CN112654786A

CN112654786A - Shape memory alloy actuator and method thereof

Info

Publication number: CN112654786A
Application number: CN202080004847.0A
Authority: CN
Inventors: N·K·贝宁; M·A·米勒; D·E·迈尔斯; M·W·戴维斯; R·N·鲁日奇卡
Original assignee: Hutchinson Technology Inc
Current assignee: Hutchinson Technology Inc
Priority date: 2019-03-29
Filing date: 2020-03-26
Publication date: 2021-04-13
Anticipated expiration: 2040-03-26
Also published as: WO2020205453A1; CN112654786B; GB2596673B; GB202113598D0; TW202101056A; KR20210143285A; JP2022527469A; GB2596673A

Abstract

SMA actuators and related methods are described herein. One embodiment of an actuator comprises: a base; a plurality of flexion arms; at least a first shape memory alloy wire coupled with a pair of flexion arms of the plurality of flexion arms. Another embodiment of an actuator comprises a base and at least one bimorph actuator comprising a shape memory alloy material. The bimorph actuator is attached to the base.

Description

Shape memory alloy actuator and method thereof

Cross Reference to Related Applications

This application claims the benefit of U.S. patent application 16/775,207 filed on day 28, month 1, 2020 and further claims the benefit of U.S. provisional patent application 62/826,106 filed on day 29, month 3, 2019, both of which are incorporated herein by reference in their entirety.

Technical Field

Embodiments of the present invention relate to the field of shape memory alloy systems. More specifically, embodiments of the present invention relate to the field of shape memory alloy actuators and related methods.

Background

Shape memory alloy ("SMA") systems have a moving component or structure that can be used with a camera lens element, for example, as an autofocus actuator. These systems may be surrounded by a structure such as a shield. The moving assembly is supported for movement on the support assembly by bearings such as a plurality of balls. A flexure element formed of a metal such as phosphor bronze or stainless steel has a moving plate and a flexure. The flexure extends between the moving plate and the fixed support assembly and acts as a spring to enable the moving assembly to move relative to the fixed support assembly. The balls allow the moving assembly to move with little resistance. The moving and support assemblies are coupled by four Shape Memory Alloy (SMA) wires extending between the assemblies. Each SMA wire is attached at one end to the support assembly and at the other end to the moving assembly. The suspension is actuated by applying an electrical drive signal to the SMA wire. However, these types of systems suffer from system complexities that result in bulky systems requiring large floor space and large height clearances. Furthermore, current systems are unable to provide a high Z travel range with a compact low profile footprint size.

Disclosure of Invention

SMA actuators and related methods are described herein. One embodiment of an actuator includes a base; a plurality of flexion arms; at least a first shape memory alloy wire coupled with a pair of the plurality of flexion arms. Another embodiment of an actuator comprises a base and at least one bimorph actuator comprising a shape memory alloy material. The bimorph actuator is attached to the base.

Other features and advantages of embodiments of the present invention will become apparent from the accompanying drawings and the following detailed description.

Drawings

Embodiments of the invention are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar elements and in which:

figure 1a shows a lens assembly comprising an SMA actuator configured as a buckling actuator according to one embodiment;

FIG. 1b shows an SMA actuator according to one embodiment;

FIG. 2 illustrates an SMA actuator according to one embodiment;

FIG. 3 shows an exploded view of an autofocus assembly including an SMA wire actuator according to one embodiment;

FIG. 4 illustrates an autofocus assembly including an SMA actuator according to one embodiment;

FIG. 5 shows an SMA actuator including a sensor according to one embodiment;

figure 6 shows top and side views of an SMA actuator configured as a buckling actuator equipped with a lens bracket according to one embodiment;

FIG. 7 shows a side view of a portion of an SMA actuator according to one embodiment;

FIG. 8 illustrates multiple views of an embodiment of a buckling actuator;

figure 9 shows a bimorph actuator with a lens holder according to one embodiment;

FIG. 10 shows a cross-sectional view of an autofocus assembly including an SMA actuator according to one embodiment;

11a-c illustrate views of a bimorph actuator according to some embodiments;

figure 12 shows a view of an embodiment of a bimorph actuator according to an embodiment;

figure 13 shows an end pad cross-section of a bimorph actuator according to one embodiment;

figure 14 shows a central supply pad cross-section of a bimorph actuator according to one embodiment;

figure 15 shows an exploded view of an SMA actuator comprising two buckling actuators according to one embodiment;

figure 16 shows an SMA actuator comprising two buckling actuators according to one embodiment;

figure 17 shows a side view of an SMA actuator comprising two buckling actuators according to one embodiment;

figure 18 shows a side view of an SMA actuator comprising two buckling actuators according to one embodiment;

figure 19 shows an exploded view of an assembly including an SMA actuator according to one embodiment, including two buckling actuators;

figure 20 shows an SMA actuator comprising two buckling actuators according to one embodiment;

figure 21 shows an SMA actuator comprising two buckling actuators according to one embodiment;

figure 22 shows an SMA actuator comprising two buckling actuators according to one embodiment;

figure 23 shows an SMA actuator including two buckling actuators and a coupler according to one embodiment;

FIG. 24 shows an exploded view of an SMA system including an SMA actuator including a buckling actuator with a laminated hammock according to one embodiment;

fig. 25 shows an SMA system comprising an SMA actuator according to one embodiment comprising a buckling actuator 2402 with a laminated hammock;

FIG. 26 illustrates a buckling actuator including a laminated hammock according to one embodiment;

FIG. 27 shows a laminated hammock of SMA actuators according to one embodiment;

FIG. 28 shows a laminated crimp connection of an SMA actuator according to one embodiment;

figure 29 shows an SMA actuator comprising a buckling actuator with a laminated hammock;

fig. 30 shows an exploded view of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a buckling actuator;

fig. 31 shows an SMA system comprising an SMA actuator according to an embodiment, the SMA actuator comprising a buckling actuator;

figure 32 shows an SMA actuator including a buckling actuator according to one embodiment;

FIG. 33 shows a two yoke capture joint of a pair of flexure arms of an SMA actuator according to one embodiment;

figure 34 shows a resistance weld crimp of an SMA actuator according to one embodiment used to attach SMA wires to a buckling actuator;

FIG. 35 illustrates an SMA actuator including a buckling actuator with a two-yoke capture joint;

figure 36 shows an SMA bimorph liquid lens according to one embodiment;

figure 37 shows a perspective view of an SMA bimorph liquid lens according to one embodiment;

figure 38 shows a cross-sectional view and a bottom view of an SMA bimorph liquid lens according to an embodiment;

figure 39 shows an SMA system comprising an SMA actuator with a bimorph actuator according to one embodiment;

figure 40 shows an SMA actuator with a bimorph actuator according to one embodiment;

figure 41 shows the length of a bimorph actuator and the location of the bond pads used to extend the wire length of the SMA wire beyond the bimorph actuator;

figure 42 shows an exploded view of an SMA system comprising a bimorph actuator according to one embodiment;

fig. 43 shows an exploded view of a sub-portion of an SMA actuator according to an embodiment;

FIG. 44 shows a sub-portion of an SMA actuator according to one embodiment;

FIG. 45 illustrates a five axis sensor shift system in accordance with one embodiment;

FIG. 46 illustrates an exploded view of a five axis sensor displacement system in accordance with one embodiment;

figure 47 shows an SMA actuator according to one embodiment comprising a bimorph actuator integrated into the circuit for all motions;

figure 48 shows an SMA actuator according to one embodiment comprising a bimorph actuator integrated into the circuit for all motions;

FIG. 49 illustrates a cross section of a five axis sensor displacement system in accordance with one embodiment;

figure 50 shows an SMA actuator comprising a bimorph actuator according to one embodiment;

figure 51 shows a top view of an SMA actuator according to an embodiment comprising a bimorph actuator moving an image sensor to different x and y positions;

figure 52 illustrates an SMA actuator comprising a bimorph actuator configured as a cassette bimorph autofocus device according to one embodiment;

figure 53 shows an SMA actuator according to an embodiment comprising a bimorph actuator;

figure 54 shows an SMA actuator comprising a bimorph actuator according to one embodiment;

figure 55 shows an SMA actuator comprising a bimorph actuator according to one embodiment;

figure 56 shows an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 57 shows an exploded view of an SMA system including an SMA actuator according to one embodiment, including a bimorph actuator configured as a two-axis lens-displacement OIS;

fig. 58 shows a cross-section of an SMA system including an SMA actuator according to one embodiment, the SMA actuator including a bimorph actuator configured as a two-axis lens-displacement OIS;

figure 59 shows a cartridge bimorph actuator according to one embodiment;

figure 60 shows an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 61 shows an exploded view of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 62 shows a cross-section of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 63 shows a cartridge bimorph actuator according to one embodiment;

figure 64 shows an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 65 shows an exploded view of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 66 shows an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 67 shows an SMA system comprising an SMA actuator according to an embodiment, the SMA actuator comprising a bimorph actuator;

figure 68 shows an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 69 shows an exploded view of an SMA comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 70 shows a cross-section of an SMA system comprising an SMA actuator according to an embodiment comprising a bimorph actuator configured as a three-axis sensor displacement OIS;

figure 71 shows a cassette bimorph actuator component according to one embodiment;

FIG. 72 shows a flexible sensor circuit used in an SMA system according to one embodiment;

figure 73 shows an SMA system comprising an SMA actuator according to an embodiment, the SMA actuator comprising a bimorph actuator;

figure 74 shows an exploded view of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 75 shows a cross-section of an SMA system including an SMA actuator according to an embodiment;

figure 76 shows a cartridge bimorph actuator according to one embodiment;

FIG. 77 shows a flexible sensor circuit for use in an SMA system according to one embodiment;

figure 78 illustrates an SMA system including an SMA actuator according to one embodiment, the SMA actuator including a bimorph actuator;

figure 79 shows an exploded view of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 80 shows a cross-section of an SMA system including an SMA actuator according to an embodiment;

figure 81 shows a cartridge bimorph actuator according to one embodiment;

FIG. 82 illustrates a flexible sensor circuit used in an SMA system according to one embodiment;

fig. 83 illustrates an SMA system including an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

fig. 84 shows an exploded view of an SMA system including an SMA actuator according to one embodiment;

figure 85 shows a cross-section of an SMA system comprising an SMA actuator according to one embodiment, the SMA actuator comprising a bimorph actuator;

figure 86 shows a cassette bimorph actuator for use in an SMA system according to one embodiment;

FIG. 87 shows a flexible sensor circuit used in an SMA system according to one embodiment;

fig. 88 illustrates exemplary dimensions of a bimorph actuator of an SMA actuator according to an embodiment;

FIG. 89 shows a lens system of a folded camera according to one embodiment;

FIG. 90 shows several embodiments of a lens system including a liquid lens according to one embodiment;

