TW202101056A - Shape memory alloy actuators and methods thereof - Google Patents

Abstract

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

Description

Shape memory alloy actuator and method thereof

The embodiment of the present invention relates to the field of shape memory alloy systems. More specifically, the embodiments of the present invention relate to the field of shape memory alloy actuators and related methods.

The shape memory alloy ("SMA") system has, for example, a moving assembly or structure that can be used in conjunction with a camera lens element as an autofocus drive. These systems can be surrounded by a structure such as a shield. The moving assembly is supported to move on a supporting assembly by a bearing such as a plurality of balls. The flexure element formed of metal such as phosphor bronze or stainless steel has a moving plate and flexure. The flexure extends between the moving plate and the stationary support assembly and acts as a spring to enable the moving assembly to move relative to the stationary support assembly. The balls allow the moving assembly to move with little resistance. The moving assembly and the support assembly are coupled by four shape memory alloy (SMA) wires extending between the assemblies. Each of the SMA wires has an end attached to the support assembly and an opposite end attached to the mobile assembly. The suspension is driven by applying an electric drive signal to the SMA wire. However, these types of systems are plagued by system complexity, resulting in huge systems requiring a large coverage area and a large height gap. In addition, this system fails to provide a high Z-stroke range with a compact, low-distribution coverage area.

Describe SMA actuators and related methods. An embodiment of the actuator includes: a base; a plurality of buckle arms; and at least one first shape memory alloy wire coupled to a pair of buckle arms of the plurality of buckle arms. Another embodiment of the actuator includes a base and at least one piezoelectric bimorph actuator. The at least one piezoelectric bimorph actuator includes a shape memory alloy material. The bimorph actuator is attached to the base.

Other features and advantages of the embodiments of the present invention will become apparent from the accompanying drawings and the following detailed description.

Cross reference of related applications

This application claims the rights and interests of U.S. Patent Application No. 16/775,207 filed on January 28, 2020, and further claims the rights and interests of U.S. Provisional Patent Application No. 62/826,106 filed on March 29, 2019. The entire contents of such cases are incorporated into this article by reference.

An embodiment of an SMA actuator is described herein, which includes a compact footprint and provides a high actuation height, such as movement in the positive z-axis direction (z direction), referred to herein as the z-stroke. Examples of SMA actuators include an SMA buckle actuator and an SMA bimorph actuator. SMA actuators can be used in many applications (including but not limited to a lens assembly as an autofocus actuator, a microfluidic pump, a sensor shift, optical image stabilization, optical zoom assembly) in mechanical The ground hits two surfaces to produce the vibration sensation commonly found in tactile feedback sensors and devices and other systems in which actuators are used. For example, the actuator embodiments described herein can be used as a tactile feedback actuator for use in a mobile phone or wearable device that is configured to provide an alert, Notifications, warnings, touch areas or press buttons to respond. In addition, more than one SMA actuator can be used in a system to achieve a larger stroke.

For various embodiments, the SMA actuator has a z-stroke greater than 0.4 millimeters. Furthermore, for various embodiments, when the SMA actuator is in its initial, non-actuated position, the SMA actuator has a height of 2.2 mm or less in the z direction. Embodiments of an SMA actuator configured as an autofocus actuator in a lens assembly can have a coverage area that is only 3 mm larger than the inner diameter ("ID") of the lens. According to various embodiments, the SMA actuator may have a wider coverage area in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the footprint of an SMA actuator is 0.5 mm larger in one direction, for example, the length of the SMA actuator is 0.5 mm larger than the width.

Figure 1a shows a lens assembly including an SMA actuator configured as a buckle actuator according to an embodiment. Figure 1b shows an SMA actuator configured as a buckle actuator according to an embodiment. The buckle actuator 102 is coupled to a base 101. As shown in Figure 1b, the SMA wire 100 is attached to the buckle actuator 102 so that when the SMA wire 100 is actuated and contracted, this causes the buckle actuator 102 to buckle, which causes each buckle At least the central portion 104 of the actuator 102 moves in the z-stroke direction (for example, the positive z-direction), as indicated by the arrow 108. According to some embodiments, the SMA wire 100 is activated when current is supplied to one end of the SMA wire 100 through a wire holder such as a crimp structure 106. The current flows through the SMA wire 100, thereby heating the SMA wire 100 due to the inherent resistance of the SMA material from which the SMA wire 100 is made. The other side of the SMA wire 100 has a wire holder, such as a crimp structure 106 connected to the SMA wire 100 to ground the circuit. Heating the SMA wire 100 to a temperature sufficient to cause the unique material property to change from a martensite crystal structure to an austenite crystal structure, which causes a length of the wire to change. Changing the current changes the temperature and therefore the length of the wire, which is used to activate and deactivate the actuator to control the movement of the actuator in at least the z direction. Those familiar with this technique will understand that other techniques can be used to provide current to an SMA wire.

Figure 2 shows an SMA actuator configured as an SMA bimorph actuator according to an embodiment. As shown in FIG. 2, the SMA actuator includes a bimorph actuator 202 coupled to a base 204. The piezoelectric bimorph actuator 202 includes an SMA tape 206. The bimorph actuator 202 is configured to move at least the unfixed end of the bimorph actuator 202 in the z-stroke direction 208 as the SMA band 206 contracts.

FIG. 3 shows an exploded view of an autofocus assembly including an SMA actuator according to an embodiment. As shown, an SMA actuator 302 is configured as a buckle actuator according to the embodiments described herein. The autofocus assembly also includes an optical image stabilizer ("OIS") 304, which is configured to hold one or more optical lenses, a lens holder 306, and a return spring 308 using technologies including those known in the art. , A vertical sliding bearing 310 and a guide cover 312. When the SMA wire uses a technique including the techniques described herein to actuate and pull and buckle the buckle actuator 302, the SMA actuator 302 is configured to follow the SMA actuator 302 in the z-stroke direction ( For example, the positive z-axis direction) moves and slides against the vertical sliding bearing 310. The return spring 308 is configured to apply a force on the lens holder 306 in a direction opposite to the z-stroke direction using techniques including techniques known in the art. According to various embodiments, the return spring 308 is configured to move the lens holder 306 in the opposite direction of the z-stroke direction when the tension in the SMA wire decreases as the SMA wire is deactivated. When the tension in the SMA wire decreases to the initial value, the lens holder 306 moves to the lowest height in the z-stroke direction. FIG. 4 shows an autofocus assembly including an SMA wire actuator according to an embodiment shown in FIG. 3.

FIG. 5 shows an SMA wire actuator including a sensor according to an embodiment. For various embodiments, the sensor 502 is configured to measure the movement of the SMA actuator in the z direction or the movement of a component that the SMA actuator is moving using techniques including techniques known in the art. The SMA actuator includes one or more buckle actuators 506 that are configured to actuate using one or more of the SMA wires 508 similar to those described herein. For example, in the autofocus assembly described with reference to FIG. 4, the sensor is configured to determine the movement of the lens holder 306 in the z-direction 504 from an initial position using techniques including techniques known in the art. the amount. According to some embodiments, the sensor is a tunnel magnetoresistive ("TMR") sensor.

6 shows a top view and a side view of an SMA actuator 602 configured as a buckle actuator according to an embodiment. The SMA actuator 602 is equipped with a lens holder 604. FIG. 7 shows a side view of a section of the SMA actuator 602 according to the embodiment shown in FIG. 6. According to the embodiment shown in FIG. 7, the SMA actuator 602 includes a sliding base 702. According to an embodiment, the sliding base 702 is formed of a metal such as stainless steel using a technique including techniques known in the art. However, those skilled in the art will understand that other materials may be used to form the sliding base 702. In addition, according to some embodiments, the sliding base 702 has a spring arm 612 coupled with the SMA actuator 602. According to various embodiments, the spring arm 612 is configured to serve two functions. The first function is to help push an object such as a lens holder 604 into the vertical sliding surface of a guide cover. For this example, the spring arm 612 preloads the lens holder 604 upward against this surface to ensure that the lens will not tilt during actuation. For some embodiments, the vertical sliding surface 708 is configured to mate with the guide cover. The second function of the spring arm 612 is to help pull the SMA actuator 602 downward in the z-negative direction after the SMA wire 608 moves the SMA actuator 602 in the z-stroke direction (ie, the z-positive direction). Therefore, when the SMA wire 608 is actuated, it is contracted to move the SMA actuator 602 in the z-stroke direction and when the SMA wire is deactivated, the spring arm 612 is configured to move in the opposite direction of the z-stroke direction SMA actuator 602.

The SMA actuator 602 also includes a buckle actuator 710. For various embodiments, the buckle actuator 710 is formed of metal such as stainless steel. In addition, the buckle actuator 710 includes a buckle arm 610 and one or more wire holders 606. According to the embodiment shown in FIGS. 6 and 7, the buckle actuator 710 includes four wire holders 606. The four wire holders 606 are each configured to receive one end of an SMA wire 608 and hold the end of the SMA wire 608 so that the SMA wire 608 is attached to the buckle actuator 710. For various embodiments, the four wire holders 606 are crimping objects, which are configured to clamp down on a portion of the SMA wire 608 to attach the wire to the crimping object. Those familiar with the art will understand that the SMA wire 608 can be attached to the wire holder 606 using techniques known in the art, including but not limited to adhesive, solder, and mechanical attachment. The smart memory alloy ("SMA") wire 608 extends between the pair of wire holders 606 so that the buckle arm 610 of the buckle actuator 710 is configured to move when the SMA wire 608 is actuated, which results in The pair of wire holders 606 are pulled closer. According to various embodiments, when a current is applied to the SMA wire 608, the SMA wire 608 is electrically actuated to move and control the position of the buckle arm 610. When the current is removed or falls below a threshold, the activation of the SMA wire 608 is deactivated. This causes the pair or wire holders 606 to move separately and the buckle arm 610 moves in the opposite direction to when the SMA wire 608 is actuated. According to various embodiments, when the SMA wire is in its initial position and is deactivated, the buckle arm 610 is configured to have an initial angle of 5 degrees relative to the sliding base 702. Moreover, according to various embodiments, the buckle arm 610 is configured to have an angle of 10 to 12 degrees with respect to the sliding base 702 during the full stroke or when the SMA wire is fully actuated.

According to the embodiments shown in FIGS. 6 and 7, the SMA actuator 602 also includes a sliding bearing 706 configured between the sliding base 702 and the wire holder 606. The sliding bearing 706 is configured to minimize any friction between the sliding base 702 and a buckle arm 610 and/or a wire retainer 606. For some embodiments, the sliding bearing is attached to the sliding bearing 706. According to various embodiments, the sliding bearing is formed of polyoxymethylene ("POM"). Those skilled in the art will understand that other structures can be used to reduce any friction between the buckle actuator and the base.

According to various embodiments, the sliding base 702 is configured to couple with an assembly base 704 such as an autofocus base. According to some embodiments, the actuator base 704 includes an etching pad. When the SMA actuator 602 is part of an assembly such as an autofocus assembly, this etched pad can be used to provide clearance for wires and crimps.

8 shows multiple views of an embodiment of a buckle actuator 802 with respect to an x-axis, a y-axis, and a z-axis. As oriented in Figure 8, the buckle arm 804 is configured to move on the z-axis when the SMA wire is actuated and de-actuated as described herein. According to the embodiment illustrated in FIG. 8, the buckle arms 804 are coupled to each other through a central part such as a hammock part 806. According to various embodiments, a hammock portion 806 is configured to support an object acted on by a buckle actuator (for example, a lens holder is moved by a buckle actuator using techniques including the techniques described herein) ) Part. According to some embodiments, a hammock portion 806 is configured to provide lateral rigidity to the buckle actuator during actuation. For other embodiments, a buckle actuator does not include a hammock portion 806. According to these embodiments, the buckle arm is configured to act on an object to move the object. For example, the buckle arm is configured to act directly on a feature of a lens holder to push up the lens holder.

