TW497099B - Manufacturing method for optical discs containing multiple recording layers - Google Patents
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497099 五、發明說明(1) 【發明之範圍】 本發明係有關於一種具有多層記錄層之光碟片的製作 方法,且特別係一種以自動化控制利用旋轉塗佈製作薄膜 記錄層,再結合其它已預鑄訊號之射出基板或其它薄膜記 錄層製程,製作具有兩層以上記錄層之光碟片的方法。 【發明之背景】 目前之CD光碟片是一種單層記錄的光碟片,一片直徑 1 2公分的碟片儲存容量只有6 5 0MB,已經漸漸不敷需求。 若是以儲存一部135分鐘的電影為例,Video-CD至少需要 二至三片,同時其壓縮技術是MPEG-1,在晝質上並不好, 相較之下,單面單層的DVD光碟片容量可達4. 7GB,採用 MPEG-2壓縮技術與AC3杜比環繞音效,無論在晝質或音效 享受上,皆非V i d e 〇 - C D所能比擬,而且只要一片D V D光碟 片就可容納1 3 5分鐘高品質的影片,因此,對於日後光碟 片的發展而言,如何提高光碟片之記錄容量就成為首要研 發的重點。 多記錄層光碟片是提高單位面積記錄容量的一種有效 方式。目前的DV D碟片已經發展出單面雙層結構,記錄容 量可達8. 5GB (就是俗稱的DVD-9 ),雷射光經由光碟片的 一面射入可讀取兩層記錄層的資料,這將提高一倍的單位 面積記錄密度,但是目前之單面雙記錄層光碟片作法是將 兩片刻有記錄訊號的碟片,面對面的貼合形成兩層記錄層 ,這種方法已經沒有繼續提高記錄層數的可行性。因此若 是光碟片要在不改變碟片之外貌、幾何尺寸與形狀下,製497099 V. Description of the invention (1) [Scope of the invention] The present invention relates to a method for manufacturing an optical disc with multiple recording layers, and particularly relates to a method for manufacturing a thin-film recording layer by spin coating with automatic control, combined with other (2) A method of making a signal emitting substrate or other thin-film recording layer to produce an optical disc with two or more recording layers. [Background of the Invention] The current CD disc is a single-layer recording disc. The storage capacity of a disc with a diameter of 12 cm is only 650 MB, which has gradually become insufficient. If you take a 135-minute movie as an example, Video-CD requires at least two to three, and its compression technology is MPEG-1, which is not good in daylight quality. In contrast, a single-sided single-layer DVD The disc capacity is up to 4.7GB. It adopts MPEG-2 compression technology and AC3 Dolby surround sound. It is not comparable to V ide 〇-CD in terms of day quality or sound enjoyment, and only one DVD disc is required. It can hold 13.5 minutes of high-quality movies. Therefore, for the future development of optical discs, how to increase the recording capacity of optical discs has become the primary focus of research and development. Multi-layer recording discs are an effective way to increase the recording capacity per unit area. The current DV D disc has developed a single-sided double-layer structure with a recording capacity of up to 8.5GB (commonly known as DVD-9). Laser light is incident on one side of the optical disc and can read data from two recording layers. This will double the recording density per unit area, but the current single-sided dual-recording layer disc method is to combine two discs engraved with recording signals and face to face to form two recording layers. This method has not continued to improve Feasibility of recording layers. Therefore, if the disc is to be manufactured without changing the appearance, geometry, and shape of the disc,
497099 五、發明說明(2) 作出具有單面三層以上的記錄層,或是如DVD Forum所訂 定規格,記錄容量達17GB (就是俗稱DVD-18 )的雙面雙層 碟片,就必須另外思考製作碟片的其他方式。目前市面上 並無DVD-18產品。 目前在技術上要克服雙面雙層光碟片(DVD-1 8 )製作 的可能方法有三種。第一種是利用機械射出成型的方法直 接射出雙層記錄層π片’’,第二種方式是利用所謂的2P (P h ◦ t 〇 - Ρ ο 1 y m e r )方法製作記錄層膜,第三種方式則是 用SOAP (spin-on-and-peel )方法作記錄層膜。 在第一種方法中,是將兩片刻有訊號的模版 籲 (stamper )分別放在射出模具的固定侧與移動側,以高 溫高壓直接將融溶的塑膠壓入模具的模穴(cavity)中, 這種方式雖然是採用現今成熟的塑膠射出成型技術,可是 製作的過程需要高溫與高壓,且對模具的磨耗也是一大問 題’另外為容易自模具中取出射出成品,成品厚度不能太 薄’否則在取出塑膠成品時,由於機械強度不足或是熱應 力或疋塑膠收縮不平均,常會造成成品的扭曲變形,因此 j 其厚度皆將超過碟片規格書中所要求的規格,因此並不適 用於生產多§己錄層的光碟片。 