TWI388727B - Fluid vavle assembly - Google Patents

Description

Fluid seat

This case relates to a fluid valve seat, and more particularly to a fluid valve seat suitable for use in a fluid delivery device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

Please refer to the first figure (a), which is a schematic diagram of the conventional micro-pull structure when it is not actuated. The conventional micro-push structure 10 series includes an inlet channel 13, a microactuator 15, a transmission block 14, and a partition. The film 12, the compression chamber 111, the substrate 11 and the outlet channel 16 define a compression chamber 111 between the substrate 11 and the interlayer film 12, mainly for storing liquid, which will be compressed by the deformation of the interlayer film 12. The volume of chamber 111 is altered.

When a voltage is applied to the upper and lower poles of the microactuator 15, an electric field is generated, causing the microactuator 15 to bend under the action of the electric field to move toward the interlayer film 12 and the compression chamber 111, due to the slight The actuator 15 is disposed on the transmission block 14, so that the transmission block 14 can transmit the thrust generated by the microactuator 15 to the interlayer film 12, so that the interlayer film 12 is also pressed and deformed, that is, as shown in the first figure. (b), the liquid can flow in the direction of the arrow X in the figure, so that the liquid stored in the compression chamber 111 after being flowed in through the inlet passage 13 is squeezed, and flows through the outlet passage 16 to other predetermined spaces. In order to achieve the purpose of supplying fluid.

Please refer to the second figure, which is a top view of the micro-push structure shown in the first figure (a). As shown in the figure, when the micro-push structure 10 is actuated, the direction of fluid transport is indicated by the symbol Y in the figure. As shown by the direction of the arrow, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, one end of the larger opening is connected to the inlet flow path 191, and one end of the smaller opening is connected to the micro compression chamber 111. At the same time, the diffuser 18 connecting the compression chamber 111 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 111 with a larger opening, and has a smaller opening and an outlet. The flow passages 192 are connected to each other. Since the inlet diffuser 17 and the outlet diffuser 18 connected to both ends of the compression chamber 111 are disposed in the same direction, the flow resistance of the diffuser can be utilized in different directions, and the compression chamber 111 can be utilized. The volumetric expansion causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 into the compression chamber 111 via the inlet diffuser 17, and then exit the outlet flow passage 192 through the outlet diffuser 18.

Such a micro-pump structure 10 without a physical valve is prone to a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber 111 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15.

Therefore, how to develop a fluid delivery device that can improve the above-mentioned conventional technology is an urgent problem to be solved.

The main purpose of the present invention is to provide a fluid valve seat which is suitable for a fluid conveying device, and is mainly composed of a valve body seat, a valve body film and a valve body cover, which are deformed by voltage actuation of the actuator. The pressure chamber is changed in volume, and then the inlet/outlet valve structure formed on the same valve body film is opened or closed, and the flexible sealing ring and the groove provided on the valve body seat or the valve body cover body are engaged with the fluid. The micro-pump structure that solves the conventional technology is prone to fluid backflow during the transfer of fluid.

In order to achieve the above object, a broader aspect of the present invention provides a fluid valve seat comprising: a valve body seat having an inlet passage, an outlet passage and an inlet passage hole; and a valve body cover disposed on the valve The body seat has an outlet passage hole; the valve body film is manufactured by conventional machining, and the thickness is substantially the same, and is disposed between the valve body seat and the valve body cover body, and the valve body film has at least a valve switch having a plurality of holes around the valve switch, forming a sealing zone around the hole, the sealing zone area being larger than the inlet channel hole area and the outlet channel hole area; and at least one temporary storage chamber; wherein, when temporarily storing When the fluid of the chamber and the fluid of the outlet channel or the inlet channel generate a pressure difference exceeding a preset value, the fluid with a larger pressure will push the corresponding valve switch, and then flow out or flow into the corresponding temporary chamber from the hole around the valve switch. .

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of

Please refer to the third figure, which is a schematic structural view of the fluid delivery device of the first preferred embodiment of the present invention. As shown, the fluid delivery device 20 of the present invention can be applied to medical technology, computer technology, printing or energy. For example, the fluid delivery device 20 is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, a plurality of temporary storage chambers, and an actuating device. 24 and a cover body 25, wherein the valve body seat 21, the valve body cover 22, and the valve body film 23 form a fluid valve seat 201, and a pressure chamber is formed between the valve body cover 22 and the actuating device 24. Room 226 is primarily used to store fluid.