Figure 9 shows an SMA actuator configured as an SMA bimorph actuator according to an embodiment. The SMA bimorph actuator includes the bimorph actuator 902, including the bimorph actuator described herein. According to the embodiment shown in FIG. 9, one end 906 of each of the piezoelectric bimorph actuators 902 is attached to a base 908. According to some embodiments, the end 906 is welded to the base 908. However, those skilled in the art will understand that another technique may be used to attach the end 906 to the base 908. Figure 9 also shows a lens holder 904 that is configured such that the bimorph actuator 902 is configured to curl in the z-direction and lift the holder 904 in the z-axis direction when actuated. For some embodiments, a return spring is used to push the bimorph actuator 902 back to an initial position. A return spring can be configured as described herein to assist in pushing the bimorph actuator down to its initial, deactivated position. Due to the small footprint of the bimorph actuator, it is possible to fabricate an SMA actuator with a reduced footprint compared to current actuator technology.

FIG. 10 shows a cross-sectional view of an autofocus assembly including an SMA actuator including a position sensor, such as a TMR sensor, according to an embodiment. The autofocus assembly 1002 includes a position sensor 1004 attached to a moving spring 1006, and one of the autofocus assemblies attached to an SMA actuator including an SMA actuator such as described herein A magnet 1008 is one of the lens holder 1010. The position sensor 1004 is configured to use a technique including techniques known in the art, based on a distance of the magnet 1008 from the position sensor 1004 to determine the movement of the lens holder 1010 in the z direction 1005 from an initial position The amount of movement. According to some embodiments, the position sensor 1004 is electrically coupled with a controller or a processor (such as a central processing unit) using a plurality of electrical traces on a spring arm of a moving spring 1006 of an optical image stabilization assembly Pick up.

11a to 11c show views of piezoelectric bimorph actuators according to some embodiments. According to various embodiments, a bimorph actuator 1102 includes a beam 1104 and one or more SMA materials 1106, such as an SMA tape 1106b (e.g., as the embodiment according to FIG. 11b includes an SMA tape, a double A piezoelectric chip actuator is shown in a perspective view) or an SMA wire 1106a (for example, as shown in a cross section of a bimorph actuator including an SMA wire according to the embodiment of FIG. 11a) ). The SMA material 1106 is attached to the beam 1104 using techniques including the techniques described herein. According to some embodiments, the SMA material 1106 is attached to a beam 1104 using an adhesive film material 1108. For various embodiments, the end of the SMA material 1106 is electrically and mechanically coupled to the contact 1110, and the contact 1110 is configured to supply current to the SMA material 1106 using techniques including techniques known in the art. According to various embodiments, the contact 1110 (eg, as shown in FIG. 11a and FIG. 11b) is a gold-plated copper pad. According to an embodiment, a bimorph actuator 1102 having a length of approximately 1 millimeter is configured to generate a large stroke and 50 millinewtons ("mN") thrust is used as part of a lens assembly, for example As shown in Figure 11c. According to some embodiments, the use of a bimorph actuator 1102 with a length greater than 1 millimeter will produce a larger stroke but smaller stroke than a bimorph actuator 1102 with a length of 1 millimeter. force. For one embodiment, a bimorph actuator 1102 includes a 20-micron thick SMA material 1106, a 20-micron thick insulator 1112 (such as a polyimide insulator), and a 30-micron thick stainless steel beam 1104 or alkali metal. Various embodiments include a second insulator 1114, and the second insulator 1114 is disposed between a contact layer including a contact 1110 and the SMA material 1106. According to some embodiments, the second insulator 1114 is configured to insulate the SMA material 1106 from the part of the contact layer that is not used as the contact 1110. For some embodiments, the second insulator 1114 is a surface coating, such as a polyimide insulator. Those familiar with this technology will understand that other sizes and materials can be used to meet the desired design characteristics.

FIG. 12 shows a view of an embodiment of a piezoelectric bimorph actuator according to an embodiment. The embodiment shown in FIG. 12 includes a center feed 1204 for applying power. Power is supplied at the center of the SMA material 1202 (wire or tape), such as the SMA material described herein. The end of the SMA material 1202 is grounded at the terminal pad 1203 as a return path to the beam 1206 or alkali metal. The terminal pad 1203 is electrically isolated from the rest of the contact layer 1214. According to an embodiment, a beam 1206 or an alkali metal along the entire length of the SMA material 1202 is very close to the SMA material 1202 (such as an SMA wire) when the current is turned off (ie, the bimorph actuator is deactivated) Provides faster line cooling. The result is a faster line to cancel the activation and actuator response time. The heat distribution of SMA wire or tape is improved. For example, the heat distribution is more uniform so that a higher total current can be reliably delivered to the wire. Without a uniform heat sink, parts of the wire (such as a central area) may overheat and be damaged, so a reduced current and reduced movement are required to operate reliably. The center feed 1204 provides the benefits of faster wire start/actuation of the SMA material 1202 (faster heating), reduced power consumption (lower resistance path length) and faster response time. This allows for a faster actuator movement and the ability to operate at a higher frequency of movement.

As shown in FIG. 12, the beam 1206 includes a center metal 1208 that is isolated from the rest of the beam 1206 to form a center feed 1204. An insulator 1210, such as the insulator described herein, is placed above the beam 1206. The insulator 1210 is configured to have one or more openings or through holes 1212 to provide electrical paths to the beam 1206, for example to couple to a ground section 1214b of the contact layer, and to provide contact with the center metal 1208 to form a center feed Electricity 1204. According to some embodiments, a contact layer 1214 (such as the contact layer described herein) includes a power section 1214a and a ground section 1214b to connect a power supply contact 1216 and a ground contact 1218 The actuation/control signal is provided to the bimorph actuator. A surface coating 1220 (such as the surface coating described herein) is disposed above the contact layer 1214 to electrically isolate the contact layer, except that the electrically coupled portion of the contact layer 1214 (for example, a Or multiple contacts).

FIG. 13 shows a cross section of one end of a piezoelectric bimorph actuator according to an embodiment as shown in FIG. 12. As described above, the terminal pad 1203 is electrically isolated from the rest of the contact layer 1214 by a gap 1222 formed between the terminal pad 1203 and the contact layer 1214. According to some embodiments, the gap is formed using etching techniques including etching techniques known in the art. The terminal pad 1203 includes a via section 1224 configured to electrically couple the terminal pad 1203 and the beam 1206. The through hole section 1224 is formed in a through hole 1212 formed in the insulator 1210. The SMA material 1202 is electrically coupled to the terminal pad 1213. The SMA material 1202 can be electrically coupled to the terminal pad 1213 using techniques including but not limited to solder, resistance welding, laser welding, and direct plating.

FIG. 14 shows a center feeding section of a piezoelectric bimorph actuator according to an embodiment shown in FIG. 12. The center feeder 1204 is electrically coupled to a power supply through the contact layer 1214 and is electrically and thermally coupled to the central metal 1208 through a through hole section 1226 in the center feeder 1204, the through hole section 1226 is formed in A through hole 1212 is formed in the insulator 1210.

The actuator described herein can be used to form an actuator assembly using multiple buckles and/or multiple piezoelectric bimorph actuators. According to an embodiment, the actuators can be stacked on each other to increase the achievable stroke distance.

15 shows an exploded view of an SMA actuator including one of two buckle actuators according to an embodiment. According to the embodiments described herein, the two buckle actuators 1302, 1304 are configured relative to each other to use their equal motions to face each other. For various embodiments, the two buckle actuators 1302, 1304 are configured to move in an inverse relationship with each other to position a lens carrier 1306. For example, the first buckle actuator 1302 is configured to receive an inverse power signal sent to a power signal of the second buckle actuator 1304.

FIG. 16 shows an SMA actuator including one of two buckle actuators according to an embodiment. The buckle actuators 1302, 1304 are configured such that the buckle arms 1310, 1312 of each buckle actuator 1302, 1304 face each other and the sliding bases 1314, 1316 of each buckle actuator 1302, 1304 are attached to the The outer surface of one of the two buckle actuators. According to various embodiments, a hammock portion 1308 of each SMA actuator 1302, 1304 is configured to support an object acted on by one or more buckle actuators 1302, 1304 (for example, by the buckle The actuator uses techniques including the techniques described herein to move a part of a lens carrier 1306).

FIG. 17 shows a side view of an SMA actuator including one of two buckle actuators according to an embodiment, which is shown to cause movement in a positive z direction or in an upward direction such as one of a lens holder The direction of the SMA line 1318 of the object.

FIG. 18 shows a side view of an SMA actuator including one of two buckle actuators according to an embodiment, which is shown to cause movement in a negative z direction or in a downward direction such as one of a lens holder The direction of the SMA line 1318 of the object.

19 shows an exploded view of an assembly including an SMA actuator including two buckle actuators according to an embodiment. The buckle actuators 1902, 1904 are configured such that the buckle arms 1910, 1912 of each buckle actuator 1902, 1904 are tied to the outer surface of one of the two buckle actuators, and each buckle actuator 1902 , The sliding bases 1914 and 1916 of 1904 face each other. According to various embodiments, a hammock portion 1908 of each SMA actuator 1902, 1904 is configured to support an object acted on by one or more buckle actuators 1902, 1904 (for example, by the buckle The actuator uses a technique including the technique described herein to move a part of a lens carrier 1906). For some embodiments, the SMA actuator includes a base portion 1918 configured to receive the second buckle actuator 1904. The SMA actuator may also include a cover portion 1920. 20 illustrates an SMA actuator including two buckle actuators according to an embodiment, the SMA actuator including a base part and a cover part.

Figure 21 shows an SMA actuator including one of two buckle actuators according to an embodiment. For some embodiments, the buckle actuators 1902, 1904 are configured relative to each other such that the hammock portion 1908 of the first buckle actuator 1902 rotates about 90 degrees from the hammock portion of the second buckle actuator 1904. The 90-degree configuration realizes the pitch and roll rotation of an object such as a lens holder 1906. This provides better control of the movement of the lens holder 1906. For each embodiment, a differential power signal is applied to the SMA wire of each buckle actuator pair, which provides pitch and roll rotation of the lens holder for tilt OIS movement.

The embodiment of the SMA actuator containing two buckle actuators eliminates the need to have a return spring. When using SMA wire resistance for position feedback, the use of two buckle actuators can improve/reduce hysteresis. Compared with the SMA actuator that includes a return spring, the reaction force SMA actuator that includes two buckle actuators assists in more accurate position control due to lower hysteresis. For some embodiments, such as the embodiment shown in FIG. 22, the SMA actuator including two buckle actuators 2202, 2204 uses differential power to transfer the left SMA wire 2218a of each buckle actuator 2202, 2204 And right SMA wire 2218b provides 2-axis tilt. For example, a left SMA wire 2218a is activated with a higher power than a right SMA wire 2218b. This causes the left side of the lens holder 2206 to move down and the right side to move up (tilt). For some embodiments, the SMA wires of the first buckle actuator 2202 are kept at equal power to serve as a fulcrum for differentially pushing the SMA wires 2218a, 2218b to cause tilting motion. Reverse the power signal applied to the SMA wire, such as applying equal power to the SMA wire of the second buckle actuator 2202 and applying differential power to the left SMA wire 2218a and right SMA wire of the second buckle actuator 2204 2218b causes the lens holder 2206 to tilt in one of the other directions. This provides the ability to tilt an object such as a lens holder on any axis of motion, or can detune any tilt between the lens and the sensor to obtain a good dynamic tilt, which results in better picture quality across all pixels .