第二種方法則是由Pi〇neer以及SONY開發的一種製作 _ 薄膜的方式’這種方法是先在已經刻有訊號的模版上,平 佈:層易於變形的高分子材料,利用高壓將這些高分子材 料壓向模版’藉以轉印與複製在模版上的訊號,並且達到 均勻厚度的目的,接著利用紫外線(UV )照射,硬化497099 5. Description of the invention (2) To make a double-sided double-layer disc with a single-sided three or more recording layers, or a double-layer double-layer disc with a recording capacity of 17GB (known as DVD-18), as specified by the DVD Forum, Also think about other ways to make discs. There are currently no DVD-18 products on the market. There are currently three possible ways to technically overcome the production of double-sided double-layer optical discs (DVD-1 8). The first method is to directly inject a two-layer recording layer π sheet by a mechanical injection molding method.The second method is to use a so-called 2P (P h ◦ t 〇-Ρ ο 1 ymer) method to make a recording layer film. One way is to use a SOAP (spin-on-and-peel) method as the recording layer film. In the first method, two stampers with signal signals are placed on the fixed side and the moving side of the injection mold, respectively, and the molten plastic is directly pressed into the cavity of the mold at high temperature and pressure. Although this method uses today's mature plastic injection molding technology, the manufacturing process requires high temperature and pressure, and the wear of the mold is also a major problem. 'In addition, it is easy to take out the injection product from the mold, and the thickness of the product cannot be too thin.' Otherwise, when the finished plastic product is taken out, due to insufficient mechanical strength or thermal stress or uneven shrinkage of the plastic, it will often cause distortion of the finished product. Therefore, its thickness will exceed the specifications required in the disc specifications, so it is not applicable. Used to produce multi-layered discs. The second method is a method of making _ thin films developed by Pioneer and SONY. This method is to firstly lay a cloth on the stencil that has been engraved with a signal: a layer of easily deformable polymer material. The polymer material is pressed to the stencil, thereby transferring and copying the signal on the stencil, and achieving the purpose of uniform thickness, and then using ultraviolet (UV) irradiation to harden
497099 五 、發明說明497099 5. Description of the invention
(cure )這層高分子膜層,同時再與另一層具有記錄訊號 的聚碳酸脂(p〇lycarbonate)基板相黏合,再繼續作後 續動作如飛鍵(sPuMering) ’如此就形成了真正的單面 雙層結構,繼續此動作將可以製作真正單面多層結構。然 而這種方法的缺點是需要高壓以獲得良好的訊號轉印與複 製效果,對模版表面將造成可觀的磨耗,由於模版表面的 磨耗將造成後期所製作出的碟片錯誤率高於前期製作的碟 片。 第三種 薄膜的方法 在旋轉的模 ,而達到轉 劑揮發後硬化,形成—具 ,基本上它是 版上,藉著旋 印複製模版上 有記錄訊號的 濺鍍,如此就 可以製作出真 用S 0 A P製程所 優點,而且利 或2 P法所得的 膜的機械強度 碳酸脂基板黏 相對増力π,同 \的薄犋成品: 多記錄層光碟 與另一層具 後續動作如 f此動作將 雖然利 溫與南壓的 較射出成型 度越薄,薄 錄訊號的聚 傷害機率也 (wrinkle : 用此方法製 coMedia公司所發展的SOAP製作 將一種高分子樹脂溶液滴在一正 轉塗佈將樹脂溶液覆蓋整個模版 訊號的功能,當高分子樹脂的溶 有s己錄膜層的南分子薄膜,這時 聚碳酸脂基板相黏合,再繼續作 形成了真正的單面雙層結構,繼 正單面多層結構。 製作的記錄薄膜具有不需使用高 用此一方法所製得的薄膜厚度比 薄膜厚度更薄,但是當薄膜層厚 就變得越差,在與另一層具有記 合後,於後續脫離模版時產生的 時也不容易獲得一平整沒有皺摺 ’這也是為何至今工業界尚未採 片的原因之一。另外,就SOAP方(cure) This polymer film layer is simultaneously bonded to another layer of polycarbonate substrate with a recording signal, and then continues to perform subsequent actions such as flying keys (sPuMering). Double-layer structure. Continuing this action will make a true single-sided multilayer structure. However, the disadvantage of this method is that high pressure is required to obtain a good signal transfer and reproduction effect, which will cause considerable wear on the surface of the stencil. Due to the wear of the stencil surface, the error rate of discs produced in the later stage is higher than that produced in the previous stage. Discs. The third method of thin film is to harden and form the rotating mold after the transfer agent is volatilized. Basically, it is on a plate. By spin-printing the recorded signal on the stencil, it can produce a true film. The advantages of using the S 0 AP process, and the mechanical strength of the film obtained by the 2 P method, the relative viscosity of the carbonic acid substrate