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TWI792475B - Immersion-cooled heat-dissipation structure with macroscopic-scale fin structure and immersion-cooled heat-dissipation structure with fin structure - Google Patents

Immersion-cooled heat-dissipation structure with macroscopic-scale fin structure and immersion-cooled heat-dissipation structure with fin structure Download PDF

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TWI792475B
TWI792475B TW110129008A TW110129008A TWI792475B TW I792475 B TWI792475 B TW I792475B TW 110129008 A TW110129008 A TW 110129008A TW 110129008 A TW110129008 A TW 110129008A TW I792475 B TWI792475 B TW I792475B
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fins
heat dissipation
immersion
fin
cooling liquid
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TW110129008A
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TW202307384A (en
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楊景明
彭晟書
葉子暘
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艾姆勒科技股份有限公司
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Abstract

An immersion-cooled heat-dissipation structure with macroscopic-scale fin structure and an immersion-cooled heat-dissipation structure with fin structure are provided. The immersion-cooled heat-dissipation structure with a macroscopic-scale fin structure has a surface with at least two contact angles. At least one portion of the surface has a first contact angle with the immersion liquid of greater than 90°. At least another portion of the surface has a second contact angle with the immersion liquid of between 0° and 90°.

Description

具巨觀鰭片結構之浸沒式散熱結構及具鰭片結構之浸沒式散熱結構Immersion heat dissipation structure with giant fin structure and immersion heat dissipation structure with fin structure

本發明涉及一種散熱結構,具體來說是涉及一種具巨觀鰭片結構之浸沒式散熱結構及具鰭片結構之浸沒式散熱結構。 The invention relates to a heat dissipation structure, in particular to an immersion heat dissipation structure with a macroscopic fin structure and an immersion heat dissipation structure with a fin structure.

浸沒式冷卻技術是將發熱元件(如伺服器、磁碟陣列等)直接浸沒在不導電的冷卻液中,以透過冷卻液吸熱氣化帶走發熱元件運作所產生之熱能。然而,如何透過浸沒式冷卻技術更加有效地進行散熱一直是業界所需要解決的問題。 The immersion cooling technology is to immerse the heating element (such as server, disk array, etc.) directly in the non-conductive cooling liquid, so as to take away the heat energy generated by the heating element through the heat absorption and vaporization of the cooling liquid. However, how to dissipate heat more effectively through immersion cooling technology has always been a problem to be solved in the industry.

有鑑於此,本發明人本於多年從事相關產品之開發與設計,有感上述缺失之可改善,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。 In view of this, the inventor has been engaged in the development and design of related products for many years, and felt that the above-mentioned defects can be improved, so he devoted himself to research and combined with the application of theories, and finally proposed an invention with a reasonable design and effective improvement of the above-mentioned defects.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種具巨觀鰭片結構之浸沒式散熱結構及具鰭片結構之浸沒式散熱結構。 The technical problem to be solved by the present invention is to provide an immersion heat dissipation structure with a macroscopic fin structure and an immersion heat dissipation structure with a fin structure in view of the deficiencies in the prior art.

為了解決上述的技術問題,本發明第一實施例提供了一種具巨觀鰭片結構之浸沒式散熱結構,其具有至少兩種以上接觸角的表面;其中,至少有一局部的所述表面對浸沒式冷卻液的接觸角>90°,並且至少有 另一局部的所述表面對浸沒式冷卻液的接觸角介於0°到90°之間。 In order to solve the above-mentioned technical problems, the first embodiment of the present invention provides an immersion heat dissipation structure with a macroscopic fin structure, which has at least two surfaces with more than two contact angles; wherein at least one part of the surface is submerged Type coolant with a contact angle >90° and at least Another part of the surface has a contact angle of immersion cooling liquid between 0° and 90°.

在一優選實施例中,所述的巨觀鰭片結構係指一種鰭片相對於鰭片長出的表面高出至少100um的鰭片結構。 In a preferred embodiment, the macroscopic fin structure refers to a fin structure in which the fin is at least 100 um higher than the surface from which the fin grows.

