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TW200832059A - Photosensitive resin composition and photosensitive element using the same - Google Patents

Photosensitive resin composition and photosensitive element using the same Download PDF

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Publication number
TW200832059A
TW200832059A TW96139508A TW96139508A TW200832059A TW 200832059 A TW200832059 A TW 200832059A TW 96139508 A TW96139508 A TW 96139508A TW 96139508 A TW96139508 A TW 96139508A TW 200832059 A TW200832059 A TW 200832059A
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Taiwan
Prior art keywords
resin composition
photosensitive resin
acid
meth
compound
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TW96139508A
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Chinese (zh)
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TWI356279B (en
Inventor
Shuuichi Itagaki
Katsunori Tsuchiya
Takeshi Ohashi
Tetsuya Yoshida
Satoshi Ootomo
Kyouko Ozawa
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Hitachi Chemical Co Ltd
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Publication of TW200832059A publication Critical patent/TW200832059A/en
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Publication of TWI356279B publication Critical patent/TWI356279B/zh

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3218Carbocyclic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/0008Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0025Crosslinking or vulcanising agents; including accelerators
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/49Phosphorus-containing compounds
    • C08K5/51Phosphorus bound to oxygen
    • C08K5/53Phosphorus bound to oxygen bound to oxygen and to carbon only
    • C08K5/5313Phosphinic compounds, e.g. R2=P(:O)OR'
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0385Macromolecular compounds which are rendered insoluble or differentially wettable using epoxidised novolak resin
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/012Flame-retardant; Preventing of inflammation

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Inorganic Chemistry (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

A photosensitive resin composition comprising (A) a novolac-type acid-modified, vinyl-group-containing epoxy resin having a biphenyl skeleton, (B) a phosphorus-containing compound, c a photopolymerizable compound having at least one ethylenically unsaturated group in the molecule, and (D) a photopolymerization initiator.

Description

200832059 九、發明說明 【發明所屬之技術領域】 本發明係關於感光性樹脂組成物及使用其之感光性元 件。 【先前技術】 印刷配線板製造業界,以往,在印刷配線板上形成抗 焊阻劑。此抗焊阻劑係接合實裝零件於印刷配線板用之焊 接步驟中,有防止於印刷配線板導體層之不要部分附焊之 功用外,於實裝零件接合後印刷配線板之使用時,亦有作 爲永久覆膜防止導體層腐蝕,保持導體層間電絕緣性之功 用。 抗焊阻劑形成方法方面,如已爲人知之於印刷配線板 導體層上,網板印刷熱硬化性樹脂之方法。但,此般方法 在光阻圖案之高解像度化有其極限,要因應近年印刷配線 板之高密度化變得有困難。 於此,爲達成光阻圖案之高解像度化,光阻法的使用 變得興盛。此光阻法爲於基板上形成由感光性樹脂組成物 所成之感光性樹脂組成物層,令此感光性樹脂組成物層經 特定圖案之曝光而硬化,使未曝光部分經顯像除去後’形 成特定圖案之硬化膜者。 另外,相關方法所使用之感光性樹脂組成物,考量作 業環境安全,地球環境安全觀點’以可用碳酸鈉水溶液等 稀鹼水溶液顯像之驗顯像型者成爲主流。 -5- 200832059 此般感光性樹脂組成物方面,已知如下述專利文獻1 之液狀光阻油墨組成物,及下述專利文獻2之感光性熱硬 化性樹脂組成物等。 [專利文獻1]特開昭61-243869號公報 [專利文獻2]特開平0 1 - 1 4 1 904號公報 【發明內容】 [發明所欲解決之課題] 而近年,各種工業製品之對火災之難燃化限制變嚴, 印刷配線板等所使用之材料亦不例外。難燃化之方法方面 ,一般熟知爲於材料中添加鹵系化合物,銻系化合物,磷 系化合物,硼系化合物,無機塡充劑等方法。 但最近,伴隨對於環境問題,對人體安全性問題之關 心提升,同時重點移至非公害性、低有毒性、安全性,不 單係難燃,亦不斷要求有害氣體及發煙性物質之減低。因 此,不使用鹵系化合物及銻系化合物之難燃基板已開始開 發·實用化。 然而,本發明者們發現於上述難燃基板上,使用專利 文獻1及2之傳統感光性樹脂組成物形成硬化膜時,變得 無法確保充分之難燃性(期望爲UL94VTM-0程度)。 本發明有鑑於上述狀況,以提供有優異鹼顯像性,同 時可形成難燃性優異之硬化膜的感光性樹脂組成物爲目的 。另外,本發明爲提供具備此般感光性樹脂組成物所成之 感光性樹脂組成物層的感光性元件爲目的。 -6 - 200832059 [解決課題之手段] 本發明者們,爲達成上述目的’努力硏究之結果,發 現藉由含具特定構造之樹脂與含磷化合物於感光性樹脂組 成物中,可達成上述目的,完成本發明。 即,本發明爲提供含(A )具聯苯骨架之酚醛清漆型 含酸改性乙烯基之環氧樹脂,及(B )含磷化合物,及( C )於分子內具有至少1個乙烯性不飽和基之光聚合性化 合物,及(D )光聚合起始劑之感光性樹脂組成物。 根據相關感光性樹脂組成物,藉由具有上述構成,除 具有優異鹼顯像性,同時其硬化膜可得優異難燃性。因此 ,上述感光性樹脂組成物可適用於要求難燃性之印刷配線 板等製造用途。 另外,本發明之感光性樹脂組成物中,上述(A )環 氧樹脂以含(A)下述一般式(1)所示之環氧樹脂與(b )含不飽和基單羧酸與(C)和多元羧酸酐之反應生成物 的含酸改性乙烯基環氧樹脂爲佳。 [化1][Technical Field] The present invention relates to a photosensitive resin composition and a photosensitive member using the same. [Prior Art] In the printed wiring board manufacturing industry, conventionally, a solder resist is formed on a printed wiring board. The solder resist is used in the soldering step for the printed wiring board, and the function of preventing the unnecessary soldering of the conductor layer of the printed wiring board, and when the printed wiring board is used after the mounting of the mounted component is used, It also functions as a permanent film to prevent corrosion of the conductor layer and to maintain electrical insulation between the conductor layers. As a method of forming a solder resist, a method of screen printing a thermosetting resin is known as a conductor layer of a printed wiring board. However, such a method has its limit in the high resolution of the photoresist pattern, and it has become difficult to increase the density of the printed wiring board in recent years. Here, in order to achieve high resolution of the photoresist pattern, the use of the photoresist method has prospered. In the photoresist method, a photosensitive resin composition layer made of a photosensitive resin composition is formed on a substrate, and the photosensitive resin composition layer is cured by exposure to a specific pattern, and the unexposed portion is removed by development. 'A person who forms a hardened film of a specific pattern. In addition, the photosensitive resin composition used in the related method is considered to be environmentally safe, and the environmental safety of the earth has become the mainstream by the use of a dilute alkali aqueous solution such as an aqueous solution of sodium carbonate. In the case of the photosensitive resin composition, a liquid photoresist composition as disclosed in Patent Document 1 below, and a photosensitive thermosetting resin composition of Patent Document 2 below are known. [Patent Document 1] JP-A-61-243869 [Patent Document 2] Japanese Unexamined Patent Publication No. JP-A No. Hei No. Hei. The flame retardation limit is tightened, and materials used for printed wiring boards and the like are no exception. As a method of incombustibility, a method of adding a halogen compound, an anthraquinone compound, a phosphorus compound, a boron compound, an inorganic chelating agent, and the like is generally known. Recently, however, with regard to environmental issues, the focus on human safety issues has increased, while the focus has shifted to non-nuisance, low toxicity, safety, not only flame retardance, but also the reduction of harmful gases and smoky substances. Therefore, a flame-retardant substrate which does not use a halogen compound or a lanthanoid compound has been developed and put into practical use. However, the present inventors have found that when the cured film is formed using the conventional photosensitive resin composition of Patent Documents 1 and 2 on the flame-retardant substrate, sufficient flame retardancy (desired to be UL94VTM-0) is not ensured. In view of the above, the present invention has an object of providing a photosensitive resin composition which has excellent alkali developability and can form a cured film having excellent flame retardancy. Further, the present invention has an object of providing a photosensitive element having a photosensitive resin composition layer formed of the photosensitive resin composition. -6 - 200832059 [Means for Solving the Problem] As a result of intensive research to achieve the above object, the present inventors have found that the above-mentioned resin and phosphorus-containing compound having a specific structure can be used in the photosensitive resin composition. Purpose, the present invention has been completed. That is, the present invention provides an epoxy resin containing a (A) biphenyl skeleton-containing novolac type acid-modified vinyl group, and (B) a phosphorus-containing compound, and (C) having at least one ethyl group in the molecule. A photopolymerizable compound of an unsaturated group; and (D) a photosensitive resin composition of a photopolymerization initiator. According to the related photosensitive resin composition, in addition to the above-described configuration, in addition to excellent alkali developability, the cured film can have excellent flame retardancy. Therefore, the above-mentioned photosensitive resin composition can be suitably used for manufacturing applications such as a printed wiring board which requires flame retardancy. Further, in the photosensitive resin composition of the present invention, the (A) epoxy resin contains (A) an epoxy resin represented by the following general formula (1) and (b) an unsaturated group-containing monocarboxylic acid ( C) An acid-modified vinyl epoxy resin which is a reaction product of a polycarboxylic acid anhydride is preferred. [Chemical 1]

〔式(1)中,R1及R2係各自獨立,表示氫原子,碳數1 200832059 〜8之烷基,或,芳基,11爲〇〜50之整數。又,式(〇 中,多數存在之R1及R2可各自爲相同或相異。〕 (Α)環氧樹脂方面,藉由含上述特定含酸改性乙烯 基氧樹脂’感光性樹脂組成物可得優異驗顯像性,同時 可形成具更優異難燃性之硬化膜。[In the formula (1), R1 and R2 each independently represent a hydrogen atom, an alkyl group having a carbon number of 1 200832059 to 8, or an aryl group, and 11 is an integer of 〇 50. Further, in the formula, most of R1 and R2 may be the same or different. (Α) In terms of epoxy resin, the photosensitive resin composition containing the above-mentioned specific acid-containing modified vinyloxy resin may be used. It has excellent imageability and can form a hardened film with more excellent flame retardancy.

另外,本發明之感光性樹脂組成物以更含(E )熱硬 化劑爲佳。感光性樹脂組成物藉由含(E )熱硬化劑,使 感光性樹脂組成物光硬化後,再熱硬化,可更提升所得硬 化膜之絶緣信賴性。 另外,本發明之感光性樹脂組成物中,上述(B )含 磷化合物以含下述一般式(2 )所示之膦酸鹽爲佳。 [化2] 〇Further, the photosensitive resin composition of the present invention preferably contains (E) a hardening agent. In the photosensitive resin composition, the photosensitive resin composition is photocured by the (E) thermal curing agent, and then thermally cured, whereby the insulating reliability of the obtained hardened film can be further improved. Further, in the photosensitive resin composition of the present invention, the phosphorus-containing compound (B) preferably contains a phosphonate represented by the following general formula (2). [Chemical 2] 〇

Mm+ (2)Mm+ (2)