is π, the same as the thin finished product: a multi-recording layer disc and another layer have subsequent actions such as f. This action will Although the injection molding degree of Lewin and South Pressure is thinner, the chance of poly damage of thin recording signals is also (wrinkle: This method is used to make a SOAP produced by coMedia company. A polymer resin solution is dropped in a forward rotation coating. The resin solution covers the function of the entire stencil signal. When the polymer resin is dissolved in the South molecular film of the film layer, the polycarbonate substrates are bonded together, and then continue to form a true single-sided double-layer structure. The multi-layered structure of the recording film is produced without the need to use a high film thickness produced by this method is thinner than the film thickness, but when the film layer thickness becomes worse, the After the bonding layer has in mind, is generated from the template in the subsequent one of the reasons is not easy to obtain a flat without wrinkles' This is why the industry has not been adopted sheet. Further, on side SOAP
五、發明說明(4) 法所發表的專利中、, ^ T 如杲國第5, 468 324、5, 6 6 9, Θ9 5 及 5,7 0 〇 5 3 9號專利戶斤揭# 土 牌恩# + 」尸汁揭路者,只有概念性敘述如何製作多記 可行的方案,這也並沒有針對各個步驟提出實際 及士本μ & $ 也疋為何未能將具多記錄層光碟片產品普 及生產的重要原因之一。 【發明之目的與概述】 用,^ t於ί,本發明的目的便是針對上述S0AP製程的應 作方法。可貝施於實際生產的多記錄層光碟片的自動化製 客~ f a方面,本發明更提供一種應用上述SOAP技術製作 光碟片時,使記錄薄膜易於脫膜的方…模版 成% ^形成的薄膜成品分離,而不會造成記錄薄膜形 烕皺摺或受到傷害。 制& ^ ^上述本發明之目的,所提出之多記錄層光碟片的 衣作方法可歸納如下所述: 取^先^以傳統的射出成型技術製作具有第一層記錄薄膜的 ♦奴酸脂基板(L1層)。 笛-之^後,重覆下述本發明揭露之製程依續於L 1層上形成 二屺錄薄膜、第三層記錄薄膜···等等,便可獲得一單 面二I記錄層的光碟片。若再將兩單面多記錄層光碟片以 片。、面方式結合一起,便可獲得—雙面多層記錄層的光碟 膠人=取彳于載有&己錄说號之模版(stamper),將之 多δ在—平面底板上,此模版記錄有第二層記錄薄膜所要V. Description of Invention (4) Among the patents published in the law, ^ T is as the national patent Nos. 5, 468 324, 5, 6 6 9, Θ9 5 and 5, 7 0 〇5 3 9 patent households Jinjiejie # 土牌 恩 # + "The corpse juice revealer only has a conceptual description of how to make multiple feasible solutions, and this does not propose actual and Shiben μ & $ for each step. One of the important reasons for the popular production of film products. [Objective and Summary of the Invention] The purpose of the present invention is to apply the above-mentioned SOAP process. It can be applied to the automated production of multi-recording layer optical discs. In the aspect of fa, the present invention further provides a method for making the recording film easy to release when applying the above-mentioned SOAP technology. The finished product is separated without causing wrinkling or damage to the recording film. ^ ^ ^ The purpose of the present invention described above, the proposed method of fabricating a multi-recording layer optical disc can be summarized as follows: Take ^ first ^ using traditional injection molding technology to produce the first layer of recording film Grease substrate (L1 layer). After this, repeat the following process disclosed in the present invention to form a second recording film, a third recording film, etc. on the L 1 layer to obtain a single-sided two I recording layer. CD. If there are two single-sided multi-recording layer discs, The combination of surface and surface methods can be obtained-a double-sided multi-layer recording layer of the disc gluer = taken from a stamper with & already recorded, and a large amount of δ on the flat substrate, this template records Required for a second recording film