為了解決上述的技術問題,本發明第二實施例提供了一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一疏水層、及至少一鰭片,且至少一所述鰭片與至少一所述疏水層形成在所述散熱基底上,且至少一所述疏水層是形成在所述散熱基底上非所述鰭片的區域,並且至少一所述疏水層的表面對浸沒式冷卻液的接觸角>90°。 In order to solve the above-mentioned technical problems, the second embodiment of the present invention provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base, at least one hydrophobic layer, and at least one fin, and at least one of the fins and at least one hydrophobic layer is formed on the heat dissipation base, and at least one hydrophobic layer is formed on a region of the heat dissipation base other than the fins, and the surface of at least one hydrophobic layer is submerged The contact angle of the coolant is >90°.

在一優選實施例中,所述疏水層是以物理沉積方式、化學沉積方式、噴塗方式的其中之一形成在所述散熱基底上非所述鰭片的區域,且所述鰭片為針柱式鰭片、片狀鰭片、或上述兩者組成的複合式鰭片結構。 In a preferred embodiment, the hydrophobic layer is formed by one of physical deposition, chemical deposition, and spraying on the area of the heat dissipation base other than the fins, and the fins are pin posts Type fins, sheet fins, or a composite fin structure composed of the above two.

為了解決上述的技術問題,本發明第三實施例提供了一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一親水層、及至少一鰭片,且至少一所述鰭片形成在所述散熱基底上,且至少一所述親水層是形成在至少一所述鰭片上,且至少一所述親水層的表面對浸沒式冷卻液的接觸角介於0°到90°之間,並且至少一所述親水層與至少一所述鰭片、所述散熱基底為異質材料所形成。 In order to solve the above-mentioned technical problems, the third embodiment of the present invention provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base, at least one hydrophilic layer, and at least one fin, and at least one of the fins It is formed on the heat dissipation base, and at least one of the hydrophilic layers is formed on at least one of the fins, and the contact angle of the surface of at least one of the hydrophilic layers to the immersion cooling liquid is between 0° and 90°. Between, and at least one of the hydrophilic layer, at least one of the fins, and the heat dissipation base are formed of heterogeneous materials.

在一優選實施例中,所述親水層是以浸鍍方式形成在至少一所述鰭片上,且所述鰭片為針柱式鰭片、片狀鰭片、或上述兩者組成的複合式鰭片結構。 In a preferred embodiment, the hydrophilic layer is formed on at least one of the fins by immersion plating, and the fins are pin-pillar fins, sheet fins, or a composite of the two. fin structure.

為了解決上述的技術問題,本發明第四實施例提供了一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一疏水層、至少一親水層、及至少一鰭片,且至少一所述鰭片形成在所述散熱基底上,且至少一所述親水層形成在至少一所述鰭片上,且至少一所述疏水層形成在所 述散熱基底上非所述鰭片的區域,且至少一所述疏水層的表面對浸沒式冷卻液的接觸角>90°,並且至少一所述親水層的表面對浸沒式冷卻液的接觸角介於0°到90°之間。 In order to solve the above technical problems, the fourth embodiment of the present invention provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base, at least one hydrophobic layer, at least one hydrophilic layer, and at least one fin, and at least One of the fins is formed on the heat dissipation base, and at least one of the hydrophilic layers is formed on at least one of the fins, and at least one of the hydrophobic layers is formed on the The area of the heat dissipation base that is not the fin, and the contact angle of the surface of at least one of the hydrophobic layers to the immersion cooling liquid>90°, and the contact angle of the surface of at least one of the hydrophilic layer to the immersion cooling liquid between 0° and 90°.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。 In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

10:散熱基底 10: heat dissipation base

11:疏水層 11: Hydrophobic layer

12:親水層 12: Hydrophilic layer

20a:巨觀鰭片 20a: Giant Fins

20b:鰭片 20b: Fins

20c:鰭片 20c: fins

20d:鰭片 20d: fins

θ1:接觸角 θ1: contact angle

θ2:接觸角 θ2: contact angle

圖1為本發明第一實施例的結構側視示意圖。 Fig. 1 is a schematic side view of the structure of the first embodiment of the present invention.