The fluid transport device 20 is assembled by disposing the valve body film 23 between the valve body seat 21 and the valve body cover 22, and the valve body film 23 is disposed corresponding to the valve body seat 21 and the valve body cover 22, A first temporary storage chamber is formed between the valve body film 23 and the valve body cover 22, and a second temporary storage chamber is formed between the valve body film 23 and the valve body seat 21, and the valve body cover 22 is formed. The corresponding position is further provided with an actuating device 24, which is assembled by a vibrating membrane 241 and an actuator 242 for driving the fluid transport device 20, and finally, the cover 25 is placed on Above the actuating device 24, the valve body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24 and the cover body 25 are sequentially stacked to complete the assembly of the fluid transport device 20. .

The valve body seat 21 and the valve body cover body 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to the fourth figure and cooperate with the third figure, wherein the fourth figure is shown in the third figure. The side structure of the valve body seat is as shown in the figure. The valve body seat 21 has an inlet flow path 211 and an outlet flow path 212. The flow system can be input from the outside and transmitted to the valve body seat 21 via the inlet flow path 211. One opening 213 of the surface 210, and in the present embodiment, the second temporary storage chamber formed between the valve body film 23 and the valve body seat 21 is the outlet temporary storage chamber 215 shown in the figure, but not To be limited thereto, the upper surface 210 of the valve body seat 21 is partially recessed at a position corresponding to the outlet flow path 212, and communicates with the outlet flow path 212. The outlet temporary cavity 215 is temporarily used. The fluid is stored and delivered to the outlet passage 212 from the outlet storage chamber 215 via an opening 214 and out of the valve body seat 21. And a plurality of groove structures on the valve body seat 21 for providing a sealing ring 26 (as shown in FIG. 7(a)). In this embodiment, the valve body seat 21 is There are grooves 216, 218 around the periphery of the opening 213, and a groove 217 surrounding the periphery of the exit temporary cavity 215.

Please refer to the fifth figure (a) and cooperate with the third figure. The fifth figure (a) is the schematic diagram of the back structure of the valve body cover shown in the third figure. As shown in the figure, the valve body cover 22 has An upper surface 220 and a lower surface 228, and an inlet valve passage 221 and an outlet valve passage 222 extending through the upper surface 220 to the lower surface 228 on the valve body cover 22, and the inlet valve passage 221 is disposed on the valve body The opening 213 of the seat 21 corresponds to the position, and the outlet valve passage 222 is disposed at a position corresponding to the opening 214 in the outlet temporary chamber 215 of the valve body seat 21, and, in the present embodiment, the valve body film 23 The first temporary storage chamber formed between the valve body cover 22 and the valve body cover 22 is the inlet temporary storage chamber 223 shown in the figure, and is not limited thereto, and is formed by the lower surface 228 of the valve body cover 22 The corresponding position of the inlet valve passage 221 is partially recessed and communicated with the inlet valve passage 221.

Referring to FIG. 5(b), which is a cross-sectional structural view of the fifth figure (a), as shown, the upper surface 220 of the valve body cover 22 is partially recessed to form a pressure chamber 226. It is disposed corresponding to the actuator 242 of the actuating device 24, and the pressure chamber 226 communicates with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222, thus, when the actuator 242 is subjected to voltage actuation to cause the actuator 24 to be convexly deformed, causing the volume of the pressure chamber 226 to expand to create a negative pressure differential, allowing fluid to flow through the inlet valve passage 221 into the pressure chamber 226, and thereafter, when applied to After the direction of the electric field of the actuator 242 is changed, the actuator 242 will cause the lowering deformation pressure chamber 226 of the actuating device 24 to contract and reduce the volume, causing the pressure chamber 226 to generate a positive pressure difference from the outside to urge the fluid from the outlet valve. The passage 222 flows out of the pressure chamber 226. At the same time, part of the fluid also flows into the inlet valve passage 221 and the inlet temporary chamber 223, however, due to the inlet valve structure 231 at this time (as shown in the sixth diagram (c) Show) is a state in which it is closed under pressure, so the fluid will not The phenomenon of backflow is generated by the inlet valve piece 231. As for the fluid temporarily stored in the inlet temporary storage chamber 223, the actuator 242 is again actuated by the voltage, and the actuator device 24 is repeatedly deformed again to increase the pressure chamber. When the chamber 226 is in volume, it is again flowed into the pressure chamber 226 from the inlet temporary chamber 223 to the inlet valve passage 221 for fluid transport.

In addition, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the upper surface 220 of the valve body cover 22 has a groove 227 disposed around the pressure chamber 226, and the lower surface is provided. The 228 has a groove 224 disposed around the inlet temporary cavity 223, a groove 225 disposed around the outlet valve passage 222, and a groove 229. Similarly, the groove structure is used for a sealing ring 27 (such as The seventh diagram (a) is shown in it.

