TW202213888A - System and method for multibeam laser source, and multibeam laser source device - Google Patents
System and method for multibeam laser source, and multibeam laser source device Download PDFInfo
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本發明涉及雷射技術領域,尤指一種多光束雷射源系統、多光束雷射源放大之方法及多波長雷射放大器。The present invention relates to the field of laser technology, in particular to a multi-beam laser source system, a multi-beam laser source amplification method and a multi-wavelength laser amplifier.
就雷射加工而言,由於適用於包括金屬、非金屬、高硬度、高脆性、高熔點等多種材質,且生產效率高,因此被加工業者廣泛應用。As far as laser processing is concerned, it is widely used by processors because it is suitable for various materials including metals, non-metals, high hardness, high brittleness, high melting point, etc., and has high production efficiency.
然而,傳統雷射加工採用單頻雷射,若直接對陶瓷、矽晶圓等硬脆材料加工,易因熱累積造成加工樣品破損;此外,單頻雷射在金屬板材切割上易有熔渣且精度較粗的現象。However, traditional laser processing uses single-frequency lasers. If hard and brittle materials such as ceramics and silicon wafers are directly processed, the processed samples are easily damaged due to heat accumulation. In addition, single-frequency lasers are prone to slag when cutting metal sheets. And the phenomenon of coarser precision.
近幾年來,雙光束雷射加工被廣泛地應用在提升雷射加工品質上,利用長脈衝波段對加工物進行預熱,再以短脈衝波段對物件進行瞬間加工以達到最小熱累積;相較於傳統單光束(單波長)雷射加工,尤其是陶瓷硬脆薄板或是精密金屬板材加工,雙光束雷射可以大幅降低硬脆材料破損率及改善精密金屬表面加工精度,為商品產業(例如5G商品產業)帶來更多先進應用。In recent years, dual-beam laser processing has been widely used to improve the quality of laser processing. The long-pulse waveband is used to preheat the processed object, and then the short-pulse waveband is used to instantly process the object to achieve minimum heat accumulation. For traditional single-beam (single wavelength) laser processing, especially for ceramic hard and brittle thin plates or precision metal sheet processing, dual-beam lasers can greatly reduce the breakage rate of hard and brittle materials and improve the precision of precision metal surface processing. 5G commodity industry) to bring more advanced applications.
雙光束雷射加工主要原理為利用第一道長脈衝高功率脈衝雷射對加工物件先進行升溫以接近物件加工閥值,同時以第二道低功率短脈衝雷射對物件做瞬間剝除加工,以達到加工區域熱累積情況最小化;此為雙光束雷射之加工最大優勢。The main principle of dual-beam laser processing is to use the first long-pulse high-power pulse laser to heat up the processed object to approach the processing threshold of the object, and at the same time use the second low-power short-pulse laser to instantly peel off the object. , in order to minimize the heat accumulation in the processing area; this is the biggest advantage of dual-beam laser processing.
傳統雙光束雷射產生方式有兩種,一為利用空間耦光方式將兩道不同波長、不同功率、不同脈衝寬度之雷射耦合在同一個光軸上;一為利用光纖放大器方式,將一個激發源做部分功率轉換成另一個訊號源並保留剩餘激發源。There are two traditional double-beam laser generation methods. One is to couple two lasers with different wavelengths, different powers and different pulse widths on the same optical axis by means of spatial coupling; The excitation source does partial power conversion into another signal source and retains the remaining excitation source.
上述兩種習知方式的缺失包括:空間耦光損失過大(超過10%)、雙光束光軸不密合、光纖孔徑變大影響光束品質,因而無法發揮雙光束雷射加工最大效用。The deficiencies of the above two conventional methods include: excessive spatial coupling light loss (more than 10%), the optical axes of the double beams are not closely spaced, and the increase of the fiber aperture affects the beam quality, so the maximum effect of the double beam laser processing cannot be exerted.
此外,習知方式僅限於雙光束,不適於多於雙光束之加工應用,例如,三光束或以上。In addition, the conventional method is limited to two beams, and is not suitable for processing applications with more than two beams, eg, three beams or more.
