TW478974B - Device for and method of producing/supplying dry ice snow, cleaning device and cleaning method - Google Patents

Abstract

This invention provides a device and method for producing/supplying dry ice capable of producing and supplying dry ice snow in a stable state. This method for supplying dry ice snow is to connect a high pressure gas vessel filled with a booster gas to a liquefied carbon dioxide storage vessel, install a temperature controlling device, maintain a constant pressure by raising pressure to a predetermined pressure with the booster gas, control the storage vessel in a temperature for keeping carbon dioxide under the constant pressure to be in a liquid state, feed the liquefied carbon dioxide in the storage vessel to a throttle nozzle unit through a shut off valve and generate and supply dry ice snow through adiabatic expansion at the throttle nozzle unit. Moreover, adjusting pipe length, concurrently injecting booster gas dry ice injection flow surrounding area and having conical shape injection nozzle and also flat side gap recess, flow rate and pressure of the injection gas can be altered. Intermittent or continuous supply of heated and ionized dry ice is provided to the injection nozzle to clean the target article.

Description

478974 6425pif.d〇c / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (() Alliance Field The present invention relates to a method for manufacturing snow-like dry ice (hereinafter referred to as dry ice and snow). In particular, it relates to a dry ice and snow generating and supplying device, a generating and supplying method, and a washing device and a washing method. About the dry ice and snow washing method and dry ice used in the present invention, the liquefied carbonic acid gas is absolutely eliminated. Thermal expansion produces dry ice and snow, and the stable supply of dry ice and snow is used efficiently. In order to remove circulating parts such as photocopiers, semiconductor wafers (residues during etching), semiconductor inspection devices and their parts, circuit boards, MR heads (CD-ROM reading (Take device) 'Plasticized residues and organic matter, acids, hydrocarbons, metal films, or fine particles attached to precision parts, etc., and a method for cleaning by spraying dry ice and snow, and a cleaning device used in this method are proposed. Background In order to remove semiconductor wafers, circuit boards, MR heads, plasticized residues, and precision parts, etc. Organic matter, acids, hydrocarbons, and fine particles are subjected to a dry ice and snow spray type washing method that sprays dry ice and snow toward the surface to be treated, or further compresses dry ice and snow to form small spherical dry ice (hereinafter referred to as dry ice ball), And this bomb material is widely used as a dry ice spray nine treatment. The above dry ice snow or dry ice ball can also be effectively used as a refrigerant. Known dry ice snow 1 ^ production equipment is shown in Figure 18, The liquefied carbon dioxide gas TY charged in the liquefied carbon dioxide gas storage container 51 is first led out through the conduit 52, then passed through the raw material valve V! And the on-off valve V2, which can be opened and closed in time, for example, a solenoid valve, and finally supplied to, for example, a needle shape. Valve Throttling 4 ----- N ------ Installation (Please read the precautions on the back before filling this page)

• BI MB Μ ·· I order --------- > (210x297 mm) 478974 B7 6425pif.doc / 008 V. Description of the invention (> /) (Please read the notes on the back before filling This page) Nozzle mechanism 53. The liquefied carbonic acid gas at the throttle nozzle mechanism 53 is adiabaticly expanded to form dry ice and snow Ts, which is led out through the pipe 54 to supply dry ice and snow Ts. The liquefied carbon dioxide gas in the liquefied state at this time is supplied to the above-mentioned throttle head mechanism 53. However, in the throttling nozzle mechanism 53, the liquefied carbonic acid gas 1 ^ adiabaticly expands to generate dry ice and snow Ts, which reduces the pressure, so that the liquefied carbonic acid gas TY cannot maintain a supply at a high pressure state, and can generate dry ice and snow Ts. For example, liquefied carbon dioxide gas at a pressure of 2 MPa adiabaticly expands to a pressure of 0 MPa (atmospheric pressure) in the throttle nozzle device 53, and the dry ice snow Ts productivity is about 40%. On the other hand, the liquefied carbon dioxide gas TY having a pressure of 6 MPa adiabaticly expands to a pressure of 0 MPa in the throttle nozzle device 53, and the dry ice snow Ts productivity is about 30%. In addition, keep the liquefied carbon dioxide gas IY in the liquefied state under the above pressure. The pressure of 2MPa must be cooled at a temperature of -20 ° C, and the pressure of 6MPa must be maintained at a temperature below 20 ° C. Also, it is necessary to keep the liquefied carbon dioxide gas γ in a liquefied state. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Therefore, in order to improve the washing efficiency of the articles to be washed, a pressure of about 6 MPa and a temperature of about 20 ° C are used. However, the pressure and temperature conditions are appropriately selected within a range capable of keeping the liquefied carbon dioxide gas in a liquefied state. It is also preferred that the normal temperature is approximately -20 ° C. In this way, the dry ice and snow Ts is generated in the throttling nozzle mechanism 53 by adiabatic expansion with high pressure liquefied carbon dioxide gas to atmospheric pressure (OMPa). However, during the continuous production and supply of dry ice and snow Ts, the pressure in the liquefied carbon dioxide gas storage container 51 gradually decreases, causing the spraying force of the dry ice and snow 1 ^ to be washed to be reduced, thereby reducing the cleaning effect. 5 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm 1 '478974 A7 B7 6425pif.doc / 008 V. Description of the invention (弋) At the same time, for example, as disclosed in Shi Kaiping No. 3-7984 The washing device is a device for adiabatic expansion of liquefied carbonic acid gas to produce dry ice and snow, and spraying the dry ice and snow onto the surface to be cleaned to remove organic matter, acids, hydrocarbons and other impurities from the cleaned surface. Here In the device, in order to prevent dry ice and snow from cooling the surface to be washed to form a condensate of moisture and organic matter during the washing, the infrared lamp # device is used to heat and maintain the surface to be cleaned at a temperature of, for example, about 20 ° C, which is efficient. However, in this device, the cleaning force near the needle valve of the throttle mechanism and the cleaning nozzle (or the spray outlet) is poor. Because the liquefied carbonic acid gas has a temperature of about -80 ° C, so the above In the case of continuous cleaning in the cleaning device, the temperature of the surrounding atmosphere will be reduced, and the temperature of the object to be cleaned will also be lowered, causing moisture in the air to condense and attach or acidify the object to be cleaned. Results and damage to the washed object may make it unusable. The results reveal that in the micro-film of Shikaihei No. 3-7948, it is necessary to treat the washed object and control the washed object near the washed object. The temperature of the net. That is, several temperature control devices need to be installed near the object to be cleaned, and the cleaning operation is restricted. The cleaning operation must be configured to limit the specific place. About the standard for removing or cleaning steel plates using dry ice and snow And the design using a dry ice ball spray gun is disclosed in, for example, Shikaihei No. 5-49258. A small sharp hole is arranged between the liquefied carbonic acid gas and the spray gun, so that the liquefied carbonic acid gas is generated when passing through the small sharp hole. Adiabatic expansion to form a dry ice and snow generation system. This dry ice and snow generation system includes other systems, such as a nitrogen system configured by supplying nitrogen in a double tube structure in a spray gun. From this, the nitrogen 6 paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page)! -Order ·! Ί!! Printed by 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (W) The pressure of gas, so that the dry ice and snow generated by the above-mentioned dry ice and snow generation system is accelerated by controlling the pressure. The structure of the dry ice and snow sprayed cleaned surface. However, the dry ice and snow generation system and nitrogen supply system are individually equipped with spray guns, so the spray gun is configured in two systems, which causes the operation to maintain an appropriate spray state during cleaning operations. Operational problems. In addition, the dry ice and snow used for cleaning and the gas used for spraying are dry. When this fluid circulates in the pipe, it is easy to rub against the pipe to generate static electricity, especially the dry ice and snow can be the largest. Live 20000V. For example, when the charged dry ice and snow are used for cleaning, especially when the cleaned material is 1C or other precision semiconductor parts, problems such as breakage may occur. In addition, the shape of the ejection outlet at the front end of the spray gun also revealed that the spray gun needs to be used in accordance with the shape formed by the object to be cleaned. For example, in order to correspond to a wide range of objects to be cleaned, the shape of the ejection outlet at the front end of the spray gun must also be a wide slit shape. Because the expansion range of dry ice and snow and the simultaneous spraying gas depends on the expansion of the spraying gas, there is a certain limit. Especially when the flow rate of the injection gas is small, it is not effective at all. The problem is that the width of the cleaning width of the sprayed dry ice and snow is the same as the width of the opening of the ejection outlet at the front of the spray gun. At this time, the expansion of the ejection gas requires maintaining the ejection gas under a certain pressure to maintain a wide shape. However, it is very difficult to manufacture a precise spray gun with a certain wide shape. Because it is difficult to manufacture a spray gun with good reproducibility, cheapness, and maintaining a certain wide accuracy, the cost will increase during manufacture. In addition, during plastic forming, in order to remove the attachment 7 of the mold release pliers (please read the precautions on the back before filling in this page). 丨 丨 丨 Order 丨 丨 I 丨 丨 — This paper size applies to China Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (t) Thermoplastic resin sheet, thermosetting resin sheet And various additives (plasticizers, stabilizers, reinforcing agents, flame retardants, antistatic agents, etc.) contained in the above resins. Conventionally, the resin sheet is removed by plasticizing, and the actual injection molding is performed to clean the resin, thereby cleaning the mold tongs. However, when the cleaning resin is used for cleaning the release tongs, the cleaning resin is different from the resin used in mass production. It takes much time to replace the resin at the beginning of washing or mass production. 1 to 2 times a day, and then according to the proficiency of the operator, 1 to 2 hours of washing time is required for one wash. The operator is prone to non-uniformity due to different release and cleaning degrees, resulting in each The problem is that the average production efficiency of the forming machine is very poor. In short, for example, in the above-mentioned cleaning operation, a method capable of efficiently and having a good cleaning power is desired. Invention 槪 沭 The main object of the present invention is to provide a dry ice and snow production and supply device and a production and supply method capable of supplying refined dry ice and snow in a stable state. In order to solve the above-mentioned problems or improper problems, dry ice and snow can always be produced and supplied in a stable state, and the washed objects can be efficiently washed. The pressure of the liquefied carbonic acid gas expanded adiabatically at the throttle nozzle is maintained under a certain state, and the liquefied carbonic acid gas stored in the liquefied carbonic acid gas storage container is constantly maintained in a liquefied state to maintain temperature-pressure. In addition, the length of the pipe near the outlet of the throttling device mechanism through which snow-like dry ice passes can be adjusted to have a sufficient physical cleaning power. Moreover, for the problem of lowering the temperature of the object to be cleaned, directly control the temperature of the object to be cleaned to solve the low temperature 8 (Please read the precautions on the back before filling this page) 0 Loading • ϋ ϋ! -Order ----- ---- > This paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ), It will not cause dew condensation even under continuous cleaning. In addition, dry ice and snow are charged, especially in the case of damage to the cleaned material, and the static electricity generated is removed. In the above case, it is possible to clean the object to be cleaned, and use the cleaning nozzle to spray dry ice and snow, so as to improve the operability. In addition, when cleaning the object to be cleaned, a special device must be prepared near the object to be cleaned. Therefore, there is provided a dry ice and snow production device capable of a convenient cleaning method in a specific place, and a cleaning device provided for implementing the method. An object of the present invention is to provide a dry ice and snow spraying device having a spray gun (hereinafter referred to as a spray nozzle), which can often spray dry ice and snow at a wide angle. The provided dry ice and snow spraying device provided with a spray nozzle, when the pressure of the spraying gas is reduced, the spraying of dry ice and snow still has a certain spraying width and spraying height. Another object of the present invention is to provide a dry ice and snow spraying device, which can exchange the spray nozzles according to the degree of contamination by the washings, and can freely change the density of dry ice and snow in a certain spraying width. Corresponding to the pollution degree of the objects to be cleaned, the washing speed can be freely changed. Another object of the present invention is to provide an easy cleaning operation, and a convenient dry ice and snow spray cleaning device and a cleaning method thereof. Therefore, it has nothing to do with the operator's degree of training, and it can achieve uniform washing and shorten the time to improve the production efficiency. And when combined with brushing, more effective washing can be achieved. In order to solve the problems of the above-mentioned conventional skills, or inappropriate ^ | fruit stomach, stomach 9 (Please read the precautions on the back before filling out this page) Binding --- --- This paper size applies Chinese national standards ( CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention q) The following solutions are proposed. The invention related to the first scope of the patent application is a dry ice and snow production and supply device, which includes a liquefied carbonated gas storage container for storing liquefied carbonic acid gas, an outlet pipe connected to the storage container, and a liquefied carbonated gas storage device for liquefied carbonic acid gas storage container. Thermal expansion throttling nozzle device. The dry ice and snow generating and supplying device is characterized in that a temperature control means and a temperature detection means for controlling the temperature of the liquefied carbon dioxide gas are provided in the liquefied carbon dioxide gas storage container. The invention related to the second scope of the patent application is the dry ice and snow generating and supplying device described in the first scope of the patent application. The liquefied carbonic acid gas storage container is characterized by a siphon type liquefied carbonic acid gas storage container using a siphon as the outlet tube. . The invention related to the third scope of the patent application is the dry ice and snow generating and supplying device described in the first scope of the patent application. The liquefied carbonic acid gas storage container is characterized by a two-port storage container. Gas source. The invention related to the fourth scope of the patent application is the dry ice and snow generating and supplying device described in the third scope of the patenting application. The dry ice and snow generating and supplying device is characterized in that the pipe connecting the liquefied carbon dioxide gas storage container and the pressure-increasing gas source is divided. Connect to a container for liquefied carbonate gas supply. The invention related to item 5 of the scope of patent application is the dry ice and snow generating and supplying device described in item 3 or 4 of the scope of patent application, which is characterized in that the gas source for pressurization is acid heat. The invention related to item 6 of the scope of patent application is a kind of dry ice and snow 10 ^ paper size applicable to China National Standard (CNS) A4 specifications (210 X 297 public love) ^ _ (Please read the precautions on the back before filling this page ) .0 pack

