TWI553425B - Gui device for pattern drawing device, pattern drawing system, method for updating job ticket and recording medium - Google Patents

Description

Graphic user interface device for pattern drawing device, pattern drawing system, work order update method, and recording medium

The present invention relates to a graphical user interface device (GUI device) used in a pattern drawing device that draws a pattern such as a wiring pattern on a substrate on which a photoresist film is formed.

Conventionally, various substrates such as a semiconductor substrate, a printed wiring board, and a glass substrate have been patterned by irradiating light through the mask. In recent years, in order to cope with the formation of various patterns, a technique is employed in which a spatially modulated light is directly irradiated onto a substrate without using a photomask, and a pattern is drawn to perform exposure processing.

The pattern drawing device that performs the exposure processing as described above is called a direct drawing device. For example, Patent Document 1 describes a graphic user interface device used in a direct drawing device (for example, paragraph 0043 of Patent Document 1 and FIG. 1). ). The graphical user interface device is used when updating the work notice. The work notification is a series of raster data that is used to generate RIP (Raster Image Processing) design data in a vector form designed by CAD (Computer Aided Design). The author.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-77718

When a work order is updated as the design information is updated, there are a number of work notices relating to the design information, which may result in updating the design information for work notifications that do not need to be updated. In order to avoid this problem, it is also possible to consider the corresponding method of making a new work notice when updating the design data, but according to this method, the number of work notices will be increased. In order to reduce the number of work notices, consider the corresponding method of eliminating the useless work notice, but there will be other problems that increase the work of the cut processing.

The object of the present invention is to provide a graphic user for a pattern drawing device that can perform an update job by simply selecting a desired work ticket when the work notice is updated as the design data is updated as the above is described. Interface device, pattern drawing system, work order update method, and recording medium.

A first aspect of the invention is a graphical user interface device for a pattern drawing device, characterized in that it is a user who updates a work order defining a series of processing data from a design data generation drawing, and includes: a display portion, a screen; an operation unit that operates the screen of the display unit; and a display control unit that controls display of the screen of the display unit; and the display control unit includes: a design data information input unit that is used to input The input unit for updating the information of the updated design information is displayed on the above screen; the work notice information display unit displays information about the work notice relating to the information input to the design data information input unit by the operation unit. In the above-mentioned screen, the work notice emphasizing display unit is notified of the work notification for replacing the design data with the updated design data as information on the work notice displayed by the work notice information display unit. Information on the work order selected by the above operation unit And the replacement instruction input display unit is configured to replace the design data with the work notification input corresponding to the information highlighted on the screen by the work notice highlighting display unit. The input unit for updating the instruction of the design data described above is displayed on the screen.

According to a second aspect of the invention, the display control unit further includes: an update candidate display unit that is based on a work notification corresponding to the information highlighted on the screen by the work notice highlighting display unit; Information on the updateable design information, that is, the update candidate design data, is displayed on the above screen.

According to a third aspect of the invention, the display control unit further includes: a lock information input display unit that displays a lock information input unit for locking the update candidate design data on the screen.

The fourth invention (pattern drawing system) includes: a graphic user interface device for a pattern drawing device according to any one of the first to third inventions; and a pattern drawing device based on the user interface by using the graphic The work notification updated by the device draws the pattern on the substrate by updating the drawing data generated by the design data.

According to a fourth aspect of the invention, the pattern drawing device is a direct drawing device for drawing a pattern by scanning a spatially modulated light beam on a photoresist film formed on a substrate.

The sixth invention is a work notice update method, which is a work notice for updating a series of processing data from a design data generation drawing, and includes: an update design data input step, which is displayed on the graphic user interface device. The design data input unit of the screen of the display unit inputs information about the updated updated design data by the operation unit provided in the graphical user interface device; the work order selection step is based on And displaying, by the operation unit, a work notice for replacing the design data with the updated design data; and the replacing step, by displaying the information input by the step of updating the design data and displaying the information corresponding to the information of the screen; The work notification is selected by the above operation notice selection step, and the above design is performed by the operation unit The data is replaced with the above updated design information.

A seventh aspect of the invention is a recording medium on which a program is recorded, characterized in that it is a graphic user interface device for pattern drawing device used when updating a work order for defining a series of processing data from a design data generation drawing data. The recording medium of the computer readable program, and the computer functions as follows: the design data information input unit display function is displayed on the display unit of the graphic user interface device, and is displayed for inputting about The design information information input unit of the updated update design information; the work notice information display function is input to the design data information input unit by the operation unit provided by the graphic user interface device; The information of the work notice of the information is displayed on the above screen; the work notice emphasizes the display function, which is related to the information of the work notice displayed on the screen by the above-mentioned work notice information display function, Replaced by the design data selected by the above operation unit into the above updated design The work notice of the data is highlighted on the screen by the information of the work notice selected by the operation unit; and the replacement instruction input display function is used to emphasize the display with the emphasis on the display function by the above work notice An input unit for inputting an instruction to replace the design data with the updated design data on the work notification corresponding to the information on the screen is displayed on the screen.

According to a seventh aspect of the present invention, in the seventh aspect of the invention, the update candidate display function is further provided by the computer, and the update candidate display function is based on a work notice corresponding to the information displayed on the screen by the work notice highlight display function. Information on the updateable design information, ie, update candidate design information, is displayed on the screen.

According to a ninth aspect of the invention, the computer further provides a lock information input display function for displaying a lock information input unit for locking the update candidate design data on the screen.

According to any one of the first invention to the ninth invention, it is possible to provide a design The graphical user interface device, the pattern drawing system, the work order update method, and the recording medium for the pattern drawing device that simply selects the required work notice and updates the work order when updating the work order.

1‧‧‧Design data production device

2‧‧‧Graphic user interface device

3‧‧‧Image processing device

4‧‧‧patterning system

5‧‧‧ computer

10‧‧‧stage

10a‧‧‧Part 1

10b‧‧‧Part 2

20‧‧‧stage moving mechanism

21‧‧‧Rotating mechanism

22‧‧‧Support board

23‧‧‧Sub Scanning Mechanism

23a‧‧‧Linear motor

23b‧‧‧rails

24‧‧‧floor

25‧‧‧Main scanning mechanism

25a‧‧‧linear motor

25b‧‧‧rail

30‧‧‧ position parameter measuring mechanism

31‧‧‧Laser light exit

32‧‧‧ Beam splitter

33‧‧‧beam bending machine

34‧‧‧1st interferometer

35‧‧‧2nd interferometer

50‧‧‧ Optical head

53‧‧‧Lighting optical system

54‧‧‧Laser oscillator

55‧‧‧Laser drive

60‧‧‧Aligning camera

70‧‧‧Control Department

71‧‧‧ computer

72‧‧‧ memory

73‧‧‧Raster Processing Department

75‧‧‧Data Generation Department

76‧‧‧Wiring pattern information

77‧‧‧Grating data

81‧‧‧ Type Input Department

82‧‧‧Information Name Input Department

83‧‧‧Notice list display

84‧‧‧After Input Department

85‧‧‧Before input department

86‧‧‧Upper Input Department

87‧‧‧Under Input Department

88‧‧‧Search button

89‧‧‧Type Change Department

90‧‧‧History Display Department

91‧‧‧Update button

92‧‧‧Confirmation display

93‧‧‧OK button

94‧‧‧Cancel button

95‧‧‧Substrate shape

96‧‧‧ wafer (block)

