CN105992997A - Gui device for pattern rendering device, pattern rendering system, job ticket updating method and program - Google Patents

Abstract

Provided are the following: a GUI device for a pattern rendering device, the GUI device enabling the desired job ticket to be easily selected and update work to be conducted when updating the job ticket following the updating of design data; a pattern rendering system; and a job ticket updating method and program. The GUI device for a pattern rendering device is used when updating a job ticket which defines a series of processes for generating rendering data from design data, wherein the following are provided: a display unit having a screen; an operation unit for operating the screen of the display unit; and a display control unit for controlling the screen display of the display unit. An input section (82) into which an updated update-design-data name is input is displayed, and a job ticket list (83) related to the input update-design-data name is displayed. For an object-of-update job ticket which is displayed with emphasis, from among the job tickets (83), an update button (91) for instructing design data to be replaced with updated design data is displayed.

Description

The GUI device of pattern describing device, pattern image forming system, job ticket update method and program

Technical field

The present invention relates to a kind of graphic user interface for pattern describing device (Graphical User Interface) device (GUI device), this pattern describing device is being formed with the substrate of photoresist film The patterns such as wiring pattern are drawn on Deng.

Background technology

In the past, irradiated to various substrates such as semiconductor substrate, printed circuit board, glass substrates Through the light of photomask, thus form pattern.In recent years, in order to tackle the various patterns of formation, And use following a kind of technology, i.e. it is required for photomask, was spatially modulated to substrate direct irradiation Light draw pattern, and carry out exposure-processed.

The most above-mentioned pattern describing device being exposed processing is referred to as direct describing device, in such as patent A kind of GUI device for direct describing device is had (such as, in patent documentation 1 described in document 1 0043rd section and Fig. 1).This GUI device update job ticket time etc. use.Job ticket (Job ticket) Define a series of actions, this series of action for by CAD (Computer Aided Design, Computer-aided design) etc. the design data of vector form of design carry out RIP (Raster Image Processing, raster image processing) launch to generate the raster data as describing data.

Prior art literature

Patent documentation

Patent documentation 1:JP JP 2013-77718 publication

Summary of the invention

The problem that invention is to be solved

When updating job ticket in the renewal along with design data, at the job ticket relevant with these design data Exist multiple in the case of, it may occur that to need not update job ticket also update design data problem. In order to prevent this problem, it is contemplated that create new job ticket when have updated design data answers the other side Method, but this method causes operation odd number to increase.In order to reduce operation odd number, it is contemplated that delete useless The countermeasure of job ticket, but the other problems that the work of this delete processing increases can occur again.

In view of problem described above, it is an object of the invention to, it is provided that one can be along with design data Renewal and simply choose desired job ticket when updating job ticket and perform to update the pattern of work and retouch The GUI device of picture device, pattern image forming system, job ticket update method and program.

Means for solving the above

First invention is the GUI device of a kind of pattern describing device, and described GUI device is in more new work Using during industry list, described job ticket defines a series of process according to design data genaration describing data, its It is characterised by,

Have:

Display part, has picture,

Operating portion, operates the described picture of described display part,

Display control unit, the picture controlling described display part shows；

Described display control unit has:

Design data information input unit, display renewal design after input with renewal on described picture The input unit of the information that data are relevant,

Job ticket information display section, shows the information relevant to following job ticket on described picture, should Job ticket is to utilize described operating portion to be input to the information of described design data information input unit relevant Job ticket,

Job ticket is highlighted portion, is highlighted the letter relevant to following job ticket on described picture Breath, this job ticket is to utilize described operating portion from utilizing described job ticket information display section to show and operation The job ticket selected in the information of simple correlation, and this job ticket is as should design data be replaced into The described job ticket updating design data,

Displacement instruction input display part, on picture, display is for inputting the input unit of following instruction, and this refers to Show it is for information that portion is highlighted on described picture is corresponding with utilizing described job ticket to be highlighted Job ticket, described design data are replaced into described update design data instruction..

Second invention is on the basis of the first invention, and described display control unit also has renewal candidate display Portion, described renewal candidate display portion according to utilize described job ticket be highlighted portion on described picture strong Adjust the job ticket that the information of display is corresponding, described picture shows and designs with the renewal that can be used in updating Data i.e. update the information that candidate designs data are relevant.

3rd invention is on the basis of the second invention, and it is aobvious that described display control unit also has filter information input Show that portion, described filter information input display part show on picture to be used for screening described renewal candidate designs number According to filter information input unit..

4th invention (pattern image forming system) has:

The GUI device of the pattern describing device according to any one of the first invention～the 3rd invention；

Pattern describing device, after according to renewal design data according to utilizing described GUI device to update The describing data that job ticket generates, draws pattern on substrate..

5th invention is on the basis of the 4th invention, and described pattern describing device is formed on substrate The light beam that photoresist film scanning was spatially modulated is to draw the direct describing device of pattern.

6th invention is a kind of job ticket update method, to definition according to design data genaration describing data The job ticket of a series of process is updated, it is characterised in that including:

Update design data input operation, utilize the operating portion that GUI device is had, fill at GUI After putting the design data information input unit input shown on the picture of had display part and updating more The information that new design data are relevant,

Job ticket selects operation, utilizes operating portion to update design data input operation from according to by described In the job ticket that the information that shows on described picture of information of input is corresponding, selection should will design data It is replaced into the job ticket updating design data,

Displacement operation, for the job ticket selected by described job ticket selection operation, utilizes described behaviour Described design data are replaced into described renewal and design data by the portion that makees.

7th invention is a kind of program, and the computer that the GUI device of pattern describing device is had can Reading, described GUI device uses when updating job ticket, and the definition of this job ticket is according to design data genaration A series of process of describing data, it is characterised in that described program make computer play following function:

Design data information input unit display function, at the picture of the display part that described GUI device is had On, showing design data information input unit, described design data information input unit is after input with renewal Update the information that design data are relevant,

Job ticket information display function, shows the information relevant to following job ticket on described picture, This job ticket is to be input to described design data information with the operating portion utilizing described GUI device to be had The job ticket that the information of input unit is relevant,

Job ticket is highlighted function, is highlighted the information relevant to following job ticket on picture, This job ticket be utilize operating portion from utilize that described job ticket information display function shows on picture with The job ticket selected in the information that job ticket is relevant, and this job ticket is as should utilizing described behaviour The design data selected as portion are replaced into the described job ticket updating design data,

Displacement instruction input display function, on picture, display is for inputting the input unit of following instruction, should Instruction is to be highlighted, for utilizing described job ticket, the information that function is highlighted on described picture Described design data are replaced into the described instruction updating design data by corresponding job ticket.

8th invention, on the basis of the 7th invention, also makes computer play and updates candidate display function, root According to the job ticket corresponding with utilize job ticket to be highlighted information that function is highlighted on described picture, It is relevant that the renewal design data shown on picture and can be used in updating i.e. update candidate designs data Information.

9th invention, on the basis of the 8th invention, also makes computer play filter information input display merit Can, on picture, display is for screening the filter information input unit of described renewal candidate designs data.

