TW201533365A - Pipe joint, fluid supply control device and pipe joint structure - Google Patents

Abstract

The present invention is capable of well miniaturizing and concentrating a device. The pipe joint of the present invention comprises a main body, a first opening part, a second opening part and a pair of screw inserting holes. The main body is a roughly rectangular component and has a connecting surface (a surface for connecting with the installing objects by taking the height direction as a normal). The first opening part is opened in the connecting surface. The second opening part is opened at one end in the long direction of the main body. The pair of screw inserting holes clamp the first opening part and are located at one end and the other end in the long direction of the main body. The fluid passage from the first opening part to the second opening part is formed to bypass the screw inserting hole.

Description

Piping joint, fluid supply control device, and piping connection structure Field of invention

The present invention relates to a pipe joint and a fluid supply control device and a pipe connection structure using the same.

Background of the invention

The configuration of the pipe joint and the pipe connection structure is known, for example, in Patent Document 1, Patent Document 2, and the like described below.

However, a flow path block having a flow path for internally forming a fluid, and a fluid supply control device for a plurality of fluid control devices installed in the flow path block are used as, for example, a gas supply device in a semiconductor process. Specifically, for example, disclosed in the gas supply unit of Patent Document 3 below, a plurality of fluid control devices (fluid control valves, flow controllers, and the like) are fixed to the inside by a screw (bolt) to form a gas flow path. Flow block. Further, the plurality of fluid control devices are arranged in a row along the longitudinal direction of the flow path block.

The gas supply devices described above for use in semiconductor processes are sometimes configured to supply a wide variety of gases. In this case, a plurality of the gas supply units are arranged in parallel (see Patent Document 4 below).

Advanced technical literature Patent literature

[Patent Document 1] Japanese Unexamined Patent Publication No. 7-4980

[Patent Document 2] Japanese Patent No. 2940292

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-227657

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2006-46494

Summary of invention

For example, in a T-flange joint of a conventional flange joint, a pipe portion extending perpendicularly (for example, upward) from a flange portion may be provided in a direction orthogonal to the pipe portion (for example, horizontal). Piping. In the pipe connection structure, the pipe front end portion (hereinafter referred to as "bending portion") is bent in a slightly L shape toward the flange joint, and the bent portion is connected to the above-described pipe portion. At this time, the main portion of the pipe (the portion other than the curved portion described above) is formed to be parallel to the longitudinal direction of the flange portion, so that the pipe can be controlled within the range of the width of the flange joint.

However, in this configuration, the mounting direction of the mounting screw for attaching (fixing) the flange portion to another mounting object is also parallel to the above-described tube portion. Therefore, in this configuration, it is necessary to provide a space in which the mounting screw or the bolting tool (for example, obliquely upward) is inserted under the main portion of the pipe. Therefore, in this configuration, it is necessary to ensure that the length of the above-described curved portion is long. That is, in this configuration, a large amount of space for securing the space in the height direction of the pipe connection structure is generated.

Further, when the plurality of pipe connection structures are arranged in the width direction of the flange joint, even if a large amount of space in the height direction as described above is secured, the flange joints other than the end portions in the arrangement direction are inserted into the mounting screws or the bolts. Tools have become extremely difficult.

As exemplified above, in the above-described conventional techniques, it is required to make the device configuration compact or centralized. The present invention has been made in view of the above-described circumstances and the like.

A first aspect of the present invention is a pipe joint which is configured to be fixed to a predetermined mounting object by a screw and has a fluid passage therein, and is characterized in that the main body portion is formed to have a predetermined longitudinal direction. a member having a shape of a substantially rectangular parallelepiped shape, and a joint surface provided to be a plane normal to a height direction orthogonal to the longitudinal direction and joined to the installation object, the first opening portion being disposed at The joint surface is opened, and the second opening is provided at one end of the main body portion in the longitudinal direction, and a pair of screw insertion holes are formed in the height direction by the screw insertion. a hole that is provided in the one end side and the other end side of the longitudinal direction of the main body portion with the first opening, and the fluid passage from the first opening to the second opening It is formed to bypass the aforementioned screw insertion hole.

According to a second aspect of the present invention, in the first aspect, the fluid passage includes a first passage, the fluid passage provided along the height direction from the first opening, and a second passage along the The long side direction is disposed to pass through the aforementioned second opening portion and is connected to the aforementioned first path The fluid passage is formed to bypass the screw insertion hole, and the second passage has an opening side passage which is a non-through hole formed by the second opening along the longitudinal direction, and does not reach a pair The flow path side screw insertion hole provided in the one end portion side of the main body portion of the screw insertion hole, and the intermediate passage are closer to the longitudinal direction and the height direction than the flow path side screw insertion hole The position in which the width direction of the orthogonal direction is the side surface of the plane of the normal line is formed so as not to communicate with the flow path side screw insertion hole and to the side of the flow path side screw insertion hole along the longitudinal direction, and the intermediate passage is formed so that One end communicates with the first passage, and the other end communicates with an end of the opening side passage on the side of the flow path side screw insertion hole.

According to a third aspect of the present invention, in the first or second aspect, the central axis of the second opening is intersected with the central axis of the first opening.

According to a fourth aspect of the present invention, there is provided a fluid supply control device comprising the pipe joint of the first to third configurations, wherein the fluid supply control device has a flow path block in which an internal flow path through which the fluid flows is formed; a plurality of fluid control devices arranged in the internal flow path and installed in the flow path block, wherein the pipe joint is configured such that the flow path block is the installation target and is connected to the aforementioned arrangement provided in the flow path block In the fluid inlet and outlet, the screw insertion hole is formed as a through hole having no screw portion, and the joint surface is formed to be connected to an inlet and outlet of the fluid provided in the flow path block.

According to a fifth aspect of the present invention, in the fourth aspect, the fluid The control device is detachably mounted to the female screw portion by one of the flow path blocks, and the pair of the female screw portions and the fluid disposed in the flow path block are connected to each other The connection flow path of the internal flow path between the control machines is arranged in a substantially linear shape along a direction in which the plurality of fluid control devices are arranged in a direction parallel to the flow direction of the fluid in the flow path block.

According to a sixth aspect of the present invention, in the fifth aspect, the female screw portion is formed as a non-through hole that is opened in the mounting surface, and the fluid control device is installed in the flow path block to form the inlet and outlet The surface of the surface is mounted on the surface side, and the connection flow path is formed in the depth direction of the female screw portion around the female screw portion.

According to a seventh aspect of the present invention, in the sixth aspect, the flow path block is configured to be arranged in a direction in which the plurality of fluid control devices arranged in the arrangement direction are arranged in a direction orthogonal to the arrangement direction.

According to an eighth aspect of the present invention, a pipe connection structure includes a pair of the pipe joints, and one of the pair of pipe joints is the other one of the installation targets, and the screw insert having a through hole having no screw portion The through hole, the other of the pair of pipe joints, is one of the above-mentioned mounting objects, and has the screw insertion hole having a non-through hole of a screw portion.

According to a ninth aspect of the present invention, in the eighth aspect, each of the pair of pipe joints is configured such that a central axis of the second opening is staggered with a central axis of the first opening.

In the pipe joint according to the first aspect, the fluid passage from the first opening to the second opening is formed to bypass the screw insertion hole. In the pipe joint of the above configuration, the screw is inserted into the pair of screw insertion holes along the height direction, thereby fixing (installing) the mounting object.

Wherein the second opening portion side of the pair of screw insertion holes and the second passage do not communicate with each other as far as possible in the width direction (the direction orthogonal to the longitudinal direction and the height direction) The size of the aforementioned body portion in the width direction may be as small as possible. Therefore, according to this configuration, the device configuration can be favorably reduced in size or concentration in the width direction.

Further, according to this configuration, since the pipe connected to the pipe joint does not interfere with the screw and the bolting tool thereof, workability is improved, and a large space in the height direction is not required as in the above-described conventional technique.

According to the second configuration described above, the dimension of the main body portion in the width direction can be reduced as much as possible.

According to the third configuration, the first opening portion and the second opening portion corresponding to the inlet and outlet of the fluid in the pipe joint can be disposed such that the central axes thereof are staggered on the same surface, and the piping design is easy.

In the fourth aspect, the pipe joint is fixed (mounted) to the flow path block by the screw so that the joint surface can be connected to the inlet and outlet provided in the flow path block. Further, the inlet and outlet pipes connected to the pipe joint are installed in the flow path side of the pipe joint In the case of the block, it does not interfere with the aforementioned screw or the bolting tool thereof, and therefore it is not necessary to secure a large amount of space in order to avoid the disturbance. Therefore, according to this configuration, the configuration of the piping portion of the flow path block can be reduced as much as possible. Therefore, the fluid supply control device can be preferably miniaturized or concentrated.

In the fifth configuration, each of the plurality of fluid control devices is detachably attached (fixed) to the flow path block by a pair of the female screw portions. In addition, in the present specification, the term "free loading and unloading" is not simply "removable", but the maintenance person in charge of the fluid supply control device can perform a relatively simple loading and unloading operation (spinning of the bolt or its release). Easy to load and unload. Further, the fluid control devices different from each other are connected by the aforementioned connecting flow path.

Wherein, in the flow path block, one of the pair of female screw portions and the connection flow path between the fluid control devices for connecting the fluid control devices are detachably mounted along the arrangement The direction (this is the direction parallel to the flow direction of the aforementioned fluid in the flow path block) is set to be slightly linear.

According to this configuration, the fluid control device is detachably attached to the flow path block, and the fluid supply control device can be miniaturized as much as possible in the width direction. Therefore, according to this configuration, in the fluid supply control device, it is possible to maintain good maintainability and to achieve further miniaturization or concentration.

According to the sixth configuration described above, the flow path block and the fluid supply control device can be miniaturized as much as possible in the width direction. Therefore, according to this configuration, it is possible to satisfactorily correspond to the smaller of the aforementioned fluid supply control devices. The requirements of modeling or centralization.

According to the seventh aspect of the invention, the fluid supply control device that can supply a plurality of types of the fluid by providing a plurality of the plurality of groups in parallel can be downsized as much as possible in the width direction. In particular, as a plurality of the aforementioned groups are arranged in parallel, when the plurality of pipes of the fluids arranged in parallel with each other are connected to the flow path block, the above-described pipe joint can be used to maintain good maintainability, and the connection can be maintained. The partial configuration can be miniaturized as much as possible in the width direction.

According to the eighth aspect of the invention, the joint surface of the pipe joint that is the screw insertion hole that does not have the through hole of the screw portion, and the screw insertion hole that is a non-through hole having the screw portion The aforementioned joint faces in the pipe joint are joined to each other, and the aforementioned screws can be screwed to the aforementioned screw portions. Thereby, a pair of the aforementioned pipe joints are joined to each other. According to this configuration, it is possible to maintain good maintainability, and the connection structure between the pipes can be miniaturized as much as possible in the width direction. In particular, when each of the plurality of pipes arranged in parallel with each other forms the connection structure, the miniaturization in the width direction can be satisfactorily achieved.

According to the ninth configuration, the first opening portion and the second opening portion corresponding to the inlet and outlet of the fluid in the pipe joint can be disposed so as to be staggered on the same plane with respect to each other, whereby the piping design becomes easy. Further, by fitting one of the above-described pipe joints to the joint faces of the pipe joints and joining the screws, the two pipes (the pipes and the pipes connected to one of the pair of pipe joints) can be connected and connected. Configured on the other side) and connected to a slightly straight line.

1‧‧‧Pipe fittings

1A‧‧‧Pipe fittings

1C‧‧‧Pipe fittings

1V‧‧‧ fluid control valve

2‧‧‧ Body Department

2a‧‧‧ joint surface

2b‧‧‧ top surface

2c‧‧‧ first end face

2d‧‧‧second end face

2e‧‧‧ first side

2f‧‧‧ second side

2g‧‧‧first opening

2k‧‧‧First bolt insertion hole

2m‧‧‧Second bolt insertion hole

2p‧‧‧second opening

2V‧‧‧ fluid control valve

3‧‧‧ Department of Tube

3V‧‧‧ fluid control valve

4‧‧‧First Path

4V‧‧‧ fluid control valve

5‧‧‧second pathway

6‧‧‧Open side access

7‧‧‧Intermediate access

7a‧‧‧ Cover

8a‧‧‧Connecting Department

8b‧‧‧Connecting Department

9a‧‧‧First bolt insertion hole

9b‧‧‧Second bolt insertion hole

10‧‧‧ gas supply device

10A~10H‧‧‧ gas supply unit

11‧‧‧Process gas inflow line

11A~11H‧‧‧Process gas inflow line

11AV‧‧‧1st piston

11BV‧‧‧2nd piston

11CV‧‧‧3rd piston

11DV‧‧‧4th piston

11EV‧‧‧5th Piston

11FV‧‧‧6th Piston

11aV‧‧‧Piston Department

11bV‧‧‧ piston rod

11cV‧‧‧ditch

11dV‧‧‧ internal flow path

11eV‧‧‧ recess

11fV‧‧‧Flow

11V‧‧‧Piston

12‧‧‧ flushing gas inflow line

12V‧‧‧ compression spring

12AV‧‧‧1st compression spring

12BV‧‧‧2nd compression spring

12CV‧‧‧3rd compression spring

12DV‧‧‧4th compression spring

12EV‧‧‧5th compression spring

12FV‧‧‧6th compression spring

13‧‧‧Process Gas Supply Line

13V‧‧ ‧ piston room

13AV‧‧ ‧ piston room

13BV‧‧ ‧ piston room

13CV‧‧ ‧ piston room

13DV‧‧ ‧ piston room

13EV‧‧ ‧ piston room

13FV‧‧ ‧ piston room

13aV‧‧‧Pressure room

13bV‧‧‧ Back Pressure Chamber

14‧‧‧Internal main gas flow path

14V‧‧‧ ontology

14aV‧‧‧ seat

14bV‧‧‧inlet flow path

14cV‧‧‧Export flow path

14dV‧‧‧ mounting hole

15‧‧‧Internal flushing gas flow path

15V‧‧‧ Adapter

15aV‧‧‧ female screw

16‧‧‧Flow Controller

16V‧‧‧ bracket

16aV‧‧‧ Male screw department

17‧‧‧ Fluid Control Valve

17a‧‧‧Fluid Control Valve Actuator

17V‧‧‧Flexible hose

18‧‧‧ fluid control valve

18a‧‧‧Fluid Control Valve Actuator

18V‧‧‧ body

19‧‧‧ Fluid Control Valve

19a‧‧‧Fluid Control Valve Actuator

19V‧‧‧ compression spring

20‧‧‧flow block

20a‧‧‧Upper surface

20b‧‧‧lower surface

20aV‧‧‧Exhaust gas

20c‧‧‧ end face

20d‧‧‧ link

20V‧‧‧ cover

21‧‧‧Connected flow path

21a‧‧‧Entry

21b‧‧‧Export

21c‧‧‧Entry access

21d‧‧‧Export

21e‧‧‧Connected

21f‧‧‧The Ministry

21V‧‧‧One-touch connector

22‧‧‧Connected flow path

22a‧‧‧Entry埠

22b‧‧‧Export

22c‧‧‧Entry access

22d‧‧‧Export

22e‧‧‧Connected

22f‧‧‧ Cover

22V‧‧‧ Exterior components

23‧‧‧Connected flow path

23a‧‧‧Entry埠

23b‧‧‧Export

23c‧‧‧Entry access

23d‧‧‧Export path

23e‧‧‧Connected road

23f‧‧‧The Ministry

23V‧‧‧ interior parts

23AV‧‧‧ Interior parts

23BV‧‧‧ Interior parts

23aV‧‧‧ cylinder

24‧‧‧Washing gas supply埠

24aV‧‧‧ Valve Bodykeeping Department

24V‧‧‧ handle

25‧‧‧Internal flushing gas line

25AV‧‧‧ Sealing member

26‧‧‧Process Gas Supply埠

26AV‧‧O ring

26BV‧‧O ring

27‧‧‧Supply side internal gas pipeline

27V‧‧O ring

28a~28d‧‧‧Female screw

28a1, 28a2‧‧‧ female screw

28V‧‧ ‧ spring mounting plate

29V‧‧‧welding department

30‧‧‧Inflow side flange

30V‧‧‧ handle

31‧‧‧Flange

31V‧‧‧diaphragm valve body

32‧‧‧ Department of Management

32V‧‧‧ seat

33‧‧‧Installation bolts

33V‧‧‧ Adapter

34V‧‧‧ bracket

35V‧‧‧ parts

40‧‧‧Valve Installation Block

41‧‧‧Installation bolts

50‧‧‧MFC Installation Department

51‧‧‧Installation bolts

60‧‧‧Valve installation block

61‧‧‧Installation bolts

100V‧‧‧Pneumatic valve

101AV, 101BV, 101CV‧‧‧ piston

102AV, 102BV, 102CV‧‧‧ coil spring

200V‧‧‧Pneumatic valve

201, 201'‧‧‧ first connecting piece

201A‧‧‧First Flow Block

201B‧‧‧ end face

201V‧‧‧1st piston

202, 202’‧‧‧second connecting piece

202A‧‧‧Second flow block

202V‧‧‧2nd piston

203V, 204V‧‧‧ coil spring

211, 211a, 211b‧‧‧ first connection opening

211H‧‧‧Connected screw holes

212‧‧‧First connection road

212H‧‧‧Connecting bolt insertion hole

213‧‧‧ Straight Tube Department

213A‧‧‧Filling line seal section

214‧‧‧ Straight Tube Department

214A‧‧‧Supply line sealing section

215‧‧‧Connected Access Department

216‧‧‧ 盖部

217‧‧‧Link bolt screw holes

215A, 216A, 217A‧‧‧ actuator mounting holes

221, 221a, 221b‧‧‧ second connection opening

222‧‧‧Second connection road

222A‧‧‧Connected flow path

222a‧‧‧Entry埠

222b‧‧‧export 埠

222c‧‧‧First entrance path

222d‧‧‧second entrance path

222e‧‧‧Connected

222g‧‧‧export path

222h‧‧ ‧ merge path

223a‧‧‧Entry埠

223b‧‧‧export 埠

223c‧‧‧First entrance path

223d‧‧‧second entrance path

223e‧‧‧Connected

227‧‧‧Link bolt insertion hole

230‧‧‧Link bolt screw holes

290‧‧‧Shunt piping

291‧‧‧Flange

292‧‧‧Connected pipe department

XV‧‧‧Actuator Department

YV‧‧‧ Valve Department

B‧‧‧Connecting bolt

C1‧‧‧ central axis

C2‧‧‧ central axis

D‧‧‧ interval

D1‧‧‧ interval

D‧‧‧Center distance

D1‧‧‧ distance between centers

P11‧‧‧Pipe

P12‧‧‧Pipe

P21‧‧‧Pipe

P22‧‧‧Pipe

P31‧‧‧Pipe

P32‧‧‧Pipe

P41‧‧‧Connecting piping

P42‧‧‧Pipe

PJ‧‧‧Pipe connection structure

Fig. 1 is a flow chart showing a schematic configuration of a flow path of a fluid in a gas supply device according to an embodiment of the fluid supply control device of the present invention.

Fig. 2 is a plan view showing an example of the configuration of the gas supply device shown in Fig. 1;

Fig. 3 is a front elevational view of the gas supply device of Fig. 2 (including an embodiment of a flow path block of the present invention).

Fig. 4 is an enlarged front elevational view showing an embodiment of the flow path block of the present invention shown in Fig. 3;

Figure 5 is a plan view of the flow path block shown in Figure 4.

Figure 6 is a side elevational view of the flow path block of Figure 5.

Figure 7 is a cross-sectional view taken along line 7-7 of Figure 5.

Figure 8 is a plan view showing a modification of one of the flow path blocks of the present invention.

Figure 9 is a front elevational view of the flow path block shown in Figure 8.

Figure 10 is a side elevational view of the flow path block shown in Figure 8.

Fig. 11 is a plan view showing a schematic configuration of a fluid supply control device according to the present invention.

Fig. 12 is a front elevational view of the fluid supply control device shown in Fig. 11;

Fig. 13 is a bottom plan view of the fluid supply control device shown in Fig. 11;

Fig. 14 is a front elevational view showing the flow path block shown in Fig. 11 in an enlarged manner.

Fig. 15 is a plan view showing a schematic configuration of a fluid supply control device according to the present invention.

Fig. 16 is a front elevational view of the fluid supply control device shown in Fig. 15;

Fig. 17 is a bottom plan view of the fluid supply control device shown in Fig. 15;

Fig. 18 is a front elevational view showing the flow path block shown in Fig. 15 in an enlarged manner.

Fig. 19 is a perspective view showing a schematic configuration of a fluid supply control device according to a modification of the present invention.

Fig. 20 is an exploded perspective view of the fluid supply control device according to another modification of the present invention.

Fig. 21 is an enlarged perspective view showing the first flow path block shown in Fig. 20.