據此,如何發展出一種「多光束雷射源系統、多光束雷射源放大之方法及多波長雷射放大器」,能夠降低雷射傳輸之損失(小於5%),解決多光束雷射同軸問題(100%密合),並且能夠大幅提升雷射光束品質,將多光束雷射加工應用發揮極致,是相關技術領域人士亟待解決之課題。According to this, how to develop a "multi-beam laser source system, multi-beam laser source amplification method and multi-wavelength laser amplifier", which can reduce the loss of laser transmission (less than 5%) and solve the problem of multi-beam laser coaxial problem (100% tightness), and can greatly improve the quality of the laser beam, and maximize the application of multi-beam laser processing, which is an urgent problem to be solved by those in the relevant technical fields.
於一實施例中,本發明提出一種多光束雷射源系統,包含: 複數雷射訊號源,每一雷射訊號源提供一訊號源雷射光束,每一訊號源雷射光束具有一訊號源波長,複數訊號源波長互不相同; 一光纖耦合器,用以耦合複數訊號源雷射光束至同一根光纖中; 至少一泵浦源,每一泵浦源用以提供一泵浦源雷射光束,泵浦源雷射光束具有一泵浦源波長,泵浦源波長小於複數訊號源波長; 一多波長雷射放大器,包括: 一光纖結合器,連接光纖,光纖結合器用以耦合複數訊號源雷射光束與泵浦源雷射光束; 一摻雜離子增益光纖,連接光纖結合器,由光纖結合器將複數訊號源雷射光束與泵浦源雷射光束傳輸至摻雜離子增益光纖中並將每一訊號源雷射光束的功率放大,摻雜離子增益光纖具有一增益介質,複數訊號源波長落在增益介質的放射頻譜的範圍中,泵浦源波長落在增益介質的吸收頻譜的範圍中;以及 一纖衣功率剝除器,連接摻雜離子增益光纖,用以濾除通過摻雜離子增益光纖後殘餘的泵浦源雷射光束的能量,並輸出經功率放大後的複數訊號源雷射光束。 In one embodiment, the present invention provides a multi-beam laser source system, including: Multiple laser signal sources, each laser signal source provides a signal source laser beam, each signal source laser beam has a signal source wavelength, and the wavelengths of the multiple signal sources are different from each other; an optical fiber coupler for coupling the laser beam of the complex signal source into the same optical fiber; at least one pump source, each pump source is used to provide a pump source laser beam, the pump source laser beam has a pump source wavelength, and the pump source wavelength is smaller than the wavelength of the complex signal source; A multi-wavelength laser amplifier, including: an optical fiber combiner for connecting the optical fibers, and the optical fiber combiner is used for coupling the laser beam of the complex signal source and the laser beam of the pump source; A doped ion gain fiber is connected to a fiber combiner, and the fiber combiner transmits the complex signal source laser beam and the pump source laser beam to the doped ion gain fiber and amplifies the power of each signal source laser beam , the ion-doped gain fiber has a gain medium, the wavelength of the complex signal source falls within the range of the radiation spectrum of the gain medium, and the wavelength of the pump source falls within the range of the absorption spectrum of the gain medium; and A fiber coat power stripper is connected to the doped ion gain fiber to filter the energy of the pump source laser beam remaining after passing through the doped ion gain fiber, and output the power-amplified complex signal source laser beam .
於一實施例中,本發明提出一種多光束雷射源放大之方法,包括下列步驟: (a)由光纖耦合器將複數訊號源雷射光束耦合至一光纖中; (b)由光纖結合器將複數訊號源雷射光束與泵浦源雷射光束耦合至摻雜離子增益光纖中,該複數訊號源雷射光束在摻雜離子增益光纖的纖核中傳遞,且泵浦源雷射光束在摻雜離子增益光纖的纖衣中傳遞; (c)泵浦源雷射光束首先放大最小波長的訊號源雷射光束,再利用部分經放大之最小波長的訊號源雷射光束放大次小波長的訊號源雷射光束,以此類推,直到所有的訊號源雷射光束的功率皆被放大;以及 (d)由纖衣功率剝除器濾除通過摻雜離子增益光纖後殘餘的泵浦源雷射光束的能量,並輸出經功率放大後的複數個訊號源雷射光束。 In one embodiment, the present invention provides a method for amplifying a multi-beam laser source, comprising the following steps: (a) Coupling the laser beam of the complex signal source into an optical fiber by a fiber coupler; (b) coupling the complex signal source laser beam and the pump source laser beam into the doped ion gain fiber by the fiber combiner, the complex signal source laser beam is transmitted in the core of the doped ion gain fiber, and The pump source laser beam is transmitted in the fiber coat of the doped ion gain fiber; (c) The pump source laser beam first amplifies the signal source laser beam of the smallest wavelength, and then uses part of the amplified signal source laser beam of the smallest wavelength to amplify the signal source laser beam of the second smallest wavelength, and so on, until All source laser beam powers are amplified; and (d) The energy of the pump source laser beam remaining after passing through the ion-doped gain fiber is filtered out by the fiber coat power stripper, and a plurality of signal source laser beams after power amplification are output.