Please refer to the sixth figure (a) and cooperate with the third figure. The sixth figure (a) is the structural diagram of the valve body film shown in the third figure. As shown in the figure, the valve body film 23 is mainly processed by conventional processing. Or yellow light etching, or laser processing, or electroforming processing, or electrical discharge machining, and is a sheet structure having substantially the same thickness, and having a plurality of hollow valve switches thereon, including the first valve switch And the second valve switch, in the embodiment, the first valve opening relationship is the inlet valve structure 231, and the second valve opening relationship is the outlet valve structure 232, wherein the inlet valve structure 231 has the inlet valve piece 2313 and a plurality of A hollow hole 2312 is provided around the periphery of the inlet valve piece 2313. Further, between the holes 2312, there is an extension portion 2311 connected to the inlet valve piece 2313. When the valve body film 23 is subjected to a pressure from the pressure chamber 226, it is downward. During the stress, as shown in the seventh figure (c), the inlet valve structure 231 is entirely flatly attached to the valve body seat 21, and the inlet valve piece 2313 abuts against the protruding portion of the sealing ring 26 on the groove 216. And sealing the opening 213 on the valve body seat 21, Its periphery and hollow bore 2312 extending portion 2311 to take advantage of sticking to the valve seat 21 above, it is thus acting to close the inlet valve structure 231 of the fluid can not flow out.

When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, since the seal ring 26 disposed in the groove 216 of the valve body seat 21 has provided the inlet valve structure 231 with a preforce, The inlet valve piece 2313 can produce a greater pre-tightening effect by the support of the extension portion 2311 to prevent backflow, and the inlet valve structure 231 is displaced upward due to the negative pressure of the pressure chamber 226 (as shown in the sixth figure). (b)), at this time, the fluid can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and is transmitted through the inlet temporary storage chamber 223 and the inlet valve passage 221 Into the pressure chamber 226, the inlet valve structure 231 can be quickly opened or closed according to the positive and negative pressure difference generated by the pressure chamber 226 to control the inflow and outflow of fluid and prevent the fluid from flowing back to the valve body seat. 21 on.

Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the sealing ring 26 around the outlet valve structure 232 is disposed in a direction opposite to the sealing ring 27 of the inlet valve structure 231, as shown in the sixth diagram (c), so that when the pressure chamber 226 is compressed to generate a thrust, The seal ring 27 disposed within the recess 225 of the valve body cover 22 will provide a pre-tension of the outlet valve structure 232 such that the outlet valve plate 2323 can be produced by the extension of the extension 2321 to create a greater pre-tightening The effect is to prevent backflow. When the outlet valve structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, the fluid can flow from the pressure chamber 226 through the valve body cover 22 via the hollow hole 2322. It is discharged into the temporary storage chamber 215 of the valve body seat 21 and can be discharged through the opening 214 and the outlet flow path 212. Thus, the fluid can be drained from the pressure chamber 226 via the mechanism of the opening of the outlet valve structure 232. To achieve fluid loss Function.

Please refer to the seventh diagram (a), which is a schematic diagram of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. In this embodiment, all the groove structures 216, 217, 218 are respectively provided with a sealing ring 26, and A sealing ring 27 is also disposed in the recesses 224, 225, and 229, and is made of a rubber material which is excellent in chemical resistance, and is not limited thereto. The recess 216 is disposed on the valve body seat 21 surrounding the opening 213. The inner sealing ring can be a ring structure having a thickness greater than the depth of the groove 216, so that the sealing ring 26 disposed in the groove 216 protrudes from the upper surface 210 of the valve body seat 21 to form a micro convex structure. Therefore, the inlet valve piece 2313 of the inlet valve structure 231 of the valve body film 23 which is disposed on the valve body seat 21 is formed with an upward convexity due to the micro convex structure of the sealing ring 26, and the remaining part of the valve body film 23 is The valve body cover 22 abuts against the top, such that the micro-convex structure pushes the inlet valve 231 to generate a pre-force effect, which contributes to a greater pre-covering effect to prevent backflow, and since the sealing ring 26 is upward The raised micro-convex structure is located at the inlet valve of the valve body film 23 The structure 231 is such that the inlet valve structure 231 has a gap between the inlet valve piece 2313 and the upper surface 210 of the valve body seat 21 when not in operation, and likewise, when the sealing ring 27 is disposed in the recess surrounding the outlet valve passage 222. In the groove 225, since the sealing ring 27 is disposed on the lower surface 228 of the valve body cover 22, the sealing ring 27 causes the outlet valve structure of the valve body film 23 to protrude downward to form a downward bulge in the valve body. The micro-convex structure of the cover body 22 is only disposed in the opposite direction to the micro-convex structure formed on the inlet valve structure 231, but its functions are the same as those described above, and thus will not be described again. The remaining seal rings 26, 27 and 28 respectively disposed in the groove structures 217, 218 and 224, 229 and 227 are mainly used to respectively form the valve body seat 21 and the valve body film 23, the valve body film 23 and the valve body cover. When the body 22 and the valve body cover 22 are in close contact with the actuating device 24, fluid leakage is prevented.

Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-convex structure of the valve body 21 and the valve body cover 22 can also be a semiconductor process, for example, yellow etching. Or coating or electroforming technology is formed directly on the valve body seat 21 and the valve body cover 22.

Please also refer to the seventh figure (a), (b), (c), as shown, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 26 and the valve body After the seats 21 are assembled to each other, the opening 213 of the valve body seat 21 corresponds to the inlet valve structure 231 on the valve body film 23 and the inlet valve passage 221 on the valve body cover 22, and the valve body seat 21 is The opening 214 corresponds to the outlet valve piece 232 on the valve body membrane 23 and the outlet valve passage 222 on the valve body cover 22, and since the sealing ring 26 is disposed in the recess 216, the inlet valve of the valve body membrane 23 is provided. The structure 231 is slightly raised above the valve body seat 21, and a pre-force is generated by the seal ring 26 located in the recess 216 contacting the valve body film 23, so that the inlet valve structure 231 is not actuated. At the same time, a gap is formed with the upper surface 210 of the valve body seat 21. Similarly, the outlet valve structure 232 is also formed with the lower surface 228 of the valve body cover 22 by the same manner as the sealing ring 27 is disposed in the recess 225. gap.

When the actuator 242 is driven by a voltage, the actuating device 24 generates a bending deformation. As shown in the seventh diagram (b), the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the pressure chamber The volume of 226 is increased, thereby creating a suction force that causes the inlet valve structure 231 of the valve body membrane 23, the outlet valve structure 232 to withstand an upward pulling force, and the inlet valve plate of the inlet valve structure 231 having a pre-force (Preforce). The 2313 is rapidly opened (as shown in Fig. 6(b)) so that the liquid can be sucked in a large amount from the inlet passage 211 on the valve body seat 21, and flows through the opening 213 of the valve body seat 21, the valve body film 23 The inlet valve structure 231 hole 2312, the inlet temporary chamber 223 on the valve body cover 22, and the inlet valve passage 221 flow into the pressure chamber 226. At this time, due to the inlet valve structure 231 of the valve body film 23 The outlet valve structure 232 is subjected to the upward pulling force, so that the outlet valve structure 232 at the other end is caused by the upward pulling force so that the outlet valve piece 2323 located on the valve body film 23 seals the outlet valve passage 222, so that the outlet valve structure 232 is closed. Therefore, the fluid flows countercurrently.

When the actuating device 24 is bent downwardly as the arrow b shown in the seventh figure (c) is deformed due to the change of the electric field direction, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a fluid to the inside. The thrust force causes the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 to receive a downward thrust. At this time, the outlet valve piece 2323 of the outlet valve structure 232 disposed on the seal ring 27 in the recess 225 can be quickly opened. (As shown in Figure 6(c)), the liquid is vented in a large amount, and the pressure chamber 226 passes through the outlet valve passage 222 on the valve body cover 22, and the hole 2322 of the outlet valve structure 232 on the valve body film 23. The outlet temporary chamber 215, the opening 214 and the outlet passage 212 on the valve body seat 21 flow out of the fluid delivery device 20, thereby completing the fluid transfer process. Similarly, since the inlet valve structure 231 is subjected to the downward movement. The thrust, thus causing the inlet valve piece 2313 to seal the opening 213, thereby closing the inlet valve structure 231 so that the fluid does not flow back, and is disposed in the valve body seat 21 and the valve body cover by the inlet valve structure 231 and the outlet valve structure 232. Body 22 Seal rings 26 and 27 within the design of the grooves 216,225, the fluid can not be generated in the case of transmission during reflux, to achieve high transmission efficiency.

In addition, in the embodiment, the material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, such as polycarbonate (Polycarbonate PC), Polysulfone (PSF), ABS resin (Acrylonitrile). Butadiene Styrene), LLDPE, LDPE, HDPE, PP, Polyphenylene Sulfide (PPS), Alignment Polystyrene (SPS), polyphenylene ether (PPO), polyacetal (POM), polybutylene terephthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer ( ETFE), a thermoplastic polymer material such as a cyclic olefin polymer (COC), but not limited thereto, and in the present embodiment, the depth of the pressure chamber 226 is between 100 μm and 300 μm , and the diameter Between 10~30mm, and not limited to this.