Figure 22 is a perspective view of another viewpoint of the first flow path block shown in Figure 21 .

Fig. 23 is a plan view showing an example of a pipe joint according to an embodiment of the present invention.

Figure 24 is a side elevational view of the pipe joint shown in Figure 23;

Figure 25 is a bottom plan view of the pipe joint shown in Figure 23;

Fig. 26 is a plan view showing another example of the pipe joint according to the embodiment of the present invention.

Figure 27 is a side elevational view of the pipe joint shown in Figure 26.

Figure 28 is a bottom plan view of the pipe joint shown in Figure 26.

FIG. 29 is a side view showing a schematic configuration of a pipe joint structure according to an embodiment of the present invention, which is formed by connecting the pipe joint shown in FIGS. 23 to 25 and the pipe joint shown in FIGS. 26 to 28.

Fig. 30 is a plan view showing a schematic configuration of a pipe joint structure according to an embodiment of the present invention, which is formed by connecting the pipe joint shown in Figs. 23 to 25 and the pipe joint shown in Figs. 26 to 28 .

Fig. 31 is a plan view showing the configuration of a pipe joint of a conventional technique as a comparative example.

Fig. 32 is a plan view showing an example of the configuration of a fluid supply control device according to an embodiment of the present invention.

Figure 33 is a side elevational view of the fluid supply control device shown in Figure 32.

Fig. 34 is a side elevational view showing the flow path block shown in Fig. 33;

Fig. 35 is a side view showing another example of the configuration of the fluid supply control device of the present invention.

Figure 36 is a plan view showing the configuration of a modification of the pipe joint of the present invention.

Figure 37 is a side elevational view of the pipe joint shown in Figure 36.

Figure 38 is a bottom plan view of the pipe joint shown in Figure 36.

Fig. 39 is a plan view showing the configuration of another modification of the pipe joint of the present invention.

Figure 40 is a side elevational view of the pipe joint shown in Figure 39.

Figure 41 is a bottom plan view of the pipe joint shown in Figure 39.

Figure 42 is a cross-sectional view of a fluid control valve.

Figure 43 is an enlarged cross-sectional view showing the PV portion of Figure 42.

Figure 44 is a cross-sectional view of the valve portion.

Figure 45 is a cross-sectional view of the piston.

Figure 46 is a perspective view of the piston.

Figure 47 is an exploded view of the fluid control valve assembled.

Figure 48 is a cross-sectional view showing a modification of one of the fluid control valves.

Figure 49 is a cross-sectional view showing another modification of the fluid control valve.

Figure 50 is a cross-sectional view of a reference example of a fluid control valve.

Figure 51 is a cross-sectional view of the periphery of the flow path in the valve mounting block.

Figure 52 is a cross-sectional view of the periphery of the flow path in the valve mounting block.

Figure 53 is a cross-sectional view of a conventional fluid control valve.

Figure 54 is a cross-sectional view of a conventional fluid control valve.

Detailed description of the preferred embodiment

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, when the modification is inserted into the description of the embodiment, the explanation of the first and last embodiments is hindered, and therefore, the description is made at the end.

<General Configuration of Gas Supply Device According to Embodiment>

First, a schematic configuration of a fluid flow path in the gas supply device 10 of an example (one embodiment) of the fluid supply control device of the present invention will be described with reference to Fig. 1 . The gas supply device 10 is used in a semiconductor process (for example, an etching process), and is configured to utilize a plurality of process gases (eight in the illustration of FIG. 1). That is, the gas supply device 10 is configured to supply a supply gas (a mixed gas in which a plurality of process gases are mixed or a single process gas) to a supply destination (process processing chamber) not shown.

Specifically, in the gas supply device 10, the gas supply units 10A, 10B, 10C, 10D, 10E, 10F, 10G, and 10H are arranged in parallel. The gas supply units 10A to 10H are respectively connected to different process gas inflow lines 11 (process gas inflow lines 11A, 11B, 11C, 11D, 11E, 11F, 11G, and 11H). The process gas inflow lines 11A to 11H are configured to introduce different kinds of process gases, respectively.

Further, the flushing gas inflow line 12 is connected to the gas supply units 10A to 10H. The flushing gas inflow line 12 is arranged to contain an inert gas (eg The flushing gas of nitrogen gas is supplied to the gas supply units 10A to 10H. Further, the process gas supply line 13 is connected to the gas supply units 10A to 10H.

In other words, the gas supply units 10A to 10H are configured to selectively supply the process gas supplied from the process gas supply source (not shown) via the process gas inflow line 11 through the flushing gas inflow line 12 to a flush gas (not shown). The flushing gas supplied from the supply source flows to the process gas supply line 13. Further, the gas supply device 10 is configured to supply the process gas to the process gas supply line 13 by operating the gas supply units 10A to 10H, thereby supplying the supply gas to the process gas supply line 13 to the above-mentioned Supply destination.

Further, the gas supply units 10A to 10H have the same configuration. Therefore, the following description will focus on the configuration of the gas supply unit 10A.

An internal main gas flow path 14 and an internal flushing gas flow path 15 are formed in the gas supply unit 10A. The internal main gas flow path 14 and the internal flushing gas flow path 15 are gas flow paths formed inside the gas supply unit 10A. The internal main gas flow path 14 is provided between the process gas inflow line 11 and the process gas supply line 13. That is, the process gas inflow line 11 is connected to the process gas supply line 13 via the internal main gas flow path 14. Further, the internal flushing gas flow path 15 is a flow path of the flushing gas, and is provided to connect the flushing gas inflow line 12 and the internal main gas flow path 14.

The gas supply unit 10A has a flow controller 16 as a module. The flow controller 16 is disposed in the inner main gas flow path 14 and is closer to the flow direction of the process gas than the connection with the internal flushing gas flow path 15 The swim side (the side of the process gas supply line 13). In addition, hereinafter, the flow direction of the process gas in the gas supply unit 10A or the like is referred to as "gas flow direction". The flow controller 16 is referred to as a so-called "mass flow controller" configured to output a detection signal corresponding to the mass flow rate of the gas in the internal main gas flow path 14, and can be externally ( A control signal of a mirco computer or the like controls the aforementioned mass flow rate.

Further, the gas supply unit 10A has a fluid control valve 17 (including a fluid control valve actuator 17a) as a module, a fluid control valve 18 (including a fluid control valve actuator 18a), and a fluid control valve 19 (including a fluid control valve). Actuator 19a). The fluid control valve 17 is disposed closer to the upstream side of the gas flow direction (on the side of the process gas inflow line 11) than the above-described connection, and is installed in the internal main gas flow path 14. The fluid control valve 18 is installed in the internal flushing gas flow path 15. The fluid control valve 19 is installed in the internal main gas flow path 14 on the downstream side of the flow rate controller 16 in the gas flow direction.

The fluid control valve 17 is an opening and closing valve having a configuration of a so-called "pneumatic valve", and a joint portion (a fluid control valve 18 and a fluid control valve for connecting an air conduit for opening and closing control) is provided at an end portion of the fluid control valve actuator 17a. 19 is the same). The fluid control valve 17 is arranged to switch the inflow of process gas from the process gas inflow line 11 toward the flow controller 16 and block it. The fluid control valve 18 is arranged to switch the inflow of flushing gas into the internal main gas flow path 14 and block it. The fluid control valve 19 is arranged to switch the inflow of gas towards the process gas supply line 13 and its blockage.

Referring to Fig. 2, in the gas supply units 10A to 10H, the fluid control valve 17, the fluid control valve 18, the flow rate controller 16, and the fluid control valve 19 are The gas circulation direction is arranged in order. Further, the fluid control valves 17 to 19 and the flow rate controller 16 are arranged in a substantially linear shape along the gas flow direction (specifically, parallel to the gas flow direction). In the following, the direction in which the fluid control valve 17, the fluid control valve 18, the flow rate controller 16, and the fluid control valve 19 in the gas supply unit 10A and the like are arranged is referred to as "machine arrangement direction". In the present configuration, the gas flow direction is parallel to the machine arrangement direction, and is set to be unidirectional (left to right direction in FIG. 2) by the fluid control valve 17 through the fluid control valve 18 and the flow rate controller 16 toward the fluid control valve 19.

Further, in the present configuration, each of the flow rate controllers 16 of the gas supply units 10A to 10D is disposed at substantially the same position in the gas flow direction (the same applies to the fluid control valves 17 to 19). In other words, each of the flow rate controllers 16 of the gas supply units 10A to 10D is arranged in a line along the width direction (a direction orthogonal to the gas flow direction and the thickness direction of the flow path block 20 to be described later: the upper and lower directions in FIG. 2). shape. Similarly, each of the flow rate controllers 16E to 10H is disposed at substantially the same position in the gas flow direction (the fluid control valves 17, 18, and 19 are also the same).

The gas supply device 10 (gas supply unit 10A) is a substantially flat member and has the above-described flow path block 20 (installation target). In the present configuration, the flow rate controller 16 and the fluid control valves 17, 18, and 19 are arranged in the machine arrangement direction and are detachably attached (fixed) to the flow path block 20. The fluid control valve 17, the fluid control valve 18, the flow controller 16, and the fluid control valve 19 are arranged in the order of the machine arrangement and are disposed in the flow path block 20, thereby being formed in the flow path block 20 The internal gas flow path (described later in detail) is connected to receive gas. That is, the flow path block 20 is configured to match The fluid control valve 17, the fluid control valve 18, the flow controller 16, and the fluid control valve 19 are installed in a state in which the machine is arranged in the direction in which the components are connected in this order.

Further, the flow path block 20 is configured to be provided with a plurality of (four in this specific example) fluid control valves 17, fluid control valves 18, flow controllers 16, and fluids arranged in the above-described machine arrangement direction in the width direction. A group of control valves 19. Specifically, in the present configuration, one flow path block 20 is configured to be arranged in a plurality of gas supply units 10A to 10D and installed in the width direction. The flow path block 20 is formed integrally with the plurality of gas supply units 10A to 10D and cannot be separated (specifically, integrated without seams). Similarly, one flow path block 20 is configured to arrange a plurality of gas supply units 10E to 10H and to be installed in the width direction. The flow path block 20 is integrally formed across a plurality of gas supply units 10E to 10H and cannot be separated (specifically, integrated without seams).

That is, in the present configuration, the gas supply device 10 has the flow path block 20 corresponding to the gas supply units 10A to 10D (which cannot be separated as a whole), and the flow path block 20 corresponding to the gas supply units 10E to 10H (integrated Can not be separated). The two are combined with each other in an adjacent state to receive a supply gas or a flushing gas from each other.

<Schematic Configuration of Flow Path Blocks of the Embodiment>

3 to 7 show the detailed configuration of the flow path block 20 according to an embodiment of the present invention. Hereinafter, the specific configuration of the flow path block 20 of the present embodiment will be described in detail with reference to FIGS. 3 to 7 and other drawings as needed.

2 and 3, gas supply units 10A to 10D and 10E In the ~10H, the flow controller 16 and the fluid control valves 17, 18, and 19 are collectively installed on the upper surface 20a (mounting surface) side of one surface of the flow path block 20. In addition, hereinafter, one surface of the flow path block 20 opposite to the upper side surface 20a is referred to as a "lower surface 20b". In the following, the surface of the flow path block 20 that is perpendicular to the upper surface 20a and the lower surface 20b and whose normal direction is the width direction is referred to as "end surface 20c".

Hereinafter, first, referring to FIGS. 2 to 4, the connection between the fluid control valve 17, the fluid control valve 18, the flow controller 16 and the fluid control valve 19 in one flow path block 20, and the gas supply units 10A to 10D A schematic configuration of the internal gas flow path associated with each other will be described.

The flow path block 20 is a plate-like member formed of stainless steel, and is configured such that the process gas flows in the gas flow direction, that is, the machine arrangement direction. Specifically, a slightly U-shaped connecting flow path 21 is formed inside the flow path block 20. The connection flow path 21 constituting the "first flow path" of the present invention is provided at a position on the upstream side in the gas flow direction of the flow path block 20 (a position closer to the upstream end portion in the gas flow direction).

The connection flow path 21 is formed in a plan view (when viewed in the thickness direction of the flow path block 20), and is formed in a substantially linear shape along the gas flow direction so that the process gas flows in the above-described gas flow direction. Specifically, the connection flow path 21 has an inlet port 21a and an outlet port 21b that are open on the upper side surface 20a. That is, the inlet port 21a is an inflow port of the process gas from the process gas inflow line 11, and is provided at an end portion on the upstream side in the gas flow direction of the connection channel 21. Similarly, the outlet port 21b is an outflow port of the process gas flowing in from the inlet port 21a, and is disposed on the downstream side of the gas flow direction of the connection flow path 21. The end.

An inlet passage 21c is formed from the inlet port 21a toward the lower side surface 20b. Similarly, an outlet passage 21d is formed from the outlet weir 21b toward the lower side surface 20b. The inlet passage 21c and the outlet passage 21d are cylindrical holes and are provided in parallel with the thickness direction of the flow passage block 20.

The ends of the inlet passage 21c and the outlet passage 21d on the side of the lower surface 20b are connected to each other by a connecting passage 21e. The connection path 21e is a groove portion 21f formed in a flat plate shape (oblong in plan view) formed of stainless steel, and is hermetically sealed by a groove (for example, laser welding or electron beam welding) to form a groove formed from the side of the lower surface 20b. The space formed by the space is arranged in parallel with the gas flow direction.

The connection flow path 22 is provided between the fluid control valves 17, 18 and the flow rate controller 16 on the downstream side of the connection flow path 21 in the gas flow direction. The connection flow path 22 constituting the "first flow path" of the present invention is a gas flow path formed inside the flow path block 20 along the gas flow direction so that the gas flows in the above-described gas flow direction. The connection flow path 22 has the same configuration as the above-described connection flow path 21, and is provided to connect the fluid control valve 17 or 18 with the flow rate controller 16.

Specifically, the connection channel 22 has an inlet port 22a, an outlet port 22b, an inlet port 22c, an outlet port 22d, a connecting path 22e, and a lid portion 22f, similarly to the above-described connecting channel 21. The connection flow path 22 is provided so that the gas flowing into the inlet port 22a via the fluid control valve 17 or 18 is transmitted to the outlet port 22b via the inlet passage 22c, the connecting path 22e, and the outlet passage 22d, and is then discharged from the outlet port 22b. This gas can flow from the fluid control valve 17 or 18 toward the flow controller 16.

A connection flow path 23 is provided at a position on the downstream side of the flow paths 21 and 22 in the flow direction of the flow path block 20. In other words, the connection flow path 23 is provided at a position on the downstream side in the gas flow direction of the flow path block 20 (a position close to the end portion on the downstream side). The connection flow path 23 constituting the "first flow path" of the present invention is formed in the gas flow direction inside the flow path block 20, and allows gas to flow through the gas flow path in the gas flow direction described above, and has the above-described The flow paths 21 and 22 are connected in the same configuration. The connection flow path 23 is provided to connect the flow controller 16 with the fluid control valve 19.

Specifically, the connection flow path 23 has an inlet port 23a, an outlet port 23b, an inlet passage 23c, an outlet passage 23d, a connecting path 23e, and a lid portion 23f, similarly to the above-described connection channels 21 and 22. The connection flow path 23 is provided such that the gas that has flowed into the inlet port 23a through the flow controller 16 is transmitted to the outlet port 23b through the inlet port 23c, the connection path 23e, and the outlet passage 23d, and is discharged from the outlet port 23b, thereby making the gas available Flow from the flow controller 16 toward the fluid control valve 19.

As described above, the connection flow paths 21, 22, and 23 are formed in a substantially straight line shape along the gas flow direction in plan view. Further, the connection flow paths 21, 22, and 23 are arranged in a substantially straight line shape along the gas flow direction in plan view. Hereinafter, the connection flow paths 21, 22, and 23 are "arranged in a substantially straight line shape", and it is not necessarily required that the center of the plane view is correctly positioned on a specific straight line. That is, for example, if the arrangement is such that it is superimposed on a specific straight line in a plan view, it may be referred to as "arranged in a straight line shape".

The flushing gas supply port 24 is provided in the upper side surface 20a of the flow path block 20 opening to the fluid control valve 18 corresponding to the fluid control valve 18 s position. The flushing gas supply port 24 is disposed in a plan view such that the inlet port 22a in the connecting flow path 22 and the outlet port 21b in the connecting flow path 21 are slightly symmetrical. That is, the outlet port 21b in the connection flow path 21, the flushing gas supply port 24, and the inlet port 22a in the connection channel 22 are arranged in a substantially straight line shape in the gas flow direction in this order.

The flushing gas supply port 24 is formed to be supplied to the fluid control valve 18 by communicating with the internal flushing gas line 25 formed across the plurality of gas supply units 10A, 10B, ... along the width direction of the device. . The internal flushing gas line 25 constituting the "second flow path" of the present invention is a flushing gas flow path formed inside the flow path block 20, and is connected to the flushing gas inflow line 12 (see Fig. 1). Further, between the flushing gas supply port 24 and the internal flushing gas line 25, a gas flow path which is parallel to the thickness direction of the flow path block 20 and which is short is formed. That is, each of the flushing gas supply ports 24 corresponding to the gas supply units 10A to 10D is connected to the internal flushing gas line 25 via the short gas flow path described above.

In the present embodiment, the internal flushing gas line 25 is disposed at a position corresponding to the fluid control valve 18 (directly below the fluid control valve 18). Specifically, the internal flushing gas line 25 is configured to substantially coincide with the flushing gas supply port 24 at a position in the machine arrangement direction.

The process gas supply port 26 is provided at a position corresponding to the fluid control valve 19 in the upper side surface 20a of the flow path block 20 opening to the fluid control valve 19. The process gas supply port 26 is formed to communicate with the supply side internal gas line 27 formed along the width direction of the device across a plurality of gas supply units 10A, 10B, ... thereby supplying gas through the fluid control valve 19. to Supply side internal gas line 27.

The supply-side internal gas line 27 constituting the "second flow path" of the present invention is a gas flow path formed inside the flow path block 20, and is connected to the process gas supply line 13 (see Fig. 1). Further, between the process gas supply port 26 and the supply side internal gas line 27, a gas flow path which is parallel to the thickness direction of the flow path block 20 and which is short is formed. That is, the respective process gas supply ports 26 corresponding to the gas supply units 10A to 10D are connected to the supply-side internal gas line 27 via the short gas flow paths, respectively.

In the present embodiment, the supply-side internal gas line 27 is provided at a position corresponding to the fluid control valve 19 (directly below the fluid control valve 19). Specifically, the supply-side internal gas line 27 is disposed so as to slightly coincide with the process gas supply port 26 at a position in the machine arrangement direction of the plan view.

As described above, the gas supply unit 10A or the like is configured such that the process gas flowing into the inlet port 21a of the connection flow path 21 or the self-rinsing gas can be inflowed by the fluid control valves 17 and 18 alternatively. The flushing gas flowing into the internal flushing gas line 25 of the line 12 is supplied to the supply-side internal gas line 27 via the connecting flow path 22, the flow rate controller 16, the connecting flow path 23, and the fluid control valve 19. That is, the gas supply units 10A to 10D (10E to 10H) are connected to each other through the internal flushing gas line 25 and the supply side internal gas line 27 so as to be mutually receivable.

On the upper side surface 20a side of the flow path block 20, female screw portions 28a, 28b, 28c, and 28d are provided. The female screw portions 28a, 28b, 28c, and 28d are so-called "thread holes", and are formed in the axial direction (depth direction) in parallel with the thickness direction of the flow path block 20.

A pair of female screw portions 28a are provided at positions corresponding to the inflow side flanges 30. A pair of female screw portions 28b are provided at positions corresponding to the fluid control valves 17 and 18. A pair of female screw portions 28c are provided at positions corresponding to the flow controller 16. A pair of female screw portions 28d are provided at positions corresponding to the fluid control valve 19. Further, the pair of female screw portions 28a, the pair of female screw portions 28b, the pair of female screw portions 28c, and the pair of female screw portions 28d are arranged in a substantially straight line shape in the gas flow direction (machine arrangement direction) in this order.

The pair of female screw portions 28a corresponding to the inlet side flanges 30 are disposed on the both sides of the inlet port 21a in the connection flow path 21, and are arranged in the machine arrangement direction. The inflow side flanges 30 are provided one by one in each of the gas supply units 10A to 10H. The inflow side flange 30 in the gas supply unit 10A is a pipe flange for connecting the process gas inflow line 11A and the inlet port 21a, and is formed in a slightly inverted T shape in front view (inflow of the gas supply units 10B to 10H) The side flanges 30 also have the same configuration).

