TWI361249B - Fluid transmission device capable of transmitting large fluid rate - Google Patents

Description

1361249 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a large-flow fluid delivery device, and more particularly to a large-flow fluid delivery device suitable for a micro-pump structure. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, industrial printing The fluid transport structure contained in products such as devices is its key technology. It is how to break through its technical bottlenecks with innovative structures and is an important part of development. Please refer to FIG. 1A , which is a schematic diagram of a conventional micro-pull structure when it is not actuated. The conventional micro-pull structure 10 includes an inlet channel 13 , a microactuator 15 , a transmission block 14 , and a barrier film . 12. The compression chamber 111, the substrate 11 and the outlet channel 16, wherein a compression chamber 111 is defined between the substrate 11 and the interlayer film 12, mainly for storing liquid, and the compression chamber 111 is caused by the deformation of the interlayer film 12. The volume has been changed. When a voltage is applied to the upper and lower poles of the microactuator 15, an electric field is generated, causing the microactuator 15 to bend under the action of the electric field to move toward the interlayer film 12 and the compression chamber 111, due to the slight The actuator 15 is disposed on the transmission block 14, so that the transmission block 14 can transmit the thrust generated by the microactuator 15 to the interlayer film 12, so that the interlayer film 12 is also pressed and deformed, that is, as shown in the first figure. As shown in B, the liquid can flow in accordance with the arrow 6 1361249 in the figure, so that the liquid stored in the compression chamber ill after being flowed in through the inlet passage 13 is squeezed, and flows to other predetermined spaces through the outlet passage 16. To achieve the purpose of supplying fluid. Please refer to the second figure, which is a top view of the micro-pull structure shown in FIG. A. As shown in the figure, when the micro-push structure 10 is actuated, the direction of fluid transport is indicated by the arrow direction Y in the figure. As shown, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, and one of the larger openings is connected to the inlet flow passage 191, and one end of the smaller opening is connected to the micro compression chamber 111, and The diffuser 18 connecting the compression chamber 111 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 111 with a larger opening, and has a smaller opening and an outlet flow passage. 192 phase connection, since the inlet diffuser 17 and the outlet diffuser 18 connected to both ends of the compression chamber 111 are arranged in the same direction, different characteristics of the flow resistance of the diffuser in both directions, and the volume of the compression chamber 111 can be utilized. The expansion causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 through the inlet diffuser 17 into the compression chamber 111 and from the outlet flow expander 18 through the outlet flow passage 192. Such a micro-pump structure 10 without a physical valve is prone to a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber 111 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15. Therefore, how to develop a large-flow fluid transport device that can improve the above-mentioned conventional techniques is an urgent problem to be solved. 7 1361249 SUMMARY OF THE INVENTION The main object of the present invention is to provide a high-flow fluid delivery device that solves the phenomenon that the micro-pull structure of the prior art is prone to fluid recirculation during fluid transfer. In order to achieve the above object, a broader aspect of the present invention provides a high-flow fluid delivery device for transferring a fluid, comprising: a valve body having at least one sealing ring; and a valve body cover The valve body seat has at least one sealing ring; the valve body film is disposed between the valve body seat and the valve body cover body, and has at least one valve switch structure, and the valve switch structure has a valve piece and a plurality of a hole and a plurality of extensions; and an actuating device comprising an actuator and a vibrating membrane, the vibrating membrane being separated from the valve body cover in an unactuated state to define a pressure chamber; wherein At an actuator having an operating frequency greater than 30 Hz on the actuator, the actuating device will cause a change in the volume of the pressure chamber, thereby driving the opening and closing of the valve switch structure so that the flow system through the pressure chamber reaches 60 ml. Large traffic transmission above /min. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of Please refer to the third figure, which is a schematic structural view of the fluid delivery device of the first preferred embodiment of the present invention. As shown in the figure, the fluid delivery device 20 of the present invention can be applied to medical technology, computer technology, and printing. Or an energy industry, and can transport gas or liquid, but not limited thereto, the fluid delivery device 20 is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, a plurality of temporary storage rooms, The actuating device 24 and the cover body 25 are formed, wherein the valve body seat 21, the valve body cover body 22 and the valve body film 23 form a fluid valve seat 201, and are formed between the valve body cover body 22 and the actuating device 24. A pressure chamber 226 is primarily used to store fluid. The fluid transport device 20 is assembled in such a manner that the valve body film 23 is disposed between the valve body seat 21 and the intermediate body cover 22, and the valve body film 23 is disposed corresponding to the valve body seat 21 and the valve body cover body 