TWI301432B - - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spindle device comprising: a spindle having a tool holding device at one end, and a gas bearing device rotatably supporting the spindle. Prior Art Figure 5 is a cross-sectional view showing a spindle device in a conventional printed substrate splicer. In the figure, in the figure (the lower end portion of the figure), the bottom portion of the bottom portion formed in the axial direction is formed in the axial direction, and the inner surface is formed to have an outer diameter at the front end and the push surface 11 has a hole. The hole 4 of the clamp (tool) 3 is the central portion of the collet 2. The collet 2 is shown at equal angular intervals in the circumferential direction.) The front end portion 11 of the main shaft 1 housed in the casing 10 is formed. That is, the main shaft J has a hole 7 through which a through hole of the bottom surface of the bottom hole 7 is provided. Further, the above-mentioned push-out surface It of the through hole. Moreover, in the collet 2, the angle of the public push surface 2t. The drill is extended in the axial direction and penetrated through the pull-out surface 21 to reach the hole 4, and a plurality of cutting grooves are formed in a manner (not shown, in the inner peripheral side of the main shaft 1, the support is supported in the cylinder The rear end side of the clip 2 (upper side of the figure) is fixed in the shape of the center hole of the 6-cup 5-series bushing lining. The stem is fitted to the bottom surface 7a of the bottomed hole 7 guided and The disc spring I 3 is contracted in such a manner that the inner surface of the guide shaft of the sea H main spindle 1 is biased upward, so that the collet 2 faces the surface 21 and is pressed against the push surface 丨t, and the collet 2 is % Further, by pushing and closing, the relationship between the inner surface of the hole 4 and the surface of the drill 3/the cross-section in the inner diameter direction is strongly maintained.

2110-5796-PF(Nl).ptd 1301432 V. Description of the invention (2) The direction of the direction is highlighted by the outer peripheral surface of the outer circumference toward the center of the outer circumference, and the edge is 1f, and will be The rotating portion is formed in a ring shape to form an annular shape (the rotor is turned back; the copper material of 9 is formed in the casing 10 so as to be slidable by the β and π wires. 11 in the axial direction of the hole 11 The hole of the fitting main shaft 1 forms the accommodating portion 11b, and is disposed so as to expand in the outer diameter direction, and the coil is disposed (the bit-converting power supply of the rotating portion 9 in the solid portion K11b is opposite to each other. It is connected to the portion of the hole i 面对 in the case of the casing 10 that is omitted from the illustration, and the quotient of the quotient of the gas supply in the direction of the axis 0 is 3 and 2 = The direction in which the compressed air is discharged is "U" 13 and the milk body (here, the direction of the upper and lower sides of the coil 12 is arranged in the direction of ', 〇, 、, and the right parent, and the gas supply on the lower side of the coil 12 is shown. .... will have a journal gas bearing that is arranged in the group of holes 1 3 to be empty, and will have the air supply arranged on the upper side of the coil 12 (4) The shaft bearing body bearing is referred to as an air bearing B. The air supply person's milk first supply port 14. The supply hole holes 13 are each provided with a connection (connected) on the square end side (lower side of the figure): slidable And the shaft accommodating portion i le on the side of the slewing and slewing main shaft, and the annular recessed portion 11 formed by accommodating the flange ^ in the accommodating portion llc. (1) = up and down in the annular recess Ud The two sides are formed with a plurality of holes 15 in the circumferential direction. The supply holes of the plurality of air supply holes 15 are oriented in the direction of the axis 0, and are connected to the second supply port 16 from the second page 2110- 5796-PF(Nl).ptd 1301432

In the thrust gas bearing c. One end of the push rod 20 (the upper end of the figure) is fixed to the double piston 2 2 . The double piston 22 is disposed in a double chamber Ua constituting a cylinder portion disposed in the upper portion of the magazine. The third and fourth supply ports 23, 24 formed in the cartridge 1 are each connected to the chamber 11a. For some reason, when the compressed air supplied to the supply port 24 is blocked, the piston 2 2 will fall to prevent the push rod 20 from contacting the rod 5. 曰/