於一實施例中,本發明提出一種多波長雷射放大器,包括: 一光纖結合器,連接一光纖,光纖結合器用以耦合複數訊號源雷射光束與泵浦源雷射光束;每一訊號源雷射光束具有一訊號源波長,複數訊號源波長互不相同;泵浦源雷射光束具有一泵浦源波長,泵浦源波長小於複數訊號源波長; 一摻雜離子增益光纖,連接光纖結合器,由光纖結合器將複數訊號源雷射光束與泵浦源雷射光束傳輸至摻雜離子增益光纖中並進行複數訊號源波長同步功率放大,摻雜離子增益光纖具有一增益介質,複數訊號源波長落在增益介質的放射頻譜的範圍中,泵浦源波長落在增益介質的吸收頻譜的範圍中;以及 一纖衣功率剝除器,連接摻雜離子增益光纖,用以濾除通過摻雜離子增益光纖後殘餘的泵浦源雷射光束的功率,並輸出經功率放大後的複數個訊號源雷射光束。 In one embodiment, the present invention provides a multi-wavelength laser amplifier, comprising: An optical fiber coupler is connected to an optical fiber, and the optical fiber coupler is used to couple the complex signal source laser beam and the pump source laser beam; each signal source laser beam has a signal source wavelength, and the complex signal source wavelengths are different from each other; The laser beam of the pump source has a wavelength of the pump source, and the wavelength of the pump source is smaller than the wavelength of the complex signal source; A doped ion gain fiber is connected to a fiber combiner. The fiber combiner transmits the complex signal source laser beam and the pump source laser beam to the doped ion gain fiber and performs wavelength synchronization power amplification of the complex signal source. The ion gain fiber has a gain medium, the wavelength of the complex signal source falls within the range of the emission spectrum of the gain medium, and the wavelength of the pump source falls within the range of the absorption spectrum of the gain medium; and A fiber coat power stripper, connected to the doped ion gain fiber, used to filter the power of the remaining pump source laser beam after passing through the doped ion gain fiber, and output a plurality of signal source lasers after power amplification beam.
請參閱圖1及圖2所示,本發明所提供之一多光束雷射源系統100,其包括二雷射訊號源1、2、光纖耦合器(Fiber coupler)3、泵浦源5及多波長雷射放大器(multi-wavelength laser amplifier)10。多波長雷射放大器10由光纖結合器(Fiber combiner)11、摻雜離子增益光纖(Ion-doped gain fiber)12及纖衣功率剝除器(CPS)13組成。Please refer to FIG. 1 and FIG. 2 , a multi-beam
每一雷射訊號源1、2可提供一訊號源雷射光束L1、L2,每一訊號源雷射光束L1、L2具有一訊號源波長,訊號源雷射光束L1、L2的訊號源波長互不相同。此外,每一雷射訊號源1、2所提供的訊號源雷射光束L1、L2的功率互不相同,且複數功率的大小順序係與複數訊號源波長的大小順序相反。以及,每一訊號源雷射光束L1、L2具有一脈衝寬度,脈衝寬度互不相同,且脈衝寬度的大小順序係與訊號源波長的大小順序相反。Each
例如,雷射訊號源1所提供的訊號源雷射光束L1具有訊號源波長λ1、功率W1及脈衝寬度PW1,雷射訊號源2所提供的訊號源雷射光束L2具有訊號源波長λ2、功率W2及脈衝寬度PW2;若λ1<λ2,則W1>W2,PW1>PW2。For example, the signal source laser beam L1 provided by the
光纖耦合器3用以耦合訊號源雷射光束L1、L2至同一根光纖4中;光纖耦合器3的型態不限,例如可為分波多工器(Wavelength Division Multiplexing, WDM)。The
泵浦源5用以提供一泵浦源雷射光束L3,泵浦源雷射光束L3具有一泵浦源波長,泵浦源波長小於各訊號源波長。The
例如,泵浦源波長為λ3,若訊號源雷射光束L1的訊號源波長λ1<訊號源雷射光束L2的訊號源波長λ2,則λ3<λ1<λ2。For example, the pump source wavelength is λ3. If the signal source wavelength λ1 of the signal source laser beam L1 < the signal source wavelength λ2 of the signal source laser beam L2, then λ3<λ1<λ2.