I ϋ 1 n ：: M, I M ·· II 478974 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy 6425pif.doc / 008 V. Description of the invention (?) Production and supply method, which is characterized by controlling liquefied carbonic acid The temperature of the gas storage container keeps the pressure of the container at a certain pressure to maintain the liquefied carbon dioxide gas, and supplies the liquefied carbon dioxide gas at a certain pressure to the throttling nozzle device to produce dry ice and snow for adiabatic expansion. The invention related to item 7 of the scope of patent application is the dry ice and snow production and supply method described in item 6 of the scope of patent application. It maintains a certain pressure in the liquefied carbon dioxide gas storage container and supplies it with a pressure source for other purposes. The gas is added to the liquefied carbon dioxide gas storage container to supplement the pressure. The invention related to item 8 of the scope of patent application is the dry ice and snow production and supply method described in item 7 of the scope of patent application, which is characterized in that the gas from the gas source for boosting is supplied to the boosting means to boost the pressure. The invention related to item 9 of the patent application scope is the dry ice and snow production and supply method described in item 7 of the patent application scope or item 8 of the patent application scope, which is characterized in that the gas source for pressurization is carbon dioxide gas. The invention related to the 10th invention of the scope of patent application is a dry ice and snow production and supply device, which includes a liquefied carbonic acid gas storage container for storing liquefied carbonic acid gas, and an adiabatic expansion throttling mechanism connected to the storage container to reach dry ice and snow. The dry ice and snow supply system that cleans the spray head to form a circulation pipeline, and the spray gas supply system that is connected to the spray gas source container and reaches the spray gas injection port provided at the peripheral part of the cleaning spray nozzle to form a circulation pipeline. The formed dry ice and snow washing device. The dry ice and snow supply system from the throttling mechanism to the cleaning nozzle is characterized by a pipe length adjustment mechanism that can adjust the length of the circulation pipe. The jet nozzles provided on the outer part of the cleaning nozzle of the jetting gas supply system are formed in parallel with the direction of spraying of dry ice and snow. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)-*-% c -V ----------- install i — — · 丨 丨 Order ί--------------- (Please read the precautions on the back before filling this page) 478974 A7 B7 6425pif.doc / 008 V. Description of the Invention (q) The jet gas k jet outlet. The invention related to item 11 of the scope of patent application is a dry ice and snow washing method, which is characterized in that pressurized liquefied carbonic acid gas expands in a throttling mechanism to form dry ice and snow, and is ejected from the ejection outlet toward the object to be cleaned for cleaning. method. The parallel jet gas is simultaneously sprayed around the dry ice and snow jet stream. Adjust the length of the flow path from the throttling mechanism to the injection port to spray dry ice and snow and wash the objects to be washed. The invention related to the 12th scope of the patent application is a dry ice and snow cleaning device, which is characterized by a dry ice and snow spraying device that uses dry ice and snow to clean the object to be washed. The carbon dioxide gas source is arranged on the connected device to spray dry ice and snow. The outer cylinder is connected to the center of the ice and snow spray nozzle, and the spray gas source is arranged along the outer periphery of the ice cone. The front end of the outer cylinder is formed with a gas ejection port for ejecting the gas. The invention related to the thirteenth patent application scope is the dry ice and snow cleaning device described in the twelfth patent scope application. The dry ice and snow spray nozzle is characterized by a flat shape at the front end of the spray outlet and a gradually conical shape. The flat-shaped ejection outlet at the front end is provided with a side gap notch. The invention related to item 14 of the scope of patent application is the dry ice and snow cleaning device described in item 13 of the scope of patent application. The flat front-end spray outlet is characterized in that the short edge of the front spray outlet is provided with a side gap notch. The invention related to item 15 of the scope of patent application is the dry ice and snow washing device described in item 13 or 14 of the scope of patent application. The flat front-end spray outlet is characterized by the restricted portion of the long side of the front spray outlet. Has a slightly rectangular shape. 12 This paper size applies to China National Standard (CNS) A4 Regulation i (21G X 297 public love) " ------------------- tr (Please read the note on the back first Please fill in this page again)% Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of Invention (β) The invention related to the 16th scope of the patent application is the 13th scope of the patent application Or the dry ice and snow cleaning device described in item 14, the shape of the front end of the spraying body ^ is characterized by a slender shape, and the connection line with the side gap notch provided at the front end of the dry head of the dry ice and snow spraying port is slightly parallel. ~ The invention related to item 17 of the scope of patent application is the dry ice and snow cleaning device described in item 16 of the scope of patent application. The shape of the front end of the jetting gas jet is characterized by a slender shape and the front end of the dry ice and snow spraying nozzle. The side gap gap connecting line provided at the exit portion is slightly parallel. The invention related to the 18th scope of the patent application is a dry ice and snow cleaning method, which is characterized by spraying dry ice and snow from the dry ice and snow spray nozzle and spraying gas from the spraying gas arranged around and outside the dry ice and snow spray nozzle □ The spraying gas is sprayed to wash the object to be cleaned, and is used as a dry ice and snow spraying device for cleaning. The flow rate or pressure of the spraying gas is changed and adjusted, and the spray cleaning range of the dry ice and snow sprayed from the spray outlet of the dry ice and snow spray nozzle is changed and adjusted. The invention related to item 19 of the scope of patent application is a dry ice and snow washing device, which is characterized in that the dry ice and snow washing device is a jet washing nozzle spraying dry ice and snow, a liquefied carbon dioxide gas container for storing liquefied carbon dioxide gas, and liquefied carbonic acid A dry ice and snow production and supply system from an air container to a jet cleaning nozzle, a jet gas source, and a jet gas supply system from the jet gas source to the jet cleaning nozzle. In the dry ice and snow spray cleaning device that generates adiabatic expansion of liquefied carbon dioxide gas, the dry ice and snow production and supply system sets switching means for intermittently supplying liquefied carbon dioxide gas. The invention related to the 20th patent application scope is the patent application scope 13 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----------- · install- ------ Order --- (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 System V. Description of the Invention (u) The dry ice and snow cleaning device described in item 19, characterized in that the gas source for spraying uses dry gas. The invention related to the scope of patent application No. 21 is the dry ice and snow washing device described in the scope of patent application No. 19 or 20, and the gas supply system for spraying is characterized by having heating control for heating the spraying gas means. The invention related to the 22nd or 23rd patent application scope is the dry ice and snow washing device, the spray gas supply system, and the dry ice and snow production and supply device described in the 19th, 20th, or 21st patent application scope. It is characterized in that one of the two systems is provided with at least an ionizing means for ionizing the gas. The invention related to the 24th scope of the patent application is the dry ice and snow cleaning device described in the 19th scope of the patent application. The jet cleaning nozzle is connected to the gas supply system for spraying and the dry ice and snow production and supply device. It forms a slightly concentric layer with the other flexible pipe. The invention related to the 25th scope of the patent application is the dry ice and snow cleaning device described in the 24th scope of the patent application. The double piping connected to the jet cleaning nozzle is characterized by the piping of the jet gas supply system and dry ice and snow production. The piping of the supply device includes a coaxial double pipe, and the front end of the simultaneous jet cleaning nozzle is formed into a tapered shape. The invention related to the 26th scope of the patent application is the dry ice and snow cleaning device described in the 24th scope of the patent application. The double piping connected to the jet cleaning nozzle is characterized by the piping of the gas supply system for spraying and the dry ice and snow ( Please read the precautions on the back before filling in this page) «Binding -------- 1 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974 Staff Consumption of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the cooperative 6425pif.doc / 〇〇 5. Description of the invention ((V) The piping of the production and supply device includes a coaxial double piping, and the jet cleaning nozzle is formed into a conical expansion shape by the throttle device toward the front end. The inventions related to the 27th, 28th, or 29th scope of the patent application are the 19th, 20th, 21st, 22nd, 23rd, 24th, 25th or 25th The dry ice and snow cleaning device described in item 26 is characterized in that the spray cleaning nozzle can be arranged on a support stand that can slide freely in at least one of the up and down direction and the left and right direction. It is the same as the item 30 or 31 of the scope of patent application. The related invention is a dry ice and snow cleaning device described in the 27th, 28th, or 29th patent application scope, which is characterized in that at least one of the vertical and horizontal directions provided by the jet cleaning nozzle can slide freely A supporting wheel is provided with moving wheels. The invention related to the 32nd patent application scope is a dry ice and snow cleaning method, which is characterized in that the dry ice and snow is sprayed on the object to be washed and intermittently supplies dry ice and snow. The continuous supply of jet gas. The invention related to the 33rd patent application scope is the dry ice and snow washing method described in the 32nd patent scope, which is characterized in that the dry ice and snow production and supply device circulates ionized carbon dioxide gas. The invention related to the 34th patent scope is the dry ice and snow washing method described in the 32nd patent scope or the 33rd patent scope, and the dry ice and snow washing method used is characterized by temperature-controlled jet gas. The inventions related to the 35th or 36th scope of the patent application are the dry ice and snow recorded in the 32nd, 33rd or 34th scope of the patent application -------------- ------ Order --------- (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif .doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention ((4) Washing method. The dry ice and snow washing method used is characterized by ionized jet gas. The scope of patent application is 37 The inventions related to Item No. 38, or No. 39 are the dry ice and snow washing methods described in the patent application scope Nos. 32, 33, 34, 35, or 36. The support stand which can be slid freely in at least one of the upper and lower directions and the lateral direction is characterized in that the spray cleaning nozzle and the object to be cleaned can be kept at a certain distance, and dry ice and snow are sprayed for cleaning. Inventions related to the 40th, 41st, 42nd, or 43rd scope of the patent application are the 32nd, 33rd, 34th, 35th, 36th, or 37th scope of the patent application The dry ice and snow washing method described in item 38 or 39. The dry ice and snow washing method is characterized in that it can be used in combination with brushing to wash the object to be washed. The dry ice and snow production and supply device of the present invention is composed of a liquefied carbonic acid gas storage container for storing liquefied carbonic acid gas, and a throttling nozzle device for adiabatic expansion of liquefied carbonic acid gas connected by an outlet pipe. In the dry ice and snow generating and supplying device, the above-mentioned liquefied carbon dioxide gas storage container is provided with temperature control means and temperature detection means for controlling the temperature of the liquefied carbon dioxide gas, so the liquefied carbon dioxide gas storage container can be maintained at a certain pressure and a certain temperature. As the liquefied carbon dioxide gas storage container, a two-port liquefied carbon dioxide gas storage container having two communication ports can be used. Two-port liquefied carbon dioxide gas storage container One side inlet and outlet are equipped with a gas source for boosting the storage container to a predetermined pressure. Pipe connecting the above-mentioned liquefied carbon dioxide gas storage container with the gas source for boosting pressure 16 (Please read the precautions on the back before filling this page) «

V irl installation • n an 订 --- 丨 order --- I ----- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 6425pif.d〇c / 00R A7 6425pif. doc / 00R A7

Description of the invention (There is a difference in β. It is more connected to the carbon dioxide gas supply container. # = In addition, the dry ice and snow production and supply method of the present invention controls the pressure-temperature of the liquefied carbon dioxide gas storage container to maintain the liquefied carbon dioxide gas in a liquefied state. Therefore Supply a certain pressure of liquefied carbonic acid gas to the throttling nozzle device to produce adiabatic expansion of dry ice and snow. Maintain a certain pressure in the above liquefied carbonic acid gas storage container, and supply gas to the liquefied carbonic acid gas from a pressure-increasing gas source for other purposes. The pressure in the storage container is replenished, and the pressure of the liquefied carbon dioxide gas storage container is maintained at a certain pressure. Therefore, the gas from the pressure-generating gas source to the pressure-increasing means is used to increase the pressure. In addition, carbonic acid gas is used as the pressure-generating gas source. Figure · The simple proof of the formula makes the above and other objects, features, and advantages of the present invention more obvious and easier to understand, and further provides an explanation of the scope of the invention patent. A preferred embodiment is given below in conjunction with the accompanying drawings for details The description is as follows: FIG. 1 is a schematic diagram of a system of the dry ice and snow generating and supplying device according to the first embodiment of the present invention. FIG. 2 is a schematic diagram of a system of a dry ice and snow generating and supplying device according to a second embodiment of the present invention. FIG. 3 is a schematic diagram of an example of a system disclosed by the first dry ice and snow washing device of the present invention. A schematic diagram of a system disclosed by an example of a circulation pipe length adjusting mechanism used in a dry ice and snow washing device. Fig. 5 is a partial cross-sectional view of a triple tube structure sprinkler. Fig. 6 is a second dry ice and snow generating supply of the present invention. Dry ice contained in the device 17 This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) ----------- · Installation -------- Order ---- --- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ((〇 Snow spraying device installed first An explanatory cross-sectional view of an example disclosed by the dry ice and snow spray nozzle according to the embodiment. FIG. 7 is a front view of the dry ice and snow spray cleaning device of FIG. 6 of the present invention. FIG. 8 is the second dry ice and snow generation and supply apparatus of the present invention. Contains the dry ice of the second embodiment installed on the dry ice snow spraying device Fig. 9 is a schematic sectional view of a spray nozzle. Fig. 9 is a schematic sectional view of a dry ice and snow spray nozzle of a third embodiment installed on the dry ice and snow spray device included in the second dry ice and snow generating and supplying device of the present invention. The schematic system diagram of the second dry ice and snow cleaning device used in the experiment. Figure 11 is a schematic cross-sectional view of the dry ice and snow spray nozzle of the dry ice and snow cleaning device for comparison. A schematic diagram of an example of the system disclosed by the ice and snow washing device. FIG. 13 is a sectional view of the piping arrangement of the jet cleaning nozzle used in the third dry ice and snow washing device of the present invention. Figure 15 is a schematic cross-sectional view of the key parts of a pointed spray cleaning nozzle used in the ice and snow cleaning device. Figure 15 is a schematic cross-sectional view of the important parts of a conical expansion type spray cleaning head used in the dry ice and snow cleaning device of the present invention. FIG. 16 is a schematic view showing a state of a free sliding rack installed with a jet cleaning nozzle of a third dry ice and snow cleaning device of the present invention. 18 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------------ install --- I --- order --- C Please read the Please fill in this page again) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ((t) Figure 17 shows the flow rate of the throttling device of various jet cleaning nozzles (m / sec) and washing pressure (MPa). Figure 18 is a schematic diagram of the traditional dry ice and snow production and supply system. Symbols of the drawings: IA, 1B: siphon type liquefied carbon dioxide gas storage container 2: siphon 3, 4: Outlet tubes 5, 9, 24, 25, 54, 242, 244, 248, 254, 256, 302, 304, 312, 315: Tube 6: Temperature control means 7, 22: Gas container 8, 23: Pressure regulator 21: Two-port liquefied carbonic acid gas storage container 21a, 21b: Communication port 53: Throttle nozzle device

Vt: feed valve V2, 313: on-off valve V5, V6: discharge valve V3, V4, V21, V22, V101, V102, V103: valve

Tc: Carbon dioxide gas T〆Liquefied carbon dioxide gas

Ts: dry ice and snow. : Temperature controller P: Gas for cleaning. The paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) --------------- Order --- I- ---- (Please read the notes on the back before filling out this page) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6425pif.doc / 008 _B7_ V. Description of Invention (〇 ) G: Pressurizing gas 110: First dry ice and snow washing device 101, 251, 301: Liquefied carbon dioxide gas container 103: Switching means 105 · Flow mechanism 107: Circulation pipeline 107a: Central pipe 107b, 108b, 204, 322: Outer tubes 107c, 108c, and 128c: Flow path 108: Wash nozzle 108a: Central discharge pipe 108d: Dry ice and snow spray outlet 108g, 213: Spray gas outlets 109 and 308: Dry ice and snow supply systems 111, 241, and 311 : Gas source containers for injection 114, 243, 314: Pressure regulators 116, 246, 316: Ionization means 118, 318: Gas supply systems for injection 119, 245, 319: Heating control means 120, 320: Control box 121: Connector 122: distribution pipe 125: circulation pipe length adjustment mechanism 127: flow of triple pipe structure Tube (please read the precautions on the back before filling out this page)-binding ---- stapling --- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 _B7_ V. Description of the invention ((Γ) 127b, 128b: Exhaust pipe 128: Cleaning nozzle with triple pipe structure 129: Dust collecting cover (please read the precautions on the back before filling this page) 102, 104, 106, 112 115, 117: Pipeline G, 2G: Gas for spraying 250: Second dry ice and snow cleaning device 201: Dry ice and snow spraying device 202, 321: Inner tube 203: Clearance 205: Outer tube 205a: Front end surface 206: Cover 207 : Expansion cone-shaped dry ice and snow spray nozzle 207a: Connection side near surface 207b, 221b, 231b, 261b: Discharge port 208 Flow device 209 Conical shape 210 Flat shape 211 Side gap notch Printed by the Ministry of Economic Affairs Intellectual Property Bureau employee consumer cooperative 212, 222: Restriction device 221: End-curved dry ice and snow spray head 231: Flat dry ice and snow spray head 261: Comparative example of dry ice and snow spray head 259: Joining member This paper size applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 mm) 47897 4 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy 6425pif.doc / 008 _B7_ V. Description of the invention (丨 1) 249: Gas supply line for injection 253, 303: Switching means 255, 305: Throttling means 257: Liquefied carbon dioxide gas Supply line 300: the third dry ice and snow cleaning device 306: dry ice and snow supply pipe 307: spraying pipe 317: spraying gas supply pipe 323: spraying and cleaning nozzle 323A: tapered spraying and cleaning nozzle 323B: conical expansion type spraying Cleaning nozzle 324: Dry ice inlet 325: Spray gas inlet 326: Introduction couplings 327, 328, 329: Bag-shaped nut 330: Stand 331: Lateral sliding rail 331a: Left-right sliding rail 331b: Front-back sliding rail 332: Up and down sliding rails 333: Sliding coupling member 334: Moving wheels 0: Conical angle of the tapered nozzle α: Expansion angle of the conical expansion nozzle (please read the precautions on the back before filling this page) Install!丨 丨 Order 1 丨!丨 — 丨 · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (>) Call: The detailed description of the preferred embodiment of the throttling device angle of the conical expansion nozzle · The embodiment of the dry ice and snow production and supply device according to the present invention will be described with reference to the drawings in order. First Embodiment FIG. 1 is a schematic diagram of a system for explaining an example of the dry ice and snow generating and supplying device according to the first embodiment of the present invention. In contrast, the machines shown in Figure 1 and Figure 18 have some common machines. The same machine as in Fig. 18 will be omitted from the detailed description. The siphon-type liquefied carbonic acid gas storage container 1 device of the first embodiment is composed of a liquefied carbonic acid gas storage container 1 and a siphon 2 provided in the container for discharging liquefied carbonic acid gas. Moreover, the siphon-type liquefied carbonic acid gas storage container 1 shown in FIG. 1 can be used interchangeably. Therefore, a plurality of siphon-type liquefied carbonic acid gas storage containers 1 can be prepared. For example, two siphon-type liquefied carbonic acid gas storage containers 1 shown in FIG. 1 are configured. , 1B. Then, the siphon tube 2 is configured, and the outlet tube 3 and the outlet tube 4 are connected to the top tube ends of the siphon tube 2, respectively. The lead-out pipe 3 and the lead-out pipe 4 pass through the raw material valve V1A and the raw material valve V1B, respectively, and are collectively connected to the pipe 5. Then, the tube 5 is connected to the throttling nozzle device 53 after passing through the on-off valve V2 such as a solenoid valve. It is hoped that the above-mentioned siphon-type liquefied carbon dioxide gas storage containers 1A and 1B can maintain a certain temperature, and a temperature control with heating means is provided. Means 6. Temperature control means 6 is used to control the temperature of the liquefied carbon dioxide gas in the siphon-type liquefied carbon dioxide gas storage containers 1 A and 1B so that the carbon dioxide gas can be kept in a liquid state. 23 (Please read the notes on the back before filling out this page).