Next, the operation of the conventional spindle device having the above configuration will be described. Compressed air is supplied from the supply port 23 to lower the piston 22. Thus, as the piston 22 descends, the push rod 20 moves to the lower side of the figure to push the rod 5, and the biasing force against the disc spring 8 causes the collet 2 to move below the figure. ★ Therefore, when the push-out surface 2t of the collet 2 is separated from the push-out surface H, the force acting on the inner diameter direction of the collet 2 disappears and the collet 2 is opened, so in this state, the drill can be used. 3 Remove from tube inflammation 2. Secondly, after the other holes are crying to the n-tube clamp 2, the supply of compressed air to the supply port 23 can be stopped, and the compressed air can be supplied to the supply port 24, so that the piston "the slave of the slave" When moving to the top of the figure, the pusher 2 is closed by the biasing force 2t of the disc spring 8 and is pressed against the push-out surface, so that the drill 3 is firmly held on the spindle 1 .

/Secondly, + supply compressed air to the supply port 1 4, 16 . In this way, the main body is supported by the radial direction by the function of the air bearings a and B, and the axis and the hole_axis are aligned in the radial direction, and the function of the thrust gas bearing C is supported by the axis 0. direction. In this state, a push is made: when the electric power is two coils 12', the magnetic field generated at the coil 12 is generated back in the rotating portion 9.

2110-5796-PF(Nl).ptd Page 6 1301432 V. INSTRUCTIONS (4) Turning distance, the main shaft 1 will turn back, the salary will be borne, and the device will be omitted to move the box 10 to the shaft complex (1) * The workpiece is machined by the drill 3. The sleeve is 0 square wide, and it is necessary to machine the hole with a very small diameter for the right and below, and the hole with a very small diameter is processed in an efficient manner. It is effective. Moreover, when the field is secreted and the 仨7 / J 旰 旰 旰 , , , , 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 尽可能 要 要 要 要 要 要^ : 3 The number of natural vibrations of the $ axis is effective for reducing the weight of the spindle: and:; Full:: Consideration: The two methods are: reducing the outer diameter size =, the diameter of the outer diameter of the gossip spindle, Since the bearing rigidity (bearing strength) at the time of supporting the shaft of the air bearing is low, there is a concern about the instability that occurs when the spindle is high and the two turns. X, when the total length of the spindle is shortened, the air bearing A and β are shortened. The distance between the rows of the air supply ports 3, or if necessary, only the air bearing Α, Β On the other hand, in any case, since the rigidity of the above-mentioned bearing of the air bearing is low, there is a concern about the instability that occurs when the spindle is rotated at a high speed. Therefore, an object of the present invention is to provide a spindle device which can In order to improve the work efficiency and improve the work efficiency, the bearing rigidity of the air bearing is not lowered, and the problem of the prior art is solved. The present invention provides a spindle device for solving the above problems. , its system

