22. The cover 612 is configured to cover the part of the outer circumference of the cutting blade 22 that is not covered by the nozzle block 62.

The nozzle block 62 faces the two sides of the cutting knife 22 of the cutting mechanism 20 to spray cutting water F1. The nozzle block 62 covers a part of the outer periphery of the cutting blade 22, and sprays cutting water F1 and high-pressure air F2 to the peak 222a of the blade 222 of the cutting blade 22. The nozzle block 62 is fixed to the spindle sleeve by the supporting portion 61. spray The nozzle block 62 is arranged on the side opposite to the main scattering side of the cutting water as the cutting blade 22 rotates in the rotation direction R. In more detail, the nozzle block 62 is arranged on the opposite side (FIG. 3) from the main scattering side (the left side in FIG. 3) where the cutting water is in contact with the workpiece W due to the rotation of the cutting blade 22 in the rotation direction R. In the right). The nozzle block 62 has, as shown in FIG. 4, a body portion 63 having inner walls 632 formed with gaps along the flange 23 on which the cutting knife 22 is installed and the two side surfaces of the cutting knife 22, and, forming On the inner wall 632, a plurality of cutting water injection ports 64 for spraying cutting water F1 on both sides of the flange 221 of the cutting blade 22, and communicating with the inner wall 632 on the radially outer side of the cutting blade 22 and along the outer circumference of the cutting blade 22 An annular groove 65 formed in the shape, and a high-pressure air injection port that communicates with the groove 65 and is formed at the downstream side of the cutting blade 22 in the rotation direction, and sprays high-pressure air F2 to both sides of the cutting blade 22 66 and, the cutting water supply port 67 for supplying the cutting water F1 sprayed from the cutting water injection port 64, and the high-pressure air supply port 68 for supplying the high-pressure air F2 sprayed from the high-pressure air injection port 66.

The body portion 63 covers a part of the outer circumference of the cutting blade 22. The main body portion 63 has a pair of wall portions 631 in a position where the flange 23 where the cutting knife 22 is installed and the two side surfaces of the cutting knife 22 are sandwiched between. The pair of wall portions 631 are arranged to face each other with a gap along the shape of the flange 23 on which the cutting knife 22 is installed and the two side surfaces of the cutting knife 22. The pair of wall portions 631 are inserted into the male screw 69 to be fastened in a state where the through holes 633 formed in the wall portion 631 overlap each other, thereby completing the assembly. The inner wall 632 is a wall part inside the pair of wall parts 631. In the cutting of the workpiece W, the cutting water F1 fills the gap between the pair of wall portions 631 and the flange 23 on which the cutting blade 22 is installed and both sides of the cutting blade 22. In more detail, with the cut When the cutter 22 rotates in the rotation direction R, the cutting water F1 will fill the gap between the inner wall 632 and the flange 23 on which the cutter 22 is installed and the two sides of the cutter 22.

The cutting water injection port 64 shown in FIGS. 5 to 7 supplies cutting water F1 to the flange 221 of the cutting blade 22, and is a cutting water supply part that supplies the cutting water F1 to the workpiece W. A plurality of cutting water injection ports 64 are formed on the inner wall 632. In this embodiment, the three cutting water injection ports 64 are arranged on the inner wall 632 at equal distances from the central axis of the main shaft 21 and at equal intervals in the circumferential direction. The cutting water injection port 64 forms an opening facing the flange 221 of the cutting blade 22. The cutting water injection port 64 is arranged at a position facing the upper side of the flange 221 of the cutting blade 22. The cutting water injection ports 64 are arranged on both sides in the Y-axis direction with the flange 221 of the cutting blade 22 sandwiched therebetween. Thereby, the cutting water injection port 64 supplies the cutting water F1 to the two sides of the cutting blade 22. The cutting water injection port 64 is formed in a circular shape. In this embodiment, the diameter of the cutting water injection port 64 is, for example, 1.5 to 2 mm. The cutting water injection port 64 is connected to the cutting water supply port 67 through the first supply passage 641 formed in the wall 631. The cutting water spray port 64 sprays the cutting water F1 supplied from the cutting water supply port 67.