The inflow side flange 30 corresponding to one of the modules is constituted by the flange portion 31 and the tube portion 32. The flange portion 31 is a plate-like member having a substantially I-shape in plan view, and is configured to hermetically join the upper side surface 20a of the flow path block 20. The tube portion 32 is erected vertically from the flange portion 31. The flange portion 31 is formed such that its width (the width direction described above: the same applies hereinafter) is slightly larger than the outer diameter of the pipe portion 32 and the mounting bolt 33, and the width of the flow controller 16 and the fluid control valves 17 to 19 (fluid control) The widths of the valve actuators 17a to 19a are slightly the same.

A through hole (not shown) through which the mounting bolt 33 is inserted is formed in the flange portion 31 at a position corresponding to the female screw portion 28a. Further, the inflow side flange 30 is airtight by screwing the mounting bolt 33 to the pair of female screw portions 28a. The floor is installed on the upper surface 20a side of the flow path block 20 (the airtight sealing structure of such a mounting portion is a well-known technique, and therefore the illustration or description is omitted: the same applies hereinafter). That is, the pair of female screw portions 28a are provided so that the inflow side flange 30 can be detachably attached to the flow path block 20.

Corresponding to one of the pair of female screw portions 28b of the fluid control valves 17 and 18, the downstream side of the gas flow direction in the outlet port 21b and the pair of female screw portions 28a in the connection flow path 21 (in FIG. 4) The position between the right side). The other of the pair of female screw portions 28b is disposed at a position between the flushing gas supply port 24 and the outlet port 22b of the connecting flow path 22.

In the present embodiment, the fluid control valves 17 and 18 are integrated by the common valve mounting block 40 and are fixed to the flow path block 20. That is, the fluid control valve actuators 17a and 18a are previously mounted on the same valve mounting block 40. The valve mounting block 40 is formed in a plan view to have a slightly I-shape. Further, the valve mounting block 40 is formed to have a width slightly larger than the outer diameter of the mounting bolt 41, and is slightly the same as the width of the flow controller 16 and the fluid control valve actuators 17a to 19a. The valve mounting block 40 is formed in a vicinity of a valve body from the outlet port 21b of the connection flow path 21 via the fluid control valve actuator 17a (the configuration of the vicinity is a well-known technique, and thus the illustration or description is omitted: The same applies to the internal gas flow path (not shown) of the inlet port 22a in the connection flow path 22, and the connection flow from the flushing gas supply port 24 to the vicinity of the valve body in the fluid control valve actuator 18a. The internal gas flow path (not shown) of the inlet port 22a in the road 22. Further, the fluid control valve 17 (18) is constructed by mounting the fluid control valve actuator 17a (18a) in the valve mounting block 40 having the above configuration.

Further, in the valve mounting block 40, a through hole (not shown) through which the mounting bolt 41 is inserted is formed at a position corresponding to the female screw portion 28b. Further, the fluid control valves 17 and 18 are screwed to the pair of female screw portions 28b by the mounting bolts 41, and can be airtightly attached to the upper side surface 20a side of the flow path block 20 via the common valve mounting block 40. That is, in the present embodiment, the fluid control valves 17 and 18 are integrally formed, in other words, the fluid control valve actuators 17a and 18a and the valve mounting block 40 previously mounted therein constitute one module that can be detachably attached to the flow path block 20. (loading module). Further, the pair of female screw portions 28b are provided such that the fluid control valves 17 and 18 (the valve mounting blocks 40 to which the fluid control valve actuators 17a and 18a are attached in advance) are detachably attached to the flow path block 20.

One of the pair of female screw portions 28c corresponding to the flow controller 16 is disposed between the downstream side of the gas flow direction in the pair of female screw portions 28b and the outlet port 22b in the connection flow path 22. The other of the pair of female screw portions 28c is disposed at a position between the inlet port 23a and the outlet port 23b in the connection flow path 23.

In the present embodiment, the flow controller 16 is provided with the MFC mounting portion 50. The MFC mounting portion 50 is formed in a substantially I-shape in plan view. Further, the MFC mounting portion 50 is formed as a portion whose width is slightly larger than the outer diameter of the mounting bolt 51 and which is higher than the MFC mounting portion 50 of the flow controller 16 and the fluid control valves 17 to 19 (fluid control valve actuator 17a) The width of ~19a) is slightly the same. The MFC mounting portion 50 is formed with an internal gas flow path (not shown) from the outlet port 22b in the connection flow path 22 to the flow controller 16, and a gas passage through the inside of the flow controller 16 to the connection flow path. The internal gas flow path of the inlet 埠 23a in 23 (not shown).

Further, in the MFC mounting portion 50, a through hole (not shown) through which the mounting bolt 51 is inserted is formed at a position corresponding to the female screw portion 28c. Further, the flow controller 16 screws the mounting bolts 51 to the pair of female screw portions 28c, thereby being airtightly mounted on the upper side surface 20a side of the flow path block 20. That is, the pair of female screw portions 28c are provided so that the flow controller 16 (the MFC mounting portion 50) can be detachably attached to the flow path block 20.

One of the pair of female screw portions 28d corresponding to one of the fluid control valves 19 is disposed between the pair of female screw portions 28c on the downstream side in the gas flow direction and the outlet port 23b in the connection flow path 23. position. The other of the pair of female screw portions 28d is provided on the downstream side closer to the gas flow direction than the process gas supply port 26, that is, on the downstream side of the flow path block 20 in the gas flow direction.

In the present embodiment, the fluid control valve 19 is configured by attaching the fluid control valve actuator 19a to the valve mounting block 60 in advance. The valve mounting block 60 is formed in a plan view to have a slightly I-shape. Further, the valve mounting block 60 is formed to have a width slightly larger than the outer diameter of the mounting bolt 61 and slightly the same as the width of the flow controller 16 and the fluid control valve actuators 17a to 19a. In the valve mounting block 60, an internal gas flow path (not shown) from the vicinity of the valve body in the fluid control valve actuator 19a from the outlet port 23b of the connection flow path 23 to the process gas supply port 26 is formed. .

Further, in the valve mounting block 60, a through hole (not shown) through which the mounting bolt 61 is inserted is formed at a position corresponding to the female screw portion 28d. Further, the fluid control valve 19 is screwed to the pair of female screw portions 28d by the mounting bolts 61, and is airtightly mounted on the flow path block 20 through the valve mounting block 60. Side surface 20a side. That is, the pair of female screw portions 28d are provided such that the fluid control valve 19 (the valve mounting block 60 to which the fluid control valve actuator 19a is attached in advance) is detachably attached to the flow path block 20.

In the present embodiment, the female screw portion 28a and the connection flow path 21 (including the inlet port 21a, the inlet passage 21c, the connection path 21e, the outlet passage 21d, and the outlet port 21b), the female screw portion 28b, and the connection flow path 22 (ibid.) The flushing gas supply port 24, the female screw portion 28c, the connecting flow path 23 (same as above), the process gas supply port 26, and the female screw portion 28d are arranged in a substantially linear shape along the machine arrangement direction. Further, the female screw portions 28a, 28b, 28c, and 28d are formed as non-through holes that are opened in the upper surface 20a. That is, the connection flow paths 21, 22, and 23 are formed around the female screw portions 28a to 28d in the depth direction of the female screw portions 28a to 28d. Specifically, the female screw portions 28a to 28d are formed so as not to communicate with the connection flow paths 21 to 23.

In addition, the internal main gas flow path 14 in FIG. 1 corresponds to the connection flow paths 21 to 23, and the internal gas flow path formed in the fluid control valve 17 (which is an internal gas flow path formed in the valve mounting block 40 and is a connection flow) The outlet port 21b of the path 21 passes through the fluid control valve actuator 17a to the flow path of the inlet port 22a of the connection flow path 22, the internal gas flow path formed in the flow rate controller 16, and the internal gas flow formed in the fluid control valve 19. The path (which is formed in the internal gas flow path of the valve mounting block 60 and is the flow path from the outlet port 23b of the connection flow path 23 to the process gas supply port 26 via the fluid control valve actuator 19a), and the supply of the process gas 26 to the gas flow path of the supply side internal gas line 27. Further, the internal flushing gas flow path 15 in Fig. 1 corresponds to the flushing gas flow path from the internal flushing gas line 25 to the flushing gas supply port 24, and is formed in the valve The internal gas flow path of the block 40 is provided, and is a flow path from the flushing gas supply port 24 via the fluid control valve 18 to the inlet port 22a in the connection flow path 22, and an internal flushing gas line 25.

<Structure of the main part of the flow path block of the embodiment>

Next, a configuration in which the internal flushing gas lines 25 and the supply side internal gas lines 27 are connected to each other in the adjacent flow path block 20 in a state in which the plurality of flow path blocks 20 are adjacent to each other in the width direction are arranged in parallel. Description will be made with reference to Figs. 5 to 7 . In addition, FIG. 7 is an enlarged cross-sectional view showing only a connecting portion of the internal flushing gas lines 25 in the adjacent flow path blocks 20. Further, since the connection portions of the supply-side internal gas lines 27 in the adjacent flow path blocks 20 have the same configuration, the enlarged cross-sectional views of the relevant portions are omitted.

The flow path block 20 has a first connecting piece 201 and a second connecting piece 202 which constitute the "connecting portion" of the present invention. The first connecting piece 201 is on the side of the lower side surface 20b, and is protruded from the one end portion (the end portion on the right side in FIG. 6) in the width direction in the width direction (that is, toward the outer side). The second connecting piece 202 is protruded from the other end portion in the width direction on the side of the upper side surface 20a. That is, as shown in FIG. 6, the first connecting piece 201 and the second connecting piece 202 are disposed at diagonal positions when viewed in the machine arrangement direction.

In the present embodiment, the first connecting piece 201 and the second connecting piece 202 are the main portion of the flow path block 20 (the portion constituting the cube of the main portion of the flow path block 20 and the cover portion 21f is removed). Seamless joints become one. Further, the first connecting piece 201 and the second connecting piece 202 are disposed across the entire length of the flow path block 20 in the machine arrangement direction. Internal flushing gas tube The wire 25 is a substantially cylindrical sealing member formed of stainless steel, and hermetically seals the non-through hole formed in the width direction from the side of the second connecting piece 202 by welding (for example, laser welding or electron beam welding). Formed by the opening. The supply side internal gas line 27 is also formed in the same manner.

The position of the machine arrangement direction of the surface of the first connecting piece 201 (the surface opposite to the lower side surface 20b) corresponds to the positions of the internal flushing gas line 25 and the supply side internal gas line 27, and the first connecting opening portion 211 is formed. The first connection opening portion 211 is provided to open in a direction from the lower side surface 20b side toward the upper side surface 20a side (ie, toward the upper side in FIG. 6).

In addition, the first connection opening portion 211 corresponding to the internal flushing gas line 25 is shown as "211a" in the drawing, and may be referred to as "first connection opening portion 211a" in the following description. Similarly, the first connection opening portion 211 corresponding to the supply-side internal gas line 27 is indicated as "211b" in the drawing, and may be referred to as "first connection opening portion 211b" in the following description. In the following description, the "first connection opening portion 211a" and the "first connection opening portion 211b" may be collectively referred to as "first connection opening portion 211".

The first connection opening portion 211 a is connected to one end portion (end portion on the first connecting piece 201 side) in the width direction of the internal flushing gas line 25 via the first connecting path 212 . That is, the internal flushing gas line 25 is formed as a non-through hole in the width direction. Further, the first connecting path 212 is an internal gas passage of the flow path block 20, and is formed to connect one of the one ends of the internal flushing gas line 25 with the first connecting opening portion 211a.

In the present embodiment, the first connecting path 212 is formed in a substantially U-shape as viewed from the side in the same manner as the above-described connecting flow path 21 and the like. in particular, The first connecting path 212 has a straight pipe portion 213, a straight pipe portion 214, and a connecting passage portion 215. The straight pipe portion 213 is a substantially cylindrical gas passage formed from the first connection opening portion 211a toward the lower side surface 20b side, and is connected to one end portion of the connection passage portion 215. The straight pipe portion 214 is a substantially cylindrical gas passage formed from one end portion of the inner flushing gas line 25 toward the lower side surface 20b side, and is connected to the other end portion of the connecting passage portion 215. The connecting passage portion 215 is a flat portion (a circular shape in plan view) formed of stainless steel, and is hermetically sealed by welding (for example, laser welding or electron beam welding) to form a side of the lower surface 20b. The space formed by the groove is formed along the width direction.

In the present embodiment, the connection between the first connection opening 211b and the supply-side internal gas line 27 is the same as the connection between the first connection opening 211a and the internal flushing gas line 25. Therefore, the first connection opening portion 211b is connected to one end portion (the end portion on the first connecting piece 201 side) in the width direction of the supply-side internal gas line 27 via the first connection path 212. That is, the supply-side internal gas line 27 is formed as a non-through hole in the width direction. Further, the first connection path 212 connecting the first connection opening portion 211b and the supply side internal gas line 27 is formed in the same manner as described above.

As shown in FIGS. 5 and 7, a joint bolt screwing hole 217 is provided on each of both sides of the first connection opening portion 211. The coupling bolt screwing hole 217 is a screw hole (through hole) provided along the thickness direction of the first connecting piece 201, and is formed to be able to screw (tie) the coupling bolt B. In the present embodiment, the pair of connecting bolt screwing holes 217 are arranged along the machine arrangement direction. That is, the pair of coupling bolt screwing holes 217 are provided to be slightly symmetrical with respect to the first connection opening portion 211.

A second connection opening portion 221 is formed at a position corresponding to the inner flushing gas line 25 and the supply side inner gas line 27 in the machine arrangement direction on the bottom surface of the second connecting piece 202 (the surface opposite to the upper side surface 20a). . The second connection opening portion 221 is provided to open in a direction toward the lower side surface 20b side of the upper side surface 20a side (ie, toward the lower side in FIG. 6).

Further, the second connection opening portion 221 corresponding to the internal flushing gas line 25 is indicated as "221a" in the drawing and may be referred to as "second connecting opening portion 221a" in the following description. Similarly, the second connection opening portion 221 corresponding to the supply-side internal gas line 27 is shown as "221b" in the drawing and may be referred to as "second connection opening portion 221b" in the following description. In the following description, the "second connection opening portion 221a" and the "second connection opening portion 221b" may be collectively referred to as "second connection opening portion 221".

The second connection opening portion 221a is connected to a position closer to the other end portion in the width direction of the internal flushing gas line 25 via the second connecting path 222. Further, the second connecting path 222 is a gas passage formed inside the flow path block 20 to connect the other end portion of the internal flushing gas line 25 and the second connecting opening portion 221a. Specifically, in the present embodiment, the second connecting passage 222 is a gas passage having a substantially cylindrical shape, and is formed by the second connecting opening portion 221a toward the internal flushing gas line 25 (that is, toward the side of the upper surface 20a).

In the present embodiment, the connection between the second connection opening portion 221b and the supply-side internal gas line 27 is the same as the connection between the second connection opening portion 221a and the internal flushing gas line 25. Therefore, the second connection opening portion 221b is connected to the other end portion in the width direction of the supply-side internal gas line 27 via the second connection path 222 (the end on the second connection piece 202 side) unit). Further, the second connecting path 222 for connecting the second connection opening portion 221b and the supply-side internal gas line 27 is formed in the same manner as described above.

As shown in FIGS. 5 and 7, a connection bolt insertion hole 227 is provided on each of both sides of the second connection opening portion 221. The connecting bolt insertion hole 227 is a through hole provided along the thickness direction of the second connecting piece 202, and is formed such that the above-described connecting bolt B can be inserted. Specifically, the connecting bolt insertion hole 227 is formed such that its inner diameter is slightly larger than the outer diameter of the connecting bolt B. Further, in the present embodiment, the pair of connection bolt insertion holes 227 are arranged along the machine arrangement direction. That is, the pair of connection bolt insertion holes 227 are provided slightly symmetrical next to the second connection opening portion 221.

In the present embodiment, the first connecting piece 201 and the second connecting piece 202 are formed such that the first connecting opening 211 and the second connecting opening 221 are at the same position in the machine arrangement direction. That is, the first connection opening portion 211 and the second connection opening portion 221 are provided such that the two flow path blocks 20 are arranged adjacent to each other in the width direction in the machine arrangement direction, and one of the first connection pieces 201 and the other In a state where the second connecting pieces 202 are overlapped, the first connecting opening portion 211a and the second connecting opening portion 221a are opposed to each other, and the first connecting opening portion 211b and the second connecting opening portion 221b are Oppose each other. Similarly, the connecting bolt insertion hole 227 is provided so as to surround the connecting bolt screwing hole 217 in a plan view.

Further, in the present embodiment, each of the first connection opening portion 211 and the second connection opening portion 221 is provided with a step portion that can accommodate a sealing member when the both are opposed to each other and airtightly joined. As such, the first connecting piece 201 and the second connecting piece 202 are configured to pass through the first connecting opening portion 211 and the second connecting opening The portions 221 overlap each other in the thickness direction, and are connected between the internal flushing gas lines 25 and the supply side internal gas lines 27 in the adjacent flow path blocks 20.

<Effects and effects of the configuration of the embodiment>

In the configuration of the present embodiment described above, the fluid control valve 17, the fluid control valve 18, the flow rate controller 16, and the fluid control valve 19 are arranged in the direction in which the machine is arranged (the members are attached to the flow path block 20). The gas supply units 10A to 10D connected to the receivable gas are installed in the flow path block 20 in a state of being arranged in the width direction. Then, the gas supply units 10A to 10D are connected to receive gas by the internal flushing gas line 25 and the supply side internal gas line 27 provided inside the flow path block 20. The gas supply units 10E to 10H are also the same.

Here, in the above configuration, the flow path block 20 in which the gas supply units 10A to 10D are mounted and the flow path block 20 in which the gas supply units 10E to 10H are mounted are arranged adjacent to each other in the width direction. Then, in the gas supply units 10A to 10H, the respective flow rate controllers 16 are disposed at substantially the same position in the gas flow direction, that is, in the machine arrangement direction (the same applies to the fluid control valves 17 to 19).

In this state, the adjacent two flow path blocks 20 are joined (connected) to each other by the first connecting piece 201 and the second connecting piece 202. Thereby, the internal flushing gas line 25 and the supply side internal gas line 27 are connected to receive gas.

Specifically, the first connecting piece 201 and the second connecting piece 202 are overlapped in the thickness direction into the first connecting opening portion 211 of the first-class road block 20 . The second connection opening portion 221 of the other flow path block 20 faces each other with the above-described sealing member. Further, the coupling bolt B is inserted into the coupling bolt insertion hole 227 and screwed into the coupling bolt screwing hole 217. Thereby, the flow path block 20 in which the gas supply units 10A to 10D are mounted and the flow path block 20 in which the gas supply units 10E to 10H are mounted can be coupled (bonded).

As described above, according to the configuration of the present embodiment described above, the plurality of flow path blocks 20 are arranged adjacent to each other in parallel, and the first connecting piece 201 and the second connecting piece 202 are connected to each other, thereby well coping with the manufacturing process. The increase in the type of gas causes a plurality of gas supply units 10A and the like to be arranged in parallel. Therefore, according to the above configuration, the gas supply device 10 can be maintained in good maintainability, and can be favorably miniaturized or concentrated.

Specifically, according to the configuration of the present embodiment as described above, the piping length of the entire gas supply device 10 can be suppressed as much as possible. Further, in the configuration of the present embodiment, the first connection opening portion 211 and the second connection opening portion 221 can be disposed at the same position in the machine arrangement direction. Therefore, according to the above configuration, the size of the entire gas supply device 10 in the machine arrangement direction can be further reduced as compared with the prior art.

Further, in the configuration of the present embodiment, the inflow side flange 30 can be detachably attached to the flow path block 20 by the pair of female screw portions 28a. Similarly, the fluid control valves 17 and 18 are detachably attached to the flow path block 20 by a pair of female screw portions 28b. Further, the flow controller 16 is detachably attached to the flow path block 20 by a pair of female screw portions 28c. Further, the fluid control valve 19 is detachably attached to the flow path block 20 by a pair of female screw portions 28d.

Thus, the inflow side flange 30, the fluid control valves 17 and 18 are borrowed between It is connected by the connection flow path 21. Similarly, the fluid control valves 17 and 18 and the flow controller 16 are connected by a connection flow path 22. Further, the flow controller 16 and the fluid control valve 19 are connected by a connection flow path 23. Further, the connection flow paths 21 to 23 and the female screw portions 28a to 28d are arranged on substantially the same straight line, and are formed to bypass the depth direction.

Therefore, according to the above configuration, even if the widths of the inflow side flange 30, the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are set to a minimum (specifically, actuation with the flow controller 16 and the fluid control valve) The widths of the tubes 17a to 19a are slightly the same. Alternatively, the flow controller 16 and the fluid control valves 17 to 19 can be detachably attached to the flow path block 20. In other words, the members can be freely attached and detached to the flow path block 20 without using a rectangular shape for every four mounting bolts. Therefore, according to the above configuration, the width of each gas supply unit 10A or the like and the width of the entire gas supply device 10 can be reduced as much as possible, so that the gas supply device 10 can maintain good maintainability and can be further improved. Miniaturization.