2110-5796-PF(Nl).ptd Page 7 1301432 V. INSTRUCTIONS (5) With the revolving 1:, the main shaft of the holding device, and the gas bearing device that holds the main shaft for the box member, the empty portion, The axial direction is formed integrally from the above-described end to the other end, and is provided with at least a guide rod of the hollow portion with respect to the radial direction of the main shaft = an axial direction of the main shaft to be inserted into the outer circumference. In the above-mentioned guide rod member supporting the above-mentioned main shaft at its inner circumference: the gas discharged from the body discharge hole, according to the present invention, by fully supporting the main shaft peak in the radial body bearing It is known that the bearing of the air bearing is shortened and lightly formed, and the bearing of the air bearing is not caused to be rotated at a high speed by holding the main sleeve, and the side can be made compact, and the device can be miniaturized. Industry efficiency. In the case of i匕, the guiding rod member is integrally fixed to the box member, and the guiding rod member is supported by the box member in a manner of moving relative to the upper portion of the box member: It is effective when the push rod that can hold the device is constructed. The tool holder may be configured to have an inner peripheral surface formed on the above-mentioned box member, on the 8th page 2110-5796-PF(Nl).Ptd 1301432 1 1 --- 5, the invention description (6 The second surface: the gas discharge hole for discharging the gas in the gap between the outer peripheral surfaces of the main shaft, and the gas bearing device on the outer peripheral surface of the gas discharged from the gas discharge hole. Further, the main shaft of the yoke may have a configuration in which an annular recessed portion that is enlarged in a ring shape is formed in the diameter direction of the main shaft in the case member, and the main i is described above. The recessed portion is formed in the radial direction of the main shaft, and the * is larger than the t-shaped projection, and the gap formed on both sides of the annular projection is formed on both sides of the annular projection. The gas discharged from the gas m gas discharge hole supports the gas bearing arrangement of the above-mentioned main shaft in the axial direction. According to the present invention, because of the opposite directions in the left direction, and the right-hand strike: at least the main body of the member is discharged The gas of the outer peripheral surface of the supported guide rod member is in the direction, so it is not necessary to set it in the conventional season to support the bearing B (refer to Fig. 5). This result is supported by air ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ When the spindle is low, the rigidity of the bearing is low, and θ can be rotated at the speed of the second bearing. X, the state of the shaft gas axis is high. When the air rigidity of the conventional spindle device is very large, it is also possible. Only the entire length of the main shaft constituting the air bearing 2 (see Fig. 5) can be omitted, and the main shaft can be made lighter. Compared with the embodiment, the embodiment can be shortened. The present invention will be described below on page 9 2110- 5796-PF(Nl).ptd 1301432

5. (Description of the Invention) (1) (1st Embodiment) Fig. 1 is a cross section of a spindle device according to a first embodiment of the present invention: an element having the same configuration as that of Fig. 5 has the same function. The sound portion) and the elements (components) having different shapes but having the same function are given the same reference numerals and the description of 1 is omitted. The spindle device in the present embodiment includes in the cartridge u: a spindle i having a cylinder (tool holding device) 2 at one end (the lower end of FIG. 1), and a cartridge (box member) ι. The way to support the gas bearing device of this spindle. The cartridge 10 is provided with a hole u along the axial direction (the vertical direction of the i-th image). The hole 11 includes a double chamber 11a that houses the double piston 22, a coil housing portion 1bb that houses the coil 12, a shaft housing portion Uc that slidably and slidably receives the distal end portion of the spindle 1, and The flange if of the main shaft 1 is accommodated in a rotatable manner, and is expanded in the radial direction of the main shaft i into a ring-shaped concave portion 11 d. Between the chamber a in the inside of the casing 10 and the coil accommodating portion 11b, a portion 3a that holds the flange portion 3'b of the center guide (guide rod member) 3'' in the thrust direction is formed. Further, the shaft housing portion llc is a space between the outer circumferential surface of the main shaft i and the inner circumferential surface of the casing 10. The cartridge 10 further includes communication passages 37a and 38a formed at different positions on the outer peripheral side of the coil housing portion 丨i b. The communication passage 37a communicates with the air supply hole 13 provided on the lower side of the coil 12 through the communication passage 37b in addition to the first supply port 14 that is penetrated through the outer peripheral surface of the casing 10. The communication passage 38a communicates with the air supply hole 15 through the communication passage 38b in addition to the second supply port i6 that is penetrated through the outer peripheral surface of the casing 1 .