IIII

A一P一0 B 〔式(2)中,A及B爲各自獨立,表示直鏈狀或分枝狀 之碳數1〜6之烷基,或,芳基,Μ爲Mg、Ca、Al、Sb 、Sn、Ge、Ti、Zn、Fe、Zr、Ce、Bi、Sr、Mn、Li' Na 及K所成之群所選出之至少一種金屬,m爲1〜4之整數 ° ] 感光性樹脂組成物因含上述一般式(2 )所示之膦酸 鹽,可更提升所得硬化膜之難燃性。 另外,本發明之感光性樹脂組成物中,上述(B )含 磷化合物以含磷酸酯爲佳。感光性樹脂組成物因含磷酸酯 -8- 200832059 ,可更提升所得硬化膜之難燃性及可撓性。又,本發明之 感光性樹脂組成物,作爲(B)含磷化合物,以含上述一 般式(2)所示之膦酸鹽與上述磷酸酯之兩者爲佳,藉由 此,可使所得硬化膜之難燃性與可撓性兩者皆優異。 另外,本發明之感光性樹脂組成物中,上述(B )含 磷化合物以含 phenoxyphosphazene化合物爲佳。感光性 樹脂組成物因含phenoxyphosphazene化合物,可更提升 所得硬化膜之難燃性及可撓性,同時使滲出性(感光性樹 脂組成物之滲出)更良好。又,本發明之感光性樹脂組成 物,作爲(B )含磷化合物,以含上述一般式(2 )所示之 膦酸鹽與上述phenoxyphosphazene化合物之兩者爲佳, 藉此,可使所得硬化膜之難燃性,可撓性及滲出性成爲特 別優異者。 進而,本發明之感光性樹脂組成物,以於可撓基板上 形成成爲永久覆膜之硬化膜用者爲佳。 本發明另外,提供具備支持體以及於該支持體上所形 成之上述本發明之感光性樹脂組成物所成之感光性樹脂組 成物層之感光性元件。根據相關感光性元件,藉由具備上 述感光性樹脂組成物所成之感光性樹脂組成物層,可得優 異鹼顯像性外,同時可形成具優異難燃性之硬化膜。 [發明效果] 根據本發明,可提供具有優異鹼顯像性,同時可形成 難燃性優異之硬化膜的感光性樹脂組成物,及使用其之感 -9 - 200832059 光性元件。 [實施發明之最佳形態] 以下,依狀況參考圖面詳細說明本發明之合適實施形 態。又,圖面中,相同或相當部分附上相同符號,省略重 複說明。另外,本發明中(甲基)丙烯酸係指丙烯酸及對 應其之甲基丙烯酸,(甲基)丙烯酸酯係指丙烯酸酯及對 應其之甲基丙烯酸酯,(甲基)丙烯醯基係指丙烯醯基及 對應其之甲基丙烯醯基。 (感光性樹脂組成物) 本發明之感光性樹脂組成物係含有(A )具聯苯骨架 之酚醛清漆型含酸改性乙烯基環氧樹脂(以下,依狀況稱 爲「( A )成分」)與(B )含磷化合物(以下,依情況 稱「(B)成分」)與(C)於分子內具有至少一個乙烯 性不飽和基之光聚合性化合物(以下,依情況稱「( C ) 成分」)與(D )光聚合起始劑(以下,依情況稱「( D )成分」)者。另外,本發明之感光性樹脂組成物更以含 (E )熱硬化劑(以下,依情況稱「(E)成分」)爲佳 〇 本發明之感光性樹脂組成物因含上述(A )〜(D ) 成分,可以稀鹼水溶液顯像,同時可使該感光性樹脂組成 物硬化所得硬化膜之難燃性滿足高水準。且根據本發明之 感光性樹脂組成物,可使具充分之難燃性的硬化膜有效率 -10- 200832059 地以局解像度形成。 另外’根據本發明之感光性樹脂組成物,可不含鹵系 化合物及銻系化合物而使硬化膜之難燃性足夠高,故可減 低如印刷配線板之環境負荷及毒性。特別係,本發明之感 光性樹脂組成物用於非鹵系或非銻系之難燃基板時,可更 達到上述效果。 以下’說明本發明之感光性樹脂組成物所含之各成分 &lt;(A)成分:含酸改性乙烯基環氧樹脂&gt; (A)成分之具聯苯骨架之酚醛清漆型含酸改性乙烯 基環氧樹脂較佳爲(a )下述一般式(1 )所示之環氧樹脂 與(b )含不飽和基單羧酸以及(c )與多元羧酸酐之反應 生成物所得者。 [化3]A - P - 0 B [In the formula (2), A and B are each independently, and represent a linear or branched alkyl group having 1 to 6 carbon atoms, or an aryl group, and lanthanum is Mg, Ca, Al. At least one metal selected from the group consisting of Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li' Na and K, m is an integer of 1 to 4] Since the resin composition contains the phosphonate represented by the above general formula (2), the flame retardancy of the obtained cured film can be further enhanced. Further, in the photosensitive resin composition of the present invention, the phosphorus-containing compound (B) is preferably a phosphate-containing compound. The photosensitive resin composition can improve the flame retardancy and flexibility of the obtained cured film due to the phosphate ester -8-200832059. Further, in the photosensitive resin composition of the present invention, as the (B) phosphorus-containing compound, it is preferred to contain both the phosphonate represented by the above formula (2) and the above phosphate, whereby the resulting product can be obtained. The cured film is excellent in both flame retardancy and flexibility. Further, in the photosensitive resin composition of the present invention, the phosphorus-containing compound (B) preferably contains a phenoxyphosphazene compound. The photosensitive resin composition contains a phenoxyphosphazene compound, which further improves the flame retardancy and flexibility of the obtained cured film, and at the same time makes the exudation (bleeding of the photosensitive resin composition) better. Further, the photosensitive resin composition of the present invention preferably contains both the phosphonate represented by the above formula (2) and the phenoxyphosphazene compound as the (B) phosphorus-containing compound, whereby the resulting hardening can be obtained. The flame retardancy, flexibility and exudation of the film are particularly excellent. Further, the photosensitive resin composition of the present invention is preferably used for forming a cured film which is a permanent film on a flexible substrate. Further, the present invention provides a photosensitive element comprising a support and a photosensitive resin composition layer formed of the photosensitive resin composition of the present invention formed on the support. According to the photosensitive resin element, the photosensitive resin composition layer formed of the photosensitive resin composition can provide a cured film having excellent flame retardancy in addition to excellent alkali developability. [Effect of the Invention] According to the present invention, it is possible to provide a photosensitive resin composition which has excellent alkali developability and can form a cured film excellent in flame retardancy, and a photosensitive element using the same. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a suitable embodiment of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding portions are denoted by the same reference numerals, and the repeated description is omitted. Further, in the present invention, (meth)acrylic means acrylic acid and methacrylic acid corresponding thereto, (meth)acrylate means acrylate and methacrylate corresponding thereto, and (meth)acryloyl group means propylene A mercapto group and a corresponding methacrylic acid group. (Photosensitive Resin Composition) The photosensitive resin composition of the present invention contains (A) a novolac type acid-modified vinyl epoxy resin having a biphenyl skeleton (hereinafter, referred to as "(A) component" depending on the situation. And (B) a phosphorus-containing compound (hereinafter, referred to as "(B) component") and (C) a photopolymerizable compound having at least one ethylenically unsaturated group in the molecule (hereinafter, referred to as "(C) ) "Component") and (D) Photopolymerization initiator (hereinafter, "(D) component"). Further, the photosensitive resin composition of the present invention contains (E) a heat curing agent (hereinafter, referred to as "(E) component"). The photosensitive resin composition of the present invention contains the above (A)~ The component (D) can be developed in a dilute aqueous alkali solution, and at the same time, the flame retardancy of the cured film obtained by curing the photosensitive resin composition can satisfy a high level. Further, according to the photosensitive resin composition of the present invention, it is possible to form a cured film having sufficient flame retardancy with an efficiency of -10- 200832059. Further, the photosensitive resin composition of the present invention can contain a halogen-based compound and an anthraquinone-based compound, and the flame retardancy of the cured film is sufficiently high, so that environmental load and toxicity such as a printed wiring board can be reduced. In particular, when the photosensitive resin composition of the present invention is used for a non-halogen-based or non-fluorene-based flame-retardant substrate, the above effects can be further attained. Hereinafter, each component contained in the photosensitive resin composition of the present invention will be described. <(A) component: acid-modified vinyl epoxy resin> (A) component of a novolac type-containing acid-modified The vinyl epoxy resin is preferably obtained by (a) an epoxy resin represented by the following general formula (1) and (b) an unsaturated group-containing monocarboxylic acid and (c) a reaction product with a polycarboxylic acid anhydride. . [Chemical 3]

〔式(1)中,R1及R2係各自獨立,表示氫原子,碳數1 〜8之烷基,或芳基,η爲0〜50之整數。又,式(1)中 ,多數存在之R1及R2可各自爲相同或相異。〕 令使用具上述一般式(1)般構造之化合物所構成之 -11 - 200832059 (A )環氧樹脂含有於感光性樹脂組成物中’可使 性與難燃性兼具。 構成(A)成分之含酸改性乙烯基環氧樹脂&amp; 含不飽和鍵結單羧酸具體例方面,如丙烯酸、丙烯 體、甲基丙烯酸、Θ -苯乙烯丙烯酸、/3 -糠基丙 巴豆酸、α -氰基桂皮酸、桂皮酸,及飽和或不飽 酸酐及與1分子中有1個羥基之(甲基)丙烯酸酯 之反應物的半酯類,或,飽和或飽和二元酸與含不 單縮水甘油基化合物之反應物的半酯類等。 半酯類有如琥珀酸酐、馬來酸酐、苯二甲酸酐 苯二甲酸酐、六氫苯二甲酸酐、甲基六氫苯二甲酸 基四氫苯二甲酸酐、衣康酸酐、甲基端亞甲基四氫 酸酐等飽和或不飽和二元酸酐,與羥基乙基(甲基 酸酯、羥基丙基(甲基)丙烯酸酯、羥基丁基(甲 烯酸酯、聚乙二醇單(甲基)丙烯酸酯、甘油二( 丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、季 三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯 苯基縮水甘油基醚之(甲基)丙烯酸酯等1分子中 羥基之(甲基)丙烯酸酯衍生物類,以等莫耳比反 之半酯類,或飽和或不飽和二元酸(如琥珀酸、馬 己二酸、苯二甲酸、四氫苯二甲酸、六氫苯二甲酸 酸、富馬酸等),與含不飽和基單縮水甘油基化合 縮水甘油基(甲基)丙烯酸酯等),以等莫耳比反 之半酯等。 鹼顯像 J ( b ) 酸之雙 烯酸、 和二元 衍生物 飽和基 、四氫 酐、甲 苯二甲 )丙烯 基)丙 甲基) 戊四醇 酸酯、 有1個 應所得 來酸、 、衣康 物(如 應所得 -12- 200832059 此等之(b )單羧酸可使用1種單獨或2種以上組合 。特別佳之(b )單羧酸爲丙烯酸。 構成(A )成分含酸改性乙烯基環氧樹脂的(c )多元 性羧酸酐具體例方面,如馬來酸酐、琥珀酸酐、苯二甲酸 酐、四氫苯二甲酸酐、六氫苯二甲酸酐、甲基四氫苯二甲 酸酐等。 (A)成分之酸價以60〜150mgKOH/g爲佳,以80〜 12 0mgKOH/g更佳。酸價未達60mgKOH/g,貝ij以稀鹼水溶 液顯像有變困難之傾向,超過150mgKOH/g則有所得硬化 膜之絶緣信賴性,耐藥品性及電鍍耐性不足之傾向。 又,(A )成分之酸價可用以下方法進行測定。首先 ,秤重作爲(A)成分之樹脂溶液約lg後,於其樹脂溶 液中添加丙酮3 0g,使樹脂溶液均一溶解。接著,適量添 加指示劑之酚酞於其溶液中,使用0.1 N之KOH水溶液進 行滴定。由滴定結果以下式算出酸價。 [數1] A=l〇xVfx56.1/(WpxI) 又,式中,A爲酸價(mgKOH/g ) ,Vf爲酚酞之滴 定量(mL ) ,Wp爲作爲(A )成分之樹脂溶液質量(g ) ,I爲作爲(A )成分之樹脂溶液之不揮發分之比例(質 量% )。 (A )成分之重量平均分子量並無特別限制,但由薄 膜性及解像度觀點,以1 000〜50000爲佳,2000〜30000 -13- 200832059 更佳,3 000〜15000特別佳。 (A)成分之具聯苯骨架之酚醛清漆型含酸改性乙烯 基環氧樹脂可以市售品購入,亦可用如 ZCR- 1 5 69H、 ZCR- 1596H、ZCR-1611H、ZCR-1610H (皆爲日本化藥公 司製,商品名)。 另外,本發明之感光性樹脂組成物可添加酚酚醛清漆 型含酸改性乙烯基環氧樹脂、甲酚酚醛清漆型含酸改性乙 烯基環氧樹脂、雙酚A型含酸改性乙烯基環氧樹脂、雙 酚F型含酸改性乙烯基環氧樹脂等具聯苯骨架之酚醛清漆 型含酸改性乙烯基環氧樹脂以外之含酸改性乙烯基環氧樹 脂、丙烯酸樹脂、苯乙烯系樹脂、環氧系樹脂、醯胺系樹 脂、醯胺環氧系樹脂、醇酸系樹脂、酚系樹脂。其中,由 賦予薄膜性觀點以使用丙烯酸樹脂爲佳。 上述丙烯酸樹脂方面,以含(甲基)丙烯酸及(甲基 )丙烯酸酯作爲構成單體之樹脂爲佳,可由令含(甲基) 丙烯酸及(甲基)丙烯酸酯之構成單體進行自由基聚合而 製造。 上述(甲基)丙烯酸酯方面,可具例如下述一般式( 3 )所示之化合物及此化合物之烷基被羥基、環氧基、鹵 等取代者。 [化4] H2C=C—C—0—R12 (3) 2 ι”ιι R11 Ο -14- 200832059 上述一般式(3)中,R11爲氫原子或甲基,R12爲碳 數1〜12之烷基、碳數5〜10之脂環式烴基或苄基。另外 ,R12所示之烷基方面,如甲基、乙基、丙基、丁基、戊 基、己基、庚基、辛基、壬基、癸基、十一烷基、十二烷 基,及此等之構造異構物。 倂用上述(A)成分之具聯苯骨架之酚醛清漆型含酸 改性乙烯基環氧樹脂與上述丙烯酸樹脂時,丙烯酸樹脂之 重量平均分子量由可提升薄膜性觀點,以 3 0,000〜 300,000 爲佳,40,000 〜200,000 更佳,50,000 〜150,000 特別佳。 &lt; (B )成分:含磷化合物&gt; (B)成分之含磷化合物以含下述一般式(2)所示之 膦酸鹽爲佳。 [化5]In the formula (1), R1 and R2 each independently represent a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, or an aryl group, and η is an integer of 0 to 50. Further, in the formula (1), most of R1 and R2 which are present may be the same or different. -11 - 200832059 (A) Epoxy resin is contained in a photosensitive resin composition, and is compatible with both flame retardancy and flame retardancy. The acid-modified vinyl epoxy resin constituting the component (A) &amp; the specific example of the unsaturated-bonded monocarboxylic acid, such as acrylic acid, acrylic, methacrylic acid, fluorene-styrene acrylic acid, /3 -fluorenyl group a half ester of a reaction of crotonic acid, α-cyano cinnamic acid, cinnamic acid, and a saturated or unsaturated anhydride with a (meth) acrylate having 1 hydroxyl group in one molecule, or saturated or saturated A half ester of a reactant of a monobasic acid and a compound containing not only a glycidyl compound. Semi-esters such as succinic anhydride, maleic anhydride, phthalic anhydride phthalic anhydride, hexahydrophthalic anhydride, methyl hexahydrophthalic acid tetrahydrophthalic anhydride, itaconic anhydride, methyl end A saturated or unsaturated dibasic acid anhydride such as methyltetrahydroanhydride, and a hydroxyethyl group (methyl ester, hydroxypropyl (meth) acrylate, hydroxybutyl (methacrylate), polyethylene glycol mono Acrylate, glycerol di(acrylate), trimethylolpropane di(meth)acrylate, quaternary (meth) acrylate, dipentaerythritol penta(methyl) propylene phenyl glycidyl ether a (meth) acrylate derivative of a hydroxyl group in one molecule such as acrylate, or a half ester in a molar ratio, or a saturated or unsaturated dibasic acid (such as succinic acid, adipic acid, benzene) Formic acid, tetrahydrophthalic acid, hexahydrophthalic acid, fumaric acid, etc.), combined with unsaturated monoglycidyl glycidyl (meth) acrylate, etc. Ester, etc. Alkali imaging J (b) acid dienoic acid, and binary derivative a saturated base, tetrahydroanhydride, toluene, propylene) propylmethyl) pentaerythritol ester, one of which should be obtained from acid, and clothing (if it should be obtained -12-200832059, etc. (b The monocarboxylic acid may be used singly or in combination of two or more kinds. Particularly preferably, (b) the monocarboxylic acid is acrylic acid. (c) The acid-modified vinyl epoxy resin (A) component (c) specific example of the polycarboxylic acid anhydride In terms of, for example, maleic anhydride, succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, etc. The acid value of the component (A) is 60 to 150 mgKOH. / g is preferably 80 to 12 mg KOH / g. The acid value is less than 60 mg KOH / g, and the appearance of ij ij is difficult to develop with a dilute aqueous solution, and the insulation reliability of the obtained cured film is more than 150 mg KOH / g. In addition, the acid value of the (A) component can be measured by the following method. First, after weighing about lg of the resin solution of the component (A), acetone is added to the resin solution. 0g, the resin solution is uniformly dissolved. Then, an appropriate amount of the indicator is added to the phenolphthalein The liquid was titrated with a 0.1 N KOH aqueous solution. The acid value was calculated from the titration result by the following formula: [A1] A = l〇xVfx56.1 / (WpxI) Further, in the formula, A is an acid value (mgKOH/g) Vf is the titer (mL) of phenolphthalein, Wp is the mass (g) of the resin solution as the component (A), and I is the ratio (% by mass) of the nonvolatile matter of the resin solution as the component (A). The weight average molecular weight of the component is not particularly limited, but from the viewpoint of film properties and resolution, it is preferably from 1,000 to 50,000, more preferably from 2000 to 30,000 -13 to 200832059, and particularly preferably from 3,000 to 15,000. The novolac type acid-modified vinyl epoxy resin having a biphenyl skeleton (A) may be commercially available, and may be used, for example, ZCR-1 5 69H, ZCR-1596H, ZCR-1611H, ZCR-1610H (all Made by Nippon Kayaku Co., Ltd., trade name). Further, the photosensitive resin composition of the present invention may be added with a phenol novolac type acid-modified vinyl epoxy resin, a cresol novolac type acid-modified vinyl epoxy resin, and a bisphenol A type acid-modified vinyl compound. Acid-modified vinyl epoxy resin, acrylic resin other than acid-modified vinyl epoxy resin, such as epoxy resin, bisphenol F type acid-modified vinyl epoxy resin, etc. A styrene resin, an epoxy resin, a guanamine resin, a guanamine epoxy resin, an alkyd resin, or a phenol resin. Among them, it is preferred to use an acrylic resin from the viewpoint of imparting film properties. In terms of the above acrylic resin, a resin containing (meth)acrylic acid and (meth)acrylic acid ester as a constituent monomer is preferred, and a constituent monomer containing (meth)acrylic acid and (meth)acrylic acid ester may be free radical. Manufactured by polymerization. In the above (meth) acrylate, for example, a compound represented by the following general formula (3) and an alkyl group of the compound may be substituted with a hydroxyl group, an epoxy group, a halogen or the like. H2C=C—C—0—R12 (3) 2 ι”ιι R11 Ο -14- 200832059 In the above general formula (3), R11 is a hydrogen atom or a methyl group, and R12 is a carbon number of 1 to 12. An alkyl group, an alicyclic hydrocarbon group having 5 to 10 carbon atoms or a benzyl group. Further, an alkyl group represented by R12, such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group or an octyl group. , mercapto, decyl, undecyl, dodecyl, and the structural isomers thereof. The novolac type acid-modified vinyl epoxy having a biphenyl skeleton as the above (A) component In the case of the resin and the above acrylic resin, the weight average molecular weight of the acrylic resin is preferably from 3,000 to 300,000, more preferably from 40,000 to 200,000, and particularly preferably from 50,000 to 150,000, from the viewpoint of improving film properties. (B) Component: phosphorus-containing compound &gt; The phosphorus-containing compound of the component (B) is preferably a phosphonate represented by the following general formula (2).