第8頁 497099 五、發明說明(5) 的訊號圖案(或為第三層的記錄薄膜…等等,係依所要形 成的記錄層為何而定),並於製程進行時,於模版直徑約 2 2〜3 5 mm處作為夾持區的模版中心部份,形成相互對稱的 氣孔,以利後續製程中形成的第二層記錄薄膜易於脫模。 接著,以旋轉塗佈法複製模版上的記錄圖案,包含以 2 0 0 - 4 0 0 r p m速度喷塗(d i s p e r s e ) —樹脂,再逐漸增加轉 速至3200-4500rpm以甩勻(spread)樹脂,形成厚度約為 1 -1 5 // m的記錄薄膜。然後,將載有模版與此記錄層的底 板翻轉,於先前L 1層上形成的記錄層濺鍍一反射層膜,例 如為Au、A1、Ag、A1N、Si3N4或SiC等金屬或介電材料, 厚度約為1 0〜3 0 nm (依所濺鍍之材料不同而有不同厚度變 化,再於反射層上塗佈一層黏合膠,使之與具有記錄層的 一面黏合起來,經由固化處理,控制所選用之黏合膠其收 縮量需小於3 %,以免造成過度的變形。最後,將底板與 模版與樹脂記錄薄膜分離,在分離時由上述氣孔吹入空氣 ,讓中心部份的膜層先分離,再繼續由内擴大至外圓周, 因此使脫模的過程容易且不致造成傷害。 經由重覆執行上述的製程,使L 1層上黏著所要記錄層 後,再整個放入濺鍍機中進行反射層濺鍍,濺鍍後的成品 就是一單面多層記錄層的結構。最後,只要將兩單面多記 錄層的薄片,以記錄面對記錄面相互黏合起來,便成為一 雙面多記錄層的光碟片。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳Page 8 497099 5. The signal pattern of the description of the invention (5) (or the third layer of the recording film ... etc., it depends on the recording layer to be formed), and the diameter of the stencil is about 2 during the manufacturing process. The center part of the stencil at 2 ~ 3 5 mm is used as the clamping area to form symmetrical air holes to facilitate the release of the second recording film formed in the subsequent process. Next, the recording pattern on the stencil was copied by spin coating, including spraying the resin at a speed of 2000-400 rpm, and then gradually increasing the speed to 3200-4500 rpm to spread the resin to form A recording film having a thickness of about 1 -1 5 // m. Then, the substrate carrying the stencil and this recording layer is turned over, and a reflective layer film is formed on the recording layer formed on the previous L 1 layer, for example, a metal such as Au, A1, Ag, A1N, Si3N4, or SiC, or a dielectric material. The thickness is about 10 ~ 30 nm (the thickness varies according to the material being sputtered, and then a layer of adhesive is coated on the reflective layer to make it adhere to the side with the recording layer. After curing, Control the shrinkage of the selected adhesive to be less than 3% to avoid excessive deformation. Finally, separate the bottom plate from the stencil and the resin recording film, and blow air into the air hole from the above to separate the film layer in the center. Separate, and then continue to expand from the inner to the outer circumference, so that the demolding process is easy and does not cause harm. After repeating the above process, the desired recording layer is adhered to the L 1 layer, and then placed in the sputtering machine. Reflective layer sputtering is performed, and the finished product after sputtering is a single-sided multilayer recording layer structure. Finally, as long as two single-sided multi-recording sheets are bonded to each other with the recording side and the recording surface, it becomes a double-sided Optical disc recording layer. In order to make the aforementioned and other objects of the present invention, features, and advantages of significantly comprehensible, a preferred embodiment hereinafter, and with the accompanying drawings, for details
497099 五、發明說明(6) 細說明如下。 圖式說明· 第1圖繪示本發明一種多層記錄層光碟片製作方法的 方塊流程圖; 第2 a〜2 g圖繪示以本發明方法用於製作具有雙層 記錄層光碟片的流程示意圖; 第3 a 、3 b圖繪示於本發明製程之模版上形成多數 個對稱的氣孔之圖示; 第4 a 、4 b圖繪示本發明之模版膠合至底板以便於 夾持進行製程; 第5 a圖繪示本發明製程中一種黏合記錄層於反射層 的方式, 第5 b圖繪示本發明製程中另一種黏合記錄層於反射 層的方式; 第6 a 、6 b圖繪示本發明製程中模版上記錄的訊號 圖案與記錄層複製後所得圖案的比較。 【實施例說明】 請參照「第1圖」,其為本發明多記錄層光碟片製作 方法。 應用於形成CD —光碟片多記錄層結構的流程步驟如下 首先,製作一具有第一層記錄訊號的聚碳酸脂基板 (步驟1 a ),然後於聚碳酸脂基板上沈積一半反射層 (步驟1 b )備用;另提供一模版(stamper )(步驟2497099 5. Description of the invention (6) The detailed description is as follows. Description of the drawings: Fig. 1 shows a block flow chart of a method for manufacturing a multi-layer recording layer optical disc according to the present invention; Figs. 2 a to 2 g show a schematic flowchart of a process for producing an optical disc with two recording layers by the method of the present invention; Figures 3a, 3b show the formation of a number of symmetrical pores on the template of the process of the present