FIG. 23 shows an SMA actuator including two buckle actuators and a coupler according to an embodiment. The SMA actuator includes two buckle actuators, such as the buckle actuator described herein. A first buckle actuator 2302 is configured to couple with a second buckle actuator 2304 using a coupler such as a coupler ring 2305. The buckle actuators 2302, 2304 are arranged relative to each other such that the hammock portion 2308 of the first buckle actuator 2302 rotates about 90 degrees from the hammock portion 2309 of the second buckle actuator 2304. A payload for moving (such as a lens or lens assembly) is attached to a lens carrier 2306 configured to be placed on a sliding base of the first buckle actuator 2302.

For various embodiments, equal power can be applied to the SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304. This can result in maximizing the z-stroke of the SMA actuator in the positive z direction. For some embodiments, the stroke of the SMA actuator may have a z-stroke equal to or greater than twice the stroke of other SMA actuators including two buckle actuators. For some embodiments, when the power signal is removed from the SMA actuator, an additional spring can be added to push against the two buckles to assist in pushing back the actuator assembly and the effective load. The same and opposite power signals can be applied to the SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304. This enables the SMA actuator to move in the positive z-axis direction by a buckle actuator and move in the negative z-direction by a buckle actuator, which realizes accurate control of the position of the SMA actuator. In addition, equal and opposite power signals (differential power signals) can be applied to the left and right SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304, so as to make a lens holder 2306 An object is tilted on at least one of two axes.

An SMA actuator including two buckle actuators and a coupler (such as the SMA actuator shown in FIG. 23) can be combined with an additional buckle actuator and buckle actuator Coupled to achieve a desired stroke greater than the stroke of a single SMA actuator.

24 shows an exploded view of an SMA system including an SMA actuator including a buckle actuator having a laminated hammock according to an embodiment. As described herein, for some embodiments, the SMA system is configured to incorporate one or more camera lens elements for use as an autofocus driver. As shown in Figure 24, the SMA system includes a return spring 2403. The return spring 2403 is configured according to various embodiments so that when the tension in the SMA wire 2408 decreases as the actuation of the SMA wire is deactivated, in the z direction A lens holder 2406 is moved in the opposite direction. For some embodiments, the SMA system includes a housing 2409 configured to receive a return spring 2403 and act on a sliding bearing to guide the lens holder in the z-stroke direction. The housing 2409 is also configured to be placed on the buckle actuator 2402. The buckle actuator 2402 includes a sliding base 2401 similar to the sliding base described herein. The buckle actuator 2402 includes a buckle arm 2404 coupled to a hammock portion, such as a laminated hammock 2406 formed of a laminate. The buckle actuator 2402 also includes an SMA wire attachment structure, such as a laminated forming crimp connector 2412.

As shown in FIG. 24, the sliding base 2401 is mounted on an optional adapter plate 2414. The adapter plate is configured to mate the SMA system or buckle actuator 2402 with another system, such as an OIS, additional SMA system, or other components. FIG. 25 illustrates an SMA system 2501 including an SMA actuator including a buckle actuator 2402 having a laminated hammock according to an embodiment.

Figure 26 illustrates a buckle actuator including a laminated hammock according to an embodiment. The buckle actuator 2402 includes a buckle arm 2404. The buckle arm 2404 is configured to move on the z-axis when the SMA wire 2412 is actuated and de-actuated as described herein. The SMA wire 2408 is attached to the buckle actuator using a laminate forming crimp connector 2412. According to the embodiment shown in FIG. 26, the buckle arms 2404 are coupled to each other through a central part of a laminated hammock 2406, for example. According to various embodiments, a laminated hammock 2406 is configured to support an object acted by the buckle actuator (for example, one of the objects moved by the buckle actuator using techniques including the techniques described herein) Lens bracket) part.

Figure 27 shows a laminated hammock of an SMA actuator according to an embodiment. For some embodiments, the material of the laminated hammock 2406 is a low rigidity material so it does not resist the actuation movement. For example, the laminated hammock 2406 is formed by using a copper layer disposed on a first polyimide layer and a second polyimide layer disposed on the copper. For some embodiments, deposition and etching techniques including deposition and etching techniques known in the art are used to form a laminated hammock 2406 on the buckle arm 2404. For other embodiments, the laminated hammock 2406 is formed separately from the buckle arm 2404 and attached to the buckle arm 2404 using techniques including welding, adhesive, and other techniques known in the art. For various embodiments, glue or other adhesive is used on the laminated hammock 2406 to ensure that the buckle arm 2404 remains in a position relative to a lens holder.

Fig. 28 illustrates a laminate of an SMA actuator according to an embodiment to form a crimp connection piece. The laminated formation crimp connector 2412 is configured to attach an SMA wire 2408 to the buckle actuator and create a circuit joint with the SMA wire 2408. For various embodiments, laminating and forming the crimp connector 2412 includes a laminate formed by one or more layers of an insulator and one or more conductive layers formed on a crimp.

For example, a polyimide layer is placed on at least a part of the stainless steel portion forming a crimp 2413. A conductive layer such as copper is then placed on the polyimide layer, which is electrically coupled to one or more signal traces 2415 placed on the buckle actuator. Deformation of the crimping object to contact the SMA wire also makes the SMA wire electrically contact the conductive layer. Therefore, the conductive layer with one or more signal traces is used to apply power signals to the SMA wire using techniques including the techniques described herein. For some embodiments, a second polyimide layer is formed in the area where the conductive layer above the conductive layer will not contact the SMA wire. For some embodiments, a deposition and etching technique including deposition and etching techniques known in the art is used to form a crimp connection 2412 by laminating on a crimp 2413. For other embodiments, the crimping object connector 2412 and one or more electrical traces are formed separately from the crimping object 2413 and the buckle actuator by laminating and forming and including welding, adhesive, and those known in the art Other technologies are attached to the crimp 2412 and buckle actuator.

Figure 29 shows an SMA actuator including a buckle actuator with a laminated hammock. As shown in Figure 29, when a power signal is applied, the SMA wire shrinks or shortens to move the buckle arm and the laminated hammock in the positive z-axis direction. The laminated hammock in contact with an object then moves that object in the positive z-axis direction, such as a lens holder. When the power signal decreases or is removed, the SMA wire extends and moves the buckle arm and laminated hammock in a negative z-axis direction.

Figure 30 shows an exploded view of an SMA system including an SMA actuator including a buckle actuator according to an embodiment. As described herein, for some embodiments, the SMA system is configured to incorporate one or more camera lens elements for use as an autofocus driver. As shown in Figure 30, the SMA system includes a return spring 3003, which is configured according to various embodiments to move in the z-stroke direction when the tension in the SMA wire 3008 decreases as the SMA wire is deactivated Move a lens holder 3005 in the opposite direction. For some embodiments, the SMA system includes a reinforcement 3000 disposed on the return spring 3003. For some embodiments, the SMA system includes a housing 3009 formed from two parts configured to receive a return spring 3003 and act on a sliding bearing to guide the lens carrier in the z-stroke direction. The housing 3009 is also configured to be placed on the buckle actuator 3002. The buckle actuator 3002 includes a sliding base 3001 similar to a sliding base described herein. The sliding base 3001 is formed of two parts. The sliding base 3001 is split to electrically isolate the two sides (for example, one side is grounded, and the other side is a power source), because according to some embodiments, current flows through the sliding base 3001 to the line.

The buckle actuator 3002 includes a buckle arm 3004. Each pair of buckle actuator 3002 is formed on a separate part of the buckle actuator 3002. The buckle actuator 3002 also includes an SMA wire attachment structure, such as a resistance welding wire crimp 3012. The SMA system optionally includes a flexible circuit 3020 for electrically coupling the SMA wire 3008 to one or more control circuits.

As shown in FIG. 30, the sliding base 3001 is mounted on an optional adapter plate 3014. The adapter plate is configured to mate the SMA system or buckle actuator 3002 with another system (such as an OIS, additional SMA system, or other components). FIG. 31 shows an SMA system 3101 including an SMA actuator including a buckle actuator 3002 according to an embodiment.

Figure 32 shows an SMA actuator including a buckle actuator according to an embodiment. The buckle actuator 3002 includes a buckle arm 3004. The buckle arm 3004 is configured to move on the z-axis when the SMA wire 3012 is actuated and de-actuated as described herein. The SMA wire 2408 is attached to the resistance welding wire crimp 3012. According to the embodiment depicted in FIG. 32, the buckle arm 3004 is configured to cooperate with an object such as a lens holder without using a double yoke to capture a central part of the joint.

Figure 33 illustrates a dual yoke capture joint of an SMA actuator to a buckle arm according to an embodiment. Figure 33 also shows the electroplated pads used to attach the optional flex circuit to the sliding base. For some embodiments, the plating pads are formed using gold. FIG. 34 illustrates a resistance welding crimp of an SMA actuator according to an embodiment, the SMA actuator is used to attach an SMA wire to the buckle actuator. For some embodiments, glue or adhesive can also be placed on the top of the weld to assist in mechanical strength and to relieve fatigue strain relief during operation and impact loading.

Figure 35 shows an SMA actuator including a buckle actuator with a dual yoke capture joint. As shown in Figure 35, when a power signal is applied, the SMA wire contracts or shortens to move the buckle arm in the positive z direction. The double yoke capture joint contacts an object, and then moves that object in the positive z direction, such as a lens holder. When the power signal decreases or disappears, the SMA wire extends and moves the buckle arm in a negative z-axis direction. This yoke capture feature ensures that the buckle arm remains in the correct position relative to the lens holder.

Fig. 36 shows an SMA bimorph liquid lens according to an embodiment. The SMA bimorph liquid lens 3501 includes a liquid lens subassembly 3502, a housing 3504, and a circuit with an SMA actuator 3506. For various embodiments, the SMA actuator includes 4 bimorph actuators 3508, such as the embodiments described herein. The bimorph actuator 3508 is configured to push a shaped ring 3510 positioned on a flexible diaphragm 3512. The ring wraps around the diaphragm 3512/liquid 3514, thereby changing the light path through the diaphragm 3512/liquid 3514. The integral containment ring 3516 is used to contain the liquid 3514 between the diaphragm 3512 and the lens 3518. The equal force from the bimorph actuator changes the focus of the image in the Z direction (normal to the lens), which allows it to be used as an autofocus device. According to some embodiments, the differential force from the bimorph actuator 3508 can move the light in the X and Y axis directions, which allows it to be used as an optical image stabilizer. By appropriately controlling each actuator, both OIS function and AF function can be achieved at the same time. For some embodiments, 3 actuators are used. The circuit 3506 with an SMA actuator includes a control signal to activate one or more contacts 3520 of the SMA actuator. According to some embodiments that include 4 SMA actuators, the circuit 3506 with SMA actuators includes 4 power circuit control contacts for each SMA actuator and a common reset contact.

Fig. 37 shows a see-through SMA bimorph liquid lens according to an embodiment. FIG. 38 shows a cross-section and a bottom view of an SMA piezoelectric bimorph liquid lens according to an embodiment.

FIG. 39 shows an SMA system including an SMA actuator 3902 with a bimorph actuator according to an embodiment. SMA actuator 3902 includes 4 piezoelectric bimorph actuators using the technology described herein. Two of the bimorph actuators are configured as positive z-stroke actuators 3904 and the other two are configured as negative z-stroke actuators 3906, as shown in FIG. 40, which is depicted in FIG. 40 An SMA actuator 3902 with a bimorph actuator according to an embodiment is shown. The relative actuators 3906, 3904 are configured to control movement in two directions over the entire stroke range. This provides the ability to tune the control code to compensate for tilt. For each embodiment, the two SMA wires 3908 attached to the top of the component achieve a positive z-stroke displacement. The two SMA wires attached to the bottom of a component achieve negative z-stroke displacement. For some embodiments, tabs used to bond an object such as a lens holder 3910 are used to attach each bimorph actuator to the object. The SMA system includes a top spring 3912 that is configured to provide stability of the lens holder 3910 on an axis perpendicular to the z-stroke axis (for example, in the direction of the x-axis and y-axis). In addition, a top spacer 3914 is configured to be placed between the top spring 3912 and the SMA actuator 3902. A bottom spacer 3916 is disposed between the SMA actuator 3902 and a bottom spring 3918. The bottom spring 3918 is configured to provide stability of the lens holder 3910 on an axis perpendicular to the z-stroke axis (for example, in the direction of the x-axis and y-axis). The bottom spring 3918 is configured to rest on a base 3920, such as the base described herein.