22, A first temporary storage chamber is formed between the valve body film 23 and the valve body cover 22, and a second temporary storage chamber is formed between the valve body film 23 and the valve body seat 21, and the valve body cover 22 is formed. The corresponding position is further provided with an actuating device 24, which is assembled by a vibrating membrane 241 and an actuator 242 for driving the fluid transport device 20, and finally, the cover 25 is placed on Above the actuating device 24, the valve body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24 and the cover body 25 are sequentially stacked to complete the assembly of the fluid transport device 20. . The valve body seat 21 and the valve body cover body 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to the fourth figure and cooperate with the third figure, wherein the fourth figure is shown in the third figure. Schematic diagram of the side of the valve body seat. As shown, the valve body seat 21 has an inlet flow path 211 and an outlet flow path 212. The flow system can be input from the outside. According to the inlet 9 1361249, please refer to the fifth figure B. The cross-sectional structural view of FIG. 5A is as shown in the figure, the upper surface 220 of the valve body cover 22 is partially recessed' to form a pressure chamber 226 which is coupled to the actuator of the actuating device 24. 242 • Correspondingly, the pressure chamber 226 is in communication with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously with the outlet valve passage 222. Thus, when the actuator 242 is actuated by voltage, the actuator 24 is actuated. The upward convex deformation 'causing the volume expansion of the pressure chamber 226 to generate a negative pressure difference' allows fluid to flow into the pressure chamber 226 through the inlet valve passage 221, after which, when the direction of the electric field applied to the actuator 242 is changed Actuator 242 will actuate the actuator The lower concave deformation pressure chamber 226 contracts and decreases in volume, causing the pressure chamber to 226 to create a positive pressure differential with the outside, causing fluid to flow out of the pressure chamber 226 from the outlet valve passage 222, while at the same time 'the same portion of the fluid will Flowing into the inlet valve passage 221 and the inlet temporary chamber 223, however, since the inlet valve structure 231 (shown as shown in FIG. 6C) at this time is in a state of being closed by pressure, the fluid does not pass through the inlet valve piece. 231, the reverse flow phenomenon occurs, and the fluid temporarily stored in the inlet temporary storage chamber 223 is further actuated by the actuator 242, and the actuator device 24 is repeatedly deformed again to increase the volume of the pressure chamber 226. At this time, the inlet temporary storage chamber 223 passes through the inlet valve passage 221 and flows into the pressure chamber 226 to carry out fluid transportation. In addition, the valve cover body 22 also has a plurality of groove structures. In the embodiment, the upper surface 220 of the valve body cover 22 has a groove 227 ′ disposed around the pressure chamber 226. The surface 228 has a groove 224 disposed around the inlet temporary cavity 223, a groove 225 surrounding the outlet door channel 222, and a groove 229. Similarly, the 1361249 groove structure is used for a sealing ring. 27 (as shown in Figure 7A) is disposed therein. Please refer to the sixth figure A and cooperate with the third figure. The sixth figure A is the structural diagram of the valve body film shown in the third figure, as shown in the figure. The valve body film 23 is mainly produced by conventional processing, or yellow light etching, or laser processing, or electroforming processing, or electric discharge machining, and is a sheet structure having substantially the same thickness, and has a plurality of layers thereon. a hollow valve switch includes a first valve switch and a second valve switch. In this embodiment, the first valve open relationship is an inlet valve structure 231, and the second valve open relationship is an outlet valve structure 232, wherein the inlet valve structure 231 series with inlet valve piece 2313 And a plurality of hollow holes 2312 disposed around the inlet valve > 1 2313, and further having an extension 2311 connected to the inlet valve piece 2313 between the holes 2312, when the valve body film 23 is subjected to a self-pressure chamber When the downward pressure is transmitted from 226, as shown in FIG. 7C, the inlet valve structure 231 is entirely flatly attached to the valve body seat 21, and the inlet valve piece 2313 is abutted against the groove 216. The protruding portion seals the opening 213 of the valve body seat 21, and the hollow hole 2312 and the extending portion 2311 of the outer periphery thereof are floated on the valve body seat 21, so that the closing of the inlet valve structure 231 causes the fluid to be closed. Can't flow out. When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, since the seal ring 26 disposed in the groove 216 of the valve body seat 21 has provided the inlet door structure 231 - Preforce, Therefore, the inlet valve piece 2313 can generate a larger pre-covering effect by the support of the extending portion 2311 to prevent backflow, and the displacement of the valve structure 231 into the 12 1361249 port is caused by the negative pressure of the pressure chamber 226 ( As shown in FIG. 6B, at this time, the fluid can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and through the inlet temporary storage chamber 223 and the inlet valve passage. The 221 is transferred into the pressure chamber 226, so that the inlet valve structure 231 can be quickly opened or closed in response to the positive and negative pressure differences generated by the pressure chamber 226 to control the ingress and egress of fluid and prevent fluid from flowing back to the valve. On the body seat 21.

Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. 'The seal ring 26 around the outlet valve structure 232 is disposed in a direction opposite to the seal ring 27 of the inlet valve structure 231, as shown in FIG. 6C, and thus is set when the pressure chamber 226 is compressed to generate a thrust. The seal ring 27 in the recess 225 of the valve body cover 22 will provide an outlet valve structure 232 - Preforce, such that the outlet flap 2323 can be provided with a greater pre-tightening effect by the support of the extension 2321. In order to prevent backflow, when the outlet valve structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, at this time, the fluid can flow from the pressure chamber 226 through the valve body cover 22 to the valve via the hollow hole 2322. The outlet of the body seat 21 is temporarily stored in the 215 and can be discharged through the opening 214 and the outlet flow path 212, so that the pressure is opened from the pressure chamber to the inside of the pressure chamber by the mechanism of the σ valve structure 232. seventh A, in order to achieve delivery of the functional fluid. The device is shown in the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. In the present embodiment, all the groove junctions 13 1361249 are provided with sealing rings 26, respectively. The groove 224, 225, and 229 are also respectively provided with a sealing ring 27', which is made of a rubber material which is excellent in chemical resistance, and is not limited thereto. The groove 216 is disposed on the valve body seat 21 around the gap 213. The inner sealing ring can be a ring structure having a thickness greater than the depth of the groove 216, so that the sealing ring 26 disposed in the groove 216 protrudes from the upper surface 210 of the valve body seat 21 to form a micro convex structure. Therefore, the inlet valve piece 2313 of the inlet valve structure 231 of the valve body film 23 which is disposed on the valve body seat 21 is formed with an upward convexity due to the micro convex structure of the sealing ring 26, and the remaining part of the valve body film 23 is The valve body cover 22 abuts against the top' such a micro-convex structure pushes the inlet valve 231 to create a pre-force effect, which helps to create a greater pre-tightening effect to prevent backflow, and because the sealing ring 26 is upward The raised micro-convex structure is located in the valve body The inlet 23 of the valve structure 231, so that the inlet valve structure 231 is not actuated when the inlet valve 2313 and the seat body between the top surface 21 of 21〇

When the body body 22 and the valve body cover 22 are closely attached to the actuator unit 1361249, fluid leakage is prevented. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-convex structure of the valve body 21 and the valve body cover 22 can also be a semiconductor process, for example, yellow etching. Or coating or electroforming technology is formed directly on the valve body seat 21 and the valve body cover 22. Please refer to FIG. 7A, B, and C at the same time. As shown in the figure, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the seal ring 26 and the valve body seat 21 are assembled correspondingly with each other, Thereafter, the opening 213 in the valve body seat 21 corresponds to the inlet valve structure 231 on the valve body membrane 23 and the inlet valve passage 221 on the valve body cover 22, and the opening 214 on the valve body seat 21 is connected to the valve body. The outlet valve piece 232 on the film 23 and the outlet valve passage 222 on the valve body cover 22 correspond to each other, and since the seal ring 26 is disposed in the groove 216, the inlet valve structure 231 of the valve body film 23 is slightly convex. Above the valve body seat 21, a pre-force force is generated by the seal ring 26 located in the recess 216 contacting the valve body film 23, so that the inlet valve structure 231 is in contact with the valve body seat when it is not actuated. The upper surface 210 of the 21 forms a gap. Similarly, the outlet valve structure 232 also forms a gap with the lower surface 228 of the valve body cover 22 in the same manner as the sealing ring 27 is disposed in the recess 225. When the actuator 242 is driven, the actuating device 24 produces a bending deformation, as in the seventh drawing B. As shown, the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the volume of the pressure chamber 226 is increased, thereby generating a suction force, so that the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 are subjected to An upward pulling force and a design of the sealing rings 26, 27 having a pre-stress 15 1361249 fitted in the grooves 216, 225 of the valve body seat 21 and the valve body cover 22 allows the fluid to be transported The situation of recirculation does not occur, and the transmission of high efficiency is achieved. The implementation of the inlet valve structure and the outlet valve structure of the valve body film of the fluid delivery device of the present invention is not limited to the third figure and the sixth figure A. The inlet valve structure 231 and the outlet valve structure 232 may also be of a valve structure having the same thickness, the same material, but different rigidity, wherein the rigidity of the valve structure depends on the appearance of the valve structure, the extension included in the ® The width and number of the parts, and the vibration frequency of the control actuator 24 to adjust the flow rate of the fluid, please refer to the eighth figure A to E, which is the valve of the preferred embodiment of the present invention. Schematic diagram of the structure, as shown in FIG. 8A, the valve structure 81 has a valve piece 811, a hollow hole 812 disposed around the periphery of the valve piece 811, and an extension extending from the hole 812 to the valve piece 811. In the embodiment 813, the valve piece 811 has a circular structure, and the number of the holes 812 can be 3. As for the number of the extending portions 813 φ is 3 and the shape thereof can be linear, the shape of the valve piece 811 is The number and shape of the holes 812 and the extensions 813 are not limited thereto. Referring to FIG. 8B again, in some embodiments, the valve structure 82 also has a valve plate 821, a hole 822, and an extension 823, as for the valve. The connection relationship between the sheet 821, the hole 822 and the extending portion 823 is the same as described above, and therefore, the description will not be repeated. In the present embodiment, the valve piece 821 has a circular '-shaped structure, and the number of the holes 822 can be 3, as for the extension. The number of the portions 823 is 3 and the shape thereof can assume a tangential shape, but the shape and shape of the valve piece 821, the hole 822, and the extending portion 823 are not limited thereto. 