TWD150427S

TWD150427S - Hybrid seal member

Info

Publication number: TWD150427S
Application number: TW099300649F
Authority: TW
Inventors: Akira Muramatsu
Original assignee: 日本華爾卡工業股份有限公司
Priority date: 2009-08-10
Filing date: 2010-02-10
Publication date: 2012-11-21

Abstract

【物品用途】;本創作物品係一種「複合密封材」，係適用在例如半導體製造裝置等之複合密封材。本創作物品之複合密封材係如A-A斷面線之剖視圖所示，由合成橡膠製之第1構件、及比合成橡膠製之第1構件更硬質之合成樹脂製的第2構件所構成。該等第1構件與第2構件係在組合之狀態下使用，或以接著劑接著2個構件之間而使用。在將本物品安裝在密封槽時，藉由配置在密封槽之外側的第1構件而確保密封性，並且藉由配置在密封槽之內側的第2構件而確保耐電漿性或耐腐蝕氣體性。;【創作特點】;本創作係有關於一種「複合密封材」之外形設計。配合立體圖所示，及配合使用狀態參考圖與A-A斷面線之剖視圖，其中顯示本創作本體橫斷面之剖視狀態，本創作之本體係由大致橫斷面呈「凸」字形之第1構件(參照第1構件之前視圖、右側視圖及俯視圖)，與橫斷面呈「C」形之第2構件(參照第2構件之前視圖、右側視圖及俯視圖)相互套合組成之圓環體特殊造形。配合上述使用狀態參考圖所示，係顯示本創作本體安裝在密封槽之狀態，其中顯示上述第1構件外側周面呈現圓弧狀，而內側周面向內約呈現梯形凸部係組合於上述第2構件內側周面所具有之梯形槽中。上述第2構件外側周面則大致形成多角狀。由上述構成本創作整體造形精巧別緻，具新穎特異之視覺效果。[Application of the article] This creation is a "composite sealing material" which is suitable for use in, for example, semiconductor manufacturing devices. The composite sealing material of the creation is composed of a first component made of synthetic rubber and a second component made of synthetic resin which is harder than the first component made of synthetic rubber, as shown in the cross-sectional view taken along the A-A section line. The first component and the second component are used in a combined state or by connecting the two components with an adhesive. When this article is installed in a sealing groove, the sealing is ensured by the first component arranged on the outside of the sealing groove, and the plasma resistance or the corrosion gas resistance is ensured by the second component arranged on the inside of the sealing groove. [Features of the creation] This creation is about the appearance design of a "composite sealing material". As shown in the three-dimensional diagram, the reference diagram of the use state and the cross-sectional view of the A-A section line, which shows the cross-sectional state of the main body of this creation, the main body of this creation is a special shape of a circular ring body composed of a first component with a roughly "convex" cross-sectional shape (refer to the front view, right side view and top view of the first component) and a second component with a "C" cross-sectional shape (refer to the front view, right side view and top view of the second component). As shown in the reference diagram of the use state, it shows the state of the main body of this creation installed in the sealing groove, which shows that the outer peripheral surface of the first component is in an arc shape, and the inner peripheral surface is inwardly approximately a trapezoidal convex portion, which is combined in the trapezoidal groove of the inner peripheral surface of the second component. The outer peripheral surface of the second component is roughly formed into a polygonal shape. The above structure makes the overall shape of this creation exquisite and unique, with a novel and unique visual effect.