Fig. 41 shows the length 4102 of a piezoelectric bimorph actuator and the position of a bonding pad 4104 for an SMA wire 4206 to extend the wire length beyond the piezoelectric bimorph actuator. Lines longer than piezoelectric bimorph actuators are used to increase stroke and force. Therefore, the extension length 4108 of the SMA wire 4206 beyond the piezoelectric bimorph actuator 4103 is used to set the stroke and force of the bimorph actuator 4103.

FIG. 42 shows an exploded view of an SMA system including an SMA bimorph actuator 4202 according to an embodiment. According to various embodiments, the SMA system is configured to use separate metal materials and non-conductive adhesives to create one or more circuits to independently power the SMA wires. Some embodiments have no AF size effect and include 4 bimorph actuators, such as the bimorph actuators described herein. Two of the bimorph actuators are configured as positive z-stroke actuators and the other two are configured as negative z-stroke actuators. Figure 43 shows an exploded view of a subsection of an SMA actuator according to an embodiment. This subsection includes a negative actuator signal connector 4302, a base 4304 with a bimorph actuator 4306. The negative actuator signal connector 4302 includes a wire bond pad 4308 for connecting an SMA wire to a bimorph actuator 4306 using techniques including the techniques described herein. An adhesive layer 4310 is used to attach the negative actuator signal connector 4302 to the base 4304. This subsection also includes a positive actuator signal connector 4314 with a wire bond pad 4316, which is used to connect a bimorph using a technique including the techniques described herein One of the actuators 4306 is an SMA wire 4312. An adhesive layer 4318 is used to attach the positive actuator signal connector 4314 to the base 4304. Each of the base 4304, the negative actuator signal connector 4302, and the positive actuator signal connector 4314 is formed of metal, such as stainless steel. The connection pads 4322 on each of the base 4304, the negative actuator signal connector 4302, and the positive actuator signal connector 4314 are configured to electrically couple the control signal and ground to use the technology including the techniques described herein The technology actuates the bimorph actuator 4306. For some embodiments, the connection pads 4322 are gold-plated. Figure 44 shows a subsection of an SMA actuator according to an embodiment. For some embodiments, gold-plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. In addition, formed wire bonding pads are used for signal connectors to electrically couple SMA wires for power signals.

Fig. 45 shows a 5-axis sensor displacement system according to an embodiment. The 5-axis sensor shift system is configured to move an object, such as an image sensor, in 5-axis relative to one or more lenses. This includes X/Y/Z axis translation and trim/roll tilt. Optionally, the system is configured to use only 4 axes, and X/Y axis translation and pitch/roll tilt together with a separate AF on the top perform Z movement. Other embodiments include a 5-axis sensor shift system configured to move one or more lenses relative to an image sensor. For some embodiments, the static lens stack is installed on the top cover and inserted into the ID (not touching the orange moving bracket inside).

Fig. 46 shows an exploded view of a 5-axis sensor displacement system according to an embodiment. The 5-axis sensor shift system includes 2 circuit components: a flexure sensor circuit 4602, a bimorph actuator circuit 4604; and a technology including the technology described in this article is built to the bimorph 8 to 12 bimorph actuators 4606 on the circuit assembly. The 5-axis sensor displacement system includes a moving bracket 4608 and a housing 4610 configured to hold one or more lenses. According to an embodiment, the bimorph actuator circuit 4604 includes 8 to 12 SMA actuators, such as the SMA actuators described herein. The SMA actuator is configured to move the moving carriage 4608 on 5-axis similar to other 5-axis systems described herein, such as in the x direction, in the y direction, in the z direction, pitch, and roll.

FIG. 47 shows an SMA actuator including a bimorph actuator integrated into the circuit for all movements according to an embodiment. An SMA actuator embodiment may include 8 to 12 bimorph actuators 4606. However, other embodiments may include more or fewer bimorph actuators 4606. FIG. 48 shows an SMA actuator 4802 including a bimorph actuator integrated into the circuit to perform all movements according to an embodiment. The SMA actuator 4802 is partially formed to be equipped inside a corresponding housing 4804. FIG. 49 shows a cross-section of a 5-axis sensor displacement system according to an embodiment.

FIG. 50 shows an SMA actuator 5002 including a piezoelectric bimorph actuator according to an embodiment. The SMA actuator 5002 is configured to use a 4-side mounted SMA bimorph actuator 5004 to move an image sensor, lens, or various other payloads in the x and y directions. FIG. 51 shows a top view of an SMA actuator including a bimorph actuator that moves an image sensor, lens, or various other payloads in different x and y positions.

FIG. 52 shows an SMA actuator including a bimorph actuator 5202 configured as a box-type bimorph autofocus device according to an embodiment. The four top and bottom mounted SMA bimorph actuators (such as the SMA bimorph actuators described herein) are configured to move together to produce movement in the z-stroke direction for autofocus movement. FIG. 53 shows an SMA actuator including a bimorph actuator according to an embodiment, and two top-mounted bimorph actuators 5302 are configured to push down one or more lenses. FIG. 54 shows an SMA actuator including a bimorph actuator according to an embodiment, and two bottom-mounted bimorph actuators 5402 are configured to push up one or more lenses. Figure 55 illustrates an SMA actuator including a bimorph actuator according to an embodiment to show four top and bottom mounted SMA bimorph actuators 5502 (such as the SMA bimorph actuator described herein) Electro-chip actuators are used to move one or more lenses to generate tilting motion.

Figure 56 shows an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial lens shift OIS, according to an embodiment. For some embodiments, the biaxial lens shift OIS is configured to move a lens on the X/Y axis. For some embodiments, the Z-axis movement comes from a separate AF, such as the AF described herein. Four bimorph actuators push the side of the auto focus device to perform OIS movement. FIG. 57 shows an exploded view of an SMA system including an SMA actuator 5802 according to an embodiment. The SMA actuator 5802 includes a bimorph actuator 5806 configured as a biaxial lens shift OIS . Figure 58 shows a cross-section of an SMA system including an SMA actuator 5802, which includes a bimorph actuator 5806 configured as a biaxial lens shift OIS, according to an embodiment. FIG. 59 shows a box-type bimorph actuator 5802 used in an SMA system according to an embodiment. The box-type bimorph actuator 5802 is configured to be equipped in the system when it is formed One of the biaxial lens shifted OIS that was manufactured before. This system can be configured to have a high OIS stroke OIS (for example, +/-200 um or higher). In addition, these embodiments are configured to use 4 sliding bearings such as POM sliding bearings to have a wide range of motion and good OIS dynamic tilt. These embodiments are configured to easily integrate with AF designs (e.g., VCM or SMA).

FIG. 60 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator configured as a 5-axis lens shift OIS and autofocus device. For some embodiments, the 5-axis lens shift OIS and autofocus device are configured to move a lens on the X/Y/Z axis. For some embodiments, pitch and yaw axis motions are used for dynamic tilt tuning capabilities. Using the technology described in this article, 8 bimorph actuators are used to provide movement for the autofocus device and OIS. Fig. 61 shows an exploded view of an SMA system including an SMA actuator 6202 according to an embodiment. The SMA actuator 6202 includes a bimorph configured as a 5-axis lens shift OIS and autofocus device Actuator 6204. FIG. 62 shows a cross-section of an SMA system including an SMA actuator 6202 according to an embodiment. The SMA actuator 6202 includes a bimorph actuator configured as a 5-axis lens shift OIS and autofocus device器6204. FIG. 63 shows a box-type bimorph actuator 6202 used in an SMA system according to an embodiment. The box-type bimorph actuator 6202 is configured to be equipped in the system when it is formed A 5-axis lens shift OIS and auto-focus device was manufactured before. This system can be configured to have a high OIS stroke OIS (for example, +/-200 um or higher) and a high autofocus stroke (for example, 400 um or higher). In addition, these embodiments can detune any tilt and eliminate the need for a separate autofocus assembly.

Figure 64 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as an extrapolation box, according to an embodiment. For some embodiments, the bimorph actuator assembly is configured to wrap around an object such as a lens holder. Since the circuit assembly moves with the lens holder, the X/Y/Z rigidity of a flexible part is low. The tail pad of the circuit is static. The extrapolation box can be configured for use with both 4 or 8 bimorph actuators. Therefore, the extrapolation box can be configured as a 4-bimorph actuator located on the OIS side and moving on the X and Y axis. The extrapolation box can be configured as a 4 bimorph actuator on the top and bottom to automatically focus when moving on the z-axis. The extrapolation box can be configured to be located on the top, bottom and sides of the OIS and autofocus device and move on the x, y, and z axes and be able to perform one of 3 axis tilts (pitch/roll/tilt) 8 Bimorph actuator. 65 shows an exploded view of an SMA system including an SMA actuator 6602, according to an embodiment, the SMA actuator 6602 including a bimorph actuator 6604 configured as an extrapolation box. Therefore, the SMA actuator is configured such that the bimorph actuator acts on the housing 6504 to move the lens holder 6506 using the techniques described herein. Figure 66 shows an SMA system including an SMA actuator 6602, according to an embodiment, the SMA actuator 6602 including a bi-piezo configured to be partially shaped to receive an extrapolation box of a lens holder 6604 Wafer actuator. FIG. 67 shows an SMA system including an SMA actuator 6602 according to an embodiment. The SMA actuator 6602 includes an extrapolation box configured to be manufactured before it is shaped to be equipped in the system Bimorph actuator 6604.

Figure 68 shows an SMA system including an SMA actuator 6802, according to an embodiment, which includes a bimorph actuator configured as a 3-axis sensor shift OIS. For some embodiments, the z-axis movement comes from a separate autofocus system. Four piezoelectric bimorph actuators are configured to use the techniques described herein to push the side of a sensor bracket 6804 to provide motion for OIS. FIG. 69 shows an exploded view of an SMA including an SMA actuator 6802 according to an embodiment. The SMA actuator 6802 includes a bimorph actuator configured as a 3-axis sensor shift OIS . FIG. 70 shows a cross-section of an SMA system including an SMA actuator 6802 according to an embodiment. The SMA actuator 6802 includes a bimorph actuator configured as a 3-axis sensor shift OIS 6806. Figure 71 shows a box-type bimorph actuator 6802 assembly used in an SMA system according to an embodiment. The box-type bimorph actuator 6802 assembly is configured to be shaped as Equipped with a 3-axis sensor shifted OIS that was previously manufactured in this system. Fig. 72 shows a flex sensor circuit used in an SMA system according to an embodiment, the flex sensor circuit configured as a 3-axis sensor shift OIS. This system can be configured to have a high OIS stroke OIS (for example, +/-200 um or higher) and a high autofocus stroke (for example, 400 um or higher). In addition, these embodiments are configured to use 4 sliding bearings such as POM sliding bearings to have a wide range of biaxial motion and good OIS dynamic tilt. These embodiments are configured to easily integrate with AF designs (e.g., VCM or SMA).