Mm+ (2)Mm+ (2)

II A—P—ΟII A—P—Ο

II

B 〔式(2)中,A及B爲各自獨立,表示直鏈狀或分枝狀 之碳數1〜6之烷基,或芳基,Μ爲Mg、Ca、Al、Sb、 Sn、Ge、Ti、Zn、Fe、Zr、Ce、Bi、Sr、Mn、Li、Na 及 K所成之群所選出之至少一種金屬,m爲1〜4之整數。 ] 在此,式(2)中A及B具體例方面,可舉例如甲基 -15- 200832059 、乙基、II 一丙基、異丙基、η—丁基、tert - 丁基、η —戊 基、苯基等。 另外,上述一般式(2)所示之膦酸鹽之80質量%以 上係基於用於感光性樹脂組成物及感光性元件時之信賴性 觀點,膦酸鹽粒子之粒度在1 〇 // m以下爲佳,5 // m以下 更佳,3 /z m以下特別佳。此粒子粒度超過1 〇 // m,有感 光性樹脂組成物塗膜外觀變差之傾向,高解像度印刷配線 板之製造有變困難之傾向。 上述膦酸鹽可1種單獨或2種以上組合使用。另外, 上述膦酸鹽可以市售品方式購入,亦可使用如EXOLIT OP 93 0,EXOLIT OP 935,EXOLIT OP 940 (皆 Clariant in Japan公司製,商品名)。 感光性樹脂組成物藉由含有作爲(B )成分之上述膦 酸鹽,使感光性樹脂組成物硬化後所得之硬化膜可得到更 充分之難燃性。另外,上述一般式(2)所示之膦酸鹽爲 不易水解之構造,因可有效防止電絕緣性降低之離子性雜 質產生,硬化膜可具有優異絶緣信賴性。 另外,(B)成分之含磷化合物以含磷酸酯爲佳。磷 酸酯具體例方面,如三苯基磷酸鹽、三甲酚磷酸鹽、三二 甲苯磷酸鹽、甲酚二苯基磷酸鹽、二甲苯二苯基磷酸鹽、 1,3-二羥基苯•三氯膦聚縮合物之酚縮合物、2,2-雙( P -羥基苯基)丙烷·三氯膦氧化物聚縮合物之酚縮合物 等。此等可以市售品取得,如 TPP、TCP、TXP、CDP、 XDP、CR-73 3 S、CR-74 1、CR-747 (皆爲大八化學公司製 -16- 200832059 ,商品名),PFR,FP-600及FP-700(皆爲ADEKA公司製 ,商品名)等。 感光性樹脂組成物藉由含作爲(B )成分之磷酸酯, 使感光性樹脂組成物硬化後所得硬化膜之難燃性可更提升 。另外,磷酸酯作爲可塑劑,故硬化膜之可撓性可更提升 〇 另外’ (B )成分之含磷化合物以含 phenoxyphosphazene 化合物爲佳。phenoxyphosphazene 化 合物例J方面,如下述一般式(4)所示之具環狀構造 t ft#% &amp; /或下述一般式(5)所示之具鏈狀構造之化 合物。 [化6]B [In the formula (2), A and B are each independently, and represent a linear or branched alkyl group having 1 to 6 carbon atoms, or an aryl group, and yttrium is Mg, Ca, Al, Sb, Sn, Ge. At least one metal selected from the group consisting of Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na, and K, and m is an integer of 1 to 4. Here, in the specific examples of A and B in the formula (2), for example, methyl-15-200832059, ethyl, II-propyl, isopropyl, η-butyl, tert-butyl, η- Pentyl, phenyl, and the like. Further, 80% by mass or more of the phosphonate represented by the above general formula (2) is based on the viewpoint of reliability when used for a photosensitive resin composition and a photosensitive element, and the particle size of the phosphonate particles is 1 〇// m. The following is better, 5 / m or less is better, 3 / zm or less is particularly good. When the particle size exceeds 1 〇 // m, the appearance of the coating film of the photosensitive resin composition tends to be deteriorated, and the production of the high-resolution printed wiring board tends to be difficult. The above phosphonates may be used alone or in combination of two or more. Further, the phosphonate may be commercially available, and may be, for example, EXOLIT OP 93 0, EXOLIT OP 935, EXOLIT OP 940 (all manufactured by Clariant in Japan, trade name). The photosensitive resin composition contains the above-mentioned phosphonate as the component (B), and the cured film obtained by curing the photosensitive resin composition can obtain more sufficient flame retardancy. Further, the phosphonate represented by the above general formula (2) is a structure which is not easily hydrolyzed, and can effectively prevent generation of ionic impurities which have reduced electrical insulating properties, and the cured film can have excellent insulation reliability. Further, the phosphorus-containing compound of the component (B) is preferably a phosphate-containing ester. Specific examples of phosphate esters, such as triphenyl phosphate, tricresol phosphate, trixylene phosphate, cresol diphenyl phosphate, xylene diphenyl phosphate, 1,3-dihydroxybenzene • trichloro A phenol condensate of a phosphine polycondensate, a phenol condensate of a polycondensate of 2,2-bis(P-hydroxyphenyl)propane·trichlorophosphine oxide, and the like. These can be obtained from commercially available products such as TPP, TCP, TXP, CDP, XDP, CR-73 3 S, CR-74 1, CR-747 (all are manufactured by Daiha Chemical Co., Ltd. -16-200832059, trade name). PFR, FP-600 and FP-700 (all manufactured by ADEKA Corporation, trade name). The photosensitive resin composition contains a phosphate ester as the component (B), and the flame retardancy of the cured film obtained by curing the photosensitive resin composition can be further improved. Further, since the phosphate ester is used as a plasticizer, the flexibility of the cured film can be further improved. Further, the phosphorus-containing compound of the component (B) is preferably a compound containing phenoxyphosphazene. In the case of the phenoxyphosphazene compound, a compound having a chain structure t ft#% &amp; / or a chain structure as shown in the following general formula (5) is shown in the following general formula (4). [Chemical 6]

〔式(4 )中,r爲!〜2〇之整數。〕 -17- (5) (5)200832059 [化7][In formula (4), r is! An integer of ~2〇. 〕 -17- (5) (5) 200832059 [Chemistry 7]