FIG. 91 illustrates a folded lens as a prism disposed on an actuator, according to one embodiment;

figure 92 illustrates a bimorph arm with an offset according to one embodiment;

figure 93 illustrates a bimorph arm with an offset and a limiter according to one embodiment;

figure 94 illustrates a bimorph arm with an offset and a limiter according to one embodiment;

figure 95 illustrates an embodiment of a base including a bimorph arm having an offset, according to one embodiment;

figure 96 illustrates an embodiment of a base including two bimorph arms with offsets according to one embodiment;

FIG. 97 illustrates a flexion arm including a load point extension according to one embodiment;

figure 98 illustrates a flexure arm 9801 including a load point extension 9810 in accordance with one embodiment;

figure 99 illustrates a bimorph arm including a point-of-load extension according to one embodiment;

figure 100 illustrates a bimorph arm including a point-of-load extension according to one embodiment;

FIG. 101 shows an SMA optical image stabilizer according to one embodiment;

fig. 102 shows the SMA material attachment portion 40 of the moving part according to an embodiment;

FIG. 103 shows an SMA attachment portion of a static plate having resistance welded SMA wires attached thereto, according to one embodiment;

figure 104 shows an SMA actuator 45 including a buckling actuator according to one embodiment;

105a-b illustrate a resistance weld crimp including an island structure for an SMA actuator according to one embodiment;

figure 106 illustrates a relationship between bending plane z-offset, valley width, and peak force for a bimorph beam according to one embodiment;

figure 107 shows an example of how the box volume of an approximate box enclosing the entire bimorph actuator according to one embodiment correlates to the work of each bimorph member;

figure 108 illustrates a liquid lens actuated using a buckling actuator, according to one embodiment;

figure 109 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment;

figure 110 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment;

figure 111 shows an unsecured point-of-load end of a bimorph arm according to one embodiment;

figure 112 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment;

figure 113 shows a fixed end of a bimorph arm according to one embodiment;

figure 114 shows a fixed end of a bimorph arm according to one embodiment;

figure 115 shows a fixed end of a bimorph arm according to one embodiment;

figure 116 shows a fixed end of a bimorph arm according to one embodiment; and

figure 117 shows a back view of a fixed end of a bimorph arm according to one embodiment.

Detailed Description

Embodiments of SMA actuators are described herein that have compact footprint and provide high actuation height, e.g., high positive z-axis direction (z-direction) movement, referred to herein as z-stroke. Embodiments of SMA actuators include SMA buckling actuators and SMA bimorph actuators. SMA actuators can be used in many applications including, but not limited to, use in lens assemblies (as autofocus actuators, microfluidic pumps, sensor displacement devices, optical image stabilization devices, optical zoom assemblies) to mechanically impact two surfaces to create a vibratory sensation commonly found in haptic feedback sensors and devices, and other systems for using actuators. For example, embodiments of the actuators described herein may be used as haptic feedback actuators for use in a cell phone or wearable device configured to provide an alarm, notification, alert, touch area, or push button response to a user. Further, more than one SMA actuator may be used in the system to achieve a greater stroke.

For the various embodiments, the SMA actuator has a z-stroke greater than 0.4 millimeters. Further, the SMA actuators of the various embodiments have a height in the z-direction of 2.2 millimeters or less when the SMA actuator is in its initial de-actuated position. The footprint of various embodiments of SMA actuators configured as autofocus actuators in a lens assembly may be as small as 3 millimeters larger than the lens inner diameter ("ID"). According to various embodiments, the footprint of the SMA actuator may be wider in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the footprint of the SMA actuator is 0.5 millimeters greater in one direction, e.g., the length of the SMA actuator is 0.5 millimeters greater than the width.

Figure 1a shows a lens assembly including an SMA actuator configured as a buckling actuator according to one embodiment. Figure 1b illustrates an SMA actuator configured as a buckling actuator according to one embodiment. The buckling actuator 102 is coupled with the base 101. As shown in fig. 1b, SMA wires (wires) 100 are attached to buckling actuators 102 such that when SMA wires 100 are actuated and contracted, buckling (bending) of buckling actuators 102 is caused, which results in at least a central portion 104 of each buckling actuator 102 moving in a z-stroke direction (e.g., the positive z-direction) as shown by arrows 108. According to some embodiments, the SMA wire 100 is actuated when an electric current is supplied to one end of the wire by a wire holder, such as a crimp structure 106. The current flowing through the SMA wire 100 heats the SMA wire 100 due to the electrical resistance inherent in the SMA material from which the SMA wire 100 is made. The other side of the SMA wire 100 has a wire holder, such as a crimp structure 106, that connects the SMA wire 100 to ground the circuit. Heating the SMA wire 100 to a sufficient temperature causes the unique material properties to transform from martensite to austenite crystal structure, which results in a change in the length of the wire. Changing the current will change the temperature and thus the length of the wire, which will be used to actuate and de-actuate the actuator to control at least the movement of the actuator in the z-direction. Those skilled in the art will appreciate that other techniques may be used to provide current to the SMA wire.

Figure 2 illustrates an SMA actuator configured as an SMA bimorph actuator according to one embodiment. As shown in fig. 2, the SMA actuator includes a bimorph actuator 202 coupled to a base 204. The bimorph actuator 202 includes an SMA ribbon 206. The bimorph actuator 202 is configured to move the unsecured end of the bimorph actuator 202 at least along the z-stroke direction 208 when the SMA ribbon 206 contracts.

Fig. 3 shows an exploded view of an autofocus assembly including an SMA actuator according to one embodiment. As shown, the SMA actuator 302 is configured as a buckling actuator according to embodiments described herein. The autofocus assembly also includes an optical image stabilizer ("OIS") 304, a lens holder 306 configured to hold one or more optical lenses using techniques including those known in the art, a return spring 308, a vertical (perpendicular) slide bearing 310, and a guide cap 312. When the buckling actuator 302 is buckled by actuating SMA wire and pulling it against the buckling actuator 302 using techniques including those described herein, the lens bracket 306 is configured to slide against the vertical slide bearing 310 as the SMA actuator 302 moves in the z-stroke direction (e.g., the positive z-direction). The return spring 308 is configured to apply a force to the lens carrier 306 in a direction opposite the z-stroke direction using techniques including those known in the art. According to various embodiments, the return spring 308 is configured to move the lens carrier 306 in a direction opposite to the z-stroke direction when the tension in the SMA wires is reduced due to the SMA wire de-actuation. When the tension in the SMA wire drops to an initial value, the lens carrier 306 moves to the lowest height in the z-stroke direction. Fig. 4 shows an autofocus assembly including an SMA wire actuator according to the embodiment shown in fig. 3.

Fig. 5 shows an SMA wire actuator including a sensor according to an embodiment. For the various embodiments, the sensor 502 is configured to measure the movement of the SMA actuator in the z-direction or the movement of the component that the SMA actuator is moving using techniques including those known in the art. The SMA actuators include one or more buckling actuators 506 configured to be actuated using one or more SMA wires 508 (similar to the SMA wires described herein). For example, in the autofocus assembly described with reference to fig. 4, the sensor is configured to determine an amount of movement of the lens holder 306 from the initial position along the z-direction 504 using techniques including those known in the art. According to some embodiments, the sensor is a tunneling magneto-resistance ("TMR") sensor.

Fig. 6 shows top and side views of an SMA actuator 602, said SMA actuator 602 being configured as a buckling actuator fitted with a lens bracket 604 according to one embodiment. Fig. 7 shows a side view of a portion of an SMA actuator 602 according to the embodiment shown in fig. 6. As with the embodiment according to fig. 7, the SMA actuator 602 includes a slide base 702. According to one embodiment, slide base 702 is formed from a metal, such as stainless steel, using techniques including those known in the art. However, those skilled in the art will appreciate that other materials may be used to form the slide base 702. Further, according to some embodiments, the slide base 702 has a spring arm 612 coupled with the SMA actuator 602. According to various embodiments, spring arm 612 is configured to serve two functions. The first function is to help push an object (e.g., lens carrier 604) to the vertical sliding surface of the guide cover. For this example, spring arm 612 preloads lens carrier 604 onto the surface to ensure that the lens does not tilt during actuation. For some embodiments, vertical sliding surface 708 is configured to mate with a guide cover. The second function of the spring arm 612 is to help pull back the SMA actuator 602 (e.g., in the negative z-direction) after the SMA wire 608 moves the SMA actuator 602 in the z-stroke direction (positive z-direction). Thus, when the SMA wire 608 is actuated, the SMA wire 608 contracts to move the SMA actuator 602 in the z-stroke direction, and when the SMA wire 608 is de-actuated, the spring arm 612 is configured to move the SMA actuator 602 in a direction opposite the z-stroke direction.

The SMA actuator 602 also includes a buckling actuator 710. For the various embodiments, the buckling actuator 710 is formed from a metal, such as stainless steel. In addition, the flexion actuator 710 includes a flexion arm 610 and one or more wire retainers 606. According to the embodiment shown in fig. 6 and 7, the buckling actuator 710 comprises four wire retainers 606. The four wire retainers 606 are each configured to receive an end of an SMA wire 608 and retain an end of the SMA wire 608 such that the SMA wire 608 is secured to the buckling actuator 710. For the various embodiments, the four wire retainers 606 are crimps configured to crimp down on a portion of the SMA wire 608 to secure the wire to the crimps. Those skilled in the art will appreciate that the SMA wire 608 may be secured to the wire retainer 606 using techniques known in the art, including but not limited to, adhesives, welding, and mechanical fastening. Smart memory alloy ("SMA") wires 608 extend between a pair of wire retainers 606 such that flexure arms 610 of flexure actuator 710 are configured to move when SMA wires 608 are actuated, causing the pair of wire retainers 606 to be drawn closer together. According to various embodiments, when an electrical current is applied to the SMA wire 608, the SMA wire 608 is electrically actuated so as to move and control the position of the flexure arm 610. When the current is removed or below a threshold, the SMA wire 608 is deactivated. This separates the pair of wire retainers 606 and moves the flexure arms 610 in a direction opposite to the direction in which the SMA wires 608 were actuated. According to various embodiments, when the SMA wire is deactivated in its initial position, the flexure arms 610 are configured to have an initial angle of 5 degrees with respect to the slide base 702. Also, according to various embodiments, at full stroke or when the SMA wires are fully actuated, flexure arm 610 is configured to have an angle of 10 to 12 degrees with respect to slide base 702.

According to the embodiment shown in fig. 6 and 7, the SMA actuator 602 further includes a plain bearing 706 disposed between the slide base 702 and the wire retainer 606. Plain bearing 706 is configured to minimize any friction between sliding base 702 and buckling arm 610 and/or wire retainer 606. The plain bearing of some embodiments is secured to plain bearing 706. According to various embodiments, the sliding bearing is formed from polyoxymethylene ("POM"). One skilled in the art will appreciate that other structures may be used to reduce any friction between the buckling actuator and the base.