FIG. 73 shows an SMA system including an SMA actuator 7302 according to an embodiment. The SMA actuator 7302 includes a bimorph actuator configured as a 6-axis sensor shift OIS and autofocus device器7304. For some embodiments, the 6-axis sensor shift OIS and auto focus device are configured to move a lens on the X/Y/Z/pitch/roll/side roll axis. For some embodiments, pitch and roll axis motion is used for dynamic tilt tuning capabilities. Using the technology described in this article, 8 bimorph actuators are used to provide movement for the autofocus device and OIS. FIG. 74 shows an exploded view of an SMA system including an SMA actuator 7402 according to an embodiment. The SMA actuator 7402 includes dual pressure configured as a 6-axis sensor shift OIS and autofocus device Electric wafer actuator 7404. FIG. 75 shows a cross-section of an SMA system including an SMA actuator according to an embodiment. The SMA actuator 7402 includes a bimorph configured as a 6-axis sensor shift OIS and autofocus device Actuator. FIG. 76 shows a box-type bimorph actuator 7402 used in an SMA system according to an embodiment. The box-type bimorph actuator 7402 is configured to be equipped in the system when it is formed A 3-axis sensor shift OIS and auto focus device that was manufactured before. Figure 77 shows a flex sensor circuit used in an SMA system according to an embodiment, the flex sensor circuit configured as a 3-axis sensor shift OIS. This system can be configured to have a high OIS stroke OIS (for example, +/-200 um or higher) and a high autofocus stroke (for example, 400 um or higher). In addition, these embodiments can detune any tilt and eliminate the need for a separate autofocus assembly.

Figure 78 shows an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial camera tilt OIS, according to an embodiment. For some embodiments, the dual-axis camera tilt OIS is configured to move a camera on the pitch/roll axis. Using the technology described in this article, 4 bimorph actuators are used to push the top and bottom of the autofocus device to obtain the entire camera movement of OIS pitch and roll motion. Fig. 79 shows an exploded view of an SMA system including an SMA actuator 7902 including a bimorph actuator 7904 configured as a biaxial camera tilt OIS according to an embodiment. Figure 80 shows a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial camera tilt OIS according to an embodiment. Figure 81 shows a box-type bimorph actuator used in an SMA system according to an embodiment, the box-type bimorph actuator is configured to be formed before being equipped in the system Manufactured a dual-axis camera tilted OIS. Figure 82 shows a flex sensor circuit used in an SMA system according to an embodiment, the flex sensor circuit configured as a dual-axis camera tilt OIS. This system can be configured to have a high OIS stroke OIS (for example, plus/minus 3 degrees or higher). These embodiments are configured to easily integrate with auto-focus ("AF") designs (e.g., VCM or SMA).

FIG. 83 shows an SMA system including an SMA actuator including a bimorph actuator configured as a 3-axis camera tilt OIS, according to an embodiment. For some embodiments, the dual axis camera tilt OIS is configured to move a camera on the pitch/roll/roll axis. Using the technique described in this article, 4 bimorph actuators are used to push the top and bottom of the autofocus device to obtain the entire camera movement of OIS pitch and roll motion, and using the technique described in this article, 4 A bimorph actuator is used to push the side of the autofocus device to obtain the entire camera movement of the OIS roll movement. FIG. 84 shows an exploded view of an SMA system including an SMA actuator 8402 including a bimorph actuator 8404 configured as a 3-axis camera tilt OIS, according to an embodiment. FIG. 85 shows a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a 3-axis camera tilt OIS, according to an embodiment. Figure 86 shows a box-type bimorph actuator used in an SMA system according to an embodiment, the box-type bimorph actuator is configured to be equipped in the system when it is shaped A 3-axis camera tilted OIS was previously manufactured. Fig. 87 shows a flex sensor circuit used in an SMA system according to an embodiment, the flex sensor circuit configured as a 3-axis camera tilt OIS. This system can be configured to have a high OIS stroke OIS (for example, plus/minus 3 degrees or higher). These embodiments are configured to easily integrate with AF designs (e.g., VCM or SMA).

Fig. 88 shows exemplary dimensions of a bimorph actuator of an SMA actuator according to an embodiment. These dimensions are preferred embodiments, but those familiar with the art will understand that other dimensions can be used based on the desired characteristics of an SMA actuator.

Fig. 89 shows a lens system for a folding camera according to an embodiment. The folding camera includes a folding lens 8902 that is configured to bend light to a lens system 8901 that includes one or more lenses 8903a to 8903d. For some embodiments, the folding lens is any one or more of a lens and a lens. The lens system 8901 is configured to have a main axis 8904, the main axis 8904 is at an angle relative to a transmission axis 8906, and the transmission axis 8906 is parallel to the traveling direction of the light before reaching the folding lens 8902. For example, a folding camera is used in a camera phone system to reduce the height of a lens system 8901 in the direction of a transmission axis 8906.

Embodiments of the lens system include one or more liquid lenses, such as the liquid lenses described herein. The embodiment depicted in Fig. 89 includes two liquid lenses 8903b, 8903d, such as the liquid lenses described herein. One or more liquid lenses 8903b, 8903d are configured to be actuated using techniques including the techniques described herein. Actuators are used to actuate a liquid lens, including but not limited to buckle actuators, bimorph actuators, and other SMA actuators. FIG. 108 illustrates the use of a buckle actuator 60 to actuate a liquid lens according to an embodiment. The liquid lens includes a shaped ring coupling 64, a liquid lens assembly 61, one or more buckle actuators 60 (such as the buckle actuators described herein), a sliding base 65, and a Base 62. One or more buckle actuators 60 are configured to move the shaping ring/coupler 64 to change the shape of the flexible diaphragm of the liquid lens assembly 61 to move or shape the light, for example as described herein. For some embodiments, 3 or 4 actuators are used. A liquid lens can be used alone or in combination with other lens configurations to act as an autofocus device or optical image stabilizer. A liquid lens can also be configured to direct an image to an image sensor in other ways.

90 shows several embodiments of a lens system 9001. The lens system 9001 includes liquid lenses 9002a to 9002h to focus an image on an image sensor 9004. As shown, the liquid lenses 9002a to 9002h can include any lens shape and are configured to dynamically adjust the light path through the lens using techniques including the techniques described herein.

A lens system for a folding camera is configured to include an actuating folding lens 9100. An example of an actuating folding lens is a tilting lens, such as the tilting lens shown in FIG. 91. In the example shown in FIG. 91, the folding lens is mounted on a ring 9102 of the actuator 9104. The actuator includes, but is not limited to, an SMA actuator, including the SMA actuator described herein. For some embodiments, the tilting beam is placed on an SMA actuator including four bimorph actuators 9106, such as the bimorph actuator described herein. According to some embodiments, using techniques including the techniques described herein, the actuated folding lens 9100 is configured as an optical image stabilizer. For example, the actuating folding lens is configured to include an SMA system, such as the SMA system shown in FIG. 39. Another example of an actuating folding lens may include an SMA actuator, such as the SMA actuator shown in FIG. 21. However, the folding lens may also include other actuators.

Figure 92 shows a bimorph arm with an offset according to an embodiment. The bimorph arm 9201 includes a bimorph beam 9202 with a formed offset 9203. Compared to a bimorph arm without an offset, forming an offset 9203 increases the mechanical advantage to generate a higher force. According to some embodiments, the depth of offset 9204 (also referred to herein as bending plane z offset 9204) and the length of offset 9206 (also referred to herein as groove width 9206) are configured to define a bimorph The characteristics of the arm, such as peak force. For example, the graph in FIG. 106 illustrates the relationship between the bending plane z offset 9204, the groove width 9206, and the peak force of a bimorph beam 9202 according to an embodiment.

The bimorph arm includes one or more SMA materials such as an SMA tape or SMA wire 9210, such as the SMA materials described herein. The SMA material is attached to the beam using techniques including the techniques described herein. For some embodiments, an SMA material such as an SMA wire 9210 is attached to a fixed end 9212 of the bimorph arm and a load point end 9214 of the bimorph arm, so that an offset 9203 is formed when the SMA is attached. Between the two ends of the material. For the various embodiments, the ends of the SMA material are electrically and mechanically coupled to the contacts configured to supply current to the SMA material using techniques including techniques known in the art. Piezoelectric bimorph arms with an offset can be included in SMA actuators and systems such as the SMA actuators and systems described herein.

Figure 93 shows a bimorph arm with an offset and a limiter according to an embodiment. The bimorph arm 9301 includes a bimorph beam 9302 with a formed offset 9303 and a limiter 9304 adjacent to the formed offset 9303. Compared with the bimorph arm 9301 without an offset, the offset 9303 increases the mechanical advantage to generate a higher force and the limiter 9304 prevents the arm from moving away from the unfixed, point-of-load end of the bimorph actuator Movement in the direction of 9306. The bimorph arm 9301 with a formed offset 9303 and limiter 9304 may be included in SMA actuators and systems such as the SMA actuators and systems described herein. The piezoelectric bimorph arm 9301 includes one or more SMA materials such as an SMA tape or SMA wire 9308, such as the SMA material described herein attached to the piezoelectric bimorph arm 9301 using a technique including the techniques described herein .

Fig. 94 shows a bimorph arm with an offset and a limiter according to an embodiment. The bimorph arm 9401 includes a bimorph beam 9402 having a formed offset 9403 and a limiter 9404 adjacent to the formed offset 9403. The limiter 9404 is formed as part of a base 9406 for the bimorph arm 9401. The base 9406 is configured to receive a bimorph arm 9401 and includes a recess 9408 configured to receive the offset portion of the bimorph beam. The bottom of the recess is configured to be adjacent to a limiter 9404 formed with an offset 9403. The base 9406 may also include one or more portions 9410 configured to support the piezoelectric bimorph arm when the bimorph arm is not actuated. The bimorph arm 9401 with a formed offset 9403 and limiter 9404 can be included in SMA actuators and systems such as the SMA actuators and systems described herein. The piezoelectric bimorph arm 9401 includes one or more SMA materials, such as an SMA tape or SMA wire, such as the SMA material described herein attached to the piezoelectric bimorph arm 9401 using techniques including the techniques described herein.

Fig. 95 shows an embodiment of a pedestal including a bimorph arm with an offset according to an embodiment. The bimorph arm 9501 includes a bimorph beam 9502 having a formed offset 9504. The piezoelectric bimorph arm can also use one of the limiters including the technology described herein. The piezoelectric bimorph arm 9501 includes one or more SMA materials such as an SMA tape or SMA wire 9506, such as the SMA material described herein attached to the piezoelectric bimorph arm 9501 using techniques including the techniques described herein .

Fig. 96 shows an embodiment of a base 9608 including two piezoelectric bimorph arms with an offset according to an embodiment. Each bimorph arm 9601a, 9601b includes a bimorph beam 9602a, 9602b with a formed offset 9604a, 9604b. Each bimorph arm 9601a, 9601b includes one or more SMA materials such as an SMA tape or SMA wire 9606a, 9606b, such as being attached to the text of the bimorph arm 9601 using a technique including the technology described herein The described SMA material. Each bimorph arm 9601a, 9601b can also use one of the limiters including the technology described herein. Some embodiments include a pedestal that includes two or more piezoelectric bimorph arms formed using techniques including the techniques described herein. According to some embodiments, the bimorph arm 9601 is integrally formed with the base 9608. For other embodiments, using technologies including but not limited to solder, resistance welding, laser welding and adhesives, one or more of the bimorph arms 9602a, 9602b are formed separately from the base 9608 and attached to the base 9608. For some embodiments, two or more bimorph arms 9601a, 9601b are configured to act on a single object. This implementation has the ability to increase the force applied to an object. The graph in FIG. 107 below shows an example of how the volume of a box as an approximation of a box surrounding the entire bimorph actuator is related to the work of each bimorph assembly. The length of the bimorph actuator 9612, the width of the bimorph actuator 9610, and the height of the bimorph actuator 9614 are used to approximate the box volume (collectively referred to as "box volume").