〔式(5)中,s爲1〜20之整數。〕 感光性樹脂組成物藉由含有作爲(B )成分之 phenoxyphosphazene化合物,使感光性樹脂組成物硬化後 ,所得硬化膜之難燃性可更提升。另外, phenoxyphosphazene化合物爲可使硬化膜之可撓性及滲出 性(感光性樹脂組成物之滲出)更好者。 (B) 成分方面,上述一般式(2)所示之膦酸鹽,亦 可單獨使用上述磷酸酯及phenoxyphosphazene化合物中 至少一個,但以使用至少上述一般式(2)所示之膦酸鹽 爲佳,以倂用上述一般式(2 )所示之膦酸鹽與上述磷酸 酯或phenoxyphosphazene化合物特別佳。另外,(B )成 分方面,亦可用此等以外公知之含磷化合物。 &lt;(C)成分:至少有一個乙烯性不飽和鍵結之化合物&gt; (C) 於分子內至少有一個乙烯性不飽和基之光聚合 性化合物的具體例方面,如雙酚A系(甲基)丙烯酸酯 化合物;多元醇與α,Θ -不飽和羧酸反應所得化合物; -18- 200832059 含縮水甘油基化合物與α,/3 -不飽和羧酸反應後所得化 合物;具尿烷鍵結之(甲基)丙烯酸酯化合物等尿烷單體 或尿烷寡聚物,此等以外,另有壬基苯氧基聚氧乙烯丙烯 酸酯;r 一氯一沒一羥基丙基一 /3’一 (甲基)丙烯醯氧 乙基—〇 —鄰苯二甲酸酯,/3 —羥基烷基一々’一(甲基) 丙烯醯氧烷基-〇-鄰苯二甲酸酯等苯二甲酸系化合物; (甲基)丙烯酸烷基酯,EO改性壬基苯基(甲基)丙烯 酸酯等。此等可1種單獨或2種以上組合使用。 雙酣A系(甲基)丙烯酸酯化合物方面,如2,2—雙 (4一((甲基)丙烯醯氧基聚乙氧基)苯基)丙烷、2,2 一雙(4-((甲基)丙烯醯氧基聚丙氧基)苯基)丙烷 、2,2-雙(4一((甲基)丙烯醯氧基聚丁氧基)苯基) 丙烷及2,2—雙(4一((甲基)丙烯醯氧基聚乙氧基聚丙 氧基)苯基)丙烷等。 2,2—雙(4一((甲基)丙烯醯氧基聚乙氧基)苯基 )丙烷方面,如2,2—雙(4一((甲基)丙烯醯氧基二乙 氧基)苯基)丙烷、2,2-雙(4 一((甲基)丙烯醯氧基 三乙氧基)苯基)丙烷、2,2—雙(4一 ((甲基)丙烯醯 氧基四乙氧基)苯基)丙烷、2,2—雙(4一((甲基)丙 烯醯氧基五乙氧基)苯基)丙烷、2,2—雙(4一((甲基 )丙烯醯氧基六乙氧基)苯基)丙烷、2,2 —雙(4 一(( 甲基)丙烯醯氧基七乙氧基)苯基)丙院、2,2—雙(4 — ((甲基)丙烯醯氧基八乙氧基)苯基)丙烷、2,2 —雙 (4一((甲基)丙烯醯氧基九乙氧基)苯基)丙烷、2,2 -19- 200832059 一雙(4一((甲基)丙烯醯氧基十乙氧基)苯基)丙烷 、2,2—雙(4一((甲基)丙烯醯氧基十一乙氧基)苯基 )丙烷、2,2—雙(4一((甲基)丙烯醯氧基十二乙氧基 )苯基)丙烷、2,2—雙(4一((甲基)丙烯醯氧基十三 乙氧基)苯基)丙烷、2,2—雙(4一((甲基)丙烯醯氧 基十四乙氧基)苯基)丙烷、2,2—雙(4—((甲基)丙 烯醯氧基十五乙氧基)苯基)丙烷及2,2—雙(4一((甲 基)丙烯醯氧基十六乙氧基)苯基)丙烷等。此中,2,2 一雙(4 一(甲基丙烯醯氧基五乙氧基)苯基)丙烷,可 以BPE-500 (新中村化學工業製,商品名)商業上取得, 2,2—雙(4 一(甲基丙烯醯氧基十五乙氧基)苯基)丙烷 可以BPE_ 1 300 (新中村化學工業製,商品名)商業上取 得。此等可1種單獨或2種以上組合使用。 2,2—雙(4一((甲基)丙烯醯氧基聚丙氧基)苯基 )丙烷方面,如2,2—雙(4一((甲基)丙烯醯氧基二丙 氧基)苯基)丙烷、2,2-雙(4一((甲基)丙烯醯氧基 三丙氧基)苯基)丙烷、2,2—雙(4一((甲基)丙烯醯 氧基四丙氧基)苯基)丙烷、2,2—雙(4一((甲基)丙 烯醯氧基五丙氧基)苯基)丙烷、2,2-雙(4一((甲基 )丙烯醯氧基六丙氧基)苯基)丙烷、2,2—雙(4一(( 甲基)丙烯醯氧基七丙氧基)苯基)丙烷、2,2-雙(4 一 ((甲基)丙烯醯氧基八丙氧基)苯基)丙烷、2,2-雙 (4一((甲基)丙烯醯氧基九丙氧基)苯基)丙烷、2,2 一雙(4一((甲基)丙烯醯氧基十丙氧基)苯基)丙烷 -20- 200832059 、2,2—雙(4一((甲基)丙烯醯氧基十一丙氧基)苯基 )丙烷、2,2—雙(4一((甲基)丙烯醯氧基十二丙氧基 )苯基)丙烷、2,2-雙(4一((甲基)丙烯醯氧基十三 丙氧基)苯基)丙烷、2,2-雙(4一((甲基)丙烯醯氧 基十四丙氧基)苯基)丙烷、2,2 —雙(4一((甲基)丙 烯醯氧基十五丙氧基)苯基)丙烷及2,2—雙(4一((甲 基)丙烯醯氧基十六丙氧基)苯基)丙烷等。此等可1種 單獨或2種以上組合使用。 2,2—雙(4一((甲基)丙烯醯氧基聚乙氧基聚丙氧 基)苯基)丙烷方面,如2,2—雙(4一((甲基)丙烯醯 氧基二乙氧基八丙氧基)苯基)丙烷、2,2—雙(4一(( 甲基)丙烯醯氧基四乙氧基四丙氧基)苯基)丙烷及2,2 一雙(4一 ((甲基)丙烯醯氧基六乙氧基六丙氧基)苯 基)丙烷等。此等可1種單獨或2種以上組合使用。 多元醇中與α,θ -不飽和羧酸反應所得化合物方面 ,如乙烯基數爲2〜14之聚乙二醇二(甲基)丙烯酸酯、 丙烯基數爲2〜14之聚丙二醇二(甲基)丙烯酸酯、乙烯 基數爲2〜14,丙烯基數爲2〜14之聚乙烯·聚丙二醇二 (甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、 三羥曱基丙烷三(甲基)丙烯酸酯、ΕΟ改性三羥甲基丙 烷三(甲基)丙烯酸酯、ΡΟ改性三羥甲基丙烷三(甲基 )丙烯酸酯、ΕΟ · ΡΟ改性三羥甲基丙烷三(甲基)丙烯 酸酯 '四羥甲基甲烷三(甲基)丙烯酸酯、四羥甲基甲烷 四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯及 -21 - 200832059 一季戊四醇六(甲基)丙烯酸酯等。此等可1種單獨或2 種以上組合使用。 又,「EO」係指「乙烯氧化物」,「PO」係指「丙 烯氧化物」。另外,「Ε Ο改性」係指具乙烯氧化物單元 (-CHidO-)之嵌段構造,Γρ〇改性」係指具丙烯氧 化物單元(-CH2CH(CH3)〇-)嵌段構造。 含縮水甘油基化合物與αΘ 一不飽和羧酸反應後所 得化合物方面,如三羥甲基丙烷三縮水甘油基醚三(甲基 )丙烯酸酯及2,2 —雙(4 一(甲基)丙烯醯氧基一 2一羥 基-丙基氧)苯基等。上述α,/3 —不飽和竣酸方面,如 (甲基)丙烯酸等。此等可1種單獨或2種以上組合使用 〇 尿烷單體或尿烷寡聚物方面,如於Θ位具有ΟΗ基之 (甲基)丙烯酸單體與異佛爾酮二異氰酸酯、2,6—甲苯 二異氰酸酯、2,4 一甲苯二異氰酸酯、1,6 —六亞甲基二異 氰酸酯等與二異氰酸酯化合物之加成反應物,三((甲基 )丙烯醯氧基四乙二醇異氰酸酯)六亞甲基異氰尿酸酯, ΕΟ改性尿烷二(甲基)丙烯酸酯,ΕΟ或ΡΟ改性尿烷二 (甲基)丙烯酸酯,含有羧基尿烷(甲基)丙烯酸酯等。 此等可1種單獨或2種以上組合使用。 另外,可舉例(甲基)丙烯酸烷基酯方面,如(甲基 )丙烯酸甲基酯、(甲基)丙烯酸乙基酯、(甲基)丙烯 酸丁基酯及(甲基)丙烯酸2-乙基己酯等。此等可1種 單獨或2種以上組合使用。 -22- 200832059 感光性樹脂組成物,由提升感光性 及硬化膜之可撓性觀點,(C )成分以1 )丙烯酸酯化合物爲佳,其中,以含具 A系二(甲基)丙烯酸酯化合物更佳。 &lt; (D)成分:光聚合起始劑&gt; (D)成分光聚合起始劑具體例方 4,4’ —雙(二甲基胺基)二苯甲酮(米 雙(二乙基胺基)二苯甲酮、4 一甲氧 基二苯甲酮、2—苄基一 2-二甲基胺3 )—丁酮一 1,2-乙基蒽酮、菲醌等芳 等苯醌類、苯偶因甲基醚、苯偶因乙基 等苯偶因醚,甲基苯偶因、乙基苯偶因 甲基縮酮等苄基衍生物,9 一苯基吖啶 吖啶基)庚烷等吖啶衍生物、N —苯基 甘胺酸衍生物、香豆素系化合物等。此 種以上組合使用。 &lt; (E)成分:熱硬化劑&gt; (E )成分熱硬化劑之具體例方面 樹脂、尿素樹脂、三聚氰胺樹脂等熱硬 氧樹脂方面,如雙酚A型三級脂肪酸 ;苯二甲酸二縮水甘油基酯、四氫苯二 酯等二縮水甘油基酯類、二縮水甘油基 樹脂組成物解像度 ^雙酚A系(甲基 伸烷基氧基之雙酚 面,如二苯甲酮、 希勒酮)、4,4’ — 基一 4’ 一二甲基胺 S — 1 一嗎啉代苯酮 香族酮、烷基蒽酮 醚、苯偶因苯基醚 等苯偶因,苄基二 、1,7—雙(9,9’ _ 甘胺酸、N -苯基 等可1種單獨或2 ,如環氧樹脂、酚 化性化合物等。環 改性多醇環氧樹脂 甲酸二縮水甘油基 苯胺、二縮水甘油 -23- 200832059 基甲苯胺等二縮水甘油基胺類等。此等可1種單獨或2種 以上組合使用。 另外,(E )成分熱硬化劑方面,亦可使用潛在性熱 硬化劑之嵌段異氰酸酯化合物。嵌段異氰酸酯化合物方面 ,如醇化合物、酚化合物、ε -己內醯胺、肟化合物、活 性亞甲基化合物等經嵌段劑嵌段化之聚異氰酸酯化合物。 經嵌段化之聚異氰酸酯化合物方面,454 -二苯基甲烷二 φ 異氰酸酯、2,4 一甲苯二異氰酸酯、2,6—甲苯二異氰酸酯 、萘1,5 —二異氰酸酯、〇—二甲苯二異氰酸酯、m —二甲 苯二異氰酸酯、2,4 -甲苯二聚物等芳香族聚異氰酸酯、 六亞甲基二異氰酸酯、4,4 一亞甲基雙(環己基異氰酸酯 )、異佛爾酮二異氰酸酯等脂肪族聚異氰酸酯、雙環庚烷 三異氰酸酯等脂環式聚異氰酸酯,由耐熱性觀點,以芳香 族聚異氰酸酯,而由防止著色觀點以脂肪族聚異氰酸酯或 脂環式聚異氰酸酯爲佳。 • 爲使感光性樹脂組成物有良好難燃性,感光性樹脂組 成物中(A )成分含有量以感光性樹脂組成物固形分全量 爲基準,以35〜70質量%爲佳,40〜65質量%更佳。( A)成分含有量未滿3 5質量%則硬化膜之難燃性有降低 傾向,超過70質量%則以稀鹼水溶液顯像有變困難之傾 向。 另外,爲得到良好難燃性,感光性樹脂組成物中磷含 有量以感光性樹脂組成物之固形分全量爲基準,以1 . 5〜 5.0質量%爲佳,2.0〜4.5質量%更佳。磷含有量未滿1.5 -24 -[In the formula (5), s is an integer of 1 to 20. 〕 The photosensitive resin composition contains a phenoxyphosphazene compound as the component (B), and the photosensitive resin composition is cured, whereby the flame retardancy of the obtained cured film can be further improved. Further, the phenoxyphosphazene compound is preferable in that the flexibility and exudation of the cured film (bleeding of the photosensitive resin composition) are better. (B) In terms of a component, at least one of the above-mentioned phosphate ester and phenoxyphosphazene compound may be used alone as the phosphonate represented by the above formula (2), but at least the phosphonate represented by the above general formula (2) is used. Preferably, the phosphonate represented by the above general formula (2) is particularly preferably used with the above phosphate or phenoxyphosphazene compound. Further, in the case of the component (B), a phosphorus-containing compound known in the art may be used. &lt;(C) component: a compound having at least one ethylenically unsaturated bond&gt; (C) Specific examples of a photopolymerizable compound having at least one ethylenically unsaturated group in the molecule, such as a bisphenol A system ( a methyl acrylate compound; a compound obtained by reacting a polyol with an α, Θ-unsaturated carboxylic acid; -18- 200832059 a compound obtained by reacting a glycidyl compound with an α,/3 -unsaturated carboxylic acid; having a urethane bond a urethane monomer or a urethane oligomer such as a (meth) acrylate compound, and the like, a nonyl phenoxy polyoxyethylene acrylate; r-chloro-mono-hydroxypropyl-/3 '1-(Methyl)acryloyloxyethyl-hydrazine-phthalate, /3-hydroxyalkyl-anthracene-(meth)propenyloxyalkyl-fluorene-phthalate Dicarboxylic acid compound; alkyl (meth)acrylate, EO-modified mercaptophenyl (meth) acrylate, and the like. These may be used alone or in combination of two or more. In terms of biguanide A-based (meth) acrylate compounds, such as 2,2-bis(4-((meth)propenyloxypolyethoxy)phenyl)propane, 2,2 bis(4-( (Meth)propenyloxypolypropoxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxy)oxy)phenyl)propane and 2,2-bis( 4-((meth)acryloxypolyethoxypolypropyloxy)phenyl)propane or the like. 2,2-bis(4-((meth)propenyloxypolyethoxy)phenyl)propane, such as 2,2-bis(4-((meth)propenyloxy)diethoxy Phenyl)propane, 2,2-bis(4-((meth)propenyloxy)triethoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy) Tetraethoxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxypentaethoxy)phenyl)propane, 2,2-bis(4-((methyl)) Propylene decyloxyhexaethoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy)ethoxy)phenyl)propane, 2,2-bis(4- ((Meth)propenyloxy octaethoxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxy)hexyloxy)phenyl)propane, 2,2- 19- 200832059 A double (4-((meth)propenyloxy-l-ethoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy eleven ethoxy)) Phenyl)propane, 2,2-bis(4-((meth)propenyloxydodecyloxy)phenyl)propane, 2,2-bis(4) One ((meth)propenyloxytridecylethoxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxytetradecyloxy)phenyl)propane, 2 ,2-bis(4-((meth)propenyloxypentadecane)ethoxy)phenyl)propane and 2,2-bis(4-((meth)propenyloxy)hexadecyloxy) Phenyl)propane, etc. Among them, 2,2 double (4-(methacryloxypentapentaethoxy)phenyl)propane can be obtained commercially from BPE-500 (manufactured by Shin-Nakamura Chemical Industry Co., Ltd.), 2, 2— Bis(4-(methacryloxylpentadecane)ethoxy)phenyl)propane is commercially available as BPE_ 1 300 (manufactured by Shin-Nakamura Chemical Industry Co., Ltd.). These may be used alone or in combination of two or more. 2,2-bis(4-((meth)propenyloxypolypropoxy)phenyl)propane, such as 2,2-bis(4-((methyl)propenyloxydipropoxy)) Phenyl)propane, 2,2-bis(4-((meth)propenyloxytripropoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy) Propyl)phenyl)propane, 2,2-bis(4-((methyl)propenyloxypentapropyloxy)phenyl)propane, 2,2-bis(4-((meth)propene)醯oxyhexapropoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy)-propenyloxy)phenyl)propane, 2,2-bis (4 (( Methyl)propenyloxy octapropoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxy pentoxy)phenyl)propane, 2,2 bis ( 4-((Meth)propenyloxydapoxy)phenyl)propane-20- 200832059, 2,2-bis(4-((methyl)propenyloxy eleven propoxy)phenyl ) propane, 2,2-bis(4-((meth)propenyloxy-t-dodecyloxy)phenyl)propane, 2,2-bis(4-((methyl) Acryloxytridecyloxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxytetradecyloxy)phenyl)propane, 2,2-bis ( 4-((meth)acrylomethoxypentadecapropoxy)phenyl)propane and 2,2-bis(4-((meth)propenyloxyhexadecane)phenyl)propane, etc. . These may be used alone or in combination of two or more. 2,2-bis(4-((meth)propenyloxypolyethoxypolypropoxy)phenyl)propane, such as 2,2-bis(4-((methyl)propenyloxy) Ethoxy octapropoxy)phenyl)propane, 2,2-bis(4-((methyl)propenyloxytetraethoxytetrapropoxy)phenyl)propane and 2,2 a pair ( 4-((meth)acryloxycarbonylhexaethoxyhexapropoxy)phenyl)propane or the like. These may be used alone or in combination of two or more. The compound obtained by reacting the α,θ-unsaturated carboxylic acid in the polyol, such as polyethylene glycol di(meth)acrylate having a vinyl number of 2 to 14, and polypropylene glycol di(methyl) having a propylene number of 2 to 14 ) acrylate, vinyl group having 2 to 14 and polypropylene group having 2 to 14 polyethylene/polypropylene glycol di(meth)acrylate, trimethylolpropane di(meth)acrylate, trishydroxypropylpropane (Meth) acrylate, hydrazine-modified trimethylolpropane tri(meth) acrylate, hydrazine-modified trimethylolpropane tri(meth) acrylate, ΕΟ · ΡΟ modified trimethylolpropane III (Meth) acrylate 'tetramethylol methane tri (meth) acrylate, tetramethylol methane tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate and - 21 - 200832059 pentaerythritol (Meth) acrylate, etc. These may be used alone or in combination of two or more. Further, "EO" means "ethylene oxide" and "PO" means "propylene oxide". Further, "Ε Ο modified" means a block structure having an ethylene oxide unit (-CHidO-), and Γρ〇 modified means a structure having a propylene oxide unit (-CH2CH(CH3)〇-) block structure. Compounds obtained by reacting a glycidyl group-containing compound with an αΘ-unsaturated carboxylic acid, such as trimethylolpropane triglycidyl ether tri(meth)acrylate and 2,2-bis(4-(meth)propene Alkyloxy-2-hydroxyl-propyloxy)phenyl and the like. The above α, /3 - unsaturated citric acid, such as (meth)acrylic acid. These may be used alone or in combination of two or more kinds of a hydrazine monomer or a urethane oligomer, such as a (meth)acrylic monomer having a mercapto group in the oxime group and isophorone diisocyanate, 2, Addition reaction with diisocyanate compound, such as 6-toluene diisocyanate, 2,4-tolyl diisocyanate, 1,6-hexamethylene diisocyanate, tris((meth) propylene methoxy tetraethylene glycol isocyanate Hexamethylene isocyanurate, hydrazine-modified urethane di(meth) acrylate, hydrazine or hydrazine modified urethane di(meth) acrylate, containing carboxyl urethane (meth) acrylate, etc. . These may be used alone or in combination of two or more. Further, examples of the alkyl (meth)acrylate such as methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, and 2-ethyl (meth)acrylate Hexyl ester and the like. These may be used alone or in combination of two or more. -22- 200832059 The photosensitive resin composition is based on the viewpoint of improving the photosensitivity and the flexibility of the cured film. The component (C) is preferably 1) an acrylate compound containing A-type di(meth)acrylate. The compound is better. &lt;Component (D): Photopolymerization initiator> (D) Component Photopolymerization initiator Specific example 4,4'-bis(dimethylamino)benzophenone (m-bis(diethyl) Amino) benzophenone, 4-methoxybenzophenone, 2-benzyl- 2-dimethylamine 3)-butanone-1,2-ethylfluorenone, phenanthrene and other aromatic benzene a benzyl derivative such as a hydrazine, a benzoin methyl ether or a benzoin ethyl group, a benzyl derivative such as a methyl benzoin or an ethyl benzoin methyl ketal, and a 9-phenyl acridine acridine. An acridine derivative such as heptane, an N-phenylglycine derivative, a coumarin compound or the like. More than one of these combinations are used. &lt;Component (E): Thermosetting agent&gt; Specific examples of the thermosetting agent of the component (E): thermosetting oxygen resin such as resin, urea resin or melamine resin, such as bisphenol A type tertiary fatty acid; Diglycidyl esters such as glycidyl esters and tetrahydrobenzene diesters, and diglycidyl resin composition composition resolution bisphenol A (methyl bisphenolic bisphenol surface, such as benzophenone, Benzene), 4,4'-yl- 4'-dimethylamine S-1 monomorpholone ketone ketone, alkyl fluorenone ether, benzoin phenyl ether and other benzoin, benzyl Base 2, 1, 7-bis (9,9'-glycine, N-phenyl, etc. may be used alone or in combination with 2, such as epoxy resins, phenolating compounds, etc. Ring-modified polyol epoxy resin formic acid Diglycidyl aniline, diglycidyl -23-200832059 diglycidylamine such as toluidine, etc. These may be used alone or in combination of two or more. In addition, in the case of the (E) component heat hardener, Blocked isocyanate compounds with latent heat hardeners can be used. For block isocyanate compounds, such as alcohol compounds, phenols Polyisocyanate compound blocked by a blocker such as ε-caprolactam, an anthracene compound or an active methylene compound. In the case of a blocked polyisocyanate compound, 454-diphenylmethane bis isocyanate , 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, naphthalene 1,5-diisocyanate, oxime-xylene diisocyanate, m-xylene diisocyanate, 2,4-toluene dimer, etc. Alicyclic polyisocyanate such as polyisocyanate, hexamethylene diisocyanate, 4,4-monomethylene bis(cyclohexyl isocyanate) or isophorone diisocyanate, or alicyclic polyisocyanate such as bicycloheptane triisocyanate, which is heat resistant The aromatic polyisocyanate is preferred, and the aliphatic polyisocyanate or the alicyclic polyisocyanate is preferred from the viewpoint of preventing coloration. • In order to make the photosensitive resin composition have good flame retardancy, the photosensitive resin composition (A) The content of the component is preferably 35 to 70% by mass, more preferably 40 to 65% by mass based on the total amount of the solid content of the photosensitive resin composition. (A) Component content When the content is 35% by mass, the flame retardancy of the cured film tends to decrease, and when it exceeds 70% by mass, the development of the diluted aqueous solution tends to be difficult. Further, in order to obtain good flame retardancy, the phosphorus in the photosensitive resin composition is contained. The amount is preferably from 1.5 to 5.0% by mass, more preferably from 2.0 to 4.5% by mass, based on the total amount of the solid content of the photosensitive resin composition. The phosphorus content is less than 1.5 - 24 -