光纖結合器11連接光纖4,光纖結合器11用以耦合訊號源雷射光束L1、L2與泵浦源雷射光束L3。The
摻雜離子增益光纖12連接光纖結合器11,由光纖結合器11將訊號源雷射光束L1、L2與泵浦源雷射光束L3傳輸至摻雜離子增益光纖12中並將每一訊號源雷射光束L1、L2的功率放大。摻雜離子增益光纖12具有一增益介質,訊號源雷射光束L1的訊號源波長λ1與訊號源雷射光束L2的訊號源波長λ2皆落在增益介質的放射頻譜的範圍中,泵浦源波長λ3則落在增益介質的吸收頻譜的範圍中。The doped
請參閱圖3所示,A1代表鐿離子吸收頻譜,E1代表鐿離子放射頻譜,當摻雜離子增益光纖12所摻雜的離子為鐿離子時,訊號源雷射光束L1的訊號源波長λ1與訊號源雷射光束L2的訊號源波長λ2皆落在增益介質的放射頻譜E1的範圍中,泵浦源波長λ3則落在增益介質的吸收頻譜A1的範圍中。Please refer to FIG. 3 , A1 represents the absorption spectrum of ytterbium ions, and E1 represents the emission spectrum of ytterbium ions. When the ions doped in the doped
請參閱圖4A、4B及圖5分別顯示鉺離子與銩離子的吸收放射頻譜,依鉺離子與銩離子的吸收放射波段選擇本發明適用之雷射訊號源1、雷射訊號源2及泵浦源5,使訊號源雷射光束L1的訊號源波長λ1與訊號源雷射光束L2的訊號源波長λ2皆落在增益介質的鉺離子放射頻譜E2、銩離子放射頻譜E4的範圍中,泵浦源波長λ3則落在增益介質的鉺離子吸收頻譜A2、銩離子吸收頻譜A4的範圍中。Please refer to FIGS. 4A , 4B and 5 to show the absorption emission spectra of erbium ions and fluorine ions, respectively. The
摻雜離子增益光纖12所摻雜的離子可為鐿離子、鉺離子、銩離子、或其他具雷同功效之離子。在圖3、4A、4B、5中,各圖的縱座標不盡相同(例如為橫截面、吸收、放射、程度等)、但橫座標皆為波長,因該等圖式僅是示意性說明摻雜離子增益光纖12所摻雜的離子不同時,要配合其吸收放射頻譜的波段選擇與之對應的不同雷射訊號源1、雷射訊號源2及泵浦源5。The ions doped in the doped
纖衣功率剝除器13連接摻雜離子增益光纖12,用以濾除通過摻雜離子增益光纖12後殘餘的泵浦源雷射光束L3的能量,並輸出經功率放大後的複數訊號源雷射光束LL1、LL2。The fiber
亦即,將雷射訊號源1、2及泵浦源5所提供的訊號源雷射光束L1、L2及泵浦源雷射光束L3輸入本發明所提供之多光束雷射源系統100後,可同時輸出功率同步放大的訊號源雷射光束LL1、LL2。That is, after the signal source laser beams L1 and L2 and the pump source laser beam L3 provided by the
請參閱圖1及圖2所示,說明利用本發明所提供之多光束雷射源系統100的多光束雷射源放大之方法,其包括下列步驟:Please refer to FIG. 1 and FIG. 2 to illustrate a method for amplifying a multi-beam laser source using the multi-beam
步驟(a):由光纖耦合器3將訊號源雷射光束L1、L2耦合至同一根光纖4中。Step (a): The signal source laser beams L1 and L2 are coupled into the same fiber 4 by the
步驟(b):由光纖結合器11將訊號源雷射光束L1、L2與泵浦源雷射光束L3耦合至摻雜離子增益光纖12中,訊號源雷射光束L1、L2在摻雜離子增益光纖12的纖核121中傳遞,且泵浦源雷射光束L3在摻雜離子增益光纖12的纖衣122中傳遞。Step (b): The signal source laser beams L1, L2 and the pump source laser beam L3 are coupled into the doped
步驟(c):泵浦源雷射光束L3首先放大最小波長的訊號源雷射光束,再利用部分經放大之最小波長的訊號源雷射光束放大次小波長的訊號源雷射光束,以此類推,直到所有的訊號源雷射光束的功率皆被放大。Step (c): The pump source laser beam L3 first amplifies the signal source laser beam of the minimum wavelength, and then uses part of the amplified signal source laser beam of the minimum wavelength to amplify the signal source laser beam of the sub-smallest wavelength, so as to And so on, until the power of all signal source laser beams are amplified.