17 1361249 Referring again to FIG. 8C, in some embodiments, the valve structure 83 also has a valve plate 831, a hole 832, and an extension 833. The connection between the valve piece 831, the hole 832, and the extension 833 is tied to The same applies to the above description. Therefore, in the present embodiment, the valve piece 831 has a circular structure, and the number of the holes 832 can be 4, and the number of the extending portions 833 is 4 and the shape thereof can assume an S-shaped shape. However, the number and shape of the valve piece 831, the hole 832, and the extending portion 833 are not limited thereto. Referring to FIG. 8 again, in some embodiments, the valve structure 84 also has a valve piece 841, a hole 842, and an extension 843. The connection relationship between the valve piece 841, the hole 842, and the extension 843 is the same as described above. Therefore, in the present embodiment, the valve piece 841 has a circular structure and has a toothed structure 8411 around it. The number of the holes 842 can be three. As for the number of the extending portions 843, the shape is three. The linear shape may be present, but the number and shape of the valve piece 841 shape, the hole 842, and the extension portion 843 are not limited thereto. Referring again to FIG. 8E, in some embodiments, the valve structure 85 also has a wide strip 851, a hole 852, and an extension 853. The connection between the valve piece 851, the hole 852, and the extension 853 is the same as described above. Therefore, in the present embodiment, the valve piece 851 has a circular structure and has a toothed structure 8511 around it. The number of the holes 852 can be three, and the number of the extensions 853 is three and its shape. The tangential shape can be presented, but the shape and shape of the valve piece 851, the hole 852, and the extension 853 are not limited thereto. Of course, the embodiment of the valve structure applied to the valve body film of the fluid conveying device of the present invention is not limited to the type of the state disclosed in the eighth embodiment A to E, and may be changed by other means as long as It is the use of a valve structure having the same thickness 'same material' value that is different in rigidity and is protected by the present invention. ^ The actuator 242 in the actuating device 24 is a piezoelectric plate, which can be fabricated by using a piezo-picked titanate (PZT) series piezoelectric powder having a piezoelectric coefficient, wherein the thickness of the actuator 242 can be Between looemi 5〇〇#m, a preferred thickness of 150/zm to 250//m' Young's coefficient is from 1〇〇 to 15〇GPa, and is not limited thereto. The material of the actuator 242 may be a single layer of metal or a double layer structure in which a layer of polymer material is attached to the metal material. The thickness of the vibrating film 241 attached to the actuator 242 may be 100#m to 300//m. The preferred thickness is looem to 25〇em, and may be i〇#m to 200/zm, and the thickness is preferably 2〇/zm to 1〇〇//m, and its Young's coefficient can be between 60~300Gpa. The vibrating film 241 may be made of a single layer of metal, such as a stainless steel material, having a Young's modulus of 24 〇 Gpa, a thickness of between 30 βπι and 80//in, or 200 m to 250 # m. For example, copper has a Young's modulus of l〇〇Gpa, a thickness of 30; tzm to 80//m, or 200 //m to 250 //ιη, and is not limited thereto. In addition, in the present embodiment, the material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, such as polycarbonate (Polycarbonate PC), Polysulfone (PSF), ABS tree-fat. (Acrylonitrile Butadiene Styrene), Longitudinal Low Density Polyethylene (LLDPE), Low Density Polyethylene (LDPE), High Density Polyethylene (HDPE), Polypropylene (pp), Polyphenylene

Sulfide, PPS), para-polystyrene (SPS), polyphenylene ether (pp〇), polyacetal (?〇1丫3〇6131, 卩01〇, polybutylene terephthalate (叩7) , thermoplastic polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer (COC) and other thermoplastic materials, but not limited to this. In this embodiment, the valve body cover The pressure chamber 226 has a depth of between 10//m and 300 #ra, and the diameter may be between 1 〇 3 〇 mm or 3 〜 20 mm, and is not limited thereto. The film 23 can be produced by conventional processing or yellow light engraving or laser processing or electroforming processing or electric discharge machining, and the material thereof can be any organic polymer material or metal with good chemical resistance, and the valve body film 23 adopts the height. The molecular material has a modulus of elasticity of 2 to 20 GPa, such as Polyimide (PI), and its modulus of elasticity, that is, the Young's modulus (E value) may be 10 GPa'. When the valve body film 23 is made of a metal material, for example, Metal materials such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel have a Young's modulus of 2 to 240 GPa. The thickness of the film 23 is uniform, and may be between 10/ζιη and 50_, and most preferably 2lAn^4Mm, and the Young's modulus may be 2 to 240 GPa. In addition, in the embodiment, the valve body film 23 is included. The number of extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 must be greater than 2, the width may be between 1 〇 and 5 〇〇, and the shape may be a linear type as shown in the eighth figure A to E. State, tangential or 疋S-shaped type, but not limited to this, and the diameter range of the concentric circles of the position of the extensions 2311, 2321, the inner diameter / outer diameter range can be: 2mm / 3_, 2 2mm/3. 5 faces, 3mm/5mm, 4ram/6mm, or 4mm/8mm, but not limited to this. As for the diameter range of the inlet piece 2313 and the outlet port 1249 valve 2323 At 2 to 4 minutes.