invention; Figures 4a, 4b show the template of the present invention glued to the base plate to facilitate the clamping process; Figure 5a illustrates a method of bonding a recording layer to a reflective layer in the process of the present invention, and Figure 5b illustrates another method of bonding a recording layer to a reflective layer in the process of the present invention; Figures 6a, 6b illustrate Comparison of the signal pattern recorded on the template in the process of the present invention with the pattern obtained after the recording layer is copied. [Explanation of the embodiment] Please refer to "Fig. 1", which is a method for manufacturing a multi-recording layer optical disc according to the present invention. The process steps used to form a CD-disc multi-recording layer structure are as follows. First, a polycarbonate substrate with a first recording signal is made (step 1a), and then a half reflective layer is deposited on the polycarbonate substrate (step 1). b) standby; another template (stamper) is provided (step 2
第10頁 497099 五、發明說明(7) a ),其上具有後續所要形成記錄層的訊號圖案,並將其 與一底板膠合(步驟2 b );接著以旋轉塗佈(spin coating)方式(步驟3 )將一高分子材質的薄膜層形成 在模版上,經固化後(步驟4 )以便形成複製有模版之記 錄訊號的一記錄層;再將一黏著膠塗佈在其上(步驟5 ) ,翻轉整個底板與模板,將此底板與模板黏合於記錄層上 (步驟6 ) •,並以固化處理使黏著膠固化,以便記錄層能 牢固結合於聚碳酸脂基板上;再來將底板以及模版與記錄 薄膜分離,即脫模的程序(步驟7 );最後將脫模所曝露 的新表面濺鍍上一層反射層(步驟8 ),即完成單面雙層 結構;經由重覆進行上述步驟1 b〜5的程序,便可陸續 於聚碳酸脂基板上形成第二層、第三層…的記錄層;最後 再將完成的單面多記錄層結構外部形成保護塗佈(步驟9 a ) 〇 依照相同製程步驟,只要將上述的CD系列光碟片或是 將二片完成的單面多記層,面對面貼合形成一完整碟片 本發明可運用於各種CD以及DVD唯讀型以及可記錄型 光碟片上,以下將以直徑120mm、厚度1.2mm的DVD雙面雙 層光碟片作為表達例子。 真正的DVD雙面雙層光碟片作法是將兩片直徑120mm單 面雙層記錄薄片(厚度約0 · 6mm ),記錄面對記錄面相互 黏合起來,變成一片厚度1. 2mm符合規格的光碟片。因此 首先就必須製作出厚度0 . 6mm單面但是具有雙記錄層的記 錄薄片。Page 497099 V. Description of the invention (7) a), which has a signal pattern of a subsequent recording layer to be formed thereon, and glues it to a base plate (step 2b); and then uses a spin coating method ( Step 3) forming a thin film layer of polymer material on the stencil, and after curing (step 4) so as to form a recording layer that reproduces the recording signal of the stencil; and then apply an adhesive on it (step 5) , Flip the entire bottom plate and template, and adhere the bottom plate and the template to the recording layer (step 6), and cure the adhesive with a curing process so that the recording layer can be firmly bonded to the polycarbonate substrate; The stencil is separated from the recording film, that is, the demolding process (step 7); finally, the new surface exposed by the demolding is sputtered with a reflective layer (step 8) to complete the single-sided double-layer structure; the above steps are repeated by repeating 1 b ~ 5 procedures, can successively form a second, third, ... recording layer on a polycarbonate substrate; finally, a protective coating is formed on the outside of the completed single-sided multi-recording layer structure (step 9 a) 〇 Follow the same As long as the above-mentioned CD series optical discs or two single-sided multi-layered layers are laminated, they are bonded face to face to form a complete disc. The present invention can be applied to various CD and DVD read-only and recordable optical discs In the following, a DVD double-sided double-layer optical disc with a diameter of 120mm and a thickness of 1.2mm will be taken as an example of expression. The true DVD double-sided double-layer disc method is to make two single-sided double-layer recording sheets with a diameter of 120mm (thickness about 0 · 6mm), and the recording faces are bonded to each other to form a disc with a thickness of 1.2mm. . Therefore, it is necessary to first produce a recording sheet having a thickness of 0.6 mm on one side but having a double recording layer.