以前述訊號源雷射光束L1的訊號源波長λ1小於訊號源雷射光束L2的訊號源波長λ2的例子而言,泵浦源雷射光束L3先放大訊號源雷射光束L1,再利用部分經放大之訊號源雷射光束L1放大次小波長的訊號源雷射光束L2,此時,雷射訊號源1可視為次泵浦源。Taking the aforementioned example that the signal source wavelength λ1 of the signal source laser beam L1 is smaller than the signal source wavelength λ2 of the signal source laser beam L2, the pump source laser beam L3 first amplifies the signal source laser beam L1, and then uses part of the The amplified signal source laser beam L1 amplifies the signal source laser beam L2 of the sub-smaller wavelength. At this time, the
步驟(d):由纖衣功率剝除器13濾除通過摻雜離子增益光纖12後殘餘的泵浦源雷射光束L3的能量,並輸出經功率放大後的訊號源雷射光束LL1、LL2。Step (d): The fiber
請參閱圖6所示,本發明所提供之一多光束雷射源系統200,其包括三雷射訊號源1、2、6、一光纖耦合器(Fiber coupler)3、泵浦源5及多波長雷射放大器(Hybrid-wavelength laser amplifier)10。多波長雷射放大器10由光纖結合器(Fiber combiner)11、摻雜離子增益光纖(Ion-doped gain fiber)12及纖衣功率剝除器(CPS)13組成。Referring to FIG. 6, a multi-beam
本實施例與圖1實施例的主要差異在於本實施例具有三個雷射訊號源1、2、6,每一雷射訊號源1、2、6可提供一訊號源雷射光束L1、L2、L4。每一訊號源雷射光束L1、L2、L4具有一訊號源波長,訊號源雷射光束L1、L2、L4的訊號源波長互不相同。此外,每一雷射訊號源1、2、4所提供的訊號源雷射光束L1、L2、L4的功率互不相同,且複數功率的大小順序係與複數訊號源波長的大小順序相反。以及,每一訊號源雷射光束L1、L2、L4具有一脈衝寬度,脈衝寬度互不相同,且脈衝寬度的大小順序係與訊號源波長的大小順序相反。The main difference between this embodiment and the embodiment of FIG. 1 is that this embodiment has three
例如,雷射訊號源1所提供的訊號源雷射光束L1具有訊號源波長λ1、功率W1及脈衝寬度PW1,雷射訊號源2所提供的訊號源雷射光束L2具有訊號源波長λ2、功率W2及脈衝寬度PW2,雷射訊號源6所提供的訊號源雷射光束L4具有訊號源波長λ4、功率W4及脈衝寬度PW4;若λ1<λ2<λ4,則W1>W2>W4,PW1>PW2>PW4。For example, the signal source laser beam L1 provided by the
光纖耦合器3用以耦合訊號源雷射光束L1、L2、L4至同一根光纖4中;光纖耦合器3的型態不限,例如可為分波多工器(Wavelength Division Multiplexing, WDM)。The
泵浦源5用以提供一泵浦源雷射光束L3,泵浦源雷射光束L3具有一泵浦源波長,泵浦源波長小於各訊號源波長。The
例如,泵浦源波長為λ3,若訊號源雷射光束L1的訊號源波長λ1<訊號源雷射光束L2的訊號源波長λ2,訊號源雷射光束L2的訊號源波長λ2<訊號源雷射光束L4的訊號源波長λ4,則λ3<λ1<λ2<λ4。For example, the pump source wavelength is λ3, if the signal source wavelength λ1 of the signal source laser beam L1 < the signal source wavelength λ2 of the signal source laser beam L2, the signal source wavelength λ2 of the signal source laser beam L2 < the signal source laser beam For the signal source wavelength λ4 of the light beam L4, λ3<λ1<λ2<λ4.