97‧‧‧Area

100‧‧‧Direct drawing device (pattern drawing device)

101‧‧‧ ontology framework

102‧‧‧ Cover

110‧‧‧Substrate storage box

120‧‧‧Transfer robot

130‧‧‧Abutment

140‧‧‧ head support

141‧‧‧foot members

142‧‧‧ foot members

143‧‧ ‧ beam components

144‧‧‧ beam members

172‧‧‧ box

200‧‧‧Display Department

230‧‧‧CPU

231‧‧‧ROM

232‧‧‧ memory

233‧‧‧Media Drive

234‧‧‧Operation Department

235‧‧‧ bus line

240‧‧‧Display Control Department

241‧‧‧Design Information Information Input Department

242‧‧‧Work Notice Information Display Department

243‧‧‧ work notice highlights the display department

244‧‧‧ Replacement instruction input display section

245‧‧‧Update candidate display

246‧‧‧Lock information input display

247‧‧‧Layout display department

400‧‧‧Graphic drawing system

511‧‧‧Space light modulator

512‧‧‧Light modulation unit

513‧‧‧Drawing Signal Processing Department

514‧‧‧Exposure Control Department

515‧‧‧Drawing Control Department

516‧‧‧Mirror

517‧‧‧Projection optical system

518‧‧‧ lens

519‧‧‧ lens

520‧‧‧ lens

521‧‧‧shading plate (aperture member)

522‧‧‧ lens

523‧‧‧ zoom lens

524‧‧‧focus lens

530a‧‧‧ movable belt

531b‧‧‧Fixed tape

535‧‧‧With the collection of pairs

536‧‧‧Drive circuit unit

540‧‧ ‧ Telescope

541‧‧‧ Concentrating lens

542‧‧‧Attenuator

543‧‧ ‧focus lens

D0‧‧‧Design materials

D1‧‧‧ updated design information

D2‧‧‧Update design information

JT‧‧‧ work notice

M‧‧ Record Media

N‧‧‧Network

P‧‧‧ program

S1~S5‧‧‧Steps

S10~S40‧‧‧Steps

S210~S240‧‧‧Steps

W‧‧‧Substrate

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Θ‧‧‧ direction

θ1‧‧‧Maximum angle

θ2‧‧‧Maximum angle

Figure 1 is a diagram showing a graphical depiction system including a patterning system.

Figure 2 is a block diagram showing the hardware configuration of the graphical user interface device.

Figure 3 is a block diagram showing the functional composition of the graphical user interface device.

Figure 4 is a flow chart showing the flow from the design data update to the depiction execution.

Figure 5 is a flow chart showing the flow of an update operation of a work order.

Fig. 6 is a diagram for explaining an initial screen.

Figure 7 is a diagram showing the graphical user interface screen when the work order is selected.

Figure 8 is a diagram showing the graphical user interface screen when the work order is updated.

Figure 9 is a side elevational view of the device directly depicted.

Figure 10 is a top plan view of the device directly depicted.

Fig. 11 is a view showing an illumination optical system and a projection optical system.

Figure 12 is a diagram showing an enlarged view of a spatial light modulator.

Fig. 13 is a block diagram showing the connection structure between the respective portions of the direct drawing device and the control unit.

Fig. 14 is a block diagram showing a control unit for controlling the drawing operation.

Figure 15 is a flow chart showing the action of the device directly.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<The overall composition of the system>

1 is a diagram showing a graphics rendering system 400 including a pattern rendering system 4 in accordance with an embodiment of the present invention. The graphic drawing system 400 is equivalent to a circuit pattern by selectively exposing, for example, a photoresist film on a circular semiconductor substrate (hereinafter simply referred to as a "substrate"). The graphic is directly depicted in the system of the photoresist film.

The graphic drawing system 400 includes a design data creating device 1, an image processing device 3, and a direct drawing device 100 that are connected to each other via a network N such as a LAN. The image processing device 3 includes a graphic user interface device 2.

The design data creation device 1 is a device that creates and compiles data on a pattern region to be drawn on a substrate to be drawn. Specifically, the data is produced as graphic data described in a vector form by CAD (Computer Aided Design). The design data D0 created by the design data creation device 1 is transmitted to the image processing device 3 and the direct drawing device 100 via the network N. Further, the design data creating apparatus 1 creates the updated design data D1 (D2...) by changing the shape or the line width size of the pattern indicated by the initial design data D0. The design data creating apparatus 1 also has a case where the updated design data in which the update history already exists is updated to create the updated design data. In addition, in the present specification, the case where the design data D0 or the updated design data D1 is simply referred to as "design data" is also referred to. The design data D0, D1, and the like created by the design data creation device 1 are transmitted to the image processing device 3 and the direct drawing device 100 via the network N, respectively.

The image processing apparatus 3 creates a work order JT for the design material D0 or the update design material D1 transmitted via the network N. The work notification JT defines a series of actor for generating RUR (Raster Image Processing), such as design data D0 or updated design data D1, to generate raster data. For example, when RIP is expanded, the size of the line width of the pattern is changed to a thickening process or a thinning process, and when the drawing data is generated, there are a plurality of RIP expansion processes that differ depending on the processing. By any one of the plurality of RIP expansion processes, whether or not the RIP development of the design data D0 or the updated design data D1 is associated is established, and the work order notification JT is defined. The work notification JT created by the image processing device 3 is transmitted to the direct drawing device 100 via the network N.

<Composition of Graphic User Interface Device>

The graphic user interface device 2 is provided in the image processing device 3 and functions as a graphical user interface for the operator. 2 is a block diagram showing the hardware configuration of the graphical user interface device 2.

The graphic user interface device 2 is, for example, a computer 5, and includes a CPU 230, a ROM 231, a memory 232, a media drive 233, a display unit 200, an operation unit 234, and the like. The hard systems are electrically connected by bus bars 235, respectively.

The CPU 230 controls the hardware components based on the program stored in the ROM 231 (or the program read by the media driver 233) P to realize the function of the computer 5 (the graphic user interface device 2). The program P can be read by the computer 5, and the computer 5 can be used for each function.

The ROM 231 is a memory device for storing the program P or the data necessary for the control of the graphic user interface device 2 in advance. The memory 232 is a memory device that can be read and written, and temporarily stores data generated by the arithmetic processing performed by the CPU 230. The memory 232 includes SRAM, DRAM, and the like. The memory 232 stores information about the design data D0, the updated design data D1, and the work notice JT.

The media drive 233 has a function of reading information stored in the recording medium M. The recording medium M is a portable recording medium such as a CD-ROM, a DVD (Digital Versatile Disk), or a flexible disk. For example, when the recording medium M has a program P recorded in advance, the computer 5 reads the program P through the recording medium M.

The display unit 200 includes a display such as a color LCD, and displays an image, a variety of materials, an operation state, and the like for the operation of the graphic user interface on the screen.