According to various embodiments, the slide base 702 is configured to couple with a component base 704, such as an autofocus base of an autofocus component. According to some embodiments, the actuator base 704 includes etched pads. Such etched shims may be used to provide clearance for the wires and crimps when the SMA actuator 602 is part of an assembly, such as an autofocus assembly.

Figure 8 illustrates multiple views of an embodiment of a buckling actuator 802 relative to an x-axis, a y-axis, and a z-axis. As shown in fig. 8, the flex arm 804 is configured to move along the z-axis when the SMA wire is actuated and de-actuated as described herein. According to the embodiment shown in fig. 8, the flex arms 804 are coupled to each other by a central portion, such as a hammock (sling) portion 806. According to various embodiments, the hammock portion 806 is configured to support (cradle) a portion of the object that functions as a flexion actuator (e.g., a lens bracket that is moved by the flexion actuator using techniques including those described herein). According to some embodiments, the hammock portion 806 is configured to provide lateral (transverse) stiffness to the buckling actuator during actuation. For other embodiments, the buckling actuators do not include the hammock portion 806. According to these embodiments, the flexion arms are configured to act on the object to cause movement thereof. For example, the flexure arms are configured to act directly on features of the lens carrier to push it upward.

Figure 9 illustrates an SMA actuator configured as an SMA bimorph actuator according to one embodiment. SMA bimorph actuators include bimorph actuators 902, and the bimorph actuators 902 include those bimorph actuators described herein. According to the embodiment shown in fig. 9, one end 906 of each bimorph actuator 902 is fixed to a base 908. According to some embodiments, the one end 906 is welded to the base 908. However, those skilled in the art will appreciate that other techniques may be used to secure the one end 906 to the base 908. Fig. 9 also shows a lens carrier 904, which lens carrier 904 is arranged such that the bimorph actuator 902 is configured to roll up in the z-direction and lift the carrier 904 in the z-direction when actuated. For some embodiments, a return spring is used to push the bimorph actuator 902 back to the initial position. The return spring may be configured as described herein to assist in pushing the bimorph actuator down to its initial de-actuated position. Due to the small footprint of the bimorph actuator, SMA actuators with reduced footprint compared to existing actuator technologies can be manufactured.

Fig. 10 illustrates a cross-sectional view of an autofocus assembly including an SMA actuator including a position sensor, such as a TMR sensor, according to one embodiment. The autofocus assembly 1002 includes a position sensor 1004 attached to a moving spring 1006 and a magnet 1008 attached to a lens carrier 1010 of the autofocus assembly, which includes an SMA actuator such as those described herein. Position sensor 1004 is configured to determine an amount of movement of lens carriage 1010 from an initial position along z-direction 1005 based on a distance of magnet 1008 from position sensor 1004 using techniques including those known in the art. According to some embodiments, the position sensor 1004 is electrically coupled to a controller or processor (e.g., a central processing unit) using a plurality of electrical traces on the spring arm of the movement spring 1006 of the optical image stabilization assembly.

Figures 11a-c illustrate views of a bimorph actuator according to some embodiments. According to various embodiments, the bimorph actuator 1102 comprises a beam 1104 and one or more SMA materials 1106, such as an SMA ribbon 1106b (e.g. as shown in the perspective view of a bimorph actuator comprising an SMA ribbon according to the embodiment of fig. 11 b) or an SMA wire 1106a (e.g. as shown in the cross-section of a bimorph actuator comprising an SMA wire according to the embodiment of fig. 11 a). The SMA material 1106 is secured to the beam 1104 using techniques including those described herein. According to some embodiments, the SMA material 1106 is secured to the beam 1104 using a bond film material 1108. For the various embodiments, the ends of the SMA material 1106 are electrically and mechanically coupled with contacts 1110, the contacts 1110 being configured to supply electrical current to the SMA material 1106 using techniques including those known in the art. According to various embodiments, the contacts 1110 (e.g., as shown in fig. 11a and 11 b) are gold plated copper pads (lands). According to various embodiments, a bimorph actuator 1102 having a length of about 1 millimeter is configured to generate a large stroke and a 50 millinewton ("mN") thrust, and is used as part of a lens assembly, for example as shown in fig. 11 c. According to some embodiments, the use of a bimorph actuator 1102 having a length greater than 1 millimeter will produce a greater stroke but less force than a bimorph actuator 1102 having a length of 1 millimeter. For one embodiment, the bimorph actuator 1102 includes a 20 micron thick SMA material 1106, a 20 micron thick insulator 1112 (e.g., a polyimide insulator), and a 30 micron thick stainless steel beam 1104 or base metal. Various embodiments include a second insulator 1114, the second insulator 1114 being disposed between the contact layer including contacts 1110 and the SMA material 1106. According to some embodiments, the second insulator 1114 is configured to insulate the SMA material 1106 from portions of the contact layer not used as contacts 1110. For some embodiments, the second insulator 1114 is a blanket layer, such as a polyimide insulator. Those skilled in the art will appreciate that other dimensions and materials may be used to meet desired design characteristics.

Figure 12 shows a view of an embodiment of a bimorph actuator according to an embodiment. The embodiment shown in fig. 12 includes a central feed 1204 for applying power (electricity). As described herein, power is supplied at the center of the SMA material 1202 (wire or ribbon). The ends of the SMA material 1202 are grounded to the beam 1206 or base metal at the end pads 1203 as return paths. The end pad 1203 is electrically isolated from the rest of the contact layer 1214. According to various embodiments, the beam 1206 or base metal is pressed against the SMA material 1202 (e.g., SMA wire) along the entire length of the SMA material 1202 such that the wire can cool down faster when the current is turned off (i.e., when the bimorph actuator is de-actuated). This makes wire deactivation faster and actuator response time faster. The thermal profile (performance) of the SMA wire or ribbon is improved. For example, the thermal profile is more uniform, so that a higher total current can be reliably delivered to the wire. Without uniform heat dissipation, certain portions of the wire (e.g., the central area) may overheat and break, requiring reduced current and reduced motion to operate reliably. The center feed 1204 has the following advantages: the SMA material 1202 has faster wire activation/actuation (faster heating) and reduced power consumption (lower resistive path length), enabling faster response times. This allows the movement of the actuator to be faster and enables operation at higher movement frequencies.

As shown in fig. 12, the beam 1206 includes a central metal 1208, the central metal 1208 being isolated from the rest of the beam 1206 to form the central feed 1204. An insulator 1210, such as the insulators described herein, is disposed on the beam 1206. The insulator 1210 is configured with one or more openings or vias 1212 to provide an electrical path to the beam 1206 (e.g., to couple the ground portion 1214b of the contact layer) and to provide contact with the central metal 1208 to form the central feed 1204. According to some embodiments, a contact layer 1214, such as those described herein, includes a power portion 1214a and a ground portion 1214b to provide actuation/control signals to the bimorph actuator through a power contact 1216 and a ground contact 1218. A cover layer 1220, such as those described herein, is disposed on the contact layer 1214 to electrically isolate the contact layer 1214 at portions of the contact layer other than those portions (e.g., one or more contacts) where electrical coupling is desired.

Figure 13 shows a cross-section of an end pad of a bimorph actuator according to the embodiment shown in figure 12. As described above, the end pad 1203 is electrically isolated from the rest of the contact layer 1214 by the gap 1222 formed between the end pad 1203 and the contact layer 1214. According to some embodiments, the gap is formed using an etching technique, including techniques known in the art. The end pad 1203 includes a via portion 1224 configured to electrically couple the end pad 1203 with the beam 1206. The via portion 1224 is formed in a via 1212 formed in the insulator 1210. The SMA material 1202 is electrically coupled to the end pads 1213. The SMA material 1202 may be electrically coupled to the end pads 1213 using techniques including, but not limited to, welding, resistance welding, laser welding, and direct plating.

Figure 14 shows a cross-section of a center feed of a bimorph actuator according to the embodiment shown in figure 12. The center feed 1204 is electrically coupled to a power source through the contact layer 1214 and is electrically and thermally coupled to the center metal 1208 through a via portion 1226 in the center feed 1204 formed in a via 1212 formed in the insulator 1210.

The actuators described herein can be used to form actuator assemblies that use multiple buckling actuators and/or multiple bimorph actuators. According to one embodiment, the actuators may be stacked on top of each other in order to increase the stroke distance that can be achieved.

Figure 15 shows an exploded view of an SMA actuator including two buckling actuators according to one embodiment. According to embodiments described herein, the two buckling

actuators

1302, 1304 are arranged relative to each other such that their movements oppose each other. For the various embodiments, the two

flexion actuators

1302, 1304 are configured to move in an opposing relationship to each other to position the lens carriage 1306. For example, first flexion actuator 1302 is configured to receive a power signal that is opposite to a power (electrical) signal sent to second flexion actuator 1304.

Figure 16 illustrates an SMA actuator including two buckling actuators according to one embodiment. Buckling

actuators

1302, 1304 are configured such that buckling arms 1310, 1312 of each buckling

actuator

1302, 1304 face each other, and sliding

base

1314, 1316 of each buckling

actuator

1302, 1304 is an outer surface of both buckling actuators. According to various embodiments, the hammock portion 1308 of each

SMA actuator

1302, 1304 is configured to support a portion of an object acted upon by the one or more buckling actuators 1302, 1304 (e.g., the lens bracket 1306 moved by the buckling actuators using techniques including those described herein).

Figure 17 shows a side view of an SMA actuator comprising two buckling actuators showing the direction of the SMA wires 1318 causing an object such as a lens carrier to move in the positive z-direction or upward direction according to one embodiment.

Figure 18 shows a side view of an SMA actuator comprising two buckling actuators showing the direction of the SMA wire 1318 causing an object such as a lens carrier to move in a negative z-direction or downward direction according to one embodiment.

Figure 19 shows an exploded view of an assembly including an SMA actuator according to one embodiment, including two buckling actuators. Buckling

actuators

1902, 1904 are configured such that buckling arms 1910, 1912 of each buckling

actuator

1902, 1904 are the outer surfaces of both buckling actuators, and sliding

bases

1914, 1916 of each buckling

actuator

1902, 1904 face each other. According to various embodiments, the hammock portion 1908 of each

SMA actuator

1902, 1904 is configured to support a portion of an object acted on by the one or more buckling actuators 1902, 1904 (e.g., a lens bracket 1906 moved by the buckling actuators using techniques including those described herein). For some embodiments, the SMA actuator includes a base portion 1918 configured to receive second buckling actuator 1904. The SMA actuator may also include a cover portion 1920. Figure 20 illustrates an SMA actuator including two buckling actuators including a base portion and a cover portion according to one embodiment.