The effect of invention

According to any one in the first invention～the 9th invention, then can provide the one can be along with setting The renewal that counts and simply choose desired job ticket when updating job ticket and perform to update work The GUI device of pattern describing device, pattern image forming system, job ticket update method and program.

Accompanying drawing explanation

Fig. 1 is the figure of the graphic describing system illustrating and comprising pattern image forming system.

Fig. 2 is the block diagram of the hardware configuration illustrating GUI device.

Fig. 3 is the block diagram of the functional structure illustrating GUI device.

Fig. 4 is to illustrate to update the flow chart drawing the flow process till execution from design data.

Fig. 5 is the flow chart of the flow process updating work illustrating job ticket.

Fig. 6 is the figure for initial picture is described.

Fig. 7 is the figure illustrating GUI picture when job ticket selects.

Fig. 8 is the figure illustrating GUI picture when job ticket updates.

Fig. 9 is the side view of direct describing device.

Figure 10 is the top view of direct describing device.

Figure 11 is the figure illustrating lamp optical system and projection optical system.

Figure 12 is the figure amplifying and illustrating spatial light modulator.

Figure 13 is the block diagram of each several part illustrating direct describing device and the attachment structure in control portion.

Figure 14 is to illustrate the block diagram controlling to draw the control portion of action.

Figure 15 is the flow chart of the action of direct describing device.

Detailed description of the invention

Hereinafter, for embodiments of the present invention, it is described with reference to the accompanying drawings.

Overall structure ＞ of ＜ system

Fig. 1 is to illustrate that the figure comprising the pattern image forming system 4 as an embodiment of the invention is retouched The figure of picture system 400.This graphic describing system 400 is optionally semiconductor-based to such as toroidal Photoresist film on plate (hreinafter referred to as " substrate ") is exposed, at photoresist film On directly draw and the system of circuit pattern graph of a correspondence.

Graphic describing system 400 has via the network N such as LAN interconnective design data creation dress Put 1, image processing apparatus 3 and direct describing device 100.Image processing apparatus 3 has GUI dress Put 2.

Design data creation device 1 is to create and edit the device of following data, and these data describe As drawing the area of the pattern should drawn on the substrate of object.Specifically, data are to pass through CAD The figure described with vector form that (Computer Aided Design, computer-aided design) creates Data.Design data D0 created by design data creation device 1 are sent to respectively via network N Image processing apparatus 3 and directly describing device 100.It addition, at the beginning of design data creation device 1 changes The shape of the pattern represented by design data D0 begun or feature sizes create renewal design data D1 (D2……).Design data creation device 1 the most also can update further and have Update log Update design data and create renewal design data.Additionally, in this manual, the most also can will design Data D0 or renewal design data D1 etc. are together simply referred to as " design data ".By design data creation Design data D0 of device 1 establishment, D1 etc. are sent to image processing apparatus 3 respectively via network N And direct describing device 100.

Image processing apparatus 3 is for sending, via network N, design data D0 come or updating design number Job ticket JT is created according to D1 etc..Job ticket JT defines for design data D0 or renewal design Data D1 etc. carry out RIP (Raster Image Processing, raster image processing) and launch to generate A series of actions as the raster data of describing data.Such as, when RIP launches by adding bulk processing Or in the case of the live width equidimension of micronization processes change pattern generates describing data, according to process Different and there is multiple different RIP expansion and process.Job ticket JT defines explicitly, by many Which RIP expansion during individual RIP expansion processes processes to design data D0 or updates design number RIP expansion is carried out according to D1 etc..The job ticket JT created by image processing apparatus 3 is via network N quilt Send to direct describing device 100.

Structure ＞ of ＜ GUI device

GUI device 2 is located at image processing apparatus 3, plays the graphic user interface of oriented manipulation person The function of (Graphical User Interface).Fig. 2 is the frame of the hardware configuration illustrating GUI device 2 Figure.

GUI device 2 e.g. computer 5, and have CPU230, ROM231, memorizer 232, Media drive 233, display part 200 and operating portion 234 etc..These hardware are respectively by bus 235 Electrical connection.

CPU230 program based on storage in ROM231 (or read in by media drive 233 Program) P controls above-mentioned hardware each several part, it is achieved the function of computer 5 (GUI device 2).Program P Can be read by computer 5, and make computer 5 play each function.

ROM231 is necessary program P of control and the reading of data pre-saving GUI device 2 Special storage device.Memorizer 232 is that by reading and the storage device of write, temporarily deposits Storage data etc. of generation when utilizing CPU230 to carry out calculation process.Memorizer 232 by SRAM, DRAM etc. are constituted.In memorizer 232, preserve and design data D0, update design data D1 Deng and the relevant information of job ticket JT.

Media drive 233 has the function of the information of storage in reading & recording medium M.Portion.Record is situated between Matter M e.g. CD-ROM, DVD (Digital Versatile Disk, digital versatile disc) or The portable recording mediums such as floppy disk.Such as, in record medium M, it is prerecorded with the situation of program P Under, computer 5 is by record medium M reading program P.

Display part 200 has such as the such display of color LCD etc., on the picture of display part 200 Show the image of GUI operation, various data and operating state etc. in a variable manner.

Operating portion 234 is the input equipment with keyboard and mouse, accepts such as input and orders or each Plant the such user operation of data.Operator uses this operating portion 234 to display on display part 200 GUI operation picture inputs various information and carrys out the picture of operation display part 200.

Fig. 3 is the block diagram of the functional structure illustrating GUI device 2.This Fig. 3 block diagram illustrates that GUI fills Put each function that the hardware configuration of 2 is played by program P shown in above-mentioned Fig. 2, but these functional devices Can be realized in a variety of forms by the combination of hardware and software.

As it is shown on figure 3, GUI device 2 has display control unit 240.This display control unit 240 controls The picture of display part 200 shows, and there is design data information input unit 241, job ticket information shows Portion 242, job ticket are highlighted portion 243, displacement instruction input display part 244, update candidate display portion 245, filter information input display part 246 and layout display part 247.Display control unit 2 is by behaviour Author utilizes operating portion 234 that display part 200 is operable to realize the function of each several part, and it is detailed Content is aftermentioned in the explanation of action.

＜ updates, from design data, overall flow ＞ started

Fig. 4 is to illustrate to update the flow chart drawing the flow process till execution from design data.First, exist In step S10, operator, when updating design data D0, uses design data creation device 1 to revise Design data D0 create (design data more new processes) such as renewal design data D1.The most also can be as The above-mentioned design data that update the most further create renewal design data.The renewal design created Data D1 etc. via network N from design data creation device 1 be respectively sent to image processing apparatus 3 with And direct describing device 100.

Then, in the job ticket more new process of step S20, operator uses GUI device 2 to select Job ticket JT, this job ticket JT application is sent to renewal design data D1 of image processing apparatus 3 Deng, the design data in job ticket are replaced into renewal design data D1 etc. and update job ticket JT.Should The detailed content of job ticket more new process is aftermentioned.Job ticket JT after renewal via network N by from image Processing means 3 sends to direct describing device 100.