圖2為本發明的結構表面的一局部對浸沒式冷卻液的接觸角的示意圖。 Fig. 2 is a schematic diagram of the contact angle of a part of the structure surface of the present invention to the immersion cooling liquid.

圖3為本發明的結構表面的另一局部對浸沒式冷卻液的接觸角的示意圖。 Fig. 3 is a schematic diagram of the contact angle of another part of the structured surface of the present invention to the immersion cooling liquid.

圖4為本發明第二實施例的結構側視示意圖。 Fig. 4 is a schematic side view of the structure of the second embodiment of the present invention.

圖5為本發明第三實施例的結構側視示意圖。 Fig. 5 is a schematic side view of the structure of the third embodiment of the present invention.

圖6為本發明第四實施例的結構側視示意圖。 Fig. 6 is a schematic side view of the structure of the fourth embodiment of the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或 者多個的組合。 The following are specific examples to illustrate the implementation methods disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used in this article may include any or all of the associated listed items depending on the actual situation. or multiple combinations.

[第一實施例] [first embodiment]

請參閱圖1所示,其為本發明的第一實施例,本發明實施例提供一種具巨觀鰭片結構之浸沒式散熱結構,可用於接觸發熱元件。如圖1所示,根據本發明實施例所提供的具巨觀鰭片結構之浸沒式散熱結構(以下簡稱浸沒式散熱結構),其具有至少兩種以上接觸角(contact angle)的表面。 Please refer to FIG. 1 , which is the first embodiment of the present invention. The embodiment of the present invention provides an immersion heat dissipation structure with a macroscopic fin structure, which can be used to contact heating elements. As shown in FIG. 1 , an immersion heat dissipation structure with a macroscopic fin structure (hereinafter referred to as an immersion heat dissipation structure) provided according to an embodiment of the present invention has at least two surfaces with more than two contact angles.

進一步說,本實施例的浸沒式散熱結構可以具有一散熱基底10及位於其上的一或多個巨觀鰭片20a,並可以浸沒於兩相浸沒式冷卻液(如電子氟化液)中。並且,本實施例的散熱基底10與巨觀鰭片20a可以是以金屬射出成型(Metal Injection Molding,MIM)方式一體地形成。在本實施例中,巨觀鰭片20a表示鰭片相對於鰭片長出的表面高出至少有100um。並且,巨觀鰭片20a也可是針柱式鰭片(pin-fin),或是片狀鰭片或其他類似的複合式鰭片結構。 Furthermore, the immersion heat dissipation structure of this embodiment can have a heat dissipation base 10 and one or more macroscopic fins 20a located thereon, and can be immersed in a two-phase immersion cooling liquid (such as electronic fluorinated liquid) . Moreover, the heat dissipation base 10 and the macroscopic fins 20 a of this embodiment may be integrally formed by Metal Injection Molding (MIM). In this embodiment, the macroscopic fin 20 a means that the fin is at least 100 um higher than the surface from which the fin grows. In addition, the macroscopic fins 20a may also be pin-fins, sheet fins or other similar composite fin structures.

值得一提的是,本實施例的浸沒式散熱結構至少有一局部的表面對浸沒式冷卻液的接觸角>90°,並且至少有另一局部的表面對浸沒式冷卻液的接觸角介於0°到90°之間。 It is worth mentioning that, in the immersion heat dissipation structure of this embodiment, at least one part of the surface has a contact angle to the immersion cooling liquid > 90°, and at least another part of the surface has a contact angle to the immersion cooling liquid between 0 ° to 90°.