Figure 21 illustrates an SMA actuator including two buckling actuators according to one embodiment. For some embodiments, the buckling

actuators

1902, 1904 are arranged relative to one another such that the hammock portion 1908 of the first buckling actuator 1902 is rotated approximately 90 degrees relative to the hammock portion of the second buckling actuator 1904. The 90 degree configuration enables pitch and roll rotation of an object such as lens carrier 1906. This enables better control of the movement of the lens holder 1906. For the various embodiments, differential power signals are applied to the SMA wires of each buckling actuator pair to cause the lens carrier to perform pitch and roll rotations to effect the tilt OIS motion.

Embodiments of SMA actuators that include two buckling actuators need not have return springs. When using SMA wire resistance for position feedback, the use of two buckling actuators may improve/reduce hysteresis. The reaction force SMA actuator comprising two buckling actuators helps achieve more precise position control due to lower hysteresis compared to an actuator comprising a return spring. For some embodiments, such as the embodiment shown in fig. 22, an SMA actuator comprising two buckling

actuators

2202, 2204 provides 2-axis tilt by applying differential power to the left and right SMA wires 2218a, 2218b of each buckling

actuator

2202, 2204. For example, the left SMA wire 2218a is actuated at a higher power than the right SMA wire 2218 b. This causes the left side of the lens holder 2206 to move downward and the right side to move (tilt) upward. For some embodiments, the SMA wires of first buckling actuator 2202 are held at equal power to serve as a fulcrum for differential pushing of SMA wires 2218a, 2218b to cause the tilting motion. Reversing the power signals applied to the SMA wires, for example applying equal power to the SMA wires of the second buckling actuator 2202 and applying differential power to the left and right SMA wires 2218a, 2218b of the second buckling actuator 2204, will cause the lens carrier 2206 to tilt in the other direction. This enables the object (e.g. the lens holder) to be tilted along either axis of motion, or any tilt between the lens and the sensor can be called out to obtain a good dynamic tilt, resulting in better image quality on all pixels.

Figure 23 illustrates an SMA actuator including two buckling actuators and one coupler according to one embodiment. The SMA actuator includes two buckling actuators, such as those described herein. First flexion actuator 2302 is configured to couple with second flexion actuator 2304 using a coupler, such as coupler loop 2305. The buckling

actuators

2302, 2304 are arranged relative to each other such that the hammock portion 2308 of the first buckling actuator 2302 is rotated approximately 90 degrees relative to the hammock portion 2309 of the second buckling actuator 2304. A payload (e.g., a lens or lens assembly) for movement is attached to a lens bracket 2306, the lens bracket 2306 configured to be disposed on a sliding base of the first buckling actuator 2302.

For the various embodiments, equal power may be applied to the SMA wires of first and second buckling

actuators

2302, 2304. This may result in maximizing the z-stroke of the SMA actuator in the positive z-direction. For some embodiments, the stroke of the SMA actuator may have a z-stroke equal to or greater than twice the stroke of other SMA actuators including two buckling actuators. For some embodiments, additional springs pushing against both flexures (actuators) may be added to help push the actuator assembly and payload back down when the power signal is removed from the SMA actuator. Equal and opposite power signals may be applied to the SMA wires of first buckling actuator 2302 and second buckling actuator 2304. This enables the SMA actuator to be moved by the buckling actuator in the positive z-direction and to be moved by the buckling actuator in the negative z-direction, which enables the position of the SMA actuator to be accurately controlled. Further, equal and opposite power signals (differential power signals) may be applied to the left and right SMA wires of first and second buckling

actuators

2302, 2304 to tilt an object, such as lens bracket 2306, in the direction of at least one of the two axes.

An embodiment of an SMA actuator comprising two buckling actuators and couplers (such as that shown in fig. 23) may be coupled with an additional buckling actuator and a pair of buckling actuators to achieve a greater desired stroke than a single SMA actuator.

Fig. 24 shows an exploded view of an SMA system including an SMA actuator according to one embodiment including a buckling actuator with a laminated hammock. As described herein, for some embodiments, an SMA system is configured to be used with one or more camera lens elements as an autofocus drive. As shown in fig. 24, the SMA system includes a return spring 2403, which return spring 2403 is configured to move the lens carrier 2406 in a direction opposite to the z-stroke direction when the tension in the SMA wires 2408 is reduced due to the SMA wires de-actuating, according to various embodiments. For some embodiments, the SMA system comprises a housing 2409 configured to receive a return spring 2403 and to act as a sliding bearing that guides movement of the lens carrier along the z-stroke direction. Housing 2409 is also configured to be disposed over buckling actuator 2402. Buckling actuator 2402 includes a slide base 2401 similar to those described herein. The buckling actuator 2402 includes a buckling arm 2404 coupled with a hammock portion (e.g., a laminated hammock 2406 formed of laminate). The buckling actuator 2402 also includes an SMA wire attachment structure, such as a crimp connection 2412 formed by lamination.

As shown in fig. 24, the slide base 2401 is disposed on an optional adapter plate 2414. The adapter plate is configured to mate the SMA system or buckling actuator 2402 with another system (e.g., OIS, additional SMA system, or other component). Fig. 25 shows an SMA system 2501 comprising an SMA actuator according to one embodiment comprising a buckling actuator 2402 with a laminated hammock.

Figure 26 illustrates a buckling actuator including a laminated hammock, according to one embodiment. Flexure actuator 2402 includes flexure arms 2404. As described herein, flexure arms 2404 are configured to move along the z-axis when SMA wires 2412 are actuated and de-actuated. SMA wires 2408 are attached to the buckling actuators using crimp connections 2412 formed by lamination. According to the embodiment shown in fig. 26, flex arms 2404 are coupled to each other through a central portion such as a laminated hammock 2406. According to various embodiments, the laminate hammock 2406 is configured to support a portion of the object acted upon by the flexion actuator (e.g., a lens bracket moved by the flexion actuator using techniques including those described herein).

Fig. 27 shows a laminated hammock of SMA actuators according to one embodiment. For some embodiments, the material of the laminated hammock 2406 is a low stiffness material so it does not resist actuation motions. For example, the laminated hammock 2406 is formed using a copper layer disposed on a first polyimide layer and a second polyimide layer disposed on the copper. For some embodiments, laminated hammocks 2406 are formed on flex arms 2404 using deposition and etching techniques, including techniques known in the art. For other embodiments, the laminated hammock 2406 is formed separately from the flexure arm 2404 and attached to the flexure arm 2404 using techniques including welding, adhesives, and other techniques known in the art. For the various embodiments, glue or other adhesive is used on the laminated hammock 2406 to ensure that the flexure arms 2404 remain in place relative to the lens bracket.

Fig. 28 shows a laminated crimp connection of an SMA actuator according to one embodiment. The laminate formed crimp connection 2412 is configured to attach the SMA wire 2408 to the buckling actuator and form a circuit joint with the SMA wire 2408. For the various embodiments, the laminate-formed crimp connection 2412 comprises a laminate formed of one or more conductive layers and one or more insulators formed on the crimp.

For example, a polyimide layer is provided on at least a part of a stainless steel portion forming the crimp 2413. A conductive layer, such as copper, is then disposed on the polyimide layer that is electrically coupled to one or more signal traces 2415 disposed on the flexure actuators. Deforming the crimp to bring the crimp into contact with the SMA wire therein also brings the SMA wire into electrical contact with the electrically conductive layer. Thus, the electrically conductive layer coupled with the one or more signal traces is used to apply a power signal to the SMA wire using techniques including those described herein. For some embodiments, a second polyimide layer is formed on the electrically conductive layer in areas where the electrically conductive layer will not be in contact with the SMA wire. For some embodiments, a laminate formed crimp connection 2412 is formed on crimp 2413 using deposition and etching techniques, including those known in the art. For other embodiments, the laminate-formed crimp connection 2412 and the one or more electrical traces are formed separately from the crimp 2413 and the buckling actuator and attached to the crimp 2412 and the buckling actuator using techniques including welding, gluing, and other techniques known in the art.

Figure 29 illustrates an SMA actuator including a buckling actuator with a laminated hammock. As shown in fig. 29, when a power signal is applied, the SMA wires will contract or shorten to move the flexure arm and the laminated hammock in the positive z-direction. While the laminated hammock in contact with the object moves the object (e.g., lens holder) in the positive z-direction. When the power signal is reduced or removed, the SMA wire will lengthen and move the flexure arm and the laminated hammock in the negative z-direction.

Fig. 30 shows an exploded view of an SMA system including an SMA actuator according to one embodiment, including a buckling actuator. As described herein, for some embodiments, an SMA system is configured to be used with one or more camera lens elements as an autofocus actuator. As shown in fig. 30, the SMA system includes a return spring 3003, which return spring 3003 is configured to move the lens carrier 3005 in a direction opposite the z-stroke direction when the tension in the SMA wires 3008 is reduced due to the SMA wires de-actuating, according to various embodiments. For some embodiments, the SMA system includes a stiffener 3000 disposed on the return spring 3003. For some embodiments, the SMA system includes a two-part housing 3009, the housing 3009 configured to receive a return spring 3003 and to act as a sliding bearing to guide movement of the lens carriage along the z-stroke direction. The housing 3009 is also configured to be disposed on the buckling actuator 3002. The buckling actuator 3002 comprises a slide base 3001, which slide base 3001 is formed of two parts similar to the slide bases described herein. The slide base 3001 is split to electrically isolate the two sides (e.g., one side is grounded and the other side is powered) because current flows to the wires through some portion of the slide base 3001 according to some embodiments.

The flexure actuator 3002 includes a flexure arm 3004. Each pair of buckling actuators 3002 is formed on a separate portion of buckling actuators 3002. Buckling actuator 3002 also includes SMA wire attachment structures, such as resistance welded wire crimps 3012. The SMA system optionally includes a flexible circuit 3020 for electrically coupling the SMA wires 3008 to one or more control circuits.

As shown in fig. 30, the slide base 3001 is provided on an optional adapter board 3014. The adapter plate is configured to mate the SMA system or buckling actuator 3002 with another system (e.g., OIS, additional SMA system, or other component). Fig. 31 shows an SMA system 3101 including an SMA actuator according to one embodiment that includes a buckling actuator 3002.

Figure 32 includes an SMA actuator including a buckling actuator according to one embodiment. The flexure actuator 3002 includes a flexure arm 3004. The flex arms 3004 are configured to move along the z-axis when the SMA wire 3012 is actuated and de-actuated as described herein. SMA wire 2408 is attached to a resistance weld wire crimp 3012. According to the embodiment shown in fig. 32, flexure arm 3004 is configured to mate with an object (e.g., a lens carrier) without using a central portion of a two yoke capture joint.