Further, in the configuration of the present embodiment, the inflow side flange 30, the flow rate controller 16, and the fluid control valves 17 to 19 are concentrated on the upper side surface 20a side of the flow path block 20. Therefore, according to the above configuration, the inflow side flange 30, the flow rate controller 16, and the fluid control valves 17 to 19 are collectively mounted on the upper surface 20a side (according to the above configuration, all of the flow rate controller 16 and the fluid control valve can be used. 17 to 19, when the maintenance (such as the bolting or the like of the mounting bolt 41 or the like) is performed, the gas supply unit 10A or the like or the gas supply device 10 can be made as small as possible because the upper surface 20a side can be used. The width is achieved without compromising good maintainability.

In particular, when the number of process gases increases, when a plurality of gas supply units 10A and the like are concentrated, the enlargement of the flow path block 20 becomes a big problem. That is, the enlargement of the flow path block 20 is accompanied by an increase in the weight and installation area of the gas supply device 10. Therefore, in the enlarged flow path block 20 and the gas supply device 10, the degree of freedom in setting is extremely small.

At this point, the miniaturization of the flow path block 20 can be achieved by the above-described configuration, whereby the degree of freedom in the arrangement of the gas supply device 10 can be improved, and the high-performance semiconductor process can be favorably realized thereby. Specifically, for example, the gas supply device 10 can be disposed in the vicinity of the process chamber. At this time, the length of the piping of the process gas supply line 13 can be shortened as much as possible. Therefore, the supply of the process gas can be performed by high frequency and high precision (high responsiveness and controllability). In addition, the productivity is improved by reducing the switching time of the process gas.

Further, in the configuration of the present embodiment, it can be assembled, stored, and transported in each flow path block 20. In addition to the above, the various requirements of the number of sets of the gas supply unit 10A and the like may be flexible by the number of the flow path blocks 20 or the parallel connection between the plurality of flow path blocks 20 by the gas supply unit 10A or the like. Correspondence. Therefore, according to the present embodiment, the ease of handling at the time of manufacture of the gas supply device 10 can be improved, and the number of parts can be reduced.

<Modification>

Hereinafter, a modification of several representatives will be exemplified. In the following description of the modified examples, the same components as those of the above-described embodiments are denoted by the same reference numerals as those of the above-described embodiments. Further, the description of the relevant portions is within the scope of technical contradiction, and the description of the above embodiments can be appropriately invoked. Moreover, the modification is not limited to the following The person is self-evident. Further, all or a part of the plurality of modifications may be suitably combined and applied within a range that is not technically contradictory.

The "upper surface 20a" is a name given to facilitate the description of each embodiment, and is not necessarily limited to the surface on the upper side in the vertical direction. That is, depending on the arrangement of the gas supply device 10, the upper surface 20a can be set such that its normal line faces the horizontal direction or below the vertical direction.

The fluid control valve 17 and the fluid control valve 18 are pre-installed in a common valve mounting block 40, but the present invention is not limited to this aspect. That is, the fluid control valve 17 and the fluid control valve 18 can be detachably attached to the flow path block 20 independently of the fluid control valve 19, respectively.

The number of the fluid control valves 17 and the like included in one gas supply unit 10A or the like is not limited to the above-described embodiment. Further, the fluid control valve 17 or the like may be integrated with the flow path block 20 in advance without using a female screw portion or a bolt.

A portion of the fluid control valve 17 and the like may also be pre-installed in the flow path block 20, and the remaining portion may be detachably attached to the flow path block 20. Further, the fluid control valve 17 or the like may be a "pneumatic valve" as described above, but may be a solenoid valve or a piezoelectric valve.

The number of gas supply units 10A and the like that can be installed in parallel in one flow path block 20 is not limited to four. In other words, for example, a flow path block 20 in which two gas supply units 10A and the like can be installed in parallel, or a flow path block 20 in which three gas supply units 10A and the like can be installed in parallel can be prepared. Further, the number of parallels of the flow path blocks 20 is not limited to two. That is, the connection of three or more flow path blocks 20 is also performed in the same manner as the description of each of the above embodiments.

8 to 10 show the configuration of a modification of the flow path block 20 of the present invention. Referring to Figs. 8 to 10, in the modification, the first connecting pieces 201, 201' and the second connecting pieces 202, 202' are formed in the flow path block 20. Further, in this modification, the first connecting pieces 201, 201' and the second connecting pieces 202, 202' are formed to have the same thickness as the body portion of the above-described flow path block 20. Further, the first connection opening portion 211a, the first connection opening portion 211b, the second connection opening portion 221a, and the second connection opening portion 221b are all provided to be open on the upper side surface 20a.

The first connecting piece 201 is provided to protrude in the width direction corresponding to the first connection opening portion 211a. The first connecting piece 201' is provided to protrude in the width direction corresponding to the first connecting opening portion 211b. The second connecting piece 202 is provided to protrude in the width direction corresponding to the second connection opening portion 221a. The second connecting piece 202' protrudes in the width direction corresponding to the second connecting opening portion 221b.

The first connecting pieces 201, 201' and the second connecting pieces 202, 202' are formed to have the same amount of protrusion. In other words, the first connecting pieces 201, 201' and the second connecting pieces 202, 202' are formed such that the first connecting piece 201 and the second connecting piece 202 are disposed in a state in which the two flow path blocks 20 are adjacently arranged in the width direction. In this order, the first connecting piece 201' and the second connecting piece 202' are arranged in a substantially straight line shape in the machine arrangement direction and are arranged adjacent to each other (at the same time, the first connecting opening portion 211a, the second connecting opening portion 221a, the first One of the connection opening portions 211b and the second connection opening portion 221b are arranged in a line shape in the machine arrangement direction in this order.

As shown in FIG. 10, the first connection opening portion 211a is connected to the first connection in the width direction of the internal flushing gas line 25 via the first connecting path 212. The ends of the sheet 201 side are connected. That is, the internal flushing gas line 25 is formed with a non-through hole in the width direction. In the modification, the first connecting passage 212 is a gas passage having a substantially cylindrical shape formed from the first connecting opening portion 211a toward the lower surface 20b side, similarly to the straight tube portion 213 of the first embodiment. And connected to the end portion on the first connecting piece 201 side in the width direction of the internal flushing gas line 25.

Further, the second connection opening portion 221a is connected to a position close to the end portion of the second connecting piece 202 side in the width direction of the internal flushing gas line 25 via the second connecting path 222. The second connecting path 222 is a gas passage formed inside the flow path block 20 to connect the end portion of the internal flushing gas line 25 on the second connecting piece 202 side and the second connecting opening portion 221a. Specifically, the second connecting path 222 is a gas passage having a substantially cylindrical shape, and is formed from the second connection opening portion 221a toward the internal flushing gas line 25 (that is, toward the side of the lower surface 20b).

On both sides of the first connection opening 211, a bolt bolting hole 230 is provided in the same manner as the bolt-molding hole 217 (see FIG. 5) in the first embodiment described above. Moreover, in this modification, the connection bolt screwing hole 230 is also provided in the both sides of the 2nd connection opening part 221a. Further, the flow path block 20 is configured such that the first connecting piece 201, the second connecting piece 202, the first connecting piece 201', and the second connecting piece 202' are disposed adjacent to each other in the direction in which the machine is arranged as described above. The flow dividing pipe 290 is thereby connected between the internal flushing gas lines 25 in the adjacent flow path blocks 20 and between the supply side internal gas lines 27.

Specifically, the branching pipe 290 has a flange portion 291 and a connecting pipe Department 292. The flange portion 291 is configured to be the same as the flange portion 31 (see FIG. 2 and the like) in the inflow side flange 30 described above. Further, in a state in which the flange portion 291 is disposed to face the first connection opening portion 211 or the second connection opening portion 221, the connection bolt B is screwed to the connection bolt screwing hole 230, thereby being separated from the flow path block. 20 airtight joints. The connecting pipe portion 292 is formed in a reverse U-shape in a front view to connect between the two flange portions 291.

In the configuration of the modification, the flow dividing pipe 290 is installed so as to straddle the first connecting piece 201 and the second connecting piece 202 in a state in which the first connecting piece 201 and the second connecting piece 202 are arranged adjacent to each other in the machine arrangement direction. Thereby, the internal flushing gas lines 25 in the adjacent flow path block 20 are connected to each other. Similarly, the branching pipe 290 is installed so as to straddle the first connecting piece 201' and the second connecting piece 202' in a state in which the first connecting piece 201' and the second connecting piece 202' are disposed adjacent to each other in the machine arrangement direction. Thereby, the supply-side internal gas lines 27 in the adjacent flow path blocks 20 are connected to each other.

Here, as shown in Fig. 8, in a state in which the two flow path blocks 20 are adjacently arranged, the second connecting piece 202 is housed in a space between the first connecting piece 201 and the first connecting piece 201'. Similarly, in the space between the second connecting piece 202 and the second connecting piece 202', the first connecting piece 201' is housed. Therefore, according to this configuration, when a plurality of gas supply units 10A and the like are arranged in parallel as the type of the process gas increases, the size of the entire gas supply device 10 in the width direction can be suppressed as much as possible.

The first connecting pieces 201, 201' and the second connecting pieces 202, 202' may be formed in a tongue shape (cantilever shape) only in the vicinity of the first connecting opening portion 211 or the second connecting opening portion 221. In particular, in this embodiment, corresponding to The first connecting piece 201 of the first connecting opening portion 211a and the first connecting piece 201' corresponding to the first connecting opening portion 211b may also be in a narrow range of the necessary minimum size in the machine arrangement direction (specifically The connecting bolt screwing holes 230 are formed as narrow as possible in a range that can be satisfactorily formed on both sides of the first connecting opening portion 211a. The second connecting piece 202 corresponding to the second connection opening portion 221a is also the same.

<Modification of the schematic configuration of the fluid supply control device>

Next, the related configuration of another example (other embodiment) of the present invention will be described. In the following description of the other examples, the same components as those described in the above embodiments are denoted by the same reference numerals as the above-described embodiments. Further, in the description of the relevant portions, the drawings or descriptions of the above-described embodiments may be appropriately invoked within the scope of technical contradiction.

Referring to Figs. 11 to 14, in the present embodiment, the flow rate controller 16 is detachably attached to the upper side surface 20a side of the flow path block 20. On the other hand, the fluid control valves 17 to 19 and the inflow side flange 30 are detachably attached to the side of the lower side surface 20b opposite to the upper side surface 20a. Further, the fluid control valve 18, the fluid control valve 17, the inflow side flange 30, and the fluid control valve 19 are arranged in this order in the machine arrangement direction (the direction parallel to the connection path 21e in the connection flow path 21). Therefore, the flow path configuration inside the flow path block 20 is changed from the above embodiment.

In addition to the above, the flow rate controller 16, the fluid control valves 17 to 19, and the inflow side flange 30 are installed in the flow path block 20 in the same manner as the above-described embodiment. That is, the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 The configuration is substantially the same as the above embodiment.

The configuration of the flow path block 20 in the present embodiment will be described. Unlike the above-described embodiment, the connection flow path 21 is provided such that the inlet port 21a and the outlet port 21b are open on the lower surface 20b side. Moreover, the connection flow path 21 is provided between the connection flow path 22 and the connection flow path 23 in terms of the arrangement direction of the machine. Specifically, the inlet port 21a in the connection flow path 21 is provided at a substantially central portion of the flow path block 20 in terms of the direction in which the machine is arranged. In addition to this, the connection flow path 21 is formed in a substantially U-shape similarly to the above-described embodiment.

The inlet port 22a in the connection flow path 22 is provided so as to open toward the lower side surface 20b side in the extension line of the directional line drawn from the inlet port 21a toward the outlet port 21b in the connection flow path 21. On the other hand, the outlet weir 22b is provided to open toward the side of the upper side surface 20a. Further, the connection flow path 22 is formed to connect the inlet port 22a and the outlet port 22b in a straight line shape. Specifically, in the present embodiment, the exit weir 22b is disposed at a position slightly aligned with the inlet weir 22a in plan view. That is, the connection flow path 22 is provided in parallel with the thickness direction of the flow path block 20.

The outlet port 23b in the connection flow path 23 is provided so as to open toward the lower side surface 20b side on the extension line of the directional line drawn from the outlet port 21b toward the inlet port 21a in the connection flow path 21. On the other hand, the inlet weir 23a is provided to open toward the side of the upper side surface 20a. Moreover, the connection flow path 23 is formed to connect the inlet port 23a and the outlet port 23b. Connected in a straight line. Specifically, in the present embodiment, the exit weir 23b is disposed at a position slightly aligned with the inlet weir 23a in a plan view. That is, the connection flow path 23 is provided in parallel with the thickness direction of the flow path block 20.

The flushing gas supply port 24 is provided so as to open toward the lower surface 20b side from the outlet line 21b of the connection flow path 21 toward the extension line of the directional line drawn by the inlet port 22a of the connection flow path 22. Specifically, the flushing gas supply port 24 is disposed in the vicinity of one end portion of the flow path block 20 in the machine arrangement direction. The flushing gas supply port 24 is connected to the internal flushing gas line 25 in the same manner as the above embodiment.

Further, the process gas supply port 26 is provided to open toward the lower side surface 20b from the inlet line 21a of the connection flow path 21 toward the extension line of the directional line drawn by the outlet port 23b of the connection flow path 23. Specifically, the process gas supply port 26 is disposed in the vicinity of the other end portion of the flow path block 20 in the machine arrangement direction so as to be close to (adjacent to) the outlet port 23b of the connection flow path 23. The process gas supply port 26 is connected to the supply side internal gas line 27 in the same manner as the above embodiment.

Further, in the present embodiment, the flushing gas supply port 24, the connecting flow path 22, the outlet port 21b of the connecting channel 21, the inlet port 21a, the connecting channel 23, and the process gas supply port 26 are arranged along the machine in this order. The directions are arranged in a slightly linear shape.

In the present embodiment, the connection flow paths 21 to 23 are also formed to bypass the female screw portions 28a to 28d. Specifically, the pair of female screw portions 28c are non-penetrating screw holes that are opened in the upper side surface 20a of the flow path block 20, and are provided on the outer sides of the connection flow paths 21 to 23 in terms of the machine arrangement direction. Moreover, the one of the pair of female screw portions 28c and the side of the connection flow path 22 are disposed so as not to communicate with the internal flushing gas line 25. Similarly, the other of the pair of female screw portions 28c is disposed on the side of the connection flow path 23, and is not provided for communication. The side internal gas line 27 is fed.

The female screw portions 28a, 28b, and 28d are non-through screw holes, and are formed to open in the lower side surface 20b of the flow path block 20. One of the pair of female screw portions 28a and one of the pair of female screw portions 28b are disposed at a position between the inlet port 21a and the outlet port 21b in the connection flow path 21 so as not to communicate with the connecting path 21e. One of the pair of female screw portions 28a and one of the pair of female screw portions 28d are provided in a region between the inlet port 21a and the connection flow path 23 in the connection flow path 21 where the internal flow path is not formed. The other of the pair of female screw portions 28b and the other of the pair of female screw portions 28d are provided in the region where the internal flow paths are not formed at both end portions in the machine arrangement direction.

As described above, in the configuration of the present embodiment, the flow rate controller 16 is detachably attached to the upper surface 20a side of one of the flow path blocks 20. On the other hand, the fluid control valves 17 to 19 are detachably provided on the side opposite to the lower side surface 20b of the upper side surface 20a. Therefore, according to this configuration, the flow controller 16 and the fluid control valves 17 to 19 can be improved in maintainability, and the gas supply unit 10A or the like or the gas supply device 10 can be realized with a width as small as possible and a length in the machine arrangement direction.

Further, referring to Fig. 12 and Fig. 14, in the embodiment, the process gas supplied to the inlet port 21a in the connection flow path 21 flows from the right to the left in the connection flow path 21 and the valve mounting block 40. From the left to the right of the figure, it flows through the flow controller 16 and the valve mounting block 60. Therefore, in the embodiment, the "gas flow direction" is not a unidirectional but a reciprocating (or "loop") in the direction in which the machine is arranged.

<Modification of the schematic configuration of the fluid supply control device>

Referring to Figs. 15 to 18, the configuration of the embodiment is a modification of the above-described embodiment. Specifically, in the present embodiment, the inflow side flange 30 is attached to the end surface 20c of the flow path block 20. Here, the end surface 20c is one surface of the flow path block 20 and is a surface orthogonal to the upper side surface 20a and the lower side surface 20b. The end surface 20c is provided on one end side of the flow path block 20 in the machine arrangement direction.

Further, in the present embodiment, the positional relationship between the fluid control valve 17 and the fluid control valve 18 in the machine arrangement direction is opposite to that of the above embodiment. That is, the fluid control valve 17 is disposed at a position closer to the end surface 20c than the fluid control valve 18. Further, due to the above-described changes, the flow path configuration inside the flow path block 20 has been changed from the above-described embodiment.

The inlet port 21a in the connection flow path 21 is provided to be open at the end face 20c. On the other hand, the outlet weir 21b is provided to be opened at a position closer to the end surface 20c side than the central portion of the lower side surface 20b in the machine arrangement direction (specifically, a position close to one of the ends in the machine arrangement direction). Further, as shown in FIGS. 16 and 18, the connection flow path 21 is formed in a shape bent in a right angle (slightly L-shaped) to connect the inlet port 21a and the outlet port 21b.

The flushing gas supply port 24 is provided to open at a position close to the center in the machine arrangement direction of the lower side surface 20b. The flushing gas supply port 24 is connected to the internal flushing gas line 25 in the same manner as in the first and the above embodiments.

The inlet port 22a in the connection flow path 22 is provided at a position between the outlet port 21b and the flushing gas supply port 24 in the connection flow path 21, and is opened at the lower side surface 20b. On the other hand, the outlet weir 22b is provided to be opened at a position closer to the end face 20c side than the central portion in the machine arrangement direction of the upper side surface 20a. With In terms of the body, the outlet port 22b is disposed at a position slightly aligned with the outlet port 21b in the connection flow path 21. Further, the connection flow path 22 is formed to connect the inlet port 22a and the outlet port 22b in a straight line shape. More specifically, in the present embodiment, the connection flow path 22 is disposed in a front view and is obliquely arranged to be staggered in the thickness direction of the flow path block 20.

Similarly to the above-described embodiment, the connection flow path 23 is provided at a position close to the other end of the flow path block 20 in the machine arrangement direction. In other words, the inlet port 23a in the connection flow path 23 is provided at a position close to the end opposite to the end surface 20c in the machine arrangement direction, and is opened on the side of the upper side surface 20a. On the other hand, the outlet port 23b is disposed on the extension line of the directional line drawn from the outlet port 21b in the connection flow path 21 toward the inlet port 22a and the flushing gas supply port 24 in the connection channel 22, on the lower side The surface 20b is open on the side. Specifically, the outlet port 23b is provided so as to be close to the inlet port 23a in a plan view, and is opened on the lower side surface 20b side in the same manner as the above-described embodiment. Further, the connection flow path 23 is formed to connect the inlet port 23a and the outlet port 23b in a straight line shape.

The process gas supply port 26 is provided at a position between the flushing gas supply port 24 and the outlet port 23b of the connection flow path 23, and is open on the side of the lower side surface 20b. Specifically, the process gas supply port 26 is disposed close to (adjacent to) the outlet port 23b in the connection flow path 23. This process gas supply port 26 is connected to the supply side internal gas line 27 in the same manner as the above embodiment.

The pair of female screw portions 28a are formed so as not to communicate with the connection flow paths 21 and 22, and are non-through holes that are open to the end surface 20c side. The female screw portions 28b and 28d are non-through screw holes, and are formed in the lower side surface 20b in the flow path block 20. Opening.

One of the pair of female screw portions 28b is formed so as not to communicate with the connection flow path 21 in the connection flow path 21 on the side closer to the end surface 20c than the outlet port 21b. One of the pair of female screw portions 28b and one of the pair of female screw portions 28d are provided in the flushing gas supply port 24 and the internal flushing gas line 25, and the process gas supply port 26 and the supply side internal gas line 27. There is no area where the internal flow path is formed.

The pair of female screw portions 28c are non-penetrating screw holes that are opened in the upper side surface 20a of the flow path block 20, and are provided in the inlet port 22b and the connection flow path 23 in the connection flow path 22 in the machine arrangement direction. Outside the 23a. Specifically, one of the pair of female screw portions 28c is formed so as to be closer to the end surface 20c side than the outlet port 22b in the connection flow path 22, and is not communicated with the connection flow path 21. Similarly to the other of the pair of female screw portions 28d, the other of the pair of female screw portions 28c is provided in an end portion of the end portion opposite to the end surface 20c in the machine arrangement direction, in which an internal flow path is not formed.