Fig. 97 shows a buckle arm including a point-of-load extension according to an embodiment. The buckle arm 9701 includes a beam portion 9702 and one or more load point extension portions 9704a, 9704b extending from the beam portion 9702. Each end 9706a, 9706b of the buckle arm 9701 is configured to be attached to or integrally formed to or a plate or other base using techniques including the techniques described herein. According to some embodiments, one or more load point extensions 9704a, 9704b are attached to or integrally formed with the beam portion 9702 at an offset from one of the load points 9710a, 9710b of the beam portion 9702. The load points 9710a, 9710b are parts of the beam portion 9702, which are configured to transfer the force of the buckle arm 9701 to another object. For some embodiments, the load points 9710a, 9710b are the center of the beam portion 9702. For other embodiments, the load points 9710a, 9710b are at a position other than the center of the beam portion 9702. A load point extension 9704a, 9704b is configured to extend in the longitudinal direction of the beam portion 9702 from the point joining to the beam portion 9702 toward the load points 9710a, 9710b of the beam portion 9702. For some embodiments, the end of the point of load extension 9704a, 9704b extends to at least the point of load 9710a, 9704b of the beam portion 9702. The buckle arm 9701 includes one or more SMA materials such as an SMA tape or SMA wire 9712, such as the SMA materials described herein. SMA material such as an SMA wire 9712 is attached to the opposite end of the beam portion 9702. The SMA material is attached to the opposite end of the beam section using techniques including the techniques described herein. For some embodiments, the length of the point-of-load extensions 9704a, 9704b can be configured to be any length contained within the longitudinal length of the associated flat (de-actuated) beam portion 9702 of the buckle arm 9701.

FIG. 98 shows a buckle arm 9801 including a point-of-load extension 9810 in an actuated position according to an embodiment. The SMA material attached to the opposite end of the beam portion 9802 is actuated using techniques including the techniques described herein. The load point 9804 enables the buckle arm 9801 to increase the stroke range on the buckle arm without an extension. Therefore, the buckle arm including the point-of-load extension can achieve a greater maximum vertical stroke. Buckle arms with point-of-load extensions may be included in SMA actuators and systems such as the SMA actuators and systems described herein.

Fig. 99 shows a piezoelectric bimorph arm including a point-of-load extension according to an embodiment. The bimorph arm 9901 includes a beam portion 9902 and one or more load point extensions 9904a, 9904b extending from the beam portion. One end of the piezoelectric bimorph arm 9901 is configured to be attached or integrally formed to a board or other base using techniques including the techniques described herein. The end of the beam portion 9902 opposite to the attached or integrated end is not fixed and can move freely. According to some embodiments, one or more load point extensions 9904a, 9904b are attached to or integrally formed with the beam portion 9902 at an offset from one of the free ends of the beam portion 9902. The point-of-load extensions 9904a, 9904b are configured to extend from the point joined to the beam portion 9902 in a direction away from a plane containing the longitudinal axis of the beam portion 9902. For example, the point-of-load extensions 9904a, 9904b extend in the direction in which the free end of the beam portion extends when actuated. Some embodiments of a piezoelectric bimorph arm 9901 include one or more load point extensions 9904a, 9904b with a longitudinal axis, the longitudinal axis and a plane containing the longitudinal axis of the beam portion forming a plane including 1 degree to 90 degrees One angle. For some embodiments, the ends 9910a, 9910b of the point-of-load extensions 9904a, 9904b are configured to bond to an object configured to be moved.

The piezoelectric bimorph arm 9901 includes one or more SMA materials such as an SMA tape or SMA wire 9906, such as the SMA materials described herein. An SMA material such as an SMA wire 9906 is attached to the opposite ends of the beam portion 9902. The SMA material is attached to the opposite end of the beam portion 9902 using techniques including the techniques described herein. For some embodiments, the length of the point-of-load extensions 9904a, 9904b can be configured to any length. According to some embodiments, the position of the point at which one end 9910a, 9910b of the point-of-load extension 9904a, 9904b is bonded to an object can be configured to be any point along the longitudinal length of the beam portion 9902. When the beam part at the end of a load point extension is flat (deactivation), the height above the beam part can be configured to any height. For some embodiments, when the bimorph arm is actuated, the point of load extension may be configured to be at least above other parts of the bimorph arm.

FIG. 100 shows a piezoelectric bimorph arm including a point-of-load extension in an actuated position according to an embodiment. The SMA material attached to the opposite end of the beam portion 2 is actuated using a technique including the technique described herein. Compared with a piezoelectric bimorph arm without an extension, the point-of-load extension 10 enables the piezoelectric bimorph arm 1 to increase the stroke force. Therefore, the piezoelectric bimorph arm 1 including the point-of-load extension 10 enables the piezoelectric bimorph arm 1 to apply a larger force. The bimorph arm 1 with the point-of-load extension 10 may be included in an SMA actuator and system such as the SMA actuator and system described herein.

FIG. 101 shows an SMA optical image stabilizer according to an embodiment. The SMA optical image stabilizer 20 includes a moving plate 22 and a static plate 24. The moving plate 22 includes a spring arm 26 formed integrally with the moving plate 22. For some embodiments, the moving plate 22 and the static plate 24 are each formed as a single, one-piece plate. The mobile board 22 includes a first SMA material attachment portion 28a and a second SMA material attachment portion 28b. The static board 24 includes a first SMA material attachment portion 30a and a second SMA material attachment portion 30b. Each SMA material attachment portion 28, 30 is configured to fix an SMA material such as an SMA wire to a board using a resistance welding head. The first SMA material attachment portion 28a of the mobile board 22 includes a first SMA wire 32a disposed between it and a first SMA material attachment portion 30a of the static board, and a second SMA wire 32a disposed between it and the static board 24 A second SMA wire 32b between the SMA attachment portions 30b. The second SMA material attachment portion 28b of the mobile board 22 includes a third SMA wire 32c disposed between it and a second SMA material attachment portion 30b of the static board, and a first SMA wire 32c disposed between it and the static board 24 A fourth SMA wire 32d between the SMA attachment portions 30a. The SMA wires are actuated to move the moving plate 22 away from the static plate 24 using techniques including the techniques described herein. FIG. 102 shows an SMA material attachment part 40 of a moving part according to an embodiment. The SMA material attachment portion is configured to have an SMA material such as an SMA wire 41 that is resistance welded to the SMA material attachment portion 40. FIG. 103 shows an SMA attachment portion 42 in which a resistance welding SMA wire 43 is attached to one of the static plates according to an embodiment.

FIG. 104 shows an SMA actuator 45 including a buckle actuator according to an embodiment. The buckle actuator 46 includes a buckle arm 47, such as the buckle arm described herein. The buckle arm 47 is configured to move on the z-axis when the SMA wire 48 is activated and deactivated using techniques including the techniques described herein. Each SMA wire 48 is attached to a respective resistance welding wire crimp portion 49 using resistance welding. Each resistance welding wire crimping object 49 includes an island 50 isolated from the metal 51, and the island 50 forms a buckle arm 47 on at least one side of the SMA wire 48. The island structure can be used in other actuators, optical image stabilizers, and autofocus systems to connect at least one side of an SMA wire to an isolated island structure formed in an alkali metal layer, such as in FIG. 101 The OIS application shown.

FIG. 105 shows a resistance welding crimp including an island for an SMA actuator used to connect an SMA wire 48 using a technique including the technique described herein, according to an embodiment Attached to a buckle actuator 46. FIG. 105a shows a bottom part of the SMA actuator 45. According to some embodiments, the SMA actuator 45 is formed of a stainless steel base layer 51. A dielectric layer 52 such as a polyimide layer is disposed on the bottom portion of the stainless steel base layer 51. According to some embodiments, a conductor layer 53 is electrically connected to the stainless steel island 50 through a through hole in the dielectric layer 52, so that the wires welded to the stainless steel island 50 and the conductor attached to the stainless steel island Electrical connections are established between the circuits. According to some embodiments, an island 50 is etched from the stainless steel base layer 50. The dielectric layer 52 maintains the position of the island 50 in the stainless steel base layer 51. The island 50 is configured to attach an SMA wire to it using techniques including the techniques described herein (eg, resistance welding). FIG. 105b shows a top portion of an SMA actuator 45 including an island 50. FIG. For some embodiments, glue or adhesive can also be placed on the top of the weld to assist in mechanical strength and to relieve fatigue strain during operation and impact loading.

Fig. 108 includes a lens system with an SMA actuator of a buckle actuator according to an embodiment. The lens system includes a liquid lens assembly 61 mounted on a base 62. The lens system also includes a shaped ring/coupler 64 that is mechanically coupled to the buckle actuator 60. The SMA actuator including the buckle actuator 60 such as the buckle actuator described herein is placed on a sliding base 65 which is placed on the base 62. The SMA actuator is configured to move the shaping ring/coupler 64 along the optical axis of the liquid lens assembly 61 by actuating the buckle actuator 60 using techniques including the techniques described herein. This moves the forming ring/coupler 64 to change the focus of the liquid lens in the liquid lens assembly.

Fig. 109 shows an unfixed, point-of-load end of a piezoelectric bimorph arm according to an embodiment. The unfixed, load-point end 70 of a bimorph arm includes a flat surface 71 for attaching SMA material, such as an SMA wire 72. The SMA wire 72 is attached to the flat surface 71 by a resistance welding 73. The resistance welding 73 is formed using techniques including techniques known in the art.

FIG. 110 illustrates an unfixed, point-of-load end of a piezoelectric bimorph arm according to an embodiment. The unfixed, load-point end 76 of a bimorph arm includes a flat surface 77 for attaching SMA material, such as an SMA wire 78. The SMA wire 78 is attached to the flat surface 77 by a resistance welding similar to the resistance welding shown in FIG. 109. An adhesive 79 is placed on the resistance welding. This achieves a more reliable connection between the SMA wire 78 and the unfixed, load point end 76. The adhesive 79 includes but is not limited to conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 111 illustrates an unfixed, point-of-load end of a piezoelectric bimorph arm according to an embodiment. The unfixed, point-of-load end 80 of a bimorph arm includes a flat surface 81 for attaching SMA material, such as an SMA wire 82. A metal interlayer 84 is disposed on the flat surface 81. The metal interlayer 84 includes but is not limited to a gold layer, a nickel layer or an alloy layer. The SMA wire 82 is attached to the metal interlayer 84 placed on the flat surface 81 by a resistance welding 83. The resistance welding 83 is formed using a technique including techniques known in the art. The metal interlayer 84 achieves better adhesion with the unfixed, load point end 80.

Fig. 112 shows an unfixed, point-of-load end of a piezoelectric bimorph arm according to an embodiment. The unfixed, load-point end 88 of a bimorph arm includes a flat surface 89 for attaching SMA material, such as an SMA wire 90. A metal interlayer 92 is disposed on the flat surface 89. The metal interlayer 92 includes but is not limited to a gold layer, a nickel layer or an alloy layer. The SMA wire 90 is attached to the flat surface 89 by a resistance welding similar to the resistance welding shown in FIG. 111. An adhesive 91 is placed on the resistance welding. This achieves a more reliable connection between the SMA wire 90 and the unfixed, load point end 88. The adhesive 91 includes but is not limited to conductive adhesives, non-conductive adhesives and other adhesives known in the art.

FIG. 113 shows a fixed end of a piezoelectric bimorph arm according to an embodiment. The fixed end 95 of a bimorph arm includes a flat surface 96 for attaching an SMA material, such as an SMA wire 97. The SMA wire 97 is attached to the flat surface 96 by a resistance welding 98. The resistance welding 98 is formed using techniques including techniques known in the art.

Fig. 114 shows a fixed end of a piezoelectric bimorph arm according to an embodiment. The fixed end 120 of a bimorph arm includes a flat surface 121 for attaching an SMA material, such as an SMA wire 122. The SMA wire 122 is attached to the flat surface 121 by a resistance welding similar to the resistance welding shown in FIG. 113. An adhesive 123 is placed on the resistance welding. This achieves a more reliable connection between the SMA wire 122 and the fixed end 120. The adhesive 123 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 115 shows a fixed end of a piezoelectric bimorph arm according to an embodiment. The fixed end 126 of a bimorph arm includes a flat surface 127 for attaching an SMA material, such as an SMA wire 128. A metal interlayer 130 is disposed on the flat surface 127. The metal interlayer 130 includes but is not limited to a gold layer, a nickel layer or an alloy layer. The SMA wire 128 is attached to the metal interlayer 130 placed on the flat surface 127 by a resistance welding 129. The resistance welding 129 is formed using techniques including techniques known in the art. The metal interlayer 130 achieves better adhesion with the fixed end 126.