200832059 質量%則硬化膜之難燃性有降低之傾向,超過5 · 0 則硬化膜耐折性,絶緣信賴性等有降低之傾向。 另外,(Β)成分,磷含有量以在上述範圍內 另外,(Β)成分方面,使用上述一般式(2)所示 鹽時,其含有量以感光性樹脂組成物之固形分全量 ,在5〜20質量%爲佳。此含有量未滿5質量%則 之難燃性有降低之傾向,超過20質量%則硬化膜 有降低之傾向。 另外,作爲(Β)成分令磷酸酯與膦酸鹽組合使 ,該磷酸酯含有量以感光性樹脂組成物之固形分全量 準,以1〜20質量%爲佳,3〜10質量%更佳。此爸 超過20質量%則電鈾性及滲出性(感光性樹脂組成 滲出)有惡化之傾向。 另外,作爲(Β)成分,使 phenoxyphosphazene 物與膦酸鹽組合使用時,該phenoxyphosphazene化 含有量以感光性樹脂組成物之固形分全量爲基準,似 20質量%爲佳,3〜15質量%更佳。此含有量超過 量%則電蝕性及滲出性(感光性樹脂組成物之滲出) 化之傾向。 (C )成分含有量由解像性及難燃性觀點,以 樹脂組成物固形分全量作爲基準,以7〜3 0質量% 10〜25質量%更佳。(C)成分含有量未滿7質量 像性有變差之傾向,超過3 0質量%則硬化膜之難 降低之傾向。 【量% Η圭。 :膦酸 ^基準 Μ匕膜 「撓性 [用時 t爲基 「有量 〖物之 化合 :合物 〔1〜 20質 有惡 丨光性 $佳, 丨則解 $性有 -25-200832059% by mass, the flame retardancy of the cured film tends to decrease, and when it exceeds 5 · 0, the cured film has a folding resistance, and the insulation reliability tends to decrease. In addition, when the (Β) component is contained in the above range, the salt of the above formula (2) is used in the above-mentioned range, and the content of the component is based on the total amount of the solid content of the photosensitive resin composition. 5 to 20% by mass is preferred. When the content is less than 5% by mass, the flame retardancy tends to be lowered, and when it exceeds 20% by mass, the cured film tends to be lowered. Further, the (Β) component is a combination of a phosphate ester and a phosphonate, and the phosphate ester content is preferably from 1 to 20% by mass, more preferably from 3 to 10% by mass, based on the total amount of the solid content of the photosensitive resin composition. . When the amount of the uranium is more than 20% by mass, the uranium property and the exudation property (the photosensitive resin composition exudation) tend to deteriorate. In addition, when the phenoxyphosphazene is used in combination with the phosphonate as the (Β) component, the phenoxyphosphazene content is preferably 20% by mass based on the total solid content of the photosensitive resin composition, and 3 to 15% by mass. good. When the content exceeds a certain amount, the electric corrosion property and the exudation property (the bleed out of the photosensitive resin composition) tend to be formed. The content of the component (C) is more preferably 7 to 30% by mass and 10 to 25% by mass based on the total amount of the solid content of the resin composition, from the viewpoint of resolution and flame retardancy. When the content of the component (C) is less than 7 mass, the image quality tends to be deteriorated, and when it exceeds 30 mass%, the cured film tends to be difficult to be lowered. [Quantity% Η圭. : phosphonic acid ^ reference Μ匕 film "flexibility [time t is based on the amount of matter 〖 compound of the compound: compound [1 ~ 20 quality has a bad light $ $ good, 丨 解 solution $ sex -25-