Then, in the describing data generation process of step S30, renewal is set by direct describing device 100 Count the RIP expansion process etc. that D1 etc. performs to be defined by job ticket JT and generate describing data.Directly Describing device 100 uses this describing data to perform to draw action (step to as the substrate drawing object S40 draws execution operation).Structure and action for direct describing device 100 are aftermentioned.Additionally, The describing data generation process of step S30 can not also utilize direct describing device 100 but utilize image Processing means 3 performs.In this case, image processing apparatus 3 describing data generated is via net Network N is sent to direct describing device 100.

The renewal work ＞ of ＜ job ticket

With reference to Fig. 5, detailed for the more new process of the job ticket shown in above-mentioned Fig. 4 (step S20) Content illustrates.Fig. 5 is the flow chart of the flow process updating work illustrating job ticket.

First, in step S210 shown in Fig. 5, GUI device 2 is on the picture of display part 200 Display initial picture (initial picture display operation).Initial picture is the such as picture shown in Fig. 6.As Shown in Fig. 6, initial picture containing type input unit 81, data name input unit 82, job ticket list Display part 83, After input unit 84, Before input unit 85, Upper input unit 86, Under are defeated Enter portion 87, Search button 88, type changing unit 89, journal displaying portion 90, more new button 91, really Recognize display part 92, OK button 93 and Cancel button 94 etc..

Initial picture is that each function part utilizing the display control unit 240 shown in Fig. 3 shows, such as, The function utilizing design data information input unit 241 show on picture the type input unit 81 of Fig. 6 with And data name input unit 82.It addition, utilize the function of job ticket information display section 242 to show on picture It is shown as industry single-row table display part 83.

It addition, utilize the function of displacement instruction input display part 244 to show as input unit on picture More new button 91, OK button 93 and Cancel button 94, utilize renewal candidate display portion 245 to exist Show log display part 90 on picture.Further, the function of filter information input display part 246 is utilized Picture showing, the After input unit 84 as input unit, Before input unit 85, Upper input Portion 86, Under input unit 87 and Search button 88, utilize the function of layout display part 247 to exist Confirmation display part 92 is shown on picture.

It is back to Fig. 5, for the renewal design data input operation of step S220 as next operation Illustrate.In this operation, operator uses the operating portion 234 type input unit 81 to initial picture Design data D0 or renewal before input renewal design affiliated type (the CAD Data such as data D1 Type, cad data type).Additionally, such input can also be omitted.Then, operator Use operating portion 234 to data name input unit 82 input design data D0 or design update data The data names such as D1 (CAD Data Name, cad data title).Now, in type input unit In the case of in 81, input has type, due in the drop-down menu linked with data name input unit 82 Display belongs to the list of the data name of inputted type, so can also select defeated from this list Enter desired data name.Above-mentioned data name is relevant to renewal design data D1 after renewal etc. One in information.

Fig. 7 is shown in type input unit 81 input has type " A ", in data name input unit 82 Input has the state of data name " AAA.gds ".Data name is inputted in data name input unit 82 When claiming " AAA.gds ", utilize the function of job ticket information display section 242 at job ticket list display part List (Ticket (the Referenced CAD of the job ticket JT relevant to this data name is shown in 83 Data) List, job ticket (relevant cad data) list).In other words, at job ticket list display part Show in 83 that the list of following job ticket JT, this job ticket JT define being labeled with above-mentioned data name The design data claimed carry out a series of actions of RIP expansion etc..

Show 3 job tickets " AA1 ", " AA2 ", " AA3 " in the figure 7.A line in list is shown Go out a job ticket JT.The first row of list represents job ticket title (Ticket Name).Secondary series Chip layout (Chip Layout) indicates whether to utilize image processing apparatus 3 to carry out changing in chip The layout work of pattern form or live width etc., in the case of showing " True " as Fig. 7, table Show and carried out layout work." False " is shown in the case of not being laid out work.

Similarly, tertial substrate layout (Wafer Layout) indicates whether to utilize image procossing to fill Put 3 layout work having carried out decision multiple chip allocation position on as the substrate drawing object, In the case of display " True " as shown in Figure 7, represent and carried out layout work.It is not laid out " False " is shown in the case of work.

4th row display RIP name (Rip Name).RIP name is that the kind processed according to RIP expansion is come Mark.In the example of fig. 7, the job ticket title of the first row is that the job ticket JT of " AA1 " is fixed Justice is to design data D0 or updates design data D1 etc. and performs RIP name and be labeled as The RIP expansion of " AA1.gds-123 " processes.Similarly, the job ticket JT of " AA2 " of the second row The RIP expansion defining execution " AA2.gds-345 " processes, the job ticket of " AA3 " of the third line JT defines the RIP expansion of execution " AA3.gds-678 " and processes.

Above-mentioned multiple RIP expansion process be such as pattern line-width add bulk processing or micronization processes respectively Different RIP expansion processes.In other words, multiple job ticket JT (AA1, AA2, AA3) define Identical design data D0 or renewal design data D1 etc. are implemented at different RIP expansion respectively Reason.

The date that update date (Modified Day) the display job ticket JT of the 4th row is updated.Additionally, It is not limited to the project shown in Fig. 7, for example, it is also possible to comprise in the project defined in job ticket JT Carry out the project of the name of the worker updating work.

As it is shown in fig. 7, owing to utilizing job ticket information display section 242 at job ticket list display part 83 Show the list of the job ticket JT relevant to data name, this data name be with update after renewal set Count the relevant information such as D1, it is possible to simply choose needs along with the renewal of design data The desired job ticket JT updated.

Being back to Fig. 5, the job ticket in step S230 selects in operation, and operator shows from picture The list of job ticket selects the job ticket that update.Figure 7 illustrates operator and utilize operating portion 234 from the job ticket JT (3 job ticket JT) corresponding with the information of display job ticket list display part 83 The job ticket JT " AA2 " of middle selection the second row is as the state of the job ticket JT of upgating object.At figure In 7, the second row is applied hacures, but utilizes job ticket to be highlighted portion 243 in actual picture Function, such as by show than other row color deeper grade shows in the way of the additional color depth and selects The information that the job ticket JT selected out is relevant, thus realize being highlighted.Additionally, the method being highlighted As long as the information that the job ticket that is capable of identify that on picture and select is relevant and with non-selected work District's method for distinguishing of the information that industry list JT is relevant, no matter which kind of method.

When selecting the job ticket JT of upgating object, update candidate display portion 245 and join with this selection action Dynamic ground function.By so, on the picture in the journal displaying portion 90 of Fig. 7, display is selected The daily record of design data of job ticket JT, be used as and can be used in the renewal design data that update i.e. Update the information that candidate designs data are relevant.In the example of fig. 7,4 row are divided to show 4 Update logs (updating candidate designs data), wherein, the data name of this job ticket JT sets for " AAA.gds's " Count and have updated 4 times on the date represented by update date (Date), and be marked with sequence respectively Number (Serial No.).