2110-5796-PF(Nl).ptd Page 10 1301432 V. INSTRUCTIONS

(8) The air supply port 3 group disposed on the lower side of the coil 1 2 is provided with the air bearing A of the journal gas bearing. In other words, the air bearing a has an air supply hole 13 which is formed in an inner circumferential surface of the shaft housing portion 11c facing the cartridge 10 and which discharges gas between the inner circumferential surface and the outer circumferential surface of the main shaft 1. The gas 'discharged from the air supply hole 13' constitutes a gas bearing device that supports the main shaft 1 on its outer peripheral surface. Further, the air supply port 15 is provided in the thrust gas bearing 'c. The spindle device of the present embodiment does not include the air bearing B constituted by the group of the air supply holes 13 disposed on the upper side of the coil 12 in the conventional spindle device described in Fig. 5. The main shaft 1 is provided with a bottom portion formed by the direction of the axis (axis 〇), the bottom end of the .1 map, and the other end (the upper end of the first figure). Same as (hollow) 7. The spindle device is provided with a center guide 30 that extends in the axial direction of the main shaft 1 and is inserted into the bottomed hole 7. The above gas bearing device that supports the main body in a rotatable manner has an outer peripheral surface formed on the center guide 3 、, and on the outer peripheral surface and the main shaft! The air gap (gas discharge hole) 33 of the gas is exhausted from the gap between the inner peripheral surfaces, and is discharged from the air supply hole 33 to support the main shaft 1 on the inner peripheral surface thereof. The body center guide 30 includes a shaft portion 30a formed along a shaft of a hollow chamber 3 2 to be described later, and a rear end side of the shaft portion 3〇a (the above-mentioned protrusion formed by the upper body of the figure) The edge portion 30b. The center guide 30 is fitted to the bottom end of the bottom portion 7 in such a manner that the front end of the shaft portion 3a (the lower side of the drawing) and the rotation of the shaft portion 3 are formed in such a manner that the axis of the shaft is broken. The flange portion 3〇b2 is integrally fixed to the cartridge 1〇 so as to be held by the segment portion 10a. That is, the center guide and the guide 30 are integrally supported by the warp direction and the vehicle direction of the main shaft 1 at 1301432 (Invention) (9) The cartridge 10 is secured to a reference position of the spindle bore of the journal gas bearing D to be described later. At both ends of the center guide 30, the center portion is penetrated in the axial direction to be slidable. The hole 3 1 in which the push rod 20 is engaged is separately formed. Further, the above-mentioned chamber 3 2 having a larger diameter than the hole 31 is the hole 3 1 and 3 1 in the shaft portion 30 a. between.

In the outer peripheral surface of the center guide 30 with respect to the inner peripheral surface of the main shaft 1 having the bottomed hole 7, the air supply hole 33 of the journal gas bearing (gas bearing device) D having the fine-cell diaphragm shape is arranged in a plurality of columns (The three columns are shown) in the axis 〇 direction ' and a plurality of air supply holes 33 are arranged in the circumferential direction in each column. In other words, the air supply holes 33 are bored through the outer peripheral surface of the shaft portion 3a of the center guide 30 so as to communicate with the chamber 32. These air holes 33 are formed as a group at almost equal intervals. It is placed in the axial direction of the shaft portion 3 〇. Further, in each of the respective air supply hole groups, the air supply holes 33 are arranged at equal angular intervals in the circumferential direction of the shaft portion 3a. The bearing rigidity of the journal gas bearing j) is not less than the bearing rigidity of the air bearing B shown in Fig. 5.

The pusher 20 includes a small-diameter portion 20a, a large-diameter portion 20b, a flange portion 20c provided at a lower portion of the large-diameter portion 20b, and an upper portion of the large-diameter portion 20b. The portion 20d and the intermediate portion from the entire portion are formed in the communication hole 34 on the upper side in the axial direction. The small diameter portion 2〇a can be formed in a manner of sliding in the holes 3 1 and 3j and the chamber 3 2 at both ends of the center guide 30, and is almost the same as the hole 3 1 : direct control, and smaller than the diameter of the chamber 32 . The large-diameter portion 20b is formed such that the diameter of the small-diameter portion 20a is large, and the flange portion 3〇b protruding from the center is protruded from the upper portion and is fitted to the center hole of the piston 2 2 in a movable/monthly manner. 2 2 a. The protrusion 20 d is formed to have a smaller diameter portion 2 〇 b having a smaller diameter from the middle of the piston 2 2