200832059 (D)成分之含有量,由光感度觀 組成物固形分全量作爲基準,以0.1-0.2〜5質量%更佳。 感光性樹脂組成物含(E )成分時 燃性及絶緣信賴性觀點,以感光性樹脂 作爲基準,以5〜20質量%爲佳,8〜] 另外,本發明之感光性樹脂組成物 綠等染料、隱色結晶紫等光發色劑、熱 甲苯磺胺等可塑劑、駄菁藍等酞菁系、 或二氧化鈦等無機顔料、二氧化矽、氧 鈣或硫酸鋇等無機顔料所成之塡充劑、 密著性賦予劑、調平劑、抗氧化劑、香 等成分以感光性樹脂組成物之固形分全 0.01〜20質量%爲佳。又上述成分可1 組合使用。 另外,本發明之感光性樹脂組成物 於甲醇、乙醇、丙酮、甲基乙基酮、甲 纖劑、甲苯、N,N —二甲基甲醯胺、丙 劑或此等混合溶劑,以固形分30〜70 塗佈。 如以上說明之本發明之感光性樹 系合金、鐵、鐵系合金等金屬面上, 塗佈乾燥後,依需要性披覆保護薄膜 光性元件形態使用。 點,以感光性樹脂 / 1 〇質量%爲佳, ,其含有量,由難 組成物固形分全量 5質量%更佳。 依需要,可含孔雀 發色防止劑或P -偶氮系等有機顔料 化鋁、滑石、碳酸 消泡劑、安定劑、 料或顯影劑等。此 量爲基準,各自含 種單獨或2種以上 可依需要,可溶解 基溶纖劑、乙基溶 二醇單甲基醚等溶 質量%之溶液進行 組成物可於銅,銅 爲液狀光阻劑進行 使用,或以後述感 -26- 200832059 另外,令本發明之感光性樹脂組成物所成之硬 聚醯亞胺等可撓基材上形成之基板,具優異難燃性 明之感光性樹脂組成物因不含鹵系化合物及銻系化 係爲硬化膜之難燃性十分高者,故可減低如印刷配 環境負荷及毒性。 另外,本發明之感光性樹脂組成物可令有充分 性之硬化膜以高解像度形成,因可形成具充分之可 硬化膜,合適用於印刷配線板,特別是可撓印刷配 永久覆膜形成。 (感光性元件) 接著,說明關於使用上述本發明之感光性樹脂 之感光性元件。圖1爲本發明之感光性元件較佳之 形態的模式剖面圖。圖1之感光性元件1爲支持I 設置於支持體1 〇上之感光性樹脂組成物層1 4所構 光性樹脂組成物層1 4爲上述本發明之感光性樹脂 所成之層。另外,本發明之感光性元件1可爲感光 組成物層1 4上支持體1 0之相反側的面F 1以保護 覆。 感光性樹脂組成物層1 4爲令本發明之感光性 成物溶解於上述溶劑或混合溶劑,成爲固形分30〃 量%之溶液後,使該溶液塗佈於支持體1 〇上後形 〇 感光性樹脂組成物層1 4之厚度,因用途而異 化膜於 。本發 合物, 線板之 之難燃 撓性之 線板之 組成物 一實施 110' 成。感 組成物 性樹脂 薄膜被 樹脂組 〆70質 成爲佳 ,藉由 -27- 200832059 加熱及/或熱風吹附而除去溶劑之乾燥後的厚度,以1 ο 〜100//m爲佳,20〜60#m更佳。此厚度未滿10//m則 工業的塗工有變困難之傾向,超過l〇〇//m則經本發明達 成之上述效果易變小,特別係有可撓性及解像度降低之傾 向。 感光性元件1所具備之支持體1 0方面,例如聚乙烯 對苯二甲酸酯,聚丙燏,聚乙烯,聚酯等具耐熱性及耐溶 劑性之聚合體薄膜等。 支持體10之厚度以5〜100//m爲佳,10〜30/zm更 佳。此厚度未滿5 // m則顯像前使支持體剝離時,該支持 體有易破傾向,另外,超過1 00 // m則解像度及可撓性有 降低之傾向。 上述支持體1 〇與感光性樹脂組成物層1 4之2層所成 之感光性元件1或支持體1 0與感光性樹脂組成物層1 4與 保護薄膜之3層所成之感光性元件,如可直接貯藏,或介 著保護薄膜捲成輥狀保管。 使用本發明之感光性元件的光阻圖案之形成方法依需 要性具備由上述感光性元件除去保護薄膜之除去步驟、令 該感光性元件以感光性樹脂組成物層、支持體順序層合於 電路形成用基板上之層合步驟、使活性光線依需要性通過 支持體照射感光性樹脂組成物層之特定部分,於感光性樹 脂組成物層上形成光硬化部之曝光步驟、除去光硬化部以 外之感光性樹脂組成物層之顯像步驟者。又,電路形成用 基板爲具備絶緣層與絶緣層上所形成之導電體層(銅、銅 -28- 200832059 系合金、鎳、鉻、鐵、不鏽鋼等鐵系合金, 系合金、鐵系合金所成者)之基板。 依需要性除去保護薄膜之除去步驟後之 層合方法方面,有藉由邊加熱感光性樹脂組 路形成用基板進行壓著而層合之方法等。該 並無特別限制,由密著性及隨動性等觀點, 合爲佳。經層合表面,通常爲電路形成用基 面,但爲導電體層以外之面亦可。 感光性樹脂組成物層之加熱溫度以7 〇〜 壓著壓力以0.1〜1.0MPa爲佳,周圍氣壓在 更佳,但此等條件並無特別限制。另外,使 成物層如上述70〜130°C加熱,預先使電路 行預熱處理雖非必要,爲使層合性更提升, 形成用基板之預熱處理。 此層合完畢後,曝光步驟中,於感光性 特定部分照射活性光線後形成光硬化部。光 法方面,有通過稱爲後照相底圖之負或正覆 像狀活性光線之方法。此時,感光性樹脂組 之支持體爲透明時,可直接照射活性光線, 除去支持體後再於感光性樹脂組成物層照射: 活性光線光源方面,公知光源,如可使 銀蒸氣弧燈、超高壓水銀燈、高壓水銀燈、 射紫外線者。另外,亦可使用照相用平面電 有效發射可見光者。 較佳爲銅、銅 層合步驟中, 成物層邊於電 層合時之環境 以在減壓下層 板之導電體層 / 1 3 0 °C 爲佳, 4000Pa以下 感光性樹脂組 形成用基板進 亦可進行電路 樹脂組成物層 硬化部形成方 膜圖案照射畫 成物層上存在 爲不透明時, 活性光線。 用碳弧燈、水 氙燈等有效放 燈、太陽燈等 -29- 200832059 接著’曝光後,在感光性樹脂組成物層上有支持體時 ’除去支持體後,顯像步驟中,以濕顯像,乾顯像等除去 光硬化部以外之感光性樹脂組成物層後進行顯像,以形成 光阻圖案。 濕顯像時,使用鹼性水溶液等顯像液,以如噴霧、摇 動浸漬、塗刷法、刷磨法等公知方法進行顯像。顯像液方 面’可使用安全且安定,操作性良好者,可使用如20〜 50C之碳酸納稀薄溶液(1〜5質量%水溶液)等。 上述形成方法所得之光阻圖案,用作如印刷配線板之 抗焊阻劑時,上述顯像步驟終了後,以提升作爲抗焊阻劑 之焊接耐熱性,耐藥品性等爲目的,以進行經高壓水銀燈 之紫外線照射及烤箱之加熱爲佳。 照射紫外線之情況可依需要性調整其照射量,如亦可 以0.2〜l(U/cm2程度之照射量進行照射。另外,加熱時, 以100〜170 °C程度範圍進行15〜90分鐘爲佳。另外亦可 實施紫外線照射與加熱兩者,亦可在實施任一者後,再實 施另一者。 另外,以藉由上述形成方法所得光阻圖案用作印刷配 線板上形成之永久覆膜爲佳。由本發明之感光性樹脂組成 物所形成之硬化膜因具優異難燃性,兼具有於基板施加焊 鍍後之配線的保護膜,可有效用作印刷配線板之永久覆膜 【實施方式】 -30- 200832059 [實施例] 以下’藉由實施例及比較例更具體說明本發明 發明不限於以下實施例。 (實施例1〜7,比較例1〜4 ) 首先,表1所示之各成分以其所示之固形分搭画 質量基準)(但,甲基乙基酮爲液體之質量基準)¾ 合得到感光性樹脂組成物溶液。 又,表1中,(A-1)成分爲聯苯基型環氧丙爲 (日本化藥公司製,商品名「ZCR-1569H」,具聯驾 之酚醛清漆型含酸改性乙烯基環氧樹脂,酸價=9 8 =4500 ) ,( A-2 )成分爲雙酚A型環氧丙烯酸酯( 化藥公司製,商品名「ZAR-200 1 H」,酸價=1〇3,200832059 The content of the component (D) is preferably 0.1 to 0.2 to 5% by mass based on the total amount of the solid content of the composition of the light sensitivity. In the case where the photosensitive resin composition contains the component (E), the flammability and the insulating reliability are preferably 5 to 20% by mass based on the photosensitive resin, and 8 to 4, and the photosensitive resin composition of the present invention is green or the like. Photochromic agents such as dyes, leuco crystal violets, plasticizers such as hot toluene sulfonamide, phthalocyanines such as phthalocyanine blue, or inorganic pigments such as titanium dioxide, inorganic pigments such as cerium oxide, calcium oxide or barium sulfate. The component such as the agent, the adhesion imparting agent, the leveling agent, the antioxidant, and the fragrance is preferably 0.01 to 20% by mass based on the total solid content of the photosensitive resin composition. Further, the above components may be used in combination. Further, the photosensitive resin composition of the present invention is in a solid solvent of methanol, ethanol, acetone, methyl ethyl ketone, methylcellulose, toluene, N,N-dimethylformamide, propionate or the like. Apply 30~70. The metal surface such as the photosensitive tree alloy, the iron or the iron-based alloy of the present invention described above is applied in the form of a protective film optical element as needed after application drying. The photosensitive resin / 1 〇 mass% is preferable, and the content thereof is more preferably 5 mass% from the solid content of the hard component. If necessary, it may contain a peacock hair color preventive agent or an organic pigmented aluminum such as P-azo or a talc, a carbonic acid defoaming agent, a stabilizer, a material or a developer. This amount is based on a single or two or more kinds of solutions which can be dissolved in a solution of a cellosolve or an ethyl solvate monomethyl ether. The composition can be used in copper or copper. The photoresist is used, or the sensation described later -26-200832059. Further, the substrate formed on a flexible substrate such as a hard polyimine obtained by the photosensitive resin composition of the present invention has excellent flammability and sensitization. Since the resin composition does not contain a halogen compound and the lanthanide system is a cured film, the flame retardancy is extremely high, so that the environmental load and toxicity such as printing can be reduced. Further, the photosensitive resin composition of the present invention can form a sufficient cured film with high resolution, and can form a sufficiently hardenable film, which is suitable for use in a printed wiring board, particularly for flexible printing with permanent film formation. . (Photosensitive Element) Next, a photosensitive element using the photosensitive resin of the present invention described above will be described. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic cross-sectional view showing a preferred embodiment of a photosensitive element of the present invention. The photosensitive element 1 of Fig. 1 is a photosensitive resin composition layer 14 which is provided on the support 1 in the support I. The photosensitive resin composition layer 14 is a layer of the photosensitive resin of the present invention. Further, the photosensitive element 1 of the present invention may be a surface F 1 on the opposite side of the support 10 on the photosensitive composition layer 14 to be protected. The photosensitive resin composition layer 14 is a solution in which the photosensitive product of the present invention is dissolved in the solvent or the mixed solvent to obtain a solid content of 30% by weight, and then the solution is applied to the support 1 to form a crucible. The thickness of the photosensitive resin composition layer 14 is different depending on the use. The composition of the present invention, the flame-retardant flexible wire plate of the wire plate is implemented as a 110'. The compositional physical resin film is preferably made of a resin group 70, and the dried thickness of the solvent is removed by heating and/or hot air blowing from -27 to 200832059, preferably 1 ο to 100//m, 20 to 60. #m is better. If the thickness is less than 10/m, the industrial coating work tends to be difficult. When the thickness exceeds 10 〇〇//m, the above-mentioned effects achieved by the present invention tend to be small, and in particular, the flexibility and the resolution are lowered. The support member 10 included in the photosensitive element 1 is, for example, a polymer film having heat resistance and solvent resistance such as polyethylene terephthalate, polypropylene, polyethylene or polyester. The thickness of the support 10 is preferably 5 to 100 / / m, more preferably 10 to 30 / zm. When the thickness is less than 5 // m, the support tends to be easily broken when the support is peeled off before development, and the resolution and flexibility tend to decrease when it exceeds 100 m. The photosensitive element 1 or the support 10 and the photosensitive resin composition layer 14 and the protective film are formed of two layers of the support 1 and the photosensitive resin composition layer 14 For example, it can be stored directly or placed in a roll shape with a protective film. The method for forming a photoresist pattern using the photosensitive element of the present invention optionally includes a step of removing the protective film by the photosensitive element, and sequentially laminating the photosensitive element with a photosensitive resin composition layer and a support. The step of laminating on the substrate for formation, and the step of irradiating the specific portion of the photosensitive resin composition layer with the support by the support, and exposing the photocurable portion to the photosensitive resin composition layer, and removing the photo-cured portion The development step of the photosensitive resin composition layer. Further, the circuit-forming substrate is provided with an insulating layer and a conductor layer formed on the insulating layer (copper, copper-28-200832059 alloy, iron-based alloy such as nickel, chromium, iron, stainless steel, alloy or iron-based alloy). The substrate of the person). In the method of laminating the step of removing the protective film as needed, there is a method of laminating by heating the photosensitive resin composition forming substrate while pressing. There is no particular limitation, and it is preferable from the viewpoints of adhesion and followability. The laminated surface is usually a circuit forming substrate, but may be a surface other than the conductor layer. The heating temperature of the photosensitive resin composition layer is preferably 7 Torr to 15 MPa, and the ambient pressure is more preferably, but the conditions are not particularly limited. Further, the resultant layer is heated at 70 to 130 ° C as described above, and the pre-heat treatment of the circuit is not necessary, and the pre-heat treatment of the substrate for formation is performed in order to improve the lamination property. After the lamination is completed, in the exposure step, the photocured portion is formed after the active light is irradiated to the photosensitive specific portion. In terms of photometry, there is a method of passing a negative or positively-like active light called a post-photograph. In this case, when the support of the photosensitive resin group is transparent, the active light can be directly irradiated, and the support can be removed and then irradiated on the photosensitive resin composition layer. In terms of the active light source, a known light source such as a silver vapor arc lamp can be used. Ultra high pressure mercury lamp, high pressure mercury lamp, and ultraviolet light. In addition, it is also possible to use a planar light for photographing to efficiently emit visible light. Preferably, in the copper and copper lamination step, the environment of the layer formed during the electrical lamination is preferably a conductor layer of the laminate under reduced pressure / 130 ° C, and the substrate for forming the photosensitive resin group below 4000 Pa The circuit resin pattern layer hardening portion may be formed to form a square film pattern to illuminate the active layer when the image layer is opaque. Use a carbon arc lamp, a water lamp, etc. to effectively discharge the lamp, the sun lamp, etc. -29-200832059 Then, 'after exposure, when there is a support on the photosensitive resin composition layer', after removing the support, the development step is wet. For example, a photosensitive resin composition layer other than the photocured portion is removed after dry development, and then developed to form a photoresist pattern. In the case of wet development, a developing solution such as an alkaline aqueous solution is used, and development is carried out by a known method such as spraying, shaking immersion, brushing, or brushing. The developing liquid surface can be used safely and stably, and if it has good workability, a thin solution of sodium carbonate (1 to 5 mass% aqueous solution) such as 20 to 50 C can be used. When the photoresist pattern obtained by the above-described formation method is used as a solder resist for a printed wiring board, for the purpose of improving solder heat resistance and chemical resistance as a solder resist after the development step is completed, Ultraviolet irradiation by a high pressure mercury lamp and heating of the oven are preferred. When the ultraviolet ray is irradiated, the amount of irradiation may be adjusted as needed. For example, it may be irradiated with an amount of 0.2 to 1 (U/cm 2 ). Further, when heating, it is preferably carried out at a temperature of 100 to 170 ° C for 15 to 90 minutes. Alternatively, both ultraviolet irradiation and heating may be performed, and after performing either of them, the other may be carried out. Further, the photoresist pattern obtained by the above-described forming method is used as a permanent film formed on a printed wiring board. The cured film formed of the photosensitive resin composition of the present invention is excellent in flame retardancy and has a protective film for wiring after soldering on a substrate, and can be effectively used as a permanent film for a printed wiring board. EMBODIMENT -30-200832059 [Examples] Hereinafter, the invention will be more specifically described by way of Examples and Comparative Examples. The invention is not limited to the following examples. (Examples 1 to 7, Comparative Examples 1 to 4) First, Table 1 The components shown in the figure are obtained on the basis of the solid-separated mass quality shown (but, methyl ethyl ketone is the mass basis of the liquid), and a photosensitive resin composition solution is obtained. In addition, in Table 1, the component (A-1) is a biphenyl type epoxidized propylene (manufactured by Nippon Kayaku Co., Ltd., trade name "ZCR-1569H", and the phenolic varnish type acid-modified vinyl ring Oxygen resin, acid value = 9 8 = 4500), (A-2) component is bisphenol A type epoxy acrylate (manufactured by Chemical Pharmaceutical Co., Ltd., trade name "ZAR-200 1 H", acid value = 1〇3,