Herein, initial design data D0 are the design data " AAA.gds " of Serial No. " 1 ", Renewal design data D1 after updating for the first time are the design data " AAA.gds " of Serial No. " 2 ", And successively the serial number updating design data D2 is set to " 3 ", the sequence of design data D3 will be updated Row number are set to " 4 ".

Utilize the function updating candidate display portion 245, to select with utilizing job ticket list display part 83 The mode of the action linkage of job ticket JT, the operation being highlighted in journal displaying portion 90 and selecting The information that the design data of the present situation of single JT are correlated with.Show in the way of being highlighted in the example of fig. 7 Going out, the design data of the present situation of the job ticket JT selected are the second row of display in journal displaying portion 90 Serial No. " 2 " renewal design data D1.In the figure 7 the second row is applied with hacures, but It is on actual picture, e.g. to show to obtain the deeper side waiting the additional color depth of color than other row Formula is highlighted the information relevant to the design data of present situation.Candidate display is updated owing to so utilizing The function in portion 245 is highlighted the information relevant to the design data of present situation, so operator can hold Change places and grasp the design data of present situation.

As above-mentioned, owing to the design data (design data before updating) of the present situation of job ticket JT are sequences Number be renewal design data D1 of " 2 ", thus update design data that candidate designs data are other, I.e. renewal design data D2, the sequence of design data D0 of Serial No. " 1 ", Serial No. " 3 " Number be " 4 " update in design data D3 any one.

It addition, layout display part 247 is to select job ticket JT's with utilizing job ticket list display part 83 The mode of action linkage carrys out function.By so, as it is shown in fig. 7, in confirming display part 92 It is shown as this job ticket JT and carries out the image of the chip layout that pattern is drawn.This laying out images comprises work For the contour substrate 95 drawing the toroidal of object and the multiple chips (block (block)) being in the layout of in substrate 96。

Showing that layout has the state of chip 96 in region 97 in the figure 7, this region 97 is at substrate Inside completely include the region of multiple chip 96.It addition, also be able to utilize the function of layout display part 247 Amplify display chip 96 and carry out the pattern in display chip 96.Operator is to aobvious in confirming display part 92 The image shown confirms, it is possible to easily grasp and carries out what pattern was drawn according to this job ticket JT Pattern form in chip 96 or the layout of chip 96.

Hereinafter, the displacement operation for step S240 shown in Fig. 5 illustrates.Shown in Fig. 7 In example, at the job ticket of " AA2 " of the second row utilizing job ticket list display part 83 to select In JT, the design data of present situation are the Serial No. " 2 " being highlighted in journal displaying portion 90 " AAA.gds ", these design data are equivalent to above-mentioned renewal such as and design data D1.

Above-mentioned renewal design data D1 are being replaced into the Serial No. being equivalent to update design data D3 In the case of " AAA.gds " of " 4 ", as shown in Figure 8, operator uses operating portion 234 to select " AAA.gds " of the Serial No. " 4 " of the fourth line in journal displaying portion 90.The fourth line selected It is applied with hacures in fig. 8, but in actual picture, utilizes and update candidate display portion 245 Function, such as by show than other row deeper the grade in the way of the additional color depth of color is emphasized showing Show.

In this state, operator utilizes the mouse etc. of operating portion 234 to click on more new button 91 (Replace CAD Data replaces cad data), utilizes the merit of displacement instruction input display part 244 Input instruction can be carried out.As a result of which it is, the design data of the job ticket JT of " AA2 " set from renewal Count D1 and be replaced into renewal design data D3.In the way of linking with this displacement action, will be really Recognize the content of display in display part 92 to switch to based on the content updating design data D3, such as, change core Display content in sheet 96.

After the content etc. confirming display part 92 has been carried out confirming by operator, determine displacement design number In the case of according to, utilize the mouse etc. of operating portion 234 to click on OK button 93 to input instruction, complete Displacement operation, the renewal end-of-job of job ticket JT.Determining that not being replaced into certain designs data, and Discuss in the case of being replaced into other design data, utilize the point such as mouse of operating portion 234 operator Hit Cancel button 94 after inputting instruction, return to select display in journal displaying portion 90 other The work of the design data (AAA.gds) of serial number.

When display updates the design data screening of candidate in journal displaying portion 90, use After defeated Enter portion 84, Before input unit 85, Upper input unit 86, Under input unit 87 and Search Button 88, this After input unit 84, Before input unit 85, Upper input unit 86, Under are defeated Entering portion 87 and Search button 88 is the merit utilizing the filter information input display part 246 shown in Fig. 3 The input unit (filter information input unit) being shown on picture.Such as, if choosing After defeated Enter the check box in portion 84, after have input the date, click on Search button 88, then in journal displaying portion The information that in 90, only display is relevant to the renewal design data being updated after this date.Similarly, if To Before input unit 85 inputting date, then only show and before this date in journal displaying portion 90 Be updated updates the information that design data are relevant.To After input unit 84 and Before input unit In the case of have input the date both 85, only show and within specified time limit in journal displaying portion 90 Be updated updates the information that design data are relevant.

It addition, such as, if choosing the check box of Upper input unit 86, after have input serial number, Click on Search button 88, then the sequence only showing in journal displaying portion 90 with there is more than this serial number Updating of row number designs the information that data are relevant.Similarly, if to Under input unit 87 list entries Number, then in journal displaying portion 90, only show the renewal design with the serial number with below this serial number The information that data are relevant.Have input to both Upper input unit 86 and Under input units 87 In the case of serial number, only show in journal displaying portion 90 and the serial number having in regulation numbering Update the information that design data are relevant.If having the function of filter information input display part 246 as such, Then in the case of replaceable renewal design data have a lot, can owing to can be reduced this by screening The quantity updating design data of displacement, it is possible to be updated work efficiently.

It is input to design data D0 of data name input unit 82 in change or updates design data The situation of the type belonging to D1 or set when not setting type name when type name, utilizes Type name after type changing unit 89 input change shown in Fig. 6 etc. or initial type name.

Structure ＞ of the direct describing device of ＜

Hereinafter, with reference to Fig. 9 and Figure 10, the structure for direct describing device 100 illustrates.Figure 9 is the side view of the direct describing device 100 of an embodiment of the invention, and Figure 10 is shown in Fig. 9 The top view of direct describing device 100.Owing to direct describing device 100 is the exposure not using photomask Electro-optical device, draws it is possible to tackle various pattern rightly.It addition, directly draw having In the pattern image forming system 4 of device 100, owing to updating continually to tackle various pattern Design data, so using above-mentioned GUI device 2 rightly.

This direct describing device 100 has been assigned photoresist film (photosensitive material) to surface The light beam that the surface scan of the substrate W such as semiconductor substrate or glass substrate was spatially modulated is drawn The device of exposing patterns.Specifically, in the manufacturing process of multi-chip module, this direct describing device 100 It is for as drawing the support substrate of object (hreinafter referred to as " substrate ".) W surface on Formed has the device drawing wiring pattern on photosensitive photoresist film.Substrate W is circular Shape, the part in the outer peripheral edge of substrate W is formed with the otch being referred to as notch (notch).Have Time also can replace notch and a part in the outer peripheral edge of substrate W is provided with directional plane (orientation flat).It addition, directly describing device 100 is that the block (chip) to mark off in substrate W is for single Position applies pattern and draws the pattern describing device of process.Additionally, drawing of direct describing device 100 is dynamic Work is to use above-mentioned job ticket JT to perform.