進一步說,本實施例的散熱基底10的表面上非巨觀鰭片20a長出的平台區域形成至少有一疏水層11,且疏水層11的表面對浸沒式冷卻液的接觸角θ1>90°(例如圖2所示意),使得本實施例的浸沒式散熱結構至少有一局部的表面對浸沒式冷卻液的接觸角>90°。並且,本實施例的巨觀鰭片20a為多孔隙金屬鰭片,其表面對浸沒式冷卻液的接觸角θ2介於0°到90°之間(例如圖3所示意),使得本實施例的浸沒式散熱結構至少有另一局部的表面對浸沒式冷卻液的接觸角介於0°到90°之間。 Further speaking, at least one hydrophobic layer 11 is formed on the platform area where the non-macroscopic fins 20a grow on the surface of the heat dissipation base 10 of this embodiment, and the surface of the hydrophobic layer 11 has a contact angle θ1>90°( For example, as shown in FIG. 2 ), the contact angle of at least a part of the surface of the immersion heat dissipation structure of this embodiment to the immersion cooling liquid is >90°. Moreover, the macroscopic fin 20a of this embodiment is a porous metal fin, and the contact angle θ2 of its surface to the immersion cooling liquid is between 0° and 90° (such as shown in FIG. 3 ), so that this embodiment The immersion heat dissipation structure has at least another partial surface whose contact angle to the immersion cooling liquid is between 0° and 90°.

因此,本實施例的巨觀鰭片20a的表面對浸沒式冷卻液的接觸角介於0°到90°之間而具有臨界熱通量(CHF)高和氣泡的成核點少的特性,而散熱基底10的平台區域形成的疏水層11的表面對浸沒式冷卻液的接觸角>90°而具有氣泡的成核點多和臨界熱通量(CHF)低的特性。由於臨界熱通量(CHF)低,會容易導致核沸騰很快的轉成膜沸騰,形成氣膜造成空氣熱阻,但成核點多則可以造成熱傳係數(HTC)增加。由於巨觀鰭片20a是主要的散熱區域,其面積大,空孔數量多而成核區塊多,熱傳係數(HTC)本身就高,因此鰭片區域之外的平台區域,適合形成有疏水層11增加氣泡的成核點,即便是核沸騰轉成膜沸騰造成空氣熱阻,也可藉由熱傳導方式經由鰭片區域將熱傳導出去。 Therefore, the contact angle of the surface of the macroscopic fin 20a of this embodiment to the immersion cooling liquid is between 0° and 90°, and has the characteristics of high critical heat flux (CHF) and few nucleation points of air bubbles, On the other hand, the surface of the hydrophobic layer 11 formed in the platform area of the heat dissipation substrate 10 has a contact angle of >90° to the immersion cooling liquid and has the characteristics of many nucleation points of bubbles and low critical heat flux (CHF). Due to the low critical heat flux (CHF), it is easy to cause nucleate boiling to quickly turn into film boiling, forming a gas film and causing air thermal resistance, but more nucleation points can increase the heat transfer coefficient (HTC). Because the giant fin 20a is the main heat dissipation area, its area is large, the number of holes is large, the nucleation block is many, and the heat transfer coefficient (HTC) itself is high, so the platform area outside the fin area is suitable for forming an effective cooling area. The hydrophobic layer 11 increases the nucleation point of the air bubbles, and even if the nucleate boiling turns into film boiling and causes air thermal resistance, the heat can be conducted out through the fin area by heat conduction.

進一步說,本實施例的散熱基底10的平台區域的疏水層11可以是以物理沉積方式、化學沉積方式、或噴塗方式形成在散熱基底10的平台區域,且可以是透過材料本身或表面微觀結構來改變材料表面對浸沒式冷卻液的接觸角。 Furthermore, the hydrophobic layer 11 of the platform area of the heat dissipation base 10 in this embodiment can be formed on the platform area of the heat dissipation base 10 by physical deposition, chemical deposition, or spraying, and can be through the material itself or the surface microstructure To change the contact angle of the material surface to the immersion coolant.

