JP2007000967A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device surely supplying a cutting fluid to a machining point of a workpiece without being affected by the thickness of the workpiece and the rotating speed of a cutting blade. <P>SOLUTION: The cutting device 10 is provided with: the cutting blade 22 for cutting the workpiece 12; a cutting blade cover 26 for covering the outer periphery of the cutting blade 22; and a cutting fluid supply member 30 which is provided to the opposite side of the cutting blade cover 26 to the rotating direction of the cutting blade 22 at a machining point S and supplies the cutting fluid to the machining point S of the workpiece 12. The cutting device 10 is characterized in that the cutting fluid supply member 30 supplies the cutting fluid into a groove part 33 formed so as to surround the outer periphery of the cutting blade 22, and that the groove part 33 is formed such that the cutting fluid supplied to the groove part 33 is discharged toward a range including the machining point S from the groove part 33 by the rotational force of the cutting blade 22. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a cutting device such as a dicing device, and more particularly to a cutting device including a cutting fluid supply member that supplies a cutting fluid to a processing point of a workpiece during cutting.

  For example, in the semiconductor device manufacturing process, a circuit such as an IC or LSI is formed in a plurality of regions partitioned by streets (cutting lines) formed in a lattice shape on the surface of a workpiece such as a semiconductor wafer having a substantially disk shape. Each semiconductor chip is manufactured by dividing each region in which the circuit is formed along the street. As a dividing device for dividing a workpiece such as a semiconductor wafer, a cutting device as a dicing device is generally used. This cutting device generally performs cutting by rotating and cutting a cutting blade formed of a grindstone portion generally made of diamond abrasive grains along a street. The semiconductor chip thus divided is packaged and widely used in electric devices such as mobile phones and personal computers.

  However, in the cutting machine, when the workpiece is processed by rotating the cutting blade at a high speed, the frictional heat generated between the cutting blade and the workpiece accelerates the wear and breakage of the cutting blade, thereby chipping the cutting groove. It becomes a factor of. For this reason, a method is used in which a cutting fluid is supplied to a cutting blade or a processing point and cooled.

  Such cutting fluid supply methods include a method in which cutting fluid is supplied from both sides of the cutting blade by a pair of cutting fluid supply nozzles in the vicinity of the processing point, and an outer periphery of the cutting blade in front of the processing point by an outer peripheral nozzle. For example, a method of supplying a cutting fluid is generally used.

Japanese Patent Laid-Open No. 11-8211 Japanese Utility Model Publication No. 57-122316

  In the above cutting apparatus, when the thickness of a workpiece such as a semiconductor wafer is generally 300 to 400 μm, if cutting fluid is supplied from both sides of the cutting blade by a pair of cutting fluid supply nozzles, There is no problem. On the other hand, if the thickness of the semiconductor wafer is 400 μm or more, the machining point that is the contact point between the cutting blade and the workpiece will move greatly to the deep part of the cutting groove. Cutting fluid cannot be supplied to the point. Therefore, when the thickness of the semiconductor wafer is 400 μm or more, the cutting fluid can be supplied to the machining point even if the machining point, which is the contact point between the cutting blade and the workpiece, moves greatly to the deep part of the cutting groove. For example, a wafer cleaning water jet nozzle 5 as described in Patent Document 1 is separately installed as a cutting fluid supply nozzle for deep cutting.

  However, when the cutting blade rotates at a high speed of 10,000 revolutions or more per minute, an air flow is generated around the cutting blade, and even if the cutting fluid is supplied from the cutting fluid nozzle for deep cutting, it is repelled by the air flow. As a result, the cutting fluid did not reach the machining point.

  For example, when the cutting blade rotates 40,000 per minute, the peripheral speed of the cutting blade is 116400 mm per second. At that time, the cutting fluid is supplied at a flow rate of 1 liter / min from the cutting fluid supply nozzle for deep cutting having a diameter of 2 mm. When supplying, the speed is only 53 mm per second.

  One way to solve this problem is to increase the hydraulic pressure and flow rate of the cutting fluid supplied from the cutting fluid supply nozzle for deep cutting. However, since the factory equipment is used, There is a limit to the water pressure and flow rate, and in order to obtain water pressure and flow rate that breaks through the air flow, additional equipment must be provided.

  Even if it is configured to obtain a water pressure or flow rate that breaks through the airflow, if the cutting blade is thin, if the cutting fluid water pressure or flow rate is too large, the cutting blade will bend and cut. I can't.

  In order to solve such a problem, in Patent Document 2, a groove is formed so as to cover both sides of the outer periphery of the cutting blade, the air flow of the cutting blade is confined in the groove, and cutting fluid is poured into the groove. It is described that the cutting fluid is supplied and accelerated by the force of the airflow to supply the cutting fluid.