«— — — — I The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (d) (Please read the notes on the back before filling (This page) In addition, the individual outlet pipes 3 and 4 of the siphon type liquefied carbon dioxide gas storage containers 1A and 1B pass through the gas container 7 and the pressure regulator 8 and communicate with the pipe 9 and are connected together after passing through the valves V3 and V4. . The gas container 7 is filled with a gas P for cleaning which is formed by inert gas such as carbonic acid gas or nitrogen gas, a low dew point, and a gas containing less particles. The pressure regulator 8 can maintain a desired supply pressure. In addition, the above-mentioned outlet pipe 3 and outlet pipe 4 may be provided with a discharge valve V5 and a discharge valve V6 when performing rinsing and removing fine particles. The above is the constitutional composition of the dry ice and snow production and supply device of the first embodiment, and the operation is explained next. Two siphon-type liquefied carbonate gas storage containers 1A and 1B. One container performs the dry ice production and supply process, and the other container performs the liquid carbon dioxide gas replenishment process to prepare for the next process in the production supply process. Here, the case where the siphon-type liquefied carbonic acid gas storage container 1A is used for the dry ice and snow production and supply process, and the siphon-type liquefied carbonic acid gas storage container 1B is used for the liquid carbon dioxide gas replenishment process will be described. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a siphon-type liquefied carbonic acid gas storage container 1A. The liquefied carbonic acid gas τγ was filled because of the supplementary filling process of the previous process. After the cleaning and particle removal work was completed, the cleaning gas was used. In the case where P is carbonic acid gas, the cleaning gas P 塡 in the gas container 7 can be charged into the siphon-type liquefied carbon dioxide gas storage container 1A in advance, and the internal pressure of the siphon-type liquefied carbon dioxide gas storage container 1A can be increased to, for example, 6MPa pressure. At the same time, corresponding to a pressure of 6 MPa, the temperature is controlled by the temperature control means 6 to maintain the liquefied state of the liquefied carbon dioxide gas γ at a temperature of 20 ° C or more. Then, the valve V3, valve V5 and valve V1B are closed and the raw material valve v1A is opened, so that the liquefaction is 24. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 — Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Carbon dioxide gas is exported through the siphon tube 2 and the outlet tube 3. Then the on-off valve v2 must correspond to the appropriate switching operation, so that the pressure above 6MPa and temperature 2 (TC The above liquefied carbon dioxide gas is supplied to the throttle nozzle device 53. After that, the liquefied carbon dioxide gas supplied to the throttle nozzle device 53 adiabaticly expands to atmospheric pressure to form dry ice and snow Ts, and can be taken by the pipe 54 to the formed dry gas. Snow and ice Ts. At this time, the pressure of the liquefied carbon dioxide gas storage container 1A has been reduced, and the temperature of the temperature control means 6 can be used to maintain the pressure of the liquefied carbonic acid gas storage container 1A above 6 MPa through heating. Above 6 MPa. Supply liquefied carbon dioxide gas 1 ^ to the throttling nozzle device 53 while maintaining a certain pressure, so that the dry ice and snow Ts is generated in a stable state. Supply. However, because the temperature control means 6 described above controls the temperature of the liquefied carbon dioxide gas TY under a certain pressure to maintain the temperature, the liquefied carbon dioxide gas is not wasted, and the liquefied carbon dioxide gas in the liquefied state is directly supplied to the throttling nozzle device 53. Generates dry ice and snow Ts, which makes the washing of objects more efficient. Another siphon-type liquefied carbonic acid gas storage container 1B is filled with liquid carbonic acid gas 1Y. First, the valves V4 and V5 are opened, and the gas container is opened. 7 The cleaning gas P is adjusted by the pressure regulator 8 to the desired pressure, for example, the pressure is adjusted to 0.3 MPa, and then the tube 9 is supplied to the outlet pipe 4 and finally discharged by the discharge valve V5. Foreign particles such as particles or water inside the outlet pipe 4 are discharged. In the case where the cleaning gas P is carbon dioxide, the discharge valve V5 is closed after the cleaning, and the liquefied carbon dioxide gas storage container 1B can also be washed in advance. Use gas p to increase the operating pressure to 25. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ••• VI ----------- install ------ -Order --------- (Please read the back first Please fill in this page again for attention) 478974 B7 6425pif.doc / 008 V. Description of the invention (4) Above 6MPa, and then the valve v4 should be closed, waiting for the next dry ice and snow production supply process to come. Also during this period At a pressure of 6 MPa or higher, it is of course necessary to control the temperature by using the temperature control means 6 to maintain the temperature of the liquefied carbon dioxide gas above 20 ° C. Thus, the liquefied carbonic acid gas TY in the liquefied carbonic acid gas storage container 1A is about to be used up. Previously, the raw material valve V1B of the other liquefied carbon dioxide gas storage container 1B in the above-mentioned recharging standby state was then opened, and at the same time, the raw material valve v1A of the liquefied carbon dioxide gas storage container 1A was closed. At this time, the liquefied carbon dioxide gas storage container 1B is subjected to a dry ice and snow production supply process, and the liquefied carbon dioxide gas storage container 1A is subjected to a replenishment / charging process. Then, the on-off valve V2 must be appropriately controlled to supply the liquefied carbon dioxide gas having a pressure of 6 MPa or more and a temperature of 20 ° C or more stored in the liquefied carbon dioxide gas storage container 1B to the throttling nozzle device 53. The dry ice and snow Ts formed by the adiabatic expansion of the throttling nozzle device 53 can be taken at the pipe 54. During this period, of course, the temperature control means 6 continues to operate, and the control temperature is maintained above 20 ° C to keep the carbon dioxide gas in a liquefied state. As a result, the liquefied carbon dioxide gas τγ is supplied to the throttling nozzle device 53 while maintaining a constant pressure, so that the dry ice snow Ts is produced and supplied in a stable state. However, the temperature control means 6 described above controls the temperature of the liquefied carbon dioxide gas under a certain pressure to maintain the temperature. Therefore, the liquefied carbon dioxide gas is not wasted, and the liquefied carbon dioxide gas in the liquefied state is directly supplied to the throttling nozzle device 53. Dry ice and snow Ts are generated and the objects to be washed can be stably washed. On the one hand, the siphon-type liquefied carbon dioxide gas storage container 1A, which enters the replenishment process, is replenished with liquid carbonate gas γ. First of all, the valve V3 and the discharge size of 26 paper are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) IIIIIIIIIII --- II --- ^ > 11111111 ^ _MW. (Please read the precautions on the back before (Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention) The valve V6 is open and dry. The washing gas p is adjusted to a pressure of 0.3 MPa by the pressure regulator 8 and is supplied to the outlet pipe 3 after passing through the pipe 9 and discharged by the discharge valve V6. The particles or water existing in the outlet pipe 3 are rinsed by the cleaning pipe 3 Wait for foreign matter to be discharged. In the case where the cleaning gas P is carbon dioxide, the discharge valve V6 is closed after the cleaning, and the liquefied carbonic acid gas storage container 1A can also be pre-pressurized with the cleaning gas P to an operating pressure of 6 MPa or higher, and then the valve V3 Shut down and wait for the next dry ice and snow production supply process to come. Similarly, during this period, under a pressure of 6 MPa or more, the temperature control means 6 was used to control the temperature to maintain the liquefied state of the carbon dioxide gas at a temperature of 20 ° C or more. Therefore, in the dry ice and snow production and supply device of the first embodiment, two siphon-type liquefied carbon dioxide gas storage containers 1A and 1B are sequentially switched and operated sequentially to perform processes such as a dry ice and snow production and supply process and a replenishment / charging process. Therefore, a temperature control means is provided in the liquefied carbonic acid gas storage container, and the liquefied carbonic acid gas TY is maintained in a liquid state by the temperature control, and then the supply of dry ice and snow can be completed in an efficient and stable state, and performed in a stable state. Wash. Moreover, the above embodiment is provided with one to two siphon-type liquefied carbonic acid gas storage containers, thereby explaining the method of switching the operation operation. If necessary, a plurality of three or more can be applied, and of course only one can be used. The cleaning gas P is mainly used to clean the outlet pipe 3 or the outlet pipe 4. Second Embodiment As for the second embodiment of the dry ice and snow generating and supplying device of the present invention, the 27 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Binding 478974 A7 B7 6425pif.doc / 008 V. Description of the invention) The second dry ice and snow generating and supplying device of Fig. 2 is taken as an example for illustration. The machine shown in Fig. 2 and that shown in Fig. 1 of the first embodiment have some common machines. For the same machine, detailed description is omitted. The dry ice and snow generating and supplying device of this second embodiment is characterized by a liquefied carbon dioxide gas storage container. A two-port liquefied carbon dioxide gas storage container 21 is used, and a communication port 21a and a communication port 21b for communication are provided above and below the container, respectively. The upper connection port 21a is connected to the pipe 24 by a gas container 22, a valve V21, a pressure regulator 23, and a valve V22 filled with an inert gas such as a boosting gas G such as carbonic acid gas. On the other hand, the lower communication port 21b passes through the valve V23, the pipe 25, and a valve that can be appropriately opened and closed, such as a solenoid valve, and is connected to the throttle head device 53. In addition, this two-neck liquefied carbon dioxide gas storage container 21 is provided with a temperature control means 6 capable of controlling the temperature in order to maintain the liquefied carbon dioxide gas γ in the container in a liquefied state. The composition of the dry ice and snow production and supply device according to the second embodiment is explained above, and the operation is explained next. First, the valve V23 is closed, and the valves V21 and V22 are opened. The gas container 22 leads the pressure-increasing gas G through the valve V21, and the desired pressure is adjusted by the pressure regulator 23, for example, to a pressure of 6 MPa or more. Then, it is supplied from the pipe 24 to the two-port liquefied carbon dioxide gas storage container 21 through the valve V22. Therefore, the pressure in the two-port liquefied carbon dioxide gas storage container 21 is maintained at a pressure of 6 MPa or more. Similarly, during this period, in order to hold the liquefied carbon dioxide gas TlJ at a pressure of 6 MPa or more in the liquefied state, the temperature control means 6 is operated, and the temperature in the two-port liquefied carbon dioxide gas storage container 21 is controlled to be maintained at 20 ° Temperature above C. Then the valve V23 is opened, and the liquefied carbonic acid gas TY is led out by the tube 25, and the paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " ~ --------ml packs — i 丨 Order 丨 (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (permit) (Please read the notes on the back first (Fill in this page again) Properly open and close the on-off valve V2 to supply the liquefied carbon dioxide gas with a pressure of 6 MPa or more to the throttle nozzle device 53. The liquefied carbon dioxide gas TL having a pressure of 6 MPa or more supplied to the throttle head device 53 forms dry ice and snow Ts to the extent that the throttle head device 53 adiabaticly expands to atmospheric pressure, and supplies the formed dry ice snow Ts through the pipe 54. Therefore, by opening and closing the valve V2, which is a solenoid valve, for example, the liquefied carbon dioxide gas TY is adiabaticly expanded at the throttle head device .53 to form dry ice Ts. At this time, the pressure in the two-port liquefied carbonic acid gas storage container 21 is often adjusted by using the pressure-increasing gas G to a pressure of 6 MPa or more. In a very stable state, the dry ice and snow generated by the throttle nozzle device 53 can be cleaned stably. Washed. The above are the individual dry ice and snow generating and supplying methods of the first embodiment and the second embodiment of the present invention. The pressure in the liquefied carbon dioxide gas storage container is controlled to be above 6 MPa and the corresponding control temperature must be maintained above 20 ° C as an example. This is not intended to limit the invention. Carbon dioxide gas in the liquefied state maintains the pressure and its corresponding temperature. The preferred pressure and temperature are from the viewpoint of cleaning efficiency. The higher the ideal pressure, the better. At least 6 MPa or more is desirable. The temperature is the temperature at which the carbon dioxide gas is kept in a liquefied state at a corresponding pressure. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, the temperature control means for heating and controlling the temperature of the liquefied carbon dioxide gas is not used to limit the installation in individual storage containers. The storage container or the gas container used herein can be stored in a closed room, for example, a cylindrical chamber equipped with a venting means and a temperature control means. In this closed room, the liquefied carbon dioxide gas can be controlled to a suitable temperature such as the above, and of course, pressurization is required to reach the desired temperature. 29 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (θ) Then 'Please refer to the graphic description for the dry ice and snow washing device of the present invention . Fig. 3 is a schematic diagram illustrating the system of the first dry ice and snow washing device of the present invention. FIG. 4 is a schematic diagram of an example of a 7K system disclosed by a circulation pipe length adjusting mechanism used in the first dry ice and snow washing device. Referring to Fig. 3, the first dry ice and snow washing device of the present invention is composed of a dry ice and snow supply system 109 and a jet gas supply system 118. The dry ice and snow supply system 109 is composed of the liquefied carbon dioxide gas TL in the liquefied carbon dioxide gas container 101 storing the liquefied carbon dioxide gas TL, and generates dry ice and snow Ts, which is supplied to the cleaning nozzle 108. The spraying gas supply system 118 is for enhancing the spraying of the dry ice and snow Ts sprayed from the cleaning nozzle 108 described above. A high-pressure gas such as nitrogen is filled as the spraying gas source, and the spraying gas source container 111 passes the spraying gas along the spraying gas source container 111. The above-mentioned cleaning spray head 108 communicates with the peripheral spray port 108g of the spray port 108d of the dry ice snow Ts described above, and is connected and arranged. The above-mentioned dry ice and snow supply system 109 is a liquefied carbon dioxide gas container 101 connected to a switching means 103 such as a solenoid valve that can control the supply of liquefied carbon dioxide gas through a pipe 102, and then connected to a needle valve or an acute hole through a pipe 104, for example. The liquefied carbon dioxide gas becomes a throttling mechanism 105 of dry ice and snow. Ts, and the throttling mechanism 105 is connected to a connecting device 121 provided on the wall of the control box 120 through a pipe 106. Therefore, the connector 121 connects a slightly concentric double tube composed of the flexible central tube 107a and the outer tube 107b, and forms a circulation line 107. The above-mentioned arrangement pipeline 106 communicates with the central tube 107a. In addition, dry ice will be placed at the center of the front end of the circulation pipe 107. The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) ---- 丨 丨 丨 丨!丨 Install!丨 丨 丨 丨 Order- 丨 --- 丨 丨! C Please read the notes on the back before filling in this page} Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 ______ 5. Description of the invention () Snow Ts sprays the cleaning nozzle with a central spray tube 108a 108. The center pipe 107a of the above-mentioned flow path 107 communicates with the center discharge pipe 108a and is connected together. (Please read the precautions on the back before filling this page.) On the other hand, the above-mentioned injection gas supply system 118 for enhancing the Ts injection of dry ice and snow is a gas source container 111 for injection, which is filled with a high-pressure gas such as nitrogen. The opening and closing valve 113 and the pressure regulator 114 are connected to the circuit 112 ′, and then the ionizing means 116 provided is connected to the ionizing means 116 through the line 115, and the ionizing means 116 is connected to the link 121 through the line 117. In addition, the spraying gas 1G sprayed by the ionizing means 116 can remove the charged dry ice and snow Ts when spraying. Therefore, the pipeline 117 connected to the connector 121 is in communication with the flow path 107c of the outer tube 107b in the above-mentioned circulation pipeline 107. Next, it communicates with the flow path 108c inside the outer tube 108b of the cleaning nozzle 108 connected to the front end of the circulation pipe 107. Then, the periphery of the discharge port 108d of the central tube 108a for spraying dry ice and snow Ts is communicated with the configured spray port 108g. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The ionization means 116 described above is included in the injection gas supply system 118. In order to heat the injection gas 1G to a certain temperature, a heating control means Π9 is provided. Then, the overheated spray gas 1G is sprayed onto the object to be cleaned through the cleaning nozzle 108, thereby suppressing the temperature of the object to be cleaned and preventing condensation on the surface of the object to be cleaned. In addition, the heating control means 119, the above-mentioned switching means 103 and the throttle mechanism 105 of the dry ice and snow supply device 109 are all stored in the control box 120. When in use, the liquefied carbonic acid gas container 101 and the spraying gas source container 111 are connected to directly form a dry ice and snow washing device, and a washing treatment operation is performed. 31 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " 478974 6425pif.doc / 008 _B7_ V. Description of the invention (4) (Please read the precautions on the back before filling this page) However In the dry ice and snow cleaning device of the present invention, the connector 121, the cleaning nozzle 108, and the circulation pipe 107 are as shown in FIG. Pipes 107-1, 107-2, 107-3, etc. with different pipeline lengths can be set. The appropriate operation of valve V1Q1, valve V1Q2, and valve Vm, etc. allows the dry ice and snow Ts to circulate to form an adjustable pipeline length. Circulation pipeline length adjustment mechanism 125. That is, FIG. 4 is a schematic diagram of a system disclosed by an example of a circulation pipe length adjusting mechanism used in the dry ice and snow cleaning device of the present invention. In Fig. 4 and Fig. 3, the names and functions are similar. The detailed description is omitted here. The circulation pipe length adjusting mechanism 125 of the present invention shown in FIG. 4 is connected to the distribution pipe 122 provided by the connecting device 121, and then the distribution pipe 122 is provided with a plurality of circulation pipes 107-1, 107- 2, 107-3 ... etc. Then the individual circulation lines 107-1, 107-2, 107-3 — etc., each pass through the valve Vm, valve V1 () 2, valve V1 () 3, etc., and then the cleaning nozzles 108-1, 108 are individually connected. -2, 108-3 ... etc. Then, an appropriate one of the opening operations is selected by the above-mentioned valve V1 () 1, valve V1 () 2, valve V1 () 3, etc. The valve is opened in the above-mentioned circulation pipeline to operate dry ice and snow Ts in a circulation pipeline. After passing through the circulation pipe of a specific length, the dry ice and snow Ts is supplied to the cleaning nozzle 108 and sprayed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs at this time, the dry ice and snow washing device of the present invention can be opened by one of the appropriate valves V1 (n, V1 () 2, V1Q3, etc., etc., and can be adjusted by changing The desired circulation pipeline is long and sprays dry ice and snow Ts. Corresponding to the situation where the washings are dirty, the appropriate spray state can be selected to spray dry ice and snow Ts. In addition, the above-mentioned valves V1Q1, V1Q2, and V1Q3, etc. One of 32 paper sizes is applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974

6425pif.doc / 008 V. Description of the Invention (Supplement) For the opening operation, the circulation pipelines with different lengths of circulation pipelines 107-7_1, 107-2, (Please read the precautions on the back before filling this page) 107- 3 ... Among them, a plurality of circulation pipelines with different circulation pipeline lengths can be used, and they are arranged on the cleaning nozzles 108-1, 108-2, 108-3, etc. that spray dry snow and snow Ts. For example, in order to deal with a large number of washing treatments, the washing line is fixed as an individual configuration. The objects to be washed are automatically conveyed through the washing line. The washing positions corresponding to the circulation pipes of different lengths are different specific positions. A large number of objects to be washed are cleaned in a short time. In addition, the above-mentioned valves V1Q1, V1 () 2, and V1G3, etc. can be used. For example, a collective valve such as a rotary switching valve makes operation easier. In addition, the circulation pipes 107, 1, 107-2, 107-3, etc. of different lengths described above have the same structure as the passage 107 described in the fifth figure, and are made of dry ice and snow. The central tube 107a, an outer tube 107b surrounding the central tube 107a and disposed coaxially with the central tube 107a, and a flow path 107c through which the injection gas 1G can flow inside the outer tube 107b surrounding the central tube 107a. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, the structure of the cleaning nozzles 108-1, 108_2, 108-3, etc. is also the same as that of the central discharge pipe 108a in the center of the fifth figure above. It is composed of a central ejection tube 108a, an outer tube 108b arranged coaxially with the central ejection tube 108a, and a flow path 108c inside the outer tube 108b along the periphery of the central ejection tube 108a. Its front end communicates with 108 g of spray ports arranged along the periphery of the dry ice and snow spray port 108d. Therefore, the ejection gas 108G for ejecting the ejection gas 1G and the ejection outlet 108d for ejecting the dry ice and snow are configured to form a parallel flow between the ejection gas 1G and the ejection flow of 1 Ts of dry ice and snow. As a result, the spraying gas 1G is sprayed onto the object to be cleaned along with the snow and ice Ts, and the cleaning effect can be improved. 33 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (M) The third embodiment is to explain the cleaning method used in the dry ice and snow cleaning device of the present invention. The liquefied carbon dioxide gas τγ at a pressure of about 6 MPa is derived from the liquefied carbon dioxide gas container 101 through the tube 102 and is continuously supplied to the throttle mechanism 105 with the switch means 103 turned on. Then it expands adiabatically at the throttle mechanism 105 to form dry ice and snow Ts. The generated dry ice and snow Ts reaches the connecting device 121 through the pipeline 106, and then the dry ice and snow Ts flows into the circulation pipelines 107 · 1 and 107- of different lengths through the distribution pipe 122 shown in FIG. 4. 2, 107-3 ... etc. of the central tube 107a. Then, the valves Vm, Vl () 2, VlQ3, etc., which are in an open state are arranged along each of the flow lines arranged. Among the open circulation pipes 107-1, 107-2, 107-3, etc., at least one of the pipes communicates with the central pipe 107a. Among the passing cleaning nozzles 108-1, 108_2, 108-3, etc., at least one sprays dry ice and snow Ts to the object to be cleaned through the central spray pipe 108a through the spray outlet 108d. On the other hand, the spraying gas 1G formed from dry, low-dew-point nitrogen at the same time is derived from the spraying gas source container 111 through the pipeline Π2, and after the valve Π3 is opened and closed, the pressure is adjusted to a constant pressure by the pressure regulator 114 At about 0.2 MPa, the ionization means 116 is introduced through the pipeline 115. After that, after being ionized by the ionizing means 116, the jetting gas 1G flows into the coupling 121 from the pipe 117, and then reaches the distribution pipe 122 shown in Fig. 4. Then the spraying gas 1G flows from the distribution pipe 122 shown in Figure 4 to 34 «pack (please read the precautions on the back before filling this page) • MB I aw ---- order --- This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (β) Circulation pipelines 107-1, 107-2, 107-3, etc. with different inlet pipeline lengths The flow path 107c in the outer tube 107b. Then, the valves V1Q1, V1 () 2, V1 () 3, etc., which are in an open state along each of the flow pipe lines arranged are passed. Among the open flow channels 107-1, 107-2, 107-3, etc., at least one of them is connected to the flow path 107c in the outer tube 107b. Among the cleaning nozzles 108-1, 108-2, 108-3, etc., at least one is introduced into the cleaning nozzle 108. Then, from the outlet 108g of the spraying gas 1G communicating with the flow path 107c in the outer tube 107b, a stream of air flowing in parallel with the dry ice and snow Ts spray stream is sprayed to the object to be cleaned.