1301432 1 V. DESCRIPTION OF THE INVENTION (10) The core hole 22a protrudes above and protrudes from the center hole 1〇b of the uppermost portion of the cartridge 10. One end of the through hole 34 passes through the hole 35 penetrating through the intermediate portion of the push rod 2, and communicates with the chamber 32, and the other end portion % is connected to the compressed air source which is omitted. Further, reference numeral 39 in the figure is a ring member which is fitted to the upper surface portion of the piston 22 and fitted to the protruding portion 2 〇d. The push rod 2 having the above-described configuration is inserted into the center hole 2ja of the piston 22 while inserting the small-diameter portion 20a at the center of the shaft portion 30a, and the projection portion 2 is made In a state in which the center hole i〇b of the case 1〇 protrudes, the spring holder that is contracted between the flange portion 2〇c and the flange portion 3〇b is received and the operation of this embodiment is clarified. In other words, when the supply port 4 and the end portion 36 of the communication hole 34 of the push cup 20 are supplied with compressed air, the self-twisting force is transmitted to the T by the given compressed air, and is fixed. Support in the box]. The center guides the 3〇 for the == side of the main shaft" from the center axis is supported in the radial direction. Also guided by the clock = 'by the journal gas bearing D and the air bearing AS two-way rotation" and the axis 〇-, and is well supported: two, 匕, state 'supply current to the coil 12 to make the main Correction of the rotation, the device that omits the diagram does not move the box 1 in the direction of the axis 0 (the vertical direction of the figure). The workpiece is machined by the drill 3 (not shown (1) above and below 2110-5796-PF ( Nl).ptd Page 13 1301432 V. INSTRUCTION DESCRIPTION (11) ----^___ As described above, in the embodiment related to the present invention, the air supply hole 33 of the outer peripheral surface of the center guide 30 is constituted. Axis 2 = placed in the D system on the inside of the main shaft 1, and the main shaft 1 is surely and stably supported in the bearing direction. Therefore, it is not necessary to provide the bearing B of the conventional spindle device (see Fig. 5). It is conventionally known that shortening the total two breast axes of the main shaft 1 corresponds to omitting the length of the air bearing B, and the main shaft 1 can be lightened by 1 mass) to increase the number of natural shocks. Therefore, the air bearing 2 = the main shaft 1 is not caused. The low rigidity of the bearing can make the spindle 1 rotate in a stable state and at a constant speed. Compared with the spindle of the known structure, even if the setting of the oldest number of revolutions is set to be high, there is no instability, so that the == work rate can be raised. Back to the money | Again, in this embodiment, it is formed The gas supply hole (gas discharge hole) 13 for discharging the gas in the gap between the inner circumferential surface of the cassette and the outer circumferential surface of the main shaft 1 is provided by the air supply port 3 from the air supply port 3 Since the gas supports the main shaft 1 in the air bearing (gas bearing device) 其 of the outer peripheral surface thereof, the above-described journal gas bearing D is added, and the main shaft 1 can be more comfortably supported by the air bearing A. The annular recessed portion 11d in which the flange (annular projection) 1f is accommodated is provided in the case 1〇. Further, the main shaft 1 is accommodated in the annular recessed portion 1d. The flange If is formed so as to protrude in a ring shape in the radial direction of the main shaft 1. Further, there is a gap formed between both side faces of the annular recessed portion 11 (1) and the flange 丨f. The air supply hole (gas discharge hole) 丨5 of the exhaust gas is arranged by the air supply hole 15 A spindle support gas to the axial direction of the thrust gas bearing (gas bearing means

1301432

Axial gas bearing D, air shaft 'by thrust gas bearing C. 5. Inventive Note (12) Set). Therefore, the spindle which is stably supported in the radial direction by the above-described bearing A can be stably supported in the direction of the axis 0. (Different 2 embodiment)

Next, a second embodiment of the present invention will be described in accordance with Fig. 2 . This figure is a cross-sectional view of the spindle device of the present embodiment. Compared with the previous embodiment shown in the drawings, the present embodiment differs only in that the center guide 3〇 and the push rod 2 are formed, and the other portions are almost the same, so the sum is: The elements having the same configuration in the drawings and the fifth embodiment have the same functions: (constitution) 'and the shape is not the same, but the same function is given to the same function (constitution), and the description thereof is omitted. In other words, between the chamber Ua and the coil housing portion 11b in the inside of the cartridge 10, a small-diameter portion 1〇d fixed in a state in which the cylindrical guide member 40 is fitted is formed, and is formed in the small diameter. The segment 丨〇c on the lower side of the portion 1 〇d. The lead member 40 has an inner diameter almost opposite to the outer diameter of the center guide 3A of the present embodiment to be fixed (i.e., fixed to the cartridge 10) to the small-diameter portion 10 held by the segment portion 1〇c. The manner in d is guided by the above-described center guide 30 that is slidably inserted in the direction of the axis 0 (the vertical direction of FIG. 2). In the present embodiment, the center guide 3 includes: a shaft portion 30c having an outer diameter substantially the same as a shaft portion 30a of the center guide 30 in Fig. 1, and is formed therein The upper portion of the shaft portion 3 0 c is an ancient portion 4, and the insertion portion 3〇d of the outer diameter of the large-diameter portion 20b of the push rod 20 of the first embodiment shown in FIG. The flange portion 3 设置 provided between the 3 0 c and the insertion portion 3 〇d and the center hole 22a from the piston 22 protrude above the gold 1 (p 7 of 2)