  However, in the invention described in Patent Document 2, the cutting fluid is not intended to be supplied to the machining point. Like the configuration of the invention described in Patent Document 2, it is simply formed along the outer periphery of the cutting blade. Even if the groove is formed, the cutting fluid does not reach the machining point, and the cutting fluid cannot be directly supplied to the machining point.

  Therefore, the present invention has been made in view of such problems, and its purpose is to reliably cut the work point of the work piece without being affected by the thickness of the work piece or the rotational speed of the cutting blade. It is an object of the present invention to provide a new and improved cutting apparatus capable of supplying a liquid.

  In order to solve the above problems, according to an aspect of the present invention, a cutting blade for cutting a workpiece, a cutting blade cover for covering the outer periphery of the cutting blade, and a rotation direction of the cutting blade at a processing point of the cutting blade cover A cutting device is provided that includes a cutting fluid supply member that is provided on the opposite side of the workpiece and supplies the cutting fluid to a processing point of the workpiece. In the above cutting apparatus, the cutting fluid supply member supplies the cutting fluid into a groove formed so as to surround the outer periphery of the cutting blade, and the cutting fluid supplied to the groove is processed from the groove by the rotational force of the cutting blade. The groove portion is formed so as to be discharged toward a range including the point.

  Further, in the cutting apparatus, the groove is formed in a first groove formed in a concentric circular arc shape larger than the diameter of the cutting blade, and a second groove formed continuously on the rotation direction side of the cutting blade of the first groove. For example, the second groove has a center different from that of the first groove so that the cutting fluid discharged from the second groove is supplied toward the range including the machining point. It can be configured to have a circular arc shape or a linear shape having a predetermined angle with respect to the processing surface of the workpiece.

  By devising the shape of the groove formed in the cutting fluid supply member as described above, the cutting fluid can be reliably applied to the machining point of the workpiece without being affected by the thickness of the workpiece or the rotational speed of the cutting blade. Can be supplied. Therefore, the temperature rise at the machining point can be suppressed and the size of cracks and chipping generated at the edge of the cutting groove can be suppressed, so that the cutting quality by the cutting blade can be improved. In addition, since the workpiece can be easily cut, the cutting speed (feeding speed for moving the cutting blade) can be increased, and the productivity of the product can be improved.

  The groove is formed with a plurality of injection holes for injecting the cutting fluid to both sides of the outer periphery of the cutting blade, and the plurality of injection openings are such that the injection amount of the cutting liquid is closer to the injection point. It is preferable that they are arranged so as to increase.

  Thus, by increasing the flow rate toward the injection port closer to the machining point and injecting a large amount of cutting fluid, the cutting fluid can be efficiently supplied to the machining point. Specifically, for example, a cutting fluid supply path for supplying cutting fluid to the injection ports is disposed so that the plurality of injection ports communicate from below to above so that the cutting fluid flows from below to above. By doing so, the flow rate can be increased as the injection port is closer to the processing point.

  According to the present invention, it is possible to provide a cutting device that can reliably supply a cutting fluid to a machining point of a workpiece without being affected by the thickness of the workpiece or the rotational speed of a cutting blade. . Therefore, according to the cutting apparatus according to the present invention, the cutting quality can be improved and the cutting speed can be improved, so that the productivity can also be improved.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
First, based on FIG. 1, the whole structure of the dicing apparatus 10 which is an example of the cutting device which concerns on the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 includes a cutting unit 20 that is a cutting unit that cuts a workpiece 12 such as a semiconductor wafer, and a chuck that is a workpiece holding unit that holds the workpiece 12. A table 15, a cutting unit moving mechanism (not shown), and a chuck table moving mechanism (not shown) are provided.

  The cutting unit 20 includes a cutting blade 22 mounted on a spindle (not shown). The cutting unit 20 cuts the workpiece 12 by cutting the workpiece 12 while rotating the cutting blade 22 at a high speed to form an extremely thin kerf.

  The chuck table 15 is, for example, a disk-shaped table having a substantially flat upper surface, and is provided with a vacuum chuck (not shown) on the upper surface. On the chuck table 15, for example, the workpiece 12 supported by the frame 14 via the wafer tape 13 is placed. The chuck table 15 stably holds the workpiece 12 by vacuum suction.