At this time, the spraying gas 1G from the spraying gas source container 111 is adjusted to a pressure of about 0.2 MPa by the pressure regulator 114, and then heated to a temperature of 50 ° C or even 90 ° C by the heating control means 119, and It is supplied to the cleaning nozzle 108. Then, the object to be cleaned is sprayed with dry ice and snow Ts and the heated spray gas 1G. Because the cleaning nozzle 108 is very close to the object to be cleaned, the spray gas 1G that maintains a high temperature does not cause dry ice and snow Ts to sublimate. As a result, by heating the spraying gas 1G, the object to be cleaned is formed at a low temperature and is not easily condensed, and a good cleaning efficiency can be achieved. In addition, the spraying gas 1G is a dry (low dew point) gas, which can keep the cleaned matter in a dry state, so it can prevent the cleaned matter from dew condensation, and obtain better results. In a short time of cleaning The treatment has a special effect and a heating control means, which is specifically composed of a heater, a sensor, and a controller, and has a good heating temperature control effect. In addition, the spraying gas 1G is ionized by ionizing means 116, 35 ----------- · installation -------- order --------- (Please read first Note on the back, please fill out this page again) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm 1 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (Supplement) And when the fluid is flowing in the pipeline, the electric charge generated by friction between the fluid and the pipeline is removed. The biggest effect of this is to prevent the dry ice and snow Ts from being charged, and because of the dry ice and snow agglomeration during spray washing, The damage caused by the cleaned material. Especially when the cleaned material is the surface of the semiconductor contact point, when the dry ice and snow are charged, the cleaned material may be damaged. Removing the static electricity from the dry ice and snow can achieve a very significant effect. The ionization means 116 is not limited to be provided in the injection gas supply system, and ionizes the injection gas 1G. It can also be installed in the dry ice snow Ts supply system to directly ionize the dry ice snow Ts, regardless of the installation Either side of the supply system can work In addition, the ionization means 116 has various methods, for example, when electrodes are arranged in the pipeline to generate plasma, and the method is used to ionize the fluid flowing in the pipe. In the dry ice and snow Ts supply system 109 The electrode is installed because the electrode may cause the phenomenon of dry ice and snow Ts attachment, accumulation, blockage, etc. In this case, it is inappropriate to install the dry ice and snow Ts supply system 109, and it is desirable to install the gas supply system 118 for injection. When considering the type of ionization means that is more suitable for setting, and also the ionization of the surrounding atmosphere, there are other means of ionization, such as the use of plasma discharge type or soft X-ray type. Therefore, it is not used In order to limit the above-mentioned components, there are better suitable choices. In addition, the gas used as the gas for injection is, for example, nitrogen, carbon dioxide, dry air, etc. Here, the method of supplying gas from a high-pressure container is used. In the case of air, it is preferable to use a machine such as a compressor. It is preferable to use a so-called high-pressure gas container for a liquefied carbon dioxide gas container. Paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 一一 --- I-- 丨 丨 丨 丨 丨 Installation i 丨-丨 丨 丨 丨 Order ------- (please first Read the notes on the back and fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (section) (Please read the notes on the back before filling this page) High pressure gas The container is made of metal inner and outer containers. 'There is a vacuum layer between the inner and outer containers, and the vacuum insulation container is filled with liquefied carbon dioxide gas, but a large vacuum insulation container can also be used. Next, to prove the dry ice and snow cleaning method of the present invention, Effect, the following experiments were performed. Experiment 1 Experiment 1 uses the system shown in Fig. 3 as the dry ice and snow washing device of the present invention. Using a part of the semiconductor inspection device as the object to be cleaned, remove and clean the oil 'resin sheets, solder chips, aluminum, silicon, copper, etc. attached to the aging test substrate or probe card. In the present invention, a needle valve is used as the throttle mechanism 105, a heater and a PID (proportional, integral, and differential) controller are used as heating control means, a plasma discharge method ionization method is used, and the ionization method is set to the injection gas Supply system 118. A 500-mm-long circulation line is formed from the vicinity of the outlet of the throttle mechanism 105 in the dry ice and snow supply device 109 to the cleaning nozzle 108. Using the circulation pipe adjustment mechanism shown in Fig. 4, the circulation pipe 107 is selected, and the material of the piping is a central pipe made of Teflon 107a. The experimental conditions and contents are as follows: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. • Gas for injection 1G: Use nitrogen gas with a nominal dew point of 65 ° C as a high-pressure gas (supply pressure: 0.2MPa ~ 0.78MPa, room temperature, 65NL / min). • Liquefied carbon dioxide gas: (supply pressure: about 6Mpa, normal temperature). • Ambient temperature: room temperature. 37 ^ The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Public Love 1 478974 A7 6425pif.d0c / 008 V. Description of the invention (3) Experimental content The experiment set the supply time of dry ice and snow Ts to 2.0 seconds, The dry ice and snow Ts was continuously ejected from the nozzle 108 of the cleaning nozzle 108. On the one hand, 0.2 MPa nitrogen was used as the injection gas 1G, and the temperature was raised to 60 by heating control means. The spraying gas 1G is ejected from the nozzle 108d of the cleaning nozzle 108. After that, in this state, confirm the occurrence of the condensation of the probe card and the removal of the attached solder shavings. Then, take this as the first stage treatment, and The first stage of processing confirms the above-mentioned state [Check 1]. Continue to repeat the same process once more ^ times, and the second stage of processing confirms the above-mentioned state [Check 2], and then continue to add [person_stage processing, and Three stages of processing confirm the above-mentioned state [Inspection 3], and the inspection is performed sequentially by the three processes. The results of this inspection are shown in Table 1. In addition, the removal of solder chips can be confirmed by contact resistance. 'Must be less than 0.5 Only qualified below. This About Condensation ', because the generated water droplets will evaporate after being contaminated and remain, you can confirm visually whether there is condensation. ----------- · Installation -------- Order-- ----- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 8 3 This paper size applies to China National Standard (CNS) A4 (210 X 297 public Chu 1- --- 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (function) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs with or without condensation. Destruction of contact resistance (passed below 0.5). Part of the block is larger than 0.5. Block is larger than 0.5 All liquefied carbon dioxide gas injection stop time (sec) below 0.5 (N 〇 (N liquefied carbon dioxide gas injection time (sec) 2 + 2! 2 + 2 + 2 Injection gas setting temperature (° C) Liquefied carbon dioxide gas supply Volume (kg / min) 0.13 0.13 0.13 Throttle mechanism cleaning nozzle circulation pipe length (mm) 500 500 500 Processing content First stage processing Second stage processing Third stage processing inspection number (N 39 ------ ----- · Install -------- Order ------- 丨 (Please read the note on the back first Please fill in this page again.) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 5. Description of the invention (1) First, after inspection 1 In the case of a probe card, confirm that the object to be treated does not condense. In addition, it was confirmed that the removal status of the solder swarf was 90% (the contact resistance of a part was greater than 0.5). Next, if the object to be processed is a probe card through inspection 2, it is confirmed that the object to be processed has not coagulated. Therefore, the removal status of the solder chip, a trace of the solder chip (a region with a contact resistance greater than 0.5) was recognized. Finally, if the object to be processed is a probe card through inspection 3, it is confirmed that the object to be processed does not coagulate. Therefore, it is proved that all the solder chips are completely removed (the contact resistance is less than 0.5). The washing step was considered to be working well. In addition, the spraying gas 1G can change the cleaning characteristics by changing the spray pressure according to the type of attachment, the degree of pollution, and the strength of the adhesion. Experiment 2 The next experiment 2 was to change the length of the flow passage from the throttle mechanism 105 to the cleaning nozzle 108. When the length of the flow passage was 45 mm, 200 mm, 500 mm, 1000 mm, 1500 mm, and 2000 mm, the cleaning effect was confirmed. The length of the flow pipe is set by the required length of the pipe among the flow pipes 107-1, 107-2, 107-3, etc. integrated on the flow pipe length adjustment mechanism of Fig. 4. Circuit, the central pipe 107a 'used for its piping material is flexible stainless steel, and the valve V1Q1, valve V1Q2, valve V1 () 3, etc. are switched. The substrate to be cleaned was subjected to an aging test substrate, and oil, resin chips, solder chips, aluminum, silicon, copper, etc. attached to the aging test substrate were removed. 40 ------------ · install ---- (Please read the precautions on the back before filling out this page) Order ------- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 B7 6425pif.doc / 008 V. Description of the invention (β) The experimental conditions are the same as those in Experiment 1: Experimental conditions • Gas for spraying 1G: Use Nitrogen with a nominal dew point of 65 ° C is used as a high-pressure gas (supply pressure: 0.2MPa to 0.78MPa, normal temperature, 65NL / min). • Liquefied carbon dioxide gas (supply pressure ... about 6Mpa, normal temperature). • Ambient temperature: room temperature. Experimental content The experiment set the supply time of dry ice and snow Ts to 120 seconds. The dry ice and snow Ts was continuously ejected from the spray outlet 108d of the cleaning nozzle 108. On the one hand, using 0.2 MPa nitrogen as the spraying gas 1G to raise the temperature to 60 degrees through heating control means, and continuously spraying the spraying gas 1G from the nozzle 108d of the cleaning nozzle 108. Then, in this state, it is confirmed that the aged state of the substrate to be cleaned is determined by the difference in the length of the flow path. And confirm that the spray pressure (MPa) of dry ice and snow Ts when sprayed on the object to be cleaned. The results are shown in Table 2. In addition, the discharge pressure was measured using a pressure measuring film (manufactured by Fuji Film, trade name: Fuji Pressure Device). ----------! ^ ιι · 装 ----— Order i — (Please read the notes on the back before filling out this page) # Printed on paper by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Applicable to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 6425pif.doc / 008 V. Description of the invention (β) Table 2 Length of the cleaning nozzle of the throttle mechanism (mm) Pressure during cleaning ( MPa) Aging test substrate cleanability 45 105 Poor cleaning 200 10 Good 500 19.5 Good 1000 22 Good 1500 25 Good 2000 33 Good From the result of Experiment 2, regarding the dry ice and snow Ts cleaning device of the present invention, from the throttling mechanism The length of the circulation pipe from 105 to the cleaning nozzle 108 is 45mm, 200mm, 500mm, 1000mm, 1500mm, and 2000mm. Continuous spraying of dry ice and snow Ts and continuous flow of spraying gas 1G at the same time to remove metal particles attached to the object to be cleaned, and prove that the object to be cleaned does not condense. Therefore, it is proved that when the length of the circulation pipe near the outlet of the throttle mechanism 105 is more than 200 mm, the effect of washing the object to be washed is very significant. In addition, the difference in cleaning performance can be seen from the material of the piping. From the perspective of the material, the cleaning power of the stainless steel pipe is not as good as that of the Teflon pipe. It also proves that the cleaning power increases with the increase of flow. In addition, each of the lengths of the flow path length from the throttle mechanism 105 to the cleaning nozzle 108 described above is tested with a pressure measurement membrane. It is proved that the longer the length of the circulation pipe, the higher the pressure during washing. Therefore, China National Standard (CNS) A4 specification (210 X 297 mm) is applicable to 42 paper sizes. ----------- Installation --------- Order ----- (Please (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (U〇 ^ In the state of removing the attached object or the object being washed Compressive strength 'by adjusting the length of the circulation pipeline and performing appropriate cleaning treatment' ϋ can prove that the cleaning efficiency will increase. (Please read the precautions on the back before filling this page) In the above experiment, it will be washed The cleaned matter is placed in a closed space for washing, and the cleaned matter is in a closed space such as a spherical box. The sublimated carbon dioxide gas or jet gas is attracted by the exhaust fan to ionize the fluid held in the closed space. Better cleaning efficiency can be achieved by removing electricity. In addition, during cleaning, in order to collect the removed oil, resin flakes, solder filings, aluminum, silicon, copper, etc., which are removed by the cleaning, perform in a slightly enclosed space. Wash and drain from a part of the slightly enclosed space In addition, when cleaning, the cleanliness of the cleaning place is also a problem. For example, cleaning in a EPA filter, a cleaning workbench equipped with a filter, or a ventilation chamber will not cause environmental pollution. Economy Ministry of Intellectual Property Bureau, Consumer Cooperative Cooperatives In addition, as shown in Figure 5, the cleaning nozzle and the assembled pipeline are shown in Figure 5. Dry ice and snow% of the discharge pipe 108a and a slightly coaxial outer pipe are arranged around the discharge pipe 108a. 〇8b forms a double pipe, and then a slightly coaxial exhaust pipe 128b is arranged at the outermost side of the double pipe, and this exhaust pipe 128b covers the double pipe as a whole to form a triple nozzle cleaning nozzle 128. The exhaust pipe 128b of the outermost pipe of the cleaning nozzle 128 of the pipe structure starts to attract. The dust collecting cover 129 arranged at the front end of the cleaning nozzle 128 attracts the removed matter by washing, and Remove dust and remove as much as possible while cleaning. In addition, the flexible flow line 127 connected to the cleaning nozzle 128 can also be outside the central tube 107a that can integrate the cleaning nozzle 128 pipeline. Configure 43 paper rulers Applicable to China National Standard (CNS) A4 specification (210 X 297 Gongchu 1 " 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention) Slightly coaxial outer tube 107b ° In addition 'Of course, it is also possible to arrange a slightly coaxial exhaust pipe 127b on the outermost side to form a triple-pipe structured circulation pipe 127. In the above experiment, the material to be cleaned was the circulating parts of a photocopier, a semiconductor wafer, and a semiconductor. The inspection device and its parts, circuit board, MR head, plasticized residue and precision parts are the demonstration objects. Of course, the present invention is not limited to these items, and it can also be applied to the washing of fruits and vegetables such as melon, orange, and watermelon. In addition, the implementation form of the dry ice and snow spraying device used in the second dry ice and snow cleaning device of the present invention can be described with reference to the drawings. Fig. 6 is an explanatory sectional view of the dry ice and snow spraying device of the second dry ice and snow generating and supplying device of the present invention. Fig. 7 is a front view of the dry ice and snow spraying device. In Figs. 6 and 7, the dry ice and snow spraying device 201 of the present invention is connected by a liquefied carbon dioxide gas supply line 257, a pipe 256, a connected inner pipe 202, and a gap 203 which is arranged to surround the outer pipe 202 and is connected. The pipe 248 of the gas supply line 249 for injection and the outer pipe 204 provided with the outer tube 205 are configured, and the outer tube 205 forms a slightly coaxial double tube surrounding the inner tube 202. The inner tube 202 is connected to the tube end surface of one side of the outer tube 205 at one end, and then connected to the above-mentioned communicating liquefied carbon dioxide gas supply tube 256 through a joint member 259. The other end 202b of the inner tube 202 passes through a sleeve 206 inside the outer tube 205, and is provided at the front end with a connection cone-shaped expansion type dry ice and snow spray nozzle 207 that can be extended to the outside. Then the inner tube 202 and the outer tube 205 form a slightly coaxial double tube. Since the area blocked by each plug 206 is sealed, the liquefied carbon dioxide gas flowing in the inner tube 202 and the jetting gas flowing in the outer tube 205 are sealed. Does not mix. 44 (Please read the precautions on the back before filling out this page) · 1 a ··· ---- Order --- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (眇) (Please read the precautions on the back before filling this page) Conical Expansion Dry Ice and Snow Spray Nozzle 207 between Conical Expansion Dry Ice and Snow Spray Nozzle 207 and Inner Tube 202 Liquefied carbonated gas (dry ice and snow) flow path. The constriction device 208 having a smaller diameter at the tip end of the connection-side near surface 207a gradually expands the diameter toward the tip ejection port 207b to form a conical shape 209. In addition, the front end ejection port 207b is gradually formed into a flat shape 210, and a short side portion of the flat shape 210 has a notch 211 of a side gap, and a long side portion is provided with a restriction device 212. An opening shaped like a character "=" is formed on the front side of the ejection port 207b. Therefore, at the ejection port 207b, the recess 211 and the two restricting devices 212 forming the side gap at the front end of the ejection head will not form a rectangular shape, but will be approximately parallel. The liquefied carbon dioxide gas is then introduced into the dry ice and snow ejection nozzle. When passing through the throttling device, the liquefied carbonic acid gas TY adiabatically expands to form dry ice and snow Ts, and is formed from the front end ejection port formed by the restriction device 212 and the longitudinal slit 211 207b Spray dry ice and snow Ts ° Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the outer tube 205 is arranged along the periphery of the expanded cone-shaped dry ice and snow spray nozzle 207, and the front end face 205a of the outer tube 205 is set for spraying The gas ejection port 213 for ejecting the gas 2G. The shape of the ejection gas ejection port 213 is an elongated shape. Therefore, the pipelines of the gas ejection outlet 213 for ejection and the two restricting devices 212 connected to the ejection outlet 207b at the front end of the expanded cone-shaped dry ice and snow ejection head 207 are slightly parallel. It is preferable to arrange two injection gas jets □ 213 at least symmetrically in the pipeline center connecting the two restriction devices 212. Therefore, it is preferable that the position of the ejection gas ejection port 213 is parallel to the line connecting the two restricting devices 212. The configured gas outlet for spraying 45 The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 B7 6425pifd〇c / 008 V. Description of the invention () (Please read the precautions on the back before (Fill in this page) 213 There is no specific limit on the number of configurations, which can be appropriately selected according to the applicable status. Further, such a structure makes the ejection direction of the ejection gas substantially parallel to the direction in which the dry ice and snow Ts flows from the inside of the expanded conical dry ice and snow ejection head 207. In addition, the notch 211 of the side gap is provided only at the short side portion. In addition, regarding the implementation form of the second dry ice and snow washing device described above, as shown in FIG. 6 and FIG. 7, the flow path of the expanded conical dry ice and snow spray nozzle 207 gradually expands in the discharge direction to form a cone shape 209. The front-end ejection port 207b is provided with a notch 211 having a side slit, and is formed into a flat shape. The expanded conical dry ice and snow spray nozzle 207 of the present invention is not limited to the shape shown in FIG. 6, and the curved dry ice and snow spray nozzle 221 on the front end of the second dry ice and snow cleaning device as shown in FIG. 8 is also very it is good. Fig. 8 is an enlarged view of the key parts of the curved curved dry ice and snow spray head of the dry ice and snow spray device used in the second dry ice and snow generation and supply device of the present invention. This curved curved dry ice and snow spray head can also be used in place of the expanded conical dry ice and snow spray head 207 included in the dry ice and snow spray device 201 shown in FIG. 6. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs About the characteristics of the curved curved dry ice and snow spray nozzle 221 of the second dry ice and snow washing device shown in Figure 8. A curving-shaped restricting device 222 is formed because a curved portion is formed at the front end of the front-end ejection port 221b. The other components are the same as the expanded cone-shaped dry ice and snow spray head 207 included in the second dry ice and snow washing device shown in Figs. 6 and 7. Therefore, the liquefied carbon dioxide gas is introduced into the curved end-type dry ice and snow spray head 221 in the same manner as the previously implemented expanded cone-shaped dry ice and snow spray head 207. When the liquefied carbonic acid gas passes through the throttling device 208, the liquefied carbonic acid 46 paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 public love Ί —-478974 A7 B7 6425pif.doc / 008 5. Description of the invention (_) Gas 1 \ adiabatic expansion forms dry ice and snow Ts, and sprays dry ice and snow Ts through the front nozzle 207b formed by the notch 211 of the side gap like "=" character. (Please read the precautions on the back before filling this page) In addition, FIG. 9 is a schematic cross-sectional view of the flat dry ice and snow spray head 231 included in the second dry ice and snow washing device of the present invention. The flat dry ice and snow spray head 231 shown in FIG. 9 and the ends shown in FIG. 8 The curved dry ice and snow spray nozzle 221 can also be used instead of the expanded cone-shaped dry ice and snow spray nozzle 207 included in the second dry ice and snow spray device 201 shown in Fig. 6. The characteristics of the flat dry ice and snow spray nozzle 231 of the second dry ice and snow washing device shown in FIG. 9 are produced. The front nozzle 231b of this nozzle 231 has a flat notch and has no side gap, and sprays out. The front surface of the longitudinal section of the port 231b has the character of "mouth". Therefore, the throttle device 208 gradually expands the diameter toward the ejection port 231b to form a conical 209 gas flow path. It is similar to the expansion cones of the previous two forms. The snow spray nozzle 207 has the same structure as the curved end-type dry ice and snow spray nozzle 221. Therefore, similar to the two expanded cone-shaped dry ice and snow spray nozzles 207 and the curved end dry ice and snow spray nozzle 221, the liquefied carbon dioxide gas is liquefied. The flat-type dry ice and snow spray nozzle 231 is introduced, and when the liquefied carbonic acid gas τγ passes through the throttle device 208, adiabatic expansion forms dry ice and snow Ts, and the dry ice and snow Ts is ejected through a nozzle 231b shaped like a mouth. Dry ice and snow spraying device used in the dry ice and snow cleaning device 47 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Preparation of the fifth, description of the invention (4) 201 The effect confirmation experiment is performed. The dry ice and snow washing device used in this experiment is shown in the schematic system diagram of FIG. In Fig. 10, the dry ice and snow washing device 205 is composed of a liquefied carbon dioxide gas supply line 257 and a spray gas supply line 249. A liquefied carbonic acid gas container 251 for storing liquefied carbonic acid gas and a connected tube 252 may be suitable. The liquefied carbon dioxide gas supply line 257 is connected to the switching means 253 for opening and closing the solenoid valve, and the connecting pipe 254 by the switching means 253, for example, through the orifice orifice orifice throttling means 255, and the dry ice and snow spraying device 201 by the pipe 256. The carbon dioxide gas supply line 257 has a PI pressure gauge. On the other hand, a gas source container 241 for injection, which stores the injection gas 2G formed by nitrogen with a low dew point, is connected to a pressure regulator 243 through a tube 242, and then passed through a tube 244. The ionizing means 246 is connected to the above-mentioned dry ice and snow spraying device 201 through a valve 247 and a pipe 248 to form a gas supply line 249 for spraying. The above-mentioned injection gas supply line 249 is provided with, for example, a heating control means 245 on the pipe 244 in order to keep the injection gas at an appropriate temperature. In addition, the switching means 253 included in the reconfirmation experiment uses a ball valve. At the same time, the above-mentioned throttling means 256 uses a needle valve or the like, corresponding to the object to be cleaned or the use environment, for example, adjusting the flow rate of liquefied carbon dioxide gas 1Υ to appropriately adjust the amount of dry ice and snow. The heating control means 245 is composed of a heater, a sensor, and a controller. In addition, the ionization means 246 is selected and used suitably in various ionizers. The liquefied carbon dioxide gas container 251 uses a high-pressure gas container (gas cylinder) to meet the desired pressure, and the spray gas 2G uses low dew 48. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm factory (please Read the precautions on the back before filling in this page) · Binding --- 478974 A7 B7 6425pif.doc / 008 5. Nitrogen at the point of the invention description (M). In this embodiment, the above-mentioned machines and parts are used, In the form of the gas to be used, the method used should also be selected. The switching means 253 is a combination of an air operated valve and a solenoid valve instead of the solenoid valve. The throttling means 255 preferably has a sharp hole shape. Insulated container for low temperature liquefied gas (may also be a storage tank), if necessary, pressurize the liquefied carbon dioxide gas and use the desired pressure. In addition to the nitrogen gas described above, carbon dioxide gas, argon gas or compressed air can also be used. .Use high pressure gas container (gas cylinder) as the gas source container for injection to pressurize the inflatable body. If it is air, you can also use a compressor Pressurized supply. In this case, because the dew point of the gas is high, it will cool and condense into moisture during the spray of dry ice and snow, which will prevent the spray. In the case of high dew point, the other method is to use a dryer or a dehumidifier. The dew point is lowered by drying. Experiment 3 For example, the second dry ice and snow washing device 250 of the present invention shown in FIG. 10 above is shown in FIG. The dry ice and snow spray nozzles 207, 221, and 231 of various shapes shown in FIG. 9 and FIG. 9 are respectively equipped with a dry ice and snow spray device 207. The dry ice and snow spray nozzles are sequentially sprayed with a wide range of dry ice and snow spray nozzles Ts. The condition of the spray shape was confirmed and evaluated in sequence. Experimental conditions • Supply liquefied carbon dioxide gas: At a temperature of about 20 ° C and a pressure of about 6 MPa, the supply flow rate was 1 kg / min. 49 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) '--- ----------- install -------- order --------- (Please read the precautions on the back before (Fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.d〇c / QQ g V. Description of the invention (vt〇) ΦInjection gas 2G: Continuous flow (only for confirming the state of the spray from different shapes of spray nozzles). Design specifications of dry ice and snow spray nozzles: • Conical angle of the flow path: 5 degrees • The inside diameter of the throttle device 208: (D = 1.4mm. • The length from the throttle device 208 to the front end of the nozzle: 40mm. • The length of the notch 211 on the side slit (expanded cone shape and end Bending type spray nozzle): 5mm. • Gap of spray outlet between limiter 212: 0.8mm. According to the above experimental conditions, in the second dry ice and snow cleaning device, the implementation forms of dry ice and snow spray nozzles of various shapes are observed at a position 15 mm away from the nozzles 207, 221, and 231 of each expanded cone dry ice and snow spray nozzle Spray shape of dry ice and snow Ts, measure its size, and confirm the spray density. When investigating the spray pattern, an aluminum tape was stuck on a silicon wafer and sprayed with dry ice and snow Ts. From the traces of deformation of the aluminum tape, determine the shape and size of the rough spray surface of the dry ice and snow Ts. The results are shown in Table III. Comparative Example In order to confirm the effect of the dry ice and snow spraying device of the present invention, a spraying nozzle shown in Fig. 11 was used as a comparative example. The dry ice and snow spray nozzle 261 shown in FIG. 11 has a tapered 209 that slowly expands toward the discharge port 261b. The front-end position is 180 degrees with a side gap notch 211 formed by the dry ice and snow spray nozzle 261. Comparative experiments were performed as a dry ice and snow spraying device. In addition, the experimental conditions, the design specifications of the dry ice and snow spray nozzles, the observation and measurement of the spray shape, and the spray 50 ^ Paper size applies ^ National Standard (CNS) A4 specification (210 X 297 mm) --- I- --- 丨 丨 Loading ---!丨 丨 Order- 丨 丨 (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 _B7_ V. Description of the invention ⑽) Confirmation of the radiation density. The above experiment 1 was performed in a common state, and the results are also described in Table 1. Printed by the Consumers Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (of the employee) Consumption cooperative prints second win-to date (_ 1 light; ^ s (N 卜 (N 卜 Φ Φ N / O • Wn tin 诔 awakens the flat ice spray nozzle 231 (Figure 9) of the dry ice and snow spraying device of the present invention, ellipse ( N tn Platinum grip Φ Φ -Wn -Ηπ Choice: Awake ΰ- w Curved end jet nozzle 221 (Fig. 8). Ellipse with approximate rectangular shape Ό m 锲 Φ Φ fc £ L tn. Ϋπ m 诔 醒 is : Expanded conical jet nozzle 207 (Figure 6) Elliptical vom platinum 婶 甶 Φ wake up Ss! Experimental confirmation items Spray shape! Long side (mm) Short side (mm) The distance of the spray density from the spray surface of the spray port ( mm) 52 (Please read the precautions on the back before filling out this page) _Packing— 丨 Order -------- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Explanation of the invention (called) Figure 11 can be clearly seen from Table 3 The ejection outlet of the dry ice and snow spray head 261 of the comparative example shown in the figure has a conical shape 209, the spray shape is slightly circular, the density of dry ice and snow Ts in the central part is loose, and the dry ice and snow in the surrounding part Ts density is tight. On the other hand, when the second dry ice and snow cleaning device with flat front ends shown in Figures 6, 8, and 9 is used, each of the dry ice and snow spray nozzles 207, 221, and 231 is used. Below, the spray shape is slightly elliptical, which proves that the long sides of the openings 207b and 231b of the front end of the spray head of the flat shape 210 are equivalent to the long sides of the ellipse. In addition, the shape of the discharge port at the front end of the spray head is increased to a flat shape. On the short side of the flat shape, a side gap notch 211 is provided, so that the sprayed dry ice and snow Ts forms a longer spray from the long side of the elliptical grip shape. From this, it is confirmed that the relatively expanded conical dry ice and snow spray nozzle 207 It is different from the flat dry ice and snow spray head 231. In addition, the spray density of dry ice and snow spray Ts is different from the dry ice and snow spray head 261 of the comparative example, and the extended cone dry ice and snow spray head 2 07 (picture 6), dry ice and snow spray nozzles 221 (figure 8) with curved ends and flat dry ice and snow spray nozzles 231 (figure 9) have a dry ice and snow Ts in a loose shape around the ellipse, and The central part is in a tight state. In addition, as shown in FIG. 8, the front end of the stopper 222 having a curved ejection port 221 b has a curved curved surface portion, and the formed dry curved snow and ice spray head 221 is formed at the curved end. The spray shape is an approximately rectangular ellipse ', which proves that the dry ice and snow are uniform sprays. Experiment 4 Then proceed to Experiment 4, and install the dry ice and snow spray in the second dry ice and snow cleaning device. 53 This paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---------- -Install -------- Order --------- (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (u) _ Set 201, using an extended conical dry ice and snow spray nozzle 207 (Figure 6). It is confirmed that the dry ice and snow Ts and the injection gas 2G ejected from the injection gas ejection port 213 provided at the front end of the outer cylinder 205 are effective at the time of injection. Experimental conditions • Gas 2G for injection: The supply pressure is 0.45 MPa, and nitrogen at a low dew point at room temperature is ejected. • Supply liquefied carbon dioxide gas: The same temperature as in Experiment 1 at a temperature of about 20 ° C and a pressure of about 6 MPa, and the supply flow rate is 1 kg / min. The design specifications of the dry ice and snow spray nozzle: • Gas injection port 213 for injection: Use the gap gap 211 connecting line at the front end of the nozzle 207b of the spray nozzle as the axis, from the center of the upper and lower spray nozzles to the gas injection port 213 The distance configuration is 11.5 mm. The shape of the gas injection port 213 for spraying is a slender shape with a long side of 5.8 mm and a short side of 1.6 mm. Arrange parallel to the side gap notch 211 connecting pipeline. Other design specifications and experiment 1 are common design specifications. From the above experiments and conditions, from the extended conical dry ice and snow spray nozzle 207, whether the spray gas 2G is used, observe the spray shape of the dry ice and snow Ts at a position 15 mm from the spray outlet, measure its size, and confirm the spray density. . When investigating the spray shape, as in Experiment 3, an aluminum tape was stuck on a silicon wafer and sprayed with dry ice and snow Ts. From the deformation marks of the aluminum tape, the shape and size of the rough spray surface of dry ice and snow Ts were measured. The results are shown in Table IV. 54 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) Pack II ϋ! —Order il! 478974 6425pif.doc / 008 V. Invention Explanation (P) Table 4 A7 B7 Printed non-ejecting gas 2G by the consumer co-operatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, approximately rectangular m cn 1 < N like 煊 φ Φ. NO · 9π whistle π Wing Η W for spraying. Gas 2G ellipse m ㊣ Φ Φ m -ηπ Wake up w. 芨 m? 搠? m * bird's eye view < TS, ―j B other dishes (跶 徴 m ----------- · equipment -------- order ------- (Please read the precautions on the back first (Fill in this page again) This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs _B7_____ Description of the invention (W) This result It can be clearly seen from Table 4 that when the spray gas 2G sprayed by the spray gas outlet 213 is used, the spray shape of the dry ice Ts is approximately oval, and the long side size does not change. The short side size is because of the spray gas 2G. The effect is to suppress the expansion in the short side direction of the dry ice and snow Ts, and it is only 2 mm to 3 mm shorter. And when the spray gas 2G is not used, the spray density of the dry ice and snow Ts is also tight in the center. The surrounding area is in a loose state. Since the spray amount of dry ice and snow Ts is constant, it is proved that the density of dry ice and snow Ts per unit area is about 2 times. From this result, it can be proved that the spray is sprayed from the gas outlet 213 for spraying. Use gas 2G to keep the alignment of the object to be cleaned. The width of the spray gas 2G will change due to pressure, so the width of the short side direction of the spray shape of the dry snow Ts may vary between 2mm and 5mm: In the above experiment, the dry Throttle device 208 is provided on the expanded cone-shaped dry ice and snow spray heads 207, 221, and 231 of the snow and ice spray device 201. The position of the throttle device 208 is not limited to the dry ice and snow spray head position. For example, it may be provided on a liquefied gas The pipe 256 of the supply line 257 can of course obtain the same effect. In addition, by adjusting the length of the side gap gap 211, the desired magnitude of the dry ice and snow Ts can be obtained. Next, the third dry ice and snow washing device of the present invention is illustrated graphically. Fig. 12 is a schematic diagram illustrating an example of a system disclosed by the third dry ice and snow washing device of the present invention. Fig. 13 is a spray of the front-end jet cleaning nozzle used by this dry ice and snow washing device. Sectional view with piping. 14