The operation unit 234 is provided with a keyboard and a mouse input device, and accepts user operations such as input of commands or various materials. Using the operation unit 234, the operator inputs various information to the graphic user interface operation screen displayed on the display unit 200, and operates the screen of the display unit 200.

3 is a block diagram showing the functional configuration of the graphical user interface device 2. FIG. 3 is a block diagram showing the hardware composition of the graphical user interface device 2 by the process shown in FIG. 2 above. Each function of the formula P can be realized in various forms by a combination of hardware and software.

As shown in FIG. 3, the graphic user interface device 2 includes a display control unit 240. The display control unit 240 controls the screen display person of the display unit 200, and includes a design material information input unit 241, a work notice information display unit 242, a work order highlight display unit 243, a replacement instruction input display unit 244, and an update candidate display unit. 245. The information input display unit 246 and the layout display unit 247 are locked. The display control unit 240 realizes the functions of the respective units by the operation of the display unit 200 by the operator using the operation unit 234, and the details thereof will be described later in the description of the operation.

<Overall process from design data update>

Figure 4 is a flow chart showing the flow from the design data update to the depiction execution. First, in step S10, when updating the design data D0, the operator uses the design material creation device 1 to correct the design data D0, and creates the update design data D1 or the like (design data update step). There are also cases where the design information is updated and updated to create updated design materials as described above. The created update design data D1 and the like are transmitted from the design material creation device 1 to the image processing device 3 and the direct drawing device 100 via the network N.

Next, in the work order update step of step S20, the operator selects the work notice JT sent by the application to the updated design material D1 of the image processing apparatus 3, and the design of the work notice, using the graphical user interface device 2. The work order is replaced with the updated design data D1 and the like, and the work notice JT is updated. The details of the update step of the work order will be described later. The updated work order JT is transmitted from the image processing apparatus 3 to the direct drawing apparatus 100 via the network N.

Next, in the drawing data generating step of step S30, the direct drawing device 100 generates drawing data by performing RIP development processing or the like defined by the execution work order J1 such as the update design data D1. Using the drawing data, the direct drawing device 100 performs a drawing operation on the substrate that is the object to be drawn (step S40 depicts the execution step). About the direct drawing device 100 The configuration and operation will be described later. Alternatively, the drawing data generating step of step S30 may be executed by the image processing apparatus 3 without directly drawing the apparatus 100. In this case, the drawing material generated by the image processing apparatus 3 is transmitted to the direct drawing apparatus 100 via the network N.

<Update job of work notice>

The details of the work order update step (step S20) shown in Fig. 4 described above will be described with reference to Fig. 5 . Figure 5 is a flow chart showing the flow of an update operation of a work order.

First, in step S210 shown in FIG. 5, the graphic user interface device 2 displays an initial screen (initial screen display step) on the screen of the display unit 200. The initial screen is, for example, the screen shown in FIG. As shown in FIG. 6, the initial screen inclusion type input unit 81, the material name input unit 82, the notice list display unit 83, the After input unit 84, the Before input unit 85, the Upper input unit 86, the Under input unit 87, and Search (search) The button 88, the type changing unit 89, the history display unit 90, the update button 91, the confirmation display unit 92, the OK (confirmation) button 93, the Cancel button 94, and the like.

The initial screen is displayed by each functional unit of the display control unit 240 shown in FIG. 3. For example, by the function of the design material information input unit 241, the type input unit 81 and the material name input unit 82 of FIG. 6 are displayed on the screen. . Further, the notice list display unit 83 displays the notice list display unit 83 on the screen by the function of the work order information display unit 242.

Moreover, the update button 91, the OK button 93, and the Cancel button 94, which are input means, are displayed on the screen by the function of the replacement instruction input display unit 244, and the history display unit 90 is displayed on the screen by the update candidate display unit 245. Further, by the function of the lock information input display unit 246, the input unit, that is, the Before input unit 84, the Before input unit 85, the Upper input unit 86, the Under input unit 87, and the Search button 88 are displayed on the screen, and the layout display unit 247 is displayed on the screen. The function confirms that the display unit 92 is displayed on the screen.

Returning to FIG. 5, the next step, the update design data input step of step S220, will be described. In this step, the operator inputs the type of the pre-update design data D0 or the update design data D1 (CAD) to the type input unit 81 of the initial screen using the operation unit 234. Data Type: CAD data type). Alternatively, input of this type can be omitted. Then, the operator inputs the material name (CAD Data Name) of the design data D0 or the design update data D1 to the material name input unit 82 using the operation unit 234. In this case, when the type input unit 81 inputs a type, the menu is displayed in conjunction with the data name input unit 82 to display a list of the data names belonging to the type entered, so that the desired material name can be selected from the list. Make your input. The above information is one of the information on the updated design data D1 and the like.

FIG. 7 shows a state in which the type input unit 81 inputs the type "A" and the material name input unit 82 inputs the material name "AAA.gds". When the material name "AAA.gds" is input to the material name input unit 82, a list of the work notifications JT of the material name (Ticket (Referenced CAD Data) List: notice list (the related CAD data) list) is entered. The notification list display unit 83 is displayed by the function of the work order information display unit 242. In other words, the notice list display unit 83 displays a list of work notices JT that define a series of operations such as RIP development such as design data to which the above-mentioned material names are attached.

In Figure 7, three work notices "AA1", "AA2", and "AA3" are displayed. One column in the list indicates one work notice JT. The first line of the list shows the ticket name (Ticket Name). The chip layout of the second row indicates whether or not the layout operation of changing the pattern shape or the line width in the wafer by the image processing apparatus 3 has been performed, and the case where "True" is displayed as shown in FIG. operation. The case where the layout job is not performed is displayed as "False".

Similarly, the substrate layout (Wafer Layout) of the third row indicates whether or not the layout operation of determining the arrangement positions of the plurality of wafers with respect to the substrate to be drawn by the image processing apparatus 3 has been performed, and is displayed as "True" as shown in FIG. The situation indicates that a layout job has been performed. The case where the layout job is not performed is displayed as "False".

The RIP name of the 4th line is displayed. The RIP name is marked according to the type of RIP development processing. In the example of Figure 7, the notice of the first column is named "AA1" work notice JT In the definition, the RIP development processing system in which the RIP name is marked as "AA1.gds-123" is executed on the design data D0 or the updated design data D1. Similarly, in the work order JT of "AA2" in the second column, it is defined as the RIP expansion process of "AA2.gds-345", and the work notice JT of the "AA3" of the third column is defined as execution. RIP expansion processing of AA3.gds-678".

The plurality of RIP expansion processes described above are, for example, RIP expansion processes in which the pattern line width is thickened or thinned. In other words, a plurality of work notices JT (AA1, AA2, AA3) define different RIP expansion processes for the same design data D0 or updated design data D1.

The modified day of the fifth line shows the date on which the work order JT was updated. Further, the item defined by the work order JT is not limited to the item shown in FIG. 7, and may include, for example, the name of the operator who performs the update operation as the item.