  The cutting unit moving mechanism moves the cutting unit 20 in the Y-axis direction. The Y-axis direction is a horizontal direction orthogonal to the cutting direction (X-axis direction), and coincides with the axial direction of the spindle extending in the cutting unit 20. By moving the cutting unit 20 in the Y-axis direction, the cutting edge of the cutting blade 22 can be aligned with the cutting position (cutting line) of the workpiece 12. Further, when performing maintenance such as replacement work of the cutting blade 22, the cutting unit 20 is advanced to the Y axis positive direction side (operator side), that is, the front side (front side) of the dicing apparatus 10, and the operator operates the cutting unit 20. It can be arranged at a position that is easy to do. Further, the cutting unit moving mechanism moves the cutting unit 20 also in the Z-axis direction (vertical direction). Thereby, the cutting depth of the cutting blade 22 with respect to the workpiece 12 can be adjusted.

  The chuck table moving mechanism reciprocates the chuck table 15 holding the workpiece 12 in the cutting direction (X-axis direction) during the cutting process so that the cutting edge of the cutting blade 22 moves linearly with respect to the workpiece 12. Let it work with.

  The dicing apparatus 10 having such a configuration is arranged in a lattice shape of the workpiece 12 by relatively moving the cutting unit 20 and the chuck table 15 while cutting the cutting blade 22 rotating at high speed into the workpiece 12. Cutting multiple cutting lines. Thereby, the workpiece 12 can be diced and divided into a plurality of chips.

  Next, based on FIG. 2, the structure of the cutting unit 20 which concerns on this embodiment is demonstrated in detail. FIG. 2 is a front view (a) and a right side view (b) showing the cutting unit 20 according to the present embodiment.

  As shown in FIG. 2, the cutting unit 20 includes, for example, a cutting blade 22, a spindle (not shown), a spindle housing (not shown), a blade cover support portion 24, a cutting blade cover 26, a cutting blade. A liquid supply nozzle (blade cooler nozzle) 28 and a cutting liquid supply member 30 are mainly provided.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 22 is attached to the tip of the spindle by, for example, a flange and a nut (both not shown). The cutting blade 22 according to the present embodiment is constituted by, for example, a hub blade in which a cutting grindstone portion disposed on the outer periphery and a base portion for pivotally attaching the cutting grindstone portion to a spindle are integrally configured. However, the present invention is not limited to this example, and the cutting blade 22 may be a so-called washer blade, and may be configured to be axially attached to the spindle by sandwiching both sides thereof with flanges and fixing with nuts. .

  The spindle is a rotating shaft for transmitting, for example, a rotational driving force of a motor (not shown) to the cutting blade 22, and the mounted cutting blade 22 can be rotated at a high speed of, for example, 30,000 rpm. . Most of the spindle is covered with a spindle housing (not shown), but its tip is exposed from the spindle housing, and a cutting blade 22 or the like is attached to the tip. The spindle extends in the Y-axis direction orthogonal to the cutting direction (X-axis direction).

  The spindle housing is a housing provided so as to cover the outer periphery of the spindle. The spindle housing rotatably supports the spindle by an air bearing (not shown) provided inside.

  The cutting blade cover 26 is fixed to the blade cover support portion 24 with screws or the like, and is disposed so as to cover the outer periphery of the cutting blade 22 along its circumferential direction, and is fixed to the tip end portion of the spindle housing. Is done. The cutting blade cover 26 protects the cutting blade 22 and prevents the cutting fluid, cutting waste, broken blade pieces, and the like accompanying the cutting from scattering outside the cutting unit 20.

  Further, a pair of cutting fluid supply nozzles (blade cooler nozzles) 28 for supplying cutting fluid from the side surface side of the cutting blade 22 are provided so as to be supported and fixed to the blade cover support portion 24. The cutting fluid supply nozzle 28 is disposed adjacent to the lower portion of the side surface of the cutting blade 22 (referred to as a flat surface on the Y-axis direction side of the cutting blade 22) and faces the front side and the back side of the cutting blade 22. Has been placed. The front surface of the cutting blade 22 is the side surface on the tip end side in the axial direction (Y-axis positive direction side) of the spindle, and the rear surface of the cutting blade 22 is the back side in the axial direction of the spindle (Y-axis negative direction side). On the side. In the horizontal portion of the cutting fluid supply nozzle 28, for example, a plurality of slit-shaped or fine-hole-shaped injection ports (not shown) are formed, and the cutting fluid ( For example, cutting water) is injected. By supplying the cutting fluid in this way, the cutting blade 22 and the processing point can be cooled, and chipping can be prevented from occurring on the workpiece during the cutting process.