1 3 000 ) ,( A-3 )成分爲雙酚F型環氧丙烯酸酯(E 藥公司製,商品名「ZFR-1516」,酸價= 7 3,Mw = )° (B-1)成分爲膦酸鹽(Clariant in Japan公司 品名「EXOLITOP 935」,磷含有量=23質量%), 2 )成分爲磷酸酯(ADEKA公司製,商品名「 ADEKASTABFP-600」,磷含有量= 8·9 質量 %), )成分爲phenoxyphosphazene化合物(大塚化學· 品名「SPB-100」,磷含有量=13質量%)。 (C)成分爲雙酚A聚氧乙烯二甲基丙烯酸酯( 村化學工業公司製,商品名「BPE-10」)。 但本1 3 000 ) , (A-3 ) is a bisphenol F type epoxy acrylate (manufactured by E Pharmaceutical Co., Ltd., trade name "ZFR-1516", acid value = 7 3, Mw = ) ° (B-1) It is a phosphonate (Clariant in Japan company name "EXOLITOP 935", phosphorus content = 23% by mass), and 2) is a phosphate ester (trade name "ADEKASTABFP-600", manufactured by ADEKA CORPORATION, phosphorus content = 8·9 The mass%), the component is a phenoxyphosphazene compound (Otsuka Chemical Co., Ltd. product name "SPB-100", phosphorus content = 13% by mass). The component (C) is bisphenol A polyoxyethylene dimethacrylate (manufactured by Murakami Chemical Co., Ltd., trade name "BPE-10"). But this

3比( !行混 ¥酸酯 ί骨架 ,M w :曰本 M w = I本化 11000 製,商 (Β- (Β-3 f,商 :新中 -31 - 200832059 (D) 成分爲2 —苄基一 2-二甲基胺基—1 一(4 —嗎 啉苯基)—丁酮—1 ( Ciba Specialty Chemicals 公司製, 商品名「1-3 69」)。 (E) 成分爲令六亞甲基二異氰酸酯成爲苯並異氰酸 酯之異氰尿酸酯體之甲基乙基酮肟嵌段體的75質量%甲 基乙基酮溶液(住化拜爾尿烷公司製,商品名「BL3 175 j ) ° 另外,表中,丙烯酸樹脂以甲基丙烯酸/丙烯酸乙酯 /甲基丙烯酸甲酯/苯乙烯爲共聚合成分,於甲苯/甲基 溶纖劑(質量比=2/3 )溶液中以常法進行聚合,酸價爲 80mgKOH/g,重量平均分子量爲1 00,000之共聚合體。 [表1] 實施例 比較例 1 2 3 4 5 6 7 1 2 3 4 (A-1)成分 90 90 90 90 90 90 70 - 90 - (A-2戚分 - - - - - - - 90 - - 90 (A-3戚分 • 90 (B-1戚分 15 15 10 10 - 15 15 15 15 - - (B-2戚分 - 15 25 5 30 - - - - - 30 (B-3戚分 • - 15 15 - - - - (C诚分 20 20 20 20 20 20 20 20 20 20 20 (D戚分 3 3 3 3 3 3 3 3 3 3 3 Φ戚分 20 20 20 20 20 20 20 20 20 20 20 丙烯酸樹脂 麵 幽 • 丨 圓丨 • 20 •丨 - - 編 甲基乙基酮 20 20 20 20 20 20 20 20 20 20 203 ratio (! line mixed ¥ ester 骨架 skeleton, M w : 曰本 M w = I localized 11000 system, quotient (Β- (Β-3 f, 商:新中-31 - 200832059 (D) component is 2 —Benzylmono-2-dimethylamino-1—(4-morpholinylphenyl)-butanone-1 (manufactured by Ciba Specialty Chemicals, trade name “1-3 69”). (E) Ingredients are Hexamethylene diisocyanate is a 75 mass % methyl ethyl ketone solution of a methyl ethyl ketone oxime block of isocyanurate of benzoisocyanate (manufactured by Bayer Urea Co., Ltd., trade name " BL3 175 j ) ° In addition, in the table, acrylic resin is copolymerized with methacrylic acid/ethyl acrylate/methyl methacrylate/styrene in toluene/methyl cellosolve (mass ratio = 2/3) The solution was polymerized in a usual manner to a copolymer having an acid value of 80 mgKOH/g and a weight average molecular weight of 100,000. [Table 1] Example Comparative Example 1 2 3 4 5 6 7 1 2 3 4 (A-1) 90 90 90 90 90 90 70 - 90 - (A-2戚分 - - - - - - - 90 - - 90 (A-3 ratings • 90 (B-1 points 15 15 10 10 - 15 15 15 15 - - (B-2 points - 15 25 5 30 - - - - - 30 (B-3戚 • - 15 15 - - - - (C Cheng 20 20 20 20 20 20 20 20 20 20 20 (D戚3 3 3 3 3 3 3 3 3 3 3 Φ戚20 20 20 20 20 20 20 20 20 20 20 Acrylic Resin • 丨 Round 丨 • 20 • 丨 - - Methyl ethyl ketone 20 20 20 20 20 20 20 20 20 20 20

注)表1中値爲各成分之固形分搭配比(除甲基乙基酮外) •32- 200832059 另外,表中記號「-」表示不含該成分。 [感光性元件之製作] 藉由分別均一塗佈實施例1〜7及比較例1〜4之感光 性樹脂組成物溶液於支持體之1 6 /z m厚的聚乙烯對苯二 甲酸酯薄膜(帝人公司製,商品名「G2-16」)上,形成 感光性樹脂組成物層,使其利用熱風對流式乾燥機以1 00 °C乾燥1 〇分鐘。感光性樹脂組成物層乾燥後之膜厚爲3 8 /am。 接著,於與感光性樹脂組成物層之支持體相接側之反 側表面上,貼合聚乙烯薄膜(tamapoly公司製,商品名「 NF-1 3」)作爲保護薄膜,得到感光性元件。 [評價用層合體之製作] 使18//m厚之銅箔層合於聚醯亞胺基材而成之可撓 印刷配線板用基板(NIKKAN INDUSTRIES Co.,Ltd.製, 商品名「F30VC1」)之銅表面用鹽酸進行酸洗淨,水洗 後,進行乾燥。 於此可撓印刷配線板用基板,使用連續式真空層合機 (日立化成工業公司製,商品名「HLM-V570」),在熱 壓溫度l〇〇°C,層合速度〇.5m/分,氣壓4000Pa以下,壓 著壓力0.3MPa條件下,使所得之感光性元件層合於邊剝 離聚乙烯薄膜之以感光性樹脂組成物層作爲銅箔側,得到 評價用層合體。 -33- 200832059 [光感度評價] 於所得上述評價用層合體上,使具有作爲底片之 StaUffer21段階梯板之光具密接,使用歐克製作所公司製 之HMW-201GX型曝光機,以使Stauffer21段階梯板顯像 後殘存階梯段數爲8 · 0之能量量進行曝光。 接著,常溫下放置1小時,剝離PET薄膜後,噴30 °C之1質量%碳酸鈉水溶液40秒進行顯像,在80 °C加熱 (乾燥)10分鐘。令光感度作爲評價數値,使用曝光時 之上述能量量。此數値愈低,光感度愈高。其結果如表2 所示。 [解像度之評價] 使具有Stauffer2 1段階梯板之光具與作爲解像度評價 用底片之具線寬/間隔寬爲30/30〜200/200 (單位: // m )之配線圖案的光具於評價用層合體上密接,使用上 述曝光機,以令Stauffedl段階梯板顯像後殘存階梯段數 爲8.0之能量量進行曝光。 接著,在常溫放置1小時,剝離PET薄膜後,噴30 °C之1質量%碳酸鈉水溶液40秒進行顯像,在80°C加熱 (乾燥)1 〇分鐘。在此,解像度藉由經顯像處理得到矩 形之光阻劑形狀之線寬間之間隔寬的最小値(單位:// m )來評價。此値愈小,解像度愈優。結果如表2所示。 -34- 200832059 評價用FPC之製作] 於所得評價用層合體上,使具(有Stauffer21段階梯板 之光具與作爲覆蓋層信賴性評價用底片之具配線圖案的光 具密接,使用上述曝光機後,以使Staiiffedl段階梯板顯 像後殘存階梯段數爲8.0之能量量進行曝光。 接著,在常溫放置1小時後,剝離層合體上之聚乙烯 對苯二甲酸酯,與光感度評價時同樣的顯像液及顯像條件 進行噴霧顯像,在80 °C加熱(乾燥)10分鐘。接著,使 用歐克製作所公司製之紫外線照射裝置以IJ/cm2能量量 進行紫外線照射,進而以160°C進行60分鐘加熱處理, 以得到形成覆蓋層之評價用FPC。 [可撓性(耐折性)評價] 使上述般得到之評價用FPC藉由固定接合重複進行 18 0°折曲,求出當時至覆蓋層產生裂隙爲止之次數,用以 下基準進行評價。又,裂隙產生與否係利用顯微鏡確認。 結果如表2所示。 A :就算折曲5次以上於覆蓋層亦無裂隙者, B:至裂隙產生之折曲次數爲3〜4次者, C:至裂隙產生之次數爲2次以下者。 [滲出性評價] 令上述所得之評價用F P C,使用3 01手壓機(東洋 精機製作所(股)製),加壓溫度160 °C ,加壓壓力 -35- 200832059 2 Okgf之條件進行30分鐘厚度方向之加壓。此時以肉眼 觀察是否有由覆蓋層滲出之感光性樹脂組成物成分,再以 下基準進行評價。即,無法確認有由覆蓋層滲出感光性樹 脂組成物成分者爲^ A」,確認到少許感光性樹脂組成物 成分之滲出者爲^ B」,感光性樹脂組成物成分之滲出明 顯者爲「C」。其結果如表2所示。 [難燃性評價] 使貼銅層合板(新日鐵化學公司製,商品名「 EspanexMB」系列)之銅箔經蝕刻除去後得到厚度25//m 之PI薄膜。接著,於該PI薄膜兩面,使用連續式真空層 合機(曰立化成工業公司製,商品名「HLM-V570」), 熱壓溫度l〇〇°C,層合速度0.5m/分,氣壓4000Pa以下, 壓著壓力〇.3MPa條件下,將上述感光性元件邊剝離聚乙 烯薄膜使感光性樹脂組成物層層合於PI薄膜側得到層合 接著,使用歐克製作所公司製HNW-201GX型曝光機 ,令上述感光性元件之感光性樹脂組成物層的曝光以使 Stauffer21段階梯板顯像後殘存階梯段數爲8.0之上述能 量量進行。接著,在常溫放置1小時,使聚乙烯對苯二甲 酸酯薄膜由層合體剝離後,噴3 0 °C 1質量%碳酸鈉水溶液 於層合體40秒進行顯像,在8〇°C加熱(乾燥)1 0分鐘。 接著,於層合體之感光性樹脂組成物層使用歐克製作 所公司製之紫外線照射裝置,以1 J/cm2之能量量進行紫 •36- 200832059 外線照射,再藉由於1 60°C進行60分鐘加熱處理,得到 形成覆蓋層之難燃性評價用樣本。 關於此難燃性評價用樣本,以UL94規格爲準進行薄 材垂直燃燒試驗。評價基於UL94規格,表示爲VTM-0、 VTM-1,或VTM-2。結果如表2所示。又,表2中「NOT 」係指,燃燒試驗中難燃性評價用樣本不爲 VTM-0, VTM-1,及VTM-2而全燒者。Note) In Table 1, 値 is the solid content ratio of each component (except methyl ethyl ketone) • 32- 200832059 In addition, the symbol “-” in the table indicates that the component is not included. [Production of Photosensitive Element] A polyethylene terephthalate film having a thickness of 1 6 /zm thick of the support was applied by uniformly applying the photosensitive resin composition solutions of Examples 1 to 7 and Comparative Examples 1 to 4, respectively. A photosensitive resin composition layer was formed on (manufactured by Teijin Co., Ltd., trade name "G2-16"), and dried by a hot air convection dryer at 100 ° C for 1 minute. The film thickness after drying of the photosensitive resin composition layer was 3 8 /am. Then, a polyethylene film (trade name "NF-1 3", manufactured by Tamapoly Co., Ltd.) was bonded to the back surface on the side in contact with the support of the photosensitive resin composition layer to obtain a photosensitive member. [Production of laminate for evaluation] A substrate for a flexible printed wiring board obtained by laminating a 18//m thick copper foil on a polyimide substrate (manufactured by NIKKAN INDUSTRIES Co., Ltd., trade name "F30VC1" The copper surface was acid washed with hydrochloric acid, washed with water, and dried. In the flexible printed wiring board substrate, a continuous vacuum laminator (trade name "HLM-V570", manufactured by Hitachi Chemical Co., Ltd.) was used, and the laminating speed was 55 m/cm at a hot pressing temperature of 10 °C. In the case where the pressure was 3,000 Pa or less and the pressure was 0.3 MPa, the obtained photosensitive element was laminated on the side of the polyethylene foil, and the photosensitive resin composition layer was used as the copper foil side to obtain a laminate for evaluation. -33-200832059 [Evaluation of Light Sensitivity] On the laminate for evaluation described above, an optical device having a stepped plate of a StaUffer 21 step as a negative film was attached, and an HMW-201GX type exposure machine manufactured by Ouke Industries Co., Ltd. was used to make Stauffer 21 steps. After the ladder plate is developed, the number of remaining step segments is 8·0, and the exposure is performed. Subsequently, the film was allowed to stand at room temperature for 1 hour, and after peeling off the PET film, it was developed by spraying a 1% by mass aqueous sodium carbonate solution at 30 ° C for 40 seconds, and heating (drying) at 80 ° C for 10 minutes. The light sensitivity is used as the evaluation number, and the above energy amount at the time of exposure is used. The lower the number, the higher the light sensitivity. The results are shown in Table 2. [Evaluation of the resolution] The optical device having the Stauffer 2 step plate and the wiring pattern having the line width/space width of 30/30 to 200/200 (unit: //m) as the film for resolution evaluation are provided. The evaluation laminate was adhered to each other, and the exposure machine was used to expose the Stauffedl step plate after the image was developed and the number of remaining step segments was 8.0. Subsequently, the film was allowed to stand at room temperature for 1 hour, and after peeling off the PET film, it was developed by spraying a 1% by mass aqueous sodium carbonate solution at 30 ° C for 40 seconds, and heating (drying) at 80 ° C for 1 〇 minutes. Here, the resolution is evaluated by the minimum 値 (unit: m) of the width of the line width of the rectangular photoresist shape obtained by the development processing. The smaller the flaw, the better the resolution. The results are shown in Table 2. -34-200832059 Manufacture of FPC for evaluation] On the laminate for evaluation, the optical device having a stepper plate of a Stauffer 21 step is attached to an optical device having a wiring pattern as a film for reliability evaluation of a cover layer, and the above exposure is used. After the machine, the amount of energy remaining after the step of the Staiiffedl step plate is 8.0 is exposed. Then, after standing at room temperature for 1 hour, the polyethylene terephthalate on the laminate is peeled off, and the light sensitivity is In the evaluation, the same developing solution and developing conditions were subjected to spray development, and the film was heated (dried) at 80 ° C for 10 minutes. Then, ultraviolet irradiation was performed at an energy of 1 J/cm 2 using an ultraviolet irradiation device manufactured by Ouke, Ltd. The heat treatment was carried out at 160 ° C for 60 minutes to obtain an FPC for evaluation for forming a coating layer. [Flexibility (Folding Resistance Evaluation)] The above-mentioned evaluation FPC was repeatedly subjected to 18 0° bending by a fixed joint. The number of times until the coating layer was cracked was determined and evaluated by the following criteria. Further, whether the crack was generated or not was confirmed by a microscope. The results are shown in Table 2. A: Even if the bending is 5 times If there is no crack in the coating layer, B: the number of times of bending to the crack is 3 to 4 times, and C: to the number of times the crack is generated is less than 2 times. [Erosion evaluation] Let the above evaluation be evaluated by FPC. Using a 3 01 hand press (manufactured by Toyo Seiki Seisakusho Co., Ltd.), pressurizing temperature of 160 ° C, pressurizing pressure of -35 - 200832059 2 Okgf for 30 minutes in the thickness direction. The composition of the photosensitive resin composition which was oozing from the coating layer was evaluated based on the following criteria. In other words, it was not confirmed that the photosensitive resin composition component was bleed out from the coating layer, and it was confirmed that a small amount of the photosensitive resin composition component was observed. The exudation is "B", and the osmosis of the photosensitive resin composition component is "C". The results are shown in Table 2. [Evaluation of flame retardancy] Copper-clad laminate (manufactured by Nippon Steel Chemical Co., Ltd., product) The copper foil of the "Espanex MB series" was removed by etching to obtain a PI film having a thickness of 25/m. Then, a continuous vacuum laminator (manufactured by Toray Chemical Industry Co., Ltd., trade name "HLM" was used on both sides of the PI film. -V570"), hot pressing The temperature is 10 ° C, the laminating speed is 0.5 m / min, the air pressure is 4,000 Pa or less, and the photosensitive element is peeled off from the polyethylene film under the pressure of 3 MPa to laminate the photosensitive resin composition layer to the PI film. The side was subjected to lamination, and the exposure of the photosensitive resin composition layer of the photosensitive element was performed using an HNW-201GX type exposure machine manufactured by Ouke, Ltd., so that the number of steps remaining after the Stauffer 21 step plate was developed was 8.0. Then, the amount of energy was increased. Then, the polyethylene terephthalate film was peeled off from the laminate at room temperature for 1 hour, and then sprayed at 30 ° C with a 1 mass% sodium carbonate aqueous solution in a laminate for 40 seconds for development. Heat (dry) at 〇 °C for 10 minutes. Next, the photosensitive resin composition layer of the laminate was irradiated with ultraviolet rays of 1⁄4/cm 2 at an energy amount of 1 J/cm 2 , and 60 minutes by 1 60 ° C using an ultraviolet irradiation device manufactured by Ouke Industries Co., Ltd. Heat treatment was performed to obtain a sample for evaluation of flame retardancy in which a coating layer was formed. Regarding this sample for flame retardancy evaluation, the vertical burning test of the thin material was carried out in accordance with the UL94 standard. The evaluation is based on the UL94 specification and is expressed as VTM-0, VTM-1, or VTM-2. The results are shown in Table 2. In addition, "NOT" in Table 2 means that the samples for flame retardancy evaluation in the combustion test are not VTM-0, VTM-1, and VTM-2.