As described above, in the embodiment, the pair of female screw portions 28c, the outlet port 22b of the connection flow path 22, and the inlet port 23a of the connection flow path 23 are arranged along the machine arrangement direction in the flow path block 20 on the upper side surface 20a side. It is almost linear. Further, on the lower surface 20b side of the flow path block 20, the female screw portions 28b and 28d, the outlet port 21b in the connection flow path 21, the inlet port 22a in the connection flow path 22, the flushing gas supply port 24, and the process gas The supply port 26 and the outlet port 23b of the connection flow path 23 are arranged in a substantially linear shape along the direction in which the machine is arranged.

In other words, in the present embodiment, the connection flow paths 21 to 23 and the female screw portions 28a to 28d are arranged in a substantially linear shape along the machine arrangement direction. and, The connection flow paths 21 to 23 are provided to bypass the female screw portions 28a to 28d.

According to the configuration of the present embodiment, the inflow side flange 30 is provided on the end surface 20c of the flow path block 20, whereby the size of the flow path block 20 in the machine arrangement direction is larger than that of the above-described embodiment. miniaturization.

Further, as shown in FIG. 19, the fluid control valve 17 or the like may be installed in the end surface of the flow path block 20 (the surface different from the upper surface 20a and the lower surface 20b).

When the gas supply device 10 is provided with a plurality of gas supply units 10A, 10B, ..., the present invention is not limited to one flow path block 20 spanning a plurality of gas supply units 10A, 10B... It is a common (integral) composition. That is, the flow path block 20 may be configured to be divided corresponding to each of the plurality of gas supply units 10A, 10B, ....

Further, the number of the fluid control valves 17 and the like included in one gas supply unit 10A or the like is not limited to the above-described embodiment. Further, the fluid control valve 17 or the like may be integrated with the flow path block 20 in advance without using a female screw portion or a bolt.

20 to 22 show the configuration corresponding to the modifications of the above. In the present modification shown in Figs. 20 to 22, the gas supply units 10A, 10B, ... are configured to be separate from each other, and are configured to be connectable to each other in the width direction. In FIG. 20, only two gas supply units 10A and 10B are displayed for simplification of the drawing. However, in the present modification, any number of gas supply units 10A and the like can be connected.

In each of the gas supply units 10A and the like of the present modification, the flow rate controller 16 is detachably attached to the flow path as in the above-described respective embodiments. The upper side surface 20a of the block 20. On the other hand, the fluid control valve 17 or the like is not integrated with the flow path block 20 in advance by the mounting bolts as described above. That is, the fluid control valve actuator 17a or the like directly fixes the flow path block 20. Further, in the present modification, the fluid control valve 17 and the like are provided on the lower side surface 20b side of the flow path block 20 (however, in Fig. 20, the lower side surface 20b side is shown as the upper side in the drawing).

Here, in the plurality of gas supply units 10A, 10B, ... arranged in parallel, the connection between the adjacent units is via the side surface (the surface having the normal to the width direction) in the adjacent flow path block 20. The joint surface 20d is formed. Hereinafter, details of the configuration for connecting the adjacent flow path blocks 20 will be described. Further, a configuration for connecting the above-described connected bodies will be described later.

In the gas supply device 10 of the present modification, two types of flow path blocks 20, that is, a first flow path block 201A and a second flow path block 202A are provided. Among the connected bodies of the plurality of gas supply units 10A, 10B, which are arranged in parallel, the first flow path block 201A and the second flow path block 202A are alternately arranged. That is, for example, the first flow path block 201A is provided in the gas supply unit 10A, and on the other hand, the second flow path block 202A is provided in the gas supply unit 10B.

In the first flow path block 201A and the second flow path block 202A, the flushing gas supply port 24 and the process gas supply port 26 are provided to be open to each other on the pair of connecting faces 20d. The connection screw hole 211H and the connection bolt insertion hole 212H are provided in the first flow path block 201A and the second flow path block 202A. The coupling screw hole 211H is a screw hole that penetrates in the width direction, and is formed to be screwable to the bolt B. The connecting bolt insertion hole 212H has a head capable of accommodating the connecting bolt B. The through hole of the segment portion is formed so that the male screw portion of the connecting bolt B can be inserted.

In the present modification, the pair of coupling screw holes 211H are provided at diagonal positions next to the flushing gas supply port 24. Further, a pair of connecting bolt insertion holes 212H are provided at diagonal positions next to the flushing gas supply port 24. Further, the pair of coupling screw holes 211H and the pair of coupling bolt insertion holes 212H are disposed so as to be slightly rectangular when viewed from the front (that is, when viewed in parallel with the width direction). Similarly, a pair of connecting screw holes 211H and a pair of connecting bolt insertion holes 212H which are slightly rectangular in front view are disposed around the process gas supply port 26.

In the present modification, the positional relationship between the connection screw hole 211H and the connection bolt insertion hole 212H of the second flow path block 202A is different from that of the first flow path block 201A, and has the same configuration as that of the first flow path block 201A. Specifically, in a front view, the first flow path block 201A and the second flow path block 202A are formed in such a manner that the position of the connection screw hole 211H is provided in the first flow path block 201A and the second flow path block 202A The positions at which the connection bolt insertion holes 212H are provided coincide with each other, and the position at which the connection bolt insertion hole 212H is provided in the first flow path block 201A coincides with the position at which the connection screw hole 211H is provided in the second flow path block 202A. Therefore, the detailed configuration of the first flow path block 201A and the second flow path block 202A will be described below with reference to FIGS. 21 and 22 of the perspective view of the first flow path block 201A.

The flushing gas supply port 24 in the connecting surface 20d of the first flow path block 201A (second flow path block 202A) is located inside the connecting screw hole 211H and the connecting bolt insertion hole 212H (flushing gas supply port) 24 side), a flush line seal section 213A is provided. The flushing line seal section 213A is formed to be mountable in the adjacent second flow block 202A (first The flow path block 201A) is a sealing member (not shown) that is hermetically connected to the position of the flushing gas supply port 24 .

Similarly, the process gas supply port 26 in the connection surface 20d of the first flow path block 201A (second flow path block 202A) is located inside the connection screw hole 211H and the connection bolt insertion hole 212H (process gas) The supply port 26 side is provided with a supply line seal section 214A. The supply line seal section 214A is formed with a seal member (not shown) for airtight connection between the adjacent second flow path block 202A (first flow path block 201A) and the process gas supply port 26.

In the first flow path block 201A and the second flow path block 202A, actuator mounting holes 215A, 216A, and 217A which are substantially cylindrical non-through holes that are opened in the lower surface 20b are provided. In the present modification, the actuator mounting holes 215A, 216A, and 217A are arranged in a substantially straight line shape along the machine arrangement direction in this order. That is, the actuator mounting hole 215A is provided at a position close to one of the ends (the left side in FIG. 21) of the first flow path block 201A and the second flow path block 202A in the machine arrangement direction. On the other hand, the actuator mounting hole 217A is provided at a position close to the other end (the right side in FIG. 21) of the first flow path block 201A and the second flow path block 202A in the machine arrangement direction.

The actuator mounting holes 215A, 216A, and 217A form fluid control valve actuators 18a, 17a, and 19a, respectively. Further, the actuator mounting holes 215A, 216A, and 217A are disposed to form the valve chambers of the fluid control valves 18, 17, and 19 after the end portions of the fluid control valve actuators 18a, 17a, and 19a are installed at the end portions in the depth direction.

Hereinafter, the first flow path block 201A and the second flow path block The internal flow path configuration in 202A will be described. In the present embodiment, the inlet port 23a in the connection flow path 23 is provided at a position which is planarly overlapped with the actuator mounting hole 217A (more specifically, a position coaxial with the central axis of the actuator mounting hole 217A). ) to open on the upper side surface 20a. The outlet port 23b in the connection flow path 23 is provided to be opened at a slight central portion in a plan view of the actuator mounting hole 217A. Further, the connection flow path 23 is formed as a substantially cylindrical through hole from the inlet weir 23a toward the outlet weir 23b. That is, the connection flow path 23 is formed such that the gas that has flowed in from the inlet port 23a via the flow rate controller 16 is discharged to the process gas supply port 26 via the actuator mounting hole 217A (fluid control valve 19).

A connection flow path 223 for connecting the inflow side flange 30 and the fluid control valve 17 (actuator mounting hole 216A) is provided in the first flow path block 201A and the second flow path block 202A. The connection flow path 223 has an inlet port 223a, an outlet port 223b, a first inlet passage 223c, a second inlet passage 223d, and a connecting path 223e.

The inlet port 223a is provided to be open to the lower side surface 20b side so as to be detachably provided at an intermediate position of one of the inflow side flanges 30 to the female screw portion 28a. The outlet port 223b is provided to be open at the actuator mounting hole 216A. The first inlet passage 223c is a substantially cylindrical non-through hole and is provided to extend from the inlet 埠 223a toward the upper surface 20a side. The second inlet passage 223d is provided to extend in the width direction from an end portion on the opposite side to the inlet port 223a of the first inlet passage 223c.

The connecting path 223e is a flat portion (in a plan view of an oblong shape) formed of stainless steel, and is not hermetically sealed by welding (for example, laser welding or electron beam welding) or the like from the second inlet. Extension of path 223d The space formed by the groove formed on the side of the joint surface 20d of the object is disposed in parallel with the gas flow direction. One end of the connecting path 223e is connected to the second inlet passage 223d. Further, the other end of the connecting path 223e is connected to the exit port 223b.

Further, a connection flow path 222A for connecting the fluid control valves 17 and 18 (actuator mounting holes 216A and 215A) and the flow rate controller 16 is provided in the first flow path block 201A and the second flow path block 202A. In the present embodiment, the connection flow path 222A has an inlet port 222a, an outlet port 222b, a first inlet passage 222c, a second inlet passage 222d, a connecting path 222e, an outlet passage 222g, and a joining passage 222h.

The inlet weir 222a is disposed to open slightly in the plan view of the actuator mounting hole 216A. The outlet port 222b is provided at a position that is planarly overlapped with the actuator mounting hole 215A so as to be open to the upper side surface 20a (more specifically, a position coaxial with the central axis of the actuator mounting hole 215A) . Further, one of the pair of female screw portions 28c is provided to open on the side of the upper side surface 20a, on the outer side in the machine arrangement direction, which is closer to the outlet port 222b. The other of the pair of female screw portions 28c is provided on the outer side in the machine arrangement direction from the inlet port 23a in the connection flow path 23 so as to open on the side of the upper side surface 20a.

The first inlet passage 222c is a substantially cylindrical non-through hole, and is provided to extend from the inlet 埠 222a toward the upper side surface 20a side. The second inlet passage 222d is provided to extend in the width direction from an end portion on the opposite side to the inlet bore 222a of the first inlet passage 222c.

The connecting path 222e is a flat plate formed of stainless steel (in a plane) The cover portion (not shown) which is viewed in an oblong shape is hermetically sealed by welding (for example, laser welding or electron beam welding), and is formed by the side of the connection surface 20d from which the second inlet passage 222d extends. The space formed by the groove is arranged in parallel with the gas flow direction. One end of the connecting path 222e is connected to the second inlet passage 222d. Further, the other end of the connecting path 222e is connected to the outlet passage 222g.

The outlet passage 222g is along the width direction, and extends from the other end portion of the connecting passage 222e toward the opposite side of the second inlet passage 222d. The outlet passage 222g is connected to the joining passage 222h. The merging passage 222h is a substantially cylindrical through hole, and is provided to connect the slightly central portion and the outlet 埠 222b in a plan view of the actuator mounting hole 215A.

In the present modification, the connection flow path 222A is formed such that process gas flowing into the actuator mounting hole 216A (fluid control valve 17) via the outlet port 223b in the connection flow path 223 is passed from the inlet port 222a to the first inlet path. The 222c, the second inlet passage 222d, the connecting passage 222e, the outlet passage 222g, and the joining passage 222h are discharged from the outlet port 222b, whereby the process gas can be supplied to the flow rate controller 16. Further, the connection flow path 222A is formed such that the flushing gas flowing from the flushing gas supply port 24 can be discharged from the outlet port 222b through the actuator mounting hole 215A (fluid control valve 18) and the joining path 222h to flush the aforesaid flushing The gas is supplied to the flow controller 16.

Further, in the present modification, the flushing gas supply port 24, the actuator mounting hole 215A (fluid control valve 18) provided in one of the pair of coupling faces 20d, and the pair of joint faces 20d are provided. The flushing gas flow path of the other flushing gas supply port 24 is formed to be equivalent to the above-described implementation. The internal flushing gas line in the form. Similarly, the process gas supply port 26, the actuator mounting hole 217A (fluid control valve 19) provided in one of the pair of coupling faces 20d, and the other of the pair of coupling faces 20d are provided. The process gas supply flow path of the process gas supply port 26 is formed to correspond to the supply side internal gas line in the above embodiment.

Further, in the present modification, the female screw portions 28a and 28c, the connection flow path 23, the inlet port 223a and the first inlet passage 223c in the connection flow path 223, and the inlet port 222a and the outlet port 223b in the connection flow path 222A are provided. The one inlet passage 222c and the connecting passage 223e are arranged in a substantially linear shape along the gas flow direction in plan view. Further, the connection flow paths 223 and 222A are provided so as not to connect the female screw portions 28a and 28c.

In the connected body of the plurality of gas supply units 10A, 10B, which are arranged in parallel, the adjacent first flow path block 201A and second flow path block 202A are joined by the joint bolt B and the above-described sealing member (not shown). Thereby, the opposite flushing gas supply ports 24 and the opposing process gas supply ports 26 are respectively airtightly connected. Thereby, an internal flushing gas line is formed through a plurality of flushing gas supply ports 24 and a plurality of actuator mounting holes 215A (fluid control valves 18). Further, similarly, the supply side internal gas line passing through the plurality of process gas supply ports 26 and the plurality of actuator mounting holes 217A (fluid control valves 19) is formed.

In this configuration, the flow rate controller 16 is detachably mounted to the flow path block 20 in which the fluid control valve 17 and the like are integrally provided. Therefore, according to this configuration, it is possible to satisfactorily achieve the miniaturization of the gas supply unit 10A or the like or the gas supply device 10 in the height direction of FIG. Also, easy assembly and flow controller The gas supply unit 10A or the like having a good maintainability of 16 or the gas supply device 10 can be realized with a width as small as possible. Further, by providing a plurality of gas supply units 10A, 10B, ... in parallel, the gas supply device 10 capable of supplying a plurality of types of process gases can be realized with a width as small as possible.

Further, the fluid control valve 17 and the like may be partially installed in advance in the flow path block 20, and the remaining portion may be detachably attached to the flow path block 20.

According to the configuration described in each of the above-described embodiments and modifications, as described above, the gas supply device 10 that can supply a plurality of types of process gases can be miniaturized as much as possible. In particular, according to the configuration described in each of the above-described embodiments and modifications, the fluid control device such as the fluid control valve 17 having the width of the main body portion as small as possible is designed to be small (for example, the installation area to be described later is reduced as much as possible). In the gas supply unit 10A or the like of the configured pneumatic valve, the mounting structure for detachably mounting the fluid control device to the flow path block 20 or the flow between the plurality of fluid control devices can be satisfactorily suppressed. The road configuration results in an increase in the width dimension.

<Configuration of piping joint and piping connection structure>

A piping joint 1 and 1A according to an embodiment of the present invention and a piping connecting structure PJ according to an embodiment of the present invention will be described with reference to Figs. 23 to 30 . The pipe joint 1 and the pipe joint 1A have substantially the same configuration. Therefore, first, the configuration of the pipe joint 1 will be described in detail using FIGS. 23 to 25. In addition, FIG. 31 is a piping joint structure 1C showing a conventional technique as a comparative example.

The pipe joint 1 has a body portion 2. The main body portion 2 is formed to have a substantially cubic shape in the longitudinal direction parallel to the left-right direction in FIGS. 23 to 25 . Shape shape. That is, the pipe joint 1 has six planar surfaces of the joint surface 2a, the top surface 2b, the first end surface 2c, the second end surface 2d, the first side surface 2e, and the second side surface 2f.

The joint surface 2a (specifically, the bottom surface) is a plane that is normal to the height direction orthogonal to both the longitudinal direction and the width direction (the upper and lower directions in FIG. 23). The joint surface 2a is a flat surface that is provided to be joined to the installation joint of the pipe joint 1, and is formed in a substantially rectangular shape. The top surface 2b is disposed in parallel with the joint surface 2a.

The first end face 2c and the second end face 2d are end faces of the body portion 2 whose normal directions are the longitudinal directions, and are disposed in parallel with each other. The first side surface 2e and the second side surface 2f are side surfaces of the main body portion 2 whose normal directions are in the width direction, and are disposed in parallel with each other.

The joint surface 2a is formed with a first opening portion 2g and a seal drop portion 2h. That is, the first opening portion 2g is provided to be open at the joint surface 2a. In the present embodiment, the first opening 2g is provided at a substantially central portion of the joint surface 2a in the width direction. The seal drop portion 2h is formed around the first opening portion 2g so as to accommodate a sealing member (not shown). Here, the sealing member is a fluid passage for forming a fluid passage formed in the installation target and the inside of the pipe joint 1 when the pipe joint 1 is attached (joined and fixed) to the installation target. (Detailed later) a member that is airtight or liquid-tight. Further, the configuration of the sealing member is well known, and therefore, the description of the configuration or a more detailed description will be omitted in the present specification.

The first bolt insertion hole 2k and the second bolt insertion hole 2m are formed in the body portion 2 in the height direction. In the embodiment, the first bolt insertion hole 2k And the second bolt insertion hole 2m is a through hole having no screw portion, and is used for inserting a screw (a bolt: for example, a bolt B shown in FIG. 29) when the pipe joint 1 is attached to the installation target, and is provided The opening is formed on the joint surface 2a and the top surface 2b.

The first bolt insertion hole 2k corresponding to the "flow path side screw insertion hole" of the present invention is provided closer to the first end surface 2c than the first opening portion 2g. In other words, the first bolt insertion hole 2k is provided at a position in the longitudinal direction of the main body portion 2 near the end portion on the side where the second opening portion 2p to be described later is provided. On the other hand, the second bolt insertion hole 2m is disposed at the end portion on the second end face 2d side in the longitudinal direction of the main body portion 2. Specifically, the first bolt insertion hole 2k and the second bolt insertion hole 2m are disposed in a plane that is symmetric with respect to the first opening portion 2g.

The second opening portion 2p is formed in the first end surface 2c. That is, the second opening portion 2p is provided to be open at the end portion on the first end face 2c side in the longitudinal direction of the main body portion 2. In the present embodiment, the second opening portion 2p is provided at a substantially central portion of the main body portion 2 in the width direction (that is, at a position substantially the same as the first opening portion 2g in the width direction). Further, in the present embodiment, the second opening portion 2p is covered by the tube portion 3. The pipe portion 3 is a substantially cylindrical member that is provided to protrude outward from the first end face 2c toward the normal direction of the first end face 2c, and has an outer diameter that is formed to be larger than the width of the body portion 2 (the dimension in the width direction: The same as below) is slightly smaller.

A fluid passage (typically a gas passage) that communicates the first opening 2g and the second opening 2p (tube portion 3) is formed inside the body portion 2. Specifically, the first passage 4 and the second passage 5 are provided inside the body portion 2.

The first passage 4 is provided in the height direction by the first opening portion 2g. In the present embodiment, the first passage 4 is formed as a non-through hole. Second path 5 is disposed along the longitudinal direction to pass through the second opening portion 2p and is connected to the first passage 4. Specifically, in the present embodiment, the second passage 5 is provided along the longitudinal direction to connect the position of the first passage 4 away from the joint surface 2a and the second opening portion 2p from the first opening portion 2g. That is, the second passage 5 is provided to connect the end portion opposite to the first opening portion 2g of the first passage 4 and the second opening portion 2p.

The second passage 5 is provided on the side of the first bolt insertion hole 2k (that is, a position that does not interfere with the second bolt insertion hole 2m). In particular, the second passage 5 is formed to bypass the first bolt insertion hole 2k. Specifically, in the present embodiment, the second passage 5 has the opening side passage 6 and the intermediate passage 7.

The opening side passage 6 is a non-through hole provided along the longitudinal direction from the second opening 2p, and is formed so as not to reach the first bolt insertion hole 2k. The intermediate passage 7 is formed in the longitudinal direction without passing through the first bolt insertion hole 2k and passing through the side thereof. That is, the intermediate passage 7 is provided at a position closer to the first side face 2e of the main body portion 2 than the first bolt insertion hole 2k in the width direction. Specifically, the intermediate passage 7 is a flat portion (a circular shape in plan view) formed of stainless steel, and is hermetically or liquid-tightly sealed by welding (for example, laser welding or electron beam welding). A space formed by a groove formed on one side 2e side is provided in parallel with the longitudinal direction.