In this embodiment, the gap between the valve body film 23 and the valve body seat 21 and the valve body cover 22 may be 10 μm to 790 μm , and most preferably 180 μm to 300 μm . In some embodiments, the separation distance between the diaphragm 241 of the actuating device 24 and the valve body cover 22, that is, the gap, may be 10 μm to 790 μm , preferably 100 μm to 300 μ. m.

The valve body film 23 can be produced by conventional processing or yellow etching or laser processing or electroforming processing or electric discharge processing, and the material thereof can be any organic polymer material or metal with good chemical resistance, when the valve body film 23 The polymer material has a modulus of elasticity of 2 to 20 GPa, for example, Polyimide (PI), and the modulus of elasticity, that is, the Young's modulus (E value) can be 10 GPa, and the valve body film 23 is made of a metal material. When the metal material such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel has a Young's modulus of 2 to 240 GPa, if the metal material is aluminum metal, the modulus of elasticity is 70 GPa, or nickel. A metal having a modulus of elasticity of 210 GPa or a stainless steel metal having a modulus of elasticity of 240 GPa or the like is not limited thereto. The thickness of the valve body film 23 may be from 10 μm to 50 μm , and most preferably from 21 μm to 40 μm .

Hereinafter, a description will be given of a method in which the valve body film 23 is made of a different material.

When the material of the valve body film 23 is Polyimide (PI), the manufacturing method is mainly by reactive ion etching (RIE), and the photoresist is applied to the valve by photosensitive photoresist. Above the structure, and after exposing and developing the valve structure pattern, etching is performed, and since the photoresist cover protects the polyimide (PI) sheet from being etched, the valve body film 23 can be etched. Valve structure.

If the material of the valve body film 23 is stainless steel metal, the valve structure can be formed by yellow etching, laser processing and machining, wherein the yellow light etching method obtains the photoresist pattern of the valve structure on the stainless steel sheet, and is immersed in The wet etching is carried out in the FeCl3 plus HCl solution. Similar to the above method, the photoresist cover protects the stainless steel sheet from being etched, so that the valve structure on the valve body film 23 can be etched.

And if the material of the valve body film 23 is metallic nickel, the photoresist pattern of the valve structure on the stainless steel substrate is obtained by the method of electroforming, and the yellow light etching method is used, and then nickel electroforming is performed. The photoresist cover is not electroformed. When the electroformed nickel metal reaches a certain thickness and is detached from the stainless steel substrate, the valve body film 23 having the valve structures 231 and 232 can be obtained.

In addition, in addition to the above-described manufacturing method, all materials applied to the valve body film 23 can be fabricated by a precision punching method, or by a conventional machining method, a laser processing or an electroforming process or an electric discharge machining method. The valve structure on it, but not limited to this.

The actuator 242 in the actuating device 24 is a piezoelectric plate, and can be fabricated by using a piezoelectric powder of a high-voltage electric coefficient lead zirconate titanate (PZT) series, wherein the thickness of the actuator 242 can be It is between 100 μm and 500 μm , preferably 150 μm to 250 μm , and the Young's modulus is 100 to 150 GPa, and is not limited thereto.

The vibrating film 241 attached to the actuator 242 has a thickness of 10 μm to 300 μm , preferably 100 μm to 250 μm , and is made of a single layer of metal, such as stainless steel. Young's coefficient is 240Gpa, thickness is between 140 μm and 160 μm , such as copper, the Young's coefficient is 100Gpa, and the thickness is between 190 μm and 210 μm , and is not limited to this, or The material can be a double-layer structure formed by attaching a layer of biochemical resistant polymer sheet to the metal material.

In some embodiments, an operating frequency of 10-50 Hz can be applied to the actuator 242 of the actuator 24 in response to the need for large flow fluid transmission, with the following conditions: the thickness of the actuator 242 is approximately 100. A stiffness characteristic from μ m to 500 μ m, preferably from 150 μm to 250 μm , and a Young's modulus of about 100-150 Gpa.

And the vibrating film 241 has a thickness of 10 μm to 300 μm , preferably 100 μm to 250 μm , and a Young's modulus of 60-300 GPa, and the material may be composed of a single layer of metal, such as stainless steel. Metal with a Young's modulus of 240 Gpa and a thickness of between 140 μm and 160 μm , such as copper, with a Young's modulus of 100 Gpa and a thickness of 190 μm to 210 μm . The limit, or a material thereof, may be a double-layer structure in which a metal-resistant material is attached to a metal material to form a thin layer of a biochemical polymer.

The pressure chamber 226 has a depth between 100 μm and 300 μm and a diameter between 10 and 30 mm.