1301432 V. INSTRUCTION DESCRIPTION (13) The protruding portion 3〇f having a small diameter and protruding from the driver's insertion portion 3〇d. Further, the center guide 30 restricts and relatively moves the piston 22 formed by the flange portion 3〇e and the annular member 39, and is substantially fixed to the piston 22. Such a center guide 30 includes a chamber 32 formed to extend in a central portion along an axial direction, and a plurality of columns (three columns shown) disposed in an axis 0 direction to constitute a journal gas bearing The air supply hole 3 3 of D, and the pressing protrusion 3〇& which protrudes from the lower side and pushes the rod 5 and the guide bushing β. The air supply holes 33 are provided in a plurality of circumferential directions of the center guides 3 at equal angular intervals in the respective rows arranged in the axial direction. Further, as described above, the center guide 3 in the present embodiment also has the function of the pusher 2〇 in the first embodiment, but the configuration of the other members in the above-described manner, and in the present embodiment The operation in the above is substantially the same as the above-described embodiment, and the overlapping description will be omitted. According to this embodiment, in addition to the effect similar to that of the above-described third embodiment, the function of the push rod 2〇 can be guided by the center, and the device can be obtained as compared with the above-described first embodiment. The structure is more simple. (Third Embodiment) Fig. 3 is a view showing the same configuration of the iin1 diagram and the fifth diagram of the publication of the spindle device according to the third embodiment of the present invention. And the elements (components) that have different shapes but are capable of being given the same symbol and omitting them. [7. Where the shaft device is: the air bearing is not provided, and the front end of the main correction is In the spindle device in the embodiment, it is different from the main unit shown in FIG.

1301432 V. INSTRUCTION OF THE INVENTION (14) The opposite side (upper side of Fig. 3) of the collet (tool holding portion) 2 is provided with a flange If and a piston 22A having a piston 22 formed in one (one-weight) manner. Therefore, the air supply port 5 (gas discharge hole) provided in the lower portion of Fig. 1 is disposed at a position relative to the flange 丨f in the central portion of the case 1〇. When the bearing rigidity of the journal gas bearing D is very large, as shown in Fig. 3, since it is not necessary to provide the air bearing A of the spindle device provided in the second drawing, the main bearing can be shortened compared with the first drawing. Full length and light weight

, 曰 is configured by the flange 1 f on the opposite side of the collet 2 at the front end of the main shaft 1. The center of gravity of the Hawthorn spindle 1 is located near the center of the axis 〇 direction, so that when the main and the second rotation are performed, the axis collapse phenomenon of the main shaft 1 can be more effectively prevented, and the two f1 / tongue plugs are constituted by one piston 22A, so It can be easily tuned and the spindle unit is lighter. In the spindle device in the example of the embodiment, the difference between the partial configuration and the hard number is the same, however, since the above-described embodiments are the same: the operation of the embodiment is substantially the same as the above : (Fourth Embodiment) Therefore, the description of the name is repeated.

In the figure, the main component of the spindle device according to the fourth embodiment of the present invention is the same (the element of the same configuration as that of the fifth embodiment) is called an element (which is adjacent to each other and has a different shape but has the same Wei The same symbol is omitted in the 卩# °卩刀) and the description thereof is omitted. The spindle device in the example is different from the one shown in Fig. 1.