497099 五、發明說明(8) 请參知 第2 a〜2 g圖」,其為本發明流程步驟的 示意圖。 如「第2 a圖」所示,先製作一片模版12,在此模版 上所記錄的訊號是單面第二層所要記錄之訊號(為易於辨 認,此層記錄訊號稱為b ),為了易於後續脫膜,在模版 之中心部份失持區(直徑22 -3 5mm處)開有相互對稱的空 氣孔(air-bl0Wn hole ) 122,請參照「第 3 a 、3 b 圖 」的實施例,分別可製成具有三孔對稱或四孔對稱的方 式。 接著,此模版1 2將與一片平面底板1 0膠合,進行此步 驟具有兩個目的,第一是易於後續作自動化夾持,第二是 提南权版的機械強度’由於電每(electro-forming )之 後所得的模版厚度只有約0 · 3 - 0 · 5 mm,相當柔軟,易受損 ,因此將模版1 2結合底板1 0,可避免直接操作模版,減少 模版12受到損壞。請參照「第4 a 、4 b圖」所示,底板 1 0可配合不同的夾具,作適於夾持的設計。 如「第2 b圖」所示,利用旋轉塗佈法複製模版1 2上 的記錄訊號’方法是先將膠合後經檢視平整無瑕的模版1 2 與底板1 0由機械手臂夾持,置於一經特殊設計夾治呈之旋 轉塗佈機(spin coater)上,並於表面上滴上樹脂 5-1 0ml,採用的樹脂種類例如可為Aery 1 ic p〇lymer、 Poly-Ether-Imide (PEI ) 、Photo Imide (PI )等,為使 薄膜厚度均勻,旋轉塗佈至少需經過兩個過程:(1 )哨、塗 (disperse)及(2)甩勻(spread uniformly) 〇 在嗜淹497099 V. Description of the invention (8) Please refer to Figures 2a to 2g ", which is a schematic diagram of the process steps of the present invention. As shown in "Figure 2a", first create a template 12. The signal recorded on this template is the signal to be recorded on the single-sided second layer (for easy identification, the recorded signal on this layer is called b). Subsequent delamination, symmetrical air-bl0Wn holes 122 are opened in the discontinuity area (diameter 22-3 5mm) in the central part of the stencil. Please refer to the embodiment of "Figures 3a and 3b" , Can be made with three-hole symmetry or four-hole symmetry. Next, this template 12 will be glued to a flat bottom plate 10. This step has two purposes. The first is to facilitate the subsequent automatic clamping. The second is to improve the mechanical strength of the Southern Edition. The thickness of the stencil obtained after forming) is only about 0. 3-0. 5 mm, which is quite soft and easy to be damaged. Therefore, combining the stencil 12 with the bottom plate 10 can avoid direct manipulation of the stencil and reduce damage to the stencil 12. Please refer to "Figures 4a and 4b", the bottom plate 10 can be used with different fixtures to make a design suitable for clamping. As shown in "Figure 2b", the method of copying the recorded signal on the template 12 using the spin coating method is to first glue the template 1 2 and the bottom plate 10, which are flat and flawless after inspection, by a robotic arm, and place Once a specially designed spin coater is applied, and resin is dripped onto the surface in an amount of 5-10 ml. The type of resin used may be, for example, Aery 1 ic polymer, Poly-Ether-Imide (PEI ), Photo Imide (PI), etc. In order to make the thickness of the film uniform, spin coating needs to go through at least two processes: (1) whistle, disperse and (2) spread uniformly.
第12頁 497099Page 12 497099
五、發明說明(9)V. Description of Invention (9)
樹月曰過程中先以2 0 0 -4 0 0 r pm速度喷塗,喷嘴由内徑向外押 或疋由外彳雙向内徑,或來回多次喷塗,喷嘴移動速度不 大於5m/sec,所用喷嘴孔徑必須小於100 /zm。在甩$過。 中逐漸增加轉速至32 0 0 — 4 5()()rpm,最後再配合樹脂種 整轉速得到一均勻的薄膜1 4,此時這層厚度約1— 1 5 、°W ^月曰缚膜1 4將轉印複製與模版相反的表面形狀,為方便 績敛述我們稱這部份的成品為A 2 (即包含有底板丨〇、 1 2及樹脂記錄層! 4 )。 吴 如「第2 c圖」所示,以傳統的射出成型技術製作取 碳酸脂基板(稱之為L1層)2〇,在L1層2〇上具有此單面^ 一層所需的記錄訊號(為易於辨認,層記錄訊號稱為a )乐 。若是欲製作的碟片D系列的碟片,則L丨碟片厚度是工 2mm左右,若是DVD系列碟片,則L1碟片厚度是0. 6mm 如「第2 d圖」所示,將li層20濺鍍一層半反射層膜 2 2 ’這層半反射層材料與濺鍍的厚度與日後所讀取時所使 之波長有洽切關係’一般例如是利用金屬或是介電材 例如是金(Au )、鋁(A1 )、銀(Ag )、矽(S i )、氮化 =(A1N ) 、I化矽(S!3N4 )或碳化矽(SiC )等,形^成 f度約10-3 0 nm的半反射層22,為方便後續敘述我們稱這 部份的成品為A1 (即包含li層2〇及半反射層22)。 如「第2 e圖」所示,是將前述做好的A丨成品半反 層22朝上放置於貼合機(b〇nding machine)上,同時將、 一 Ιέ合膠24塗於A1半反射層22,此黏合膠24例如可為uv固During the process of Shuyue Yue, first spray at a speed of 2 0-4 0 0 r pm. The nozzles are pushed outward from the inner radial direction or from the outer diameter of the two-way inner diameter, or sprayed back and forth multiple times. The nozzle moving speed is not greater than 5m / sec, the nozzle diameter used must be less than 100 / zm. Over $$ off. Gradually increase the rotation speed to 32 0 0 — 4 5 () () rpm, and finally match the resin rotation speed to obtain a uniform film 14, at this time the thickness of this layer is about 1-15, ° W 14 Transfer and copy the surface shape opposite to the stencil. For the sake of convenience, we will call the finished product of this part A 2 (that is, it includes the bottom plate 〇0, 12 and the resin recording layer! 