Fig. 33 shows a two yoke capture joint of a pair of flexure arms of an SMA actuator according to one embodiment. Fig. 33 also shows plated pads for attaching an optional flexible circuit to the slide base. For some embodiments, the plated pads are formed using gold. Figure 34 illustrates a resistance weld crimp of an SMA actuator used to attach an SMA wire to a buckling actuator, according to one embodiment. For some embodiments, glue or adhesive may also be applied on top of the weld to help improve mechanical strength and to act to relieve fatigue strain during handling and impact loading.

Figure 35 illustrates an SMA actuator including a buckling actuator with a two yoke capture joint. As shown in fig. 35, when a power signal is applied, the SMA wire will contract or shorten to move the flexure arm in the positive z-direction. And a two yoke capture joint in contact with an object (e.g., a lens holder) moves the object in the positive z-direction. When the power signal is reduced or removed, the SMA wire lengthens and moves the flexure arm in the negative z-direction. The yoke capture feature may ensure that the flexure arm is held in the correct position relative to the lens carrier.

Figure 36 shows an SMA bimorph liquid lens according to one embodiment. SMA bimorph liquid lens 3501 includes a liquid lens subassembly 3502, a housing 3504, and an electrical circuit 3506 with SMA actuators. For various embodiments, the SMA actuator comprises four bimorph actuators 3508, such as the embodiments described herein. The bimorph actuator 3508 is configured to push a shaped ring 3510 located on a flexible membrane 3512. The ring bends the membrane 3512/liquid 3514, thereby changing the optical path through the membrane 3512/liquid 3514. Liquid containment ring 3516 is used to contain liquid 3514 between membrane 3512 and lens 3518. Equal force from the bimorph actuator changes the focus of the image in the Z direction (perpendicular to the lens), which makes it useful as an autofocus device. According to some embodiments, the differential (different) force from the bimorph actuator 3508 may move the light ray along the X, Y axis direction, which makes it useful as an optical image stabilizer. By appropriately controlling each actuator, both OIS (optical image stabilization) and AF (auto focus) functions can be realized. For some embodiments, three actuators are used. The circuit 3506 with SMA actuator includes one or more contacts 3520 for transmitting control signals to actuate the SMA actuator. According to some embodiments including four SMA actuators, the circuit 3506 with SMA actuators includes four power circuit control contacts and one common return contact for each SMA actuator.

Figure 37 shows a perspective view of an SMA bimorph liquid lens according to one embodiment. Figure 38 shows a cross-sectional view and a bottom view of an SMA bimorph liquid lens according to one embodiment.

Fig. 39 illustrates an SMA system including an SMA actuator 3902 with a bimorph actuator according to one embodiment. The SMA actuator 3902 includes four bimorph actuators using the techniques described herein. As shown in fig. 40, the two bimorph actuators are configured as positive z-stroke actuators 3904 and the two bimorph actuators are configured as negative z-stroke actuators 3906, in which an SMA actuator 3902 with a bimorph actuator is shown, according to one embodiment. The opposing

actuators

3906, 3904 are configured to control movement in two directions throughout a range of travel. This enables the control code to be adjusted to compensate for tilt. For the various embodiments, two SMA wires 3908 attached to the top of the component effect a positive z stroke displacement. Two SMA wires attached to the bottom of the part can achieve a negative z-stroke displacement. For some embodiments, each bimorph actuator is attached to an object (e.g., lens bracket 3910) by engaging the object with a tab. The SMA system includes top springs 3912 configured to provide stability to the lens carrier 3910 in an axis perpendicular to the z-stroke axis (e.g., in the directions of the x-axis and the y-axis). Additionally, a top spacer 3914 is configured to be disposed between top spring 3912 and SMA actuator 3902. The bottom spacer 3916 is disposed between the SMA actuator 3902 and the bottom spring 3918. The bottom springs 3918 are configured to provide stability to the lens carrier 3910 in an axis perpendicular to the z-stroke axis (e.g., in the directions of the x-axis and the y-axis). Bottom spring 3918 is configured to be disposed on a base 3920 (e.g., a base described herein).

Fig. 41 shows the length 4102 of the bimorph actuator 4103 and the location of the wire pads 4104 used to extend the wire length of the SMA wire 4206 beyond the bimorph actuator. Longer wires than bimorph actuators are used to increase stroke and force. Thus, the SMA wire 4206 exceeds the extension length 4108 of the bimorph actuator 4103 for setting the stroke and force of the bimorph actuator 4103.

Fig. 42 shows an exploded view of an SMA system comprising an SMA bimorph actuator 4202 according to an embodiment. According to various embodiments, an SMA system is configured to create one or more circuits using separate metallic materials and non-conductive adhesives to independently power SMA wires. Some embodiments do not affect AF size and include four bimorph actuators, such as those described herein. The two bimorph actuators are configured as positive z-stroke actuators and the two bimorph actuators are configured as negative z-stroke actuators. Fig. 43 shows an exploded view of a sub-portion of an SMA actuator according to one embodiment. This subsection includes a negative actuator signal connector 4302, a base 4304 with a bimorph actuator 4306. The negative actuator signal connector 4302 includes a wiring pad 4308 for connecting SMA wires of the bimorph actuator 4306 using techniques including those described herein. The negative actuator signal connector 4302 is secured to the base 4304 using an adhesive layer 4310. This subsection also includes a positive actuator signal connection 4314, the positive actuator signal connection 4314 carrying a wiring pad 4316 for connecting the SMA wire 4312 of the bimorph actuator 4306 using techniques including those described herein. The positive actuator signal connector 4314 is secured to the base 4304 using an adhesive layer 4318. Each of the base 4304, negative actuator signal connector 4302, and positive actuator signal connector 4314 is formed of a metal, such as stainless steel. The connection pads 4322 on each of the base 4304, the negative actuator signal connector 4302, and the positive actuator signal connector 4314 are configured to electrically couple the control signal and ground using techniques including those described herein to actuate the bimorph actuator 4306. For some embodiments, the connection pads 4322 are gold plated. Fig. 44 shows a sub-portion of an SMA actuator according to an embodiment. For some embodiments, gold plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. In addition, the formed bond pads are used for signal contacts to electrically couple SMA wires for power signals.

FIG. 45 illustrates a five axis sensor shift system according to one embodiment. The five-axis sensor displacement system is configured to move an object (e.g., an image sensor) relative to one or more lenses along five axes. Including X/Y/Z axis translation and pitch/roll tilt. Optionally, the system is configured to use only four axes (i.e., X/Y axis pan and pitch/roll tilt) and has a separate AF on top to perform the Z motion. Other embodiments include a five-axis sensor displacement system configured to move one or more lenses relative to an image sensor. For some embodiments, the static stack of lenses is mounted on the top cover and inserted into the ID (without contacting the inner orange moving carriage).

FIG. 46 illustrates an exploded view of a five axis sensor displacement system in accordance with one embodiment. This five sensor shift systems includes: two circuit components, namely, a flexible sensor circuit 4602, a bimorph actuator circuit 4604; and 8-12 bimorph actuators 4606 built on the bimorph circuit component using techniques including those described herein. The five axis sensor displacement system includes a moving carriage 4608 configured to hold one or more lenses and a housing 4610. According to one embodiment, the bimorph actuator circuit 4604 includes 8-12 SMA actuators, such as the SMA actuators described herein. The SMA actuators are configured to move the moving carriage 4608 along five axes (e.g., x-direction, y-direction, z-direction, pitch, and roll), similar to the other five axis systems described herein.

Figure 47 shows an SMA actuator according to one embodiment comprising a bimorph actuator integrated into the circuit for all motions. An embodiment of an SMA actuator may include 8-12 bimorph actuators 4606. However, other embodiments may include more or fewer bimorph actuators. Fig. 48 shows an SMA actuator 4802 according to one embodiment, the SMA actuator 4802 comprising a bimorph actuator integrated into the circuit for all movements, and the SMA actuator 4802 being formed in part to fit within a respective housing 4804. FIG. 49 illustrates a cross-section of a five axis sensor displacement system according to one embodiment.

Figure 50 illustrates an SMA actuator 5002 including a bimorph actuator according to one embodiment. The SMA actuator 5002 is configured to move an image sensor, lens, or other various payloads along the x-direction and y-direction using four side-mounted SMA bimorph actuators 5004. Figure 51 shows a top view of an SMA actuator comprising a bimorph actuator which moves an image sensor, lens, or other various payloads to different x and y positions.

Figure 52 illustrates an SMA actuator comprising a bimorph actuator 5202 configured as a cassette bimorph autofocus device according to one embodiment. Four top and bottom mounted SMA bimorph actuators (such as the SMA bimorph actuators described herein) are configured to move together to produce movement in the z-stroke direction for autofocus motion. Figure 53 shows an SMA actuator comprising a bimorph actuator according to one embodiment and wherein the two top-mounted bimorph actuators 5302 are configured to push one or more lenses downward. Figure 54 shows an SMA actuator comprising a bimorph actuator according to one embodiment and wherein two bottom-mounted bimorph actuators 5402 are configured to push one or more lenses upward. Figure 55 shows an SMA actuator comprising bimorph actuators according to one embodiment to illustrate four top and bottom mounted SMA bimorph actuators 5502, such as described herein, for moving the one or more lenses to produce a tilting motion.

Fig. 56 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a two-axis lens-displacement OIS, according to one embodiment. For some embodiments, the two-axis lens shift OIS is configured to move the lens along the X/Y axis. For some embodiments, the Z-axis movement is from a separate AF, such as those described herein. Four bimorph actuators push the sides of the autofocus device for OIS motion. Fig. 57 shows an exploded view of an SMA system comprising an SMA actuator 5802 according to one embodiment, the SMA actuator 5802 comprising a bimorph actuator 5806 configured as a two-axis lens displacement OIS. Fig. 58 shows a cross-section of an SMA system including an SMA actuator 5802 according to one embodiment, the SMA actuator 5802 including a bimorph actuator 5806 configured as a two-axis lens displacement OIS. Figure 59 shows a cassette bimorph actuator 5802 for an SMA system according to one embodiment, the cassette bimorph actuator 5802 being configured as a two-axis lens displacement OIS as shaped to fit a previously manufactured system. Such a system may be configured as an OIS with a high OIS stroke (e.g., +/-200um or higher). Further, such embodiments are configured to use four plain bearings (e.g., POM plain bearings) with a wide range of motion and good OIS dynamic tilting. These embodiments are configured to be easily integrated with AF designs (e.g., VCM or SMA).