The intermediate passage 7 is provided such that one end thereof communicates with the end portion on the top surface 2b side of the first passage 4 via the communication portion 8a of the extremely short fluid passage. Similarly, the intermediate passage 7 is provided such that the other end communicates with the end portion of the opening-side passage 6 on the first bolt insertion hole 2k side via the communication portion 8b of the extremely short fluid passage. Thus, inside the body portion 2, the fluid passage from the second opening portion 2p to the first opening portion 2g bypasses the first bolt insertion hole 2k and along the longitudinal direction Form a slightly L-shaped.

The pipe joint 1A has a first bolt insertion hole 9a instead of the first bolt insertion hole 2k, and has a second bolt insertion hole 9b instead of the second bolt insertion hole 2m, and has a pipe joint 1 (abbreviated) The same composition. Therefore, the description of the above-described pipe joint 1 will be described with respect to the description of the portions other than the first bolt insertion hole 9a and the second bolt insertion hole 9b in the configuration of the pipe joint 1A shown in Figs. 26 to 28 .

The first bolt insertion hole 9a has a screw portion that can be screwed into the screw of the first bolt insertion hole 2k. In the present embodiment, the first bolt insertion hole 9a is formed as a non-through hole that is opened only on the joint surface 2a. Similarly, the second bolt insertion hole 9b has a screw portion that can be screwed into the screw of the second bolt insertion hole 2m. In the present embodiment, the second bolt insertion hole 9b is also formed as a non-through hole that is opened only on the joint surface 2a.

The pipe joints 1 and 1A are configured such that a central axis C1 of the second opening portion 2p along the longitudinal direction (specifically parallel to the longitudinal direction) and a first opening along the height direction (specifically, parallel to the height direction) The central axis C2 of the portion 2g is staggered (specifically, orthogonal) at a slight central portion in the width direction of the body portion 2.

The pipe connection structure PJ shown in Fig. 29 has a pipe joint 1 and a pipe joint 1A. The pipe portion 3 in the pipe joint 1 is hermetically or liquid-tightly connected to the pipe-shaped pipe P11 formed of stainless steel by welding (for example, TIG welding). Similarly, the pipe portion 3 in the pipe joint 1A is hermetically or liquid-tightly connected to the pipe-shaped pipe P12 formed of stainless steel by welding (for example, TIG welding) or the like. First opening of the pipe joint 1 and the pipe joint 1A The portions 2g are joined to each other on the joint surface 2a. Further, the pipe connection structure PJ is inserted into the first bolt insertion hole 2k and screwed to the first by joining the joint faces 2a of the pipe joint 1 and the joint face 2a of the pipe joint 1A as described above. The bolt is inserted into the through hole 9a, and the other bolt B is inserted into the second bolt insertion hole 2m and screwed to the second bolt insertion hole 9b.

The piping connection structure PJ shown in FIG. 30 has four piping connection structures PJ as shown in FIG. 29, and connects the piping P11 and the piping P12, the connection piping P21 and the piping P22, the connection piping P31 and the piping P32, and the connection piping P41 and Piping P42.

<Action, effect>

In the configuration of the above-described embodiment, the first passage 4 and the second opening 2p (tube) are disposed between the first bolt insertion hole 2k (9a) and the second bolt insertion hole 2m (9b) in the height direction. The fluid passage between the portions 3) bypasses the first bolt insertion hole 2k (9a) and is formed along the longitudinal direction. In the pipe joint 1 having the above-described configuration, the screw (bolt B or the like) is inserted into the first bolt insertion hole 2k and the second bolt insertion hole 2m in the height direction, thereby fixing (installing) the object to be mounted.

Here, the first passage 4 and the second passage 5 are made as close as possible in the width direction, and the first bolt insertion hole 2k (9a) and the second passage 5 are as close as possible to each other in the width direction. Therefore, the size of the main body portion 2 in the width direction can be as small as possible. Therefore, according to this configuration, the device configuration can be favorably reduced in size or integrated in the width direction.

Further, in the pipe joints 1 and 1A, the central axis C1 along the second opening portion 2p in the longitudinal direction and the first opening portion 2g along the height direction The central axis C2 is staggered at a slight central portion in the width direction of the body portion 2 (specifically, is orthogonal on the same side). In this configuration, the central axis C1 of the pipe joint 1 and the central axis C1 of the pipe joint 1A are slightly coincident in the width direction. Therefore, according to this configuration, the piping design becomes easy. Specifically, the two pipes P11 and P12 can be arranged on the straight line in the width direction and connected. Moreover, when the pipe joint 1 is attached to any of the installation targets by using a screw, the pipe portion 3 and the pipe connected thereto can be satisfactorily prevented from interfering with the screw or the bolting tool described above.

In particular, in the pipe connection structure PJ formed by connecting (connecting) the pipe joint 1 and the pipe joint 1A, as shown in FIGS. 29 and 30, the height from the top surface 2b side of the pipe joint 1 can be increased along the height The operation bolt B such as a hexagonal screwdriver such as a rod is inserted in the direction to perform the work of tying (coupling) or separating the pipe joint 1 and the pipe joint 1A. Therefore, according to the above configuration, even if the widths of the pipe joint 1 and the pipe joint 1A are made as small as possible, good maintainability (workability of the above work) can be ensured.

Moreover, as shown in FIG. 30, when a plurality of pipes P11, P21, ... arranged in parallel and a plurality of pipes P12, P22, ... arranged in parallel are connected to each other, a pipe connection structure for forming the connection is formed. Compared with the pipe joint structure 1C (see FIG. 31) of the prior art, PJ can be well integrated in the width direction.

In other words, "d" shown in FIG. 30 indicates the interval between adjacent pipes required to operate the bolt B from the top surface 2b side of the pipe joint 1 in the height direction as described above. Here, in FIG. 30, the four pipes P11 to P41 arranged in parallel and the four pipes P12 to P42 arranged in parallel are connected, and therefore The distance between the centers of P11 and P41 (the distance between the centers of P12 and P42) D is 3d.

In the piping joint structure 1C (see FIG. 31) of the prior art, the maintenance work for bolting or separating is performed by inserting a wrench in a direction orthogonal to the pipe P11 and the like, and rotating in the axial direction of the pipe P11 or the like. get on. Therefore, when the piping joint structure 1C of the prior art is used, in the case where the pipes P11 to P41 and the pipes P12 to P42 are connected in the same manner as in Fig. 30, as shown in Fig. 31, the interval d1 between the adjacent pipes is much larger than that of the drawing. The interval d between the 30 is large, and the distance between the centers of P11 and P41 (the distance between the centers of P12 and P42) D1 is also much larger than the distance D between the centers of FIG.

Next, a specific example of the case where the above-described pipe joint 1 (see FIGS. 23 to 25) is used as the gas supply device 10 of the "fluid supply control device" of the present invention will be described with reference to FIGS. 32 to 34.

A pair of female screw portions 28a1, 28a2 are provided at positions corresponding to the pipe joint 1. Specifically, the one pair of the female screw portions 28a1 and 28a2 of the pipe joint 1 are arranged in the machine arrangement direction on both sides of the inlet cymbal 21a in the splicing flow path 21. In other words, the female screw portion 28a1 (the upstream side in the gas flow direction) is provided at the most upstream side in the gas flow direction of the flow path block 20. A pair of female screw portions 28b are provided at positions corresponding to the fluid control valves 17 and 18. A pair of female screw portions 28c are provided at positions corresponding to the flow controller 16. A pair of female screw portions 28d are provided at positions corresponding to the fluid control valve 19.

In the present embodiment, the pair of female screw portions 28a1 and 28a2, the pair of female screw portions 28b, the pair of female screw portions 28c, and the pair of female screw portions 28d are arranged in this order along the gas flow direction (machine arrangement direction). The list is on a straight line. Specifically, the female screw portions 28b and 28c and the female screw portion 28d It is placed on the center line C (see the 1-point chain line of Fig. 32) which is in a plan view and which is located at the center of the line parallel to the gas flow direction. Further, the pair of female screw portions 28a1, 28a2 are arranged in plan view, and the circle constituting the inner diameter overlaps with the center line C.

Further, in the present embodiment, the female screw portion 28a1 is provided such that its center is shifted from the center line C by one of the device width directions (opposite to the gas supply units 10B to 10D). Similarly, the female screw portion 28a2 is disposed such that its center is further away from the center line C than the above-described center line C on the other side (the gas supply units 10B to 10D side).

The pipe joints 1 are provided one by one to the gas supply units 10A, 10B, 10C, and 10D, respectively. The piping joint 1 of the gas supply unit 10A is configured to be connected to the inlet port 21a of the connection flow path 21 (corresponding to the "inlet" of the present invention). In other words, the pipe joint 1 is hermetically joined to the upper side surface 20a of the flow path block 20 at a position opposed to the inlet port 21a, thereby connecting the process gas inflow line 11A and the inlet port 21a (gas supply units 10B, 10C, and 10D). The pipe joint 1 also has the same configuration).

The pipe joint 1 is such that the longitudinal direction of the main body portion 2 can be in the direction along the machine arrangement direction (specifically, parallel), and the width direction of the main body portion 2 can be in the direction along the width direction of the device (specifically The height direction of the main body portion 2 may be in the direction along the thickness direction of the flow path block 20 (specifically, parallel), and is installed in the flow path block 20. Further, in the main body portion 2, the first bolt insertion hole 2k and the second bolt insertion hole 2m are formed in a state in which the pipe joint 1 is installed in the flow path block 20, and the bolt B is planarly viewed from the above The center line C is staggered. Engagement in the body portion 2 The face 2a is joined to the upper side surface 20a of the flow path block 20.

The pipe joint 1 is installed in the flow path block 20 so that the first end face 2c can be positioned on the upstream side in the gas flow direction. A pipe portion 3 for connecting to the process gas inflow line 11 is provided, and the pipe portion 3 can protrude from the first end face 2c in a slightly horizontal direction.

The first side surface 2e is provided on the side of the female screw portion 28a2 in a state where the pipe joint 1 is attached to the flow path block 20. The second side surface 2f is provided on the side of the female screw portion 28a1 in a state where the pipe joint 1 is attached to the flow path block 20.

In the pipe joint 1, the pair of bolts B are inserted into the first bolt insertion hole 2k and the second bolt insertion hole 2m, and are screwed to the pair of female screw portions 28a1 and 28a2, thereby being detachably mounted on the flow. Road block 20. Here, in the present embodiment, the main body portion 2 is formed to have a width slightly larger than the outer diameters of the pipe portion 3 and the bolt B, and the width of the flow rate controller 16 and the fluid control valves 17 to 19 (fluid control valve actuator) The width of 17a~19a is slightly the same.

The first bolt insertion hole 2k is disposed on the tube portion 3 side in plan view so as to correspond to the female screw portion 28a1. On the other hand, the second bolt insertion hole 2m is disposed at the end on the second end face 2d side in the longitudinal direction described above to correspond to the female screw portion 28a2. The first opening 2g is disposed at a position facing the inlet port 21a of the connection flow path 21 corresponding to the inlet of the process gas in a state where the pipe joint 1 is installed in the flow path block 20.

The seal drop portion 2h is formed to accommodate the gas seal member. In the state in which the pipe joint 1 is installed in the flow path block 20, the gas seal member is hermetically connected to the connection flow path 21 at the joint between the upper surface 20a of the flow path block 20 and the joint surface 2a of the body portion 2. The inlet port 21a and the first opening portion 2g. The second opening 2p is provided to open at the upstream end of the main body portion 2 in the gas flow direction in a state where the pipe joint 1 is installed in the flow path block 20.

One of the pair of female screw portions 28b corresponding to one of the fluid control valves 17 and 18 is disposed at a position between the outlet port 21b and the female screw portion 28a2 in the connection flow path 21. The other of the pair of female screw portions 28b is provided between the flushing gas supply port 24 and the outlet port 22b of the connecting flow path 22 (more strictly, the other of the pair of female screw portions 28b is provided in the flushing gas The supply port 24 and the pair of female screw portions 28c are described later between the flushing gas supply port 24. However, in the present specification, the positions of the pair of female screw portions 28c have not been determined. Therefore, the pair of female screw portions Please refer to the description below for the position of 28c.).

One of the pair of female screw portions 28c corresponding to the flow controller 16 is provided at a position between the pair of female screw portions 28b located downstream of the gas flow direction and the outlet port 22b of the connection flow path 22. The other of the pair of female screw portions 28c is provided at a position between the inlet port 23a of the connection flow path 23 and the outlet port 23b (more strictly, the other of the pair of female screw portions 28c is provided at the inlet port 23a, One of the pair of female screw portions 28d will be described later. However, in the present specification, the positions of the pair of female screw portions 28d have not yet been determined. Therefore, the position of the pair of female screw portions 28d will be described later. .).

Further, in the MFC mounting portion 50, a through hole (not shown) through which the mounting bolt 51 is inserted is formed at a position corresponding to the female screw portion 28c. Further, the flow controller 16 is airtightly attached to the upper side surface 20a side of the flow path block 20 by screwing the mounting bolt 51 to the pair of female screw portions 28c. which is, The pair of female screw portions 28c are provided to be detachably attached to the flow path block 20 by the flow rate controller 16 (the MFC mounting portion 50). Further, the configuration in which the flow rate controller 16 (the MFC mounting portion 50) is hermetically joined to the upper side surface 20a side of the flow path block 20 is well known, and therefore, in the present specification, the illustration of the configuration or more detailed The explanation is omitted.

As described above, in the present embodiment, the female screw portions 28a1 and 28a2 and the connection flow path 21 (including the inlet port 21a, the inlet passage 21c, the connection path 21e, the outlet passage 21d, and the outlet port 21b), the female screw portion 28b, and the connection flow are provided. The path 22 (same as above), the flushing gas supply port 24, the female screw portion 28c, the connecting flow path 23 (same as above), the process gas supply port 26, and the female screw portion 28d are arranged substantially in a straight line shape along the machine arrangement direction. Further, the female screw portions 28a1, 28a2, 28b, 28c, and 28d are formed as non-through holes that are opened in the upper surface 20a. That is, the connection flow paths 21, 22, and 23 are formed around the female screw portions 28a1 to 28d in the depth direction of the female screw portions 28a1 to 28d. Specifically, the female screw portions 28a1 to 28d are formed so as not to communicate with the connection flow paths 21 to 23.

<Action, effect>

In the configuration of the present embodiment described above, the pipe joint 1 is detachably attached to the flow path block 20 by the pair of female screw portions 28a1 and 28a2. Similarly, the fluid control valves 17 and 18 are detachably attached to the flow path block 20 by a pair of female screw portions 28b. Further, the flow controller 16 is detachably attached to the flow path block 20 by a pair of female screw portions 28c. Further, the fluid control valve 19 is detachably attached to the flow path block 20 by a pair of female screw portions 28d.

Therefore, the pipe joint 1 and the fluid control valves 17 and 18 are borrowed. It is connected by the connection flow path 21. Similarly, the fluid control valves 17 and 18 and the flow controller 16 are connected by the connection flow path 22. Further, the flow controller 16 and the fluid control valve 19 are connected by a connection flow path 23. Further, the connection flow paths 21 to 23 are disposed on substantially the same straight line as the female screw portions 28a to 28d, and are formed to bypass the depth direction.

Therefore, according to the above configuration, even if the widths of the pipe joint 1, the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are set to a minimum (specifically, with the flow controller 16 and the fluid control valve actuator The widths of 17a to 19a are slightly the same), and the flow controller 16 and the fluid control valves 17 to 19 can be freely attached and detached to the flow path block 20. In other words, the members can be freely attached and detached to the flow path block 20 without using every four mounting bolts to be slightly rectangular in plan view. Therefore, according to this configuration, the width of each gas supply unit 10A or the like and the width of the entire gas supply device 10 can be reduced as much as possible, whereby the gas supply device 10 can maintain good maintainability and be further downsized.

In particular, attention is paid to the configuration of the pipe portion 20 to the flow path block 20, and the pipe joint 1 is formed in a body portion 2 having a shape in the longitudinal direction and a second opening portion 2p side in the longitudinal direction. The end portion on the opposite side is provided with a first bolt insertion hole 2k. Further, the first bolt insertion hole 2k and the second bolt insertion hole 2m are disposed at positions slightly symmetrical with respect to the first opening portion 2g and the first passage 4 that open toward the flow path block 20. The first bolt insertion hole 2k and the second bolt insertion hole 2m and the bolt B are used, and the pipe joint 1 is attached to the flow path block 20.

Here, in the interior of the body portion 2, the first passage 4 is from the first opening The portion 2g is disposed along the height direction. Further, the second passage 5 is provided to bypass the first bolt insertion hole 2k in the longitudinal direction from a position away from the first opening portion 2g in the first passage 4.

In other words, in this configuration, a gas passage having a slightly L-shaped cross section is formed between the first opening 2g and the second opening 2p inside the main body 2. Further, the first passage 4 and the second passage 5 are made as close as possible in the width direction, and the second bolt insertion hole 2m and the second passage 5 are as close as possible to each other in the width direction. The size of the portion 2 in the width direction can be as small as possible.

Moreover, in this configuration, the piping portion is configured to be as small as possible in the flow path block 20. That is, the pipe joint 1 is configured by the flow controller 16 and the fluid control valves 17 to 19 and the above-described flow path block 20 (the female screw portion 28b and the like, the mounting bolt 41, etc.) The gas flow direction is arranged in a substantially linear female screw portion 28a1, 28a2 and a pair of bolts B, and is attached to the flow path block 20.

At this time, the gas passage (the gas passage and the pipe portion 3 inside the main body portion 2) for connecting to the process gas inflow line 11 from the pipe joint 1 is disposed so as to be slightly horizontal from the body portion 2 toward the gas flow direction. The upstream side extends. Therefore, as shown in FIGS. 32 and 33, the portion in the vicinity of the pipe joint 1 of the process gas inflow line 11 is not curved in the device width direction or the height direction.

Moreover, when the pipe joint 1 is attached or detached to the flow path block 20, the first bolt insertion hole 2k and the second bolt insertion hole 2m do not interfere with the position of the vicinity of the pipe joint 1 in the process gas inflow line 11. Therefore, in the first snail The plug insertion hole 2k and the second bolt insertion hole 2m are provided on the upper side, and the piping design eliminates the need to make (ensure) a relatively large space for the bolting operation of the bolt B. In other words, it is not necessary to particularly bypass the piping portion to secure the space for loading and unloading the piping joint 1. Therefore, the piping portion can be shortened as much as possible.

Further, in the configuration of the present embodiment, the pipe joint 1, the flow rate controller 16, and the fluid control valves 17 to 19 are concentrated on the upper surface 20a side of the flow path block 20. Therefore, according to this configuration, the pipe joint 1, the flow rate controller 16, and the fluid control valves 17 to 19 are collectively mounted on the upper surface 20a side (according to this configuration, all the pipe joints 1, the flow controller 16, and the fluid control valve) 17 to 19, when the maintenance (the bolting of the bolt B and the mounting bolt 41, or the loosening operation, etc.) can be performed from the side of the upper surface 20a, the gas supply unit 10A or the like or the gas supply device 10 can be non-destructive. For good maintainability, achieve with as small a width as possible.

The configuration shown in Figs. 29 and 30 can be favorably applied to, for example, piping of the piping portion before the flow path block 20 in the process gas inflow line 11 (process gas inflow lines 11A, 11B, 11C, and 11D) shown in Fig. 32. Connection structure.

The fluid control valves 17 to 19 are also detachably attached to the side of the lower side surface 20b. Fig. 35 corresponds to the aforementioned modification. In the present modification, the pipe joint 1 has the same configuration as that of the above-described embodiment, and the pipe portion 3 is attached to the lower end side (the lower surface 20b side) so as to be attached to the end surface 201B of the flow path block 20. Here, the end surface 201B is one surface of the flow path block 20 and is a surface orthogonal to the upper side surface 20a and the lower side surface 20b. The end surface 201B is provided on one end side of the flow path block 20 in the machine arrangement direction.

Further, in the present modification, the fluid control valves 17, 18, and 19 are arranged in the machine arrangement direction in this order from the end surface 201B side. Due to such changes, the flow path configuration inside the flow path block 20 has been changed from the above embodiment. In addition to the above, the flow rate controller 16, the fluid control valves 17 to 19, and the pipe joint 1 are attached to the flow path block 20 in the same manner as the above-described embodiment. That is, the configurations of the valve mounting block 40, the MFC mounting portion 50, and the valve mounting block 60 are substantially the same as those of the above-described embodiment.

The inlet port 21a in the connection flow path 21 is provided to be opened at a slightly central portion in the thickness direction of the end surface 201B. On the other hand, the outlet weir 21b is provided to be opened at a position closer to the end surface 201B side than the central portion in the machine arrangement direction of the lower side surface 20b. Further, the connection flow path 21 is a shape (slightly L-shaped) in which the connection inlet port 21a and the outlet port 21b are formed to be bent at right angles.