[第二實施例] [Second Embodiment]

請參閱圖4所示,其為本發明的第二實施例,本實施例與第一實施例大致相同,本實施例提供一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底10、至少一疏水層11、及至少一鰭片20b,且鰭片20b與疏水層11是形成在散熱基底10上。本實施例的鰭片20b為親水性金屬材,且可以是針柱式鰭片(pin-fin),但也可以是片狀鰭片或其他類似的複合式鰭片結構。並且,本實施例的疏水層11是形成在散熱基底10上非鰭片20b的區域,例如非鰭片20b的周邊區域,並且疏水層11的表面對浸沒式冷卻液的接觸角>90°。 Please refer to FIG. 4, which is the second embodiment of the present invention. This embodiment is substantially the same as the first embodiment. This embodiment provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base 10, At least one hydrophobic layer 11 and at least one fin 20 b are formed on the heat dissipation base 10 . The fins 20b in this embodiment are made of hydrophilic metal, and may be pin-fins, but may also be sheet fins or other similar composite fin structures. Moreover, the hydrophobic layer 11 of this embodiment is formed on the non-fin 20b region on the heat dissipation substrate 10, such as the peripheral region of the non-fin 20b, and the contact angle of the surface of the hydrophobic layer 11 to the immersion cooling liquid is >90°.

[第三實施例] [Third embodiment]

請參閱圖5所示,其為本發明的第三實施例,本實施例與第一實施例大致相同,本實施例提供一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底10、至少一親水層12、及至少一鰭片20c,且鰭片20c形成在散熱基底10上,而親水層12形成在至少一鰭片20c上,且親水層12的表面對浸沒式冷卻液的接觸角介於0°到90°之間。 Please refer to FIG. 5, which is the third embodiment of the present invention. This embodiment is substantially the same as the first embodiment. This embodiment provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base 10, At least one hydrophilic layer 12, and at least one fin 20c, and the fin 20c is formed on the heat dissipation base 10, and the hydrophilic layer 12 is formed on at least one fin 20c, and the surface of the hydrophilic layer 12 is in contact with the immersion cooling liquid The angle is between 0° and 90°.

進一步說,本實施例的親水層12可以是以浸鍍方式形成在至少一鰭片20c上,且可以是透過材料本身或表面微觀結構來改變材料表面對浸沒式冷卻液的接觸角。值得注意的是,本實施例的親水層12與鰭片20c為異質材料,也與散熱基底10為異質材料,也就是說,本實施例的鰭片20c或散熱基底10可以是非親水性材料所形成。 Furthermore, the hydrophilic layer 12 of this embodiment can be formed on at least one fin 20c by immersion plating, and can change the contact angle of the material surface to the immersion cooling liquid through the material itself or the surface microstructure. It is worth noting that the hydrophilic layer 12 and the fins 20c of this embodiment are heterogeneous materials, and also the heat dissipation substrate 10 is a heterogeneous material, that is to say, the fins 20c or the heat dissipation substrate 10 of this embodiment can be made of non-hydrophilic materials. form.

[第四實施例] [Fourth embodiment]

請參閱圖6所示,其為本發明的第四實施例,本實施例與第一實施例大致相同,本實施例提供一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底10、至少一疏水層11、至少一親水層12、及至少一鰭片20d。本實施例的鰭片20d形成在散熱基底10上,親水層12形成在至少一鰭片20d上,而疏水層11形成在散熱基底10上非鰭片20d的區域。其中,疏水層11的表面對浸沒式冷卻液的接觸角>90°,而親水層12的表面對浸沒式冷卻液的接觸角介於0°到90°之間。 Please refer to FIG. 6, which is the fourth embodiment of the present invention. This embodiment is substantially the same as the first embodiment. This embodiment provides an immersion heat dissipation structure with a fin structure, which has a heat dissipation base 10, At least one hydrophobic layer 11, at least one hydrophilic layer 12, and at least one fin 20d. In this embodiment, the fins 20d are formed on the heat dissipation base 10 , the hydrophilic layer 12 is formed on at least one fin 20d , and the hydrophobic layer 11 is formed on the area of the heat dissipation base 10 that is not the fin 20d. Wherein, the contact angle of the surface of the hydrophobic layer 11 to the immersion cooling liquid is >90°, while the contact angle of the surface of the hydrophilic layer 12 to the immersion cooling liquid is between 0° and 90°.