Fig. 60 illustrates an SMA system including an SMA actuator according to one embodiment comprising a bimorph actuator configured as a five-axis lens-shift OIS and an autofocus device. For some embodiments, the five-axis lens shift OIS and autofocus arrangement are configured to move the lens along the X/Y/Z axis. For some embodiments, pitch and yaw axis motion is used for dynamic pitch tuning capabilities. Using the techniques described herein, eight bimorph actuators are used to move the autofocus device and OIS. Fig. 61 shows an exploded view of an SMA system comprising an SMA actuator 6202 according to an embodiment, the SMA actuator 6202 comprising a bimorph actuator 6204 according to an embodiment, the bimorph actuator 6204 being configured as a five-axis lens shift OIS and an autofocus device. Fig. 62 shows a cross-section of an SMA system comprising an SMA actuator 6202 according to an embodiment, the SMA actuator 6202 comprising a bimorph actuator 6204 configured as a five-axis lens-shift OIS and a autofocus arrangement. Figure 63 illustrates a cassette bimorph actuator 6202 for an SMA system according to one embodiment, the cassette bimorph actuator 6202 configured as a five-axis lens-displacement OIS and autofocus device as shaped to fit previously manufactured for the system. Such a system may be configured with high OIS runs (e.g., +/-200um or higher) and high autofocus runs (e.g., 400um or higher). Furthermore, such an embodiment enables the elimination of any tilt and does not require a separate autofocus assembly.

Fig. 64 illustrates an SMA system including an SMA actuator according to one embodiment that includes a bimorph actuator configured to push the cassette outward. For some embodiments, the bimorph actuator assembly is configured to be wrapped around an object, such as a lens holder. Since the circuit assembly moves with the lens holder, the X/Y/Z stiffness of the flexible portion is low. The tail pad of the circuit is static. The push-out cartridge may be configured as four or eight bimorph actuators. Thus, the push-out cartridge may be configured as four bimorph actuators on the OIS side and move in the X and Y axes. The push-out cartridge may be configured as four bimorph actuators on the top and bottom of the autofocus device to move in the z-axis. The push-out pod can be configured as eight bimorph actuators on the OIS and autofocus device top, bottom, and sides to move in the x, y, and z axes and can perform 3-axis tilt (pitch/roll/yaw). Fig. 65 shows an exploded view of an SMA system comprising an SMA actuator 6602 according to one embodiment, the SMA actuator 6602 comprising a bimorph actuator 6604 configured to push the cell outward. Thus, the SMA actuator is configured such that the bimorph actuator acts on the housing 6504 to move the lens carrier 6506 using the techniques described herein. Fig. 66 illustrates an SMA system including an SMA actuator 6602 according to one embodiment, the SMA actuator 6602 including a bimorph actuator configured to push a cell outward, the push-outward cell being partially shaped to receive a lens carrier 6604. Fig. 67 shows an SMA system comprising an SMA actuator 6602 with a bimorph actuator 6604 according to one embodiment, the bimorph actuator 6604 being configured as an outwardly pushing box as shaped to fit the system was previously manufactured.

Fig. 68 shows an SMA system comprising an SMA actuator 6802 according to one embodiment, the SMA actuator 6802 comprising a bimorph actuator configured as a three-axis sensor displacement OIS. For some embodiments, the z-axis movement is from a separate autofocus system. The four bimorph actuators are configured to push the sides of the sensor bracket 6804 in order to move the OIS using the techniques described herein. Fig. 69 shows an exploded view of an SMA comprising an SMA actuator 6802 according to one embodiment, the SMA actuator 6802 comprising a bimorph actuator configured as a three-axis sensor displacement OIS. Fig. 70 shows a cross-section of an SMA system comprising an SMA actuator 6802 according to an embodiment, the SMA actuator 6802 comprising a bimorph actuator 6806 configured as a three-axis sensor displacement OIS. Figure 71 shows the components of a cassette bimorph actuator 6802 for an SMA system according to one embodiment configured as a three-axis sensor displacement OIS shaped to fit the system previously fabricated. Fig. 72 illustrates a flexible sensor circuit for an SMA system configured as a three-axis sensor displacement OIS, in accordance with one embodiment. Such a system may be configured with high OIS runs (e.g., +/-200um or higher) and high autofocus runs (e.g., 400um or higher). Further, such embodiments are configured to have a wide range of two-axis motion and good OIS dynamic tilt using four sliding bearings (e.g., POM sliding bearings). These embodiments are configured to be easily integrated with AF designs (e.g., VCM or SMA).

Fig. 73 illustrates an SMA system comprising an SMA actuator 7302 according to one embodiment, the SMA actuator 7302 comprising a bimorph actuator 7304 configured as a six-axis sensor displacement OIS and an autofocus arrangement. For some embodiments, the six-axis sensor shift OIS and autofocus device are configured to move the lens on the X/Y/Z/pitch/yaw/roll axis. For some embodiments, pitch and yaw axis motion is used for dynamic pitch tuning capabilities. Using the techniques described herein, eight bimorph actuators are used to move the autofocus and OIS devices. Fig. 74 shows an exploded view of an SMA system comprising an SMA actuator 7402 according to one embodiment, the SMA actuator 7402 comprising a bimorph actuator 7404 configured as a six-axis sensor displacement OIS and an autofocus device. Fig. 75 shows a cross-section of an SMA system comprising an SMA actuator 7402 according to one embodiment, the SMA actuator 7402 comprising a bimorph actuator configured as a six-axis sensor displacement OIS and an autofocus device. Figure 76 shows a cassette bimorph actuator 7402 for an SMA system according to one embodiment, the cassette bimorph actuator 7402 being configured as a six-axis sensor displacement OIS and autofocus device as shaped to fit a previously manufactured system. Fig. 77 illustrates a flexible sensor circuit for an SMA system configured as a three-axis sensor displacement OIS, according to one embodiment. Such a system may be configured with high OIS runs (e.g., +/-200um or higher) and high autofocus runs (e.g., 400um or higher). Furthermore, such an embodiment enables the elimination of any tilt and does not require a separate autofocus assembly.

Fig. 78 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a two-axis camera tilt OIS, according to one embodiment. For some embodiments, the two-axis camera tilt OIS is configured to move the camera in the pitch/yaw axis. Using the techniques described herein, four bimorph actuators are used to push the top and bottom of the autofocus device throughout the camera motion to achieve OIS pitch and yaw motion. Fig. 79 shows an exploded view of an SMA system including an SMA actuator 7902 according to one embodiment, the SMA actuator 7902 including a bimorph actuator 7904 configured as a two-axis camera tilt OIS. Fig. 80 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a two-axis camera tilt OIS, according to one embodiment. Figure 81 shows a cassette bimorph actuator for an SMA system configured as a two-axis camera tilt OIS shaped to fit a two-axis camera previously manufactured for the system, according to one embodiment. Fig. 82 illustrates a flexible sensor circuit for an SMA system configured as a two-axis camera tilt OIS, according to one embodiment. Such systems may be configured for OIS with high OIS travel (e.g., plus or minus 3 degrees or higher). These embodiments are configured to be easily integrated with an auto-focus ("AF") design (e.g., VCM or SMA).

Fig. 83 illustrates an SMA system including an SMA actuator according to one embodiment that includes a bimorph actuator configured as a three-axis camera tilt OIS. For some embodiments, the two-axis camera tilt OIS is configured to move the camera along the pitch/yaw/roll axis. Using the techniques described herein, four bimorph actuators are used to push the top and bottom of the autofocus device throughout the camera motion to achieve OIS pitch and yaw motion, and using the techniques described herein, four bimorph actuators are used to push the sides of the autofocus device throughout the camera motion to achieve OIS roll motion. Fig. 84 illustrates an exploded view of an SMA system including an SMA actuator 8402 according to one embodiment, the SMA actuator 8402 including a bimorph actuator 8404 configured as a three-axis camera tilt OIS. Fig. 85 shows a cross-section of an SMA system including an SMA actuator according to one embodiment comprising a bimorph actuator configured as a three-axis camera tilt OIS. Figure 86 shows a cassette bimorph actuator for an SMA system configured as shaped to fit a three-axis camera tilt OIS that the system was previously manufactured into, according to one embodiment. Fig. 87 shows a flexible sensor circuit for an SMA system configured as a three-axis camera tilt OIS, according to one embodiment. Such systems may be configured for OIS with high OIS travel (e.g., plus or minus 3 degrees or higher). These embodiments are configured to be easily integrated with AF designs (e.g., VCM or SMA).

Fig. 88 illustrates exemplary dimensions of a bimorph actuator of an SMA actuator according to various embodiments. These dimensions are preferred embodiments, but those skilled in the art will appreciate that other dimensions may be used based on the desired characteristics of the SMA actuator.

FIG. 89 illustrates a lens system for a folded camera according to one embodiment. The folded camera includes a folded lens 8902, the folded lens 8902 configured to bend light into a lens system 8901 including one or more lenses 8903 a-d. For some embodiments, the folded lens is any one or more of a prism and a lens. The lens system 8901 is configured to have a principal axis 8904, the principal axis 8904 being at an angle to the transmission axis 8906, the transmission axis 8906 being parallel to the direction of travel of the light before it reaches the folded lens 8902. For example, a folded camera may be used in a camera phone system to reduce the height of the lens system 8901 in the direction of the transmission axis 8906.

Embodiments of the lens system include one or more liquid lenses, such as those described herein. The embodiment shown in fig. 89 includes two liquid lenses 8903b, d, such as those described herein. The one or more liquid lenses 8903b, d are configured to be actuated using techniques, including those described herein. The liquid lens is actuated using actuators including, but not limited to, buckling actuators, bimorph actuators, and other SMA actuators. Figure 108 illustrates a liquid lens actuated using a buckling actuator 60 according to one embodiment. The liquid lens includes a contoured ring coupler 64, a liquid lens assembly 61, one or more flexion actuators 60 such as described herein, a slide base 65, and a base 62. The one or more buckling actuators 60 are configured to move the shaping ring/coupler 64 to change the shape of the flexible membrane of the liquid lens assembly 61 to move or shape the light rays, e.g., as described herein. For some embodiments, three or four actuators are used. The liquid lens may be configured alone or in combination with other lenses to serve as an auto-focusing device or an optical image stabilizer. The liquid lens may also be configured to direct the image onto the image sensor in other ways.

FIG. 90 shows several embodiments of a lens system 9001, the lens system 9001 comprising liquid lenses 9002a-h to focus an image on an image sensor 9004. As shown, the liquid lenses 9002a-h can have any lens shape and be configured to dynamically adjust the optical path through the lenses using techniques including those described herein.

The lens system for a folded camera is configured to include an actuated folded lens 9100. An example of an actuated fold lens is a prism tilt device, such as shown in FIG. 91. In the example shown in fig. 91, the folding lens is a prism 9102 provided on an actuator 9104. Including but not limited to SMA actuators including the actuators described herein. For some embodiments, the prism tilt apparatus is disposed on an SMA actuator comprising four bimorph actuators 9106 (e.g., those bimorph actuators described herein). According to some embodiments, actuated folded lens 9100 is configured as an optical image stabilizer using techniques including those described herein. For example, the actuated folded lens is configured to include an SMA system such as the one shown in fig. 39. Another example of an actuated folded lens may include an SMA actuator such as the SMA actuator shown in fig. 21. However, the folded lens may also comprise other actuators.