[表2] 實施例 比較例 1 2 3 4 5 6 7 1 2 3 4 光感度 (mJ/cm2) 180 180 200 200 200 180 190 200 200 160 200 解像度 μ m 70 70 70 70 70 70 70 70 80 60 70 可撓性 (耐折性) B A A B A A A B B B A 滲出性 A B C A C A A A A A C 難燃性 VTM-0 VTM-0 VTM-0 VTM-0 VTM-1 VTM-0 VTM-0 NOT NOT NOT NOT 由表2結果明白,根據實施例1〜7之感光性樹脂組 成物,確認其得到充分之光感度及解像度。另外,具備由 實施例1〜7之感光性樹脂組成物所形成之硬化膜的層合 板,有充分之難燃性。進而,由實施例2,3及5〜7之感 光性樹脂組成物所形成之硬化膜具優異可撓性(耐折性) -37- 200832059 [產業上利用可能性] 如以上說明般,根據本發明,可提供具有優異鹼顯像 性同時可形成難燃性優異硬化膜之感光性樹脂組成物,及 使用其之感光性元件。 【圖面簡單說明】 [圖1]本發明之感光性薄膜的較佳之一實施形態的模 式剖面圖。 【主要元件符號說明】 1 :感光性元件 1 〇 :支持體 1 4 :感光性樹脂組成物層[Table 2] Example Comparative Example 1 2 3 4 5 6 7 1 2 3 4 Light sensitivity (mJ/cm2) 180 180 200 200 200 180 190 200 200 160 200 Resolution μ m 70 70 70 70 70 70 70 70 80 60 70 Flexibility (Fold-resistant) BAABAAABBBA Exudative ABCACAAAAAC Flame retardant VTM-0 VTM-0 VTM-0 VTM-0 VTM-1 VTM-0 VTM-0 NOT NOT NOT NOT As understood from the results of Table 2, according to the embodiment The photosensitive resin composition of 1 to 7 was confirmed to have sufficient light sensitivity and resolution. Further, the laminate having the cured film formed of the photosensitive resin compositions of Examples 1 to 7 has sufficient flame retardancy. Further, the cured film formed of the photosensitive resin compositions of Examples 2, 3 and 5 to 7 has excellent flexibility (folding resistance) -37-200832059 [Industrial Applicability] As described above, according to the above description, According to the present invention, it is possible to provide a photosensitive resin composition which has excellent alkali developability and can form a cured film excellent in flame retardancy, and a photosensitive element using the same. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a preferred embodiment of a photosensitive film of the present invention. [Explanation of main component symbols] 1 : Photosensitive element 1 〇 : Support 1 4 : Photosensitive resin composition layer

-38--38-

Claims (1)

200832059 十、申請專利範圍 1 · 一種感光性樹脂組成物,其特徵係含有 (A)具聯苯骨架之酚醛清漆型含酸改性乙烯基之環 氧樹脂,及 (B )含磷化合物,及 (C) 於分子內具有至少1個乙烯性不飽和基之光聚 合性化合物,及 (D) 光聚合起始劑。 2.如申請專利範圍第1項之感光性樹脂組成物,其 中該(A)環氧樹脂係含(A)以下通式(1)所示之環氧 樹脂及(B)含不飽和基之單竣酸及(C)與多元竣酸酐之 反應生成物之含酸改性乙烯基之環氧樹脂, [化1]200832059 X. Patent Application No. 1 · A photosensitive resin composition characterized by (A) a novolac type acid-modified vinyl epoxy resin having a biphenyl skeleton, and (B) a phosphorus-containing compound, and (C) a photopolymerizable compound having at least one ethylenically unsaturated group in the molecule, and (D) a photopolymerization initiator. 2. The photosensitive resin composition of claim 1, wherein the (A) epoxy resin comprises (A) an epoxy resin represented by the following formula (1) and (B) an unsaturated group-containing An acid-modified vinyl epoxy resin obtained by reacting monodecanoic acid with (C) with a polyanthracene anhydride, [Chemical Formula 1] 〔式(1)中’R1及R2爲各自獨袠示氫原子,碳數1 〜8之烷基,或芳基,η爲〇〜50之整數,又,式(丨)中 ,複數存在之R1及R2可爲各自相同或相粤〕。 3 .如申請專利範圍弟1或2項之感光性樹脂組成物 ,其中更含(Ε)熱硬化劑。 4. 如申請專利範圍第 1〜3項中你 迂〜項之感光性樹脂 組成物,其中該(Β )含磷化合物爲含以 Λ下通式(2 )所不 -39- 200832059 之膦酸鹽 [化2] Ο Mm+ (2) II A—P—0 B 〔式(2)中,A及B各自獨立,表示直鏈狀或分支狀之 碳數1〜6之烷基,或芳基,Μ表示由Mg,Ca,Al,Sb, Sn,Ge,Ti,Zn,Fe,Zr,Ce,Bi,Sr,Mn,Li,Na 以 及K所成群中選出之至少一種金屬,①爲1〜4之整數〕 5 ·如申請專利範圍第1〜4項中任一項之感光性樹脂 組成物,其中該(B)含磷化合物包含磷酸酯。 6 ·如申請專利範圍第1〜5項中任一項之感光性樹脂 組成物,其中該(B )含磷化合物包含苯氧基磷腈化合物 〇 • 7.如申請專利範圍第1〜6項中任一項之感光性樹脂 組成物,其係於可撓基板上形成作爲永久覆膜之硬化膜用 者。 8 · —種感光性元件,其特徵係具備支持體與在該支 持體上所形成之如申請專利範圍第1〜7項中任一項之感 光性樹脂組成物所成之感光性樹脂組成物層。 -40-[In the formula (1), 'R1 and R2 each independently represent a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, or an aryl group, and η is an integer of 〇 50 50. Further, in the formula (丨), a plural number exists. R1 and R2 may be the same or each. 3. A photosensitive resin composition of the first or second aspect of the patent application, which further contains a (b) thermal hardener. 4. The photosensitive resin composition of the above-mentioned item in the first to third paragraphs of the patent application, wherein the (Β) phosphorus-containing compound is a phosphonic acid containing the underarm of the formula (2) and not -39-200832059 Salt [Chemical 2] Ο Mm+ (2) II A—P—0 B [In the formula (2), A and B are each independently, and represent a linear or branched alkyl group having 1 to 6 carbon atoms, or an aryl group. , Μ denotes at least one metal selected from the group consisting of Mg, Ca, Al, Sb, Sn, Ge, Ti, Zn, Fe, Zr, Ce, Bi, Sr, Mn, Li, Na and K, 1 is 1 The photosensitive resin composition according to any one of claims 1 to 4, wherein the (B) phosphorus-containing compound contains a phosphate. The photosensitive resin composition according to any one of claims 1 to 5, wherein the (B) phosphorus-containing compound comprises a phenoxyphosphazene compound 7. 7. 7. Patent Application Nos. 1 to 6 A photosensitive resin composition according to any one of the preceding claims, which is formed on a flexible substrate to form a cured film as a permanent film. And a photosensitive resin composition comprising a support and a photosensitive resin composition according to any one of claims 1 to 7 formed on the support. Floor. -40-
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