And the valve structure 231, 232 on the valve body film 23 has a thickness of 10 μm to 50 μm and a Young's modulus of 2 to 240 GPa, and can be any organic polymer material or metal with good chemical resistance. 23 using the polymer material, the modulus of elasticity is 2-20 Gpa, such as Polyimide (PI), the elastic coefficient, that is, the Young's modulus (E value) can be 10 Gpa, the valve body film 23 is made of metal Materials such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel, with a Young's modulus of 2 to 240 GPa, an aluminum metal modulus of 70 GPa, or a nickel metal modulus of 210 GPa, or The stainless steel has a spring modulus of 240 Gpa and the gap between the valve body film 23 and the valve body seat 21 and the valve body cover 22 can be 10 μm to 790 μm , and the optimum is 180 μm to 300 μ. m.

By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close to drive the fluid. One-way flow is performed, and the fluid flowing through the pressure chamber 226 can reach a large flow output of 5 cc or more per minute.

In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the integrally formed inlet valve structure 231 can cooperate with the softness disposed in the groove 216 of the valve body seat 21. The seal ring 26 opens the inlet valve structure 231 to deliver fluid to the pressure chamber 226, and the actuator device 24 changes the volume of the pressure chamber 226, thereby causing the outlet valve structure 232 to fit over the valve body cover 22. The soft sealing ring 27 in the recess 225 is opened to allow the fluid to be delivered outside the pressure chamber 226. Since the pressure chamber 226 can generate a large fluid suction and thrust at the moment of volume expansion, the valve body film 23 is engaged. The upper valve structure has a rapid opening and closing reaction, so that the fluid can be transported to a large flow rate and effectively block the reverse flow of the fluid.

Please refer to the eighth figure and the third figure, wherein the eighth figure is a manufacturing flow chart of the fluid conveying device of the second preferred embodiment of the present invention, firstly forming a valve body layer, that is, the valve body as shown in the third figure. The seat 21 (shown in step S81), and thereafter, a valve body cover layer is formed. In the embodiment, the valve body cover layer is the valve body cover body 22 shown in the third figure, and has a valve body cover body The pressure chamber 226 (as shown in step S82), and then a micro-convex structure is formed on the valve body seat 21 and the valve body cover 22 (as shown in step S83), and the micro-convex structure can be formed in two ways. The method is not limited thereto: 1. Referring to the third figure and the embodiment of the present invention, at least one groove is formed on the valve body seat 21 and the valve body cover 22, respectively, as shown in the figure. The valve body seat 21 has a recess 216, and a sealing ring 26 is disposed in the recess 216 (as shown in FIG. 7(a)), because the seal ring 26 disposed in the recess 216 is partially protruded. The upper surface 210 of the valve body seat 21 can form a micro-convex structure on the upper surface 210 of the valve body seat 21. Similarly, the groove 225 and the sealing ring 26 can also be in the above manner. A micro-convex structure is formed on the lower surface 228 of the cover 22 (as shown in FIG. 5(b)). Second, a semiconductor process such as yellow etching or coating or electroforming may be used, but not limited thereto. A micro-convex structure is formed directly on the valve body seat 21 and the valve body cover 22.

Next, a flexible film is formed, which has at least one valve sheet structure, that is, the valve body film 23 of the present invention and the inlet valve structure 231 and the outlet valve structure 232 (as shown in step S84), and then formed. The actuating film, that is, the vibrating film 241 of the present case (as shown in step S85), and the actuator 242 are formed (as shown in step S86), after which the actuator 242 is attached and positioned on the vibrating film 241. The actuator 24 is assembled and the actuator 242 is disposed corresponding to the pressure chamber 226 (as shown in step S87), and the valve body film 23 is disposed on the valve body seat 21 and the valve body cover after step S87. 22, and the valve body seat 21, the valve body film 23 and the valve body cover 22 are disposed corresponding to each other (as shown in step S88), and finally, the actuating device 24 is correspondingly disposed on the valve body cover 22, The valve body membrane 23 is closed to the pressure chamber 226 of the valve body cover 22 to form a fluid delivery device (as shown in step S89).