FIG. 116 shows a fixed end of a piezoelectric bimorph arm according to an embodiment. The fixed end 135 of a bimorph arm includes a flat surface 136 for attaching an SMA material, such as an SMA wire 137. A metal interlayer 138 is disposed on the flat surface 136. The metal interlayer 136 includes but is not limited to a gold layer, a nickel layer or an alloy layer. The SMA wire 137 is attached to the flat surface 136 by a resistance welding similar to the resistance welding shown in FIG. 115. An adhesive 139 is placed on the resistance welding. This achieves a more reliable connection between the SMA wire 137 and the fixed end 135. The adhesive 139 includes but is not limited to conductive adhesives, non-conductive adhesives and other adhesives known in the art.

FIG. 117 shows a rear view of a fixed end of a piezoelectric bimorph arm according to an embodiment. The bimorph arm 143 is configured according to the embodiments described herein. The fixed end 143 of a bimorph arm includes an island 144 isolated from the outer portion 145 of the fixed end 143. This enables the island 144 to be electrically and/or thermally isolated from the exterior 145. For some embodiments, the SMA material attached to the opposite side of the fixed end 143 of the bimorph arm is electrically coupled to the SMA material such as an SMA wire through a through hole. The island 144 is disposed on an insulator 146, such as the insulator described herein. The islands 144 can be formed using etching techniques including etching techniques known in the art.

It will be understood that terms such as "top", "bottom", "above", "below" and the x-direction, y-direction, and z-direction as used as convenient terms herein indicate that the components are relative to each other rather than any particular space or gravity The spatial relationship of orientation. Therefore, these terms are intended to cover an assembly of component parts, regardless of whether the assembly is oriented in a specific orientation as shown in the drawings and described in the specification, inverted from that orientation, or any other rotational variation.

It will be understood that the term "present invention" as used herein should not be interpreted as meaning only presenting a single invention with a single basic element or group of elements or a single invention. Similarly, it will also be understood that the term "present invention" encompasses several separate innovations, each of which can be regarded as a separate invention. Although the present invention has been described in detail with respect to preferred embodiments and drawings, it should be obvious to those familiar with the art that various embodiments of the present invention can be implemented without departing from the spirit and scope of the present invention. Adapt and modify. In addition, the techniques described herein can be used to make a device with two, three, four, five, six or more usually n bimorph actuators and buckle actuators. Accordingly, it should be understood that the detailed description and accompanying drawings as set forth above are not intended to limit the breadth of the present invention, and the breadth should only be inferred from the scope of the patent application below and the legal equivalents of the proper interpretation.

1: Bimorph arm 2: beam part 10: Load point extension 20: Shape memory alloy (SMA) optical image stabilizer 22: mobile board 24: Static board 26: spring arm 28a: The first SMA material attachment part 28b: second SMA material attachment part 30a: The first SMA material attachment part 30b: second SMA material attachment part 32a: The first SMA line 32b: The second SMA line 32c: third SMA line 32d: Fourth SMA line 40: SMA material attachment part 42: SMA attachment part 45: SMA actuator 50: island 51: Metal/Stainless Steel Base 52: Dielectric layer 53: Conductor layer 60: Buckle actuator 61: Liquid lens assembly 62: Pedestal 64: forming ring coupling/forming ring/coupling 65: Sliding base 70: Unfixed, load point end 71: Flat surface 72: SMA wire 73: Resistance welding 76: Unfixed, load point end 77: Flat surface 78: SMA wire 79: Adhesive 80: Unfixed, load point end 81: Flat surface 82: SMA wire 83: Resistance welding 84: Metal sandwich 88: Unfixed, load point end 89: flat surface 90: SMA wire 91: Adhesive 92: Metal sandwich 95: fixed end 96: flat surface 97: SMA wire 98: Resistance welding 100: Shape memory alloy (SMA) wire 101: Pedestal 102: Buckle actuator 104: central part 106: Crimp structure 108: z stroke direction 120: fixed end 121: flat surface 122: SMA line 123: Adhesive 126: fixed end 127: Flat surface 128: SMA line 129: Resistance welding 130: Metal sandwich 135: fixed end 136: Flat surface 137: SMA wire 138: Metal sandwich 139: Adhesive 143: Bimorph arm/fixed end 144: Island 145: External 146: Insulator 202: Bimorph actuator 204: Pedestal 206: SMA belt 208: z stroke direction 302: SMA actuator 304: Optical Image Stabilizer (``OIS'') 306: lens holder 308: return spring 310: Vertical sliding bearing 312: boot cover 502: Sensor 504: z direction 506: Buckle actuator 508: SMA cable 604: lens holder 606: line holder 608: Smart Memory Alloy ("SMA") Cable/Smart Memory Alloy ("SMA") Cable 610: Buckle arm 612: Spring arm 702: Sliding base 704: Assembly base 706: Sliding bearing 708: Vertical sliding surface 710: Buckle actuator 802: Buckle actuator 804: Buckle arm 806: hammock part 902: Bimorph actuator 904: lens holder 906: end 908: Pedestal 1002: Auto focus assembly 1004: position sensor 1005: z direction 1006: moving spring 1008: Magnet 1010: lens holder 1106b: SMA belt 1202: S MA material 1204: Center feed 1206: beam 1208: Center Metal 1210: Insulator 1212: opening or through hole 1214a: Power section 1214b: Grounded section 1216: Power supply contact 1218: Ground contact 1220: surface coating 1222: gap 1224: Through hole section 1226: Through hole section 1302: First buckle actuator 1304: Second buckle actuator 1306: lens holder 1314: Sliding base 1316: Sliding base 1902: First buckle actuator 1904: second buckle actuator 1906: lens holder 1914: Sliding base 1916: Sliding base 1918: base part 1920: cover part 2202: first buckle actuator 2204: second buckle actuator 2206: lens holder 2218a: Left SMA wire 2218b: Right SMA wire 2302: The first buckle actuator 2304: second buckle actuator 2305: Coupler ring 2306: lens holder 2401: Sliding base 2402: Buckle actuator 2403: return spring 2406: lens holder 2409: shell 2413: Crimp 2414: Adapter board 2415: signal trace 2501: SMA system 3000: reinforcement 3002: Buckle actuator 3003: return spring 3014: Adapter plate 3020: flexible circuit 3101: SMA system 3501: SMA bimorph liquid lens 3502: Liquid lens sub-assembly 3504: shell 3506: SMA actuator 3508: Bimorph actuator 3510: forming ring 3512: Flexible diaphragm 3514: Liquid 3516: body containment ring 3518: lens 3520: Contact 3902: SMA actuator 3904: Positive z-stroke actuator 3906: Negative z-stroke actuator 3908: SMA cable 3910: lens holder 3912: top spring 3914: Top spacer 3916: bottom spacer 3918: bottom spring 3920: Pedestal 4102: length 4103: Bimorph actuator 4104: Bonding pad 4108: extended length 4202: SMA bimorph actuator 4302: Negative actuator signal connector 4304: Pedestal 4308: Wire bond pad 4310: Adhesive layer 4314: Positive actuator signal connector 4316: Wire bond pad 4318: Adhesive layer 4322: connection pad 4602: Torsion Sensor Circuit 4604: Bimorph actuator circuit 4606: Bimorph actuator 4608: mobile carriage 4610: shell 4802: SMA actuator 4804: Shell 5002: SMA actuator 5004: SMA bimorph actuator mounted on 4 sides 5202: Bimorph actuator 5402: Bimorph actuator mounted on the bottom 5502: SMA bimorph actuator mounted on the top and bottom 5802: SMA actuator/box type bimorph actuator 5806: Bimorph actuator 6202: SMA actuator/box type bimorph actuator 6204: Bimorph actuator 6504: Shell 6506: lens holder 6602: SMA actuator 6604: Bimorph actuator/lens holder 6802: SMA actuator/box type bimorph actuator 6804: Sensor bracket 7402: SMA actuator/box type bimorph actuator 7404: Bimorph actuator 7902: SMA actuator 7904: Bimorph actuator 8402: SMA actuator 8404: Bimorph actuator 8901: lens system 8902: Folding lens 8903a: lens 8903b: Liquid lens 8903c: lens 8903d: Liquid lens 8904: Spindle 8906: Transmission axis 9001: lens system 9002a: Liquid lens 9002b: Liquid lens 9002c: Liquid lens 9002d: Liquid lens 9002e: Liquid lens 9002f: Liquid lens 9002g: Liquid lens 9002h: Liquid lens 9004: Image sensor 9100: Actuated folding lens 9102: 稜鏡 9104: Actuator 9106: Bimorph actuator 9201: bimorph arm 9202: Bimorph beam 9203: Warp formed offset 9204: Offset/curved plane z offset 9206: Offset/slot width 9210: SMA tape or SMA wire 9212: fixed end 9214: Point of Load 9301: Bimorph arm 9302: Bimorph beam 9303: Warp formed offset 9304: limiter 9306: Unfixed, point-of-load end 9308: SMA tape or SMA cable 9401: bimorph arm 9402: Bimorph beam 9403: warp formed offset 9404: limiter 9406: Pedestal 9408: recess 9410: part 9501: Bimorph arm 9502: Bimorph beam 9504: Formed offset 9506: SMA tape or SMA wire 9601a: bimorph arm 9601b: Bimorph arm 9602a: Bimorph optical beam 9602b: Bimorph optical beam 9604a: formed offset 9604b: formed offset 9606a: SMA tape or SMA wire 9606b: SMA tape or SMA cable 9608: Pedestal 9610: Bimorph actuator 9612: Bimorph actuator 9614: Bimorph actuator 9701: Buckle arm 9702: beam part 9704a: point of load extension 9704b: point of load extension 9706a: end 9706b: end 9710a: point of load 9710b: point of load 9712: SMA tape or SMA wire 9801: Buckle arm 9802: beam part 9804: point of load 9810: Point of Load Extension 9901: bimorph arm 9902: beam part 9904a: Load point extension 9904b: point of load extension 9906: SMA tape or SMA wire 9910a: end 9910b: end

The figures of the accompanying drawings illustrate embodiments of the present invention by way of example and not limitation, wherein similar element symbols indicate similar elements and among them:

Figure 1a shows a lens assembly including an SMA actuator configured as a buckle actuator according to an embodiment;

Figure 1b shows an SMA actuator according to an embodiment;

Figure 2 shows an SMA actuator according to an embodiment;

FIG. 3 shows an exploded view of an autofocus assembly including an SMA wire actuator according to an embodiment;

Fig. 4 shows an autofocus assembly including an SMA actuator according to an embodiment;

FIG. 5 shows an SMA actuator including a sensor according to an embodiment;

6 shows a top view and a side view of an SMA actuator configured as a buckle actuator according to an embodiment, the SMA actuator is equipped with a lens holder;

Fig. 7 shows a side view of a section of the SMA actuator according to the embodiment;

Figure 8 shows multiple views of an embodiment of a buckle actuator;

Fig. 9 shows a bimorph actuator with a lens holder according to an embodiment;

10 shows a cross-sectional view of an auto-focus assembly including an SMA actuator according to an embodiment;

11a to 11c show views of a bimorph actuator according to some embodiments;

FIG. 12 shows a view of an embodiment of a piezoelectric bimorph actuator according to an embodiment;

FIG. 13 shows a cross-section of a pad of a piezoelectric bimorph actuator according to an embodiment;