4). As shown in "Figure 2c", Wu uses traditional injection molding techniques to make a carbonate substrate (called the L1 layer) 20, which has this single-sided ^ one layer on the L1 layer 20 and the required recording signal (one layer) For easy identification, the layer recording signal is called a) music. If it is the D series of discs to be produced, the thickness of the L 丨 disc is about 2mm. If it is a DVD series, the thickness of the L1 disc is 0.6mm. As shown in "the second d picture", the li Layer 20 is sputtered with a semi-reflective film 2 2 'The material of this semi-reflective layer and the thickness of the sputtering have a close relationship with the wavelength used in future readings' Generally, for example, a metal or a dielectric material such as Gold (Au), aluminum (A1), silver (Ag), silicon (Si), nitride = (A1N), silicon carbide (S! 3N4), or silicon carbide (SiC), etc. The 10-3 0 nm semi-reflective layer 22, for the convenience of subsequent description, we call the finished product of this part as A1 (that is, it includes the li layer 20 and the semi-reflective layer 22). As shown in "Fig. 2e", the semi-reflective layer 22 of the finished A 丨 finished product is placed on a bonding machine facing upwards, and at the same time, a glue 24 is applied to the A1 semi-finished product. Reflective layer 22, this adhesive 24 can be, for example, UV-curable
第13頁 /uy9 五、發明說明(10) 但其知點疋固化時收縮率須 化型或是熱處理固化型黏膠 小於3 %以下。 接著將上述的A2成品翻轉,讓A2的樹脂記錄膜層14接 觸A1的黏合膠24,同時藉由旋轉塗佈與壓力密合黏著μ與 A2 °另外一種避免產生氣泡夾雜可行的方法,可參照「第Page 13 / uy9 V. Description of the invention (10) But its knowledge: The shrinkage rate during curing must be reduced or less than 3%. Then turn the above-mentioned A2 finished product, so that the resin recording film layer 14 of A2 contacts the adhesive 24 of A1, and at the same time, adhere to μ and A2 by spin coating and pressure. Another feasible method to avoid air bubble inclusion is to refer to "No.
f :圖」不’係利用一支注射唧筒5 0,由一支長針52將黏 者劑24注入於A1以及A2之間,注射的同時,針頭52同時向 碟片外部移動,由於黏著膠24與樹脂丨4間表面張力的關係 ’黏著膠24將填充於a 1與A2狹窄的空間中,最後利用旋轉 將多餘的黏著膠甩掉。還有一種避免產生氣泡夾雜可行的 方去明參如「第5 b圖」所示,係相反於上述圖例中a 1 與A2的位置,也就是…在人丨的下面,藉由以上利用針頭 填充黏著膠24方式,或是先將一團黏著膠24塗佈於A2樹脂 4的中〜,再考曲(bend)Al ,因為A1是一層聚碳酸脂塑 膠物質,容易變形成為突出的淺盤狀,先讓A2與人丨的中心 區域相接觸,接著慢慢旋轉壓下A1,同時加大區域接觸面 ’直到黏著膠佈滿整個碟片為止Q 接著將黏著膠24固化,此黏合膠24若為uv固化型黏著 膠,UV光源26是由A1的聚碳酸脂塑膠面射入,讓uv固化型 黏著膠吸收光能量而固化;若為熱處理固化型黏著膠,則 將整座夾治具放入熱風烤箱中作烘烤,無論所選用之黏著 膠種類’其收縮里需小於3 %,以免造成過度的變形。 如第2 f圖」所不’是將A 1部份的底板1 〇以及模版 1 2與樹脂記錄膜1 4分離,為了容易分離,由於在底板以及f: The figure "No" is using an injection tube 50, and a long needle 52 is used to inject the adhesive 24 between A1 and A2. During the injection, the needle 52 moves to the outside of the disc at the same time. Relationship with the surface tension of resin 丨 'Adhesive 24 will be filled in the narrow space of a 1 and A2, and finally excess adhesive will be thrown away by rotation. There is also a feasible way to avoid the inclusion of bubbles. As shown in "Figure 5b", it is opposite to the positions of a 1 and A2 in the above illustration, that is, ... under the person, using the needle above. The method of filling the adhesive glue 24, or firstly apply a group of adhesive glue 24 to the A2 resin 4 and then test Al. Because A1 is a layer of polycarbonate plastic material, it is easy to deform into a prominent shallow disk shape. First, let A2 contact the central area of the person, then slowly rotate and press A1, while increasing the area contact surface 'until the adhesive tape fills the entire disc Q. Then the adhesive glue 24 is cured. It is a UV curing adhesive. The UV light source 26 is injected from the polycarbonate plastic surface of A1 to allow the UV curing adhesive to absorb light energy and cure. If it is a heat curing curing adhesive, put the entire clamp. Baking in a hot air oven, regardless of the type of adhesive used, its shrinkage should be less than 3% to avoid excessive deformation. As shown in Figure 2f, “the bottom plate 10 and the stencil plate 12 of the A 1 portion are separated from the resin recording film 14. In order to facilitate separation,