  The cutting fluid supply member 30 is provided on the opposite side to the rotation direction of the cutting blade 22 at the processing point of the cutting blade cover 26, that is, on the X axis positive direction side, and uses the rotational force of the cutting blade 22. This is a member for supplying the cutting fluid to the processing point of the workpiece 12, and the detailed configuration thereof will be described later. The cutting fluid supply nozzle 28 and the cutting fluid supply member 30 are common in that they have a function of supplying the cutting fluid toward the processing point of the workpiece. It differs from the cutting fluid supply nozzle 28 in that the cutting fluid can be reliably supplied to the processing point without being affected by the thickness of the workpiece and the rotational speed of the cutting blade.

  Hereinafter, based on FIG. 2 and FIG. 3, the external structure of the cutting fluid supply member 30 which is the characteristic component which concerns on this embodiment is demonstrated in detail. FIG. 3 is a perspective view showing an external configuration of the cutting fluid supply member 30 according to the present embodiment.

  As shown in FIGS. 2 and 3, the cutting blade cover 26 is covered by the cutting blade 22 separately from a pair of cutting fluid supply nozzles 28 that supply the cutting fluid from both sides near the processing point of the cutting blade 22. A cutting fluid supply member 30 is provided on the side opposite to the rotation direction of the cutting blade 22 at the processing point of the workpiece 12, that is, on the X axis positive direction side in FIG. The cutting fluid supply member 30 is attached to the cutting blade cover 26 for the purpose of reliably supplying the cutting fluid to the machining point without being affected by the thickness of the workpiece or the rotational speed of the cutting blade. , A member formed of a metal such as stainless steel.

  Further, the cutting fluid supply member 30 has a substantially V-shaped groove 33 formed on the side of the base portion 32 facing the cutting blade 22 (X-axis positive direction side) so as to cover the outer periphery of the cutting blade 22. . Further, the groove 33 is formed with a plurality of injection ports 34 for injecting the cutting fluid to both sides of the outer periphery of the cutting blade 22 (the front and back surfaces of the outer periphery of the cutting blade 22). Further, a cutting fluid supply passage 36 having one end communicating with the injection port 34 is formed inside the base portion 32, and the other end of the cutting fluid supply passage 36 is a hose connecting portion inserted into the supply hole 38a. A fluid supply hose (not shown) communicated with a cutting fluid supply means (not shown) provided outside the cutting fluid supply member 30 via 38.

  Here, based on FIG. 4 and FIG. 5, the structure of the groove part 33 and the injection port 34 is demonstrated in detail. 4 is an enlarged perspective view showing the configuration of the groove 33 and the injection port 34 formed in the cutting fluid supply member 30 according to this embodiment, and FIG. 5 is the cutting blade and the cutting fluid supply member of FIG. It is sectional drawing cut | disconnected by the plane parallel to XY plane.

  As shown in FIG. 4, the groove portion 33 is formed in a substantially V shape on the side of the base portion 32 facing the cutting blade 22 (X-axis positive direction side), and the outer periphery of the cutting blade 22 is formed by the groove portion 33. Is disposed so as to cover a part (the side opposite to the rotation direction of the cutting blade 22 at the processing point). Inside the groove 33, there are a plurality of pairs of injection ports 34 (five locations in FIG. 4) that can be sprayed so that the cutting fluid is directly applied to the front and back surfaces of the outer periphery of the cutting blade 22. Is provided. The reason why the cutting fluid is supplied from the both side surfaces (front and back) of the cutting blade 22 is that the airflow generated by the rotation of the cutting blade 22 is most strongly generated on both side surfaces near the outer periphery. That is, the cutting fluid is easily pushed out by the airflow by supplying the cutting fluid from both side surfaces near the outer periphery where the airflow is generated most strongly.

  More specifically, as shown in FIG. 5, the injection port 34 is disposed at a position where the cutting fluid can be injected from a substantially vertical direction (substantially Y-axis direction) with respect to the front and rear surfaces of the outer periphery of the cutting blade 22. , Multiple locations are arranged in the height direction. Although a total of ten injection ports 34 are provided in FIG. 4, the number of injection ports 34 is not particularly limited and can be freely selected according to cutting conditions.

  Moreover, it is preferable that the distance between the injection port 34 and the cutting blade 22 be in the range of 1 to 5 mm. When the distance between the injection port 34 and the cutting blade 22 is less than 1 mm and the distance between the injection port 34 and the cutting blade 22 becomes too close, the cutting fluid injected from the injection port 34 collides with the cutting blade 22 and rebounds. This may cause clogging of the injection port 34, which is not preferable because the cutting fluid cannot be effectively injected. On the other hand, if the distance between the injection port 34 and the cutting blade 22 exceeds 5 mm and the distance between the injection port 34 and the cutting blade 22 becomes too long, the water pressure when the cutting fluid hits the cutting blade 22 becomes weak, and the airflow Since it is thought that it will be played, it is not preferable.