14 shows a cross section of a center supply pad of a piezoelectric bimorph actuator according to an embodiment;

15 shows an exploded view of an SMA actuator including one of two buckle actuators according to an embodiment;

FIG. 16 shows an SMA actuator including one of two buckle actuators according to an embodiment;

FIG. 17 shows a side view of an SMA actuator including one of two buckle actuators according to an embodiment;

18 shows a side view of an SMA actuator including one of two buckle actuators according to an embodiment;

FIG. 19 shows an exploded view of an assembly including an SMA actuator according to an embodiment, the SMA actuator including two buckle actuators;

FIG. 20 shows an SMA actuator including one of two buckle actuators according to an embodiment;

Figure 21 shows an SMA actuator including one of two buckle actuators according to an embodiment;

Figure 22 shows an SMA actuator including one of two buckle actuators according to an embodiment;

FIG. 23 shows an SMA actuator including two buckle actuators and a coupler according to an embodiment;

FIG. 24 shows an exploded view of an SMA system including an SMA actuator including a buckle actuator having a laminated hammock according to an embodiment;

25 illustrates an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a buckle actuator 2402 having a laminated hammock;

Figure 26 illustrates a buckle actuator including a laminated hammock according to an embodiment;

Figure 27 illustrates a laminated hammock of an SMA actuator according to an embodiment;

FIG. 28 illustrates a laminate of an SMA actuator according to an embodiment to form a crimp connection piece;

Figure 29 shows an SMA actuator including a buckle actuator with a laminated hammock;

30 shows an exploded view of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a buckle actuator;

FIG. 31 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a buckle actuator;

FIG. 32 shows an SMA actuator including a buckle actuator according to an embodiment;

Figure 33 illustrates a dual yoke capture joint of an SMA actuator to a buckle arm according to an embodiment;

FIG. 34 shows a resistance welding crimp of an SMA actuator according to an embodiment, the SMA actuator is used to attach an SMA wire to the buckle actuator;

Figure 35 shows an SMA actuator including a buckle actuator with a double yoke capture joint;

Fig. 36 shows an SMA bimorph liquid lens according to an embodiment;

Fig. 37 shows a see-through SMA bimorph liquid lens according to an embodiment;

38 shows a cross-section and a bottom view of an SMA bimorph liquid lens according to an embodiment;

FIG. 39 shows an SMA system including an SMA actuator with a bimorph actuator according to an embodiment;

FIG. 40 shows an SMA actuator with a bimorph actuator according to an embodiment;

Figure 41 shows the length of a piezoelectric bimorph actuator and the position of a bonding pad used for an SMA wire to extend the wire length beyond the piezoelectric bimorph actuator;

FIG. 42 shows an exploded view of an SMA system including a piezoelectric bimorph actuator according to an embodiment;

Figure 43 shows an exploded view of a subsection of the SMA actuator according to an embodiment;

Figure 44 shows a subsection of an SMA actuator according to an embodiment;

FIG. 45 shows a 5-axis sensor displacement system according to an embodiment;

Fig. 46 shows an exploded view of a 5-axis sensor shift system according to an embodiment;

FIG. 47 shows an SMA actuator including a bimorph actuator integrated into the circuit for all movements according to an embodiment;

FIG. 48 shows an SMA actuator including a bimorph actuator integrated into the circuit for all movements according to an embodiment;

FIG. 49 illustrates a cross-section of a 5-axis sensor displacement system according to an embodiment;

FIG. 50 shows an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 51 shows a top view of an SMA actuator including a bimorph actuator that moves an image sensor in different x and y positions according to an embodiment;

FIG. 52 shows an SMA actuator including a piezoelectric bimorph actuator configured as a box-type bimorph autofocus device according to an embodiment;

FIG. 53 shows an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 54 shows an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 55 shows an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 56 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 57 shows an exploded view of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator configured as a biaxial lens shift OIS;

Figure 58 shows a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a biaxial lens shift OIS according to an embodiment;

Fig. 59 shows a box-type bimorph actuator according to an embodiment;

FIG. 60 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

Fig. 61 shows an exploded view of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 62 shows a cross-section of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

Fig. 63 shows a box-type bimorph actuator according to an embodiment;

FIG. 64 illustrates an SMA system including an SMA actuator, the SMA actuator including a bimorph actuator, according to an embodiment;

FIG. 65 shows an exploded view of an SMA system including an SMA actuator, the SMA actuator including a bimorph actuator, according to an embodiment;

FIG. 66 illustrates an SMA system including an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 67 illustrates an SMA system including an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 68 illustrates an SMA system including an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 69 shows an exploded view of an SMA including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 70 shows a cross-section of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator configured as a 3-axis sensor shift OIS;

Figure 71 shows a box-type bimorph actuator assembly according to an embodiment;

FIG. 72 shows a flex sensor circuit used in an SMA system according to an embodiment;

FIG. 73 shows an SMA system including an SMA actuator including a bimorph actuator according to an embodiment;

FIG. 74 shows an exploded view of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 75 shows a cross-section of an SMA system including an SMA actuator according to an embodiment;

Fig. 76 shows a box-type bimorph actuator according to an embodiment;

Figure 77 shows a flex sensor circuit used in an SMA system according to an embodiment;

FIG. 78 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 79 shows an exploded view of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

80 shows a cross-section of an SMA system including an SMA actuator according to an embodiment;

Figure 81 shows a cassette type bimorph actuator according to an embodiment;

Figure 82 shows a flex sensor circuit used in an SMA system according to an embodiment;

FIG. 83 shows an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 84 shows an exploded view of an SMA system including an SMA actuator according to an embodiment;

FIG. 85 shows a cross-section of an SMA system including an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator;

FIG. 86 shows a box-type bimorph actuator used in an SMA system according to an embodiment;

Fig. 87 shows a flex sensor circuit used in an SMA system according to an embodiment;

Fig. 88 shows an exemplary size of a bimorph actuator of an SMA actuator according to an embodiment;

FIG. 89 shows a lens system for a folding camera according to an embodiment;

FIG. 90 shows several embodiments of a lens system including a liquid lens according to an embodiment;

Fig. 91 shows a folding lens as a ridge and arranged on an actuator according to an embodiment;

Figure 92 shows a bimorph arm with an offset according to an embodiment;

Fig. 93 shows a bimorph arm with an offset and a limiter according to an embodiment;

FIG. 94 shows a bimorph arm with an offset and a limiter according to an embodiment;

FIG. 95 shows an embodiment of a base including a piezoelectric bimorph arm with an offset according to an embodiment;

FIG. 96 illustrates an embodiment of a pedestal including two piezoelectric bimorph arms with an offset according to an embodiment;

Fig. 97 shows a buckle arm including a load point extension according to an embodiment;

FIG. 98 shows a buckle arm 9801 including a point-of-load extension 9810 according to an embodiment;

FIG. 99 shows a piezoelectric bimorph arm including a point-of-load extension according to an embodiment;

FIG. 100 shows a piezoelectric bimorph arm including a point-of-load extension according to an embodiment;

FIG. 101 shows an SMA optical image stabilizer according to an embodiment;

FIG. 102 shows an SMA material attachment part 40 of a moving part according to an embodiment;

FIG. 103 shows an SMA attachment part of a static board according to an embodiment, in which a resistance welding SMA wire is attached to the SMA attachment part;

FIG. 104 shows an SMA actuator 45 including a buckle actuator according to an embodiment;

105a to 105b illustrate a resistance welding crimp including an island for an SMA actuator according to an embodiment;

FIG. 106 shows the relationship between the z-offset of the bending plane, the groove width, and the peak force of a piezoelectric bimorph beam according to an embodiment;

FIG. 107 shows an example of how the volume of a box as an approximation of a box surrounding the entire bimorph actuator is related to the work of each bimorph assembly according to an embodiment;

Fig. 108 illustrates the use of a buckle actuator to actuate a liquid lens according to an embodiment;

FIG. 109 illustrates an unfixed, load point end of a piezoelectric bimorph arm according to an embodiment;

FIG. 110 illustrates an unfixed, load point end of a piezoelectric bimorph arm according to an embodiment;

FIG. 111 illustrates an unfixed, load point end of a piezoelectric bimorph arm according to an embodiment;

Fig. 112 shows an unfixed, load point end of a piezoelectric bimorph arm according to an embodiment;

FIG. 113 shows a fixed end of a piezoelectric bimorph arm according to an embodiment;

Fig. 114 shows a fixed end of a piezoelectric bimorph arm according to an embodiment;

FIG. 115 shows a fixed end of a piezoelectric bimorph arm according to an embodiment;

Fig. 116 shows a fixed end of a piezoelectric bimorph arm according to an embodiment; and

FIG. 117 shows a rear view of a fixed end of a piezoelectric bimorph arm according to an embodiment.

9212: fixed end

9214: Point of Load

Claims (30)

An actuator, which includes: A beam part A fixed end A load point end, the beam part is arranged between the fixed end and the load point end; and A shape memory alloy (SMA) material is attached to the fixed end and the load point end. Such as the actuator of claim 1, which includes a limiter. Such as the actuator of claim 1, wherein the load point end is configured to use a resistance welding to attach the SMA material. Such as the actuator of claim 1, wherein the fixed end is configured to use a resistance welding to attach the SMA material. The actuator of claim 4, wherein the fixed end includes a flat surface. The actuator of claim 5, wherein the SMA material is attached to the flat surface by the resistance welding. Such as the actuator of claim 6, wherein one of the adhesives is disposed on at least a part of the resistance welding and the flat surface. Such as the actuator of claim 5, which includes a metal interlayer disposed on the flat surface. The actuator of claim 3, wherein the fixed end includes a flat surface. The actuator of claim 9, wherein the SMA material is attached to the flat surface by the resistance welding. Such as the actuator of claim 10, wherein an adhesive is disposed on at least a part of the resistance welding and the flat surface. The actuator of claim 9, which includes a metal interlayer disposed on the flat surface. The actuator of claim 10, which includes an island formed on the fixed end on a side opposite to the resistance welding, and the island is electrically coupled to the SMA material. The actuator of claim 1, wherein the beam portion includes a formed offset. Such as the actuator of claim 14, which includes a limiter configured to be adjacent to the formed offset. The actuator of claim 15, wherein the limiter is formed as part of a base. Such as the actuator of claim 1, wherein the SMA material is an SMA wire. Such as the actuator of claim 1, which includes one or more load point extensions. The actuator of claim 18, wherein the one or more load point extensions are formed at an angle with the beam portion. The actuator of claim 18, wherein the one or more load point extensions are formed parallel to the beam portion. An actuator, which includes: A base; and One or more bimorph arms, the one or more bimorph arms comprising: A beam part A fixed end A load point end, the beam part is arranged between the fixed end and the load point end; and A shape memory alloy (SMA) material is attached to the fixed end and the load point end. The actuator of claim 21, wherein the SMA material of the one or more bimorph arms is an SMA wire. The actuator of claim 21, wherein the bimorph arms are integrally formed with the base. The actuator of claim 21, wherein at least one of the fixed end and the load point end of the one or more bimorph arms includes a flat surface. The actuator of claim 24, wherein the SMA material of the one or more bimorph arms is attached to the flat surface of at least one of the fixed end and the load point end by a resistance welding. Such as the actuator of claim 25, wherein an adhesive is disposed on the flat surface of the resistance welding and at least one of the fixed end and the load point end. The actuator of claim 25, wherein at least one of the fixed end and the load point end includes a metal interlayer disposed on the flat surface. The actuator of claim 25, which includes an island formed on at least one of the fixed end and the load point end on a side opposite to the resistance welding, the island and the SMA material Electrically coupled. The actuator of claim 21, wherein the beam portion of the one or more piezoelectric bimorph arms includes a formed offset. The actuator of claim 29, wherein the one or more piezoelectric bimorph arms include a limiter configured to be adjacent to the formed offset.

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