In some embodiments, an operating frequency greater than 5 Hz may be applied to the actuator 242 of the actuator 24 in response to a flow rate fluid demand of typically 1 to 6 〇 ml/min in response to a flow rate, in conjunction with the following conditions: The thickness of the actuator 242 is about 1 〇〇 to 500 / / m. The preferred thickness is 150 // m to 250 m, and the Young's modulus is about l〇〇-150 Gpa. The material can be a single layer. A metal or a two-layer structure composed of a metal material and a polymer material. And the thickness of the vibrating film 241 is between 1 〇〇em and 300 // m, preferably from 1〇〇em to 250/ζπι, and the Young's coefficient is 6〇-3〇〇GPa, and the material can be one Layer metal, such as stainless steel, with a Young's modulus of 240 Gpa and a thickness of 20 〇em to 250/zm, such as copper metal, with a Young's modulus of 100 GPa and a thickness of 2 〇〇/ /m to 25〇em, but not limited to this.

The depth of the pressure chamber 226 is between 1 〇//„1 to 3〇〇"111, and the straight line is between 10~30 mm. The valve body seat 21 and the valve body cover 22 are of a quality system. The thermoplastic plastic material can be used, and the whole body of the valve body cover 22 is uniform. Year! The thickness of the inlet door structure 23 on the reading film 23 is 〇#ιη to 5〇em, and the thickness is preferably "(7) to 彳 ° 冓 Young's coefficient is 2 to 240 GPa, which can be used for polymer materials or metal film 23, and its elastic modulus is 2 to 2" 'Valve body = Polyimide (PI) The elastic modulus is 丨Pa, and the film 23 can also be made of a metal material, such as the Syrian and Ming people's Pa's body.... Nickel, recorded 21 1361249 metal materials such as gold, copper, copper alloy or stainless steel, the Young's modulus The number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be between 10 and 500 # m, and the shape may be as follows. The linear type, tangent type or S-shaped type shown in the eighth figure A to E' is not limited to this, and is extended Stretch. The diameter range of the concentric circles of the position of P 2311, 2321, the inner diameter / outer diameter of the basin can be: 2mm / 3mm, 2. 2mm / 3. 5mm, 3mm / 5mm, 4mm / 6mm, 4mm / 7mm or It is 4mm/8mm, but not limited thereto. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. The pre-action structure of the valve body film 23 is a sealing ring. The associated parameter conditions of the actuator 242, the vibrating membrane 241, the pressure chamber 226, and the valve body membrane 23 can drive the inlet valve structure 231 and the outlet valve structure 232 of the valve body membrane 23 to open and close, thereby driving the fluid to be single. Flowing and allowing the fluid flowing through the pressure chamber 226 to reach a flow output of 1 to 60 ml per minute, and allowing the suction of the fluid into the fluid delivery device to be less than 2 kPa, and the fluid is pushed out of the fluid delivery device The pressure may be less than 5 kPa. In some * embodiments, an operation greater than 30 Hz may be applied to the actuator 242 of the actuator 24 in order to achieve a large flow fluid delivery requirement of greater than 60 ml/min in response to the flow rate. Frequency, and with the following conditions: The thickness of the 242 is about 100/ira to 50 〇em. The preferred thickness is from 15 〇//m to 250 // m, and the Young's modulus is about 100-150 Gpa. The material can be a single layer of metal or The two-layer structure consisting of a metal material and a high molecular material of 22 molecules, and the thickness of the vibrating thin mold 241 is preferably " (^ is pulled to 25 〇 between l00/zm and 300#m, and the material thereof can be a single The Mm' Young's coefficient of the layer metal is 6〇_3〇〇GPa 'the system number is 240GPa, the thickness is ^, such as stainless steel material, and its Young's metal material, its Young's teaching" in 2〇0&quot ;m to 250#m, such as copper to -. One:: is the thickness of the system. The depth of the 3=226 is between - the quality system can be heated, and the materials of ^:1 and _frequency 22 are consistent. The thickness of the threshold body 22 is the thickness of the inlet valve on the valve body film 23, and the thickness of the door is preferably 2 to 24 GGpa, which can be a polymer material; ^ «π to 4_' film 23 _ The polymer material, its material system = genus material, valve body such as polyamidamine (10) yimide, ρι), its elasticity is (4) Gpa, and the film 23 can also be made of metal materials, such as Ming, = ^ 〇 coffee, valve body gold , copper, copper alloy or; bismuth; stainless steel and other metal materials, =, nickel, nickel 2~240Gpa. " ^ coefficient is, and the number of extensions 2311, 2321 of the door structure 232 included in the valve body film 23 must be large; between 1〇~500"m, the shape can be Such as the eighth figure A, : ^ linear type, tangential type or s-shaped plastic state, but not limited to this, and the diameter range of the two concentric circles of the position of the extensions 2311, 2321 | its = 23 1361249 diameter / The outer diameter range can be: 2mm / 3mm, 2. 2mm / 3. 