The pair of female screw portions 28a1 and 28a2 are formed so as not to communicate with the connection flow paths 21 and 22, and are non-through holes that are open to the end surface 201B side. Specifically, the female screw portion 28a1 is provided above the inlet port 21a of the connection flow path 21 (on the side of the upper surface 20a). On the other hand, the female screw portion 28a2 is provided below the inlet port 21a in the connection flow path 21 (on the side of the lower side surface 20b). Further, the female screw portion 28a1, the inlet port 21a of the connection flow path 21, and the female screw portion 28a2 are arranged in this order from the top to the bottom.

The female screw portions 28b and 28d are non-through screw holes, and are formed to open on the lower side surface 20b of the flow path block 20. One of the pair of female screw portions 28b is formed so as not to communicate with the connection flow path 21 in the connection flow path 21 on the side closer to the end surface 201B than the outlet port 21b. One of the pair of female screw portions 28b and one of the pair of female screw portions 28d are provided in the flushing gas supply port 24 and A region between the flushing gas line 25, the process gas supply port 26, and the supply side internal gas line 27 where the internal flow path is not formed.

As described above, in the present modification, on the upper surface 20a side of the flow path block 20, the pair of female screw portions 28c, the outlet port 22b of the connection flow path 22, and the inlet port 23a of the connection flow path 23 are arranged slightly along the machine arrangement direction. Straight. Further, on the lower surface 20b side of the flow path block 20, the female screw portions 28b and 28d, the outlet port 21b of the connection flow path 21, the inlet port 22a of the connection flow path 22, the flushing gas supply port 24, and the process gas supply port 26 are provided. It is arranged in a straight line along the direction in which the machine is arranged.

Moreover, in the configuration of the present modification, the pipe portion 3 in the pipe joint 1 is provided to protrude toward the lower side (the lower surface 20b side). Therefore, the portion of the process gas flowing into the vicinity of the pipe joint 1 in the line 11 is not bent in the width direction of the device. Thereby, the piping portion can be made as short as possible.

Further, according to the configuration of the present modification, the pipe joint 1 is provided on the end surface 201B of the flow path block 20, and the size of the flow path block 20 in the machine arrangement direction is reduced. Thereby, the flow path block 20 can be made lighter.

Further, a flow state of the process gas in the present modification will be described with reference to Fig. 35. First, the process gas convection path block 20 is supplied to the inlet port 21a provided in the connection flow path 21 provided at the end surface 201B. The process gas moves in the connection flow path 21 and moves downward in the right direction in the drawing. Then, the process gas flows from the outlet port 21b in the connection flow path 21 through the fluid control valve 17 to the inlet port 22a of the connection flow path 22, and flows through the valve mounting block 40. The flow of the process gas up to this point is from the left to the right in the direction of the machine.

On the other hand, the outlet port 22b in the connection flow path 22 is provided in the machine. The column direction is more in the left side of the figure than the inlet port 22a. Therefore, the flow of the process gas in the connection flow path 22 is from the right to the left in the direction in which the machine is arranged. Then, the process gas flows in the flow controller 16 (including the MFC mounting portion 50) from left to right in the drawing in the direction in which the machine is arranged.

Further, the process gas supplied to the inlet port 23a of the connection flow path 23 via the flow rate controller 16 (including the MFC mounting portion 50) flows downward in the connection flow path 23 and reaches the valve mounting block 60. In the valve mounting block 60, the process gas is also passed between the fluid control valve 19 and the process gas supply port 26, and the machine arrangement direction is from right to left in the drawing. As described above, in the present modification, the "gas flow direction" is not only a direction in the direction in which the machine is arranged, but also a reciprocal (or "loop") in the direction in which the machine is arranged.

The present invention is not limited to the piping configuration of the above-described embodiment or modification. Therefore, the configuration of the pipe joint 1 can be appropriately changed depending on the piping configuration of the entire apparatus.

For example, as shown in FIGS. 36 to 38, the first passage 4 may be formed as a through hole from the joint surface 2a to the top surface 2b. In this case, the top surface 2b may be provided with the tube portion 3. Further, as shown in FIGS. 39 to 41, the tube portion 3 and the second opening portion 2p may be provided on the second end face 2d side. In this case, the second passage 5 is formed in a plan view, and a pair is formed next to the first opening portion 2g (first passage 4). Typically, in this case, the pair of second passages 5 may be disposed slightly symmetrical next to the first opening portion 2g (first passage 4).

The tube portion 3 can be omitted as appropriate.

The first bolt insertion hole 2k and the second bolt insertion hole 2m are viewed in plan view, and may not be disposed at positions symmetrical with respect to the first opening portion 2g. which is, The position of the first bolt insertion hole 2k and the second bolt insertion hole 2m can be appropriately changed within a range in which the sealing of the first opening 2g can be ensured.

The present invention is not limited to the application to the supply of the fluid to the flow path block 20. That is, the present invention is also applicable to the outflow (outflow side joint) of the fluid from the flow path block 20.

Conventionally, in a pneumatic valve in which two or more pistons are slid by operating the pressure of air, the valve body is brought into contact with the valve seat or away from the valve seat, so that the valve body is brought into contact with the valve seat. Compression spring for potential energy. In the semiconductor manufacturing process, since a dangerous gas is handled, even if the gas leaks slightly from the pneumatic valve for semiconductor manufacturing, it must be prevented. Therefore, high sealing performance is required when the pneumatic valve is closed. For example, in the patent document 1 (Japanese Laid-Open Patent Publication No. Hei 04-248085), there is a pneumatic valve 100 as shown in FIG.

However, the pneumatic valve 100V has the following problems.

That is, the pneumatic valve 100V has pistons 101AV, 101BV, and 101CV. Each of the pistons is provided with eight coil springs 102AV to 102AV, 102BV to 102BV, and 102CV to 102CV in a circumferential direction. Among the eight coil springs, for example, if any one coil spring is deteriorated, the balance of the valve body may collapse, and the sealing force required when the pneumatic valve 100V is closed may be deteriorated.

In the pneumatic valve 200V described in the patent document 2 (JP-A-2008-144819), as shown in Fig. 54, in the first piston 201V and the second piston 202V, the first piston 201V is closed. When the valve is sealed, the two coil springs 203V and 204V have two on the same plane.

However, the pneumatic valve 200V described in Patent Document 2 has the following problems.

(1) In order to obtain the sealing force required for the valve closing, the valve of the two coil springs 203V and 204V is mounted on the same plane in the first piston 201V as in the case of the pneumatic valve 200V, and the valve may become large. In recent years, in a semiconductor manufacturing apparatus, as the manufacturing process of a semiconductor wafer is complicated, it is necessary to switch a plurality of gases. As a result, the number of valves that should be set is increased. Therefore, if a plurality of pneumatic valves are provided, there is a problem in that the entire installation area is increased. Therefore, the requirement to miniaturize each valve is also increased.

(2) In addition, if the valve is miniaturized, the installation area will be limited, and the degree of freedom of the spring wire diameter or the spring diameter will disappear. The reason is that when the installation area is limited, the wire diameter of the spring has to be thin, and only the diameter of the spring can be used. Therefore, the stress applied to one spring is increased, which causes a problem with the durability of the spring. In particular, in the semiconductor manufacturing process, since a dangerous gas is handled, the sealing force required for the valve closing of the fluid control valve for semiconductor manufacturing, the performance of the valve, durability, and the like are major problems.

The present invention has been made to solve the above problems, and an object thereof is to provide a fluid control valve which can reduce the size of a valve, realize a reduction in the entire installation area, and improve the design freedom of the compression spring, and can secure the sealing force required for the valve closing. .

<Composition of fluid control valve>

As shown in Fig. 42, the fluid control valve 1V (the above-described fluid control valves 17 to 19) has a valve portion YV for controlling the fluid and an actuator portion XV for giving a driving force to the valve portion YV. The fluid control valve 1V is an actuator that is transmitted through the adapter 15V. The part XV is connected to the body 14V. The fluid control valve 1V has the same diameter as the pencil and constitutes a cylindrical appearance.

As shown in Fig. 44, the valve portion YV has a body 14V and a bracket 16V. Below the main body 14V, an inlet flow path 14bV for controlling the flow of the fluid and an outlet flow path 14cV for controlling the flow of the fluid are formed. On the upper surface of the body 14V, the mounting hole 14dV is formed in a cylindrical shape. A valve seat 14aV is formed at a central portion of the body 14V, and the inlet flow path 14bV communicates with the outlet flow path 14cV via a valve hole in the valve seat 14aV.

At the upper portion of the body 14V, the bracket 16V is fixed by welding in the welded portion 29V. Thereby, the body 14V is integrated with the holder 16V and sealed. At the upper portion of the bracket 16V, as shown in Fig. 42, the adapter 15V is mounted. A male screw portion 16aV is provided on the outer circumferential surface of the bracket 16V, and a female screw portion 15aV is provided on the inner circumferential surface of the adapter 15V. The cylindrical shank 24V is slidably held on the inner circumferential surface of the bracket 16V. An opening is formed on the upper surface of the bracket 16V, and a compression spring 19V is housed. Further, the upper end surface of the bellows 17V is attached to the lower surface of the bracket 16V. The lower end surface of the bellows 17V is attached to the valve body holding portion 24aV formed under the shank 24V. The valve body 18V composed of an elastic body is attached to the valve body holding portion 24aV. That is, the bellows 17V is disposed between the valve body 18V and the bracket 16V.

The valve body 18V abuts against or leaves the valve seat 14aV. When the valve body 18V abuts against the valve seat 14aV, the inlet flow path 14bV and the outlet flow path 14cV are blocked. When the valve body 18V is separated from the valve seat 14aV, the inlet flow path 14bV and the outlet flow path 14cV communicate. The shank 24V is attached with a spring mounting plate 28V, and the upper end surface of the compression spring 19V abuts against the lower side of the spring mounting plate 28V. Lower end of compression spring 19V The surface abuts against the opening of the bracket 16V. The compression spring 19V imparts a potential energy in a direction to cause the valve body 18V to move away from the valve seat 14aV. As shown in Fig. 43, an O-ring 27V for preventing air leakage is attached between the outer peripheral portion of the shank 24V and the inner peripheral surface of the inner component 23AV.

As shown in FIG. 43, the actuator portion XV has the first piston 11AV and the second piston 11BV arranged in-line on the coaxial line. The so-called coaxial means that the axis is the same. In the first piston 11AV, one first compression spring 12AV that gives potential energy in a direction in which the valve body 18V abuts against the valve seat 14aV is mounted on the coaxial line, and the second piston 11BV abuts against the valve body at the valve body 18V. One second compression spring 12BV that imparts potential energy in the direction of 14 aV is mounted on the coaxial line. Since they are mounted on the coaxial line in series, the width of the valve can be reduced and the size can be reduced. Further, the first piston 11AV and the second piston 11BV, the first compression spring 12AV and the second compression spring 12BV, and the inner component 23AV and the inner component 23BV have the same shape. Therefore, the parts can be made common and the manufacturing cost can be reduced. Moreover, the efficiency of the work is improved during assembly.

Further, the actuator portion XV includes an interior component 23AV, an interior component 23BV, an exterior member 22V, and a lid body 20V.

In addition, in each component of the same shape, description of one component is abbreviate|omitted and description of other components is abbreviate|omitted. Further, since the explanation is cumbersome, "A" and "B" of the parts having the same shape are omitted as appropriate.

As shown in Fig. 43, the actuator portion XV is loaded with two interior parts 23AV and 23BV in the tubular outer casing member 22V. The side surface of the inner part 23V is formed in a cylindrical shape. A cylinder 23aV is formed inside the interior part 23V. The outer diameter of the built-in part 23V is the inner diameter of the outer member 22V The size is roughly the same. An opening portion having a smaller inner diameter than the outer member 22V is formed inside the lower portion of the inner component 23V. A cover 20V is attached to the front end of the exterior member 22V, and an adapter 15V is attached to the other end. Thereby, between the adapter 15V and the lid body 20V, the inner parts 23AV and 23BV are inserted and held. The interior parts 23AV and 23BV are fixed in an overlapping state inside the exterior member 22V, and the first piston chamber 13AV and the second piston chamber 13BV that house the first piston 11AV and the second piston 11BV, respectively, are formed.

The piston 11V is slidably loaded in the piston chamber 13V, and the piston chamber 13V region is drawn as a pressurizing chamber 13aV and a back pressure chamber 13bV. In the back pressure chamber 13bV, the compression spring 12V is disposed coaxially with the piston 11V in a state where the potential energy is applied in a direction in which the piston 11V approaches the valve seat 14aV.

As shown in FIGS. 45 and 46, the piston 11V is formed by integrally forming the piston rod 11bV to the piston portion 11aV. The piston portion 11aV has a cylindrical shape, and the outer diameter is slightly smaller than the inner diameter of the inner component 23V. The mounting groove 11cV of the O-ring 25V, which is formed of an elastic body such as rubber, is provided in a ring shape along the outer peripheral surface of the piston portion 11aV. A recess 11eV is formed below the piston 11V. Further, an internal flow path 11dV is formed inside the piston 11V. A flow path 11fV for communicating with the pressurizing chamber 13aV is formed below the internal flow path 11dV. The flow path 11fV is in communication with the internal flow path 11dV. In other words, the supply/exhaust port 20aV formed on the inner circumferential surface of the lid body 20V communicates with the pressurizing chamber 13aV of the piston 11V via the internal flow path 11dV of the piston 11V and the flow path 11fV.

In the fluid control valve 1V, among the two pistons 11V, the shank 24V is disposed in the recess 11eV of the first piston 11AV located at the lower end. On the other hand, the first piston is disposed in the recess 11eV of the second piston 11BV located at the upper end. The upper end of the 11AV piston rod 11bV. Further, in the piston 11V having two pistons, an O-ring 26AV for preventing leakage of air is disposed on the outer circumferential surface of the piston rod 11bV of the first piston 11AV located at the lower end and the inner peripheral portion of the inner component 23BV. On the other hand, an O-ring 26BV is disposed between the outer peripheral surface of the piston rod 11bV of the second piston 11BV located at the upper end and the inner peripheral portion of the lower portion of the lid body 20V.

The lower end faces of the compression springs 12AV and 12BV that provide the potential energy in the direction in which the valve body 18V abuts against the valve seat 14aV abut against the upper surface of the piston portion 11aV of the first piston 11AV and the second piston 11BV. The upper end surface of the first compression spring 12AV abuts against the lower surface of the inner component 23BV, and the upper end surface of the second compression spring 12BV abuts against the lower surface of the lid body 20V.

Here, the sum of the potential energy (F1) generated by the first compression spring 12AV and the potential energy (F2) generated by the second compression spring 12BV (F1+F2) is a force for abutting the valve body 18V against the valve seat 14aV (F=F1) +F2), which is the sealing force used to close the fluid control valve 1V. Further, the resistance of the compression spring 19V is a force smaller than the force (F) at which the valve body 18V abuts against the valve seat 14aV. Therefore, the resistance of the compression spring 19V is omitted in the description. In the fluid control valves 2V and 3V of the other embodiments to be described later, the description of the resistance of the compression spring 19V is similarly omitted.

Further, since the first compression spring 12AV and the second compression spring 12BV have the same shape, they have the same potential energy (F1 = F2). That is, the potential energy required for one spring is F/2=F1=F2 when the two pistons overlap. Thereby, the potential energy of each spring can be reduced. That is, the stress applied to one spring can be reduced, and the durability of the spring can be improved. Also, the design of the spring can be improved Degree of freedom.

Further, in the fluid control valve 2V of the other embodiment to be described later, the six first compression springs 12AV to the sixth compression springs 12FV have the total potential energy of each compression spring 12V (F1+F2+F3+F4+F5+). F6) is a force for abutting the valve body 18V against the valve seat 14aV (F=F1+F2+F3+F4+F5+F6). Moreover, the potential energy required for one spring is F/6=F1=F2=F3=F4=F5=F6. Further, the fluid control valve 3V of the other embodiment to be described later is the same as the number of pistons of the fluid control valve 2V of the other embodiment, and thus the description thereof is omitted.

The fluid control valve 1V supplies or exhausts air through the supply and exhaust port 20aV formed on the inner circumferential surface of the lid body 20V. The outer peripheral surface of the lid body 20V is covered by the exterior member 22V, and a one-touch joint 21V is mounted on the upper surface of the lid body 20V. Although not shown, the one-touch joint 21V is connected to an air pipe. In this way, since the air pipe member can be connected at the above, the installation area can be prevented from increasing.

(assembly of fluid control valve)

Next, the assembly of the fluid control valve 1 of the present embodiment will be described with reference to Fig. 47. The actuator portion XV and the valve portion YV are separately assembled. Therefore, the actuator portion XV can be attached and detached by the bracket 16V constituting the valve portion YV.

First, the assembly of the actuator portion XV will be described. A sealing member 25AV is attached to the first groove 11AV and the installation groove 11cV of the second piston 11BV. The adapter 15V is pressed into the opening of one end of the exterior member 22V. The inner component 23AV, the piston 11AV, the compression spring 12AV, the inner component 23BV, the piston 11BV, and the compression spring 12BV are loaded to the exterior member 22V. At this point, the piston of the piston 11V The rod 11bV penetrates the through hole of the inner fitting member 23V and the through hole of the lid body 20V. The lid body 20V is fitted to the opening end portion of the exterior member 22V so that the piston rod 11bV that has flowed outward from the through hole of the interior member 23V penetrates. At this stage, the inner component 23V, the piston 11V, and the compression spring 12V are temporarily held in the exterior member 22V. Both end portions of the exterior member 22V are converged and fixed along the convergence groove of the cover 15V and the lid body 20V.

Next, the assembly of the valve portion YV will be described. As shown in Fig. 47, the bracket 16V is inserted into the mounting hole 14dV of the body 14V, and the bracket 16V fitted into the stem 24V is disposed inside the mounting hole 14dV. The body 14V and the holder 16V are fixed by being welded in the welded portion 29V. Thereby, the body 14V is formed integrally with the holder 16V and sealed. Further, the method of fixing the main body 14V and the bracket 16V may be carried out by press fitting or screwing with a metal spacer or the like interposed therebetween.

Next, the actuator portion XV is coupled to the valve portion YV. The female screw portion 15aV of the adapter 15V of the main body 14V is screwed into the male screw portion 16aV of the bracket 16V. At this time, the shank 24V protruding from the bracket 16V abuts against the recess 11eV of the piston 11V, and the elastic force of the compression spring 12V acting on the piston 11V is transmitted to the valve body 18V through the shank 24V, and the valve body 18V is abutted. At the valve seat 14aV. The above is assembled.

In recent years, the demand for miniaturization of fluid control valves has increased. However, with the miniaturization, the components of the fluid control valve are each reduced, so that it is difficult to maintain sufficient strength. Therefore, when the main body 14V and the bracket 16V are fixed and pressed, there is a fear that the components are broken.

In the fluid control valve 1V of the present invention having the same diameter as the pencil (for example, a diameter of about 10 mm), the body 14V is coupled by fusion When the bracket 16V is fixed, there is no damage caused by pressing or screwing, and the body 14V can be sealed with the bracket 16V. Therefore, the miniaturization of the fluid control valve can be achieved, and the strength of the valve portion Y can be ensured. At the time of assembly or maintenance, since the actuator portion X can be easily detached from the valve portion Y, work efficiency can be improved. Further, since the main body 14V is sealed to the holder 16V, the control fluid is not leaked, and safety can be improved.

(Description of the operation of the fluid control valve)

Next, the operation of the fluid control valve 1V of the present embodiment will be described.

When the fluid control valve 1V does not supply air to the supply and exhaust port 20aV, the elastic force of the compression spring 12V reverses the resistance of the compression spring 19V, and the piston 11V is pressed toward the valve seat 14aV, and the valve is passed through the stem 24V. The body 18V abuts against the valve seat 14aV. Therefore, the control fluid supplied to the inlet flow path 14bV cannot flow from the valve seat 14aV to the outlet flow path 14cV.

When air is supplied from the exhaust port 20aV, air flows into the pressurizing chamber 13aV from the internal channel 11dV through the channel 11fV. When the air flowing into the pressurizing chamber 13aV exceeds the elastic force of the compression spring 12V located in the back pressure chamber 13bV, the compression spring 12V starts to contract. Thereby, the piston 11V rises. When the piston 11V is raised, as shown in Fig. 42, the compression spring 19V attached to the shank 24V cannot be pushed in the valve seat 14aV direction, and the shank 24V is raised by the elastic force of the compression spring 19V. The elongated telescopic hose 17V will contract and the valve body 18V will leave the valve seat 14aV. In this state, when the control fluid is supplied to the inlet flow path 14bV, the control fluid flows from the inlet flow path 14bV through the valve hole in the valve seat 14aV to the outlet flow path 14cV.