As shown in Fig. 9 and Figure 10, direct describing device 100 mainly has the loading keeping substrate W Platform 10, make object stage travel mechanism 20 that object stage 10 moves, measure the position pair with object stage 10 The location parameter measuring mechanism 30 of the location parameter answered, to the optics of the surface irradiating pulsed light of substrate W 50, one, head alignment photographic head 60 and control portion 70.

It addition, in this direct describing device 100, by installation lid 102 on main body frame 101 The body interior configuration device each several part formed, constitutes main part, and main part outside ( In present embodiment, it is main part+Y side as shown in Figure 9) it is configured with substrate reception box 110.? Being accommodated with the untreatment base W that accept exposure-processed in this substrate reception box 110, utilization is configured at This substrate W is loaded into main part by the conveying robot 120 of body interior.It addition, to untreated After substrate W is applied with exposure-processed (process drawn by pattern), utilize the conveying robot 120 should Substrate W unloads from main part and puts back to substrate reception box 110.So, conveying robot 120 Wave the function of trucking department.

As shown in Figure 10, in this main part, at+Y the side of covered 102 body interior surrounded Portion is configured with conveying robot 120.It addition, be configured with base station 130 in the-Y side of this conveying robot 120. The end side the region (+Y side region of Fig. 9 and Figure 10) of this base station 130 as with handling machinery The substrate delivery/reception region of substrate W is joined between hands 120.It addition, the Y-direction center side of base station 130 Region is drawn as substrate W carries out the pattern that pattern draws in region.As shown in Figure 10, head supporting part 140 have the two legs component 141 erected upward from base station 130 and the-Y at two legs component 141 The two legs component 142 that side erects upward from base station 130.It addition, head supporting part 140 also have with Between the top of two legs component 141 bridge joint the beam 143 that arranges of mode and with at two legs structure The beam 144 that between the top of part 142, the mode of bridge joint is arranged.And, as it is shown in figure 9, by right Quasi-photographic head (image pickup part) 60 is fixed on the-Y side of beam 143, can shoot as described later On object stage 10 keep substrate W surface (by the face of drawing, exposed surface) on multiple to fiducial mark Note or lower pattern.

Object stage travel mechanism 20 is utilized to make the object stage 10 as the supporting part supporting substrate W at base θ side is also had to move up in X-direction, Y-direction on platform 130.That is, object stage travel mechanism 20 with The mode making object stage 10 carry out two-dimensional movement in horizontal plane positions, and so that object stage 10 around θ axle (vertical axle) rotation adjusts the mode of the relative angle relative to optical head 50 described later and comes Location.

It addition, optical head 50 is so constituted can the most freely movably be installed on Head supporting part 140 on.So, alignment photographic head 60 and optical head 50 are installed on a supporting part 140, In X/Y plane, both position relationships are fixed.It addition, substrate W is carried out by this optical head 50 Pattern is drawn, and is moved in the vertical direction by head moving mechanism (omitting diagram).And, moved by head Motivation structure works, and thus optical head 50 moves in the vertical direction, it is possible to adjust optics accurately Head 50 and the distance of the substrate W of holding on object stage 10.So, optical head 50 plays and retouches The function of picture head.

And, to bridge two beams 143,144, the top of two legs component 141 and two legs structure The mode at the top of part 142 is provided with the case 172 of the optical system having received optical head 50.

Object stage 10 has the profile of cylindrical shape, is to place with flat-hand position for surface thereon and protect Hold the maintaining part of substrate W.Upper surface at object stage 10 is formed with multiple sucker (omitting diagram). Therefore, when substrate W is positioned on object stage 10, substrate W by multiple suckers suction pressure and The adsorbed upper surface being fixed on object stage 10.Additionally, in the present embodiment, by spin-coating method (rotation Rotatable coating method) etc. in advance in surface (interarea) shape of the substrate W as the object drawing process Become to have photoresist (photosensitive material) film.

Object stage travel mechanism 20 is for making the object stage 10 base station relative to direct describing device 100 130 at main scanning direction (Y direction), in sub scanning direction (X-direction) and direction of rotation The mechanism of (direction of rotation about the z axis) upper movement.Object stage travel mechanism 20 has makes object stage 10 The rotating mechanism 21, the gripper shoe 22 being supported for object stage 10 rotating that rotate, make gripper shoe 22 The subscan mechanism 23 of movement on sub scanning direction, support gripper shoe 22 via subscan mechanism 23 Base plate 24 and make base plate 24 main scanning mechanism 25 of movement on main scanning direction.

Rotating mechanism 21 has the motor including being installed on the rotor of the inside of object stage 10.It addition, It is provided with swivel bearing mechanism between central part lower face side and the gripper shoe 22 of object stage 10.Therefore, exist When making motor operations, rotor moves up in θ side, and object stage 10 is with the rotary shaft of swivel bearing mechanism Centered by the range of predetermined angular rotate.

Subscan mechanism 23 has the movable piece utilizing the lower surface being installed on gripper shoe 22 and is layed in the end The fixture of the upper surface of plate 24 produces the linear motor 23a of the propulsive force of sub scanning direction.It addition, it is secondary Sweep mechanism 23 also has relative to base plate 24 leading for a pair along sub scanning direction guiding gripper shoe 22 Rail 23b.Therefore, when making linear motor 23a work, gripper shoe 22 and object stage 10 are the end of along Guide rail 23b on plate 24 moves on sub scanning direction.

Main scanning mechanism 25 has to utilize the movable piece of the lower surface being installed on base plate 24 and be layed in head props up The fixture of the upper surface of support part 140 produces the linear motor 25a of the propulsive force of main scanning direction.Separately Outward, main scanning mechanism 25 also has relative to head supporting part 140 along main scanning direction guiding base plate 24 Pair of guide rails 25b.Therefore, the guide rail when making linear motor 25a work, on base station 130 25b is movable base plate 24, gripper shoe 22 and object stage 10 on main scanning direction.Additionally, as such as Such object stage travel mechanism 20, it is possible to use the X-Y-θ axle travel mechanism in the past just commonly used.

Location parameter measuring mechanism 30 is for utilizing sharp interference of light to measure position for object stage 10 The mechanism of parameter.Location parameter measuring mechanism 30 mainly has laser emitting portion 31, beam splitter 32, curved Bundle device the 33, first interferometer 34 and the second interferometer 35.

Laser injection part 31 is the light supply apparatus for penetrating measuring laser.Laser injection part 31 sets It is placed in fixed position, is i.e. arranged at fixing relative to the base station 130 of this device or optical head 50 Position.First it is incident to beam splitter 32 from the laser of laser injection part 31 injection, and branches into from beam splitting First branch's light of device 32 directive beam beander 33 and from the second of beam splitter 32 directive the second interferometer 35 Branch's light.