  Furthermore, the flow rate of the cutting fluid ejected from the ejection port 34 is, for example, when a pair of ejection ports 34 is provided at five locations in the height direction (Z-axis direction) as shown in FIG. When the flow rate is 1.5 liters / minute, the lowest stage is 0.5 liters / minute, the second stage from the bottom is 0.4 liters / minute, the middle stage is 0.3 liters / minute, From the second stage to the second stage, it is preferably 0.2 liter / min, and at the top stage, 0.1 liter / min. Thus, the cutting fluid can be efficiently supplied to the processing point by increasing the flow rate toward the injection port 34 closer to the processing point and injecting a large amount of the cutting fluid.

  Further, in the present embodiment, the groove portion 33 in which the injection port 34 is provided is formed in a substantially V shape, but the shape is not particularly limited. For example, the groove portion 33 has a substantially U shape, a substantially arc shape, or the like. There may be.

  Further, the groove 33 of the cutting fluid supply member 30 according to the present embodiment includes a first groove 52 (arc from point A to point B in FIG. 4) formed in a concentric circular arc shape with the cutting blade 22, and a first It is comprised from the 2nd groove part 54 (arc from B point of FIG. 4 to C point) formed in the circular arc shape which has a different center from a groove part. Details of the groove 33 will be described later.

  Next, based on FIG. 2 and FIG. 6, the cutting fluid supply path formed inside the cutting fluid supply member 30 according to the present embodiment will be described. FIG. 6 is a perspective view showing a cutting fluid supply path 36 formed in the cutting fluid supply member 30 according to the present embodiment.

  As shown in FIG. 2 and FIG. 6, the nozzle of the cutting fluid sprayed on the front and back surfaces of the outer periphery of the cutting blade 22 in order to efficiently supply the cutting fluid to the machining point ejects the cutting fluid. A circular injection port 34 (five portions each on the front side and the back side in FIG. 6) and a cutting fluid supply path 36 communicated with the injection port 34 are provided. As described above, the injection port 34 is a position at which the cutting fluid can be injected into the groove portion 33 formed on the side of the base portion 32 facing the cutting blade 22 from a direction substantially perpendicular to the front and back surfaces of the outer periphery of the cutting blade 22. Is arranged. Specifically, five first to fifth injection ports 34a to 34e are formed on both side surfaces of the groove 33 from the lower side (the one closer to the processing point S).

  The cutting fluid supply path 36 includes a first path 362, a second path 364, a pair of third paths 366, a pair of fourth paths 368, and a pair of fifth to ninth paths 369a to 369a. 369e. One end of the first path 362 communicates with a supply hole 38a provided at the top of the base portion 32, and extends from the bottom 36a of the supply hole 38a vertically downward (Z-axis negative direction). Yes. The first path 362 is joined to the substantially central portion of the second path 364 disposed at the other end extending in the horizontal direction at a predetermined position. That is, the second path 364 branches at the junction with the first path 362 in the horizontal left and right sides (Y-axis positive direction and Y-axis negative direction). Further, a pair of substantially parallel third paths 366 are joined near both ends of the second path 364 branched to the left and right sides. The third path 366 is connected to the cutting blade 22 from the joint with the second path 364. It extends toward the diagonally lower side on the side close to. In addition, a pair of fifth paths 369 a is joined to the distal ends of the pair of third paths 366 so as to be substantially perpendicular to the third path 366. The fifth path 369a extends from the joint with the third path 366 toward the substantially horizontal inner side (side with the groove 33), and communicates with the lowermost first injection port 34a. On the other hand, a pair of fourth paths 368 are joined slightly behind the tip of the third path 366 (on the side far from the cutting blade 22). The fourth path 368 extends obliquely upward on the side far from the cutting blade 22 from the joint with the third path 366. Further, a pair of sixth to sixth passages 368 communicate with the second to fifth injection ports 34b to 34e from the second injection port 34b from the bottom to the uppermost injection port 34e. Ninth paths 369b to 369e are provided. Similar to the fifth path 369a, these sixth to ninth paths 369b to 369e respectively extend substantially inward in the horizontal direction (the side with the groove 33) from the joint with the fourth path 368. It communicates with the second to fifth injection ports 34b to 34e.