Figure 92 illustrates a bimorph arm with an offset according to one embodiment. The bimorph arm 9201 includes a bimorph beam 9202 having a shaped offset 9203. The shaped offset 9203 adds mechanical advantage to generate higher forces than a bimorph arm without an offset. According to some embodiments, the depth 9204 of the offset (also referred to herein as the bending plane z-offset 9204) and the length 9206 of the offset (also referred to herein as the valley width 9206) are configured to define a characteristic of the bimorph arm, such as a peak force. For example, the curve in fig. 106 shows the relationship between the bending plane z-offset 9204, valley width 9206, and peak force of the bimorph beam 9202, according to one embodiment.

The bimorph arm includes one or more SMA materials, such as SMA ribbon or SMA wire 9210, such as those SMA materials described herein. The SMA material is secured to the beam using techniques including those described herein. For some embodiments, the SMA material (e.g., SMA wire 9210) is attached to the fixed end 9212 of the bimorph arm and the load point end 9214 of the bimorph arm such that the shaped offset 9203 is between the two ends of the fixed SMA material. For the various embodiments, the ends of the SMA material are electrically and mechanically coupled with contacts configured to supply electrical current to the SMA material using techniques including those known in the art. Bimorph arms with offsets may be included in SMA actuators and systems such as those described herein.

Figure 93 illustrates a bimorph arm with an offset and a limiter according to one embodiment. Bimorph arm 9301 includes a bimorph beam 9302 having a shaped offset portion 9303 and a limiter 9304 adjacent to the shaped offset portion 9303. The offset portion 9303 adds mechanical advantage to generate higher forces than the bimorph arm 9301 without an offset portion, and the limiter 9304 prevents the arm from moving away from the unimpaired load point end 9306 of the bimorph actuator. Bimorph arms 9301 with shaped offsets 9303 and limiters 9304 can be included in SMA actuators and systems such as described herein. Bimorph arm 9301 includes one or more SMA materials such as described herein, for example SMA ribbon or SMA wire 9308, and these SMA materials are secured to bimorph arm 9301 using techniques including those described herein.

Figure 94 illustrates a bimorph arm with an offset and a limiter according to one embodiment. Bimorph arm 9401 includes a bimorph beam 9402 having a shaped offset 9403 and a limiter 9404 adjacent to the shaped offset 9403. The limiter 9404 is formed as part of the base 9406 of the bimorph arm 9401. The base 9406 is configured to receive the bimorph arm 9401 and includes a recess 9408, the recess 9408 configured to receive the offset portion of the bimorph beam. The bottom of the recess is configured as a limiter 9404 adjacent to the form offset 9403. The base 9406 can also include one or more portions 9410 configured to support certain portions of the bimorph arm when it is not actuated. Bimorph arms 9401 with shaped offsets 9403 and limiters 9404 may be included in SMA actuators and systems such as described herein. Bimorph arm 9401 includes one or more SMA materials such as described herein, e.g., SMA tape or SMA wire, secured to bimorph arm 9401 using techniques including those described herein.

Figure 95 illustrates an embodiment of a base including a bimorph arm having an offset, according to one embodiment. The bimorph arm 9501 includes a bimorph beam 9502 having a shaped offset 9504. The bimorph arm may also include a limiter using techniques including those described herein. The bimorph arm 9501 includes one or more SMA materials such as described herein, for example SMA ribbon or SMA wire 9506, secured to the bimorph arm 9501 using techniques including those described herein.

Fig. 96 illustrates an embodiment of a pedestal 9608 including two bimorph arms with offsets according to one embodiment. Each bimorph arm 9601a, b includes a bimorph beam 9602a, b having a shaped offset 9604a, b. Each bimorph arm 9601a, b has one or more SMA materials such as described herein, for example SMA tape or SMA wires 9606a, b, secured to bimorph arm 9501 using techniques including those described herein. Each bimorph arm 9601a, b can also include a limiter using techniques including those described herein. Some embodiments include a base comprising more than two bimorph arms formed using techniques including those described herein. According to some embodiments, bimorph arms 9601 are integrally formed with base 9608. For other embodiments, one or more of the bimorph arms 9602a, b are formed separately from the base 9608 and secured to the base 9608 using techniques including, but not limited to, welding, resistance welding, laser welding, and gluing. For some embodiments, two or more bimorph arms 9601a, b are configured to act on a single object. This makes it possible to increase the force applied to the object. The following graph in figure 107 illustrates an example of how the box volume of an approximate box enclosing the entire bimorph actuator correlates to the work of each bimorph member. The length of the bimorph actuator 9612, the width of the bimorph actuator 9610, and the height of the bimorph actuator 9614 are used to approximate the cartridge volume (collectively referred to as the "cartridge volume").

Fig. 97 illustrates a flexure arm including a load point extension, in accordance with one embodiment. The flexure arms 9701 include a beam portion 9702 and one or more load point extensions 9704a, b extending from the beam portion 9702. Each end 9706a, b of the flexion arms 9701 is configured to be secured to or integrally formed with a plate or other base using techniques including those described herein. According to some embodiments, the one or more load point extensions 9704a, b are fixed to beam portion 9702 with an offset from load points 9710a, b of beam portion 9702 or are integral with beam portion 9702. Load points 9710a, b are portions of beam portion 9702 that are configured to transfer the force of flexure arm 9701 to another object. For some embodiments, load points 9710a, b are the centers of beam portions 9702. For other embodiments, load points 9710a, b are located off center of beam portion 9702. Load point extensions 9704a, b are configured to extend from the point where they connect to beam portion 9702, along the longitudinal axis of beam portion 9702, toward load points 9710a, b of beam portion 9702. For some embodiments, the ends of load point extensions 9704a, b extend to at least load points 9710a, b of beam portion 9702. The flexion arms 9701 include one or more SMA materials such as those described herein, e.g., SMA ribbon or SMA wire 9712. SMA material (e.g., SMA wire 9712) is secured at opposite ends of the beam portion 9702. The SMA material is secured to the opposite ends of the beam portion using techniques including those described herein. For some embodiments, the length of load point extensions 9704a, b may be configured to be any length contained within the longitudinal length of the associated flat (unactuated) beam portion 9702 of the flexure arm 9701.

Figure 98 illustrates a flexure arm 9801 including a load point extension 9810 in an actuated position according to one embodiment. The SMA material attached to the opposite ends of beam portion 9802 is actuated using techniques including those described herein. Load point 9804 enables flexure arm 9801 to increase the range of travel compared to a flexure arm without an extension. Thus, a buckling arm comprising a load point extension may achieve a larger maximum vertical stroke. Flexure arms with load-point extensions may be included in SMA actuators and systems such as those described herein.

Figure 99 illustrates a bimorph arm including a point-of-load extension according to one embodiment. Bimorph arm 9901 includes a beam portion 9902 and one or more load point extensions 9904a, b extending from the beam portion. One end of bimorph arm 9901 is configured to be secured to or integrally formed with a plate or other base using techniques including those described herein. The end of the beam portion 9902 opposite the fixed or integrally formed end is not fixed and is free to move. According to some embodiments, the one or more load point extensions 9904a, b are fixed to the beam portion 9902 at an offset from the free end of the beam portion 9902 or are integrally formed with the beam portion 9902. The load point extensions 9904a, b are configured to extend from the point where they connect to the beam portion 9902 toward a direction away from a plane that includes the longitudinal axis of the beam portion 9902. For example, the one or more load point extensions 9904a, b extend toward the direction of extension of the free end of the beam portion when actuated. Some embodiments of bimorph arm 9901 include one or more load point extensions 9904a, b having longitudinal axes that form an angle with a plane that includes the longitudinal axis of the beam portion that includes from 1 degree to 90 degrees. For some embodiments, ends 9910a, b of load point extensions 9904a, b are configured to engage an object configured to move.

Bimorph arm 9901 includes one or more SMA materials such as described herein, for example SMA ribbon or SMA wire 9906. SMA material (e.g., SMA wire 9906) is secured at opposite ends of the beam portion 9902. The SMA material is secured to the opposite ends of the beam portion 9902 using techniques including those described herein. For some embodiments, the length of load point extensions 9904a, b may be configured to be any length. According to some embodiments, the location of the point of attachment of the ends 9910a, b of the load point extensions 9904a, b to the object may be configured at any point along the longitudinal length of the beam portion 9902. The height of the end of the load point extension above the beam portion can be configured to be any height when the beam portion is flat (unactuated). For some embodiments, the load point extensions can be configured to be at least over other portions of the bimorph arm when the bimorph arm is actuated.

Figure 100 illustrates a bimorph arm including a point-of-load extension in an actuated position according to one embodiment. The SMA material secured to the opposite ends of the beam portion 2 is actuated using techniques including those described herein. The load point extension 10 enables the bimorph arm 1 to increase the stroke force compared to a bimorph arm without an extension. Thus, bimorph arm 1 including load point extension 10 enables bimorph arm 1 to exert a greater force. Bimorph arms 1 with load point extensions 10 may be included in SMA actuators and systems such as those described herein.

Fig. 101 shows an SMA optical image stabilizer according to one embodiment. The SMA optical image stabilizer 20 includes a moving plate 22 and a static plate 24. The moving plate 22 includes spring arms 26 integrally formed with the moving plate 22. For some embodiments, the moving plate 22 and the static plate 24 are each formed as a unitary, integral plate. The moving plate 22 includes a first SMA material attachment portion 28a and a second SMA material attachment portion 28 b. The static plate 24 includes a first SMA material attachment portion 30a and a second SMA material attachment portion 30 b. Each SMA material attachment portion 28, 30 is configured to secure an SMA material, such as an SMA wire, to the plate using a resistance weld joint. The first SMA material attachment portion 28a of the moving plate 22 includes a first SMA wire 32a disposed between it and a first SMA material attachment portion 30a of the static plate and a second SMA wire 32b disposed between it and a second SMA attachment portion 30b of the static plate 24. The second SMA material attachment portion 28b of the moving plate 22 includes a third SMA wire 32c disposed between it and the second SMA material attachment portion 30b of the static plate and a fourth SMA wire 32d disposed between it and the first SMA attachment portion 30a of the static plate 24. Each SMA wire is actuated using techniques, including those described herein, to move the moving plate 22 away from the static plate 24. Fig. 102 shows the SMA material attachment portion 40 of the moving part according to one embodiment. The SMA material attachment portion is configured to resistively weld an SMA material (e.g., SMA wire 41) to the SMA material attachment portion 40. Fig. 103 shows an SMA attachment portion 42 of a static plate with resistance welded SMA wires 43 attached thereto according to one embodiment.