As shown in FIG. 7, the notice list display unit 83 displays a list of work notices JT related to the information on the updated update design data D1, etc., by the work order information display unit 242. Simply select the required work order JT that needs to be updated as the design information is updated.

Returning to Fig. 5, in the work order selection step of step S230, the operator selects the work notice to be updated from the list of work notices displayed on the screen. In FIG. 7, the operator selects the work notification JT of the second column from the work notification JT (three work notices JT) corresponding to the information displayed on the notice list display unit 83 by the operation unit 234. AA2" is the status of the work order JT as the update target. In FIG. 7, the second column is hatched, and in the actual screen, the function of the display unit 243 is emphasized by the work order, for example, it is thicker than other lists, and the highlight is displayed to indicate the selected work notification. A single JT information is used to achieve an emphasis display. Further, the method of emphasizing the display may be any method as long as it is a method for visually distinguishing between the information on the selected work notice and the information on the unselected work notice JT on the screen.

When the work notification JT of the update target is selected, the update candidate display unit 245 functions in conjunction with the selection operation. Thereby, the history display unit 90 of FIG. 7 displays the history of the design information of the selected work order JT as information on the updateable design information, that is, the update candidate design data, on the screen. In the example of FIG. 7, four update histories (update candidate design data) are displayed in four columns, and the design data of the data name "AAA.gds" is in the work notice JT, as shown on the update date (Date). The date is updated 4 times and is marked with a serial number (Serial No.).

Here, the initial design data D0 is set to the design data "AAA.gds" with the serial number "1", and the updated design data D1 after the initial update is set to the design data "AAA.gds" with the serial number "2". Then, the serial number of the updated design data D2 is set to "3", and the serial number of the updated design data D3 is set to "4".

In conjunction with the selection operation of the work order JT in the notice list display unit 83, the information on the design information of the current work order JT is emphasized by the history display unit 90 by the function of the update candidate display unit 245. display. In the example of FIG. 7, the design data indicating the current status of the selected work order JT is displayed as the update design data D1 of the serial number "2" displayed in the second column of the history display unit 90. In FIG. 7, the second column is hatched, and in the actual screen, for example, it is thicker than other lists, and the highlighting is emphasized to highlight information about the current design data. Since the information on the current design data is highlighted by the function of the update candidate display unit 245, the operator can easily grasp the current design information.

As mentioned above, since the design information (pre-update design data) of the work order JT is the updated design data D1 with the serial number "2", the update candidate design data is other design data, that is, the serial number is "1". Any of the design data D0, the updated design data D2 whose serial number is "3", and the updated design data D3 whose serial number is "4".

Further, the layout display unit 247 functions in conjunction with the selection operation of the work order JT in the notice list display unit 83. Thereby, as shown in Figure 7, will be based on the work notice An image of the wafer layout in which JT is patterned is displayed on the confirmation display unit 92. The layout image includes a substrate shape 95 that is a circular object in which the object is drawn, and a plurality of wafers (blocks) 96 that are laid out into the substrate.

The state in which the wafer 96 is laid out in the region 97 in which the plurality of wafers 96 are completely contained in the substrate is shown in FIG. Further, the pattern in the wafer 96 can be displayed by enlarging the display wafer 96 by the function of the layout display unit 247. By confirming the image displayed on the confirmation display unit 92, the operator can easily grasp the pattern shape of the wafer 96 or the layout of the wafer 96 patterned according to the work order JT.

Next, the replacement step of step S240 shown in FIG. 5 will be described. In the example shown in FIG. 7, in the work notice JT of "AA2" in the second column selected by the work order list display unit 83, the current design data is highlighted by the history display unit 90. "AAA.gds" of "2", the design data is equivalent to the update design data D1 as described above.

When the update design data D1 is replaced by "AAA.gds" corresponding to the update design data D3 whose serial number is "4", as shown in FIG. 8, the operator selects the history display unit 90 using the operation unit 234. The serial number of the fourth column is "AAA.gds" of "4". The selected fourth column is hatched in FIG. 8. In the actual screen, by updating the function of the candidate display unit 245, for example, it is thicker than other lists, and the highlight is displayed.

In this state, the operator clicks the update button 91 (Replace CAD Data) by the mouse or the like of the operation unit 234, and inputs an instruction by replacing the function of the instruction input display unit 244. As a result, the design information of the work order JT of "AA2" is replaced with the updated design data D3 from the updated design data D1. In conjunction with the replacement operation, the content displayed on the confirmation display unit 92 is switched to the content based on the update design data D3, for example, the display content in the wafer 96 is changed.

After confirming the contents of the confirmation display unit 92, etc., the operator determines the replacement of the design data. In this case, the mouse button of the operation unit 234 or the like clicks the OK button 93 to input an instruction, and the replacement step is completed, thereby ending the update operation of the work order JT. When the replacement of a certain design data is not determined and the replacement of the other design data is studied, the operator inputs the instruction by clicking the Cancel button 94 by the mouse of the operation unit 234, and then returns to the selection display on the history display unit 90. The operation of other serial number design materials (AAA.gds).

The function of the lock information input display unit 246 shown in FIG. 3 is displayed on the input unit (lock information input unit) of the screen, that is, the After input unit 84, the Before input unit 85, the Upper input unit 86, the Under input unit 87, and the Search. The button 88 is used when the design information of the update candidate displayed on the history display unit 90 is locked. For example, when the check box of the After input unit 84 is checked, and after the date is input, when the Search button 88 is clicked, only the information on the updated design data updated after the date is displayed on the history display unit 90. Similarly, when the date is input in the Before input unit 85, only the information on the updated design data updated before the date is displayed on the history display unit 90. When the date is input to both the After input unit 84 and the Before input unit 85, only the information on the updated design data updated in the specific period is displayed on the history display unit 90.

Further, for example, when the check box of the Upper input unit 86 is checked, and after the serial number is input, when the Search button 88 is clicked, only information on the updated design data having the serial number or higher is displayed on the history display unit 90. . Similarly, when the serial number is input to the Under input unit 87, only the information on the updated design data having the serial number below the serial number is displayed on the history display unit 90. When the serial number is input to both the upper input unit 86 and the Under input unit 87, only the information on the updated design data having the serial number within the specific number is displayed on the history display unit 90. If there is such a function of the lock information input display unit 246, when there are a plurality of replaceable updated design materials, the number can be locked and reduced, so that the update operation can be performed efficiently.

The type changing unit 89 shown in FIG. 6 and the like is a case where the type of the design data D0 or the updated design data D1 input to the material name input unit 82 is changed or the type name is not set. In the case of the case where the type name is set, the type name or the initial type name after the change is input.

<Composition of direct drawing device>

Next, the configuration of the direct drawing device 100 will be described with reference to FIGS. 9 and 10 . Fig. 9 is a side view of the direct drawing device 100 according to an embodiment of the present invention, and Fig. 10 is a plan view of the direct drawing device 100 shown in Fig. 9. Since the direct drawing device 100 is an exposure device that does not use a photomask, it can appropriately correspond to various pattern drawing. Further, in the pattern drawing system 4 having the direct drawing device 100, since the design data is frequently updated in order to correspond to various patterns, the above-described graphic user interface device 2 is suitably used.