5mm, 3mm / 5mm, 4mm / 6mm, 4mm / 7mm or 4mm / 8mm, but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. The pre-action structure of the valve body film 23 is a seal ring. By the above-mentioned actuator 242, diaphragm 241, pressure chamber 226 and valve body film 23 and other related parameter conditions, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, _ drive The fluid flows in one direction, and the fluid flowing through the pressure chamber 226 can reach a large flow output of more than 60 ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be greater than 2 kPa, and the fluid is transported by the fluid. The pressure introduced inside the device can be greater than 3 kPa. In some embodiments 'in order to accommodate a microdroplet flow fluid delivery requirement at a flow rate of less than 1 ml/inin, an operating frequency of less than 20 Hz can be applied to the actuator 242 of the actuator 24 in conjunction with the following conditions: The thickness of 242 is about ι〇〇/ζηι to 50〇//m. The special thickness is 150 # m to 250 " m, the Young's coefficient is about 100 l50Gpa'. The material can be a single layer. A metal or a two-layer structure composed of a metal material and a polymer material. And the thickness of the vibrating film 241 is between 1 〇 / / ιη to 200 / zm, preferably 20 " m to loo", Young's coefficient is 6 〇 3 〇〇 Gpa, and the two qualities can be - single layer metal The composition is, for example, a non-recorded steel material, and the Young's system* 2 is 24 〇Gpa' thickness system is between 30 (four) and 80 _, for example, the copper metal material has a Young's coefficient of l〇〇Gpa and a thickness of 3〇. _ to 8 〇, but not limited to this. 24 丄 The depth of the room 226 is between... 0...The door is straight from "between 3 and 20". The body of the valve body 21 can be made of thermoplastic plastic material, and the material of ^^ 2 is uniform. The needle and the overall thickness of the valve body disk 22 are on the valve body film 23. The thickness of the D fat Μ & 232 is Π), to 5. _, the Young's coefficient of the outlet valve structure of H23 is 2~240Gpa, which can be 8 and 21 "m to 4〇"m,

For the backing material or the metal material, the intervening membrane 23 is made of the knife material, which has a modulus of elasticity of 2 to 20 GPa, such as polyiminamide (10) yimide 'Pl), and its elastic modulus W: the film 23 can also be made of a metal material. , example (4) 1 alloy, nickel, ^

Metals such as gold, copper, financial or *axis (4), Qian's system, 2 2 ~ 240 Gpa. A

And the number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be 10~500/zm, and the shape may be as the eighth 胄A~E The linear type, tangential type, cancer or S-shaped type shown, but not limited thereto, and the diameter range of the two concentric circles of the position where the extending portions 2311 and 2321 are located, the inner/outer diameter fe can be 2mm/3mm, 2. 2mm/3. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mro, but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. The pre-action structure of the valve body film 23 may be a sealing ring or a semiconductor process, such as a yellow light etching or a coating or electroforming technique, directly formed on the valve body seat 21 and the valve body cover 22. Micro convex structure. By the combination of the above-mentioned actuator 242, the vibrating membrane 241, the pressure chamber 226, and the valve body film 23, such as the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body membrane 23 can be driven to open and close. Driving the fluid to flow in one direction, and allowing the fluid flowing through the pressure chamber 226 to reach a microdroplet flow output of 1 m 1 per minute, and allowing the suction of the fluid into the fluid delivery device to be less than 20 kPa, and the fluid is The pressure introduced inside the fluid delivery device can be less than 30 kPa. In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the integrally formed inlet valve structure 231 can cooperate with the softness disposed in the groove 216 of the valve body seat 21. The seal ring 26 opens the inlet valve structure 231 to deliver fluid to the pressure chamber 226, and the actuator device 24 changes the volume of the pressure chamber 226, thereby causing the outlet valve structure 232 to fit over the valve body cover 22. The soft seal ring 27 in the recess 225 is opened to allow fluid to be delivered outside the pressure chamber 226. Since the pressure chamber 226 can generate fluid suction and thrust at the moment of volume expansion, the valve on the valve body film 23 is engaged. The rapid opening and closing reaction of the structure allows the fluid to reach a general flow rate, a large flow rate or the transmission of micro droplets, and effectively blocks the countercurrent of the fluid. In summary, the fluid conveying device of the present invention is applicable to a micro-pump structure, which is mainly composed of a valve body seat, a valve body film, a valve body cover body, a vibration film and an actuator, which are driven by the actuating device. The piezoelectric actuation causes the volume of the pressure chamber to change, thereby opening or closing the inlet/outlet valve structure formed on the same valve body film, with the soft sealing ring and the concave surface disposed on the valve body seat or the valve body cover The tank and the fluid are transported. Since the fluid transport device of the present invention can transport gas and fluid, not only has excellent flow rate and pressure of 26 1361249, but also self-capture liquid in the initial state, and has high precision controllability. And because it can transport gas, it can eliminate bubbles in the fluid transport process to achieve high efficiency transmission. In addition, by controlling the frequency of operation imparted to the actuator of the actuator, and in conjunction with the different conditions of other components, the fluid delivery device can be delivered to a typical flow rate, large flow rate, or microdroplet in response to demand. Therefore, the large-flow fluid delivery device in this case is of great industrial value and is submitted in accordance with the law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