Figure 104 shows an SMA actuator 45 including a buckling actuator according to one embodiment. The flexion actuator 46 includes a flexion arm 47 such as described herein. The flexure arms 47 are configured to move along the z-axis when the SMA wires 48 are actuated and de-actuated using techniques including those described herein. Each SMA wire 48 is attached to a respective resistance weld wire crimp 49 using resistance welding. Each resistance weld wire crimp 49 includes an island structure 50 on at least one side of the SMA wire 48 that is isolated from the metal 51 forming the flexure arm 47. The island structure may be used in other actuators, optical image stabilizers and auto focus systems to connect at least one side of the SMA wire to an isolated island structure formed in a base metal layer, such as the OIS application shown in fig. 101.

Fig. 105 shows a resistance weld crimp of an SMA actuator including an island structure for attaching SMA wires 48 to buckling actuator 46 using techniques including those described herein, according to one embodiment. Fig. 105A shows the bottom of the SMA actuator 45. According to some embodiments, the SMA actuator 45 is formed from a stainless steel base layer 51. A dielectric layer 52 (e.g., a polyimide layer) is provided on the bottom of the stainless steel base layer 51. According to some embodiments, the conductor layer 53 is electrically connected to the stainless steel island structure 50 through vias in the dielectric layer 52, thereby enabling electrical connection between wires soldered to the stainless steel island structure 50 and conductor circuitry attached to the stainless steel island structure. According to some embodiments, the island structures 50 are etched from the stainless steel base layer. The dielectric layer 52 maintains the position of the island structure 50 within the stainless steel base layer 51. The island structure 50 is configured to have SMA wires attached thereto using techniques including those described herein (e.g., resistance welding). Fig. 105B shows the top of the SMA actuator 45 including the island structure 50. For some embodiments, glue or adhesive may also be applied on top of the weld to help improve mechanical strength and to act to relieve fatigue strain during handling and impact loading.

Figure 108 includes a lens system including an SMA actuator with a buckling actuator according to one embodiment. The lens system comprises a liquid lens assembly 61 arranged on a base 62. The lens system also includes a shaped ring/coupler 64 mechanically coupled to the buckling actuator 60. SMA actuators including a buckling actuator 60 such as described herein are provided on a slide base 65, which slide base 65 is provided on a base 62. The SMA actuator is configured to move the shaped ring/coupler 64 along the optical axis of the liquid lens assembly 61 by actuating the buckling actuator 60 using techniques including those described herein. This moves the forming ring/coupler 64 to change the focus of the liquid lens in the liquid lens assembly.

Figure 109 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment. The unsecured load point end 70 of the bimorph arm includes a flat surface 71 for securing an SMA material (e.g., SMA wire 72). SMA wire 72 is secured to flat surface 71 by resistance weld 73. The resistance weld 73 is formed using techniques including those known in the art.

Figure 110 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment. The unsecured load point end 76 of the bimorph arm includes a flat surface 77 for securing an SMA material (e.g., SMA wire 78). SMA wire 78 is secured to flat surface 77 by a resistance weld similar to that shown in fig. 109. An adhesive 79 is provided on the resistance weld. This makes the bond between the SMA wire 78 and the unsecured load point end 76 more reliable. Adhesive 79 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

Figure 111 shows an unsecured point-of-load end of a bimorph arm according to one embodiment. The unsecured load point end 80 of the bimorph arm includes a flat surface 81 for securing an SMA material (e.g., SMA wire 82). A metal intermediate layer (interlayer) 84 is provided on the flat surface 81. The metallic interlayer 84 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. SMA wire 82 is secured by resistance welds 83 to a metal intermediate layer 84 disposed on planar surface 81. The resistance weld 83 is formed using techniques including those known in the art. The metal intermediate layer 84 provides better adhesion to the unsecured load point end 80.

Figure 112 illustrates an unsecured point-of-load end of a bimorph arm according to one embodiment. The unsecured load point end 88 of the bimorph arm includes a flat surface 89 for securing an SMA material (e.g., SMA wire 90). A metal intermediate layer 92 is provided on the planar surface 89. The metal intermediate layer 92 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. SMA wire 90 is secured to planar surface 89 by a resistance weld similar to that shown in fig. 111. An adhesive 91 is disposed on the resistance weld. This makes the bond between the SMA wire 90 and the unsecured load point end 88 more reliable. Adhesive 91 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

Figure 113 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 95 of the bimorph arm includes a flat surface 96 for fixing an SMA material (e.g. SMA wire 97). SMA wire 97 is secured to flat surface 96 by resistance weld 98. The resistance weld 98 is formed using techniques including those known in the art.

Figure 114 illustrates a fixed end of a bimorph arm according to one embodiment. The fixed end 120 of the bimorph arm includes a flat surface 121 for fixing an SMA material (e.g., SMA wire 122). SMA wire 122 is secured to flat surface 121 by a resistance weld similar to that shown in fig. 113. An adhesive 123 is disposed on the resistance weld. This makes the bond between the SMA wire 122 and the fixed end 120 more reliable. Adhesive 123 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

Figure 115 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 126 of the bimorph arm includes a flat surface 127 for fixing an SMA material (e.g., SMA wire 128). A metallic intermediate layer 130 is disposed on the planar surface 127. The metal interlayer 130 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. SMA wire 128 is secured by a resistance weld 129 to a metallic intermediate layer 130 disposed on planar surface 127. The resistance weld 129 is formed using techniques including those known in the art. The metal interlayer 130 provides better adhesion to the fixed end 126.

Figure 116 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 135 of the bimorph arm includes a flat surface 136 for fixing an SMA material (e.g., SMA wire 137). A metal intermediate layer 138 is disposed on the planar surface 136. The metal interlayer 136 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 137 is secured to the planar surface 136 by a resistance weld similar to that shown in fig. 115. An adhesive 139 is disposed on the resistance weld. This makes the bond between the SMA wire 137 and the fixed end 135 more reliable. Adhesive 139 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

Figure 117 shows a back view of a fixed end of a bimorph arm according to one embodiment. Bimorph arms 143 are configured according to embodiments described herein. The fixed end 143 of the bimorph arm includes an island structure 144 isolated from the outer portion 145 of the fixed end 143. This electrically and/or thermally isolates the island structures 144 from the outer portion 145. For some embodiments, the SMA material fixed to the opposite side of the fixed end 143 of the bimorph arm is electrically coupled with the SMA material (e.g., SMA wire) by a via. The island structures 144 are disposed on an insulator 146, such as described herein. The island structures 144 may be formed using etching techniques, including techniques known in the art.

It will be understood that terms such as "top," "bottom," "above," "below," and the x-direction, y-direction, and z-direction are used herein for convenience to denote the spatial relationship of parts relative to one another, and not any particular spatial or gravitational direction. Accordingly, these terms are intended to encompass an assembly of parts, whether oriented in a particular direction as shown in the figures and described in the specification, upside down from that direction, or any other rotationally varying orientation.

It is to be understood that the term "invention" as used herein is not to be interpreted as representing only a single invention having a single base element or group of elements. Similarly, it will also be understood that the term "invention" encompasses many individual innovations, each of which may be considered an individual invention. Although the present invention has been described in detail with respect to the preferred embodiments and the accompanying drawings, it should be apparent to those skilled in the art that various modifications and variations can be made to the embodiments of the present invention without departing from the spirit and scope of the invention. Additionally, the techniques described herein may be used to fabricate devices with two, three, four, five, six, or more typically n numbers of bimorph and buckling actuators. It is, therefore, to be understood that the detailed description and drawings set forth above are not intended as limitations on the breadth of the present invention, which is to be inferred only from the appended claims and their legal equivalents when properly interpreted.

Claims

1. An actuator, the actuator comprising:

a beam portion;

a fixed end;

a load point end, the beam portion disposed between the fixed end and the load point end; and

an SMA material secured to the fixed end and the point-of-load end.

2. The actuator of claim 1, comprising a limiter.

3. The actuator of claim 1, wherein the load point end is configured to secure the SMA material using a resistance weld.

4. The actuator of claim 1, wherein the fixed end is configured to secure the SMA material using a resistance weld.

5. The actuator of claim 4, wherein the fixed end comprises a flat surface.

6. The actuator of claim 5, wherein the SMA material is secured to the planar surface by the resistance weld.

7. The actuator of claim 6, wherein an adhesive is disposed on at least a portion of the flat surface and the resistance weld.

8. The actuator of claim 5, comprising a metallic intermediate layer disposed on the planar surface.

9. The actuator of claim 3, wherein the fixed end comprises a flat surface.

10. The actuator of claim 9, wherein the SMA material is secured to the planar surface by the resistance weld.

11. The actuator of claim 10, wherein an adhesive is disposed on at least a portion of the flat surface and the resistance weld.

12. The actuator of claim 9, comprising a metallic intermediate layer disposed on the planar surface.

13. The actuator of claim 10, comprising an island structure formed on the fixed end on a side opposite the resistance weld, the island structure being electrically coupled with the SMA material.

14. The actuator of claim 1, wherein the beam portion comprises a shaped offset.

15. The actuator of claim 14, comprising a limiter configured adjacent to the shaped offset.

16. The actuator of claim 15, wherein the limiter is formed as part of the base.

17. An actuator according to claim 1, wherein the SMA material is an SMA wire.

18. The actuator of claim 1, comprising one or more point-of-load extensions.

19. The actuator of claim 18, wherein the one or more load point extensions are formed at an angle to the beam portion.

20. The actuator of claim 18, wherein the one or more load point extensions are formed parallel to the beam portion.

21. An actuator, the actuator comprising:

a base; and

one or more bimorph arms, the one or more bimorph arms comprising:

the beam portion is formed of a plurality of beam portions,

a fixed end, and

an SMA material secured to the fixed end and the point-of-load end.

22. The actuator of claim 21, wherein the SMA material of the one or more bimorph arms is an SMA wire.

23. The actuator of claim 21, wherein the bimorph arm is integrally formed with the base.

24. The actuator of claim 21, wherein at least one of the fixed end and the point-of-load end of the one or more bimorph arms comprises a flat surface.

25. The actuator of claim 24, wherein the SMA material of the one or more bimorph arms is secured to the flat surface of at least one of the fixed end and the point-of-load end by a resistance weld.

26. The actuator of claim 25 wherein an adhesive is disposed on a flat surface and a resistance weld of at least one of the fixed end and the load point end.

27. The actuator of claim 25 wherein at least one of said fixed end and said load-point end comprises a metallic intermediate layer disposed on said planar surface.

28. The actuator of claim 25, comprising an island structure formed on at least one of the fixed end and the point-of-load end on a side opposite the resistance weld, the island structure being electrically coupled with the SMA material.

29. The actuator of claim 21, wherein the beam portion of the one or more bimorph arms comprises a shaped offset.

30. The actuator of claim 29, wherein the one or more bimorph arms comprise a limiter configured adjacent to the shaped offset.