The direct drawing device 100 is a device that scans a spatially modulated light beam on a surface of a substrate W such as a semiconductor substrate or a glass substrate to which a photoresist film (photosensitive material) is applied, and draws an exposure pattern. Specifically, in the manufacturing process of the multi-wafer module, the device is formed on the surface of the support substrate (hereinafter referred to as "substrate") W, which is a drawing object, and has a photosensitive photoresist film to draw a wiring pattern. . The substrate W has a circular shape, and a notch called a groove is formed in one of the outer peripheral edges thereof. There is also a case where an orientation flat is provided instead of the groove at one of the outer circumferences of the substrate W. Further, the direct drawing device 100 is a pattern drawing device that performs pattern drawing processing on a block (wafer) unit in which the substrate W is divided. Further, the drawing operation of the direct drawing device 100 is executed using the above-described work order JT.

As shown in FIGS. 9 and 10, the direct drawing device 100 mainly includes a stage 10 that holds the substrate W, a stage moving mechanism 20 that moves the stage 10, and a position parameter measuring mechanism 30 that measures a positional parameter corresponding to the position of the stage 10; the optical head 50 is irradiated with pulsed light on the surface of the substrate W; one alignment camera 60; and a control unit 70.

Further, in the direct drawing device 100, the main body portion is formed by arranging the respective portions of the device inside the main body formed by attaching the cover 102 to the main body frame 101, and is outside the main body portion (in the present embodiment, as shown in FIG. The substrate storage case 110 is disposed on the +Y side of the main body portion. The substrate storage case 110 houses an unprocessed substrate W to be subjected to exposure processing. The substrate W is loaded onto the main body portion by the transfer robot 120 disposed inside the main body. After the exposure processing (pattern drawing processing) is performed on the unprocessed substrate W, the substrate W is unloaded from the main body portion by the transfer robot 120 and returned to the substrate storage case 110. In this way, the transport robot 120 functions as a transport unit.

In the main body portion, as shown in FIG. 10, a transfer robot 120 is disposed at the +Y side end portion of the inside of the main body surrounded by the outer cover 102. Further, a base 130 is disposed on the -Y side of the transfer robot 120. One end side region (the +Y side region in FIGS. 9 and 10) of the base 130 serves as a substrate transfer region for transferring the substrate W to and from the transfer robot 120. Further, the center side region in the Y direction of the base 130 serves as a pattern drawing region for patterning the substrate W. As shown in FIG. 10, the head support portion 140 includes two leg members 141 which are erected upward from the base 130, and two leg members 142 which are closer to the Y-leg member 141. The side is placed upright from the base 130 upward. Further, the head supporting portion 140 is provided with a beam member 143 which is provided to bridge between the tops of the two leg members 141, and a beam member 144 which is bridged between the tops of the two leg members 142. Mode setting. Further, as shown in FIG. 9, an alignment camera (image pickup unit) 60 is fixed to the -Y side of the beam member 143, and the surface of the substrate W held by the stage 10 can be imaged as described later (the surface to be drawn is exposed). a plurality of alignment marks or lower patterns on the surface).

The stage 10, which is a support portion for supporting the substrate W, is moved on the base 130 by the stage moving mechanism 20 in the X direction, the Y direction, and the θ direction. In other words, the stage moving mechanism 20 positions the stage 10 in two dimensions in the horizontal plane, and rotates around the θ axis (vertical axis) to adjust the relative angle with respect to the optical head 50 to be described later.

Further, the optical head unit 50 is attached to the head support portion 140 configured in such a manner as to be freely movable in the vertical direction. The alignment camera 60 and the optical head 50 are attached to the head supporting portion 140 in such a manner, and the positional relationship between the two is fixed in the XY plane. Further, the optical head unit 50 is formed by patterning the substrate W, and is moved in the vertical direction by a head moving mechanism (not shown). Moreover, the optical head 50 is moved up and down by actuating the head moving mechanism The movement of the optical head 50 and the substrate W held by the stage 10 can be adjusted with high precision. In this manner, the optical head 50 functions as a drawing head.

Further, the cartridge 172 of the optical system in which the optical head 50 is housed is provided so as to bridge the top of the two beam members 143 and 144 and the two leg members 141 and the top of the two leg members 142.

The stage 10 has a cylindrical outer shape and is a holding portion for holding the substrate W on the upper surface thereof in a horizontal posture. A plurality of suction holes (not shown) are formed on the upper surface of the stage 10. Therefore, when the substrate W is placed on the stage 10, the substrate W is adsorbed and fixed to the upper surface of the stage 10 by the suction pressure of the plurality of suction holes. In the surface (main surface) of the substrate W to be subjected to the drawing process in the present embodiment, a photoresist (photosensitive material) film is formed in advance by a spin coating method (rotary coating method) or the like.

The stage moving mechanism 20 is for positioning the stage 10 with respect to the base 130 of the direct drawing device 100 in the main scanning direction (Y-axis direction), the sub-scanning direction (X-axis direction), and the rotation direction (around the Z-axis). The direction of rotation) the mechanism of movement. The stage moving mechanism 20 has a rotating mechanism 21 that rotates the stage 10, a support plate 22 that supports the stage 10 to be rotatable, and a sub-scanning mechanism 23 that supports the support plate 22 The scanning direction is moved; the bottom plate 24 supports the support plate 22 via the sub-scanning mechanism 23; and the main scanning mechanism 25 moves the bottom plate 24 in the main scanning direction.

The rotation mechanism 21 has a motor which is constituted by a rotor attached to the inside of the stage 10. Further, a rotary bearing mechanism is provided between the lower surface side of the central portion of the stage 10 and the support plate 22. Therefore, when the motor is operated, the rotor moves in the θ direction, and the stage 10 rotates within a specific angle around the rotation axis of the rotary bearing mechanism.

The sub-scanning mechanism 23 has a linear motor 23a which generates a thrust force in the sub-scanning direction by a mover attached to the lower surface of the support plate 22 and a stator attached to the upper surface of the bottom plate 24. Further, the sub-scanning mechanism 23 has a pair of guide rails 23b that guide the support plate 22 in the sub-scanning direction with respect to the bottom plate 24. Therefore, when the linear motor 23a is actuated, The holding plate 22 and the stage 10 are moved in the sub-scanning direction along the guide rail 23b on the bottom plate 24.

The main scanning mechanism 25 has a linear motor 25a which generates a thrust force in the main scanning direction by a mover attached to the lower surface of the bottom plate 24 and a stator attached to the upper surface of the head support portion 140. Further, the main scanning mechanism 25 has a pair of guide rails 25b that guide the bottom plate 24 in the main scanning direction with respect to the head support portion 140. Therefore, when the linear motor 25a is operated, the bottom plate 24, the support plate 22, and the stage 10 are moved in the main scanning direction along the guide rail 25b on the base 130. Further, as such a stage moving mechanism 20, an X-Y-θ axis moving mechanism which has been used in a large amount since the prior art can be used.

The position parameter measuring mechanism 30 is a mechanism for measuring the positional parameter of the stage 10 by the interference of the laser light. The position parameter measuring mechanism 30 mainly includes a laser light emitting unit 31, a beam splitter 32, a beam bending machine 33, a first interferometer 34, and a second interferometer 35.