First branch's light is reflected by beam beander 33, and is incident to the first interferometer 34, and dry from first It (is the end edge of-Y side that interferometer 34 is irradiated to the first position of the end edge of-Y side of object stage 10 herein Central part) 10a.Then, first branch's light in the first position 10a reflection is again incident on the first interference Instrument 34.First interferometer 34, first branch's light based on directive object stage 10 reflects with from object stage 10 The interference of light of the first branch, measure the position that the position of the first position 10a with object stage 10 is corresponding Put parameter.

On the other hand, second branch's light is incident to the second interferometer 35, and shines from the second interferometer 35 It is mapped to the second position (positions different for position 10a from the first) 10b of the end edge of-Y side of object stage 10. Then, second branch's light in the second position 10b reflection is again incident on the second interferometer 35.Second is dry Interferometer 35 second branch's light based on directive object stage 10 and second branch's light from object stage 10 reflection Interference, measure the location parameter corresponding with the position of the second position 10b of object stage 10.First is dry Interferometer 34 and the second interferometer 35 will be sent to control portion by the respective location parameter obtained of measuring 70。

Optical head 50 is the light of the surface irradiating pulsed light to the substrate W kept on object stage 10 Irradiation portion.Beam 143 is set up in the way of striding across object stage 10 and object stage travel mechanism 20 On base station 130, optical head 50 is located at the substantial middle of the sub scanning direction on beam 143.Light Learn head 50 to be connected with a laser oscillator 54 via lamp optical system 53.It addition, as light The laser oscillator 54 in source is connected with the Laser Driven portion 55 driving laser oscillator 54.Make laser When drive division 55 works, penetrating pulsed light from laser oscillator 54, this pulsed light is via illumination optical system System 53 is imported into the inside of optical head 50.

In the inside of optical head 50, from introduction part, pulsed light is imported to light from lamp optical system 53 Learn the inside of head 50, the pulsed light of importing be set to define the light beam of the pattern form of regulation, Pulsed light is irradiated to the surface of substrate W, by the photoresist film (sense on exposure base W Photosphere), draw pattern on the surface of substrate W.

In the direct describing device 100 of Fig. 9, case 172 is located at by the laser oscillator 54 as light source In, by the light from laser oscillator 54 via in lamp optical system 53 brought into optical head 50 Portion.The interarea of the substrate W of present embodiment is pre-formed with photosensitive by ultraviolet irradiation Photoresist (photosensitive material) film, laser oscillator 54 be injection wavelength X be about 365nm The lasing light emitter of ultraviolet (i line).Certainly, laser oscillator 54 can also penetrate the sense of substrate W The light of other wavelength contained in the wave band that photosensitiveness material can be photosensitive.

Figure 11 is lamp optical system 53 and the projection optical system illustrating direct describing device 100 The figure of 517.From the light of the laser oscillator 54 shown in Fig. 9 through illumination optical system as shown in Figure 11 System 53 and reflecting mirror 516 are irradiated to the spatial light modulator 511 of light-modulating cell 512.Through spatial light The light that manipulator 511 spatial modulation is crossed is irradiated to object stage 10 via projection optical system 517 and is supported Substrate W on.

Lamp optical system 53 has telescope 540, condenser lens 541, attenuator 542 and focuses on thoroughly Mirror 543.Telescope 540 has the beam diameter of expansion light (laser beam) on X and Z-direction and (cuts Face shape) function, be made up of 3 lens.Condenser lens 541 has expansion of laser light bundle in the X direction Function.The energy (transit dose) of the attenuator 542 laser beam to passing through is adjusted.Condenser lens 543 functions with the sectional dimension reducing laser beam in z-direction.From condenser lens 543 injection Light (laser beam) via mirror 516 as extending in the X direction and the line that reduces in the Y direction The illumination light of shape is irradiated to spatial light modulator 511.Additionally, lamp optical system 53 be not necessarily required to as Constitute as shown in Figure 11, it is also possible to add other optical element.

In order to make from the normal reflection light (0 light) of spatial light modulator 511 reflection by projection described later The opening of the shutter 521 of optical system, and (± 1 time) that produces from spatial light modulator 511 spreads out Penetrating the light plate 521 that is blocked to block, the light being irradiated to spatial modulator 511 from lamp optical system 53 is excellent Choosing is close to directional light.Therefore, numerical aperture NA1 of lamp optical system 53 be more than 0 (zero), and It is set as less than 0.06.Additionally, numerical aperture NA1 is the photograph in the wire that will extend in the X direction When the maximum angle relative to the optical axis of illumination light in the YZ plane that Mingguang City is run through is set to θ 1, Obtained by NA1=n sin θ 1.Wherein, n is the refractive index of medium, in the feelings of present embodiment Under condition, owing to medium is air, so refractive index n is 1.

Projection optical system 517 has 4 lens 518,519,520,522, shutter (aperture structure Part) 521, zoom lens 523 and condenser lens 524.The lens 518 of projection optical system 517, 519,520,522 and shutter 521 constitute the schlieren (schrieren) of both sides telecentricity (telecentric) Optical system, is imported into the shutter 521 with opening by the light of lens 520, and a part of light is (just Reflection light (0 light)) it is imported into lens 522, remaining light ((± 1) secondary diffraction light) by opening The plate 521 that is blocked blocks.It is imported into zoom lens 523, via condenser lens by the light of lens 522 524 photoresist films (photosensitive material) being directed on substrate W with the multiplying power of regulation.Additionally, Projection optical system 517 is not necessarily required to constitute as shown in Figure 11, it is also possible to add other optics Element.

In order to reduce the diameter of the light that is irradiated to substrate W on corresponding with focal position (focal position) The change of (width), needs to be set to longer (deeply) depth of field of projection optical system 517.Therefore, Numerical aperture NA2 of projection optical system 517 preferably sets less, such as, be set as 0.1.Additionally, Numerical aperture NA2 is in the YZ plane projected light of the wire extended in the X direction run through When being set to θ 2 relative to the maximum angle of the optical axis of projected light, obtained by NA2=n sin θ 2. Wherein, n is the refractive index of medium, in this case, owing to medium is air, so Refractive index n is 1.

As above-mentioned, in order to make the normal reflection light reflected by spatial light modulator 511 irradiate with desired shape On substrate W, numerical aperture NA1 of lamp optical system 53 is divided by the number of projection optical system 517 The value (σ value) of value aperture NA2 is preferably close to 0, such as, is set greater than 0, and, 0.6 with Under.

Spatial light modulator 511 is electrically connected with the control portion 515 of drawing of the modulation controlling light-modulating cell 512 Connect.Draw control portion 515 and projection optical system 517 is built in optical head 50.Drawing control It is electrically connected exposure control unit 514 in portion 515 and has drawn signal processing part 513.Exposure control unit 514 with draw signal processing part 513 and object stage travel mechanism 20 electrically connects.Exposure control unit 514 with And draw signal processing part 513 and be located in the control unit 70 of Figure 13.