  Further, as described above, a hose connecting portion (not shown) is installed in the supply hole 38a, and a cutting fluid supply means (not shown) provided outside the cutting fluid supply member 30 is provided in the hose connecting portion. A liquid supply hose (not shown) communicated with the liquid supply hose. With this configuration, the cutting fluid supplied from the cutting fluid supply means via the fluid supply hose is supplied to the cutting fluid supply path 36 (first to ninth paths 362, 364, 366, 368) formed in the base portion 32. , 369a to 369e) and from the injection port 34 (first to fifth injection ports 34a to 34e) to the front and rear surfaces of the outer periphery of the cutting blade 22, more specifically opposite to the rotation direction of the cutting blade 22 at the processing point S Injected toward the outer peripheral surface of the side cutting blade 22.

  The path through which the cutting fluid passes will be described in more detail. The cutting fluid supplied from the cutting fluid supply means through the liquid supply hose first moves the first path 362 downward in the vertical direction as indicated by the arrow in FIG. After flowing in the first direction, the first path 362 and the second path 364 branch to the left and right in the horizontal direction and flow through the third path 366. Part of the cutting fluid that has passed through the third path 366 passes through the fifth path 369a and is ejected from the first ejection port 34a. Further, the remaining cutting fluid that has not been directed to the fifth path 369a passes through the fourth path 368, passes through the sixth to ninth paths 369b to 369e, and passes through the second to fifth injection ports 34b to 34e. Be injected.

  In this way, when the cutting fluid is ejected from the ejection port 34, the cutting fluid is ejected from the lower side (closer to the processing point S) by supplying the cutting fluid from the lower side to the upper side. The flow rate can be increased. That is, the flow rate of the first injection port 34a is the highest and the flow rate of the fifth injection port 34e is the lowest.

  By supplying the cutting fluid in this manner, the air flow generated by the high speed rotation of the cutting blade 22 is confined in the groove portion 33, and the cutting fluid is supplied to the groove portion 33 in which the air flow is confined. The cutting fluid can be accelerated and the cutting fluid can be supplied. However, the cutting fluid cannot be supplied to the machining point S of the workpiece 12 simply by forming the groove 33 along the outer periphery of the cutting blade. Therefore, in this embodiment, as will be described in detail later, the shape of the groove 33 is devised so that the cutting fluid can be reliably supplied to the machining point.

  Next, a mechanism for supplying the cutting fluid to the machining point S of the workpiece 12 by the cutting fluid supply member 30 according to the present embodiment will be described with reference to FIGS. 7 is an explanatory view showing a state in which a cutting fluid supply member according to the prior art supplies cutting fluid to the workpiece 12. FIG. 8 shows a state in which the cutting fluid supply member 30 according to this embodiment is a workpiece. It is explanatory drawing which shows the mechanism in which cutting fluid is supplied to 12 processing points S.

  As indicated by the arrows in FIG. 8, in this embodiment, the cutting blade 22 rotates clockwise when viewed from the positive direction of the Y axis, and the chuck table 15, that is, the workpiece 12 is Therefore, the machining point S includes a contact point between the cutting blade 22 and the workpiece 12 and is a region in the vicinity of the contact point on the opposite side of the rotation direction of the cutting blade 22.

  In addition, as described above, the rotation of the cutting blade 22 generates an air flow along the rotation direction of the blade, and this generated air flow is generated in the substantially V-shaped groove portion 33 formed in the cutting fluid supply member 30. Be trapped. Further, when the cutting fluid is supplied to the groove 33 from the injection port 34 via the cutting fluid supply path 36, the cutting fluid supplied into the groove 33 is pushed out by the air flow confined in the groove 33.

Here, the groove 33 may be provided with a concentric arc-shaped groove larger than the diameter of the cutting blade 22 so as to cover the outer periphery of the cutting blade 22 in the sense of accelerating the cutting fluid. However, as shown in FIG. 7, when the groove portion of the cutting fluid supply member 300 is formed as an arc-shaped groove 520 concentric with the cutting blade 22, the end portions C and D of the groove portion (ends close to the machining point) As shown by the cutting fluid trajectories L ₃ and L ₄ , the cutting fluid discharged from the part) does not reach the machining point S and is supplied onto the surface of the workpiece 12. Here, the cutting fluid trajectories L ₃ and L ₄ indicate the cutting fluid trajectories when it is assumed that the groove is formed as an arcuate groove 520 concentric with the cutting blade 22. In such a state, when the workpiece 12 such as a semiconductor wafer is thick (for example, 400 μm or more), even if the cutting fluid is supplied onto the surface of the workpiece 12, the processing point S is reached. Cutting fluid does not reach.

  For this reason, in the cutting fluid supply member 30 according to the present embodiment, the groove 33 is arranged so that the cutting fluid is supplied directly to the machining point S when the cutting fluid is discharged from the tip of the groove 33. The shape near the tip is devised.