The laser light emitting portion 31 is a light source device for emitting laser light for measurement. The laser light emitting portion 31 is provided at a fixed position, that is, a position fixed to the base 130 or the optical head 50 of the device. The laser light emitted from the laser light exiting portion 31 is first incident on the beam splitter 32, and branched into the first branched light from the beam splitter 32 toward the beam bending machine 33, and from the beam splitter 32 toward the second interferometer 35. The second branch light.

The first branched light system is reflected by the beam bending machine 33 and enters the first interferometer 34, and is irradiated from the first interferometer 34 to the first portion of the end side of the -Y side of the stage 10 (here - The central portion of the end side of the Y side) 10a. Then, the first branched light system reflected in the first portion 10a is incident on the first interferometer 34 again. The first interferometer 34 measures the positional parameter corresponding to the position of the first portion 10a of the stage 10 based on the interference between the first branched light that is directed toward the stage 10 and the first branched light that is reflected from the stage 10.

On the other hand, the second branch light is incident on the second interferometer 35, and is irradiated from the second interferometer 35 to the second portion (the portion different from the first portion 10a) on the side of the -Y side of the stage 10. ) 10b. Further, the second branched light system reflected in the second portion 10b is again incident on the second interferometer 35. The second interferometer 35 is based on the second branch light directed toward the stage 10 and the self-loading stage 10 The interference of the second branch light of the shot is measured, and the positional parameter corresponding to the position of the second portion 10b of the stage 10 is measured. The first interferometer 34 and the second interferometer 35 transmit the positional parameters obtained by the respective measurements to the control unit 70.

The optical head 50 is a light irradiation unit that irradiates the surface of the substrate W held on the stage 10 with pulsed light. The beam member 143 is mounted on the base 130 so as to straddle the stage 10 and the stage moving mechanism 20, and the optical head 50 is disposed substantially at the center of the beam member 143 in the sub-scanning direction. The optical head 50 is connected to one laser oscillator 54 via an illumination optical system 53. Further, a laser drive unit 55 that drives the laser oscillator 54 is connected to the laser oscillator 54, which is a light source. When the laser driving unit 55 is operated, pulsed light is emitted from the laser oscillator 54, and the pulsed light is introduced into the optical head 50 via the illumination optical system 53.

Inside the optical head 50, pulse light is introduced from the illumination optical system 53 to the inside of the optical head 50 by the introduction portion, and the introduced pulse light is irradiated to the substrate W as a light beam shaped into a specific pattern shape. On the surface, the photoresist film (photosensitive layer) on the substrate W is exposed, whereby a pattern is drawn on the surface of the substrate W.

In the direct drawing device 100 of FIG. 9, a laser oscillator 54, which is a light source, is placed in the cartridge 172, and light from the laser oscillator 54 is introduced into the optical head 50 via the illumination optical system 53. On the main surface of the substrate W of the present embodiment, a photoresist (photosensitive material) film which is exposed by ultraviolet light is formed in advance, and the laser oscillator 54 emits ultraviolet rays (i-line) having a wavelength λ of about 365 nm. Laser source. Of course, the laser oscillator 54 may also be light of other wavelengths included in the wavelength band of the photosensitive material that emits the substrate W.

FIG. 11 is a view showing the illumination optical system 53 and the projection optical system 517 of the direct drawing device 100. The light from the laser oscillator 54 shown in FIG. 9 is irradiated to the spatial light modulator 511 of the light modulation unit 512 via the illumination optical system 53 and the mirror 516 shown in FIG. The light that has been spatially modulated by the spatial light modulator 511 is irradiated onto the substrate W supported by the stage 10 via the projection optical system 517.

The illumination optical system 53 includes a telescope 540, a collecting lens 541, an attenuator 542, and a collecting device. Focus lens 543. The telescope 540 has a function of expanding the beam diameter (cross-sectional shape) of the light (laser beam) in the X and Z directions, and includes three lenses. The condenser lens 541 has a function of expanding the laser beam in the X direction. The attenuator 542 adjusts the energy (transmittance) of the laser beam passing therethrough. The focus lens 543 has a function of reducing the cross-sectional size of the laser beam in the Z direction. The light (laser beam) emitted from the self-focusing lens 543 is irradiated to the spatial light modulator 511 as illumination light that extends in the X direction and is reduced in the Y direction via the mirror surface 516. Further, the illumination optical system 53 does not have to be configured as shown in FIG. 11, and other optical elements may be added.

The light emitted from the illumination optical system 53 to the spatial light modulator 511 is such that the regular reflection light (zero-order light) reflected from the spatial light modulator 511 passes through the opening of the shielding plate 521 of the projection optical system to be described later, and The shielding plate 521 shields (±1) times of diffracted light generated from the spatial light modulator 511, preferably close to parallel light. Therefore, the number of openings NA1 of the illumination optical system 53 is set to be larger than 0 (zero), and 0.06 or less. Further, the number of openings NA1 is defined by NA1=n when the maximum angle of the illumination light of the YZ plane through which the linear illumination light extending in the X direction passes is set to θ1 with respect to the optical axis. Sin θ1 is obtained. Here, n is the refractive index of the medium. In the case of the present embodiment, since the medium is air, the refractive index n is 1.

The projection optical system 517 includes four lenses 518, 519, 520, and 522, a shielding plate (aperture member) 521, a zoom lens 523, and a focus lens 524. The lenses 518, 519, 520, and 522 of the projection optical system 517 and the shielding plate 521 are constructed as a two-sided telecentric optical system, and are guided by the light of the lens 520 to the shielding plate 521 having an opening, and a part of the light is introduced. (Regular reflection light (zero-order light)) is introduced into the lens 522 through the opening, and the remaining light ((±1) times of diffracted light) is shielded by the shielding plate 521. The light passing through the lens 522 is introduced into the zoom lens 523, and introduced into the photoresist film (photosensitive material) on the substrate W at a specific magnification via the focus lens 524. Further, the projection optical system 517 does not have to be completely configured as shown in FIG. 11, and other optical elements may be added.

In order to reduce the light that is irradiated onto the substrate W corresponding to the focus position (focus position) The change in the diameter (width) must set the depth of field of the projection optical system 517 to be long (deep). Therefore, the number of openings NA2 of the projection optical system 517 is preferably small, and is set to, for example, 0.1. Further, the number of openings NA2 is defined by NA2=n when the maximum angle of the projection light of the YZ plane through which the linear projection light extending in the X direction passes is set to θ2 with respect to the optical axis. Sin θ2 is obtained. Here, n is the refractive index of the medium. In the case of the present embodiment, since the medium is air, the refractive index n is 1.

The value (σ value) obtained by dividing the aperture number NA1 of the illumination optical system 53 by the aperture number NA2 of the projection optical system 517 is as described above, in order to convert the regular reflection light reflected by the spatial light modulator 511 into a desired shape. The irradiation onto the substrate W is preferably close to zero, and is set to be, for example, greater than 0 and 0.6 or less.