Figure 12 is the figure amplifying and illustrating spatial light modulator 511.Spatial light modulator 511 shown in Figure 12 It it is the diffraction grating of the degree of depth that can change grid utilizing semiconductor device manufacturing technology manufacture.In space In photomodulator 511, multiple movable belt (ribbon) 530a and fixing band 531b parallel alternately Row are formed, as be described hereinafter, movable belt 530a can relative to datum level lifting moving individually behind, Fixing band 531b fixes relative to datum level.The spatial light modulator of known diffraction grating type has such as GLV (Grating Light Valve: grating light valve) (silicon light machine (San Jose city) Registered trade mark).

Upper surface at fixing band 531b is provided with fixed reflection surface, and the upper surface in movable belt 530a is provided with Movable reflecting surface.In multiple movable belt 530a and fixing band 531b, illumination beam cross section is along arrangement The light of the wire that direction is longer.In spatial light modulator 511, with adjacent movable belt 530a And this band of fixing band 531b is to during as grid element, adjacent one another are more than 3 Grid element is corresponding with the pattern drawn pixel.In the present embodiment, with adjacent one another are 4 The set of individual grid element is as the modulation element corresponding with a pixel, in fig. 13 with putting on accompanying drawing The rectangle of the thick line of labelling 535 surround the band constituting a modulation element to set.

Drive circuit unit 536 between movable belt 530a and datum level apply voltage (potential difference), Movable belt 530a is thus made to bend to datum level side.Result is, is leaving datum level with movable belt 530a Initial position and the position contacted with datum level between the mode of lifting moving, set movable belt 530a Height and position.

Control portion 70 shown in Fig. 9 is for while performing various calculation process, controls directly to retouch The information treatment part of the action of each several part in picture device 100.Figure 13 is to illustrate direct describing device 100 Each part mentioned above and control portion 70 between the block diagram of attachment structure.As shown in figure 13, control portion 70 With above-mentioned rotating mechanism 21, linear motor 23a, 25a, laser injection part the 31, first interferometer 34, Second interferometer 35, lamp optical system 53, Laser Driven portion 55, projection optical system 517 and Alignment photographic head 60 electrically connects.Control portion 70 is made up of the computer with such as CPU and memorizer, Computer carrys out work according to the program installed in computer, thus controls the action of each part mentioned above.

It addition, control portion 70 has computer 71 and exposure control unit 514, this computer 71 has CPU and memorizer 72 etc..Figure 14 is to illustrate the block diagram controlling to draw the control portion of action.Computer CPU in 71 carries out calculation process according to the program of regulation, it is achieved grating process portion 73 and data are raw One-tenth portion 75.

The data of such as corresponding with semiconductor packages pattern are by the figure of the generations such as outside CAD Case data, prepare in memorizer 72, based on this wiring pattern as wiring pattern data 76 in advance Data 76 and data generating section 75 draw retouching of semiconductor packages in the way of as be described hereinafter on substrate W Picture case.Additionally, herein, computer 71 plays the work drawing signal processing part 513 shown in Figure 11 With.

Above-mentioned wiring pattern data 76 are equivalent to from the design data creation device 1 shown in Fig. 1 via net Network N sends above-mentioned design data D0 to direct describing device 100 or renewal design data D1 Deng.Send to directly via network N it addition, also preserve in memorizer 72 from image processing apparatus 2 Meet the above-mentioned job ticket JT of describing device 100.

The unit area represented by the describing data generated by data generating section 75 is split in grating process portion 73 Carry out grating process, generate raster data 77 and be stored in memorizer 72.Thus, getting out light Untreated substrate W is drawn concurrently after grid data 77 or with preparing raster data 77.Above-mentioned It is to perform according to the RIP expansion process etc. defined by above-mentioned job ticket JT that grating processes, and generates Be equivalent to the raster data 77 of the describing data of the present invention.

The describing data so generated is sent to exposure control unit 514, exposure control from data generating section 75 Portion 514 processed controls light-modulating cell 512, each several part of object stage travel mechanism 20, thus carries out one Drawing of striped size.Additionally, control such as Figure 11 that exposure control unit 514 is to light-modulating cell 512 As shown in perform via drawing control portion 515.And, in the exposure record end to a striped Time, next cut zone is carried out same process, repeatedly draws by each striped.The control of the present invention Portion processed in the present embodiment by control portion 70, draw control portion 515, exposure control unit 514 and Drive circuit unit 536 grade realizes.

It addition, directly describing device 100 is carrying out when drawing action of each striped, exposure control unit 514 The control to light-modulating cell 512, thus base is performed through control portion 515 of drawing as shown in Figure 11 In the conditions of exposure that each in multiple pieces marked off by substrate W is set, hold in units of block Row exposure actions.This block (chip) is equivalent at the core confirming to show in display part 92 shown in Fig. 8 Sheet 96.

In the present embodiment, the computer 71 shown in Figure 14 is located in direct describing device 100, But this computer 71 can also be located in the image processing apparatus 3 shown in Fig. 1.In this situation Under, image processing apparatus 3 perform above-mentioned grating and process (RIP expansion) etc., the raster count that will generate Send to direct describing device 100 via network N according to (describing data).

The position control ＞ of ＜ object stage

This direct describing device 100 has based on the first above-mentioned interferometer 34 and the second interferometer 35 Each measurement result controls the function of the position of object stage 10.Hereinafter, for such object stage 10 Position control illustrates.

As it was earlier mentioned, the first interferometer 34 and the second interferometer 35 are measured and object stage 10 respectively Location parameter corresponding to the first position 10a and the position of the second position 10b.First interferometer 34 And second interferometer 35 location parameter that obtained by respective measurement is sent to control portion 70. As shown in figure 14, control portion 70 has computer 71 and is used as calculating part.The function of this computer 71 To be the CPU by such as computer 71 carry out action according to the program of regulation realizes.

On the other hand, control portion 70 sends based on from the first interferometer 34 and the second interferometer 35 Location parameter calculate position (position of Y direction and the anglec of rotation about the z axis of object stage 10 Degree).Hereinafter, control portion 70 is with reference to the position of the object stage 10 calculated, while making object stage Travel mechanism 20 works, and controls position and the mobile speed of object stage 10 of object stage 10 the most exactly Degree.Herein, control portion 70 makes object stage 10 rotate about the z axis, thus can also revise and sweep along with main The inclination (deviation of the anglec of rotation about the z axis) of the object stage 10 retouching the movement in direction and produce.Separately Outward, control portion 70 is with reference to the position of the object stage 10 calculated, while making Laser Driven portion 55 Work, controls the pulsed light irradiation position to the surface of substrate W the most exactly.

The action ＞ of the direct describing device of ＜

Then, for an example of the action of above-mentioned direct describing device 100, with reference to Figure 15 Flow chart while illustrating.

When substrate W is processed by direct describing device 100, first, it is adjusted from optics The position of the pulsed light that head 50 irradiates and the correction process (step S1) of light quantity.In correction process, First, make base plate 24 move, thus not shown CCD camera is configured at optical head 50 Lower section.Then, make CCD camera move on sub scanning direction, while from optical head 50 Irradiating pulsed light, utilizes the pulsed light that CCD camera shooting is irradiated.Control portion 70 is based on the figure obtained As data, make lamp optical system 53 action of optical head 50, by so, adjust from optical head The position of the pulsed light that portion 50 is irradiated or light quantity.