56 (Please read the notes on the back before filling out this page) Binding --- 丨 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Invention Explanation (sister) (Please read the precautions on the back before filling out this page) The figure is a schematic cross-sectional view of the key parts of a pointed spray cleaning nozzle suitable for this dry ice and snow cleaning device. Fig. 15 is a schematic cross-sectional view of important parts of a conical expansion type spray cleaning nozzle suitable for the dry ice and snow cleaning device. Fig. 16 is a schematic diagram illustrating the state of the free sliding stage of the spray cleaning nozzle of the dry ice and snow cleaning device. The third dry ice and snow washing device 300 according to the present invention is shown in FIG. It consists of a dry ice and snow production supply system 308 and a jet gas supply system 318. The liquefied carbonic acid gas container 301 storing the liquefied carbon dioxide gas τγ and the connected pipe 302 can be opened and closed by means of a switching means 303 which can appropriately open and close the solenoid valve, etc., and then through the connecting pipe 304 of the switching means 303, for example, by means of an orifice orifice throttle means 305 The dry ice and snow supply pipe 306 is connected to the spray cleaning nozzle disposed at the front end thereof, and the spraying pipe 307 is connected to form a dry ice and snow production and supply system 308. Printed by Shelley Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the gas source container 311 for storing nitrogen and the like is connected to the pipe 312 through the on-off valve 313 and the pressure regulator 314, and then through the pipe 315 through ionization means 316 is connected to an injection piping in which an injection cleaning nozzle 323 is arranged at the front end via an injection gas supply pipe 317, and is provided as an injection gas supply system 318. In addition, in order to keep the injection gas 3G at an appropriate temperature, the above-mentioned injection gas supply system 318 is provided with a heating control means 319 on the pipe 315, for example. In addition, the equipment such as the above-mentioned dry ice and snow generation and supply system 308 equipped with the switching means 303 or the throttling means 305 and the injection gas supply system with the ionization means 316 or heating control means 319 are all collected and stored in Operation in the control box 320 57 The paper size is in accordance with China National Standard (CNS) A4 (210 X 297 public love) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2. Description of the invention) It is very convenient. Therefore, the dry ice and snow supply pipe 306 extended from the dry ice and snow generation supply system 308 and the injection gas supply pipe 317 extended from the injection gas supply system 318 are individually connected to the injection cleaning nozzle 323 in the injection pipe 307, and become Slightly coaxial double tube and small box. In addition, the use of flexible flexible tubes improves the operability of processing operations. That is, by holding the spraying piping 307 of the spray cleaning nozzle 323 with a hand, the appropriate direction of the spray cleaning nozzle 323 can be changed by setting, and the washed part of the object to be cleaned can be accurately cleaned. In addition, only the inner tube of the double tube may be a flexible tube. The spraying pipe 307 in which the spray cleaning head 323 is arranged has a structure as shown in FIG. 13, for example. That is, the injection pipe 307 is formed by a gap between the inner pipe 321, the outer side of the inner pipe 321, and the arranged outer pipe 322 to form a slightly concentric double pipe. Therefore, an opening is provided at the front end to tightly combine the spray cleaning nozzle 323. The other end is an introduction coupling 326 configured to communicate with the dry ice and snow introduction port 324 connected to the inner pipe 321 and the injection gas introduction port 325 connected to the outer pipe 322 and sealed with a bag nut 327. link. Therefore, the above-mentioned dry ice and snow introduction port 324 seals and connects the dry ice and snow supply pipe 306 of the above dry ice and snow generation supply system 308 with a bag nut 328. The above-mentioned injection gas introduction port 325 seals and connects the injection gas supply pipe 317 of the above-mentioned injection gas supply system 318 with a bag nut 329. Therefore, the spraying pipe 307 in which the spray cleaning head 323 is arranged is preferably formed of stainless steel suitable for low temperature. The jet cleaning head 323 has a linear opening at its tip, as shown in Fig. 13, for example. Except for the linear jet cleaning nozzle, such as the 14th and 58th scales are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm " ~ '(Please read the precautions on the back before filling this page) Binding ---- order ---- 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (ς4) The important section shown in the figure is a schematic cross-sectional view, which is formed by gradually shrinking toward the front end of the nozzle at a cone angle 0. The thin-shaped jet cleaning nozzle 323A of the opening 323a. As shown in FIG. 15, a schematic cross-sectional view of the important part is formed by gradually expanding toward the front end with a conical expansion angle α using a throttle passing through a throttle angle of / 5. Cone-expanded spray cleaning nozzle 323B, etc. of the expansion opening 323b. In addition, the switching means 303 is composed of a solenoid valve, a timer, and a controller thereof. The solenoid valve can also be replaced by a combination of an air operated valve and a solenoid valve Moreover, the above-mentioned throttling means 305 preferably has a sharp hole shape, and a needle valve or the like is used to adjust the flow of liquefied carbonic acid A to appropriately adjust the amount of dry ice and snow Ts corresponding to the object to be cleaned or the use environment. The heating control means 319 is specifically composed of a heater 319a, a sensor 319b, and a controller 3 19c. In addition, the ionization means 246 is appropriately selected for use in various ionizers. The liquefied carbon dioxide gas TY container is preferably Use high-pressure gas containers (gas cylinders). In addition, low-temperature liquefied gas insulation containers (storage tanks) can also be used. If necessary, pressurize the liquefied carbon dioxide gas and use the desired pressure. In addition to the nitrogen gas described above, Carbon dioxide gas, argon gas, or compressed air can also be used. The high-pressure gas container (gas cylinder) is used as the injection gas source container 311 to pressurize the aerated body. In the case of air, a compressor can also be used to pressurize the supply. In this case, because the dew point of the gas is high, it will cool and condense into moisture during the spraying of dry ice and snow, preventing the spraying. 59 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --- ----! 4 予 ---- ίγ -----! # (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif .doc / 008 5. Description of the invention (q) In the case of high dew point, another method is to use a dryer or dehumidifier (pictured), and the dew point must be lowered by drying. (Please read the precautions on the back first (Please fill in this page again) The present invention is not limited to the above-mentioned various machines or parts. The above is only limited to maintain the gist of the present invention, and is appropriately selected for use. The above is the third dry ice and snow washing device 300 of the present invention, the following The operation is described with reference to Fig. 12. First, the liquefied carbonic acid gas container 301 is maintained in a liquefied state, and the liquefied carbonic acid gas t1 maintained at a pressure of about 6 MPa is led out through a pipe 302. A suitable operation is, for example, the switching means 303 of the solenoid valve, so that the liquefied carbon dioxide gas γ is intermittently supplied to the throttling means 305 through the pipe 304. The above-mentioned switching means 303 is in an open state, and the liquefied carbon dioxide gas TL flow rate is adjusted by the sharp holes of the throttling means 305, and at the same time, the adiabatic expansion under atmospheric pressure (about 0 MPa) forms dry ice and snow Ts. Thereafter, the generated dry ice and snow Ts passes through the dry ice and snow supply pipe 306, is supplied to the dry ice and snow inlet 324 of the introduction coupling 326 provided in the spraying pipe 307, and is sprayed by the spray cleaning nozzle 323. At this time, the dry ice and snow Ts is operated by the above-mentioned switching means 303 at appropriate intervals to maintain intermittent spraying. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs On the other hand, the injection gas source container 311 is filled with 3G of injection gas such as about 15 MPa of nitrogen. The on-off valve 313 is opened, and the injection gas 3G is sent to the pressure regulator 314 through the pipeline 312. After the pressure is adjusted to less than 1 MPa by the pressure regulator 314, the gas is passed through the pipeline 315 to the ionization means 316. After that, the injection gas 3G must be appropriately ionized by the ionizing means 316, and then passed through the injection gas supply pipe 317. The injection gas supplied to the introduction connection 326 provided in the injection pipe 307 is introduced into the 60 paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (stain) 325. In addition, the supplied spraying gas 3G is supplied to the pipe 315 on the way [j. The temperature of the heating control means 319 is appropriate to increase the temperature by 50 ° (: to 70 ° (:). Moreover, this temperature can be seen from the spray of dry ice and snow Ts during washing. The time is appropriately selected and adjusted. That is, when the cleaning time is short, a lower temperature is required. When the cleaning time is longer, a higher temperature is required. In order to improve the cleaning effect, the person can be seen The type or state of the contaminated cleaning substance is appropriately selected to adjust the set temperature. Therefore, the dry ice and snow Ts and the injection gas 3G supplied to the injection pipe 307 are shown in FIG. 13, and the injection gas 3G passes through the injection pipe 307 The outer tube 322 is supplied to the spray cleaning nozzle 323 provided at the front end portion thereof, and the atmospheric pressure is lowered along the inner edge of the opening at the front end to spray. The dry ice Ts passes through the inner tube 321 of the spraying pipe 307, from which The spray cleaning nozzle 323 provided at the front end is located at a slightly central position, and is sprayed coaxially with the above-mentioned spray gas 3G. Then, the spray is sprayed on the object to be cleaned, so that the object to be cleaned can be properly cleaned. It is clear that the cleaning is performed in the above state, and in addition, the above-mentioned cleaning device of the present invention can be used in conjunction with the following operating conditions to obtain a better cleaning effect. That is, the supply of dry ice and snow Ts is switched on and off by means of 303 Perform intermittent switching operation. At this time, continuously supply the spraying gas 3G on the other side. In order to prevent the continuous supply of dry ice and snow Ts, the spraying gas 3G can be heated and washed during the period when dry ice and snow Ts is not supplied. This result will not cause the temperature of the object to be washed to drop sharply, because the object to be cleaned will not maintain the paper size. Applicable to China National Standard (CNS) A4 (210 X 297 mm) ------- -----; · Install -------- Order C, please read the notes on the back before filling this page)