27 1361249 [Simple description of the diagram] Figure A: This is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated. First Figure B: This is a schematic diagram of the structure of the first Figure A when it is activated. Second figure: It is a top view of the micro-push structure shown in the first figure A. Fig. 3 is a schematic view showing the structure of the fluid transporting device of the first preferred embodiment of the present invention. Figure 4: It is a schematic view of the side structure of the valve body seat shown in the third figure. Fig. 5A is a schematic view showing the structure of the back surface of the valve body cover shown in the third figure. Figure 5B is a schematic cross-sectional view of the fifth Figure A. Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure. Figure 7A is a schematic view of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. Figure 7B is a schematic view showing the state of expansion of the pressure chamber of Figure 7A. Figure 7C is a schematic view showing the compression state of the pressure chamber of Figure 7B. Eighth Figs. A to E: are structural illustrations of the valve structure of the preferred embodiment of the present invention. [Main component symbol description] Substrate: 11 Interlayer film: 12 Transmission block: 14 Outlet channel: 16 Micro-pull structure: 10 Compression chamber: 111 Inlet channel: 13 Microactuator: 15 28 1361249

Inlet expansion.17 Flow direction: X, Y Fluid delivery: 20 Body seat: 21 Body film: 23 Cover: 25 Actuator: 242 Outlet runner: 192, 212 Upper surface: 210, 220 Surface: 228 inlet valve passage: 221 groove: 216, 217, 218, pressure chamber: 226 inlet valve structure: 231 inlet valve plate: 2313 valve structure: 81, 82, 83 outlet diffuser: 18 direction: a, b Fluid seat: 201 Body cover: 22 Actuator: 24 Vibrating membrane: 241 Inlet runner: 191, 211 Opening: 213, 214 Outlet chamber: 215 Inlet chamber: 223 Outlet valve channel: 222 224, 225, 227, 229 Sealing ring: 26, 27, 28 Outlet valve structure: 232 Outlet valve: 2323, Hole: 2312, 2322 84 Valve: 811, 82 831, 84 851 Hole: 812, 822, 832, 842, 852 extensions·· 231 232 813, 823, 833, 843, 853 Toothed structure: 8411, 8511 29

Claims (1)

Revised replacement page on December 9, 2011 X. Patent application scope · · Used to transport a fluid, A large-flow fluid delivery device comprising: a seat having at least one sealing ring; a dense (four) valve body cover disposed on the valve body seat and having at least one, a valve body film disposed thereon (4) The seat and (4) the body cover body has at least one __ structure, the __ system has a valve piece, a plurality of holes and a plurality of extensions; and an actuating device comprising an actuator and a a vibrating membrane, the vibrating membrane is separated from the fresh body to define a pressure chamber; wherein the valve body seat and the valve body cover the sealing ring and the valve body 4, the film phase abuts to form a pre-force, so that a gap is formed between the valve body film and the valve body seat and the valve body cover, when the operating frequency is greater than 3 Hz at the actuating device In the actuator, the actuating device will cause the pressure chamber to change in volume, thereby driving the opening and closing of the valve switch structure, so that the flow system flowing through the pressure chamber reaches a large flow rate of 60 ml/min or more. . 2. The large flow fluid delivery device of claim 1, wherein the valve body seat and the valve body cover system are formed by injection of a thermoplastic plastic material. 3. The large-flow fluid transfer device according to claim 1, wherein the valve body seat and the seal ring portion included in the valve body cover are replaced by the replacement of the 1361 249-2011 December 9 a plurality of grooves protruding from the valve body seat and the valve body cover. 4. The high-flow fluid transport device of claim 1, wherein the vibrating membrane is copper metal, and the optimum thickness is 200 // Π 1 to 250 // m, and the Young's coefficient is 10 OGPa. 5. The high-flow fluid delivery device of claim 1, wherein the vibrating membrane is a stainless steel material having an optimum thickness of 200 // m to 250 // m and a Young's modulus of 240 GPa. 6. The high flow fluid delivery device of claim 1, wherein the number of extensions is greater than two. 7. The high flow fluid delivery device of claim 1, wherein the extension has a width of from 10/m to 500/zm. 8. The large flow fluid delivery device of claim 1, wherein the valve plate has a diameter ranging from 2 mm to 4 inches. 