When completing correction process, below, substrate W is moved into by worker or conveying robot 120 And it is positioned over the upper surface (step S2) of object stage 10.

Then, direct describing device 100 is adjusted substrate W and the optics being positioned on object stage 10 The registration process (step S3) of the relative position of head 50.In above-mentioned step S2, by substrate W is positioned over the position substantially specified on object stage 10, but, as drawing fine pattern Positional precision for often not enough.Therefore, registration process is carried out thus to the position of substrate W with incline Angle is finely adjusted whole, improves the follow-up precision drawing process.

In registration process, first, utilize alignment photographic head 60 to shoot respectively and be formed at the upper of substrate W The alignment mark of the corner on surface.Control portion 70 is based on each by be directed in the image that photographic head 60 obtains The position of alignment mark, calculate the substrate W bias away from ideal position (positional offset amount of X-direction, The positional offset amount of Y direction and tilt quantity about the z axis).Then, object stage travel mechanism 20 is made The direction of the bias calculated to reduction carries out action, revises the position of substrate W.

Then, the substrate W after registration process is drawn process (step by direct describing device 100 S4).That is, direct describing device 100 is while making object stage 10 in main scanning direction and subscan side Move up, from optical head 50 to the upper surface irradiating pulsed light of substrate W, be thus directed towards Each in multiple pieces marked off in substrate W draws regular pattern at the upper surface of substrate W.Should Draw action to perform based on above-mentioned describing data.

When completing to draw process, direct describing device 100 makes object stage travel mechanism 20 action make Object stage 10 and substrate W move to taking out of position.Then, worker or conveying robot 120 Substrate W is taken out of from the upper surface of object stage 10 (step S5).

＜ deformation implementation ＞

In the direct describing device 100 of above-mentioned embodiment, substrate W is relative to optical head 50 etc. Mobile, but can also be to make optical head 50 grade move relative to the substrate W being fixedly supported, with Realize relative movement.

Pattern describing device is not limited to the substrate W of chip formed as described above etc. is drawn the straight of pattern Connect describing device 100, for example, it is also possible to be the base to the photomask that should be used as exposure-processed The pattern describing device of pattern drawn by plate.

The explanation of reference

2 GUI devices

4 pattern image forming systems

5 computers

82 data name input units

83 job ticket list display parts

90 journal displaying portions

91 more new buttons

100 direct describing devices (pattern describing device)

200 display parts

234 operating portions

240 display control units

241 design data information input units

242 job ticket information display section

243 job tickets are highlighted portion

244 displacement instruction input display parts

245 update candidate display portion

W substrate

P program

Claims (9)

1. a GUI device for pattern describing device, described GUI device makes when updating job ticket With, the definition of described job ticket is according to a series of process of design data genaration describing data, it is characterised in that

Have:

Display part, has picture,

Operating portion, operates the described picture of described display part,

Display control unit, the picture controlling described display part shows；

Described display control unit has:

Design data information input unit, display renewal design after input with renewal on described picture The input unit of the information that data are relevant,

Job ticket information display section, shows the information relevant to following job ticket on described picture, should Job ticket is to utilize described operating portion to be input to the information of described design data information input unit relevant Job ticket,

Job ticket is highlighted portion, is highlighted the letter relevant to following job ticket on described picture Breath, this job ticket is to utilize described operating portion from utilizing described job ticket information display section to show and operation The job ticket selected in the information of simple correlation, and this job ticket is as should design data be replaced into The described job ticket updating design data,

Displacement instruction input display part, on picture, display is for inputting the input unit of following instruction, and this refers to Show it is for information that portion is highlighted on described picture is corresponding with utilizing described job ticket to be highlighted Job ticket, described design data are replaced into described update design data instruction.

2. the GUI device of pattern describing device as claimed in claim 1, it is characterised in that

Described display control unit also have renewal candidate display portion, described renewal candidate display portion according to profit It is highlighted the job ticket that information that portion is highlighted on described picture is corresponding, in institute with described job ticket State and show and can be used in the design data that update that update on picture i.e. to update candidate designs data relevant Information.

3. the GUI device of pattern describing device as claimed in claim 2, it is characterised in that

Described display control unit also has filter information input display part, described filter information input display part On picture, display is for screening the filter information input unit of described renewal candidate designs data.

4. a pattern image forming system, it is characterised in that have:

The GUI device of the pattern describing device according to any one of claims 1 to 3；

Pattern describing device, after according to renewal design data according to utilizing described GUI device to update The describing data that job ticket generates, draws pattern on substrate.

5. pattern image forming system as claimed in claim 4, it is characterised in that

Described pattern describing device is to be spatially modulated the photoresist film scanning formed on substrate The light beam crossed is to draw the direct describing device of pattern.

6. a job ticket update method, to definition according to designing a series of of data genaration describing data The job ticket processed is updated, it is characterised in that including:

Update design data input operation, utilize the operating portion that GUI device is had, fill at GUI After putting the design data information input unit input shown on the picture of had display part and updating more The information that new design data are relevant,

Job ticket selects operation, utilizes operating portion to update design data input operation from according to by described In the job ticket that the information that shows on described picture of information of input is corresponding, selection should will design data It is replaced into the job ticket updating design data,

Displacement operation, for the job ticket selected by described job ticket selection operation, utilizes described behaviour Described design data are replaced into described renewal and design data by the portion that makees.

7. a program, the computer that the GUI device of pattern describing device is had can read, Described GUI device uses when updating job ticket, and the definition of this job ticket draws number according to design data genaration According to a series of process, it is characterised in that described program make computer play following function:

Design data information input unit display function, at the picture of the display part that described GUI device is had On, showing design data information input unit, described design data information input unit is after input with renewal Update the information that design data are relevant,

Job ticket information display function, shows the information relevant to following job ticket on described picture, This job ticket is to be input to described design data information with the operating portion utilizing described GUI device to be had The job ticket that the information of input unit is relevant,

Job ticket is highlighted function, is highlighted the information relevant to following job ticket on picture, This job ticket be utilize operating portion from utilize that described job ticket information display function shows on picture with The job ticket selected in the information that job ticket is relevant, and this job ticket is as should utilizing described behaviour The design data selected as portion are replaced into the described job ticket updating design data,

Displacement instruction input display function, on picture, display is for inputting the input unit of following instruction, should Instruction is to be highlighted, for utilizing described job ticket, the information that function is highlighted on described picture Described design data are replaced into the described instruction updating design data by corresponding job ticket.

8. program as claimed in claim 7, it is characterised in that

Also make computer play and update candidate display function, according to utilize job ticket to be highlighted function to exist The job ticket that the information that is highlighted on described picture is corresponding, shows on picture and can be used in updating Update design data and i.e. update the information that candidate designs data are relevant.

9. program as claimed in claim 8, it is characterised in that

Also make computer play filter information input display function, picture shows described in being used for screening more The filter information input unit of new candidate designs data.