• ϋ ϋ I I an ϋ I Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 5. The description of the invention (θ) is in a low temperature state, and it is difficult to form a condensation state. In this case, the injection gas 3G decompressed from the injection gas source container 311 is heated up by the temperature control means 319, and is continuously supplied to the injection cleaning nozzle 323. On the other side, the dry ice and snow Ts is opened by the switching means 303, and the dry ice and snow Ts is sprayed onto the object to be cleaned by the spray cleaning nozzle 323. Dry ice and snow Ts collides with the object to be washed to achieve the effect of washing. At this time, the temperature of the object to be cleaned is slowly lowered by the low-temperature cold source of dry ice and snow Ts, but the switching means 303 is changed from on to off to stop the supply of dry ice and snow Ts, and only the heating gas 3G is continuously supplied. The object to be cleaned is brought to a state close to normal temperature. Therefore, the temperature of the injection gas 3G is raised, and the switching means 303 is turned off for a short period of time to perform cleaning with better efficiency. In addition, the spraying gas 3G uses a dry (low dew point) gas, so the object to be cleaned can be maintained in a dry state, and the formation of dew on the object to be cleaned can be prevented. In the case where the object to be cleaned is a semiconductor wafer which may be damaged due to static electricity, an ionizing means 316 provided in the gas supply system 318 for ejection may be used. After the expansion of the liquefied carbonic acid gas by the throttling means 305, the charge generated by friction between the dry ice and snow Ts and the pipeline is removed, which does not cause the problem of discharge destruction or agglomeration caused by the charging, which is often good. Wash. In addition, because the dry ice and snow Ts is mixed with the injection gas 3G during injection, one ionization can be performed, and the charged dry ice and snow Ts can be reliably removed. Therefore, the ionization means 316 can also be installed on both the jet gas supply system 318 and the dry ice and snow generation supply system 308, but it is not necessary to set the ionization means 316 for both systems, as long as the 62 paper standards are applicable to the Chinese country Standard (CNS) A4 specification (210 X 297 mm) -------- install · ----- 丨 丨 Order -------- (Please read the precautions on the back before filling in this Page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the Invention ("," A system with ionization means 316 can play a very significant effect. In addition to the above example, the ionization The ionizing means 316 is provided in the gas supply system 318, and of course, it can also be installed in the dry ice and snow generating and supplying system 308. In addition, the ionizing means 316 has various methods, such as placing electrodes in a pipeline to generate plasma, and In the case of the ionization method of the flowing fluid. Install electrodes in the dry ice and snow Ts supply system 308, because the electrodes are caused to cause the dry ice and snow Ts to attach, accumulate, and block. In the case of the ionization means 316, it is inappropriate to install the Ts supply system 109 in the dry ice and snow, but it is desirable to install it in the gas supply system 118 for injection. At this time, the ionization means 316 and other different methods should be considered. The particularity of one method is discussed in terms of a suitable system. In addition, other ionization means 316 is a device using a soft X-ray irradiation method. In addition, the atmosphere of the cleaning room can be destaticized by the desired ionization means. In addition, in the case of cleaning the stain on any part of the object to be cleaned, the spray cleaning nozzle 323 has a convenient and freely changeable suitable direction device. In this case, as described above, the control box The dry ice and snow generating supply pipe 306 extended from 320 is connected to the spray cleaning nozzle 323 of the spray gas supply pipe 317. The spray pipe 307 formed by the inner tube 321 and the outer pipe 322 which are slightly coaxial is preferably the spray pipe 307. A flexible tube with flexibility. In addition, in order to maintain a certain distance between the object to be cleaned and the cleaning nozzle 323, a supporting cleaning nozzle 323 can be installed as shown in FIG. 16 Orientation and horizontal (front-rear direction, left-right direction) freely sliding stand. 63 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ installation-- ---- & quoti (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 _ B7 V. Description of Invention (Μ) Figure 16 The frame 303 shown is, for example, a base plate 330a supported by three legs 330b or a stable frame such as an angle steel frame. The base plate 330a is provided with a lateral sliding rail 331 composed of an extended left-right sliding rail 331a and an extended front-back sliding rail 331b. In Fig. 16, a left-right sliding rail 331a is installed. Therefore, an up-down sliding track 332 is provided on the left-right sliding track 331a of the horizontal-moving sliding track 331 so as to slide up and down along the above-mentioned left-right sliding track 331a. Further, the up-down sliding track 332 and the forward-backward sliding track 331b of the above-mentioned lateral sliding track 331 are arranged together by a sliding coupling member 333. Therefore, the sliding on the sliding rail in the up-down direction by the sliding coupling member 333 is moved up and down along the sliding rail 332 in the up-and-down direction by the sliding coupling member 333. Further, the forward-backward sliding rail 331b uses the sliding coupling member 333 as a fulcrum, and a force in the forward-backward direction is given to cause the forward-backward sliding rail 33 lb to move forward and backward. Therefore, the installed dry ice and snow washing nozzle 323 is fixed on the sliding track 331b before and after the installation. The dry ice and snow washing nozzle 323 can freely slide up and down, left and right, and maintain a certain distance from the object to be cleaned. This can effectively clean the contamination of the stripper. In addition, of the lateral taxiing rails 331 arranged in FIG. 16, the lateral taxiing rails 331a and the forward and backward taxiing rails 331b arranged in FIG. 16 may of course be arranged at opposite positions, and it is convenient and suitable to choose a configuration. Moreover, the foot of the three-legged 330b can be provided with a fixed caster, for example. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

· 1111111 IIII # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.d〇c / 〇〇8 V. Description of the invention (Handling) The wheel 334 of the stop mechanism can be easily adjusted to increase the workability . In Fig. 16, the object to be cleaned is a stripping pliers for molding. The stripping pliers of the type opened above and below are taken as an example for cleaning, and the stripping pliers of the type opened left and right may be washed and washed. The starting direction of the spray cleaning nozzle (the direction of spraying of dry ice and snow) is almost horizontally corresponding. In addition, in Fig. 16, a nozzle having two ejection directions is used, and there may be a plurality of ejection directions in the same direction. Therefore, the spray cleaning nozzle 323 sprays dry ice and snow from two directions, but the main body of the spray cleaning nozzle is integrated into one. In addition, when cleaning, setting a scale to know the moving amount of each of the above-mentioned slide rails, and an automatic travel mechanism as necessary, may make the work easier. In addition, a plurality of dry ice and snow production and supply systems 308 and injection gas supply systems 318 may be provided in order to cope with the processed products. A plurality of cleaning nozzles 323 are fixedly arranged to automatically convey the objects to be cleaned, and a large amount of cleaning can be performed in a short time. In addition, due to the intrusion of particles and other wastes, the use of metal double tubes can be used to reach the desired atmosphere according to the need. 'For example, a cleaning table can be used to maintain a good cleaning degree 65 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ----------- UP Packing ----------- Order --------- (Please read the notes on the back before filling out this page) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (G) Fifth The embodiment uses the system shown in FIG. 12 as the fifth embodiment by using a dry ice and snow washing device made by the following design specifications. Here, a glass plate with grease is used as the object to be cleaned, and then a confirmation test such as the following performance is performed. Experiment 1: The dry ice and snow Ts were intermittently supplied to confirm the cleaning effect. Experiment 2: The experiment of confirming the effect of static elimination was performed by the setting of ionization means. Design specifications of the dry ice and snow washing device produced: Liquefied carbonic acid gas production and supply system 308: • Liquefied carbonic acid gas container 301: High-pressure gas steel cylinder. • Charging pressure of liquefied carbon dioxide gas: · About 6 Mpa. • Switching means 303: a solenoid valve with a switch interval timer. • Throttling means 305: needle valve. Gas supply system for injection 318: • Gas source container for injection 311: High-pressure gas cylinder. • Jet gas 3G: nitrogen gas with dew point of -65 ° C, the pressure charged is about 1.5MPa. • Pressure regulator 314: The pressure is adjusted to a constant pressure at room temperature and is continuously supplied to the jet cleaning nozzle 323 at about 0.7 MPa. • Ionization method 316: Plasma discharge method (made by American Ion System). • Temperature control means 319: with proportional-integral-derivative (PID) control 66 This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 public love) " " " " " (Please read first Note on the back, please fill out this page again) Install · 11111% 478974 A7 B7 6425pif.doc / 008 5. Electric heater of invention description (β). Spray cleaning nozzle 323: • Spray structure: linear spray nozzle, coaxial spray method with spraying gas 3G and dry ice snow Ts. Experiment 1 Experiment 1 was performed using a device manufactured in the fifth embodiment described above, and the glass plate with grease was washed. The specified experiment is: • The laboratory temperature for the experiment is 15 ~ 2 (TC.) • The temperature of the supplied injection gas is controlled by the temperature control means 319 at a fixed temperature of 60 ° C. ○ Ambient humidity (relative humidity:% RH) Under the condition that the humidity is generally easy to dew, the relative humidity is about 70 ~ 73% RH. The reference sample: the above conditions, the ambient humidity is 70% RH. First, set the switching means 303 in the dry ice and snow Ts generation and supply system 308 The solenoid valve is opened to spray dry ice and snow Ts with a spray time of 0.25 seconds, and the solenoid valve is closed to stop spraying dry ice and snow Ts with a stop time of 2.0 seconds. It sprays dry ice and snow intermittently to supply liquefied carbon dioxide gas at 1.0 kg / min. On the one hand, the gas supply system 318 for injection uses nitrogen gas at 60 ° C as the injection gas 3G to pass through the cleaning nozzle 323. Cleaning in this state will not cause condensation on the glass plate, which proves that grease can be removed. The state is used as the reference sample. Samples 1 and 2 are performed next. The switching interval of the solenoid valve of the switching means 303 is the same as that of the reference sample. The injection time of the solenoid valve in the open state is 0.25 seconds, and the closed state. The stop time is 20 seconds. The ambient humidity and the supply of liquefied carbon dioxide gas TL are changed as follows to clean the place. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) — 丨 —丨 丨! Install i 丨 — 丨 丨 丨 —Order · ί (Please read the precautions on the back before filling this page) # · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pifdoc / 008 B7__ V. Description of the invention (β ) Check to see if condensation has formed on the glass plate as the object to be cleaned. Sample 1 · Ambient humidity 72% RH 'The supply of liquefied carbon dioxide is 0.5kg / min. (Please read the precautions on the back before filling this page) Sample 2: Ambient humidity of 73% RH, and the supply of liquefied carbon dioxide gas is 0.2 kg / min. In addition, samples 3 and 4, the supply of ambient humidity and liquefied carbon dioxide gas τγ are the same as those of the reference sample. The ambient humidity is 70% RH, and liquefied carbonic acid is supplied. The supply amount of gas TL is 1.0 kg / min. The switching interval of the solenoid valve of the switching means 303 is changed as follows to intermittently spray dry ice and snow! ^ Perform cleaning treatment to confirm whether dew condensation occurs on the glass plate as the object to be cleaned . Sample 3: Spray time in open state is 0.25 seconds, Stop time in closed state is 1.5 seconds. Sample 4: Spray time in open state is 0.25 seconds, Stop time in closed state is 1.0 seconds. Sample 5: Low ambient humidity 50% RH, in this state, the solenoid valve of the switching means 303 is kept open, the supply of liquefied carbon dioxide gas γ is 1.0 kg / min, and the continuous supply of dry ice and snow Ts and continuous spray cleaning are confirmed. Whether there is condensation on the glass plate of the object to be cleaned. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The experimental results of samples 1 to 5 and the reference samples are shown in Table 5. 68 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7