The groove 65 shown in FIGS. 7 and 8 collects the cutting water F1 sprayed from the cutting water injection port 64 and reaching the flange 221 of the cutting knife 22 on the radially outer side of the cutting knife 22. The groove 65 is formed on the radially outer side of the cutting blade 22 of the inner wall 632. The groove 65 is in a state where the pair of wall portions 631 are arranged to face each other, and a gap is formed between the pair of wall portions 631 on the radially outer side of the cutting blade 22. The groove 65 is formed in an arc shape along the outer peripheral shape of the cutting blade 22. In more detail, the groove 65 is formed in an arc shape having a larger diameter than the diameter of the cutting blade 22. The groove 65 has a radially outer side of the cutting knife 22 in the direction of the central axis of the main shaft 21 Protruding protrusion 651. In other words, the groove 65 is formed relatively deep at the radially outer end of the cutting blade 22. The groove 65 like this has a size and a shape in which the cutting water F1 sprayed from each cutting water injection port 64 and contacting the flange 23 can flow. During the cutting of the workpiece W, the cutting water F1 fills the groove 65 as the cutting blade 22 rotates in the rotation direction R. The cutting water F1 filled with the groove 65 is jetted from the groove 65 at a high speed by the centrifugal force caused by the rotation of the spindle 21.

The high-pressure air injection port 66 shown in FIGS. 2 and 4 supplies high-pressure air F2 to the peak 222a (see FIG. 2) of the blade 222 of the cutting blade 22 during the cutting of the workpiece W. The high-pressure air injection port 66 is connected to the high-pressure air supply port 68 through the second supply passage 661 formed in the wall portion 631 as an intermediary. In addition, the second supply passage 661 arranged on the upstream side of the high-pressure air injection port 66 communicates with the lower end of the groove 65. Thereby, the high-pressure air injection port 66 sprays the cutting water F1 sprayed at a high speed from the groove 65 and the high-pressure air F2 supplied from the high-pressure air supply port 68 into a mixed fluid F3 containing two kinds of fluids. The high-pressure air injection port 66 sprays the mixed fluid F3 parallel to the two sides of the cutting blade 22 toward the peak 222 a of the blade 222. The high-pressure air injection port 66 sprays the mixed fluid F3 to the peak 222a of the blade 222 to remove cutting chips from the peak 222a. The high-pressure air injection port 66 faces the peak 222 a of the blade 222. The high-pressure air injection port 66 is arranged on the lower side of the nozzle block 62. The high-pressure air injection port 66 has a rectangular shape. The width of the high-pressure air injection port 66 in the Y-axis direction is larger than the thickness of the cutting blade 22. In this embodiment, the high-pressure air injection port 66 has, for example, a width of 11 mm in the Y-axis direction and a width of 1.2 mm in the Z-axis direction. In this implementation form In this state, the width of the high-pressure air injection port 66 in the Z-axis direction is smaller than the width of the high-pressure air injection port 66 in the Y-axis direction, forming a flat shape.

In addition, as shown in FIG. 9, the high-pressure air injection ports 66 may be formed as a pair sandwiching the cutting blade 22 in the Y-axis direction. Thereby, the air can be sprayed to both sides of the cutting blade 22 more effectively.

The second supply passage 661 is formed in a flat shape in the wall portion 631 and communicates the high-pressure air injection port 66 with the high-pressure air supply port 68. The second supply passage 661 communicates with the lower end of the groove 65. Thereby, in the second supply passage 661, the cutting water F1 flowing in from the groove 65 and the high-pressure air F2 supplied from the high-pressure air supply port 68 form a mixed fluid F3. The cutting water F1 jetted from the groove 65 at a high speed is mixed with the high-pressure air F2 supplied from the high-pressure air supply port 68 to form a mixed fluid F3 containing two kinds of fluids. Since the mixed fluid F3 is mixed with the cutting water F1 and the high-pressure air F2 in the flat second supply passage 661, it is faster than the cutting water F1 and the high-pressure air F2.

The cutting water supply port 67 is arranged on the upper side of the nozzle block 62. The cutting water supply port 67 supplies cutting water F1 from a cutting water source not shown in the figure. In this embodiment, pressurized cutting water F1 is used, for example, 2.5L/min~5L/min, preferably 3L/min.

The high-pressure air supply port 68 is arranged on the lower side of the nozzle block 62. The high-pressure air supply port 68 supplies high-pressure air F2 from an air supply source not shown. In this embodiment, pressurized high-pressure air F2 is used, for example, 0.2 MPa (gauge pressure) to 0.6 MPa (gauge pressure), preferably 0.3 MPa (gauge pressure).

Next, the processing operation of the cutting device 1 of this embodiment will be described.