In summary, the fluid valve seat of the present invention is applicable to a fluid conveying device, and is mainly composed of a valve body seat, a valve body film, and a valve body cover body, which is actuated by piezoelectric action of the actuator to make the pressure chamber The volume of the chamber is changed, and the inlet/outlet valve structure formed on the same valve body film is opened or closed, and the flexible sealing ring and the groove provided on the valve body seat or the valve body cover body are used for fluid transportation. The fluid conveying device of the present invention can transport gas and fluid, not only has excellent flow rate and output pressure, but also can self-capture liquid in an initial state, and has high precision controllability, and because it can transport gas, it is in the fluid transport process. Bubbles can be eliminated to achieve high efficiency transmission. Therefore, the fluid valve seat of this case is of great industrial value and is submitted in accordance with the law.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

Micro pump structure. . . 10

Substrate. . . 11

Compression room. . . 111

Interlayer film. . . 12

Entrance passage. . . 13

Transmission block. . . 14

Microactuator. . . 15

Export channel. . . 16

Entrance diffuser. . . 17

Export diffuser. . . 18

Flow direction. . . X, Y

direction. . . a, b

Fluid delivery device. . . 20

Fluid valve seat. . . 201

Valve body seat. . . twenty one

Body cover. . . twenty two

Body film. . . twenty three

Actuation device. . . twenty four

Cover. . . 25

Vibration film. . . 241

Actuator. . . 242

Entrance runner. . . 191, 211

Export flow path. . . 192, 212

Opening. . . 213, 214

Upper surface. . . 210, 220

Export temporary storage cavity. . . 215

lower surface. . . 228

Entrance temporary cavity. . . 223

Entrance valve passage. . . 221

Exit valve passage. . . 222

Groove. . . 216, 217, 218, 224, 225, 227, 229

Pressure chamber. . . 226

Sealing ring. . . 26, 27, 28

Entrance valve structure. . . 231

Export valve structure. . . 232

Entrance valve plate. . . 2313

Export valve plate. . . 2323

Extension. . . 2311, 2321

Hole. . . 2312, 2322

S81~S89. . . Fluid delivery device manufacturing process

First figure (a): It is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated.

First figure (b): It is a schematic diagram of the structure of the first figure (a) at the time of actuation.

Second figure: It is a top view of the micro-push structure shown in the first figure (a).

Third: It is a schematic structural view of a fluid delivery device according to a first preferred embodiment of the present invention.

Figure 4: It is a schematic view of the side structure of the valve body seat shown in the third figure.

Figure 5 (a): This is a schematic view of the back structure of the valve body cover shown in the third figure.

Figure 5 (b): This is a schematic cross-sectional view of the fifth diagram (a).

Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure.

Figure 7 (a) is a schematic view showing the unactuated state of the fluid delivery device of the preferred embodiment of the present invention.

Figure 7 (b): This is a schematic diagram of the pressure chamber expansion state of the seventh diagram (a).

Figure 7 (c): This is a schematic diagram of the pressure chamber compression state of the seventh diagram (b).

Figure 8 is a flow chart showing the manufacture of the fluid delivery device of the second preferred embodiment of the present invention.

Fluid delivery device. . . 20

Fluid valve seat. . . 201

Valve body seat. . . twenty one

Body cover. . . twenty two

Body film. . . twenty three

Actuation device. . . twenty four

Cover. . . 25

Vibration film. . . 241

Actuator. . . 242

Entrance runner. . . 211

Opening. . . 213, 214

Upper surface. . . 220

Export temporary storage cavity. . . 215

lower surface. . . 228

Entrance valve passage. . . 221

Exit valve passage. . . 222

Pressure chamber. . . 226

Groove. . . 216, 217, 218, 227

Entrance valve structure. . . 231

Export valve structure. . . 232

Entrance valve plate. . . 2313

Export valve plate. . . 2323

Extension. . . 2311, 2321

Hole. . . 2312, 2322

Claims (19)