V. Description of the invention (Handed Table 5 Sample No. Humidity around the sample number (% RH) Variation of carbon dioxide gas temperature (° C) Presence or absence of condensation (kg / min) Spray time (sec) Stop time (sec) Reference 70 1.0 0.25 2.0 60 > fnr None 1 72 0.5 0.25 2.0 60 Μ J \\\ 2 73 0.2 0.25 2.0 60 and J \\\ 3 70 1.0 0.25 1.5 60 dnt. Μ 4 70 1.0 0.25 1.0 60 Μ j \\\ 5 50 1.0 continuous ifrpl 60 dniL INI ----------- • install ----- (Please read the precautions on the back before filling this page) It can be clearly seen from Table 5 that samples 1 and The supply of sprayed liquefied carbon dioxide gas TY in sample 2 is less than that in the reference sample. When the amount of sprayed dry ice and snow Ts is reduced, and in a state where the surrounding humidity is high and dew condensation is likely to occur, the glass plate to be washed is There is no condensation, which indicates that the washing state is as good as the reference state. Also, as in samples 3 and 4, the same humidity and the same amount of dry ice and snow Ts are sprayed and cooled at the same spraying time under the same ambient humidity as the reference sample. In order to reduce the degree of cooling of the objects to be washed, the recovery is shortened. The solenoid valve of the switching means 303 is kept closed, and the stopping time for shortening the injection stop time is 1.5 seconds (sample 3) and 1.0 seconds (sample 4). There is no condensation on the glass plate as the object to be cleaned. , Indicating that the washing condition is as good as the reference state. In addition, if sample 5 reduces the surrounding humidity to 50% rh to form a dry state 69 Order # Printed by the Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperatives This paper is suitable for China National Standard (CNS) A4 Specification (21〇X 297 public love) 4.78974 A7 B7 6425pif.doc / 008 V. Description of Invention (6)) In a state where it is difficult to dew, the solenoid valve of the switching means 303 remains open. Dry ice and snow Ts are continuously supplied for washing treatment, and it is confirmed whether dew condensation occurs from the beginning to the end of washing. This starts the spray cleaning of dry ice and snow Ts, intermittently operates the spray of dry ice and snow Ts, and continuously flows the spraying gas 3G. The above can prove how important the cleaning effect is. In the above experiment 1, when the ambient humidity is about 50% RH and the temperature of the spraying gas 3G is 60 ° C, the spray time of the dry ice and snow Ts is 0.25 seconds and the stop time is more than 1 second. There is no condensation. However, Experiment 1 is only an example disclosed by the present invention. For example, when the ambient humidity is higher than that of Experiment 1, the temperature of the injection gas 3G can be controlled or the supply of dry ice and snow Ts can be stopped, so that the switching means 303 is closed and The stop time is 1 second or longer, and it can be easily understood that dew condensation does not occur in the cleaning process. Experiment 2 Experiment 2 was performed using the dry ice and snow Ts cleaning device manufactured in the fifth embodiment, and the effect of the ionization means 316 provided in the injection gas supply system 318 was confirmed. The supply conditions of the injection gas 3G and dry ice snow Ts were the same as those of the reference sample of Experiment 1. That is, the opening and closing time of the switching means 303 for supplying the dry ice and snow Ts is 0.25 seconds and the closing time is 2.0 seconds. The spray gas is 60 ° C. The ionization means 316 is a plasma discharge ionization device manufactured by American Ion Systems. First, in order to confirm the 70 paper produced by the dry ice and snow Ts production and supply system 308, the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------ 丨 丨 丨 --lm ^ 装 i 丨- ——Order · ———— Author 丨 (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention ( θ) The amount of static electricity generated without using the gas supply system 318. The dry ice and snow Ts production and supply system 308 circulates liquefied carbon dioxide gas TY in the same state as the reference sample of the above experiment 1, and measures the static electricity of the dry ice and snow 1 ^ near the front end of the jet cleaning nozzle 323. As a result, the static electricity was about 3300V. Next, the operating gas supply system 318 was operated, the temperature of the injection gas 3G was raised to 60 ° C, and the flow rate was about 70 to 225 L / min. At this time, the static electricity amount near the front end of the jet cleaning nozzle 323 is about 1600V. At this time, the plasma discharge device using the ionization means 316 provided in the injection gas supply system 318 starts to operate, the injection gas 3G is heated to 60 ° C, and the flow rate is about 70 to 225 L / min. At this time, the amount of static electricity near the front end of the spray cleaning nozzle 323 is about 0V. In this way, the ionization means 316 such as a plasma discharge device is used to make the charge of the dry ice Ts approximately 0V. It has been proved that the equipment of the ionizing means 316 such as a plasma discharge device is effective. In Experiments 1 and 2 of the fifth embodiment described above, the object to be cleaned was not placed in a closed space. For the surrounding environment to be cleaned, the object to be cleaned is placed in a closed space such as a ventilated room or a clean bench, and ionizing means are provided in the closed space to keep the ionized fluid in the closed space, so that the efficiency of removing electricity better. In addition, the low dew point gas (dry gas) in the above-mentioned closed space is kept clean, so that the object to be cleaned can be cleaned without dew condensation. 71 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ Installation -------- Order (Please read the precautions on the back first) (Fill in this page again) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 〇〇8 A7 B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This is a dry ice and snow cleaning device manufactured by arranging the spray cleaning nozzle 323 shown in FIG. 16 on the stand 330. Here, the mold release pliers for molding the thermosetting resin are used as the object to be cleaned. Design specifications of the dry ice and snow washing device produced: Liquefied carbonic acid gas production and supply system 308: • Liquefied carbonic acid gas container 301: High-pressure gas steel cylinder. • Charging pressure of liquefied carbon dioxide gas: about 6MPa. • Switching means 303: Manual is a ball valve. • Throttling means 305: needle valve. Gas supply system for injection 318: • Gas source container for injection 311: High-pressure gas cylinder. • Jet gas 3G: nitrogen gas with dew point of -65 ° C, filling pressure is about 1.5MPa. • Pressure regulator 314: adjust the nitrogen supply pressure at a normal temperature to a certain pressure of about 0.1 to 0.9 MPa, or continuously supply the spray cleaning nozzle 323 without using nitrogen. • Ionization method 316: Plasma discharge method (ionizer made by MEISEI or nozzle-type static elimination device made by Kasuga Electric Co., Ltd.). • Temperature control means 319: Equipped with electric heater with proportional-integral-derivative (PID) control. Spray cleaning nozzle 323: • Spray structure: linear spray nozzle, coaxial spray method with spraying gas 3G and dry ice snow Ts. 72 (Please read the notes on the back before filling out this page) 装 • I I I Μ · * Order ----

Mm. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (>) Use the above The device made in the sixth embodiment. The mold-removing pliers used for molding the thermosetting resin were regarded as the object to be cleaned, and the cleaning process was performed under the following conditions. • Performed at room temperature of 15 ~ 20 ° C. • The temperature of the supplied injection gas is controlled by temperature control means 319 at a fixed temperature of 20 ~ 60 ° C. • Ambient humidity (relative humidity:% RH) is usually in the condition of high humidity and easy to dew, and the relative humidity is 40 ~ 70% RH. Under the above conditions, the ambient humidity is 40% RH. First, the resin sheet remaining on the demolding tongs is removed by brushing, and the manual ball valve of the switching means 303 included in the dry ice and snow Ts generation and supply system 308 is opened to supply 0.1 kg / min of liquefied carbon dioxide gas. On the other hand, the on-off valve included in the injection gas supply system 318 was opened, and nitrogen gas at 20 ° C was used as the injection gas 3G to flow through the cleaning nozzle 323. Therefore, the dry ice and snow Ts and nitrogen are continuously sprayed, and the cleaning tongs for molding the thermosetting resin are cleaned under the cleaning conditions in the above range. As a result, the detergency was very good. In addition, the time required for the cleaning test of the present invention is 5 minutes. As described above, in the sixth embodiment, the demolding tongs cleaned by the dry ice and snow cleaning device of the present invention are used. First, the resin sheet (and various additives mentioned above) remaining in the demolding tongs is removed by brushing. The preferred brushing method is brushing by repeating and rotating. In order to remove the above-mentioned various additives, the liquefied carbon dioxide gas in the liquefied carbon dioxide gas container 301 is maintained in a liquefied state, and the liquefied carbon dioxide gas B maintained at a pressure of about 6 MPa is led out through a pipe. After that, it is suitable to operate the manual switch means 303 (also can be a solenoid valve) to make the liquefied carbonic acid 73 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling (This page) One outfit • ϋ ϋ n

MM I I ^ · ϋ 1 ϋ ϋ I 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (0 丨) The gas TL is intermittently supplied to the throttling means 305 through a pipe. The switching means 30 is in an open state and the flow is adjusted by the sharp holes of the throttling means 305; s, Wei Ri Temple makes the liquefied carbon dioxide TL adiabatic expansion film to form dry ice and snow Ts under atmospheric pressure (about 0 MPa). The dry ice and snow Ts generated thereafter is sprayed from the jet cleaning nozzle 323 through a pipe. Therefore, it is preferable to use a liquefied carbonic acid gas TL at -20 ° C and 2 MPa and a gas-liquid separator for the various types of additives mentioned above. In addition, the material for brushing is not particularly limited, as long as it is a brush made of a material that does not damage the surface of the release pliers as the object to be cleaned, and is appropriately selected for use. Seventh Embodiment The seventh embodiment demonstrates the effect of the cleaning power of different cleaning nozzles used. The cleaning nozzles used are (1) linear nozzles (refer to the spray cleaning nozzle 323 in Fig. 13), (2) sharp nozzles (refer to the spray cleaning nozzle 323A in Figure 14), and (3) conical shape There are three types of expansion nozzles (see jet cleaning nozzle 323B in Figure 15). Therefore, the design specifications of the various spray nozzles mentioned above are as follows: (1) Linear nozzle • Inner diameter of outer tube: 4mm. • Outer diameter of inner tube: 3.2mm. • Inner diameter of the inner tube: 1.2mm. (2) Slim nozzle • Inner diameter of outer tube: 4mm. 74 Paper size applies to China National Standard (CNS) A4 specification (210 X 297 male f I --------- install i 丨 丨 丨 丨 丨 丨 order-(Please read the precautions on the back before filling this page ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention • Outer diameter of the inner tube: 3.2mm. • Inner diameter of the inner tube: 1.2mm. • Front tube shape: flat (Long side: 6mm, short side: 〇_9mm) No side gap. • Length from the throttle to the front end of the nozzle: 4Gmm ° • Conical angle (Θ) on the throttle: 35 degrees. (3) Conical expansion nozzle • Inner diameter of outer tube: 4mm. • Outer diameter of inner tube: 3.2mm. • Inner diameter of inner tube: 1.6mm. • Inner diameter of throttle device: Φ3.4ηπη. • Length of throttle device : 5mm. • Length from throttle device to nozzle front: 6.8mm. • Throttle device angle (/ 3): 90 degrees. • Conical expansion angle (α) on throttle device: 5 degrees. Use the above The following experiments were performed for various nozzles (1), (2), and (3). Experiment 3 Using the device shown in Fig. 12, the flow rate of liquefied carbonic acid gas 1 ^ was 77 · 8 g / min. Nitrogen was used as the spraying gas 3G, and the flow rate of the spraying gas 3G was 180 L / min. Under the same conditions, it was supplied to the above-mentioned cleaning nozzle, and the cleaning nozzle was measured at a position 15 mm from the nozzle. The instantaneous impact pressure (hereinafter referred to as the cleaning pressure) (MPa) when the spray port sprays the object to be cleaned. In addition, the supply pressure of the 3G spray gas to the spray cleaning nozzle is adjusted to a constant pressure of 0.7 MPa. Determining the pressure of ejection 75 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " --------- install —! Order ·-(Please read the precautions on the back first (Fill in this page again) # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 V. Description of the invention 0) A pressure measuring film made by Fujifilm (Stock) Co., Ltd. (Product name: Fuji Pressure Device ). The results are listed in Table 6 and Table 6. Types of nozzles: Inner tube material Outer tube material Liquefied carbon dioxide gas flow rate (g / min) Gas flow rate for injection (L / min) Washing pressure (MPa) (1) Linear Teflon iron Fron 77.8 180 47.5 (2) Slim thin iron Fron iron Fron 77.8 180 60 ~ 75 (2) Slim thin stainless steel 77.8 180 12.5 (3) Conical expansion iron Fron iron Fron 77.8 180 76.0 --- -------- (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, and confirmed by Table 6 (2) Linear nozzles are better than (2) Slim nozzles and (3) The cleaning pressure of the conical expansion nozzle is low. And (2) the cleaning pressure of the tip nozzle is lower than that of the (3) conical expansion nozzle. However, (2) when the material of the pipe on the downstream side of the throttling device is made of stainless steel, the cleaning pressure obtained is low. The high cleaning pressure obtained by using Teflon to make pipes near the outlet of the throttling device proves to be ideal. Experiment 4 Following experiment 4, nitrogen gas was used as the injection gas 3 G, and the flow rate of the fixed injection gas 3 G was 180 L / min, and the flow rate of the liquefied carbon dioxide gas γ was changed. With the above cleaning nozzle, it is confirmed that the maximum cleaning pressure (MPa) is obtained. 76

• III Μ · I Subscriber · This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 478974 6425pif.doc / 008 A7 B7 V. Description of the invention (?) The flow of liquefied carbon dioxide gas TL ( g / min). In addition, the device was the same as in Experiment 3, and the device shown in Fig. 12 was used. The cleaning pressure (MPa) of the spray was measured at a position 15 mm from the spray outlet. In addition, the supply pressure of the spray gas 3G to the spray cleaning nozzle was adjusted in the same manner as in Experiment 3 so that the constant pressure was 0.7 MPa. The pressure (washing pressure) for measuring the discharge was measured using a pressure measuring film (trade name: Fuji Pressure Device) manufactured by Fuji Film (Stock) Co., Ltd. The results are shown in Table 7. Table 7 — Types of nozzles Inner tube material Outer tube material Liquefied carbon dioxide gas flow (g / min) Gas flow for injection (L / min) Washing pressure (MPa) (1) Linear Teflon Long Tiefulong 295.9 180 47.5 (2) Slim and thin Tiefulong Tiefulong 202.0 180 60 ~ 75 (2) Slim and thin stainless steel 202.0 180 33.0 (3) Tapered extension Tiefulong Tiefulong 236.5 180 104 ( Please read the precautions on the back before filling in this page.) ---- Order --- Etiquette-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The maximum pressure is 104.0 MPa, and the flow rate of the liquefied carbon dioxide gas supplied at this time is 236.5 g / min. (2) The material of the pipe near the outlet of the throttling nozzle is made of Teflon. The maximum cleaning pressure is 60 to 75 MPa. At this time, the flow rate of the liquefied carbon dioxide gas supplied is 202.0 g / min. 77 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (γ /) But (2) The tip of the thin nozzle is near the outlet of the throttling device. The material of the tube is made of stainless steel, the cleaning pressure is 33.0 MPa, and the flow rate of the liquefied carbon dioxide gas supplied at this time is 295.5 g / min. From the results obtained in Experiments 3 and 4 above, the following facts can be obtained. • The size of the cleaning pressure is [(3) conical expansion nozzles] > [(2) tapered nozzles]> [(1) linear nozzles] • The material of the pipe near the outlet of the throttle device is stainless steel. Long poor. • The maximum cleaning pressure obtained by the cone-shaped expansion nozzle ’The maximum cleaning pressure 値 is a pressure of 104.0 MPa. Therefore, the cone-shaped expansion nozzle can be used for efficient cleaning. • The maximum cleaning pressure of the linear nozzle and the tip nozzle is reached with the increase of the flow of liquefied carbon acid gas TY. After that, the maximum cleaning pressure tends to decrease as the liquefied carbon dioxide gas flow increases. Therefore, this nozzle can achieve higher cleaning efficiency at the vertex operation. • The use of cone-shaped expansion nozzles can remove fine fiber debris after the honing process of the color filter substrate manufacturing process. The supply flow of liquefied carbon dioxide gas is 120g / min, and the supply flow of 3G with nitrogen as the spray gas is 220L / min to 30L / min. It can also be washed well. Experiment 5 followed by Experiment 5 was to change the calculated flow rate of the [injection gas 3G + liquefied carbon dioxide gas] of the throttling device among (1) linear nozzles, (2) tapered nozzles, and (3) conical expansion nozzles. (m / sec) and confirm the change in the cleaning pressure. 78 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------ • 丨 丨 丨 丨 丨 丨 丨 Order!! _1 * ^ 11 ^ · (Please read the first Note: Please fill in this page again.) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (乂) In addition, nitrogen is used as the spray gas 3G, assuming that liquefied carbon dioxide gas is 70% gasified The flow rate of the throttling device can be obtained by the following formula: Flow rate (m / seC) = [flow rate of nitrogen + supply of liquefied carbon dioxide gas × 0.506 (m3 / kg) x 0.7] / nozzle cross-sectional area This result is shown in Figure 17 The relationship between the flow rate (m / sec) and the cleaning pressure (MPa) of the throttling device of various cleaning nozzles. Experiment 5 can clearly prove the following results from the relationship diagram of FIG. 17. • The linear nozzle's throttling device can obtain a maximum cleaning pressure of 47.5MPa when the flow rate is 275m / Sec, and the cleaning pressure will not increase but will decrease, and the cleaning force cannot be increased. • It is proved that the cleaning pressure of the tapered nozzle and the conical expansion nozzle increases with the increase of the flow rate of the throttling device. However, compared with the tapered nozzle, the conical expansion nozzle has a significantly higher cleaning pressure and a higher cleaning force. high. • Especially when the flow rate of the throttle device exceeds the speed of sound (0 ° C, about 331m / Sec at 1 atmosphere), the conical expansion nozzle has a very high lift above the cleaning pressure, and the cleaning effect is more significant. In addition, in the above embodiment, the angle of the throttle device of the conical expansion nozzle 323B is not 90 degrees, and the expansion angle α of the conical expansion nozzle 323B is 5 degrees. This is not intended to limit the present invention. The angle cooling of the throttling device can be 30 degrees to 90 degrees, and the conical expansion angle α can be 5 degrees to 25 degrees. The same effect can be obtained. From the above description, the dry ice and snow production supply device and production supply means of the present invention 'maintain the liquefied carbon dioxide gas in the liquefied carbon dioxide gas storage container by controlling the temperature and pressure. Generally liquefied carbon dioxide gas under stable pressure 79 This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) I n ϋ nn I ϋ -ϋ ϋ I n I · ϋ ϋ l ml ϋ n ϋ 1 δ, · 1 I 1 ϋ I (Please read the notes on the back before filling out this page)% Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 478974 6425pif.doc / 008 A7 B7 Printed by the Employee Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention Ολ) It can supply adiabatic expansion to the throttling device, and the throttling device produces and supplies dry ice and snow in a stable state. Therefore, the dry ice and snow can be supplied stably, the washing operation can be carried out reliably, and the washing yield of the articles to be washed can be improved. In addition, the first dry ice and snow washing device and washing means of the present invention can achieve the effects described below. The dry ice and snow washing device according to the present invention has a length of dry ice and snow circulation pipes from the throttling mechanism to the cleaning nozzle of 45 mm, 200 mm, 500 mm, 1000 mm, 1500 mm, and 2000 mm. Continuously spray dry ice and snow, while continuously flowing out the other side of the spray gas to remove metal particles adhering to the object to be cleaned, and confirm that no condensation will occur during cleaning. Therefore, the length of the circulation pipe of the cleaning nozzle near the exit of the throttling mechanism can be seen from the object to be cleaned. The length of the circulation pipe is more than 200mm, which proves that the cleaning effect is very significant. In addition, the length of the above-mentioned flow line from the throttle mechanism to the cleaning nozzle proves that the longer the length is, the higher the pressure will be when cleaning. As a result, the cleaning efficiency can be improved by removing the adhered state of the object or the compressive strength of the object to be cleaned by adjusting the length of the circulation pipeline while avoiding damage and performing appropriate cleaning treatment. In addition, the length of the circulation pipeline can be adjusted to spray dry ice and snow. Corresponding to the situation that the cleansed material is dirty, choose the proper spraying state of dry ice and snow to increase the cleaning efficiency. In particular, the circulation pipelines with different lengths of circulation pipelines, and at the same time, in order to correspond to the cleaning state of a large number of cleaning treatments, the individual configuration of the cleaning lines is fixed, so that the objects to be washed are automatically conveyed by the cleaning pipelines. The washing position corresponding to the length is different, and the articles to be cleaned are continuously conveyed. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). (Please read the precautions on the back before filling this page. ) Assembly ---- Order ---% 478974 6425pif.doc / 008 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (%) Through the fixed cleaning nozzle position, individual cleaning nozzles Different washing positions are sequentially washed, so a large amount of objects to be washed can be efficiently washed in a short time. In order to increase the cleaning effect, it is effective to increase the flow rate of the ejection gas by continuous flow. It has also been proven that from 65NL / min to 270NL / min can shorten the cleaning time. And it is proved that the aging test substrate or probe card made of ultra-fine needle-like stylus can be cleaned as long as the nitrogen flow rate is 65NL / min. On the one hand, because the object to be cleaned is charged, it may be defective. The ionizing means can be set in the gas supply system for spraying or the dry ice and snow supply system. It has also been proved that the ionizing fluid makes it possible to mix dry ice and snow in the cleaning nozzle The charge is approximately 0V. Therefore, washing is performed in accordance with the characteristics of the object to be cleaned, and it is possible to perform the cleaning without causing damage to the object. The reproducible inspection tool product can be reused, and, for example, the probe card can be omitted from the honing process for regeneration. With regard to the second dry ice and snow cleaning device of the present invention, a spray gas outlet is provided around the dry ice and snow spray nozzle to spray the spray gas. By adjusting the flow rate or pressure of the spraying gas, the spraying range of dry ice and snow can be adjusted to the desired appropriate range, and the spraying density of the object to be cleaned can be freely changed appropriately. Therefore, in accordance with the contaminated state of the object to be cleaned, the spraying area of dry ice and snow, or the size of the spraying density of dry ice and snow, the workability can be easily improved by changing the cleaning nozzles and easily adjusting. And the dry ice and snow spraying device of the present invention, because the spraying nozzle sprays out 81 (please read the precautions on the back before filling this page). Installation • ϋ ϋ ϋ ---- order --- # This paper size applies to Chinese national standards ( CNS) A4 specification (210 X 297 public love) 478974 A7 B7 6425pif.doc / 008 V. Description of the invention (M) The front end of the mouth is formed into a flat shape, and its spray shape is expanded to form an oval shape, and it has an area that can achieve flat cleaning effect. Because the spray density of dry ice and snow in the central part is relatively dense, the proper range of the cleaning position can be obtained, and a reliable cleaning effect can be achieved. In addition, the short-side part of the flat-shaped ejection outlet is provided with a side gap notch, so the spray shape of dry ice and snow is expanded to form a slightly rectangular shape. Because the spray of dry ice and snow along the central part of the rectangular shape has a slightly uniform areal density, the surface of the object to be cleaned can be maintained during washing, so that the washing efficiency is good. In particular, when the object to be cleaned has a rectangular shape, washing is effective. In addition, the ejection gas ejection port is parallel to the elongated side gap gap connecting line provided at the ejection port portion of the dry ice and snow jet nozzle, and is provided at a position where the axis of the above side gap gap connecting line is symmetrical. Adjusting the flow rate or pressure of the jetting gas from the jetting gas ejection port can change the size of the rectangular shape near the short side of the jet shape, and it can also change the spray density of dry ice and snow. Depending on the degree of contamination of the object being cleaned, it can be efficiently adjusted to the appropriate desired spraying state. The third dry ice and snow washing device of the present invention performs dry ice and snow intermittent operation on the one hand, and continuous flow as a gas for the propelling gas injection. Therefore, the object to be cleaned is not cooled during washing, and no dew condensation is generated on the object to be cleaned, and uniform and good washing can be performed. In addition, increasing the temperature of the continuously flowing jet gas will not cause dew condensation, which can exert a high-efficiency cleaning effect in a short time. In addition, the temperature of continuous flowing jet gas is increased to prevent dew condensation, which can reach 82 in a short time. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- , φέ (Please read the notes on the back before filling this page)