First, the operator registers the processing content information in the control mechanism 90, and places the workpiece W on the holding portion 10 away from the cutting mechanism 20. When there is an instruction from the operator to start the processing operation, the cutting device 1 starts Perform processing actions. During the processing operation, the control mechanism 90 sucks and holds the workpiece W placed on the holding portion 10 and moves the holding portion 10 sucking and holding the workpiece W to the lower side of the cutting mechanism 20.

After the alignment is performed by the control mechanism 90, the cutting blade 22 is rotated, and the holding portion 10 and the cutting blade 22 are relatively moved along the planned dividing line L to cut the workpiece W according to the processing content information. During cutting, the control mechanism 90 makes the cutting water source in a driving state, and supplies the cutting water F1 from the cutting water jet 64 to the cutting blade 22. During cutting, the control mechanism 90 drives the air supply source to supply the high-pressure air F2 from the high-pressure air injection port 66 to the cutting blade 22.

In this manner, during cutting, the cutting water F1 is sprayed from the cutting water spray port 64 to the flange 221 of the cutting blade 22. Next, the cutting water F1 supplied from the cutting water injection port 64 to the flange 221 of the cutting blade 22 fills the gap with the inner wall 632 and the groove 65 as the cutting blade 22 rotates in the rotation direction R. Then, the cutting water F1 is jetted from the groove 65 at a high speed by the centrifugal force generated by the rotation of the main shaft 21. Next, in the second supply passage 661, the cutting water F1 jetted from the groove 65 at a high speed is mixed with the high-pressure air F2 supplied from the high-pressure air supply port 68 to form a mixed fluid F3 containing the two fluids. The ejection port 66 ejects the mixed fluid F3. Next, mix The fluid F3 is sprayed from the high-pressure air injection port 66 to the peak 222 a of the blade 222 of the cutting blade 22. Next, the mixed fluid F3 is discharged from the cutting device 1 through a discharge port not shown.

If the control mechanism 90 determines that the cutting has been completed, the Z-axis moving mechanism 50 moves the cutting mechanism 20 away from the workpiece W, and then uses the X-axis moving mechanism 30 to move the holding portion 10 away from the lower part of the cutting mechanism 20. If the holding part 10 is far away from the lower part of the cutting mechanism 20, the control mechanism 90 will release the suction and holding of the holding part 10. The operator removes the workpiece W that has been cut from the holding part 10, and then re-processes the workpiece before cutting. The object W is placed on the holding part 10. The cutting device 1 repeats such steps to cut the workpiece W.

As described above, with the blade cover 60 of this embodiment, the cutting water F1 is sprayed from the cutting water injection port 64 to the flange 221 of the cutting blade 22. In addition, the cutting water F1 supplied from the cutting water injection port 64 to the flange 221 of the cutting blade 22, along with the rotation of the cutting blade 22 in the rotation direction R, fills the gap and groove 65 of the inner wall 632, and uses the spindle 21 The centrifugal force generated by the rotation of φ is ejected from the groove 65 at a high speed. In the second supply passage 661, the cutting water F1 jetted from the groove 65 at a high speed and the high-pressure air F2 supplied from the high-pressure air supply port 68 are mixed into a mixed fluid F3. The mixed fluid F3 is sprayed from the high-pressure air injection port 66 to the peak 222 a of the blade 222 of the cutting blade 22. Therefore, the mixed fluid F3 becomes sprayed to the peak 222a of the blade 222 of the cutting blade 22 at a higher speed than the cutting water F1 and the high-pressure air F2. That is, even if the mixed fluid F3 uses only a small amount of cutting water F1, it is possible to remove the end materials and the like generated during cutting. Like this, the blade cover 60 is Without increasing the amount of cutting water, only a small amount of cutting water F1 can be used to remove end materials.

Since the groove 65 is formed in the blade cover 60 along the outer peripheral shape of the cutting blade 22, the cutting water F1 sprayed from the cutting water injection port 64 and contacting the flange 23 flows into the groove 65. Thereby, the cutting water F1 flowing into the groove 65 can be reused together with the high-pressure air F2 supplied from the high-pressure air supply port 68 as the mixed fluid F3 for blowing away end materials and the like. In this way, the blade cover 60 can obtain a water saving effect by reusing the cutting water F1.

Moreover, the blade cover 60 is formed in a flat shape with a width in the Z-axis direction of the high-pressure air injection port 66 smaller than that in the Y-axis direction of the high-pressure air injection port 66, so that the cutting blade 22 and the workpiece W The contact part (cutting part) can spray the mixed fluid F3 to a wider area. Thereby, the blade cover 60 can remove end materials and the like with a small amount of cutting water F1.