A fluid valve seat comprising: a valve body seat having an inlet passage, an outlet passage and an inlet passage hole and a micro-convex structure; a valve body cover disposed on the valve body seat And having an outlet passage hole and a micro convex structure; a valve body film having substantially the same thickness and disposed between the valve body seat and the valve body cover, the valve body film having at least one valve switch The valve switch has a plurality of holes around the hole, and a sealing area is formed around the hole, the sealing area is larger than the inlet channel hole area and the outlet channel hole area, and the valve opening relationship is respectively associated with the valve The body and the micro-convex structure of the valve body cover are in contact with each other to form a pre-force, and a gap is formed between the valve switch and the valve body seat and the valve body cover; and at least one temporary storage room Provided between the valve body cover and the valve body seat; wherein, when the fluid of the temporary storage chamber and the outlet channel or the inlet channel generate a pressure difference exceeding a preset value, the pressure is higher The fluid will push the corresponding valve Off, and further the hole from the periphery of the valve switch, corresponding to the inflow or outflow of the staging chamber. The fluid valve seat of claim 1, wherein the fluid comprises a gas and a liquid. The fluid valve seat according to claim 1, wherein the valve body film is formed by conventional mechanical processing, yellow light etching, laser processing, electroforming processing or electric discharge machining. The fluid valve seat according to claim 1, wherein the micro-convex structure is formed by a sealing ring respectively disposed in the plurality of grooves of the valve body seat and the valve body cover, and the sealing ring system is Partially protrudes from the groove. The fluid valve seat of claim 4, wherein the seal ring is made of a rubber material. The fluid valve seat according to claim 1, wherein the fluid valve seat further comprises a vibrating membrane, the periphery of the fluid valve seat is fixed to the valve body cover body, and the vibrating membrane is attached to the valve body when the vehicle is not in operation. The body cover is separated to define a pressure chamber. The fluid valve seat according to claim 6, wherein the vibrating membrane is separated from the valve body cover by a distance of 100 μm to 300 μm. The fluid valve seat of claim 1, wherein the fluid valve seat further comprises an actuator coupled to the vibrating membrane for actuating the fluid valve seat. The fluid valve seat according to claim 1, wherein the valve body film has a thickness of 10 μm to 50 μm. The fluid valve seat according to claim 1, wherein the valve body film has an optimum thickness of 21 μm to 40 μm. The fluid valve seat according to claim 1, wherein the material of the valve body film is a polymer material. The fluid valve seat according to claim 11, wherein the polymer material is polyamidamine. The fluid valve seat according to claim 1, wherein the valve body film is made of a metal material. The fluid valve seat of claim 13, wherein the metal material is aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel. The fluid valve seat according to claim 1, wherein the valve body seat and the valve body cover are made of a thermoplastic material. The fluid valve seat according to claim 1, wherein the temporary storage chamber further comprises a first temporary storage chamber formed between the valve body film and the valve body cover body, and the valve body film and the valve body A second temporary storage chamber is formed between the valve body seats. The fluid valve seat according to claim 16, wherein the fluid pushes the fluid when the fluid of the inlet passage of the valve body seat and the fluid of the first temporary storage chamber generate a pressure difference exceeding a preset value. The first valve switch further flows from the hole around the first valve switch into the first temporary storage chamber of the valve body cover body, and the fluid of the outlet passage of the valve body cover body and the second temporary storage When the fluid of the chamber generates a pressure difference exceeding a preset value, the fluid pushes the second valve switch, and the hole from the periphery of the second valve switch flows into the second temporary storage chamber. A fluid valve seat includes: a valve body seat having an inlet passage, an outlet passage, an inlet passage hole and at least one groove; and a valve body cover disposed on the valve body seat And having an outlet passage hole and at least one groove; a valve body film having substantially the same thickness and disposed between the valve body seat and the valve body cover, the valve body film having at least one valve open Closely, the valve switch has a plurality of holes around the hole, and a sealing area is formed around the hole, the sealing area is larger than the inlet channel hole area and the outlet channel hole area; at least one temporary storage room is a valve body disposed between the valve body cover and the valve body seat; and a plurality of sealing rings respectively disposed in the valve body seat and the groove of the valve body cover body, and the sealing ring system is partially protruded The sealing zone is coupled to the valve body seat or the valve when the groove is configured to apply a pre-stress to the sealing area of the valve body film, and the sealing zone is within a preset value when the pressure difference between the two sides is within a preset value Separating the body cover; wherein when the fluid of the temporary chamber and the fluid of the outlet channel or the inlet channel generate a pressure difference exceeding a preset value, the fluid having a higher pressure will push the corresponding valve switch, thereby The hole from the periphery of the valve switch flows out or flows into the corresponding temporary storage chamber. A fluid valve seat includes: a valve body seat having an inlet passage, an outlet passage, an inlet passage hole and at least one groove; and a valve body cover disposed on the valve body seat And having an outlet passage hole and at least one groove; a valve body film having a thickness substantially the same and being 10 μm to 50 μm, and disposed between the valve body seat and the valve body cover body, the valve body film Having at least one valve switch, the valve switch has a plurality of holes around the hole, and defines a sealing zone around the hole, the sealing zone area is larger than the inlet channel hole area and the outlet channel hole area; At least one temporary storage chamber is disposed between the valve body cover and the valve body seat; and a plurality of sealing rings are respectively disposed in the valve body seat and the groove of the valve body cover body, And the sealing ring portion protrudes from the groove for applying a pre-stress to the sealing portion of the valve body film, and the sealing portion is when the pressure difference between the two sides is within a preset value. Separating from the valve body or the valve body cover; wherein when the fluid of the temporary chamber and the fluid of the outlet channel or the inlet channel generate a pressure difference exceeding a preset value, the fluid having a higher pressure will The corresponding valve switch is pushed to flow out or flow into the corresponding temporary chamber from the hole around the valve switch.