A rendering control unit 515 that performs modulation control of the optical modulation unit 512 is electrically connected to the spatial light modulator 511. The drawing control unit 515 and the projection optical system 517 are built in the optical head unit 50. The drawing control unit 515 is electrically connected to the exposure control unit 514 and the drawing signal processing unit 513, respectively. The drawing control unit 514 is electrically connected to the drawing signal processing unit 513 and the stage moving mechanism 20. The exposure control unit 514 and the rendering signal processing unit 513 are provided in the control unit 70 of Fig. 13 .

Figure 12 is a diagram showing an enlarged view of the spatial light modulator 511. The spatial light modulator 511 shown in Fig. 12 is manufactured by a semiconductor device manufacturing technique, and employs a diffraction lattice in which the depth of the crystal lattice can be changed. The plurality of movable belts 530a and the fixed belt 531b are alternately arranged in parallel with each other in the spatial light modulator 511. As will be described later, the movable belt 530a can be moved up and down individually with respect to the reference plane on the back side, and the fixed belt 531b is fixed to the reference surface. As a spatial lattice modulator of a diffraction lattice type, for example, a GLV (Grating Light Valve) (registered trademark of Silicon Light Machines (San Jose, Calif.)) is known.

A fixed reflecting surface is provided on the upper surface of the fixing belt 531b, and a movable reflecting surface is provided on the upper surface of the movable belt 530a. The plurality of movable belts 530a and the fixed belt 531b are irradiated with light having a linear cross section in the arrangement direction. In the spatial light modulator 511, if Each of the adjacent movable belts 530a and 531b has one belt pair as a lattice element, and three or more lattice elements adjacent to each other correspond to one pixel of the drawn pattern. In the present embodiment, a set of four lattice elements adjacent to each other is a modulation element corresponding to one pixel, and in FIG. 12, a set of pairs of one modulation element is marked with a symbol. The rectangle of 535 is surrounded by a rectangle.

The driver circuit unit 536 bends the movable belt 530a toward the reference surface side by applying a voltage (potential difference) between the movable belt 530a and the reference surface. As a result, the movable belt 530a moves up and down between the initial position separated from the reference surface and the position in contact with the reference surface, and sets the height position of the movable belt 530a.

The control unit 70 shown in FIG. 9 is an information processing unit that controls the operation of each unit in the direct drawing device 100 while performing various kinds of arithmetic processing. FIG. 13 is a block diagram showing the connection between the above-described respective units of the direct drawing device 100 and the control unit 70. As shown in FIG. 13, the control unit 70 is connected to the above-described rotating mechanism 21, linear motors 23a and 25a, laser light emitting unit 31, first interferometer 34, second interferometer 35, illumination optical system 53, and laser drive unit. 55. The projection optical system 517 and the alignment camera 60 are electrically connected. The control unit 70 is configured by, for example, a computer having a CPU or a memory, and causes the computer to operate in accordance with a program installed on the computer, thereby performing operation control of each of the above units.

Further, the control unit 70 includes a computer 71 having a CPU, a memory 72, and the like, and an exposure control unit 514. Fig. 14 is a block diagram showing a control unit for controlling the drawing operation. The CPU in the computer 71 performs arithmetic processing in accordance with a specific program, thereby realizing the raster processing unit 73 and the data generating unit 75.

The data corresponding to, for example, the pattern of one semiconductor package is prepared in advance as the wiring pattern data 76 in the memory 72 by pattern data generated by external CAD or the like. The drawing pattern of the semiconductor package is drawn on the substrate W based on the wiring pattern data 76 and the data generating unit 75 as will be described later. Here, the computer 71 functions as the drawing signal processing unit 513 shown in FIG.

The wiring pattern data 76 corresponds to the above-described design data D0 or updated design data D1 transmitted from the design material creation device 1 shown in FIG. 1 to the direct drawing device 100 via the network N. Further, the above-described work notification JT transmitted from the image processing device 2 to the direct drawing device 100 via the network N is also stored in the memory 72.

The raster processing unit 73 performs raster processing by dividing the unit area indicated by the drawing data generated by the data generating unit 75, and generates raster data 77 and stores it in the memory 72. The unprocessed substrate W is depicted after the preparation of the raster data 77 or in parallel with the preparation of the raster data 77. The above-described raster processing is performed in accordance with the RIP expansion processing defined by the above-mentioned work order JT, and raster information 77 corresponding to the drawing material of the present invention is generated.

The drawing data thus generated is transmitted from the data generating unit 75 to the exposure control unit 514, and the exposure control unit 514 controls each of the optical modulation unit 512 and the stage moving mechanism 20 to perform one-dimensional drawing. The control of the light modulation unit 512 by the exposure control unit 514 is executed via the drawing control unit 515 as shown in FIG. Further, when the exposure recording for one piece is completed, the same processing is performed on the next divided area, and each piece is repeatedly drawn. In the present embodiment, the control unit of the present invention is realized by the control unit 70, the drawing control unit 515, the exposure control unit 514, the driver circuit unit 536, and the like.

Further, when the direct drawing device 100 is controlled by the light control unit 512 by the exposure control unit 514, which is executed by the drawing control unit 515 shown in FIG. 11, the direct drawing device 100 is based on the division substrate W. The exposure conditions set by each of a plurality of blocks (wafers) are performed in units of blocks. This block (wafer) corresponds to the wafer 96 shown on the confirmation display portion 92 shown in FIG.

In the present embodiment, the computer 71 shown in FIG. 14 is installed in the direct drawing device 100. However, the computer 71 may be provided in the image processing device 3 shown in FIG. 1. In this case, the image processing device 3 executes the above-described raster processing (RIP expansion) or the like, and transmits the generated raster data (drawing data) to the direct drawing device 100 via the network N.

<Location control of the stage>

The direct drawing device 100 has a function of controlling the position of the stage 10 based on the respective measurement results of the first interferometer 34 and the second interferometer 35 described above. Hereinafter, the position control of the stage 10 will be described.

As described above, the first interferometer 34 and the second interferometer 35 measure positional parameters corresponding to the positions of the first portion 10a and the second portion 10b of the stage 10, respectively. The first interferometer 34 and the second interferometer 35 transmit the positional parameters obtained by the respective measurements to the control unit 70. As shown in FIG. 14, the control unit 70 has a computer 71 as a calculation unit. The function of the computer 71 is realized, for example, by causing the CPU of the computer 71 to operate according to a specific program.

On the other hand, the control unit 70 calculates the position (the position in the Y-axis direction and the rotation angle around the Z-axis) of the stage 10 based on the positional parameters transmitted from the first interferometer 34 and the second interferometer 35. Next, the control unit 70 operates the stage moving mechanism 20 with reference to the calculated position of the stage 10, thereby accurately controlling the position of the stage 10 or the moving speed of the stage 10. Here, the control unit 70 also corrects the inclination of the stage 10 (offset of the rotation angle about the Z axis) caused by the movement in the main scanning direction by rotating the stage 10 about the Z axis. Moreover, the control unit 70 operates the laser drive unit 55 while referring to the calculated position of the stage 10, thereby accurately controlling the irradiation position of the pulse light on the surface of the substrate W.