Since the blade cover 60 sprays the mixed fluid F3 from the high-pressure air injection port 66 to the vicinity of the peak 222a of the blade 222 of the cutting blade 22, the cutting blade 22 and the workpiece W can be washed with a small amount of cutting water F1.

The blade cover 60 is formed to fill the gap between the cutting blade 22 and the inner wall 632 and the groove 65, and to cover the cutting blade 22 with the cutting water F1 flowing into the groove 65 at a high speed, so that high cleaning power can be obtained. Thereby, the blade cover 60 can wash the cutting knife 22 with a small amount of cutting water F1.

The blade cover 60 is in a state where the cutting blade 22 is covered with cutting water F1 filled in the gap between the cutting blade 22 and the inner wall 632 and the groove 65, and it can be cooled. In this way, since the cutting blade 22 is in a state where a part of its outer periphery is covered by the cutting water F1, and for example, the cutting blade 22 is sprayed from the nozzle Compared with the case of cooling water, a higher cooling effect can be obtained.

In this way, the cutting water F1 supplied from the cutting water source of one system is used for the cutting water F1 to be used for cooling the cutting blade 22, removing end materials, etc., and for washing the cutting blade 22 and the workpiece W. In this way, compared with, for example, the cooling of the cutting blade 22, the removal of end materials, and the configuration in which the cutting blade 22 and the workpiece W are cleaned by separately supplying the cutting water F1, the blade cover 60 can suppress the cutting water F1. Usage amount.

In addition, because the blade cover 60 is as described above, the end material and the like can be removed with the mixed fluid F3, so it is possible to suppress the occurrence of defects such as damage, deformation, and misalignment of the blade cover 60 itself caused by contact with the end material and the like. . In this way, the blade cover 60 can suppress the occurrence of defects that accompany the contact of scattered end materials and the like.

In addition, the present invention is not limited to the content of the above-mentioned embodiment. That is, various modifications can be made without departing from the scope of the basic points of the present invention before implementation. For example, in the above embodiment, although the blade cover 60 is applied to the cutting device 1 for cutting rectangular package substrates, etc., the blade cover 60 may be applied to a cutting device for cutting general semiconductor wafers or the like.

60‧‧‧Blade Cover

61‧‧‧Support

611‧‧‧Base

612‧‧‧Cover

613‧‧‧through hole

62‧‧‧Nozzle block

63‧‧‧Main body

631‧‧‧Wall

632‧‧‧Inner Wall

633‧‧‧through hole

64‧‧‧Cutting water jet

641‧‧‧First supply channel

65‧‧‧Groove

66‧‧‧High pressure air injection port

661‧‧‧Second Supply Channel

67‧‧‧Cutting water supply port

68‧‧‧High pressure air supply port

F1‧‧‧Cutting water

F2‧‧‧High pressure air

F3‧‧‧Mixed fluid

Claims (1)

A blade cover, which is arranged at the front end of a spindle sleeve that supports the spindle to be freely rotatable, and covers the blade cover of the cutting knife installed on the spindle by a flange. The blade cover is provided with a nozzle block, which is arranged on and supplied to the cutting The cutting water of the knife is caused by the rotation of the cutting knife, so that the cutting water is mainly scattered from the side where the cutting knife and the workpiece are in contact, and the cutting water is sprayed facing the two sides of the cutting knife. The nozzle block is provided with an inner wall formed with a gap along the shape of the flange on which the cutting knife is installed and both sides of the cutting knife, and a cutting water jet formed on the inner wall and spraying cutting water toward both sides of the flange. A plurality of cutting water injection ports, an annular groove formed along the outer circumferential shape of the cutting knife and communicating with the inner wall on the radially outer side of the cutting knife, and communicating with the groove and formed in the rotation of the cutting knife The high-pressure air injection port that injects air toward the two side surfaces of the cutting knife. The high-pressure air injection port is relative to the cutting knife in a width ratio that is parallel to the two side surfaces of the cutting knife. The width in the direction perpendicular to the two side surfaces is small and is formed into a flat shape. When cutting water is supplied from the cutting water injection port, the cutting water will fill the gap and the groove with the inner wall along with the rotation of the cutting knife. , By the centrifugal force generated by the rotation of the main shaft, cutting water is jetted from the groove at high speed, and mixed with the high-pressure air supplied to the high-pressure air jet port to jet two kinds of fluids from the high-pressure air jet port.

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