2110-5796-PF(Nl).Ptd Page 17 1301432 V. INSTRUCTIONS (15) __ The position of the device is: the air bearing A is not provided, and the opposite side of the collet (tool holding portion) 2 (the 4) The top side of the figure) is configured with the protrusion = 1 = point, and the chuck that uses centrifugal force (centr丨f water, this tool holding device uses this. chuck) as the above-mentioned chuck using centrifugal force (for example, refer to the US No. 223) is a tool for holding the holding member of the tool; the first::: the spindle is rotated to utilize the centrifugal force applied to the holding member. Therefore, in the i-th figure, the yH = of the skirt for loading and unloading the tool and the piston 22 of the driving device of the push rod 20 become unnecessary. Moreover, the components of the dry-reducing main shaft 1 can be made lighter. The present invention has been described above based on the examples, but the second embodiment described in the present invention is not limited to the examples. Further, the scope of the present invention is indicated by the appended claims, and is not limited to the description of the embodiments. Moreover, it is a modification of the scope of the patent application and the scope of the invention.

1301432 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a spindle device according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing a spindle device according to a second embodiment of the present invention. Fig. 3 is a cross-sectional view showing a spindle device according to a third embodiment of the present invention. 4 is a cross-sectional view of a spindle device according to a fourth embodiment of the present invention. FIG. 5 is a cross-sectional view of a conventional spindle device. Symbol 1 Spindle, 3 drill, 6 guide bush 8 disc Spring 10 boxes, 2 cylinder clamps, 5 rods, 7 bottom holes (hollow) 9 rotating parts, 11 holes, 1 2 coils, 1 3, 1 5, 3 3 air supply holes, 20 push rods, 20a small diameter parts , 20b large diameter section, 22, 22A piston, 30 center guide, 32 chamber, 34 communication hole, 39 joint member, 40 guide member, D journal gas bearing, 11, 21 push-out surface, 1 f flange portion , 10c section, 10b center hole, 3 0 c shaft section.

2110-5796-PF(Nl).ptd Page 19

Claims (1)

1301432 ^----Case No. 921210QR_ &, Patent Application No. 1 · A spindle device, including ·································································· » Replacement page [ ψ ψ ' spindle gas bearing device, phase display device; and; the box member is supported in a rotatable manner. The feature is: the empty part is in the above-mentioned main axis, along the axis direction from the one end to the other - Forming a medium-body ground support: a: a guide rod member that is hollowed in a radial direction of the main shaft; and a gas bearing device that is inserted into the middle shaft in the direction of the x-axis Gas emissions? The gap between the circumferential faces of the ΐ-i axis does not hold the above-mentioned main axis on its inner peripheral surface. In the case of the spindle device according to the first aspect of the patent application, the plurality of the guide member are integrally fixed to the above-mentioned case member. The above-mentioned 3 is the spindle device as described in the scope of the patent application, wherein the bar member is a movable, middle upper track with respect to the axial direction of the spindle. ^Component' and also used as a pusher for moving the above-mentioned tool holding device, as in any one of the first to third aspects of the patent application, the main two-sided gas bearing device having the above-mentioned box structure and at The inner peripheral surface and the outer peripheral surface of the above-mentioned main shaft are in contact with each other, and the gas discharge hole of the gas is discharged from the gas discharge hole:: row 1 page 20 2221-5796-PF1 (Nl).ptc 1301432 -- - Case No. 921210Qfi VI. The scope of application for patents holds the above-mentioned main axis on its outer circumference. 5. If the patent application range is from 1st to 10th, wherein any one of the above-mentioned boxes is a %-shaped concave portion of the %; and the uranium of the soil is used to accommodate the axis of the annular recess An annular projection projecting in a ring shape is formed in the radial direction; further comprising a gas bearing device having gas formed on both sides and the gas discharge hole 'on both sides of the annular projection from the gas discharge hole Axis direction.曰I , , •〜〜·~I __丨|_" 丨修 (more) is the replacement of the radial direction of the spindle assembly to form a expansion method relative to the main one in the above-mentioned 1 wrap ^ void discharge 4 male Support for the upper block: 2221-5796-PFl (Nl)