<Modification of Fluid Control Valve>

Other embodiments of the fluid control valve of the present invention will be described with reference to the drawings. Figure 48 is a cross-sectional view showing a fluid control valve 2V according to another embodiment of the present invention. It is to be noted that the same reference numerals are given to the above-described embodiments in the drawings, and the description thereof will be omitted.

In the fluid control valve 2V (the above-described fluid control valves 17 to 19) of the present embodiment, as shown in FIG. 48, by fixing six internal components 23V having the same shape and being fixed to the exterior member 22V, Six first, second, third, fourth, fifth, and sixth pistons 11AV, 11BV, 11CV, 11DV, 11EV, and 11FV (hereinafter referred to as 11AV to 11FV), and six first and second stages are provided. The third, fourth, fifth, and sixth compression springs 12AV, 12BV, 12CV, 12DV, 12EV, and 12FV (hereinafter referred to as 12AV to 12FV). The first to sixth compression springs 12AV to 12FV are attached to the first to sixth pistons 11AV to 11FV one by one and coaxially. By overlapping the pistons 11V by six, six piston chambers 13AV, 13BV, 13CV, 13DV, 13EV, and 13FV are formed, and a six-stage fluid control valve is constructed.

Here, in recent years, in the semiconductor manufacturing apparatus, since switching of a plurality of gases is performed, the number of valves to be installed is increased, and the total installation area is reduced. In order to miniaturize the valve, a fluid control valve having the same diameter as the pencil has been developed. In this case, the spring diameter of the compression spring 12V attached to the piston 11V must be small. Therefore, in order to ensure a certain sealing force at the time of valve closing, it is necessary to overlap a plurality of pistons 11V.

The applicant has learned from several experiments that it is necessary to overlap four or more pistons 11V in order to ensure a certain sealing force at the time of valve closing. The compression springs 12V are respectively mounted on the coaxial one or more pistons one by one 11V. Further, in the case of the fluid control valve 2V, when the six pistons 11V are overlapped and the six compression springs 12V are attached one by one, it is understood that a certain sealing force can be reliably ensured, and the durability of the compression spring 12V can be improved.

As explained above, the fluid control valves 1V, 2V, (1) according to the present invention slide the piston 11V by the pressure of the operating fluid, and the valve body 18V abuts or leaves the fluid control valves 1V, 2V of the valve seat 14aV. The first piston 11AV and the second piston 11BV are coaxially provided, and one first compression spring 12AV that gives potential energy in a direction in which the valve body 18V abuts against the valve seat 14aV is coaxially attached to the first piston 11AV. The one second compression spring 12BV that gives the potential energy in the direction in which the valve body 18V abuts against the valve seat 14aV is coaxially attached to the second piston 11BV. Therefore, the first compression spring 12AV and the second compression spring 12BV are respectively connected in series to each other. Since the first piston 11AV and the second piston 11BV reduce the width of the fluid control valves 1V and 2V, the size can be reduced. Thereby, the total installation area can be reduced.

Since it is not only the two pistons 11V (the first piston 11AV and the second piston 11BV), even if, for example, six pistons 11V are added to increase the sealing force for closing the valve, only the height of the actuator portion X is increased. That is, the installation area can be changed without increasing the sealing force and maintaining the width of the fluid control valve itself. Therefore, regardless of the number of the pistons 11V, the miniaturization of the fluid control valve can be achieved, and the reduction in the total installation area can be achieved. Further, regardless of the number of the pistons 11V, only a certain number of pistons 11V can be combined in accordance with the material or shape of the valve body 18V, the necessary Cv value, etc., and it is easy to set the sealing force required for the valve closing. Further, even if any one of the compression springs 12V is deteriorated, the sealing force of the valve seat 14aV can be ensured by the potential energy of the other compression springs 12V. The valve body 18V does not become unbalanced and tilts.

(2) The fluid control valves 1V and 2V according to (1), wherein the first piston 11AV and the second piston 11BV have the same shape, and the first compression spring 12AV and the second compression spring 12BV have the same shape. When a plurality of pistons 11V are combined with the compression springs 12V, they are respectively of the same shape, so that the parts can be common. Thereby, it is not necessary to separately prepare pistons and compression springs of other shapes, and the manufacturing cost can be reduced when manufacturing parts by molding. Further, by the commonality of the components, the efficiency of the work can be improved during assembly.

(3) The fluid control valves 1V and 2V according to (1) or (2), wherein the total potential energy of the first compression spring 12AV and the potential energy of the second compression spring 12BV can abut the valve body 18V. Since the valve seat 14aV is such that the total potential of the first compression spring 12AV and the second compression spring 12BV is the sealing force for closing the fluid control valves 1V and 2V, the spring stress of the compression spring 12V can be individually lowered. Therefore, the durability of the compression spring 12V can be improved. Moreover, the degree of freedom in designing the compression spring 12V is improved, and design and manufacture are easy. Further, even if the tolerance is uneven, the sealing force necessary for closing the valve can be ensured.

(4) The fluid control valves 1V and 2V according to any one of (1) to (3), wherein the bracket 16V is fixed to an upper portion of the body 14V forming the valve seat 14aV, and is in the valve body 18V and A telescopic hose 17V is arranged between the brackets 16V, so that a long stroke can be obtained in a smaller diameter than the diaphragm valve body.

(5) The fluid control valve described in any one of (1) to (4) In the 1V and 2V, the bracket 16V is fixed to the upper portion of the body 14V forming the valve seat 14aV by welding, so that the assembly of the actuator portion XV can be easily performed during assembly or maintenance, and the efficiency of the operation can be improved. improve. Further, since the body 14V and the holder 16V are sealed, the control fluid does not leak, and safety can be improved.

(6) The fluid control valve according to (5), wherein the actuator portion XV having the piston 11V is detachable from the bracket 16V, so that the actuator portion X can be replaced immediately during assembly or maintenance. It can improve the efficiency of the work.

(7) The fluid control valves 1V and 2V according to any one of (1) to (6), which are characterized in that the tubular outer casing member 22V is provided, so that assembly can be easily performed.

(8) The fluid control valves 1V and 2V according to (7), characterized in that the upper surface of the cover 20V attached to the front end of the exterior member 22V has a one-touch joint 21V, and thus is attached to the exterior member. A one-touch joint 21V is disposed on the front cover 20V, and the air pipe fitting can be connected to the upper end, thereby preventing an increase in the installation area.

<Other variants of the fluid control valve>

Other embodiments of the fluid control valve of the present invention will be described with reference to the drawings. Figure 49 is a cross-sectional view showing a fluid control valve 3V (the above-described fluid control valves 17 to 19) according to another embodiment of the present invention. It is to be noted that the same reference numerals are given to the above-described embodiments, and the description thereof will be omitted.

In the above embodiment, it is described in the valve of the fluid control valve 1. The YV uses a flexible hose 17V. In the fluid control valve 3V of the present embodiment, as shown in FIG. 49, the valve portion YV does not use the bellows 17V, but the diaphragm valve body 31V constitutes the fluid control valve 3V.

Below the body 14V of the valve portion Y, an inlet flow path 14bV and an outlet flow path 14cV are provided. The mounting hole 14dV is formed in a cylindrical shape above the body 14V. The valve seat 32V is annularly disposed at a central portion of the bottom wall of the mounting hole 14dV, and communicates with the outlet flow path 14cV via the valve seat 32V thereof.

The valve portion YV is provided with the diaphragm valve body 31V in the mounting hole 14dV of the main body 14V, and the outer edge portion of the diaphragm valve body 31V is pressed by the bracket 34V so as to be inserted into the inner peripheral surface of the mounting hole 14dV and the outer peripheral surface of the bracket 34V. The adapter 33V is inserted between the body 14V, thereby holding the outer edge portion of the diaphragm valve body 31V between the body 14V and the bracket 34V. The diaphragm valve body 31V is a type in which a resin or a metal is formed into a film shape and is deformable. Further, the material of the bracket 34V and the adapter 33V is a metal having heat resistance or rigidity. The holder 34V is filled with a metal stem 30V, and is in contact with the diaphragm valve body 31V, and transmits the driving force of the actuator portion XV to the diaphragm valve body 31V via the stem 30V.

As explained above, according to the fluid control valve 3V of the present invention, (1) the piston 11V is slid by the pressure of the operating fluid, and the diaphragm valve body 31V is abutted or separated from the fluid control valve 3V of the valve seat 32V, The first piston 11AV and the second piston 11BV are coaxially provided, and the first compression spring 12AV that applies the potential energy in the direction in which the diaphragm valve body 31V abuts against the valve seat 32V is coaxially attached to the first piston 11AV; The first compression spring 12BV that gives potential energy in the direction in which the diaphragm valve body 31V abuts against the valve seat 32V is coaxially attached to the second piston 11BV, so the first compression spring 12AV and the second compression spring Since the springs 12BV are attached to the first piston 11AV and the second piston 11BV in series, the width of the fluid control valve 3V can be reduced and the size can be reduced. Thereby, the total installation area can be reduced.

<Reference Example of Fluid Control Valve>

The same shape of the piston 11V can also be applied to the NO type fluid control valve. Fig. 50 is a cross-sectional view showing the fluid control valve 4V (the above-described fluid control valves 17 to 19) of the reference example. Compared with the NC type fluid control valves 1V, 2V, 3V, the compression spring 12V does not give a potential energy in the direction in which the valve body 18V abuts against the valve seat 14aV, and the compression spring 12V does not depend on the plurality of pistons 11V. The points at which the pistons are installed are also different. It is to be noted that the same reference numerals are given to the above-described embodiments in the drawings, and the description thereof will be omitted.

In the fluid control valve 4V, the piston portion 11aV of the piston 11V is attached to the upper portion and the piston rod 11bV is attached to the lower portion than the NC type fluid control valves 1V, 2V, and 3V. The compression spring 12AV is attached only to the first piston 11AV disposed at the lowermost position. One end of the compression spring 12AV abuts against the first piston 11AV, and the other end abuts against the part 35V attached to the adapter 15V. The compression spring 12AV imparts potential energy in a direction away from the valve seat 14aV by the valve body 18V. Thereby, the piston 11V of the same shape can correspond not only to the NC type but also to the NO type.

Further, in the NO type fluid control valve, only one compression spring 12AV is used in the fluid control valve 4V of the reference example. However, when a plurality of pistons are used, one compression spring 12V may be attached to one piston 11V. For example, in the fluid control valve 4V of the reference example, the compression springs 12V may be attached to the pistons 11AV to 11FV one by one.

The present embodiment is merely an exemplification and is not intended to limit the invention. Therefore, it is a matter of course that the invention can be variously modified and modified without departing from the spirit thereof.

For example, in the above embodiment, two pistons 11V are stacked, and in other embodiments, six pistons 11V are overlapped, but several pistons 11V may be overlapped.

For example, in the above embodiment, air is used as the operating fluid, but the operating fluid may be an inert gas.

<Flow path in the valve installation block>

Figure 51 is a cross-sectional view showing the periphery of the flow path in the valve mounting block 60. In the valve mounting block 60, an inlet flow path 14bV into which the process gas or the flushing gas flows, an outlet flow path 14cV through which the process gas or the flushing gas flows, and a mounting hole 14dV (the valve chamber) communicating with the inlet flow path 14bV and the outlet flow path 14cV are formed. ).

The inlet flow path 14bV is connected to the connection flow path 23 via the outlet port 23b. The outlet flow path 14cV is connected to the supply side internal gas line 27 via the process gas supply port 26 . Further, the valve body 18V of the fluid control valve 19 is separated from and abutted against the valve seat 14aV, thereby being driven to communicate and block the mounting hole 14dV and the outlet flow path 14cV. In other words, the mounting hole 14dV and the bellows 17V having a large volume and a complicated shape are disposed on the upstream side of the blocking portion. With such a configuration, in the state in which the valve body 18V blocks the mounting hole 14dV and the outlet flow path 14cV, the amount of gas remaining between the supply-side internal gas line 27 and the valve body 18V on the downstream side of the blocking portion can be reduced. .

Figure 52 is a cross-sectional view showing the periphery of the flow path in the valve mounting block 40. Valve installation block 40 (on the left side of the same figure), forming process gas (first 1 fluid) an inlet flow path 14bV (first inlet flow path), an outlet flow path 14cV (first outlet flow path) through which the process gas flows, and a mounting hole 14dV that communicates with the inlet flow path 14bV and the outlet flow path 14cV (No. 1 valve room). Further, in the valve mounting block 40 (on the right side in the same figure), an inlet flow path 14bV (second inlet flow path) into which the flushing gas (second fluid) flows, and an outlet flow path 14cV through which the flushing gas flows out (second outlet flow) are formed. The road is connected to the mounting hole 14dV (second valve chamber) of the inlet flow path 14bV and the outlet flow path 14cV.

The inlet flow path 14bV on the left side is connected to the connection flow path 21 via the outlet port 21b. The outlet flow path 14cV is connected to the connection flow path 22 via the inlet port 22a. The inlet flow path 14bV on the right side is connected to the internal flushing gas line 25 via the flushing gas supply port 24. The outlet flow path 14cV is connected to the connection flow path 22 via the inlet port 22a. The two outlet flow paths 14cV are in communication with each other.

Further, in the left side of the same figure, the valve body 18V of the fluid control valve 17 (one of the fluid control valves) is separated from and abutted against the valve seat 14aV, thereby driving to communicate and block the mounting hole 14dV (first valve chamber) And the outlet flow path 14cV (first outlet flow path). Further, in the right side of the same figure, the valve body 18V of the fluid control valve 18 (the other fluid control valve) is separated from and abutted against the valve seat 14aV, thereby driving the mounting hole 14dV (second valve chamber) and the outlet flow path. 14cV (second exit flow path) is connected and blocked.

In other words, the mounting hole 14dV having a large volume and a complicated shape and the bellows 17V are disposed on the upstream side of the blocking portion. With this configuration, in the state of the fluid control valves 17 and 18 of the both sides, in the state in which the valve body 18V blocks the attachment hole 14dV and the outlet flow path 14cV, the amount of gas remaining on the downstream side of the blocking portion can be reduced. Therefore, when the process gas is switched to the flushing gas, the retention can be reduced. The amount of gas before switching is mixed into the gas after switching.

It is a matter of course that the present invention is not limited to the scope of the invention, and it is a matter of course that it is included in the technical scope of the present invention. Further, among the elements constituting the means for solving the problem of the present invention, the elements that are expressed in function and function include the specific configuration disclosed in the above-described embodiments or modifications, and the equivalents thereof. Any composition of function and function.

10‧‧‧ gas supply device

10A~10H‧‧‧ gas supply unit

11,11A~11H‧‧‧Process gas inflow line

12‧‧‧ flushing gas inflow line

13‧‧‧Process Gas Supply Line

14‧‧‧Internal main gas flow path

15‧‧‧Internal flushing gas flow path

16‧‧‧Flow Controller

17~19‧‧‧ fluid control valve

17a, 18a, 19a‧‧‧ Fluid Control Valve Actuator

Claims (16)

A pipe joint is configured to be fixed to a predetermined mounting object by a screw and has a fluid passage therein, and is characterized in that: the body portion is formed into a substantially rectangular shape having a predetermined longitudinal direction. a member having a shape, and having a joint surface which is a plane which is a normal line orthogonal to the longitudinal direction and which is joined to the installation target; the first opening is provided to open at the joint surface; The two opening portions are provided to open at a first end surface of the main body portion in the longitudinal direction; and a pair of screw insertion holes are holes through which the screw holes are inserted along the height direction, and are next to each other The first opening portion is provided on the first end surface side and the second end surface side in the longitudinal direction of the main body portion, and the fluid passage from the first opening portion to the second opening portion is formed to bypass The aforementioned screw is inserted through the hole. The pipe joint of claim 1, wherein the fluid passage has a first passage that is a fluid passage that is disposed from the first opening along the height direction, and a second passage that is disposed along the longitudinal direction Passing through the aforementioned second opening portion and connecting to the fluid passage of the first passage, and forming to bypass the screw insertion hole, the second passage has: The opening-side passage is a non-through hole formed in the longitudinal direction by the second opening, and does not reach the flow path side screw insertion provided on the first end side of the main body portion of the pair of screw insertion holes. The through hole and the intermediate passage are formed at a position closer to a side surface of the plane perpendicular to the longitudinal direction and the height direction, and are formed along the longitudinal direction of the screw insertion hole. The intermediate passage is provided so that one end thereof communicates with the first passage and the other end and the flow passage side of the opening side passage are not connected to the flow path side screw insertion hole and passes through the side of the flow path side screw insertion hole. The end of the screw insertion hole side is in communication. A pipe joint according to claim 2, further comprising a third opening portion provided to open at said second end surface of said body portion in said longitudinal direction, said fluid passage having a third passage disposed along said longitudinal direction Passing through the third opening portion and connecting to the fluid passage of the first passage, and forming the bypass passage through the screw insertion hole, the third passage has an opening side passage along the long side from the third opening portion a non-through hole formed in the direction, and does not reach a second screw insertion hole provided in the pair of screw insertion holes on the second end surface side of the main body portion; and the intermediate passage is inserted through the second screw The hole is closer to the width direction orthogonal to the longitudinal direction and the height direction a position of a side surface of the plane of the normal line is formed so as not to communicate with the second screw insertion hole and passes through the side of the second screw insertion hole along the longitudinal direction, and the intermediate passage is provided at one end and the first side The passage is continuous, and the other end communicates with an end of the opening side passage on the second screw insertion hole side. The pipe joint of claim 2 or 3, wherein the intermediate passage is a space formed by sealing a groove formed from the side surface side in a gas-tight or liquid-tight manner with a flat lid portion. The pipe joint of claim 2 or 3, wherein the first passage is a through hole that is provided to penetrate the height direction from the first opening. The pipe joint of any one of claims 1 to 3, wherein a central axis of the second opening is staggered with a central axis of the first opening. A fluid supply control device according to any one of claims 1 to 3, wherein the fluid supply control device has a flow path block in which an internal flow path through which the fluid flows is formed; And a plurality of fluid control devices arranged along the internal flow path and installed in the flow path block, wherein the pipe joint is configured such that the flow path block is the installation object and is connected to the flow path block In the inlet and outlet of the fluid, the screw insertion hole is formed as a through hole having no screw portion, and the joint surface is formed to be connected to the flow path block. The inlet and outlet of the aforementioned fluid. The fluid supply control device according to claim 7, wherein the fluid control device is detachably mounted to the flow channel block by being disposed on one of the flow path blocks, and the pair of the female screw portions, a connecting flow path of the internal flow path between the fluid control devices disposed in the flow path block and connected to the flow control block is a plurality of the fluids in a direction parallel to a flow direction of the fluid of the flow path block The arrangement direction of the control machine is configured to be slightly linear. The fluid supply control device according to claim 8, wherein the female screw portion is formed as a non-through hole opened in the mounting surface, so that the fluid control device is installed in the flow path block to form a surface of the inlet and outlet. On the surface side, the connection flow path is formed in the depth direction of the female screw portion around the female screw portion. The fluid supply control device according to claim 9, wherein the flow path block is configured to arrange a plurality of the fluid control devices arranged in the arrangement direction and to be disposed in a direction orthogonal to the arrangement direction. The fluid supply control device of claim 7, wherein the plurality of fluid control devices comprise: a fluid control valve configured to switch a flow and a blockage of the fluid; and a flow controller configured to control the fluid Through flow, the actuators of the two aforementioned fluid control valves are through common installation The block is installed in the flow path block. The fluid supply control device according to claim 11, wherein the inside of the mounting block is formed with a first inlet flow path through which the first fluid flows, a first outlet flow path through which the first fluid flows, and a first inlet; a flow path and a first valve chamber of the first outlet flow path; a second inlet flow path through which the second fluid flows; a second outlet flow path through which the second fluid flows out; and a second inlet flow path and a second valve chamber of the second outlet flow path, wherein a valve body of the fluid control valve is driven to communicate and block the first valve chamber and the first outlet flow path, and the valve of the other fluid control valve The body is driven to communicate and block the second valve chamber and the second outlet flow path, and the first outlet flow path and the second outlet flow path are in communication with each other. The fluid supply control device of claim 11, wherein the width of the mounting block is formed to be slightly the same as the width of the fluid control valve in a direction orthogonal to the arrangement direction. The fluid supply control device according to claim 8, wherein the pipe joint is provided in an end surface of the flow path block in the arrangement direction. A pipe connection structure characterized by having a pair of pipe joints as claimed in claim 1 or 2, wherein one of the pair of pipe joints is the other one of the installation objects, and has a screw-free connection The screw insertion hole of the hole, and the other one of the pair of pipe joints is the aforementioned one of the above-mentioned mounting objects, and has a non-through hole having a screw portion Screw the through hole. The piping connection structure of claim 15, wherein each of the pair of the pipe joints is configured such that a central axis of the second opening portion is staggered with a central axis of the first opening portion.