本實施例的疏水層11可以是以物理沉積方式、化學沉積方式、或噴塗方式形成在散熱基底10上非鰭片20d的區域,而親水層12可以是以浸鍍方式形成在至少一鰭片20d上。 The hydrophobic layer 11 of this embodiment can be formed on the non-fin 20d area on the heat dissipation substrate 10 by physical deposition, chemical deposition, or spraying, and the hydrophilic layer 12 can be formed on at least one fin by immersion plating. 20d on.

綜合以上所述,本發明實施例提供的浸沒式散熱結構,其可以通過「具有至少兩種以上接觸角的表面」、「至少有一局部的所述表面對浸沒式冷卻液的接觸角>90°,並且至少有另一局部的所述表面對浸沒式 冷卻液的接觸角介於0°到90°之間」;「具有一散熱基底、至少一疏水層、及至少一鰭片」、「至少一所述鰭片與至少一所述疏水層形成在所述散熱基底上」、「至少一所述疏水層是形成在所述散熱基底上非所述鰭片的區域,並且至少一所述疏水層的表面對浸沒式冷卻液的接觸角>90°」;「具有一散熱基底、至少一親水層、及至少一鰭片」、「至少一所述親水層是形成在至少一所述鰭片上」、「至少一所述親水層的表面對浸沒式冷卻液的接觸角介於0°到90°之間,並且至少一所述親水層與至少一所述鰭片、所述散熱基底為異質材料所形成」;「具有一散熱基底、至少一疏水層、至少一親水層、及至少一鰭片」、「至少一所述鰭片形成在所述散熱基底上,且至少一所述親水層形成在至少一所述鰭片上,且至少一所述疏水層形成在所述散熱基底上非所述鰭片的區域」、「至少一所述疏水層的表面對浸沒式冷卻液的接觸角>90°,並且至少一所述親水層的表面對浸沒式冷卻液的接觸角介於0°到90°之間」的技術方案,使得本發明實施例提供的浸沒式散熱結構具有親疏水之特性,以使主要散熱區域具有臨界熱通量(CHF)高和成核點少之特性而輔助散熱區域具有成核點多和臨界熱通量(CHF)低的特性,據此更加提升浸沒式散熱效果。 Based on the above, the immersion heat dissipation structure provided by the embodiment of the present invention can pass "surfaces with at least two or more contact angles" and "at least one part of the surface has a contact angle of >90° to the immersion cooling liquid." , and there is at least one other partial of said surface to the submerged The contact angle of the cooling liquid is between 0° and 90°"; "has a heat dissipation base, at least one hydrophobic layer, and at least one fin", "at least one of the fins and at least one of the hydrophobic layer are formed on the On the heat dissipation base", "at least one of the hydrophobic layers is formed on the area of the heat dissipation base other than the fins, and the contact angle of the surface of at least one of the hydrophobic layers to the immersion cooling liquid is >90° "; "has a heat dissipation base, at least one hydrophilic layer, and at least one fin", "at least one of said hydrophilic layer is formed on at least one of said fins", "the surface of at least one of said hydrophilic layer is submerged The contact angle of the cooling liquid is between 0° and 90°, and at least one of the hydrophilic layer, at least one of the fins, and the heat dissipation base are formed of heterogeneous materials”; “has a heat dissipation base, at least one hydrophobic layer, at least one hydrophilic layer, and at least one fin", "at least one of the fins is formed on the heat dissipation base, and at least one of the hydrophilic layers is formed on at least one of the fins, and at least one of the The hydrophobic layer is formed on the area of the heat dissipation base other than the fins", "the contact angle of the surface of at least one of the hydrophobic layers to the immersion cooling liquid is >90°, and the surface of at least one of the hydrophilic layers is to the submerged The technical solution that the contact angle of the cooling liquid is between 0° and 90°" makes the submerged heat dissipation structure provided by the embodiment of the present invention have hydrophilic and hydrophobic characteristics, so that the main heat dissipation area has a critical heat flux (CHF) The auxiliary heat dissipation area has the characteristics of many nucleation points and low critical heat flux (CHF), which further enhances the immersion heat dissipation effect.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。 The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