9. The large flow fluid delivery device of claim 1, wherein the concentric circle diameter ratio of the position of the valve piece is: 2 mm/3 mm, 2.2 mm/3.5 mm, 3 mm/5 mm, 4 mm/ 6mm, 4mm/7mm or 4mm/8mm. 10. The high flow fluid delivery device of claim 1, wherein the suction force of the fluid into the fluid delivery device is greater than 20 kPa. 11. The high flow fluid delivery device of claim 1, wherein the pressure of the fluid from the interior of the fluid delivery device is substantially greater than 30 kPa. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 13. The high flow fluid delivery device of claim 1, wherein the sputum valve sheet comprises a toothed structure. 14. The high flow fluid delivery device of claim 1, wherein the extension is substantially tangential. 15. The high flow fluid delivery device of claim 1, wherein the extension is substantially linear. The large flow fluid delivery device of claim 1, wherein the extension is substantially S-shaped. 17. For a large-flow fluid conveying device as described in item 1 of the patent scope, the optimum thickness of the eight-story &quot;Xuankuo body &gt; special film is 21 v m to 40 // m. 18. The high flow fluid delivery device of claim 1, wherein the actuator has a thickness of lGGpHOO/zin. The large flow fluid delivery device of claim 1, wherein the optimal thickness of the actuator is 15 () / / 111 to 250 / m. 20. The large flow fluid delivery device of claim 1, wherein the Young's coefficient of the 5H actuator is 100 to 150 GPa. 21. The large flow fluid delivery device of the Shenqing patent scope, wherein the vibrating membrane is a single layer metal structure. 22. The high-flow fluid transport device according to claim 1, wherein the vibrating membrane is a two-layer structure formed by laminating a metal material and a polymer material. 23. For the large-flow fluid conveying device described in the May 1 patent I color cofferdam, 32 丄----_ December 9, 2011 revised replacement page where the thickness of the vibration (4) is (10) _ to fine S--24. The high-flow fluid conveying device according to claim 1, wherein the optimum thickness of the vibrating diaphragm is 100//m to 250 //m. 25. For the high-flow fluid transfer device described in claim 1, the pressure chamber has a depth of l〇em to 300/zm and a diameter of 10 mm to 30 mm. The large flow fluid delivery device of claim 1, wherein the valve body seat and the valve body cover are made of a thermoplastic material. 27. A high flow fluid delivery device for delivering a fluid comprising: • a valve body seat having at least one sealing ring; a valve body cover being disposed on the valve body seat And having at least one sealing ring; a valve body film disposed between the valve body seat and the valve body cover ′ and having at least one valve switch structure, the valve switch structure respectively having a valve piece and a plurality of a hole and a plurality of extensions; and an actuator comprising an actuator and a vibrating membrane separated from the wide body to define a pressure chamber when in an unactuated state The depth of the pressure chamber is 1〇#m to 3〇(), and the diameter of the 111' is 10mm to 30mm; wherein the sealing body of the valve body seat and the valve body cover is opposite to the valve body film Forming a pre-force to form a gap between the valve body film and the valve body seat and the valve body cover, respectively, when applying an actuator having an operating frequency greater than 3 Hz to the actuating device Above, the actuating device will cause the pressure 33 1361249 2011 On December 9th, the replacement page force chamber volume change was modified to drive the opening and closing of the valve switch structure so that the flow system flowing through the pressure chamber reached a large flow rate of 6 〇 ml/ffiin or more. a large-flow drooling fluid transporting device for transporting a fluid, comprising: a valve body seat having at least one sealing ring; a valve body cover body disposed on the valve body seat and having At least one sealing ring; a valve body film disposed between the wide body seat and the valve body cover body, and having at least one valve switch structure, the valve switch structure respectively having a valve piece, a plurality of holes, and a plurality of extensions; and an actuating device comprising an actuator and a vibrating membrane, the vibrating membrane being separated from the valve body cover in an unactuated state to define a pressure chamber, the fluid being drawn into the The suction force inside the pressure chamber is greater than 20 kPa, and the pressure of the fluid from the inside of the pressure chamber is greater than 30 kPa; wherein the seal ring of the body seat and the valve body cover abuts against the valve body film Forming a pre-force to form a gap between the valve body film and the valve body seat and the valve body cover respectively. When an operating frequency greater than 30 Hz is applied to the actuator of the actuating device, Moving device This causes the pressure chamber to change in volume&apos; which in turn drives the opening and closing of the valve switch structure so that the flow system flowing through the pressure chamber reaches a large flow rate of 6 〇 ml/min or more. 34