第14頁 五 發明說明(11) 模版14的中心部份約2 2- 3 5mm的失持區域有著空氣孔丨22, :1,分離時只要吹入空氣,讓中心部分的膜層先分離, 繼績由内擴大至外圓周,便可輕易的脫模。由於CD或 兮D光碟片在失持區域沒有記錄訊號,分離時若有些微的 k形’也不會對磲片的品質造成影響。 、/如 弟2 g圖」所示,最後將整個物品放入錢鍍機中 =行反射膜2 6濺鍍,濺鍍後的成品就是一單面雙記錄層的 結構。此外,在整個製作過程中為防止灰塵或小顆粒沾黏 於碟^表面,造成訊號的失真,所有過程必須在1 〇 〇 〇等級 或更南等級之無塵室下工作,另外必須有除靜 供電中性的空氣。 ,第6 a 、6匕圖」是利用本發明方法複製訊號的表 面形狀掃目苗’ 「圖6 a」是利用原子力顯微鏡(AFΜ )掃 目=模版的表面形狀所得之結果;而「圖6 b」則是利用本 ^明製私’利用旋轉塗佈複製模版上的記錄訊號所得的結 果’在模版上原為凸起的部份,經轉印後變成凹陷的部份 反之原為凹陷的部份,經轉印後變成突起部份,由Α ρ μ 結果可瞭解本發明方法將極精確有效的轉印原模版上的訊 號圖案。The description of the invention on page 14 (11) The central part of the template 14 is about 2 2-3 5mm. There is an air hole in the 5-20 mm misalignment area. 22,: 1, just blow in the air during separation, and let the film layer in the center part separate. After the performance is expanded from the inner to the outer circumference, it can be easily demolded. Since there is no signal recorded on the CD or HDD discs in the region of miscarriage, a slight k-shape 'during separation will not affect the quality of the film. "/ As shown in Figure 2g", finally put the entire article into the coin plating machine = line reflective film 2 6 sputtering, the finished product after sputtering is a single-sided double recording layer structure. In addition, in order to prevent dust or small particles from sticking to the surface of the dish during the entire production process, which will cause signal distortion, all processes must work in a clean room at a level of 1,000 or more, and there must be a Powered by neutral air. "Figures 6a and 6" are copies of the surface shape of the signal using the method of the present invention. "Figure 6a" is the result of using the atomic force microscope (AFM) to scan = the surface shape of the template; and "Figure 6 “b” is the result of using “Bei Ming Zhi private” to copy the recorded signals on the stencil by spin coating. The stencil was originally a raised part, and after the transfer, it became a depressed part. Otherwise, it was a depressed part. After being transferred, it becomes a protruding part. From the result of Αρμ, it can be understood that the method of the present invention will transfer the signal pattern on the original template with great accuracy and efficiency.
雖然本發明已以一較佳實施例揭露如上,然其並非用 乂限疋本兔明’任何熟習此技藝者,在不脫離本發明之精 神和範圍内’當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 【圖式之符號說明】Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit this rabbit to anyone who is familiar with the art, without departing from the spirit and scope of the present invention, should make some modifications and retouching. Therefore, the protection scope of the present invention shall be determined by the scope of the appended patent application. [Illustration of Symbols in the Schematic]
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TW088113347A TW497099B (en) | 1999-08-05 | 1999-08-05 | Manufacturing method for optical discs containing multiple recording layers |
JP2000002890A JP2001056969A (en) | 1999-08-05 | 2000-01-11 | Production of multilayer optical disk |
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TW088113347A TW497099B (en) | 1999-08-05 | 1999-08-05 | Manufacturing method for optical discs containing multiple recording layers |
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TW (1) | TW497099B (en) |
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