<Action of direct drawing device>

Next, an example of the operation of the above-described direct drawing device 100 will be described with reference to a flowchart of FIG.

When the substrate W is processed in the direct drawing device 100, first, a calibration process of adjusting the position or amount of the pulsed light irradiated from the optical head 50 is performed (step S1). In the calibration process, first, a CCD camera (not shown) is placed below the optical head 50 by moving the bottom plate 24. Then, while the CCD camera is moved in the sub-scanning direction, pulsed light is irradiated from the optical head 50, and the pulsed light is irradiated by the CCD camera. The control unit 70 operates the illumination optical system 53 of the optical head 50 based on the acquired image data. Thereby, the position or amount of the pulsed light irradiated from the optical head 50 is adjusted.

When the calibration process is completed, the operator or the transfer robot 120 then loads the substrate W and mounts it on the upper surface of the stage 10 (step S2).

Next, the direct drawing device 100 performs an alignment process of adjusting the relative positions of the substrate W placed on the stage 10 and the optical head 50 (step S3). In the above-described step S2, the substrate W is placed at a substantially specific position on the stage 10, but it is often insufficient as a positional accuracy for drawing a fine pattern. Therefore, the position or inclination of the substrate W is finely adjusted by performing the alignment process, thereby improving the accuracy of the subsequent drawing process.

In the alignment process, first, alignment marks formed on the four corners of the upper surface of the substrate W are respectively photographed by the alignment camera 60. The control unit 70 calculates the offset amount of the substrate W from the ideal position based on the position of each alignment mark in the image obtained by the alignment camera 60 (the positional shift amount in the X-axis direction and the Y-axis direction). The positional offset and the amount of tilt around the Z axis). Then, the position of the substrate W is corrected by operating the stage moving mechanism 20 in the direction of lowering the calculated offset amount.

Next, the direct drawing device 100 performs drawing processing on the substrate W after the alignment processing (step S4). In other words, the direct drawing device 100 irradiates the upper surface of the substrate W with the pulse light from the optical head 50 while moving the stage 10 in the main scanning direction and the sub-scanning direction, thereby dicing the substrate W on the upper surface of the substrate W. Each of the plurality of blocks within the port depicts a regular pattern. This drawing operation is performed based on the above-described drawing material.

When the drawing process is completed, the direct drawing device 100 operates the stage moving mechanism 20 to move the stage 10 and the substrate W to the carry-out position. Then, the operator or the transfer robot 120 carries out the substrate W from the upper surface of the stage 10 (step S5).

<Change implementation>

In the direct drawing device 100 of the above-described embodiment, the substrate W is moved relative to the optical head 50 or the like, but the optical head 50 or the like may be opposed to the substrate supported by the solid. W moves while achieving relative movement.

The pattern drawing device is not limited to the direct drawing device 100 for patterning a substrate W formed of a wafer or the like as described above, and may be, for example, a pattern drawing device corresponding to a substrate drawing pattern of a photomask for exposure processing.

81‧‧‧ Type Input Department

82‧‧‧Information Name Input Department

83‧‧‧Notice list display

84‧‧‧After Input Department

85‧‧‧Before input department

86‧‧‧Upper Input Department

87‧‧‧Under Input Department

88‧‧‧Search button

89‧‧‧Type Change Department

90‧‧‧History Display Department

91‧‧‧Update button

92‧‧‧Confirmation display

93‧‧‧OK button

94‧‧‧Cancel button

95‧‧‧Substrate shape

96‧‧‧ wafer (block)

97‧‧‧Area

200‧‧‧Display Department

Claims (9)

A graphical user interface device for a pattern drawing device, characterized in that it updates a user who defines a work order for processing a series of drawing data from a design data, and includes: a display portion having a screen; And a display control unit that controls display of the screen of the display unit; and the display control unit includes: a design data information input unit for inputting an updated update design The information input unit is displayed on the screen; the work notice information display unit displays information on the work notification relating to the information input to the design data information input unit by the operation unit; The work notice emphasizing the display unit, which is based on the work notice of the work notification displayed by the work notice information display unit, by using the work notice as the execution of replacing the design data with the update design data. The information of the work notice selected by the operation unit is highlighted on the above screen; a replacement instruction input display unit for inputting an instruction to replace the design data with the updated design data for a work notification corresponding to information highlighted on the screen by the work notice highlighting display unit The input section is displayed on the screen. The graphic user interface device for a pattern drawing device according to claim 1, wherein the display control unit further includes: an update candidate display unit that is based on information highlighted on the screen by the work notification highlighting display unit Correct The work notice will be displayed on the above screen with information on the updateable design information, ie, update candidate design information. The graphic user interface device for the pattern drawing device of claim 2, wherein the display control unit further includes: a lock information input display unit that displays a lock information input unit for locking the update candidate design data on the screen. A pattern drawing system comprising: a graphical user interface device for a pattern drawing device according to any one of claims 1 to 3; and a pattern drawing device based on updating according to the graphic user interface device The work order is drawn on the substrate by updating the drawing data generated by the design data. The pattern drawing system of claim 4, wherein the pattern drawing device is a direct drawing device that draws a pattern by scanning a spatially modulated light beam on a photoresist film formed on the substrate. A work order update method, which is to update a work notice that defines a series of processing data from a design data generation drawing, and includes: an update design data input step, which is displayed on a display of the graphic user interface device The design information input part of the screen of the department inputs information about the updated updated design data by the operation unit provided by the graphical user interface device; the work order selection step is based on the update design data according to the above The information input in the input step is displayed in the work notice corresponding to the information on the above screen, and the operation unit selects a work notice for replacing the design data with the updated design data; and the replacement step is performed by the above work. The work order selected by the notification step is selected by the operation unit to replace the design data with the update device Data. A recording medium on which a program is recorded, characterized in that it is a computer having a graphic user interface device for pattern drawing device used when updating a work order for defining a series of processing data from a design data generation drawing data a recording medium of a readable program, and causing the computer to perform the following functions: a design data input portion display function, which is displayed on a display portion of the graphic user interface device, and is displayed for inputting updated updates. Design information input part of the design information; work notice information display function, which is to notify the work related to the information input to the design information information input unit by the operation unit provided by the graphic user interface device The single information is displayed on the above screen; the work notice emphasizes the display function, which is related to the information of the work notice displayed on the screen by the above-mentioned work notice information display function, and the execution will be performed by the above operation unit. Replacement of selected design data with the above-mentioned updated design data The information of the work notice selected by the operation unit is emphasized on the screen; and the replacement instruction input display function is used to emphasize the display on the screen by the emphasis display function by the work notice. The input unit for inputting the above design data to the above-mentioned updated design data is displayed on the screen. The recording medium of claim 7, wherein the program for causing the computer to perform the update candidate display function is recorded, wherein the update candidate display function is based on the work notification corresponding to the information highlighted on the screen by the work notification highlighting display function. The information about the updateable design information, that is, the update candidate design data, is displayed on the screen. The recording medium of claim 8, wherein A program for causing the computer to play the lock information input display function is recorded, and the lock information input display function displays the lock information input unit for locking the update candidate design data on the screen.