10:散熱基底 10: heat dissipation base

11:疏水層 11: Hydrophobic layer

20a:巨觀鰭片 20a: Giant Fins

Claims (7)

一種具巨觀鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一疏水層、及至少一巨觀鰭片,且至少一所述巨觀鰭片與至少一所述疏水層用以浸沒在浸沒式冷卻液中並分別形成在所述散熱基底上,且至少一所述疏水層是形成在所述散熱基底上非所述巨觀鰭片的區域,並且至少一所述疏水層的表面對所述浸沒式冷卻液的接觸角>90°,藉以使至少一所述巨觀鰭片為主要散熱區域而具有臨界熱通量高之特性以強化沸騰傳熱,且使形成有所述疏水層之區域為輔助散熱區域而能用以增加氣泡成核點並促進氣泡脫離。 An immersion heat dissipation structure with a macroscopic fin structure, which has a heat dissipation base, at least one hydrophobic layer, and at least one macroscopic fin, and at least one of the macroscopic fins and at least one of the hydrophobic layer are used for Submerged in the immersion cooling liquid and formed on the heat dissipation base respectively, and at least one of the hydrophobic layers is formed on the area of the heat dissipation base that is not the macroscopic fin, and at least one of the hydrophobic layers The contact angle of the surface to the immersion cooling liquid is >90°, so that at least one of the macroscopic fins is the main heat dissipation area and has the characteristics of high critical heat flux to enhance boiling heat transfer, and the formation of the The area of the hydrophobic layer is an auxiliary heat dissipation area and can be used to increase the nucleation points of the bubbles and promote the detachment of the bubbles. 如請求項1所述的具巨觀鰭片結構之浸沒式散熱結構,其中,所述疏水層是以物理沉積方式、化學沉積方式、噴塗方式的其中之一形成在所述散熱基底上非所述巨觀鰭片的區域,且所述巨觀鰭片為針柱式鰭片、片狀鰭片、或上述兩者組成的複合式鰭片結構。 The submerged heat dissipation structure with a macroscopic fin structure according to claim 1, wherein the hydrophobic layer is formed on the heat dissipation substrate by one of physical deposition, chemical deposition, and spraying. The region of the macroscopic fins, and the macroscopic fins are pin-pillar fins, sheet fins, or a composite fin structure composed of the above two. 一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一親水層、及至少一鰭片,至少一所述親水層及至少一所述鰭片用以浸沒在浸沒式冷卻液中,且至少一所述鰭片形成在所述散熱基底上,且至少一所述親水層是形成在至少一所述鰭片上,且至少一所述親水層的表面對所述浸沒式冷卻液的接觸角介於0°到90°之間,並且至少一所述親水層的表面對所述浸沒式冷卻液的接觸角小於至少一所述鰭片和所述散熱基底對所述浸沒式冷卻液的接觸角,藉以使形成有所述親水層的所述鰭片為主要散熱區域而具有臨界熱通量高之特性以強化沸騰傳熱。 An immersion heat dissipation structure with a fin structure, which has a heat dissipation base, at least one hydrophilic layer, and at least one fin, at least one of the hydrophilic layer and at least one of the fins are used for immersion in the immersion cooling liquid , and at least one of the fins is formed on the heat dissipation base, and at least one of the hydrophilic layers is formed on at least one of the fins, and the surface of at least one of the hydrophilic layers is opposite to the immersion cooling liquid The contact angle is between 0° and 90°, and the contact angle of at least one surface of the hydrophilic layer to the immersion cooling liquid is smaller than that of at least one of the fins and the heat dissipation base to the immersion cooling liquid contact angle, so that the fins formed with the hydrophilic layer are the main heat dissipation area and have the characteristics of high critical heat flux to enhance boiling heat transfer. 如請求項3所述的具鰭片結構之浸沒式散熱結構,其中,所述親水層是以浸鍍方式形成在至少一所述鰭片上,且所述鰭片為針柱式鰭片、片狀鰭片、或上述兩者組成的複合式鰭片結構。 