• IB-1 al · — ϋ 11 nn I 』, · 1 11 ml The effect. (Please read the precautions on the back before filling in this page.) Because the object to be cleaned has a charge, in the case of damage that may cause the object to be cleaned, the injection gas supply system or dry ice and snow supply system can be set with ions. The means. The ionization of the spraying gas or the fluid of dry ice and snow makes the charge of mixing dry ice and snow in the cleaning nozzle about 0 volts. It can reduce the occurrence of defective products such as breakage and improve the yield, and can avoid electrostatic dust collection and prevent foreign matter from entering. In addition, according to the characteristics of the object to be cleaned, it is necessary to skillfully adjust the temperature of the spraying gas, adjust the switching time of the switching means, and operate the ionizing means to perform the cleaning process. Therefore, it does not cause damage to the objects to be cleaned, and it is possible to efficiently and surely perform cleaning, thereby improving the working efficiency. In addition, the sliding track is used to maintain a constant interval between the object to be cleaned and the jet cleaning nozzle, which can be cleaned more uniformly. Moreover, it can be more effective to clean the demolding tongs with brushing. In addition, the use of a pointed nozzle or a cone-shaped expansion nozzle as a cleaning nozzle can obtain a higher cleaning force, especially suitable for peeling and removing strong adherents, which can exert a larger effect, especially using a cone The cleaning effect of the shape-expanding nozzle is extremely remarkable. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Although the present invention has been disclosed above in a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art will not depart from the spirit and scope of the present invention. Various modifications and retouching can be made, so the protection scope of the present invention shall be determined by the scope of the attached patent application. 83 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

478974 A8 B8 C8 D8 6425pif.doc / 〇〇8 /, declared patent scope I A dry ice and snow production and supply device, the device includes: a liquefied carbon dioxide gas storage container, the liquefied carbon dioxide gas storage container stores liquefied carbon dioxide gas; A lead-out pipe connected to the liquefied carbonic acid gas storage container; a throttling nozzle device which adiabaticly expands the liquefied carbonic acid gas of the liquefied carbonic acid gas storage container; and, a temperature control means and a temperature detection means The temperature control means and the temperature detection means are arranged in the liquefied carbon dioxide gas storage container to control the temperature of the temperature of the liquefied carbon dioxide gas. 2. The dry ice and snow generating and supplying device according to item 1 of the scope of patent application, wherein the liquefied carbon dioxide gas storage container includes a siphon-type liquefied carbon dioxide gas storage container using a siphon as the outlet tube. 3. The dry ice and snow generating and supplying device according to item 1 of the scope of the patent application, wherein the liquefied carbon dioxide gas storage container includes a two-port storage container, and an inlet and an outlet on one side of the two-port storage container are connected to a gas source for pressure increase provided. 4. The dry ice and snow generating and supplying device according to item 3 of the scope of the patent application, wherein the dry ice and snow generating and supplying device includes a connection between the liquefied carbon dioxide gas storage container and the pressure source gas source to be connected to the liquefied carbon dioxide gas supply. With container. 5. The dry ice and snow generating and supplying device as described in claim 3 or claim 4, wherein the pressure-generating gas source includes carbon dioxide gas. 6. — A dry ice and snow production and supply method, the method includes: 84 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------------% (Please (Please read the notes on the back before filling out this page) Order --------- Line-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employee Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by 478974 A8 B8 6425pif.d. c / 〇〇 //, the scope of the patent application is to control the temperature of the liquefied carbon dioxide gas storage container, maintain a certain pressure in the liquefied carbon dioxide gas storage container, and maintain the liquefied carbon dioxide gas; and supply the liquefied carbon dioxide gas to the throttling nozzle device, Production supplies adiabatic dry ice and snow. 7. The method for producing and supplying dry ice and snow as described in item 6 of the scope of the patent application, wherein the method for maintaining a certain pressure in the liquefied carbon dioxide gas storage container includes supplying gas to the liquefied carbonic acid gas storage from a pressure source gas source for other purposes Pressure in the container. 8. The dry ice and snow production and supply method according to item 7 of the scope of the patent application, wherein the gas of the pressure-generating gas source is supplied to a pressure-increasing means to increase the pressure. 9. The dry ice and snow production and supply method according to item 7 of the scope of patent application or item 8 of the scope of patent application, wherein the pressure source gas source includes carbon dioxide gas. 10 · A dry ice and snow production and supply device, the device includes: a dry ice and snow supply system, the dry ice and snow supply system is a liquefied carbon dioxide gas storage container for storing liquefied carbon dioxide gas, and an adiabatic expansion throttling mechanism provided by being connected to the storage container And formed by washing nozzles for spraying dry ice and snow. The dry ice and snow supply system from the throttling mechanism to the cleaning nozzle includes a pipe length adjusting mechanism provided with an adjustable flow pipe length. A spraying gas supply system is formed by a spraying gas source container and a spraying gas spraying port provided at a peripheral portion of the cleaning nozzle which reaches the spraying dry ice and snow. The ejection port provided on the peripheral part of the cleaning nozzle of the gas supply system for ejection includes forming and 85 1 paper standards applicable to China National Standard (CNS) A4 specifications (210 X 297 public love) ------- ------------- Order --------- line (please read the notes on the back before filling this page) 478974 A8 B8 C8 6425pif.doc / 008 D8 VI. Application Patent range Dry ice and snow spray direction parallel jet air jet outlet. 11. A method for washing dry ice and snow, the method comprising: expanding liquefied carbonic acid gas at a throttle mechanism to form dry ice and snow, and ejecting the dry ice and snow from a jet port toward the object to be cleaned as a washing method; and The surrounding portion of the dry ice and snow jet stream simultaneously ejects parallel jets with gas. Adjust the length of the flow path of the throttling mechanism to the spray port to spray dry ice and snow to wash the objects to be washed. 12. A dry ice and snow washing device, the device comprising: a dry ice and snow spray device, the dry ice and snow spray device is provided with a dry ice and snow spray nozzle for spraying dry ice and snow, and cleans the object to be washed; a carbonic acid gas source, the The carbon dioxide gas source is connected to the dry ice and snow spray nozzle for spraying dry ice and snow; an outer cylinder is arranged at a position slightly coaxial with the periphery of the center of the dry ice and snow spray nozzle, and is used to connect the configured spraying nozzle. A gas source; and a gas ejection port for ejection, the ejection gas ejection port being located at the front end of the outer cylinder for ejecting the ejection gas. 13. The dry ice and snow washing device according to item 12 of the scope of the patent application, wherein the dry ice and snow spray nozzle includes a flat shape spray outlet with a front end gradually expanding toward the spray outlet, and the front flat spray outlet is provided with side edges. Clearance gap. 14. The dry ice and snow washing device as described in item 13 of the scope of the patent application, wherein the flat front-end ejection opening includes the short-side portion of the front-end ejection opening, and the paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) ------------- # (Please read the notes on the back before filling in this page) Order --------- line · Staff of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative 478974 A8 B8 C8 6425pif.doc / 008 D8. There is a gap in the side gap in the scope of patent application. 15. The dry ice and snow washing device according to item 13 of the scope of patent application or item 14 of the scope of patent application, wherein the flat end of the front-end ejection opening includes a restricting portion of the long side portion of the front-end ejection opening portion having a slightly rectangular shape. . 16. The dry ice and snow washing device according to item 13 of the application scope or item 14 of the application scope, wherein the shape of the front end of the spraying gas outlet includes an elongated shape, and the front end of the dry ice and snow spraying nozzle Set the side gap gap connection lines slightly parallel. 17. The dry ice and snow washing device according to item 15 of the scope of the patent application, wherein the shape of the front end of the spray gas ejection opening includes an elongated shape, and the side gap gap connection line provided with the front end ejection outlet of the dry ice and snow spray nozzle Slightly parallel. 18. —A method for cleaning dry ice and snow, the method comprising: spraying dry ice and snow from a dry ice and snow spray nozzle and spraying a spray gas from a spray gas outlet disposed along the periphery of the dry ice and snow spray nozzle, thereby washing The cleaned object is used as a dry ice and snow spraying device for washing. The flow rate or pressure of the spraying gas is changed and adjusted, and the spray cleaning range of the dry ice and snow sprayed from the spray outlet of the dry ice and snow spray nozzle is changed and adjusted. 19. A dry ice and snow washing device, the device comprising: a spray washing nozzle for spraying dry ice and snow; a liquefied carbon dioxide gas storage container, the liquefied carbon dioxide gas storage container being used for storing liquefied carbon dioxide gas; 87 -------------------- Order --------- line- ^ 11 · (Please read the precautions on the back before filling this page) Economy The paper size printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 478974 A8 B8 C8 D8 6425pif.d〇c / 〇〇8 /, declares that the scope of patents is dry ice and snow A production and supply system, the dry ice and snow production and supply system is arranged between the liquefied carbon dioxide gas storage container and the jet cleaning nozzle, and is used to produce and supply dry ice and snow; a jet gas source, and the jet gas source is used to jet gas; A gas supply system for spraying, the gas supply system for spraying is disposed between the gas source for spraying and the spray cleaning nozzle for supplying gas for spraying; and a switch means is provided on the dry ice and snow Production Supply System 'For intermittently supplying liquefied carbon dioxide gas is. 20. The dry ice and snow washing device according to item 19 of the scope of the patent application, wherein the gas source for spraying comprises using a dry gas. 21. The dry ice and snow washing device according to item 19 of the patent application scope or item 20 of the patent application scope, wherein the spraying gas supply system includes a heating control means having a heating spraying gas. 22. The dry ice and snow washing device according to item 19 of the scope of patent application or item 20 of the scope of patent application, wherein the gas supply system for spraying and the dry ice and snow production and supply device include at least one of two systems. Ionization means capable of ionizing gas. 23. The dry ice and snow washing device according to item 21 of the scope of application for a patent, wherein the spray gas supply system and dry ice and snow production and supply device include at least one of two systems, and an ionization means for ionizing gas is provided. . 24. The dry ice and snow washing device as described in item 19 of the scope of application for a patent, in which the gas supply system for spraying and the dry ice and snow production and supply system are connected. 88 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297). Li) --------- € -------- ^ --------- line. (Please read the notes on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperative 4/8974 Printed by employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 —6425Pif.doc / 〇〇8__Qg ____ The patent application scope of this spray cleaning nozzle includes the piping of one side and the other with a soft life. The piping forms a slightly coaxial double pipe. 25. The dry ice and snow washing device as described in item 24 of the scope of application for a patent, wherein the double pipe connected to the jet cleaning nozzle includes a pipe for the gas supply system for the jet and a pipe for the dry ice and snow production and supply system. At the same time, the front end of the jet cleaning nozzle has a sharp shape. 26_ The dry ice and snow washing device according to item 24 of the scope of the patent application, wherein the double piping connected to the jet cleaning nozzle includes the piping of the gas supply system for injection and the piping of the dry ice and snow production and supply system. The double tube, meanwhile, the spray cleaning nozzle is formed into a conical expansion shape toward the front end through a throttling device. 27. The dry ice and snow washing device as described in item 19, 20, 24, 25, or 26 of the scope of patent application, wherein the jet cleaning nozzle includes at least one which can be arranged in the up-down direction and the left-right direction. There is a support frame that can slide freely in one direction. 28. The dry ice and snow washing device as described in item 21 of the scope of application for a patent, wherein the spray cleaning nozzle includes a support stand that can be freely slidable in at least one of the vertical direction and the horizontal direction. 29. The dry ice and snow washing device according to item 22 of the scope of application for a patent, wherein the spray cleaning nozzle includes a support stand which can be freely slidable in at least one of the vertical direction and the horizontal direction. 30. The dry ice and snow washing device according to item 28 of the scope of application for a patent, wherein the support stand on which the spray washing nozzle is arranged to be freely slidable in at least one of the up-down direction and the transverse direction includes a wheel for moving. 89 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back? Matters before filling out this page) 478974 A8 B8 C8 D8 6425pif.doc / 008 6. Scope of patent application 31. The dry ice and snow cleaning device described in item 28 of the scope of application for patent, wherein the jet cleaning nozzle is provided with at least one of a vertical direction and a horizontal direction The freely sliding support stand includes moving wheels. 32. A method for washing dry ice and snow, the method comprising: a method for washing dry objects with dry ice and snow; intermittently supplying dry ice and snow; and continuously supplying spray gas. 33. The dry ice and snow washing method as described in item 32 of the scope of the patent application, wherein the dry ice and snow production and supply device includes circulating ionized carbon dioxide gas. 34. The dry ice and snow washing method according to item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the dry ice and snow washing method used includes controlling the spraying gas with temperature. 35. The dry ice and snow washing method according to item 32 of the patent application scope or item 33 of the patent application scope, wherein the dry ice and snow washing method used includes an ionized spray gas. 36. The dry ice and snow washing method according to item 34 of the scope of application for a patent, wherein the dry ice and snow washing method used includes an ionized spray gas. 37. The dry ice and snow washing method according to item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the jet cleaning nozzle includes a support stand provided in the up-down direction and at least one direction that can be slid freely so that The spray cleaning nozzle keeps a certain distance from the object to be cleaned, and sprays dry ice and snow for cleaning. 38. The dry ice and snow washing method as described in item 34 of the scope of the patent application, wherein the jet cleaning nozzle includes at least 90 horizontal and vertical directions. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297). Mm) LL ------- ¾ (Please read the precautions on the back before filling out this page) Order --------- Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economics 478974 A8 B8 C8 6425pif.doc / 008 D8 6. The scope of the patent application There is a support stand that can slide freely in the direction, so that the spray cleaning nozzle keeps a certain distance from the object to be cleaned, and dry ice and snow are sprayed for cleaning. (Please read the precautions on the back before filling this page) 39. The dry ice and snow cleaning method as described in item 35 of the scope of patent application, wherein the spray cleaning nozzle includes at least one direction which can be set freely in the up-down direction and the transverse direction. The sliding support frame keeps the spray cleaning nozzle and the object to be cleaned at a certain distance, and sprays dry ice and snow for cleaning. 40. The dry ice and snow washing method as described in item 32 of the scope of patent application or item 33 of the scope of patent application, wherein the dry ice and snow washing method comprises washing with washing together with washing. 41. The dry ice and snow washing method according to item 34 of the scope of application for a patent, wherein the dry ice and snow washing method comprises washing with washing together with brushing. 42. The dry ice and snow washing method according to item 35 of the scope of application for a patent, wherein the dry ice and snow washing method includes washing with the brush and washing the object to be washed. 43. The dry ice and snow washing method as described in item 37 of the scope of application for a patent, wherein the dry ice and snow washing method includes washing with washing together with brushing. 44. The dry ice and snow washing device according to item 29 of the scope of application for a patent, wherein the support stand on which the spray washing nozzle is arranged to be freely slidable in at least one of the up-down direction and the transverse direction includes a wheel for moving. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 91 This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297)