光纖結合器11連接光纖4,光纖結合器11用以耦合訊號源雷射光束L1、L2、L4與泵浦源雷射光束L3。The
摻雜離子增益光纖12連接光纖結合器11,由光纖結合器11將訊號源雷射光束L1、L2、L4與泵浦源雷射光束L3傳輸至摻雜離子增益光纖12中並將每一訊號源雷射光束L1、L2、L4的功率放大。摻雜離子增益光纖12具有一增益介質,訊號源雷射光束L1的訊號源波長λ1、訊號源雷射光束L2的訊號源波長λ2與訊號源雷射光束L4的訊號源波長λ4皆落在增益介質的放射頻譜的範圍中,泵浦源波長λ3則落在增益介質的吸收頻譜的範圍中。The doped
纖衣功率剝除器13連接摻雜離子增益光纖12,用以濾除通過摻雜離子增益光纖12後殘餘的泵浦源雷射光束L3的能量,並輸出經功率放大後的訊號源雷射光束LL1、LL2、LL4。The fiber
圖1實施例與圖6實施例說明,本發明的雷射訊號源的數量不限,可為二個或二個以上。The embodiment of FIG. 1 and the embodiment of FIG. 6 illustrate that the number of laser signal sources of the present invention is not limited, and may be two or more.
為驗證本發明之可實施性,申請人進行了實驗。請參閱下表所示實施例1:
實施例1:
於實施例1中選用了兩個雷射訊號源S1、S2,所選用的摻雜離子增益光纖為摻雜鐿離子增益光纖,其離子吸收放射頻譜如圖3所示。依照摻雜鐿離子增益光纖的吸收放射頻譜譜選用的泵浦源波長為915nm,雷射訊號源S1的訊號源波長為1030nm,放大前的功率為6.5W ;雷射訊號源S2的訊號源波長為1080nm,放大前的功率為0.4W。訊號源波長的大小順序與放大前或/及放大後的功率的大小順序相反。In Example 1, two laser signal sources S1 and S2 are selected, and the selected doped ion gain fiber is a doped ytterbium ion gain fiber, and its ion absorption radiation spectrum is shown in FIG. 3 . The wavelength of the pump source selected according to the absorption emission spectrum of the doped ytterbium ion gain fiber is 915nm, the wavelength of the signal source of the laser signal source S1 is 1030nm, and the power before amplification is 6.5W; the wavelength of the signal source of the laser signal source S2 is 1080nm, and the power before amplification is 0.4W. The magnitude order of the signal source wavelength is opposite to the magnitude order of the power before amplification or/and after amplification.
利用圖1所示本發明所提供之一多光束雷射源系統100,可將訊號源波長為1030nm的雷射訊號源S1的功率由6.5W放大到380W,訊號源波長為1080nm的雷射訊號源S2的功率由0.4W放大到20W。Using a multi-beam
接著,於實施例2中選用了三個雷射訊號源S1、S2、S3。
實施例2:
利用圖1所示本發明所提供之一多光束雷射源系統100,可將訊號源波長為1030nm的雷射訊號源S1的功率由3W放大到58W,將訊號源波長為1064nm的雷射訊號源S2的功率由0.5W放大到8W,將訊號源波長為1080nm的雷射訊號源S3的功率由0.1W放大到1.5W。同樣地,訊號源波長的大小順序與放大前或/及放大後的功率的大小順序相反Using a multi-beam
值得說明的是,若選用的雷射訊號源的波長相同時,則由於離子光學特性,只有高功率的雷射訊號源會被放大,而低功率的雷射訊號源則幾乎無放大效果。請參閱下表所示實施例3。
實施例3:
於實施例3中所選用的摻雜離子增益光纖為摻雜鐿離子增益光纖,所選用的雷射訊號源的波長皆為1030nm,但是功率不同,分別為6.5W及0.4W,經本發明所提供之多光束雷射源系統的放大作用後,6.5W的雷射訊號源S1放大為500W,功率放大倍率為76.9;至於0.4W的雷射訊號源S2放大為0.65W,功率放大倍率僅為1.6。The doped ion gain fiber selected in Example 3 is a ytterbium ion gain fiber, and the wavelengths of the selected laser signal sources are all 1030 nm, but the powers are different, 6.5W and 0.4W respectively, provided by the present invention. After the amplification of the multi-beam laser source system, the 6.5W laser signal source S1 is amplified to 500W, and the power amplification is 76.9; as for the 0.4W laser signal source S2, the amplification is 0.65W, and the power amplification is only 1.6 .