The submerged heat dissipation structure with fin structure according to claim 3, wherein the hydrophilic layer is formed on at least one of the fins by immersion plating, and the fins are pin-pillar fins, fins shaped fins, or a composite fin structure composed of the above two. 一種具鰭片結構之浸沒式散熱結構,其具有一散熱基底、至少一疏水層、至少一親水層、及至少一鰭片,至少一所述疏水層、至少一所述親水層、及至少一所述鰭片用以浸沒在浸沒式冷卻液中,且至少一所述鰭片形成在所述散熱基底上,且至少一所述親水層形成在至少一所述鰭片上,且至少一所述疏水層形成在所述散熱基底上非所述鰭片的區域,且至少一所述疏水層的表面對所述浸沒式冷卻液的接觸角>90°,並且至少一所述親水層的表面對所述浸沒式冷卻液的接觸角介於0°到90°之間,藉以使形成有所述親水層的所述鰭片為主要散熱區域而具有臨界熱通量高之特性以強化沸騰傳熱,且使形成有所述疏水層之區域為輔助散熱區域而能用以增加氣泡成核點並促進氣泡脫離。 A submerged heat dissipation structure with a fin structure, which has a heat dissipation base, at least one hydrophobic layer, at least one hydrophilic layer, and at least one fin, at least one hydrophobic layer, at least one hydrophilic layer, and at least one The fins are used to be immersed in the immersion cooling liquid, and at least one of the fins is formed on the heat dissipation base, and at least one of the hydrophilic layers is formed on at least one of the fins, and at least one of the fins is formed on the heat dissipation base. The hydrophobic layer is formed on the area of the heat dissipation base other than the fins, and the contact angle of at least one surface of the hydrophobic layer to the immersion cooling liquid is >90°, and the surface of at least one hydrophilic layer is opposite to The contact angle of the immersion cooling liquid is between 0° and 90°, so that the fins formed with the hydrophilic layer are the main heat dissipation areas and have the characteristics of high critical heat flux to enhance boiling heat transfer , and make the area where the hydrophobic layer is formed an auxiliary heat dissipation area, which can be used to increase bubble nucleation points and promote bubble detachment. 如請求項5所述的具鰭片結構之浸沒式散熱結構,其中,所述疏水層是以物理沉積方式、化學沉積方式、噴塗方式的其中之一形成在所述散熱基底上非所述鰭片的區域,所述親水層是以浸鍍方式形成在至少一所述鰭片上。 The submerged heat dissipation structure with fin structure according to claim 5, wherein the hydrophobic layer is formed on the heat dissipation base other than the fins by one of physical deposition, chemical deposition and spraying In the area of the sheet, the hydrophilic layer is formed on at least one of the fins by immersion plating. 如請求項5所述的具鰭片結構之浸沒式散熱結構,其中,所述鰭片為針柱式鰭片、片狀鰭片、或上述兩者組成的複合式鰭片結構。 The submerged heat dissipation structure with a fin structure according to claim 5, wherein the fins are pin-pillar fins, sheet-like fins, or a composite fin structure composed of the above two.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200912238A (en) * 2007-09-07 2009-03-16 Foxconn Tech Co Ltd Micro liquid cooling device and droplet generator thereof
CN107565827A (en) * 2016-06-30 2018-01-09 福特全球技术公司 The coolant flow carried out using coating material is distributed
CN210321301U (en) * 2019-05-05 2020-04-14 刘含春 Strip heat exchanger

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200912238A (en) * 2007-09-07 2009-03-16 Foxconn Tech Co Ltd Micro liquid cooling device and droplet generator thereof
CN107565827A (en) * 2016-06-30 2018-01-09 福特全球技术公司 The coolant flow carried out using coating material is distributed
CN210321301U (en) * 2019-05-05 2020-04-14 刘含春 Strip heat exchanger

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