That is, for example, as shown in FIG. 8, the groove 33 is divided into a first groove 52 formed in a concentric circular arc shape larger than the diameter of the cutting blade 22, and the rotation direction of the cutting blade 22 in the first groove 52. When the second groove portion 54 is formed so as to consist of the second groove portion 54, the second groove portion 54 has the first groove portion 54 so that the cutting fluid supplied to the groove portion 33 is discharged to a range including the machining point S. It can be configured to be formed in a circular arc shape of a circle having a center different from that of the groove 52 (in FIG. 8, the first groove 52 is located from the point A (the end on the side far from the processing point S) to the point B. The arc to point, the second groove 54 is shown as an arc from point B to point C (lower tip). More specifically, when the second groove portion 54 is formed in a circular arc shape having a center different from that of the first groove portion 52, the shape of the groove portion 33 is an end portion of the circular arc constituting the second groove portion 54. a tangent L ₁ at point C, and the straight line L ₂ parallel to the tangential line L ₁ drawn from point D is the tip portion of the groove portion 33 upper surface side, so as to include a processing point S, the arc diameter size and arc The length is set.

  Further, as described above, the groove portion 33 is not limited to the configuration including the two continuous arc-shaped first groove portions 52 and the second groove portion 53, and may form three or more groove portions on the continuous arc. The tangent line at point C, which is the lower end portion, and the straight line parallel to the tangent line drawn from the point D, which is the tip portion on the upper surface side of the groove 33, may be configured to include the machining point S. .

  Furthermore, the shape near the tip of the groove 33 may be a shape that can supply the cutting fluid directly to the machining point S. For example, the shape is continuous with the arcuate groove concentric with the cutting blade 22 and is linear. A groove may be formed. In this case, the cutting fluid is discharged in the extending direction of the straight groove, but the machining surface of the straight groove is positioned so that the machining point S is located between the upper surface and the lower surface of the discharged cutting fluid. Adjust the angle and length with respect to.

  By using the cutting fluid supply member 30 as described above, when cutting a semiconductor wafer having a thickness of 400 μm or more with a cutting device, the cutting point can be cut efficiently even if the cutting blade is rotated at a high speed of 10,000 revolutions or more. Liquid can be supplied.

  Note that when the cutting fluid supply member 30 having the above-described configuration is used, the cutting fluid can be supplied to the processing point, so that the problem of chipping does not occur. 28 need not be provided.

  Next, as an example of the present invention, as in the cutting fluid supply member 30 according to the present embodiment, a first groove portion in which the groove portion is formed in an arc shape concentric with the cutting blade, and a central circle different from the first groove portion. As a comparative example, the results of comparative experiments will be described for an example constituted by the second groove portion formed in the shape of a circular arc and an example using only a conventional cutting fluid supply nozzle (blade cooler nozzle) as a comparative example.

  First, in order to compare the cutting water supply capability with respect to the machining point, the amount of water reaching the machining point was measured for the example of the present invention and the comparative example. As a measurement method, a 0.2 mm slit (length 10 mm) is provided as a pseudo machining point on the plate-like member, and is usually placed near the machining point so as not to contact the cutting blade. Was obtained by measuring the amount of water that passed through as the amount of water that reached the processing point. In this measurement, the spindle rotation speed was 30000 rpm, and the total amount of cutting fluid supplied from the cutting fluid supply nozzle or the cutting fluid supply member was 1.5 liters / minute. As a result, when only the conventional blade cooler nozzle is used, the amount of the cutting fluid supplied to the machining point is 24 ml / min, whereas the cutting fluid supply member according to the embodiment of the present invention is used. As a result, a cutting fluid with a water volume of 78 ml / min was supplied to the machining point. That is, when the cutting fluid supply member according to the embodiment of the present invention is used, it has been found that the ability to supply the cutting fluid to the processing point is more than three times that of the conventional blade cooler nozzle alone. did.

  Therefore, by using the cutting fluid supply member according to the embodiment of the present invention, the cooling effect on the cutting blade and the workpiece at the machining point can be enhanced without increasing the amount of cutting fluid, and at the machining point. The generated cutting waste can be washed away efficiently.

  Here, based on FIG. 9, the cooling effect with respect to the cutting blade and workpiece in the processing point by the said experiment is demonstrated. FIG. 9 is an explanatory view showing the temperature distribution in the vicinity of the cutting blade 22 and the processing point S. FIG. 9A shows the case where only the cutting fluid supply nozzle according to the prior art is used, and FIG. The case where the cutting fluid supply member which concerns on one Example is used is shown. FIG. 9 shows that the temperature increases as the numerical value shown on the right side of the figure increases (the dot in each temperature region becomes darker).