實施例3說明,於選用雷射訊號源時,各雷射訊號源的訊號源波長應互不相同以達更佳效益。
綜上所述,本發明所提供之多光束雷射源系統,利用不同增益光纖本身摻雜離子皆具有吸收及放射頻譜能階特性,在增益光纖中產生階層式激發源現象,實現同一個增益光纖放大器多泵浦現象,讓複數種不同波長(複數光束)之雷射訊號可在同一個光纖放大器中並存且同步放大,達成光纖系統簡化與光束品質提升。To sum up, the multi-beam laser source system provided by the present invention utilizes that the doped ions in different gain fibers have absorption and emission spectrum energy level characteristics, and a hierarchical excitation source phenomenon is generated in the gain fibers to achieve the same gain. The phenomenon of multi-pumping of fiber amplifiers allows multiple laser signals of different wavelengths (complex beams) to coexist and amplify synchronously in the same fiber amplifier, thereby simplifying the fiber system and improving the beam quality.
此外,本發明採全光纖式架構設計,能夠降低雷射傳輸之損失(小於5%),解決多光束雷射同軸問題(100%密合),並且能夠大幅提升雷射光束品質,將多光束雷射加工應用發揮極致,不限於雙光束。In addition, the present invention adopts an all-fiber structure design, which can reduce the loss of laser transmission (less than 5%), solve the coaxial problem of multi-beam lasers (100% tightness), and can greatly improve the quality of laser beams. Laser processing applications are maximized, not limited to dual beams.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above by the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The protection scope of the present invention shall be determined by the scope of the appended patent application.
100,200:光束雷射源系統
1,2,6,S1,S2,S3:雷射訊號源
3:光纖耦合器
4:光纖
5:泵浦源
10:多波長雷射放大器
11:光纖結合器
12:摻雜離子增益光纖
121:纖核
122:纖衣
13:纖衣功率剝除器
A1:鐿離子吸收頻譜
A2:鉺離子吸收頻譜
A4:銩離子吸收頻譜
E1:鐿離子放射頻譜
E2:鉺離子放射頻譜
E4:銩離子放射頻譜
L1,L2,L4:訊號源雷射光束
L3:泵浦源雷射光束
LL1,LL2,LL4:放大的訊號源雷射光束
PW1,PW2,PW4:脈衝寬度
W1,W2,W4:功率
λ1,λ2,λ4:訊號源波長
λ3:泵浦源波長
100,200: Beam
圖1為本發明之多光束雷射源系統之一實施例之系統示意圖。 圖2為本發明利用泵浦源放大雷射訊號源之示意圖。 圖3為鐿離子吸收放射頻譜。 圖4A為鉺離子於一頻帶的吸收頻譜。 圖4B為鉺離子於另一頻帶的吸收放射頻譜。 圖5為銩離子吸收放射頻譜。 圖6為本發明之多光束雷射源系統另一實施例之系統示意圖。 FIG. 1 is a system schematic diagram of an embodiment of the multi-beam laser source system of the present invention. FIG. 2 is a schematic diagram of amplifying a laser signal source using a pump source according to the present invention. Figure 3 shows the absorption emission spectrum of ytterbium ions. FIG. 4A shows the absorption spectrum of erbium ions in a frequency band. FIG. 4B shows the absorption emission spectrum of erbium ions in another frequency band. Figure 5 is the absorption emission spectrum of Qin ion. FIG. 6 is a system schematic diagram of another embodiment of the multi-beam laser source system of the present invention.
100:光束雷射源系統 100: Beam Laser Source System
1,2:雷射訊號源 1,2: Laser signal source
3:光纖耦合器 3: Fiber Coupler
4:光纖 4: Optical fiber
5:泵浦源 5: Pump source
10:多波長雷射放大器 10: Multi-wavelength laser amplifier
11:光纖結合器 11: Optical fiber combiner
12:摻雜離子增益光纖 12: Doped ion gain fiber
13:纖衣功率剝除器 13: Fiber Clothes Power Stripper
L1,L2:訊號源雷射光束 L1, L2: Signal source laser beam
L3:泵浦源雷射光束 L3: Pump source laser beam
LL1,LL2:放大的訊號源雷射光束 LL1,LL2: Amplified signal source laser beam
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