  As shown in FIG. 9 (a), when only the cutting fluid supply nozzle according to the prior art is used, the temperature rise near the processing point S is severe and the cutting fluid is efficiently supplied to the processing point S. I understand that there is no. On the other hand, as shown in FIG. 9B, when the cutting fluid supply member according to one embodiment of the present invention is used, the temperature rise in the vicinity of the processing point S is considerably suppressed, so that the cutting fluid is at the processing point. It can be seen that S is efficiently supplied to S.

  Thus, by using the cutting fluid supply member in one embodiment of the present invention, the temperature rise at the machining point can be suppressed, and the size of cracks and chipping generated at the edge of the cutting groove can be suppressed. Cutting quality by the cutting blade can be improved. In addition, since the workpiece can be easily cut, the cutting speed (feeding speed for moving the cutting blade) can be increased, and the productivity of the product can be improved.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this example. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the dicing apparatus 10 is described as an example of the cutting apparatus, but the present invention is not limited to such an example. For example, as long as it is a device that cuts the workpiece 12 using the cutting blade 22 that rotates at high speed by the spindle 25, for example, various cutting devices that perform cutting processing other than dicing processing may be used.

  In the above-described embodiment, an example in which the shape of the injection port 34 is substantially circular has been described. However, the present invention is not limited to such an example. For example, the shape of the injection port may be substantially rectangular or slit as long as the cutting fluid can be sprayed to the front and back surfaces of the outer periphery of the cutting blade 22 to supply the cutting fluid to the processing point.

  In the above-described embodiment, the material of the cutting fluid supply member 30 is a metal such as stainless steel, but the present invention is not limited to this example, and may be any material such as a synthetic resin such as plastic.

  The present invention can be applied to a cutting device such as a dicing device, and in particular, can be applied to a cutting device including a cutting fluid supply member that supplies a cutting fluid to a processing point of a workpiece during cutting.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a figure which shows the structure of the cutting unit which concerns on the embodiment, (a) is a front view, (b) is a right view. It is a perspective view which shows the external appearance structure of the cutting blade and cutting fluid supply member which concern on the same embodiment. It is an expansion perspective view which shows the structure of the groove part and injection port which were formed in the cutting blade and cutting fluid supply member which concern on the same embodiment. It is sectional drawing cut | disconnected by the plane parallel to XY plane of the cutting blade and cutting fluid supply member of FIG. It is a perspective view which shows the cutting fluid supply path | route formed in the cutting fluid supply member based on the embodiment. It is explanatory drawing which shows the state in which the cutting fluid supply member by a prior art supplies cutting fluid to the workpiece. It is explanatory drawing which shows the mechanism in which the cutting fluid supply member which concerns on the embodiment supplies a cutting fluid to the process point of a workpiece. It is explanatory drawing which shows temperature distribution near a cutting blade and a process point, (a) is only when the cutting fluid supply nozzle by a prior art is used, (b) is the cutting fluid supply which concerns on one Example of this invention. The case where a member is used is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Dicing apparatus 12 Workpiece 15 Chuck table 20 Cutting unit 22 Cutting blade 26 Cutting blade cover 28 Cutting fluid supply nozzle 30 Cutting fluid supply member 32 Base part 33 Groove part 34 Injection port 36 Cutting fluid supply path

Claims (3)

A cutting blade that cuts the workpiece, a cutting blade cover that covers the outer periphery of the cutting blade, and a cutting blade that is provided on a side opposite to the rotation direction of the cutting blade at a processing point of the cutting blade cover. In a cutting apparatus comprising: a cutting fluid supply member that supplies a processing point of an object:
The cutting fluid supply member supplies cutting fluid into a groove formed so as to surround the outer periphery of the cutting blade, and the cutting fluid supplied to the groove is removed from the groove by the rotational force of the cutting blade. The cutting device, wherein the groove is formed so as to be discharged toward a range including a point. The groove portion includes a first groove portion formed in a concentric circular arc shape larger than the diameter of the cutting blade, and a second groove portion formed continuously on the rotation direction side of the cutting blade of the first groove portion. ,
The second groove portion has an arc shape in which the second groove portion has a center different from that of the first groove portion so that the cutting fluid discharged from the second groove portion is supplied toward a range including the machining point. 2. The cutting device according to claim 1, wherein the cutting device is formed in a straight line having a predetermined angle with respect to a processing surface of the workpiece. In the groove portion, a plurality of injection ports for injecting cutting fluid to both side surfaces of the outer periphery of the cutting blade are formed,
The cutting device according to claim 1 or 2, wherein the plurality of injection ports are arranged such that the amount of cutting fluid injected increases toward the injection port closer to the processing point.

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